JP3920676B2 - Substrate processing equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a technique in a substrate processing apparatus. More specifically, the present invention relates to a technique in a moving mechanism of a processing tool that performs a predetermined process on a substrate such as a glass substrate for manufacturing a flat panel display or the like.
[0002]
[Prior art]
The processing in the substrate processing apparatus may be performed by scanning with a processing tool (such as a nozzle or a sensor) on the substrate held at a predetermined position on a holding table (stage). An example of such a process is a scan coating process in the case of applying a chemical solution to a substrate.
[0003]
Here, in order to perform scanning as described above, it is necessary to move the processing tool in the horizontal direction along the surface of the substrate. As such a technique, for example, Japanese Patent Laid-Open No. 2001-310152 discloses a technique for moving a nozzle in a horizontal direction using a linear motor. According to the technique described in the publication, it is possible to prevent the lubricant such as oil from being scattered around, compared to the case where the processing tool is moved using a spin motor and a ball screw. There is.
[0004]
Conventionally, in such a technique, a core-equipped linear motor has been used because it is necessary to obtain a sufficient thrust for moving the processing tool.
[0005]
[Problems to be solved by the invention]
However, when a linear motor with a core is used, there is a problem that the size of the device is increased by an amount corresponding to the iron core (core), thereby increasing the footprint of the device (the floor area of the device).
[0006]
Furthermore, if a linear motor with a core is arranged on a holding table for holding a substrate, a space for that is required, so the holding surface of the holding table needs to be widened, and the planar accuracy of the holding surface is reduced. There was a problem.
[0007]
The present invention has been made in view of the above problems, and an object of the present invention is to provide a substrate processing apparatus capable of reducing the footprint of the apparatus and performing highly accurate processing.
[0008]
[Means for Solving the Problems]
In order to solve the above-described problems, the invention of claim 1 is directed to a holding table for holding a substrate on a holding surface, a cross-linking structure to which a predetermined processing tool is attached and spanned along the holding surface, and the cross-linking comprising a moving means for moving the structure in a direction along the surface of the substrate held on the holding surface, and a proposal in means you guiding movement by the moving means of the cross-linked structure, the cross-linked structure in the direction In the substrate processing apparatus that performs a predetermined process on the surface of the substrate by scanning the surface of the substrate with the processing tool while moving the substrate, the moving means is attached to the holding table and the bridge A stator extending along a moving direction of the structure and a moving element extending from the bridge structure and facing the stator in a non-contact manner on each end side so as to correspond to both ends of the bridge structure; Establishment By detecting a positional relationship between an AC coreless linear servo motor, a scale portion attached to the holding base substantially parallel to the stator, and a detection end extending from the bridging structure and facing the scale portion, A linear encoder that detects the position of the bridge structure, the position of the AC coreless linear servomotor is controlled according to the detection result of the linear encoder, and the bridge structure is moved by the driving force of the AC coreless linear servomotor. The guide means is attached to the holding surface.
[0009]
The invention of claim 2 is the substrate processing apparatus according to the invention of claim 1, wherein the stator, characterized in that attached to the side of the holder.
[0012]
According to a third aspect of the present invention, there is provided the substrate processing apparatus according to the first or second aspect of the present invention, wherein two AC coreless linear servo motors provided on the respective end portions so as to correspond to both end portions of the bridging structure. Are characterized in that each is controlled independently .
[0013]
The invention of claim 4 is, in the substrate processing apparatus according to any one of the claims 1 to 3, the cross-linked structure, characterized in that the aggregate made of carbon fiber is used.
[0014]
According to a fifth aspect of the present invention, in the substrate processing apparatus according to any one of the first to fourth aspects, the processing tool is a slit nozzle that discharges a predetermined processing liquid. wherein the layer of the treatment liquid on the surface.
[0015]
The invention of claim 6 is, in the substrate processing apparatus according to the invention of claim 5, wherein the substrate is a substrate of rectangular for a flat panel display, wherein the processing solution is a resist solution.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described in detail with reference to the accompanying drawings.
[0017]
<1. First Embodiment>
<1.1 Description of configuration>
FIG. 1 is a perspective view schematically showing a substrate processing apparatus 1 according to an embodiment of the present invention. FIG. 2 is a plan view of the main body 2 of the substrate processing apparatus 1 as viewed from above. 3 and 4 are a front view and a side view of the main body 2.
[0018]
The substrate processing apparatus 1 is roughly divided into a main body 2 and a control system 6, and a rectangular glass substrate for manufacturing a screen panel of a liquid crystal display device is a substrate 90 to be processed, and an electrode layer formed on the surface of the substrate 90. In the process of selectively etching, etc., it is configured as a coating apparatus that applies a resist solution to the surface of the substrate 90. Therefore, in this embodiment, the slit nozzle 41 discharges the resist solution. In addition, the substrate processing apparatus 1 can be modified and used not only as a glass substrate for a liquid crystal display device but also as a device for applying a processing liquid (chemical solution) to various substrates for a flat panel display.
[0019]
The main body 2 includes a stage 3 that functions as a holding table for mounting and holding the substrate to be processed 90 and also functions as a base for each attached mechanism. The stage 3 is made of an integral stone having a rectangular parallelepiped shape, and its upper surface (holding surface 30) and side surfaces are processed into flat surfaces.
[0020]
The upper surface of the stage 3 is a horizontal plane and serves as a holding surface 30 for the substrate 90. A number of vacuum suction ports are distributed and formed on the holding surface 30, and the substrate 90 is held at a predetermined horizontal position by sucking the substrate 90 while the substrate processing apparatus 1 processes the substrate 90.
[0021]
A pair of running rails 31a extending in parallel in a substantially horizontal direction are fixed to both ends of the holding surface 30 across the holding area of the substrate 90 (region where the substrate 90 is held). The traveling rail 31a constitutes a linear motion guide mechanism together with support blocks 31b fixed to both ends of the bridging structure 4.
[0022]
As a result, the moving direction of the crosslinked structure 4 can be defined, and the crosslinked structure 4 can be supported above the holding surface 30.
[0023]
Above the stage 3, a bridging structure 4 is provided that extends substantially horizontally from both sides of the stage 3. The bridging structure 4 is mainly composed of a nozzle support portion 40 that uses carbon fiber resin as an aggregate, and lifting mechanisms 43 and 44 that support both ends thereof.
[0024]
Thus, by using an aggregate made of carbon fiber resin for the nozzle support portion 40 of the bridging structure 4, weight reduction can be achieved while maintaining the strength of the bridging structure 4. Therefore, since the driving force required to move the bridging structure 4 can be reduced, a motor with a small driving force can be used.
[0025]
A slit nozzle 41 and a gap sensor 42 are attached to the nozzle support portion 40.
[0026]
The slit nozzle 41 extending in the horizontal Y direction is connected to a discharge mechanism (not shown) including a pipe for supplying a chemical solution to the slit nozzle 41 and a resist pump. The slit nozzle 41 is supplied with a resist by a resist pump and scans the surface of the substrate 90, thereby discharging the resist to a predetermined region on the surface of the substrate 90 (hereinafter referred to as “resist application region”).
[0027]
The gap sensor 42 is attached to the nozzle support portion 40 so as to be in the vicinity of the slit nozzle 41, and the height difference (gap) between the lower presence object (for example, the surface of the substrate 90 or the surface of the resist film) is determined. The measurement result is transmitted to the control system 6.
[0028]
As described above, the slit nozzle 41 and the gap sensor 42 are attached to the nozzle support portion 40, so that their relative positional relationship is fixed. Therefore, the control system 6 can detect the distance between the surface of the substrate 90 and the slit nozzle 41 based on the measurement result of the gap sensor 42. The substrate processing apparatus 1 according to the present embodiment includes two gap sensors 42. However, the number of gap sensors 42 is not limited to this, and more gap sensors 42 may be provided. .
[0029]
The elevating mechanisms 43 and 44 are divided on both sides of the slit nozzle 41 and connected to the slit nozzle 41 by the nozzle support portion 40. The elevating mechanisms 43 and 44 are used for moving the slit nozzle 41 in translation and adjusting the posture of the slit nozzle 41 in the YZ plane.
[0030]
5 and 6 are diagrams showing details of the elevating mechanism 44. FIG. The lifting mechanism 44 includes an AC servo motor 440, a ball screw 441, and a rotary encoder 442. The elevating mechanism 44 includes a coupling member (not shown), and components such as an AC servo motor 440 and a rotary encoder 442 are attached to the coupling member and supported at a predetermined position. Further, the elevating mechanism 43 has substantially the same configuration as the elevating mechanism 44.
[0031]
The AC servo motor 440 is a motor capable of controlling the rotation angle and the rotation direction based on a control signal from the control system 6, and generates a lifting drive force for the bridging structure 4.
[0032]
The upper end of the ball screw 441 is connected to the AC servo motor 440 and can be rotated about the central axis P. An attachment hole in which a female screw structure is formed is provided at the end of the nozzle support portion 40, and the ball screw 441 is screwed into the attachment hole. In other words, the ball screw 441 moves up and down in the Z-axis direction by rotating in response to the rotational driving force from the AC servomotor 440, thereby rotating the nozzle support portion 40 (slit nozzle 41).
[0033]
The rotary encoder 442 is provided above the AC servo motor 440 and detects the rotation angle of the AC servo motor 440, and transmits the detection result to the control system 6. Note that the amount of movement of the nozzle support 40 that is moved up and down by the lifting mechanism 44 is determined by the rotation angle of the ball screw 441 (the rotation angle of the AC servomotor 440). Therefore, the control system 6 can control the position of the nozzle support portion 40 (the position of the slit nozzle 41 and the gap sensor 42) by controlling the rotation angle.
[0034]
A pair of AC coreless linear servo motors (hereinafter simply abbreviated as “linear motors”) 50, 51 arranged separately along the edges on both sides of the stage 3 are provided at both ends of the bridge structure 4, respectively. It is fixed.
[0035]
7 and 8 are diagrams showing a linear motor 50 that moves the bridging structure 4 in a substantially horizontal direction along the surface of the substrate 90 and a linear encoder 52 that detects the position of the bridging structure 4. The linear motor 51 and the linear encoder 53 provided on the opposite side of the bridging structure 4 have substantially the same configuration.
[0036]
The linear motor 50 includes a stator (stator) 50a and a mover 50b, and generates a driving force for moving the bridging structure 4 in the X-axis direction by electromagnetic interaction between the stator 50a and the mover 50b. It is a motor. Since the linear motor 50 is a type without an iron core (core), the apparatus can be reduced in size as compared with a type with an iron core (linear motor with a core). That is, in the AC coreless linear servo motor, since a suction force is not generated between the moving element and the stator unlike a linear motor having an iron core, each mounting structure can be simplified. In addition, when the reaction force by the stator is large, vibration due to rolling of the ball of the linear motion guide mechanism is likely to occur, and it is necessary to increase the strength by increasing the guide. However, if an AC coreless linear servo motor is used, Such a need does not arise. The amount and direction of movement by the linear motor 50 can be controlled by a control signal from the control system 6.
[0037]
The stator 50 a is fixed to the side surface on the stage 3 side so as to extend along the moving direction of the bridging structure 4, and is disposed substantially horizontally at a position lower than the holding surface 30. The mover 50b is fixed to the bridging structure 4 side and faces the stator 50a in a non-contact manner.
[0038]
Thus, by obtaining the driving force for moving the bridging structure 4 by the AC coreless linear servomotors 50 and 51, the footprint can be reduced as compared with the case where the cored linear motor is used. Further, by providing the stators 50a, 51a of the linear motors 50, 51 on the side surface of the stage 3, the area of the holding surface 30 can be reduced, so that the planar accuracy of the holding surface 30 can be improved.
[0039]
The linear encoder 52 includes a scale unit 52a and a detector 52b, detects the relative positional relationship between the scale unit 52a and the detector 52b, and transmits the relative positional relationship to the control system 6. This means that the position in the X-axis direction of the side where the detector 52b is fixed (the side where the linear motor 50 is fixed) of both ends of the bridging structure 4 is detected. Therefore, the control system 6 can detect the position of the linear motor 50 based on the detection result from the linear encoder 52, and can control the position of the linear motor 50 based on the detection result.
[0040]
The scale portion 52 a is fixed to the side surface on the stage 3 side and is disposed substantially horizontally at a position lower than the holding surface 30. Further, the stator 50a of the linear motor 50 is substantially parallel to the stator 50a of the linear motor 50. The stator 50a of the linear motor 50 is disposed near the side surface of the stage 3, and the scale portion 52a of the linear encoder 52 is disposed farther. The detector 52b is provided on the bridging structure 4 side so as to face the scale portion 52a.
[0041]
As described above, in the substrate processing apparatus 1, the position of the bridging structure 4 can be detected with high accuracy by the linear encoders 52 and 53, so that the position of the slit nozzle 41 can be controlled with high accuracy. In addition, linear motors 50 and 51 are provided so as to correspond to both ends of the bridging structure 4, and linear encoders 52 and 53 are also provided so as to correspond to both ends of the bridging structure 4. The control system 6 is configured such that the linear motor at one end of the bridging structure 4 performs control based on the detection result of the corresponding linear encoder. Therefore, the left and right positions of the bridge structure 4 can be independently controlled, and the nozzle position can be controlled with high accuracy.
[0042]
The control system 6 includes an arithmetic unit 60 that processes various data according to a program and a storage unit 61 that stores the program and various data. In addition, an operation unit 62 for an operator to input necessary instructions to the substrate processing apparatus 1 and a display unit 63 for displaying various data are provided on the front surface.
[0043]
The control system 6 is connected to each mechanism attached to the main body 2 by a cable (not shown), and based on signals from the operation unit 62 and various sensors, the stage 3, the bridging structure 4, the lifting mechanisms 43 and 44, and The components such as the linear motors 50 and 51 are controlled.
[0044]
Specifically, the storage unit 61 corresponds to a RAM that temporarily stores data, a read-only ROM, a magnetic disk device, and the like, and a storage medium such as a portable magneto-optical disk and a memory card; Those readers may be used. The operation unit 62 includes buttons and switches (including a keyboard and a mouse), but may have a function of the display unit 63 such as a touch panel display. The display unit 63 corresponds to a liquid crystal display or various lamps.
[0045]
<1.2 Explanation of operation>
Next, the operation of the substrate processing apparatus 1 will be described. In the substrate processing apparatus 1, the resist coating process is started when the substrate 90 is transferred to a predetermined position by an operator or a transfer mechanism (not shown). Note that the instruction for starting the processing may be input by operating the operation unit 62 by the operator when the transfer of the substrate 90 is completed.
[0046]
First, the stage 3 sucks and holds the substrate 90 at a predetermined position on the holding surface 30. Subsequently, the elevating mechanisms 43 and 44 move the gap sensor 42 attached to the nozzle support unit 40 to a predetermined altitude (hereinafter referred to as “measurement altitude”). At this time, the control system 6 gives a control signal to each of the lifting mechanisms 43 and 44 based on the detection result of each rotary encoder 442 provided in each of the lifting mechanisms 43 and 44, thereby Control the position.
[0047]
When the gap sensor 42 is set to the measurement altitude, the linear motors 50 and 51 move the gap sensor 42 to above the resist coating region by moving the bridging structure 4 in the X direction. Here, the resist application region is a region in the surface of the substrate 90 where the resist solution is to be applied, and is usually a region obtained by excluding a region having a predetermined width along the edge from the entire area of the substrate 90. It is. At this time, the control system 6 controls the horizontal position of the gap sensor 42 by giving a control signal to the linear motors 50 and 51 based on the detection results of the linear encoders 52 and 53.
[0048]
Next, the gap sensor 42 starts measuring the gap between the surface of the substrate 90 and the slit nozzle 41 in the resist coating region on the surface of the substrate 90. When the measurement is started, the linear motors 50 and 51 further move the bridging structure 4 in the X direction so that the gap sensor 42 scans the resist coating region and transmits the measurement result during the scanning to the control system 6. At this time, the control system 6 stores the measurement result of the gap sensor 42 in the storage unit 61 in association with the horizontal position detected by the linear encoders 52 and 53.
[0049]
When the bridge structure 4 passes over the substrate 90 in the X direction and the scanning by the gap sensor 42 is finished, the control system 6 stops the bridge structure 4 at that position, and based on the measurement result from the gap sensor 42, The attitude of the slit nozzle 41 in the YZ plane is an appropriate attitude (an attitude in which the interval between the slit nozzle 41 and the resist application region is an appropriate interval for applying the resist. Hereinafter, referred to as “appropriate attitude”). The position of the nozzle support part 40 is calculated, and a control signal is given to each of the lifting mechanisms 43 and 44 based on the calculation result. Based on the control signal, the respective lifting mechanisms 43 and 44 move the nozzle support portion 40 in the Z-axis direction to adjust the slit nozzle 41 to an appropriate posture. Further, the linear motors 50 and 51 move the bridging structure 4 in the −X direction, and move the slit nozzle 41 to the discharge start position. Here, the ejection start position is a position where the slit nozzle 41 substantially extends along one side of the resist coating region.
[0050]
When the slit nozzle 41 moves to the discharge start position, the control system 6 gives a control signal to the linear motors 50 and 51 and a resist pump (not shown). Based on the control signal, the linear motors 50 and 51 move the bridging structure 4 in the −X direction so that the slit nozzle 41 scans the surface of the substrate 90, and the resist pump is activated during the scanning of the slit nozzle 41. By operating, the resist is sent to the slit nozzle 41, and the slit nozzle 41 discharges the resist to the resist coating region. As a result, a resist layer is formed on the surface of the substrate 90.
[0051]
When the slit nozzle 41 moves to the discharge end position, the control system 6 gives a control signal to the linear motors 50 and 51 and the registration pump. Based on the control signal, when the resist pump is stopped, the discharge of the resist from the slit nozzle 41 is stopped, and the elevating mechanisms 43 and 44 move the gap sensor 42 to the measurement altitude.
[0052]
Further, the linear motors 50 and 51 move the bridging structure 4 in the X direction, so that the gap sensor 42 scans the resist coating region, measures the gap with the resist film formed on the substrate 90, and enters the control system 6. introduce. The control system 6 compares the gap value (distance to the surface of the substrate 90) measured before resist coating with the gap value (distance to the surface of the resist film) measured after resist coating. The thickness of the resist film 90 is calculated, and the calculation result is displayed on the display unit 63.
[0053]
When the inspection of the resist film is completed, the stage 3 stops the adsorption of the substrate 90, and the operator or the transport mechanism picks up the substrate 90 from the holding surface 30 and transports it to the next processing step.
[0054]
As described above, the substrate processing apparatus 1 can reduce the footprint by obtaining the driving force for moving the bridging structure 4 by the AC coreless linear servomotors 50 and 51. Further, by providing the AC coreless linear servomotors 50 and 51 on the side surface of the stage 3, the area of the holding surface 30 can be reduced, so that the planar accuracy of the holding surface 30 can be improved. That is, since the position of the slit nozzle 41 can be controlled with high accuracy, the resist coating process can be performed with high accuracy.
[0055]
In the above embodiment, the substrate is placed on a horizontal holding surface and held in a horizontal posture. For example, the substrate is held in a vertical posture and processed or held in a tilted posture and processed. The present invention can be applied to those that do.
[0056]
【The invention's effect】
In the first to sixth aspects of the invention, the footprint can be reduced by moving the bridging structure by the driving force of the AC coreless linear servomotor. Further, since the guide means for guiding the movement by the moving means of the cross-linked structure is attached to the holding surface, the moving direction of the cross-linked structure can be defined.
[0057]
In the invention according to claim 2, since the stator is attached to the side surface of the holding table, the area of the holding surface of the holding table can be reduced, so that the planar accuracy of the holding surface is improved. Can do.
[0060]
In the invention according to claim 3 , the two AC coreless linear servomotors provided on the respective end sides so as to correspond to the both end portions of the bridging structure are controlled independently, thereby achieving high accuracy. Nozzle position control .
[0061]
In the invention described in claim 6 , since the carbon fiber aggregate is used for the crosslinked structure, the weight of the crosslinked structure can be reduced while maintaining the strength of the crosslinked structure. Since a necessary driving force can be reduced, a motor having a small driving force can be used.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an outline of a substrate processing apparatus in an embodiment of the present invention.
FIG. 2 is a plan view of the main body of the substrate processing apparatus as viewed from above.
FIG. 3 is a front view of the main body.
FIG. 4 is a side view of the main body.
FIG. 5 is a diagram showing details of an elevating mechanism.
FIG. 6 is a diagram showing details of an elevating mechanism.
FIG. 7 is an enlarged view showing a linear motor and a linear encoder from the front.
FIG. 8 is an enlarged view showing a linear motor and a linear encoder from the side.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Substrate processing apparatus 2 Main body 3 Stage 30 Holding surface 31a Traveling rail 31b Support block 4 Bridge structure 40 Nozzle support part 41 Slit nozzle 50, 51 AC coreless linear servomotor 50a Stator 50b Mover 52, 53 Linear encoder 52a Scale part 52b Detector 90 substrate

Claims (6)

A holding table for holding the substrate on the holding surface;
A cross-linking structure to which a predetermined processing tool is attached and spanned along the holding surface;
Moving means for moving the bridging structure in a direction along the surface of the substrate held by the holding surface;
A draft in means you guiding movement by the moving means of the cross-linked structure,
With
In the substrate processing apparatus for performing a predetermined process on the surface of the substrate by scanning the surface of the substrate with the processing tool while moving the bridging structure in the direction,
The moving means is
Corresponding to both ends of the bridging structure having a stator attached to the holding stand and extending along the moving direction of the bridging structure, and a moving piece extending from the bridging structure and facing the stator in a non-contact manner An AC coreless linear servo motor provided on each end side,
The position of the bridging structure is detected by detecting the positional relationship between a scale portion attached to the holding table substantially parallel to the stator and a detection end extending from the bridging structure and facing the scale portion. A linear encoder;
With
The position of the AC coreless linear servomotor is controlled according to the detection result of the linear encoder,
The bridging structure is moved by the driving force of the AC coreless linear servo motor,
The substrate processing apparatus, wherein the guide means is attached to the holding surface. The substrate processing apparatus according to claim 1,
The substrate processing apparatus, wherein the stator is attached to a side surface of the holding table. The substrate processing apparatus according to claim 1 or 2,
A substrate processing apparatus, wherein two AC coreless linear servo motors provided on each end side so as to correspond to both ends of the bridge structure are controlled independently. The substrate processing apparatus according to any one of claims 1 to 3,
A substrate processing apparatus, wherein an aggregate made of carbon fiber is used for the cross-linking structure. The substrate processing apparatus according to claim 1,
The processing tool is a slit nozzle that discharges a predetermined processing liquid,
The substrate processing apparatus, wherein the processing liquid layer is formed on the surface of the substrate by the scanning. The substrate processing apparatus according to claim 5,
A substrate processing apparatus, wherein the substrate is a square substrate for a flat panel display, and the processing solution is a resist solution.

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