JP3880944B2 - Manufacturing method of magnetic head - Google Patents

Description

  The present invention relates to a magnetic head, and in particular, can appropriately prevent magnetic saturation during recording, generate a large leakage magnetic field in the vicinity of the gap, and improve various characteristics such as overwrite characteristics. In addition, the track width controllability can be improved.MagnetismQi headofIt relates to a manufacturing method.
[0001]
[Prior art]
  20 is a partial front view showing the structure of a conventional magnetic head (inductive head), and FIG. 21 is a partial longitudinal sectional view of the thin film magnetic head cut from the line 25-25 shown in FIG. is there.
[0002]
  Reference numeral 1 shown in FIGS. 20 and 21 denotes a lower core layer made of a magnetic material such as permalloy, and an insulating layer 9 is formed on the lower core layer 1.
[0003]
  The insulating layer 9 is formed with a groove 9a having an inner width dimension in the track width direction (X direction shown in the drawing) with the track width Tw extending from the surface facing the recording medium in the height direction (Y direction shown in the drawing). .
[0004]
  In this groove portion 9a, a lower magnetic pole layer 3 that is magnetically connected to the lower core layer 1, a gap layer 4, and an upper magnetic pole layer 5 that is magnetically connected to the upper core layer 6 are plated in order from the bottom. Yes.
  As shown in FIG. 20, the upper core layer 6 is formed on the upper magnetic pole layer 5 by plating.
[0005]
  Further, as shown in FIG. 21, the coil layer 7 patterned in a spiral shape is provided on the insulating layer 9.
[0006]
  The coil layer 7 is covered with a coil insulating layer 8 such as a resist, and the upper core layer 6 is formed on the coil insulating layer 8. The upper core layer 6 is magnetically connected to the upper magnetic pole layer 5 at the distal end portion 6a and to the lower core layer 1 at the proximal end portion 6b.
[0007]
  In the inductive head shown in FIGS. 20 and 21, when a recording current is applied to the coil layer 7, a recording magnetic field is induced in the lower core layer 1 and the upper core layer 6 and magnetically connected to the lower core layer 1. A magnetic signal is recorded on a recording medium such as a hard disk by a leakage magnetic field from between the upper magnetic pole layer 5 magnetically connected to the layer 3 and the upper core layer 6.
[0008]
  In the conventional thin film magnetic head shown in FIGS. 20 and 21, a Gd determining layer 10 made of, for example, an organic insulating material is formed on the lower core layer 1 that is separated from the surface facing the recording medium by a predetermined distance in the height direction. Has been.
[0009]
  A lower magnetic pole layer 3, a gap layer 4 and an upper magnetic pole layer 5 are laminated in that order from the bottom between the opposing surfaces and the Gd determining layer 10. In FIG. 21, the gap depth (Gd) is determined by the length T2 from the facing surface to the position where the gap layer 4 and the Gd determining layer 10 are in contact with each other, and the control of the gap depth is controlled by the position where the Gd determining layer 10 is formed. Since the upper magnetic pole layer 5 can be extended beyond the length of the gap depth by forming the upper magnetic pole layer 5 up to the Gd determining layer 10, the length of the gap depth can be increased. Regardless of this, the contact area between the upper magnetic pole layer 5 and the upper core layer 6 can be increased, and the magnetic saturation of the upper magnetic pole layer 5 can be appropriately reduced even in future higher recording densities.
[0010]
  The magnetic head shown in FIGS. 20 and 21 is described in Patent Document 1.
  However, in the magnetic head shown in FIGS. 20 and 21, the length in the height direction of the lower magnetic pole layer 3 is defined by the distance from the surface facing the recording medium to the front end surface of the Gd determining layer 10. It was difficult to increase the volume of the bottom pole layer 3.
[0011]
  The magnetic head shown in FIG. 22 is a magnetic head in which it is easy to increase the length in the height direction (Y direction in the drawing) of the lower magnetic pole layer.
[0012]
  In the magnetic head shown in FIG. 22, the lower magnetic pole layer 12 is connected on the side of the lower core layer 11 facing the recording medium, and the rear portion 12a of the lower magnetic pole layer 12 is scraped away from the front portion 12b. The film thickness is thin. An insulating layer 13 is formed on the lower core layer 11, and a tip portion 13 a of the insulating layer 13 is laminated on the rear portion 12 a of the lower magnetic pole layer 12.
[0013]
  The gap depth length of the magnetic head shown in FIG. 22 is defined by the distance T3 from the surface facing the recording medium to the tip 13a of the insulating layer 13.
[0014]
  A gap layer 14 and an upper magnetic pole layer 15 are formed on the lower magnetic pole layer 12. The track width Tw of the magnetic head shown in FIG. 22 is also defined by the track width direction (X direction in the drawing) dimensions of the lower magnetic pole layer 12, the gap layer 14, and the upper magnetic pole layer 15.
[0015]
  An insulating layer 16 is provided behind and to the sides of the gap layer 14 and the top pole layer 15. On the insulating layer 16, a coil layer 17 patterned in a spiral shape is provided. The coil layer 17 is covered with a coil insulating layer 18 such as a resist, and an upper core layer 19 is formed on the coil insulating layer 18. The upper core layer 19 is magnetically connected to the upper magnetic pole layer 15 at the distal end portion 19a and to the lower core layer 11 at the proximal end portion 19b.
  The magnetic pole structure of the magnetic head shown in FIG.
[0016]
[Patent Document 1]
      JP 2002-352402 A
[Patent Document 2]
      Japanese Patent Laid-Open No. 2002-8208 (page 9, FIG. 3)
[0017]
[Problems to be solved by the invention]
  In the magnetic head shown in FIGS. 20 and 21, since it is difficult to increase the volume of the lower magnetic pole layer 3, magnetic saturation is likely to occur at the lower magnetic pole layer 3, and it is difficult to improve the overwrite characteristics.
[0018]
  On the other hand, in the magnetic head shown in FIG. 22, it is easy to increase the length of the lower magnetic pole layer in the height direction (Y direction in the drawing), and magnetic saturation at the lower magnetic pole layer 3 hardly occurs.
[0019]
  However, in the magnetic head shown in FIG. 22, the gap depth length is determined by the position where the rear portion 12a of the lower magnetic pole layer 12 is scraped. The position where the rear portion 12a of the bottom pole layer 12 is scraped varies.ButProne to occur. In other words, the magnetic head structure shown in FIG.ButIt tends to occur.
[0020]
  The present invention is for solving the above-described conventional problems, and has a Gd determining layer that can accurately define the formation position, and can increase the volume of the lower magnetic pole layer.ofAn object is to provide a manufacturing method.
[0021]
[Means for Solving the Problems]
  The method of manufacturing a magnetic head according to the present invention includes the following steps.
(A) On the lower core layerMore away from the position facing the recording medium in the height directionA step of plating an auxiliary magnetic pole layer using a magnetic material at a position;
(B) forming a Gd determining layer on the auxiliary magnetic pole layer using a nonmagnetic metal capable of being plated;
(C) providing an insulating layer on the front end surface of the auxiliary magnetic pole layer so that the auxiliary magnetic pole layer and the lower magnetic pole layer are electrically connected and electrically insulated in the next step;
(d) On the lower core layer, from the position facing the recording medium to the front end face of the auxiliary magnetic pole layerOn the front end surface of the formed insulating layerOver the bottom pole layerplatingForming,Thereby, the lower magnetic pole layer and the auxiliary magnetic pole layer are magnetically connected and electrically insulated.Process,
(e) A gap layer on the bottom pole layerplatingAfter forming, the step of plating the upper magnetic pole layer from the gap layer to the upper surface of the Gd determining layer;
(f) From the bottom pole layer, gap layer and top pole layerHeightdirectionAwayForming a coil layer at the position,
(g) A step of forming an upper core layer on the upper magnetic pole layer.
[0022]
  In the magnetic head manufacturing method of the present invention, the front end face of the Gd determining layer and the front end face of the auxiliary magnetic pole layer can be made continuous.
[0023]
  In the present invention, since the Gd determining layer made of a nonmagnetic material is provided on the lower core layer, it is easy to accurately define the gap depth length. Therefore, the overwrite characteristics of the magnetic head can be made uniform.
[0024]
  Further, an auxiliary magnetic pole layer made of a magnetic material is provided between the Gd determining layer and the lower core layer, and the rear end surface of the lower magnetic pole layer is connected to the front end surface of the auxiliary magnetic pole layer. Saturation can be reduced and the overwrite characteristics of the magnetic head can be improved.
[0025]
  Furthermore, since the Gd determining layer is formed of metal, the shape of the upper magnetic pole layer formed by plating on the Gd determining layer can be made uniform.
[0026]
  In the present invention, when the lower magnetic pole layer and the auxiliary magnetic pole layer are electrically insulated by the insulating layer, it is easy to flatten the upper surface of the lower magnetic pole layer, and the recording characteristics of the magnetic head are improved. It becomes easy to make uniform.
[0027]
  In the present invention, in the step (c), the insulating layer made of an inorganic insulating material is formed so as to cover the lower core layer, the auxiliary magnetic pole layer, and the Gd determining layer, and then on the lower core layer and the Gd. It is preferable to carry out by removing the insulating layer formed on the determining layer.
[0028]
  Alternatively, the step (c) may be performed by forming the insulating layer made of an organic insulating material on the front end face of the auxiliary magnetic pole layer by a photolithography technique.
[0029]
  In the present invention, the auxiliary magnetic pole layer is formed by plating. As another method for forming the auxiliary magnetic pole layer, there is a method in which the Gd determining layer or a mask layer other than the Gd determining layer is used as a mask, and the auxiliary magnetic pole layer is cut out by ion milling or the like. However, if the auxiliary magnetic pole layer is scraped off, there are cases where shavings adhere to the side surface of the auxiliary magnetic pole layer, or there is a shaving near the boundary between the auxiliary magnetic pole layer and the lower core layer. Difficult to make uniform. In the present invention in which the auxiliary magnetic pole layer is formed by plating, such a problem can be prevented.
[0030]
  In the method for manufacturing a magnetic head of the present invention, the auxiliary magnetic pole layer is made of the same material as the lower core layer.platingMay be formed, depending on different materialsplatingIt may be formed.
[0031]
  In particular, the auxiliary magnetic pole layer is made of a material different from that of the lower core layer.platingWhen forming the saturation magnetic flux density of the auxiliary magnetic pole layer, the lower core layerplatingIt is preferable to make it larger than the saturation magnetic flux density of the magnetic material to be formed.
[0032]
  In order to ensure the magnetic connection between the lower magnetic pole layer and the auxiliary magnetic pole layer,c) Step, the thickness of the insulating layer in the normal direction relative to the front end face of the auxiliary magnetic pole layer is preferably 50 mm or more and 6000 mm or less.
[0033]
  In the present invention, the gap layer is selected from one or more of NiP, NiReP, NiPd, NiPt, NiRh, NiW, NiMo, Au, Pt, Rh, Pd, Ru, Cr, Ag, Cu, and Ti. Non-magnetic metal materialplatingIt is preferable to form.
[0034]
DETAILED DESCRIPTION OF THE INVENTION
  FIG.Reference exampleFIG. 2 is a longitudinal sectional view of the magnetic head shown in FIG. 1 taken along the line AA and viewed from the arrow direction. The recording magnetic head Hw shown in FIG. 2 is the magnetic head of the present invention, which is a so-called inductive head Hw. This inductive head Hw is laminated on a reproducing magnetic head Hr using a magnetoresistive effect, for example.
[0035]
  The magnetic head shown in FIGS. 1 and 2 is formed on the trailing end surface 21a of the ceramic slider 21 constituting the floating head, and includes a reproducing magnetic head Hr and a writing inductive head. A laminated thin film magnetic head is obtained.
[0036]
  As shown in FIGS. 1 and 2, Al is formed on the trailing side end surface 21 a of the slider 21.₂O₃A reproducing magnetic head Hr is formed through the film 22. The reproducing magnetic head Hr detects a leakage magnetic field from a recording medium such as a hard disk by using a magnetoresistive effect and reads a recording signal.
[0037]
  The reproducing magnetic head Hr is formed of, for example, a GMR element using a giant magnetoresistance effect typified by a spin valve film, a TMR element using a tunnel magnetoresistance effect, or an AMR element using an anisotropic magnetoresistance effect. A magnetic field reading unit M which is a magnetoresistive effect element, and a lower shield layer 23 and an upper shield layer 26 formed above and below the magnetic field reading unit M via a lower gap layer 24 and an upper gap layer 25 are provided.
[0038]
  The length of the magnetic field reading unit M in the track width direction (X direction) is the track width Tr of the reproducing magnetic head Hr. The distance between the upper shield layer 26 and the lower shield layer 23 is H2.
[0039]
  The lower gap layer 24 and the upper gap layer 25 are made of Al.₂O₃And SiO₂The lower shield layer 23 and the upper shield layer 26 are made of a soft magnetic material having a high magnetic permeability such as a NiFe alloy (Permalloy).
[0040]
  On the upper shield layer 26, Al₂O₃And SiO₂A separation layer 27 made of an insulating material such as,An inductive head Hw is stacked on the separation layer 27.
[0041]
  A lower core layer 30 is stacked on the separation layer 27. A Gd determining layer 32 is formed on the lower core layer 31 with the auxiliary magnetic pole layer 31 interposed therebetween as shown in FIG.
[0042]
  The auxiliary magnetic pole layer 31 is made of NiFe, CoFe, FeCoNi, CoFeX or FeNiX (where X is one or more elements of Pd, Ir, Rh, Ru, and Pt). Any one or more of the soft magnetic materials indicated by The material of the Gd determining layer 32 is one or more of NiP, NiReP, NiPd, NiPt, NiRh, NiW, NiMo, Au, Pt, Rh, Pd, Ru, Cr, Ag, Cu, and Ti. A nonmagnetic metal material selected from is used. The Gd determining layer 32 may be formed of a single layer or a multilayer film.
[0043]
  The auxiliary magnetic pole layer 31 may be formed of the same material as the lower core layer 30 and the lower magnetic pole layer 34, or may be formed of a different material. When the auxiliary magnetic pole layer 31 is formed of a material different from that of the lower core layer 30, the saturation magnetic flux density of the auxiliary magnetic pole layer 31 is preferably larger than the saturation magnetic flux density of the magnetic material forming the lower core layer 30.
[0044]
  The auxiliary magnetic pole layer 31 is formed with a film thickness smaller than the total film thickness of the lower magnetic pole layer 34 and the gap layer 35. BookformIn this state, the auxiliary magnetic pole layer 31 is formed with a thickness of 0.2 μm to 2.0 μm. The Gd determining layer 32 is formed with a thickness of 0.2 μm to 3.0 μm.
[0045]
  The Gd determining layer 32 and the auxiliary magnetic pole layer 31 areFormBecause it is a component that makes the characteristics of, will be described in detail later.
[0046]
  The gap depth (Gd) is regulated by the length from the surface F facing the recording medium to the front end surface 32a of the Gd determining layer 32.
[0047]
  As shown in FIG. 2, a magnetic pole portion 33 is formed from the surface F facing the recording medium to the Gd determining layer 32.
[0048]
  The magnetic pole portion 33 is formed by laminating a lower magnetic pole layer 34, a nonmagnetic gap layer 35, and an upper magnetic pole layer 36 from the bottom.
[0049]
  The lower magnetic pole layer 34 is formed by plating on the lower core layer 30. The gap layer 35 formed on the bottom pole layer 34 is preferably made of a nonmagnetic metal material that can be plated. Specifically, one or more of NiP, NiReP, NiPd, NiPt, NiRh, NiW, NiMo, Au, Pt, Rh, Pd, Ru, Cr, Ag, Cu, and Ti can be selected. The gap layer 35 may be formed of a single layer film or a multilayer film.
[0050]
  In additionBookFormThenNiP is used for the gap layer 35. This is because the gap layer 35 can be appropriately brought into a nonmagnetic state by forming the gap layer 35 with NiP. Further, when the gap layer 35 is formed of a NiP alloy, in addition to the ease of continuous plating in manufacturing, it has excellent heat resistance and good adhesion to the lower magnetic pole layer 34 and the upper magnetic pole layer 36. Further, since the hardness of the lower magnetic pole layer 34 and the upper magnetic pole layer 36 can be made equal, for example, the processing amount when the lower magnetic pole layer 34, the gap layer 35 and the upper magnetic pole layer 36 are processed by ion milling or the like is also equivalent. The workability can be improved.
[0051]
  The gap layer 35 is a NiP alloy, and the concentration of the element P is preferably 8% by mass or more and 15% by mass or less. This makes it possible to be stable and non-magnetic against external factors such as heat generation. Further, the measurement of the alloy composition of the gap layer 35 such as NiP alloy can be specified by a combined X-ray analyzer such as SEM or TEM or a waveform dispersion type line analyzer.
[0052]
  The gap layer 35 is made of Al, for example.₂O₃In such a case, it is necessary to form a plating base for plating the upper magnetic pole layer 36 on the gap layer 35, and the formation of the magnetic pole portion 33 becomes complicated. Layer 35 is preferably plated.
[0053]
  Further, the upper magnetic pole layer 36 formed on the gap layer 35 is magnetically connected to the upper core layer 41 formed thereon.
[0054]
  When the gap layer 35 is formed of a nonmagnetic metal material that can be plated as described above, the lower magnetic pole layer 34, the gap layer 35, and the upper magnetic pole layer 36 can be formed by continuous plating.
[0055]
  In the thin film magnetic head shown in FIGS. 1 and 2, the width dimension of the upper magnetic pole layer 36 in the track width direction (X direction in the drawing) is shorter than the width dimension of the upper core layer 41. The track width Tw is regulated by the width dimension. The track width Tw is, for example, 0.1 μm to 1.0 μm. Or it is 0.1 micrometer-0.5 micrometer.
[0056]
  The upper magnetic pole layer 36 and the lower magnetic pole layer 34 are made of NiFe, CoFe, FeCoNi, CoFeX or FeNiX (where X is one or more elements of Pd, Ir, Rh, Ru, and Pt). It is formed using any one or two or more of the soft magnetic materials represented by the composition formula.
[0057]
  BookformIn this state, the top pole layer 36 is formed by a laminated structure of a magnetic layer 36a and a magnetic layer 36b, and the magnetic layer 36a is formed from the gap layer 35 to the Gd determining layer 32 as shown in FIG.
[0058]
  The magnetic layer 36b may be formed of a soft magnetic material represented by the same composition formula as that of the soft magnetic material forming the magnetic layer 36a, or may be formed of a soft magnetic material having a different composition formula.
[0059]
  However, the magnetic layer 36a is preferably formed of a soft magnetic material having a saturation magnetic flux density higher than that of the magnetic layer 36b.
[0060]
  By forming the magnetic layer 36a close to the gap layer 35 with a magnetic material having a high saturation magnetic flux density in this way, it becomes easy to concentrate the magnetic flux flowing from the upper core layer 41 in the vicinity of the gap, thereby improving the recording density. It becomes possible.
[0061]
  When the magnetic layer 36b is also formed of the same magnetic material as that of the magnetic layer 36a, for example, when formed of a NiFe alloy, the Fe amount of the NiFe alloy on the magnetic layer 36a side is set to the Fe amount of the NiFe alloy on the magnetic layer 36b side. The saturation magnetic flux density Bs of the magnetic layer 36a can be made larger than the saturation magnetic flux density Bs of the magnetic layer 36b.
[0062]
  Similarly, when the upper magnetic pole layer 36 is formed as a multilayer film of three or more layers, it is preferable to select a magnetic material so that the magnetic layer closer to the gap layer 35 has a higher saturation magnetic flux density Bs.
  The magnetic pole portion may be composed of only the gap layer 35 and the upper magnetic pole layer 36.
[0063]
  An insulating layer 37 is formed on the lower core layer 30 and behind the Gd determining layer 32 in the height direction (Y direction in the drawing). The coil layer is formed on the insulating layer 37 by a conductive material such as Cu. 38 is formed in a spiral pattern. The coil layer 38 has a two-layer structure and is covered with an insulating layer 39 made of an inorganic insulating material and a coil insulating layer 40 made of an organic insulating material.
[0064]
  As shown in FIG. 2, the upper core layer 41 is patterned by, for example, a frame plating method from the magnetic pole part 33 to the coil insulating layer 40. Further, as shown in FIG. 1, the tip 41a of the upper core layer 41 is formed with a width dimension W1 in the track width direction on the surface F facing the recording medium, and the width dimension W1 is larger than the track width Tw. Largely formed.
[0065]
  As shown in FIG. 2, the base end portion 41 b of the upper core layer 41 is connected to a connection layer (back gap layer) 42 made of a magnetic material formed on the lower core layer 30.
[0066]
  The upper core layer 41 is coupled to the magnetic layer 36 b of the upper magnetic pole layer 36. The magnetic layer 36b is preferably formed of a soft magnetic material having a saturation magnetic flux density higher than that of the upper core layer 41.
[0067]
  The upper core layer 41 and the lower core layer 30 are plated with NiFe or the like. The upper core layer 41 and the upper magnetic pole layer 36 may be formed of the same material or different materials. The lower core layer 30 and the lower magnetic pole layer 34 may be formed of the same material or different materials. The lower magnetic pole layer 34 is preferably formed of a soft magnetic material having a saturation magnetic flux density higher than that of the lower core layer 30.
[0068]
  On the surface facing the recording medium, the upper surface of the lower core layer 30 may be formed as a flat surface 30a, or inclined so as to incline toward the lower surface as it moves away from the base end of the magnetic pole portion 33 in the track width direction (X direction in the drawing). The surface 30b may be formed. When the upper surface of the lower core layer 30 is formed by the inclined surface 30b, the interval between the upper core layer 41 and the lower core layer 30 can be widened, and thus the occurrence of side fringing can be suppressed.
[0069]
  As shown in FIG. 1, insulating layers 39 are exposed on both sides of the magnetic pole portion 33 in the track width direction (X direction in the drawing).
[0070]
  When a recording current is applied to the coil layer 38, a recording magnetic field is induced in the lower core layer 30 and the upper core layer 41, and a leakage magnetic field is generated between the lower magnetic pole layer 34 and the upper magnetic pole layer 36 facing each other through the gap layer 35. However, a magnetic signal is recorded on a recording medium such as a hard disk by the leakage magnetic field.
[0071]
  SpecialI will talk about the features.
  FIG. 3 is a partial enlarged cross-sectional view of the periphery of the surface F facing the recording medium of the thin film magnetic head shown in FIG.
[0072]
  A Gd determining layer 32 is provided on the lower core layer 30 on the rear side in the height direction from the surface F facing the recording medium. When the Gd determining layer 32 is provided, it becomes easy to accurately define the gap depth length. BookformIn this state, the rear end surface 35a of the gap layer 35 is in contact with the front end surface 32a of the Gd determining layer 32, and the gap depth length L1 is set at a distance from the surface F facing the recording medium to the front end surface 32a of the Gd determining layer 32. Can be accurately defined. Therefore, the overwrite characteristics of the magnetic head can be made uniform.
[0073]
  Further, an auxiliary magnetic pole layer 31 made of a magnetic material is provided between the Gd determining layer 32 and the lower core layer 30, and the rear end surface 34 a of the lower magnetic pole layer 34 is connected to the front end surface 31 a of the auxiliary magnetic pole layer 31. Therefore, the magnetic saturation at the lower magnetic pole layer 34 can be reduced, and the overwrite characteristic of the magnetic head rises sharply. In addition, since the absolute value of the overwrite characteristic is increased, the recording current can be reduced. Further, the magnetic flux can escape from the rear portion of the upper magnetic pole layer 36 to the auxiliary magnetic pole layer 31, and the side fringing can be reduced. The overwrite characteristics of the magnetic head can be improved.
[0074]
  GThe front end surface 32a of the d determining layer 32 and the front end surface 31a of the auxiliary magnetic pole layer 31 can be a continuous surface C having no step.
[0075]
  The front end surface 32a of the Gd determining layer 32 is a surface perpendicular to the upper surface of the lower core layer 30, and the gap depth length L1 can be accurately defined.
[0076]
  The Gd determining layer 32 is made of a metal that can be plated, and both the auxiliary magnetic pole layer 31 and the Gd determining layer 32 are formed by a plating method.
[0077]
  Since the Gd determining layer 32 is made of metal, the shape of the upper magnetic pole layer 36 formed by plating on the Gd determining layer 32 can be made uniform.
[0078]
  Accordingly, it is possible to prevent the upper magnetic pole layer 36 from being magnetically saturated, a large leakage magnetic flux is generated from the opposing surface of the magnetic layer 36a, and a thin film magnetic head that can appropriately cope with an increase in recording density is provided. Is possible.
[0079]
  The Gd determining layer 32 may be a stacked body of a plurality of layers made of different nonmagnetic materials. The auxiliary magnetic pole layer 31 may also be a laminate of a plurality of layers made of different nonmagnetic materials.
[0080]
  A method of manufacturing the magnetic head shown in FIGS. 1 to 3 will be described below with reference to manufacturing process diagrams shown in FIGS. The manufacturing process diagrams shown in FIGS. 4 to 8 are longitudinal sectional views (that is, sectional views cut from a plane parallel to the YZ plane in the drawing) of the magnetic head being manufactured.
[0081]
  In the step shown in FIG. 4, the lower core layer 30 made of NiFe alloy or the like is plated, and the height direction (the Y direction in the drawing) from the height side rear end surface of the lower core layer 30 or the track width direction of the lower core layer 30 Al on both sides (X direction in the figure)₂O₃Then, the surface of the lower core layer 30 and the surface of the insulating material layer 43 are polished using a CMP technique or the like to make a flat surface.
[0082]
  Next, the auxiliary magnetic pole layer 31 can be formed by plating using a magnetic material at a predetermined position on the lower core layer 30 by a frame plating method using the resist layer R1 as a frame. The Gd determining layer 32 is formed by plating using a nonmagnetic metal. The front end surface 32a of the Gd determining layer 32 and the front end surface 31a of the auxiliary magnetic pole layer 31 are continuous surfaces C having no step.
[0083]
  The auxiliary magnetic pole layer 31 is made of NiFe, CoFe, FeCoNi, CoFeX or FeNiX (where X is one or more elements of Pd, Ir, Rh, Ru, and Pt). Any one or more of the soft magnetic materials indicated by The material of the Gd determining layer 32 is one or more of NiP, NiReP, NiPd, NiPt, NiRh, NiW, NiMo, Au, Pt, Rh, Pd, Ru, Cr, Ag, Cu, and Ti. A nonmagnetic metal material selected from is used. The Gd determining layer 32 may be formed of a single layer or a multilayer film.
[0084]
  The auxiliary magnetic pole layer 31 is formed with a film thickness smaller than the total film thickness of the lower magnetic pole layer 34 and the gap layer 35. BookformIn this state, the auxiliary magnetic pole layer 31 is formed with a thickness of 0.2 μm to 2.0 μm. The Gd determining layer 32 is formed with a thickness of 0.2 μm to 3.0 μm.
[0085]
  By using the frame plating method, the front end surface 32 a of the Gd determining layer 32 can be made a vertical surface with respect to the upper surface of the lower core layer 30.
[0086]
  Next, in the process shown in FIG. 6, the lower magnetic pole layer 34, the gap layer 35, and the upper magnetic pole layer 36 are formed by continuous plating using the resist layer R <b> 2 in which the groove portion having the shape of the magnetic pole portion 33 is formed as a frame.
[0087]
  For the lower magnetic pole layer 34 and the upper magnetic pole layer 36, a magnetic material such as a NiFe alloy, a CoFe alloy, or a CoFeNi alloy can be used, and a high saturation magnetic flux density Bs can be obtained by adjusting the composition ratio of these magnetic materials. thisformIn this state, the high saturation magnetic flux density Bs means a saturation magnetic flux density of 1.8 T or more.
[0088]
  The lower magnetic pole layer 34 and the upper magnetic pole layer 36 may have a single-layer structure or a multi-layer structure.
[0089]
  The gap layer 35 is preferably made of a nonmagnetic metal material that can be plated. Specifically, one or more of NiP, NiReP, NiPd, NiPt, NiRh, NiW, NiMo, Au, Pt, Rh, Pd, Ru, Cr, Ag, Cu, and Ti can be selected. The gap layer 35 may be formed of a single layer film or a multilayer film.
[0090]
  In additionBookFormThenNiP is used for the gap layer 35. This is because the gap layer 35 can be appropriately brought into a nonmagnetic state by forming the gap layer 35 with NiP. Further, when the gap layer 35 is formed of a NiP alloy, in addition to the ease of continuous plating in manufacturing, it has excellent heat resistance and good adhesion to the lower magnetic pole layer 34 and the upper magnetic pole layer 36. Further, since the hardness of the lower magnetic pole layer 34 and the upper magnetic pole layer 36 can be made equal, for example, the processing amount when the lower magnetic pole layer 34, the gap layer 35 and the upper magnetic pole layer 36 are processed by ion milling or the like is also equivalent. The workability can be improved.
[0091]
  The gap layer 35 is a NiP alloy, and the concentration of the element P is preferably 8% by mass or more and 15% by mass or less. This makes it possible to be stable and non-magnetic against external factors such as heat generation. Further, the measurement of the alloy composition of the gap layer 35 such as NiP alloy can be specified by a combined X-ray analyzer such as SEM or TEM or a waveform dispersion type line analyzer.
[0092]
  The gap layer 35 is made of Al, for example.₂O₃In such a case, it is necessary to form a plating base for plating the upper magnetic pole layer 36 on the gap layer 35, and the formation of the magnetic pole portion 33 becomes complicated. Layer 35 is preferably plated.
[0093]
  When the gap layer 35 is formed of a nonmagnetic metal material that can be plated as described above, the lower magnetic pole layer 34, the gap layer 35, and the upper magnetic pole layer 36 can be formed by continuous plating.
[0094]
  At this time, since the rear end face 34a of the lower magnetic pole layer 34 is connected to the front end face 31a of the auxiliary magnetic pole layer 31, magnetic saturation at the lower magnetic pole layer 34 can be reduced, and the rise of the overwrite characteristic of the magnetic head is steep. Become. In addition, the absolute value of the overwrite characteristic increases, so the recording current is reduced.Lesscan do. Further, the magnetic flux can escape from the rear portion of the upper magnetic pole layer 36 to the auxiliary magnetic pole layer 31, and the side fringing can be reduced. The overwrite characteristics of the magnetic head can be improved.
[0095]
  Further, the rear end surface 35 a on the height direction side of the gap layer 35 is brought into contact with the front end surface 32 a on the opposite surface side of the Gd determining layer 32. Thereby, the gap depth length L1 can be accurately defined by the distance from the surface F facing the recording medium to the front end surface 32a of the Gd determining layer 32.
[0096]
  Further, when the surface (front end surface) 32a of the Gd determining layer 32 that contacts the gap layer 35 is a surface perpendicular to the surface of the lower core layer 30, the height direction dimension of the gap layer 35 can be accurately defined, and the gap depth dimension can be set. It becomes easy to form accurately.
[0097]
  Next, in the process shown in FIG. 7, Al is disposed behind the Gd determining layer 32 in the height direction.₂O₃And SiO₂After the insulating layer 37 is formed of an inorganic material such as the like, the lower layer portion of the coil layer 38 is spirally plated to form an insulating layer 39 made of an inorganic material.
[0098]
  Further, in the step shown in FIG. 8, the top surface of the magnetic pole part 33, the top surface of the insulating layer 39, and the top surface of the connection layer 42 are planarized using, for example, CMP technology.
[0099]
  Thereafter, the upper layer portion of the coil layer 38 is spirally plated on the insulating layer 39, and then the coil insulating layer 40 is formed on the coil layer 38. Then, the upper core layer 41 is formed by, for example, frame plating from the magnetic pole part 33 to the coil insulating layer 40. The base end portion 41 b of the upper core layer 41 is connected to the connection layer 42. Thereby, the magnetic head shown in FIGS. 1 and 2 can be obtained.
[0100]
  The front end surface 32a of the Gd determining layer 32 may be a slope or a curved surface.
  For example, as shown in FIG. 9, a Gd determining layer 82 that is an inclined surface that approaches a surface facing the recording medium as the front end surface 82a moves upward in the drawing (closer to the upper core layer 41) may be formed. . The rear end surface 82b of the Gd determining layer 82 is an inclined surface that approaches the height direction as it goes upward in the drawing (closer to the upper core layer 41).
[0101]
  Further, the auxiliary magnetic pole layer 81 provided under the Gd determining layer 82 is also an inclined surface that approaches the surface facing the recording medium as the front end surface 81a goes upward in the drawing (closer to the upper core layer 41). The end surface 81b is an inclined surface that approaches the height direction as it goes upward in the drawing (closer to the upper core layer 41). The front end surface 82a of the Gd determining layer 82 and the front end surface 81a of the auxiliary magnetic pole layer 81 are a continuous surface S1 having no step, and the angle formed by the continuous surface S1 and the surface 30c of the lower core layer 30 is θ1.
[0102]
  Examples of the method of forming the auxiliary magnetic pole layer 81 and the Gd determining layer 82 as shown in FIG. 9 include the following. First, in the process shown in FIG. 5, the resist layer R1 used as a frame is heat-treated, and the end surfaces R1a1 of the groove R1a for forming the auxiliary magnetic pole layer 31 and the Gd determining layer 32 are inclined surfaces S and S. Then, the auxiliary magnetic pole layer 31 and the Gd determining layer 32 are formed by plating.
[0103]
  10 is a perspective view of the lower core layer 30, the auxiliary magnetic pole layer 31, and the Gd determining layer 32 in the process shown in FIG. 5, and FIG. 11 is a lower core layer 30 and the auxiliary magnetic pole layer in the process shown in FIG. 31 is a perspective view of the Gd determining layer 32. FIG.
[0104]
  As shown in FIG. 10, the Gd determining layer 32 and the auxiliary magnetic pole layer 31 are formed in the same planar shape. As shown in FIG. 11, the track width direction dimension (X direction dimension in the drawing) of the auxiliary magnetic pole layer 31 and the Gd determining layer 32 is larger than the track width direction dimension of the magnetic pole portion 33, and the lower magnetic pole layer 34. However, the magnetic saturation can be effectively reduced.
[0105]
  BookformIn this state, after the Gd determining layer 32 and the auxiliary magnetic pole layer 31 are formed, the magnetic pole portion 33 is formed by plating. On the other hand, as shown in FIG. 12, after the Gd determining layer 32 is formed, the magnetic pole portion 33 is plated inside the groove formed in the resist layer R2, and ion milling is performed in the step shown in FIG. A method of forming the auxiliary magnetic pole layer 31 by scraping the surface of the lower core layer 30 is also conceivable. However, the method shown in FIGS. 12 and 13 may cause the following problems.
[0106]
  First, in the ion milling process shown in FIG. 12, the shaving residue when the surface of the lower core layer 30 is shaved adheres to the side in the track width direction of the magnetic pole portion 33 to form the reattachment layers H1 and H1. There arises a problem that the magnetic pole layer 36 and the lower magnetic pole layer 34 are short-circuited.
[0107]
  In the same ion milling process, the surface of the lower core layer 30 is shaved.KiAre attached to the front end portion of the auxiliary magnetic pole layer 31 and the Gd determining layer 32 facing the recording medium and the rear end portion in the height direction to form reattachment layers H2 and H2. There arises a problem that the upper magnetic pole layer 36 and the lower magnetic pole layer 34 are short-circuited. Further, the track width direction dimension of the upper magnetic pole layer 36 and the lower magnetic pole layer 34 cannot be accurately processed to a predetermined size.
[0108]
  Further, the upper surface of the magnetic pole part 33 is scraped by a thickness t1 by an ion milling process after the magnetic pole part 33 is formed by plating. Therefore, in the process shown in FIG. 12, it is necessary to form the magnetic pole part 33 as thick as the thickness cut by the ion milling process, and it is necessary to form the resist layer R2 as thick as that. However, when the resist layer R2 is thickened, the resolution of resist photolithography is lowered, and it becomes difficult to reduce the dimension in the track width direction of the groove for forming the magnetic pole portion 33. That is, it is difficult to reduce the size of the magnetic pole portion 33 in the track width direction.
[0109]
  Further, when forming the auxiliary magnetic pole layer 31 in the ion milling process shown in FIG. 13, it becomes difficult to increase the film thickness dimension (dimension in the Z direction in the drawing) of the auxiliary magnetic pole layer 31. However, the auxiliary magnetic pole layer 31 having a volume that effectively reduces the magnetic saturation may not be formed.
[0110]
  On the other hand, as shown in FIGS. 5 to 7, these problems can be avoided if the magnetic pole portion 33 is formed by plating after the Gd determining layer 32 and the auxiliary magnetic pole layer 31 are formed.
[0111]
  In particular, the flatness of the surface 30c of the lower core layer 30 can be maintained by plating the Gd determining layer 32 and the auxiliary magnetic pole layer 31, and the side surfaces of the Gd determining layer 32 and the auxiliary magnetic pole layer 31 and the auxiliary magnetic pole layer can be maintained. It is possible to prevent a step from being generated near the boundary between 31 and the lower core layer 30.
[0112]
  by the way,SupplementWhen the magnetic pole part 33 is formed by plating after the auxiliary magnetic pole layer 31 is formed, the lower magnetic pole layer 34 and the gap layer 35 also grow from the auxiliary magnetic pole layer 31 when the lower magnetic pole layer 34 and the gap layer 35 are formed by plating. Sometimes. As a result, as shown in FIG. 14, curved portions 34b and 35b are formed in the vicinity of the Gd determining layer 32 of the lower magnetic pole layer 34 and the gap layer 35, and the lower magnetic pole layer 34 and the gap layer 35 are formed as flat thin films. It may disappear. If the bottom pole layer 34 and the gap layer 35 are curved, the recording characteristics of the magnetic head may be deteriorated.
[0113]
  In order to reliably planarize the upper surface of the bottom pole layer 34 and the gap layer 35, FIG.(Embodiment)As shown in FIG. 4, a thin insulating layer 92 is provided between the rear end surface 34a of the lower magnetic pole layer 34 and the front end surface 31a of the auxiliary magnetic pole layer 31, and the lower magnetic pole layer 34 and the auxiliary magnetic pole layer 31 are magnetically connected. However, it is preferable to be in an electrically insulated state.
[0114]
  When the lower magnetic pole layer 34 and the auxiliary magnetic pole layer 31 are electrically insulated, the lower magnetic pole layer 34 grows and curves from the auxiliary magnetic pole layer 31 when the lower magnetic pole layer 34 and the gap layer 35 are formed by plating. It is easy to make the recording characteristics of the magnetic head uniform by surely flattening the lower magnetic pole layer 34 and the gap layer 35.
[0115]
  In order to ensure electrical insulation and magnetic connection between the lower magnetic pole layer 34 and the auxiliary magnetic pole layer 31, the distance t2 between the rear end surface 34a of the lower magnetic pole layer 34 and the front end surface 31a of the auxiliary magnetic pole layer 31 is 50 mm. It is preferable that it is more than 6000cm.
[0116]
  In FIG. 15, the insulating layer 92 is also provided on the rear end face 31 b side of the auxiliary magnetic pole layer 31, which is derived from a manufacturing method described later.
[0117]
  The insulating layer 92 is formed by forming the auxiliary magnetic pole layer 31 by the process shown in FIG.ShowCan be formed by a method.
[0118]
  First, as shown in FIG. 16, an insulating layer 92 is formed by sputtering or vapor deposition so as to cover the lower core layer 30, the auxiliary magnetic pole layer 31, and the Gd determining layer 32. The material of the insulating layer 92 is Al.₂O₃And SiO₂An inorganic insulating material such as is used. Next, in the step shown in FIG. 17, anisotropic ion milling or reactive ion etching (RIE) from the direction perpendicular to the upper surface of the lower core layer 30 and the upper surface of the Gd determining layer 32 (the direction opposite to the Z direction in the drawing). Thus, the insulating layer 92 on the lower core layer 30 and the Gd determining layer 32 is removed. At this time, the insulating layer 92 on the lower core layer 30 and the Gd determining layer 32 is completely removed, and the insulating layer 92 on the front end face 31a of the auxiliary magnetic pole layer 31 is made 50 to 6000 mm. Thereafter, the magnetic pole layer 33 is formed in the same manner as in the step shown in FIG. 6, and the coil layer and the upper core layer are further formed.
[0119]
  Alternatively, as shown in FIG. 18A, an insulating layer 93 between the rear end surface 34a of the lower magnetic pole layer 34 and the front end surface 31a of the auxiliary magnetic pole layer 31 may be formed using an organic insulating material such as a resist. Good. The insulating layer 93 is formed in a predetermined shape by resist photolithography. The distance t3 between the rear end surface 34a of the lower magnetic pole layer 34 and the front end surface 31a of the auxiliary magnetic pole layer 31 is preferably set to 50 mm or more and 6000 mm or less. Further, even if the insulating layer 93 on the Gd determining layer 32 is removed by anisotropic ion milling or reactive ion etching (RIE) from the direction perpendicular to the film surface of the lower core layer 30 (the direction opposite to the Z direction in the drawing). Good.
[0120]
  Further, the insulating layer 93 may be used as a Gd determining layer, and the formation of the Gd determining layer 32 may be omitted (FIG. 1).8(B))(Reference example).
[0121]
  FIG.otherIt is a longitudinal cross-sectional view of the magnetic head of a form.
  The configuration of the reproducing magnetic head Hr is the same as the reproducing magnetic head Hr of the magnetic head shown in FIGS. In the following description, layers having the same names as those of the magnetic head shown in FIGS. 1 and 2 are formed of the same material unless otherwise specified.
[0122]
  A lower core layer 60 is formed on the separation layer 27. The lower core layer 60 is made of a magnetic material such as a NiFe alloy. The lower core layer 60 is formed with a predetermined length dimension in the height direction (Y direction in the drawing) from the surface F facing the recording medium.
[0123]
  The lower core layer 60 is formed with a raised portion 60a having a predetermined length dimension from the surface F facing the recording medium to the height direction (Y direction in the drawing). The raised portion 60a forms part of the lower core layer 60, but may be formed integrally with the lower layer portion 60b of the lower core layer 60 or may be formed separately.
[0124]
  A back gap layer 62 is formed on the lower core layer 60 at a predetermined distance from the rear end surface 60a1 in the height direction of the raised portion 60a in the height direction (Y direction in the drawing).
[0125]
  The raised portion 60a and the back gap layer 62 are formed of a magnetic material, and may be formed of the same material as the lower layer portion 60b of the lower core layer 60, or may be formed of a different material. The raised portion 60a and the back gap layer 62 may be a single layer or may be formed in a multilayer structure. The raised portion 60 a and the back gap layer 62 are magnetically connected to the lower layer portion 60 b of the lower core layer 60.
[0126]
  Al is formed in a space surrounded by the lower core layer 60 and the back gap layer 62.₂O₃And SiO₂A coil insulating base layer 63 made of an insulating material such as the like is formed, and a coil layer 64 that spirally winds around the back gap layer 62 is formed on the coil insulating base layer 63. A coil insulating layer 65 is formed on the coil layer 64 with an inorganic material.
[0127]
  On the raised portion 60a, a Gd determining layer 95 is formed in a height direction from a position away from the surface F facing the recording medium by a predetermined distance in the height direction (Y direction in the drawing).
[0128]
  Further, an auxiliary magnetic pole layer 94 made of a magnetic material is provided between the Gd determining layer 32 and the raised portion 60 a of the lower core layer 60. The auxiliary magnetic pole layer 94 and the Gd determining layer 95 are formed by plating on the raised portion 60a. The front end surface 95a of the Gd determining layer 95 and the front end surface 94a of the auxiliary magnetic pole layer 94 are continuous surfaces without steps.
[0129]
  Further, on the raised portion 60a from the surface F facing the recording medium to the Gd determining layer 95, on the coil insulating layer 65 in the height direction from the Gd determining layer 95, and on the back gap layer 62, the bottom magnetic pole layer 69 from below And the gap layer 70 is formed. thisformIn this state, the bottom pole layer 69 and the gap layer 70 are plated.
[0130]
  An upper magnetic pole layer 71 is formed on the gap layer 70 and the Gd determining layer 95 by plating, and an upper core layer 72 is formed on the upper magnetic pole layer 71 by plating. The upper magnetic pole layer 71 extends to the back gap layer 62 through the Gd determining layer 32.
[0131]
  FIG.9As shown in FIG. 4, on the four layers 73 of the lower magnetic pole layer 69, the gap layer 70, the upper magnetic pole layer 71, and the upper core layer 72, for example, Al₂O₃An insulating layer 74 made of an insulating material such as resist or resist is formed.
[0132]
  In FIG.IndicatedIn the magnetic head, since the magnetic path length is formed by connecting the ridge 60a and the back gap layer 62 with four linear layers, the magnetic head is formed by raising the layers below the upper core layer 72. Magnetic path length can be shortened.
[0133]
  For this reason, even if the number of turns of the coil layer 64 constituting the magnetic head is reduced, a constant recording characteristic can be maintained, and the coil resistance can be reduced by reducing the number of turns. Heat generation of the head can be suppressed, and as a result, problems such as the gap layer 70 protruding from the surface F facing the recording medium can be suppressed.
[0134]
  In addition, since the magnetic path length can be shortened, the magnetic field reversal speed can be increased, and a magnetic head excellent in high frequency characteristics can be formed.
[0135]
  Furthermore, an inorganic insulating material can be used for the coil insulating layer 65 covering the coil layer 64. Therefore, the thermal expansion coefficient of the magnetic head can be reduced.
[0136]
  Next, a Gd determining layer 66 is formed from the upper surface of the raised portion 60 a to the upper surface of the coil insulating layer 65, and the lower magnetic pole layer 69, the gap layer 70, and the Gd determining layer 66 positioned on the side facing the surface F facing the recording medium. The upper magnetic pole layer 71 functions as a magnetic pole layer, and the lower magnetic pole layer 69, the gap layer 70, and the upper magnetic pole layer 71 located on the height side of the Gd determining layer 66 function as a yoke layer.
[0137]
  That is, the lower magnetic pole layer 69, the gap layer 70, and the upper magnetic pole layer 71 are formed to extend from the raised portion 60a to the back gap layer 62, but the functions are separated before and after the Gd determining layer 68, This separation of functions makes it possible to improve the performance of the recording characteristics of the magnetic head.
[0138]
  Also, the lower magnetic pole layer 69, the gap layer 70, the upper magnetic pole layer 71, and the upper core layer 72 are all formed by plating, and these four layers can be formed by plating in the same frame, which is very easy to form. is there. Further, by adopting a four-layer plating structure, the track width Tw determined by the width dimension of the facing surface of the upper magnetic pole layer 71 can be regulated to a predetermined dimension with high precision, and the track width Tw is set by performing trimming processing or the like as in the prior art. There is no need to make it smaller. Since these four layers are plated with the same frame, the planar shapes of these four layers are all the same.
[0139]
  BookformEven in this state, since the rear end surface 69a of the lower magnetic pole layer 69 is connected to the front end surface 94a of the auxiliary magnetic pole layer 94, the magnetic saturation at the lower magnetic pole layer 69 can be reduced, and the overwrite characteristic of the magnetic head rises sharply. become. In addition, since the absolute value of the overwrite characteristic is increased, the recording current can be reduced. Further, the magnetic flux can escape from the upper magnetic pole layer 72 to the auxiliary magnetic pole layer 94, and the side fringing can be reduced. The overwrite characteristics of the magnetic head can be improved.
[0140]
  Since the Gd determining layer 95 is made of metal, the entire upper magnetic pole layer 71 can be formed with a predetermined thickness.
[0141]
  Although the present invention has been described with reference to preferred embodiments thereof, various modifications can be made without departing from the scope of the present invention.
[0142]
  For example, a coil layer wound in a toroidal shape with the upper core layer or the lower core layer as an axis may be formed.
[0143]
  The above-described embodiments are merely examples, and do not limit the scope of the claims of the present invention.
[0144]
【The invention's effect】
  In the present invention described in detail above, since the Gd determining layer made of a nonmagnetic material is provided on the lower core layer, it is easy to accurately define the gap depth length. Therefore, the overwrite characteristics of the magnetic head can be made uniform.
[0145]
  Further, an auxiliary magnetic pole layer formed of a magnetic material is provided between the Gd determining layer and the lower core layer, and the rear end surface of the lower magnetic pole layer is connected to the front end surface of the auxiliary magnetic pole layer. Magnetic saturation in the lower magnetic pole layer can be reduced, and the overwrite characteristics of the magnetic head can be improved.
[0146]
  Further, since the Gd determining layer is made of metal, the shape of the upper magnetic pole layer formed by plating on the Gd determining layer can be made uniform.
[Brief description of the drawings]
[Figure 1]Reference exampleThe partial front view which shows the structure of the magnetic head of the form,
FIG. 2 is a longitudinal sectional view of the magnetic head shown in FIG.
3 is a partially enlarged view of the vicinity of the Gd determining layer of the magnetic head shown in FIGS. 1 and 2. FIG.
[Fig. 4]Figure1 process drawing which shows the manufacturing method of 1 magnetic head,
FIG. 5 is a process diagram performed following the process shown in FIG. 4;
FIG. 6 is a process diagram performed following the process shown in FIG. 5;
FIG. 7 is a process diagram performed following the process shown in FIG. 6;
FIG. 8 is a process diagram performed following the process shown in FIG. 7;
FIG. 9Reference exampleA partially enlarged view around the Gd determining layer of the magnetic head in the form of
10 is a perspective view of the magnetic head in the manufacturing process in the step shown in FIG.
11 is a perspective view of the magnetic head in the manufacturing process in the step shown in FIG.
FIG.MagnetismOne process diagram showing another manufacturing method of the Qi head,
FIG. 13 is a process diagram performed following the process shown in FIG.
FIG. 14 is a partially enlarged view around the Gd determining layer of a magnetic head having a curved lower magnetic pole layer and gab layer;
FIG. 15 BookFruitA partially enlarged view around the Gd determining layer of the magnetic head of the embodiment,
FIG. 16Fruit1 process drawing which shows the manufacturing method of the magnetic head of an embodiment,
FIG. 17 is a process diagram performed following the process shown in FIG. 16;
FIG. 18(A)BookFruitA partially enlarged view around the Gd determining layer of the magnetic head of the embodiment, (b)Partial enlarged view around the Gd determining layer of the magnetic head of the reference example,
FIG. 19Reference exampleA longitudinal sectional view showing the structure of a magnetic head in the form of
FIG. 20 is a partial front view showing the structure of a conventional magnetic head;
FIG. 21 is a longitudinal sectional view of the magnetic head shown in FIG.
FIG. 22 is a longitudinal sectional view of a conventional magnetic head,
[Explanation of symbols]
30 Lower core layer
31 Auxiliary magnetic pole
32 Gd decision layer
33 Pole layer
34 Bottom pole layer
35 Gap layer
36 Top pole layer
38 Coil layer
41 Upper core layer

Claims (9)

A magnetic head manufacturing method comprising the following steps.
(A) plating the auxiliary magnetic pole layer with a magnetic material at a position away from the position on the lower core layer facing the recording medium in the height direction ;
(B) forming a Gd determining layer on the auxiliary magnetic pole layer using a nonmagnetic metal capable of being plated;
(C) providing an insulating layer on the front end surface of the auxiliary magnetic pole layer so that the auxiliary magnetic pole layer and the lower magnetic pole layer are electrically connected and electrically insulated in the next step;
And (d) a the lower core layer, a lower magnetic pole layer formed by plating over the front end face of the formed from a position which is a surface facing the recording medium on the front end face of the auxiliary magnetic layer and the insulating layer, Thereby, the step of magnetically connecting and electrically insulating the lower magnetic pole layer and the auxiliary magnetic pole layer ;
( E ) plating a gap layer on the lower magnetic pole layer, and then plating the upper magnetic pole layer from the gap layer to the upper surface of the Gd determining layer;
Forming a coil layer (f) the lower magnetic pole layer, a gap layer, a release position in the height direction from the upper magnetic pole layer,
( G ) A step of forming an upper core layer on the upper magnetic pole layer.   In the step (c), the insulating layer made of an inorganic insulating material is formed so as to cover the lower core layer, the auxiliary magnetic pole layer, and the Gd determining layer, and then formed on the lower core layer and the Gd determining layer. The method of manufacturing a magnetic head according to claim 1, wherein the method is performed by removing the insulating layer.   2. The method of manufacturing a magnetic head according to claim 1, wherein the step (c) is performed by forming the insulating layer made of an organic insulating material on the front end face of the auxiliary magnetic pole layer by a photolithography technique. The method of manufacturing a magnetic head according to any one of claims 1 to 3 on the front end face of the auxiliary magnetic layer between the front end face of the Gd defining layer, to a continuous surface. The method of manufacturing a magnetic head according to any one of claims 1 to 4 formed by plating the lower core layer and the auxiliary magnetic layer of the same material. The method of manufacturing a magnetic head according to any one of claims 1 to 4 wherein the auxiliary magnetic layer and the lower core layer is formed by plating by a different material. 7. A method of manufacturing a magnetic head according to claim 6, wherein the auxiliary magnetic pole layer is formed by plating using a material having a saturation magnetic flux density higher than that of the lower core layer. In the step (c), the normal direction of the film thickness with respect to the front end surface of the auxiliary magnetic layer of the insulating layer, a method of manufacturing the magnetic head according to any one of claims 1 to 7 to 50Å or more 6000Å or less. The gap layer is non-magnetic selected from one or more of NiP, NiReP, NiPd, NiPt, NiRh, NiW, NiMo, Au, Pt, Rh, Pd, Ru, Cr, Ag, Cu, and Ti. 9. A method of manufacturing a magnetic head according to claim 1, wherein the magnetic head is plated with a metal material.

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