JP3972691B2 - Mounting machine - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a mounting machine for mounting an electronic component (hereinafter referred to as a component) on a circuit board (hereinafter referred to as a substrate).
[0002]
[Prior art]
In conventional mounting machines, components supplied from the supply unit are picked up by the nozzles of the head unit, taken out, transported onto the substrate held by the substrate holding unit, and then the components are mounted on this substrate. It was. Then, the inspection unit provided in the moving path of the head unit inspects the component sucked and held by the nozzle, and corrects the posture of the component as necessary based on the inspection result to perform the mounting operation. It was.
[0003]
In the head portion, a diffuser is arranged as a background of the nozzle that holds the component, and the tip of the nozzle protrudes from the through hole provided in the diffuser. With the background of the nozzle that has been irradiated with light rays and held the component by the diffuser as a bright background, a light image of the shadow of the component held at the nozzle tip, that is, a shadow image, is taken by the inspection unit.
[0004]
[Problems to be solved by the invention]
However, the conventional mounting machine has the following problems.
[0005]
That is, when a shadow image of a component is captured by the inspection unit, the contour may overlap with the through-hole of the diffuser depending on the size of the component held at the nozzle tip. In this case, since the through-hole is not a bright background, the shadow image captured by the inspection unit does not clearly indicate the contour shape of the component, and the holding posture of the component cannot be accurately inspected. There was a case.
[0006]
An object of the present invention is to solve such problems, improve the accuracy of the holding posture inspection of the component held by the nozzle, and as a result, improve the mounting accuracy of the component on the substrate.
[0007]
[Means for Solving the Problems]
In order to solve this problem, the present invention provides a supply unit for supplying a component, a substrate holding unit for holding a substrate on which the component is mounted, and picking up the component from the supply unit and mounting the component on the substrate. And a first diffuser disposed on the opposite side of the nozzle from the tip side and provided with a through hole through which the nozzle penetrates, and an outer shape larger than the through hole of the first diffuser A second diffuser attached to the outer periphery of the nozzle; a light source that emits light toward the first and second diffusers; and a holding posture of the component held by the tip of the nozzle. It is configured to include an inspection unit for inspecting, and it is possible to improve the accuracy of the holding posture inspection of the component held by the nozzle, and as a result, it is possible to improve the mounting accuracy of the component on the substrate.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
  According to the first aspect of the present invention, there is provided a supply unit for supplying a component, a substrate holding unit for holding a substrate on which the component is mounted, and picking up the component from the supply unit and removing the component from the supply unit. A nozzle to be mounted, a first diffuser provided with a through-hole through which the nozzle passes, and a second diffuser having an outer shape larger than the through-hole of the first diffuser and attached to the outer peripheral portion of the nozzle And arranging the through hole of the first diffuser between the nozzle tip and the second diffuser attached to the outer periphery of the nozzle,The first diffuser is provided with a reflecting portion on the side opposite to the nozzle tip side except for the peripheral edge of the through hole of the first diffuser,Mounting provided with a light source for irradiating light from the tip end side of the nozzle toward the first and second diffusers, and an inspection unit for inspecting the holding posture of the component held at the tip end of the nozzle This improves the accuracy of inspection of the holding posture of the components held by the nozzle, and as a result, improves the mounting accuracy of the components on the board, and the nozzle can be stored inside the first diffuser. The nozzle and the first diffuser can be made compact as a whole.
  In addition, among the light rays emitted from the light source toward the first diffuser, the light diffuses into the first diffuser without being reflected by the surface of the first diffuser at the nozzle tip side, The amount of light that passes through and reaches the second diffuser can be increased. As a result, the brightness of the background generated by the second diffuser, which tends to be darker than the background generated by the first diffuser, is increased, the variation in the brightness of the background is reduced, and the clearer A shadow image can be obtained, the accuracy of the holding posture inspection of the component held by the nozzle can be improved, and as a result, the mounting accuracy of the component on the board can be improved.
[0009]
The invention according to claim 2 of the present invention is the mounting machine according to claim 1, wherein the first diffuser is provided with a reflecting portion on the side opposite to the nozzle tip side. Of the light irradiated toward the diffuser of the first diffuser, the light propagates to the inside of the first diffuser without being reflected by the surface on the nozzle tip side of the first diffuser and passes through the first diffuser. The reflected light is reflected to the nozzle tip side by the reflecting part, the brightness of the background generated by the first diffuser is increased, a clear shadow image can be obtained, and the holding posture inspection of the parts held by the nozzle The accuracy can be improved, and as a result, the mounting accuracy of the component on the board can be improved.
[0016]
  Claims of the invention2According to the invention described in claim 1, a thin wall portion larger than the outer shape of the second diffuser is provided on the periphery of the through hole of the first diffuser on the side opposite to the nozzle tip side.1The mounting machine according to claim 1, wherein the thin portion is provided so that the light beam irradiated from the light source toward the first diffuser enters the first diffuser and passes through the first diffuser. Since the amount of light scattered inside the first diffuser is reduced, the amount of light passing through the first diffuser and reaching the second diffuser is further increased. The brightness of the background generated by the second diffuser, which tends to be darker than the background generated by, can be further increased, variation in the brightness of the background can be reduced, a clear shadow image can be obtained, and the nozzle The accuracy of the holding posture inspection of the held component can be improved, and as a result, the mounting accuracy of the component on the board can be improved.
[0017]
  Claims of the invention3The invention described in claim 1 has a shape in which the through hole of the first diffuser expands to the opposite side of the nozzle tip side.2The mounting machine according to claim 1, wherein the amount of light passing through the first diffuser and reaching the second diffuser is increased, so that it becomes darker than the background generated by the first diffuser. The brightness of the background generated by the second diffuser can be further increased, the variation in the brightness of the background can be reduced, a clear shadow image can be obtained, and the accuracy of the holding posture inspection of the parts held by the nozzle As a result, it is possible to improve the mounting accuracy of components on the board.
[0018]
  Claims of the invention4The invention described in claim 1 has a shape in which the through hole of the first diffuser is widened to the nozzle tip side.2The light beam that reaches the second diffuser among the light beams emitted from the light source toward the first and second diffusers once passes through the first diffuser. The second diffuser is directly irradiated from the light source, and the amount of light reaching the second diffuser is increased compared to the case where it passes through the first diffuser, and is generated by the first diffuser. The background brightness generated by the second diffuser, which tends to be darker than the background, can be increased, the background brightness variation can be reduced, and a clearer shadow image can be obtained. The accuracy of the holding posture inspection of the held component can be improved, and as a result, the mounting accuracy of the component on the substrate can be further improved.
[0023]
(Embodiment 1)
Hereinafter, a first embodiment of the present invention will be described with reference to FIGS.
[0024]
FIG. 1 is a schematic plan view showing a mounting machine according to the first embodiment of the present invention, FIG. 2 is a perspective view showing a head portion of the mounting machine, and FIGS. 3 and 5 are inspections of the mounting machine. FIG. 4 is a bottom view showing a head portion of the mounting machine.
[0025]
As shown in FIG. 1, the supply unit 1 is equipped with a plurality of supply bodies 2 for supplying components 31 and reciprocates in the Z direction shown in FIG. 1, and the components supplied by the supply unit 1. 31 is mounted on the substrate 3 held by the substrate holding part 4 movable in the XY directions.
[0026]
Above the supply unit 1 and the substrate holding unit 4, a rotary table unit 5 that intermittently rotates in the M direction shown in FIG. 1 is arranged, and 16 head units 6 are arranged at the peripheral part of the rotary table unit 5. Attached at intervals, the rotary table 5 is intermittently rotated. As shown in FIG. 2, the head unit 6 is connected to a head rotating unit 8 composed of a motor provided at the upper part of a rotating body 7 provided at the lower part, and the rotating unit 7 of the head unit 6 is connected by the head rotating unit 8. It is designed to rotate. Further, as shown in FIG. 4, six nozzles 9 a to 9 f are attached to the lower portion of the rotating body 7 so that they cannot rotate relative to the rotating body 7. As shown in FIG. 2, a holder 10 is coupled to the lower portion of the rotating body 7, and a first diffuser 11 is coupled to the lower portion of the holder 10 as illustrated in FIGS. 2 and 3. As shown in FIG. 4, the first diffuser 11 is provided with through holes 12a to 12f corresponding to the nozzles 9a to 9f. Then, as shown in FIG. 2, one nozzle to be used among the six nozzles 9a to 9f, for example, the nozzle 9a, selectively penetrates downward through the through holes 12a to 12f. At this time, the other nozzles 9 b to 9 f are stored in the holder 10. The nozzles 9a to 9f pick up and take out the components 31 supplied by the supply unit 1 shown in FIG. 1 and transport them onto the substrate 3 held by the substrate holding unit 4 for mounting. The part 31 is taken out at the K position in FIG. 1 and mounted at the S position. Only the nozzles 9a to 9f that are located on the outermost side of the head portion 6 attached to the rotary table portion 5 protrude downward from the first diffuser 11, and the nozzles 9a to 9f The part 31 is taken out and mounted by one protruding nozzle.
[0027]
As shown in FIG. 1, in the H position, which is one of intermittent stop positions of the head unit 6 that intermittently moves from the supply unit 1 to the substrate 3, holding of the component 31 that is held and conveyed by the nozzles 9a to 9f. An inspection unit 13 for inspecting the posture is arranged. As shown in FIGS. 1 and 3, the inspection unit 13 has a small-field component camera 15 and a large-field component camera 16 attached to the lens barrel 14, and switches the camera to be used depending on the component 31 to be inspected. . As shown in FIGS. 1, 3, and 5, there is a light source 18 in which a red LED is arranged on the side of the image capturing unit 17, and a red light beam 19 a is applied to the nozzle 9 a stopped on the image capturing unit 17. To do. As will be described later, a shadow image formed by passing the red light beam 19a from the upper side to the lower side of the component 31 passes through the inside of the image capturing unit 17 and the lens barrel 14, and the small-field component camera 15 or the large field-of-view. The component camera 16 is reached and imaged, and the holding posture of the component 31 is inspected.
[0028]
Although not shown, this mounting machine is provided with a control unit for controlling the operation of each unit. This control unit stores mounting position information such as the type of component 31 mounted on the substrate 3, the mounting position and angle. The inspection unit 13 shown in FIGS. 1, 3, and 5 inspects the holding posture of the component 31 held by the nozzle 9 a from the image of the component 31 captured by the small-field component camera 15 or the large-field component camera 16. Then, the control unit calculates how much the substrate holding unit 4 and the head rotation unit 8 of the head unit 6 should be moved next from the mounting position information of the component 31 or the inspection result of the inspection unit 13. When the holding posture of the component 31 is deviated from a predetermined one, it is natural to calculate the correction rotation angle of the head unit 6 and the correction movement amount of the substrate holding unit 4 for correcting this deviation. become. When the holding posture of the component 31 causes a deviation in the rotation direction, the rotation body 7 is rotated by the head rotation unit 8 of the head unit 6 to correct the rotation direction deviation. That is, the head rotating unit 8 is a correcting unit.
[0029]
In this way, the component 31 is mounted by controlling the operation of each unit by the control unit while calculating the rotation angle of the head unit 6 and the movement amount of the substrate holding unit 4.
[0030]
Next, the inspection of the holding posture of the component 31 held by the nozzle 9a will be described in detail.
[0031]
As shown in FIG. 5, the nozzle 9 a of the head portion 6 includes a tip portion 20 that holds the component 31 by suction, and a large-diameter base portion 21 that is held by the rotating body 7 shown in FIG. 2 above the tip portion 20. The taper portion 22 formed between the base portion 21 and the tip portion 20 and the second diffuser 24 attached to the base portion 21. As shown in the figure, the through holes 12a to 12f of the first diffuser 11 are arranged between the tip portions 20 of the nozzles 9a to 9f. For this reason, as described above, the nozzle 9a. ˜9f can be accommodated inside the first diffuser 11, and the nozzles 9a to 9f and the first diffuser 11 can be made compact as a whole. The nozzle 9a is formed of an SK material, and at least the outer surface of the tapered portion 22, that is, the tapered surface is a mirror surface subjected to electroless nickel plating. The second diffuser 24 is made of a synthetic resin (methacrylic resin) of the same color as the light beam 19a emitted from the light source 18, and the surface of the nozzle 9a on the tip 20 side is a blasted rough surface. The second reflecting portion 25 is provided on the surface opposite to the tip portion 20 side. Further, as shown in FIG. 6, the second diffuser 24 is provided with an engaging protrusion 26, and an engaging groove 27 that engages with the engaging protrusion 26 is provided on the outer peripheral portion of the nozzle 9a. The diffuser 24 can be fixed simply by pushing it in from the tip 20 side of the nozzle 9a. With such a configuration, it is possible to easily perform the operation of attaching or replacing the second diffuser 24 to the nozzle 9a. Reference numeral 11 denotes a first diffuser coupled to the holder 10 of the head unit 6. The first diffuser 11 is made of a synthetic resin (methacrylic resin) of the same color as the light beam 19a emitted from the light source 18, and the surface of the nozzle 9a on the tip 20 side is blasted. The first reflecting portion 23 is provided on the surface opposite to the tip 20 side of the nozzle 9a. However, the first reflecting portion 23 is adjacent to the peripheral portion of the through hole 12a smaller than the outer shape of the second diffuser 24 through which the nozzle 9a of the first diffuser 11 passes, that is, the second diffuser 24. It is assumed that the first reflecting portion 23 is not provided at the peripheral portion.
[0032]
In such a state, a light beam 19a is irradiated from the light source 18 toward the first diffuser 11 as shown in FIG. A part of the irradiated light beam 19a is reflected by the surface of the first diffuser 11, and is directed to the lower side, that is, the light beam 19e directed to the upper surface of the component 31 adsorbed by the tip 20 of the nozzle 9a, The light beam 19d is reflected from the surface of one diffuser 11 and travels toward the tapered portion 22 of the nozzle 9a. This light beam 19d is reflected by the plating surface of the taper portion 22 of the nozzle 9a and becomes a light beam 19h directed downward, that is, toward the upper surface of the component 31 attracted to the tip portion 20 of the nozzle 9a in the same manner as the light beam 19e. Of the light rays 19a irradiated from the light source 18 toward the first diffuser 11, those other than the light reflected by the surface of the diffuser 11 proceed to the inside of the first diffuser 11, and a part thereof is the first. The first diffuser 11 diffuses inside the one diffuser 11 to cause the first diffuser 11 itself to emit light (the light beam path is not shown), but otherwise the first diffuser 11 passes through the first reflector 23. The light beam 19b reaches the light beam 19c and the light beam 19c reaches the peripheral edge of the through hole 12a of the nozzle 9a. The light beam 19 b is reflected by the first reflecting portion 23 and travels again into the first diffuser 11, and is diffused inside to cause the first diffuser 11 itself to emit light, and from the first diffuser 11. The light beam 19g is directed downward, that is, toward the upper surface of the component 31 adsorbed by the tip 20 of the nozzle 9a. Further, since the light beam 19c passes through the peripheral portion of the through hole 12a without the first reflecting portion 23, it is irradiated toward the second diffuser 24 adjacent to the through hole 12a. A part of the light beam 19c irradiated to the second diffuser 24 is reflected by the surface of the second diffuser 24 and directed downward, that is, toward the upper surface of the component 31 adsorbed by the tip 20 of the nozzle 9a. Becomes the light beam 19f. Among the light rays 19c irradiated to the second diffuser 24, those other than those reflected by the surface of the second diffuser 24 travel inside the second diffuser 24, and the second diffuser 24 The light is diffused inside to cause the second diffuser 24 itself to emit light, and becomes a light beam directed downward from the second diffuser 24, that is, toward the upper surface of the component 31 adsorbed by the tip 20 of the nozzle 9a (light ray). The route is not shown).
[0033]
In this way, the components in which the light beams 19e and 19g from the first diffuser 11, the light beam 19f from the second diffuser 24, and the light beam 19h from the tapered portion 22 of the nozzle 9a are attracted to the tip portion 20 of the nozzle 9a. Since the light beam is directed toward the upper surface of 31, a clear shadow image formed by the light beam that has passed through the component 31 is captured by the inspection unit 13 to inspect the holding posture of the component 31.
[0034]
By adopting such a configuration, the mounting machine according to the present embodiment is configured so that the contour of the component 31 adsorbed to the tip 20 of the nozzle 9a overlaps with the through hole 12a of the first diffuser 11. Positioning can be performed with high accuracy, and positioning can be performed with high accuracy even when the component 31 is smaller than the base portion 21 of the nozzle 9a.
[0035]
Moreover, the 1st reflective part 23 and the 2nd reflective part 25 are provided in the surface on the opposite side to the front-end | tip part 20 side of the nozzle 9a of the 1st diffuser 11 and the 2nd diffuser 24, respectively. Therefore, among the light rays 19 a emitted from the light source 18, those that pass through the first diffuser 11 and the second diffuser 24 without the first and second reflecting portions 23, 25, Since the light is reflected by the first reflecting portion 23 and the second reflecting portion 25, the brightness of the background generated by the first diffuser 11 and the second diffuser 24 is increased, and a clearer shadow image is formed. The component holding posture can be inspected stably. Furthermore, the surface of the first reflector 23 of the first diffuser 11 on the tip 20 side of the nozzle 9a is a mirror surface. Similarly, the surface of the second reflecting portion 25 of the second diffuser 24 on the tip end side of the nozzle 9a is also a mirror surface. By doing in this way, the light beam 19a irradiated from the light source 18 can be used effectively.
[0036]
Further, since the tapered portion 22 of the nozzle 9a is a mirror surface, the upper surface of the component 31 adsorbed on the tip portion 20 of the nozzle 9a can be efficiently irradiated with the light beam 19d reflected by the surface of the tapered portion 22. Thus, a clearer shadow image can be obtained, and the component holding posture can be inspected stably. In this case, if the entire surface of the nozzle 9a is not mirror-finished, but at least the outer peripheral surface of the tapered portion 22 is a mirror surface, it can be manufactured at low cost.
[0037]
The nozzle 9a has a base portion 21 that is larger than the tip portion 20, and has a configuration in which a tapered portion 22 is formed from the base portion 21 toward the tip portion 20 side, ensuring the strength of the entire nozzle 9a. However, the tip 20 is made small to be suitable for attracting and holding the minute component 31.
[0038]
(Embodiment 2)
Next, a second embodiment of the present invention will be described with reference to FIG.
[0039]
The second embodiment of the present invention is different from the first embodiment on the side opposite to the tip 20 side of the nozzles 9a to 9f at the periphery of the through holes 12a to 12f of the first diffuser 11. Since the counterbore portion larger than the outer shape of the second diffuser 24 is provided, and the counterbore portion is not provided with the first reflecting portion 23, the other points are the same in configuration. Similar components are denoted by the same reference numerals, and detailed description thereof is omitted.
[0040]
In FIG. 7, 28 is a peripheral part of the through-holes 12a-12f of the 1st diffuser 11, and is rather than the external shape of the 2nd diffuser 24 provided in the opposite side to the front-end | tip part 20 side of the nozzles 9a-9f. It is a large counterbore part, and the counterbore part 28 is not provided with the first reflection part 23.
[0041]
Of the light rays 19 a irradiated from the light source 18 toward the first diffuser 11, the light 19 a travels inward without being reflected by the surface of the first diffuser 11 and passes through the first diffuser 11 from the counterbore 28. The light beam 19c is diffused inside the first diffuser 11 while traveling inside the first diffuser 11, and causes the first diffuser 11 itself to emit light. Therefore, the amount of light diffused inside the first diffuser 11 is reduced, and the amount of light beam 19c passing through the first diffuser 11 is increased. This light beam 19c passes through the first diffuser 11 from the counterbore 28 and is irradiated to the second diffuser 24, and is adsorbed to the lower side from the second diffuser 24, that is, the tip 20 of the nozzle 9a. Since the light beam 19f is directed toward the upper surface of the component 31, an increase in the light amount of the light beam 19c results in an increase in the light amount of the light beam 19f.
[0042]
With such a configuration, the light beams 19e and 19g from the first diffuser 11, the light beam 19f from the second diffuser 24, and the light beam from the taper portion 22 of the nozzle 9a irradiated on the upper surface of the component 31. 19h, the amount of light 19f from the second diffuser 24, which tends to be darker than the others, is increased, and as a result, the light irradiated on the upper surface of the component 31 approaches uniformly and is imaged by the inspection unit 13. Therefore, it is possible to stably inspect the component holding posture.
[0043]
(Embodiment 3)
Next, a third embodiment of the present invention will be described with reference to FIG.
[0044]
The third embodiment of the present invention is different from that of the first embodiment in that the through holes 12a to 12f of the first diffuser 11 are widened to the side opposite to the tip 20 side of the nozzles 9a to 9f. The enlarged portion is different only in that the first reflecting portion 23 is not provided, and the other portions are of the same configuration, so that the same components are denoted by the same reference numerals and detailed description thereof is omitted. Description is omitted.
[0045]
In FIG. 8, reference numeral 29 denotes an expanded portion in which the through holes 12 a to 12 f of the first diffuser 11 have a shape that expands toward the side opposite to the tip portion 20 side of the nozzles 9 a to 9 f. The portion 29 is not provided with the first reflecting portion 23.
[0046]
Of the light rays 19 a irradiated from the light source 18 toward the first diffuser 11, the light 19 a travels inward without being reflected by the surface of the first diffuser 11, and passes through the first diffuser 11 from the expanding portion 29. The light beam 19c is diffused inside the first diffuser 11 while traveling inside the first diffuser 11, and causes the first diffuser 11 itself to emit light. Since it is thinner than the portion, the amount of light diffused inside the first diffuser 11 is reduced, and the amount of light beam 19c passing through the first diffuser 11 is increased. The light beam 19c passes through the first diffuser 11 from the expanding portion 29 and is irradiated to the second diffuser 24, and is a component adsorbed to the lower side, that is, the tip 20 of the nozzle 9a from the second diffuser 24. Since the light beam 19f is directed toward the upper surface of 31, the increase in the light amount of the light beam 19c results in an increase in the light amount of the light beam 19f.
[0047]
With such a configuration, the light beams 19e and 19g from the first diffuser 11, the light beam 19f from the second diffuser 24, and the light beam from the taper portion 22 of the nozzle 9a irradiated on the upper surface of the component 31. 19h, the amount of light 19f from the second diffuser 24, which tends to be darker than the others, is increased, and as a result, the light irradiated on the upper surface of the component 31 approaches uniformly and is imaged by the inspection unit 13. Therefore, it is possible to stably inspect the component holding posture.
[0048]
(Embodiment 4)
Next, a fourth embodiment of the present invention will be described with reference to FIG.
[0049]
The fourth embodiment of the present invention is different from the first embodiment only in that the through holes 12a to 12f of the first diffuser 11 have a shape that expands toward the tip 20 of the nozzles 9a to 9f. However, the other components have the same configuration, and the same components are denoted by the same reference numerals and detailed description thereof is omitted.
[0050]
In FIG. 9, reference numeral 30 denotes an expanded portion in which the through holes 12 a to 12 f of the first diffuser 11 have a shape that expands toward the tip portion 20 side of the nozzles 9 a to 9 f.
[0051]
The light beam 19i irradiated from the light source 18 toward the second diffuser 24 has an expanded portion 30 having a shape in which the through holes 12a to 12f of the diffuser 11 expand toward the tip portion 20 side of the nozzles 9a to 9f. Therefore, the second diffuser is directly passed through the first diffuser 11 without going through the first diffuser 11 and without diffusing inside the first diffuser 11. 24 is irradiated. For this reason, the amount of light 19i is significantly larger than the case where the light beam 19i passes through the first diffuser 11 and is irradiated to the second diffuser 24 from the light source 18. As a result, the light amount of the light beam 19f from the second diffuser 24 toward the lower side, that is, the upper surface of the component 31 attracted to the tip portion 20 of the nozzle 9a is increased.
[0052]
With such a configuration, the light beams 19e and 19g from the first diffuser 11, the light beam 19f from the second diffuser 24, and the light beam from the taper portion 22 of the nozzle 9a irradiated on the upper surface of the component 31. 19h, the light quantity of the light beam 19f from the second diffuser 24, which tends to be darker than the others, is increased, and as a result, the light beam irradiated on the upper surface of the component 31 approaches more uniformly. The captured shadow image is stable, and the component holding posture can be inspected stably.
[0053]
【The invention's effect】
As described above, the present invention has a first diffuser provided with a through-hole through which the nozzle passes, and a second diffuser attached to the side opposite to the tip end side of the nozzle. Since a clear shadow image of the component adsorbed on the tip of the nozzle can be obtained, the component can be positioned with high accuracy and mounted on the substrate with high accuracy.
[Brief description of the drawings]
FIG. 1 is a schematic plan view showing a mounting machine according to a first embodiment of the present invention.
FIG. 2 is a perspective view showing a head portion of the mounting machine.
FIG. 3 is a perspective view showing an inspection unit of the mounting machine.
FIG. 4 is a bottom view showing a head portion of the mounting machine.
FIG. 5 is a front view showing an inspection unit of the mounting machine.
FIG. 6 is a sectional view showing the main part of the nozzle of the same mounting machine.
FIG. 7 is a front view showing an inspection unit of the mounting machine according to the second embodiment of the present invention.
FIG. 8 is a front view showing an inspection unit of a mounting machine according to a third embodiment of the present invention.
FIG. 9 is a front view showing an inspection unit of a mounting machine according to a fourth embodiment of the present invention.
[Explanation of symbols]
1 Supply section
2 Supplier
3 Substrate
4 Substrate holder
5 Rotary table section
6 Head
7 Rotating body
8 Head rotating part
9a, 9b, 9c, 9d, 9e, 9f Nozzle
10 Holder
11 First diffuser
12a, 12b, 12c, 12d, 12e, 12f Through hole
13 Inspection Department
14 Tube
15 Small field of view camera
16 Large field of view camera
17 Image capture unit
18 Light source
19a, 19b, 19c, 19d, 19e, 19f, 19g, 19h, 19i rays
20 Tip
21 Base part
22 Taper
23 First reflector
24 Second diffuser
25 Second reflector
26 Engagement protrusion
27 Engagement groove
28 counterbore
29 Expanding part
30 Expansion part
31 parts

Claims (4)

A supply unit for supplying the component, a substrate holding unit for holding a substrate on which the component is mounted, a nozzle for sucking the component and taking it out from the supply unit and mounting it on the substrate, and a through hole through which the nozzle passes And a second diffuser having a larger outer shape than the through hole of the first diffuser and attached to the outer peripheral portion of the nozzle, and the through hole of the first diffuser Is disposed between the nozzle tip and the second diffuser attached to the outer periphery of the nozzle, and the first diffuser is arranged except for the peripheral edge of the through hole of the first diffuser. A reflection part is provided on the side opposite to the nozzle tip side, and a light source for irradiating light from the tip side of the nozzle toward the first and second diffusers, and the light source held at the tip of the nozzle A mounting machine including an inspection unit for inspecting a holding posture of a component. The mounting machine according to claim 1, wherein a thin wall portion larger than the outer shape of the second diffuser is provided on the side of the through hole of the first diffuser on the side opposite to the nozzle tip side. The mounting machine according to claim 2 , wherein the through hole of the first diffuser has a shape that expands to the opposite side of the nozzle tip side. The mounting machine according to claim 2 , wherein the through hole of the first diffuser has a shape that expands toward the nozzle tip.

Images