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JP3972686B2 - Conductive film and method for producing conductive film - Google Patents
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JP3972686B2 - Conductive film and method for producing conductive film - Google Patents

Conductive film and method for producing conductive film Download PDF

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JP3972686B2
JP3972686B2 JP2002060101A JP2002060101A JP3972686B2 JP 3972686 B2 JP3972686 B2 JP 3972686B2 JP 2002060101 A JP2002060101 A JP 2002060101A JP 2002060101 A JP2002060101 A JP 2002060101A JP 3972686 B2 JP3972686 B2 JP 3972686B2
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fine particles
conductive film
conductive
metal
film according
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JP2003151361A (en
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透 大久保
久光 亀島
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Toppan Inc
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Toppan Inc
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Description

【0001】
【発明の属する技術分野】
本発明は、EL,PDP,LCD,CRT等の各種表示装置の電磁波遮蔽膜および電極、あるいは太陽電池の電極として有用な導電膜およびその製造方法に関する。特に透明電極等に用いられる透明導電膜に関する。またプリント配線板などに用いることのできるパターニングされた導電膜に関する。また、詳しくは、これまでより低い熱処理温度で形成され、よって広範な基材に対応可能な導電膜およびその製造方法に関する。
【0002】
【従来の技術】
従来、導電膜は錫ドープ酸化インジウム(ITO)等の導電性酸化物、あるいは銀等の金属からなる薄膜をスパッタリングや蒸着等のドライプロセスにより導電層を成膜することで一般的に得られてきたが、ドライプロセスは成膜が高真空中で行われるため、成膜工程が複雑かつ高コストであるという本質的な問題点があった。
【0003】
これに対し近年、導電層の低コストな形成方法として湿式塗工に代表されるウェットプロセスが盛んに試みられてきた。湿式塗工材料としてはITO微粒子や金属微粒子等の導電材料をバインダや分散安定剤とともに分散媒に分散させたものが一般的に用いられている。
このうちITO微粒子を用いた導電膜は、塗工層中の微粒子間の粒界抵抗のため達成可能な表面抵抗は低くとも103Ω/□〜104Ω/□であり、電磁波遮蔽あるいは電極として必要なレベルの導電性を得ることができない。また、350℃〜400℃以上の高温熱処理により低抵抗化も可能であるが、基材がガラスに限定されてしまう。
【0004】
一方、金属微粒子は体積固有抵抗率が前記導電性酸化物と比較し1/100オーダーで小さいことに加え、前記導電性酸化物微粒子あるいはバルク状態の前記金属微粒子と比較し、低温で粒子同士の融着が生じることが一般的に知られている。このため、金属微粒子は湿式塗工用の導電材料として用いた場合、比較的低温の熱処理で前記用途に必要なレベルの導電性を得ることが可能であり、導電材料としての研究対象の最近の主流となってきている。
【0005】
【発明が解決しようとする課題】
しかしながら、前記金属微粒子を用いた場合でも、前記用途に要求されるレベルの導電性を発現させるのに必要な熱処理温度は150℃〜200℃以上であり、フィルム基材の耐熱性を考慮した場合十分低いとはいえず、使用可能な基材が限定されるという問題点は依然解決されていない。本発明はこの問題点を鑑みてなされたものであり、従来よりも低い熱処理温度で、上記用途に必要な導電性を示す導電膜を提供することを課題とする。
【0006】
【課題を解決しようとする手段】
請求項1の発明は、導電性微粒子の少なくとも一部が表面から突出している突出部分を有する導電層を具備した導電膜であって、少なくとも前記突出部分の一部が金属により被覆されており、かつ前記突出部分において近接する該導電性微粒子同士が該金属により架橋されており、並びに前記導電層が酸化ケイ素を主成分とするバインダを含むことを特徴とする導電膜である。
【0007】
請求項2の発明は、前記導電性微粒子の一次粒径が50nm以下であることを特徴とする請求項1記載の導電膜である。
【0010】
請求項の発明は、前記導電性微粒子が金属微粒子であることを特徴とする請求項1または2に記載の導電膜である。
【0011】
請求項の発明は、前記金属微粒子がAg,Al,Au,Cu,Pd,Ptのいずれか、あるいはそれらの2種類以上の組み合わせまたは合金であることを特徴とする請求項に記載の導電膜である。
【0012】
請求項の発明は、前記金属微粒子がAuを含み、その含量が金属微粒子全体に対し50重量%以下であることを特徴とする請求項記載の導電膜である。
【0013】
請求項の発明は、前記金属がAg,Au,Pd,Ptのいずれか、あるいはそれらの2種類以上の組み合わせまたは合金であることを特徴とする請求項1〜記載のいずれかに記載の導電膜である。
【0014】
請求項の発明は、前記導電層が透明であり、かつ導電膜全体の可視光域の光線透過率が50%以上であることを特徴とする請求項1〜のいずれかに記載の導電膜である。
【0015】
請求項の発明は、導電性微粒子の少なくとも一部が表面から露出している導電層を有し、かつ前記導電層が酸化ケイ素を主成分とするバインダを有する導電膜を、金属イオンを含む処理液により処理する工程を含むことを特徴とする導電膜の製造方法である。
【0016】
請求項の発明は、前記導電性微粒子の一次粒径が、50nm以下であることを特徴とする請求項記載の導電膜の製造方法である。
【0017】
請求項10の発明は、前記導電性微粒子が金属微粒子であることを特徴とする請求項またはに記載の導電膜の製造方法である。
【0018】
請求項11の発明は、前記導電層が、前記導電性微粒子を少なくとも含む塗布液を基材に塗布乾燥した後、熱処理することにより形成されることを特徴とする請求項〜1のいずれかに記載の導電膜の製造方法である。
【0019】
請求項12の発明は、前記熱処理の処理温度が150℃以下であることを特徴とする請求項1記載の導電膜の製造方法である。
【0021】
請求項13の発明は、前記塗布液がバインダを含むことを特徴とする請求項11またはに記載の導電膜の製造方法である。
【0023】
請求項14の発明は、前記金属微粒子がAg,Al,Au,Cu,Pd,Ptのいずれか、あるいはそれらの2種類以上の組み合わせまたは合金からなることを特徴とする請求項1〜1記載の導電膜の製造方法である。
【0024】
請求項15の発明は、前記金属微粒子がAuを含み、その含量が金属微粒子全体に対し50重量%以下であることを特徴とする請求項1記載の導電膜の製造方法である。
【0025】
請求項16の発明は、前記処理液中の金属イオンがAgイオン,Auイオン,Pdイオン,Ptイオンから選択される一種類以上を含むことを特徴とする請求項〜15のいずれかに記載の導電膜の製造方法である。
【0026】
請求項17の発明は、前記処理液が還元剤を含むことを特徴とする請求項16記載の透明導電膜の製造方法である。
【0027】
請求項18の発明は、前記導電層が透明であり、膜全体として透明であることを特徴とする請求項17のいずれかに記載の導電膜の製造方法である。
【0028】
請求項19の発明は、前記導電性微粒子を少なくとも含む塗布液をパターン状に塗布することを特徴とする請求項11〜18のいずれかに記載の導電膜の製造方法である。
【0029】
【発明の実施の形態】
本発明者らは鋭意検討の結果、導電膜を図1に代表される構成とすることで、導電性の向上、かつ従来より低温での熱処理で前記用途に必要なレベルの導電性が発現することを見いだした。図1に本発明の実施形態の一例について具体的構成を示す。
【0030】
本発明の導電膜1は導電層2を含み、基材3上に形成されている。導電層2はバインダ4と一次粒径50nm以下の金属微粒子5を含み、導電性微粒子5の一部が導電層2の表面から突出している。また、前記突出部分は金属6により被覆されたものであり、かつ該突出部分において近接する該導電性微粒子5同士が前記金属6により架橋されている。以下に、前記導電膜の具体的構成とその製造方法について詳細な説明を行う。
【0031】
[導電膜の具体的構成]
基材3は、特に限定されるものではなく、各種ガラス基材をはじめ適当な機械的剛性をもつ公知のプラスチックフィルムもしくはシートの中から適宜選択して用いることができる。また、透明な導電膜を製造する時は透明なガラス、プラスチック、シート等の基材を用いれば良い。具体例としては、ポリエステル、ポリエチレン、ポリプロピレン、トリアセチルセルロース、ジアセチルセルロース等のフィルムが挙げられる。
【0032】
導電膜1は、主として導電層2と基材3からなるが、必要に応じ導電層以外の機能層を設けることも可能である。例として、機械強度付与を目的としたハードコート層、あるいは低反射性付与を目的とした単層または多層構成の反射防止層など挙げられるが、特に、機械強度と低反射性を同時に付与できるものとして、表面硬度が高く屈折率の比較的小さいシリカ層が好適に用いられる。シリカ層の形成は、例えば各種アルコキシシランの加水分解物を含む塗布液を、導電層2上に均一に塗布して成膜する方法により行うことができる。塗布方法としては、スピンコート、ナイフコート、スプレーコート、ディップコート等が挙げられるが、特にスピンコートが好ましい。塗布後は塗膜を乾燥し、好ましくは焼き付け処理を行うことにより強固な膜が形成される。
【0033】
導電層2はバインダ4と、少なくとも一部が金属6により被覆された導電性微粒子5を含む。詳しくは、導電性微粒子5は、一部が透明導電層2から突出し、かつ金属6で被覆された部分を有し、突出部分において隣接する導電性微粒子同士が架橋されている。
【0034】
バインダ4は導電性微粒子を導電層に固定することを主目的に用いられる。なお、なんらかの手段で導電性微粒子が導電層に固定されれば、導電層はバインダを必ずしも含む必要はない。バインダの具体例としては、有機系のものとしてポリエステル樹脂、アクリル樹脂、エポキシ樹脂、ウレタン樹脂等、無機系のものとしてケイ素、ジルコニウム、チタン等の金属アルコキシドの加水分解物が挙げられるが、特にケイ素アルコキシドの加水分解物が好適に用いられる。
【0035】
透明な導電膜とする場合、導電性微粒子5の粒径は透明性の観点から一次粒径50nm以下であることが好ましい。一次粒径が50nm以上であると、透明性の低下のみならずヘーズが発生しやすくなり、視認性の悪化につながる。
【0036】
導電性微粒子としては金属微粒子等が挙げられる。金属微粒子の金属種としてはAg,Al,Au,Cu,Pd,Pt等が挙げられるが、特に導電性と透明性の観点からAgを主体とすることが好ましい。さらに、金属微粒子は、後述の薬液処理時に金属微粒子露出部分での金属イオンの析出を効果的に行うために、Auを含むことが好ましく、Agを主体とするAuとの合金微粒子、Au微粒子との混合物、あるいは前記合金微粒子との混合物であることが好ましい。
【0037】
また、前記各種金属微粒子は、透明導電膜の用途にもよるが、色調や化学的安定性の向上のため、Pd等の金属を含んでいてもよい。Au,Pd等の前記金属の必要含有量は、薬液処理時の反応条件あるいは透明導電膜の用途により異なるが、必要以上に多いと導電性の低下や高コスト化につながり好ましくない。例えばAuを用いる場合、金属微粒子全体に対して50重量%以下であることが好ましい。
【0038】
金属微粒子はCareyLeaが1889年に発表した方法(Am.J.Sci.,vol.37,pp.491,1889)に代表される数多くの公知技術により比較的容易に製造可能である。例えばPdとAgの合金微粒子は、PdとAgの硝酸塩水溶液をクエン酸等の分散安定剤の存在下において硫酸第一鉄等の還元剤で還元することで得られる。その他の金属微粒子についても、原理的には、分散安定剤の存在下で金属イオンを還元する方法により製造可能である。
【0039】
金属6すなわち被覆金属の金属種としては、Ag,Au,Pd,Pt等が挙げられるが、特に、後述の薬液処理時の反応性、および薬液処理後に得られる透明導電膜の化学的耐久性の観点からAuを含むことが好ましい。
【0040】
[導電層の製造方法]
前記導電層2の製造方法は、前駆導電層の形成とそれに続く薬液処理からなる。前駆導電層とは、金属微粒子が表面から露出した状態で固定されている導電層を示す。
【0041】
(前駆導電層の形成)
前駆導電層の形成は、例えば前記金属微粒子等の導電性微粒子と前記バインダおよび分散媒を含む塗布液を基材上に均一に塗布後、乾燥および熱処理する方法で行うことができる。なお、バインダの添加量は、導電性微粒子が導電層中に完全に埋没しない程度とすることが重要である。塗布は前記シリカ層塗布と同様の方法で可能であるが、特にスピンコートを用いる方法が好ましい。熱処理の主たる目的は、バインダの硬化と導電性微粒子同士の融着による導電性の向上であるが、熱処理温度は各種フィルム基材の耐熱性の点から150℃以下が好ましく、特に120℃以下が好ましい。従来技術では十分な導電性を発現させるため、成膜時に150℃〜200℃以上での熱処理が必要であり、使用可能な基材は、ガラスと耐熱性の高い一部のフィルムに限定されていた。本発明では、後述の薬液処理により導電性を向上させ、ひいては成膜時の熱処理温度を、広汎なフィルム基材に対応可能なレベルまで下げることが可能となった。
【0042】
また、塗布液を塗布する際、全面に形成しても良いし、パターン状に形成しても良い。全面に形成する場合は、膜圧、使用する導電性微粒子の選択などにより透明導電膜とすることができる。また、透明な導電膜とする場合、膜全体の可視光域の光線透過率が50%以上、好ましくは70%以上であることが好ましい。パターニングは公知の手法を用いてすることができる。パターニングの方法は例えば、グラビア印刷法、オフセット印刷法、活版印刷法インクジェット法などが挙げられる。また、導電層を透明とすれば、透明なパターニングされた導電膜を形成することができる。
【0043】
(前駆導電層の薬液処理)
薬液処理は、前記の前駆導電層を金属6の塩と還元剤と水を含む処理溶液で処理することでなされる。薬液処理の具体的方法としては、前駆導電層を該処理液に浸漬する方法および前駆導電層に薬液処理する方法等が挙げられるが、いずれの方法においても処理後の前駆導電層を純粋で十分に洗浄することが重要である。
【0044】
薬液処理により、前駆導電層の金属微粒子の表面から露出した部分において、選択的に金属6のイオンの還元析出が生じ、金属微粒子の露出部分が金属6により被覆され、さらには隣接する金属微粒子同士が金属6により架橋されることで、導通パスが生成し、導電性の向上がみられる。なお、金属微粒子同士の架橋はAFM等の手法で実際に観察することが可能である。また、薬液処理は、系により異なるが、室温〜80℃で行われるため、フィルム基材の耐熱性に関しては問題ない。薬液処理においては、用いる金属微粒子や金属塩の種類に応じて各種反応条件を適宜最適化し、金属微粒子の新たな核発生を抑制し、金属微粒子の露出部分のみで金属が析出するようにすることが重要である。新たな核発生が生じると、架橋による導通パスが効率的に得られない。特に、透明導電膜とする場合、透明性を著しく損なう。
【0045】
金属6の塩としては、反応性および導電層の化学的耐久性の観点からAu塩が好ましく、例としてHAuCl4やその水和物を用いることができる。
還元剤は、特に限定はなく、導電性微粒子および還元する金属イオンの種類により適宜最適なものを選択して用いることができる。なお、各種条件によっては、還元剤無しで金属の還元析出が生じる場合もあり、還元剤は必ずしも必須成分ではない。還元剤としては、導電性微粒子としてAg/Au合金の金属微粒子および金属塩としてHAuCl4を用いた系におけるヒドロキシルアミンが一例として挙げられる。
【0046】
【実施例】
以下に本発明を、導電性微粒子として金属微粒子を用い、透明導電膜に応用した例で具体的に説明するが、本発明はこれらの実施例によって制限されるものではない。まず、各実施例および比較例に共通な各種溶液の調製方法および各種評価方法について示す。
【0047】
[Ag微粒子分散液の調製]
硫酸第一鉄7水和物11g,クエン酸ナトリウム2水和物12.8g,水酸化ナトリウム0.5gを蒸留水に溶解させた溶液53gに、硝酸銀2gを蒸留水に溶解させた溶液20gを加え、コロイド状銀微粒子を生成させた。生成した銀微粒子を遠心分離により回収し、硝酸アンモニウム水溶液で洗浄し不純物を除去した後、蒸留水に再分散させ、Ag微粒子分散液(Ag濃度=4重量%)を得た。
【0048】
[Au微粒子分散液の調製]
塩化金酸0.1gを蒸留水に溶解させた溶液1000gを加熱沸騰させた状態で、クエン酸ナトリウム2水和物0.2gを蒸留水に溶解させた溶液20gを加え生成したコロイド状金微粒子分散液を濃縮し、Au微粒子分散液(Au濃度=4重量%)を得た。
【0049】
[バインダ形成溶液の調製]
テトラエトキシシラン10.4gに1N塩酸6.8gを添加し加水分解を行った後、エタノールを添加し、濃度がシリカ換算で4重量%のバインダ形成溶液を調製した。
【0050】
[Ag被覆用処理液の調製]
硝酸銀0.1g,ヒドロキノン0.44gを蒸留水に溶解させ、1000gのAg被覆用処理液を調製した。
【0051】
[Au被覆用処理液の調製]
塩化金酸3水和物0.1g,ヒドロキシルアミン0.13gを蒸留水に溶解させ1000gのAu被覆用処理液を調製した。
【0052】
[透明導電膜の評価]
(表面抵抗率)
三菱油化(株)製 ロレスタAP(MCP−T400)を用い4端針法にて測定を行った。
(透過率)
(株)村上色彩技術研究所製 反射・透過率計(HR−100)を用い測定を行った。
(耐塩水性)
透明導電層が形成された各基材を、5%食塩水に1時間浸漬した後の表面抵抗率を測定した。
各実施例および比較例の評価結果は全て表1に示した。
【0053】
<実施例1>
前駆透明導電層形成用の塗布液として下記を調製した。
Ag微粒子分散液 20g
エタノール 20g
バインダ形成溶液 1g
上記塗布液をスピンコータを用い150rpm−30秒の条件でガラス基材に塗布し、乾燥後、120℃−30分の熱処理を行い前駆透明導電層を得た。続いて、前駆透明導電層をAg被覆用処理液に室温にて2分間浸漬した後、純水で十分に洗浄し、透明導電層を得た。
【0054】
<実施例2>
実施例1で得られた前駆透明導電層を、Au被覆用処理液に室温にて2分間浸漬した後、純水で十分に洗浄し、透明導電層を得た。
【0055】
<実施例3>
前駆透明導電層形成用の塗布液として下記を調製した。
Ag微粒子分散液 15g
Au微粒子分散液 5g(金属微粒子全体に対し25%)
エタノール 20g
バインダ形成溶液 1g
上記塗布液を用い、実施例1と同様に成膜・熱処理を行い得られた前駆透明導電層を、実施例2と同様に処理し、透明導電層を得た。
【0056】
<実施例4>
前駆透明導電層形成用の塗布液として下記を調製した。
Au微粒子分散液 20g
エタノール 20g
バインダ形成溶液 1g
上記塗布液を用い、実施例1と同様に成膜・熱処理を行い得られた前駆透明導電層を、実施例2と同様に処理し、透明導電層を得た。
【0057】
<比較例1>
実施例1で得られた前駆透明導電層をそのまま比較例1とした。
【0058】
<比較例2>
実施例1の前駆透明導電層形成時の熱処理温を200℃とした以外は全て実施例1と同様の条件で前駆透明導電層を形成し、比較例2とした。
【0059】
<比較例3>
実施例3で得られた前駆透明導電層をそのまま比較例3とした。
【0060】
<比較例4>
実施例4で得られた前駆透明導電層をそのまま比較例4とした。
【0061】
【表1】

Figure 0003972686
【0062】
耐塩水性:透明導電層が形成された各基材を、5%食塩水に1時間浸漬した後の表面抵抗率
【0063】
[評価結果]
表1に示された結果から明らかなように、本発明で得られた透明導電膜は、各実施例に示した薬液処理を行うことで、透明性が若干減少するものの導電性が著しく改善することが確認される。また、比較例3と実施例3の評価結果から、金属6(被覆金属)として化学的安定性の大きい金を用いることで、耐塩水性も向上することが確認される。
【0064】
【発明の効果】
本発明の導電膜は、導電材として金属微粒子等の導電性微粒子を含み、導電性微粒子の少なくとも一部が表面から突出しており、かつ突出部分において近接する導電性微粒子同士が金属により架橋されているため、良好な導電性を有する。また、金属としてイオン化傾向の小さいAuなどを用いることにより、良好な化学的耐久性を付与することが可能である。また、金属による被覆および架橋構造は、室温液相中で金属イオンを導電性微粒子の露出部において選択的に還元析出することで形成されるため、導電性向上のため従来必要であった高温での熱処理を必要とせず、基材の耐熱性に関する従来の問題も回避可能であり、基材として広凡なフィルムが対応可能である。また、導電層を透明とすることで透明導電膜とすることができる。また、導電層をパターニングすることでプリント配線体などのパターニングされた導電膜とすることができる。
【0065】
【図面の簡単な説明】
【図1】本発明の一実施例を示す層構成図である。
【符号の説明】
1 透明導電膜
2 透明導電層
3 透明基材
4 バインダ
5 金属微粒子
6 金属(被覆金属)[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an electromagnetic wave shielding film and electrode for various display devices such as EL, PDP, LCD, and CRT, or a conductive film useful as an electrode for a solar cell and a method for producing the same. It is related with the transparent conductive film used especially for a transparent electrode etc. The present invention also relates to a patterned conductive film that can be used for a printed wiring board or the like. More specifically, the present invention relates to a conductive film that can be formed at a lower heat treatment temperature than before and can be used for a wide range of substrates, and a method for manufacturing the conductive film.
[0002]
[Prior art]
Conventionally, a conductive film has generally been obtained by forming a conductive layer by a dry process such as sputtering or vapor deposition of a thin film made of a conductive oxide such as tin-doped indium oxide (ITO) or a metal such as silver. However, since the dry process is performed in a high vacuum, there is an essential problem that the film forming process is complicated and expensive.
[0003]
On the other hand, in recent years, a wet process typified by wet coating has been actively tried as a low-cost method for forming a conductive layer. As a wet coating material, a material obtained by dispersing a conductive material such as ITO fine particles or metal fine particles in a dispersion medium together with a binder and a dispersion stabilizer is generally used.
Of these, the conductive film using ITO fine particles has a surface resistance of at least 10 3 Ω / □ to 10 4 Ω / □ that can be achieved due to the grain boundary resistance between the fine particles in the coating layer. As a result, the required level of conductivity cannot be obtained. Moreover, although resistance reduction is also possible by high-temperature heat processing of 350 to 400 degreeC or more, a base material will be limited to glass.
[0004]
On the other hand, the metal fine particles have a volume specific resistivity smaller than that of the conductive oxide on the order of 1/100, and in addition to the conductive oxide fine particles or the bulk metal fine particles, It is generally known that fusion occurs. For this reason, when the metal fine particles are used as a conductive material for wet coating, it is possible to obtain the level of conductivity necessary for the above-mentioned application by a relatively low temperature heat treatment. It has become mainstream.
[0005]
[Problems to be solved by the invention]
However, even when the metal fine particles are used, the heat treatment temperature necessary to develop the level of conductivity required for the application is 150 ° C. to 200 ° C. or higher, and the heat resistance of the film substrate is taken into consideration. The problem that it cannot be said that it is low enough and the base material which can be used is limited has not been solved yet. This invention is made | formed in view of this problem, and makes it a subject to provide the electrically conductive film which shows the electroconductivity required for the said use at the heat processing temperature lower than before.
[0006]
[Means to solve the problem]
The invention of claim 1 is a conductive film having a conductive layer having a protruding portion in which at least a part of the conductive fine particles protrudes from the surface, and at least a part of the protruding portion is covered with a metal, The conductive fine particles adjacent to each other in the protruding portion are cross-linked by the metal, and the conductive layer includes a binder mainly composed of silicon oxide .
[0007]
A second aspect of the present invention is the conductive film according to the first aspect, wherein a primary particle size of the conductive fine particles is 50 nm or less.
[0010]
The invention according to claim 3 is the conductive film according to claim 1 or 2 , wherein the conductive fine particles are metal fine particles.
[0011]
A fourth aspect of the present invention, conductive according to claim 3, wherein the fine metal particles are Ag, Al, Au, Cu, Pd, and wherein the one of Pt, or a two or more combinations or alloys thereof It is a membrane.
[0012]
The invention according to claim 5 is the conductive film according to claim 4 , wherein the metal fine particles contain Au, and the content thereof is 50% by weight or less based on the whole metal fine particles.
[0013]
The invention of claim 6, wherein the metal is Ag, Au, Pd, according to any one of claims 1 to 5, wherein a one of Pt, or a two or more combinations or alloys thereof It is a conductive film.
[0014]
The invention of claim 7, wherein the conductive layer is transparent, and conductive according to any one of claims 1 to 6, the light transmittance in the visible light region of the entire conductive film is characterized in that 50% or more It is a membrane.
[0015]
The invention of claim 8 includes a conductive layer having a conductive layer in which at least a part of the conductive fine particles are exposed from the surface , and the conductive layer having a binder mainly composed of silicon oxide , containing metal ions. It is a manufacturing method of the electrically conductive film characterized by including the process processed with a process liquid.
[0016]
The invention according to claim 9 is the method for producing a conductive film according to claim 8 , wherein a primary particle size of the conductive fine particles is 50 nm or less.
[0017]
The invention according to claim 10 is the method for producing a conductive film according to claim 8 or 9 , wherein the conductive fine particles are metal fine particles.
[0018]
The invention of claim 11, wherein the conductive layer after coating and drying a coating solution containing at least the conductive fine particles on the substrate, any of claims 8-1 0, characterized in that it is formed by heat treatment It is a manufacturing method of the electrically conductive film.
[0019]
The invention of claim 12 is a method for producing a conductive film according to claim 1 1, wherein the processing temperature of the heat treatment is 0.99 ° C. or less.
[0021]
The invention of claim 13 is a method of manufacturing a conductive film according to claim 1 1 or 1 2, characterized in that said coating solution contains a binder.
[0023]
The invention of claim 14, wherein the fine metal particles Ag, Al, Au, Cu, Pd, claim 1 0-1 3, characterized in that it consists of either, or their two or more combinations or alloys of Pt It is a manufacturing method of the electrically conductive film of description.
[0024]
The invention of claim 15, wherein comprises the fine metal particles are Au, a method for producing a conductive film according to claim 1 4, wherein the content thereof is less than 50 wt% relative to total metal particles.
[0025]
The invention of claim 16, the metal ions are Ag ions in the treatment solution, Au ions, Pd ion, any crab claims 8-1 5, characterized in that it comprises one or more selected from Pt ions It is a manufacturing method of the electrically conductive film of description.
[0026]
The invention according to claim 17 is the method for producing a transparent conductive film according to claim 16 , wherein the treatment liquid contains a reducing agent.
[0027]
The invention according to claim 18 is the method for producing a conductive film according to any one of claims 8 to 17 , wherein the conductive layer is transparent and the whole film is transparent.
[0028]
The invention of claim 19 is the method for producing a conductive film according to any one of claims 11 to 18, wherein the coating liquid containing at least the conductive fine particles is applied in a pattern.
[0029]
DETAILED DESCRIPTION OF THE INVENTION
As a result of intensive studies, the present inventors have made the conductive film as represented by FIG. 1 so that the conductivity is improved and the level of conductivity required for the above-described application is exhibited by heat treatment at a lower temperature than in the past. I found out. FIG. 1 shows a specific configuration of an example of an embodiment of the present invention.
[0030]
The conductive film 1 of the present invention includes a conductive layer 2 and is formed on a substrate 3. The conductive layer 2 includes a binder 4 and metal fine particles 5 having a primary particle size of 50 nm or less, and a part of the conductive fine particles 5 protrudes from the surface of the conductive layer 2. The protruding portion is covered with the metal 6, and the conductive fine particles 5 adjacent to each other in the protruding portion are cross-linked by the metal 6. Hereinafter, a specific configuration of the conductive film and a manufacturing method thereof will be described in detail.
[0031]
[Specific structure of conductive film]
The substrate 3 is not particularly limited, and can be appropriately selected from known plastic films or sheets having appropriate mechanical rigidity including various glass substrates. Moreover, what is necessary is just to use base materials, such as transparent glass, a plastics, a sheet | seat, when manufacturing a transparent conductive film. Specific examples include films of polyester, polyethylene, polypropylene, triacetyl cellulose, diacetyl cellulose and the like.
[0032]
The conductive film 1 is mainly composed of a conductive layer 2 and a base material 3, but a functional layer other than the conductive layer can be provided as necessary. Examples include a hard coat layer for the purpose of imparting mechanical strength, or an antireflection layer having a single layer or a multilayer structure for the purpose of imparting low reflectivity. Particularly, those capable of imparting mechanical strength and low reflectivity simultaneously. A silica layer having a high surface hardness and a relatively low refractive index is preferably used. Formation of a silica layer can be performed by the method of apply | coating uniformly the coating liquid containing the hydrolyzate of various alkoxysilanes on the conductive layer 2, and forming into a film, for example. Examples of the coating method include spin coating, knife coating, spray coating, dip coating, and the like, and spin coating is particularly preferable. After coating, the coating film is dried, and preferably a strong film is formed by baking.
[0033]
The conductive layer 2 includes a binder 4 and conductive fine particles 5 at least partially covered with a metal 6. Specifically, the conductive fine particles 5 have a portion partially protruding from the transparent conductive layer 2 and covered with the metal 6, and adjacent conductive fine particles are cross-linked at the protruding portion.
[0034]
The binder 4 is used mainly for fixing the conductive fine particles to the conductive layer. Note that if the conductive fine particles are fixed to the conductive layer by any means, the conductive layer does not necessarily include a binder. Specific examples of the binder include organic resins such as polyester resins, acrylic resins, epoxy resins, and urethane resins, and inorganic materials such as hydrolysates of metal alkoxides such as silicon, zirconium, and titanium. An alkoxide hydrolyzate is preferably used.
[0035]
When a transparent conductive film is used, the particle diameter of the conductive fine particles 5 is preferably 50 nm or less from the viewpoint of transparency. When the primary particle size is 50 nm or more, not only the transparency is lowered but also haze is likely to occur, leading to deterioration of visibility.
[0036]
Examples of the conductive fine particles include metal fine particles. Examples of the metal species of the metal fine particles include Ag, Al, Au, Cu, Pd, and Pt. In particular, Ag is the main component from the viewpoint of conductivity and transparency. Further, the metal fine particles preferably contain Au in order to effectively precipitate metal ions at the exposed portions of the metal fine particles during the chemical treatment described later, and are alloy fine particles with Au mainly composed of Ag, Au fine particles, Or a mixture with the alloy fine particles.
[0037]
The various metal fine particles may contain a metal such as Pd in order to improve color tone and chemical stability, depending on the use of the transparent conductive film. The required content of the metal such as Au and Pd varies depending on the reaction conditions during chemical treatment or the use of the transparent conductive film. However, if it is more than necessary, the conductivity is lowered and the cost is increased, which is not preferable. For example, when using Au, it is preferable that it is 50 weight% or less with respect to the whole metal microparticle.
[0038]
The metal fine particles can be produced relatively easily by a number of known techniques represented by the method published by CareyLea in 1889 (Am. J. Sci., Vol. 37, pp. 491, 1889). For example, Pd and Ag alloy fine particles can be obtained by reducing an aqueous nitrate solution of Pd and Ag with a reducing agent such as ferrous sulfate in the presence of a dispersion stabilizer such as citric acid. In principle, other metal fine particles can be produced by a method of reducing metal ions in the presence of a dispersion stabilizer.
[0039]
Examples of the metal species of the metal 6, that is, the coated metal include Ag, Au, Pd, and Pt. In particular, the reactivity at the time of chemical treatment described later, and the chemical durability of the transparent conductive film obtained after the chemical treatment are described. From the viewpoint, it is preferable to include Au.
[0040]
[Method for producing conductive layer]
The manufacturing method of the said conductive layer 2 consists of formation of a precursor conductive layer, and a subsequent chemical | medical solution process. The precursor conductive layer refers to a conductive layer that is fixed in a state where metal fine particles are exposed from the surface.
[0041]
(Formation of precursor conductive layer)
The formation of the precursor conductive layer can be performed, for example, by a method in which conductive fine particles such as the metal fine particles, the binder and the dispersion medium containing the dispersion medium are uniformly applied on a substrate, and then dried and heat-treated. It is important that the amount of the binder added is such that the conductive fine particles are not completely buried in the conductive layer. The coating can be performed by the same method as the silica layer coating, but a method using spin coating is particularly preferable. The main purpose of the heat treatment is to improve the conductivity by curing the binder and fusing the conductive fine particles, but the heat treatment temperature is preferably 150 ° C. or less, particularly 120 ° C. or less from the viewpoint of heat resistance of various film substrates. preferable. In order to express sufficient electrical conductivity in the prior art, heat treatment at 150 ° C. to 200 ° C. or higher is necessary at the time of film formation, and usable substrates are limited to glass and some heat-resistant films. It was. In the present invention, it is possible to improve the conductivity by the chemical treatment described later, and to lower the heat treatment temperature at the time of film formation to a level compatible with a wide range of film base materials.
[0042]
Moreover, when apply | coating a coating liquid, you may form in the whole surface and may form in pattern shape. When formed on the entire surface, a transparent conductive film can be formed by selecting the film pressure, the conductive fine particles to be used, and the like. In the case of a transparent conductive film, the light transmittance in the visible light region of the entire film is 50% or more, preferably 70% or more. Patterning can be performed using a known technique. Examples of the patterning method include a gravure printing method, an offset printing method, a letterpress printing method, and an inkjet method. If the conductive layer is transparent, a transparent patterned conductive film can be formed.
[0043]
(Chemical solution treatment of precursor conductive layer)
The chemical treatment is performed by treating the precursor conductive layer with a treatment solution containing a salt of metal 6, a reducing agent, and water. Specific examples of the chemical treatment include a method of immersing the precursor conductive layer in the treatment solution and a method of treating the precursor conductive layer with a chemical solution. In both methods, the treated precursor conductive layer is pure and sufficient. It is important to wash it.
[0044]
In the portion exposed from the surface of the metal fine particles of the precursor conductive layer by the chemical treatment, reduction precipitation of ions of the metal 6 selectively occurs, and the exposed portion of the metal fine particles is covered with the metal 6, and further, adjacent metal fine particles Is cross-linked by the metal 6, a conduction path is generated, and the conductivity is improved. The cross-linking between the metal fine particles can be actually observed by a technique such as AFM. Moreover, although chemical processing changes with systems, since it is performed at room temperature-80 degreeC, there is no problem regarding the heat resistance of a film base material. In chemical processing, various reaction conditions should be optimized as appropriate according to the type of metal fine particles and metal salt used, to suppress the generation of new nuclei of metal fine particles, and to deposit metal only at the exposed portions of metal fine particles. is important. When new nucleation occurs, a conduction path due to crosslinking cannot be obtained efficiently. In particular, when a transparent conductive film is used, the transparency is significantly impaired.
[0045]
The salt of metal 6 is preferably an Au salt from the viewpoint of reactivity and chemical durability of the conductive layer, and HAuCl 4 or a hydrate thereof can be used as an example.
The reducing agent is not particularly limited, and an optimum reducing agent can be appropriately selected depending on the type of conductive fine particles and metal ions to be reduced. Note that, depending on various conditions, there may be a case where reduction deposition of metal occurs without a reducing agent, and the reducing agent is not necessarily an essential component. Examples of the reducing agent include hydroxylamine in a system using Ag / Au alloy metal particles as conductive particles and HAuCl 4 as metal salt.
[0046]
【Example】
Hereinafter, the present invention will be specifically described with reference to an example in which metal fine particles are used as conductive fine particles and applied to a transparent conductive film. However, the present invention is not limited to these examples. First, preparation methods and various evaluation methods for various solutions common to each example and comparative example will be described.
[0047]
[Preparation of Ag fine particle dispersion]
11 g of ferrous sulfate heptahydrate, 12.8 g of sodium citrate dihydrate, and 53 g of a solution of 0.5 g of sodium hydroxide in distilled water and 20 g of a solution of 2 g of silver nitrate in distilled water In addition, colloidal silver fine particles were produced. The produced silver fine particles were collected by centrifugation, washed with an aqueous ammonium nitrate solution to remove impurities, and then redispersed in distilled water to obtain an Ag fine particle dispersion (Ag concentration = 4% by weight).
[0048]
[Preparation of Au fine particle dispersion]
Colloidal gold fine particles produced by adding 20 g of a solution in which 0.2 g of sodium citrate dihydrate was dissolved in distilled water in a state where 1000 g of a solution in which 0.1 g of chloroauric acid was dissolved in distilled water was heated to boiling. The dispersion was concentrated to obtain an Au fine particle dispersion (Au concentration = 4% by weight).
[0049]
[Preparation of binder forming solution]
After hydrolyzing by adding 6.8 g of 1N hydrochloric acid to 10.4 g of tetraethoxysilane, ethanol was added to prepare a binder forming solution having a concentration of 4% by weight in terms of silica.
[0050]
[Preparation of treatment liquid for Ag coating]
Silver nitrate (0.1 g) and hydroquinone (0.44 g) were dissolved in distilled water to prepare a 1000 g Ag coating solution.
[0051]
[Preparation of Au coating treatment solution]
1000 g of Au coating solution was prepared by dissolving 0.1 g of chloroauric acid trihydrate and 0.13 g of hydroxylamine in distilled water.
[0052]
[Evaluation of transparent conductive film]
(Surface resistivity)
Measurement was performed by a four-end needle method using Loresta AP (MCP-T400) manufactured by Mitsubishi Yuka Co., Ltd.
(Transmittance)
Measurement was performed using a reflection / transmittance meter (HR-100) manufactured by Murakami Color Research Laboratory.
(Salt water resistance)
The surface resistivity after each substrate with the transparent conductive layer formed was immersed in 5% saline for 1 hour was measured.
The evaluation results of each example and comparative example are all shown in Table 1.
[0053]
<Example 1>
The following was prepared as a coating liquid for forming the precursor transparent conductive layer.
Ag fine particle dispersion 20g
Ethanol 20g
1g of binder forming solution
The said coating liquid was apply | coated to the glass base material on 150 rpm-30 second conditions using the spin coater, and after drying, it heat-processed for 120 degreeC-30 minutes, and obtained the precursor transparent conductive layer. Subsequently, the precursor transparent conductive layer was immersed in a treatment liquid for Ag coating at room temperature for 2 minutes, and then sufficiently washed with pure water to obtain a transparent conductive layer.
[0054]
<Example 2>
The precursor transparent conductive layer obtained in Example 1 was immersed in an Au coating solution at room temperature for 2 minutes, and then sufficiently washed with pure water to obtain a transparent conductive layer.
[0055]
<Example 3>
The following was prepared as a coating liquid for forming the precursor transparent conductive layer.
Ag fine particle dispersion 15g
Au fine particle dispersion 5g (25% of the total fine metal particles)
Ethanol 20g
1g of binder forming solution
A precursor transparent conductive layer obtained by performing film formation and heat treatment in the same manner as in Example 1 using the above coating solution was treated in the same manner as in Example 2 to obtain a transparent conductive layer.
[0056]
<Example 4>
The following was prepared as a coating liquid for forming the precursor transparent conductive layer.
Au fine particle dispersion 20g
Ethanol 20g
1g of binder forming solution
A precursor transparent conductive layer obtained by performing film formation and heat treatment in the same manner as in Example 1 using the above coating solution was treated in the same manner as in Example 2 to obtain a transparent conductive layer.
[0057]
<Comparative Example 1>
The precursor transparent conductive layer obtained in Example 1 was used as Comparative Example 1 as it was.
[0058]
<Comparative example 2>
A precursor transparent conductive layer was formed under the same conditions as in Example 1 except that the heat treatment temperature when forming the precursor transparent conductive layer in Example 1 was 200 ° C.
[0059]
<Comparative Example 3>
The precursor transparent conductive layer obtained in Example 3 was used as Comparative Example 3 as it was.
[0060]
<Comparative example 4>
The precursor transparent conductive layer obtained in Example 4 was used as Comparative Example 4 as it was.
[0061]
[Table 1]
Figure 0003972686
[0062]
Salt water resistance: surface resistivity after each substrate on which a transparent conductive layer is formed is immersed in 5% saline for 1 hour.
[Evaluation results]
As is clear from the results shown in Table 1, the transparent conductive film obtained in the present invention is significantly improved in conductivity although the transparency is slightly reduced by performing the chemical treatment shown in each example. That is confirmed. Moreover, from the evaluation results of Comparative Example 3 and Example 3, it is confirmed that the salt water resistance is improved by using gold having high chemical stability as the metal 6 (coating metal).
[0064]
【The invention's effect】
The conductive film of the present invention contains conductive fine particles such as metal fine particles as a conductive material, and at least a part of the conductive fine particles protrudes from the surface, and the adjacent conductive fine particles in the protruding part are cross-linked by metal. Therefore, it has good conductivity. Moreover, it is possible to give favorable chemical durability by using Au etc. with a small ionization tendency as a metal. In addition, the metal coating and cross-linking structure is formed by selectively reducing and depositing metal ions in the exposed part of the conductive fine particles in the liquid phase at room temperature. Therefore, the conventional problems relating to the heat resistance of the substrate can be avoided, and a wide range of films can be used as the substrate. Moreover, it can be set as a transparent conductive film by making a conductive layer transparent. Further, a patterned conductive film such as a printed wiring body can be obtained by patterning the conductive layer.
[0065]
[Brief description of the drawings]
FIG. 1 is a layer configuration diagram showing an embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Transparent conductive film 2 Transparent conductive layer 3 Transparent base material 4 Binder 5 Metal fine particle 6 Metal (coating metal)

Claims (19)

導電性微粒子の少なくとも一部が表面から突出している突出部分を有する導電層を具備した導電膜であって、少なくとも前記突出部分の一部が金属により被覆されており、かつ前記突出部分において近接する該導電性微粒子同士が該金属により架橋されており、並びに前記導電層が酸化ケイ素を主成分とするバインダを含むことを特徴とする導電膜。  A conductive film comprising a conductive layer having a protruding portion in which at least a part of the conductive fine particles protrudes from the surface, wherein at least a part of the protruding portion is covered with a metal and is close to the protruding portion. A conductive film characterized in that the conductive fine particles are crosslinked with the metal, and the conductive layer contains a binder mainly composed of silicon oxide. 前記導電性微粒子の一次粒径が50nm以下であることを特徴とする請求項1記載の導電膜。  The conductive film according to claim 1, wherein a primary particle size of the conductive fine particles is 50 nm or less. 前記導電性微粒子が金属微粒子であることを特徴とする請求項1または2に記載の導電膜。  The conductive film according to claim 1, wherein the conductive fine particles are metal fine particles. 前記金属微粒子がAg,Al,Au,Cu,Pd,Ptのいずれか、あるいはそれらの2種類以上の組み合わせまたは合金であることを特徴とする請求項3に記載の導電膜。  The conductive film according to claim 3, wherein the metal fine particles are any one of Ag, Al, Au, Cu, Pd, and Pt, or a combination or alloy of two or more thereof. 前記金属微粒子がAuを含み、その含量が金属微粒子全体に対し50重量%以下であることを特徴とする請求項4記載の導電膜。  5. The conductive film according to claim 4, wherein the metal fine particles contain Au, and the content thereof is 50% by weight or less based on the whole metal fine particles. 前記金属がAg,Au,Pd,Ptのいずれか、あるいはそれらの2種類以上の組み合わせまたは合金であることを特徴とする請求項1〜5記載のいずれかに記載の導電膜。  The conductive film according to claim 1, wherein the metal is any one of Ag, Au, Pd, and Pt, or a combination or alloy of two or more kinds thereof. 前記導電層が透明であり、かつ導電膜全体の可視光域の光線透過率が50%以上であることを特徴とする請求項1〜6のいずれかに記載の導電膜。  The conductive film according to claim 1, wherein the conductive layer is transparent, and a light transmittance in a visible light region of the entire conductive film is 50% or more. 導電性微粒子の少なくとも一部が表面から露出している導電層を有し、かつ前記導電層が酸化ケイ素を主成分とするバインダを有する導電膜を、金属イオンを含む処理液により処理する工程を含むことを特徴とする導電膜の製造方法。  A step of treating a conductive film having a conductive layer in which at least a part of the conductive fine particles are exposed from the surface and the conductive layer having a binder mainly composed of silicon oxide with a treatment liquid containing metal ions. A method for producing a conductive film, comprising: 前記導電性微粒子の一次粒径が、50nm以下であることを特徴とする請求項8記載の導電膜の製造方法。  The method for producing a conductive film according to claim 8, wherein a primary particle size of the conductive fine particles is 50 nm or less. 前記導電性微粒子が金属微粒子であることを特徴とする請求項8または9に記載の導電膜の製造方法。  The method for producing a conductive film according to claim 8 or 9, wherein the conductive fine particles are metal fine particles. 前記導電層が、前記導電性微粒子を少なくとも含む塗布液を基材に塗布乾燥した後、熱処理することにより形成されることを特徴とする請求項8〜10のいずれかに記載の導電膜の製造方法。  The conductive film according to any one of claims 8 to 10, wherein the conductive layer is formed by applying and drying a coating solution containing at least the conductive fine particles on a substrate and then performing a heat treatment. Method. 前記熱処理の処理温度が150℃以下であることを特徴とする請求項11記載の導電膜の製造方法。  The method for producing a conductive film according to claim 11, wherein a treatment temperature of the heat treatment is 150 ° C. or less. 前記塗布液がバインダを含むことを特徴とする請求項11または12に記載の導電膜の製造方法。  The method for producing a conductive film according to claim 11, wherein the coating liquid contains a binder. 前記金属微粒子がAg,Al,Au,Cu,Pd,Ptのいずれか、あるいはそれらの2種類以上の組み合わせまたは合金からなることを特徴とする請求項10〜13記載の導電膜の製造方法。  The method for producing a conductive film according to claim 10, wherein the metal fine particles are made of any one of Ag, Al, Au, Cu, Pd, and Pt, or a combination or alloy of two or more thereof. 前記金属微粒子がAuを含み、その含量が金属微粒子全体に対し50重量%以下であることを特徴とする請求項14記載の導電膜の製造方法。  The method for producing a conductive film according to claim 14, wherein the metal fine particles contain Au, and the content thereof is 50% by weight or less based on the whole metal fine particles. 前記処理液中の金属イオンがAgイオン,Auイオン,Pdイオン,Ptイオンから選択される一種類以上を含むことを特徴とする請求項8〜15のいずれかに記載の導電膜の製造方法。  The method for producing a conductive film according to any one of claims 8 to 15, wherein the metal ions in the treatment liquid include one or more selected from Ag ions, Au ions, Pd ions, and Pt ions. 前記処理液が還元剤を含むことを特徴とする請求項16記載の透明導電膜の製造方法。  The method for producing a transparent conductive film according to claim 16, wherein the treatment liquid contains a reducing agent. 前記導電層が透明であり、膜全体として透明であることを特徴とする請求項8〜17のいずれかに記載の導電膜の製造方法。  The method for producing a conductive film according to claim 8, wherein the conductive layer is transparent and the entire film is transparent. 前記導電性微粒子を少なくとも含む塗布液をパターン状に塗布することを特徴とする請求項11〜18のいずれかに記載の導電膜の製造方法。The method for producing a conductive film according to claim 11, wherein the coating liquid containing at least the conductive fine particles is applied in a pattern.
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