JP3893497B2 - Fine processing equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a microfabrication apparatus characterized by using a cantilever used in a scanning probe microscope, in particular, a cantilever in which a microscopic aperture is formed, to allow a fluid to flow out of the microscopic aperture, and the microscopic aperture. The present invention relates to a method for manufacturing a cantilever equipped with
[0002]
[Prior art]
In recent years, research on scanning probe microscopes typified by AFM (Atomic Force Microscope) has been conducted in order to enable ultra-high resolution observation of the sample surface state at the atomic level and measurement of optical properties. It is actively done.
[0003]
Many of these scanning probe microscopes accurately detect surface information of a sample by bringing a deep needle called a cantilever very close to or in contact with the sample surface. Therefore, the structure of the cantilever serving as the deep needle has a strong correlation with the observation accuracy and the measured optical property quantity.
[0004]
A cantilever literally means a so-called cantilever beam. In other words, this cantilever is composed of a cantilever portion that is cantilevered and a protruding portion that protrudes from the tip, and the tip of the protruding portion is sharply formed as a deep needle point. The surface information of the sample is detected by making it extremely close to or in contact with the surface.
[0005]
In the operation of the AFM, one end of the cantilever is cantilevered to bring the deep needle point very close to the sample surface and scanned by a scanning piezo or the like in parallel with the sample surface. The displacement of the cantilever caused by the interaction (atomic force) is detected by an optical lever method using a laser beam, and AFM measurement is performed.
[0006]
In addition, research on SNOM (Scanning Nearfield Optical Microscope) applying the principle of AFM has been actively conducted. This is because various optical physical properties are obtained by using evanescent light that oozes out from the tip of the minute aperture formed at the tip of the cantilever and extracting high-frequency information of the evanescent field on the sample surface that is brought close to the minute aperture. Can be evaluated.
[0007]
Furthermore, by applying this SNOM principle, the recording medium, resist, etc. are irradiated with evanescent light that oozes out from the minute opening of the cantilever, and ultrahigh density storage devices and ultrafine processing devices that exceed the conventional diffraction limit of light Development has also begun.
[0008]
Now, in the research of such a scanning probe microscope, a technique for producing a micro-aperture at the tip of the cantilever is the nucleus. As a typical representative micro-aperture manufacturing technique, CO is applied to an optical fiber or a glass capillary. ₂ By irradiating with laser light or placing between discharge electrodes, it is melted thermally, stretched in the direction of the central axis, cut, sharpened at the tip, and then rotated around the central axis, There is a method in which a metal thin film is formed at the tip by coating a metal from the direction, and this is used as a minute opening. In addition, there is a method in which the tip of the optical waveguide optical probe formed into a chip is made into a minute opening by using a semiconductor manufacturing process using an electron beam exposure apparatus, a stepper (projection reduction exposure apparatus), or the like.
[0009]
In any case, as shown in FIGS. 12 and 13, such a cantilever 3 f includes a cantilever portion 13 and a protruding portion 14 that protrudes from the tip of the cantilever portion 13.
[0010]
A hollow portion 14 is formed inside the protruding portion 13, and the protruding portion 13 is formed of a thin wall body. A minute opening 15 is formed through the tip of the protrusion. Therefore, the tip of the protruding portion 13 is a cross section of the micro-opening 15, and this cross section is used as an effective deep needle surface, and is brought into microcontact with the surface of the sample 5 arranged opposite to the cross-sectional direction. On the other hand, by irradiating the surface of the sample 5 with evanescent light oozing from the cross section, SNOM measurement and ultrafine processing of the surface of the sample 5 are possible.
[0011]
[Problems to be solved by the invention]
However, in the ultrafine processing as described above, a particle beam such as a light beam, an X-ray beam, an electron beam or an ion beam, or an electromagnetic wave such as a wave beam or a laser is used, and the sample surface is exposed by the electromagnetic wave. The only way to process it.
[0012]
In addition, the surface of the sample usually has undulations on the order of nanometers, whereas the aperture diameter of the micro-aperture produced by the method described above is at most about several hundreds of nanometers. The resolution was as large as several hundred nm, and the uneven shape of the sample surface could not be observed clearly.
[0013]
Therefore, the present invention has been made in view of the above problems, and a first technical problem is to provide an apparatus capable of performing ultrafine processing using a cantilever using a medium other than electromagnetic waves. A second technical problem is to provide a method for easily producing a cantilever having a microscopic aperture having a very small aperture diameter.
[0014]
[Means for Solving the Problems]
Specific means for solving the above technical problems are as follows. That is, the microfabrication apparatus according to claim 1 is provided with a cantilever portion supported at one end, and protruding from the cantilever portion. Fluid is introduced inside Protruding part and minute opening formed through the projecting part in the projecting direction The Cantilever having A stage for mounting the sample, and a Z servo circuit for controlling the vertical position of the stage to keep the distance from the cantilever constant, A device comprising: By using voltage pulses controlling the stage with the Z servo circuit, Fluid flows out from the inside of the protrusion through the minute opening And the amount of spillage can be controlled. It is characterized by this.
[0015]
According to a second aspect of the present invention, there is provided a micro-machining apparatus, wherein a cantilever portion that is supported at one end and protrudes from the cantilever portion. Fluid is introduced inside A protruding portion, a deep needle point formed sharply at the tip of the protruding portion, and a minute opening formed through the protruding portion in the protruding direction while leaving the deep needle point at a position near the deep needle point The Cantilever having A stage for mounting the sample, and a Z servo circuit for controlling the vertical position of the stage to keep the distance from the cantilever constant, A device comprising: By using voltage pulses controlling the stage with the Z servo circuit, Fluid flows out from the inside of the protrusion through the minute opening And the amount of spillage can be controlled. It is characterized by this.
[0016]
According to a third aspect of the present invention, there is provided a micro-machining apparatus having a cantilever portion supported at one end and protruding from the cantilever portion. Fluid is introduced inside A protruding part, a nanotube whose base end is fixed to the protruding part, and a tip part protrudes, and a minute opening formed in the protruding part in the protruding direction at a position near the nanotube The Cantilever having A stage for mounting the sample, and a Z servo circuit for controlling the vertical position of the stage to keep the distance from the cantilever constant, A device comprising: By using voltage pulses controlling the stage with the Z servo circuit, Fluid flows out from the inside of the protrusion through the minute opening And the amount of spillage can be controlled. It is characterized by this.
[0017]
According to a fourth aspect of the present invention, there is provided the microfabrication apparatus according to any one of the first to third aspects, wherein the fluid is liquid In or Ga.
[0018]
According to a fifth aspect of the present invention, there is provided the microfabrication apparatus according to any one of the first to third aspects, wherein the fluid is an alloy of In and Ga.
[0019]
According to a sixth aspect of the present invention, there is provided the microfabrication apparatus according to any one of the first to third aspects, wherein the fluid is a liquid organic substance.
[0020]
According to a seventh aspect of the present invention, there is provided the micromachining apparatus according to the first to third aspects, wherein the fluid is a reactive gas.
[0022]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a microfabrication apparatus 1 according to a first embodiment of the present invention will be described with reference to the drawings. As shown in FIG. 1, the microfabrication apparatus 1 according to the first embodiment of the present invention includes a holder 2, a cantilever 3 supported by the holder 2, a fluid 4 introduced into the cantilever 3, and a sample 5. The stage 6 mounted, the oscillation circuit 7 for self-excited oscillation of the cantilever 3, the detection circuit 8 for detecting the voltage of the oscillation circuit 7, the vertical direction of the stage 6 is controlled, and the distance from the cantilever 3 is controlled. The Z servo circuit 9 is held constant, the XY scanning circuit 10 controls the horizontal direction of the stage 6, and the computer 11 is an input / output unit. Hereinafter, it demonstrates still in detail based on drawing.
[0023]
As shown in FIGS. 2 and 3, the cantilever 3 is composed of the cantilever part 12 supported at one end by the holder 2 and the protruding part 13 protruding from the tip of the cantilever part 12. It has become.
[0024]
The protrusion 13 is made of a thin wall and has a substantially quadrangular pyramid shape that is open at an angle of about 60 degrees. A cavity 14 is formed inside the protrusion 13 on the back side, and a minute opening 15 is formed through the tip of the protrusion 13 in the protrusion direction. That is, the tip of the protrusion 13 is a cross section of the minute opening 15. The micro openings 15 are circular ultra micro holes having an opening diameter (cross-sectional diameter) of 20 to 500 nm. However, the formation position of the minute opening 15 is not limited to the apex tip of the protrusion 13, and may be near the apex tip of the protrusion 13.
[0025]
A fluid 4 such as In, Ga, or In—Ga (an alloy of In and Ga) is introduced into the hollow portion 14. However, since In or Ga is solid at room temperature, it is made liquid by heating or the like. The fluid 4 described here is a general term for a liquid or gaseous substance that does not evaporate even in a vacuum, and includes not only a simple substance but also a compound or a mixture. Further, the fluid 4 may be introduced into the cavity 14 as a liquid organic substance. The liquid organic substance described here is a liquid organic substance that does not evaporate even in a vacuum, and it goes without saying that it includes compounds, mixtures, and the like. Moreover, the substance introduced into the cavity 14 is not limited to the above, and various substances may be used without departing from the technical idea of the present invention. In the fluid 4, the opening diameter of the minute opening 15 is extremely small, and the phase of the fluid 4 is liquid or gas, so that the particles of the fluid 4 are aggregated such as van der Waals force. Even though the particles are weak due to force, the particles are bonded to each other, so that the particles do not flow out of the micro-openings 15 simply by being introduced into the cavity 14.
[0026]
A mask 16 such as At may be formed (applied) on the surface of the cavity 14. The mask 16 has an effect of reducing the surface tension of a substance such as the fluid 4 introduced into the cavity 14, and the component, film pressure, and the like can be variously selected.
[0027]
The horizontal positioning of the stage 6 is voltage controlled by the XY scanning circuit 10. Further, the vertical positioning of the stage 6, that is, the vertical positioning of the cantilever 3 loops the voltage of the oscillation circuit 7 detected by the detection circuit 8 in the oscillation circuit 7, so that the minute opening The Z servo circuit 9 controls the voltage so that the distance between the surface of the sample 5 and the surface of the sample 5 is kept constant, and the minute opening 15 is not brought into contact with the surface of the sample 5. Further, by using a voltage pulse that controls the positioning of the cantilever 3 in the vertical direction by the Z servo circuit 9, the binding force of each particle of the fluid 4 is cut, and the fluid 4 is opened to the minute opening. 15 and the flow amount of the fluid 4 can be controlled.
[0028]
On the other hand, FIG. 4 is a schematic explanatory diagram when a small opening is drilled in the cantilever. The cantilever 3b without a minute opening is usually formed of a material such as silicon, silicon nitride or silicon nitride. By installing the cantilever 3b without a minute aperture in the focused ion beam chamber 17 and irradiating the focused ion beam I, the minute aperture 15 having a very small diameter can be perforated.
[0029]
In order to irradiate the focused ion beam I with a very fine focus on the cantilever 3b without a minute aperture, an FIB apparatus (focused ion beam apparatus) that can freely focus the ion beam and process an object is used.
[0030]
The FIB apparatus usually ionizes Ga atoms, presses and accelerates an electric field applied to the ions, and focuses the ion beam with an electric field lens to make the ion beam cross section ultra-fine to a high energy density. An apparatus for processing a target by irradiating the target with an ion beam. In order to perform these functions, the FIB apparatus is composed of partial devices such as an ion source, an acceleration device, a beam focusing device, and a beam scanning device.
[0031]
In the FIB apparatus, the acceleration voltage can be freely adjusted, and the energy of the focused ion beam I can be arbitrarily set. Depending on the thickness of the protruding portion 13 of the cantilever 3b without the minute aperture, the energy of the focused ion beam I can be arbitrarily varied to punch the protruding portion 13. Here, the focused ion beam I is formed by ionizing Ga atoms, but the present invention is not limited to this, and atoms such as In and Ar may be ionized and used.
[0032]
In FIG. 4, the focused ion beam I is irradiated from the cavity 14 side, but irradiation may be performed from the opposite direction. In order to reduce the aperture diameter of the minute aperture 15, the beam diameter of the focused ion beam I may be narrowed down. By making the cross-sectional diameter of the focused ion beam I variable, the cross-sectional diameter of the minute aperture 15 can be arbitrarily changed.
[0033]
The cantilever 3 of the microfabrication apparatus 1 configured as described above is moved to a predetermined position, and the fluid 4 flows out from the micro opening 15 to the surface of the sample 5 by a voltage pulse. The fluid 4 that has flowed out is made into ultrafine particles, adheres to the surface of the sample 5, and nanoscale ultra-fine dots are formed on the surface of the sample 5. Further, when the fluid 4 that has flowed out adheres to the surface of the sample 5, a chemical reaction or the like is excited by the interaction with the surface of the sample 5, thereby causing various substances or substances on the surface of the sample 5. Nanoscale ultra-fine dots such as shapes may be formed. Further, when the fluid 4 is attached to the surface of the sample 5 while the stage 6 is continuously moved, an ultrafine line having a nanoscale width is formed. Specifically, when the fluid 4 flows out and adheres as In, Ga or In—Ga, ultrafine dots or ultrafine lines of compound semiconductors such as GaAs, InGaAs, AlGaAs, and InGaAsP are formed, and high-speed optical communication For example, a semiconductor light-emitting device for use is manufactured. Further, the fluid 4 is made into a liquid organic substance, which is injected into the cavity 14 and flows out and adheres from the micro-openings 15, thereby exciting various chemical reactions and the like by the interaction with the surface of the sample 5. Then, ultra-fine dots and ultra-fine lines of various substances and shapes are formed, or new substances are formed.
[0034]
Next, a microfabrication apparatus 1 according to a second embodiment of the present invention will be described with reference to the drawings. As shown in FIG. 1, the microfabrication apparatus 1 according to the second embodiment of the present invention also includes a holder 2, a cantilever 3 supported by the holder 2, a fluid 4 introduced into the cantilever 3, and a sample 5. The stage 6 mounted, the oscillation circuit 7 for self-excited oscillation of the cantilever 3, the detection circuit 8 for detecting the voltage of the oscillation circuit 7, the vertical direction of the stage 6 are controlled, and the distance from the cantilever 3 is controlled. The Z servo circuit 9 is held constant, the XY scanning circuit 10 controls the horizontal direction of the stage 6, and the computer 11 is an input / output unit.
[0035]
5 and 6, the cantilever 3 includes a cantilever portion 12 supported at one end by the holder 2, a protruding portion 13 projecting from the cantilever portion 12, and a back surface of the protruding portion 13. A cavity 14 formed inside the side, a deep needle point 18 formed sharply at the tip of the protrusion 13, and the protrusion while leaving the deep needle point 18 at a position near the deep needle point 18. 13 is a cantilever 3c composed of a micro-opening 15 penetratingly formed in the protruding direction.
[0036]
That is, the microfabrication apparatus 1 according to the present embodiment is different from the microfabrication apparatus 1 according to the first embodiment described above in the components of the cantilever 3. In other words, the micromachining apparatus 1 according to the present embodiment is characterized in that the deep needle point 18 is located at a position where the deep needle point 18 is added to the tip of the protruding portion 13 and in the vicinity of the deep needle point 18. The cantilever 3c is characterized in that the cantilever 3c is characterized in that the protruding portion 13 is formed so as to penetrate the minute opening 15 in the protruding direction. Since other configurations are the same as those of the microfabrication apparatus 1 according to the first embodiment described above, the details thereof are omitted.
[0037]
The deep needle point 18 is formed at the distal end portion of the protruding portion 13, and the distal end of the deep needle point 18 has a sharp shape, and its radius of curvature can be processed as small as about 10 nm at present. The formation position of the deep needle point 18 is not limited to the tip of the protruding portion 13, and may be near the tip of the protruding portion 13. Further, as will be described later, when the deep needle point 18 contacts the surface of the sample 5 at one point, the surface information of the sample 5 can be locally detected with a high resolution of about several nm.
[0038]
On the other hand, in the present embodiment, the minute opening 15 is formed in the projecting portion 13 in the vicinity of the deep needle point 18 so as to penetrate in the projecting direction of the projecting portion 13 while the deep needle point 18 remains. . The opening diameter of the minute opening 15 depends on the processing method, but the method using the FIB apparatus has reached the point where a minute opening having a minute diameter of several hundred nm to several tens of nm can be opened. Here, as described above, using the FIB apparatus, the minute opening 15 having a minute diameter of 20 to 500 nm was formed in the vicinity of the deep needle point 18 while the deep needle point 18 remained. Further, as will be described later, the closer the position of the minute opening 15 is to the position of the deep needle point 18, the more the fluid flows from the minute opening 15 to the position of the surface of the sample 5 specified by the deep needle point 18. 4 is easy to drain.
[0039]
The microfabrication apparatus 1 configured as described above performs positioning of the cantilever 3c or the sample 5 or the like of the surface of the sample 5 by performing AFM scanning on the surface of the sample 5 using the deep needle point 18. Observations can be performed. Since the deep needle point 18 is composed of a sharp point, the surface of the sample 5 can be scanned with high accuracy, and positioning, observation, etc. can be performed accurately. Other operational effects are the same as the operational effects of the microfabrication apparatus 1 according to the first embodiment described above, and the details thereof are omitted. Further, the ultrafine dots and ultrafine lines formed on the surface of the sample 5 by the fluid 4 flowing out from the micro openings 15 are subjected to AFM scanning using the deep needle points 18, The formation position, shape, etc. are observed and checked (confirmed) with high resolution.
[0040]
Next, a microfabrication apparatus 1 according to a third embodiment of the present invention will be described with reference to the drawings. As shown in FIG. 1, the microfabrication apparatus 1 according to the third embodiment of the present invention also includes a holder 2, a cantilever 3 supported by the holder 2, a fluid 4 introduced into the cantilever 3, and a sample 5. The stage 6 mounted, the oscillation circuit 7 for self-excited oscillation of the cantilever 3, the detection circuit 8 for detecting the voltage of the oscillation circuit 7, the vertical direction of the stage 6 is controlled, and the distance from the cantilever 3 is controlled. The Z servo circuit 9 is held constant, the XY scanning circuit 10 controls the horizontal direction of the stage 6, and the computer 11 is an input / output unit.
[0041]
7 and 8, the cantilever 3 includes a cantilever portion 12 supported at one end by the holder 2, a protruding portion 13 projecting from the cantilever portion 12, and a back surface of the protruding portion 13. A hollow portion 14 formed inside the side, a nanotube 19 in which a proximal end portion 19a is fixed to the protruding portion 13 and a distal end portion 19b is protruded, and a protruding direction of the protruding portion 13 in the vicinity of the nanotube 19 It is a cantilever 3d composed of a minute opening 15 formed in the through hole.
[0042]
That is, the micromachining apparatus 1 according to the present embodiment is different from the micromachining apparatus 1 according to the second embodiment described above in the components of the cantilever 3. That is, the micromachining apparatus 1 according to the present embodiment is characterized in that the cantilever 3d is characterized in that the nanotube 19 is added instead of the deep needle point 18. Since other configurations are the same as those of the microfabrication apparatus 1 according to the second embodiment described above, the details thereof are omitted.
[0043]
The nanotube 19 is attached to the rear wall 13 a of the protruding portion 13 by a known method, and the tip 19 b protrudes downward from the tip of the protruding portion 13. In other words, the nanotube 19 is disposed so as to pass through the tip of the protruding portion 13. Further, the opening diameter (cross-sectional diameter) of the nanotube 19 can be variously selected from 1 nm, and the mounting position is not limited to the rear wall 13a of the protruding portion 13, and may be any surface of the protruding portion 13. .
[0044]
The microfabrication apparatus 1 configured as described above can perform AFM or SNOM scanning on the surface of the sample 5 using the nanotubes 19. That is, the tip 19b of the nanotube 19 becomes an effective deep needle point or an effective minute aperture as a substitute for the deep needle point 18, and positioning of the cantilever 3d, the sample 5, etc., observation of the surface of the sample 5, Physical property evaluation and the like can be performed accurately. Since the opening diameter of the nanotube 19 is extremely small, the surface of the sample 5 can be scanned with AFM or SNOM with extremely high accuracy. Since other operational effects are the same as the operational effects of the microfabrication apparatus 1 according to the second embodiment described above, the details thereof are omitted.
[0045]
Next, a microfabrication apparatus 1 according to a fourth embodiment of the present invention will be described with reference to the drawings. As shown in FIG. 9, the microfabrication apparatus 1 according to the fourth embodiment of the present invention includes a holder 2, a cantilever 3 supported by the holder 2, a tank 20, a fluid 4 introduced into the tank 20, A feed nozzle 21 that feeds the fluid 4 to the cantilever 3, a stage 6 on which a sample 5 is placed, an oscillation circuit 7 that self-oscillates the cantilever 3, and a detection circuit that detects the voltage of the oscillation circuit 7 8. A Z servo circuit 9 for controlling the vertical direction of the stage 6 to keep the distance from the cantilever 3 constant, an XY scanning circuit 10 for controlling the horizontal direction of the stage 6, and a computer 11 as an input / output unit It consists of and.
[0046]
10 and 11, the cantilever 3 includes a cantilever portion 12 supported at one end by the holder 2, a protruding portion 13 projecting from the cantilever portion 12, and a back surface of the protruding portion 13. The cantilever 3e is configured by a cavity portion 14 formed inside the side and a minute opening 15 formed at the tip portion of the protruding portion 13, and the tip portion of the feed nozzle 21 is formed by the cavity portion. 14 inside.
[0047]
That is, the micro processing apparatus 1 according to the present embodiment is characterized in that the fluid 4 is sealed in the tank 20 as compared with the micro processing apparatus 1 according to the first embodiment described above, and the feeding nozzle 21 in that the fluid 4 flows out of the minute opening 15 through 21. Since other configurations are the same as those of the microfabrication apparatus 1 according to the first embodiment described above, details thereof are omitted.
[0048]
Although not shown, the fluid 4 is introduced into the tank 20 as a reactive gas. The reactive gas mentioned here is a general term for gaseous substances that do not evaporate even in a vacuum and excite various chemical reactions with the surface of the substance, including single substances as well as compounds and mixtures. Yes. For example, halogen gas such as HF or HCl or C ₄ H ₅ N or CH ₃ CH ₂ Although it is preferable to use a cyanide gas such as CN, the present invention is not limited to this. However, solid or liquid materials need to be vaporized by heating or the like. Although not shown, the tank 20 is usually a vacuum chamber.
[0049]
As shown in FIGS. 10 and 11, the feed nozzle 21 is a hollow tube having a distal end portion provided in the hollow portion 14 and the other end connected to the tank 20. That is, the feed nozzle 21 is a hollow tube that joins the tank 21 and the cavity 14 for allowing the fluid 4 introduced into the tank 21 to flow out of the minute opening 15. Yes. The tip of the feed nozzle 21 has a microhole so that the fluid 4 can easily flow out through the microopening 15. The tip of the feed nozzle 21 may be connected to the minute opening 15.
[0050]
The microfabrication apparatus 1 configured as described above causes the fluid 4 to flow out from the tip of the feed nozzle 21 to the surface of the sample 5 through the micro openings 15 by a known method. Since the fluid 4 is a reactive gas, when it adheres to the surface of the sample 5, various chemical reactions and the like are excited by the interaction with the surface of the sample 5, and nanoscale ultrafine particles are formed on the surface of the sample 5. Small dots and ultrafine lines are formed. Other operational effects are the same as the operational effects of the microfabrication apparatus 1 according to the first embodiment described above, and the details thereof are omitted.
[0051]
The present invention is not limited to the above-described embodiment, and various modifications, design changes, and the like within the scope not departing from the technical idea of the present invention are included in the technical scope. Nor.
[0052]
【The invention's effect】
As described above, according to the microfabrication apparatus according to claim 1 of the present invention, a fluid is caused to flow out from the inside of the projecting portion through the micro opening to the sample surface, and is attached to the sample surface. Nanoscale ultra fine dots and ultra fine lines are formed on the surface.
[0053]
According to the microfabrication apparatus according to claim 2 of the present invention, in addition to the effect of the microfabrication apparatus according to claim 1 of the present invention described above, a deep needle point is formed at the tip of the protruding portion, and the depth Since the protrusion has a cantilever that penetrates the minute opening in the protruding direction while leaving the deep needle point in the vicinity of the needle point, the sample surface is AFM scanned using the deep needle point. Thus, positioning of the cantilever, the sample, etc., observation of the sample surface, and the like can be performed. Since the deep needle point is composed of a sharp point, the sample surface can be scanned with high accuracy, and positioning, observation, etc. can be performed accurately. In addition, the ultra-fine dots and ultra-fine lines formed on the sample surface by the fluid that has flowed out of the micro-openings are subjected to AFM scanning using the deep needle points, thereby forming positions, shapes, etc. Can perform observation inspection (confirmation inspection) with high resolution.
[0054]
According to the microfabrication apparatus according to claim 3 of the present invention, in addition to the effect of the microfabrication apparatus according to claim 2 of the present invention described above, the cantilever to which the nanotube is added is provided. By using the sample surface for AFM or SNOM scanning, positioning of the cantilever, the sample, etc., observation of the sample surface, evaluation of physical properties of the sample surface, and the like can be performed accurately. Since the opening diameter of the nanotube is extremely small, the sample surface can be scanned with AFM or SNOM with extremely high accuracy.
[0055]
According to the microfabrication apparatus according to claim 4 of the present invention, in addition to the effects of the microfabrication apparatus according to claims 1 to 3 of the present invention described above, the fluid is liquid In, Ga, and Since it flows out and adheres to the sample surface from the inside through a microscopic aperture, ultrafine dots and ultrafine lines of compound semiconductors such as GaAs, InGaAs, AlGaAs, and InGaAsP are formed, and semiconductor light emitting devices for high-speed optical communication, etc. Can be produced.
[0056]
According to the microfabrication apparatus according to claim 5 of the present invention, in addition to the effects of the microfabrication apparatus according to claims 1 to 3 of the present invention described above, the fluid is In—Ga and the microfabrication apparatus is microscopic from the inside of the protrusion. Since In-Ga is a liquid at room temperature by allowing the fluid to flow out and adhere to the sample surface through the opening, it is easy to use ultrafine dots or ultrafines of compound semiconductors such as GaAs, InGaAs, AlGaAs, and InGaAsP. A thin line is formed, and a semiconductor light emitting element for high-speed optical communication can be manufactured.
[0057]
According to the microfabrication apparatus according to claim 6 of the present invention, in addition to the effects of the microfabrication apparatus according to claims 1 to 3 of the present invention described above, the fluid is made into a liquid organic substance and a microscopic opening is formed from the inside of the protrusion. By flowing out and adhering to the surface of the sample through the sample, various chemical reactions are excited by the interaction with the sample surface, and ultra-fine dots and ultra-fine lines of various substances and shapes are formed. In addition to being promoted, the creation of new substances can be promoted.
[0058]
According to the microfabrication apparatus according to claim 7 of the present invention, in addition to the effects of the microfabrication apparatus according to claims 1 to 3 of the present invention described above, the fluid is used as a reactive gas and the microfabrication apparatus is microscopic from the inside of the protrusion. By letting the fluid flow out and adhere to the sample surface through the opening, not only liquid substances but also gaseous substances can interact with the surface of the sample 5, and various chemical reactions are excited. In addition to the formation of ultra-fine dots and ultra-fine lines of various substances and shapes, the creation of new substances can be promoted.
[Brief description of the drawings]
FIG. 1 is a block diagram showing a schematic configuration of a microfabrication apparatus according to first to third embodiments of the present invention.
FIG. 2 is a perspective view showing a schematic configuration of a cantilever of the microfabrication apparatus according to the first embodiment of the present invention.
3 is a cross-sectional view taken along line AA in FIG.
FIG. 4 is a schematic explanatory diagram for punching a microscopic opening in a cantilever.
FIG. 5 is a perspective view showing a schematic configuration of a cantilever of a microfabrication apparatus according to a second embodiment of the present invention.
6 is a cross-sectional view taken along line BB in FIG.
FIG. 7 is a perspective view showing a schematic configuration of a cantilever of a microfabrication apparatus according to a third embodiment of the present invention.
8 is a cross-sectional view taken along line CC in FIG.
FIG. 9 is a block diagram showing a schematic configuration of a microfabrication apparatus according to a fourth embodiment of the present invention.
FIG. 10 is a perspective view showing a schematic configuration of a cantilever of a microfabrication apparatus according to a fourth embodiment of the present invention.
11 is a sectional view taken along line DD of FIG.
FIG. 12 is a perspective view showing a schematic configuration of a cantilever used in a conventional SNOM or the like.
13 is a cross-sectional view taken along line EE in FIG.
[Explanation of symbols]
1 Fine processing equipment
3 Cantilever
4 Fluid
5 samples
12 Cantilever part
13 Protrusion
15 Small aperture
17 Focused ion beam chamber
18 Deep needle point
19 Nanotube
20 tanks
21 Feed nozzle
I Focused ion beam

Claims (7)

A cantilever portion that is supported at one end, a protruding portion that protrudes from the cantilever portion and into which a fluid is introduced , a cantilever that has a minute opening formed through the protruding portion in the protruding direction, and a sample are placed thereon And a Z servo circuit that controls the position of the stage in the vertical direction to maintain a constant distance from the cantilever , the Z servo circuit controlling the stage. By using a voltage pulse that flows, fluid can flow out from the inside of the protruding portion through the minute opening, and the amount of flow can be controlled . A cantilever portion that is supported at one end, a protruding portion that protrudes from the cantilever portion and into which fluid is introduced, a deep needle point that is sharply formed at the tip of the protruding portion, and a position near the deep needle point a cantilever having a projecting portion on the minute aperture formed through its protruding direction while leaving the depth needle point, a stage for mounting a sample, from the cantilever to control the vertical position of the stage A Z servo circuit that maintains a constant distance of the Z servo circuit by using a voltage pulse that controls the stage by the Z servo circuit, thereby opening the minute opening from the inside of the protrusion. Through which the fluid is allowed to flow out and the flow rate of the fluid can be controlled . A cantilever part supported at one end, a projecting part projecting from the cantilever part into which fluid is introduced , a nanotube having a proximal end fixed to the projecting part and projecting a distal end part, and a position near the nanotube in holding a cantilever having a microscopic aperture formed through its protruding direction in the protruding portion, a stage for mounting a sample, the distance from the cantilever to control the vertical position of the stage constant a device comprising a Z servo circuit causes, and by using a voltage pulse which controls the stage in the Z servo circuit, drained fluid through the microscopic aperture from the inside of the projecting portion And the fine processing apparatus characterized by being able to control the outflow amount . Microfabricated apparatus according to any one of claims 1 to 3, wherein the fluid is a liquid In or Ga. Microfabricated apparatus according to any one of claims 1 to 3, wherein the fluid is an alloy of In and Ga. Microfabricated apparatus according to any one of claims 1 to 3, wherein the fluid is a liquid organic material. The microfabrication apparatus according to any one of claims 1 to 3 , wherein the fluid is a reactive gas.

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