JP3889181B2 - Moving stage device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a scanning stage microscope and various microscopes for measuring the surface shape and physical properties of a substance, a surface shape measuring device, a surface roughness measuring device, various precision measuring instruments, and a movable stage device used for various inspection devices. is there.
[0002]
[Prior art]
In scanning probe microscopes, various microscopes, surface shape measuring devices, surface roughness measuring devices, or various precision measuring instruments, the object to be observed or the object to be measured is positioned at a predetermined location, and at the same time due to external disturbances such as vibration. In order to reduce noise, it is required to increase the rigidity of the system from the observation head or the detection head to the object to be observed or the object to be measured.
[0003]
FIG. 12 shows a conventional example of a moving stage apparatus used in a scanning probe microscope or a surface shape measuring apparatus, which is arranged on two horizontal guide surfaces 1a of a base 1 in two orthogonal directions, that is, an X axis direction and a Y axis. An X-axis stage 3 and a Y-axis stage 2 that can move in the respective directions are arranged to overlap each other, and a sample stage 6 is placed on the two stacked stages. The X-axis stage 3 is guided by an X-axis guide guide 22 by an X-axis drive motor 20 and an X-axis feed screw 21 connected to the X-axis drive motor 20, and moves in the X-axis direction. Similarly, the Y-axis stage 2 is guided by a Y-axis guide 19 by a Y-axis drive motor 17 and a Y-axis feed screw 18 connected to the Y-axis drive motor 17, and the sample stage 6 in the Y-axis direction. To move.
[0004]
Furthermore, a gate-shaped column 8 is fixed on the base 1, and a Z-axis stage 9 that can move in the Z direction orthogonal to the X direction and the Y direction is connected to a substantially central portion thereof. An observation head 10 is fixed on the moving surface 9a. A sample 7 to be observed is placed on the sample stage 6, and the sample stage 6 is desired by the X-axis stage 3 and the Y-axis stage 2 so that an arbitrary observation point of the sample 7 is directly below the observation head 10. Move to the position.
[0005]
[Problems to be solved by the invention]
As shown in the above prior art, in the conventional moving stage apparatus, the two stages of the X axis and the Y axis are arranged on the base, and the sample stage is further arranged on the stage. The height from the guide surface of the base to the sample mounting surface of the sample table becomes high. This is because when the device is subjected to disturbances such as vibration and sound, the higher the height from the guide surface of the base to the sample mounting surface of the sample table, the more susceptible to disturbances, so during observation and measurement There is a problem that noise increases. Further, the X-axis and Y-axis stages are subjected to a vertical load by respective guide guides. Balls and rollers are used for the sliding surface of this guide guide, and since the vertical load is actually received by the point contact of this part, the vertical rigidity of the entire XY stage from the sample placement surface However, there is also a problem that cannot be secured sufficiently.
[0006]
In addition, depending on the microscope and measurement apparatus, the height of the sample placement surface may be restricted, and the thickness of the X-axis and Y-axis stages may be limited. If the thicknesses of the X-axis and Y-axis stages are reduced, there is a problem that the rigidity in the moving direction of each of the X-axis and Y-axis stages decreases accordingly. At the same time, there is also a problem that the entire moving stage is easily distorted, and the positioning accuracy of the moving stage is lowered.
[0007]
Accordingly, the object of the present invention is to reduce the height of the sample mounting surface without being affected by the rigidity of the X-axis and Y-axis stage main bodies in order to solve the above-described problems. An object of the present invention is to provide a moving stage device having high rigidity in the vertical direction from the base to the sample mounting surface.
[0008]
[Means for Solving the Problems]
In order to solve the above problems, the present invention is characterized in that the following means are taken.
(1) A moving-side driving means for moving in one direction with respect to two directions orthogonal to each other in a horizontal plane, and a fixed-side driving means for moving in another direction orthogonal to and connected to the moving-side driving means A moving base connected to the base and a base base for fixing the fixed side driving means, and the moving base moves on the base base by the moving side driving means and the fixed side driving means.
[0009]
(2) The moving side driving means and the moving table are connected by an elastic body.
(3) The moving side driving means and the fixed side driving means are connected by an elastic body.
(4) A single-axis guide guide is used for at least one of the moving side driving means and the fixed side driving means.
[0010]
(5) The moving side driving means has a concave structure.
[0011]
[Action]
In the moving stage apparatus configured as described above, since the moving stage for placing the sample is not stacked on the driving means in two orthogonal directions, each of the two orthogonal directions is arranged. By this driving means, it is possible to move directly on the guide surface of the base table.
[0012]
In addition, one of the driving means and the moving table are connected by an elastic body, or the moving table is supported and connected by a plurality of elastic bodies from an arbitrary direction on the outer periphery of the moving table. It can move in the vertical direction of the surface. At this time, the movable body can be moved along the base table guide surface by applying a force in advance so that the elastic body connecting the movable table presses the movable table against the base table.
[0013]
Further, by connecting the driving means in two directions with an elastic body, one of the driving means connected to the moving table can move in the vertical direction when moving on the base table guide surface. Therefore, one drive means connected to the movable table can move along the base table guide surface.
In addition, a single-axis guide guide is used for at least one of the two-direction driving means, and the one driving means connected to the moving base has a concave structure, thereby reducing the height of the moving stage. And can be made compact. At the same time, the number of parts of the moving stage can be reduced.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing a first embodiment of the present invention, and shows an embodiment when applied to various microscopes. In the moving table device of the present embodiment, when the base 1 having the horizontal guide surface 1a and one of two axes orthogonal to each other in the horizontal plane of the base 1 is the X axis and the other is the Y axis, the reciprocating movement is performed in the Y axis direction. A Y-axis stage 2 which is a driving means to be fixed is fixed to one surface of the base 1. An X-axis stage 3, which is a driving means for reciprocating in the other X-axis direction of the two orthogonal axes, is placed on the guide surface 1 a of the base 1 and is connected to the Y-axis stage 2 by the stage connecting material 4. Yes. A sample stage 6 is directly placed on the guide surface 1 a of the base 1, and a sample 7 to be observed or measured is placed on the sample stage 6. The sample stage 6 is connected to the X-axis stage 3 by a sample stage connecting material 5. In the moving stage apparatus configured as described above, the Y-axis stage 2 moves the X-axis stage 3, the sample table connecting material 5, and the sample table 6 back and forth in the Y-axis direction via the stage connecting material 4, and the X-axis stage 3. Ru is reciprocated the sample stage 6 through the sample base coupling member 5 in the X-axis direction. Furthermore, a gate-shaped column 8 is fixed on the base 1, and a Z-axis stage 9 that can move in the Z direction orthogonal to the X direction and the Y direction is connected to a substantially central portion thereof. An observation head 10 is fixed on the moving surface 9a. Therefore, the sample stage 6 can freely move on the guide surface 1 a of the base 1, and the desired position of the sample 7 placed on the sample stage 6 can be adjusted to be directly below the observation head 10.
[0015]
FIG. 2 is a perspective view showing a modification of the first embodiment. In the first embodiment shown in FIG. 1, the stage connecting member 4 and the sample stage connecting member 5 are configured using elastic bodies. Is shown. The Y-axis stage 2 that reciprocates in the Y-axis direction and the X-axis stage 3 that reciprocates in the X-axis direction are connected by an elastic body A11, and the X-axis stage 3 and the sample stage 6 are elastic bodies B12. It has a connected structure. By using the elastic body A11 and the elastic body B12, the X-axis stage 3 and the sample stage 6 can have a degree of freedom in the vertical direction with respect to the guide surface 1a of the base 1. As a result, the sample stage 6 is placed in contact with the guide surface 1a by its own weight and can freely move on the guide surface 1a.
[0016]
FIG. 3 is a cross-sectional view showing an example in which a leaf spring is used as an elastic body . The X-axis stage 3 and the sample stage 6 are connected by a leaf spring 13 which is a kind of elastic body, and the sample is moved by the leaf spring 13. The sample stage 6 can be brought into close contact with the guide surface 1a by applying a force so as to press the stage or by supporting it at the same height. Thereby, the sample stage can be moved along the guide surface. FIG. 4 is a cross-sectional view showing an example in which a coil spring is used as the elastic body. The X-axis stage 3 is connected to the sample stage 6 through the coil spring 14 via the connecting plate 15. The coil spring 14 applies a force so as to press the sample table 6 downward, and can bring the sample table 6 into close contact with the guide surface 1a in the same manner as the leaf spring, thereby moving the sample table along the guide surface. Can do.
[0017]
FIG. 5 is a perspective view showing the second embodiment, and shows an embodiment when applied to various microscopes and the like. In the moving table device of the present embodiment, as in FIG. 1, Y is a driving means for reciprocating in the Y-axis direction with a base 1 having a horizontal guide surface 1a and two axes perpendicular to each other in the horizontal plane of the base 1. The axis stage 2 is fixed to one surface of the base 1 and is driven on the X axis direction. The X axis stage 3 is mounted on the guide surface 1a of the base 1 and is connected to the Y axis stage 2 and the stage. They are connected by a material 4. A sample stage 6 is directly placed on the guide surface 1 a of the base 1, and a sample 7 to be observed or measured is placed on the sample stage 6. The sample stage 6 is supported from a plurality of directions by a plurality of sample stage connecting members 5, and the plurality of sample stage connecting members 5 are fixed to a frame frame 16 disposed on the outer periphery of the sample stage 6. Connected to stage 3. In the moving stage apparatus configured as described above, the Y-axis stage 2 is reciprocally moved in the Y-axis direction through the X-axis stage 3, the frame frame 16, the plurality of sample table connection materials 5, and the sample table 6 via the stage connection material 4. The X axis stage 3 reciprocates the sample stage 6 in the X axis direction via the frame 16 and the plurality of sample stage connecting members 5. That is, since the sample stage is supported by a plurality of sample stage connecting members 5 from the outer periphery, the sample stage moves reliably and freely on the guide surface 1a of the base 1 according to the movement of the X-axis stage 3 and the Y-axis stage 2. And positioning accuracy can be improved.
[0018]
FIG. 6 is a perspective view showing a modification of the second embodiment. In this example, the sample stage 6 is provided with a plurality of plate springs 13 and coil springs 14 arranged at positions facing the plate springs 13. The spring 13 and the coil spring 14 are supported from a plurality of directions, and the other ends thereof are fixed to the frame frame 16 disposed on the outer periphery, and the frame frame 16 is connected to the X-axis stage 3. In the moving stage apparatus configured as described above, the sample stage 6 has a degree of freedom in the vertical direction with respect to the guide surface 1a of the base 1 by using a leaf spring 13 and a coil spring 14 which are elastic bodies. Can do. As a result, the sample stage 6 is placed in contact with the guide surface 1a by its own weight and can freely move on the guide surface 1a.
[0019]
FIG. 7 is a perspective view showing the third embodiment. This is a Y-axis drive motor 17 for moving the Y-axis stage 2 on the one side surface of the base 1 and moving in the Y-axis direction. The stage connecting member 4 is moved in the Y-axis direction by the Y-axis feed screw 18. Further, the stage connecting material 4 is connected to an X-axis stage 3 mounted on a plurality of Y-axis guide guides 19. The Y-axis stage 2 connects the X-axis stage 3 and the sample stage 6 via the sample stage connecting material 5. And move in the Y-axis direction. The X-axis stage 3 is guided by the X-axis guide guide 22 by the X-axis drive motor 20 and the X-axis feed screw 21 connected to the X-axis drive motor 20, and moves the slider 23 in the X-axis direction. The slider 23 and the sample stage 6 are connected by the sample stage connecting member 5, and the sample stage 6 is moved in the X-axis direction by the X-axis drive motor 20. Accordingly, the sample stage 6 can freely move on the guide surface 1a of the base 1, and the desired position of the sample 7 placed on the sample stage 6 is adjusted to be directly below the observation head (not shown). it can. Furthermore, positioning accuracy can be improved by using a plurality of Y-axis guide guides 19.
[0020]
FIG. 8 is a perspective view showing a fourth embodiment, in which a Y-axis drive cylinder 24 is installed on one side surface of the base 1 as a Y-axis side stage, and a Y-axis drive cylinder shaft 24a directly connected to the Y-axis drive cylinder shaft 24 is X. The shaft drive cylinder 25 is connected. The X-axis stage 3 is placed on the Y-axis guide guide 19, and the X-axis drive cylinder 25 moves the slider 23 directly connected thereto along the X-axis guide guide 22 in the X-axis direction. The slider 23 and the sample table 6 are connected by a sample table connecting member 5, and the sample table 6 can freely move on the guide surface 1 a of the base 1 by a Y-axis drive cylinder 24 and an X-axis drive cylinder 25. . Therefore, the desired position of the sample 7 placed on the sample stage 6 can be adjusted directly below the observation head (not shown).
[0021]
FIG. 9 is a perspective view showing a fifth embodiment, in which a Y-axis linear motor 26 is installed in one direction on the guide surface 1a of the base 1 as a Y-axis side stage, and a Y-axis guide is oriented in a direction parallel thereto. The guide 19 is installed, and the X-axis stage 3 is installed on the Y-axis linear motor 26 and the Y-axis guide guide 19. The X-axis stage 3 is reciprocated in the X-axis direction by the X-axis linear motor 27 to move the slider 23 placed thereon. The slider 23 and the sample table 6 are connected by a sample table connecting member 5, and the sample table 6 can be freely moved on the guide surface 1 a of the base 1 by a Y-axis linear motor 26 and an X-axis linear motor 27. . Therefore, the desired position of the sample 7 placed on the sample stage 6 can be adjusted directly below the observation head (not shown).
[0022]
FIG. 10 is a perspective view showing the sixth embodiment, which shows an example in which the Y-axis guide 19 is used in a single axis in the third embodiment shown in FIG. One of the X-axis stages 3 is installed on the Y-axis guide guide 19 and the other is placed on the guide surface 1a. The Y-axis drive motor 17 moves along the Y-axis guide guide 19 on the guide surface 1a. Move in the Y-axis direction. Accordingly, the sample stage 6 can freely move on the guide surface 1a of the base 1, and the desired position of the sample 7 placed on the sample stage 6 is adjusted to be directly below the observation head (not shown). it can.
[0023]
FIG. 11 is a cross-sectional view of the X-axis stage 3 shown in FIGS. 7 and 10 according to an embodiment of the present invention. The X-axis stage 3 has a concave structure, and is constituted by an X-axis feed screw 21 and a slider 23 connected thereto, and the X-axis drive motor 20 reciprocates the slider 23 in the X-axis direction.
[0024]
【The invention's effect】
According to the present invention, as described above, since the moving table can be directly positioned at a desired position on the base table, the rigidity in the vertical direction from the base table to the upper surface of the moving table on which the sample is placed is increased. The maximum can be secured. Further, since the stage portion is not interposed between the moving table and the base table, the height from the upper surface of the base table to the upper surface of the moving table can be made extremely low by making the moving table thinner. By these, there is an effect that it is possible to provide a stage device that is strong against disturbances such as vibration and sound. Furthermore, since the structure of the moving stage is simple, the number of parts can be reduced, and the rigidity in each moving direction can be increased and the positioning accuracy can be improved as compared with the conventional moving stage having the same height. is there.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a first embodiment of the present invention.
FIG. 2 is a perspective view showing a modification of the first embodiment of the present invention.
FIG. 3 is a sectional view showing a modification of the first embodiment of the present invention.
FIG. 4 is a sectional view showing another modification of the first embodiment of the present invention.
FIG. 5 is a perspective view showing a second embodiment of the present invention.
FIG. 6 is a perspective view showing a modification of the second embodiment of the present invention.
FIG. 7 is a perspective view showing a third embodiment of the present invention.
FIG. 8 is a perspective view showing a fourth embodiment of the present invention.
FIG. 9 is a perspective view showing a fifth embodiment of the present invention.
FIG. 10 is a perspective view showing a sixth embodiment of the present invention.
FIG. 11 is a cross-sectional view showing an X-axis stage according to third and sixth embodiments of the present invention.
FIG. 12 is a perspective view showing a conventional example.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Base stand 1a Guide surface 2 Y-axis stage 3 X-axis stage 4 Stage connection material 5 Sample stand connection material 6 Sample stand 7 Sample 8 Support column 9 Z-axis stage 9a Z-axis stage moving surface 10 Observation head 11 Elastic body A
12 Elastic body B
13 Leaf spring 14 Coil spring 15 Connecting plate 16 Frame frame 17 Y axis drive motor 18 Y axis feed screw 19 Y axis guide guide 20 X axis drive motor 21 X axis feed screw 22 X axis guide guide 23 Slider 24 Y axis drive cylinder 24a Y-axis drive cylinder shaft 25 X-axis drive cylinder 25a X-axis drive cylinder shaft 26 Y-axis linear motor 27 X-axis linear motor

Claims (7)

A base having a guide surface;
A sample stage arranged on the guide surface;
A direction substantially parallel to an arbitrary direction on the plane where the guide surface exists (X-axis direction) ) An X-axis stage that moves the member to
A sample stage connecting member that is connected to the X axis stage and is moved to the X axis stage, and is also connected to the sample stage;
A Y-axis stage connected to the X-axis stage and moving the X-axis stage in a direction substantially parallel to a direction orthogonal to the X-axis direction;
A moving stage apparatus. A base having a guide surface;
A sample stage arranged on the guide surface;
A direction substantially parallel to an arbitrary direction on the plane where the guide surface exists (X-axis direction) ) An X-axis stage that moves the member to
A frame surrounding the sample stage on the guide surface, connected to the X-axis stage, and moved to the X-axis stage;
One or a plurality of sample table connecting members for connecting the frame and the sample table;
A Y-axis stage connected to the X-axis stage and moving the X-axis stage in a direction substantially parallel to a direction orthogonal to the X-axis direction;
A moving stage apparatus. The movable body stage apparatus according to claim 1, wherein the sample stage coupling member is configured by an elastic body. The movable body stage device according to any one of claims 1 to 3, wherein the Y-axis stage is fixed to a lower side of the base guide surface on a side surface of the base. The movable body stage apparatus as described in any one of Claims 1 thru | or 4 which connected the Y-axis stage and the X-axis stage with the elastic body. The movable body stage apparatus according to any one of claims 1 to 5, wherein at least one of the X-axis stage and the Y-axis stage moves along one or more guide guides. A concave structure comprising an X-axis stage connected to the sample stage connecting member and moved in the X-axis direction, and an X-axis feed screw extending in a direction substantially parallel to the X-axis direction and penetrating the stage The slider is moved along the X-axis feed screw, and the movable body stage device according to any one of claims 1 to 6.

Images