JP3824074B2

JP3824074B2 - Nozzle for composite structure manufacturing, composite structure manufacturing apparatus, and composite structure manufacturing method

Info

Publication number: JP3824074B2
Application number: JP2002049240A
Authority: JP
Inventors: 達郎横山; 広典鳩野; 万也辻道; 純明渡
Original assignee: National Institute of Advanced Industrial Science and Technology AIST
Current assignee: National Institute of Advanced Industrial Science and Technology AIST
Priority date: 2002-02-26
Filing date: 2002-02-26
Publication date: 2006-09-20
Anticipated expiration: 2022-02-26
Also published as: JP2003247080A

Description

【０００１】
【発明の技術分野】
本発明は、微粒子を含むエアロゾルを基板に吹き付け、構造物を基板上に形成させることによって基板と構造物からなる複合構造物を作製するときに使用する複合物作製用ノズルや、複合構造物作製装置及び複合構造物作製方法に関する。
【０００２】
【従来の技術】
基板上の膜の形成方法としては数μｍ以上の厚膜の場合、溶射法が一般に知られているが、その他ガスデポジション法（加集誠一郎：金属１９８９年１月号）が提案されている。この方法は金属やセラミックスの超微粒子をガス攪拌にてエアロゾル化し、微少なノズルを通して加速せしめ、基材表面に超微粒子の圧粉体層を形成させ、これを加熱して焼成させることにより被膜を形成する。
【０００３】
上記ガスデポジション法を改良した先行技術として微粒子ビーム堆積法あるいはエアロゾルデポジション法と呼ばれる脆性材料の膜あるいは構造物の形成方法がある。これは、脆性材料の微粒子を含むエアロゾルをノズルから高速で基板に向けて噴射し、基板に微粒子を衝突させて、その機械的衝撃力を利用して脆性材料の多結晶構造物を基板上にダイレクトに形成させる方法であり、特開平１１−２１６７７号公報、特開２０００−２１２７６６号公報に開示されるものが知られている。
【０００４】
特開平１１−２１６７７号公報に開示される技術は、前記した超微粒子を含むエアロゾルを運搬する際あるいはセラミックスなどを加熱蒸発させる際に、超微粒子同士が凝集して大きな粒子となるのを防止するために、中間の経路に分級装置を配置するようにしている。
【０００５】
特開２０００−２１２７６６号公報は、粒径が１０ｎｍから５μｍの範囲にあるセラミックスなどの超微粒子をガスに分散させてエアロゾルとした後、ノズルより高速の超微粒子流として基板に向けて噴射して堆積物を形成させる。このときに超微粒子や基板に、イオン、原子、分子ビームや低温プラズマなどの高エネルギー原子などを照射して作製される構造物を強固なものにする工夫がなされている。
【０００６】
【発明が解決しようとする課題】
従来法においては、エアロゾルデポジション法によって構造物を作製する場合、矩形の開口の長辺方向が最大５ｍｍ程度の比較的小さな導出開口を備えたノズルを使用し、導出開口からエアロゾルを基材に噴射して構造物を作製していた。従って、例えば、矩形の導出開口の長辺方向以上の被覆面積を持つ構造物を基材に作製させる場合、エアロゾルを基材に噴射している状態で、基材を固定しているステージを長辺方向に垂直な水平方向のみではなく、長辺方向に平行な水平方向にも作動させる必要があった。そのために以下のような問題を生じていた。
１）上記垂直方向から上記水平方向への切り替えがスムーズにいかないとその部分のみ厚膜になる。
２）一度塗布した部分に隣接する部分に構造物を形成する場合に重なり合って厚膜になりやすい。
３）大面積の構造物の形成に時間がかかる。
【０００７】
上記１）〜３）の問題点を解消するために、単純に導出開口の矩形の長辺方向を長くして基材を固定しているステージを長辺方向に垂直な水平方向のみ移動させて複合構造物を形成する方法が考えられるが、この方法では導出開口の矩形の長辺方向の外縁部と中心部と比較した場合に、中心部の方がエアロゾルの濃度が高くなってしまい、エアロゾルの濃度が高い部分には厚く、またエアロゾルの濃度が低い部分には薄く構造物が成膜され、均一な膜厚である構造物を作製することが出来なかった。
【０００８】
又は、特公平３−２３２１８号で開示されている細いノズルを収束せしめた束状ノズルを用い、基材を固定しているステージを長辺方向に垂直な水平方向のみ移動させて複合構造物を形成する場合も短時間で大面積の複合構造物を形成することは可能であるが、ノズル間のクリアランス部分が存在するために、構造物表面に小さな凹凸が存在してしまい、均一な膜厚の構造物を得ることが出来なかった。
【０００９】
本発明では、上記事情に鑑み、一定の比較的大きな面積の複合構造物を形成するに際し、均一な膜厚の構造物を短時間で作製するための複合構造物形成用ノズル、複合構造物形成装置及び複合構造物形成方法を提供することを目的とする。
【００１０】
【課題を解決しようとする手段】
ここで本発明のノズルを用いた複合構造物形成法であるエアロゾルデポジション法について説明する。
延展性を持たない脆性材料（セラミックス）に機械的衝撃力を付加すると、結晶子同士の界面などの劈開面に沿って結晶格子のずれを生じたり、あるいは破砕される。そして、これらの現象が起こると、ずれ面や破面には、もともと内部に存在し別の原子として結合していた原子が剥き出しの状態となった新生面が形成される。この新生面の原子一層の部分は、もともと安定した原子結合状態から外力により強制的に不安定な表面状態に晒され、表面エネルギーが高い状態となる。この活性面が隣接した脆性材料表面や同じく隣接した脆性材料の新生面或いは基板表面と接合して安定状態に移行する。外部からの連続した機械的衝撃力の付加は、この現象を継続的に発生させ、粒子の変形、破砕などの繰り返しにより接合の進展、緻密化が行われ、脆性材料構造物が形成される。
【００１１】
そして、上記機械的衝撃を搬送ガスにて脆性材料を基板に衝突させるようにした方法がエアロゾルデポジション法である。
【００１２】
この方法は、ガスデポジション法により発展してきた手法であり、脆性材料の微粒子をガス中に分散させたエアロゾルを運搬し、高速で基板表面に噴射して衝突させ、微粒子を破砕・変形せしめ、基板との界面にアンカー層を形成して接合させるとともに、破砕した断片粒子同士を接合させることにより、基材との密着性が良好で強度の大きい脆性材料構造物を基板状にダイレクトに形成させることが出来る。
【００１３】
本発明はエアロゾルデポジション法に都合が良いばかりではなく、ガスデポジション法などの微粒子を噴射させる方法などにも利用できる。
【００１４】
ここで、図面を使用して複合構造物作製装置の一般的な装置構成を説明する。図１は、複合構造物作製装置の装置図であり、窒素を内蔵するガスボンベ１１は、ホース状の搬送管１２を介してエアロゾル発生器１３に連結され、さらに搬送管を通じて構造物形成室１４内に円形の導入部と矩形の開口を持つ開口部を備えたノズル１５が設置される。コンピュータにより上下（Ｚ）、前後左右（ＸＹ）に制動できる基板ホルダ１７に基材１６がノズルに対向して配置される。構造物形成室１４は排気ポンプ１８に接続している。
【００１５】
また、ノズル１５と基材１６の間にエアロゾル濃度を測定するためのセンサ装置２１を配置し、センサ装置２１から出力される信号は、フィードバック制御回路２２へ送られ、そして処理され、エアロゾル発生器１３やガスボンベ１１それぞれの制御部へ配線２３を通って送られ、エアロゾル濃度を制御するように、また、基材に衝突するエアロゾルの量を任意量供給するように制御を行う。
【００１６】
ノズル１５の導入部形状は、ホース状の搬送管１２でエアロゾルが搬送されてくるため、導入部形状はホース径にあわせた形状が望ましい。また、ホース径は大きいとエアロゾルを運搬するためにガス量を多くしなければならないので、数ｍｍ程度が妥当である。また開口部形状は、基材に作製させる複合構造物の大きさに合わせて矩形の長辺方向と短辺方向の長さを決定する。
【００１７】
本発明の複合構造物作製用ノズルの一実施態様においては、微粒子をガス中に分散させたエアロゾルを基材に衝突させ、前記基材表面に前記微粒子の構成材料からなる構造物を形成させる複合構造物形成装置に用いられるノズルにおいて、前記ノズルが、前記エアロゾルが通過するエアロゾル通過空間を有するノズル本体と、前記エアロゾルを導入するための導入開口と、前記エアロゾルを噴射させるための矩形の導出開口とを具備し、前記導出開口の短辺方向と対応する前記導入開口の部位から、前記導出開口の短辺方向の部位に向かって短辺方向寸法を連続的に減少させていくのに対し、前記導出開口の長辺方向と対応する前記導入開口の部位から、前記導出開口の長辺方向の部位に向かって長辺方向寸法を連続的に拡大させていくノズル内部形状を有する。
【００１８】
本発明の複合構造物作製用ノズルの他の実施態様においては、微粒子をガス中に分散させたエアロゾルを基材に衝突させ、前記基材表面に前記微粒子の構成材料からなる構造物を形成させる複合構造物形成装置に使用するノズルにおいて、前記ノズルが、前記エアロゾルが通過するエアロゾル通過空間を有するノズル本体と、前記エアロゾルを導入するための導入開口と、前記エアロゾルを噴射させるための矩形の導出開口とを具備し、前記導出開口の短辺方向と対応する前記導入開口の部位から、前記導出開口の短辺方向の部位に向かって短辺方向寸法を前記ノズル本体の前記エアロゾル通過空間の任意の位置から連続的に減少させていくのに対し、前記導出開口の長辺方向と対応する前記導入開口の部位から、前記導出開口の長辺方向の部位に向かって長辺方向寸法を前記ノズル本体の前記エアロゾル通過空間の任意の位置から連続的に拡大させていくノズル内部形状を有する。
【００１９】
本発明の複合構造物作製用ノズルの他の実施態様においては、微粒子をガス中に分散させたエアロゾルを基材に衝突させ、前記基材表面に前記微粒子の構成材料からなる構造物を形成させる複合構造物形成装置に用いられるノズルにおいて、前記ノズルが、前記エアロゾルが通過するエアロゾル通過空間を有するノズル本体と、前記エアロゾルを導入するための導入開口と、前記エアロゾルを噴射させるための矩形の導出開口とを具備し、前記導出開口の短辺方向と対応する前記導入開口の部位から、前記導出開口の短辺方向の部位に向かって短辺方向寸法を連続的に減少させていくのに対し、前記導出開口の長辺方向と対応する前記導入開口の部位から、前記導出開口の長辺方向の部位に向かって長辺方向寸法を連続的に拡大させ、かつ前記導出開口を含む部分には断面積が一定の部分を有する。ここで、前記エアロゾル通過空間においては、前記導入開口から前記導出開口にかけて前記エアロゾルが通過する方向に垂直な面方向の空間の断面積が減少する部分を有する形状にすることができる。
【００２０】
本発明の複合構造物作製用ノズルの他の実施態様においては、微粒子をガス中に分散させたエアロゾルを基材に衝突させ、前記基材表面に前記微粒子の構成材料からなる構造物を形成させる複合構造物形成装置に使用するノズルにおいて、前記ノズルが、前記エアロゾルが通過するエアロゾル通過空間を有するノズル本体と、前記エアロゾルを導入するための導入開口と、前記エアロゾルを噴射させるための矩形の導出開口とを具備し、前記導出開口の短辺方向と対応する前記導入開口の部位から、前記導出開口の短辺方向の部位に向かって短辺方向寸法を前記ノズル本体の前記エアロゾル通過空間の任意の位置から連続的に減少させていくのに対し、前記導出開口の長辺方向と対応する前記導入開口の部位から、前記導出開口の長辺方向の部位に向かって長辺方向寸法を前記ノズル本体の前記エアロゾル通過空間の任意の位置から連続的に拡大させ、かつ前記導出開口を含む部分には断面積が一定の部分を有する。
ここで、前記エアロゾル通過空間においては、前記導入開口から前記導出開口にかけて前記エアロゾルが通過する方向に垂直な面方向の空間の断面積が減少する部分を有する形状にすることができる。
【００２１】
本発明の複合構造物形成装置の一実施態様においては、エアロゾル発生手段と、エアロゾルを基材に衝突させるためのノズルとを少なくとも具備してなり、微粒子をガス中に分散させたエアロゾルを基材に衝突させ、前記基材表面に前記微粒子の構成材料からなる構造物を形成させる複合構造物形成装置において、前記ノズルが、前記エアロゾルが通過するエアロゾル通過空間を有するノズル本体と、前記エアロゾルを導入するための導入開口と、前記エアロゾルを噴射させるための矩形の導出開口とを具備し、前記導出開口の短辺方向と対応する前記導入開口の部位から、前記導出開口の短辺方向の部位に向かって短辺方向寸法を連続的に減少させていくのに対し、前記導出開口の長辺方向と対応する前記導入開口の部位から、前記導出開口の長辺方向の部位に向かって長辺方向寸法を連続的に拡大させていくノズル内部形状を有する。
【００２２】
本発明の複合構造物形成装置の他の実施態様においては、エアロゾル発生手段と、エアロゾルを基材に衝突させるためのノズルとを少なくとも具備してなり、微粒子をガス中に分散させたエアロゾルを基材に衝突させ、前記基材表面に前記微粒子の構成材料からなる構造物を形成させる複合構造物形成装置において、前記ノズルが、前記エアロゾルが通過するエアロゾル通過空間を有するノズル本体と、前記エアロゾルを導入するための導入開口と、前記エアロゾルを噴射させるための矩形の導出開口とを具備し、前記導出開口の短辺方向と対応する前記導入開口の部位から、前記導出開口の短辺方向の部位に向かって短辺方向寸法を前記ノズル本体の前記エアロゾル通過空間の任意の位置から連続的に減少させていくのに対し、前記導出開口の長辺方向と対応する前記導入開口の部位から、前記導出開口の長辺方向の部位に向かって長辺方向寸法を前記ノズル本体の前記エアロゾル通過空間の任意の位置から連続的に拡大させていくノズル内部形状を有する。
【００２３】
本発明の複合構造物形成装置の他の実施態様においては、エアロゾル発生手段と、エアロゾルを基材に衝突させるためのノズルとを少なくとも具備してなり、微粒子をガス中に分散させたエアロゾルを基材に衝突させ、前記基材表面に前記微粒子の構成材料からなる構造物を形成させる複合構造物形成装置において、前記ノズルが、前記エアロゾルが通過するエアロゾル通過空間を有するノズル本体と、前記エアロゾルを導入するための導入開口と、前記エアロゾルを噴射させるための矩形の導出開口とを具備し、前記導出開口の短辺方向と対応する前記導入開口の部位から、前記導出開口の短辺方向の部位に向かって短辺方向寸法を連続的に減少させていくのに対し、前記導出開口の長辺方向と対応する前記導入開口の部位から、前記導出開口の長辺方向の部位に向かって長辺方向寸法を連続的に拡大させ、かつ前記導出開口を含む部分には断面積が一定の部分を有する。
ここで、前記エアロゾル通過空間においては、前記導入開口から前記導出開口にかけて前記エアロゾルが通過する方向に垂直な面方向の空間の断面積が減少する部分を有する形状にすることができる。
【００２４】
本発明の複合構造物形成装置の他の実施態様においては、エアロゾル発生手段と、エアロゾルを基材に衝突させるためのノズルとを少なくとも具備してなり、微粒子をガス中に分散させたエアロゾルを基材に衝突させ、前記基材表面に前記微粒子の構成材料からなる構造物を形成させる複合構造物形成装置において、前記ノズルが、前記エアロゾルが通過するエアロゾル通過空間を有するノズル本体と、前記エアロゾルを導入するための導入開口と、前記エアロゾルを噴射させるための矩形の導出開口とを具備し、前記導出開口の短辺方向と対応する前記導入開口の部位から、前記導出開口の短辺方向の部位に向かって短辺方向寸法を前記ノズル本体の前記エアロゾル通過空間の任意の位置から連続的に減少させていくのに対し、前記導出開口の長辺方向と対応する前記導入開口の部位から、前記導出開口の長辺方向の部位に向かって長辺方向寸法を前記ノズル本体の前記エアロゾル通過空間の任意の位置から連続的に拡大させ、かつ前記導出開口を含む部分には断面積が一定の部分を有する。
ここで、前記エアロゾル通過空間においては、前記導入開口から前記導出開口にかけて前記エアロゾルが通過する方向に垂直な面方向の空間の断面積が減少する部分を有する形状にすることができる。
【００２５】
本発明の複合構造物形成方法の一実施態様においては、微粒子をガス中に分散させたエアロゾルをノズルから吐出させて基材に衝突させ、前記基材表面に前記微粒子の構成材料からなる構造物を形成させる複合構造物形成方法において、前記ノズルが、前記エアロゾルが通過するエアロゾル通過空間を有するノズル本体と、前記エアロゾルを導入するための導入開口と、前記エアロゾルを噴射させるための矩形の導出開口とを具備し、前記導出開口の短辺方向と対応する前記導入開口の部位から、前記導出開口の短辺方向の部位に向かって短辺方向寸法を連続的に減少させていくのに対し、前記導出開口の長辺方向と対応する前記導入開口の部位から、前記導出開口の長辺方向の部位に向かって長辺方向寸法を連続的に拡大させていくノズル内部形状を有する。
【００２６】
本発明の複合構造物形成方法の他の実施態様においては、微粒子をガス中に分散させたエアロゾルをノズルから吐出させて基材に衝突させ、前記基材表面に前記微粒子の構成材料からなる構造物を形成させる複合構造物形成方法において、前記ノズルが、前記エアロゾルが通過するエアロゾル通過空間を有するノズル本体と、前記エアロゾルを導入するための導入開口と、前記エアロゾルを噴射させるための矩形の導出開口とを具備し、前記導出開口の短辺方向と対応する前記導入開口の部位から、前記導出開口の短辺方向の部位に向かって短辺方向寸法を前記ノズル本体の前記エアロゾル通過空間の任意の位置から連続的に減少させていくのに対し、前記導出開口の長辺方向と対応する前記導入開口の部位から、前記導出開口の長辺方向の部位に向かって長辺方向寸法を前記ノズル本体の前記エアロゾル通過空間の任意の位置から連続的に拡大させていくノズル内部形状を有する。
【００２７】
本発明の複合構造物形成方法の他の実施態様においては、微粒子をガス中に分散させたエアロゾルをノズルから吐出させて基材に衝突させ、前記基材表面に前記微粒子の構成材料からなる構造物を形成させる複合構造物形成方法において、前記ノズルが、前記エアロゾルが通過するエアロゾル通過空間を有するノズル本体と、前記エアロゾルを導入するための導入開口と、前記エアロゾルを噴射させるための矩形の導出開口とを具備し、前記導出開口の短辺方向と対応する前記導入開口の部位から、前記導出開口の短辺方向の部位に向かって短辺方向寸法を連続的に減少させていくのに対し、前記導出開口の長辺方向と対応する前記導入開口の部位から、前記導出開口の長辺方向の部位に向かって長辺方向寸法を連続的に拡大させ、かつ前記導出開口を含む部分には断面積が一定の部分を有する。
ここで、前記エアロゾル通過空間においては、前記導入開口から前記導出開口にかけて前記エアロゾルが通過する方向に垂直な面方向の空間の断面積が減少する部分を有する形状にすることができる。
【００２８】
本発明の複合構造物形成方法の他の実施態様においては、微粒子をガス中に分散させたエアロゾルをノズルから吐出させて基材に衝突させ、前記基材表面に前記微粒子の構成材料からなる構造物を形成させる複合構造物形成方法において、前記ノズルが、前記エアロゾルが通過するエアロゾル通過空間を有するノズル本体と、前記エアロゾルを導入するための導入開口と、前記エアロゾルを噴射させるための矩形の導出開口とを具備し、前記導出開口の短辺方向と対応する前記導入開口の部位から、前記導出開口の短辺方向の部位に向かって短辺方向寸法を前記ノズル本体の前記エアロゾル通過空間の任意の位置から連続的に減少させていくのに対し、前記導出開口の長辺方向と対応する前記導入開口の部位から、前記導出開口の長辺方向の部位に向かって長辺方向寸法を前記ノズル本体の前記エアロゾル通過空間の任意の位置から連続的に拡大させ、かつ前記導出開口を含む部分には断面積が一定の部分を有する。
ここで、前記エアロゾル通過空間においては、前記導入開口から前記導出開口にかけて前記エアロゾルが通過する方向に垂直な面方向の空間の断面積が減少する部分を有する形状にすることができる。
【００２９】
本発明においては、必要とする大きさの構造物を短時間で作製するために、一度に成膜可能な範囲を大きくすることが考えられる。その手法は、前記導出開口の長辺方向を必要とする長さまで拡大しながら、前記導出開口の短辺方向の長さを減少させていくというものである。このようなエアロゾル通過空間形状を取ることによって、一度に成膜可能な範囲が拡大し、構造物を短時間で作製することが可能となる。
【００３０】
前記導出開口の長辺方向長さを拡大する理由としては、成膜可能な範囲を拡大するためである。前記導入開口の短辺方向長さを減少させる理由としては、長辺方向を拡大したのみでは、矩形の導出開口の面積が導入開口よりも拡大してしまうため、微粒子が導出開口全体に万遍なく分散せず、エアロゾルに濃度差が発生してしまうのに対し、短辺方向長さを減少させた場合、前記導出開口から濃度が均一なエアロゾルを噴射させることが出来るからである。
【００３１】
また、前記導出開口の短辺方向と対応する前記導入開口の部位から、前記導出開口の短辺方向の部位に向かって短辺方向寸法を減少させていく位置、及び前記導出開口の長辺方向と対応する前記導入開口の部位から、前記導出開口の長辺方向の部位に向かって長辺方向寸法を拡大させていく位置に関しては、例えばエアロゾル化する微粒子の性状や重量及び粒子径、または搬送用ガス種や流量など、各条件に合わせて前記エアロゾル通過空間の任意の位置から連続的に変化させる。
【００３２】
本発明におけるノズルの一態様としては、前記ノズルにおいて、前記導入開口を複数ヶ有し且つ、前記導出開口を１ヶ持つことを特徴とする。
【００３３】
本発明においては、前記導出開口の長辺方向長さを拡大すると、前記導入開口と前記導出開口の距離が短い場合、前記導出開口長辺方向の外縁部まで微粒子が広がらず、前記導出開口から噴射するエアロゾルの濃度にばらつきが生じるが、前記導入開口を複数ヶ備えることによって、前記導出開口の長辺寸法を同じにした場合、前記導入開口から前記導出開口までの距離を、前記導入開口を１ヶのみ備えるものに比べて短くすることが出来るため、前記ノズルの大きさを小さくすることが可能となり、複合構造物作製装置の構造物形成室の大きさを小さくすることが可能となる。
【００３４】
又、複数の導入開口に対し、１ヶの導出開口のみを持ち合わせているため、特公平３−２３２１８号で開示されたノズルのように、構造物表面に導入部に対応した小さな凹凸は存在せず、均一な膜厚である構造物を得ることが可能である。
【００３５】
本発明におけるノズルの一態様としては、前記ノズル本体の前記エアロゾル通過空間において、前記導入開口から前記導出開口にかけて前記エアロゾルが通過する方向に垂直な面方向の空間の断面積が減少する部分を持ち、次いでこの断面積が一定の部分を併せ持つことを特徴とする。
【００３６】
本発明においては、前記ノズルに断面積が一定の部分を併せ持つのは、断面積が減少する部分の微粒子は、前記導出開口の長辺方向では寸法が広がる方向へ飛散し、前記導入開口の短辺方向は寸法が狭まる方向へ飛散するため、基材へ衝突するエアロゾルの濃度が基材の固定角度や形状、ノズルとの距離等により、基材へ衝突するエアロゾルの濃度が変化してしまうためと、前記導出開口の長辺方向の中心を通過する微粒子は速度が速く、外縁部を通過する微粒子の速度が遅くなり、前記導出開口から噴射される微粒子の速度が一定にならないため、断面積が一定の部分にエアロゾルを通し、微粒子の飛散する方向及び速度を一定にするためである。
【００３７】
【発明の実施の形態】
以下、本発明の実施の形態を、図面により詳細に説明する。
図２は、本発明の一態様としての脆性材料構造物作製装置で使用するノズル３１であり、図３は図２の内部形状を示し、このうち（ａ）は一方の板状部材の斜視図、（ｂ）は（ａ）のＢ−Ｂ矢示に沿った通路の断面図、（ｃ）は（ａ）のＣ−Ｃ矢示に沿ったエアロゾル通過空間の断面図である。
ノズル３１は金属或いはセラミックからなる２枚の板状部材３１１、３１２を貼り合わせてなり、一方の板状部材の表面には一端が導出開口３２で他端が導入開口３３となる溝３１３が形成され、他方の板状部材には溝を形成していない。尚、両方の板状部材に溝を形成してもよい。
前記溝３１３は導入開口３３から導出開口３２に至る範囲において、下流側に向かって（Ｚ方向に沿って）、短辺方向（Ｘ方向）の寸法が徐々に小さくなり、長辺方向（Ｙ方向）の寸法が徐々に長くなるようにし、しかも、図３（ｂ）及び（ｃ）から分るように、導入開口３３に近い部分のエアロゾル通過空間の断面積をＳ１とし、これよりも下流側のエアロゾル通過空間の断面積をＳ２とすると、Ｓ１＞Ｓ２となるように加工している。
このノズルの具体的な寸法としては、１０ｍｍ×０．５ｍｍの矩形の導出開口３２を持ち、３．０ｍｍ×３．０ｍｍの矩形の導入開口３３を１ヶ持つ。
図４乃至図６はノズル形状の別タイプを示し、図４に示すタイプでは、溝３１３の上流側部分３１３ａについては短辺方向（Ｘ方向）及び長辺方向（Ｙ方向）の寸法を変化させずに略等しくし、下流側部分３１３ｂについては、下流側に向かって（Ｚ方向に沿って）、短辺方向（Ｘ方向）の寸法が徐々に小さくなり、長辺方向（Ｙ方向）の寸法が徐々に大きくなるようにし、しかも、下流側部分３１３ｂではエアロゾル通過空間の断面積が下流側に向かって徐々に狭くなるようにしている。
図５に示すタイプでは、溝３１３の上流側部分３１３ａについては、下流側に向かって、短辺方向の寸法が徐々に小さくなり長辺方向の寸法が徐々に大きくなるようにし、しかも、上流側部分３１３ａではエアロゾル通過空間の断面積が下流側に向かって徐々に狭くなるようにし、下流側部分３１３ｂについては短辺方向及び長辺方向の寸法を変化させずに略等しくしている。
図６に示すタイプでは、溝３１３の上流側部分３１３ａ及び下流側部分３１３ｂについては短辺方向及び長辺方向の寸法を変化させずに略等しくし、中間部分３１３ｃについては、下流側に向かって短辺方向の寸法が徐々に小さくなり長辺方向の寸法が徐々に大きくなるようにし、しかもエアロゾル通過空間の断面積が下流側に向かって徐々に狭くなるようにしている。
尚、図示例はは実施の一例を示したものであり、ノズルの形状は上記に限るものではない。
【００３８】
図２で示したノズル３１を図１で示した複合構造物製造装置のノズル１５として使用し、３０ｍｍ×３０ｍｍの面積で膜厚が１０μｍで均一の脆性材料構造物を得ようとした場合を述べる。ノズル３１を使用した場合、ノズル又は基材をＸ軸方向へ３０ｍｍ移動させ、１０ｍｍ×３０ｍｍで膜厚１０μｍの脆性材料構造物を作製する。次に、ノズル又は基板をＹ軸方向へ１０ｍｍ移動させ、再びノズル又は基板をＸ軸方向へ３０ｍｍ移動させ、２０ｍｍ×３０ｍｍの面積で膜厚が１０μｍの脆性材料構造物を作製する。次に、前記動作をもう一度繰り返し、３０ｍｍ×３０ｍｍの脆性材料構造物を作製する。
【００３９】
次に本発明の別態様として、図７及び図８で示したノズルを図１で示した複合構造物製造装置のノズル１５として使用し、３０ｍｍ×３０ｍｍの面積で膜厚が１０μｍで均一の脆性材料構造物を得ようとした場合を述べる。ノズル４１は３０ｍｍ×０．５ｍｍの矩形の導出開口４２を持ち、３．０ｍｍ×３．０ｍｍの矩形の導入開口４３を１ヶ持つ。ノズル４１を使用した場合では、ノズル又は基板をＸ軸方向へ３０ｍｍ移動のみで、３０ｍｍ×３０ｍｍで膜厚１０μｍの脆性材料構造物を作製することが可能である。ノズル又は基板が移動する時間は、ノズル３１を使用した場合と比較すると１／３の時間で終了する。しかし、ノズル４１に比べてノズル５１は導出開口３２の面積が導出開口４１の面積の３倍であるため、ノズル４１の導入開口４３にノズル３１の導入開口３３と同濃度のエアロゾルを供給した場合、ノズル４１の導出開口４２でのエアロゾル濃度はノズル３１の導出開口３２に比べて１／３の濃度となり、単位面積あたりに対する成膜速度はノズル３１と比べて同等である。そこで、導入開口４３に導入開口３３へ導入するエアロゾル濃度が３倍のエアロゾルを導入することによって脆性材料構造物作製時間をノズル３１を使用したときと比べて１／３に縮小した。
【００４０】
次に本発明の別態様として、図９で示したノズル５１を図１で示した複合構造物製造装置のノズル１５として使用し、３０ｍｍ×３０ｍｍの面積で膜厚が１０μｍで均一の脆性材料構造物を得ようとした場合を述べる。ノズル５１は３０ｍｍ×０．５ｍｍの矩形の導出開口５２を持ち、３．０ｍｍ×３．０ｍｍの矩形の導入開口５３を３ヶ持つ。
【００４１】
図９に示したノズル５１は導入開口を３ヶ持っているため、各々の導入開口５３にエアロゾル発生器１３を装着する。各々の導入開口５３へ供給するエアロゾル濃度はノズル３１の導入開口３３へ供給するエアロゾル濃度と同等で、導出開口５２から噴射されるエアロゾル濃度はノズル４１の導出開口４３から噴射されるエアロゾル濃度と同等となり、エアロゾル発生器１３に負荷をかけることなく、ノズル３１を使用して脆性材料構造物を作製する時間を１／３に短縮した。
【００４２】
又、ノズル５１は、溝幅を３．０ｍｍから１０ｍｍへ広げるため、溝幅を３．０ｍｍから３０ｍｍに広げる図７及び図８に示したノズル４１に比べ、エアロゾルが溝内で十分に広がり、開口部３２中央部と外縁部とでエアロゾルの濃度差を少なくすることが可能である。よって、研磨工程などの作業なしで３０ｍｍ×３０ｍｍの凹凸の少ないセラミック構造物を作製することが可能であり、セラミック構造物作製時間を短縮することが可能である。
【００４３】
又、ノズル５１は、図９で示したように３０ｍｍ×０．５ｍｍの矩形の導出開口５２を１カ所、３．０ｍｍ×３．０ｍｍの導入開口５３を３カ所持っているため、例えば図２で示したノズル３１を３つ隙間無く並べた場合、作製する脆性材料構造物に凹凸部が３カ所出来てしまい、凹凸を平坦にするような研磨加工などの作業が必要になる。しかし、ノズル５１の場合、ノズル内部でエアロゾルの流路が３カ所から１カ所に合流しているため、作製される脆性材料構造物の凹凸が減少して研磨加工などの作業が不必要となるので脆性材料構造物作製時間を短縮することが可能である。
【００４４】
又、ノズル４１は導入開口４３から導出開口４２の間で長辺方向の長さを３．０ｍｍから３０ｍｍに広げるのに対し、ノズル５１は、ノズル３１と同様に導入開口５３から導出開口５２の間で長辺方向の長さを３．０ｍｍから１０ｍｍへ広げ、１０ｍｍまで広げた溝を隙間無く並べ、長辺方向の長さ３０ｍｍの開口部５２を形成する。そうすることによって、ノズル５１の導入開口５３から導出開口５２までの距離をノズル４１に比べて短くすることが可能であり、ノズル４１を使用した装置系よりも小型化することが可能である。
【００４５】
又、ノズル５１は導入開口５３に各々エアロゾル発生器１３を備えているため、各々のエアロゾル発生器１３から供給するエアロゾルの濃度をそれぞれ調節することによって、導出開口５２から噴射するエアロゾル濃度に変化を与えることができ、作製される脆性材料構造物の形状を任意に制御することが可能である。
【００４６】
【発明の効果】
本発明によれば、一定の比較的大きな面積の複合構造物を形成するに際し、均一な膜厚の構造物を短時間で作製するための複合構造物形成用ノズル、複合構造物形成装置及び複合構造物形成方法を提供することが可能となる。
【図面の簡単な説明】
【図１】従来使用されている複合構造物作製装置の一般的な構成を示した図。
【図２】本発明のノズル（タイプ１）の全体構成を示した図。
【図３】（ａ）は本発明のノズル（タイプ１）を構成する一方の板状部材の斜視図、（ｂ）は（ａ）のＢ−Ｂ矢示に沿った部分の通路断面を示す図、（ｃ）は（ａ）のＣ−Ｃ矢示に沿った部分の通路断面を示す図。
【図４】本発明のノズル（タイプ２）を構成する一方の板状部材の斜視図。
【図５】本発明のノズル（タイプ３）を構成する一方の板状部材の斜視図。
【図６】本発明のノズル（タイプ４）を構成する一方の板状部材の斜視図。
【図７】本発明のノズル（タイプ５）の全体構成を示した図。
【図８】本発明のノズル（タイプ６）を構成する一方の板状部材の斜視図。
【図９】本発明のノズル（タイプ７）を構成する一方の板状部材の斜視図。
【符号の説明】
１１…ガスボンベ、１２…搬送管、１３…エアロゾル発生器、１４…構造物形成室、１５…ノズル、１６…基材、１７…基材ホルダ、１８…排気ポンプ、２１…センサ装置、２２…フィードバック制御回路、２３…配線、３１…ノズル、３１１、３１２…ノズルを構成する板状部材、３１３…エアロゾル通過空間となる溝、３１３ａ、３１３ｂ、３１３ｃ…溝の一部、３２…１０ｍｍ×０．５ｍｍの矩形の導出開口、３３…３．０ｍｍ×３．０ｍｍの矩形の導入開口、４１…ノズル、４２…３０ｍｍ×０．５ｍｍの矩形の導出開口、４３…３．０ｍｍ×３．０ｍｍの矩形の導入開口、５１…ノズル、５２…３０ｍｍ×０．５ｍｍの矩形の導出開口、５３…３．０ｍｍ×３．０ｍｍの矩形の導入開口。[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention sprays aerosol containing fine particles onto a substrate, and forms a structure on the substrate to form a composite structure composed of the substrate and the structure. The present invention relates to an apparatus and a composite structure manufacturing method.
[0002]
[Prior art]
As a method for forming a film on a substrate, in the case of a thick film of several μm or more, a spraying method is generally known, but another gas deposition method (Seiichiro Kashu: Metal January 1989 issue) has been proposed. . In this method, ultrafine particles of metal or ceramics are aerosolized by gas stirring and accelerated through a minute nozzle to form a green compact layer of ultrafine particles on the surface of the substrate, which is heated and fired to form a coating. Form.
[0003]
As a prior art improved from the gas deposition method, there is a method of forming a film or structure of a brittle material called a fine particle beam deposition method or an aerosol deposition method. This is because an aerosol containing fine particles of brittle material is sprayed from a nozzle toward the substrate at high speed, the fine particles collide with the substrate, and the polycrystalline structure of the brittle material is applied onto the substrate using the mechanical impact force. This is a direct forming method, and those disclosed in JP-A-11-21676 and JP-A-2000-212766 are known.
[0004]
The technique disclosed in Japanese Patent Application Laid-Open No. 11-21677 prevents the ultrafine particles from aggregating into large particles when transporting the aerosol containing the ultrafine particles or heating and evaporating ceramics. For this reason, a classifier is arranged in an intermediate path.
[0005]
Japanese Patent Laid-Open No. 2000-212766 discloses that after dispersing ultrafine particles such as ceramics having a particle diameter in the range of 10 nm to 5 μm in a gas to form an aerosol, the fine particle flow at a higher speed than the nozzle is sprayed toward the substrate. A deposit is formed. At this time, an effort has been made to strengthen a structure produced by irradiating ultrafine particles or a substrate with high-energy atoms such as ions, atoms, molecular beams, and low-temperature plasma.
[0006]
[Problems to be solved by the invention]
In the conventional method, when a structure is manufactured by the aerosol deposition method, a nozzle having a relatively small outlet opening whose long side direction of the rectangular opening is about 5 mm at the maximum is used, and the aerosol is used as a base material from the outlet opening. The structure was made by spraying. Therefore, for example, when a structure having a covering area equal to or longer than the long side direction of the rectangular lead-out opening is formed on the base material, the stage that fixes the base material is long while the aerosol is sprayed onto the base material. It was necessary to operate not only in the horizontal direction perpendicular to the side direction but also in the horizontal direction parallel to the long side direction. Therefore, the following problems have occurred.
1) If switching from the vertical direction to the horizontal direction is not smooth, only that portion becomes thick.
2) When a structure is formed in a portion adjacent to a portion that has been applied once, it tends to overlap and become a thick film.
3) It takes time to form a large area structure.
[0007]
In order to solve the above problems 1) to 3), the long side direction of the rectangle of the outlet opening is simply lengthened and the stage fixing the substrate is moved only in the horizontal direction perpendicular to the long side direction. A method of forming a composite structure is conceivable, but in this method, the aerosol concentration is higher in the central portion than the outer edge portion and the central portion in the long side direction of the rectangular of the outlet opening, and the aerosol is A structure having a uniform film thickness could not be produced because a thick structure was formed on a portion where the concentration of selenium was high and a thin structure was formed on a portion where the concentration of aerosol was low.
[0008]
Alternatively, the composite structure can be obtained by moving the stage fixing the substrate only in the horizontal direction perpendicular to the long side direction using a bundled nozzle in which narrow nozzles disclosed in Japanese Patent Publication No. 3-23218 are converged. Even when forming, it is possible to form a composite structure with a large area in a short time, but since there is a clearance portion between the nozzles, there are small irregularities on the surface of the structure, and a uniform film thickness The structure of could not be obtained.
[0009]
In the present invention, in view of the above circumstances, when forming a composite structure having a certain relatively large area, a composite structure forming nozzle for forming a structure with a uniform film thickness in a short time, and formation of the composite structure It is an object to provide an apparatus and a composite structure forming method.
[0010]
[Means to solve the problem]
Here, the aerosol deposition method which is a composite structure forming method using the nozzle of the present invention will be described.
When a mechanical impact force is applied to a brittle material (ceramics) that does not have spreadability, the crystal lattice shifts along the cleaved surface such as the interface between crystallites or is crushed. When these phenomena occur, a new surface is formed on the slipping surface or fracture surface, in which atoms originally present inside and bonded as another atom are exposed. The part of the atomic layer on the new surface is exposed to an unstable surface state by an external force from a stable atomic bond state, and the surface energy is high. The active surface joins the adjacent brittle material surface, the newly formed brittle material surface, or the substrate surface, and shifts to a stable state. The addition of continuous mechanical impact force from the outside causes this phenomenon to occur continuously, and the joining is progressed and densified by repeated deformation and crushing of the particles, thereby forming a brittle material structure.
[0011]
An aerosol deposition method is a method in which a brittle material is caused to collide with a substrate with a carrier gas by the mechanical impact.
[0012]
This method has been developed by the gas deposition method.It transports an aerosol in which fine particles of brittle material are dispersed in a gas, and jets and collides with the substrate surface at a high speed to crush and deform the fine particles. An anchor layer is formed and bonded to the interface with the substrate, and the crushed fragment particles are bonded to each other, so that a brittle material structure having good adhesion and high strength is directly formed on the substrate. I can do it.
[0013]
The present invention is not only convenient for the aerosol deposition method, but can also be used for a method of injecting fine particles such as a gas deposition method.
[0014]
Here, a general apparatus configuration of the composite structure manufacturing apparatus will be described with reference to the drawings. FIG. 1 is an apparatus diagram of a composite structure manufacturing apparatus, in which a gas cylinder 11 containing nitrogen is connected to an aerosol generator 13 through a hose-shaped transport pipe 12, and further inside the structure forming chamber 14 through the transport pipe. Nozzle 15 having a circular introduction portion and an opening portion having a rectangular opening is installed. A base material 16 is arranged opposite to the nozzles on a substrate holder 17 that can be braked vertically (Z), front-back, left-right (XY) by a computer. The structure forming chamber 14 is connected to an exhaust pump 18.
[0015]
In addition, a sensor device 21 for measuring the aerosol concentration is arranged between the nozzle 15 and the substrate 16, and a signal output from the sensor device 21 is sent to the feedback control circuit 22 and processed to generate an aerosol generator. Control is performed so as to control the aerosol concentration and to supply an arbitrary amount of aerosol that collides with the substrate.
[0016]
As the shape of the introduction portion of the nozzle 15, aerosol is conveyed by the hose-shaped conveyance pipe 12, the shape of the introduction portion is preferably matched to the diameter of the hose. Also, if the hose diameter is large, the amount of gas has to be increased in order to carry the aerosol, so a few mm is appropriate. The shape of the opening determines the length in the long side direction and the short side direction of the rectangle according to the size of the composite structure to be produced on the base material.
[0017]
In one embodiment of the composite structure production nozzle of the present invention, a composite in which an aerosol in which fine particles are dispersed in a gas is collided with a base material to form a structure made of the constituent material of the fine particles on the surface of the base material. In the nozzle used in the structure forming apparatus, the nozzle has a nozzle body having an aerosol passage space through which the aerosol passes, an introduction opening for introducing the aerosol, and a rectangular lead-out opening for injecting the aerosol And continuously reducing the dimension in the short side direction from the portion of the introduction opening corresponding to the short side direction of the lead-out opening toward the portion in the short side direction of the lead-out opening, Nozzle that continuously increases the dimension in the long side direction from the part of the introduction opening corresponding to the long side direction of the lead-out opening toward the part in the long side direction of the lead-out opening Having an interior shape.
[0018]
In another embodiment of the nozzle for producing a composite structure of the present invention, an aerosol in which fine particles are dispersed in a gas is collided with a base material to form a structure made of the constituent material of the fine particles on the surface of the base material. In the nozzle used in the composite structure forming apparatus, the nozzle has a nozzle body having an aerosol passage space through which the aerosol passes, an introduction opening for introducing the aerosol, and a rectangular lead for injecting the aerosol. The size of the short side direction from the part of the introduction opening corresponding to the short side direction of the lead-out opening toward the part of the short side direction of the lead-out opening. In contrast, the position of the lead-out opening is continuously decreased from the position of the lead-in opening corresponding to the long-side direction of the lead-out opening. The long side dimension towards the position with a continuously expanded so it will nozzle internal shape from an arbitrary position of the aerosol passage space of the nozzle body.
[0019]
In another embodiment of the nozzle for producing a composite structure of the present invention, an aerosol in which fine particles are dispersed in a gas is collided with a base material to form a structure made of the constituent material of the fine particles on the surface of the base material. In the nozzle used in the composite structure forming apparatus, the nozzle has a nozzle body having an aerosol passage space through which the aerosol passes, an introduction opening for introducing the aerosol, and a rectangular lead for injecting the aerosol. The size of the short side direction is continuously reduced from the introduction opening portion corresponding to the short side direction of the lead-out opening toward the short side portion of the lead-out opening. , Continuously increasing the dimension in the long side direction from the part of the introduction opening corresponding to the long side direction of the lead-out opening toward the part in the long side direction of the lead-out opening, and Sectional area in a portion including the outlet opening has a constant section. Here, the aerosol passage space can have a shape having a portion in which the cross-sectional area of the space in the plane direction perpendicular to the direction in which the aerosol passes extends from the introduction opening to the lead-out opening.
[0020]
In another embodiment of the nozzle for producing a composite structure of the present invention, an aerosol in which fine particles are dispersed in a gas is collided with a base material to form a structure made of the constituent material of the fine particles on the surface of the base material. In the nozzle used in the composite structure forming apparatus, the nozzle has a nozzle body having an aerosol passage space through which the aerosol passes, an introduction opening for introducing the aerosol, and a rectangular lead for injecting the aerosol. The size of the short side direction from the part of the introduction opening corresponding to the short side direction of the lead-out opening toward the part of the short side direction of the lead-out opening. In contrast, the position of the lead-out opening is continuously decreased from the position of the lead-in opening corresponding to the long-side direction of the lead-out opening. Position to continuously expand the long side dimension from an arbitrary position of the aerosol passage space of the nozzle body toward, and cross-sectional area in the portion including the outlet opening has a constant section.
Here, the aerosol passage space can have a shape having a portion in which the cross-sectional area of the space in the plane direction perpendicular to the direction in which the aerosol passes extends from the introduction opening to the lead-out opening.
[0021]
In one embodiment of the composite structure forming apparatus of the present invention, an aerosol generating means and a nozzle for causing the aerosol to collide with the substrate are provided, and the aerosol in which fine particles are dispersed in the gas is the substrate. In the composite structure forming apparatus for forming a structure made of the constituent material of the fine particles on the surface of the base material, the nozzle introduces the aerosol, the nozzle body having an aerosol passage space through which the aerosol passes, and the aerosol And a rectangular lead-out opening for injecting the aerosol, from a part of the lead-in opening corresponding to the short-side direction of the lead-out opening to a part in the short-side direction of the lead-out opening While the dimension in the short side direction is continuously decreased toward the long side direction, the lead opening from the portion of the lead opening corresponding to the long side direction of the lead opening is reduced. Having a nozzle internal geometry which will continuously expand the long side dimension towards the site of the long-side direction of.
[0022]
In another embodiment of the composite structure forming apparatus of the present invention, an aerosol generation means and at least a nozzle for causing the aerosol to collide with the base material are provided, and the aerosol is dispersed based on an aerosol. In a composite structure forming apparatus that collides with a material and forms a structure composed of the constituent material of the fine particles on the surface of the base material, the nozzle includes a nozzle body having an aerosol passage space through which the aerosol passes, and the aerosol. A portion in the short side direction of the lead-out opening from the portion of the lead-in opening corresponding to the short-side direction of the lead-out opening, which has a lead-in opening for introduction and a rectangular lead-out opening for injecting the aerosol The dimension in the short side direction is continuously decreased from an arbitrary position in the aerosol passage space of the nozzle body toward the The dimension of the long side direction is continuously enlarged from an arbitrary position in the aerosol passage space of the nozzle body from the portion of the introduction opening corresponding to the long side direction of the nozzle toward the long side direction of the outlet opening. Has a nozzle internal shape.
[0023]
In another embodiment of the composite structure forming apparatus of the present invention, an aerosol generation means and at least a nozzle for causing the aerosol to collide with the base material are provided, and the aerosol is dispersed based on an aerosol. In a composite structure forming apparatus that collides with a material and forms a structure composed of the constituent material of the fine particles on the surface of the base material, the nozzle includes a nozzle body having an aerosol passage space through which the aerosol passes, and the aerosol. A portion in the short side direction of the lead-out opening from the portion of the lead-in opening corresponding to the short-side direction of the lead-out opening, which has a lead-in opening for introduction and a rectangular lead-out opening for injecting the aerosol From the portion of the introduction opening corresponding to the long side direction of the outlet opening, the dimension in the short side direction is continuously reduced toward Towards the site of the long-side direction of the mouth continuously expanding the long side dimension and cross-sectional area in the portion including the outlet opening has a constant section.
Here, the aerosol passage space can have a shape having a portion in which the cross-sectional area of the space in the plane direction perpendicular to the direction in which the aerosol passes extends from the introduction opening to the lead-out opening.
[0024]
In another embodiment of the composite structure forming apparatus of the present invention, an aerosol generation means and at least a nozzle for causing the aerosol to collide with the base material are provided, and the aerosol is dispersed based on an aerosol. In a composite structure forming apparatus that collides with a material and forms a structure composed of the constituent material of the fine particles on the surface of the base material, the nozzle includes a nozzle body having an aerosol passage space through which the aerosol passes, and the aerosol. A portion in the short side direction of the lead-out opening from the portion of the lead-in opening corresponding to the short-side direction of the lead-out opening, which has a lead-in opening for introduction and a rectangular lead-out opening for injecting the aerosol The dimension in the short side direction is continuously decreased from an arbitrary position in the aerosol passage space of the nozzle body toward the From the position of the introduction opening corresponding to the long-side direction of the nozzle, the dimension in the long-side direction is continuously expanded from an arbitrary position in the aerosol passage space of the nozzle body toward the long-side direction of the outlet opening, The portion including the lead-out opening has a portion having a constant cross-sectional area.
Here, the aerosol passage space can have a shape having a portion in which the cross-sectional area of the space in the plane direction perpendicular to the direction in which the aerosol passes extends from the introduction opening to the lead-out opening.
[0025]
In one embodiment of the method for forming a composite structure of the present invention, an aerosol in which fine particles are dispersed in a gas is ejected from a nozzle to collide with a base material, and the structure comprising the constituent material of the fine particles on the base material surface In the composite structure forming method, the nozzle has a nozzle body having an aerosol passage space through which the aerosol passes, an introduction opening for introducing the aerosol, and a rectangular lead-out opening for injecting the aerosol And continuously reducing the dimension in the short side direction from the portion of the introduction opening corresponding to the short side direction of the lead-out opening toward the portion in the short side direction of the lead-out opening, A nozzle that continuously expands the dimension in the long side direction from the part of the introduction opening corresponding to the long side direction of the lead-out opening toward the part of the long side direction of the lead-out opening Having a section shape.
[0026]
In another embodiment of the method for forming a composite structure of the present invention, an aerosol in which fine particles are dispersed in a gas is ejected from a nozzle to collide with a base material, and the structure comprising the constituent material of the fine particles on the base material surface In the composite structure forming method for forming an object, the nozzle has a nozzle body having an aerosol passage space through which the aerosol passes, an introduction opening for introducing the aerosol, and a rectangular lead for injecting the aerosol The size of the short side direction from the part of the introduction opening corresponding to the short side direction of the lead-out opening toward the part of the short side direction of the lead-out opening. In contrast, the position of the lead-out opening is continuously decreased from the position of the lead-in opening corresponding to the long-side direction of the lead-out opening. The long side dimension towards the position with a continuously expanded so it will nozzle internal shape from an arbitrary position of the aerosol passage space of the nozzle body.
[0027]
In another embodiment of the method for forming a composite structure of the present invention, an aerosol in which fine particles are dispersed in a gas is ejected from a nozzle to collide with a base material, and the structure comprising the constituent material of the fine particles on the base material surface In the composite structure forming method for forming an object, the nozzle has a nozzle body having an aerosol passage space through which the aerosol passes, an introduction opening for introducing the aerosol, and a rectangular lead for injecting the aerosol The size of the short side direction is continuously reduced from the introduction opening portion corresponding to the short side direction of the lead-out opening toward the short side portion of the lead-out opening. , Continuously increasing the dimension in the long side direction from the part of the introduction opening corresponding to the long side direction of the lead-out opening toward the part in the long side direction of the lead-out opening, and Sectional area in a portion including the output aperture has a constant section.
Here, the aerosol passage space can have a shape having a portion in which the cross-sectional area of the space in the plane direction perpendicular to the direction in which the aerosol passes extends from the introduction opening to the lead-out opening.
[0028]
In another embodiment of the method for forming a composite structure of the present invention, an aerosol in which fine particles are dispersed in a gas is ejected from a nozzle to collide with a base material, and the structure comprising the constituent material of the fine particles on the base material surface In the composite structure forming method for forming an object, the nozzle has a nozzle body having an aerosol passage space through which the aerosol passes, an introduction opening for introducing the aerosol, and a rectangular lead for injecting the aerosol The size of the short side direction from the part of the introduction opening corresponding to the short side direction of the lead-out opening toward the part of the short side direction of the lead-out opening. In contrast, the position of the lead-out opening is continuously decreased from the position of the lead-in opening corresponding to the long-side direction of the lead-out opening. Position to continuously expand the long side dimension from an arbitrary position of the aerosol passage space of the nozzle body toward, and cross-sectional area in the portion including the outlet opening has a constant section.
Here, the aerosol passage space can have a shape having a portion in which the cross-sectional area of the space in the plane direction perpendicular to the direction in which the aerosol passes extends from the introduction opening to the lead-out opening.
[0029]
In the present invention, in order to produce a structure having a required size in a short time, it is conceivable to increase the range in which a film can be formed at a time. The technique is to reduce the length of the lead-out opening in the short side direction while expanding the length of the lead-out opening to a required length. By taking such an aerosol passage space shape, the range in which a film can be formed at a time is expanded, and a structure can be manufactured in a short time.
[0030]
The reason why the length of the lead-out opening in the long side direction is increased is to increase the film forming range. The reason for reducing the length in the short side direction of the introduction opening is that the area of the rectangular lead opening is larger than the lead opening only by enlarging the long side direction. This is because, when the length in the short side direction is reduced, aerosol having a uniform concentration can be ejected from the outlet opening.
[0031]
Further, a position in which the dimension of the short side direction is decreased from the part of the introduction opening corresponding to the short side direction of the lead-out opening toward the part of the short side direction of the lead-out opening, and the long side direction of the lead-out opening With respect to the position where the dimension in the long side direction is enlarged from the corresponding part of the introduction opening toward the long side direction of the lead-out opening, for example, the properties, weights and particle diameters of fine particles to be aerosolized, or conveyance The gas is continuously changed from an arbitrary position in the aerosol passage space according to various conditions such as the gas type and flow rate.
[0032]
As an aspect of the nozzle in the present invention, the nozzle has a plurality of introduction openings and a single lead-out opening.
[0033]
In the present invention, when the length in the long side direction of the lead-out opening is increased, when the distance between the lead-in opening and the lead-out opening is short, the fine particles do not spread to the outer edge in the long-side direction of the lead-out opening. Although the concentration of the aerosol to be sprayed varies, if the long side dimension of the outlet opening is made the same by providing a plurality of the inlet openings, the distance from the inlet opening to the outlet opening is set to Since it can be shortened compared with what is provided only with one piece, the size of the nozzle can be reduced, and the size of the structure forming chamber of the composite structure manufacturing apparatus can be reduced.
[0034]
In addition, since only one lead-out opening is provided for a plurality of introduction openings, there is no small unevenness corresponding to the introduction portion on the surface of the structure as in the nozzle disclosed in Japanese Patent Publication No. 3-23218. It is possible to obtain a structure having a uniform film thickness.
[0035]
As an aspect of the nozzle according to the present invention, the aerosol passage space of the nozzle body has a portion in which a cross-sectional area of a space in a plane direction perpendicular to a direction in which the aerosol passes from the introduction opening to the discharge opening decreases. Then, this cross-sectional area is characterized by having a certain part.
[0036]
In the present invention, the nozzle has a portion having a constant cross-sectional area because the fine particles in the portion where the cross-sectional area decreases are scattered in a direction in which the dimension increases in the long side direction of the lead-out opening, and the short of the introduction opening. Since the side direction scatters in the direction of narrowing the dimensions, the concentration of aerosol that collides with the base material changes depending on the fixed angle and shape of the base material, the distance to the nozzle, etc. The fine particles passing through the center in the long side direction of the lead-out opening have a high speed, the speed of the fine particles passing through the outer edge is slow, and the speed of the fine particles ejected from the lead-out opening is not constant. This is because the aerosol is passed through a certain portion, and the direction and speed of scattering of the fine particles are made constant.
[0037]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 2 shows a nozzle 31 used in the brittle material structure manufacturing apparatus as one embodiment of the present invention, FIG. 3 shows the internal shape of FIG. 2, and (a) is a perspective view of one plate-like member. (B) is sectional drawing of the channel | path along BB arrow of (a), (c) is sectional drawing of the aerosol passage space along CC arrow of (a).
The nozzle 31 is formed by bonding two plate-like members 311 and 312 made of metal or ceramic, and a groove 313 is formed on one surface of the plate-like member so that one end is a lead-out opening 32 and the other end is an introduction opening 33. The other plate-like member has no groove. A groove may be formed in both plate-like members.
In the range from the inlet opening 33 to the outlet opening 32, the groove 313 gradually decreases in the short side direction (X direction) toward the downstream side (along the Z direction), and the long side direction (Y direction). ) Gradually increases, and as can be seen from FIGS. 3B and 3C, the cross-sectional area of the aerosol passage space in the portion close to the introduction opening 33 is S1, which is on the downstream side. If the cross-sectional area of the aerosol passage space is S2, it is processed so that S1> S2.
As specific dimensions of this nozzle, it has a rectangular lead-out opening 32 of 10 mm × 0.5 mm and one rectangular introduction opening 33 of 3.0 mm × 3.0 mm.
4 to 6 show different types of nozzle shapes. In the type shown in FIG. 4, the dimensions of the upstream side portion 313a of the groove 313 are changed in the short side direction (X direction) and the long side direction (Y direction). About the downstream portion 313b, the dimension in the short side direction (X direction) gradually decreases toward the downstream side (along the Z direction), and the dimension in the long side direction (Y direction). In addition, the cross-sectional area of the aerosol passage space is gradually narrowed toward the downstream side in the downstream portion 313b.
In the type shown in FIG. 5, with respect to the upstream portion 313a of the groove 313, the dimension in the short side direction gradually decreases and the dimension in the long side direction gradually increases toward the downstream side. In the portion 313a, the cross-sectional area of the aerosol passage space is gradually narrowed toward the downstream side, and the downstream portion 313b is made substantially equal without changing the dimensions in the short side direction and the long side direction.
In the type shown in FIG. 6, the upstream side portion 313a and the downstream side portion 313b of the groove 313 are substantially equal without changing the dimensions in the short side direction and the long side direction, and the intermediate portion 313c is directed toward the downstream side. The dimension in the short side direction is gradually reduced and the dimension in the long side direction is gradually increased, and the cross-sectional area of the aerosol passage space is gradually narrowed toward the downstream side.
The illustrated example shows an example of implementation, and the shape of the nozzle is not limited to the above.
[0038]
The case where the nozzle 31 shown in FIG. 2 is used as the nozzle 15 of the composite structure manufacturing apparatus shown in FIG. 1 to obtain a uniform brittle material structure with an area of 30 mm × 30 mm and a film thickness of 10 μm will be described. . When the nozzle 31 is used, the brittle material structure having a thickness of 10 mm × 30 mm and a thickness of 10 μm is produced by moving the nozzle or the base material by 30 mm in the X-axis direction. Next, the nozzle or substrate is moved 10 mm in the Y-axis direction, and the nozzle or substrate is again moved 30 mm in the X-axis direction to produce a brittle material structure having an area of 20 mm × 30 mm and a film thickness of 10 μm. Next, the above operation is repeated once more to produce a 30 mm × 30 mm brittle material structure.
[0039]
Next, as another aspect of the present invention, the nozzle shown in FIG. 7 and FIG. 8 is used as the nozzle 15 of the composite structure manufacturing apparatus shown in FIG. 1, and the area is 30 mm × 30 mm and the film thickness is 10 μm and uniform brittleness. A case where a material structure is to be obtained will be described. The nozzle 41 has a rectangular lead-out opening 42 of 30 mm × 0.5 mm, and has one rectangular introduction opening 43 of 3.0 mm × 3.0 mm. When the nozzle 41 is used, it is possible to produce a brittle material structure having a thickness of 10 μm with a thickness of 30 mm × 30 mm only by moving the nozzle or the substrate by 30 mm in the X-axis direction. The time for moving the nozzle or the substrate is 1/3 as compared with the case where the nozzle 31 is used. However, since the area of the outlet opening 32 of the nozzle 51 is three times the area of the outlet opening 41 compared to the nozzle 41, the aerosol having the same concentration as the inlet opening 33 of the nozzle 31 is supplied to the inlet opening 43 of the nozzle 41. The aerosol concentration at the outlet opening 42 of the nozzle 41 is １／ that of the outlet opening 32 of the nozzle 31, and the film formation rate per unit area is the same as that of the nozzle 31. Therefore, by introducing an aerosol having an aerosol concentration of 3 times introduced into the introduction opening 43 into the introduction opening 43, the brittle material structure preparation time was reduced to 1/3 compared with when the nozzle 31 was used.
[0040]
Next, as another aspect of the present invention, the nozzle 51 shown in FIG. 9 is used as the nozzle 15 of the composite structure manufacturing apparatus shown in FIG. 1, and a uniform brittle material structure with an area of 30 mm × 30 mm and a film thickness of 10 μm. Describe the case of trying to get something. The nozzle 51 has a rectangular lead-out opening 52 of 30 mm × 0.5 mm, and three rectangular introduction openings 53 of 3.0 mm × 3.0 mm.
[0041]
Since the nozzle 51 shown in FIG. 9 has three introduction openings, the aerosol generator 13 is attached to each introduction opening 53. The aerosol concentration supplied to each inlet opening 53 is equivalent to the aerosol concentration supplied to the inlet opening 33 of the nozzle 31, and the aerosol concentration injected from the outlet opening 52 is equivalent to the aerosol concentration injected from the outlet opening 43 of the nozzle 41. Thus, the time for producing a brittle material structure using the nozzle 31 without applying a load to the aerosol generator 13 was reduced to 1/3.
[0042]
Further, since the nozzle 51 widens the groove width from 3.0 mm to 10 mm, compared with the nozzle 41 shown in FIGS. 7 and 8 in which the groove width is increased from 3.0 mm to 30 mm, the aerosol is sufficiently spread in the groove. It is possible to reduce the difference in aerosol concentration between the central portion of the opening 32 and the outer edge portion. Therefore, it is possible to produce a ceramic structure with less unevenness of 30 mm × 30 mm without work such as a polishing step, and it is possible to shorten the ceramic structure production time.
[0043]
Further, as shown in FIG. 9, the nozzle 51 has one rectangular lead-out opening 52 of 30 mm × 0.5 mm and three introduction openings 53 of 3.0 mm × 3.0 mm. When the three nozzles 31 shown in FIG. 3 are arranged without gaps, three concavo-convex portions are formed in the brittle material structure to be manufactured, and it is necessary to perform an operation such as polishing to flatten the concavo-convex portions. However, in the case of the nozzle 51, since the aerosol flow paths merge from three to one inside the nozzle, the unevenness of the brittle material structure to be produced is reduced, and work such as polishing is unnecessary. Therefore, the brittle material structure manufacturing time can be shortened.
[0044]
The nozzle 41 widens the length in the long side direction from the introduction opening 43 to the extraction opening 42 from 3.0 mm to 30 mm, whereas the nozzle 51 extends from the introduction opening 53 to the extraction opening 52 similarly to the nozzle 31. The length in the long side direction is expanded from 3.0 mm to 10 mm, and the grooves widened to 10 mm are arranged without gaps, and an opening 52 having a length of 30 mm in the long side direction is formed. By doing so, the distance from the inlet opening 53 to the outlet opening 52 of the nozzle 51 can be made shorter than that of the nozzle 41, and the apparatus system using the nozzle 41 can be made smaller.
[0045]
Further, since the nozzles 51 are provided with the aerosol generators 13 in the introduction openings 53, the concentration of the aerosol supplied from each of the aerosol generators 13 is adjusted to change the aerosol concentration injected from the outlet opening 52. The shape of the brittle material structure to be produced can be arbitrarily controlled.
[0046]
【The invention's effect】
According to the present invention, when forming a composite structure having a certain relatively large area, a composite structure forming nozzle, a composite structure forming apparatus, and a composite for producing a structure with a uniform film thickness in a short time It is possible to provide a structure forming method.
[Brief description of the drawings]
FIG. 1 is a diagram showing a general configuration of a composite structure manufacturing apparatus that has been conventionally used.
FIG. 2 is a diagram showing an overall configuration of a nozzle (type 1) according to the present invention.
FIG. 3A is a perspective view of one plate-like member constituting the nozzle (type 1) of the present invention, and FIG. 3B is a sectional view of the passage along the line B-B in FIG. The figure, (c) is a figure which shows the channel | path cross section of the part along CC arrow of (a).
FIG. 4 is a perspective view of one plate-like member constituting the nozzle (type 2) of the present invention.
FIG. 5 is a perspective view of one plate-like member constituting the nozzle (type 3) of the present invention.
FIG. 6 is a perspective view of one plate-like member constituting the nozzle (type 4) of the present invention.
FIG. 7 is a diagram showing an overall configuration of a nozzle (type 5) according to the present invention.
FIG. 8 is a perspective view of one plate-like member constituting the nozzle (type 6) of the present invention.
FIG. 9 is a perspective view of one plate-like member constituting the nozzle (type 7) of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 11 ... Gas cylinder, 12 ... Conveyance pipe, 13 ... Aerosol generator, 14 ... Structure formation chamber, 15 ... Nozzle, 16 ... Base material, 17 ... Base material holder, 18 ... Exhaust pump, 21 ... Sensor device, 22 ... Feedback Control circuit, 23 ... wiring, 31 ... nozzle, 311, 312 ... plate-like member constituting nozzle, 313 ... groove serving as aerosol passage space, 313a, 313b, 313c ... part of groove, 32 ... 10 mm × 0.5 mm Rectangular lead-out opening, 33 ... 3.0 mm x 3.0 mm rectangular lead-in opening, 41 ... nozzle, 42 ... 30 mm x 0.5 mm rectangular lead-out opening, 43 ... 3.0 mm x 3.0 mm rectangular lead opening Introduction opening, 51... Nozzle, 52... 30 mm × 0.5 mm rectangular lead-out opening, 53... 3.0 mm × 3.0 mm rectangular introduction opening.

Claims

In a nozzle used in a composite structure forming apparatus for causing an aerosol in which fine particles are dispersed in a gas to collide with a base material to form a structure made of the constituent material of the fine particles on the base material surface, the nozzle includes the aerosol A nozzle body having an aerosol passage space through which the aerosol passes, an introduction opening for introducing the aerosol, and a rectangular lead-out opening for injecting the aerosol, and corresponding to the short side direction of the lead-out opening From the introduction opening portion, the short side direction dimension is continuously decreased toward the short side direction portion of the lead-out opening, whereas from the introduction opening portion corresponding to the long-side direction of the lead-out opening For a composite structure forming apparatus characterized by having a nozzle internal shape that continuously expands the dimension in the long side direction toward the long side direction portion of the lead-out opening Zur.

In a nozzle for use in a composite structure forming apparatus for causing an aerosol in which fine particles are dispersed in a gas to collide with a base material to form a structure made of the constituent material of the fine particles on the surface of the base material, the nozzle includes the aerosol A nozzle body having an aerosol passage space through which the aerosol passes, an introduction opening for introducing the aerosol, and a rectangular lead-out opening for injecting the aerosol, and corresponding to the short side direction of the lead-out opening The short side dimension is continuously reduced from any position in the aerosol passage space of the nozzle body from the introduction opening portion toward the short side direction portion of the lead opening, whereas the lead opening is reduced. The dimension of the long side direction from the site of the introduction opening corresponding to the long side direction of the nozzle toward the site of the long side direction of the lead-out opening is the aerosol of the nozzle body. Composite structure forming apparatus for nozzle and having a continuously expanded so it will nozzle internal shape from an arbitrary position of the passage space.

In a nozzle used in a composite structure forming apparatus for causing an aerosol in which fine particles are dispersed in a gas to collide with a base material to form a structure made of the constituent material of the fine particles on the base material surface, the nozzle includes the aerosol A nozzle body having an aerosol passage space through which the aerosol passes, an introduction opening for introducing the aerosol, and a rectangular lead-out opening for injecting the aerosol, and corresponding to the short side direction of the lead-out opening From the introduction opening portion, the short side direction dimension is continuously decreased toward the short side direction portion of the lead-out opening, whereas from the introduction opening portion corresponding to the long-side direction of the lead-out opening , Continuously increasing the dimension in the long side direction toward the long side portion of the lead-out opening, and the portion including the lead-out opening has a portion having a constant cross-sectional area. Composite structure forming nozzle to symptoms.

In a nozzle for use in a composite structure forming apparatus for causing an aerosol in which fine particles are dispersed in a gas to collide with a base material to form a structure made of the constituent material of the fine particles on the surface of the base material, the nozzle includes the aerosol A nozzle body having an aerosol passage space through which the aerosol passes, an introduction opening for introducing the aerosol, and a rectangular lead-out opening for injecting the aerosol, and corresponding to the short side direction of the lead-out opening The short side dimension is continuously reduced from any position in the aerosol passage space of the nozzle body from the introduction opening portion toward the short side direction portion of the lead opening, whereas the lead opening is reduced. The dimension of the long side direction from the site of the introduction opening corresponding to the long side direction of the nozzle toward the site of the long side direction of the lead-out opening is the aerosol of the nozzle body. Composite structure forming nozzle, characterized in that continuously expanding from an arbitrary position, and the cross-sectional area in the portion including the outlet opening has a constant part of the passage space.

In the aerosol passage space, in a region where the dimension in the short side direction and / or the long side direction continuously changes, the cross-sectional area in the direction perpendicular to the direction in which the aerosol passes continuously decreases toward the downstream side. The composite structure forming nozzle according to claim 1, wherein:

5. The composite structure forming nozzle according to claim 1, wherein the fine particles are brittle material fine particles.

5. The composite structure forming nozzle according to claim 1, wherein the nozzle has a plurality of introduction openings and has one lead-out opening.

5. The composite structure forming nozzle according to claim 1, wherein an aspect ratio of the outlet opening is 10 or more.

5. The composite structure forming nozzle according to claim 1, wherein an aspect ratio of the introduction opening is 2 or less, and the shape of the introduction opening is rectangular or circular.

It comprises at least an aerosol generating means and a nozzle for causing the aerosol to collide with the base material. In the composite structure forming apparatus for forming the structure, the nozzle has a nozzle body having an aerosol passage space through which the aerosol passes, an introduction opening for introducing the aerosol, and a rectangle for injecting the aerosol. And the size of the short side direction is continuously reduced from the part of the introduction opening corresponding to the short side direction of the lead opening toward the part of the short side direction of the lead opening. On the other hand, the dimension in the long side direction is continuously increased from the part of the introduction opening corresponding to the long side direction of the lead-out opening toward the part in the long side direction of the lead-out opening. Composite structure forming apparatus characterized in that it comprises a nozzle internal geometry which will cause large is.

It comprises at least an aerosol generating means and a nozzle for causing the aerosol to collide with the base material. The aerosol in which the fine particles are dispersed in the gas is caused to collide with the base material, and the fine particle constituent material is applied to the base material surface In the composite structure forming apparatus for forming the structure, the nozzle has a nozzle body having an aerosol passage space through which the aerosol passes, an introduction opening for introducing the aerosol, and a rectangle for injecting the aerosol. The size of the short side direction from the part of the introduction opening corresponding to the short side direction of the lead opening toward the part of the short side direction of the lead opening. From the position of the introduction opening corresponding to the long side direction of the lead-out opening, A composite structure forming apparatus characterized by having a nozzle internal shape in which the dimension in the long side direction is continuously enlarged from an arbitrary position in the aerosol passage space of the nozzle body toward a portion in the long side direction of the opening. .

It comprises at least an aerosol generating means and a nozzle for causing the aerosol to collide with the base material. In the composite structure forming apparatus for forming the structure, the nozzle has a nozzle body having an aerosol passage space through which the aerosol passes, an introduction opening for introducing the aerosol, and a rectangle for injecting the aerosol. And the size of the short side direction is continuously reduced from the part of the introduction opening corresponding to the short side direction of the lead opening toward the part of the short side direction of the lead opening. On the other hand, the dimension in the long side direction is continuously increased from the part of the introduction opening corresponding to the long side direction of the lead-out opening toward the part in the long side direction of the lead-out opening. Large Toe, and composite structure forming apparatus, wherein a cross-sectional area has a constant section in the portion including the outlet opening.

It comprises at least an aerosol generating means and a nozzle for causing the aerosol to collide with the base material. The aerosol in which the fine particles are dispersed in the gas is caused to collide with the base material, and the fine particle constituent material is applied to the base material surface In the composite structure forming apparatus for forming the structure, the nozzle has a nozzle body having an aerosol passage space through which the aerosol passes, an introduction opening for introducing the aerosol, and a rectangle for injecting the aerosol. The size of the short side direction from the part of the introduction opening corresponding to the short side direction of the lead opening toward the part of the short side direction of the lead opening. From the position of the introduction opening corresponding to the long side direction of the lead-out opening, A portion having a constant cross-sectional area is continuously enlarged from an arbitrary position in the aerosol passage space of the nozzle body toward the portion in the long side direction of the opening from an arbitrary position in the aerosol passage space. A composite structure forming apparatus comprising:

In the aerosol passage space, in a region where the dimension in the short side direction and / or the long side direction continuously changes, the cross-sectional area in the direction perpendicular to the direction in which the aerosol passes continuously decreases toward the downstream side. The composite structure forming apparatus according to claim 10, wherein:

The composite structure forming apparatus includes a stage for fixing a base material, and the stage is perpendicular to the long side direction of the lead-out opening while maintaining a substantially constant distance between the stage and the lead-out opening. 15. The composite structure forming apparatus according to claim 10, wherein the composite structure is formed by discharging the aerosol from the outlet opening while being operated.

The composite structure forming apparatus includes a stage for fixing a base material, and the nozzle is perpendicular to the long side direction of the lead-out opening while maintaining a substantially constant distance between the stage and the lead-out opening. 15. The composite structure forming apparatus according to claim 10, wherein the composite structure is formed by discharging the aerosol from the outlet opening while being operated.

15. The composite structure forming apparatus according to claim 10, wherein the fine particles are brittle material fine particles.

The composite structure forming apparatus according to claim 10, wherein the apparatus has a plurality of introduction openings and has one lead-out opening.

15. The composite structure forming apparatus according to claim 10, wherein an aspect ratio of the outlet opening is 10 or more.

15. The composite structure forming apparatus according to claim 10, wherein an aspect ratio of the introduction opening is 2 or less, and a shape of the introduction opening is a rectangle or a circle.

In a composite structure forming method in which an aerosol in which fine particles are dispersed in a gas is ejected from a nozzle to collide with a base material, and a structure composed of the constituent material of the fine particles is formed on the surface of the base material, the nozzle includes the nozzle A nozzle body having an aerosol passage space through which aerosol passes, an introduction opening for introducing the aerosol, and a rectangular outlet opening for injecting the aerosol, corresponding to the short side direction of the outlet opening The dimension of the short side direction is continuously decreased from the part of the introduction opening toward the part of the short side direction of the lead opening, whereas the part of the lead opening corresponding to the long side direction of the lead opening And a nozzle internal shape in which the dimension in the long side direction is continuously enlarged toward the long side portion of the lead-out opening.

In a composite structure forming method in which an aerosol in which fine particles are dispersed in a gas is ejected from a nozzle to collide with a base material, and a structure composed of the constituent material of the fine particles is formed on the surface of the base material, the nozzle includes the nozzle A nozzle body having an aerosol passage space through which aerosol passes, an introduction opening for introducing the aerosol, and a rectangular outlet opening for injecting the aerosol, corresponding to the short side direction of the outlet opening While the dimension of the short side direction is continuously reduced from the position of the aerosol passage space of the nozzle body toward the short side direction part of the lead-out opening from the part of the lead-in opening, the lead-out The dimension of the long side direction from the part of the introduction opening corresponding to the long side direction of the opening toward the part of the long side direction of the outlet opening is the air of the nozzle body. Composite structure forming method characterized by having a nozzle internal geometry which will continuously expand from an arbitrary position of the sol passes through the space.

In a composite structure forming method in which an aerosol in which fine particles are dispersed in a gas is ejected from a nozzle to collide with a base material, and a structure composed of the constituent material of the fine particles is formed on the surface of the base material, the nozzle includes the nozzle A nozzle body having an aerosol passage space through which aerosol passes, an introduction opening for introducing the aerosol, and a rectangular outlet opening for injecting the aerosol, corresponding to the short side direction of the outlet opening The dimension of the short side direction is continuously decreased from the part of the introduction opening toward the part of the short side direction of the lead opening, whereas the part of the lead opening corresponding to the long side direction of the lead opening The size in the long side direction is continuously enlarged toward the portion in the long side direction of the lead-out opening, and the portion including the lead-out opening is cut off in the aerosol passage space. Composite structure forming method product is characterized by having a constant section.

In a composite structure forming method in which an aerosol in which fine particles are dispersed in a gas is ejected from a nozzle to collide with a base material, and a structure composed of the constituent material of the fine particles is formed on the surface of the base material, the nozzle includes the nozzle A nozzle body having an aerosol passage space through which aerosol passes, an introduction opening for introducing the aerosol, and a rectangular outlet opening for injecting the aerosol, corresponding to the short side direction of the outlet opening While the dimension of the short side direction is continuously reduced from the position of the aerosol passage space of the nozzle body toward the short side direction part of the lead-out opening from the part of the lead-in opening, the lead-out The dimension of the long side direction from the part of the introduction opening corresponding to the long side direction of the opening toward the part of the long side direction of the outlet opening is the air of the nozzle body. From an arbitrary position of the sol passage space is enlarged continuously, in the aerosol passage space, the composite structure forming method sectional area in a portion including said outlet opening and having a fixed portion.

In the aerosol passage space, in a region where the dimension in the short side direction and / or the long side direction continuously changes, the cross-sectional area in the direction perpendicular to the direction in which the aerosol passes continuously decreases toward the downstream side. 25. The method of forming a composite structure according to claim 21, wherein:

The substrate is fixed to a stage, and while maintaining the distance between the stage and the outlet opening substantially constant, the aerosol is moved from the outlet opening to the aerosol while operating the stage perpendicular to the long side direction of the outlet opening. 25. The composite structure forming method according to claim 21, wherein the composite structure is formed by discharging the water.

The substrate is fixed to a stage, and the aerosol is operated from the outlet opening while operating the nozzle perpendicular to the long side direction of the outlet opening while maintaining a distance between the stage and the outlet opening substantially constant. The composite structure forming apparatus according to claim 21, wherein the composite structure is formed by discharging the gas.

25. The composite structure forming method according to claim 21, wherein the fine particles are brittle material fine particles.

The composite structure forming method according to claim 21, wherein the plurality of introduction openings are provided and the number of the lead-out openings is one.

25. The method of forming a composite structure according to claim 21, wherein an aspect ratio of the lead-out opening is 10 or more.

25. The composite structure forming method according to claim 21, wherein an aspect ratio of the introduction opening is 2 or less, and a shape of the introduction opening is rectangular or circular.