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JP3869433B2 - Method for producing blackened surface-treated copper foil for electromagnetic wave shielding - Google Patents
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JP3869433B2 - Method for producing blackened surface-treated copper foil for electromagnetic wave shielding - Google Patents

Method for producing blackened surface-treated copper foil for electromagnetic wave shielding Download PDF

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JP3869433B2
JP3869433B2 JP2004150277A JP2004150277A JP3869433B2 JP 3869433 B2 JP3869433 B2 JP 3869433B2 JP 2004150277 A JP2004150277 A JP 2004150277A JP 2004150277 A JP2004150277 A JP 2004150277A JP 3869433 B2 JP3869433 B2 JP 3869433B2
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copper foil
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electromagnetic wave
layer
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JP2005290541A (en
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鍾 虎 柳
承 亮 鄭
相 範 金
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日進素材産業株式会社
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • H05K9/0073Shielding materials
    • H05K9/0094Shielding materials being light-transmitting, e.g. transparent, translucent
    • H05K9/0096Shielding materials being light-transmitting, e.g. transparent, translucent for television displays, e.g. plasma display panel
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/34Anodisation of metals or alloys not provided for in groups C25D11/04 - C25D11/32
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/38Chromatising
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/12Electroplating: Baths therefor from solutions of nickel or cobalt
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/34Pretreatment of metallic surfaces to be electroplated
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/48After-treatment of electroplated surfaces
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • H05K3/384Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by plating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • H05K9/0073Shielding materials
    • H05K9/0081Electromagnetic shielding materials, e.g. EMI, RFI shielding
    • H05K9/0084Electromagnetic shielding materials, e.g. EMI, RFI shielding comprising a single continuous metallic layer on an electrically insulating supporting structure, e.g. metal foil, film, plating coating, electro-deposition, vapour-deposition
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D9/00Electrolytic coating other than with metals
    • C25D9/04Electrolytic coating other than with metals with inorganic materials
    • C25D9/08Electrolytic coating other than with metals with inorganic materials by cathodic processes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0213Electrical arrangements not otherwise provided for
    • H05K1/0216Reduction of cross-talk, noise or electromagnetic interference
    • H05K1/0218Reduction of cross-talk, noise or electromagnetic interference by printed shielding conductors, ground planes or power plane
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0335Layered conductors or foils
    • H05K2201/0355Metal foils
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703Plating
    • H05K2203/0723Electroplating, e.g. finish plating

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Laminated Bodies (AREA)

Description

本発明は、反射率が低く、外観にむらがなく、残渣が殆どない均一な外観を有する電磁波遮蔽用黒化表面処理銅箔の製造方法及びその表面処理銅箔に関する。   The present invention relates to a method for producing a blackened surface-treated copper foil for shielding electromagnetic waves and having a uniform appearance with low reflectance, uniform appearance and almost no residue, and the surface-treated copper foil.

プラズマ・デイスプレーパネル(PDP)は画像表示面から人体に有害な強力な電磁波を放射するため、電磁波遮蔽体を設けて電磁波の放射を防止する必要がある。電磁波遮蔽体としては、銅回路を例えばPET等のような絶縁性透明基材に積層させて製造した複合材料が使用されているが、上記複合材料は電磁波放射の防止能力と光線透過性が優れた長所がある。具体的に、上記複合材料は、所定の表面粗度を有する銅箔(copper foil)を上記透明基材に積層し、エッチングによって不必要な銅箔を除去して望む銅回路を形成することにより、製造される。銅回路の線幅とパターンは必要とする電磁波放射能力と光線の透過性を基に選ばれる。
ところが、上記銅回路が外光を反射すれば、表示画面の輝度(brightness)を低下させる問題がある。よって、電磁波遮蔽用銅箔としては、黒色に近いように表面処理され、低い反射率を有する銅箔が選好されている。
Since a plasma display panel (PDP) emits a strong electromagnetic wave harmful to the human body from the image display surface, it is necessary to provide an electromagnetic wave shielding body to prevent the electromagnetic wave from being emitted. As the electromagnetic wave shielding body, a composite material manufactured by laminating a copper circuit on an insulating transparent base material such as PET is used. However, the composite material has excellent ability to prevent electromagnetic radiation and light transmittance. There are advantages. Specifically, the composite material is formed by laminating a copper foil having a predetermined surface roughness on the transparent substrate, and removing unnecessary copper foil by etching to form a desired copper circuit. Manufactured. The line width and pattern of the copper circuit are selected based on the required electromagnetic wave radiation ability and light transmittance.
However, if the copper circuit reflects external light, there is a problem of reducing the brightness of the display screen. Therefore, as an electromagnetic shielding copper foil, a copper foil that is surface-treated so as to be close to black and has a low reflectance is preferred.

しかしながら、表面処理された銅箔の表面が黒色に近い程、その外観にむらが発生しやすくなるか、表面から粉末がくっ付いてでるなど残渣が発生しやすくなる傾向がある。銅箔表面のむらはPDPの画質を落とし、残渣はエッチングされ透明基材が表れるべき部分に落ちて光線の透過性を落とすので、PDP解像度が全般的に低下するという短所がある。
このため、従来は、銅箔の表面を完全な黒色にしないで、黒色に近いチョコレート色又は暗い金属色を有するように表面処理する方向に、主に研究が行なわれている。しかし、上記のような方法で製造された銅箔の表面は、完全な黒色でないので、電磁波遮蔽用銅箔としての反射率改善には限界があった。
However, the closer the surface of the surface-treated copper foil is to black, the more easily the appearance becomes uneven or the residue tends to be generated, such as powder sticking to the surface. The unevenness of the copper foil surface reduces the image quality of the PDP, and the residue is etched and falls on the portion where the transparent base material should appear, thereby reducing the light transmittance, so that the PDP resolution is generally lowered.
For this reason, research has been mainly conducted in the direction of surface treatment so that the surface of the copper foil is not completely black but has a chocolate color or dark metal color close to black. However, since the surface of the copper foil manufactured by the method as described above is not completely black, there is a limit to improving the reflectance as an electromagnetic shielding copper foil.

本発明は、黒色の外観を有するため反射率が低い電磁波遮蔽用黒化表面処理銅箔及びその製造方法を提供することを目的とする。
また、本発明は黒色の外観を有しながらも、むら及び残渣が殆どない均一な外観を有する電磁波遮蔽用黒化表面処理銅箔及びその製造方法を提供することを目的とする。
また、本発明のさらに他の目的は、剥離強度(peel strength)が優れた電磁波遮蔽用黒化表面処理銅箔及びその製造方法を提供することにある。
An object of the present invention is to provide a blackened surface-treated copper foil for shielding electromagnetic waves having a black appearance and a low reflectance, and a method for producing the same.
Another object of the present invention is to provide a blackened surface-treated copper foil for electromagnetic wave shielding and a method for producing the same, having a uniform appearance with almost no unevenness and residue while having a black appearance.
Still another object of the present invention is to provide a blackened surface-treated copper foil for electromagnetic wave shielding excellent in peel strength and a method for producing the same.

上記目的を達成するための本発明による電磁波遮蔽用黒化表面処理銅箔の製造方法は、
Co又はCoを含む2元系以上の電解メッキ浴でメッキを行なって銅箔の表面にCoを含む黒化メッキ層を形成する段階と;
塩基性電解浴において上記銅箔を陽極に配置して電気分解することにより、上記黒化メッキ層の表面を酸化させる段階と;を含むことを特徴とする。
In order to achieve the above object, a method for producing a blackened surface-treated copper foil for shielding electromagnetic waves according to the present invention,
Forming a blackened plating layer containing Co on the surface of the copper foil by plating with Co or a binary electrolytic plating bath containing Co or more;
And oxidizing the surface of the blackened plating layer by disposing the copper foil on the anode and electrolyzing in a basic electrolytic bath.

上記黒化メッキ層を形成する前に、銅箔の表面に微細銅粒子層を析出形成させる段階をさらに含むことが好ましい。
さらに、上記酸化された黒化メッキ層の表面に電解クロメート(chromate)層を形成する段階をさらに含むことが好ましい。
一方、黒化メッキ層が形成された表面の裏面にZn又はZn合金で構成されたメッキ皮膜層を形成する段階をさらに含むことが好ましい。
上記塩基性電解浴のpHは10以上であることが好ましい。
It is preferable to further include a step of forming a fine copper particle layer on the surface of the copper foil before forming the blackened plating layer.
Furthermore, it is preferable to further include a step of forming an electrolytic chromate layer on the surface of the oxidized blackened plating layer.
On the other hand, it is preferable to further include a step of forming a plating film layer made of Zn or a Zn alloy on the back surface of the front surface on which the blackened plating layer is formed.
The pH of the basic electrolytic bath is preferably 10 or more.

以下、本発明を詳しく説明する。
本発明の対象となる電磁波遮蔽用銅箔は、広幅生産が可能な電解銅箔として銅箔の厚さは、1〜35μm、好ましくは6〜18μmである。表面粗度(Rz:DIN)は0.1〜2.0μm、好ましくは0.5〜1.5μmである。表面粗度が0.1μmより小さい場合、透明基材との接着性が十分でないようになり、電磁波遮蔽体の信頼性が低下し、2.0μmより大きい場合、エッチングによって回路を形成した後に、銅箔が接着されている透明基材の表面の凹凸が大きくなり、これに因り表示画面の曇りが大きくなることにより、好ましくない。
Hereinafter, the present invention will be described in detail.
The electromagnetic shielding copper foil that is the subject of the present invention is an electrolytic copper foil capable of wide production, and the thickness of the copper foil is 1 to 35 μm, preferably 6 to 18 μm. The surface roughness (Rz: DIN) is 0.1 to 2.0 μm, preferably 0.5 to 1.5 μm. If the surface roughness is less than 0.1 μm, the adhesion to the transparent substrate will be insufficient, and the reliability of the electromagnetic wave shield will be reduced. If the surface roughness is greater than 2.0 μm, the copper foil will be formed after forming the circuit by etching. The unevenness of the surface of the transparent base material to which the is adhered becomes large, and the fogging of the display screen becomes large due to this, which is not preferable.

本発明の主な特徴は、黒色表面処理された銅箔を塩基性電解浴で酸化処理することにより、銅箔表面を黒色にしながらも、むら、又は残渣が発生しない均一な外観の黒化表面処理銅箔を得ることができることにある。
銅箔の黒化処理は、黒色を誘発する金属が含まれた電解メッキ浴において、銅箔を陰極に配置し、上記陰極の銅箔表面上に上記金属メッキ層を析出させることにより行なわれる。黒色を誘発するとして知られた金属としては、Cu、Cr、Al、Co等があるが、Cuは完全な黒色を導出することができるが、追って銅箔回路パターン形成時、銅箔回路側に浸透して回路パターンを損傷させる問題があり、Crは銅箔回路形成時のエッチング性に問題を起こすため、本発明に適用することが難しい。また、Alは、その金属特性上、後述する陽極酸化処理が可能でない。よって、製品損傷防止、製造工程上の問題点及び陽極酸化処理の効率性等を考慮すれば、Coが最も適当な金属である。
The main feature of the present invention is a blackened surface with a uniform appearance that does not generate unevenness or residue while blackening the surface of the copper foil by oxidizing the copper foil treated with a black surface in a basic electrolytic bath. The treatment copper foil can be obtained.
The blackening treatment of the copper foil is performed by placing the copper foil on the cathode in an electrolytic plating bath containing a metal that induces blackness, and depositing the metal plating layer on the surface of the copper foil of the cathode. Metals known to induce blackness include Cu, Cr, Al, Co, etc., but Cu can derive a perfect black color, but later on the copper foil circuit side when forming the copper foil circuit pattern There is a problem that it penetrates and damages the circuit pattern, and Cr causes a problem in the etching property at the time of forming the copper foil circuit, so that it is difficult to apply to the present invention. Moreover, Al cannot be anodized as described later due to its metal characteristics. Therefore, Co is the most suitable metal in consideration of product damage prevention, manufacturing process problems, anodizing efficiency, and the like.

Coの黒化メッキは、例えば、Ir電極を陽極に使用し、陰極を銅箔にして限界電流密度以上の電流でメッキをすることにより行なわれ、銅箔表面に形成されたCo黒化メッキ層は、Co3O4、CoO(OH)、CoOのような酸化物の形態になっている。
電解メッキ浴に含まれるCoの濃度は、1〜80g/lから選ぶことができるが、最も効率良く黒化メッキ層が形成され得る濃度は、10〜30g/lである。工業的に経済的なメッキ浴の電流密度は0.1〜60A/dm2であり、特に、5〜25A/dm2の電流密度が好ましい。また、メッキ時間は1〜20秒の範囲で可能であるが、電流密度、電解液濃度等を考慮して上記範囲以外も可能である。
Co blackening plating is performed, for example, by using an Ir electrode as the anode and plating the cathode with copper foil at a current exceeding the limit current density, and a Co blackening plating layer formed on the copper foil surface. Is in the form of an oxide such as Co 3 O 4 , CoO (OH), or CoO.
The concentration of Co contained in the electrolytic plating bath can be selected from 1 to 80 g / l, but the concentration at which the blackened plating layer can be formed most efficiently is 10 to 30 g / l. Current density industrially economical plating baths are 0.1~60A / dm 2, in particular, a current density of 5~25A / dm 2 is preferred. The plating time can be in the range of 1 to 20 seconds, but other than the above range is possible in consideration of the current density, the electrolyte concentration, and the like.

一方、銅箔の剥離強度向上や銅箔による特性を付加するために、Co以外の金属成分をも電解浴に含ませることができる。銅箔の特性を害せず、剥離強度を向上させる元素としてNi、Feが適当である。上記金属成分とCoを合わせた電解液中の金属成分濃度は1〜80g/lの範囲にあるものがメッキ効率性の面で好ましい。
黒化メッキ層が形成された銅箔は、表面にメッキ粒子層がノジュール(nodule)形に析出された状態である。ところが、メッキ粒子層が形成された銅箔の表面粗度は全体的には電磁波遮蔽用銅箔に使用可能な範囲内にあるが、微視的にその表面をよく見れば、銅箔の表面条件又はメッキ条件等に従って銅箔の表面に析出されるノデユール粒子の大きさや数が部分的に差異があるようになる。また、析出反応によって陰極では水素が発生するようになるが、このような水素が発生する部分のメッキの厚さは残り部分の厚さと微細な差異を見せる。
On the other hand, metal components other than Co can also be included in the electrolytic bath in order to improve the peel strength of the copper foil and to add the characteristics of the copper foil. Ni and Fe are suitable as elements for improving the peel strength without impairing the properties of the copper foil. The metal component concentration in the electrolytic solution in which the metal component and Co are combined is preferably in the range of 1 to 80 g / l in terms of plating efficiency.
The copper foil on which the blackened plating layer is formed is in a state where a plating particle layer is deposited in a nodule shape on the surface. However, the surface roughness of the copper foil on which the plated particle layer is formed is generally within the range that can be used for the copper foil for electromagnetic wave shielding. Depending on the conditions or plating conditions, the size and number of nodule particles deposited on the surface of the copper foil are partially different. In addition, hydrogen is generated at the cathode by the deposition reaction, and the thickness of the plating in the portion where such hydrogen is generated shows a fine difference from the thickness of the remaining portion.

このため、全体銅箔表面を眺めた時、周囲部に比べて粒子大きさや粒子数が相対的に差異が大きいか、水素発生態様が異なる部分は、むらに見えるようになる。また、非常に微細な粒子の場合、銅箔の製造過程中に表面から脱落され残渣となって銅箔品質を落とす。
本発明は、このような問題を解決するために、黒化メッキ層が形成された銅箔を塩基性電解浴に陽極に配置し、黒化メッキ層の表面を酸化(腐食)させ、一定程度平坦化させることにより、むら、残渣の発生を極力低減している。
黒化メッキ層を陽極酸化処理する場合の長所は、黒化メッキ層の表面を電解液が前後左右方向に均一な流れ(flow)に流れながら、その表面を一様に腐食させるという点にある。
For this reason, when the whole copper foil surface is looked at, the part from which a particle size and the number of particle | grains are relatively large compared with the surrounding part, or a hydrogen generation aspect differs will become uneven. In the case of very fine particles, the copper foil is dropped from the surface during the production process of the copper foil and becomes a residue, which degrades the copper foil quality.
In order to solve such a problem, the present invention places a copper foil with a blackened plating layer on the anode in a basic electrolytic bath, oxidizes (corrodes) the surface of the blackened plated layer, and to a certain extent. By flattening, the generation of unevenness and residue is reduced as much as possible.
The advantage of anodizing the blackened plating layer is that the surface of the blackened plating layer is uniformly corroded while the electrolyte flows in a uniform flow in the front-rear and left-right directions. .

陽極酸化電化浴は、NaOH、KOH等のような塩基性溶液で構成された塩基性電解用であり、陽極酸化時の好ましい電流密度は、1〜30A/dm2、時間は1〜20秒から選ぶことができる。上記電流密度及び時間は電解液の種類、組成及び温度等に従って異なり得る。陽極酸化は、例えば、ステンレス・スチールを陰極に使用し、陽極に黒化表面処理された銅箔を配置して行われる。
陽極酸化処理において、重要な点は、塩基性電解浴のpH調整である。むら、残渣を効果的に除去するためには、電解浴のpHが少なくとも10以上でなければならないし、本出願人の実験結果によれば、pH 13において最も好ましい結果を表した。
The anodic oxidation bath is for basic electrolysis composed of a basic solution such as NaOH, KOH, etc., and the preferred current density during anodization is 1 to 30 A / dm 2 , and the time is from 1 to 20 seconds. You can choose. The current density and time may vary according to the type, composition and temperature of the electrolyte. Anodization is performed, for example, by using stainless steel as a cathode and placing a blackened surface-treated copper foil on the anode.
An important point in the anodizing treatment is the pH adjustment of the basic electrolytic bath. In order to remove the residue effectively, the pH of the electrolytic bath must be at least 10 or more, and according to the experiment results of the present applicant, the most preferable result was shown at pH 13.

一方、反射率を小さくし、又、透明基材との接着性を向上させるために黒化メッキを行う前に、銅箔の表面に微細銅粒子層を析出付着させることができる。析出された銅粒子は、アンカー(anchor)役割をして透明基材に銅箔を積層させる時、剥離強度を上昇させて接着性を向上させ、外観を乱反射させて反射率を落とす。
微細銅粒子層の形成は、プリント配線板用銅箔に使用される粗化処理を利用して行うことができる。粗化処理は硫酸銅メッキ浴で行うのが普通であり、粗化処理時の銅粒子付着量は0.1〜10g/m2の範囲が好ましい。上記範囲を下回(粗度下降)ると、反射率は低くなるが、剥離強度(接着性)が落ちるし、上記範囲を上回(粗度上昇)ると逆に剥離強度は高くなるが反射率が高くなるからである。
On the other hand, a fine copper particle layer can be deposited on the surface of the copper foil before blackening plating in order to reduce the reflectivity and improve the adhesion to the transparent substrate. The deposited copper particles act as an anchor, and when the copper foil is laminated on the transparent substrate, the peel strength is increased to improve the adhesion, and the appearance is irregularly reflected to reduce the reflectance.
Formation of a fine copper particle layer can be performed using the roughening process used for the copper foil for printed wiring boards. Roughening treatment is usually carried out in a copper sulfate plating bath, copper particles deposited amount when the roughening treatment is preferably in the range of 0.1 to 10 g / m 2. Below the above range (decrease in roughness), the reflectivity decreases, but the peel strength (adhesiveness) decreases, and when above the range (increased roughness), the peel strength increases conversely. This is because the reflectance increases.

微細銅粒子層形成、黒化メッキ層形成及び陽極酸化処理時の3工程に亙って表面粗度はRz(DIN規格)で0.1〜2.0μm以内に維持されなければならない。その理由は、上述のとおりである。上述の黒化メッキ条件、陽極酸化条件の範囲内で表面処理する場合、表面粗度を上記範囲以内に維持することができる。
一方、本発明の銅箔に電解クロメート(chromate)処理等の防錆処理をすることができる。また黒化メッキをしなかった側の表面に、Zn又はZn合金からなるメッキ皮膜を形成すると、電磁波遮蔽体製造のための加熱工程において、加熱変色を防ぐことができる。
The surface roughness must be maintained within 0.1 to 2.0 μm in Rz (DIN standard) over the three steps of fine copper particle layer formation, blackening plating layer formation and anodizing treatment. The reason is as described above. When the surface treatment is performed within the above-described blackening plating conditions and anodizing conditions, the surface roughness can be maintained within the above ranges.
On the other hand, the copper foil of the present invention can be subjected to rust prevention treatment such as electrolytic chromate treatment. Further, when a plating film made of Zn or a Zn alloy is formed on the surface that has not been subjected to blackening plating, heating discoloration can be prevented in the heating step for manufacturing the electromagnetic wave shielding body.

以下、本発明を実施例により具体的に説明する。しかし、下記の実施例は、専ら、本発明を説明するためのものであって、本発明の要旨によって本発明の範囲が下記の実施例に限定されないことは当業界において通常の知識を有する者には自明なことである。   Hereinafter, the present invention will be specifically described by way of examples. However, the following examples are only for explaining the present invention, and those having ordinary knowledge in the art that the scope of the present invention is not limited to the following examples by the gist of the present invention. It is self-evident.

表面粗度(Rz)が2μm以下、厚さ10μmである電解銅箔を100g/l 硫酸で5秒間浸漬し、酸洗処理した後、純水で洗浄した後、下記の条件で黒化メッキ処理及び陽極酸化処理を行った。
黒化メッキ処理条件;電解浴のCo金属イオン濃度18g/l(Coは硫酸コバルト形態にメッキ浴に添加される)、緩衝液(H3BO3)濃度30g/l、pH3.5、電解液の温度30℃、電流密度20A/dm2、メッキ時間4秒。
陽極酸化処理条件;NaOH 陽極酸化浴の pH:13、陽極酸化浴温度:70℃、電流密度:15A/dm2、酸化処理時間:4秒。
An electrolytic copper foil with a surface roughness (Rz) of 2 μm or less and a thickness of 10 μm is immersed in 100 g / l sulfuric acid for 5 seconds, pickled, washed with pure water, and then blackened under the following conditions And anodizing.
Blackening plating conditions: Co metal ion concentration of electrolytic bath 18g / l (Co is added to the plating bath in the form of cobalt sulfate), buffer solution (H 3 BO 3 ) concentration 30g / l, pH 3.5, electrolyte Temperature 30 ° C, current density 20A / dm 2 , plating time 4 seconds.
Anodizing conditions: pH of NaOH anodizing bath: 13, anodizing bath temperature: 70 ° C., current density: 15 A / dm 2 , oxidation treatment time: 4 seconds.

銅付着量を1.5g/m2にして微細銅粒子層を形成し、実施例1と同じ条件で黒化メッキ処理及び陽極酸化処理を行った。 A fine copper particle layer was formed with a copper adhesion amount of 1.5 g / m 2 , and blackening plating treatment and anodizing treatment were performed under the same conditions as in Example 1.

実施例1と同じ条件で銅箔の表面を前処理した後、以下の条件で黒化メッキ処理及び陽極酸化処理を行った。
黒化メッキ処理条件;Co金属イオンの濃度10g/l、Ni金属イオン濃度8g/l、(Niは硫酸ニッケル形態にメッキ浴に添加される)、緩衝液(H3BO3)濃度30g/l、pH3.5、電解液の温度30℃、電流密度20A/dm2、メッキ時間4秒。
陽極酸化処理条件; NaOH 陽極酸化浴の pH:13、陽極酸化浴温度:70℃、電流密度:15A/dm2、酸化処理時間4秒。
After pre-treating the surface of the copper foil under the same conditions as in Example 1, blackening plating treatment and anodizing treatment were performed under the following conditions.
Blacking plating conditions: Co metal ion concentration 10 g / l, Ni metal ion concentration 8 g / l, (Ni is added to the plating bath in the form of nickel sulfate), buffer solution (H 3 BO 3 ) concentration 30 g / l , PH 3.5, electrolyte temperature 30 ° C, current density 20A / dm 2 , plating time 4 seconds.
Anodizing conditions: NaOH pH of anodizing bath: 13, anodizing bath temperature: 70 ° C., current density: 15 A / dm 2 , oxidation treatment time 4 seconds.

実施例2と同じ条件で微細銅粒子層を形成した後、実施例3と同じ条件で黒化メッキ処理及び陽極酸化処理を行った。   After forming a fine copper particle layer under the same conditions as in Example 2, blackening plating and anodizing were performed under the same conditions as in Example 3.

実施例1と同じ条件で銅箔の表面を前処理した後、以下の条件で黒化メッキ処理及び陽極酸化処理を行った。
黒化メッキ処理条件;Co金属イオンの濃度10g/l、Fe金属イオンの濃度5g/l(Feは硫酸鉄形態にメッキ浴に添加される)、緩衝液(H3BO3) 濃度 30g/l、
pH 3.5、電解液の温度 30℃、電流密度 20A/dm2、メッキ時間 4秒。
陽極酸化処理条件; NaOH 陽極酸化浴のpH:12、陽極酸化浴温度:70℃、電流密度:15A/dm2、酸化処理時間:4秒。
After pre-treating the surface of the copper foil under the same conditions as in Example 1, blackening plating treatment and anodizing treatment were performed under the following conditions.
Blacking plating conditions: Co metal ion concentration 10 g / l, Fe metal ion concentration 5 g / l (Fe is added to the plating bath in the form of iron sulfate), buffer solution (H 3 BO 3 ) concentration 30 g / l ,
pH 3.5, electrolyte temperature 30 ° C, current density 20A / dm 2 , plating time 4 seconds.
Anodizing conditions: NaOH pH of anodizing bath: 12, anodizing bath temperature: 70 ° C., current density: 15 A / dm 2 , oxidation treatment time: 4 seconds.

実施例2と同じ条件で微細銅粒子層を形成した後、実施例5と同じ条件で黒化メッキ処理及び陽極酸化処理を行った。   After forming a fine copper particle layer under the same conditions as in Example 2, blackening plating and anodizing were performed under the same conditions as in Example 5.

比較例1
上記実施例と同じ条件で電解銅箔の表面を前処理した後、下記の条件で黒化処理メッキを行った。
Co金属イオンの濃度 20g/l、pH 3.5、電解液の温度30℃、電流密度20A/dm2、メッキ時間4秒。
下記の表1は、上記実施例及び比較例による表面処理銅箔のむら発生の有無、擦ることによる残渣発生(粉落)の有無、剥離強度を測定した結果を示す。
Comparative Example 1
After pre-treating the surface of the electrolytic copper foil under the same conditions as in the above examples, blackening treatment plating was performed under the following conditions.
Co metal ion concentration 20g / l, pH 3.5, electrolyte temperature 30 ° C, current density 20A / dm 2 , plating time 4 seconds.
Table 1 below shows the results of measuring the presence / absence of unevenness of the surface-treated copper foil according to the above examples and comparative examples, the presence / absence of residue generation (dusting) by rubbing, and the peel strength.

Figure 0003869433
Figure 0003869433

むらの程度:△:若干存在、▲:無い
残渣発生(擦ることによる粉落)程度:○:微量、×:無い
Unevenness: △: Slightly present, ▲: No residue generated (powder by rubbing): ○: Trace, ×: None

表1に示すように、黒化メッキ処理だけをした比較例1は、表面上にむらと残渣が発生している。しかし、黒化メッキ処理後に陽極酸化処理をした実施例1〜6は、むら及び残渣が発生していないことを分かる。
また、黒化メッキ処理前に微細銅粒子層を形成させた実施例2、4、6は、微細銅粒子層を形成しない各対応した条件の実施例1、3、5に比べて剥離強度が上昇したことが分かる。また、黒化メッキ層にNiとFeがそれぞれ追加的に含まれた実施例3と実施例5は、上記成分等が含まれていない実施例1より高い剥離強度を有することが分かる。
上記のような均一な外観を有する本発明の表面処理銅箔をPETのような絶縁性透明基材に積層して製造される複合材料で電磁波遮蔽体を製造すれば、表示画面の解像度が優れたプラズマディスプレーパネルを製造することができ、その不良率も顕著に下げることができる。
As shown in Table 1, in Comparative Example 1 in which only the blackening plating process was performed, unevenness and residue were generated on the surface. However, it can be seen that in Examples 1 to 6, which were anodized after the blackening plating process, unevenness and residue were not generated.
Further, Examples 2, 4, and 6 in which the fine copper particle layer was formed before the blackening plating treatment had a peel strength compared to Examples 1, 3, and 5 of the corresponding conditions in which the fine copper particle layer was not formed. You can see that it has risen. Further, it can be seen that Example 3 and Example 5 in which Ni and Fe are additionally included in the blackened plating layer have higher peel strength than Example 1 in which the above components and the like are not included.
If the electromagnetic wave shielding body is made of a composite material produced by laminating the surface-treated copper foil of the present invention having a uniform appearance as described above on an insulating transparent substrate such as PET, the resolution of the display screen is excellent. In addition, a plasma display panel can be manufactured, and the defect rate can be significantly reduced.

以上説明したように、本発明の製造方法によれば、製造された表面処理銅箔は反射率が低い黒色の外観を有するので、PDP表示画面の輝度を低下させないという長所がある。
また、本発明による表面処理銅箔は黒色の外観を有しながらも、むら及び残渣が殆どない均一な外観を有するので、これを利用して製造された電磁波遮蔽用複合材料の不良率が顕著に低くなり、上記複合材料を使用して製造されたPDP表示画面の外観が優秀になる等の効果がある。

As described above, according to the manufacturing method of the present invention, the manufactured surface-treated copper foil has a black appearance with low reflectivity, and therefore has an advantage of not reducing the brightness of the PDP display screen.
In addition, the surface-treated copper foil according to the present invention has a uniform appearance with almost no unevenness and residue while having a black appearance, so the defect rate of the electromagnetic shielding composite material produced using this is remarkable. And the appearance of the PDP display screen manufactured using the composite material is excellent.

Claims (7)

Co又はCoを含む2元系以上の電解メッキ浴でメッキを行なって銅箔の表面にCoを含む黒化メッキ層を形成する段階と、塩基性電解浴において該銅箔を陽極に配置して電気分解することにより該黒化メッキ層の表面を酸化させる段階とを含むことを特徴とする電磁波遮蔽用黒化表面処理銅箔の製造方法。 Plating with Co or a binary electrolytic plating bath containing Co to form a blackened plating layer containing Co on the surface of the copper foil, and placing the copper foil on the anode in the basic electrolytic bath; And a step of oxidizing the surface of the blackened plating layer by electrolysis, and a method for producing a blackened surface-treated copper foil for shielding electromagnetic waves. 更に、前記黒化メッキ層を形成する前に、銅箔の表面に微細銅粒子層を析出形成させる段階を含むことを特徴とする請求項1に記載の製造方法。 The method according to claim 1, further comprising the step of depositing a fine copper particle layer on the surface of the copper foil before forming the blackened plating layer. 更に、前記酸化された黒化メッキ層の表面に電解クロメート層を形成する段階を含むことを特徴とする請求項1又は2に記載の製造方法。 The method according to claim 1, further comprising a step of forming an electrolytic chromate layer on the surface of the oxidized blackened plating layer. 更に、黒化メッキ層が形成された表面の裏面にZn又はZn合金で構成されたメッキ皮膜層を形成する段階を含むことを特徴とする請求項1〜3のいずれか一項に記載の製造方法。 The manufacturing method according to any one of claims 1 to 3, further comprising a step of forming a plating film layer made of Zn or a Zn alloy on the back surface of the surface on which the blackening plating layer is formed. Method. 前記塩基性電解浴のpHが10以上であることを特徴とする請求項1〜4のいずれか一項に記載の製造方法。 The manufacturing method according to claim 1, wherein the pH of the basic electrolytic bath is 10 or more. 請求項1〜5のいずれか一項に記載の方法によって製造された電磁波遮蔽用黒化表面処理銅箔。 The blackened surface-treated copper foil for electromagnetic wave shielding manufactured by the method as described in any one of Claims 1-5. 請求項6に記載の黒化表面処理銅箔を絶縁性透明基材に積層して製造された電磁波遮蔽用複合材料。
An electromagnetic wave shielding composite material produced by laminating the blackened surface-treated copper foil according to claim 6 on an insulating transparent substrate.
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