JP3786509B2 - Fluid heating device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an improvement of a fluid heating apparatus suitable for heating a fluid such as a cleaning solution such as pure water, an etching solution, and a photoresist stripping solution in a semiconductor manufacturing facility or the like.
[0002]
[Prior art]
Conventionally, a fluid heating apparatus shown in FIGS. 6 to 7 is known as this type of fluid heating apparatus.
6-7, A is a cylinder made of quartz glass, and this cylinder A is formed in a cylindrical tube portion 1, its both end surface plate portions 2, 3 and a lower portion of one end surface plate portion 2. Formed by an opened fluid inlet 4 and a fluid outlet 5 opened at the upper portion of the other end face plate portion 3, and made of two quartz glasses penetrating the both end face plate portions 2, 3 inside the cylinder A Tube bodies 6 and 6 are provided, and a halogen lamp 7 is inserted and arranged in each tube body 6.
[0003]
According to the fluid heating apparatus having the above-described configuration, the halogen lamp 7 is disposed in the liquid flow path that flows in from the inlet 4 of the cylinder A and flows toward the outlet 5, so that the liquid is generated by the radiation of the halogen lamp. Can be continuously heat-treated. In addition, it is possible to replace the halogen lamp as the light source.
[0004]
[Problems to be solved by the invention]
However, the fluid heating device having the above configuration has the following problems.
1) When the fluid heating device is incorporated in a semiconductor manufacturing facility, the fluid inlet and outlet of the cylindrical body must be connected to the processing tank of the facility with tubes, joints, etc., respectively. Since the outlets are arranged separately on opposite ends of the cylinder, when installing a fluid heating device, it is necessary to perform tube connection work at the inlet and outlet at the opposite positions of the cylinder. The workability is bad.
2) Moreover, in order to perform the said connection operation | work, a work space is required in the both ends of a heating apparatus, and there exists a problem from the point of space saving.
3) Further, the halogen lamp in the quartz glass tube also requires a certain amount of work space since the electrode lead connection work must be performed on the opposite ends of the cylinder.
4) Since the fluid inlet and outlet are located at opposite ends of the cylinder body, there is a tendency for a liquid pool (liquid staying part) to occur at the opposite part of the outlet (A). In the case of a fluid corrosive to quartz glass such as phosphoric acid, the temperature of the chemical solution rises and convection occurs, and the quartz glass tube and tube are partially corroded.
5) The tube for inserting and arranging the halogen lamp is open at both ends, and can be inserted from either direction. However, it is difficult to determine the insertion position of the halogen lamp accurately, and the position of the tube after the insertion is misaligned. Prone to occur.
[0005]
The object of the present invention is to eliminate the drawbacks of the above-described conventional fluid heating device for semiconductor manufacturing equipment, facilitate the connection work of tubes, joints, etc. to the fluid inlet and outlet, and save space for the connection work. It is possible to reduce the space required for connecting the halogen lamp, and there is no retention part in the fluid flow path of the cylindrical body, ensuring a smooth flow of the fluid, and accurately positioning the halogen lamp insertion position. An object of the present invention is to provide a fluid heating apparatus for semiconductor manufacturing equipment having a compact configuration that can be determined.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, a fluid heating apparatus for a semiconductor manufacturing facility according to claim 1 of the present invention is a quartz glass cylinder having a fluid inlet and outlet and at least inserted into the cylinder. A first quartz glass tube and a halogen lamp inserted in the tube, wherein the fluid inlet and outlet are provided at one end of the cylinder; A second tube body made of quartz glass is inserted and fixed from the one end portion to the other end portion in the cylindrical body to form the inflow port, and the halogen lamp is an inflow port for the fluid in the tube body. , have a same side of the tube opening only the electrode leads and the outlet, the one of the tube outlet of the first tube is closed, the tube opening end that is the obstruction of the tubular body portion near Rukoto The gist.
[0007]
The invention of claim 2 is a quartz glass cylinder having a fluid inlet and outlet, at least one quartz glass first tube inserted into the cylinder, and A halogen lamp inserted into the tube, the fluid inlet and outlet are provided at one end of the cylinder, and the second tube made of quartz glass is formed in the cylinder. The halogen lamp is inserted and fixed from one end to the other end to form the inlet, and the halogen lamp has electrode leads only on the same side as the fluid inlet and outlet of the tube. The gist of the present invention is that one of the tube ports of the first tubular body is closed by an end face plate facing the longitudinal direction of the cylindrical body.

[0008]
The gist of the invention of claim 3 is that, in the invention of claim 1 or 2, the tip of the cylindrical body in the vicinity of the opening of the second tubular body is bent.

[0012]
DETAILED DESCRIPTION OF THE INVENTION
1 and 2 show a preferred embodiment of the present invention.
Fluid heating apparatus of the figure, made of quartz glass having an inlet 43 and outlet 44 of the fluid cylinder member A _1, tubular member A ₁ of the two which are inserted into steel quartz glass first Tubes 46 and 47 and halogen lamps 48 and 49 inserted into the respective cylinders are provided. Inlet 43 and outlet 44 of the fluid is provided on one end of the cylindrical body A _1, at one end an inlet 43, the second tube 45 made of quartz glass to form an opening 50 at the other end The tube A ₁ extends from the one end to the other end 41 to a predetermined position. The halogen lamp 49 has an inlet 43 of the fluid of the cylinder A _1, the outlet 44 and the same side of the tube opening only the electrode leads 48a, 48b, 49a, and 49b.
[0013]
【Example】
Examples of the present invention will be described below.
1 and 2 show an embodiment of the fluid heating apparatus of the present invention.
In the figure, A ₁ is a quartz glass cylinder, 40 is a cylindrical cylinder part forming a cylinder, and 41 and 42 are end plate parts that close both ends in the longitudinal direction of the cylinder part. . The cylindrical body A ₁ is provided with a fluid inflow port 43 and a fluid outflow port 44 on the end face plate portion 42 side. The fluid inflow port 43 is formed at one end of a second tube body 45 made of quartz glass, and the second tube body 45 is extended to a predetermined position in the cylindrical portion 40.
[0014]
Quartz glass-made first tubes 46 and 47 are juxtaposed in the approximate center of the tube portion 40, and halogen lamps 48 and 49 are inserted into the tubes. Reference numerals 48a, 48b, 49a, 49b denote electrode leads provided only on the fluid inlet and outlet sides of the halogen lamp. One tube port of the first tube bodies 46 and 47 is closed and supported by the end face plate portion 41. In addition, you may comprise the front-end | tip part 45a in the cylinder of the 2nd pipe body 45 as shown in FIG. With such a configuration, a swirling flow of the fluid from the inlet 43 is generated in the cylindrical body, so that the liquid pool can be reduced. Even if occluded tubing inlet end 46a of the tube 46 is closed by an end face plate portion 41 of the cylindrical body A _1, it may be in the tubular body portion have recessed from the end surface plate portion 41.
[0015]
FIG. 4 shows a state in which the cylindrical body A ₁ (shown in FIG. 1) is incorporated in the exterior box 21. In that case, attach a heat insulating material, an excessive temperature rise sensor, a leak sensor, etc., and fix it in the exterior box. The plate surface of the exterior box is provided with through holes for exposing the fluid inlet 43, the outlet 44, and the tube 47 to the outside. The plate surface on the opposite side is provided with through holes. No processing is necessary.
[0016]
FIG. 5 shows a state in which the exterior box 21 is incorporated in a semiconductor manufacturing facility. 22 is a pump, 23 is a filter, 24 is a treatment tank, and 25 and 26 are connection tubes (or pipes).
[0017]
【The invention's effect】
According to the use of the fluid heating device of the present invention described above, the following effects can be obtained.
1) Since the inflow port and the outflow port of the fluid are collected on one end side of the cylindrical body, the connection work of the tube may be performed on one side of the apparatus, and the workability is good.
2) The electrode lead connection of the halogen lamp can also be performed on the tube connection side to the fluid inlet / outlet.
3) Since space for tube connection work and electrode lead connection work on one end side of the cylindrical body is not required, space saving can be achieved. In addition, as shown in FIG. 5, when the fluid heating device is incorporated in, for example, a semiconductor manufacturing facility, it is necessary to secure a space for performing tube connection work and halogen lamp connection work on the side opposite to the fluid inlet / outlet. In this respect, the fluid heating device is useful for installation in equipment.
4) For example, when the fluid heating device is incorporated in the exterior box as shown in FIG. 4, the fluid inlet / outlet on the opposite side of the fluid inlet / outlet of the cylindrical body, the electrode of the halogen lamp Since there is no lead or the like, the opposite sides of the fluid inlet and outlet can be sealed with a flat plate-shaped exterior member having no through hole.
5) In addition, in the fluid heating apparatus, the second pipe is provided to reduce the flow area of the fluid in the cylinder and increase the flow velocity of the fluid. This reduces the occurrence of erosion of the quartz glass forming the cylinder or tube.
6) since the further closing the one of the tube outlet of the first quartz glass tube body can be determined insertion position of the halogen lamp precisely.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing an embodiment of a fluid heating apparatus of the present invention.
FIG. 2 is a cross-sectional view taken along line XX ′ of the embodiment.
FIG. 3 is a front view of another embodiment of the present invention.
FIG. 4 is a perspective view showing a state in which the fluid heating device of the present invention is incorporated in an exterior box.
FIG. 5 is a plan view showing a state in which the fluid heating apparatus of the present invention is incorporated in a semiconductor manufacturing facility.
FIG. 6 is a cross-sectional view of a conventional fluid heating device.
FIG. 7 is a front view of the fluid heating device.
[Explanation of symbols]
A ₁ tubular body 40 cylindrical tubular portion 41 end face plate portion 42 end face plate portion 43 fluid inflow port 44 fluid outflow port 45 second tubular body 46 first tubular body 47 first tubular body 48 halogen lamp 49 halogen lamp 48a Electrode lead 48b Electrode lead 49a Electrode lead 49b Electrode lead

Claims (3)

A quartz glass cylinder having a fluid inlet and outlet, at least one quartz glass first pipe inserted into the cylinder, and inserted into the pipe. A halogen lamp, and an inlet and an outlet of the fluid are provided at one end of the cylinder, and a second tube made of quartz glass is connected to the other end from the one end of the cylinder. fixedly inserted toward the end, forming the inlet, the halogen lamp is closed the tube inlet of the fluid, electrode lead only to a tube port on the same side as the outlet, the first one of the tubes opening of the tube is closed, the semiconductor manufacturing equipment for a fluid heating apparatus ductal orifice end that is the obstruction and wherein said tubular body portion near Rukoto. A quartz glass cylinder having a fluid inlet and outlet, at least one quartz glass first pipe inserted into the cylinder, and inserted into the pipe. A halogen lamp, and an inlet and an outlet of the fluid are provided at one end of the cylinder, and a second tube made of quartz glass is connected to the other end from the one end of the cylinder. The halogen lamp is inserted and fixed toward the end portion to form the inlet, and the halogen lamp has electrode leads only on the same side as the inlet and outlet of the fluid of the pipe body, One fluid port for a semiconductor manufacturing facility is characterized in that one tube port of the tubular body is closed by an end face plate facing the longitudinal direction of the tubular body. 3. The fluid heating apparatus for semiconductor manufacturing equipment according to claim 1, wherein a tip end portion of the second tubular body in the vicinity of the opening in the cylindrical body is bent.

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