JP3804367B2

JP3804367B2 - Liquid crystal device inspection method, liquid crystal device inspection device, and liquid crystal device manufacturing method

Info

Publication number: JP3804367B2
Application number: JP32998599A
Authority: JP
Inventors: 桂一末廣
Original assignee: Seiko Epson Corp
Current assignee: Seiko Epson Corp
Priority date: 1999-11-19
Filing date: 1999-11-19
Publication date: 2006-08-02
Anticipated expiration: 2019-11-19
Also published as: JP2001147412A

Description

【０００１】
【発明の属する技術分野】
本発明は液晶装置の検査方法及び検査装置に係り、特に、液晶パネルに給電した状態で外観検査を実施するための方法及び装置構造に関する。
【０００２】
【従来の技術】
一般に、液晶装置の製造工程においては、２枚のガラス等からなる透明基板をシール材によって貼り合わせ、シール材の内側領域に液晶を注入して封止した構造の液晶パネルを形成する。この液晶パネルには、一方の基板が他方の基板の外縁よりも外側に張り出してなる張出部が設けられ、この張出部の表面上に複数の外部端子が形成される。これらの外部端子は基板内面上に形成された透明電極（表示電極）に導電接続されている。
【０００３】
この液晶パネルに対しては、上記の外部端子に所定の電力を供給して点灯させた状態で、いわゆる点灯検査と呼ばれる外観検査が行われる。この外観検査は、液晶パネルの点灯不良や色むらの有無などの表示品位について検査するものである。外観検査においては、例えば、検査装置に固定された矩形枠状の下側の支持体上に液晶パネルを載置し、回動機構に取り付けられた上側の矩形枠状の支持体を下方へ回動させて上方から液晶パネルを押さえ込むようにして、上下の支持体により液晶パネルの縁部外面を挟持する。ここで、支持体の一部には、張出部の表面上に形成された外部端子に接触するラバーコネクタが取り付けられている。したがって、通常、矩形の液晶パネルの一辺近傍に設けられた張出部にはラバーコネクタが当接し、他の３辺近傍の縁部外面には支持体の表面が直接当接した状態となる。また、上記のように支持された液晶パネルの上下には偏光板が配置される。さらに、必要に応じて液晶パネルの表示状態を視認可能とするための照明が設けられる。
【０００４】
検査時においては、導通異方性を有するラバーコネクタを張出部上の外部端子に接触させ、このラバーコネクタを介して駆動電力が供給される。この状態で、上記の偏光板を通して液晶パネルの点灯状態を目視により、或いはカメラに撮影された画像によって観察する。この観察によって、液晶パネルの表示不良の有無や表示領域内の色ムラの有無を調べることができる。
【０００５】
【発明が解決しようとする課題】
しかしながら、上記の外観検査を行う場合、従来の方法では、液晶パネルを挟持する上下の支持体が回動機構によって開閉されるように構成されているため、上下の支持体間の平行度が狂いやすいことから、液晶パネルの縁部外面を上下から挟持する際に液晶パネルが支持体から受ける圧力が場所によってばらつきやすくなるとともに、支持体が直接に当接する液晶パネルの縁部外面と、ラバーコネクタに圧着される張出部の表面との間に受ける圧力に差が生ずることから、液晶パネルに撓み（歪み）が発生しやすくなるため、液晶パネルの表示領域に色ムラが生ずる場合があり、この撓みに起因する色むら等の表示態様への影響が正確な外観検査の実施を妨げるという問題点がある。
【０００６】
特に、近年の液晶パネルにおいては、表示面積の増大と小型化の要請によって表示領域の外側に存在する周囲部分や張出部の幅（すなわち、いわゆる見切りからパネル外縁までの幅）が１〜２ｍｍ程度と小さくなる傾向にあり、その結果、外観検査時における上記支持体により挟持することのできる部分の幅が狭くなるので、支持体から液晶パネルに加える圧力も必然的に増大することから、支持体の当接面における凹凸や撓み等に起因する液晶パネルの撓みも増大し、また、近年の液晶装置においては基板の厚さも従来の半分以下にまで薄くなる場合があることから液晶パネル自身も撓み易くなってきているので、上述のような外観検査時の液晶パネルの支持状態に起因して生ずる液晶パネルの撓みが増大し、大きな問題となっている。
【０００７】
そこで本発明は上記問題点を解決するものであり、その課題は、外観検査時における液晶パネルの支持状態に起因する撓みを低減することによって、正確な外観検査を行うことのできる方法及び装置を提供することにある。
【０００８】
【課題を解決するための手段】
上記課題を解決するために本発明の液晶装置の検査方法は、２枚の基板を貼り合わせてなり、少なくとも一方の前記基板の一部が他方の前記基板の外縁よりも外側に張り出した張出部を有し、該張出部の表面上に外部端子が形成されてなる液晶装置の検査方法であって、前記液晶装置の他方の前記基板側から、前記張出部の表面に弾性導通部材を当接させて前記外部端子との導通を確保するとともに、これと同側から前記張出部以外の前記液晶装置の縁部外面に、前記弾性導通部材と略同様の弾性特性及び略同様の厚さを有し、前記液晶装置に対する当接方向における前記弾性導通部材との位置ずれ量が、前記張出部の表面と前記張出部以外の前記液晶装置の縁部外面との段差に略等しくなるように配置される弾性支持部材を当接させ、前記弾性導通部材及び前記弾性支持部材と、一方の前記基板側から当接する対向支持部との間に前記液晶装置を挟持し、前記弾性導通部材及び前記弾性支持部材の変形量が略同一になった状態で、前記弾性導通部材の厚さ方向に貫通し且つ前記弾性導通部材と一体化された導通部を通じて前記液晶装置に給電して外観検査を行うことを特徴とする。
【０００９】
この発明によれば、張出部の表面に当接する弾性導通部材と、張出部以外の液晶パネルの縁部外面に当接する弾性支持部材とが共に弾性を有するので、液晶パネルに対するこれらの部材の当接面における凹凸や撓みの影響を低減することができる上に、両者が相互に略同様の弾性特性（すなわち、弾性変形量と弾性力との間の相関に関わる特性）を備えているので、支持された液晶パネルの弾性導通部材から受ける圧力と弾性支持部材から受ける圧力との差が低減されるため、液晶パネルの撓みを低減することができ、より正確な外観検査を行うことができる。また、張出部の表面と、張出部以外の縁部外面との間には、液晶パネルを構成する一方の基板の厚さ分とほぼ等しい分だけの段差が存在するが、この段差と等しい当接方向の位置ずれ量を弾性導通部材と弾性支持部材との間に設け、しかも、弾性導通部材と弾性支持部材とを相互に同様の厚さとすることにより、上記段差の存在にも関わらず、液晶パネルを支持したときの弾性導通部材と弾性支持部材の支持圧力に起因する変形量をほぼ等しくすることができるので、液晶パネルの撓みをさらに低減することができる。
【００１０】
本発明において、前記対向支持部を、前記弾性導通部材及び前記弾性支持部材に対向する弾性部材とすることが好ましい。液晶パネルを反対側から支持する対向支持部をも弾性部材とすることによって液晶パネルの撓みをさらに低減することができる。この場合、液晶パネルの対向支持部に対向する張出部の表面が存在する場合には、当該表面に上記と同じ弾性導通部材を当接させ、それ以外の液晶パネルの縁部外面には上記と同じ弾性支持部材を当接させることが好ましい。
【００１１】
本発明において、前記弾性導通部材及び前記弾性支持部材は、開口部を有する枠状ベース上に設けられ、該枠状ベースの前記液晶装置を視認する側には該開口部の内縁に沿って傾斜面が形成されてなり、前記外観検査は、前記傾斜面が形成された開口部を閉鎖するように設けられる偏光板を介して視認することにより行われることが好ましい。
【００１３】
次に、本発明の液晶装置の検査装置は、２枚の基板を貼り合わせてなり、少なくとも一方の前記基板の一部が他方の前記基板の外縁よりも外側に張り出した張出部を有し、該張出部の表面上に外部端子が形成されてなる液晶装置の検査装置であって、前記液晶装置の他方の前記基板側から前記張出部の表面に当接可能に構成された、前記外部端子との導通を確保するための弾性導通部材と、他方の前記基板側から前記張出部以外の前記液晶装置の縁部外面に当接可能に構成され、前記弾性導通部材と略同様の弾性特性及び略同様の厚さを有する弾性支持部材と、前記弾性導通部材及び前記弾性支持部材並びにこれらに対向する対向支持部とにより前記液晶装置を挟持可能とするための接離機構とを有し、前記弾性支持部材は、前記液晶装置に対する当接方向における前記弾性導通部材との位置ずれ量が、前記張出部の表面と前記張出部以外の前記液晶装置の縁部外面との段差に略等しくなるように配置されており、前記弾性導通部材及び前記弾性支持部材の変形量が略同一になった状態で、前記弾性導通部材の厚さ方向に貫通し且つ前記弾性導通部材と一体化された導通部を通じて前記液晶装置に給電して外観検査を行うように構成されていることを特徴とする。
【００１４】
本発明において、前記対向支持部は、前記弾性導通部材及び前記弾性支持部材に対向する弾性部材であることが好ましい。
【００１５】
本発明において、前記弾性導通部材及び前記弾性支持部材は、開口部を有する枠状ベース上に設けられ、該枠状ベースの前記液晶装置を視認する側には該開口部の内縁に沿って傾斜面が形成されてなり、前記外観検査は、前記傾斜面が形成された開口部を閉鎖するように設けられる偏光板を介して視認することにより行われることが好ましい。
【００１６】
本発明において、前記接離機構は、前記液晶パネルに対する当接方向に、前記弾性導通部材及び前記弾性支持部材と、前記対向支持部とを直線的に接離させるための直線案内構造を備えていることが好ましい。
【００１７】
この発明によれば、接離機構に、弾性導通部材及び弾性支持部材と対向支持部とを接離させる直線案内構造を設けることにより、弾性導通部材及び弾性支持部材による液晶パネルに対する支持面と対向支持部による液晶パネルに対する支持面とがほぼ平行な状態で接離動作するように構成されるので、液晶パネルを挟持した場合における両支持面間の平行度が狂いにくくなり、当該平行度を高精度に維持することができるため、液晶パネルの撓みをさらに低減できる。
【００１８】
本発明において、前記弾性導通部材は、弾性絶縁部と、厚さ方向に貫通した導通部とが一体化されたものであることが好ましい。弾性絶縁部としては合成ゴムなど適宜の弾性を有するものを容易に入手することができ、これに導通部を一体化させることによって、所望の弾性特性を有する弾性導通部材を容易に構成できる。ここで、弾性導通部材或いはその導通部は厚さ方向にのみ導通する導電異方性を有するものであることが好ましい。
【００１９】
なお、上記各発明において、弾性支持部材を弾性導通部材と同一の部材で構成することが最も望ましい。
【００２０】
【発明の実施の形態】
次に、添付図面を参照して本発明に係る液晶装置の検査方法及び検査装置の実施形態について詳細に説明する。
【００２１】
図３は本実施形態の検査装置の全体構成を模式的に示す概略断面図である。ハウジング１０には、厚板ガラス等からなる下側支持板１１が支柱１２を介して水平に固定されている。下側支持板１１は中央部に矩形状の開口部を有し、その開口縁に下側支持体１３が固定されている。下側支持板１１の上方には、厚板ガラス等からなる上側支持板１４が水平に配置され、この上側支持板１４は硬質金属等からなる支持梁１５によって下側支持板１１に対して平行な姿勢で従動部材１７に固定されている。上側支持板１４もまた中央に矩形状の開口部を有し、その開口縁に上側支持体１６が固定されている。下側支持体１３と上側支持体１６は、上下から液晶パネルを挟持して固定するためのものである。
【００２２】
従動部材１７は軸受部材１８に固定されており、軸受部材１８は垂直に伸びるガイド軸１９に案内されて上下にスライド自在に構成されている。軸受部材１８はガイド軸１９に挿通されたコイルバネ等の弾性部材２１によって常時上方へ付勢されている。駆動軸２２はハウジング１０に対して水平姿勢で回転自在に取り付けられているとともに、リンク２３，２４を介して従動部材１７に連結されている。駆動軸２２には図示しない操作アームが連結され、当該操作アームを回動させることによって駆動軸２２を図示時計回りに回転させることができるようになっている。駆動軸２２が回転すると、リンク２３，２４を介して従動部材１７は下方に移動する。なお、駆動軸２２、リンク２３，２４及び従動部材１７の駆動力伝達機構にはトーションスプリング等からなる弾性部材が介在し、所定応力以上の駆動力が従動部材１７に伝達されないように構成されている。上側支持板１４及び上側支持体１６は、下側支持板１１及び下側支持体１３と常に平行を保った状態で上下に直線的に移動するように構成されている。
【００２３】
次に、図１及び図２を参照して、上記下側支持体１３及び上側支持体１６の細部構造について説明する。図１は本実施形態の検査装置における液晶パネルを保持する部分を液晶パネルと共に示す拡大断面図、図２は本実施形態の検査装置を用いて検査する液晶パネルと、この液晶パネルを上下から挟持する上側支持体及び下側支持体の構造を示す概略斜視図である。
【００２４】
下側支持体１３においては、矩形枠状に形成された枠状ベース１３１と、この枠状ベース１３１の３つの辺部分にそれぞれ接着固定等の方法により取り付けられた合成ゴム等からなる弾性支持部材１３２と、枠状ベース１３１における残りの一つの辺部分において取り付けられた回路基板等からなる配線板１３３と、この配線板１３３の表面上に接着固定等の方法により取り付けられた弾性導通部材１３４とを備えている。図４（ａ）に示すように、本実施形態における弾性導通部材１３４は厚さ方向（図示上下方向）に貫通した導通部１３４ａが合成ゴム等の弾性絶縁材の内部において一体化され、この導通部１３４ａは配線板１３３の表面上に形成された配線１３３ａに導電接続されている。また、図４（ｂ）に示すように、弾性絶縁材の側面に導通部１３４ａ’が一体化された弾性導通部材１３４’を用いてもよい。
【００２５】
一方、上側支持体１６においても、矩形枠状に形成された枠状ベース１６１と、この枠状ベース１６１の３つの辺部分に対してそれぞれ接着固定等の方法により取り付けられた合成ゴム等からなる弾性支持部材１６２と、枠状ベース１６１における残りの一つの辺部分に取り付けられた回路基板等からなる配線板１６３と、この配線板１６３の表面上に接着固定等の方法により取り付けられた弾性導通部材１６４とを備えている。弾性導通部材１６４は厚さ方向（図示上下方向）に貫通した導通部１６４ａが合成ゴム等の弾性絶縁材の内部において一体化され、この導通部１６４ａは配線板１６３の表面上に形成された図示しない配線に導電接続されている。また、上記の枠状ベース１６１の上部内縁には、上方に開くように形成された傾斜面部１６１ａが形成されている。
【００２６】
上記弾性導通部材１３４，１６４の導通部１３４ａ，１６４ａは導電性を有するものであって、後述する液晶パネルの外部端子にそれぞれ所定の電位を供給することができるように構成されているものであればよいが、本実施形態においては、弾性絶縁材中に貫通するように形成された厚さ方向に伸びる多数の細い導電線、或いは、弾性絶縁材中に分散配置された多数の導電性粒子（金属粒子等の導電粒子の他、絶縁粒子の表面上に鍍金処理等により導電層を形成したものであってもよい。）によって形成された、厚さ方向にのみ導電性を有するものとして機能する導電異方性を有する部分となっている。このように導電異方性を有する導通部１３４ａ，１６４ａによって、液晶パネルに複数の外部端子が高密度に配列されていても、精密な位置決めを要することなく、当該外部端子毎にそれぞれ独立した電位を、配線板１３３，１６３を介して供給することができる。
【００２７】
配線板１３３，１６３に形成された図示しない複数の配線は上記外部端子１０１ｂ、１０２ｂにそれぞれ導通し、図示しないコネクタ等を介して、別途設けられた給電回路に接続される。なお、この代わりに、配線板１３３，１６３にフレキシブル配線基板等を接続してもよい。
【００２８】
上記の枠状ベース１３１及び１６１には、その内側の開口部を閉鎖するように偏光板１３５及び１６５が取り付けられている。これらの偏光板１３５，１６５は、液晶パネル１００の上下の外面上に対して後の工程において貼り付けられるべき偏光板と同じものであり、液晶パネル１００に偏光板を貼り付けた液晶装置の表示特性を知るために装置側に配置されているものである。
【００２９】
本実施形態において図示する液晶パネル１００は、２枚のガラス等からなる透明基板１０１，１０２をシール材１０３によって貼り合わせ、このシール材１０３の内側に液晶を注入し、封止したものである。この液晶パネル１００においては、透明基板１０１が透明基板１０２の外縁よりも外側へ張り出してなる張出部１０１ａと、透明基板１０２が透明基板１０１の外縁よりも外側へ張り出してなる張出部１０２ａとを備えている。これらの張出部１０１ａ，１０２ａの表面上には、それぞれ、シール材１０３の内側にある表示領域内から画素電極に接続された複数の配線が引き出され、それらの先端部が外部端子１０１ｂ、１０２ｂとなって複数配列されている。
【００３０】
本実施形態では、下側支持体１３及び上側支持体１６のいずれにおいても、弾性支持部材１３２と弾性導通部材１３４とが同一の厚さになるように構成されている。また同様に、弾性支持部材１６２と弾性導通部材１６４とが同一の厚さになるように構成されている。さらにまた、弾性支持部材１３２の上面と弾性導通部材１３４の上面との間の厚さ方向（図示上下方向）のずれ量が、液晶パネル１００の透明基板１０２の外面（液晶パネルにおける図示下側の面）と張出部１０１ａの表面との間の段差（すなわち、液晶パネルのセル厚が無視できるとすれば透明基板１０２の厚さ）にほぼ等しく、同様に、弾性支持部材１６２の下面と弾性導通部材１６４の下面との間の厚さ方向（図示上下方向）のずれ量が、液晶パネル１００の透明基板１０１の外面（液晶パネルにおける図示上側の面）と張出部１０２ａの表面との間の段差（すなわち、セル厚が無視できるとすれば透明基板１０１の厚さ）にほぼ等しくなるように構成されている。
【００３１】
図１を参照して、下側支持体１３について上記の関係を具体的に説明すると、弾性導通部材１３４と弾性支持部材１３２とは共に同一の厚さｈを有し、しかも、その断面もまた全く同一寸法になるように構成されている。また、枠状ベース１３１における弾性支持部材１３２に対する支持面の高さと、配線板１３３における弾性導通部材１３４に対する支持面の高さとの間には、図示の段差ｄが設けられ、この段差ｄと、液晶パネル１００の透明基板１０２の厚さとがほぼ等しくなるように構成されている。ここで、液晶パネル１００のセル厚は高々５〜１０μｍであるので、透明基板１０２の厚さ（例えば３００〜１２００μｍ）と比べれば無視できる。このような構成は上側支持体１６の弾性導通部材１６４と弾性支持部材１６２についても全く同様である。
【００３２】
次に、以上説明した検査装置を用いて液晶パネル１００の点灯検査を行う方法について説明する。まず、上記液晶パネル１００を、そのパネル縁部外面（透明基板１０２の外面）が上記弾性支持部材１３２の上面に、その張出部１０１ａの表面が弾性導通部材１３４の上面にそれぞれ当接するようにして下側支持体１３の上に載置する。次に、図示しない操作アームを操作することなどによって、図３に示す駆動軸２２を図示時計周りに回転させ、従動部材１７をガイド軸１８に沿って降下させ、下側支持体１３の上に載置されている液晶パネル１００に対して、上方から上側支持体１６を当接させる。このとき、上側支持体１６においては、上記弾性支持部材１６２の下面が液晶パネル１００のパネル縁部外面（透明基板１０１の外面）に当接し、上記弾性導通部１６４の下面が液晶パネル１００の張出部１０２ａの表面に当接する。
【００３３】
上記のようにして、液晶パネル１００は下側支持体１３と上側支持体１６との間に上下から挟持されるようになる。このとき、張出部１０１ａ，１０２ａの表面上に形成された外部端子１０１ｂ，１０２ｂは弾性導通部材１３４，１６４に圧接され、それらの導通部１３４ａ，１６４ａ及び配線板１３３，１６３を介して図示しない給電回路から所定の電位が供給される。その結果、液晶パネル１００の表示領域内の各画素は所定の状態（例えば点灯状態）になり、この状態で、上下に配置された偏光板１３５，１６５を介して液晶パネルの表示状態を視認することができるようになる。
【００３４】
この場合、図１に示すように、下側支持体１３の下方位置と上側支持体１６の上方位置のいずれか一方に光源Ａを配置し、他方にカメラ等の撮像手段や顕微鏡Ｂなどを配置したり他方から肉眼で視認したりすることによって液晶パネル１００の表示領域を検査する。ここで、上側支持体１６の枠状ベース１６１の上部内縁には上方に向けて開くように形成された傾斜面部１６１ａが形成されているため、表示領域の周縁部が上側支持体１６によって隠されにくくなるように構成されている。したがって、上側支持体１６の上方から液晶パネルの表示領域を観察した方が、観察時の見逃しを低減することができ、しかも、斜め上方からであっても表示領域全体を観察することができるようになるので、外観検査を容易に行うことが可能になる。
【００３５】
液晶パネル１００は外縁部において全て合成ゴム等の弾性部材に支持され、上下から挟持された状態となるので、液晶パネル１００に歪みが発生しにくくなり、液晶パネル１００の支持状態に起因するパネルの歪みが原因となって生ずる色ムラ等を低減することができる。したがって、外観検査において液晶パネル自体に起因する表示不良や色ムラ等を、妨げを受けることなく確実に観察することが可能になる。特に、液晶パネル１００において表示領域の周囲部分や張出部１０１ａ，１０２ａの幅、特に、シール材１０３の外側領域がきわめて狭くなっても、弾性部材によって上下から挟持されていることによって、下側支持体１３や上側支持体１６の歪みや凹凸などに影響されることが少なくなるため、液晶パネル１００の撓みを低減できる。
【００３６】
本実施形態では、上記の弾性支持部材１３２，１６２と、弾性導通部材１３４，１６４とを、ほぼ同一の弾性特性を有する素材（例えば同組成の合成ゴムを基材として構成したもの）によって構成している。この結果、液晶パネル１００に対して上下から受ける狭圧力の応力分布を液晶パネル１００の外縁の全周に亘ってほぼ均一にすることができるので、液晶パネル１００の支持状態に起因する撓みをさらに低減できる。本実施形態では、弾性支持部材は例えば全体が合成ゴム等からなる弾性絶縁材で構成され、弾性導通部材は上記のように導通部を有するものとしているが、弾性支持部材を弾性導通部材と全く同じもので構成してもよく、この場合には両者の弾性特性を完全に同一のものとすることができる。
【００３７】
さらに、弾性支持部材１３２，１６２と弾性導通部材１３４，１６４とをほぼ同じ厚さに形成し、一方、液晶パネル１００の外面と張出部１０１ａ，１０２ａの表面との段差を吸収するために、弾性支持部材１３２，１６２に対する取付面である枠状ベース１３１，１６１の表面と、弾性導通部材１３４，１６４に対する取付面である配線板１３３，１６３の表面との間に当接方向（図示上下方向）に段差（すなわちオフセット）を設けている。したがって、液晶パネルに当接することによって生ずる弾性支持部材と弾性導通部材の変形量をもほぼ同一にすることができるから、液晶パネル１００に対する加圧力をより均一に分布させることができ、液晶パネル１００の撓みをより低減させることに成功している。
【００３８】
本実施形態では、下側支持体１３と、上側支持体１６とを常に平行に保ちつつ、下側支持体１３と上側支持体１６とが相互に直線的に接離するように軸支部材１８とガイド軸１９によって直線案内構造を構成している。したがって、ヒンジ接合によって連結された開閉蓋のように回動させることによって接離させる機構とは異なり、本実施形態の接離機構においては、両者の平行度が接離方向の距離によって大きく変動することがないので、液晶パネルに対する狭圧力が変わっても液晶パネルの受ける加圧力の分布の変動が少なくなるとともに、液晶パネルを挟持した場合の対向する挟持面間の平行精度自体を高めることが容易になるため、液晶パネル１００に対する支持加圧力をより均一化し、液晶パネル１００の検査時における撓みをさらに低減することが可能になる。
【００３９】
尚、本発明の検査装置は、上述の図示例にのみ限定されるものではなく、本発明の要旨を逸脱しない範囲内において種々変更を加え得ることは勿論である。例えば、上記実施形態では一体の枠状ベースに弾性支持部材や弾性導通部材を取り付けているが、枠状ベースが一体に構成されている必要はなく、また、枠状ベースを設けることなく、上下の支持板１１，１４に直接に弾性支持部材や弾性導通部材等を取り付けても構わない。
【００４０】
【発明の効果】
以上説明したように本発明によれば、張出部の表面に当接する弾性導通部材と、張出部以外の液晶パネルの縁部外面に当接する弾性支持部材とが共に弾性を有するので、液晶パネルに対するこれらの部材の当接面における凹凸や撓みの影響を低減することができる上に、両者が相互に略同様の弾性特性（すなわち、弾性変形量と弾性力との間の相関に関わる特性）を備えているので、支持された液晶パネルの弾性導通部材から受ける圧力と弾性支持部材から受ける圧力との差が低減されるため、液晶パネルの撓みを低減することができ、より正確な外観検査を行うことができる。
【図面の簡単な説明】
【図１】本発明に係る液晶装置の検査方法及び検査装置の実施形態における液晶パネルの支持構造の主要部を示す拡大断面図である。
【図２】同実施形態における支持構造を示す斜視図である。
【図３】同実施形態の検査装置の全体構成を示す概略断面図である。
【図４】同実施形態の検査装置に用いる弾性導通部材の構造を示す拡大断面図（ａ）及び（ｂ）である。
【符号の説明】
１０ハウジング
１１下側支持板
１３下側支持体
１４上側支持板
１６上側支持体
１７従動部材
１８軸受部材
１９ガイド軸
１３１，１６１枠状ベース
１３２，１６２弾性支持部材
１３３，１６３配線板
１３４，１６４弾性導通部材
１３５，１６５偏光板[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an inspection method and an inspection apparatus for a liquid crystal device, and more particularly, to a method and an apparatus structure for performing an appearance inspection in a state where power is supplied to a liquid crystal panel.
[0002]
[Prior art]
In general, in a manufacturing process of a liquid crystal device, a transparent substrate made of two sheets of glass or the like is bonded together with a sealing material, and a liquid crystal panel having a structure in which liquid crystal is injected into an inner region of the sealing material and sealed is formed. The liquid crystal panel is provided with an overhanging portion in which one substrate extends outward from the outer edge of the other substrate, and a plurality of external terminals are formed on the surface of the overhanging portion. These external terminals are conductively connected to a transparent electrode (display electrode) formed on the inner surface of the substrate.
[0003]
This liquid crystal panel is subjected to an appearance inspection called a so-called lighting inspection in a state in which predetermined power is supplied to the external terminal to light it. This appearance inspection is to inspect the display quality such as lighting failure of the liquid crystal panel and presence / absence of color unevenness. In the appearance inspection, for example, a liquid crystal panel is placed on a rectangular frame-shaped lower support fixed to an inspection apparatus, and the upper rectangular frame-shaped support attached to the rotation mechanism is rotated downward. The liquid crystal panel is pressed from above, and the outer surface of the edge of the liquid crystal panel is held between the upper and lower supports. Here, a rubber connector that contacts an external terminal formed on the surface of the overhanging portion is attached to a part of the support. Therefore, the rubber connector is usually in contact with the overhanging portion provided near one side of the rectangular liquid crystal panel, and the surface of the support is in direct contact with the outer surface of the edge near the other three sides. In addition, polarizing plates are arranged above and below the liquid crystal panel supported as described above. Furthermore, illumination for enabling the display state of the liquid crystal panel to be visible is provided as necessary.
[0004]
At the time of inspection, a rubber connector having conduction anisotropy is brought into contact with an external terminal on the overhanging portion, and driving power is supplied through this rubber connector. In this state, the lighting state of the liquid crystal panel is observed through the polarizing plate, visually or by an image taken by a camera. By this observation, the presence or absence of display defects on the liquid crystal panel and the presence or absence of color unevenness in the display area can be examined.
[0005]
[Problems to be solved by the invention]
However, when performing the above-described appearance inspection, in the conventional method, since the upper and lower supports sandwiching the liquid crystal panel are configured to be opened and closed by the rotation mechanism, the parallelism between the upper and lower supports is out of order. Since the pressure applied to the liquid crystal panel from the support when the outer surface of the liquid crystal panel is sandwiched from above and below tends to vary depending on the location, the outer surface of the liquid crystal panel that directly contacts the support and the rubber connector Since a difference occurs in the pressure received between the surface of the overhanging portion to be crimped to the liquid crystal panel, the liquid crystal panel is likely to bend (distorted), and color unevenness may occur in the display area of the liquid crystal panel. There is a problem in that the influence on the display mode such as color unevenness caused by this bending hinders an accurate appearance inspection.
[0006]
In particular, in recent liquid crystal panels, the width of the peripheral portion and the overhanging portion existing outside the display region (that is, the width from the so-called parting to the outer edge of the panel) due to the demand for an increase in display area and downsizing is 1-2 mm. As a result, the width of the portion that can be clamped by the support during the visual inspection becomes narrower, and the pressure applied from the support to the liquid crystal panel inevitably increases. The deflection of the liquid crystal panel due to unevenness or deflection on the contact surface of the body also increases, and in recent liquid crystal devices, the thickness of the substrate may be reduced to half or less than the conventional one, so the liquid crystal panel itself is also Since it becomes easy to bend, the bending of the liquid crystal panel resulting from the support state of the liquid crystal panel at the time of the appearance inspection as described above increases, which is a big problem.
[0007]
Accordingly, the present invention solves the above-mentioned problems, and the problem is to provide a method and apparatus capable of performing an accurate appearance inspection by reducing the deflection caused by the support state of the liquid crystal panel during the appearance inspection. It is to provide.
[0008]
[Means for Solving the Problems]
In order to solve the above-described problems, the liquid crystal device inspection method of the present invention is a projecting method in which two substrates are bonded together, and at least a part of one of the substrates projects outward from the outer edge of the other substrate. A method for inspecting a liquid crystal device in which an external terminal is formed on the surface of the overhanging portion, and an elastic conducting member from the other substrate side of the liquid crystal device to the surface of the overhanging portion To ensure electrical continuity with the external terminal, and from the same side to the outer surface of the edge of the liquid crystal device other than the overhanging portion, substantially the same elastic characteristics and substantially the same as the elastic conductive member. The amount of positional deviation from the elastic conducting member in the contact direction with respect to the liquid crystal device has a thickness substantially equal to a step between the surface of the overhanging portion and the outer surface of the edge of the liquid crystal device other than the overhanging portion. Abutting elastic support members arranged to be equal, The liquid crystal device is sandwiched between the conductive conducting member and the elastic support member and the opposing support portion that comes into contact with one of the substrates, and the deformation amounts of the elastic conductive member and the elastic support member are substantially the same. In this state, the liquid crystal device is fed to the liquid crystal device through a conduction portion that penetrates in the thickness direction of the elastic conduction member and is integrated with the elastic conduction member, thereby performing an appearance inspection.
[0009]
According to the present invention, both the elastic conducting member that contacts the surface of the overhanging portion and the elastic support member that contacts the outer surface of the edge of the liquid crystal panel other than the overhanging portion have elasticity. In addition to being able to reduce the influence of unevenness and deflection on the contact surface, both have substantially the same elastic characteristics (that is, characteristics relating to the correlation between the amount of elastic deformation and the elastic force). Therefore, since the difference between the pressure received from the elastic conductive member of the supported liquid crystal panel and the pressure received from the elastic support member is reduced, the deflection of the liquid crystal panel can be reduced, and a more accurate appearance inspection can be performed. it can. In addition, there is a level difference between the surface of the overhanging portion and the outer surface of the edge other than the overhanging portion, which is almost equal to the thickness of one substrate constituting the liquid crystal panel. By providing the same amount of displacement in the abutting direction between the elastic conducting member and the elastic supporting member, and by making the elastic conducting member and the elastic supporting member have the same thickness, the presence of the step is also involved. First, the amount of deformation caused by the support pressure of the elastic conducting member and the elastic support member when the liquid crystal panel is supported can be made substantially equal, so that the deflection of the liquid crystal panel can be further reduced.
[0010]
In this invention, it is preferable that the said opposing support part is an elastic member facing the said elastic conduction member and the said elastic support member. By using the opposing support portion that supports the liquid crystal panel from the opposite side as an elastic member, the deflection of the liquid crystal panel can be further reduced. In this case, when the surface of the overhanging portion facing the opposite support portion of the liquid crystal panel is present, the same elastic conductive member as above is brought into contact with the surface, and the outer surface of the edge portion of the other liquid crystal panel is placed on the outer surface of the edge portion. It is preferable to make the same elastic support member abut.
[0011]
In the present invention, the elastic conducting member and the elastic support member are provided on a frame-like base having an opening, and the frame-like base is inclined along the inner edge of the opening on the side where the liquid crystal device is viewed. It is preferable that the appearance inspection is performed by visually recognizing through a polarizing plate provided so as to close the opening in which the inclined surface is formed.
[0013]
Next, an inspection apparatus for a liquid crystal device according to the present invention includes two overhanging portions in which at least one of the substrates protrudes outside the outer edge of the other substrate by bonding two substrates together. An inspection device for a liquid crystal device in which an external terminal is formed on the surface of the overhang portion, and is configured to be able to contact the surface of the overhang portion from the other substrate side of the liquid crystal device. An elastic conducting member for securing conduction with the external terminal, and configured to be able to come into contact with the outer surface of the edge of the liquid crystal device other than the overhanging portion from the other substrate side, and substantially the same as the elastic conducting member An elastic support member having substantially the same elastic thickness and substantially the same thickness, and a contact / separation mechanism for allowing the liquid crystal device to be sandwiched between the elastic conducting member, the elastic support member, and an opposing support portion opposed thereto. And the elastic support member is provided on the liquid crystal device. The displacement amount with the elastic conducting member in the contact direction is arranged so as to be substantially equal to the step between the surface of the overhanging portion and the outer surface of the edge of the liquid crystal device other than the overhanging portion, With the deformation amount of the elastic conducting member and the elastic support member being substantially the same, power is supplied to the liquid crystal device through a conducting portion that penetrates in the thickness direction of the elastic conducting member and is integrated with the elastic conducting member. And an appearance inspection is performed.
[0014]
In this invention, it is preferable that the said opposing support part is an elastic member facing the said elastic conduction member and the said elastic support member.
[0015]
In the present invention, the elastic conducting member and the elastic support member are provided on a frame-like base having an opening, and the frame-like base is inclined along the inner edge of the opening on the side where the liquid crystal device is viewed. It is preferable that the appearance inspection is performed by visually recognizing through a polarizing plate provided so as to close the opening in which the inclined surface is formed.
[0016]
In the present invention, the contact / separation mechanism includes a linear guide structure for linearly contacting / separating the elastic conducting member, the elastic support member, and the opposing support portion in a contact direction with respect to the liquid crystal panel. Preferably it is.
[0017]
According to the present invention, the contact / separation mechanism is provided with a linear guide structure that contacts and separates the elastic conducting member and the elastic support member from the opposing support portion, so that the elastic conduction member and the elastic support member face the support surface for the liquid crystal panel. Since the support part is configured to move toward and away from the liquid crystal panel in a substantially parallel state, the parallelism between the two support surfaces when the liquid crystal panel is sandwiched is less likely to be distorted, and the parallelism is increased. Since the accuracy can be maintained, the deflection of the liquid crystal panel can be further reduced.
[0018]
In the present invention, it is preferable that the elastic conductive member is formed by integrating an elastic insulating portion and a conductive portion penetrating in the thickness direction. As the elastic insulating portion, a material having appropriate elasticity such as synthetic rubber can be easily obtained, and by integrating the conductive portion therein, an elastic conductive member having desired elastic characteristics can be easily configured. Here, it is preferable that the elastic conducting member or the conducting portion thereof has a conductive anisotropy that conducts only in the thickness direction.
[0019]
In each of the above inventions, it is most desirable that the elastic support member is made of the same member as the elastic conduction member.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
Next, embodiments of a liquid crystal device inspection method and inspection apparatus according to the present invention will be described in detail with reference to the accompanying drawings.
[0021]
FIG. 3 is a schematic cross-sectional view schematically showing the overall configuration of the inspection apparatus of the present embodiment. A lower support plate 11 made of thick glass or the like is horizontally fixed to the housing 10 via a support column 12. The lower support plate 11 has a rectangular opening at the center, and the lower support 13 is fixed to the opening edge. An upper support plate 14 made of thick glass or the like is horizontally disposed above the lower support plate 11, and the upper support plate 14 is parallel to the lower support plate 11 by a support beam 15 made of hard metal or the like. It is fixed to the driven member 17 in a posture. The upper support plate 14 also has a rectangular opening at the center, and the upper support 16 is fixed to the opening edge. The lower support 13 and the upper support 16 are for sandwiching and fixing the liquid crystal panel from above and below.
[0022]
The driven member 17 is fixed to a bearing member 18, and the bearing member 18 is guided by a vertically extending guide shaft 19 and is slidable up and down. The bearing member 18 is always urged upward by an elastic member 21 such as a coil spring inserted through the guide shaft 19. The drive shaft 22 is rotatably attached to the housing 10 in a horizontal posture, and is connected to the driven member 17 via links 23 and 24. An operation arm (not shown) is connected to the drive shaft 22, and the drive shaft 22 can be rotated clockwise in the drawing by rotating the operation arm. When the drive shaft 22 rotates, the driven member 17 moves downward via the links 23 and 24. The drive force transmission mechanism of the drive shaft 22, the links 23 and 24, and the driven member 17 includes an elastic member made of a torsion spring or the like so that a drive force exceeding a predetermined stress is not transmitted to the driven member 17. Yes. The upper support plate 14 and the upper support body 16 are configured to move linearly up and down while being always parallel to the lower support plate 11 and the lower support body 13.
[0023]
Next, with reference to FIG.1 and FIG.2, the detailed structure of the said lower side support body 13 and the upper side support body 16 is demonstrated. FIG. 1 is an enlarged cross-sectional view showing a portion for holding a liquid crystal panel in the inspection apparatus according to the present embodiment together with the liquid crystal panel. FIG. 2 shows a liquid crystal panel to be inspected by using the inspection apparatus according to the present embodiment, It is a schematic perspective view which shows the structure of the upper side support body and lower side support body which do.
[0024]
In the lower support 13, a frame-shaped base 131 formed in a rectangular frame shape, and an elastic support member made of synthetic rubber or the like attached to each of three side portions of the frame-shaped base 131 by a method such as adhesive fixing 132, a wiring board 133 made of a circuit board or the like attached to the remaining one side portion of the frame-shaped base 131, and an elastic conductive member 134 attached to the surface of the wiring board 133 by a method such as adhesive fixing It has. As shown in FIG. 4 (a), in the elastic conducting member 134 in this embodiment, a conducting portion 134a penetrating in the thickness direction (vertical direction in the figure) is integrated inside an elastic insulating material such as synthetic rubber. The part 134 a is conductively connected to the wiring 133 a formed on the surface of the wiring board 133. Further, as shown in FIG. 4B, an elastic conductive member 134 ′ in which a conductive portion 134a ′ is integrated with the side surface of the elastic insulating material may be used.
[0025]
On the other hand, the upper support 16 also includes a frame-shaped base 161 formed in a rectangular frame shape, and synthetic rubber or the like attached to the three side portions of the frame-shaped base 161 by a method such as adhesive fixing. An elastic support member 162, a wiring board 163 made of a circuit board or the like attached to the remaining one side portion of the frame-shaped base 161, and an elastic continuity attached to the surface of the wiring board 163 by a method such as adhesive fixing Member 164. In the elastic conducting member 164, a conducting portion 164a penetrating in the thickness direction (vertical direction in the figure) is integrated inside an elastic insulating material such as synthetic rubber, and the conducting portion 164a is formed on the surface of the wiring board 163. Conductive connection to the wiring that does not. In addition, an inclined surface portion 161 a formed to open upward is formed at the upper inner edge of the frame-shaped base 161.
[0026]
The conducting portions 134a and 164a of the elastic conducting members 134 and 164 are conductive and may be configured to supply predetermined potentials to external terminals of a liquid crystal panel described later. However, in the present embodiment, many thin conductive wires extending in the thickness direction formed so as to penetrate through the elastic insulating material, or many conductive particles dispersed in the elastic insulating material ( In addition to conductive particles such as metal particles, a conductive layer may be formed on the surface of insulating particles by plating or the like.), And functions as having conductivity only in the thickness direction. This is a portion having conductive anisotropy. Thus, even if a plurality of external terminals are arranged at high density on the liquid crystal panel by the conductive portions 134a and 164a having conductive anisotropy, independent potentials are provided for the respective external terminals without requiring precise positioning. Can be supplied via the wiring boards 133 and 163.
[0027]
A plurality of wirings (not shown) formed on the wiring boards 133 and 163 are electrically connected to the external terminals 101b and 102b, respectively, and are connected to a separately provided power supply circuit via a connector or the like (not shown). Instead of this, a flexible wiring board or the like may be connected to the wiring boards 133 and 163.
[0028]
Polarizing plates 135 and 165 are attached to the frame-shaped bases 131 and 161 so as to close the openings inside thereof. These polarizing plates 135 and 165 are the same as the polarizing plates to be attached to the upper and lower outer surfaces of the liquid crystal panel 100 in a later step, and the display of the liquid crystal device in which the polarizing plates are attached to the liquid crystal panel 100. In order to know the characteristics, it is arranged on the device side.
[0029]
In the liquid crystal panel 100 shown in the present embodiment, two transparent substrates 101 and 102 made of glass or the like are bonded together by a sealing material 103, and liquid crystal is injected inside the sealing material 103 and sealed. In this liquid crystal panel 100, an overhanging portion 101 a in which the transparent substrate 101 projects outward from the outer edge of the transparent substrate 102, and an overhanging portion 102 a in which the transparent substrate 102 projects outward from the outer edge of the transparent substrate 101. It has. A plurality of wirings connected to the pixel electrodes are drawn out from the display area inside the sealing material 103 on the surfaces of these overhanging portions 101a and 102a, respectively, and the leading ends thereof are external terminals 101b and 102b. A plurality are arranged.
[0030]
In the present embodiment, the elastic support member 132 and the elastic conductive member 134 are configured to have the same thickness in both the lower support 13 and the upper support 16. Similarly, the elastic support member 162 and the elastic conductive member 164 are configured to have the same thickness. Furthermore, the amount of deviation in the thickness direction (the vertical direction in the figure) between the upper surface of the elastic support member 132 and the upper surface of the elastic conduction member 134 is the outer surface of the transparent substrate 102 of the liquid crystal panel 100 (the lower side of the liquid crystal panel in the figure). Surface) and the surface of the overhanging portion 101a (that is, the thickness of the transparent substrate 102 if the cell thickness of the liquid crystal panel is negligible). The amount of displacement in the thickness direction (vertical direction in the figure) between the lower surface of the conductive member 164 is between the outer surface of the transparent substrate 101 (the upper surface in the liquid crystal panel in the figure) of the liquid crystal panel 100 and the surface of the protruding portion 102a. (That is, the thickness of the transparent substrate 101 if the cell thickness is negligible).
[0031]
Referring to FIG. 1, the above-described relationship is specifically described for the lower support 13. Both the elastic conducting member 134 and the elastic support member 132 have the same thickness h, and the cross section thereof is also It is comprised so that it may become the completely same dimension. Further, a step d shown in the figure is provided between the height of the support surface for the elastic support member 132 in the frame-shaped base 131 and the height of the support surface for the elastic conduction member 134 in the wiring board 133. The transparent substrate 102 of the liquid crystal panel 100 is configured to be approximately equal in thickness. Here, since the cell thickness of the liquid crystal panel 100 is at most 5 to 10 μm, it can be ignored as compared with the thickness of the transparent substrate 102 (for example, 300 to 1200 μm). Such a configuration is exactly the same for the elastic conduction member 164 and the elastic support member 162 of the upper support 16.
[0032]
Next, a method for performing a lighting inspection of the liquid crystal panel 100 using the inspection apparatus described above will be described. First, the liquid crystal panel 100 is arranged such that the outer surface of the panel edge (the outer surface of the transparent substrate 102) is in contact with the upper surface of the elastic support member 132 and the surface of the protruding portion 101a is in contact with the upper surface of the elastic conductive member 134. To be placed on the lower support 13. Next, by operating an operation arm (not shown), the drive shaft 22 shown in FIG. 3 is rotated in the clockwise direction in the drawing, and the driven member 17 is lowered along the guide shaft 18 to be placed on the lower support 13. The upper support 16 is brought into contact with the liquid crystal panel 100 placed from above. At this time, in the upper support 16, the lower surface of the elastic support member 162 abuts on the panel edge outer surface (the outer surface of the transparent substrate 101) of the liquid crystal panel 100, and the lower surface of the elastic conductive portion 164 is the tension of the liquid crystal panel 100. It contacts the surface of the protruding portion 102a.
[0033]
As described above, the liquid crystal panel 100 is sandwiched between the lower support 13 and the upper support 16 from above and below. At this time, the external terminals 101b and 102b formed on the surfaces of the projecting portions 101a and 102a are brought into pressure contact with the elastic conducting members 134 and 164, and are not shown through the conducting portions 134a and 164a and the wiring boards 133 and 163. A predetermined potential is supplied from the power supply circuit. As a result, each pixel in the display area of the liquid crystal panel 100 is in a predetermined state (for example, a lighting state). In this state, the display state of the liquid crystal panel is visually recognized through the polarizing plates 135 and 165 disposed above and below. Will be able to.
[0034]
In this case, as shown in FIG. 1, the light source A is arranged at one of the lower position of the lower support 13 and the upper position of the upper support 16, and the imaging means such as a camera and the microscope B are arranged on the other. Or inspecting the display area of the liquid crystal panel 100 by visually observing with the naked eye from the other side. Here, an inclined surface portion 161 a formed so as to open upward is formed on the upper inner edge of the frame-shaped base 161 of the upper support 16, so that the peripheral portion of the display area is hidden by the upper support 16. It is configured to be difficult. Therefore, observing the display area of the liquid crystal panel from above the upper support 16 can reduce oversight at the time of observation, and the entire display area can be observed even from obliquely above. Therefore, the appearance inspection can be easily performed.
[0035]
Since the liquid crystal panel 100 is entirely supported by an elastic member such as synthetic rubber at the outer edge and is sandwiched from above and below, the liquid crystal panel 100 is less likely to be distorted, and the liquid crystal panel 100 is caused by the support state of the liquid crystal panel 100. Color unevenness caused by distortion can be reduced. Accordingly, it is possible to reliably observe display defects and color unevenness caused by the liquid crystal panel itself in the appearance inspection without being disturbed. In particular, even if the peripheral portion of the display area and the width of the projecting portions 101a and 102a in the liquid crystal panel 100, in particular, the outer area of the sealing material 103 is extremely narrow, the lower side is held by the elastic member from above and below. Since it is less affected by the distortion and unevenness of the support 13 and the upper support 16, the deflection of the liquid crystal panel 100 can be reduced.
[0036]
In the present embodiment, the elastic support members 132 and 162 and the elastic conductive members 134 and 164 are configured by a material having substantially the same elastic characteristics (for example, a synthetic rubber having the same composition as a base material). ing. As a result, the stress distribution of the narrow pressure applied to the liquid crystal panel 100 from above and below can be made substantially uniform over the entire circumference of the outer edge of the liquid crystal panel 100, so that the deflection caused by the support state of the liquid crystal panel 100 can be further increased. Can be reduced. In this embodiment, the elastic support member is composed of, for example, an elastic insulating material made entirely of synthetic rubber or the like, and the elastic conductive member has the conductive portion as described above, but the elastic support member is completely different from the elastic conductive member. The same material may be used, and in this case, both elastic properties can be made completely the same.
[0037]
Further, in order to absorb the step between the outer surface of the liquid crystal panel 100 and the surface of the projecting portions 101a and 102a, the elastic support members 132 and 162 and the elastic conductive members 134 and 164 are formed to have substantially the same thickness. The abutting direction (vertical direction in the figure) between the surface of the frame-like bases 131 and 161 that is the mounting surface for the elastic support members 132 and 162 and the surface of the wiring boards 133 and 163 that are the mounting surfaces for the elastic conducting members 134 and 164 ) Is provided with a step (that is, offset). Accordingly, since the deformation amount of the elastic support member and the elastic conductive member caused by contacting the liquid crystal panel can be made substantially the same, the pressure applied to the liquid crystal panel 100 can be more uniformly distributed, and the liquid crystal panel 100 It has succeeded in further reducing the deflection of.
[0038]
In this embodiment, the lower support 13 and the upper support 16 are always kept parallel, and the lower support 13 and the upper support 16 are linearly contacted and separated from each other. The guide shaft 19 constitutes a linear guide structure. Therefore, unlike the mechanism that is contacted / separated by rotating like an open / close lid connected by hinge joining, in the contact / separation mechanism of this embodiment, the parallelism of both greatly varies depending on the distance in the contact / separation direction. Therefore, even if the narrow pressure on the liquid crystal panel changes, the fluctuation in the distribution of the applied pressure received by the liquid crystal panel is reduced, and it is easy to improve the parallel accuracy itself between the opposing clamping surfaces when the liquid crystal panel is held As a result, the pressure applied to the liquid crystal panel 100 can be made more uniform, and the bending of the liquid crystal panel 100 during inspection can be further reduced.
[0039]
The inspection apparatus of the present invention is not limited to the above-described illustrated examples, and it is needless to say that various modifications can be made without departing from the gist of the present invention. For example, in the above embodiment, the elastic support member and the elastic conductive member are attached to the integral frame-shaped base, but the frame-shaped base does not have to be integrally formed, and the upper and lower sides are not provided without providing the frame-shaped base. An elastic support member, an elastic conduction member, or the like may be directly attached to the support plates 11 and 14.
[0040]
【The invention's effect】
As described above, according to the present invention, both the elastic conducting member that contacts the surface of the overhanging portion and the elastic support member that contacts the outer surface of the edge of the liquid crystal panel other than the overhanging portion have elasticity. In addition to being able to reduce the effects of unevenness and deflection on the abutment surface of these members against the panel, both have substantially the same elastic characteristics (that is, characteristics related to the correlation between the amount of elastic deformation and the elastic force). ), The difference between the pressure received from the elastic conductive member of the supported liquid crystal panel and the pressure received from the elastic support member is reduced, so that the deflection of the liquid crystal panel can be reduced and the appearance is more accurate. Inspection can be performed.
[Brief description of the drawings]
FIG. 1 is an enlarged cross-sectional view showing a main part of a support structure for a liquid crystal panel in an embodiment of an inspection method and an inspection apparatus for a liquid crystal device according to the present invention.
FIG. 2 is a perspective view showing a support structure in the same embodiment.
FIG. 3 is a schematic cross-sectional view showing the overall configuration of the inspection apparatus of the embodiment.
FIGS. 4A and 4B are enlarged sectional views (a) and (b) showing the structure of an elastic conducting member used in the inspection apparatus of the embodiment.
[Explanation of symbols]
10 Housing
11 Lower support plate
13 Lower support
14 Upper support plate
16 Upper support
17 Follower
18 Bearing members
19 Guide shaft
131,161 frame base
132,162 Elastic support member
133,163 Wiring board
134,164 Elastic conducting member
135,165 Polarizing plate

Claims

Two substrates are bonded together, and at least one of the substrates has an overhanging portion that protrudes outward from the outer edge of the other substrate, and an external terminal is formed on the surface of the overhanging portion An inspection method for a liquid crystal device,
An elastic conductive member is brought into contact with the surface of the overhanging portion from the other substrate side of the liquid crystal device to ensure conduction with the external terminal, and the liquid crystal other than the overhanging portion from the same side. The outer peripheral surface of the device has substantially the same elastic characteristics and substantially the same thickness as the elastic conducting member, and the amount of displacement from the elastic conducting member in the contact direction with respect to the liquid crystal device is An elastic support member disposed so as to be substantially equal to a step between the surface of the liquid crystal device and the outer surface of the edge of the liquid crystal device other than the overhanging portion,
The liquid crystal device is sandwiched between the elastic conduction member and the elastic support member, and an opposing support portion that comes into contact with one of the substrates,
With the deformation amount of the elastic conducting member and the elastic support member being substantially the same, power is supplied to the liquid crystal device through a conducting portion that penetrates in the thickness direction of the elastic conducting member and is integrated with the elastic conducting member. And inspecting the appearance of the liquid crystal device.

2. The method for inspecting a liquid crystal device according to claim 1, wherein the opposing support portion is an elastic member facing the elastic conduction member and the elastic support member.

3. The elastic conduction member and the elastic support member according to claim 1, wherein the elastic conductive member and the elastic support member are provided on a frame-shaped base having an opening, and the opening of the frame-shaped base on the side where the liquid crystal device is visually recognized. An inclined surface is formed along the inner edge,
The method for inspecting a liquid crystal device, wherein the appearance inspection is performed by visually recognizing through a polarizing plate provided so as to close the opening portion in which the inclined surface is formed.

Two substrates are bonded together, and at least one of the substrates has an overhanging portion that protrudes outward from the outer edge of the other substrate, and an external terminal is formed on the surface of the overhanging portion An inspection apparatus for a liquid crystal device,
An elastic conductive member configured to be able to contact the surface of the projecting portion from the other substrate side of the liquid crystal device to ensure electrical connection with the external terminal;
An elastic support member configured to be able to come into contact with the outer surface of the edge of the liquid crystal device other than the overhanging portion from the other substrate side, and having substantially the same elastic characteristics and substantially the same thickness as the elastic conductive member;
A contact / separation mechanism for enabling the liquid crystal device to be sandwiched between the elastic conduction member, the elastic support member, and an opposing support portion facing them;
The elastic support member has a displacement amount with respect to the elastic conductive member in a contact direction with respect to the liquid crystal device, and is substantially equal to a step between the surface of the overhanging portion and the outer surface of the edge of the liquid crystal device other than the overhanging portion. Are arranged to be equal,
With the deformation amount of the elastic conducting member and the elastic support member being substantially the same, power is supplied to the liquid crystal device through a conducting portion that penetrates in the thickness direction of the elastic conducting member and is integrated with the elastic conducting member. And an inspection device for a liquid crystal device, wherein the inspection device is configured to perform an appearance inspection.

5. The inspection apparatus for a liquid crystal device according to claim 4, wherein the opposing support portion is an elastic member facing the elastic conduction member and the elastic support member.

6. The elastic conducting member and the elastic support member according to claim 4 or 5, wherein the elastic conducting member and the elastic support member are provided on a frame-shaped base having an opening, and the opening of the frame-shaped base on the side where the liquid crystal device is visually recognized. An inclined surface is formed along the inner edge,
The liquid crystal device inspection apparatus, wherein the appearance inspection is performed by visually recognizing through a polarizing plate provided so as to close the opening portion in which the inclined surface is formed.

7. The contact / separation mechanism according to claim 4, wherein the contact / separation mechanism contacts and separates the elastic conduction member, the elastic support member, and the opposing support portion in a contact direction with respect to the liquid crystal panel. An inspection apparatus for a liquid crystal device, comprising: a linear guide structure.

8. The liquid crystal device according to claim 4, wherein the elastic conductive member is formed by integrating an elastic insulating portion and a conductive portion penetrating in a thickness direction. Inspection device.

A method for manufacturing a liquid crystal device, comprising the method for inspecting a liquid crystal device according to claim 1.