Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JP3907613B2 - Ultrasonic flow meter - Google Patents
[go: Go Back, main page]

JP3907613B2 - Ultrasonic flow meter - Google Patents

Ultrasonic flow meter Download PDF

Info

Publication number
JP3907613B2
JP3907613B2 JP2003274374A JP2003274374A JP3907613B2 JP 3907613 B2 JP3907613 B2 JP 3907613B2 JP 2003274374 A JP2003274374 A JP 2003274374A JP 2003274374 A JP2003274374 A JP 2003274374A JP 3907613 B2 JP3907613 B2 JP 3907613B2
Authority
JP
Japan
Prior art keywords
ultrasonic
flow rate
flow
propagation
measurement unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003274374A
Other languages
Japanese (ja)
Other versions
JP2004004115A (en
Inventor
明久 足立
裕治 中林
雅彦 橋本
利春 佐藤
茂 岩永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2003274374A priority Critical patent/JP3907613B2/en
Publication of JP2004004115A publication Critical patent/JP2004004115A/en
Application granted granted Critical
Publication of JP3907613B2 publication Critical patent/JP3907613B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Measuring Volume Flow (AREA)

Description

本発明は、超音波により流体の流量の計測を行う超音波流量計に関するものである。   The present invention relates to an ultrasonic flowmeter that measures the flow rate of a fluid using ultrasonic waves.

従来のこの種の超音波流量計は、例えば特開平8−233628号公報が知られており、図27Aおよび図27Bに示すように、断面4が矩形の流路1の一部に超音波振動子2と3を対向するよう配置し、超音波振動子2から送信した超音波を超音波振動子3で受信するまでの伝搬時間と、超音波振動子3から送信した超音波を超音波振動子2で受信するまでの伝搬時間の差から流量演算手段5で流体の速度を算出するとともにその時の流体のレイノルズ数から流路1内の流速分布を類推し、補正係数を求め流量を演算していた。   A conventional ultrasonic flowmeter of this type is known, for example, in Japanese Patent Laid-Open No. 8-233628, and as shown in FIGS. 27A and 27B, ultrasonic vibration is generated in a part of a channel 1 having a rectangular cross section 4. The children 2 and 3 are arranged so as to face each other, and the propagation time until the ultrasonic wave transmitted from the ultrasonic vibrator 2 is received by the ultrasonic vibrator 3 and the ultrasonic wave transmitted from the ultrasonic vibrator 3 are ultrasonically vibrated. The flow rate calculation means 5 calculates the velocity of the fluid from the difference in propagation time until it is received by the child 2, and the flow velocity distribution in the flow path 1 is estimated from the Reynolds number of the fluid at that time, and the correction coefficient is obtained to calculate the flow rate. It was.

しかしながら、従来の超音波流量計では、流路内壁面で反射された反射波と反射されずに伝搬する直接波の伝搬距離が異なるため、反射波と直接波に位相差が生じ、この反射波と直接波の合成波を受信波として観測しているので反射波と直接波の位相差により受信波の振幅が増減したり、受信波の周期が変化してしまい、測定精度や測定可能な流量範囲が狭くなるという課題を有していた。
特開平8−233628号公報
However, in the conventional ultrasonic flowmeter, since the propagation distance of the reflected wave reflected from the inner wall surface of the flow path and the direct wave propagating without being reflected is different, there is a phase difference between the reflected wave and the direct wave. As the received wave is observed as the received wave, the amplitude of the received wave increases or decreases due to the phase difference between the reflected wave and the direct wave, and the period of the received wave changes. There was a problem that the range was narrowed.
JP-A-8-233628

本発明は上記課題を解決するするために、直接波と反射波との間の位相差が測定結果に与える影響が低減されるように、流量測定部と一対の超音波振動子を構成したものである。   In order to solve the above-mentioned problems, the present invention comprises a flow rate measurement unit and a pair of ultrasonic transducers so that the influence of the phase difference between the direct wave and the reflected wave on the measurement result is reduced. It is.

上記発明によれば、流路測定部内での反射波の影響を小さくすることができるので広範囲にわたって測定精度が向上できる。   According to the above invention, the influence of the reflected wave in the flow channel measurement unit can be reduced, so that the measurement accuracy can be improved over a wide range.

本発明の第1の形態の超音波流量計は、一対の超音波振動子と、前記一対の超音波振動子間を超音波が伝搬する時間を計測する計測部と、前記計測部の出力に基づいて、流量測定部を流れる流体の量を計算する計算部とを備え、前記流量測定部の壁面によって反射される反射波が前記測定結果に与える影響が低減されるように、前記流量測定部と前記一対の超音波振動子とが構成されているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   An ultrasonic flowmeter according to a first aspect of the present invention includes a pair of ultrasonic transducers, a measurement unit that measures the time during which ultrasonic waves propagate between the pair of ultrasonic transducers, and an output of the measurement unit. Based on the flow rate measurement unit, and the flow rate measurement unit so that the influence of the reflected wave reflected by the wall surface of the flow rate measurement unit on the measurement result is reduced. And the pair of ultrasonic transducers, the influence of the reflected wave in the flow rate measurement unit can be reduced, and a highly accurate ultrasonic flowmeter can be obtained.

本発明の第2の形態の超音波流量計は、超音波を用いて流体の流量を測定する超音波流量計において、一対の超音波振動子と、前記一対の超音波振動子間を超音波が伝搬する時間を計測する計測部と、前記計測部の出力に基づいて流量測定部を流れる流体の量を計算する計算部とを備え、前記流量測定部は当該流量測定部の壁面に反射することなく前記流量測定部を流れる流体中を伝搬する直接波と前記流量測定部の壁面によって反射される反射波との間の位相差が測定結果に影響を与える構成で、前記直接波と前記反射波との位相差が前記測定結果に与える影響が低減されるように、前記流量測定部と前記一対の超音波振動子とが構成されているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   An ultrasonic flowmeter according to a second aspect of the present invention is an ultrasonic flowmeter that measures the flow rate of a fluid using ultrasonic waves, and an ultrasonic wave between a pair of ultrasonic transducers and the pair of ultrasonic transducers. A measurement unit that measures the time during which the flow is propagated, and a calculation unit that calculates the amount of fluid flowing through the flow rate measurement unit based on the output of the measurement unit, and the flow rate measurement unit reflects on the wall surface of the flow rate measurement unit The phase difference between the direct wave propagating in the fluid flowing through the flow rate measurement unit and the reflected wave reflected by the wall surface of the flow rate measurement unit affects the measurement result, and the direct wave and the reflection Since the flow measurement unit and the pair of ultrasonic transducers are configured so that the influence of the phase difference with the wave on the measurement result is reduced, the influence of the reflected wave in the flow measurement unit is reduced. A high-accuracy ultrasonic flowmeter can be obtained.

本発明の第3の形態の超音波流量計は、超音波を用いて流体の流量を測定する超音波流量計において、一対の超音波振動子と、前記一対の超音波振動子間を超音波が伝搬する時間を計測する計測部と、前記計測部の出力に基づいて流量測定部を流れる流体の量を計算する計算部とを備え、前記流量測定部は当該流量測定部の壁面に反射することなく前記流量測定部を流れる流体中を伝搬する直接波と前記流量測定部の壁面によって反射される反射波との間の位相差が測定結果に影響を与える構成で、前記直接波と前記反射波との位相差が前記測定結果に与える影響が低減されるように、前記一対の超音波振動子の周波数と、前記一対の超音波振動子間の距離と、前記流量測定部の断面形状に関連するパラメータとの組合せによって特徴づけられるため、簡易な構成で流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   An ultrasonic flowmeter according to a third aspect of the present invention is an ultrasonic flowmeter that measures the flow rate of a fluid using ultrasonic waves. An ultrasonic flowmeter is disposed between a pair of ultrasonic transducers and the pair of ultrasonic transducers. A measurement unit that measures the time during which the flow is propagated, and a calculation unit that calculates the amount of fluid flowing through the flow rate measurement unit based on the output of the measurement unit, and the flow rate measurement unit reflects on the wall surface of the flow rate measurement unit The phase difference between the direct wave propagating in the fluid flowing through the flow rate measurement unit and the reflected wave reflected by the wall surface of the flow rate measurement unit affects the measurement result, and the direct wave and the reflection The frequency of the pair of ultrasonic transducers, the distance between the pair of ultrasonic transducers, and the cross-sectional shape of the flow rate measurement unit are reduced so that the influence of the phase difference with the waves on the measurement result is reduced. Characterized by combination with related parameters Because, it is possible to reduce the influence of the reflected wave at a flow rate measurement portion with a simple configuration, it is possible to obtain a high-precision ultrasonic flowmeter.

本発明の第4の形態の超音波流量計は、第3の形態の超音波流量計において、前記直接波は、前記一対の超音波振動子の中心を結ぶ直線に沿って伝搬する波であり、前記反射波は、前記一対の超音波振動子の中心と前記流量測定部の壁面上の点とを結ぶことによって形成される二等辺三角形の二等辺に沿って伝搬する波であり、前記直接波の伝搬距離と前記反射波の伝搬距離との差から生じる伝搬位相差が3π/2以上であるため、簡易な構成で流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   An ultrasonic flowmeter according to a fourth aspect of the present invention is the ultrasonic flowmeter according to the third aspect, wherein the direct wave is a wave propagating along a straight line connecting the centers of the pair of ultrasonic transducers. The reflected wave is a wave propagating along the isosceles of an isosceles triangle formed by connecting the center of the pair of ultrasonic transducers and a point on the wall surface of the flow rate measuring unit, and the direct wave Since the propagation phase difference resulting from the difference between the propagation distance of the wave and the propagation distance of the reflected wave is 3π / 2 or more, the influence of the reflected wave in the flow measurement unit can be reduced with a simple configuration, and high-accuracy ultrasonic waves A flow meter can be obtained.

本発明の第5の形態の超音波流量計は、第3の形態の超音波流量計において、前記直接波は、前記一対の超音波振動子の中心を結ぶ直線に沿って伝搬する波であり、前記反射波は、前記流量測定部の壁面によって1回だけ反射される波であり、前記直接波の伝搬時間に比べ前記反射波の最短伝搬時間が長くなるよう前記一対の超音波振動子の有効放射面の1つの辺あるい直径を前記流量測定部の高さより短くしたため、簡易な構成で流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   An ultrasonic flowmeter according to a fifth aspect of the present invention is the ultrasonic flowmeter according to the third aspect, wherein the direct wave is a wave propagating along a straight line connecting the centers of the pair of ultrasonic transducers. The reflected wave is a wave that is reflected only once by the wall surface of the flow rate measurement unit, and the shortest propagation time of the reflected wave is longer than the propagation time of the direct wave. Since one side or diameter of the effective radiation surface is made shorter than the height of the flow measurement unit, the influence of reflected waves in the flow measurement unit can be reduced with a simple configuration, and a highly accurate ultrasonic flow meter can be obtained. .

本発明の第6の形態の超音波流量計は、第4または第5の形態の超音波流量計において、前記一対の超音波振動子の周波数は所定値以上に設定されているため、流量測定部内での反射波の影響を低減でき、時間分解能も向上できるので、さらに高精度な超音波流量計を得ることができる。  The ultrasonic flow meter according to the sixth aspect of the present invention is the ultrasonic flow meter according to the fourth or fifth aspect, wherein the frequency of the pair of ultrasonic transducers is set to a predetermined value or more, so that the flow measurement Since the influence of the reflected wave in the part can be reduced and the time resolution can be improved, a more accurate ultrasonic flowmeter can be obtained.

本発明の第7の形態の超音波流量計は、第3の形態の超音波流量計において、前記直接波は、前記一対の超音波振動子の中心を結ぶ直線に沿って伝搬する波であり、前記反射波は、前記一対の超音波振動子の中心と前記流量測定部の壁面上の点とを結ぶことによって形成される二等辺三角形の二等辺に沿って伝搬する波であり、前記直接波の伝搬距離と前記反射波の伝搬距離との差から生じる伝搬位相差が0.2π以下であるため、簡易な構成で流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   An ultrasonic flowmeter according to a seventh aspect of the present invention is the ultrasonic flowmeter according to the third aspect, wherein the direct wave is a wave propagating along a straight line connecting the centers of the pair of ultrasonic transducers. The reflected wave is a wave propagating along the isosceles of an isosceles triangle formed by connecting the center of the pair of ultrasonic transducers and a point on the wall surface of the flow rate measuring unit, and the direct wave Since the propagation phase difference resulting from the difference between the propagation distance of the wave and the propagation distance of the reflected wave is 0.2π or less, the influence of the reflected wave in the flow rate measurement unit can be reduced with a simple configuration, and high-accuracy ultrasonic waves A flow meter can be obtained.

本発明の第8の形態の超音波流量計は、第7の形態の超音波流量計において、前記超音波流量計は、前記流量測定部を複数の部分に分割する少なくとも1つ以上の分割板をさらに備えているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   An ultrasonic flow meter according to an eighth aspect of the present invention is the ultrasonic flow meter according to the seventh aspect, wherein the ultrasonic flow meter includes at least one or more divided plates that divide the flow rate measurement unit into a plurality of portions. Therefore, the influence of the reflected wave in the flow rate measurement unit can be reduced, and a highly accurate ultrasonic flow meter can be obtained.

本発明の第9の形態の超音波流量計は、第8の形態の超音波流量計において、前記一対の超音波振動子の周波数は所定値以下に設定されているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   The ultrasonic flow meter according to the ninth aspect of the present invention is the ultrasonic flow meter according to the eighth aspect, wherein the frequency of the pair of ultrasonic transducers is set to a predetermined value or less. The influence of the reflected wave can be reduced, and a highly accurate ultrasonic flow meter can be obtained.

本発明の第10の形態の超音波流量計は、第1〜5、7のいづれかの形態の超音波流量計において、前記流量測定部の断面形状は矩形であり、前記流量測定部の断面形状に関連するパラメータは前記矩形の高さであるため、簡易な構成で流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。  The ultrasonic flowmeter according to a tenth aspect of the present invention is the ultrasonic flowmeter according to any one of the first to fifth and seventh aspects, wherein the cross-sectional shape of the flow rate measurement unit is a rectangle, and the cross-sectional shape of the flow rate measurement unit Since the parameter related to is the height of the rectangle, the influence of the reflected wave in the flow measurement unit can be reduced with a simple configuration, and a highly accurate ultrasonic flowmeter can be obtained.

本発明の第11の形態の超音波流量計は、第1〜5、7のいづれかの形態の超音波流量計において、前記流量測定部の断面形状は円であり、前記流量測定部の断面形状に関連するパラメータは前記円の直径であるため、簡易な構成で流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   The ultrasonic flowmeter according to an eleventh aspect of the present invention is the ultrasonic flowmeter according to any one of the first to fifth and seventh aspects, wherein the cross-sectional shape of the flow rate measurement unit is a circle, and the cross-sectional shape of the flow rate measurement unit Since the parameter related to is the diameter of the circle, the influence of the reflected wave in the flow measurement unit can be reduced with a simple configuration, and a highly accurate ultrasonic flowmeter can be obtained.

本発明の第12の形態の超音波流量計は、第1〜5、7のいずれかの形態の超音波流量計において、前記一対の超音波振動子は、反射波に伝搬位相差を設けるために、前記一対の超音波振動子の中心を結ぶ直線が前記流量測定部の断面の所定方向の中心線に対してシフトするように配置されているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。 An ultrasonic flowmeter according to a twelfth aspect of the present invention is the ultrasonic flowmeter according to any one of the first to fifth and seventh aspects, wherein the pair of ultrasonic vibrators provide a propagation phase difference in reflected waves. In addition, since the straight line connecting the centers of the pair of ultrasonic transducers is arranged so as to shift with respect to the center line in the predetermined direction of the cross section of the flow rate measuring unit, the influence of the reflected wave in the flow rate measuring unit is reduced. An ultrasonic flowmeter with high accuracy can be obtained.

本発明の第13の形態の超音波流量計は、第12の形態の超音波流量計において、前記一対の超音波振動子の中心を結ぶ線と前記流量測定部の断面の所定方向の中心線とは互いに平行であるため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。  An ultrasonic flow meter according to a thirteenth aspect of the present invention is the ultrasonic flow meter according to the twelfth aspect, wherein a line connecting the centers of the pair of ultrasonic transducers and a center line in a predetermined direction of a cross section of the flow rate measurement unit Are parallel to each other, the influence of the reflected wave in the flow rate measuring unit can be reduced, and a highly accurate ultrasonic flow meter can be obtained.

本発明の第14の形態の超音波流量計は、第12の形態の超音波流量計において、前記一対の超音波振動子の中心を結ぶ線と前記流量測定部の断面の所定方向の中心線とは所定の角度をなしているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   An ultrasonic flow meter according to a fourteenth aspect of the present invention is the ultrasonic flow meter according to the twelfth aspect, wherein a line connecting the centers of the pair of ultrasonic transducers and a center line in a predetermined direction of the cross section of the flow rate measurement unit Since it forms a predetermined angle, the influence of the reflected wave in the flow rate measuring unit can be reduced, and a highly accurate ultrasonic flow meter can be obtained.

本発明の第15の形態の超音波流量計は、第1または第2の形態の超音波流量計において、前記超音波流量計は、前記流量測定部の壁面によって1回だけ反射される反射波の発生を阻止する構成をさらに備えているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   An ultrasonic flow meter according to a fifteenth aspect of the present invention is the ultrasonic flow meter according to the first or second aspect, wherein the ultrasonic flow meter is reflected only once by the wall surface of the flow rate measuring unit. Since the structure which prevents generation | occurrence | production of this is further provided, the influence of the reflected wave in a flow measurement part can be reduced, and a highly accurate ultrasonic flowmeter can be obtained.

本発明の第16の形態の超音波流量計は、第15の形態の超音波流量計において、前記一対の超音波振動子の中心を結ぶ線と前記流量測定部の断面の所定方向の中心線とは所定の角度をなしているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   An ultrasonic flow meter according to a sixteenth aspect of the present invention is the ultrasonic flow meter according to the fifteenth aspect, wherein a line connecting the centers of the pair of ultrasonic transducers and a center line in a predetermined direction of the cross section of the flow rate measurement unit Since it forms a predetermined angle, the influence of the reflected wave in the flow rate measuring unit can be reduced, and a highly accurate ultrasonic flow meter can be obtained.

本発明の第17の形態の超音波流量計は、第1または第2の形態の超音波流量計において、前記超音波流量計は、前記流量測定部に設けられた少なくとも1つの構造体をさらに備えているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   The ultrasonic flow meter according to a seventeenth aspect of the present invention is the ultrasonic flow meter according to the first or second aspect, wherein the ultrasonic flow meter further includes at least one structure provided in the flow rate measuring unit. Since it is provided, the influence of the reflected wave in the flow rate measurement unit can be reduced, and a highly accurate ultrasonic flow meter can be obtained.

本発明の第18の形態の超音波流量計は、第17の形態の超音波流量計において、前記少なくとも1つの構造体は、前記一対の超音波振動子の近傍に配置されているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   An ultrasonic flow meter according to an eighteenth aspect of the present invention is the ultrasonic flow meter according to the seventeenth aspect, wherein the at least one structure is disposed in the vicinity of the pair of ultrasonic transducers. The influence of the reflected wave in the measurement unit can be reduced, and a highly accurate ultrasonic flow meter can be obtained.

本発明の第19の形態の超音波流量計は、第17の形態の超音波流量計において、前記少なくとも1つの構造体は、前記流量測定部の壁面に配置されているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   The ultrasonic flow meter of the nineteenth aspect of the present invention is the ultrasonic flow meter of the seventeenth aspect, wherein the at least one structure is disposed on the wall surface of the flow measurement unit. The influence of the reflected wave can be reduced, and a highly accurate ultrasonic flowmeter can be obtained.

本発明の第20の形態の超音波流量計は、第1または第2の形態の超音波流量計において、前記流量測定部の壁面には、少なくとも1つ以上の凹部または凸部が設けられているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   An ultrasonic flow meter according to a twentieth aspect of the present invention is the ultrasonic flow meter according to the first or second aspect, wherein at least one concave or convex portion is provided on the wall surface of the flow measuring unit. Therefore, the influence of the reflected wave in the flow rate measurement unit can be reduced, and a highly accurate ultrasonic flow meter can be obtained.

本発明の第21の形態の超音波流量計は、第20の形態の超音波流量計において、前記超音波流量計は、前記凹部を覆うメッシュ構造体をさらに備えているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   The ultrasonic flowmeter of the twenty-first aspect of the present invention is the ultrasonic flowmeter of the twentieth aspect, wherein the ultrasonic flowmeter further includes a mesh structure that covers the concave portion. The influence of the reflected wave can be reduced, and a highly accurate ultrasonic flowmeter can be obtained.

本発明の第22の形態の超音波流量計は、第1または第2の形態の超音波流量計において、前記一対の超音波振動子は、前記一対の超音波振動子の中心を結ぶ線と前記一対の超音波振動子の少なくとも一方の指向性を示す方向とが所定の角度をなすように配置されているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   The ultrasonic flowmeter of the twenty-second aspect of the present invention is the ultrasonic flowmeter of the first or second aspect, wherein the pair of ultrasonic transducers is a line connecting the centers of the pair of ultrasonic transducers. Since the direction indicating at least one of the pair of ultrasonic transducers is arranged at a predetermined angle, the influence of the reflected wave in the flow rate measurement unit can be reduced, and the ultrasonic flow rate with high accuracy can be reduced. You can get a total.

本発明の第23の形態の超音波流量計は、第1〜5、7のいづれかの形態の超音波流量計において、少なくとも前記流量測定部の上流側に流れの方向を整える整流手段を有しており、流量測定部内の流れの方向を均一化でき、さらに高精度な超音波流量計を得ることができる。   An ultrasonic flow meter according to a twenty-third aspect of the present invention is the ultrasonic flow meter according to any one of the first to fifth and seventh aspects, and has a rectifying means for adjusting the flow direction at least upstream of the flow rate measuring unit. Therefore, the flow direction in the flow rate measurement unit can be made uniform, and a more accurate ultrasonic flow meter can be obtained.

以下、本発明の実施例について図面を用いて説明する。なお図面中で同一符号を付しているものは同一のものであり、詳細な説明は省略する。   Embodiments of the present invention will be described below with reference to the drawings. In addition, what attaches | subjects the same code | symbol in drawing is the same thing, and detailed description is abbreviate | omitted.

図1は本発明の実施例1の超音波流量計の構成図である。また図2は図1の流路6のa−a’線を横から見た断面図である。図1において、6は流路で、7は流量測定部、8、9は流路6の側壁部で、10、11は側壁部8、9に取り付けられた超音波振動子である。12は超音波振動子10、11に接続された計測部で、13は計測部12に接続された計算部である。図2において、14は流路6の下板部で、15は側壁部8、9に接続された上板部である。また流量測定部7の断面形状は矩形で、幅はW0、高さはH0である。   FIG. 1 is a configuration diagram of an ultrasonic flowmeter according to a first embodiment of the present invention. FIG. 2 is a cross-sectional view of the channel 6 of FIG. In FIG. 1, 6 is a flow path, 7 is a flow rate measurement unit, 8 and 9 are side wall portions of the flow path 6, and 10 and 11 are ultrasonic transducers attached to the side wall portions 8 and 9. A measurement unit 12 is connected to the ultrasonic transducers 10 and 11, and a calculation unit 13 is connected to the measurement unit 12. In FIG. 2, 14 is a lower plate portion of the flow path 6, and 15 is an upper plate portion connected to the side wall portions 8 and 9. The cross-sectional shape of the flow rate measuring unit 7 is rectangular, the width is W0, and the height is H0.

以上のように構成された超音波流量計の流路の作製方法の一例について図1、図2を用いて説明する。流路6を構成する側壁部8、9、下板部14、上板部15に用いる材料は被測定流体に対して化学変化を生じない材質を用いる。本実施例では被測定流体を例えば空気としたため、材質には ABS樹脂を選択した。   An example of a method for producing a flow path of the ultrasonic flowmeter configured as described above will be described with reference to FIGS. The materials used for the side wall portions 8 and 9, the lower plate portion 14, and the upper plate portion 15 constituting the flow path 6 are materials that do not cause a chemical change with respect to the fluid to be measured. In this embodiment, since the fluid to be measured is air, for example, ABS resin is selected as the material.

側壁部8、9の端面にシール材を介して上板部15をネジどめして、矩形断面の流量測定部7を構成する。また超音波振動子10、11は送受波面が相対するよう側壁部8、9に設けられた取り付け口10a、11aにシール材を介して固定する。   The upper plate portion 15 is screwed to the end surfaces of the side wall portions 8 and 9 via a sealing material to constitute the flow rate measuring portion 7 having a rectangular cross section. Further, the ultrasonic transducers 10 and 11 are fixed to attachment ports 10a and 11a provided in the side wall portions 8 and 9 through a sealing material so that the transmission / reception surfaces face each other.

以上のように構成された超音波流量計についてその動作を説明する。超音波振動子10と超音波振動子11の中心を結ぶ距離をLとし、この直線と流れの方向である流量測定部7の長手方向となす角をθとする。また被測定流体である空気の無風状態での音速をC、流量測定部7内での空気の流速をVとする。流路6の上流側に配置された超音波振動子10から送信された超音波は流量測定部7を斜に横断し、下流側に配置された超音波振動子11で受信する。このときの伝搬時間t1は、   The operation of the ultrasonic flowmeter configured as described above will be described. A distance connecting the centers of the ultrasonic transducer 10 and the ultrasonic transducer 11 is L, and an angle between the straight line and the longitudinal direction of the flow rate measuring unit 7 which is a flow direction is θ. Further, the velocity of sound in the windless state of the air to be measured is C, and the flow velocity of air in the flow rate measuring unit 7 is V. The ultrasonic wave transmitted from the ultrasonic transducer 10 arranged on the upstream side of the flow path 6 obliquely crosses the flow rate measuring unit 7 and is received by the ultrasonic transducer 11 arranged on the downstream side. The propagation time t1 at this time is

Figure 0003907613
Figure 0003907613

で示される。次に送信・受信する超音波振動子を切り替え、超音波振動子11から超音波を送信し、超音波振動子10で受信する。このときの伝搬時間t2は、 Indicated by Next, the ultrasonic transducer to be transmitted / received is switched, ultrasonic waves are transmitted from the ultrasonic transducer 11, and received by the ultrasonic transducer 10. The propagation time t2 at this time is

Figure 0003907613
Figure 0003907613

で示される。t1とt2の式から空気の音速Cを消去すると、 Indicated by Erasing the speed of sound C of air from the equation of t1 and t2,

Figure 0003907613
Figure 0003907613

の式が得られる。Lとθが既知ならば、計測部12にてt1とt2を測定すれば流速Vが求められる。 The following equation is obtained. If L and θ are known, the flow velocity V can be obtained by measuring t1 and t2 in the measuring unit 12.

この流速Vから流量Qは、流量測定部7の断面面積をS、補正係数をKとすれば、計算部13で、
Q=KSV
を演算し、流量を求めることができる。
From this flow velocity V to the flow rate Q, if the cross-sectional area of the flow rate measurement unit 7 is S and the correction coefficient is K, the calculation unit 13
Q = KSV
To obtain the flow rate.

以上のような動作原理で流量を計測する超音波流量計の流量測定部7での超音波の伝搬について図3を用いて説明する。図3は図1の流路6のb−b’線を横から見た断面図である。   The propagation of ultrasonic waves in the flow rate measuring unit 7 of the ultrasonic flow meter that measures the flow rate based on the above operation principle will be described with reference to FIG. FIG. 3 is a cross-sectional view of the flow path 6 of FIG.

超音波振動子10には指向性があるため送信された超音波は一般的に広がりながら流量測定部7を伝搬する。このため超音波振動子11で受信される超音波は、例えば流量測定部7内の伝搬経路17に沿って伝搬する直接波と、伝搬経路18のように上板部15の内壁面で1回反射して受信される反射波が存在する。ここで、伝搬経路17、18は代表的な伝搬経路であり、伝搬経路17以外の直接波や伝搬経路18以外の反射波も存在し、例えば下板部14で反射されて伝搬する反射波や反射回数も1回だけでなく2回以上反射して受信される反射波も存在する。この結果超音波振動子11で受信される受信波は、直接波と反射波の合成波として観測される。ここで、直接波と反射波は伝搬経路17、18が示すように伝搬距離差が生じる。伝搬経路17と伝搬経路18の伝搬距離差をΔLとすると

Figure 0003907613
Since the ultrasonic transducer 10 has directivity, the transmitted ultrasonic wave generally propagates through the flow rate measurement unit 7 while spreading. For this reason, the ultrasonic wave received by the ultrasonic transducer 11 is transmitted once on the inner wall surface of the upper plate 15 such as the direct wave propagating along the propagation path 17 in the flow rate measurement unit 7 and the propagation path 18, for example. There is a reflected wave that is reflected and received. Here, the propagation paths 17 and 18 are typical propagation paths, and there are direct waves other than the propagation path 17 and reflected waves other than the propagation path 18, for example, reflected waves that are reflected by the lower plate portion 14 and propagated. There is a reflected wave that is reflected not only once but also reflected twice or more. As a result, the received wave received by the ultrasonic transducer 11 is observed as a combined wave of the direct wave and the reflected wave. Here, there is a propagation distance difference between the direct wave and the reflected wave as indicated by the propagation paths 17 and 18. When the propagation distance difference between the propagation path 17 and the propagation path 18 is ΔL
Figure 0003907613

で示される。超音波振動子の波長λより代表伝搬経路17、18の伝搬距離差を伝搬位相差Δθに換算すると、 Indicated by When the propagation distance difference between the representative propagation paths 17 and 18 is converted into the propagation phase difference Δθ from the wavelength λ of the ultrasonic transducer,

Figure 0003907613
Figure 0003907613

が得られる。このように流量計測部7の内部を伝搬する超音波に伝搬位相差が存在するため、全ての伝搬経路を伝搬する直接波と反射波の重ねあわせである受信波は伝搬位相差による干渉の影響を受けると考えられる。 Is obtained. Since there is a propagation phase difference in the ultrasonic wave propagating in the flow rate measuring unit 7 in this way, the received wave, which is a superposition of the direct wave and the reflected wave propagating through all propagation paths, is affected by interference due to the propagation phase difference. It is thought to receive.

そこで直接波に対する反射波の影響を推定するため、直接波と反射波の伝搬経路分布およびそれぞれの波形の計算を行った。本計算では超音波振動子10、11の放射面形状を正方形(一定)、超音波振動子10、11の距離をL、流量測定部7は無限に広い2枚の平行平板からなると仮定した。また被測定流体の流れは無いものとする。   Therefore, in order to estimate the influence of the reflected wave on the direct wave, the propagation path distribution of the direct wave and the reflected wave and the respective waveforms were calculated. In this calculation, it is assumed that the radiation surface shape of the ultrasonic transducers 10 and 11 is square (constant), the distance between the ultrasonic transducers 10 and 11 is L, and the flow rate measurement unit 7 is composed of two infinitely wide parallel plates. It is assumed that there is no flow of the fluid to be measured.

伝搬経路17、18の伝搬位相差が例えば0.7π〜2.2πとなるように高さ(H0)を変えた場合の、超音波振動子10から送信され超音波振動子11で受信される超音波の伝搬経路分布を求めた計算結果を図4Aおよび図4Bに示す。直接波を実線、1回反射の反射波を破線、2回反射の反射波を1点鎖線とする。図4Aおよび図4Bの横軸はそれぞれの伝搬経路の伝搬距離、縦軸は相対的な経路別強度を示している。   When the height (H0) is changed so that the propagation phase difference between the propagation paths 17 and 18 is, for example, 0.7π to 2.2π, the ultrasonic wave is transmitted from the ultrasonic transducer 10 and received by the ultrasonic transducer 11. FIG. 4A and FIG. 4B show the calculation results for obtaining the propagation path distribution of ultrasonic waves. A direct wave is a solid line, a reflected wave of one reflection is a broken line, and a reflected wave of two reflections is a one-dot chain line. 4A and 4B, the horizontal axis represents the propagation distance of each propagation path, and the vertical axis represents the relative path strength.

直接波の伝搬経路分布は超音波振動子10、11の形状が一定であるため変化が見られないが、1回反射波の伝搬経路分布は直接波より広いうえ、伝搬位相差が大きいほうが広い傾向を示している。2回反射の反射波の伝搬経路分布は1回反射よりもさらに広い。また直接波の経路別強度が最も大きくなる距離は伝搬経路17の距離とほぼ等しく、1回反射の反射波の経路別強度が最も大きくなる距離も伝搬経路18の距離とほぼ等しい。   The propagation path distribution of the direct wave does not change because the shape of the ultrasonic transducers 10 and 11 is constant. However, the propagation path distribution of the reflected wave once is wider than the direct wave and the propagation phase difference is wider. It shows a trend. The propagation path distribution of the reflected wave of the two-time reflection is wider than that of the one-time reflection. In addition, the distance at which the intensity of the direct wave is the largest is almost equal to the distance of the propagation path 17, and the distance at which the intensity of the reflected wave of the single reflection is the largest is also almost equal to the distance of the propagation path 18.

次に図4Aおよび図4Bの計算結果に、超音波振動子10、11のパルス応答特性を加えて計算した受信波形を図5Aおよび図5Bに示す。ただし超音波振動子10、11の周波数は270kHzとし、直接波を実線、1回反射の反射波を破線、2回反射の反射波を1点鎖線とする。伝搬位相差が大きいほうが1回反射の反射波の振幅は小さい。また2回反射の反射波は1回反射の反射波よりさらに小さい。これは図4Aおよび図4Bに示されるように代表伝搬経路17、18の伝搬位相差が大きいほど、伝搬経路分布が広くかつ傾斜がなだらかなため、全ての伝搬経路について考えると伝搬位相差が広範囲に存在し、反射波同士の干渉により打ち消しあっている。   Next, received waveforms calculated by adding the pulse response characteristics of the ultrasonic transducers 10 and 11 to the calculation results of FIGS. 4A and 4B are shown in FIGS. 5A and 5B. However, the frequency of the ultrasonic transducers 10 and 11 is 270 kHz, the direct wave is a solid line, the reflected wave of one reflection is a broken line, and the reflected wave of two reflections is a one-dot chain line. The larger the propagation phase difference, the smaller the amplitude of the reflected wave once reflected. In addition, the reflected wave of the two-time reflection is smaller than the reflected wave of the one-time reflection. As shown in FIGS. 4A and 4B, the larger the propagation phase difference between the representative propagation paths 17 and 18, the wider the propagation path distribution and the gentler the inclination. Therefore, when considering all the propagation paths, the propagation phase difference is wide. And cancel each other due to interference between reflected waves.

また図5Aおよび図5Bにおいて、伝搬位相差が大きいほうが直接波に対する反射波の立上り時間が遅くなる傾向が見られる。   5A and 5B, the larger the propagation phase difference, the slower the rise time of the reflected wave with respect to the direct wave.

以上の計算結果から、反射波の伝搬経路分布が広くなるよう高さ(H0)を設定すれば、あるいは伝搬経路17、18の伝搬位相差が大きくなるように高さ(H0)を設定すれば、直接波への影響を低減できる。さらに超音波振動子の放射面を高さ(H0)より小さくすれば、直接波に対する反射波の影響をさらに低減できる。   From the above calculation results, if the height (H0) is set so that the propagation path distribution of the reflected wave becomes wide, or if the height (H0) is set so that the propagation phase difference between the propagation paths 17 and 18 becomes large. , The influence on the direct wave can be reduced. Furthermore, if the radiation surface of the ultrasonic transducer is made smaller than the height (H0), the influence of the reflected wave on the direct wave can be further reduced.

直接波に対する反射波の影響を確認するため、超音波振動子10、11の距離をL、超音波振動子10、11の有効放射面を正方形、幅をW0(一定)とし、高さ(H0)は伝搬経路17、18の伝搬位相差が0.7π〜2.2πとなるように設定し、空気を用いて行った実験結果を図6、図7に示す。なお超音波振動子10、11の周波数は270kHzとする。   In order to confirm the influence of the reflected wave on the direct wave, the distance between the ultrasonic transducers 10 and 11 is L, the effective radiation surface of the ultrasonic transducers 10 and 11 is square, the width is W0 (constant), and the height (H0 ) Is set so that the propagation phase difference between the propagation paths 17 and 18 is 0.7π to 2.2π, and experimental results using air are shown in FIGS. The frequency of the ultrasonic transducers 10 and 11 is 270 kHz.

図6、図7の横軸は(式5)を用い求めた直接波の伝搬経路17と反射波の伝搬経路18の伝搬位相差である。なおλは、超音波振動子10、11の流れの無い室温での波長とする。図6の縦軸は超音波振動子10、11を開空間に配置して測定した受信電圧に対する流路6に配置して測定した受信電圧の相対受信電圧である。ただし流れは無しとする。また図7の縦軸は流れが無しでの受信電圧に対する6000リットル/時間程度流して得られた受信電圧の変化率である。   The horizontal axis of FIGS. 6 and 7 is the propagation phase difference between the direct wave propagation path 17 and the reflected wave propagation path 18 obtained by using (Equation 5). Note that λ is a wavelength at room temperature where the ultrasonic transducers 10 and 11 do not flow. The vertical axis in FIG. 6 is a relative received voltage of the received voltage measured by arranging the ultrasonic transducers 10 and 11 in the flow path 6 with respect to the received voltage measured by arranging in the open space. However, there is no flow. The vertical axis in FIG. 7 represents the rate of change in received voltage obtained by flowing about 6000 liters / hour with respect to the received voltage without flow.

流れが無しでの受信電圧は、図6から伝搬位相差がπ〜1.4π程度の時最も小さくなる傾向が見られる。流れによる受信電圧の変化率は図7から伝搬位相差が0.8π〜1.2π程度の場合、超音波振動子10で送信、超音波振動子11で受信での組合せは受信電圧が最も減少し、反対に超音波振動子11で送信、超音波振動子10で受信での組合せは受信電圧が最も増加する。このように受信電圧が増加する現象は、直接波と反射波の重ね合わせにおいて位相的な影響がなければ起こらない。   FIG. 6 shows that the received voltage without flow tends to be the smallest when the propagation phase difference is about π to 1.4π. As shown in FIG. 7, the rate of change in the received voltage due to the flow is the lowest in the received voltage when the propagation phase difference is about 0.8π to 1.2π, and the combination of transmission by the ultrasonic transducer 10 and reception by the ultrasonic transducer 11 is the smallest. On the other hand, the combination of transmission by the ultrasonic transducer 11 and reception by the ultrasonic transducer 10 has the highest received voltage. The phenomenon that the reception voltage increases in this way must occur if there is no phase effect in the superposition of the direct wave and the reflected wave.

伝搬位相差が3π/2以上では超音波振動子10で送信、超音波振動子11で受信での組合せも、超音波振動子11で送信、超音波振動子10で受信での組合せも、両組合せともに受信電圧が減少する傾向が見られる。これは流れにより超音波振動子10、超音波振動子11の指向性が偏向されたためと考えられる。   When the propagation phase difference is 3π / 2 or more, both the combination of transmission by the ultrasonic transducer 10 and reception by the ultrasonic transducer 11, the combination of transmission by the ultrasonic transducer 11 and reception by the ultrasonic transducer 10, both There is a tendency for the received voltage to decrease for both combinations. This is probably because the directivity of the ultrasonic transducer 10 and the ultrasonic transducer 11 is deflected by the flow.

以上の結果より、直接波の伝搬経路17と反射波の伝搬経路18の伝搬位相差が0.8π〜1.4π程度となる高さ(H0)では反射波の影響が大きいため広い測定範囲での高精度な流量計測が困難である。反対に伝搬位相差がおよそ3π/2以上となるように超音波振動子10、11の周波数、超音波振動子10、11の距離(L)、高さ(H0)の組合せを設定すれば反射波の影響を低減でき広い測定範囲での高精度な流量計測が可能となる。また距離(L)、高さ(H0)を一定とすれば、超音波振動子10、11の周波数を高く設定するほうが伝搬位相差を大きくできるので、さらに高精度な流量計測が可能となる。   From the above results, since the influence of the reflected wave is large at the height (H0) where the propagation phase difference between the direct wave propagation path 17 and the reflected wave propagation path 18 is about 0.8π to 1.4π, it is possible to measure over a wide measurement range. It is difficult to measure the flow rate with high accuracy. On the other hand, if the combination of the frequency of the ultrasonic transducers 10 and 11, the distance (L) and the height (H0) of the ultrasonic transducers 10 and 11 is set so that the propagation phase difference is about 3π / 2 or more, reflection is performed. The influence of waves can be reduced, and high-accuracy flow measurement over a wide measurement range is possible. Further, if the distance (L) and the height (H0) are constant, the propagation phase difference can be increased by setting the frequency of the ultrasonic transducers 10 and 11 higher, so that the flow rate can be measured with higher accuracy.

以上のように、本発明によれば直接波と反射波の伝搬位相差が測定結果に影響を与えるような超音波流量計において、伝搬経路17と伝搬経路18の伝搬位相差が3π/2以上となるよう流量測定部7の高さ(H0)、超音波振動子10、11の距離(L)、周波数の組合せを選択することにより簡易な構成で反射波の影響を低減でき、被測定流体の流量を短時間に広範囲に高精度で測定することができる。また流量測定部7に凹部や凸部を設けないため、流れを乱したり、圧力損失を増加させることが少ない。   As described above, according to the present invention, in the ultrasonic flowmeter in which the propagation phase difference between the direct wave and the reflected wave affects the measurement result, the propagation phase difference between the propagation path 17 and the propagation path 18 is 3π / 2 or more. By selecting the combination of the height (H0) of the flow rate measurement unit 7, the distance (L) of the ultrasonic transducers 10 and 11, and the frequency so that the influence of the reflected wave can be reduced with a simple configuration, the fluid to be measured Can be measured over a wide range in a short time with high accuracy. Further, since the flow measuring unit 7 is not provided with a concave portion or a convex portion, the flow is not disturbed and the pressure loss is rarely increased.

なお、実施例1では伝搬経路17、18の伝搬位相差が0.7π〜2.2πとなる高さ(H0)を選択したが、伝搬経路17、18の伝搬位相差が2.2π以上となる高さ(H0)を選択しても構わないし、超音波振動子10、11の距離(L)や周波数を選択しても構わない。   In the first embodiment, the height (H0) at which the propagation phase difference between the propagation paths 17 and 18 is 0.7π to 2.2π is selected, but the propagation phase difference between the propagation paths 17 and 18 is 2.2π or more. The height (H0) may be selected, or the distance (L) and the frequency of the ultrasonic transducers 10 and 11 may be selected.

以下、本発明の実施例2について、図8、9を参照しながら説明する。   Hereinafter, Example 2 of the present invention will be described with reference to FIGS.

図8は本発明の実施例2における超音波流量計の流路6のa−a’線を横から見た断面図である。図9は流路6のb−b’線を横から見た断面図である。図8において14、15は流路6の側壁部、下板部、上板部で、以上は図2の構成と同様なものである。図9において10、11は超音波振動子で以上は図3の構成と同様なものである。上記のように構成された超音波流量計の流路の作製方法、動作原理は実施例1と同様となるため省略する。   FIG. 8 is a cross-sectional view of the flow path 6 of the ultrasonic flowmeter according to the second embodiment of the present invention, as viewed from the side. FIG. 9 is a cross-sectional view of the flow path 6 taken along the line b-b ′. In FIG. 8, 14 and 15 are the side wall part, the lower plate part, and the upper plate part of the flow path 6, and the above is the same as the structure of FIG. In FIG. 9, reference numerals 10 and 11 denote ultrasonic transducers, which have the same configuration as that of FIG. The method for producing the flow path of the ultrasonic flowmeter configured as described above and the operating principle thereof are the same as those in the first embodiment, and are therefore omitted.

圧力損失を少なくするため一般的に流量測定部7の断面積は、被測定流体を供給する配管の内径と同程度とし、流速分布の観点から高さ(H1)と幅(W1)のアスペクト比(W1/H1)を大きくしいたい場合がある。このような場合、伝搬経路19と伝搬経路20の伝搬位相差が3π/2以上となるような超音波振動子10、11の距離(L)、高さ(H1)、周波数の組合せを選択できない場合がある。そこで、アスペクト比を大きくしながら、反射波の影響を低減する手段について考える。   In order to reduce pressure loss, the cross-sectional area of the flow rate measuring unit 7 is generally the same as the inner diameter of the pipe supplying the fluid to be measured, and the aspect ratio of height (H1) and width (W1) from the viewpoint of flow velocity distribution. There are cases where it is desired to increase (W1 / H1). In such a case, it is not possible to select a combination of the distance (L), height (H1), and frequency of the ultrasonic transducers 10 and 11 such that the propagation phase difference between the propagation path 19 and the propagation path 20 is 3π / 2 or more. There is a case. Therefore, a means for reducing the influence of reflected waves while increasing the aspect ratio will be considered.

直接波に対する反射波の影響を確認するため、実施例1と同様に超音波振動子10、11の距離をL、超音波振動子10、11の有効放射面を正方形、幅をW1(一定)とし、高さ(H1)は伝搬経路19、20の伝搬位相差が0.05π〜0.7πとなるように設定し、空気を用いて行った実験結果を図10、図11に示す。なお超音波振動子10、11の周波数は270kHzとする。   In order to confirm the influence of the reflected wave on the direct wave, the distance between the ultrasonic transducers 10 and 11 is L, the effective radiation surface of the ultrasonic transducers 10 and 11 is square, and the width is W1 (constant) as in the first embodiment. The height (H1) is set so that the propagation phase difference between the propagation paths 19 and 20 is 0.05π to 0.7π, and the results of experiments conducted using air are shown in FIGS. The frequency of the ultrasonic transducers 10 and 11 is 270 kHz.

図10、図11の横軸は(式5)を用い求めた直接波の伝搬経路19と反射波の伝搬経路20の伝搬位相差である。なおλは、超音波振動子10、11の流れの無い室温での波長とする。図10の縦軸は超音波振動子10、11を開空間に配置して測定した受信電圧に対する流路6に配置して測定した受信電圧の相対受信電圧である。ただし流れは無しとする。また図11の縦軸は流れが無しでの受信電圧に対する6000リットル/時間程度流して得られた受信電圧の変化率である。   The horizontal axes of FIGS. 10 and 11 represent the propagation phase difference between the direct wave propagation path 19 and the reflected wave propagation path 20 obtained using (Equation 5). Note that λ is a wavelength at room temperature where the ultrasonic transducers 10 and 11 do not flow. The vertical axis of FIG. 10 represents the relative received voltage of the received voltage measured by arranging the ultrasonic transducers 10 and 11 in the flow path 6 with respect to the received voltage measured by arranging them in the open space. However, there is no flow. The vertical axis in FIG. 11 represents the rate of change in received voltage obtained by flowing about 6000 liters / hour with respect to the received voltage without flow.

図10では伝搬位相差が小さくなるど受信電圧は小さくなっている。これは超音波振動子10、11の有効放射面を一定としたため、高さ(H1)を低くすることにより、下板部14、上板部15で超音波振動子10、11の一部分が遮られたためと考えられる。   In FIG. 10, the received voltage decreases as the propagation phase difference decreases. Since the effective radiation surfaces of the ultrasonic transducers 10 and 11 are constant, a part of the ultrasonic transducers 10 and 11 is blocked by the lower plate portion 14 and the upper plate portion 15 by reducing the height (H1). It is thought that it was because

図11では伝搬位相差が0.2π以上では超音波振動子10で送信、超音波振動子11で受信での組合せと超音波振動子11で送信、超音波振動子10で受信での組合せの変化率に差が見られる。これに対し伝搬位相差が0: 2π以下では、超音波振動子10で送信、超音波振動子11で受信での組合せと超音波振動子11で送信、超音波振動子10で受信での組合せの変化率がほぼ等しくなっている。このように変化率が等しくなったのは、流れにより超音波の伝搬速度が早くなる方向でも遅くなる方向でも、直接波に対する反射波の重なり合わせに位相的な影響がないこと意味し、直接波に対する反射波の影響が低減できたと考えられる。   In FIG. 11, when the propagation phase difference is 0.2π or more, the transmission is performed by the ultrasonic transducer 10, the combination is received by the ultrasonic transducer 11, the transmission is transmitted by the ultrasonic transducer 11, and the combination is received by the ultrasonic transducer 10. There is a difference in the rate of change. On the other hand, when the propagation phase difference is 0: 2π or less, the transmission is transmitted by the ultrasonic transducer 10, the combination is received by the ultrasonic transducer 11, the transmission is transmitted by the ultrasonic transducer 11, and the combination is received by the ultrasonic transducer 10. The rate of change of is almost equal. The rate of change equalized in this way means that there is no phase effect on the overlap of the reflected wave with the direct wave, regardless of whether the propagation speed of the ultrasonic wave is faster or slower due to the flow. It is thought that the influence of the reflected wave on can be reduced.

以上の結果より、伝搬経路19と伝搬経路20の伝搬位相差をおよそ0.2π以下となるように超音波振動子10、11の周波数、超音波振動子10、11の距離(L)、高さ(H1)の組合せを設定すれば反射波の影響を低減でき広い測定範囲での高精度な流量計測が可能となる。また距離(L)、高さ(H1)を一定とすれば、超音波振動子10、11の周波数を低く設定するほうが伝搬位相差を小さくできるので、さらに高精度な流量計測が可能となる。   From the above results, the frequency of the ultrasonic transducers 10 and 11, the distance (L) of the ultrasonic transducers 10 and 11, and the high so that the propagation phase difference between the propagation path 19 and the propagation path 20 is about 0.2π or less. If the combination of (H1) is set, the influence of the reflected wave can be reduced, and high-accuracy flow rate measurement in a wide measurement range becomes possible. Further, if the distance (L) and the height (H1) are constant, the propagation phase difference can be made smaller by setting the frequency of the ultrasonic transducers 10 and 11 lower, so that the flow rate can be measured with higher accuracy.

なお、実施例2では伝搬経路19、20の伝搬位相差が0.05π〜0.7πとなる高さ(H1)を選択したが、伝搬経路19、20の伝搬位相差が0.05π以下となる高さ(H1)を選択しても構わないし、超音波振動子10、11の距離(L)や周波数を選択しても構わない。   In the second embodiment, the height (H1) at which the propagation phase difference between the propagation paths 19 and 20 is 0.05π to 0.7π is selected. However, the propagation phase difference between the propagation paths 19 and 20 is 0.05π or less. The height (H1) may be selected, or the distance (L) and frequency of the ultrasonic transducers 10 and 11 may be selected.

以下、本発明の実施例3について、図面を参照しながら説明する。   Embodiment 3 of the present invention will be described below with reference to the drawings.

図12は本発明の実施例3における超音波流量計の流路6のa−a’線を横から見た断面図である。図12において8、9、14、15は流路6の側壁部、下板部、上板部で、以上は図2の構成と同様なものである。図2の構成と異なるのは、流量測定部の断面が分割板21a、21bで3分割され、分割流量測定部22a〜22cとなっている点である。   FIG. 12 is a cross-sectional view of the flow path 6 of the ultrasonic flowmeter according to the third embodiment of the present invention as seen from the side. In FIG. 12, 8, 9, 14, and 15 are the side wall part, lower plate part, and upper plate part of the flow path 6, and the above is the same as that of the structure of FIG. The difference from the configuration of FIG. 2 is that the cross section of the flow rate measuring unit is divided into three by the dividing plates 21a and 21b to become divided flow rate measuring units 22a to 22c.

流量測定部7の断面積と被測定流体を供給する配管の内径と同程度としながら高さ(H2)と幅(W2)のアスペクト比(W2/H2)を大きくすると、流路6を小型化しにくい場合がある。そこで、流量計測部7の断面を複数に分割し、それぞれの分割流量測定部の高さと幅のアスペクト比を大きくする手段を考える。   When the aspect ratio (W2 / H2) of the height (H2) and the width (W2) is increased while keeping the cross-sectional area of the flow rate measuring unit 7 and the inner diameter of the pipe supplying the fluid to be measured, the flow path 6 is reduced in size. It may be difficult. Therefore, a means for dividing the cross section of the flow rate measuring unit 7 into a plurality of parts and increasing the aspect ratio between the height and width of each divided flow rate measuring unit will be considered.

まず超音波流量計の流路6の作製方法の一例について簡単に説明する。例えば高さ(H2)と幅(W2)とのアスペクト比(W2/H2)が5である流量測定部7に対し、厚み0.2mmのSUS製の分割板21a、21bを下板部14の内壁面に平行となるよう側壁部8、9に接着剤にて固定する。分割板21a、21bを側壁部8、9に固定した後、上板部15を側壁部8、9の端面にシール材を介してネジどめ固定する。なお分割流量測定部(22a、22c)のアスペクト比は約20、分割流量測定部(22b)のアスペクト比は約17となるように高さ(H2a、H2b、H2c)を設定する。   First, an example of a method for producing the flow path 6 of the ultrasonic flowmeter will be briefly described. For example, with respect to the flow rate measuring unit 7 having an aspect ratio (W2 / H2) of 5 (height (H2) and width (W2)), SUS-made divided plates 21a and 21b having a thickness of 0.2 mm are connected to the lower plate 14. It fixes to the side wall parts 8 and 9 with an adhesive so that it may become parallel to an inner wall surface. After the divided plates 21a and 21b are fixed to the side wall portions 8 and 9, the upper plate portion 15 is screwed and fixed to the end surfaces of the side wall portions 8 and 9 through a sealing material. The height (H2a, H2b, H2c) is set so that the aspect ratio of the divided flow rate measuring units (22a, 22c) is about 20, and the aspect ratio of the divided flow rate measuring unit (22b) is about 17.

また分割流量測定部(22b)には伝搬経路23と伝搬経路24に約0.04πの伝搬位相差が生じ、分割流量測定部(22a)には伝搬経路25と伝搬経路26に約0.1πの伝搬位相差が生じるよう、超音波振動子10、11の距離(L)を選択する。なお超音波振動子10、11の有効放射面は正方形、周波数は270kHzとする。以上のように構成された超音波流量計への超音波振動子の取り付け方法、動作原理は実施例1と同様になるため省略する。   Further, a propagation phase difference of about 0.04π is generated in the propagation path 23 and the propagation path 24 in the divided flow rate measurement unit (22b), and about 0.1π in the propagation path 25 and the propagation path 26 is generated in the divided flow rate measurement unit (22a). The distance (L) between the ultrasonic transducers 10 and 11 is selected so that a propagation phase difference of. The effective radiation surfaces of the ultrasonic transducers 10 and 11 are square and the frequency is 270 kHz. The method of attaching the ultrasonic transducer to the ultrasonic flowmeter configured as described above and the operating principle thereof are the same as those in the first embodiment, and are therefore omitted.

次に分割流量測定部22内での超音波の伝搬について、図13に示すような伝搬経路23〜26を用いて説明する。なお伝搬経路23〜26は代表的な伝搬経路であり、実施例1と同様に図示されていない伝搬経路が存在する。図13は流路6のb−b’線を横から見た断面図である。   Next, propagation of ultrasonic waves in the divided flow rate measuring unit 22 will be described using propagation paths 23 to 26 as shown in FIG. The propagation paths 23 to 26 are typical propagation paths, and there are propagation paths that are not shown in the same manner as in the first embodiment. FIG. 13 is a cross-sectional view of the channel 6 taken along the line b-b ′.

分割流量測定部22bにおいて、直接波は伝搬経路23のように伝搬し、反射波は伝搬経路24のように分割板21bで反射されながら伝搬する。また分割流量測定部22aでは、直接波は伝搬経路25のように伝搬し、反射波は伝搬経路26のように上板部15で反射されながら伝搬する。分割流量測定部22cの高さ(H2c)は分割流量測定部22aの高さ(H2a)と等しく設定してあるので、直接波と反射波の関係は分割流量測定部22aと同様になる。   In the divided flow rate measuring unit 22b, the direct wave propagates like the propagation path 23, and the reflected wave propagates while being reflected by the dividing plate 21b like the propagation path 24. In the divided flow rate measuring unit 22 a, the direct wave propagates like the propagation path 25, and the reflected wave propagates while being reflected by the upper plate part 15 like the propagation path 26. Since the height (H2c) of the divided flow measuring unit 22c is set equal to the height (H2a) of the divided flow measuring unit 22a, the relationship between the direct wave and the reflected wave is the same as that of the divided flow measuring unit 22a.

超音波振動子11では分割流路(H2a、H2b、H2c)内を伝搬する全ての直接波と反射波の合成波を受信波として観測する。実施例2で示したように、直接波と反射波の伝搬位相差が0.2π以下となるように分割流量測定部(22a〜22c)の高さを設定したため、各分割流量測定部22a〜22c内での直接波と反射波の重なり合わせの位相的な関係は、流れにより影響を受けない。この結果、直接波に対する反射波の影響が低減できる。   The ultrasonic transducer 11 observes a combined wave of all direct waves and reflected waves propagating in the divided flow paths (H2a, H2b, H2c) as received waves. As shown in the second embodiment, the heights of the divided flow rate measuring units (22a to 22c) are set so that the propagation phase difference between the direct wave and the reflected wave is 0.2π or less. The topological relationship of the superposition of the direct wave and the reflected wave in 22c is not affected by the flow. As a result, the influence of the reflected wave on the direct wave can be reduced.

上記構成のように流量測定部を3分割し、被測定流体である空気を約6000リットル/時間流して行った実験結果では、超音波振動子10で送信、超音波振動子11で受信での組合せの変化率と超音波振動子11で送信、超音波振動子10で受信での組合せの変化率がほぼ等しくなることを確認した。   As shown in the above configuration, the flow measurement unit is divided into three parts, and the experimental result of flowing the fluid to be measured at about 6000 liters / hour shows that the ultrasonic transducer 10 transmits and the ultrasonic transducer 11 receives. It was confirmed that the rate of change of the combination and the rate of change of the combination in transmission by the ultrasonic transducer 11 and reception by the ultrasonic transducer 10 were almost equal.

以上のように、本発明よれば分割板により流量測定部を複数に分割することにより、反射波の影響を低減でき、さらに流れの安定化も図ることができ、被測定流体の流量を短時間に高精度で測定することができる。  As described above, according to the present invention, by dividing the flow rate measurement unit into a plurality of parts by the dividing plate, the influence of the reflected wave can be reduced, the flow can be stabilized, and the flow rate of the fluid to be measured can be reduced for a short time. Can be measured with high accuracy.

なお実施例3では、流量測定部を3分割したが、直接波に対する反射波の位相差が小さくできるなら2分割でも4分割以上でも構わないし、高さ(H2a〜H2c)の高さは適宜変更して設定しても構わない。また全ての分割流量測定部に超音波が伝搬するとしたが、流量計測の精度が満足可能ならば全ての分割流量測定部に超音波を伝搬させる必要はない。   In the third embodiment, the flow rate measurement unit is divided into three parts. However, if the phase difference of the reflected wave with respect to the direct wave can be reduced, it may be divided into two parts or more than four parts, and the heights (H2a to H2c) are appropriately changed. You can set it. Further, although the ultrasonic wave propagates to all the divided flow rate measuring units, it is not necessary to propagate the ultrasonic wave to all the divided flow rate measuring units if the accuracy of the flow rate measurement can be satisfied.

以下、本発明の実施例4について、図面を参照しながら説明する。   Embodiment 4 of the present invention will be described below with reference to the drawings.

図14は本発明の実施例4における超音波流量計の流路6のb−b’線を横から見た断面図である。図14において8、9、14、15は流路6の側壁部、下板部、上板部で、以上は図3の構成と同様なものである。図3の構成と異なるのは、超音波振動子10、11の中心を結ぶ線27と高さ(H3)の中心線29が平行でかつ同一線上とならないように、超音波振動子10、11を側壁部8、9に配置している点である。   FIG. 14 is a cross-sectional view of the b-b ′ line of the flow path 6 of the ultrasonic flowmeter according to the fourth embodiment of the present invention as viewed from the side. In FIG. 14, 8, 9, 14, and 15 are the side wall part, lower plate part, and upper plate part of the flow path 6, and the above is the same as the structure of FIG. 3 is different from the configuration of FIG. 3 in that the line 27 connecting the centers of the ultrasonic vibrators 10 and 11 and the center line 29 of the height (H3) are parallel and not on the same line. Is disposed on the side walls 8 and 9.

高精度な流量計を得るには反射波の影響を低減することが必要で、下板部14の内壁面からの反射波と上板部15から反射波に伝搬位相差を設けることを考える。その方法の1つとして、下板部14の内壁面からの反射波と上板部15から反射波が異なる位相で超音波振動子に到達するように、流量測定部28の高さ(H3)の中心線29に対し、一対の超音波振動子の中心を結ぶ線27を平行にシフトさせて配置する方法を選択した。   In order to obtain a highly accurate flow meter, it is necessary to reduce the influence of the reflected wave, and it is considered to provide a propagation phase difference between the reflected wave from the inner wall surface of the lower plate portion 14 and the reflected wave from the upper plate portion 15. As one of the methods, the height (H3) of the flow rate measurement unit 28 is set so that the reflected wave from the inner wall surface of the lower plate portion 14 and the reflected wave from the upper plate portion 15 reach the ultrasonic transducer with different phases. A method of arranging the line 27 connecting the centers of the pair of ultrasonic transducers in parallel with respect to the center line 29 is selected.

上記のように構成された超音波流量計の流路の作成方法の一例について説明する。例えば直接波の伝搬経路27と下板部14での反射波の伝搬経路30との伝搬位相差が0.7π、伝搬経路27と上板部15での反射波の伝搬経路31との伝搬位相差が2.2πとなるように、超音波振動子10、11を側壁部8、9にシール材を介してネジどめ固定する。また上板部15を側壁部8、9の端面にシール材を介してネジどめ固定する。なお超音波振動子10、11の距離、有効放射面形状、周波数、被測定流体は実施例1と同様とする。以上のように構成された超音波流量計の動作原理は実施例1と同様になるため省略する。   An example of a method for creating a flow path of the ultrasonic flowmeter configured as described above will be described. For example, the propagation phase difference between the direct wave propagation path 27 and the reflected wave propagation path 30 at the lower plate portion 14 is 0.7π, and the propagation position between the propagation path 27 and the reflected wave propagation path 31 at the upper plate portion 15. The ultrasonic transducers 10 and 11 are screwed and fixed to the side wall portions 8 and 9 via a sealing material so that the phase difference is 2.2π. Further, the upper plate portion 15 is screwed and fixed to the end faces of the side wall portions 8 and 9 through a sealing material. The distance between the ultrasonic transducers 10 and 11, the effective radiation surface shape, the frequency, and the fluid to be measured are the same as those in the first embodiment. Since the operation principle of the ultrasonic flowmeter configured as described above is the same as that of the first embodiment, a description thereof will be omitted.

次に流量測定部28での超音波の伝搬について、伝搬経路の一例を用いて説明する。直接波は中心を結ぶ線27に沿って伝搬し、反射波は下板部14の内壁面で反射される伝搬経路30と上板部15の内壁面で反射される伝搬経路31があり、超音波振動子11の中心付近で受信される。なお図示された直接波と反射波の伝搬経路は代表的な伝搬経路であり、図示されていない伝搬経路も実施例1と同様に存在する。中心を結ぶ線27と中心線29が一致している場合は、伝搬経路30と伝搬経路31の伝搬距離が等しいため伝搬位相差は生じない。しかし、中心を結ぶ線27と中心線29を一致させないと、伝搬経路30と伝搬経路31の伝搬距離が異なるため伝搬位相差が生じる。このため反射波同士が干渉の影響を受け、直接波に対する影響を低減させることが可能となる。   Next, propagation of ultrasonic waves in the flow rate measuring unit 28 will be described using an example of a propagation path. The direct wave propagates along a line 27 that connects the centers, and the reflected wave has a propagation path 30 that is reflected by the inner wall surface of the lower plate portion 14 and a propagation path 31 that is reflected by the inner wall surface of the upper plate portion 15. Received in the vicinity of the center of the acoustic transducer 11. Note that the propagation paths of the direct wave and the reflected wave shown in the figure are typical propagation paths, and there are also propagation paths not shown in the same manner as in the first embodiment. When the line 27 connecting the centers and the center line 29 coincide with each other, the propagation distance between the propagation path 30 and the propagation path 31 is equal, so that no propagation phase difference occurs. However, if the line 27 connecting the centers and the center line 29 are not matched, a propagation phase difference occurs because the propagation distances of the propagation path 30 and the propagation path 31 are different. For this reason, the reflected waves are affected by interference, and the influence on the direct wave can be reduced.

上記構成で空気を約6000リットル/時間流して行った実験では、図8の伝搬位相差が2.2πの結果とほぼ同様の結果になることを確認した。   In an experiment conducted with air flowing at about 6000 liters / hour with the above configuration, it was confirmed that the propagation phase difference in FIG. 8 was almost the same as the result of 2.2π.

以上のように、本発明によれば流量測定部の高さ(H3)の中心線に対し超音波振動子の中心を結ぶ線を平行にシフトさせて配置することにより、下板部と上板部で反射される反射波の伝搬位相差を変えることができ、直接波に対する反射波の影響を低減でき被測定流体の流量を短時間に高精度で測定することができる。   As described above, according to the present invention, the lower plate portion and the upper plate are arranged by shifting the line connecting the centers of the ultrasonic transducers in parallel to the center line of the height (H3) of the flow rate measuring portion. The propagation phase difference of the reflected wave reflected by the unit can be changed, the influence of the reflected wave on the direct wave can be reduced, and the flow rate of the fluid to be measured can be measured with high accuracy in a short time.

なお実施例4では直接波の伝搬経路27と下板部14での反射波の伝搬経路30との伝搬位相差が0.7π、伝搬経路27と上板部15での反射波の伝搬経路31との伝搬位相差が2.2πとなるように、超音波振動子の中心を結ぶ線27と流量計測部の高さ(H7)の中心線29を平行にシフトして配置するとしたが、上記条件に限定されるわけではなく、適宜変えて構成することができる。   In the fourth embodiment, the propagation phase difference between the direct wave propagation path 27 and the reflected wave propagation path 30 at the lower plate portion 14 is 0.7π, and the reflected wave propagation path 31 at the propagation path 27 and the upper plate portion 15. The line 27 connecting the centers of the ultrasonic transducers and the center line 29 of the height (H7) of the flow rate measurement unit are arranged so as to be shifted in parallel so that the propagation phase difference between the two is 2.2π. It is not necessarily limited to the conditions, and can be appropriately changed.

以下、本発明の実施例5について、図面を参照しながら説明する。   Embodiment 5 of the present invention will be described below with reference to the drawings.

図15は本発明の実施例5における超音波流量計の流路6のb−b’線を横から見た断面図である。図15において8、9、14、15は流路6の側壁部、下板部、上板部で、以上は図3の構成と同様なものである。図3の構成と異なるのは、超音波振動子10、11の中心を結ぶ線32と流量測定部36の高さ(H4)の中心線33とが所定の角度(θ4)となるように、超音波振動子10、11を側壁部8、9に斜めに配置している点である。   FIG. 15 is a cross-sectional view of the b-b 'line of the flow path 6 of the ultrasonic flowmeter according to the fifth embodiment of the present invention as viewed from the side. In FIG. 15, 8, 9, 14, and 15 are the side wall part, the lower plate part, and the upper plate part of the flow path 6, and the above is the same as the structure of FIG. The difference from the configuration of FIG. 3 is that the line 32 connecting the centers of the ultrasonic transducers 10 and 11 and the center line 33 of the height (H4) of the flow rate measuring unit 36 are at a predetermined angle (θ4). The ultrasonic transducers 10 and 11 are arranged obliquely on the side wall portions 8 and 9.

実施例4と同様に、高精度な流量計を得るには反射波の影響を低減することが必要で、下板部14の内壁面からの反射波と上板部15から反射波に伝搬位相差を設けることを考える。その方法の1つとして、一対の超音波振動子の中心を結ぶ線32と高さ(H4)の中心線33とが所定の角度(θ4)を有すよう超音波振動子10、11を配置する方法を選択した。   As in the fourth embodiment, in order to obtain a highly accurate flow meter, it is necessary to reduce the influence of the reflected wave, and the propagation wave from the inner wall surface of the lower plate portion 14 to the reflected wave from the upper plate portion 15 is propagated. Consider providing a phase difference. As one of the methods, the ultrasonic transducers 10 and 11 are arranged so that the line 32 connecting the centers of the pair of ultrasonic transducers and the center line 33 of the height (H4) have a predetermined angle (θ4). Selected method to do.

そこで上記のように構成された超音波流量計の流路の作成方法の一例について説明する。例えば高さ(H4)の中心線33に対し、超音波振動子10、11の中心を結ぶ線32が約2.5度だけ傾くように側壁部8、9に超音波振動子10、11をシール材を介してネジどめ固定する。また上板部15を側壁部8、9の端面にシール材を介してネジどめ固定する。なお超音波振動子10、11の距離、有効放射面形状、周波数、被測定流体は実施例1と同様とする。以上のように構成された超音波流量計の動作原理は実施例1と同様になるため省略する。   Therefore, an example of a method for creating a flow path of the ultrasonic flowmeter configured as described above will be described. For example, the ultrasonic transducers 10 and 11 are placed on the side walls 8 and 9 so that the line 32 connecting the centers of the ultrasonic transducers 10 and 11 is inclined by about 2.5 degrees with respect to the center line 33 of the height (H4). Secure with screws through the sealing material. Further, the upper plate portion 15 is screwed and fixed to the end faces of the side wall portions 8 and 9 through a sealing material. The distance between the ultrasonic transducers 10 and 11, the effective radiation surface shape, the frequency, and the fluid to be measured are the same as those in the first embodiment. Since the operation principle of the ultrasonic flowmeter configured as described above is the same as that of the first embodiment, a description thereof will be omitted.

次に流量測定部36での超音波の伝搬について、伝搬経路の一例を用いて説明する。例えば直接波は中心を結ぶ線32に沿って伝搬する。超音波振動子10の中心付近から下板部14と上板部15のそれぞれの方向に同じ角度で放射される伝搬経路34と伝搬経路35を反射波の代表例の1つとして考える。なお図示された直接波と反射波の伝搬経路は代表的な伝搬経路であり、図示されていない伝搬経路も実施例1と同様に存在する。伝搬経路34に沿って伝搬する超音波は下板部14で反射され、伝搬経路35に沿って伝搬する超音波は上板部15で反射される。伝搬経路34と伝搬経路35を伝搬する反射波は、伝搬距離が異なるため伝搬位相差が生じる。   Next, propagation of ultrasonic waves in the flow rate measuring unit 36 will be described using an example of a propagation path. For example, the direct wave propagates along a line 32 connecting the centers. A propagation path 34 and a propagation path 35 radiated at the same angle from the vicinity of the center of the ultrasonic transducer 10 in the respective directions of the lower plate portion 14 and the upper plate portion 15 are considered as one of representative examples of reflected waves. Note that the propagation paths of the direct wave and the reflected wave shown in the figure are typical propagation paths, and there are also propagation paths not shown in the same manner as in the first embodiment. The ultrasonic wave propagating along the propagation path 34 is reflected by the lower plate part 14, and the ultrasonic wave propagating along the propagation path 35 is reflected by the upper plate part 15. The reflected waves propagating through the propagation path 34 and the propagation path 35 have a propagation phase difference because the propagation distances are different.

中心を結ぶ線32と中心線33が一致している場合は、伝搬経路34と伝搬経路35の伝搬距離が等しいため伝搬位相差は生じず、超音波振動子11の同じ位置で受信していた。しかし、中心を結ぶ線32と中心線33が2.5度傾いているため、伝搬経路34と伝搬経路35の伝搬距離が異なり伝搬位相差が生じる。   When the line 32 connecting the centers and the center line 33 coincide with each other, the propagation distance between the propagation path 34 and the propagation path 35 is equal, so that no propagation phase difference occurs, and reception is performed at the same position of the ultrasonic transducer 11. . However, since the line 32 connecting the centers and the center line 33 are inclined by 2.5 degrees, the propagation distance between the propagation path 34 and the propagation path 35 is different, and a propagation phase difference is generated.

さらに超音波振動子11の異なる位置で受信される。このため反射波同士が干渉の影響を受け、直接波に対する影響を低減させることが可能となる。   Furthermore, it is received at a different position of the ultrasonic transducer 11. For this reason, the reflected waves are affected by interference, and the influence on the direct wave can be reduced.

なお実施例5では、高さ(H4)の中心線33に対し超音波振動子10、11の中心を結ぶ線32を約2.5度傾けるとしたが、上記条件に限定されるわけでなく、2.5度よりも大きくしても小さくしても構わない。   In the fifth embodiment, the line 32 connecting the centers of the ultrasonic transducers 10 and 11 is inclined by about 2.5 degrees with respect to the center line 33 of the height (H4). However, the present invention is not limited to the above conditions. The angle may be larger or smaller than 2.5 degrees.

以下、本発明の実施例6について、図面を参照しながら説明する。   Embodiment 6 of the present invention will be described below with reference to the drawings.

図16は本発明の実施例6における超音波流量計の流路の上面図である。また図17は図16の流路のc−c’線を横から見た断面図である。また図18は図16の流路のd−d’線を横から見た断面図である。各図において、37は流路で、38は流路37の上板部で、39は上板部38に設けられた超音波振動子10の取付部aである。40は流路37の下板部で、41は下板部40に設けられた超音波振動子11の取付部bで、42、43は流路37の側壁部で、44は流量測定部である。   FIG. 16 is a top view of the flow path of the ultrasonic flowmeter according to the sixth embodiment of the present invention. FIG. 17 is a cross-sectional view of the flow path of FIG. 16 taken along the line c-c ′. FIG. 18 is a cross-sectional view of the flow path of FIG. 16 taken along the line d-d '. In each figure, 37 is a flow path, 38 is an upper plate portion of the flow path 37, and 39 is a mounting portion a of the ultrasonic transducer 10 provided on the upper plate portion 38. Reference numeral 40 denotes a lower plate portion of the flow path 37, 41 denotes a mounting portion b of the ultrasonic transducer 11 provided on the lower plate portion 40, 42 and 43 denote side wall portions of the flow path 37, and 44 denotes a flow rate measurement portion. is there.

高精度な流量計を得るには反射波の影響を低減することが必要で、反射波の中でも特に1回反射の反射波の影響を低減することが重要となる。また流速分布の観点から、高さ(H5)と幅(W5)のアスペクト比(W5/H5)を大きくしたい場合もある。そこで流量測定部44の形状にかかわらず、流量測定部44内で1回反射が生じない位置に一対の超音波振動子を配置する方法について考える。   In order to obtain a highly accurate flow meter, it is necessary to reduce the influence of the reflected wave, and it is important to reduce the influence of the reflected wave of a single reflection among the reflected waves. In some cases, from the viewpoint of the flow velocity distribution, it is desired to increase the aspect ratio (W5 / H5) of the height (H5) and the width (W5). Therefore, a method of arranging a pair of ultrasonic transducers at a position where no reflection occurs once in the flow measurement unit 44 regardless of the shape of the flow measurement unit 44 will be considered.

上記のように構成された超音波流量計の流路の作成方法の一例について説明する。流路37を構成する上板部38、下板部40、取付部39、41、側壁部42、43に用いる材料は被測定流体に対して化学変化を生じない材質を用いる。   An example of a method for creating a flow path of the ultrasonic flowmeter configured as described above will be described. The material used for the upper plate portion 38, the lower plate portion 40, the mounting portions 39 and 41, and the side wall portions 42 and 43 constituting the flow path 37 is a material that does not cause a chemical change with respect to the fluid to be measured.

本実施例では被測定流体を例えば空気としたため、材質にはABS樹脂を選択した。まず上板部38の長軸方向と超音波振動子10の取付方向d−d’の角度(θ5)が例えば30度となるように取付部39を上板部38に接着固定する。下板部40の長軸方向と超音波振動子11の取付方向d−d’の角度(θ5)も30度となるように取付部41を上板部40に接着固定する。この上板部38を側壁部42、43の端面にシール剤を介してネジ止めし、断面形状が矩形の流量測定部44を構成する。次に超音波振動子10、11の中心を結ぶ線47とd−d’断面の高さ(H5)の中心線となす角(θ6)が30度となるように、取付部39、41に超音波振動子10、11をシール材45、46を介して固定する。   In this embodiment, since the fluid to be measured is air, for example, ABS resin is selected as the material. First, the attachment portion 39 is bonded and fixed to the upper plate portion 38 so that the angle (θ5) between the major axis direction of the upper plate portion 38 and the attachment direction d-d ′ of the ultrasonic transducer 10 is, for example, 30 degrees. The attachment portion 41 is bonded and fixed to the upper plate portion 40 so that the angle (θ5) between the major axis direction of the lower plate portion 40 and the attachment direction d-d ′ of the ultrasonic transducer 11 is also 30 degrees. The upper plate portion 38 is screwed to the end faces of the side wall portions 42 and 43 via a sealant to form a flow rate measuring portion 44 having a rectangular cross-sectional shape. Next, the attachment portions 39 and 41 are arranged so that the angle (θ6) between the line 47 connecting the centers of the ultrasonic transducers 10 and 11 and the center line of the height (H5) of the dd ′ section is 30 degrees. The ultrasonic transducers 10 and 11 are fixed via the sealing materials 45 and 46.

なお超音波振動子10、11の距離、有効放射面形状、周波数は実施例1と同様とする。以上のように構成された超音波流量計の動作原理は実施例1と同様になるため説明を省略する。   The distance, the effective radiation surface shape, and the frequency of the ultrasonic transducers 10 and 11 are the same as those in the first embodiment. Since the operating principle of the ultrasonic flowmeter configured as described above is the same as that of the first embodiment, description thereof is omitted.

次に流量測定部44内での超音波の伝搬について図18に示すような伝搬経路47〜49を用いて説明する。なお伝搬経路47〜49は代表的な伝搬経路であり、図示されていない伝搬経路も存在する。超音波振動子10から送信された直接波は伝搬経路47に沿って超音波振動子11に伝搬する。超音波振動子10から送信される超音波は一般的に広がりながら伝搬するため、伝搬経路48、49に沿って伝搬する超音波も存在する。しかし伝搬経路48に沿って伝搬した超音波は、下板部40で反射されたのち、流量測定部44の壁面でもう1回反射され超音波振動子11に到達することはできない。また伝搬経路49に沿って伝搬した超音波も側壁部42で反射されたのち、流量測定部44の壁面でもう1回反射され超音波振動子11に到達することはできない。このような位置関係に配置された超音波振動子10、11においては、流量測定部44で1回だけ反射されて受信される反射波は存在しない。この結果、直接波に影響を与える反射波は2回反射以上であり、2回反射以上の反射波が直接波に与える影響は1回反射の反射波に比べるとかなり小さいため、反射波の影響が低減できる。   Next, propagation of ultrasonic waves in the flow rate measurement unit 44 will be described using propagation paths 47 to 49 as shown in FIG. Propagation paths 47 to 49 are typical propagation paths, and there are also propagation paths not shown. The direct wave transmitted from the ultrasonic transducer 10 propagates along the propagation path 47 to the ultrasonic transducer 11. Since ultrasonic waves transmitted from the ultrasonic transducer 10 generally propagate while spreading, ultrasonic waves that propagate along the propagation paths 48 and 49 also exist. However, the ultrasonic wave propagated along the propagation path 48 is reflected by the lower plate part 40 and then reflected once again by the wall surface of the flow rate measuring part 44 and cannot reach the ultrasonic transducer 11. Further, the ultrasonic wave propagated along the propagation path 49 is also reflected by the side wall portion 42 and then reflected once again by the wall surface of the flow rate measuring unit 44 and cannot reach the ultrasonic transducer 11. In the ultrasonic transducers 10 and 11 arranged in such a positional relationship, there is no reflected wave reflected and received only once by the flow rate measuring unit 44. As a result, the reflected wave that affects the direct wave is reflected twice or more, and the influence of the reflected wave that is reflected twice or more on the direct wave is considerably smaller than the reflected wave of the single reflection. Can be reduced.

上記のように構成した流量測定部44を用い、被測定流体である空気を約6000リットル/時間流して行った実験結果では、実施例1の伝搬位相差が2.2πと同等の結果になることを確認した。この結果より、流路37の長軸方向と流量測定部44の高さ(H5)方向のそれぞれに角度(θ5、θ6)を有し、1回反射の反射波が生じない位置に1対の超音波振動子10、11を配置すれば、流量測定部44の断面寸法に依存せずに被測定流体の流量を広範囲に高精度で測定することができる。   In the experimental result obtained by using the flow rate measuring unit 44 configured as described above and flowing air as the fluid to be measured at about 6000 liters / hour, the propagation phase difference of Example 1 is equivalent to 2.2π. It was confirmed. From this result, there is a pair of angles at positions where the major axis direction of the flow path 37 and the height (H5) direction of the flow rate measurement unit 44 have angles (θ5, θ6) and no reflected wave of one-time reflection occurs. If the ultrasonic transducers 10 and 11 are arranged, the flow rate of the fluid to be measured can be measured over a wide range with high accuracy without depending on the cross-sectional dimension of the flow rate measuring unit 44.

なお実施例6では、流路37の長軸方向と超音波振動子の取付方向d−d’の角度(θ5)が30度、一対の超音波振動子の中心を結ぶ線47と高さ(H5)の中心線とのなす角(θ6)が30度傾けるとしたが、上記条件に限定されるわけでなく、適当な角度に変えて構成することができる。   In Example 6, the angle (θ5) between the major axis direction of the flow path 37 and the attachment direction dd ′ of the ultrasonic transducer is 30 degrees, and the height (line 47) connecting the centers of the pair of ultrasonic transducers ( Although the angle (θ6) formed with the center line of H5) is inclined by 30 degrees, it is not limited to the above conditions, and can be configured by changing to an appropriate angle.

以下、本発明の実施例7について、図面を参照しながら説明する。   Embodiment 7 of the present invention will be described below with reference to the drawings.

図19は本発明の実施例7における超音波流量計の流路6のa−a’線を横から見た断面図である。図19において8、9、14、15は流路6の側壁部、下板部、上板部で、以上は図2の構成と同様なものである。図2の構成と異なるのは、流量測定部52を層状に分割しない寸法を有す構造体50、51が側壁部8、9に配置されている点である。   FIG. 19 is a cross-sectional view of the flow path 6 of the ultrasonic flowmeter according to the seventh embodiment of the present invention as viewed from the side. In FIG. 19, 8, 9, 14, and 15 are the side wall part, the lower plate part, and the upper plate part of the flow path 6, and the above is the same as the structure of FIG. 2 is that the structures 50 and 51 having dimensions that do not divide the flow rate measuring unit 52 into layers are arranged on the side wall portions 8 and 9.

反射波の影響を低減するため、反射波と直接波の伝搬位相差を所望の大きさに設定するよう流量測定部52に反射板を設ける方法について考える。  In order to reduce the influence of the reflected wave, consider a method of providing a reflecting plate in the flow rate measuring unit 52 so as to set the propagation phase difference between the reflected wave and the direct wave to a desired magnitude.

上記のように構成された超音波流量計の流路の作成方法の一例について説明する。例えば流量測定部52に対し、厚み0.2mm、長さ(L6)が7mmのSUS製の2枚の構造体50a、50bを下板部14の内壁面に平行となるよう超音波振動子10が配置されている側壁部8に接着剤にて固定する。同様に超音波振動子11が配置されている側壁部9にも構造体51a、51bを接着剤にて固定する。構造体50および構造体51を側壁部8、9に固定した後、上板部15を側壁部8、9の端面にシール材を介してネジどめ固定する。なお超音波振動子10、11の距離、有効放射面形状、周波数、被測定流体は実施例1と同様とする。以上のように構成された超音波流量計への超音波振動子の取り付け方法、動作原理は実施例1と同様になるため省略する。   An example of a method for creating a flow path of the ultrasonic flowmeter configured as described above will be described. For example, with respect to the flow rate measuring unit 52, the ultrasonic transducer 10 is configured so that two SUS structures 50 a and 50 b having a thickness of 0.2 mm and a length (L6) of 7 mm are parallel to the inner wall surface of the lower plate part 14. It fixes to the side wall part 8 by which an adhesive is arrange | positioned with an adhesive agent. Similarly, the structural bodies 51a and 51b are also fixed to the side wall portion 9 where the ultrasonic transducer 11 is disposed with an adhesive. After the structure 50 and the structure 51 are fixed to the side wall portions 8 and 9, the upper plate portion 15 is screwed and fixed to the end surfaces of the side wall portions 8 and 9 through a sealing material. The distance between the ultrasonic transducers 10 and 11, the effective radiation surface shape, the frequency, and the fluid to be measured are the same as those in the first embodiment. The method of attaching the ultrasonic transducer to the ultrasonic flowmeter configured as described above and the operating principle thereof are the same as those in the first embodiment, and are therefore omitted.

次に流量測定部52内での超音波の伝搬について、図20に示すような伝搬経路53、54を用いて説明する。なお伝搬経路53、54は代表的な伝搬経路であり、実施例1と同様に図示されていない伝搬経路も存在する。図20は流路6のb−b’線を横から見た断面図である。直接波は伝搬経路53に沿って伝搬する。また反射波は伝搬経路54のように構造体50a、下板部14で反射を繰り返しながら伝搬する。伝搬経路54で伝搬する反射波は、上板部15で一回のみ反射する伝搬経路より伝搬距離が延びる。また構造体51により受信を阻害される図示されていない反射波の伝搬経路も存在する。このため直接波に対する反射波の影響を低減することが可能となる。   Next, propagation of ultrasonic waves in the flow rate measuring unit 52 will be described using propagation paths 53 and 54 as shown in FIG. The propagation paths 53 and 54 are typical propagation paths, and there are also propagation paths that are not shown in the same manner as in the first embodiment. FIG. 20 is a cross-sectional view of the channel 6 taken along the line b-b ′. The direct wave propagates along the propagation path 53. Further, the reflected wave propagates while being repeatedly reflected by the structure 50 a and the lower plate portion 14 like the propagation path 54. The reflected wave propagating through the propagation path 54 has a propagation distance longer than that of the propagation path that is reflected only once by the upper plate portion 15. There is also a propagation path of a reflected wave (not shown) that is blocked by the structure 51. For this reason, it becomes possible to reduce the influence of the reflected wave on the direct wave.

以上のように、本発明よれば構造体により直接波と反射波の伝搬位相差を所望の大きさにすることができるため、反射波の影響を低減でき被測定流体の流量を短時間に高精度で測定することができる。   As described above, according to the present invention, the propagation phase difference between the direct wave and the reflected wave can be set to a desired magnitude by the structure, so that the influence of the reflected wave can be reduced and the flow rate of the fluid to be measured can be increased in a short time. It can be measured with accuracy.

なお実施例7では構造体の厚みを0.2mm、長さ(L6)を7mm、SUS製としたが、上記条件に限定されるわけではなく、寸法、材質を適宜変えて構成することができる。また構造体50、51を側壁部8、9に接着固定するとしたが、側壁部8、9以外の場所に配置してもよい。また構造体の枚数を全部で4枚としたが、1枚以上ならば何枚でも構わない。   In Example 7, the thickness of the structure is 0.2 mm, the length (L6) is 7 mm, and the product is SUS. However, the structure is not limited to the above-described conditions, and the structure and the material can be appropriately changed. . In addition, the structural bodies 50 and 51 are bonded and fixed to the side wall portions 8 and 9, but they may be disposed in places other than the side wall portions 8 and 9. Although the total number of structures is four, any number may be used as long as it is one or more.

以下、本発明の実施例8について、図面を参照しながら説明する。   Embodiment 8 of the present invention will be described below with reference to the drawings.

図21は本発明の実施例8における超音波流量計の流路6のa−a’線を横から見た断面図である。図21において8、9、14、15は流路6の側壁部、下板部、上板部で、以上は図2の構成と同様なものである。図2の構成と異なるのは、流量測定部56を層状に分割しない構造体55a、55bが下板部14、上板部15に配置されている点である。   FIG. 21 is a cross-sectional view of the a-a ′ line of the flow channel 6 of the ultrasonic flowmeter according to the eighth embodiment of the present invention as seen from the side. In FIG. 21, 8, 9, 14, and 15 are the side wall part, the lower plate part, and the upper plate part of the flow path 6, and the above is the same as the structure of FIG. The difference from the configuration of FIG. 2 is that the structures 55 a and 55 b that do not divide the flow rate measurement unit 56 into layers are arranged in the lower plate unit 14 and the upper plate unit 15.

高精度な流量計を得るには反射波の影響を低減することが必要で、反射波が受信されにくいよう流量測定部56に反射板を設ける方法について考える。   In order to obtain a highly accurate flow meter, it is necessary to reduce the influence of the reflected wave, and a method of providing a reflector on the flow rate measuring unit 56 so that the reflected wave is difficult to receive will be considered.

上記のように構成された超音波流量計の流路の作成方法の一例について説明する。例えば流量測定部56に対し、厚み0.2mm、長さ(L7)が1mmのSUS製の構造体55a、55bを下板部14、上板部15の内壁面に垂直で、幅(W7)の中央部あたりとなるよう接着剤にて固定する。構造体55を固定した後、上板部15を側壁部8、9の端面にシール材を介してネジどめ固定する。なお超音波振動子10、11の距離、有効放射面形状、周波数、被測定流体は実施例1と同様とする。以上のように構成された超音波流量計への超音波振動子の取り付け方法、動作原理は実施例1と同様になるため省略する。   An example of a method for creating a flow path of the ultrasonic flowmeter configured as described above will be described. For example, the SUS structures 55a and 55b having a thickness of 0.2 mm and a length (L7) of 1 mm are perpendicular to the inner wall surfaces of the lower plate portion 14 and the upper plate portion 15, and the width (W7). Fix it with an adhesive so that it is around the center of the. After the structural body 55 is fixed, the upper plate portion 15 is screwed and fixed to the end surfaces of the side wall portions 8 and 9 through a sealing material. The distance between the ultrasonic transducers 10 and 11, the effective radiation surface shape, the frequency, and the fluid to be measured are the same as those in the first embodiment. The method of attaching the ultrasonic transducer to the ultrasonic flowmeter configured as described above and the operating principle thereof are the same as those in the first embodiment, and are therefore omitted.

次に流量測定部56での超音波の伝搬について、図22に示すような伝搬経路57、58を用いて説明する。なお伝搬経路57、58は代表的な伝搬経路であり、実施例1と同様に図示されていない伝搬経路も存在する。図22は流路6のb−b’線を横から見た断面図である。超音波振動子10から送信された超音波は広がりながら伝搬し、例えば直接波は伝搬経路57に沿って伝搬する。また広がった超音波は上板部15や下板部14で反射され、超音波振動子11で反射波として受信される。しかし構造体55aを上板部15に設けることにより、例えば伝搬経路58の反射波は構造体55aにより伝搬を阻害される。このため、伝搬経路58での反射波は超音波振動子11では受信されない。反射波の伝搬経路は伝搬経路58以外にも存在するが、構造体55a、55bによって反射波の一部の伝搬が阻害できるため、直接波に対する反射波の影響を低減することが可能となる。   Next, propagation of ultrasonic waves in the flow rate measurement unit 56 will be described using propagation paths 57 and 58 as shown in FIG. Note that the propagation paths 57 and 58 are typical propagation paths, and there are also propagation paths not shown in the same manner as in the first embodiment. FIG. 22 is a cross-sectional view of the channel 6 taken along the line b-b ′. The ultrasonic wave transmitted from the ultrasonic transducer 10 propagates while spreading. For example, a direct wave propagates along the propagation path 57. The spread ultrasonic waves are reflected by the upper plate portion 15 and the lower plate portion 14 and are received as reflected waves by the ultrasonic transducer 11. However, by providing the structural body 55a on the upper plate portion 15, for example, the reflected wave of the propagation path 58 is inhibited from propagating by the structural body 55a. For this reason, the reflected wave on the propagation path 58 is not received by the ultrasonic transducer 11. Although the propagation path of the reflected wave exists in addition to the propagation path 58, since the propagation of a part of the reflected wave can be inhibited by the structures 55a and 55b, the influence of the reflected wave on the direct wave can be reduced.

以上のように、本発明よれば構造体により反射波の一部の伝搬を阻害できるため、構造体を配置する位置および枚数を適切に選択することにより反射波の影響を低減でき被測定流体の流量を短時間に高精度で測定することができる。   As described above, according to the present invention, since the propagation of a part of the reflected wave can be inhibited by the structure, the influence of the reflected wave can be reduced by appropriately selecting the position and the number of the structures to be arranged. The flow rate can be measured with high accuracy in a short time.

なお実施例8では構造体55a、55bの厚みを0.2mm、長さ(L7)を1mm、SUS製で、幅(W7)の中央あたりに位置するとしたが、上記条件に限定されるわけではなく、寸法、位置、材質を適宜変えて構成することができる。また構造体55a、55bを下板部10、上板部15上に接着固定するとしたが、下板部14、上板部15以外の場所に配置しても構わない。また構造体を2枚配置したが、1枚以上ならば何枚でも構わない。   In Example 8, the thickness of the structural bodies 55a and 55b is 0.2 mm, the length (L7) is 1 mm, made of SUS, and is located around the center of the width (W7), but is not limited to the above conditions. The size, position, and material can be appropriately changed. Further, although the structural bodies 55a and 55b are bonded and fixed on the lower plate portion 10 and the upper plate portion 15, they may be disposed in places other than the lower plate portion 14 and the upper plate portion 15. In addition, although two structural bodies are arranged, any number may be used as long as the number is one or more.

以下、本発明の実施例9について、図面を参照しながら説明する。   Embodiment 9 of the present invention will be described below with reference to the drawings.

図23は本発明の実施例9における超音波流量計の流路6のa−a’線を横から見た断面図である。図23において8、9、14、15は流路6の側壁部、下板部、上板部で、以上は図2の構成と同様なものである。図2の構成と異なるのは、下板部14に凹部59と、凹部59の上方にメッシュ構造体60を設けた点である。   FIG. 23 is a cross-sectional view of the a-a ′ line of the flow channel 6 of the ultrasonic flowmeter according to the ninth embodiment of the present invention as viewed from the side. In FIG. 23, 8, 9, 14, and 15 are the side wall part, lower board part, and upper board part of the flow path 6, and the above is the same as that of the structure of FIG. The difference from the configuration of FIG. 2 is that a recess 59 is provided in the lower plate portion 14 and a mesh structure 60 is provided above the recess 59.

流量測定部61の高さ(H8)と幅(W8)のアスペクト比(W8/H8)を大きくしながら反射波の影響を低減するため、流量測定部61に凹部を設け、さらにその凹部に流れを乱さないようメッシュ構造体を設ける方法について考える。   In order to reduce the influence of the reflected wave while increasing the aspect ratio (W8 / H8) between the height (H8) and the width (W8) of the flow rate measuring unit 61, the flow rate measuring unit 61 is provided with a recess and further flows into the recess. Consider a method of providing a mesh structure so as not to disturb.

上記のように構成された超音波流量計の流路の作成方法の一例について説明する。例えばアスペクト比(W8/H8)が5である流量測定部61の下板部14の中央付近に、伝搬経路62と伝搬経路63の伝搬位相差が2.2πとなるよう凹部59をフライス盤を用い構成する。凹部59には被測定流体である空気の流れが生じないように、凹部59を覆うようにメッシュ構造体を上方に固定する。   An example of a method for creating a flow path of the ultrasonic flowmeter configured as described above will be described. For example, in the vicinity of the center of the lower plate part 14 of the flow rate measuring unit 61 having an aspect ratio (W8 / H8) of 5, a recess 59 is used by using a milling machine so that the propagation phase difference between the propagation path 62 and the propagation path 63 is 2.2π. Constitute. The mesh structure is fixed upward so as to cover the recess 59 so that the flow of air, which is the fluid to be measured, does not occur in the recess 59.

メッシュ構造体は超音波が透過するように、例えばメッシュサイズは100番程度とする。また伝搬経路62と伝搬経路64の伝搬位相差が1.2πとなるように、上板部15を、側壁部8、9の端面にシール材を介してネジどめ固定する。   For example, the mesh size is about 100 so that the ultrasonic wave can be transmitted through the mesh structure. Further, the upper plate portion 15 is screwed and fixed to the end surfaces of the side wall portions 8 and 9 with a sealing material so that the propagation phase difference between the propagation path 62 and the propagation path 64 becomes 1.2π.

なお超音波振動子10、11の距離、有効放射面形状、周波数、被測定流体は実施例1と同様とする。以上のように構成された超音波流量計への超音波振動子の取り付け方法、動作原理は実施例1と同様になるため省略する。  The distance between the ultrasonic transducers 10 and 11, the effective radiation surface shape, the frequency, and the fluid to be measured are the same as those in the first embodiment. The method of attaching the ultrasonic transducer to the ultrasonic flowmeter configured as described above and the operating principle thereof are the same as those in the first embodiment, and are therefore omitted.

次に流量測定部61での超音波の伝搬について、図24に示すような伝搬経路の一例を用いて説明する。図24は流路6のb−b’線を横から見た断面図である。直接波は伝搬経路62に沿って伝搬する。一方下板部14での反射波は伝搬経路63のように凹部59の底部で反射され伝搬する。また上板部15での反射波は伝搬経路64のように反射され伝搬する。なお伝搬経路62〜64は代表的な伝搬経路であり、実施例1と同様に図示されていない伝搬経路も存在する。またメッシュ構造体60を透過せず、メッシュ構造体60の表面で反射される反射波も存在する。   Next, the propagation of ultrasonic waves in the flow rate measuring unit 61 will be described using an example of a propagation path as shown in FIG. FIG. 24 is a cross-sectional view of the flow path 6 taken along the line b-b ′. The direct wave propagates along the propagation path 62. On the other hand, the reflected wave at the lower plate portion 14 is reflected and propagated at the bottom of the recess 59 like the propagation path 63. The reflected wave at the upper plate portion 15 is reflected and propagates like a propagation path 64. The propagation paths 62 to 64 are typical propagation paths, and there are also propagation paths that are not shown in the same manner as in the first embodiment. There are also reflected waves that do not pass through the mesh structure 60 and are reflected by the surface of the mesh structure 60.

伝搬経路62と伝搬経路63の伝搬位相差が2.2π、伝搬経路62と伝搬経路64の伝搬位相差が1.2πとしたため、それぞれの反射波の伝搬経路分布が異なり、下板部14と上板部15からの反射波同士が干渉の影響を受ける。このように下板部14の構成と上板部15の構成を非対称にすることにより、直接波に対する影響が低減できる。また凹部59にはメッシュ構造体60が設けてあるため、空気は凹部59を除く流量測定部61を流れ、流れに対し乱れを生じない。また超音波は凹部59を含む流量測定部61を伝搬させることができる。   Since the propagation phase difference between the propagation path 62 and the propagation path 63 is 2.2π and the propagation phase difference between the propagation path 62 and the propagation path 64 is 1.2π, the propagation path distribution of each reflected wave is different, and the lower plate portion 14 and Reflected waves from the upper plate portion 15 are affected by interference. Thus, by making the configuration of the lower plate portion 14 and the configuration of the upper plate portion 15 asymmetric, the influence on the direct wave can be reduced. Moreover, since the mesh structure 60 is provided in the recessed part 59, air flows through the flow rate measuring unit 61 excluding the recessed part 59, and does not disturb the flow. Further, the ultrasonic wave can propagate through the flow rate measuring unit 61 including the recess 59.

以上のように、本発明よれば構造体により直接波と反射波の伝搬位相差を所望の大きさにすることができるうえ、測定流量範囲において安定した流速分布を実現できるため、反射波の影響を低減でき被測定流体の流量を短時間に高精度で測定することができる。   As described above, according to the present invention, the propagation phase difference between the direct wave and the reflected wave can be set to a desired size by the structure, and a stable flow velocity distribution can be realized in the measurement flow rate range. The flow rate of the fluid to be measured can be measured with high accuracy in a short time.

なお第9の実施例では伝搬経路62と伝搬経路63の伝搬位相差が2.2πとなるよう凹部59を設けたが、上記条件に限定されるわけではなく、適宜変えて構成することができる。また凹部59の上方に100番程のメッシュ構造体60を設けるとしたが、その他のメッシュ構造体でも構わないし、凹部59が流れに対し測定上問題になる影響を与えないなら設ける必要はない。また凹部59を下板部14の中央付近に設けるとしたが、反射波の影響を低減するため必要な場所に必要な数だけ設ければよく、上板部15にも設けてもいいし、凹部59だけでなく凸部を設けても構わない。   In the ninth embodiment, the concave portion 59 is provided so that the propagation phase difference between the propagation path 62 and the propagation path 63 is 2.2π. However, the present invention is not limited to the above-described conditions, and can be appropriately changed. . In addition, although about 100 mesh structures 60 are provided above the recesses 59, other mesh structures may be used. If the recesses 59 do not affect the flow in terms of measurement, they need not be provided. In addition, the concave portion 59 is provided near the center of the lower plate portion 14, but it may be provided in a necessary number in a necessary place in order to reduce the influence of the reflected wave, and may be provided in the upper plate portion 15. Not only the concave portion 59 but also a convex portion may be provided.

以下、本発明の実施例10について、図面を参照しながら説明する。   Hereinafter, Example 10 of this invention is described, referring drawings.

図25は本発明の実施例10における超音波流量計の流路6を上から見た断面図である。図25において6は流路、8、9は流路6の側壁部で、以上は図1の構成と同様なものである。図1の構成と異なるのは、超音波振動子10、11の中心を結ぶ線65に対し超音波振動子10の中心方向66を上流側にθ10(約5度)、超音波振動子11の中心方向67を下流側にθ11(約5度)だけずらして配置した点である。流路の作成方法、超音波振動子の取り付け方法、動作原理は実施例1と同様なため省略する。また超音波振動子10、11の距離、放射面形状、周波数被測定流体は実施例1と同様とする。   FIG. 25 is a cross-sectional view of the flow path 6 of the ultrasonic flowmeter according to the tenth embodiment of the present invention as viewed from above. In FIG. 25, 6 is a flow path, 8 and 9 are side walls of the flow path 6, and the above is the same as the structure of FIG. The difference from the configuration of FIG. 1 is that the center direction 66 of the ultrasonic transducer 10 is θ10 (about 5 degrees) upstream of the line 65 connecting the centers of the ultrasonic transducers 10 and 11, and the ultrasonic transducer 11 The center direction 67 is shifted from the downstream side by θ11 (about 5 degrees). Since the method for creating the flow path, the method for attaching the ultrasonic transducer, and the operating principle are the same as those in the first embodiment, the description thereof is omitted. The distance between the ultrasonic transducers 10 and 11, the radiation surface shape, and the frequency fluid to be measured are the same as those in the first embodiment.

一般的に超音波振動子の指向性は超音波振動子の中心方向に強い傾向がある。   In general, the directivity of an ultrasonic transducer tends to be strong in the central direction of the ultrasonic transducer.

このため開空間では超音波振動子10、11の指向性を一致させて対向した場合、受信電圧は最も大きくできる。ところが流路6のような閉空間で超音波の送受信を行う場合、受信される反射波も比較的強い指向性の部分であるため大きな受信電圧となり、直接波に対する影響が大きくなってしまう。そこで、中心を結ぶ線65に対し中心方向66、67をθ10、θ11だけずらして超音波振動子10、11を配置する。このような配置では直接波の受信電圧は下がるが、反射波は比較的弱い指向性の部分となるので反射波の受信電圧も小さくなり反射波の影響を小さくすることが可能となる。   For this reason, in the open space, when the directivities of the ultrasonic transducers 10 and 11 are made to coincide with each other, the reception voltage can be maximized. However, when ultrasonic waves are transmitted and received in a closed space such as the flow path 6, the received reflected wave is also a portion having a relatively strong directivity, so that the received voltage becomes a large reception voltage and the influence on the direct wave is increased. Therefore, the ultrasonic transducers 10 and 11 are arranged by shifting the central directions 66 and 67 by θ10 and θ11 with respect to the line 65 connecting the centers. In such an arrangement, the reception voltage of the direct wave is lowered, but the reflected wave becomes a relatively weak directivity portion, so the reception voltage of the reflected wave is also reduced, and the influence of the reflected wave can be reduced.

超音波振動子10の中心方向66を下流側に、超音波振動子11の中心方向67を上流側に約5度ずらした構成で実施例1と同様に空気を約6000リットル/時間流して行った実験では図7の伝搬位相差が2π程度と同程度の結果が得られた。   In the same manner as in Example 1, the center direction 66 of the ultrasonic transducer 10 is shifted to the downstream side, and the center direction 67 of the ultrasonic transducer 11 is shifted to the upstream side by about 6000 liters / hour as in the first embodiment. In the experiment, the result that the propagation phase difference of FIG. 7 is about 2π was obtained.

以上のように、本発明によれば超音波振動子の中心を結ぶ線と超音波振動子の中心線をずらして配置することにより、直接波に対する反射波の影響を低減でき被測定流体の流量を短時間に高精度で測定することができる。   As described above, according to the present invention, the influence of the reflected wave on the direct wave can be reduced by shifting the line connecting the centers of the ultrasonic transducers and the center line of the ultrasonic transducers. Can be measured with high accuracy in a short time.

なお実施例10では65超音波振動子の中心を結ぶ線に対し超音波振動子の中心方向66、67を5度ずらすとしたが、上記条件に限定されるわけではなく、角度を適宜変えて構成することができる。また超音波振動子10、11の中心線をずらす方向を流れの上流側、下流側としたが、下板部方向、上板部方向でも、どの方向の組み合わせでも構わない。   In Example 10, the ultrasonic transducer center directions 66 and 67 are shifted by 5 degrees with respect to the line connecting the centers of the 65 ultrasonic transducers. However, the present invention is not limited to the above conditions, and the angle is appropriately changed. Can be configured. In addition, the direction in which the center lines of the ultrasonic transducers 10 and 11 are shifted is the upstream side and the downstream side of the flow, but any combination of the lower plate direction and the upper plate portion direction may be used.

以下、本発明の実施例11について、図面を参照しながら説明する。   Embodiment 11 of the present invention will be described below with reference to the drawings.

図26は本発明の実施例11における超音波流量計の配管への取り付け状態を示す局所断面図である。図26において10a、11aは取り付け口で、14、15は流路6の下板部、上板部で、68は整流手段で、69は流量測定部で、70、71は配管である。図示していない流量測定部69の構成は、実施例1から実施例10のいずれかの構成と同様とする。実施例1から実施例10と異なるのは、流量測定部69に整流手段68を設けた点である。例えば整流手段68はアルミ製のハニカム構造体からなり、空気の流れにより移動しないよう下板部14、上板部15と図示していない側壁部に接着剤により接着固定する。超音波流量計の流路の組み立て方法、超音波振動子の取り付け方法、動作原理は実施例1と同様になるため省略する。   FIG. 26 is a local cross-sectional view showing a state in which the ultrasonic flowmeter according to the eleventh embodiment of the present invention is attached to a pipe. In FIG. 26, 10a and 11a are attachment ports, 14 and 15 are the lower plate portion and upper plate portion of the flow path 6, 68 is a rectifying means, 69 is a flow rate measuring portion, and 70 and 71 are pipes. The configuration of the flow rate measuring unit 69 (not shown) is the same as that of any one of the first to tenth embodiments. The difference from the first embodiment to the tenth embodiment is that the flow measuring unit 69 is provided with a rectifying means 68. For example, the rectifying means 68 is made of an aluminum honeycomb structure, and is bonded and fixed to the lower plate portion 14 and the upper plate portion 15 and a side wall portion (not shown) with an adhesive so as not to move due to the flow of air. The method of assembling the flow path of the ultrasonic flowmeter, the method of attaching the ultrasonic transducer, and the operating principle are the same as those in the first embodiment, and will not be described.

次に整流手段の動作について説明する。一般的に流量測定では流速分布や流れの方向を安定化するため、流量計測部の上流側に直径に対し十分長い(10倍程度)直管部を設ける。しかし超音波流量計を小型化や設置場所の制限により流量計測部69の上流側に直径に対し十分長い直管部を設けることは困難で、さらに配管70を流路6に垂直に取り付ける場合もある。このような構成では、空気は流れの方向が乱れた状態で流量測定部69を流れ、測定精度に影響を与えてしまう。   Next, the operation of the rectifying means will be described. Generally, in flow rate measurement, in order to stabilize the flow velocity distribution and the flow direction, a straight pipe portion that is sufficiently long (about 10 times) with respect to the diameter is provided on the upstream side of the flow rate measurement portion. However, it is difficult to provide a straight pipe portion sufficiently long with respect to the diameter on the upstream side of the flow rate measuring portion 69 due to downsizing of the ultrasonic flow meter and restrictions on the installation location. is there. In such a configuration, air flows through the flow rate measuring unit 69 in a state where the flow direction is disturbed, and affects the measurement accuracy.

そこで、配管70から流量測定部69に流入する空気の流れを安定化するためハニカム構造を有す整流手段68を設ける。整流手段68を通過した空気は流れの方向が均一化され、下板部14や上板部15に対しほぼ平行となる。   Therefore, a rectifying means 68 having a honeycomb structure is provided to stabilize the flow of air flowing from the pipe 70 into the flow rate measuring unit 69. The flow direction of the air that has passed through the rectifying means 68 is made uniform, and is substantially parallel to the lower plate portion 14 and the upper plate portion 15.

以上のように、本発明によれば整流手段68を流量測定部69の上流側に設けることにより流れの方向を安定化することができ、実施例1から実施例10の反射波の影響を低減する手段と組みあわせることにより、測定流体の流量を短時間に高精度で測定することができる。   As described above, according to the present invention, the flow direction can be stabilized by providing the rectifying means 68 on the upstream side of the flow rate measuring unit 69, and the influence of the reflected wave in the first to tenth embodiments is reduced. By combining with the means to perform, the flow rate of the measurement fluid can be measured with high accuracy in a short time.

なお第11の実施例では整流手段68をアルミ製のハニカム構造体としたが、整流効果が得られるならばパイプ、網目構造体、平板でも構わないし、SUSのような金属や樹脂、複合体でも構わない。配管70、71を上板部15に垂直に取り付けるとしたが、上板部15以外の部位に取り付けても構わないし、また水平に取り付けても構わない。整流手段68を上流側に設けるとしたが、上流側と下流側の両方に設けても構わない。   In the eleventh embodiment, the rectifying means 68 is made of an aluminum honeycomb structure. However, if the rectifying effect is obtained, it may be a pipe, a mesh structure, a flat plate, or a metal, resin, or composite such as SUS. I do not care. Although the pipes 70 and 71 are attached vertically to the upper plate portion 15, they may be attached to portions other than the upper plate portion 15 or may be attached horizontally. Although the rectifying means 68 is provided on the upstream side, it may be provided on both the upstream side and the downstream side.

また実施例1〜3、7では高さ(H0、H1、H2、H6)と超音波振動子10、11の高さが等しくなるよう図示しているが、高さ(H0、H1、H2、H6)より超音波振動子10、11の高さを低くしても高くしても構わない。   In the first to third and seventh embodiments, the heights (H0, H1, H2, H6) and the ultrasonic transducers 10 and 11 are shown to be equal, but the heights (H0, H1, H2, From H6), the height of the ultrasonic transducers 10 and 11 may be lowered or increased.

また実施例1〜5、7〜11では超音波振動子10、11を側壁部8、9に流れに対し斜めに設けるとしたが、流れが計測可能ならば側壁部8、9以外の場所に配置して構わないし、流れに対し平行となる位置に配置しても構わない。また流量測定部の断面形状を矩形としたが、超音波振動子10、11を流れに対し平行となる位置に配置するなら、円形や楕円形でも構わない。   In the first to fifth and seventh to eleventh embodiments, the ultrasonic transducers 10 and 11 are provided on the side wall portions 8 and 9 obliquely with respect to the flow. You may arrange | position and may arrange | position in the position parallel to a flow. Although the cross-sectional shape of the flow rate measuring unit is rectangular, it may be circular or elliptical if the ultrasonic transducers 10 and 11 are arranged at positions parallel to the flow.

また実施例1〜11では超音波振動子10、11の有効放射面は正方形としたが、上記条件に限定されるわけではなく、円形、楕円形、他の多角形でも構わない。また超音波振動子10、11の周波数は270kHzとしたが、上記条件に限定されるわけではなく、270kHz以上でも以下でも構わない。また流量測定部の断面形状を矩形としたが、上記形状に限定されるわけでなく、矩形の一部を変形した形状、矩形以外の多角形でも構わない。また被測定流体を空気としたが、空気以外の例えばLPガスや都市ガスのような気体や水のような液体でも構わない。また流路6の材質をABS樹脂としたが、被測定流体によって化学的変化を受けない材質ならばなんでもよく、被測定流体がLPガス、都市ガス等であればSUSやアルミダイカストのような金属でも構わない。圧力損失を少なくするため一般的に流量測定部の断面積は、被測定流体を供給する配管の内径と同程度とするとしたが、必要に応じて断面積を大きくしても小さくしても構わない。   In the first to eleventh embodiments, the effective radiation surfaces of the ultrasonic transducers 10 and 11 are square, but are not limited to the above conditions, and may be circular, elliptical, or other polygonal shapes. Moreover, although the frequency of the ultrasonic transducers 10 and 11 is 270 kHz, it is not limited to the above condition, and may be 270 kHz or higher or lower. Moreover, although the cross-sectional shape of the flow rate measuring unit is rectangular, it is not limited to the above shape, and a shape obtained by deforming a part of the rectangle or a polygon other than the rectangle may be used. Although the fluid to be measured is air, it may be a gas other than air, such as LP gas or city gas, or a liquid such as water. In addition, although the material of the flow path 6 is ABS resin, any material can be used as long as it is not subject to chemical change by the fluid to be measured. If the fluid to be measured is LP gas, city gas, etc., metal such as SUS or aluminum die casting It doesn't matter. In order to reduce the pressure loss, the cross-sectional area of the flow rate measuring unit is generally set to be approximately the same as the inner diameter of the pipe supplying the fluid to be measured. However, the cross-sectional area may be increased or decreased as necessary. Absent.

また本発明の超音波流量計を家庭用ガスメータを想定した超音波式ガスメータや被測定流体の流速を測定する流速計に用いても構わない。また複数の実施例の構成を組みあわせてよいことは言うまでもない。   The ultrasonic flow meter of the present invention may be used for an ultrasonic gas meter assuming a household gas meter or a flow meter for measuring the flow velocity of a fluid to be measured. Needless to say, the configurations of a plurality of embodiments may be combined.

以上のように本発明の第1の超音波流量計は、一対の超音波振動子と、前記一対の超音波振動子間を超音波が伝搬する時間を計測する計測部と、前記計測部の出力に基づいて、流量測定部を流れる流体の量を計算する計算部とを備え、前記流量測定部の壁面によって反射される反射波が前記測定結果に与える影響が低減されるように、前記流量測定部と前記一対の超音波振動子とが構成されているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   As described above, the first ultrasonic flowmeter of the present invention includes a pair of ultrasonic transducers, a measurement unit that measures the time during which ultrasonic waves propagate between the pair of ultrasonic transducers, A calculation unit that calculates the amount of fluid flowing through the flow rate measurement unit based on the output, and the flow rate is reduced so that the influence of the reflected wave reflected by the wall surface of the flow rate measurement unit on the measurement result is reduced Since the measurement unit and the pair of ultrasonic transducers are configured, the influence of the reflected wave in the flow rate measurement unit can be reduced, and a highly accurate ultrasonic flowmeter can be obtained.

また第2の超音波流量計は、超音波を用いて流体の流量を測定する超音波流量計において、一対の超音波振動子と、前記一対の超音波振動子間を超音波が伝搬する時間を計測する計測部と、前記計測部の出力に基づいて流量測定部を流れる流体の量を計算する計算部とを備え、前記流量測定部は当該流量測定部の壁面に反射することなく前記流量測定部を流れる流体中を伝搬する直接波と前記流量測定部の壁面によって反射される反射波との間の位相差が測定結果に影響を与える構成で、前記直接波と前記反射波との位相差が前記測定結果に与える影響が低減されるように、前記流量測定部と前記一対の超音波振動子とが構成されているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   The second ultrasonic flowmeter is an ultrasonic flowmeter that measures the flow rate of fluid using ultrasonic waves, and a time during which ultrasonic waves propagate between the pair of ultrasonic transducers and the pair of ultrasonic transducers. And a calculation unit for calculating the amount of fluid flowing through the flow rate measurement unit based on the output of the measurement unit, the flow rate measurement unit without reflecting on the wall surface of the flow rate measurement unit The phase difference between the direct wave propagating in the fluid flowing through the measurement unit and the reflected wave reflected by the wall surface of the flow rate measurement unit affects the measurement result. Since the flow measurement unit and the pair of ultrasonic transducers are configured so that the influence of the phase difference on the measurement result is reduced, the influence of the reflected wave in the flow measurement unit can be reduced, and high accuracy An ultrasonic flowmeter can be obtained.

また第3の超音波流量計は、超音波を用いて流体の流量を測定する超音波流量計において、一対の超音波振動子と、前記一対の超音波振動子間を超音波が伝搬する時間を計測する計測部と、前記計測部の出力に基づいて流量測定部を流れる流体の量を計算する計算部とを備え、前記流量測定部は当該流量測定部の壁面に反射することなく前記流量測定部を流れる流体中を伝搬する直接波と前記流量測定部の壁面によって反射される反射波との間の位相差が測定結果に影響を与える構成で、前記直接波と前記反射波との位相差が前記測定結果に与える影響が低減されるように、前記一対の超音波振動子の周波数と、前記一対の超音波振動子間の距離と、前記流量測定部の断面形状に関連するパラメータとの組合せによって特徴づけられるため、簡易な構成で流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   The third ultrasonic flowmeter is an ultrasonic flowmeter that measures the flow rate of fluid using ultrasonic waves, and a time during which ultrasonic waves propagate between the pair of ultrasonic transducers and the pair of ultrasonic transducers. And a calculation unit for calculating the amount of fluid flowing through the flow rate measurement unit based on the output of the measurement unit, the flow rate measurement unit without reflecting on the wall surface of the flow rate measurement unit The phase difference between the direct wave propagating in the fluid flowing through the measurement unit and the reflected wave reflected by the wall surface of the flow rate measurement unit affects the measurement result. Parameters related to the frequency of the pair of ultrasonic transducers, the distance between the pair of ultrasonic transducers, and the cross-sectional shape of the flow rate measurement unit so that the influence of the phase difference on the measurement result is reduced. To be characterized by a combination of In easy Do construction can reduce the influence of the reflected wave in the flow measurement section, it is possible to obtain a high-precision ultrasonic flowmeter.

また第4の超音波流量計は、第3の超音波流量計において、前記直接波は、前記一対の超音波振動子の中心を結ぶ直線に沿って伝搬する波であり、前記反射波は、前記一対の超音波振動子の中心と前記流量測定部の壁面上の点とを結ぶことによって形成される二等辺三角形の二等辺に沿って伝搬する波であり、前記直接波の伝搬距離と前記反射波の伝搬距離との差から生じる伝搬位相差が3π/2以上であるため、簡易な構成で流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   Further, the fourth ultrasonic flowmeter is the third ultrasonic flowmeter, wherein the direct wave is a wave propagating along a straight line connecting the centers of the pair of ultrasonic transducers, and the reflected wave is A wave propagating along the isosceles of an isosceles triangle formed by connecting the center of the pair of ultrasonic transducers and a point on the wall surface of the flow rate measurement unit, and the propagation distance of the direct wave and the Since the propagation phase difference resulting from the difference from the propagation distance of the reflected wave is 3π / 2 or more, the influence of the reflected wave in the flow measurement unit can be reduced with a simple configuration, and a highly accurate ultrasonic flow meter can be obtained. it can.

また第5の超音波流量計は、第3の超音波流量計において、前記直接波は、前記一対の超音波振動子の中心を結ぶ直線に沿って伝搬する波であり、前記反射波は、前記流量測定部の壁面によって1回だけ反射される波であり、前記直接波の伝搬時間に比べ前記反射波の最短伝搬時間が長くなるよう前記一対の超音波振動子の有効放射面の1つの辺あるい直径を前記流量測定部の高さより短くしたため、簡易な構成で流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   Further, the fifth ultrasonic flowmeter is the third ultrasonic flowmeter, wherein the direct wave is a wave propagating along a straight line connecting the centers of the pair of ultrasonic transducers, and the reflected wave is One of the effective radiation surfaces of the pair of ultrasonic transducers is a wave that is reflected only once by the wall surface of the flow rate measuring unit and has a minimum propagation time of the reflected wave longer than a propagation time of the direct wave. Since the side or diameter is made shorter than the height of the flow measurement unit, the influence of reflected waves in the flow measurement unit can be reduced with a simple configuration, and a highly accurate ultrasonic flow meter can be obtained.

また第6の超音波流量計は、第4または第5の超音波流量計において、前記一対の超音波振動子の周波数は所定値以上に設定されているため、流量測定部内での反射波の影響を低減でき、時間分解能も向上できるので、さらに高精度な超音波流量計を得ることができる。   Further, the sixth ultrasonic flow meter is the fourth or fifth ultrasonic flow meter, and the frequency of the pair of ultrasonic transducers is set to a predetermined value or higher, so that the reflected wave in the flow measurement unit Since the influence can be reduced and the time resolution can be improved, a more accurate ultrasonic flowmeter can be obtained.

また第7の形態の超音波流量計は、第3の超音波流量計において、前記直接波は、前記一対の超音波振動子の中心を結ぶ直線に沿って伝搬する波であり、前記反射波は、前記一対の超音波振動子の中心と前記流量測定部の壁面上の点とを結ぶことによって形成される二等辺三角形の二等辺に沿って伝搬する波であり、前記直接波の伝搬距離と前記反射波の伝搬距離との差から生じる伝搬位相差が0.2π以下であるため、簡易な構成で流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   An ultrasonic flowmeter according to a seventh aspect is the third ultrasonic flowmeter, wherein the direct wave is a wave propagating along a straight line connecting the centers of the pair of ultrasonic transducers, and the reflected wave Is a wave propagating along the isosceles of the isosceles triangle formed by connecting the center of the pair of ultrasonic transducers and the point on the wall surface of the flow rate measuring unit, and the propagation distance of the direct wave The propagation phase difference resulting from the difference between the reflected wave and the propagation distance of the reflected wave is 0.2π or less, so that the influence of the reflected wave in the flow measurement unit can be reduced with a simple configuration, and a highly accurate ultrasonic flowmeter is obtained. be able to.

また第8の超音波流量計は、第7の超音波流量計において、前記超音波流量計は、前記流量測定部を複数の部分に分割する少なくとも1つ以上の分割板をさらに備えているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   In addition, the eighth ultrasonic flow meter is the seventh ultrasonic flow meter, and the ultrasonic flow meter further includes at least one dividing plate that divides the flow rate measuring unit into a plurality of portions. The influence of the reflected wave in the flow rate measuring unit can be reduced, and a highly accurate ultrasonic flow meter can be obtained.

また第9の超音波流量計は、第8の超音波流量計において、前記一対の超音波振動子の周波数は所定値以下に設定されているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   The ninth ultrasonic flowmeter is the eighth ultrasonic flowmeter, and the frequency of the pair of ultrasonic transducers is set to a predetermined value or less, so that the influence of the reflected wave in the flow measurement unit is reduced. And a high-accuracy ultrasonic flowmeter can be obtained.

また第10の超音波流量計は、第1〜5、7のいづれかの超音波流量計において、前記流量測定部の断面形状は矩形であり、前記流量測定部の断面形状に関連するパラメータは前記矩形の高さであるため、簡易な構成で流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   The tenth ultrasonic flowmeter is any one of the first to fifth and seventh ultrasonic flowmeters, and the cross-sectional shape of the flow rate measurement unit is rectangular, and the parameters related to the cross-sectional shape of the flow rate measurement unit are Since the height is rectangular, the influence of the reflected wave in the flow rate measuring unit can be reduced with a simple configuration, and a highly accurate ultrasonic flow meter can be obtained.

また第11の超音波流量計は、第1〜5、7のいづれかの超音波流量計において、前記流量測定部の断面形状は円であり、前記流量測定部の断面形状に関連するパラメータは前記円の直径であるため、簡易な構成で流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   The eleventh ultrasonic flowmeter is any one of the first to fifth and seventh ultrasonic flowmeters, and the cross-sectional shape of the flow rate measurement unit is a circle, and the parameters related to the cross-sectional shape of the flow rate measurement unit are Since the diameter is a circle, the influence of the reflected wave in the flow rate measurement unit can be reduced with a simple configuration, and a highly accurate ultrasonic flow meter can be obtained.

また第12の形態の超音波流量計は、第1〜5、7のいづれかの超音波流量計において、前記一対の超音波振動子は、前記一対の超音波振動子の中心を結ぶ線が前記流量測定部の断面の所定方向の中心線に対してシフトするように配置されるため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   The ultrasonic flowmeter of the twelfth aspect is the ultrasonic flowmeter of any one of the first to fifth and seventh, wherein the pair of ultrasonic transducers has a line connecting the centers of the pair of ultrasonic transducers. Since it arrange | positions so that it may shift with respect to the centerline of the predetermined direction of the cross section of a flow measurement part, the influence of the reflected wave in a flow measurement part can be reduced, and a highly accurate ultrasonic flowmeter can be obtained.

また第13の超音波流量計は、第12の超音波流量計において、前記一対の超音波振動子の中心を結ぶ線と前記流量測定部の断面の所定方向の中心線とは互いに平行であるため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   Further, the thirteenth ultrasonic flowmeter is the twelfth ultrasonic flowmeter, wherein a line connecting the centers of the pair of ultrasonic transducers and a center line in a predetermined direction of the cross section of the flow rate measuring unit are parallel to each other. Therefore, the influence of the reflected wave in the flow rate measurement unit can be reduced, and a highly accurate ultrasonic flow meter can be obtained.

また第14の超音波流量計は、第12の超音波流量計において、前記一対の超音波振動子の中心を結ぶ線と前記流量測定部の断面の所定方向の中心線とは所定の角度をなしているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   Further, the fourteenth ultrasonic flowmeter is the twelfth ultrasonic flowmeter, wherein a line connecting the centers of the pair of ultrasonic transducers and a central line in a predetermined direction of the cross section of the flow rate measuring unit form a predetermined angle. Therefore, the influence of the reflected wave in the flow rate measurement unit can be reduced, and a highly accurate ultrasonic flow meter can be obtained.

また第15の超音波流量計は、第1または第2の超音波流量計において、前記超音波流量計は、前記流量測定部の壁面によって1回だけ反射される反射波の発生を阻止する構成をさらに備えているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   Further, the fifteenth ultrasonic flow meter is the first or second ultrasonic flow meter, and the ultrasonic flow meter is configured to prevent generation of a reflected wave that is reflected only once by the wall surface of the flow measuring unit. Therefore, the influence of the reflected wave in the flow rate measurement unit can be reduced, and a highly accurate ultrasonic flow meter can be obtained.

また第16の超音波流量計は、第15の超音波流量計において、前記一対の超音波振動子の中心を結ぶ線と前記流量測定部の断面の所定方向の中心線とは所定の角度をなしているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   The sixteenth ultrasonic flowmeter is the fifteenth ultrasonic flowmeter, wherein a line connecting the centers of the pair of ultrasonic transducers and a central line in a predetermined direction of the cross section of the flow rate measuring unit form a predetermined angle. Therefore, the influence of the reflected wave in the flow rate measurement unit can be reduced, and a highly accurate ultrasonic flow meter can be obtained.

また第17の超音波流量計は、第1または第2の超音波流量計において、前記超音波流量計は、前記流量測定部に設けられた少なくとも1つの構造体をさらに備えているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   In addition, the seventeenth ultrasonic flow meter is the first or second ultrasonic flow meter, and the ultrasonic flow meter further includes at least one structure provided in the flow measurement unit. The influence of the reflected wave in the measurement unit can be reduced, and a highly accurate ultrasonic flow meter can be obtained.

また第18の超音波流量計は、第17の超音波流量計において、前記少なくとも1つの構造体は、前記一対の超音波振動子の近傍に配置されているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   The eighteenth ultrasonic flowmeter is the seventeenth ultrasonic flowmeter in which the at least one structure is disposed in the vicinity of the pair of ultrasonic transducers, and therefore the reflected wave in the flow measurement unit. Therefore, a highly accurate ultrasonic flowmeter can be obtained.

また第19の超音波流量計は、第17の超音波流量計において、前記少なくとも1つの構造体は、前記流量測定部の壁面に配置されているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   Further, the 19th ultrasonic flowmeter is the 17th ultrasonic flowmeter, wherein the at least one structure is arranged on the wall surface of the flow rate measuring unit, and therefore the influence of the reflected wave in the flow rate measuring unit is reduced. An ultrasonic flowmeter with high accuracy can be obtained.

本発明の第20の形態の超音波流量計は、第1または第2の形態の超音波流量計において、前記流量測定部の壁面には、少なくとも1つ以上の凹部または凸部が設けられているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   An ultrasonic flow meter according to a twentieth aspect of the present invention is the ultrasonic flow meter according to the first or second aspect, wherein at least one concave or convex portion is provided on the wall surface of the flow measuring unit. Therefore, the influence of the reflected wave in the flow rate measurement unit can be reduced, and a highly accurate ultrasonic flow meter can be obtained.

また第21の超音波流量計は、第20の超音波流量計において、前記超音波流量計は、前記凹部を覆うメッシュ構造体をさらに備えているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   The twenty-first ultrasonic flowmeter is the twentieth ultrasonic flowmeter, and the ultrasonic flowmeter further includes a mesh structure that covers the concave portion. An ultrasonic flowmeter with high accuracy can be obtained.

また第22の超音波流量計は、第1〜5、7のいづれかの超音波流量計において、前記一対の超音波振動子は、前記一対の超音波振動子の中心を結ぶ線と前記一対の超音波振動子の少なくとも一方の指向性を示す方向とが所定の角度をなすように配置されているため、流量測定部内での反射波の影響を低減でき、高精度な超音波流量計を得ることができる。   The twenty-second ultrasonic flowmeter may be any one of the first to fifth and seventh ultrasonic flowmeters, and the pair of ultrasonic transducers may include a line connecting a center of the pair of ultrasonic transducers and the pair of ultrasonic transducers. Since the ultrasonic transducer is arranged so as to form a predetermined angle with the direction of directivity of at least one of the ultrasonic transducers, it is possible to reduce the influence of the reflected wave in the flow measurement unit and obtain a highly accurate ultrasonic flow meter be able to.

また第23の超音波流量計は、第1から第22の超音波流量計において、少なくとも前記流量測定部の上流側に流れの方向を整える整流手段を有しており、流量測定部内の流れの方向を均一化でき、さらに高精度な超音波流量計を得ることができる。   Further, the 23rd ultrasonic flow meter has a rectifying means for adjusting the flow direction at least upstream of the flow rate measurement unit in the first to 22nd ultrasonic flow meters, The direction can be made uniform, and an ultrasonic flowmeter with higher accuracy can be obtained.

図1は、本発明の実施例1における超音波流量計の構成図である。FIG. 1 is a configuration diagram of an ultrasonic flowmeter according to the first embodiment of the present invention. 図2は、同流量計におけるa−a’線を横から見た断面図である。FIG. 2 is a cross-sectional view of the flow meter as seen from the side along the line a-a ′. 図3は、同流量計におけるb−b’線を横から見た断面図である。FIG. 3 is a cross-sectional view of a b-b ′ line of the flow meter as viewed from the side. 図4Aは、流量測定部内での超音波の伝搬経路分布計算結果を示す図である。FIG. 4A is a diagram showing a calculation result of an ultrasonic propagation path distribution in the flow rate measurement unit. 図4Bは、流量測定部内での超音波の伝搬経路分布計算結果を示す図である。FIG. 4B is a diagram showing the calculation result of the propagation path distribution of ultrasonic waves in the flow rate measuring unit. 図5Aは、超音波の受信波の計算結果を示す図である。FIG. 5A is a diagram illustrating a calculation result of an ultrasonic wave. 図5Bは、超音波の受信波の計算結果を示す図である。FIG. 5B is a diagram illustrating a calculation result of an ultrasonic wave reception. 図6は、同流量計における相対受信電圧を示す特性図である。FIG. 6 is a characteristic diagram showing a relative received voltage in the flow meter. 図7は、同流量計における受信電圧の変化率を示す特性図である。FIG. 7 is a characteristic diagram showing the rate of change in received voltage in the same flow meter. 図8は、本発明の実施例2における超音波流量計のa−a’線を横から見た断面図である。FIG. 8 is a cross-sectional view of the ultrasonic flowmeter according to the second embodiment of the present invention as seen from the side along the line a-a ′. 図9は、同流量計におけるb−b’線を横から見た断面図である。FIG. 9 is a cross-sectional view of the flow meter as viewed from the b-b ′ line. 図10は、同流量計における相対受信電圧を示す特性図である。FIG. 10 is a characteristic diagram showing a relative received voltage in the flow meter. 図11は、同流量計における受信電圧の変化率を示す特性図である。FIG. 11 is a characteristic diagram showing the rate of change in received voltage in the same flow meter. 図12は、本発明の実施例3における超音波流量計のa−a’線を横から見た断面図である。FIG. 12 is a cross-sectional view of the ultrasonic flowmeter according to the third embodiment of the present invention as seen from the side along the line a-a ′. 図13は、同流量計におけるb−b’線を横から見た断面図である。FIG. 13 is a cross-sectional view of a b-b ′ line of the flow meter as viewed from the side. 図14は、本発明の実施例4における超音波流量計のb−b’線を横から見た断面図である。FIG. 14 is a cross-sectional view of the ultrasonic flowmeter according to the fourth embodiment of the present invention as viewed from the b-b ′ line. 図15は、本発明の実施例5における超音波流量計のb−b’線を横から見た断面図である。FIG. 15 is a cross-sectional view of the ultrasonic flowmeter according to the fifth embodiment of the present invention as viewed from the b-b ′ line. 図16は、本発明の実施例6における超音波流量計の上面図である。FIG. 16 is a top view of the ultrasonic flowmeter according to the sixth embodiment of the present invention. 図17は、同流量計におけるc−c’線を横から見た断面図である。FIG. 17 is a cross-sectional view of a c-c ′ line of the flow meter as viewed from the side. 図18は、同流量計におけるd−d’線を横から見た断面図である。FIG. 18 is a cross-sectional view of the d-d ′ line of the flow meter as viewed from the side. 図19は、本発明の実施例7における超音波流量計のa−a’線を横から見た断面図である。FIG. 19 is a cross-sectional view of the ultrasonic flowmeter according to the seventh embodiment of the present invention as viewed from the side along the line a-a ′. 図20は、同流量計におけるb−b’線を横から見た断面図である。FIG. 20 is a cross-sectional view of a b-b ′ line of the flow meter as viewed from the side. 図21は、本発明の実施例8における超音波流量計のa−a’線を横から見た断面図である。FIG. 21 is a cross-sectional view of the ultrasonic flowmeter according to the eighth embodiment of the present invention as seen from the side along the line a-a ′. 図22は、同流量計におけるb−b’線を横から見た断面図である。FIG. 22 is a cross-sectional view of a b-b ′ line of the flow meter as viewed from the side. 図23は、本発明の実施例9における超音波流量計のa−a’線を横から見た断面図である。FIG. 23 is a cross-sectional view of the ultrasonic flowmeter according to the ninth embodiment of the present invention as viewed from the side along the line a-a ′. 図24は、同流量計におけるb−b’線を横から見た断面図である。FIG. 24 is a cross-sectional view of the flow meter as viewed from the b-b ′ line. 図25は、本発明の実施例10における超音波流量計を上から見た断面図である。FIG. 25 is a cross-sectional view of the ultrasonic flowmeter according to the tenth embodiment of the present invention as viewed from above. 図26は、本発明の実施例11における超音波流量計の配管への取り付け状態を示す局所断面図である。FIG. 26 is a local cross-sectional view showing a state in which the ultrasonic flowmeter according to the eleventh embodiment of the present invention is attached to a pipe. 図27Aは、従来の超音波流量計の構成図である。FIG. 27A is a configuration diagram of a conventional ultrasonic flowmeter. 図27Bは、従来の超音波流量計の構成図である。FIG. 27B is a configuration diagram of a conventional ultrasonic flowmeter.

符号の説明Explanation of symbols

7 流量測定部
10 超音波振動子
11 超音波振動子
12 計測部
13 計算部
7 Flow measurement unit 10 Ultrasonic transducer 11 Ultrasonic transducer 12 Measurement unit 13 Calculation unit

Claims (3)

超音波を用いて流体の流量を測定する超音波流量計において、
流体が流れる流量計測部と、前記流体中を伝搬する超音波を送受信する一対の超音波振動子と、前記一対の超音波振動子間を超音波が伝搬する時間を計測する計測部と、前記計測部の出力に基づいて前記流量測定部を流れる流体の量を計算する計算部とを備え、
前記一対の超音波振動子は、前記流量測定部の壁面に反射することなく流体中を伝搬する直接波と前記流量測定部の壁面によって反射され流体中を伝搬する反射波を重ね合わせた受信波を受信する関係に配置され、
前記反射波に伝搬位相差を設けるために、前記一対の超音波振動子の中心を結ぶ直線が前記流量測定部の断面の中心線に対してシフトするように構成され、少なくとも流量測定部の上流側に流れの方向を整える整流手段を備え、
前記反射波同士の干渉効果を高めることで、直接波に対する影響を低減するようにした、超音波流量計。
In an ultrasonic flowmeter that measures the flow rate of fluid using ultrasonic waves,
A flow rate measurement unit through which a fluid flows; a pair of ultrasonic transducers that transmit and receive ultrasonic waves propagating in the fluid; a measurement unit that measures a time during which ultrasonic waves propagate between the pair of ultrasonic transducers; A calculation unit that calculates the amount of fluid flowing through the flow rate measurement unit based on the output of the measurement unit;
The pair of ultrasonic transducers is a received wave obtained by superimposing a direct wave propagating in the fluid without reflecting on the wall surface of the flow rate measuring unit and a reflected wave reflected on the wall surface of the flow rate measuring unit and propagating in the fluid. Is placed in a relationship to receive
In order to provide a propagation phase difference in the reflected wave, a straight line connecting the centers of the pair of ultrasonic transducers is configured to shift with respect to the center line of the cross section of the flow rate measurement unit, and at least upstream of the flow rate measurement unit With rectifying means to adjust the flow direction
The ultrasonic flowmeter which reduced the influence with respect to a direct wave by raising the interference effect of the said reflected waves .
前記一対の超音波振動子の中心を結ぶ線と前記流量測定部の断面の中心線とは互いに平行である、請求項1に記載の超音波流量計。   The ultrasonic flowmeter according to claim 1, wherein a line connecting the centers of the pair of ultrasonic transducers and a center line of a cross section of the flow rate measuring unit are parallel to each other. 前記流量測定部を形成する両側壁部に配置される前記一対の超音波振動子中心を結ぶ線前記流量計測部の高さ方向に対して所定の角度を有して取り付けられる請求項1に記載の超音波流量計。
The flow of the pair of ultrasonic transducers disposed on both side walls forming the measurement unit according to claim 1 which is a line connecting the centers mounted at a predetermined angle with respect to the height direction of the flow measuring unit The ultrasonic flowmeter described in 1.
JP2003274374A 1997-04-18 2003-07-14 Ultrasonic flow meter Expired - Fee Related JP3907613B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003274374A JP3907613B2 (en) 1997-04-18 2003-07-14 Ultrasonic flow meter

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10142397 1997-04-18
JP2003274374A JP3907613B2 (en) 1997-04-18 2003-07-14 Ultrasonic flow meter

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP54545198A Division JP3556232B2 (en) 1997-04-18 1998-04-16 Ultrasonic flow meter

Publications (2)

Publication Number Publication Date
JP2004004115A JP2004004115A (en) 2004-01-08
JP3907613B2 true JP3907613B2 (en) 2007-04-18

Family

ID=30445371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003274374A Expired - Fee Related JP3907613B2 (en) 1997-04-18 2003-07-14 Ultrasonic flow meter

Country Status (1)

Country Link
JP (1) JP3907613B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006064626A (en) * 2004-08-30 2006-03-09 Toyo Gas Meter Kk Flow measuring device
JP4931550B2 (en) * 2006-10-27 2012-05-16 リコーエレメックス株式会社 Ultrasonic flow meter
JP2008107287A (en) * 2006-10-27 2008-05-08 Ricoh Elemex Corp Ultrasonic flow meter
JP4949951B2 (en) * 2007-07-06 2012-06-13 リコーエレメックス株式会社 Ultrasonic flow meter

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57194313A (en) * 1981-05-26 1982-11-29 Oval Eng Co Ltd Ultrasonic flow meter for gas
JPS586236U (en) * 1981-07-07 1983-01-14 横河電機株式会社 Ultrasonic transducer
JPH05223608A (en) * 1992-02-18 1993-08-31 Tokimec Inc Ultrasonic flowmeter
JPH09236462A (en) * 1996-03-01 1997-09-09 Aichi Tokei Denki Co Ltd Ultrasonic flow meter

Also Published As

Publication number Publication date
JP2004004115A (en) 2004-01-08

Similar Documents

Publication Publication Date Title
JP3556232B2 (en) Ultrasonic flow meter
JPWO1998048247A1 (en) ultrasonic flow meter
US7363174B2 (en) Apparatus and method for measuring a fluid flow rate profile using acoustic doppler effect
US8701501B2 (en) Ultrasonic flowmeter
EP2639560B1 (en) Ultrasonic flow rate measurement device
JP3916162B2 (en) Ultrasonic flow meter
JP2895704B2 (en) Ultrasonic flow meter
JP3907613B2 (en) Ultrasonic flow meter
JP3570315B2 (en) Ultrasonic flow meter and gas meter using it
JP2004279224A (en) Ultrasonic flow meter
JP5070620B2 (en) Ultrasonic flow meter and flow measurement method
CA2557099A1 (en) Doppler type ultrasonic flow meter
JP6982737B2 (en) Ultrasonic flow meter
JP3583114B2 (en) Ultrasonic flow velocity measuring device
JP3013596B2 (en) Transmission ultrasonic flowmeter
JP4804872B2 (en) Ultrasonic flow meter
JP2001208585A (en) Flowmeter
WO2026014420A1 (en) Ultrasonic flowmeter
JP2000304583A (en) Measurement part of ultrasonic flowmeter
JP2006138667A (en) Ultrasonic flow meter and fluid leak detection device
NO20221413A1 (en) A non-invasive non-intrusive clamp-on transducer wedge and a method for arranging a transducer to a pipe or conduit for wave transmission along chordal paths in a fluid inside the pipe or conduit
JP2023120485A (en) Vibration Propagation Member, Transducer, Velocity Meter, Flow Meter Using the Same
JPH1144561A (en) Ultrasonic flow rate and flow velocity meter
JP4346458B2 (en) Ultrasonic flow meter
JP4007861B2 (en) Ultrasonic flow meter

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050415

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20061010

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20061207

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070116

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070116

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110126

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110126

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120126

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130126

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140126

Year of fee payment: 7

LAPS Cancellation because of no payment of annual fees