JP3918652B2 - Excimer lamp - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an excimer lamp using excimer light emission from excimer molecules generated by discharge of a discharge gas, and more particularly to a means for realizing a long excimer lamp that enables irradiation of a large area.
[0002]
[Prior art]
Conventionally, excimer lamps have been used as light sources for surface treatment by irradiation with vacuum ultraviolet light in semiconductor manufacturing processes and liquid crystal plate manufacturing processes. The excimer lamp uses discharge light such as a rare gas disposed between a pair of electrodes to form excimer molecules, and uses light emitted in the process of dissociating the excimer molecules. For example, a discharge gas such as xenon is sealed in a discharge space formed by arranging a large-diameter cylindrical quartz glass tube and a small-diameter quartz glass tube as a double cylindrical tube, and the outside of the double cylindrical tube A first electrode is disposed on the outer wall of the tube, a second electrode is disposed on the inner side of the inner tube, and a high frequency voltage is applied between the electrodes to generate a discharge.
[0003]
FIG. 4 shows a schematic configuration diagram of a conventional excimer lamp. The excimer lamp 51 includes a discharge vessel composed of a substantially cylindrical tubular outer tube 52 and an inner tube 53 made of quartz glass, a discharge gas 58 such as a rare gas sealed in the discharge vessel 54, and the outer tube. The light-transmitting first electrode 55 provided on the outer wall 52 and the second electrode 56 provided on the inner surface of the inner tube 53 are configured. A high frequency high voltage power source 57 is connected between the first electrode 55 and the second electrode 56, and a high frequency high voltage is supplied between the electrodes to discharge the discharge gas 58, thereby excimer. Excimer light emitted in the process of generating molecules and dissociating the excimer molecules is used.
[0004]
Liquid crystal plates and the like in which the excimer lamp 51 is used have been increased in size as represented by a liquid crystal television, and the excimer lamp 51 is also required to be larger and have a large area irradiation type.
[0005]
However, if the excimer lamp 51 itself is simply elongated, the quartz glass on the inner tube side constituting the excimer lamp 51 is bent by its own weight, and the discharge gap does not become constant, causing variations in the discharge in the tube axis direction. There is a problem that surface irradiation cannot be realized. In addition, it is very difficult to handle the long glass tube itself at the time of manufacture. In particular, the center axis shifts due to the weight of the excimer lamp during processing in the process of connecting the inner tube and the outer tube. There was a problem that the discharge gap could not be taken.
[0006]
Furthermore, when the second electrode 56 is formed on the inner tube 53, if the lamp itself is long, the material constituting the second electrode 56 is thin, so that it is very difficult to handle during manufacture. There was a problem.
[0007]
[Problems to be solved by the invention]
Provided is a long excimer lamp capable of large-area irradiation, which is easy to handle at the time of manufacture. It is another object of the present invention to provide a long excimer lamp that can provide uniform discharge without causing the inner tube itself to be bent by its own weight.
[0008]
[Means for Solving the Problems]
The excimer lamp of the present invention has a substantially cylindrical outer tube and a substantially cylindrical inner tube, a double cylindrical tubular discharge vessel in which the outer tube and the inner tube are disposed on substantially the same tube axis, A discharge gas sealed in the discharge vessel; a light transmissive first electrode formed on the outer wall of the outer tube of the discharge vessel; and an inner tube formed on the outer wall of the discharge vessel. And a projecting member that protrudes in the tube axis direction of the discharge vessel in an excimer lamp that uses excimer light emission from excimer molecules generated by discharge of the discharge gas sealed in the discharge vessel. The projection-like member can be connected to the inner wall of the inner tube of another excimer lamp, and the projection-like member abuts against the end of the second electrode. excimer characterized by regulating the position Amplifier.
[0009]
As a result, it is possible to simply connect the protruding member of the excimer lamp to the inner tube inner wall of another excimer lamp, thereby realizing a long excimer lamp. Further, it is not necessary to provide a connecting part on the outer wall of the outer tube of the excimer lamp in order to fit the protruding member to the inner wall of the inner tube of another excimer lamp. There is an advantage that irradiation can be realized. Furthermore, since the excimer lamps are connected to each other by being fitted to the inner wall of the inner tube, the distance from the excimer lamp to the irradiation surface can be close to the outer wall of the lamp. This is because the irradiation energy can reach the irradiated surface sufficiently by approaching the irradiated surface, especially when the light irradiated from the excimer lamp is vacuum ultraviolet light that is absorbed in an oxygen atmosphere. There are advantages.
Further, since the protruding member regulates the position of the second electrode by contacting the end of the second electrode, the expansion and contraction in the tube axis direction that occurs when the excimer lamp repeatedly turns on and off. Therefore, it is possible to suppress the inconvenience that a uniform radiation intensity cannot be obtained because the second electrode moves and the light emitting portion is displaced.
[0010]
Further, the length in the tube axis direction per one of the excimer lamps is 800 mm or less, and the length in the tube axis direction when a plurality of the excimer lamps are connected is 800 mm or more.
[0011]
Thereby, the deflection of the inner tube due to its own weight can be reduced as compared with the case where a single excimer lamp having a length in the tube axis direction of 800 mm or more is configured. In addition, there is an advantage that the difficulty of handling at the time of manufacture is eliminated.
[0014]
In addition, the excimer lamp of the present invention is characterized in that connecting means for electrically connecting the second electrode to an electrode disposed on an inner tube inner wall of another excimer lamp is provided.
[0015]
As a result, even if a plurality of excimer lamps are connected, power can be supplied to each excimer lamp. In addition, when a high frequency high voltage is supplied to the excimer lamp, creeping discharge or the like along the discharge vessel of the excimer lamp occurs between the excimer lamp connection portion and the first electrode disposed outside. Can be prevented.
[0016]
Further, the connecting means is made of a conductive elastic member.
[0017]
As a result, the power supply member as the connection means has elasticity, so that when connecting the excimer lamp, simply connecting it to another excimer lamp enables simple and stable electrical connection.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
A first embodiment of the present invention is shown in FIG. The excimer lamp 1 of the present invention shown in FIG. 1-A) has a discharge vessel 4 composed of a substantially cylindrical outer tube 2 and a substantially cylindrical inner tube 3, and a rare gas or the like is inside the discharge vessel 4. The discharge gas 5 is enclosed. A light transmissive first electrode 6 is disposed on the outer wall of the outer tube 1, and a second electrode 7 is disposed on the inner wall of the inner tube 3, which is outside the discharge vessel 4. A high frequency high voltage is supplied from a high frequency high voltage power supply 8 between one electrode 6 and the second electrode 7. A connecting projection 9 having an outer diameter slightly smaller than the inner diameter of the inner tube 3 is provided on one end of the substantially cylindrical discharge vessel 4 in the cylindrical axis direction. Moreover, the length of the discharge vessel in the tube axis direction was 600 mm. FIG. 1B shows a case where the excimer lamp 1 of the present invention is connected to another excimer lamp 11. By fitting the connecting projection 9 with the inner tube 3 of another excimer lamp 11, a plurality of excimer lamps can be connected on the same tube axis to form a long excimer lamp.
[0019]
Further, the electrical connection between the excimer lamps is performed by a power supply elastic member 11 which is a conductive elastic member disposed between the second electrodes. The substantially power supply elastic member 11 is made of, for example, a tungsten wire. Depending on other shapes, stainless steel or aluminum can be used. The elastic member 11 for general power feeding is made of an elastic body that opens in the radial direction so as to press the second electrode 7 against the inner surface of the inner tube 3 of the excimer lamp 1. In the present embodiment, as shown in FIG. 1-B), the elastic member 11 for power feeding uses a coil spring at both ends. Coil spring portions 12 are provided at both ends of the power supply elastic member 11, and the second electrodes 7 provided on the inner surface of the inner tube 3 of the excimer lamp 1 are connected to the inner side by opening the coil spring portions 12 in the radial direction. It is fixed so as to press against the tube 3. A metal rod portion 13 is provided between the coil spring portions 12 to electrically connect the coil spring portions 12 at both ends. Further, the metal rod portion 13 arranged between the excimer lamps has a diameter smaller than the inner diameter of the inner tube so as not to contact the inner tube inner wall of the excimer lamp. This prevents the occurrence of creeping discharge along the discharge vessel of the excimer lamp between the excimer lamp connecting portion and the first electrode disposed outside when the high frequency high voltage is supplied. it can.
[0020]
FIG. 2 shows another embodiment of the present invention. In FIG. 2A, the excimer lamp 1 has a protrusion 21 that extends the inner tube 3 as the connecting protrusion. Further, a fitting hole 22 of the projection 21 is provided at an end of the excimer lamp where the projection 21 is not disposed, and the projection 21 and the fitting hole 22 are fitted to each other. A plurality of the excimer lamps 1 can be connected.
[0021]
FIG. 2B is a view in which a protrusion 23 having an angle formed on the protrusion extending from the inner tube 3 and having a substantially truncated cone shape is provided. Further, a substantially frustoconical fitting hole 24 is provided at an end of the excimer lamp where the protrusion 23 is not disposed, and the protrusion 23 and the fitting hole 24 are fitted. Thus, a plurality of the excimer lamps 1 can be connected.
[0022]
In FIG. 2-C), connecting projections 25 and 26 having outer diameters slightly smaller than the inner diameter of the inner tube 3 are provided at both ends of the substantially cylindrical discharge vessel 4 in the cylindrical axis direction. The positions where the protrusions 25 and 26 are provided are different positions on the same circumference. For example, when another excimer lamp provided with the same protrusions 25 and 26 is connected, The protrusions 25 and 26 can be fitted together without colliding on the same circumference.
[0023]
In the excimer lamp shown in the embodiment, the projection and the fitting hole are provided at each end. However, the excimer lamp provided with the projection at both ends and the fitting hole at both ends. A long excimer lamp can also be formed by alternately connecting excimer lamps provided with.
[0024]
FIG. 3 shows another embodiment of the elastic member for power supply provided in the excimer lamp of the present invention. The power supply elastic member 30 shown in FIG. 3A includes a plate-shaped spring portion 32 extending at both ends of the metal rod portion 31 and a substantially fan-shaped power supply terminal portion 33 provided at the tip of the spring portion 32. ing. The power supply terminal portion 33 is fixed by pressing a second electrode provided on the inner surface of the inner tube of the excimer lamp in the radial direction by the spring portion 32. The spring part 32 extending from the metal rod 31 to both ends of the elastic member 30 for power supply and the power supply terminal part 33 arranged at the tip of the spring part 32 are arranged on the inner tubes of two excimer lamps. By being connected to the other electrode, power is supplied from one excimer lamp to another excimer lamp.
[0025]
One of the elastic members 34 for feeding shown in FIG. 3B has a C-shaped spring structure, and the C-shaped spring portion 35 is fixed so as to press against the inner wall of the inner tube of one excimer lamp. An arm portion 36 extends from the C-shaped spring portion 35, and a feeding terminal portion 37 that presses against an inner tube inner wall of another excimer lamp is disposed at the tip of the arm portion 36. The arm portion 36 has elasticity in the radial direction of the excimer lamp, and the power supply terminal portion 37 can be driven with a connection portion with the C-shaped spring portion 35 as a fulcrum.
[0026]
The elastic member 38 for feeding shown in FIG. 3C) is a connection on the receiving side comprising a plurality of plate-like spring members 40 extending in a radial direction from a ring-shaped metal member 39 disposed on the inner wall of the inner tube of the excimer lamp. The connecting member is composed of a member and a ring-shaped metal member 41 disposed on the inner wall of the inner tube of another excimer lamp, and an insertion member 42 extending from the metal member 41. The insertion member 42 on the insertion side is inserted into the plate-like spring member 40 on the receiving side and held by the plate-like spring, whereby the high frequency high voltage supplied to one excimer lamp is the second of the other excimer lamp. Power is also supplied to the other electrode.
[0027]
【The invention's effect】
With the excimer lamp of the present invention, a long excimer lamp can be realized by simply connecting the protruding member of the excimer lamp to the inner wall of the inner tube of another excimer lamp. Further, it is not necessary to provide a connecting part on the outer wall of the outer tube of the excimer lamp in order to fit the protruding member to the inner wall of the inner tube of another excimer lamp. There is an advantage that irradiation can be realized. Furthermore, since the excimer lamps are connected to each other by being fitted to the inner wall of the inner tube, the distance from the excimer lamp to the irradiation surface can be close to the outer wall of the lamp. This is because the irradiation energy can reach the irradiated surface sufficiently by approaching the irradiated surface, especially when the light irradiated from the excimer lamp is vacuum ultraviolet light that is absorbed in an oxygen atmosphere. There are advantages.
Further, there is a problem in that a uniform radiation intensity cannot be obtained because the second electrode moves due to expansion and contraction in the tube axis direction caused by repeated turning on and off of the excimer lamp and the light emitting portion is shifted. Has an advantage that it can be suppressed by contacting the end of the second electrode.
[0028]
Further, according to the configuration of the present invention, the deflection of the inner tube due to its own weight can be reduced as compared with the case where the length of the excimer lamp in the tube axis direction is a single excimer lamp having a length of 800 mm or more. Further, according to the configuration of the present invention, it is easy to handle because the length in the tube axis direction is short compared to handling the long excimer lamp at the time of manufacture, and the inner tube and the outer tube are connected in particular. During processing in the process, the central axis of the excimer lamp can be easily taken and a stable product can be supplied.
[0029]
Furthermore, when the electrode is formed on the inner tube side, the electrode itself can be shortened at the time of manufacturing the lamp as compared with a long excimer lamp. The problem is solved.
[Brief description of the drawings]
FIG. 1 is an explanatory view for explaining an excimer lamp and its coupling mechanism in the present invention. FIG. 2 is a cross-sectional view showing another embodiment of the excimer lamp in the present invention. Explanatory drawing which shows the example of the connection means connected to FIG. 4 is sectional drawing which shows the structure of the conventional excimer lamp
DESCRIPTION OF SYMBOLS 1 Excimer lamp 2 Outer tube 3 Inner tube 4 Discharge container 5 Discharge gas 6 1st electrode 7 2nd electrode 8 High frequency high voltage power supply 9 Protrusion part 10 Other excimer lamp 11 Power supply elastic member 12 Coil spring part 13 Metal rod Part 21 Projection part 22 Fitting hole part 23 Projection part 24 Fitting hole part 25 Projection part 26 Projection part 30 Power supply elastic member 31 Metal rod part 32 Spring part 33 Power supply terminal part 34 Power supply elastic member 35 C-type spring part 36 Arm portion 37 Feeding terminal portion 38 Power supply elastic member 39 Ring-shaped metal member 40 Plate-shaped spring member 41 Ring-shaped metal member 42 Insertion member 51 Excimer lamp 52 Outer tube 53 Inner tube 54 Discharge vessel 55 First electrode 56 First 2 electrode 57 high frequency high voltage power supply 58 discharge gas

Claims (4)

A double cylindrical tubular discharge vessel having a substantially cylindrical outer tube and a substantially cylindrical inner tube, the outer tube and the inner tube being arranged on substantially the same tube axis, and enclosed in the discharge vessel A discharge gas, a light transmissive first electrode formed on the outer wall of the outer tube of the discharge vessel, and a second electrode formed on the inner side of the inner tube which is the outer wall of the discharge vessel. In an excimer lamp that utilizes excimer light emission from excimer molecules generated by discharge of the discharge gas sealed in the discharge vessel,
It has a protruding member protruding in the tube axis direction of the discharge vessel, and can be connected by fitting the protruding member with the inner tube inner wall of another excimer lamp ,
The excimer lamp is characterized in that the position of the second electrode is regulated by the protruding member coming into contact with the end of the second electrode.   The excimer lamp according to claim 1, wherein a length in the tube axis direction per one of the excimer lamps is 800 mm or less, and a length in the tube axis direction when a plurality of the excimer lamps are connected is 800 mm or more. . 2. The excimer lamp according to claim 1, further comprising connection means for electrically connecting the second electrode to an electrode disposed on an inner tube inner wall of another excimer lamp. The excimer lamp according to claim 3, wherein the connecting means is made of a conductive elastic member.

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