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JP3849935B2 - Particle size distribution measuring device - Google Patents
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JP3849935B2 - Particle size distribution measuring device - Google Patents

Particle size distribution measuring device Download PDF

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Publication number
JP3849935B2
JP3849935B2 JP2002365930A JP2002365930A JP3849935B2 JP 3849935 B2 JP3849935 B2 JP 3849935B2 JP 2002365930 A JP2002365930 A JP 2002365930A JP 2002365930 A JP2002365930 A JP 2002365930A JP 3849935 B2 JP3849935 B2 JP 3849935B2
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Prior art keywords
particle size
size distribution
scattered light
light intensity
response time
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JP2004198208A (en
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稲垣好太
池田英幸
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Horiba Ltd
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Horiba Ltd
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Description

【0001】
【発明の属する技術分野】
本発明は、試料中の測定対象粒子に光を照射して散乱した散乱光強度の角度分布に基づいて粒子径分布を測定する粒子径分布測定装置に関するものである。
【0002】
【従来の技術】
この種の装置では、セル内で分散させた測定対象粒子にレーザ光を照射して散乱されたレーザ光強度の角度分布(散乱パターン)を測定し、その散乱パターンからMIE散乱理論に基づいて測定対象粒子の粒子径分布を求めるようにしている。そして散乱光パターンの測定にはセルの回りに配置した複数の光検出器(例えばホトダイオード)を用い、それら光検出器でそれぞれ散乱光の角度ごとの強度を検出するようにしている(特許文献1)。
【0003】
具体的には、各ホトダイオードに一次遅れ要素であるプリアンプがそれぞれ接続してあって、それらプリアンプによりインピーダンス変換を行うとともに、信号波形を若干鈍らせ、平均化することによって、その後の信号増幅処理やAD変換処理等における円滑性を担保したりノイズ除去を行ったりしている。
【0004】
【特許文献1】
特開2000−214068公報
【0005】
【発明が解決しようとする課題】
ところで、セル中に分散させた測定対象粒子は、異なった径のものが種々混ざり合い、しかもその数の比率が大きく異なっている場合がある。例えば実際には、小径粒子に比べ大径粒子の数が少ないことが多いが、そのような場合小径粒子による散乱光は略間断なく発生するのに対し、大径粒子による散乱光は間欠的に発生することとなる。
【0006】
しかしながら従来は、各プリアンプの応答時間(時定数)を一定かつある程度大きく設定しているため、連続的な信号となっている小径粒子からの散乱光強度信号はより平均化されノイズ等も除去されて好適に測定できるものの、ピーキーな山形波形であって高い周波数成分まで取り込むことが必要な大径粒子からの散乱光強度信号は、プリアンプのフィルタ効果によって歪められるため、その値が精度よく測定されているとは言い難い。
【0007】
一方、前記大径粒子からの散乱光強度信号をも確実に測定すべく、プリアンプの応答時間(時定数)を全て小さくすると、小径粒子からの散乱光強度信号についてその平均化が阻害されノイズ等も除去されないため、測定精度に悪影響が生じ得る。さらに、それに応じてAD変換のサンプリング間隔を小さなものにすると、全体のデータ取得量が膨大なものとなって処理時間が長引いたり、処理回路や演算プログラムに負担がかかるといったおそれも生じる。
【0008】
本発明はかかる問題点に鑑みてなされたものであって、試料中に異なった径の測定対象粒子が種々混ざり合い、しかもその数の比率が大きく異なっている場合においても、それらの粒径分布を確実にかつハードウェア等への負担なく測定できる粒子径分布測定装置を提供することをその主たる課題としたものである。
【0009】
【課題を解決するための手段】
すなわち本発明に係る粒子径分布測定装置は、セル内で分散させた測定対象粒子に光を照射する光照射部と、その光が測定対象粒子にあたって散乱する散乱光強度の角度分布を検出すべく前記セルの回りに複数配置され、前記散乱光を受光するとともにその強度に応じた値の散乱光強度信号を出力する検出器と、それら検出器から出力される各散乱光強度信号を受信し所定の処理を行う信号処理部と、この信号処理部で処理された散乱光強度信号の値に基づいて粒子径分布を算出する算出部とを備えた粒子径分布測定装置であって、前記信号処理部が、各検出器から出力される散乱光強度信号を所定の応答時間で伝達する複数の伝達要素を備え、数が多いと思われる径の粒子を主検出対象とする検出器に対応する伝達要素の応答時間を長くし、数が少ないと思われる径の粒子を主検出対象とする検出器に対応する伝達要素の応答時間を短くしていることを特徴とする。
また、本発明に係る粒子径分布測定装置は、セル内で分散させた測定対象粒子に光を照射する光照射部と、その光が測定対象粒子にあたって散乱する散乱光強度の角度分布を検出すべく前記セルの回りに複数配置され、前記散乱光を受光するとともにその強度に応じた値の散乱光強度信号を出力する検出器と、それら検出器から出力される各散乱光強度信号を受信し所定の処理を行う信号処理部と、この信号処理部で処理された散乱光強度信号の値に基づいて粒子径分布を算出する算出部とを備えた粒子径分布測定装置であって、前記信号処理部が、各検出器から出力される散乱光強度信号を所定の応答時間で伝達する複数の伝達要素を備え、検出の主対象径が大きい検出器に対応する伝達要素ほど、前記応答時間を短く設定していることを特徴とする。
【0010】
このようなものであれば、試料中に異なった径の測定対象粒子が種々混ざり合いしかもその数の比率が大きく異なっている場合であっても、各径の粒子数の多い少ないの推定さえある程度できていれば、数が多いと思われる径の粒子を主検出対象とする検出器に対応する伝達要素の応答時間を長くし、数が少ないと思われる径の粒子を主検出対象とする検出器に対応する伝達要素の応答時間を短くすることで、各散乱光強度信号の測定を精度よく行うことができる。
【0011】
実際には、小径粒子に比べ大径粒子の数が少ないことが多いため、検出の主対象となる粒子の径が大きい検出器に対応する伝達要素ほど、その応答時間が短くなるように設定しておくことが望ましい。
【0012】
また前記信号処理部が前記伝達要素に接続されたADコンバータを更に備えたものであれば、そのADコンバータによるAD変換間隔を各伝達要素の応答時間に対応させて異ならせておく、具体的には応答時間の長い伝達要素ほどその出力信号に対するAD変換の間隔を長く設定しておくことにより、全体のデータ取得量の無駄を抑制できるため、処理時間が長引いたり、処理回路や演算プログラムに負担がかかるといった不具合を回避できる。
【0013】
具体的実施態様としては、前記伝達要素が、オペアンプを利用した一次遅れ系積分回路で構成してあるものを挙げることができる。
【0014】
【発明の実施の形態】
以下に本発明の一実施形態について図1、図2、図3を参照して説明する。
【0015】
本実施形態に係る粒子径分布測定装置1は、粒子に光を照射した際に生じる散乱光の散乱パターン(散乱光強度の角度分布)が、MIE散乱理論から粒子径によって定まることを利用し、前記散乱パターンを検出することによって粒子径分布を測定するようにしたものである。具体的にこのものは、図1に模式的に示すように、測定対象粒子Sを溶媒中に分散させてなる試料を収容するセル2と、そのセル2にコヒーレントな基本光たるレーザ光Lを照射する光照射部5と、前記セル2の周囲に配置され、レーザ光Lを照射されて発生した散乱光及び/又は回折光(以下散乱光という)LSを受光し、その強度に応じたアナログ電気信号である散乱光強度信号を出力する複数の検出器3と、それら検出器3から出力される各散乱光強度信号を受信し変換等の処理を行う信号処理部4と、その信号処理部4で処理された各散乱光強度信号の値に基づいて粒子径分布を算出する算出部7とを備えている。なお符号6は、検出器3の受光面に散乱光を集光するための凸レンズである。
【0016】
各部を詳述すると、前記セル2は、図1に示すように、ガラス等の透明容器であって、例えば図示しないポンプ等により試料を循環させる試料循環経路上に配置してある。そしてその流入ポート21から試料を流入させるとともに吐出ポート22から試料を吐出させることにより、内部の試料が常に流動し、測定対象粒子Sが分散するようにしたフロー式のものである。
【0017】
光照射部5は、例えば半導体レーザ等の光源51と、光源51から発せられたレーザ光Lをセル2に導く光案内機構52とを備えてなる。図1中符号521は、光案内機構52を構成するものであって光源51から出たレーザ光Lの径を拡大するビーム拡大器である。光源51は、もちろんガスレーザ等でもよく、測りたい粒子径レンジに適切な波長の光を発するものを選択すればよい。なお、本明細書で「光」とは、可視光の他、紫外光や赤外光も含む電磁波をも含むものである。
【0018】
検出器3は、例えばホトダイオードであり、本実施形態では前方散乱光を測定すべく、セル2を透過したレーザ光Lの光軸を中心とする扇形の受光面を有したものである。そして図2に示すように、それら各検出器3の受光面を同心円状に配置して検出器アレイ3Rを構成している。
【0019】
信号処理部4は、図1、図3に示すように、検出器3から出力される各散乱光強度信号に、インピーダンス変換、平均化、AD変換等の処理を施すもので、各検出器3に接続した伝達要素たるプリアンプ41、1又は複数のADコンバータ42、前記各プリアンプ41をADコンバータ42に選択的に接続するマルチプレクサ(アナログスイッチ)43、バッファメモリ44等を備えたものである。プリアンプ41は、オペアンプ411、抵抗412、コンデンサ413を利用した積分回路であり、一次遅れ要素としての役割を担う。アナログスイッチ43は、外部からの制御信号により接点が切り替わり、いずれかのプリアンプ41をADコンバータ42に選択的に接続するものである。ADコンバータ42は周知のものであり、外部から与えられる変換開始信号等に基づいてアナログ信号を所定間隔でサンプリングし、デジタル信号に変換するものである。そしてデジタル信号に変換された散乱光強度信号が、バッファメモリ44を介して、後述する算出部7に送信されるように構成している。
【0020】
算出部7は、例えば処理速度や使い勝手、保守等の観点から、パソコン等の汎用コンピュータと専用処理コンピュータとに物理的に分離して構成したものであって(もちろん一体でも構わない)、全体としての基本的な機器構成としては、図4に示すように、CPU101に加え、入出力インタフェース102、記憶装置104(内部メモリ1042及び外部メモリ1041)等からなり、ディスプレイ73や入力手段74、プリンタ75等を接続してある。そして前記ADコンバータ42からデジタル信号として出力される各検出器3毎の散乱光強度信号値を入出力インタフェース102から取り込み、前記記憶装置104に記憶させたMIE散乱理論に基づく所定のプログラムにしたがって演算することにより粒度径分布等をディスプレイ73やプリンタ75等に出力するものである。
【0021】
しかして本実施形態では、検出の主対象となる粒子の径が大きい検出器3に対応するプリアンプ41ほど、その応答時間を短く設定するとともに、応答時間の短いプリアンプ41からの信号ほど、ADコンバータ42の変換間隔(サンプリング間隔)を短くするように設定している。
【0022】
具体的には、中心、すなわち基本光光軸に近い検出器に対応するプリアンプ41ほど抵抗値×コンデンサ容量をパラメータとする応答時間(時定数)を小さくし、外側の検出器3に対応するプリアンプ41ほど応答時間を大きく設定している。この応答時間の設定方法としては、例えば中心からの距離に反比例するように各検出器3の応答時間を定めればよい。更に、応答時間の小さいプリアンプ41からの信号をAD変換する際はサンプリング間隔を相応に小さくし、応答時間の大きいプリアンプ41からの信号をAD変換する際はサンプリング間隔を相応に大きくしている。
【0023】
一方、一般的に試料中に含まれる大径粒子の粒子数は少なく、小径粒子の粒子数は多くなる傾向がある。したがって大径粒子がセルを通過する頻度が低くなり、大径粒子からの散乱光LSによる散乱光強度信号波形は、一様な大きさのものではなく、間欠的に生じる幅の狭い鋭い山形のものとなる。しかして本実施形態では、大径粒子に対応するプリアンプ41ほど応答時間を短くしているため、高い周波数成分を含む前記山形の波形をカットしたり大きくなまらせることなく確実にADコンバータ42に伝達することができる。しかもADコンバータ42のサンプリング間隔を十分小さく設定しているため、ピーキーなアナログ散乱光強度信号の値を精度よくデジタル値に変換できる。
【0024】
これとは逆に小径粒子は粒子数が多く、セルを一様に通過するため、それら小径粒子からの散乱光LSによる散乱光強度信号波形は略一定のものとなるところ、本実施形態ではこの小径粒子に対応するプリアンプ41の応答時間を長く設定しているため、前記波形がさらに平均化されてAD変換の際の精度が向上する。しかもADコンバータ42のサンプリング間隔を大きく設定しているため、一定時間に取り込むデータ量が無駄に増加することがない。
【0025】
このように本実施形態によれば、可及的に少ないデータ量でハードソフトに負担をかけることなく、しかも数の少ない大径粒子から数の多い小径粒子に至るまで正確な粒径分布データが得られる。
【0026】
なお、本発明は上記実施形態に限られるものではない。例えばプリアンプの応答時間は、各個に異ならせる必要はなく、複数毎に段階的に異ならせるようにしても構わない。また応答時間の長さを測定モードにより設定しても構わない。
【0027】
さらに、プリアンプの応答時間を変更可能に構成してもよい。具体的には抵抗を切り替え可能にしたり可変のものを利用した構成にすればよい。その場合、ADコンバータの変換間隔もそれに応じて変更できるようにしておくことが望ましい。
【0028】
伝達要素たるプリアンプも一次遅れ要素のみならず多次遅れ要素であって構わない。
【0029】
またプリアンプの応答時間やADコンバータの変換間隔は、要は数の少ない粒子に対応する検出器のものほど短くすればよいのであって、試料中に含まれる粒子数が例えば小径のものほど少ないような傾向であれば、前記実施形態とは逆の設定になるのはいうまでもない。
【0030】
その他本発明は、上記図示例に限られず、その趣旨を逸脱しない範囲で種々の変更が可能である。
【0031】
【発明の効果】
以上に詳述したように、本発明によれば、試料中に異なった径の測定対象粒子が種々混ざり合いしかもその数の比率が大きく異なっている場合であっても、各径の粒子数の多い少ないの推定さえある程度できていれば、数が多いと思われる径の粒子を主検出対象とする検出器に対応する伝達要素の応答時間を長くし、数が少ないと思われる径の粒子を主検出対象とする検出器に対応する伝達要素の応答時間を短くすることで、各散乱光強度信号の測定を精度よく行うことができる。
【0032】
また前記信号処理部が前記伝達要素に接続されたADコンバータを更に備えたものであれば、そのADコンバータによるAD変換間隔を各伝達要素の応答時間に対応させて異ならせておく、具体的には応答時間の長い伝達要素ほどその出力信号に対するAD変換の間隔を長く設定しておくことにより、全体のデータ取得量を可及的に減らすことができ、無駄を抑制できるため、処理時間が長引いたり、処理回路や演算プログラムに負担がかかるといった不具合を回避できる。
【図面の簡単な説明】
【図1】本発明の一実施形態における動的散乱式粒子径分布測定装置の全体模式図。
【図2】同実施形態における検出器アレイを示す模式図。
【図3】同実施形態における信号処理部の模式的回路図。
【図4】同実施形態における算出部の機器構成図。
【符号の説明】
1・・・粒子径分布測定装置
2・・・セル
3・・・検出器
4・・・信号処理部
41・・・伝達要素(プリアンプ)
411・・・オペアンプ
42・・・ADコンバータ
5・・・光照射部
7・・・算出部
S・・・測定対象粒子
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a particle size distribution measuring apparatus for measuring a particle size distribution based on an angular distribution of scattered light intensity that is scattered by irradiating light to a measurement target particle in a sample.
[0002]
[Prior art]
This type of device measures the angular distribution (scattering pattern) of the intensity of the scattered laser light by irradiating the measurement target particles dispersed in the cell with laser light, and measures the scattering pattern based on the MIE scattering theory. The particle size distribution of the target particles is obtained. For the measurement of the scattered light pattern, a plurality of photodetectors (eg, photodiodes) arranged around the cell are used, and the intensity for each angle of the scattered light is detected by these photodetectors (Patent Document 1). ).
[0003]
Specifically, pre-amplifiers that are first-order lag elements are connected to each photodiode, and impedance conversion is performed by these pre-amplifiers, and the signal waveform is slightly dulled and averaged, so that subsequent signal amplification processing and Smoothness in AD conversion processing or the like is ensured or noise removal is performed.
[0004]
[Patent Document 1]
[Patent Document 1] Japanese Patent Laid-open No. 2000-21468
[Problems to be solved by the invention]
By the way, the particles to be measured dispersed in the cell may be mixed in various sizes, and the ratio of the numbers may be greatly different. For example, in actuality, the number of large-diameter particles is often smaller than that of small-diameter particles. In such a case, scattered light from small-diameter particles is generated without interruption, whereas scattered light from large-diameter particles is intermittent. Will occur.
[0006]
Conventionally, however, the response time (time constant) of each preamplifier is set to be constant and large to some extent, so that the scattered light intensity signal from small-diameter particles, which is a continuous signal, is further averaged to remove noise and the like. However, the scattered light intensity signal from large-diameter particles that have a peaky chevron waveform and need to capture high frequency components is distorted by the filter effect of the preamplifier. It's hard to say.
[0007]
On the other hand, if the response time (time constant) of the preamplifier is all made small in order to reliably measure the scattered light intensity signal from the large particle, the averaging of the scattered light intensity signal from the small particle is hindered, such as noise. Is also not removed, which may adversely affect measurement accuracy. Furthermore, if the sampling interval for AD conversion is made small accordingly, the total amount of data acquisition becomes enormous, which may prolong the processing time and impose a burden on the processing circuit and the arithmetic program.
[0008]
The present invention has been made in view of such problems, and even in the case where various measurement target particles having different diameters are mixed in a sample and the ratio of the number is greatly different, the particle size distribution thereof is also provided. The main object is to provide a particle size distribution measuring apparatus that can reliably measure the particle size without burden on hardware or the like.
[0009]
[Means for Solving the Problems]
That is, the particle size distribution measuring apparatus according to the present invention should detect a light irradiation unit that irradiates light to the measurement target particles dispersed in the cell, and an angular distribution of scattered light intensity that scatters on the measurement target particles. A plurality of detectors arranged around the cell, receiving the scattered light and outputting a scattered light intensity signal having a value corresponding to the intensity, and receiving each scattered light intensity signal output from the detectors. A particle size distribution measuring apparatus comprising: a signal processing unit that performs the above-described processing; and a calculation unit that calculates a particle size distribution based on the value of the scattered light intensity signal processed by the signal processing unit, wherein the signal processing The unit is equipped with a plurality of transmission elements that transmit the scattered light intensity signal output from each detector with a predetermined response time, and transmission corresponding to a detector whose main detection target is a particle having a diameter that seems to be large Increase element response time Characterized in that it shortens the response time of the transfer element corresponding to the detector for the particle diameter you think that the fewer the main detection target.
Further, the particle size distribution measuring apparatus according to the present invention detects a light irradiation unit that irradiates light to the measurement target particles dispersed in the cell, and an angular distribution of scattered light intensity that the light scatters on the measurement target particles. Therefore, a plurality of detectors are arranged around the cell, receive the scattered light and output a scattered light intensity signal having a value corresponding to the intensity, and receive each scattered light intensity signal output from the detector. A particle size distribution measuring apparatus comprising: a signal processing unit that performs a predetermined process; and a calculation unit that calculates a particle size distribution based on a value of a scattered light intensity signal processed by the signal processing unit. The processing unit includes a plurality of transmission elements that transmit the scattered light intensity signals output from the respective detectors with a predetermined response time, and the transmission elements corresponding to detectors having a large main target diameter for detection have the response time as described above. That it ’s set short. And butterflies.
[0010]
In such a case, even if the particles to be measured having different diameters are mixed in the sample and the ratio of the numbers is greatly different, there is even a small estimate that the number of particles of each diameter is large. If possible, increase the response time of the transfer element corresponding to the detector whose main detection target is a particle with a large number of particles, and detect the particle with a small particle size as the main detection target. By shortening the response time of the transfer element corresponding to the vessel, each scattered light intensity signal can be measured with high accuracy.
[0011]
In practice, the number of large particles is often smaller than that of small particles, so the transfer element corresponding to a detector with a large particle size as the main target of detection is set so that its response time is shorter. It is desirable to keep it.
[0012]
In addition, if the signal processing unit further includes an AD converter connected to the transmission element, the AD conversion interval by the AD converter is made different according to the response time of each transmission element. Since the transmission element with a longer response time can set the interval of AD conversion for the output signal longer, the waste of the entire data acquisition amount can be suppressed, so that the processing time is prolonged and the processing circuit and calculation program are burdened. It is possible to avoid problems such as that.
[0013]
As a specific embodiment, there can be mentioned one in which the transfer element is composed of a first-order lag integration circuit using an operational amplifier.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to FIGS. 1, 2, and 3.
[0015]
The particle size distribution measuring apparatus 1 according to the present embodiment utilizes the fact that the scattering pattern of scattered light (angle distribution of scattered light intensity) generated when light is irradiated on the particles is determined by the particle diameter from the MIE scattering theory, The particle size distribution is measured by detecting the scattering pattern. Specifically, as schematically shown in FIG. 1, a cell 2 that contains a sample in which particles S to be measured are dispersed in a solvent, and a laser beam L that is a coherent fundamental light are supplied to the cell 2. An irradiation unit 5 that is disposed around the cell 2 and receives scattered light and / or diffracted light (hereinafter referred to as scattered light) LS generated by irradiation with the laser light L, and an analog corresponding to the intensity thereof A plurality of detectors 3 that output scattered light intensity signals that are electrical signals, a signal processing unit 4 that receives each scattered light intensity signal output from the detectors 3 and performs processing such as conversion, and the signal processing unit And a calculation unit 7 that calculates the particle size distribution based on the value of each scattered light intensity signal processed in step 4. Reference numeral 6 denotes a convex lens for condensing scattered light on the light receiving surface of the detector 3.
[0016]
Specifically, as shown in FIG. 1, the cell 2 is a transparent container made of glass or the like, and is arranged on a sample circulation path for circulating the sample by a pump (not shown), for example. Then, by flowing the sample from the inflow port 21 and discharging the sample from the discharge port 22, the internal sample always flows and the measurement target particles S are dispersed.
[0017]
The light irradiation unit 5 includes a light source 51 such as a semiconductor laser and a light guide mechanism 52 that guides the laser light L emitted from the light source 51 to the cell 2. Reference numeral 521 in FIG. 1 is a beam expander that constitutes the light guiding mechanism 52 and expands the diameter of the laser light L emitted from the light source 51. The light source 51 may of course be a gas laser or the like, and a light source that emits light having a wavelength suitable for the particle size range to be measured may be selected. In this specification, “light” includes not only visible light but also electromagnetic waves including ultraviolet light and infrared light.
[0018]
The detector 3 is, for example, a photodiode. In the present embodiment, the detector 3 has a fan-shaped light receiving surface centering on the optical axis of the laser light L transmitted through the cell 2 in order to measure forward scattered light. As shown in FIG. 2, the detector array 3R is configured by concentrically arranging the light receiving surfaces of the detectors 3.
[0019]
As shown in FIGS. 1 and 3, the signal processing unit 4 performs processing such as impedance conversion, averaging, and AD conversion on each scattered light intensity signal output from the detector 3. A preamplifier 41, one or a plurality of AD converters 42, and a multiplexer (analog switch) 43 that selectively connects each preamplifier 41 to the AD converter 42, a buffer memory 44, and the like. The preamplifier 41 is an integration circuit using an operational amplifier 411, a resistor 412, and a capacitor 413, and plays a role as a first-order lag element. The analog switch 43 is configured to selectively connect one of the preamplifiers 41 to the AD converter 42 by switching contacts according to a control signal from the outside. The AD converter 42 is a well-known one, and samples an analog signal at a predetermined interval based on a conversion start signal or the like given from the outside and converts it into a digital signal. Then, the scattered light intensity signal converted into the digital signal is configured to be transmitted to the calculation unit 7 described later via the buffer memory 44.
[0020]
The calculation unit 7 is configured by physically separating a general-purpose computer such as a personal computer and a dedicated processing computer from the viewpoints of, for example, processing speed, usability, and maintenance (of course, they may be integrated), and as a whole As shown in FIG. 4, the basic device configuration includes an input / output interface 102, a storage device 104 (an internal memory 1042 and an external memory 1041), etc. in addition to the CPU 101, and includes a display 73, input means 74, and printer 75. Etc. are connected. Then, the scattered light intensity signal value for each detector 3 output as a digital signal from the AD converter 42 is fetched from the input / output interface 102 and calculated according to a predetermined program based on the MIE scattering theory stored in the storage device 104. By doing so, the particle size distribution or the like is output to the display 73, the printer 75, or the like.
[0021]
Thus, in the present embodiment, the preamplifier 41 corresponding to the detector 3 having a large particle size as the main target of detection has a shorter response time, and the signal from the preamplifier 41 with a shorter response time is the AD converter. 42 is set to shorten the conversion interval (sampling interval).
[0022]
Specifically, the preamplifier 41 corresponding to the center, that is, the detector closer to the basic optical axis, has a smaller response time (time constant) with the resistance value × capacitor capacity as a parameter, and the preamplifier corresponding to the outer detector 3. The response time is set as large as 41. As a method for setting the response time, for example, the response time of each detector 3 may be determined so as to be inversely proportional to the distance from the center. Further, when AD converting a signal from the preamplifier 41 having a short response time, the sampling interval is correspondingly reduced, and when AD converting a signal from the preamplifier 41 having a long response time, the sampling interval is appropriately increased.
[0023]
On the other hand, generally, the number of large-sized particles contained in a sample is small, and the number of small-sized particles tends to be large. Therefore, the frequency with which large-diameter particles pass through the cell is low, and the scattered light intensity signal waveform due to the scattered light LS from the large-diameter particles is not of a uniform size, but is a sharp mountain with a narrow width that occurs intermittently It will be a thing. In this embodiment, the preamplifier 41 corresponding to the large-diameter particles has a shorter response time. Therefore, the chevron-shaped waveform including high frequency components is reliably transmitted to the AD converter 42 without being cut or enlarged. can do. Moreover, since the sampling interval of the AD converter 42 is set sufficiently small, the value of the peaky analog scattered light intensity signal can be converted into a digital value with high accuracy.
[0024]
On the contrary, since the small-diameter particles have a large number of particles and pass through the cells uniformly, the scattered light intensity signal waveform due to the scattered light LS from the small-diameter particles becomes substantially constant. Since the response time of the preamplifier 41 corresponding to the small-diameter particles is set to be long, the waveform is further averaged to improve the accuracy in AD conversion. In addition, since the sampling interval of the AD converter 42 is set to be large, the amount of data captured in a certain time does not increase unnecessarily.
[0025]
As described above, according to the present embodiment, accurate particle size distribution data can be obtained from a large number of small particles to a large number of small particles without burdening the hardware and software with as little data as possible. can get.
[0026]
The present invention is not limited to the above embodiment. For example, the response time of the preamplifier need not be different for each individual, but may be varied step by step for a plurality of preamplifiers. The length of the response time may be set according to the measurement mode.
[0027]
Furthermore, the response time of the preamplifier may be changed. Specifically, a configuration in which the resistance can be switched or a variable one is used may be used. In that case, it is desirable that the conversion interval of the AD converter can be changed accordingly.
[0028]
The preamplifier as a transfer element may be a multi-order delay element as well as a first-order delay element.
[0029]
In addition, the response time of the preamplifier and the conversion interval of the AD converter may be shortened as the detector corresponding to the smaller number of particles, and the number of particles contained in the sample is smaller, for example, as the particle size is smaller. Needless to say, the setting is opposite to that in the above embodiment.
[0030]
In addition, the present invention is not limited to the above illustrated example, and various modifications can be made without departing from the spirit of the present invention.
[0031]
【The invention's effect】
As described in detail above, according to the present invention, even when the measurement target particles having different diameters are mixed in the sample and the ratio of the numbers is greatly different, If even a few estimations have been made to a certain extent, the response time of the transfer element corresponding to the detector whose main detection target is a particle with a large number of particles is lengthened, and particles with a small number of particles Each scattered light intensity signal can be measured with high accuracy by shortening the response time of the transfer element corresponding to the detector as the main detection target.
[0032]
In addition, if the signal processing unit further includes an AD converter connected to the transmission element, the AD conversion interval by the AD converter is made different according to the response time of each transmission element. The longer the response time, the longer the transmission time, the longer the AD conversion interval with respect to the output signal, the more the total data acquisition amount can be reduced as much as possible, and the waste can be suppressed. Or a burden on the processing circuit or the arithmetic program can be avoided.
[Brief description of the drawings]
FIG. 1 is an overall schematic diagram of a dynamic scattering particle size distribution measuring apparatus according to an embodiment of the present invention.
FIG. 2 is a schematic diagram showing a detector array in the same embodiment.
FIG. 3 is a schematic circuit diagram of a signal processing unit in the embodiment.
FIG. 4 is a device configuration diagram of a calculation unit in the embodiment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Particle size distribution measuring apparatus 2 ... Cell 3 ... Detector 4 ... Signal processing part 41 ... Transmission element (preamplifier)
411... Operational amplifier 42... AD converter 5... Light irradiation unit 7.

Claims (5)

セル内で分散させた測定対象粒子に光を照射する光照射部と、その光が測定対象粒子にあたって散乱する散乱光強度の角度分布を検出すべく前記セルの回りに複数配置され、前記散乱光を受光するとともにその強度に応じた値の散乱光強度信号を出力する検出器と、それら検出器から出力される各散乱光強度信号を受信し所定の処理を行う信号処理部と、この信号処理部で処理された散乱光強度信号の値に基づいて粒子径分布を算出する算出部とを備えた粒子径分布測定装置であって、
前記信号処理部が、各検出器から出力される散乱光強度信号を所定の応答時間で伝達する複数の伝達要素を備え、数が多いと思われる径の粒子を主検出対象とする検出器に対応する伝達要素の応答時間を長くし、数が少ないと思われる径の粒子を主検出対象とする検出器に対応する伝達要素の応答時間を短くしていることを特徴とする粒子径分布測定装置。
A light irradiation unit for irradiating the measurement target particles dispersed in the cell with light, and a plurality of the light irradiation units disposed around the cell to detect the angular distribution of scattered light intensity scattered by the measurement target particles. And a signal processing unit that receives the scattered light intensity signals output from the detectors and performs predetermined processing, and this signal processing. A particle size distribution measuring apparatus comprising a calculation unit that calculates a particle size distribution based on the value of the scattered light intensity signal processed by the unit,
The signal processing unit includes a plurality of transmission elements that transmit a scattered light intensity signal output from each detector with a predetermined response time, and a detector that mainly detects particles having a diameter that seems to be large in number Particle size distribution measurement characterized in that the response time of the corresponding transfer element is lengthened and the response time of the transfer element corresponding to the detector whose main detection target is a particle with a small number of particles is shortened. apparatus.
セル内で分散させた測定対象粒子に光を照射する光照射部と、その光が測定対象粒子にあたって散乱する散乱光強度の角度分布を検出すべく前記セルの回りに複数配置され、前記散乱光を受光するとともにその強度に応じた値の散乱光強度信号を出力する検出器と、それら検出器から出力される各散乱光強度信号を受信し所定の処理を行う信号処理部と、この信号処理部で処理された散乱光強度信号の値に基づいて粒子径分布を算出する算出部とを備えた粒子径分布測定装置であって、A light irradiation unit for irradiating the measurement target particles dispersed in the cell with light, and a plurality of the light irradiation units disposed around the cell to detect the angular distribution of scattered light intensity scattered by the measurement target particles. And a signal processing unit that receives the scattered light intensity signals output from the detectors and performs predetermined processing, and this signal processing. A particle size distribution measuring apparatus comprising a calculation unit that calculates a particle size distribution based on the value of the scattered light intensity signal processed by the unit,
前記信号処理部が、各検出器から出力される散乱光強度信号を所定の応答時間で伝達する複数の伝達要素を備え、検出の主対象径が大きい検出器に対応する伝達要素ほど、前記応答時間を短く設定していることを特徴とする粒子径分布測定装置。The signal processing unit includes a plurality of transmission elements that transmit the scattered light intensity signals output from the detectors with a predetermined response time, and the transmission elements corresponding to the detectors having a large main target diameter of detection have the response. A particle size distribution measuring apparatus characterized in that the time is set short.
前記信号処理部が前記伝達要素に接続されたADコンバータを更に備えたものであって、前記ADコンバータによる変換間隔を各伝達要素の応答時間に対応させて異なったものにしている請求項1又は2記載の粒子径分布測定装置。It is one in which the signal processing unit further comprising a connected AD converter to said transfer element, the claim would be different in correspondence and to the response time of each transfer element conversion interval by the AD converter 1 or 2. The particle size distribution measuring apparatus according to 2. 応答時間の長い伝達要素からの信号ほど、ADコンバータによる変換間隔を長く設定している請求項記載の粒子径分布測定装置。4. The particle size distribution measuring apparatus according to claim 3, wherein the conversion interval by the AD converter is set longer for a signal from a transmission element having a longer response time. 前記伝達要素が、オペアンプを利用した一次遅れ系積分回路で構成してある請求項1、2、3又は4記載の粒子径分布測定装置。  The particle size distribution measuring apparatus according to claim 1, 2, 3, or 4, wherein the transmission element is constituted by a first-order lag integration circuit using an operational amplifier.
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