JP3790243B2 - Electrostatic actuator and camera module - Google Patents

Description

  The present invention relates to an electrostatic actuator and a camera module driven by electrostatic force.

  A conventional electrostatic actuator has, for example, the configuration shown in FIG. That is, the electrostatic actuator 100 includes a mover 101 and a stator 102. The mover 101 is a substantially rectangular parallelepiped having a hollow portion, and the stator 102 is a substantially rectangular parallelepiped having a through hole formed in a predetermined direction. The mover 101 is inserted into the through hole of the stator 102, and the mover 101 can move in a predetermined direction. The gap between the stator 102 and the mover 101 is about several microns.

  Further, in the movable element 101, convex stripe electrodes 103a and 103b are formed on a pair of surfaces facing the inner wall of the stator 102 by etching or the like.

  In the stator 102, electrodes 107a and 107b are formed by patterning on the surfaces of the glass plates 106a and 106b mounted on the surfaces facing the electrodes 103a and 103b. The electrodes 107a and 107b are formed so as to be shifted from each other by a half pitch.

  The operation of the electrostatic actuator having such a configuration will be described with reference to FIG. The electrostatic actuator operates by repeating the first to fourth steps. That is, in the first step, the movable element 101 is set to the ground potential, and a voltage of + V [V] is supplied only to (a) of the electrodes 107a. An electrostatic force (attraction force) is generated between (a) and the electrode 103a. Due to this electrostatic force, the mover 101 moves to the glass plate 106 a side of the stator 102.

  In the second step, a voltage of + V [V] is supplied only to (D) of the electrode 107b. An electrostatic force is generated between (D) and the electrode 103b. Due to this electrostatic force, the mover 101 moves to the glass plate 106 b side of the stator 102. At this time, the movable element 101 is moved by a half pitch of the arrangement pitch of one electrode 106a (or 106b) in the left direction in FIG. 11 compared with the original position.

  In the third step, a voltage of + V [V] is supplied only to (a) of the electrodes 107a. An electrostatic force is generated between (a) and the electrode 103a. Due to this electrostatic force, the mover 101 moves again toward the glass plate 106a. At this time, the mover 101 is moved by the arrangement pitch of one electrode 106a in the left direction in FIG. 11 compared to the original position.

  In the fourth step, a voltage of + V [V] is supplied only to (c) of the electrodes 107b. An electrostatic force is generated between (C) and the electrode 103b. Due to this electrostatic force, the mover 101 moves again toward the glass plate 106b. At this time, the mover 101 is moved by a length 1.5 times the arrangement pitch of the electrodes 106b in the left direction in FIG. 11 compared to the original position.

By repeating the first to fourth steps, the mover 101 can be moved by a desired distance in the left direction in FIG. Further, when a voltage is supplied to each electrode in the order of the fourth step, the third step, the second step, and the first step, the mover 101 can be moved in the left direction in FIG. An electrostatic actuator and a product to which the electrostatic actuator is applied are known (for example, see Patent Document 1).
Japanese Patent Laid-Open No. 10-239578

  The electrostatic actuator described above has the following problems. First, since the stator and the mover are in surface contact with each other, there is a problem that the frictional force generated at the time of driving is increased, the charge is charged in the mover, and the driving efficiency is low.

  Secondly, it is necessary to supply electric power to reduce the electrification of the mover, but it is difficult to appropriately supply electric power to the moving mover.

  Third, for example, in the case where a lens is incorporated in each of the plurality of movable elements and the distance between the lenses is controlled, the proximity distance of the lenses is limited because the movable element housings interfere with each other. There was a limit to improving performance. Further, when the housing of the mover is downsized, there is a possibility that the necessary driving force cannot be sufficiently received from the stator electrode.

  Therefore, an object of the present invention is to provide an electrostatic actuator and a camera module capable of bringing a plurality of movers sufficiently close to each other while ensuring a necessary driving force.

  In order to solve the above problems and achieve the object, the electrostatic actuator and camera module of the present invention are configured as follows.

(1) A stator and first and second movers that are guided by the stator and reciprocate in a predetermined direction and are provided independently of each other are provided. A driving electrode, a first holding electrode, and a second holding electrode, in which at least three electrodes to which a voltage is supplied in order are sequentially arranged in a predetermined direction, are formed. A first driven electrode disposed opposite to the driving electrode and a first held electrode disposed opposite to the first holding electrode are formed, and the second movable element includes the driving electrode. A second driven electrode disposed opposite to the electrode for use and a second held electrode disposed opposite to the second holding electrode are formed, the driving electrode, the first holding electrode, A power supply unit configured to supply a voltage to the second holding electrode; and the first power supply unit. A holding circuit that regulates movement of one of the first mover or the second mover along the predetermined direction by supplying a voltage to one of the holding electrode or the second holding electrode; An order of supplying a voltage to each electrode of the driving electrode while alternately supplying a voltage to the driving electrode and the other of the first holding electrode or the second holding electrode provided in the power supply unit A switching circuit for sequentially switching, the first movable element includes a movable body, a fitting portion extending from the movable body to the second movable element, and the second movable element includes: A mover main body and a fitted portion that extends from the mover main body toward the first mover and is fitted to the fitting portion are formed.

(2) An imaging device, a stator, and optical elements that are guided by the stator so as to be reciprocable in a predetermined direction and that are provided independently of each other and that form an image of light on the imaging device. The stator includes a driving electrode, a first holding electrode, and a first holding electrode in which at least three electrodes to which a voltage is supplied in a different order are sequentially arranged in a predetermined direction. 2 holding electrodes are formed, and the first movable element includes a first driven electrode disposed opposite to the driving electrode and a first electrode disposed opposite to the first holding electrode. A held electrode is formed, and the second movable element includes a second driven electrode disposed to face the driving electrode, and a second covered electrode disposed to face the second holding electrode. A holding electrode is formed, and the driving electrode, the first holding electrode, and the second holding electrode are formed. A power supply unit configured to supply a voltage to the electrode for use, and the power supply unit configured to supply a voltage to one of the first holding electrode or the second holding electrode. A holding circuit for restricting movement of one of the second movable elements along the predetermined direction; and the other of the driving electrode and the first holding electrode or the second holding electrode provided in the power supply unit. And a switching circuit for sequentially switching the order in which the voltage is supplied to each electrode of the driving electrode, and the first mover includes a mover body, and the first mover from the mover body. The fitting part extended to the movable element side of the two, the second movable element, the movable element main body, and the movable element main body extending from the movable element main body to the first movable element side, and the fitting Electrostatic actuator formed with a mated part to be fitted to the part Characterized in that it comprises a chromatography data.

  According to the present invention, it is possible to bring a plurality of movers close enough while ensuring a necessary driving force.

  1 and 2 are diagrams illustrating an example in which the electrostatic actuator according to the technical reference example is applied to the lens mechanism 10 of the camera module. The lens mechanism 10 includes a square cylindrical stator 20 and two movers 30 and 40 that are reciprocally movable along the axial direction in the stator 20. A camera module is configured by providing a CCD device 50 that is arranged and detects an image. In the figure, C indicates the optical axis direction of the lens.

  The stator 20 includes a frame body 21, a stator electrode 22 patterned using a semiconductor process technology on a glass substrate, and a protrusion 25 extending along the optical axis direction C inside the frame body 21. And a power supply unit 26 that supplies power to the stator electrode 22.

  The stator electrode 22 includes a driving electrode group 23 and a holding electrode group 24. The drive electrode group 23 includes four-phase drive electrodes 23a, 23b, 23c, and 23d that are supplied with voltages in different orders and are alternately provided along the optical axis direction C. The driving electrodes 23a, 23b, 23c, and 23d are each formed in a stripe shape along a direction that intersects the optical axis direction C. Note that the voltage supplied to the drive electrodes 23a, 23b, 23c, and 23d is applicable as long as it has at least three phases. The holding electrode group 24 includes two-phase holding electrodes 24a and 24b, and each is formed in a stripe shape along the optical axis direction C.

  The power supply unit 26 includes a holding circuit 26a and a switching circuit 26b. The holding circuit 26a selectively supplies voltage to the holding electrodes 24a and 24b of the holding electrode group 24 to hold either the mover 30 or the mover 40 in the optical axis direction C. It has a function to regulate movement along. The switching circuit 26b is a holding circuit that is not held by the holding circuit 26a among the driving electrodes 23a, 23b, 23c, 23d of the driving electrode group 23 and the holding electrodes 24a, 24b of the holding electrode group 24. A voltage is alternately supplied to the electrodes for use, and a function of sequentially switching the order of supply to the drive electrodes 23a, 23b, 23c, and 23d is provided.

  The mover 30 includes a mover body 31, a lens group 32 supported by the mover body 31, a driven electrode 33 on which a driving force is applied by a drive voltage applied from the stator electrode 22, and a held object. Electrode 34.

  The driven electrode 33 is formed in a plurality of stripes formed along the direction intersecting the optical axis direction C. The held electrodes 34 are formed in stripes along the optical axis direction C so as to face the holding electrodes 24a.

  The mover 40 includes a mover main body 41, a lens group 42 supported by the mover main body 41, a driven electrode 43 on which a driving force is applied by a driving voltage applied from the stator electrode 22, and a held object. Electrode 44.

  The driven electrode 43 is formed in a plurality of stripes formed along the direction intersecting the optical axis direction C. The held electrodes 44 are formed in stripes along the optical axis direction C so as to face the holding electrodes 24b.

  The lens mechanism 10 configured as described above operates as follows. Here, the case where only the mover 30 is moved in the direction of arrow α in FIG. 2A will be described. In addition, the needle | mover 30 of (a) of FIG. 2 has shown the initial position. When the voltage V is supplied to the driving electrode 23a by the switching circuit 26b, an attractive force is generated between the movable element 30 and the driven electrode 33 and between the movable element 40 and the driven electrode 43 by electrostatic force. With this suction force, the first movable element 30 and the second movable element 40 are attracted to the driving electrode group 23 side of the stator 20 by the driving electrode 23a. Next, by supplying a voltage to the holding electrode 24a and the holding electrode 24b by the switching circuit 26b, the mover 30 and the mover 40 are attracted downward in the figure. Here, when the voltage is continuously supplied to the holding electrode 24b by the holding circuit 26a, the mover 40 is held at the position as it is.

  Next, when a voltage is supplied to the driving electrode 23b by the switching circuit 26b, the second driven electrode 33 from the left in the figure is attracted to the driving electrode 23b, and the mover 30 is moved from the initial position in the direction of the arrow α. Will move. Next, the movable element 30 is attracted downward in the figure by supplying a voltage to the holding electrode 24a by the switching circuit 26b. On the other hand, since the voltage is continuously supplied to the holding electrode 24b by the holding circuit 26a, the mover 40 does not advance at the position as it is. In this manner, the switching circuit 26b alternately applies voltages to the driving electrodes 23a to 23d of the driving electrode group 23 and the holding electrode 24a in the holding electrode group 24 to set the supply order. Thus, the movable element 30 can be driven along the optical axis direction C, and the position of the movable element 40 can be fixed by continuously supplying a voltage to the holding electrode 24b by the holding circuit 26a. It becomes.

  When only the mover 40 is moved, the switching circuit 26b is driven similarly by alternately supplying voltages to the drive electrodes 23a to 23d and the holding electrode 24b of the drive electrode group 23 by the switching circuit 26b. In addition, it is possible to fix the position of the mover 30 by continuously supplying a voltage to the holding electrode 24a by the holding circuit 26a.

  On the other hand, when the movers 30 and 40 move along the optical axis direction C, they move up and down in the direction in which the driving electrode group 23 and the holding electrode group 24 of the stator 20 are provided. At this time, the protrusion 25 provided on the stator 20 contacts the movers 30 and 40. That is, the protrusion 25 functions as a line contact support for the movers 30 and 40. Since the contact between the protrusion 25 and the movers 30 and 40 is a line contact, the frictional resistance can be greatly reduced as compared with the surface contact where the stator 20 and the movers 30 and 40 are in direct contact. For this reason, it becomes possible to improve drive efficiency.

  As described above, according to the lens mechanism 10 to which the electrostatic actuator according to the technical reference example is applied, it is possible to selectively drive the plurality of movers 30 and 40 in which the lens groups are arranged, and as a lens driving mechanism. An actuator configuration having a zoom function is possible. Further, since the frictional resistance between the stator 20 and the movers 30 and 40 can be greatly reduced, the driving efficiency can be improved. Furthermore, in the reference example of the present technology, the case where there are two movers has been described, but the present invention can also be applied to a case where there is a single mover.

  FIGS. 3A to 3C are explanatory views showing modifications of the lens mechanism 10 described above. In addition, illustration of the needle | mover 40 is abbreviate | omitted in this modification.

  In the modification shown in FIG. 3A, a pair of protrusions 27 are formed along the optical axis direction C with the drive electrode group 23 sandwiched between the upper part of the frame body 21. A pair of protrusions 28 are formed along the optical axis direction C with the holding electrode group 24 of the stator 20 interposed therebetween at the lower part of the frame body 21. Further, like the lens mechanism 10 described above, a pair of protrusions 25 are formed in the side frame 21 along the optical axis direction C.

  On the other hand, a convex movable element stopper 35 protruding to the side is formed at the front end portion and the rear end portion in the optical axis direction C of the movable element 30. The contact between the mover stopper 35 and the protrusions 27 and 28 is a line contact.

  In the present modification, only the protrusion 27 can be a place where the driven electrode 33 contacts. For this reason, when the mover 30 moves along the optical axis direction C, it is possible to prevent the electrode from being broken by the sliding of the driving electrode group 23 and the driven electrode group 33. Since the contact between the protrusion 27 and the driven electrode 33 is a line contact, the frictional resistance can be greatly reduced as compared with the surface contact in which the stator 20 and the mover 30 are in direct contact.

  Similarly, only the ridge portion 28 can be a place where the held electrode 34 contacts. For this reason, when the mover 30 moves along the optical axis direction C, it is possible to prevent the electrode from being broken due to the sliding of the holding electrode group 24 and the held electrode 34. Since the contact between the protrusion 28 and the held electrode 34 is a line contact, the frictional resistance can be greatly reduced as compared with the surface contact in which the stator 20 and the mover 30 are in direct contact.

  On the other hand, the place where the protrusion 25 contacts can be the movable element stopper 35 alone. For this reason, the contact between the protrusion 25 and the mover stopper 35 when the mover 30 moves along the optical axis direction C is a substantially point contact, and the surface contact where the stator 20 and the mover 30 are in direct contact with each other. Compared with, the frictional resistance can be greatly reduced.

  As described above, by providing the protrusions 25, 27, and 28 and the mover stopper 35, it is possible to reduce the contact resistance and provide an electrostatic actuator with good driving efficiency.

  In the modification shown in FIG. 3B, a convex movable element stopper 36 is formed over the entire circumference of the front end portion and the rear end portion in the optical axis direction C of the movable element 30. Thereby, the contact between the protrusions 27 and 28 and the mover stopper 36 when the mover 30 moves along the optical axis direction C becomes a substantially point contact, and the stator 20 and the mover 30 come into direct contact. Frictional resistance can be greatly reduced compared to surface contact. Further, since the driven electrode 33 and the held electrode 34 do not slide with the ridges 27 and 28, the electrode can be prevented from being broken.

  In the modification shown in FIG. 3C, a convex movable element stopper 37 is formed only at the lower end of the front end portion and the rear end portion in the optical axis direction C of the movable element 30. Thereby, the contact between the protrusion 28 and the mover stopper 37 when the mover 30 moves along the optical axis direction C becomes a substantially point contact, and the contact between the stator 20 and the mover 30 directly comes into contact. Compared with, the frictional resistance can be greatly reduced. Further, since the held electrode 34 does not slide with the protrusion 28, the electrode can be prevented from being broken. As a result, the frictional resistance between the stator 20 and the mover 30 can be further reduced, so that drive efficiency can be improved.

  In these modifications, the movable element 30 has been described, but the movable element 40 can also be applied. Moreover, it is applicable not only to a single mover but also to a plurality of movers.

  FIG. 4 is a perspective view showing an example in which the electrostatic actuator according to the technical reference example is applied to the lens mechanism 60. In this figure, the same functional parts as those in FIGS. 1 and 2 are denoted by the same reference numerals, and detailed description thereof is omitted.

  The lens mechanism 60 is provided with a power supply member that provides a drive signal to prevent the movable element 30 from being charged. Specifically, the lead wire 61 is connected to the side wall 31 a of the mover main body 31 of the mover 30, and is connected to the drive signal terminal 62 outside from the window frame 21 a provided on the side wall 21 of the frame body 21 of the stator 20. . By setting the lead wire 61 to an appropriate length, there is no resistance to the reciprocation of the mover 30.

  According to the lens mechanism 60, it is possible to provide a power supply member that provides a drive signal in order to prevent the movable element 30 from being charged without providing a shield or an obstacle in the optical path formed by the lens group. Since the mover 30 can be prevented from being charged, the driving efficiency can be improved. Further, even if the lead wire 61 vibrates when the movable element 30 is driven, the lead wire 61 can be prevented from interfering with the optical path, and the lead wire 61 is inserted in the gap between the stator electrode 22 and the movable element 30 that changes during the driving. A highly reliable drive is possible without being pinched.

  FIG. 5 is a view showing a modification of the lens mechanism 60 described above. In this modification, a coiled lead wire 63 is used instead of the lead wire 61. When the movable range of the mover 30 is large, the coiled lead wire 63 that is more compact when shortened than the lead wire 61 is easy to handle. In addition, when no driving force is applied to the mover 30, the mover 30 can be returned to a predetermined position (initial position) by the elastic force of the lead wire 63.

  FIG. 6 is a diagram showing a modification of the lens mechanism 60 described above. In this modification, a side stopper 64 and a plate-like drive signal terminal 65 are provided on the frame body 21. Further, an elastic lead wire 66 is attached to the mover main body 31 so that the tip of the lead wire 66 slides on the drive signal terminal 65 as the mover 30 moves. The drive signal terminal 65 is subjected to a conductive surface treatment that is resistant to friction and wear, and the reliability of the mechanism is enhanced.

  According to this modification, the mover 30 can be moved while being pressed against the side stopper 64 by the elastic force of the lead wire 66. For this reason, the needle | mover 30 can be moved with sufficient linearity. In addition, the lead wire 66 can be reliably slid to the drive signal terminal 65, and power can be supplied reliably.

  In this modification, the movable element 30 has been described. However, the movable element 40 can also be applied. Moreover, it is applicable not only to a single mover but also to a plurality of movers.

  FIG. 7 is a perspective view showing the movers 70 and 80 incorporated in the lens mechanism to which the electrostatic actuator according to the first embodiment of the present invention is applied. In this figure, the same functional parts as those in FIGS. 1 and 2 are denoted by the same reference numerals, and detailed description thereof is omitted.

  The mover 70 includes a mover main body 71, a lens group 72 supported by the mover main body 71, a driven electrode 73 on which a driving force is applied by a drive voltage applied from the stator electrode 22, and a holding electrode. Electrodes (not shown).

  The mover main body 71 has a recess (fitting portion) 71a formed along the optical axis direction C. The driven electrode 73 is formed in a plurality of stripes formed along the direction intersecting the optical axis direction C. The holding electrode faces the holding electrode 24a and is formed in a stripe shape along the optical axis direction C.

  The mover 80 includes a mover main body 81, a lens group 82 supported by the mover main body 81, a driven electrode 83 on which a driving force is applied by a drive voltage applied from the stator electrode 22, and a holding member. Electrodes (not shown).

  The movable body 81 is formed with a convex portion (a fitted portion) 81a that is formed along the optical axis direction C and that fits into the concave portion 71a. The driven electrode 83 is formed in a plurality of stripes formed along a direction intersecting the optical axis direction C. The holding electrode faces the holding electrode 24b and is formed in a stripe shape along the optical axis direction C.

  Since the movable element 70 and the movable element 80 formed in this way have a relationship of being fitted along the optical axis direction C as shown in FIG. 7A, the lens group 72 and the lens group 82 are mutually connected. Can be brought close together. Therefore, the zoom function and the focus adjustment function can be improved. That is, in order to construct a zoom optical system, at least two sets of lens groups to be driven are required, and a small zoom optical system that is short in the optical axis direction is moved away from each lens group once. The optical magnification is often changed depending on the positional relationship. In the conventional electrostatic actuator, if the electrode area necessary for driving is secured in the housing in which the lens is disposed, the proximity distance between the optical lenses is limited by the housing.

  In the movers 70 and 80 in the present embodiment, the lens groups 72 and 82 can be brought close to each other by securing the electrode area at the convex portion of the mover 80 or the side surface portion 71a of the mover 70. It is possible to prevent the housing from limiting the distance between the lenses, and it is possible to realize a zoom optical system that is miniaturized in the optical axis direction C without considering the housing.

  On the other hand, since the lengths of the driven electrodes 73 and 83 required for driving the movable element 70 and the movable element 80 along the optical axis direction C can be sufficiently secured, the function as an electrostatic actuator can be achieved. It can be demonstrated.

  FIG. 8 is a diagram illustrating a modification of the above-described movable element 70 and movable element 80. In this modification, a groove portion 71b is provided instead of the concave portion 71a of the movable element 70, and a convex portion 81b that is further extended in the optical axis direction C is used instead of the convex portion 81a of the movable element 80. Thereby, the distance between lenses can be further reduced.

  FIG. 9 shows a camera module 100 according to the second embodiment of the present invention, in which the electrostatic actuator is incorporated. That is, the camera module 100 is a module part incorporated in a digital camera, a mobile phone, or the like. An image sensor 102 such as a CMOS or a CCD is provided on a substrate 101, and an electrostatic actuator 103 is provided thereon. Here, a lens group that forms an image on the image sensor 102 is incorporated in the mover constituting the electrostatic actuator 103. A power supply unit 104 that controls driving of the electrostatic actuator 103 is mounted on the substrate 101.

  The camera module 100 according to the present embodiment is suitable for use as a camera focus adjustment mechanism because the electrostatic actuator 103 is excellent in drive characteristics.

  The present invention is not limited to the above embodiment. That is, although the electrostatic actuator is applied to the lens mechanism in the above-described embodiment, the present invention is not limited to this. Of course, various modifications can be made without departing from the scope of the present invention.

The perspective view which shows the lens mechanism incorporating the electrostatic actuator which concerns on a technical reference example. It is a figure which shows the lens mechanism typically, Comprising: (a) is a longitudinal cross-sectional view, (b) is sectional drawing cut | disconnected by the XX line in (a) and looked at the arrow direction, (c) is (a) Sectional drawing cut | disconnected by the YY line | wire in FIG. The figure which shows the modification of the lens mechanism. The perspective view which shows the principal part of the electrostatic actuator which concerns on a technical reference example. The perspective view which shows the modification of the electrostatic actuator. The perspective view which shows another modification of the electrostatic actuator. The perspective view which shows the needle | mover incorporated in the electrostatic actuator which concerns on the 1st Embodiment of this invention. The perspective view which shows the modification of the same needle | mover. The perspective view which shows the camera module which concerns on the 2nd Embodiment of this invention. The disassembled perspective view which shows the conventional electrostatic actuator. Explanatory drawing which shows the operation | movement method of the electrostatic actuator.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10,60 ... Lens mechanism, 20 ... Stator, 21 ... Frame, 22 ... Stator electrode, 23 ... Drive electrode group, 24 ... Holding electrode group, 25 ... Projection part, 26 ... Electric power supply part, 30 , 40, 70, 80 ... mover, 31, 41 ... mover body, 32, 42 ... lens group, 33, 43 ... driven electrode, 34, 44 ... holding electrode, 61, 63 ... lead wire, 62 , 65 ... drive signal terminal, 66 ... metal wire.

Claims (2)

A stator and first and second movers guided by the stator and reciprocally movable in a predetermined direction and provided independently of each other;
The stator is formed with a driving electrode, a first holding electrode, and a second holding electrode in which at least three electrodes to which voltages are supplied in a different order are sequentially arranged in a predetermined direction,
The first movable element is formed with a first driven electrode disposed to face the driving electrode and a first held electrode disposed to face the first holding electrode.
The second movable element is formed with a second driven electrode disposed opposite to the driving electrode and a second held electrode disposed opposed to the second holding electrode,
A power supply unit for supplying a voltage to the driving electrode, the first holding electrode, and the second holding electrode;
Provided in the power supply unit and supplying a voltage to one of the first holding electrode or the second holding electrode, in one predetermined direction of one of the first mover or the second mover. A holding circuit for restricting movement along,
A voltage is provided in the power supply unit, and alternately supplies a voltage to the driving electrode and the other of the first holding electrode or the second holding electrode, and supplies a voltage to each electrode of the driving electrode. A switching circuit for sequentially switching the order;
The first mover includes a mover body, a fitting portion extending from the mover body to the second mover,
The second mover includes a mover main body and a fitted portion that extends from the mover main body toward the first mover and is fitted to the fitting portion. An electrostatic actuator characterized by comprising: An image sensor;
First and second movable elements each having a stator and an optical element guided by the stator so as to be reciprocally movable in a predetermined direction and independently of each other and forming an image of light on the imaging element. The stator includes a driving electrode, a first holding electrode, and a second holding electrode in which at least three electrodes to which voltages are supplied in a different order are sequentially arranged in a predetermined direction. The first movable element is formed with a first driven electrode disposed to face the driving electrode and a first held electrode disposed to face the first holding electrode. The second movable element is provided with a second driven electrode disposed opposite to the driving electrode and a second held electrode disposed opposed to the second holding electrode, A voltage is applied to the driving electrode, the first holding electrode, and the second holding electrode. And a power supply unit that is provided in the power supply unit and that supplies a voltage to one of the first holding electrode or the second holding electrode, so that the first mover or the second mover A holding circuit that restricts movement along one of the predetermined directions and a voltage provided alternately to the driving electrode and the other of the first holding electrode or the second holding electrode are provided in the power supply unit. A switching circuit that sequentially switches the order of supplying voltages to the electrodes of the drive electrode, and the first mover includes a mover body and the mover body to the second mover side. The extended fitting portion and the second mover are extended from the mover main body to the first mover side from the mover main body and fitted into the fitting portion. An electrostatic actuator formed with a mated part;
A camera module comprising:

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