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JP3854350B2 - Semiconductor device - Google Patents
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JP3854350B2 - Semiconductor device - Google Patents

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JP3854350B2
JP3854350B2 JP32060896A JP32060896A JP3854350B2 JP 3854350 B2 JP3854350 B2 JP 3854350B2 JP 32060896 A JP32060896 A JP 32060896A JP 32060896 A JP32060896 A JP 32060896A JP 3854350 B2 JP3854350 B2 JP 3854350B2
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chip
semiconductor
semiconductor chip
semiconductor device
main surface
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JPH10163248A (en
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好彦 嶋貫
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Renesas Technology Corp
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Renesas Technology Corp
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/072Connecting or disconnecting of bump connectors
    • H10W72/07251Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/29Bond pads specially adapted therefor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/531Shapes of wire connectors
    • H10W72/5363Shapes of wire connectors the connected ends being wedge-shaped
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/59Bond pads specially adapted therefor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/874On different surfaces
    • H10W72/884Die-attach connectors and bond wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/15Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/754Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/756Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink

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Description

【0001】
【発明の属する技術分野】
本発明は半導体チップおよびそれを用いた半導体装置に関し、特に、半導体チップに形成されたチップ電極のレイアウトに適用して有効な技術に関する。
【0002】
【従来の技術】
半導体装置の多機能化に伴ってそれに用いられる半導体チップはますます多品種になり、チップサイズも多種多様となっている。そして、チップ外周に沿って形成されている場合、半導体チップ90,100のサイズが異なればそれぞれのチップ電極91,101のレイアウトはピッチおよびサイズともに異なっている(図9)。
【0003】
なお、半導体チップのチップ電極のレイアウトについて詳しく記載している例としては、たとえば、日刊工業新聞社発行、「CMOSデバイスハンドブック」(昭和62年 9月29日発行)、P482〜P486がある。
【0004】
【発明が解決しようとする課題】
このようにチップ電極のレイアウトが区々であることから、半導体チップが搭載されるリードフレームなどのチップ接続材はこれに合わせて多くのパターンを用意する必要がある。したがって、半導体チップの種類が増加するに比例してチップ接続材の種類も増加し、標準化を行うことが困難になる。
【0005】
これでは、チップ接続材一つ当たりのコストが上昇し、延いてはこのチップ接続材を用いた半導体装置自体のコストアップを招来することになる。
【0006】
そこで、本発明の目的は、異なるチップサイズの半導体チップを相互に共通のチップ接続材を適用することのできる技術を提供することにある。
【0007】
本発明の前記ならびにその他の目的と新規な特徴は、本明細書の記述および添付図面から明らかになるであろう。
【0008】
【課題を解決するための手段】
本願において開示される発明のうち、代表的なものの概要を簡単に説明すれば、次のとおりである。
【0009】
すなわち、本発明の半導体装置は、集積回路および前記集積回路と外部との間で複数のバンプを介して信号の授受を行う複数のチップ電極が形成された半導体チップを有する半導体装置であって、前記チップ電極が、前記半導体チップとサイズの異なる他の半導体チップに形成されたチップ電極と、前記各半導体チップの中心点を基準に全体的に連続する同一の升目形状および同一のピッチに形成され、これら複数のチップ電極それぞれの上に前記バンプが形成され、前記半導体チップのバンプは、一主面に形成されたリードと、前記リードに接続され前記一主面と対向する他の主面まで伸びるスルーホール配線とを有する樹脂基板の前記リードに接続され、前記スルーホール配線は、樹脂基板の前記一主面から前記他の主面まで一直線上に伸びており、さらに前記樹脂基板の前記他の主面には前記スルーホール配線と接続される複数のバンプが設けられているものである。
【0010】
本発明の半導体装置に用いられる半導体チップはバンプを介したフリップチップ接続またはボンディングワイヤを介したワイヤ接続により電気的に接続することができる。チップ電極はアルミニウムで形成することができる。
【0012】
上記した手段によれば、相互にサイズの異なる半導体チップに形成されたチップ電極を同じ配置としているので、異なるチップサイズの半導体チップに対して共通のチップ接続材を適用することが可能になる。
【0013】
【発明の実施の形態】
以下、本発明の実施の形態を図面に基づいて詳細に説明する。なお、実施の形態を説明するための全図において同一の機能を有する部材には同一の符号を付し、その繰り返しの説明は省略する。
【0014】
(実施の形態1)
図1は本発明の一実施の形態である半導体チップを示す平面図、図2は図1の半導体チップを用いて構成された半導体装置を示す断面図、図3は図2の半導体装置を概略的に示す斜視図である。
【0015】
図1(a)に示す場合において、所定の集積回路の形成された(Px1×Py1)サイズの半導体チップ10には、集積回路と外部との間で信号の授受を行うためのたとえばAl(アルミニウム)からなるチップ電極11が中央寄りにおいて升目状に複数形成されている。このチップ電極11は、横方向にはA1,A2,・・・An のピッチで、縦方向にはB1,B2,・・・Bn のピッチでそれぞれ配置されている。
【0016】
これに対し、図1(b)に示す場合において、半導体チップ20は図1(a)よりも小さい(Px2×Py2)サイズを有している。しかしながら、半導体チップ20のチップ電極21は半導体チップ10のそれと同じ配置となっている。つまり、図1(a)に示す場合と同じように、チップ電極21はチップ中央寄りにその外形に対応した升目状に配列され、横方向にA1,A2,・・・An の、縦方向にB1,B2,・・・Bn のピッチをもって形成され、さらにチップ電極11と同一のサイズとなっている。但し、電極サイズは相互に異なっていてもよい。
【0017】
このように半導体チップ10のチップ電極11と半導体チップ20のチップ電極21とが半導体チップの中心点を基準にして相互に同一のレイアウト形状および同一のピッチで形成されているので、図1(a),(b)中の二点鎖線で示すようにチップサイズは異なっていてもそれぞれのチップ電極11,21は位置的に完全に一致することになる。
【0018】
図1(a)の半導体チップ10が用いられた半導体装置1aを図2(a)および図3(a)に、図1(b)の半導体チップ20が用いられた半導体装置1bを図2(b)および図3(b)にそれぞれ示す。なお、便宜上、図3においてモールド封止部分は省略されている。また、図示する場合には、BGA(Ball Grid Array)タイプの半導体装置1a,1bであるが、たとえばCSP(Chip Size Package)など他のタイプの半導体装置であってもよい。
【0019】
図2(a)および図3(a)に示す半導体装置1aでは、接着樹脂28によって半導体チップ10がパッケージ基板3に搭載されて熱硬化性の樹脂4でモールド封止されており、パッケージ基板3に設けられたバンプ5を介して半導体チップ10とプリント基板とが電気的に接続される。
【0020】
たとえばエポキシ樹脂で形成されたパッケージ基板3の一方面にはたとえばCu(銅)によるリード(チップ接続材)6が形成されており、このリード6はパッケージ基板3を貫通して形成されたスルーホール7内の導電性を有するコンタクトメタル8を介して他方面の全域にわたって設けられたたとえばPb/Sn(鉛/スズ)からなるバンプ5と電気的に接続されている。そして、半導体チップ2はバンプ29により前記したリード6とフリップチップ接続されている。したがって、このような半導体装置1aが実装されれば、半導体チップ2はバンプ29、リード6、コンタクトメタル8およびバンプ5を介してプリント基板と電気的に接続される。パッケージ基板3の両面はバンプ5を残して絶縁性の保護マスク15が被着されており、装置内部を外的雰囲気から遮断している。
【0021】
半導体チップ20が封止された図2(b)、図3(b)の半導体装置1bも、このような半導体装置1aと同様な構造を有している。
【0022】
なお、実施の形態2に示す場合を含め、チップ接続材としてのリード6はパッケージ基板3に印刷されているものであるが、板状金属を打ち抜いたりエッチングして形成されるリードフレームを適用してもよい。
【0023】
ここで、前述のように、半導体チップ10と半導体チップ20とは、そのチップサイズが異なっているもののチップ電極11,21は半導体チップの中心点を基準に一致する配置となっている。したがって、図3(a),(b)に示すように、相互に同一の位置でバンプ接続することが可能になる。
【0024】
このように、相互にサイズの異なる半導体チップ10,20に形成されたチップ電極11,21を同一のレイアウト形状、同一のピッチとすることにより、異なるチップサイズの半導体チップ10,20に対して同一のフリップチップ接続を行うことが可能になる。したがって、種々の仕様の半導体チップ10,20のバンプ位置にあわせたパッケージ基板3を用意する必要がなくなってその標準化を図ることができ、半導体装置1a,1bのコスト低減を図ることが可能になる。
【0025】
(実施の形態2)
図4は本発明の他の実施の形態である半導体チップを用いて構成された半導体装置を示す断面図、図5は図4の要部を破断して示す斜視図である。
【0026】
図示する場合において、図4(a)および図5(a)には前述した図1(a)の半導体チップ10が、図4(b)および図5(b)には図1(b)の半導体チップ20がそれぞれ搭載される。
【0027】
本実施の形態においても、半導体チップ10がパッケージ基板3に搭載されて熱硬化性の樹脂4でモールド封止されており、バンプ5を介して半導体チップ10とプリント基板とが電気的に接続される。
【0028】
そして、半導体チップ2はボンディングワイヤ9によりリード6とワイヤ接続されている。なお、半導体チップ20が封止された図4(b)、図5(b)の半導体装置1bも半導体装置1aと同様な構造である。
【0029】
このように、半導体チップとリード6とをワイヤ接続した場合には、図5(a),(b)に示すように、リード6のボンディング位置からそれぞれのチップ電極11,21までの距離は相互に等しくなり、相互に同一のボンディングパターンで接続することが可能になる。なお、TABのようにリードを直接接続する場合には、半導体チップ10と半導体チップ20とに用いられるリードが同一形状のものになる。
【0030】
したがって、異なるチップサイズの半導体チップ10,20に対して共通のチップ接続材を適用することが可能になり、種々の仕様の半導体チップ10,20にあわせて個々に用意する必要がなくなってその標準化を図ることができる。これにより、チップ接続材のコント数を最小限に抑えることでコストアップを抑えることができ、このチップ接続材を用いた半導体装置1a,1bのコスト低減を図ることが可能になる。
【0031】
以上、本発明者によってなされた発明をその実施の形態に基づき具体的に説明したが、本発明は前記実施の形態に限定されるものではなく、その要旨を逸脱しない範囲で種々変更可能であることは言うまでもない。
【0032】
たとえば、本実施の形態においては、チップ電極11,21は半導体チップ10,20の中央寄りにおいて、チップ外形と平行の四角形をなすように形成されているが、これに限定されるものではない。つまり、図6の半導体チップ30,40に示すように、チップ電極11,21の配列形状を90°回転させたチップ電極31,41の配列形状としたり、図7の半導体チップ50,60に示すように、チップ電極11,21の配列形状から中央部を取り去ったチップ電極51,61の配列形状、あるいは、図8の半導体チップ70,80に示すように、十文字型のチップ電極71,81の配列形状とすることなどが考えられる。
【0033】
さらに、以上の説明では、主として本発明者によってなされた発明をBGAに適用した場合について説明したが、既に述べたように、他の種々の形態の半導体装置に適用することが可能である。特に、TAB、KGD、CSPなど小型パッケージの標準化、およびチップ接続材の標準化に有利である。
【0034】
【発明の効果】
本願において開示される発明のうち、代表的なものによって得られる効果を簡単に説明すれば以下のとおりである。
【0035】
(1).本発明によれば、半導体チップをフリップチップ接続した場合、異なるチップサイズの半導体チップに対して同一のフリップチップ接続を行うことが可能になる。したがって、種々の仕様の半導体チップのバンプ位置にあわせたチップ接続材を有するパッケージ基板を用意する必要がなくなってその標準化を図ることができる。
【0036】
(2).また、本発明によれば、半導体チップをワイヤ接続した場合、異なるチップサイズの半導体チップに対して共通のサイズのチップ接続材を適用することが可能になる。したがって、種々の仕様の半導体チップにあわせて異なるサイズのチップ接続材を用意する必要がなくなってその標準化を図ることができる。
【0037】
(3).前記した(1) および(2) により、チップ接続材のコント数を最小限に抑えることでコストアップを抑えることができ、延いてはチップ接続材を用いた半導体装置のコスト低減を図ることが可能になる。
【図面の簡単な説明】
【図1】(a),(b)は本発明の一実施の形態である半導体チップを示す平面図である。
【図2】(a),(b)は図1の半導体チップを用いて構成された半導体装置を示す断面図である。
【図3】(a),(b)は図2の半導体装置の概略を示す斜視図である。
【図4】(a),(b)は本発明の実施の形態2による半導体装置を示す断面図である。
【図5】(a),(b)は図4の要部を破断して示す斜視図である。
【図6】(a),(b)は本発明の一変形例である半導体チップを示す平面図である。
【図7】(a),(b)は本発明の他の変形例である半導体チップを示す平面図である。
【図8】(a),(b)は本発明のさらに他の変形例である半導体チップを示す平面図である。
【図9】(a),(b)は本発明者が検討対象とした半導体チップを示す平面図である。
【符号の説明】
1a 半導体装置
1b 半導体装置
2 半導体チップ
3 パッケージ基板
4 樹脂
5 バンプ
6 リード(チップ接続材)
7 スルーホール
8 コンタクトメタル
9 ボンディングワイヤ
10 半導体チップ
11 チップ電極
15 保護マスク
20 半導体チップ
21 チップ電極
28 接着樹脂
29 バンプ
30 半導体チップ
31 チップ電極
40 半導体チップ
41 チップ電極
50 半導体チップ
51 チップ電極
60 半導体チップ
61 チップ電極
70 半導体チップ
71 チップ電極
80 半導体チップ
81 チップ電極
90 半導体チップ
91 チップ電極
100 半導体チップ
101 チップ電極
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a semiconductor chip and a semiconductor device using the same, and more particularly to a technique effective when applied to a layout of chip electrodes formed on a semiconductor chip.
[0002]
[Prior art]
Along with the increase in functionality of semiconductor devices, the number of semiconductor chips used in the semiconductor devices has increased, and the chip sizes have also varied. If the semiconductor chips 90 and 100 are different in size when formed along the outer periphery of the chip, the layout of the chip electrodes 91 and 101 is different in both pitch and size (FIG. 9).
[0003]
Examples of the detailed description of the chip electrode layout of the semiconductor chip include, for example, published by Nikkan Kogyo Shimbun, “CMOS Device Handbook” (issued September 29, 1987), P482 to P486.
[0004]
[Problems to be solved by the invention]
As described above, since the layout of the chip electrodes varies, it is necessary to prepare many patterns for the chip connection material such as a lead frame on which the semiconductor chip is mounted. Accordingly, the types of chip connection materials increase in proportion to the increase in the types of semiconductor chips, making it difficult to standardize.
[0005]
As a result, the cost per chip connecting material increases, and as a result, the cost of the semiconductor device itself using the chip connecting material increases.
[0006]
SUMMARY OF THE INVENTION An object of the present invention is to provide a technique capable of applying a common chip connecting material to semiconductor chips having different chip sizes.
[0007]
The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.
[0008]
[Means for Solving the Problems]
Of the inventions disclosed in the present application, the outline of typical ones will be briefly described as follows.
[0009]
That is, the semiconductor device of the present invention is a semiconductor device having a semiconductor chip on which an integrated circuit and a plurality of chip electrodes for transferring signals between the integrated circuit and the outside through a plurality of bumps are formed, The chip electrode is formed in a chip electrode formed on another semiconductor chip having a different size from the semiconductor chip, and the same continuous grid shape and the same pitch on the basis of the center point of each semiconductor chip. The bump is formed on each of the plurality of chip electrodes, and the bump of the semiconductor chip includes a lead formed on one main surface and another main surface connected to the lead and facing the one main surface. extending is connected to the leads of the resin substrate having a through-hole wiring, the through-hole wiring, on a straight line from the one main surface of a resin substrate to said other major surface Biteori, more said other main surface of the resin substrate in which a plurality of bumps connected to said through-hole wiring is provided.
[0010]
The semiconductor chip used in the semiconductor device of the present invention can be electrically connected by flip chip connection via bumps or wire connection via bonding wires. The chip electrode can be formed of aluminum.
[0012]
According to the above-described means, since the chip electrodes formed on the semiconductor chips having different sizes are arranged in the same manner, a common chip connecting material can be applied to the semiconductor chips having different chip sizes.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Note that members having the same function are denoted by the same reference symbols throughout the drawings for describing the embodiments, and the repetitive description thereof will be omitted.
[0014]
(Embodiment 1)
1 is a plan view showing a semiconductor chip according to an embodiment of the present invention, FIG. 2 is a cross-sectional view showing a semiconductor device configured using the semiconductor chip of FIG. 1, and FIG. 3 is a schematic view of the semiconductor device of FIG. FIG.
[0015]
In the case shown in FIG. 1A, a (P x1 × P y1 ) size semiconductor chip 10 formed with a predetermined integrated circuit is provided with, for example, Al for exchanging signals between the integrated circuit and the outside. A plurality of chip electrodes 11 made of (aluminum) are formed in a grid pattern near the center. The tip electrode 11, A 1, A 2 in the transverse direction, at a pitch of · · · A n, the vertical direction B 1, B 2, are respectively arranged at a pitch of · · · B n.
[0016]
On the other hand, in the case shown in FIG. 1B, the semiconductor chip 20 has a smaller size (P x2 × P y2 ) than that in FIG. However, the chip electrode 21 of the semiconductor chip 20 has the same arrangement as that of the semiconductor chip 10. In other words, just as the case shown in FIG. 1 (a), the tip electrode 21 are arranged in a square shape corresponding to the outer shape chip inboard, A 1, A 2 transversely of · · · A n, It is formed with a pitch of B 1 , B 2 ,... B n in the vertical direction, and has the same size as the chip electrode 11. However, the electrode sizes may be different from each other.
[0017]
As described above, the chip electrode 11 of the semiconductor chip 10 and the chip electrode 21 of the semiconductor chip 20 are formed with the same layout shape and the same pitch with respect to the center point of the semiconductor chip. ) And (b), even if the chip sizes are different as shown by the two-dot chain line, the respective chip electrodes 11 and 21 are completely aligned in position.
[0018]
A semiconductor device 1a using the semiconductor chip 10 of FIG. 1A is shown in FIGS. 2A and 3A, and a semiconductor device 1b using the semiconductor chip 20 of FIG. 1B is shown in FIG. It shows in b) and FIG.3 (b), respectively. For convenience, the mold sealing portion is omitted in FIG. In the illustrated example, the BGA (Ball Grid Array) type semiconductor devices 1a and 1b are used, but other types of semiconductor devices such as a CSP (Chip Size Package) may be used.
[0019]
In the semiconductor device 1a shown in FIGS. 2A and 3A, the semiconductor chip 10 is mounted on the package substrate 3 by the adhesive resin 28 and molded and sealed with the thermosetting resin 4. The semiconductor chip 10 and the printed circuit board are electrically connected to each other through the bumps 5 provided on the substrate.
[0020]
For example, a lead (chip connecting material) 6 made of, for example, Cu (copper) is formed on one surface of the package substrate 3 made of epoxy resin, and the lead 6 is a through hole formed through the package substrate 3. 7 is electrically connected to a bump 5 made of, for example, Pb / Sn (lead / tin) provided over the entire area of the other surface via a contact metal 8 having conductivity. The semiconductor chip 2 is flip-chip connected to the above-described leads 6 by bumps 29. Therefore, when such a semiconductor device 1 a is mounted, the semiconductor chip 2 is electrically connected to the printed circuit board via the bumps 29, the leads 6, the contact metal 8 and the bumps 5. Both surfaces of the package substrate 3 are covered with insulating protective masks 15 leaving the bumps 5 to block the inside of the apparatus from the external atmosphere.
[0021]
The semiconductor device 1b of FIG. 2B and FIG. 3B in which the semiconductor chip 20 is sealed also has the same structure as the semiconductor device 1a.
[0022]
In addition, including the case shown in the second embodiment, the lead 6 as the chip connecting material is printed on the package substrate 3, but a lead frame formed by punching or etching a plate metal is applied. May be.
[0023]
Here, as described above, although the semiconductor chip 10 and the semiconductor chip 20 have different chip sizes, the chip electrodes 11 and 21 are arranged so as to coincide with the center point of the semiconductor chip as a reference. Therefore, as shown in FIGS. 3A and 3B, bumps can be connected to each other at the same position.
[0024]
As described above, the chip electrodes 11 and 21 formed on the semiconductor chips 10 and 20 having different sizes have the same layout shape and the same pitch, so that the semiconductor chips 10 and 20 having different chip sizes are the same. It is possible to perform flip chip connection. Therefore, it is not necessary to prepare the package substrate 3 in accordance with the bump positions of the semiconductor chips 10 and 20 having various specifications, and the standardization thereof can be achieved, and the cost of the semiconductor devices 1a and 1b can be reduced. .
[0025]
(Embodiment 2)
FIG. 4 is a cross-sectional view showing a semiconductor device constituted by using a semiconductor chip according to another embodiment of the present invention, and FIG. 5 is a perspective view showing a principal part of FIG.
[0026]
4A and FIG. 5A, the semiconductor chip 10 shown in FIG. 1A is shown. In FIGS. 4B and 5B, the semiconductor chip 10 shown in FIG. Each semiconductor chip 20 is mounted.
[0027]
Also in the present embodiment, the semiconductor chip 10 is mounted on the package substrate 3 and molded and sealed with the thermosetting resin 4, and the semiconductor chip 10 and the printed circuit board are electrically connected via the bumps 5. The
[0028]
The semiconductor chip 2 is connected to the leads 6 by bonding wires 9. Note that the semiconductor device 1b of FIGS. 4B and 5B in which the semiconductor chip 20 is sealed has the same structure as the semiconductor device 1a.
[0029]
As described above, when the semiconductor chip and the lead 6 are connected by wire, as shown in FIGS. 5A and 5B, the distance from the bonding position of the lead 6 to the respective chip electrodes 11 and 21 is mutual. It becomes possible to connect with each other by the same bonding pattern. When leads are directly connected like TAB, the leads used for the semiconductor chip 10 and the semiconductor chip 20 have the same shape.
[0030]
Therefore, it is possible to apply a common chip connecting material to the semiconductor chips 10 and 20 having different chip sizes, and it is not necessary to individually prepare them for the semiconductor chips 10 and 20 having various specifications. Can be achieved. As a result, the cost increase can be suppressed by minimizing the number of controllers of the chip connection material, and the costs of the semiconductor devices 1a and 1b using the chip connection material can be reduced.
[0031]
As mentioned above, the invention made by the present inventor has been specifically described based on the embodiment. However, the invention is not limited to the embodiment, and various modifications can be made without departing from the scope of the invention. Needless to say.
[0032]
For example, in the present embodiment, the chip electrodes 11 and 21 are formed near the center of the semiconductor chips 10 and 20 so as to form a quadrangle parallel to the outer shape of the chip. However, the present invention is not limited to this. That is, as shown in the semiconductor chips 30 and 40 of FIG. 6, the arrangement shape of the chip electrodes 11 and 21 is changed to 90 ° by the arrangement shape of the chip electrodes 31 and 41, or as shown in the semiconductor chips 50 and 60 of FIG. Thus, as shown in the array shape of the chip electrodes 51 and 61 with the central portion removed from the array shape of the chip electrodes 11 and 21, or the semiconductor chips 70 and 80 in FIG. An array shape may be considered.
[0033]
Further, in the above description, the case where the invention mainly made by the present inventor is applied to the BGA has been described. However, as described above, the invention can be applied to various other types of semiconductor devices. In particular, it is advantageous for standardization of small packages such as TAB, KGD, and CSP, and standardization of chip connection materials.
[0034]
【The invention's effect】
Among the inventions disclosed in the present application, effects obtained by typical ones will be briefly described as follows.
[0035]
(1) According to the present invention, when semiconductor chips are flip-chip connected, it is possible to perform the same flip-chip connection to semiconductor chips of different chip sizes. Therefore, it is not necessary to prepare a package substrate having a chip connecting material matched to the bump positions of semiconductor chips of various specifications, and standardization thereof can be achieved.
[0036]
(2) Further, according to the present invention, when semiconductor chips are wire-connected, it is possible to apply a chip connecting material having a common size to semiconductor chips having different chip sizes. Therefore, it is not necessary to prepare chip connection materials of different sizes according to semiconductor chips of various specifications, and standardization thereof can be achieved.
[0037]
(3) By the above (1) and (2), the cost increase can be suppressed by minimizing the number of controllers of the chip connection material, and the cost of the semiconductor device using the chip connection material can be reduced. Can be achieved.
[Brief description of the drawings]
1A and 1B are plan views showing a semiconductor chip according to an embodiment of the present invention.
2A and 2B are cross-sectional views illustrating a semiconductor device configured using the semiconductor chip of FIG.
3A and 3B are perspective views schematically showing the semiconductor device of FIG.
4A and 4B are cross-sectional views showing a semiconductor device according to a second embodiment of the present invention.
5 (a) and 5 (b) are perspective views showing a main part of FIG.
6A and 6B are plan views showing a semiconductor chip which is a modified example of the present invention.
7A and 7B are plan views showing a semiconductor chip according to another modification of the present invention.
8A and 8B are plan views showing a semiconductor chip which is still another modification of the present invention.
FIGS. 9A and 9B are plan views showing a semiconductor chip to be studied by the present inventors. FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1a Semiconductor device 1b Semiconductor device 2 Semiconductor chip 3 Package substrate 4 Resin 5 Bump 6 Lead (chip connection material)
7 Through hole 8 Contact metal 9 Bonding wire 10 Semiconductor chip 11 Chip electrode 15 Protective mask 20 Semiconductor chip 21 Chip electrode 28 Adhesive resin 29 Bump 30 Semiconductor chip 31 Chip electrode 40 Semiconductor chip 41 Chip electrode 50 Semiconductor chip 51 Chip electrode 60 Semiconductor chip 61 chip electrode 70 semiconductor chip 71 chip electrode 80 semiconductor chip 81 chip electrode 90 semiconductor chip 91 chip electrode 100 semiconductor chip 101 chip electrode

Claims (2)

集積回路および前記集積回路と外部との間で複数のバンプを介して信号の授受を行う複数のチップ電極が形成された半導体チップを有する半導体装置であって、前記チップ電極が、前記半導体チップとサイズの異なる他の半導体チップに形成されたチップ電極と、前記各半導体チップの中心点を基準に全体的に連続する同一の升目形状および同一のピッチに形成され、これら複数のチップ電極それぞれの上に前記バンプが形成され、前記半導体チップのバンプは、一主面に形成されたリードと前記リードに接続され前記一主面と対向する他の主面まで伸びるスルーホール配線とを有する樹脂基板の前記リードに接続され、前記スルーホール配線は、樹脂基板の前記一主面から前記他の主面まで一直線上に伸びており、さらに前記樹脂基板の前記他の主面には前記スルーホール配線と接続される複数のバンプが設けられていることを特徴とする半導体装置。A semiconductor device having an integrated circuit and a semiconductor chip on which a plurality of chip electrodes that exchange signals between the integrated circuit and the outside via a plurality of bumps are formed, wherein the chip electrode is connected to the semiconductor chip Chip electrodes formed on other semiconductor chips having different sizes and the same continuous grid shape and the same pitch on the basis of the center point of each of the semiconductor chips are formed on each of the plurality of chip electrodes. The bump of the semiconductor chip has a lead formed on one main surface and a through-hole wiring connected to the lead and extending to another main surface facing the one main surface. connected to said leads, said through-hole wiring extends in a straight line from the one main surface of a resin substrate to said other main surface, before further of the resin substrate The semiconductor device in the other main surface, wherein a plurality of bumps connected to said through-hole wiring is provided. 請求項1記載の半導体装置において、前記チップ電極はアルミニウムで形成されていることを特徴とする半導体装置。  2. The semiconductor device according to claim 1, wherein the chip electrode is made of aluminum.
JP32060896A 1996-11-29 1996-11-29 Semiconductor device Expired - Fee Related JP3854350B2 (en)

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JP32060896A JP3854350B2 (en) 1996-11-29 1996-11-29 Semiconductor device

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JP3854350B2 true JP3854350B2 (en) 2006-12-06

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