JP3963500B2 - Black resist composition for color filter - Google Patents
Black resist composition for color filter Download PDFInfo
- Publication number
- JP3963500B2 JP3963500B2 JP15984896A JP15984896A JP3963500B2 JP 3963500 B2 JP3963500 B2 JP 3963500B2 JP 15984896 A JP15984896 A JP 15984896A JP 15984896 A JP15984896 A JP 15984896A JP 3963500 B2 JP3963500 B2 JP 3963500B2
- Authority
- JP
- Japan
- Prior art keywords
- resin
- black
- color filter
- resist composition
- carbon black
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000203 mixture Substances 0.000 title claims description 24
- 229920005989 resin Polymers 0.000 claims description 62
- 239000011347 resin Substances 0.000 claims description 62
- 239000006229 carbon black Substances 0.000 claims description 33
- 238000000034 method Methods 0.000 claims description 29
- 239000006185 dispersion Substances 0.000 claims description 26
- 239000000178 monomer Substances 0.000 claims description 22
- 239000011230 binding agent Substances 0.000 claims description 15
- 239000003999 initiator Substances 0.000 claims description 15
- 239000002904 solvent Substances 0.000 claims description 13
- 239000004925 Acrylic resin Substances 0.000 claims description 11
- 229920000178 Acrylic resin Polymers 0.000 claims description 10
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims description 10
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 10
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 9
- 238000001179 sorption measurement Methods 0.000 claims description 9
- 239000003086 colorant Substances 0.000 claims description 8
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 claims description 8
- 239000006228 supernatant Substances 0.000 claims description 8
- 239000011342 resin composition Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims description 2
- 239000000470 constituent Substances 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- 241000872198 Serjania polyphylla Species 0.000 claims 2
- 238000002604 ultrasonography Methods 0.000 claims 2
- 235000019241 carbon black Nutrition 0.000 description 23
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 20
- 150000001875 compounds Chemical class 0.000 description 20
- 229910003460 diamond Inorganic materials 0.000 description 19
- 239000010432 diamond Substances 0.000 description 19
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 18
- -1 Polyethylene Polymers 0.000 description 17
- 239000000049 pigment Substances 0.000 description 11
- 239000002253 acid Substances 0.000 description 10
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 9
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 239000011159 matrix material Substances 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 6
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 6
- 239000000047 product Substances 0.000 description 6
- 239000004593 Epoxy Substances 0.000 description 5
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 5
- 239000007864 aqueous solution Substances 0.000 description 5
- 238000011161 development Methods 0.000 description 5
- 230000018109 developmental process Effects 0.000 description 5
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 5
- 238000001035 drying Methods 0.000 description 5
- 238000004043 dyeing Methods 0.000 description 5
- 229920003986 novolac Polymers 0.000 description 5
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 4
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229920000877 Melamine resin Polymers 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- STMDPCBYJCIZOD-UHFFFAOYSA-N 2-(2,4-dinitroanilino)-4-methylpentanoic acid Chemical compound CC(C)CC(C(O)=O)NC1=CC=C([N+]([O-])=O)C=C1[N+]([O-])=O STMDPCBYJCIZOD-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- 229920003270 Cymel® Polymers 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 125000000217 alkyl group Chemical group 0.000 description 3
- 239000011324 bead Substances 0.000 description 3
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- JFDZBHWFFUWGJE-UHFFFAOYSA-N benzonitrile Chemical compound N#CC1=CC=CC=C1 JFDZBHWFFUWGJE-UHFFFAOYSA-N 0.000 description 3
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 3
- 239000004202 carbamide Substances 0.000 description 3
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 229920003987 resole Polymers 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 2
- CTMHWPIWNRWQEG-UHFFFAOYSA-N 1-methylcyclohexene Chemical compound CC1=CCCCC1 CTMHWPIWNRWQEG-UHFFFAOYSA-N 0.000 description 2
- GQCZPFJGIXHZMB-UHFFFAOYSA-N 1-tert-Butoxy-2-propanol Chemical compound CC(O)COC(C)(C)C GQCZPFJGIXHZMB-UHFFFAOYSA-N 0.000 description 2
- HXVNBWAKAOHACI-UHFFFAOYSA-N 2,4-dimethyl-3-pentanone Chemical compound CC(C)C(=O)C(C)C HXVNBWAKAOHACI-UHFFFAOYSA-N 0.000 description 2
- BRLVZIYXQOFFAW-UHFFFAOYSA-N 2-(1-prop-2-enoyloxypropan-2-yloxycarbonyl)benzoic acid Chemical compound C=CC(=O)OCC(C)OC(=O)C1=CC=CC=C1C(O)=O BRLVZIYXQOFFAW-UHFFFAOYSA-N 0.000 description 2
- HCLJOFJIQIJXHS-UHFFFAOYSA-N 2-[2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOCCOC(=O)C=C HCLJOFJIQIJXHS-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- ZPVFWPFBNIEHGJ-UHFFFAOYSA-N 2-octanone Chemical compound CCCCCCC(C)=O ZPVFWPFBNIEHGJ-UHFFFAOYSA-N 0.000 description 2
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 2
- SYBYTAAJFKOIEJ-UHFFFAOYSA-N 3-Methylbutan-2-one Chemical compound CC(C)C(C)=O SYBYTAAJFKOIEJ-UHFFFAOYSA-N 0.000 description 2
- FFWSICBKRCICMR-UHFFFAOYSA-N 5-methyl-2-hexanone Chemical compound CC(C)CCC(C)=O FFWSICBKRCICMR-UHFFFAOYSA-N 0.000 description 2
- GZVHEAJQGPRDLQ-UHFFFAOYSA-N 6-phenyl-1,3,5-triazine-2,4-diamine Chemical compound NC1=NC(N)=NC(C=2C=CC=CC=2)=N1 GZVHEAJQGPRDLQ-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- 108010010803 Gelatin Proteins 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- DIQMPQMYFZXDAX-UHFFFAOYSA-N Pentyl formate Chemical compound CCCCCOC=O DIQMPQMYFZXDAX-UHFFFAOYSA-N 0.000 description 2
- FQYUMYWMJTYZTK-UHFFFAOYSA-N Phenyl glycidyl ether Chemical compound C1OC1COC1=CC=CC=C1 FQYUMYWMJTYZTK-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 229920002125 Sokalan® Polymers 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 2
- DZBUGLKDJFMEHC-UHFFFAOYSA-N acridine Chemical compound C1=CC=CC2=CC3=CC=CC=C3N=C21 DZBUGLKDJFMEHC-UHFFFAOYSA-N 0.000 description 2
- HFBMWMNUJJDEQZ-UHFFFAOYSA-N acryloyl chloride Chemical compound ClC(=O)C=C HFBMWMNUJJDEQZ-UHFFFAOYSA-N 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 229940072049 amyl acetate Drugs 0.000 description 2
- PGMYKACGEOXYJE-UHFFFAOYSA-N anhydrous amyl acetate Natural products CCCCCOC(C)=O PGMYKACGEOXYJE-UHFFFAOYSA-N 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 2
- 239000012965 benzophenone Substances 0.000 description 2
- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- XUPYJHCZDLZNFP-UHFFFAOYSA-N butyl butanoate Chemical compound CCCCOC(=O)CCC XUPYJHCZDLZNFP-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 239000002270 dispersing agent Substances 0.000 description 2
- SNRUBQQJIBEYMU-UHFFFAOYSA-N dodecane Chemical compound CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- MTZQAGJQAFMTAQ-UHFFFAOYSA-N ethyl benzoate Chemical compound CCOC(=O)C1=CC=CC=C1 MTZQAGJQAFMTAQ-UHFFFAOYSA-N 0.000 description 2
- FKRCODPIKNYEAC-UHFFFAOYSA-N ethyl propionate Chemical compound CCOC(=O)CC FKRCODPIKNYEAC-UHFFFAOYSA-N 0.000 description 2
- 229920000159 gelatin Polymers 0.000 description 2
- 239000008273 gelatin Substances 0.000 description 2
- 235000019322 gelatine Nutrition 0.000 description 2
- 235000011852 gelatine desserts Nutrition 0.000 description 2
- VPVSTMAPERLKKM-UHFFFAOYSA-N glycoluril Chemical compound N1C(=O)NC2NC(=O)NC21 VPVSTMAPERLKKM-UHFFFAOYSA-N 0.000 description 2
- 235000019382 gum benzoic Nutrition 0.000 description 2
- MNWFXJYAOYHMED-UHFFFAOYSA-M heptanoate Chemical compound CCCCCCC([O-])=O MNWFXJYAOYHMED-UHFFFAOYSA-M 0.000 description 2
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 2
- XMGQYMWWDOXHJM-UHFFFAOYSA-N limonene Chemical compound CC(=C)C1CCC(C)=CC1 XMGQYMWWDOXHJM-UHFFFAOYSA-N 0.000 description 2
- BHIWKHZACMWKOJ-UHFFFAOYSA-N methyl isobutyrate Chemical compound COC(=O)C(C)C BHIWKHZACMWKOJ-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 239000003504 photosensitizing agent Substances 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 239000004584 polyacrylic acid Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 2
- 150000003254 radicals Chemical class 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 2
- 238000005199 ultracentrifugation Methods 0.000 description 2
- VMHYWKBKHMYRNF-UHFFFAOYSA-N (2-chlorophenyl)-phenylmethanone Chemical class ClC1=CC=CC=C1C(=O)C1=CC=CC=C1 VMHYWKBKHMYRNF-UHFFFAOYSA-N 0.000 description 1
- CKGKXGQVRVAKEA-UHFFFAOYSA-N (2-methylphenyl)-phenylmethanone Chemical compound CC1=CC=CC=C1C(=O)C1=CC=CC=C1 CKGKXGQVRVAKEA-UHFFFAOYSA-N 0.000 description 1
- WJTCHBVEUFDSIK-NWDGAFQWSA-N (2r,5s)-1-benzyl-2,5-dimethylpiperazine Chemical compound C[C@@H]1CN[C@@H](C)CN1CC1=CC=CC=C1 WJTCHBVEUFDSIK-NWDGAFQWSA-N 0.000 description 1
- RYNQKSJRFHJZTK-UHFFFAOYSA-N (3-methoxy-3-methylbutyl) acetate Chemical compound COC(C)(C)CCOC(C)=O RYNQKSJRFHJZTK-UHFFFAOYSA-N 0.000 description 1
- URBLVRAVOIVZFJ-UHFFFAOYSA-N (3-methylphenyl)-phenylmethanone Chemical compound CC1=CC=CC(C(=O)C=2C=CC=CC=2)=C1 URBLVRAVOIVZFJ-UHFFFAOYSA-N 0.000 description 1
- PSGCQDPCAWOCSH-UHFFFAOYSA-N (4,7,7-trimethyl-3-bicyclo[2.2.1]heptanyl) prop-2-enoate Chemical compound C1CC2(C)C(OC(=O)C=C)CC1C2(C)C PSGCQDPCAWOCSH-UHFFFAOYSA-N 0.000 description 1
- KEOLYBMGRQYQTN-UHFFFAOYSA-N (4-bromophenyl)-phenylmethanone Chemical compound C1=CC(Br)=CC=C1C(=O)C1=CC=CC=C1 KEOLYBMGRQYQTN-UHFFFAOYSA-N 0.000 description 1
- WXPWZZHELZEVPO-UHFFFAOYSA-N (4-methylphenyl)-phenylmethanone Chemical compound C1=CC(C)=CC=C1C(=O)C1=CC=CC=C1 WXPWZZHELZEVPO-UHFFFAOYSA-N 0.000 description 1
- QIBMYZSHLJAOMN-GORDUTHDSA-N (e)-2-(oxiran-2-ylmethyl)but-2-enoic acid Chemical compound C\C=C(C(O)=O)/CC1CO1 QIBMYZSHLJAOMN-GORDUTHDSA-N 0.000 description 1
- NVYYCYBVCOTAMA-UHFFFAOYSA-N 1,1,2,2,3,3,4,4,5,5,6,6,7,7,12,12,12-heptadecafluorododecyl prop-2-enoate Chemical compound FC(F)(F)CCCCC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)OC(=O)C=C NVYYCYBVCOTAMA-UHFFFAOYSA-N 0.000 description 1
- QMMJWQMCMRUYTG-UHFFFAOYSA-N 1,2,4,5-tetrachloro-3-(trifluoromethyl)benzene Chemical compound FC(F)(F)C1=C(Cl)C(Cl)=CC(Cl)=C1Cl QMMJWQMCMRUYTG-UHFFFAOYSA-N 0.000 description 1
- MYWOJODOMFBVCB-UHFFFAOYSA-N 1,2,6-trimethylphenanthrene Chemical compound CC1=CC=C2C3=CC(C)=CC=C3C=CC2=C1C MYWOJODOMFBVCB-UHFFFAOYSA-N 0.000 description 1
- LZDKZFUFMNSQCJ-UHFFFAOYSA-N 1,2-diethoxyethane Chemical compound CCOCCOCC LZDKZFUFMNSQCJ-UHFFFAOYSA-N 0.000 description 1
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 1
- QWOZZTWBWQMEPD-UHFFFAOYSA-N 1-(2-ethoxypropoxy)propan-2-ol Chemical compound CCOC(C)COCC(C)O QWOZZTWBWQMEPD-UHFFFAOYSA-N 0.000 description 1
- DURPTKYDGMDSBL-UHFFFAOYSA-N 1-butoxybutane Chemical compound CCCCOCCCC DURPTKYDGMDSBL-UHFFFAOYSA-N 0.000 description 1
- BOCJQSFSGAZAPQ-UHFFFAOYSA-N 1-chloroanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2Cl BOCJQSFSGAZAPQ-UHFFFAOYSA-N 0.000 description 1
- VFWCMGCRMGJXDK-UHFFFAOYSA-N 1-chlorobutane Chemical compound CCCCCl VFWCMGCRMGJXDK-UHFFFAOYSA-N 0.000 description 1
- SQCZQTSHSZLZIQ-UHFFFAOYSA-N 1-chloropentane Chemical compound CCCCCCl SQCZQTSHSZLZIQ-UHFFFAOYSA-N 0.000 description 1
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- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
- KMPQYAYAQWNLME-UHFFFAOYSA-N Undecanal Natural products CCCCCCCCCCC=O KMPQYAYAQWNLME-UHFFFAOYSA-N 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 1
- INXWLSDYDXPENO-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(CO)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C INXWLSDYDXPENO-UHFFFAOYSA-N 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- 150000001251 acridines Chemical class 0.000 description 1
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 1
- 239000001361 adipic acid Substances 0.000 description 1
- 235000011037 adipic acid Nutrition 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 229940027998 antiseptic and disinfectant acridine derivative Drugs 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- GCTPMLUUWLLESL-UHFFFAOYSA-N benzyl prop-2-enoate Chemical compound C=CC(=O)OCC1=CC=CC=C1 GCTPMLUUWLLESL-UHFFFAOYSA-N 0.000 description 1
- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 description 1
- FAMJVEVTWNPFSF-UHFFFAOYSA-N bis[2-(2-hydroxypropan-2-yl)-4-propan-2-ylphenyl]methanone Chemical compound CC(O)(C)C1=CC(C(C)C)=CC=C1C(=O)C1=CC=C(C(C)C)C=C1C(C)(C)O FAMJVEVTWNPFSF-UHFFFAOYSA-N 0.000 description 1
- RRIRSNXZGJWTQM-UHFFFAOYSA-N butyl 3-methoxypropanoate Chemical compound CCCCOC(=O)CCOC RRIRSNXZGJWTQM-UHFFFAOYSA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000005018 casein Substances 0.000 description 1
- BECPQYXYKAMYBN-UHFFFAOYSA-N casein, tech. Chemical compound NCCCCC(C(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(CC(C)C)N=C(O)C(CCC(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(C(C)O)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(COP(O)(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(N)CC1=CC=CC=C1 BECPQYXYKAMYBN-UHFFFAOYSA-N 0.000 description 1
- 235000021240 caseins Nutrition 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 235000010980 cellulose Nutrition 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- KBLWLMPSVYBVDK-UHFFFAOYSA-N cyclohexyl prop-2-enoate Chemical compound C=CC(=O)OC1CCCCC1 KBLWLMPSVYBVDK-UHFFFAOYSA-N 0.000 description 1
- WVIIMZNLDWSIRH-UHFFFAOYSA-N cyclohexylcyclohexane Chemical group C1CCCCC1C1CCCCC1 WVIIMZNLDWSIRH-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 125000004386 diacrylate group Chemical group 0.000 description 1
- SOCTUWSJJQCPFX-UHFFFAOYSA-N dichromate(2-) Chemical compound [O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O SOCTUWSJJQCPFX-UHFFFAOYSA-N 0.000 description 1
- CMMUKUYEPRGBFB-UHFFFAOYSA-L dichromic acid Chemical compound O[Cr](=O)(=O)O[Cr](O)(=O)=O CMMUKUYEPRGBFB-UHFFFAOYSA-L 0.000 description 1
- 150000001993 dienes Chemical class 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- POLCUAVZOMRGSN-UHFFFAOYSA-N dipropyl ether Chemical compound CCCOCCC POLCUAVZOMRGSN-UHFFFAOYSA-N 0.000 description 1
- LQZZUXJYWNFBMV-UHFFFAOYSA-N dodecan-1-ol Chemical compound CCCCCCCCCCCCO LQZZUXJYWNFBMV-UHFFFAOYSA-N 0.000 description 1
- DDXLVDQZPFLQMZ-UHFFFAOYSA-M dodecyl(trimethyl)azanium;chloride Chemical compound [Cl-].CCCCCCCCCCCC[N+](C)(C)C DDXLVDQZPFLQMZ-UHFFFAOYSA-M 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 1
- IJUHLFUALMUWOM-UHFFFAOYSA-N ethyl 3-methoxypropanoate Chemical compound CCOC(=O)CCOC IJUHLFUALMUWOM-UHFFFAOYSA-N 0.000 description 1
- XPKFLEVLLPKCIW-UHFFFAOYSA-N ethyl 4-(diethylamino)benzoate Chemical compound CCOC(=O)C1=CC=C(N(CC)CC)C=C1 XPKFLEVLLPKCIW-UHFFFAOYSA-N 0.000 description 1
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- WBJINCZRORDGAQ-UHFFFAOYSA-N formic acid ethyl ester Natural products CCOC=O WBJINCZRORDGAQ-UHFFFAOYSA-N 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- WOLATMHLPFJRGC-UHFFFAOYSA-N furan-2,5-dione;styrene Chemical compound O=C1OC(=O)C=C1.C=CC1=CC=CC=C1 WOLATMHLPFJRGC-UHFFFAOYSA-N 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 125000004970 halomethyl group Chemical group 0.000 description 1
- PZDUWXKXFAIFOR-UHFFFAOYSA-N hexadecyl prop-2-enoate Chemical compound CCCCCCCCCCCCCCCCOC(=O)C=C PZDUWXKXFAIFOR-UHFFFAOYSA-N 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 150000002460 imidazoles Chemical class 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 229940079865 intestinal antiinfectives imidazole derivative Drugs 0.000 description 1
- WDAXFOBOLVPGLV-UHFFFAOYSA-N isobutyric acid ethyl ester Natural products CCOC(=O)C(C)C WDAXFOBOLVPGLV-UHFFFAOYSA-N 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- PBOSTUDLECTMNL-UHFFFAOYSA-N lauryl acrylate Chemical compound CCCCCCCCCCCCOC(=O)C=C PBOSTUDLECTMNL-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- YDKNBNOOCSNPNS-UHFFFAOYSA-N methyl 1,3-benzoxazole-2-carboxylate Chemical compound C1=CC=C2OC(C(=O)OC)=NC2=C1 YDKNBNOOCSNPNS-UHFFFAOYSA-N 0.000 description 1
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 description 1
- 229940043265 methyl isobutyl ketone Drugs 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 1
- YKYONYBAUNKHLG-UHFFFAOYSA-N n-Propyl acetate Natural products CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 1
- WDQKICIMIPUDBL-UHFFFAOYSA-N n-[2-(dimethylamino)ethyl]prop-2-enamide Chemical compound CN(C)CCNC(=O)C=C WDQKICIMIPUDBL-UHFFFAOYSA-N 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 239000004843 novolac epoxy resin Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- YYZUSRORWSJGET-UHFFFAOYSA-N octanoic acid ethyl ester Natural products CCCCCCCC(=O)OCC YYZUSRORWSJGET-UHFFFAOYSA-N 0.000 description 1
- 150000007978 oxazole derivatives Chemical class 0.000 description 1
- FEUIEHHLVZUGPB-UHFFFAOYSA-N oxolan-2-yl prop-2-enoate Chemical compound C=CC(=O)OC1CCCO1 FEUIEHHLVZUGPB-UHFFFAOYSA-N 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
- FZUGPQWGEGAKET-UHFFFAOYSA-N parbenate Chemical compound CCOC(=O)C1=CC=C(N(C)C)C=C1 FZUGPQWGEGAKET-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 125000001791 phenazinyl group Chemical class C1(=CC=CC2=NC3=CC=CC=C3N=C12)* 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920001643 poly(ether ketone) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920001197 polyacetylene Polymers 0.000 description 1
- 229920002401 polyacrylamide Polymers 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 150000004291 polyenes Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001195 polyisoprene Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920001184 polypeptide Polymers 0.000 description 1
- 229920001955 polyphenylene ether Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229920000128 polypyrrole Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920001021 polysulfide Polymers 0.000 description 1
- 239000005077 polysulfide Substances 0.000 description 1
- 150000008117 polysulfides Polymers 0.000 description 1
- 229920000909 polytetrahydrofuran Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 102000004196 processed proteins & peptides Human genes 0.000 description 1
- 108090000765 processed proteins & peptides Proteins 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- ARJOQCYCJMAIFR-UHFFFAOYSA-N prop-2-enoyl prop-2-enoate Chemical compound C=CC(=O)OC(=O)C=C ARJOQCYCJMAIFR-UHFFFAOYSA-N 0.000 description 1
- JCMFJIHDWDKYIL-UHFFFAOYSA-N propyl 3-methoxypropanoate Chemical compound CCCOC(=O)CCOC JCMFJIHDWDKYIL-UHFFFAOYSA-N 0.000 description 1
- 229940090181 propyl acetate Drugs 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- KKEYFWRCBNTPAC-UHFFFAOYSA-L terephthalate(2-) Chemical compound [O-]C(=O)C1=CC=C(C([O-])=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-L 0.000 description 1
- ISXSCDLOGDJUNJ-UHFFFAOYSA-N tert-butyl prop-2-enoate Chemical compound CC(C)(C)OC(=O)C=C ISXSCDLOGDJUNJ-UHFFFAOYSA-N 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
- GKASDNZWUGIAMG-UHFFFAOYSA-N triethyl orthoformate Chemical compound CCOC(OCC)OCC GKASDNZWUGIAMG-UHFFFAOYSA-N 0.000 description 1
- KYWIYKKSMDLRDC-UHFFFAOYSA-N undecan-2-one Chemical compound CCCCCCCCCC(C)=O KYWIYKKSMDLRDC-UHFFFAOYSA-N 0.000 description 1
- 229920006305 unsaturated polyester Polymers 0.000 description 1
- 229920006337 unsaturated polyester resin Polymers 0.000 description 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Optical Filters (AREA)
- Liquid Crystal (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Paints Or Removers (AREA)
- Optical Elements Other Than Lenses (AREA)
Description
【0001】
【発明の属する技術分野】
本発明は、液晶の表示装置または固体撮像素子と組み合わせて用いるカラーフィルターの製造に好適なブラックレジスト組成物である。ブラックマトリックスとなる黒色パターン形成に好適に使用できる。
【0002】
【従来の技術】
カラーフィルターは染色法、印刷法、電着法、顔料分散法などによりガラス基板上に赤、緑、青、などの微細な画素を形成したものである。これら公知の方法については以下のような特徴、問題点を有する。
染色法によるカラーフィルターはゼラチンやポリビニルアルコールなどに感光剤として重クロム酸塩を混合した感光性樹脂により画像を形成した後、染色して製造される。多色を同一基板に形成するためには、防染工程が必須であり、工程が複雑になる問題点がある。また、染料を使用しているため耐光性に劣る。感光剤として用いる重クロム酸は公害防止の観点からも問題である。
【0003】
印刷法によるカラーフィルターはスクリーン印刷またはフレキソ印刷などの方法で、熱硬化または光硬化インキをガラス基板に転写させる。画像形成、染色が不要であるため工程が簡略である反面、高精細な画像が得られず、インキの平滑性にも問題がある。
電着法によるカラーフィルターは、顔料または染料を含んだ浴に電極をもうけたガラス基板を浸し電気泳動により色相を付着させるものである。平滑性に優れるが、あらかじめ、ガラス基板に電極が必要なため、複雑なパターンを形成させるのが困難である。
【0004】
顔料分散法は光硬化性樹脂に顔料を分散させた着色レジストにより画像を形成する。高耐熱性、染色がいらないなどの利点があり、また、高精度な画像形成が可能である。品質、製造コストの点から上記製造法に比較し顔料分散法は優れ、現在カラーフィルター製造の主流となっている。
カラーフィルターの赤、青、緑の着色画像の間には通常コントラストを向上させる目的のためブラックマトリックスと呼ばれる格子状の黒色パターンを配置するのが一般的である。ブラックマトリックスはガラス基板全体にクロムを蒸着し、エッチング処理によりパターン形成するのが一般的であるが、クロムを使用するため、高コスト、高反射率であり、廃液処理にも問題を有している。このため、微細加工のできる顔料分散法でブラックマトリックスを製造する検討が鋭意なされている。
【0005】
ブラックマトリックス形成用のブラックレジストは黒色顔料または数種の顔料を混合して黒色にした感光性組成物である。ブラックレジストは遮光を目的としているため、現像液に不溶の顔料を多量に含有する組成物である。このため、ブラックレジストは現像性が悪く、長時間の現像が必要であったり、必要とする解像力が得られない等の問題点があった。
【0006】
【発明が解決しようとする課題】
従来のブラックレジストは含有される多量の黒色顔料により現像性が著しく阻害され、極端な場合には非画線部が現像液に不溶であったり、あるいは現像が可能であっても解像力が不十分であり、ブラックマトリックス形成が著しく困難であった。現像液への溶解性が低い場合には現像時間を延ばす、あるいは溶解力の強い現像液を使う必要性が生じる。現像時間を延ばすことでは生産性が低下し、溶解性の強い現像液では画線部をも侵してしまうため解像性、密着性低下等の問題が発生する。本発明の目的は上記にあげた従来のブラックレジストの問題点を解決し、高現像性、高解像力のカラーフィルター用ブラックレジスト組成物を提供することにある。
【0007】
【課題を解決するための手段】
本発明者らは鋭意研究を進めた結果、黒色着色剤およびバインダー樹脂を含有する光硬化性樹脂組成物からなるカラーフィルター用ブラックレジスト組成物において、該黒色着色剤として、分散樹脂で分散処理されていて20〜200mg/gの分散樹脂を吸着しているカーボンブラックを用いることにより、現像性および解像力が改良され、高品位、低コストでカラーフィルターを製造できることを見出し、本発明に到達した。
【0008】
【発明の実施の形態】
以下、本発明をより詳細に説明する。
本発明ブラックレジスト組成物に用いられる光硬化性樹脂組成物は、ブラックレジスト用として十分な光硬化性を有するものなら特に限定されないが、黒色着色剤およびバインダー樹脂以外に、光重合開始剤、該光重合開始剤の作用により硬化するモノマーおよび溶剤を含有する構成をとるのが好ましい。
バインダー樹脂としては塗膜形成能を有する高分子化合物であれば特に制限は無く、具体的な例としては例えば下記の化合物が挙げられる。
1)ポリオレフィン系ポリマー
ポリエチレン、ポリプロピレン、ポリイソブチレン等
2)ジエン系ポリマー
ポリブタジエン、ポリイソプレン等
3)共役ポリエン構造を有するポリマー
ポリアセチレン系ポリマー、ポリフェニレン系ポリマー等
4)ビニルポリマー
ポリ塩化ビニル、ポリスチレン、酢酸ビニル、ポリビニルアルコール、ポリアクリ
ル酸、ポリアクリル酸エステル、ポリアクリルアミド、ポリアクリロニトリル、ポ
リビニルフェノール等
5)ポリエーテル
ポリフェニレンエーテル、ポリオキシラン、ポリオキセタン、ポリテトラヒドロフ
ラン、ポリエーテルケトン、ポリエーテルエーテルケトン、ポリアセタール等
6)フェノール樹脂
ノボラック樹脂、レゾール樹脂等
7)ポリエステル
ポリエチレンテレフタレート、ポリフェノールフタレインテレフタレート、ポリ
カーボネート、アルキッド樹脂、不飽和ポリエステル樹脂等
8)ポリアミド
ナイロン−6、ナイロン66、水溶性ナイロン、ポリフェニレンアミド等
9)ポリペプチド
ゼラチン、カゼイン等
10)エポキシ樹脂及びその変性物
ノボラックエポキシ樹脂、ビスフェノールエポキシ樹脂、ノボラックエポキシアク
リレート及び酸無水物による変性樹脂等
11)その他
ポリウレタン、ポリイミド、メラミン樹脂、尿素樹脂、ポリイミダゾール、ポリオ
キサゾール、ポリピロール、ポリアニリン、ポリスルフィド、ポリスルホン、セル
ロース類等
【0009】
これらの樹脂の中では樹脂側鎖または主鎖にカルボキシル基あるいはフェノール性水酸基等を有するものがアルカリ現像可能なため、公害防止の観点から好ましい。特にカルボキシル基を有する樹脂、例えば、アクリル酸(共)重合体、スチレン/無水マレイン酸樹脂、ノボラックエポキシアクリレートの酸無水物変性樹脂等は高アルカリ現像性なので好ましい。
さらに、アクリル樹脂は現像性に優れているので好ましく、その共重合体は様々なモノマーを選択して重合が可能なため、性能および製造制御の観点からより好ましい。
【0010】
より具体的にはカルボキシル基を含有するアクリル樹脂は、例えば、(メタ)アクリル酸、(無水)マレイン酸、クロトン酸、イタコン酸、フマル酸、などのカルボキシル基を有するモノマーとスチレン、α−メチルスチレン、(メタ)アクリル酸メチル、(メタ)アクリル酸エチル、(メタ)アクリル酸プロピル、(メタ)アクリル酸イソプロピル、(メタ)アクリル酸ブチル、酢酸ビニル、アクリロニトリル、(メタ)アクリルアミド、グリシジル(メタ)アクリレート、アリルグリシジルエーテル、エチルアクリル酸グリシジル、クロトン酸グリシジルエーテル、(メタ)アクリル酸クロライド、ベンジル(メタ)アクリレート、ヒドロキシエチル(メタ)アクリレート、N−メチロールアクリルアミド、N,Nジメチルアクリルアミド、N−メタクリロイルモルホリン、N,N−ジメチルアミノエチル(メタ)アクリレート、N,N−ジメチルアミノエチルアクリルアミド、などのコモノマーを共重合させたポリマーが挙げられる。中でも好ましいのは、構成モノマーとして少なくとも(メタ)アクリル酸あるいは(メタ)アクリル酸アルキルエーテルを含有するアクリル樹脂であり、さらに好ましくは(メタ)アクリル酸およびスチレンを含有するアクリル樹脂である。
【0011】
また、これらの樹脂は樹脂側鎖にエチレン性二重結合を付加させることもできる。樹脂側鎖に二重結合を付与することにより光硬化性が高まるため、解像性、密着性をさらに向上させることができ好ましい。エチレン性二重結合を導入する合成手段として、例えば、特公昭50−34443、特公昭50−34444などに記載の方法等が挙げられる。具体的には、カルボキシル基や水酸基にグリシジル基、エポキシシクロヘキシル基および(メタ)アクリロイル基を併せ持つ化合物やアクリル酸クロライドなどを反応させる方法が挙げられる。例えば、(メタ)アクリル酸グリシジル、アリルグリシジルエーテル、α−エチルアクリル酸グリシジル、クロトニルグリシジルエーテル、(イソ)クロトン酸グリシジルエーテル、(3,4−エポキシシクロヘキシル)メチル(メタ)アクリレート、(メタ)アクリル酸クロライド、(メタ)アリルクロライドなどの化合物を使用し、カルボキシル基や水酸基を有する樹脂に反応させることにより側鎖に重合基を有する樹脂を得ることができる。特に、(3,4−エポキシシクロヘキシル)メチル(メタ)アクリレートを反応させた樹脂が好ましい。
なお、本明細書において、「(メタ)アクリル〜」、「(メタ)アクリレート」等は、「アクリル〜またはメタクリル〜」、「アクリレートまたはメタクリレート」等を意味するものとし、例えば「(メタ)アクリル酸」は「アクリル酸またはメタクリル酸」を意味するものとする。
【0012】
これらのアクリル樹脂のGPCで測定した重量平均分子量の好ましい範囲は1000〜100,000を超えると現像性が低下する傾向がある。また、カルボキシル基の好ましい含有量の範囲は酸価で5〜200である。酸価が5以下であるとアルカリ現像液に不溶となり、また、200を超えると感度が低下することがある。
【0013】
光重合開始剤の作用により硬化するモノマーとしては、光重合開始剤の発生するラジカルの作用によりラジカル重合するモノマーおよび光重合開始剤から発生する酸の作用で付加縮合するモノマー等公知のいずれのものも用い得る。
前者の代表的例としては、エチレン性二重結合を有するモノマーが挙げられ、より具体的には、
イソブチルアクリレート、t−ブチルアクリレート、ラウリルアクリレート、セチルアクリレート、ステアリルアクリレート、シクロヘキシルアクリレート、イソボニルアクリレート、ベンジルアクリレート、2−メトキシエチルアクリレート、3−メトキシブチルアクリレート、エチルカルビトールアクリレート、フェノキシエチルアクリレート、テトラヒドロフリルアクリレート、フェノキシポリエチレングリコールアクリレート、メトキシプロピレングリコールアクリレート、2−ヒドロキシエチルアクリレート、2−ヒドロキシプロピルアクリレート、2−アクリロイルオキシエチルハイドロゲンフタレート、2−アクリロイルオキシプロピルハイドロゲンフタレート、2−アクリロイルオキシプロピルハイドロゲンフタレート、2−アクリロイルオキシプロピルテトラヒドロハイドロゲンフタレート、モルホリノエチルメタクリレート、トリフルオロエチルアクリレート、トリフルオロエチルメタクリレート、テトラフルオロプロピル(メタ)アクリレート、ヘキサフロオロプロピル(メタ)アクリレート、オクタフルオロペンチル(メタ)アクリレート、ヘプタデカフルオロドデシルアクリレート、トリメチルシロキシエチルメタクリレート、1,4−ブタンジオールジアクリレート、1,6−ヘキサンジオールジアクリレート、1,9−ノナンジオールジアクリレート、ネオペンチルグリコールジアクリレート、テトラエチレングリコールジアクリレート、トリプロピレングリコールジアクリレート、プロピレングリコールジアクリレート、グリセリンメタクリレートアクリレート、ビスフェノールA、エチレンオキサイド付加物ジアクリレート、トリメチロールプロパントリアクリレート、ペンタエリスリトールトリアクリレート、ペンタエリスリトールテトラアクリレート、トリメチロールプロパンエチレンオキサイド付加トリアクリレート、グリセリンプロピレンオキサイド付加トリアクリレート、トリスアクリロイルオキシエチルフォスフェート、ジペンタエリスリトールヘキサアクリレート、ノボラックエポキシのアクリル酸変性物、ノボラックエポキシのアクリル酸および酸無水物の変性物、N−ビニルピロリドン、N−ビニルカプロラクタム、アクリル化イソシアヌレート、ジペンタエリスリトールモノヒドロキシペンタアクリレート、ウレタンアクリレート、不飽和ポリエステルアクリレートなどが挙げられる。
これらのモノマーのなかではアクリルモノマー、特に3個以上の二重結合を有するアクリルモノマーが好ましい。これらのモノマーは単独または複数組み合わせて使用される。
一方、光重合開始剤から発生する酸の作用で付加縮合するモノマーとしては、メラミン、ベンゾグアナミン、グリコールウリルもしくは尿素にホルムアルデヒドを作用させた化合物またはそれらのアルキル変性化合物、エポキシ化合物およびレゾール化合物等の架橋作用を有する化合物が挙げられる。
【0014】
具体的には、三井サイアナミド社のサイメル(登録商標)300、301、303、350、736、738、370、771、325、327、703、701、266、267、285、232、235、238、1141、272、254、202、1156、1158は、メラミンにホルムアルデヒドを作用させた化合物またはそのアルキル変性物の例である。サイメル(登録商標)1123、1125、1128は、ベンゾグアナミンにホルムアルデヒドを作用させた化合物またはそのアルキル変性物の例である。サイメル(登録商標)1170、1171、1174、1172はグリコールウリルにホルムアルデヒドを作用させた化合物またはそのアルキル変性物の例である。尿素にホルムアルデヒドを作用させた化合物またはそのアルキル変性物の例として三井サイアナミド社のUFR(登録商標)65、300を挙げることができる。
【0015】
エポキシ化合物の例として、トリグリシジルトリスヒドロキシエチルイソシアヌレート、アリルグリシジルエーテル、エチルヘキシルグリシジルエーテル、フェニルグリシジルエーテル、フェノールグリシジルエーテル、ラウリルアルコールグリシジルエーテル、アジピン酸グリシジルエーテル、フタル酸グリシジルエーテル、ジブロモフェニルグリシジルエーテル、ジブロモネオペンチルグリコールジグリシジルエーテル、グリシジルフタルイミド、(ポリ)エチレングリコールグリシジルエーテル、ポリプロピレングリコールジグリシジルエーテル、ネオペンチルグリコールジグリシジルエーテル、グリセリンポリグリシジルエーテル、トリメチロールプロパンポリグリシジルエーテル、ブチルグリシジルエーテル等を挙げることができる。
【0016】
この中で特に好ましい化合物として、分子中に−N(CH2 OR)2 基を有する化合物(式中、Rは水素原子またはアルキル基を示す)が挙げられる。詳しくは、尿素あるいはメラミンにホルムアルデヒドを作用させた化合物またはそのアルキル変性物が特に好ましい。
レゾール化合物の例として、群栄化学社製のPP−3000s、PP−3000A、RP−2978、SP−1974、SP−1975、SP−1976、SP−1977、RP−3973等が挙げられる。
【0017】
これらのバインダー樹脂およびモノマーの中では、前記のカルボキシル基を含有するアクリル樹脂とアクリルモノマーとの組合せが、現像性の点で最も好ましい。
光重合開始剤としては、公知のいずれのものも用いることができ、紫外線によりエチレン性不飽和基を重合させるラジカルを発生させることのできる化合物および紫外線により酸を発生させる化合物が挙げられる。
【0018】
具体的には2−(4−メトキシフェニル)−4、6−ビス(トリクロロメチル)−s−トリアジン、2−(4−メトキシナフチル)−4、6−ビス(トリクロロメチル)−s−トリアジン、2−(4−エトキシナフチル)−4、6−ビス(トリクロロメチル)−s−トリアジン、2−(4−エトキシカルボニルナフチル)−4、6−ビス(トリクロロメチル)−s−トリアジン、などのハロメチル化トリアジン誘導体、ハロメチル化オキサゾール誘導体、2−(2′−クロロフェニル)−4,5−ジフェニルイミダゾール2量体、2−(2′−クロロフェニル)−4,5−ビス(3′−メトキシフェニル)イミダゾール2量体、2−(2′−フルオロフェニル)−4,5−ジフェニルイミダゾール2量体、2−(2′−メトキシフェニル)−4,5−ジフェニルイミダゾール2量体、(4′−メトキシフェニル)−4,5−ジフェニルイミダゾール2量体などのイミダゾール誘導体、ベンゾインメチルエーテル、ベンゾインフェニルエーテル、ベンゾインイソブチルエーテル、ベンゾインイソプロピルエーテルなどのベンゾイン、ベンゾインアルキルエーテル類、2−メチルアントラキノン、2−エチルアントラキノン、2−t−ブチルアントラキノン、1−クロロアントラキノンなどのアントラキノン誘導体、ベンズアンスロン誘導体、ベンゾフェノン、4,4′−ビス(ジメチルアミノ)ベンゾフェノン(ミヒラーズケトン)、4,4′−ビス(ジエチルアミノ)ベンゾフェノン、2−メチルベンゾフェノン、3−メチルベンゾフェノン、4−メチルベンゾフェノン、2−クロロベンゾフェノン、4−ブロモベンゾフェノン、2−カルボキシベンゾフェノンなどのベンゾフェノン誘導体、2,2−ジメトキシ−2−フェニルアセトフェノン、2,2−ジエトキシアセトフェノン、1−ヒドロキシシクロヘキシルフェニルケトン、α−ヒドロキシ−2−メチルフェニルプロパノン、1−ヒドロキシ−1−メチルエチル−(p−イソプロピルフェニル)ケトン、1−ヒドロキシ−1−(p−ドデシルフェニル)ケトン、2−メチル−(4′−(メチルチオ)フェニル)−2−モルホリノ−1−プロパノン、1,1,1−トリクロロメチル−(p−ブチルフェニル)ケトンなどのアセトフェノン誘導体、チオキサントン、2−エチルチオキサントン、2−イソプロピルチオキサントン、2−クロロチオキサントン、2,4−ジメチルチオキサントン、2,4−ジエチルチオキサントン、2,4−ジイソプロピルチオキサントンなどのチオキサントン誘導体、p−ジメチルアミノ安息香酸エチル、p−ジエチルアミノ安息香酸エチルなどの安息香酸エステル誘導体、9−フェニルアクリジン、9−(p−メトキシフェニル)アクリジンなどのアクリジン誘導体、9,10−ジメチルベンズフェナジンなどのフェナジン誘導体、ジ−シクロペンタジエニル−Ti−ジ−クロライド、ジ−シクロペンタジエニル−Ti−ビス−フェニル、ジ−シクロペンタジエニル−Ti−ビス−2,3,4,5,6−ペンタフルオロフェニ−1−イル、ジ−シクロペンタジエニル−Ti−ビス−2,3,5,6−テトラフルオロフェニル−1−イル、ジ−シクロペンタジエニル−Ti−ビス−2,4,6−トリフルオロフェニ−1−イル、ジ−シクロペンタジエニル−Ti−2,6−ジ−フルオロフェニ−1−イル、ジ−シクロペンタジエニル−Ti−2,4−ジ−フルオロフェニ−1−イル、ジ−メチルシクロペンタジエニル−Ti−ビス−2,3,4,5,6−ペンタフルオロフェニ−1−イル、ジ−メチルシクロペンタジエニル−Ti−ビス−2,6−ジ−フルオロフェニ−1−イル、ジ−シクロペンタジエニル−Ti−2,6−ジ−フルオロ−3−(ピル−1−イル)−フェニ−1−イルなどのチタノセン誘導体等が挙げられる。これらの光重合開始剤は単独または複数組み合わせて使用される。例えば、特公昭53−12802、特開平1−279903、特開平2−48664、特開平4−164902、特開平6−75373などに記載の開始剤の組み合わせなどが挙げられる。
【0019】
本発明で用いるカーボンブラックとしては、具体的に三菱化学社製のカーボンブラック#2400、#2350、#2300、#2200、#1000、#980、#970、#960、#950、#900、#850、MCF88、#650、MA600、MA7、MA8、MA11、MA100、MA220、IL30B、IL31B、IL7B、IL11B、IL52B、#4000、#4010、#55、#52、#50、#47、#45、#44、#40、#33、#32、#30、#20、#10、#5、CF9、#3050、#3150、#3250、#3750、#3950、ダイヤブラックA、ダイヤブラックN220M、ダイヤブラックN234、ダイヤブラックI、ダイヤブラックLI、ダイヤブラックII、ダイヤブラックN339、ダイヤブラックSH、ダイヤブラックSHA、ダイヤブラックLH、ダイヤブラックH、ダイヤブラックHA、ダイヤブラックSF、ダイヤブラックN550M、ダイヤブラックE、ダイヤブラックG、ダイヤブラックR、ダイヤブラックN760M、ダイヤブラックLP。キャンカーブ社製のカーボンブラックサーマックスN990、N991、N907、N908、N990、N991、N908。旭カーボン社製のカーボンブラック旭#80、旭#70、旭#70L、旭F−200、旭#66、旭#66HN、旭#60H、旭#60U、旭#60、旭#55、旭#50H、旭#51、旭#50U、旭#50、旭#35、旭#15、アサヒサーマル、デグサ社製のカーボンブラックColorBlack Fw200、ColorBlack Fw2、ColorBlack Fw2V、ColorBlack Fw1、ColorBlack Fw18、ColorBlack S170、ColorBlackS160、SpecialBlack6、SpecialBlack5、SpecialBlack4、SpecialBlack4A、PrintexU、PrintexV、Printex140U、Printex140V等が挙げられる。
【0020】
これらのカーボンブラックはそのままの状態では凝集しているため、本発明では分散処理が必要である。カーボンブラックに分散剤及び溶剤を加えてミルベースをつくり、それをボールミル、サンドミル、ビーズミル、3本ロール、ペイントシェーカー、超音波、バブルホモジナイザーなどの方法により分散処理を行う。これらの処理方法は2つ以上組合わせることも可能である。分散剤には本発明レジスト組成物のバインダー樹脂をそのまま用いるほか、BYK社製のAnti−Terra−U、Disperbyk−160、161、162、163、ZENECA社製のSolspers20000、24000GR、26000、28000、楠本化成社製のDA−703−50、NDC−8194L、NDC−8203L、NDC−8257L、KS−860、花王社製のホモゲナールL−18、L−1820、L−95、L−100、日本ペイント社製のVP5000、グッドリッチ社製のE5703P、ユニオンカーバイド社製のVAGH、東洋紡社製のUR8200、日本ゼオン社製のMR113、等の公知の分散樹脂が使用可能である。これらの分散樹脂は単独でも、また、複数組み合わせても使用可能である。これらの分散樹脂で好ましいのは前記のカルボキシル基を含有するアクリル樹脂である。分散処理によりカーボンブラック表面に樹脂が吸着されると同時にカーボンブラック粒子の凝集が破壊され粒径が微細化される。カーボンブラックの好ましい平均粒径は0.01〜1μの範囲である。本発明では、カーボンブラック表面上に吸着される樹脂は樹脂吸着量で1〜200mg/gの範囲である必要がある。さらに好ましくは5〜180mg/gである。より好ましくは20〜160mg/gである。樹脂吸着量が上記範囲の上限を越えると現像性、解像性の低下が起こる。また、下限以下では分散が安定化されずに短期間で再凝集が起こる。なお、樹脂吸着量はカーボンブラック分散液を超遠心分離させ、上澄みの樹脂濃度を重量法によりもとめ、仕込量との差から決定することができる。
【0021】
より具体的には、樹脂中にカーボンブラックを分散したペーストをプロピレングリコールモノメチルエーテルアセテートで10倍に希釈し、日本エマソン(株)製BRANSON5200を用いて超音波で3分間処理した後、27000rpmで1時間超遠心分離し、上澄み液を120℃2時間乾固させ、精密天秤により樹脂重量を求め、仕込量との差から決定することができる。
【0022】
本発明レジスト組成物は、分散性、塗布性向上のため、溶剤を含有することが好ましいが溶剤としては具体的に、ジイソプロピルエーテル、ミネラルスピリット、n−ペンタン、アミルエーテル、エチルカプリレート、n−ヘキサン、ジエチルエーテル、イソプレン、エチルイソブチルエーテル、ブチルステアレート、n−オクタン、バルソル#2、アプコ#18ソルベント、ジイソブチレン、アミルアセテート、ブチルブチレート、アプコシンナー、ブチルエーテル、ジイソブチルケトン、メチルシクロヘキセン、メチルノニルケトン、プロピルエーテル、ドデカン、Socal solvent No.1およびNo.2、アミルホルメート、ジヘキシルエーテル、ジイソプロピルケトン、ソルベッソ#150、(n,sec,t)−酢酸ブチル、ヘキセン、シェル、TS28、ソルベント、ブチルクロライド、エチルアミルケトン、エチルベンゾネート、アミルクロライド、エチレングリコールジエチルエーテル、エチルオルソホルメート、メトキシメチルペンタノン、メチルブチルケトン、メチルヘキシルケトン、メチルイソブチレート、ベンゾニトリル、エチルプロピオネート、メチルセロソルブアセテート、メチルイソアミルケトン、メチルイソブチルケトン、プロピルアセテート、アミルアセテート、アミルホルメート、ビシクロヘキシル、ジエチレングリコールモノエチルエーテルアセテート、ジペンテン、メトキシメチルペンタノール、メチルアミルケトン、メチルイソプロピルケトン、プロピルプロピオネート、プロピレングリコール−t−ブチルエーテル、メチルエチルケトン、メチルセロソルブ、エチルセロソルブ、エチルセロソルブアセテート、カルビトール、シクロヘキサノン、酢酸エチル、プロピレングリコール、プロピレングリコールモノメチルエーテル、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテル、プロピレングリコールモノエチルエーテルアセテート、ジプロピレングリコールモノエチルエーテル、ジプロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテルアセテート、ジプロピレングリコールモノメチルエーテルアセテート、3−メトキシプロピオン酸、3−エトキシプロピオン酸、3−エトキシプロピオン酸エチル、3−メトキシプロピオン酸メチル、3−メトキシプロピオン酸エチル、3−メトキシプロピオン酸プロピル、3−メトキシプロピオン酸ブチル、ジグライム、ジプロピレングリコールモノメチルエーテル、エチレングリコールアセテート、エチルカルビトール、ブチルカルビトール、エチレングリコールモノブチルエーテル、プロピレングリコール−t−ブチルエーテル、3−メチル−3−メトキシブタノール、トリプロピレングリコールメチルエーテル、3−メチル−3−メトキシブチルアセテートなどの有機溶剤が挙げられる。
溶剤は沸点が100℃から200℃の範囲のものを選択するのが好ましい。より好ましくは120℃〜170℃の沸点をもつものである。これらの溶剤は単独もしくは混合して使用される。
【0023】
本発明はバインダー樹脂100重量部に対しモノマーは5重量部〜80重量部、光重合開始剤は0.01〜30重量部、カーボンブラックは100重量部〜500重量部、溶剤は200〜10000重量部の範囲で含有されるのが好ましい。
モノマーが上記範囲以下であると像露光された画線部の架橋密度が十分でなくなり良好な画像が得られにくく、また、上記範囲を超えると乾燥後のレジスト膜のベタつきが大きくなり作業性に劣るようになることがある。光重合開始剤の添加量が上記範囲以下であると十分な感度がえられず、また、上記範囲を超えると、ときに開始剤が感光液から析出することがある。カーボンブラックの添加量が上記範囲以下であると十分な色濃度が出しにくく、遮光力も劣り、また、上記範囲を超えると顔料の分散安定性を保持できなくなるため、顔料の凝集が起こり均一な塗膜が得られなくなることがある。溶剤の添加量が上記範囲以下であると塗布むらがでやすく膜厚の均一性に欠け、上記範囲を超えると十分な膜厚を得ることができず、また、ピンホールなどの塗布欠陥がでやすくなることがある。
尚、カーボンブラックの全固形分中の濃度は、25〜70重量%であるのが好ましい。
本発明には上記の成分以外に増感剤、塗布性改良剤、重合禁止剤、可塑剤、難燃剤、などを好適に添加することができる。これらは単独もしくは数種併用することも可能である。
【0024】
本発明の組成物はスピンコーター、ロールコーター、カーテンコーター、スクリーン印刷などの公知の方法でガラス基板に塗布される。塗布膜厚は0.1μm〜10μmが好ましい。塗布膜を乾燥させるためにコンベクションオーブンまたはホットプレートが使用される。乾燥温度は50℃〜150℃、乾燥時間は30秒〜60分が好適である。露光は高圧水銀灯、超高圧水銀灯、キセノン燈、カーボンアーク燈等が一般的に用いられ、マスクを通して露光することによりレジスト膜に潜像が形成される。その後、未露光部分を溶解させる溶剤で現像することにより画像が形成される。現像液はアセトン、トルエン、MEKなどの有機溶剤も使用可能であるが、環境問題からアルカリ現像液の方が好ましい。一例をあげるならば水酸化ナトリウム水溶液、水酸化カリウム水溶液、炭酸ナトリウム水溶液、炭酸カリウム、アンモニア水、テトラメチルアンモニウムハイドロオキサイド水溶液、などが用いられる。アルカリ現像液には界面活性剤、消泡剤などが添加されていてもよい。現像方法としては、特に制限はなく、パドル法、ディッピング法、スプレー法など公知の方法でおこなうことができる。またプリウエットを採用してもよい。画像形成後現像液の乾燥、レジスト膜の硬化を高める目的でポストベーク、後光硬化などを採用してもよい。
【0025】
【実施例】
次に、実施例を用いて具体的に説明するが、本発明はその要旨を超えない限り以下の実施例に限定されるものではない。
合成例−1
酸価200、重量平均分子量5000のスチレン・アクリル酸樹脂20g、p−メトキシフェノール0.2g、ドデシルトリメチルアンモニウムクロリド0.2g、プロピレングリコールモノメチルエーテルアセテート40gをフラスコに仕込み(3,4エポキシシクロヘキシル)メチルアクリレート7.6gを滴下し100℃の温度で30時間反応させた。反応液を水に再沈殿、乾燥させて樹脂を得た。KOHによる中和滴定をおこなったところ樹脂の酸価は80であった。
【0026】
カーボンブラックの分散
カーボンブラック(三菱化学(株)製、MA220)100gに合成例−1の樹脂ワニス100g、プロピレングリコールモノメチルエーテルアセテート100gを混合、撹拌し、ミルベースを作った。これをビーズミルにより処理した。ビーズは粒径0.5mm、材質ジルコニアを用いた。分散温度は約60℃でディスク周速及び分散時間を変えて樹脂吸着量の異なるカーボンブラックペーストを作った。
【0027】
樹脂吸着量の測定
上記カーボンブラックペーストを一部採取し、プロピレングリコールモノメチルエーテルアセテートで10倍に希釈し、日本エマソン(株)製 BRANSON5200を用いて超音波で3分間処理した。このサンプルを超遠心分離(27000rpm、1時間)にかけ上澄み液をとった。上澄み液を120℃で2時間乾固させた後、精密天秤により樹脂重量を求め、仕込量との差からカーボンブラックに吸着した樹脂量を算出した。
【0028】
ブラックレジストの調合
1)カーボンブラックペースト:40g
2)ジペンタエリスリトールヘキサアクリレート5g
3)ジシクロペンタジエニル−Ti−ビス−2,6−ジフルオロ−3−(ピロール−1−イル)−フェニル−1−イル0.5g
4)4,4′−ビス(ジエチルアミノ)ベンゾフェノン0.5g
5)プロピレングリコールモノメチルエーテルアセテート30g
以上の割合で混合しブラックレジスト感光液を調合した。
【0029】
レジストの評価
ブラックレジスト感光液をスピンコーターにてガラス基板に塗布し、ホットプレートで80℃、1分間乾燥した。乾燥後のレジスト膜厚は1μであった。このサンプルをマスクを通して高圧水銀燈で2000mj/cm2 像露光した。温度25℃、濃度0.05%の水酸化カリウム水溶液に浸漬現像してレジストパターンを得た。非画線部が現像される時間を目視観察により現像速度を求めた。また、形成できる最小レジストパターンを顕微鏡で観察し解像力を求めた。
【0030】
【表1】
【0031】
【発明の効果】
表−1の実施例の如く、本発明のブラックレジスト組成物は現像性、解像性が高いため高精度のブラックマトリックスを高能率で形成できる。従って、本発明のレジスト組成物を用いることにより、高品位、低コストでカラーフィルターを製造することができる。[0001]
BACKGROUND OF THE INVENTION
The present invention is a black resist composition suitable for producing a color filter used in combination with a liquid crystal display device or a solid-state imaging device. It can be used suitably for black pattern formation used as a black matrix.
[0002]
[Prior art]
The color filter is obtained by forming fine pixels such as red, green, and blue on a glass substrate by a dyeing method, a printing method, an electrodeposition method, a pigment dispersion method, or the like. These known methods have the following characteristics and problems.
A color filter by a dyeing method is manufactured by forming an image with a photosensitive resin obtained by mixing dichromate as a photosensitizer with gelatin, polyvinyl alcohol, or the like, and then dyeing. In order to form multiple colors on the same substrate, a dye-proofing process is essential, and there is a problem that the process becomes complicated. Moreover, since the dye is used, it is inferior in light resistance. Dichromic acid used as a photosensitizer is also a problem from the viewpoint of pollution prevention.
[0003]
The color filter by printing is a method such as screen printing or flexographic printing, which transfers thermosetting or photocurable ink to a glass substrate. Since image formation and dyeing are unnecessary, the process is simple, but a high-definition image cannot be obtained, and there is a problem in the smoothness of the ink.
A color filter based on the electrodeposition method is one in which a glass substrate with an electrode is immersed in a bath containing a pigment or dye, and the hue is adhered by electrophoresis. Although it is excellent in smoothness, it is difficult to form a complicated pattern because an electrode is required on the glass substrate in advance.
[0004]
In the pigment dispersion method, an image is formed with a colored resist in which a pigment is dispersed in a photocurable resin. There are advantages such as high heat resistance and no need for dyeing, and high-precision image formation is possible. The pigment dispersion method is superior to the above production method in terms of quality and production cost, and is currently the mainstream of color filter production.
A grid-like black pattern called a black matrix is generally arranged between the red, blue, and green colored images of the color filter for the purpose of usually improving contrast. Black matrix is generally formed by depositing chromium on the entire glass substrate and patterning it by etching. However, because it uses chromium, it has high cost and high reflectivity, and has a problem in waste liquid treatment. Yes. For this reason, studies for producing a black matrix by a pigment dispersion method capable of fine processing have been intensively conducted.
[0005]
A black resist for forming a black matrix is a photosensitive composition in which a black pigment or several kinds of pigments are mixed to be black. Since the black resist is intended for light shielding, it is a composition containing a large amount of a pigment insoluble in the developer. For this reason, the black resist has poor developability, and there are problems such as long-time development and the required resolution cannot be obtained.
[0006]
[Problems to be solved by the invention]
In conventional black resists, developability is significantly hindered by the large amount of black pigment contained, and in extreme cases, the non-image area is insoluble in the developer or the resolution is insufficient even if development is possible And formation of a black matrix was extremely difficult. When the solubility in the developing solution is low, it is necessary to extend the developing time or use a developing solution having a strong dissolving power. If the development time is extended, the productivity is lowered, and a developing solution having a strong solubility also erodes the image area, which causes problems such as a decrease in resolution and adhesion. An object of the present invention is to solve the above-mentioned problems of the conventional black resist and to provide a black resist composition for a color filter having high developability and high resolution.
[0007]
[Means for Solving the Problems]
As a result of diligent research, the present inventors have conducted a dispersion treatment with a dispersion resin as the black colorant in a black resist composition for a color filter comprising a photocurable resin composition containing a black colorant and a binder resin. Thus , the present inventors have found that by using carbon black adsorbing 20 to 200 mg / g of a dispersed resin , the developability and resolution are improved, and a color filter can be produced with high quality and low cost.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in more detail.
The photocurable resin composition used in the black resist composition of the present invention is not particularly limited as long as it has sufficient photocurability for a black resist. In addition to the black colorant and the binder resin , a photopolymerization initiator , It is preferable to take a constitution containing a monomer and a solvent that are cured by the action of the photopolymerization initiator.
The binder resin is not particularly limited as long as it is a polymer compound capable of forming a coating film, and specific examples include the following compounds.
1) Polyolefin polymer Polyethylene, polypropylene, polyisobutylene, etc. 2) Diene polymer, polybutadiene, polyisoprene, etc. 3) Polymer having conjugated polyene structure Polyacetylene polymer, polyphenylene polymer, etc. 4) Vinyl polymer Polyvinyl chloride, polystyrene, vinyl acetate , Polyvinyl alcohol, Polyacrylic acid, Polyacrylic acid ester, Polyacrylamide, Polyacrylonitrile, Polyvinylphenol, etc. 5) Polyether Polyphenylene ether, Polyoxirane, Polyoxetane, Polytetrahydrofuran, Polyetherketone, Polyetheretherketone , Polyacetal, etc. 6) Phenol resin Novolac resin, Resole resin, etc. 7) Polyester Polyethylene terephthalate, Poly Rephenolphthalein terephthalate, polycarbonate, alkyd resin, unsaturated polyester resin, etc. 8) Polyamide, nylon-6, nylon 66, water-soluble nylon, polyphenyleneamide, etc. 9) Polypeptide gelatin, casein, etc. 10) Epoxy resin and its modified products Novolac epoxy resin, bisphenol epoxy resin, modified resin with novolac epoxy acrylate and acid anhydride, etc. 11) Others Polyurethane, polyimide, melamine resin, urea resin, polyimidazole, polyoxazole, polypyrrole, polyaniline, polysulfide, polysulfone, celluloses Etc. [0009]
Among these resins, those having a carboxyl group or a phenolic hydroxyl group in the resin side chain or main chain can be alkali-developed, which is preferable from the viewpoint of pollution prevention. In particular, a resin having a carboxyl group, for example, an acrylic acid (co) polymer, a styrene / maleic anhydride resin, an acid anhydride-modified resin of novolak epoxy acrylate, and the like are preferable because of high alkali developability.
Furthermore, an acrylic resin is preferable because it is excellent in developability, and a copolymer thereof is more preferable from the viewpoint of performance and production control because various monomers can be selected and polymerized.
[0010]
More specifically, the acrylic resin containing a carboxyl group is, for example, a monomer having a carboxyl group such as (meth) acrylic acid, (anhydrous) maleic acid, crotonic acid, itaconic acid, fumaric acid, styrene, α-methyl, etc. Styrene, methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, isopropyl (meth) acrylate, butyl (meth) acrylate, vinyl acetate, acrylonitrile, (meth) acrylamide, glycidyl (meth) ) Acrylate, allyl glycidyl ether, glycidyl ethyl acrylate, glycidyl crotonic acid ether, (meth) acrylic acid chloride, benzyl (meth) acrylate, hydroxyethyl (meth) acrylate, N-methylol acrylamide, N, N dimethylacrylamid , N- methacryloyl morpholine, N, N- dimethylaminoethyl (meth) acrylate, N, N- dimethylaminoethyl acrylamide, polymers obtained by copolymerizing comonomers such. Among them, an acrylic resin containing at least (meth) acrylic acid or (meth) acrylic acid alkyl ether as a constituent monomer is preferable, and an acrylic resin containing (meth) acrylic acid and styrene is more preferable.
[0011]
Moreover, these resins can also add an ethylenic double bond to the resin side chain. Since the photocurability is increased by imparting a double bond to the resin side chain, the resolution and adhesion can be further improved, which is preferable. Examples of the synthesis means for introducing an ethylenic double bond include the methods described in JP-B-50-34443, JP-B-50-34444, and the like. Specific examples include a method of reacting a compound having both a glycidyl group, an epoxycyclohexyl group and a (meth) acryloyl group with a carboxyl group or a hydroxyl group, or acrylic acid chloride. For example, glycidyl (meth) acrylate, allyl glycidyl ether, glycidyl α-ethyl acrylate, crotonyl glycidyl ether, (iso) crotonic acid glycidyl ether, (3,4-epoxycyclohexyl) methyl (meth) acrylate, (meth) By using a compound such as acrylic acid chloride or (meth) allyl chloride and reacting with a resin having a carboxyl group or a hydroxyl group, a resin having a polymer group in the side chain can be obtained. In particular, a resin obtained by reacting (3,4-epoxycyclohexyl) methyl (meth) acrylate is preferable.
In this specification, “(meth) acryl-”, “(meth) acrylate” and the like mean “acryl- or methacryl-”, “acrylate or methacrylate”, and the like, for example, “(meth) acryl” "Acid" shall mean "acrylic acid or methacrylic acid".
[0012]
When the preferable range of the weight average molecular weight measured by GPC of these acrylic resins exceeds 1000 to 100,000, the developability tends to decrease. Moreover, the range of preferable content of a carboxyl group is 5-200 in an acid value. When the acid value is 5 or less, it becomes insoluble in an alkaline developer, and when it exceeds 200, the sensitivity may be lowered.
[0013]
As the monomer cured by the action of the photopolymerization initiator, any known monomer such as a monomer that undergoes radical polymerization by the action of a radical generated by the photopolymerization initiator and a monomer that undergoes addition condensation by the action of an acid generated from the photopolymerization initiator. Can also be used.
A typical example of the former is a monomer having an ethylenic double bond, and more specifically,
Isobutyl acrylate, t-butyl acrylate, lauryl acrylate, cetyl acrylate, stearyl acrylate, cyclohexyl acrylate, isobornyl acrylate, benzyl acrylate, 2-methoxyethyl acrylate, 3-methoxybutyl acrylate, ethyl carbitol acrylate, phenoxyethyl acrylate, tetrahydrofuryl Acrylate, phenoxypolyethylene glycol acrylate, methoxypropylene glycol acrylate, 2-hydroxyethyl acrylate, 2-hydroxypropyl acrylate, 2-acryloyloxyethyl hydrogen phthalate, 2-acryloyloxypropyl hydrogen phthalate, 2-acryloyloxypropyl hydrogen phthalate, 2 Acryloyloxypropyltetrahydrophthalate, morpholinoethyl methacrylate, trifluoroethyl acrylate, trifluoroethyl methacrylate, tetrafluoropropyl (meth) acrylate, hexafluoropropyl (meth) acrylate, octafluoropentyl (meth) acrylate, heptadecafluorododecyl Acrylate, trimethylsiloxyethyl methacrylate, 1,4-butanediol diacrylate, 1,6-hexanediol diacrylate, 1,9-nonanediol diacrylate, neopentyl glycol diacrylate, tetraethylene glycol diacrylate, tripropylene glycol diacrylate Acrylate, propylene glycol diacrylate, glycerin methacrylate Acrylate, bisphenol A, ethylene oxide adduct diacrylate, trimethylolpropane triacrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, trimethylolpropane ethylene oxide addition triacrylate, glycerin propylene oxide addition triacrylate, trisacryloyloxyethyl phosphate , Dipentaerythritol hexaacrylate, novolac epoxy modified acrylic acid, novolak epoxy modified acrylic acid and anhydride, N-vinylpyrrolidone, N-vinylcaprolactam, acrylated isocyanurate, dipentaerythritol monohydroxypentaacrylate , Urethane acrylate, unsaturated polyester acrylate And so on.
Among these monomers, acrylic monomers, particularly acrylic monomers having 3 or more double bonds are preferable. These monomers are used alone or in combination.
On the other hand, as a monomer which undergoes addition condensation by the action of an acid generated from a photopolymerization initiator, melamine, benzoguanamine, glycoluril or urea is a compound obtained by acting formaldehyde or an alkyl-modified compound thereof, an epoxy compound or a resole compound. Examples thereof include compounds having an action.
[0014]
Specifically, Mitsui Cyanamid's Cymel (registered trademark) 300, 301, 303, 350, 736, 738, 370, 771, 325, 327, 703, 701, 266, 267, 285, 232, 235, 238, 1141, 272, 254, 202, 1156, 1158 are examples of compounds in which formaldehyde is allowed to act on melamine or alkyl modified products thereof. Cymel (registered trademark) 1123, 1125, and 1128 are examples of a compound obtained by allowing formaldehyde to act on benzoguanamine or an alkyl-modified product thereof. Cymel (registered trademark) 1170, 1171, 1174, and 1172 are examples of compounds obtained by allowing formaldehyde to act on glycoluril or alkyl-modified products thereof. UFR (registered trademark) 65, 300 of Mitsui Cyanamid Co., Ltd. can be given as an example of a compound obtained by reacting urea with formaldehyde or an alkyl modified product thereof.
[0015]
Examples of epoxy compounds include triglycidyl trishydroxyethyl isocyanurate, allyl glycidyl ether, ethylhexyl glycidyl ether, phenyl glycidyl ether, phenol glycidyl ether, lauryl alcohol glycidyl ether, adipic acid glycidyl ether, phthalic acid glycidyl ether, dibromophenyl glycidyl ether, Dibromoneopentyl glycol diglycidyl ether, glycidyl phthalimide, (poly) ethylene glycol glycidyl ether, polypropylene glycol diglycidyl ether, neopentyl glycol diglycidyl ether, glycerin polyglycidyl ether, trimethylolpropane polyglycidyl ether, butyl glycidyl ether, etc. It is possible .
[0016]
Among these, particularly preferred compounds include compounds having a —N (CH 2 OR) 2 group in the molecule (wherein R represents a hydrogen atom or an alkyl group). Specifically, a compound obtained by reacting formaldehyde with urea or melamine or an alkyl-modified product thereof is particularly preferable.
Examples of the resol compound include PP-3000s, PP-3000A, RP-2978, SP-1974, SP-1975, SP-1976, SP-1977, and RP-3972 manufactured by Gunei Chemical Co., Ltd.
[0017]
Among these binder resins and monomers, the combination of the above acrylic resin containing a carboxyl group and an acrylic monomer is most preferable in terms of developability.
As the photopolymerization initiator, any known photopolymerization initiator can be used, and examples thereof include a compound capable of generating a radical for polymerizing an ethylenically unsaturated group by ultraviolet rays and a compound capable of generating an acid by ultraviolet rays.
[0018]
Specifically, 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-methoxynaphthyl) -4,6-bis (trichloromethyl) -s-triazine, Halomethyl such as 2- (4-ethoxynaphthyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-ethoxycarbonylnaphthyl) -4,6-bis (trichloromethyl) -s-triazine Triazine derivatives, halomethylated oxazole derivatives, 2- (2'-chlorophenyl) -4,5-diphenylimidazole dimer, 2- (2'-chlorophenyl) -4,5-bis (3'-methoxyphenyl) imidazole Dimer, 2- (2'-fluorophenyl) -4,5-diphenylimidazole dimer, 2- (2'-methoxyphenyl)- , 5-diphenylimidazole dimer, imidazole derivatives such as (4′-methoxyphenyl) -4,5-diphenylimidazole dimer, benzoin such as benzoin methyl ether, benzoin phenyl ether, benzoin isobutyl ether, benzoin isopropyl ether, Benzoin alkyl ethers, 2-methylanthraquinone, 2-ethylanthraquinone, 2-t-butylanthraquinone, anthraquinone derivatives such as 1-chloroanthraquinone, benzanthrone derivatives, benzophenone, 4,4'-bis (dimethylamino) benzophenone (Michler's ketone) ), 4,4'-bis (diethylamino) benzophenone, 2-methylbenzophenone, 3-methylbenzophenone, 4-methylbenzophenone, 2-chloro Benzophenone derivatives such as benzophenone, 4-bromobenzophenone, 2-carboxybenzophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxyacetophenone, 1-hydroxycyclohexyl phenyl ketone, α-hydroxy-2-methylphenyl Propanone, 1-hydroxy-1-methylethyl- (p-isopropylphenyl) ketone, 1-hydroxy-1- (p-dodecylphenyl) ketone, 2-methyl- (4 ′-(methylthio) phenyl) -2- Acetophenone derivatives such as morpholino-1-propanone, 1,1,1-trichloromethyl- (p-butylphenyl) ketone, thioxanthone, 2-ethylthioxanthone, 2-isopropylthioxanthone, 2-chlorothioxanthone, 2,4-di Thiolxanthone derivatives such as tilthioxanthone, 2,4-diethylthioxanthone, 2,4-diisopropylthioxanthone, benzoic acid ester derivatives such as ethyl p-dimethylaminobenzoate, ethyl p-diethylaminobenzoate, 9-phenylacridine, 9- ( acridine derivatives such as p-methoxyphenyl) acridine, phenazine derivatives such as 9,10-dimethylbenzphenazine, di-cyclopentadienyl-Ti-di-chloride, di-cyclopentadienyl-Ti-bis-phenyl, di -Cyclopentadienyl-Ti-bis-2,3,4,5,6-pentafluorophen-1-yl, di-cyclopentadienyl-Ti-bis-2,3,5,6-tetrafluorophenyl -1-yl, di-cyclopentadienyl-Ti-bi -2,4,6-trifluorophen-1-yl, di-cyclopentadienyl-Ti-2,6-di-fluorophen-1-yl, di-cyclopentadienyl-Ti-2,4- Di-fluorophen-1-yl, di-methylcyclopentadienyl-Ti-bis-2,3,4,5,6-pentafluorophen-1-yl, di-methylcyclopentadienyl-Ti-bis -Titanocene derivatives such as 2,6-di-fluorophen-1-yl, di-cyclopentadienyl-Ti-2,6-di-fluoro-3- (pyr-1-yl) -phen-1-yl Etc. These photopolymerization initiators are used alone or in combination. For example, combinations of initiators described in JP-B-53-12802, JP-A-1-279903, JP-A-2-48664, JP-A-4-164902, JP-A-6-75373 and the like can be mentioned.
[0019]
The carbon black used in the present invention is specifically carbon black # 2400, # 2350, # 2300, # 2200, # 1000, # 980, # 970, # 960, # 950, # 900, # 900 manufactured by Mitsubishi Chemical Corporation. 850, MCF88, # 650, MA600, MA7, MA8, MA11, MA100, MA220, IL30B, IL31B, IL7B, IL11B, IL52B, # 4000, # 4010, # 55, # 52, # 50, # 47, # 45, # 44, # 40, # 33, # 32, # 30, # 20, # 10, # 5, CF9, # 3050, # 3150, # 3250, # 3750, # 3950, Diamond Black A, Diamond Black N220M, Diamond Black N234, Diamond Black I, Diamond Black LI, Diamond Black II, Diamond Rack N339, Diamond Black SH, Diamond Black SHA, Diamond Black LH, Diamond Black H, Diamond Black HA, Diamond Black SF, Diamond Black N550M, Diamond Black E, Diamond Black G, Diamond Black R, Diamond Black N760M, Diamond Black LP . Carbon black thermax N990, N991, N907, N908, N990, N991, N908 made by Cancarb. Carbon black Asahi # 80, Asahi # 70, Asahi # 70L, Asahi F-200, Asahi # 66, Asahi # 66HN, Asahi # 60H, Asahi # 60U, Asahi # 60, Asahi # 55, Asahi # 50H, Asahi # 51, Asahi # 50U, Asahi # 50, Asahi # 35, Asahi # 15, Asahi Thermal, Degussa's carbon black ColorBlack Fw200, ColorBlack Fw2, ColorBlack Fw2, ColorBlack Fw1, ColorBlack 170, BlackBlack 160, BlackBlack , Special Black 6, Special Black 5, Special Black 4, Special Black 4A, PrintexU, PrintexV, Printex140U, Printex140V, etc. It is below.
[0020]
Since these carbon blacks are agglomerated as they are, dispersion treatment is required in the present invention. A mill base is prepared by adding a dispersant and a solvent to carbon black, and this is subjected to a dispersion treatment by a method such as a ball mill, a sand mill, a bead mill, a three roll, a paint shaker, an ultrasonic wave, or a bubble homogenizer. Two or more of these processing methods can be combined. In addition to using the binder resin of the resist composition of the present invention as it is as a dispersant, Anti-Terra-U, Disperbyk-160, 161, 162, 163 manufactured by BYK, Solspers 20000, 24000GR, 26000, 28000, manufactured by ZENECA Kasei DA-703-50, NDC-8194L, NDC-8203L, NDC-8257L, KS-860, Kao's homogenal L-18, L-1820, L-95, L-100, Nippon Paint Known dispersion resins such as VP5000 manufactured by Goodrich, E5703P manufactured by Goodrich, VAGH manufactured by Union Carbide, UR8200 manufactured by Toyobo, and MR113 manufactured by ZEON can be used. These dispersion resins can be used alone or in combination. Among these dispersion resins, the acrylic resin containing the carboxyl group is preferable. The resin is adsorbed on the surface of the carbon black by the dispersion treatment, and at the same time, the aggregation of the carbon black particles is broken and the particle size is refined. The preferable average particle diameter of carbon black is in the range of 0.01 to 1 μm. In the present invention, the resin adsorbed on the surface of carbon black needs to be in the range of 1 to 200 mg / g in terms of resin adsorption. More preferably, it is 5-180 mg / g. More preferably, it is 20-160 mg / g. When the resin adsorption amount exceeds the upper limit of the above range, the developability and resolution are deteriorated. Also, below the lower limit, dispersion is not stabilized and reaggregation occurs in a short period of time. The resin adsorption amount can be determined from the difference from the charged amount by ultracentrifuging the carbon black dispersion and determining the resin concentration of the supernatant by a gravimetric method.
[0021]
More specifically, a paste in which carbon black is dispersed in a resin is diluted 10 times with propylene glycol monomethyl ether acetate, treated with ultrasonic waves using BRANSON 5200 manufactured by Nippon Emerson Co., Ltd., and then 1 at 27000 rpm. Ultracentrifugation is performed for a period of time, and the supernatant is dried at 120 ° C. for 2 hours. The resin weight is obtained by a precision balance and can be determined from the difference from the charged amount.
[0022]
The resist composition of the present invention preferably contains a solvent in order to improve dispersibility and coating properties. Specific examples of the solvent include diisopropyl ether, mineral spirit, n-pentane, amyl ether, ethyl caprylate, n- Hexane, diethyl ether, isoprene, ethyl isobutyl ether, butyl stearate, n-octane, Barsol # 2, Apco # 18 solvent, diisobutylene, amyl acetate, butyl butyrate, apcocinner, butyl ether, diisobutyl ketone, methylcyclohexene, methyl Nonyl ketone, propyl ether, dodecane, Social solvent No. 1 and no. 2, amyl formate, dihexyl ether, diisopropyl ketone, Solvesso # 150, (n, sec, t) -butyl acetate, hexene, shell, TS28, solvent, butyl chloride, ethyl amyl ketone, ethyl benzoate, amyl chloride, ethylene Glycol diethyl ether, ethyl orthoformate, methoxymethyl pentanone, methyl butyl ketone, methyl hexyl ketone, methyl isobutyrate, benzonitrile, ethyl propionate, methyl cellosolve acetate, methyl isoamyl ketone, methyl isobutyl ketone, propyl acetate, Amyl acetate, amyl formate, bicyclohexyl, diethylene glycol monoethyl ether acetate, dipentene, methoxymethylpentanol, methyl Milketone, methyl isopropyl ketone, propyl propionate, propylene glycol-t-butyl ether, methyl ethyl ketone, methyl cellosolve, ethyl cellosolve, ethyl cellosolve acetate, carbitol, cyclohexanone, ethyl acetate, propylene glycol, propylene glycol monomethyl ether, propylene glycol monomethyl ether Acetate, propylene glycol monoethyl ether, propylene glycol monoethyl ether acetate, dipropylene glycol monoethyl ether, dipropylene glycol monomethyl ether, propylene glycol monoethyl ether acetate, dipropylene glycol monomethyl ether acetate, 3-methoxypropionic acid, 3- Ethoxypropi Acid, ethyl 3-ethoxypropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, propyl 3-methoxypropionate, butyl 3-methoxypropionate, diglyme, dipropylene glycol monomethyl ether, ethylene glycol acetate, Organic solvents such as ethyl carbitol, butyl carbitol, ethylene glycol monobutyl ether, propylene glycol-t-butyl ether, 3-methyl-3-methoxybutanol, tripropylene glycol methyl ether, 3-methyl-3-methoxybutyl acetate It is done.
It is preferable to select a solvent having a boiling point in the range of 100 ° C to 200 ° C. More preferably, it has a boiling point of 120 ° C to 170 ° C. These solvents are used alone or in combination.
[0023]
In the present invention, the monomer is 5 to 80 parts by weight, the photopolymerization initiator is 0.01 to 30 parts by weight, the carbon black is 100 to 500 parts by weight, and the solvent is 200 to 10,000 parts by weight with respect to 100 parts by weight of the binder resin. It is preferably contained in the range of parts.
If the monomer is less than the above range, the image-exposed image area has insufficient crosslinking density, and it is difficult to obtain a good image, and if it exceeds the above range, the resist film after drying becomes more sticky, resulting in workability. May become inferior. If the addition amount of the photopolymerization initiator is less than the above range, sufficient sensitivity cannot be obtained, and if it exceeds the above range, the initiator sometimes precipitates from the photosensitive solution. If the added amount of carbon black is less than the above range, it is difficult to obtain a sufficient color density and the light shielding ability is poor, and if it exceeds the above range, the dispersion stability of the pigment cannot be maintained. A film may not be obtained. If the amount of the solvent added is less than the above range, uneven coating tends to occur and the film thickness is not uniform.If the amount exceeds the above range, a sufficient film thickness cannot be obtained, and coating defects such as pinholes may occur. May be easier.
In addition, it is preferable that the density | concentration in the total solid of carbon black is 25 to 70 weight%.
In addition to the above components, a sensitizer, a coating property improver, a polymerization inhibitor, a plasticizer, a flame retardant, and the like can be suitably added to the present invention. These can be used alone or in combination of several kinds.
[0024]
The composition of this invention is apply | coated to a glass substrate by well-known methods, such as a spin coater, a roll coater, a curtain coater, and screen printing. The coating film thickness is preferably 0.1 μm to 10 μm. A convection oven or a hot plate is used to dry the coating film. The drying temperature is preferably 50 ° C. to 150 ° C., and the drying time is preferably 30 seconds to 60 minutes. For the exposure, a high-pressure mercury lamp, an ultra-high pressure mercury lamp, a xenon lamp, a carbon arc lamp or the like is generally used, and a latent image is formed on the resist film by exposing through a mask. Then, an image is formed by developing with the solvent which dissolves an unexposed part. As the developer, an organic solvent such as acetone, toluene, or MEK can be used, but an alkali developer is preferable from the viewpoint of environmental problems. For example, sodium hydroxide aqueous solution, potassium hydroxide aqueous solution, sodium carbonate aqueous solution, potassium carbonate, ammonia water, tetramethylammonium hydroxide aqueous solution and the like are used. A surfactant, an antifoaming agent, or the like may be added to the alkaline developer. There is no restriction | limiting in particular as a developing method, It can carry out by well-known methods, such as a paddle method, a dipping method, and a spray method. A pre-wet may be adopted. Post-baking, post-photocuring, etc. may be employed for the purpose of enhancing the drying of the developer after the image formation and the curing of the resist film.
[0025]
【Example】
Next, although it demonstrates concretely using an Example, this invention is not limited to a following example, unless the summary is exceeded.
Synthesis Example-1
A flask is charged with 20 g of a styrene / acrylic acid resin having an acid value of 200 and a weight average molecular weight of 5000, 0.2 g of p-methoxyphenol, 0.2 g of dodecyltrimethylammonium chloride, and 40 g of propylene glycol monomethyl ether acetate (3,4 epoxy cyclohexyl) methyl. 7.6 g of acrylate was added dropwise and reacted at a temperature of 100 ° C. for 30 hours. The reaction solution was reprecipitated in water and dried to obtain a resin. When neutralization titration with KOH was performed, the acid value of the resin was 80.
[0026]
Dispersion of carbon black 100 g of carbon black (manufactured by Mitsubishi Chemical Corporation, MA220) was mixed with 100 g of the resin varnish of Synthesis Example-1 and 100 g of propylene glycol monomethyl ether acetate to prepare a mill base. This was processed by a bead mill. The beads used a particle size of 0.5 mm and the material zirconia. Carbon black pastes with different amounts of resin adsorption were prepared by changing the disk peripheral speed and dispersion time at a dispersion temperature of about 60 ° C.
[0027]
Measurement of resin adsorption amount A part of the carbon black paste was collected, diluted 10 times with propylene glycol monomethyl ether acetate, and treated with ultrasonic waves using BRANSON 5200 manufactured by Nippon Emerson Co., Ltd. for 3 minutes. This sample was subjected to ultracentrifugation (27000 rpm, 1 hour), and a supernatant was taken. After the supernatant was dried at 120 ° C. for 2 hours, the resin weight was determined with a precision balance, and the amount of resin adsorbed on the carbon black was calculated from the difference from the charged amount.
[0028]
Black resist formulation 1) Carbon black paste: 40g
2) 5 g of dipentaerythritol hexaacrylate
3) Dicyclopentadienyl-Ti-bis-2,6-difluoro-3- (pyrrol-1-yl) -phenyl-1-yl 0.5 g
4) 4,4'-bis (diethylamino) benzophenone 0.5 g
5) 30 g of propylene glycol monomethyl ether acetate
The black resist photosensitive solution was prepared by mixing at the above ratio.
[0029]
Evaluation of resist A black resist photosensitive solution was applied to a glass substrate with a spin coater and dried on a hot plate at 80C for 1 minute. The resist film thickness after drying was 1 μm. This sample was exposed to 2000 mj / cm 2 image with a high-pressure mercury lamp through a mask. A resist pattern was obtained by immersion development in a potassium hydroxide aqueous solution having a temperature of 25 ° C. and a concentration of 0.05%. The development speed was determined by visual observation of the time during which the non-image area was developed. In addition, the minimum resist pattern that can be formed was observed with a microscope to determine the resolving power.
[0030]
[Table 1]
[0031]
【The invention's effect】
As shown in the examples in Table 1, since the black resist composition of the present invention has high developability and resolution, a highly accurate black matrix can be formed with high efficiency. Therefore, by using the resist composition of the present invention, a color filter can be produced with high quality and low cost.
Claims (9)
分散樹脂の吸着量の測定法:
カーボンブラックを分散樹脂で分散処理してなるペーストを、プロピレングリコールモノメチルエーテルアセテートで10倍に希釈する。得られた分散液を超音波で3分間処理したのち、1時間超遠心分離する。上澄み液の樹脂濃度を重量法により求め、分散処理に用いたカーボンブラック及び分散樹脂の重量と上澄み液中の樹脂量との差から、カーボンブラック1g当りの分散樹脂の吸着量を算出する。 In a black resist composition for a color filter comprising a photocurable resin composition containing a black colorant and a binder resin , the black colorant is dispersed with a dispersion resin , and measured by the following method, 20 to 200 mg. A black resist composition for a color filter, which is carbon black adsorbing a / g dispersion resin .
Method for measuring the amount of adsorbed dispersion resin:
A paste obtained by dispersing carbon black with a dispersion resin is diluted 10 times with propylene glycol monomethyl ether acetate. The obtained dispersion is treated with ultrasound for 3 minutes and then ultracentrifuged for 1 hour. The resin concentration of the supernatant is determined by a weight method, and the amount of adsorption of the dispersed resin per gram of carbon black is calculated from the difference between the weight of the carbon black and the dispersed resin used for the dispersion treatment and the amount of resin in the supernatant.
バインダー樹脂の吸着量の測定法:Measuring method of adsorption amount of binder resin:
カーボンブラックをバインダー樹脂で分散処理してなるペーストを、プロピレングリコールモノメチルエーテルアセテートで10倍に希釈する。得られた分散液を超音波で3分間処理したのち、1時間超遠心分離する。上澄み液の樹脂濃度を重量法により求め、分散処理に用いたカーボンブラック及びバインダー樹脂の重量と上澄み液中の樹脂量との差から、カーボンブラック1g当りのバインダー樹脂の吸着量を測定する。A paste obtained by dispersing carbon black with a binder resin is diluted 10 times with propylene glycol monomethyl ether acetate. The obtained dispersion is treated with ultrasound for 3 minutes and then ultracentrifuged for 1 hour. The resin concentration of the supernatant liquid is obtained by a weight method, and the adsorption amount of the binder resin per gram of carbon black is measured from the difference between the weight of the carbon black and binder resin used for the dispersion treatment and the amount of resin in the supernatant liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15984896A JP3963500B2 (en) | 1996-06-20 | 1996-06-20 | Black resist composition for color filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15984896A JP3963500B2 (en) | 1996-06-20 | 1996-06-20 | Black resist composition for color filter |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006263463A Division JP4073463B2 (en) | 2006-09-27 | 2006-09-27 | Method for producing black resist composition for color filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1010311A JPH1010311A (en) | 1998-01-16 |
| JP3963500B2 true JP3963500B2 (en) | 2007-08-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP15984896A Expired - Lifetime JP3963500B2 (en) | 1996-06-20 | 1996-06-20 | Black resist composition for color filter |
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| JP (1) | JP3963500B2 (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20000035753A (en) * | 1998-11-30 | 2000-06-26 | 마쯔모또 에이찌 | Radiosensitive Compositions for Black Resist |
| KR100431461B1 (en) * | 2002-06-03 | 2004-05-17 | 주식회사 엘지화학 | Photosensitive composition for liquid crystal display and black matrix comprising thereof |
| KR100725023B1 (en) | 2006-10-16 | 2007-06-07 | 제일모직주식회사 | Resin composition containing cardo resin, and manufacturing method by pattern, color filter using same |
| CN102436142B (en) | 2010-09-29 | 2013-11-06 | 第一毛织株式会社 | Black photosensitive resin composition and light blocking layer using the same |
| KR101367253B1 (en) | 2010-10-13 | 2014-03-13 | 제일모직 주식회사 | Photosensitive resin composition and black matrix using the same |
| KR101486560B1 (en) | 2010-12-10 | 2015-01-27 | 제일모직 주식회사 | Photosensitive resin composition and black matrix using the same |
| KR101453769B1 (en) | 2010-12-24 | 2014-10-22 | 제일모직 주식회사 | Photosensitive resin composition and color filter using the same |
| KR101344786B1 (en) | 2011-12-02 | 2013-12-26 | 제일모직주식회사 | Photosensitive resin composition for color filter comprising the same and color filter using the same |
| KR20140076320A (en) | 2012-12-12 | 2014-06-20 | 제일모직주식회사 | Photosensitive resin composition and black spacer using the same |
| KR101709698B1 (en) | 2013-09-02 | 2017-02-23 | 제일모직 주식회사 | Black photosensitive resin composition and light blocking layer using the same |
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1996
- 1996-06-20 JP JP15984896A patent/JP3963500B2/en not_active Expired - Lifetime
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| JPH1010311A (en) | 1998-01-16 |
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