JP3808680B2 - Stack for flat semiconductor devices - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a stack for a flat semiconductor element.
[0002]
[Prior art]
Semiconductor conversion devices tend to have larger capacities (higher voltages), and accordingly, a large number of flat semiconductor elements have been used. A semiconductor conversion device includes a plurality of flat semiconductor elements and heat-sinks for cooling the flat semiconductor elements, which are alternately stacked, a pressurizing mechanism for applying an elastic pressing force, and a frame for supporting them. A large number of flat semiconductor element stacks constituted by the above are used as circuit components of a semiconductor conversion device.
[0003]
For example, as shown in FIG. 19, the flat semiconductor element stack includes at least one of the stacked bodies 105 in which the flat semiconductor elements 101 and the heat sink 103 for cooling are alternately stacked, and the stacked body 105 along the stacking direction. An urging spring 107 for applying pressure is provided. On the other hand, they are structured to be fixedly held by upper and lower pressure supports 109 and 111 and a stud bolt 113 constituting the frame.
[0004]
[Problems to be solved by the invention]
There are two methods for applying a pressing force to the stacked body 105 in the flat semiconductor element stack thus configured. One of the upper and lower nuts 115 and 117 screwed to the stud bolt 113 is loosened, and the lower nut 117 is loosened, and a predetermined pressurizing force F is applied to the upper support 109 by a press machine (not shown). In addition, in this state, the upper nut 115 is fastened and fixed, and a predetermined pressing force can be applied by removing the press machine. The other is to loosen the lower nut 117 and directly pressurize the upper nut 115 with a specified tightening torque, but the flat semiconductor element stack is applied with a high load of several tons. Use with pressure.
[0005]
If the applied pressure is insufficient, the contact resistance increases and the amount of heat generation increases. On the other hand, if the applied pressure is excessive, an optimum applied pressure is required, for example, the performance of the element may be lowered.
[0006]
Conventionally, the applied pressure is confirmed by measuring the tightening torque of the bolt and the amount of displacement of the spring. However, since the measurement equipment is used for the measurement, the measurement work is troublesome, and the applied pressure after a certain time has passed. When regularly checking, the measurement is performed using a measuring device, which makes it difficult to maintain the pressure.
[0007]
In particular, in recent years, flat semiconductor elements have increased in diameter with increasing capacity, and the applied pressure has increased by the square of the diameter. There is a growing demand for visual confirmation.
[0008]
Accordingly, the present invention has been made in view of the above, and an object of the present invention is to provide a flat semiconductor element stack in which pressure can be reliably applied and the applied pressure can be directly visually confirmed.
[0009]
[Means for Solving the Problems]
In order to achieve the above object, according to claim 1 of the present invention, at least one of the pressure supports supporting both ends of a laminate in which flat semiconductor elements and heat sinks are alternately laminated is pressurized. It has a pressurizing means for pressurizing the stacking direction of the laminate through a rotary body rotating about an axis, and a pressure display means for displaying the pressure in the laminating direction by the pressing means The pressing force in the stacking direction by the pressurizing means is based on a combination scale by a first pressurizing scale engraved along the laminating direction and a second pressurizing scale engraved along the outer periphery of the rotating body . It is displayed .
[0010]
Thus, pressure in the lamination direction by the pressing means, the first pressure graduations engraved on the stacking direction, for example, displays the pressure of tonnes. Moreover, it becomes possible to display kg unit by the 2nd pressurization scale carved in the rotary body, and the value of the pressurizing force to kg unit can be confirmed directly visually.
[0011]
In addition, it is possible to check the pressurization force periodically by eyes.
[0012]
According to claim 2 of the present invention, the pressure display means includes the upper pressing body having the first pressure scale directly pressed by the pressing means, and the movement of the upper pressing body in the pressing direction. A lower pressing body that transmits to the laminate through the biasing member, and a lower pressing body that is movable in the compression direction of the biasing member and supports the lower pressing body to prevent movement in the biasing direction, and the screw of the upper pressing body It is comprised with the rotary body which has a 2nd pressurization scale threadably screwed by the part.
[0013]
Thereby, the pressure display means that can directly check the pressure applied by the eyes is such that the rotating body and the upper pressing body are integrated with each other by screwing the rotating body into the screw portion of the upper pressing body. It becomes a unit structure in which the urging member and the lower pressing body are incorporated inside. Therefore, the assembly is facilitated, and the part management man-hour is very preferable.
[0014]
According to a third aspect of the present invention, the pressing force display means includes an upper pressing body having a first pressing scale fixedly supported by the pressing support body, and the upper pressing body includes the urging member. The lower pressing body to be sandwiched and the urging member can be moved in the compression direction, and the lower pressing body is supported so as to prevent movement in the urging direction, and the screw portion of the upper pressing body is rotatably screwed. A rotating body having a combined second pressure scale, and a pressure bolt that penetrates the upper pressing body and the urging member and is screwed to the lower pressing body so that a front end portion for pressing the laminated body protrudes. To do.
[0015]
Accordingly, the pressure display means that can directly check the pressure applied by the eyes can be formed into a unit structure, and the laminate can be reliably pressurized by rotating the pressure bolt.
[0016]
According to the fourth aspect of the present invention, the pressure display means includes the upper pressing body having the first pressure scale directly pressed by the pressing means, and the movement of the upper pressing body in the pressing direction. A lower pressing body that transmits to the laminated body through the biasing member, and the upper pressing body that can move the biasing member in the compression direction and prevent the movement in the biasing direction, and the lower pressing body And a rotating body having a second pressure scale that is rotatably engaged with the threaded portion, and a pleated insulating spacer that is in contact with the laminated body and is integrally fitted and fixed to the lower pressing body. To do.
[0017]
Thereby, since the pressure display means for directly confirming the pressure with the eyes can be provided in the unit with the insulating spacer, the assembling work is facilitated. Moreover, the creeping distance of the surface that becomes the insulating surface is increased by the pleats, and more reliable insulation can be expected.
[0018]
According to claim 5 of the present invention, both ends of a laminate in which flat semiconductor elements and heat sinks are alternately laminated are supported by pressure supports that are fixedly supported by stud bolts. At least one of the upper support plate and the lower support plate is formed, and is supported by a pressure nut that is supported between the upper support plate and the lower support plate by penetrating the stud bolt and screwed into the thread portion of the stud bolt. A pressure display means to which pressure is applied is arranged, the pressure display means includes an upper pressing body having a first pressure scale that contacts the upper support plate, a lower pressing body that contacts the lower support plate, and An urging member that is provided between the upper pressing body and the lower pressing body and applies an urging force to the upper pressing body and the lower pressing body, and the urging member can be moved in the compression direction, and can be moved in the urging direction. Support the lower pressing body to prevent To together, one consisting of a rotating body having a second pressure graduations engaged rotatably with the threaded portion of the upper pressing member, the lower support plate is provided with a pressurized 圧突 force of the stack pressurization.
[0019]
As a result, by tightening the stud nut of the stud bolt, the lower support plate descends and pressurizes the laminate through the pressure display means, the lower support plate, and the pressurization protrusion. Can be directly achieved, and a reliable and stable mounting state of the pressure display means can be obtained.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings of FIGS.
[0021]
In FIG. 1, reference numeral 1 denotes a stack of flat semiconductor element stacks 3, and 5 denotes a frame.
[0022]
The frame 5 includes a pair of upper and lower plate-like pressure supports 7 and 9, and a pair of left and right stud bolts 11 and 11 that couple the pressure supports 7 and the pressure supports 9. The threaded portions 11a at the upper and lower ends penetrate the pressure supports 7 and 9. A pair of pressure nuts 13 and 15 are respectively screwed into the threaded portion 11a so as to sandwich the pressure supports 7 and 9 from above and below.
[0023]
The stud bolts 11 may be arranged at four locations on the pressure supports 7 and 9.
[0024]
The laminated body 1 is formed by alternately laminating flat semiconductor elements 17 and heat sinks 19 for cooling the flat semiconductor elements 17, conductors 21 serving as electric circuit connection terminals at both ends thereof, and insulating spacers 23 outside the conductors 21. Are arranged respectively. One insulating spacer 23 on the lower side is supported by the lower pressure support 9, and the other insulating spacer 23 on the upper side is a pressure bolt 25 screwed on the upper pressure support 7. It is supported via a pressure display means 27 to which pressure is applied by the pressure bolt 25.
[0025]
As shown in FIG. 2, the pressure display means 27 includes upper and lower upper pressing bodies 29 and lower pressing bodies 31, and an urging member 33 that is disposed between the upper pressing bodies 29 and the lower pressing bodies 31 and applies an urging force, A unit is constituted by the rotating body 35 screwed into the threaded portion 29 a of the upper pressing body 29.
[0026]
The upper pressing body 29 is provided with a spherical concave portion 37 having an automatic centering action so that when the pressing force is applied to the central portion of the upper surface, the pressing force is applied toward the central portion. The tip portion 39 of this is acting.
[0027]
The lower pressing body 41 is disposed inside the rotating body 35 together with the urging member 33, has a flange portion 31 on the outer periphery, and the flange portion 41 is supported by the bottom of the rotating body 35 provided with the opening hole 45. Yes. A spherical convex portion 47 is provided at a lower central portion of the lower pressing body 31, and the spherical convex portion 47 projects downward from the opening hole 45 of the rotating body 35 and is in contact with the upper surface of the insulating spacer 23. .
[0028]
The urging member 33 is a disc spring made of a spring material that is compressed by a pressing force in tons, and one end is in contact with the upper pressing body 29 and the other end is in contact with the lower pressing body 31. In this case, the biasing member 33 may be a coil spring instead of a disc spring. Further, by using stainless steel or the like as a material, it becomes a spring having corrosion resistance, and since it is a non-magnetic material, overheating due to electromagnetic induction hardly occurs.
[0029]
The rotating body 35 includes a cylindrical portion 35a and a bottom portion 35b that are open at the top, and the opening hole 45 is provided in the bottom portion 35b. A screw portion is provided on the inner side of the cylindrical portion 35a on the upper open side, and is screwed with a screw portion 25a provided on the outer periphery of the upper pressing body 29.
[0030]
In the pressure bolt 25, the head 49 protrudes upward from the pressure support 7, the screw portion 51 is screwed into the screw hole 53 of the pressure support 7, and the tip 39 is downward from the pressure support 7. It protrudes and acts on the concave portion 37 of the upper pressing body 7.
[0031]
On the other hand, the upper pressing body 29 is provided with a first pressure scale 55, and the rotating body 35 is provided with a second pressure scale 57.
[0032]
The first pressurization scale 55 is provided so as to be orthogonal to the pressurization direction (arrow in FIG. 1).
[0033]
The second pressure scale 57 is provided along the outer peripheral surface of the rotating body 35 in parallel with the pressure direction. In this embodiment, the urging member 33 is compressed by screwing the pressure bolt 25 downward, and a gap G is formed between the flange portion 41 and the bottom portion 35b. If it is measured how many mm the gap G is, the applied pressure is obtained from the applied pressure-displacement characteristic of the urging member 33 as spring displacement = gap.
[0034]
Specifically, the rotating body 35 is rotated by hand, and the amount by which the rotating body 35 is screwed according to the screw pitch of the screw portion 29a is displayed as a displacement in the rotation direction. The increase in applied pressure for each rotation is graduated on the upper pressing body 29. Moreover, the pressurizing force can be measured finely by displaying the increment of the pressurizing force in one rotation as a scale of the rotating body 35.
[0035]
For example, in the case of the urging member 33 that is displaced by 1 mm per ton, when the pitch of the threaded portion of the rotating body 35 is 1 mm, a scale for several tons is provided with the scale of the upper pressing body 29 as 1 mm intervals. As shown in FIG. 4, the rotary body 35 displays a scale of 250 kg at intervals of 45 degrees. FIG. 5 shows the relationship between the amount of displacement up to 0.5 mm, the rotation angle, and the applied pressure at this time.
[0036]
Therefore, when the biasing member 33 is compressed by 0.5 mm, for example, a gap G is formed. Therefore, when the biasing member 33 is rotated until the gap G becomes zero, the rotation angle of the rotating body 35 is 180 degrees and the applied pressure is 500 kg. It will be. Similarly, when the compression is 0.1 mm, the rotating body 35 rotates 36 degrees and the applied pressure becomes 50 kg.
[0037]
For this reason, for example, when it is compressed by 1.5 mm, a pressing force of 1 ton and 500 kg is obtained, and it is possible to accurately confirm to the kg unit.
[0038]
In this case, a color bar display may indicate that the pressure is within a specified pressure range.
[0039]
Thus, according to the flat type semiconductor device stack 3 configured, by the operation of the fixing bolt 25 and the rotor 35, it may be added a predetermined pressure against the laminate 1. The pressurizing force at this time can be confirmed directly to the kg unit by looking at the first pressurization scale 55 and the second pressurization scale 57 of the pressurization display means 27. Further, the confirmation work after the elapse of a predetermined time can be easily performed only by looking at the pressure scales 55 and 57, and the troublesomeness is eliminated.
[0040]
On the other hand, since the pressure display means 27 has an integral unit structure, it can be easily assembled and has the advantage that the number of parts can be reduced.
[0041]
The rotating body 35 is preferably made of a material having the same coefficient of thermal expansion as the spring material of the urging member 33.
[0042]
As a result, even if the thermal expansion or contraction of the biasing member 33 occurs due to the heat generation of the flat semiconductor element 17 or the temperature change due to the use environment, the rotating body 35 also expands and contracts in the same manner, and therefore is affected by the temperature change. And an accurate display of the pressure scale 57 is obtained.
[0043]
FIG. 6 shows a second embodiment.
[0044]
That is, two pressure bolts 25 are additionally disposed on the left and right sides of the pressure bolt 25 outside the center pressure bolt 25, and the tip 39 of each pressure bolt 25 is placed on the upper surface of the upper pressing body 29. It acts on. In this case, it is desirable to provide a spherical recess 37 on the upper surface of the upper pressing body 29 on which the tip 39 of each pressure bolt 25 acts.
[0045]
Since other components are the same as those in the first embodiment, the same reference numerals are used and detailed description thereof is omitted.
[0046]
Therefore, according to the second embodiment, since it is possible to directly confirm the applied pressure with the eyes, since the pressure is applied with the three pressure bolts 25, it is possible to reduce the pressure sharing per one. Manual pressurization becomes easy. In addition, a large pressing force can be applied.
[0047]
FIG. 7 shows a third embodiment.
[0048]
That is, the first pressure scale 55 and the second pressure scale 57 are provided on the detachable scale plate 61 so that the mounting position can be freely changed by the mounting screw 59.
[0049]
Since other components are the same as those in the first embodiment, the same reference numerals are used and detailed description thereof is omitted.
[0050]
Therefore, according to the third embodiment, in accordance with the spring characteristics of the biasing member 33 to be used, the scale plate 61 and the second pressure scale 57 graduated from the first pressure scale 55 when no load is applied. Since the scale plate 61 calibrated can be adjusted to the zero point correctly, the applied pressure can be measured accurately. In this case, the same effect can be obtained by adhering the scale plate 61 or attaching a seal printed with the scale.
[0051]
8 and 9 show a fourth embodiment.
[0052]
That is, a plurality of urging members 33 arranged between the upper pressing body 29 and the lower pressing body 31 are arranged in a triangular shape in this embodiment, while three portions of the lower pressing body 31 corresponding to the urging member 33 are arranged. The structure is such that three spherical convex portions 63 are arranged on the lower surface.
[0053]
Since other components are the same as those in the first embodiment, the same reference numerals are used and detailed description thereof is omitted.
[0054]
Therefore, according to the fourth embodiment, it is possible to make the pressure distribution of the laminate 1 uniform over the entire region.
[0055]
10 and 11 show the fifth embodiment.
[0056]
In other words, the upper pressing body 29 is fixedly supported to the upper pressure support body 7 by the fixing bolt 65, while the pressurizing bolt 25 is connected to the upper pressure support body 7, the upper pressing body 37, and the biasing member 33. It penetrates with play, and the screw part 51 is screwed into the screw hole 65 of the lower pressing body 31. In this structure, the tip 39 of the pressure bolt 25 protruding downward from the lower pressing body 31 is applied to the upper surface of the insulating spacer 23.
[0057]
Since other components are the same as those in the first embodiment, the same reference numerals are used and detailed description thereof is omitted.
[0058]
Therefore, according to the fifth embodiment, it is a matter of course that the pressurizing force can be directly confirmed by eyes, and since the upper pressing body 37 is directly fixedly supported by the upper pressure support body 7, the pressurizing display means 27. It is possible to ensure a reliable support state. Thereby, for example, even when used in a horizontal direction, a stable pressure can be obtained.
[0059]
In this case, as shown in FIGS. 12 and 13, the urging member 33 and the pressure bolt 25 are arranged in three triangular positions, and the tip 39 of the pressure bolt 25 protruding downward from the lower pressing body 31 is While acting on the upper surface of the pressurizing body 67, the spherical convex portion 69 provided on the lower surface of the pressurizing body 67 is configured to act on the central portion of the upper surface of the insulating spacer 23.
[0060]
The tip 39 of the pressure bolt 25 may be directly applied to the upper surface of the insulating spacer 23 without using the pressure body 67.
[0061]
Thereby, in addition to the said effect, since the pressure share per one decreases, the pressurization by manual operation becomes easy and a big pressurization can be applied.
[0062]
FIG. 14 shows a sixth embodiment.
[0063]
That is, the upper pressing member 71 is provided with a flange portion 73 on the outer periphery and the upper half portion provided with a spherical concave portion 74 on the upper surface protrudes upward from the opening 76 of the rotating body 75, while the inner screw of the rotating body 75. The portion is screwed into the screw portion 78 of the lower pressing body 77. An urging member 79 made of a disc spring is disposed between the upper pressing body 71 and the lower pressing body 77. The bottom portion of the lower pressing body 77 is integrally fitted with an insulating spacer 83 provided with pleats 81 so that the pressure display means 27 has a single unit structure.
[0064]
Since other components are the same as those in the first embodiment, the same reference numerals are used and detailed description thereof is omitted.
[0065]
Therefore, according to the sixth embodiment, it is obvious that the pressure can be directly confirmed by the eye. Of course, the insulating spacer 83 and the pressure display means 27 can be integrated into a single unit structure. This is also very preferable in terms of man-hours.
[0066]
In addition, the crease 81 increases the creepage distance of the surface that becomes the insulating surface, and reliable insulation can be expected.
[0067]
FIG. 15 shows a seventh embodiment.
[0068]
In other words, a pressure member 89 having a flange portion 87 faces the opening hole 85 of the upper pressure support member 7 from above, and a predetermined gap is provided between the flange portion 87 and the pressure support member 7. The mounting bolt 90 can be moved forward and backward.
[0069]
The pressure member 89 is screwed with the threaded portion 51 of the pressure nut 25, and the tip 39 protruding downward from the pressure member 89 acts on the central portion of the upper surface of the upper pressing body 29.
[0070]
Since other components are the same as those in the first embodiment, the same reference numerals are used and detailed description thereof is omitted.
[0071]
Therefore, according to the seventh embodiment, it is possible to directly confirm the applied pressure visually with the applied pressure display means 27, and it is possible to pressurize with the pressurizing bolt 25 and the outer mounting bolt 90. Pressure can be applied. Moreover, since the load sharing of the bolt per one can be small, the pressurization by manual operation can be easily performed.
[0072]
FIG. 16 shows an eighth embodiment.
[0073]
In other words, the pressure rod 92 having the flange portion 91 faces the opening hole 85 of the upper pressure support body 7, and a plurality of gaps are provided between the flange portion 91 and the pressure support body 7. The mounting bolt 93 is attached so as to freely advance and retract.
[0074]
The tip of the pressure rod 92 has a structure that passes through the opening hole 85 and acts on the central portion of the upper surface of the upper pressing body 29.
[0075]
Since other components are the same as those in the first embodiment, the same reference numerals are used and detailed description thereof is omitted.
[0076]
Therefore, according to the eighth embodiment, the pressurizing rod 92 is lowered and the upper pressing body 29 is lowered by tightening the plurality of mounting bolts 93 as a matter of course that the pressurizing force can be directly confirmed by the pressurizing force display means 27. The laminated body 1 is pressurized via the biasing member 33 and the lower pressing body 31. At this time, since the load applied to the pressurizing rod 92 is shared by the plurality of mounting bolts 93, pressurization by manual operation can be easily performed and a high pressurizing force can be applied.
[0077]
17 and 18 show a ninth embodiment.
[0078]
That is, the upper pressure body 7 is formed by the upper pressure plate 94 and the lower pressure plate 95, and the upper pressing body 29, the urging member 33, the lower pressing body 31, between the upper pressure plate 94 and the lower pressure plate 95, The pressure display means 27 composed of the rotating body 35 is arranged on the left and right. The upper pressing body 29 is in contact with the upper pressing plate 94 and the lower pressing body 31 is in contact with the lower pressing plate 95. A pressure nut 96 is screwed into the threaded portion 11 a of the stud bolt 11 protruding upward from the upper pressure plate 94.
[0079]
On the other hand, on the lower surface of the central portion of the lower pressure plate 95, a pressure protrusion 97 for pressing the laminate formed in a hemispherical shape is provided.
[0080]
Since other components are the same as those in the first embodiment, the same reference numerals are used and detailed description thereof is omitted.
[0081]
Therefore, according to the ninth embodiment, when the pressure nut 96 of the stud bolt 11 is tightened, the lower support plate 94 is lowered, and the pressure display means 27, the lower support plate 95, and the pressure protrusion 97 are interposed. Since the laminated body 1 is pressurized, the applied pressure can be directly confirmed by the eyes, and the pressure display means 27 can be reliably and stably attached.
[0082]
【The invention's effect】
As described above, according to the flat type semiconductor device stack of the present invention, for example, it is possible to reliably pressurizing the laminate from tonnes to kg units, to confirm directly the pressure in the eye be able to. Moreover, it can pressurize easily by manual operation.
[Brief description of the drawings]
FIG. 1 is a schematic explanatory diagram of an entire stack for flat semiconductor elements according to the present invention.
FIG. 2 is a schematic sectional view of a pressure display means.
FIG. 3 is an operation diagram of a pressure display means.
FIG. 4 is an explanatory diagram of a second pressure scale.
FIG. 5 is an explanatory diagram showing a rotation angle and a pressing force with respect to a displacement amount.
FIG. 6 is a schematic explanatory diagram of a main part of a stack for a flat semiconductor element showing a second embodiment.
FIG. 7 is a schematic explanatory diagram of a main part of a stack for a flat semiconductor element according to a third embodiment.
FIG. 8 is a schematic plan view of a pressure display means of a flat semiconductor element stack showing a fourth embodiment.
9 is a schematic cut-away view of the main part of FIG.
FIG. 10 is a schematic plan view of a main part of a stack for a flat semiconductor element showing a fifth embodiment.
FIG. 11 is a schematic side view of a main part obtained by cutting a part of FIG. 10;
FIG. 12 is a schematic plan view similar to FIG. 10, showing a modification of the fifth embodiment.
13 is a schematic side view of an essential part similar to FIG. 11 showing a modification of the fifth embodiment.
FIG. 14 is a schematic sectional view of a pressure display means showing a sixth embodiment.
FIG. 15 is a schematic side view of a flat semiconductor element stack showing a seventh embodiment;
FIG. 16 is a schematic side view of a flat semiconductor element stack showing an eighth embodiment;
FIG. 17 is a schematic plan view of a flat semiconductor element stack showing a ninth embodiment;
FIG. 18 is a schematic side view of a main part obtained by cutting a part of FIG. 17;
FIG. 19 is a schematic explanatory diagram of an entire stack for a conventional flat semiconductor element.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Laminated body 7, 9 Pressurization support body 17 Flat type semiconductor element 19 Heat sink 25 Pressurization means (pressurization bolt)
27 Pressure display means 55 First pressurization scale 57 Second pressurization scale

Claims (5)

The laminate is laminated in a laminating direction via a rotating body that rotates about a pressure axis on at least one of the pressure supports that support both ends of the laminate in which flat semiconductor elements and heat sinks are alternately laminated. and pressurizing means for pressurizing along, and a pressure display means for displaying the pressure in the laminating direction by the pressurizing means, pressure in the lamination direction by the pressurizing means, along the stacking direction first and pressure scale, the rotator flat semiconductor element stack, characterized in that displayed by combining the scale of the second pressure scale engraved along the outer periphery of the engraved. The pressure display means includes an upper pressing body having a first pressing scale that is directly pressed by the pressing means, and a lower pressing that transmits the movement of the upper pressing body in the pressing direction to the stacked body through the biasing member. The body and the urging member can be moved in the compression direction, and the lower pressing body is supported so as to prevent movement in the urging direction, and the screw is rotatably engaged with the thread portion of the upper pressing body. 2. A stack for a flat semiconductor device according to claim 1, comprising a rotating body having two pressure graduations. The pressure display means includes an upper pressing body having a first pressure scale fixedly supported by the pressing support body, a lower pressing body that sandwiches the biasing member by the upper pressing body, and compression of the biasing member. Rotation having a second pressure scale that is movable in the direction and supports the lower pressing body to prevent movement in the urging direction, and is rotatably screwed into the threaded portion of the upper pressing body. The flat body according to claim 1, comprising a body, and a pressure bolt that penetrates through the upper pressing body and the biasing member, protrudes from the front end of the laminated body, and is screwed into the lower pressing body. Type semiconductor device stack. The pressure display means includes an upper pressing body having a first pressing scale that is directly pressed by the pressing means, and a lower pressing that transmits the movement of the upper pressing body in the pressing direction to the stacked body through the biasing member. The body and the urging member can be moved in the compression direction, and the upper pressing body is supported so as to prevent the movement in the urging direction, and is rotatably engaged with the thread portion of the lower pressing body. 2. A flat mold according to claim 1, comprising: a rotating body having a pressure scale of 2; and a pleated insulating spacer which is brought into contact with the laminated body and in which the lower pressing body is integrally fitted and fixed. Stack for semiconductor devices. Both ends of the laminated body in which flat semiconductor elements and heat sinks are alternately stacked are supported by a pressure support that is fixedly supported by stud bolts, and at least one of the pressure supports is supported by an upper support plate and a lower support. A pressure display means that is formed by a plate, is supported between the upper support plate and the lower support plate by the penetration of the stud bolt, and is applied with a pressure nut screwed into the threaded portion of the stud bolt; The pressure display means is provided between the upper pressing body having the first pressure scale that contacts the upper support plate, the lower pressing body that contacts the lower support plate, and the upper pressing body and the lower pressing body. An urging member for applying an urging force to the upper pressing body and the lower pressing body, and the urging member can be moved in the compression direction, and supports the lower pressing body to prevent movement in the urging direction, On the threaded part of the pressing body A flat semiconductor element stack characterized by comprising a rotating body having a second pressure scale screwed in a freely rotatable manner, and having a pressing protrusion for pressing the laminate on the lower support plate .

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