JP3973659B2 - Macro lighting device - Google Patents

Description

[0001]
【Technical field】
The present invention relates to a macro illumination device that performs illumination at the time of macro inspection of an object such as a semiconductor wafer or a glass substrate of a flat panel display (hereinafter referred to as FPD).
[0002]
[Background]
FIG. 16 is a block diagram of a macro illuminating device described in Japanese Patent Application No. 2002-521196 (first basic application number Japanese Patent Application No. 2000-253924, unpublished on August 24, 2000, the earliest basic application date). A holder 2 is provided in the inside of the device body 1 that is not known. A glass substrate 3 used for an FPD such as an LCD is held on the holder 2. As the glass substrate 3, a large FPD having a size exceeding 1000 mm capable of chamfering four or six chamfers has appeared. The holder 2 is rotatably supported at the center, and can be swung or reversed within a range of a predetermined angle around the support.
[0003]
Above the apparatus main body, a plurality of illumination light sources 4 constituting the illumination optical system, for example, a total of four illumination light sources 4 in the front, rear, left and right are provided. Corresponding to these illumination light sources 4, a plurality of, for example, a total of four reflecting mirrors 5, for example, front, rear, left and right, are arranged inclined at a predetermined angle.
On the reflection optical path of these reflection mirrors 5, the respective condensing optical systems 6R and 6F divided into four are arranged. These condensing optical systems 6R and 6F are composed of first and second Fresnel lenses 61 and 62, and are arranged in two rows in the front-rear direction of the apparatus main body 1.
A plurality of illumination light sources 4 and 8 are arranged above the apparatus main body. Each illumination light output from these illumination light sources 4 is reflected by each reflecting mirror 5, and enters each of the four condensing optical systems 6R and 6F. These condensing optical systems 6 </ b> R and 6 </ b> F form each illumination light into each convergence light 7 and uniformly irradiate the entire area of the large glass substrate 3. Thereby, the glass substrate 3 is illuminated with each convergent light 7, and the surface is scratched and soiled and macroscopically inspected.
[0004]
However, for example, in order to macro-illuminate the entire surface of a large glass substrate 3 that exceeds 1000 mm for four or six chamfering, for example, a total of four illumination light sources 4 and condensing optical systems 6 are required. Moreover, when each irradiation area becomes larger as the glass substrate 3 becomes larger, the optical path of the illumination optical system becomes longer. For this reason, it becomes difficult to arrange the illumination optical system in the space of the limited apparatus body 1.
It is necessary to dispose each reflection mirror 5 between each illumination light source 4 and each condensing optical system 6R, 6F. For this reason, the area of each reflecting mirror 5 cannot be increased due to the relationship with the size of the apparatus main body 1 or the like.
[0005]
DISCLOSURE OF THE INVENTION
According to the main aspect of the present invention, a glass substrate having a plurality of chamfered regions is held by a holder, and the surface of the glass substrate is irradiated with illumination light in a state in which the holder is swung at a predetermined angle for visual inspection. In the macro illumination device to perform, a light source unit that emits illumination light toward the glass substrate, a converging lens that converges the illumination light emitted from the light source unit on the glass substrate to the size of the chamfered region, a light source unit and a converging lens And a two-dimensional moving mechanism that is arranged above the holder and moves the lighting box two-dimensionally, the holder is rotated, and the irradiation angle of the illumination light with respect to the glass substrate is set to a predetermined angle. In such a state, a macro illumination device is provided that irradiates illumination light for each chamfered region of the glass substrate by moving the illumination box by a two-dimensional movement mechanism.
[0006]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is an external view of a macro inspection apparatus. A swingable holder 2 is provided in the apparatus main body 20. On this holder 2, for example, a large glass substrate 3 for four or six chamfering is held. In FIG. 1, the holder 2 is raised to the inspector Q side.
[0007]
A macro illumination device 21 having a basic concept shown in FIG. A light source 23 is provided in an illumination box 22 that is a housing. The illumination box 22 is movable in the xy plane. A Fresnel lens 24 is provided at the opening of the illumination box 22 as a converging lens. As the converging lens, a convex lens having a large aperture or a convex lens having a small aperture other than the Fresnel lens may be arranged in a matrix. The Fresnel lens 24 may be a single lens as long as it has an optical function for converging the illumination light output from the light source 23, or may be a two-lens lens that forms a parallel light beam and a convergent light beam.
[0008]
A transmissive liquid crystal scattering plate 25 is provided below the illumination box 22 as scattering means. The liquid crystal scattering plate 25 is disposed substantially parallel to the xy plane. The liquid crystal scattering plate 25 is configured to irradiate the glass substrate 3 with the scattered light s obtained by scattering the convergent light c output from the illumination box 22 in a translucent state, and to scatter the convergent light c in a transparent state. It is possible to switch between the operation of canceling the operation and allowing the convergent light c to pass through and irradiate the glass substrate 3.
[0009]
In the case of such a macro illumination device 21, the liquid crystal scattering plate 25 is switched to scatter the convergent light c output from the illumination box 22 or pass the convergent light c as it is.
[0010]
The illumination box 22 moves in the xy direction in order to irradiate the scattered light s or the convergent light c to the region on the glass substrate 3 where the macro inspection is desired. Thereby, the surface of the glass substrate 3 is macro-illuminated by the scattered light s or the convergent light c, and scratches and dirt on the surface of the glass substrate 3 are macro-inspected by the inspector Q.
[0011]
Next, a specific configuration of the macro illumination device 21 will be described with reference to FIGS. 3 and 4. The same parts as those in FIG. 2 are denoted by the same reference numerals, and detailed description thereof is omitted.
One to a plurality of light sources 23 are provided. In the illustrated example, an example in which one light source 23 is mounted is shown. The light source 23 is provided at an easily replaceable position in the apparatus main body 20 shown in FIG.
The light source 23 may include a plurality of light sources of the same type, and may be switched to a new spare light source 23 when the light source 23 being used becomes a lifetime or becomes unusable. Further, a plurality of light sources 23 may be provided, and these light sources 23 may be turned on simultaneously. Furthermore, a plurality of types of light sources 23 may be provided, and these light sources 23 may be selected individually, or a plurality of types may be selected and turned on simultaneously.
One end of the optical fiber 26 is connected to the light source 23, and the other end is connected to the illumination box 22. The other end of the optical fiber 26 is inserted into the illumination box 22. A lens 27 is provided at the exit of the other end of the optical fiber 26. The portion of the optical fiber 26 that is inserted into the illumination box 22 is fixed so that the position of the emission port does not shift.
[0012]
The illumination area moving mechanism 28 has an XY stage function for moving the illumination box 22 in the xy plane. An opening 30 is formed in the base 29. A step 31 is formed at the edge of the opening 30. A liquid crystal scattering plate 25 is provided on the step 31.
[0013]
An opening 30 is formed in the base 29. Two linear guides 32 and 33 are provided in parallel to each other in the y direction along the opposing sides of the opening 30 of the base 29. On the linear guides 32 and 33, a Y stage 36 is provided so as to be movable in the y direction via the movable parts 34 and 35.
[0014]
A ball screw 37 is provided on the base 29 in parallel with one of the linear guides 33. Both end portions of the ball screw 37 are rotatably supported by the support portions 38 and 39. A Y stage 36 is connected to the ball screw 37 via a screwing support 40.
[0015]
One end of the ball screw 37 is connected to the shaft of the y-direction motor 41. The y-direction motor 41 rotates the ball screw 37 forward and backward. The y-direction motor 41 is provided with a rotary encoder 42. The rotary encoder 42 outputs a pulse signal py corresponding to the rotation of the y-direction motor 41.
[0016]
A quadrilateral opening 43 is formed in the Y stage 36. The opening 43 is formed so that at least the length in the x direction is longer than the length in the x direction of the opening 30 on the base 29.
[0017]
Two linear guides 44 and 45 are provided in parallel to each other in the x direction along two opposing sides of the opening 43 of the Y stage 36. An X stage 48 is provided on the linear guides 44 and 45 so as to be movable in the x direction via the movable parts 46 and 47.
Further, a ball screw 49 is provided on the Y stage 36 in parallel to the one linear guide 44. Both end portions of the ball screw 49 are rotatably supported by the support portions 50 and 51. An X stage 48 is connected to the ball screw 49 via a screwing support portion 52. One end of the ball screw 49 is connected to the shaft of the x-direction motor 53. The x-direction motor 53 is provided with a rotary encoder 54. The rotary encoder 54 outputs a pulse signal px corresponding to the rotation of the x-direction motor 53.
[0018]
An opening 55 is formed in the X stage 48. An illumination box 22 is provided above the opening 55.
An operation panel 56 is provided on the front side of the apparatus main body 20. This operation panel 56 has an operation switch group SW for setting each illumination mode for the glass substrate 3. ₁ And an operation switch SW for instructing to turn on or off the light source 23 ₂ And an operation switch SW for giving an instruction to switch the liquid crystal scattering plate 25 to either a translucent state (scattering the convergent light c) or a transparent state (passing the convergent light c as it is) ₃ With.
[0019]
Operation switch group SW ₁ The automatic scan switch ASW for automatically scanning the macro illumination area on the preset glass substrate 3, the stop switch GW for stopping the automatic scan mechanism, and the macro illumination area xy A four-way switch FSW for scanning movement in four directions (x direction, -x direction, y direction, -y direction) in the plane and a plurality of macro illumination areas on the glass substrate 3, for example, nine spot positions A position switch PSW that automatically moves to any assigned spot position, and a joystick JS, a trackball TB, and a mouse M for manually operating a macro illumination area on the glass substrate 3 are provided.
[0020]
The drive control unit 57 includes an operation switch group SW on the operation panel 56. ₁ Each of the x-direction motor 53 and the y-direction motor 41 is controlled according to the operation instructions of the automatic scan switch ASW, stop switch GW, 4-way switch FSW, 9-position switch PSW, or joystick JS, trackball TB, and mouse M. Output a signal.
The drive control unit 57 includes an operation switch group SW. ₁ When the macro illumination area on the glass substrate 3 designated by the above is macro-illuminated, the output pulse signals px and py from the rotary encoders 54 and 42 are counted, respectively, and the macro on the current glass substrate 3 is calculated from these count values. An illumination area is obtained and each drive control signal for moving to the macro illumination area instructed for operation is output to the x-direction motor 53 and the y-direction motor 41.
Further, the drive control unit 57 includes an operation switch SW. ₂ The light source 23 is turned on or off in accordance with the instruction operation, and the operation switch SW ₃ The liquid crystal scattering plate 25 is switched to either a translucent state (scattering the convergent light c) or a transparent state (passing the convergent light c as it is) according to the instruction operation.
[0021]
Next, the operation of the apparatus configured as described above will be described.
For example, a large glass substrate 3 having four chamfers shown in FIG. 5 or six chamfers shown in FIG. 6 is held on the holder 2 in the apparatus main body 20.
Inspector Q operation switch SW on the operation panel 56 ₂ When an instruction to turn on the light source 23 is given by an operation on, and a macro illumination area on the glass substrate 3 is designated by a manual operation on the joystick JS, these operation instructions are sent to the drive control unit 57.
[0022]
The drive control unit 57 outputs drive control signals to the x-direction motor 53 and the y-direction motor 41 in response to a manual operation on the joystick JS. As a result, either or both of the x-direction motor 53 and the y-direction motor 41 are driven, and the X stage 48 moves in the x direction and the Y stage 36 moves in the y direction in response thereto.
[0023]
As the X stage 48 and Y stage 36 move, the illumination box 22 moves above the macro illumination area on the glass substrate 3 instructed by the operation of the joystick JS.
[0024]
When the lighting box 22 moves, the light source 23 and the lighting box 22 are connected by a flexible and bendable optical fiber 26, so that the movement of the lighting box 22 is not affected.
At the same time, the operation switch SW of the operation panel 56 ₂ Since the instruction to turn on the light source 23 is given by the operation of, the drive control unit 57 turns on the light source 23. The illumination light output from the light source 23 is transmitted through the optical fiber 26 and reaches the lens 27 in the illumination box 22, and is efficiently irradiated to the effective area of the Fresnel lens 24 through the lens 27.
[0025]
The illumination light applied to the Fresnel lens 24 is converged by the Fresnel lens 24 and passes through the opening 55 of the X stage 48 and the opening 43 of the Y stage 36 as convergent light c shown in FIG. 25 is incident.
Here, the operation switch SW of the operation panel 56 ₃ When the inspector Q gives a switching instruction to scatter the convergent light c, the drive control unit 57 repeatedly operates the liquid crystal scattering plate 25 in a translucent state. Thereby, the liquid crystal scattering plate 25 scatters and emits the incident convergent light c. The scattered light s is irradiated onto the surface of the glass substrate 3 as shown in FIG. In this state, the inspector Q observes light from the glass substrate 3 and performs a macro inspection on the surface of the glass substrate 3.
[0026]
On the other hand, the operation switch SW of the operation panel 56 ₃ When the inspector Q gives a switching instruction to pass the convergent light c as it is, the drive control unit 57 repeatedly operates the liquid crystal scattering plate 25 in a transparent state. Thereby, the convergent light c passes through the liquid crystal scattering plate 25 as it is and is irradiated onto the surface of the glass substrate 3. In this state, the inspector Q observes light from the glass substrate 3 and performs a macro inspection on the surface of the glass substrate 3.
[0027]
Further, when the glass substrate 3 is irradiated with scattered light s or convergent light c for macro inspection, if the holder 2 holding the glass substrate 3 is swung in the direction of rising toward the inspector Q, glass The irradiation angle of the scattered light s or the convergent light c on the substrate 3 can be varied. Thereby, it becomes easy to inspect the defective part on the glass substrate 3.
[0028]
A case where the four-chamfered glass substrate 3 shown in FIG. 5 or the six-chamfered glass substrate 3 shown in FIG. 6 is macro-inspected by a manual operation using the joystick JS or the trackball TB will be described. In these figures, W indicates a macro irradiation region by scattered light s.
When the four-chamfered glass substrate 3 shown in FIG. 5 is macro-inspected, the X stage 48 and the Y stage 36 are moved and driven by the manual operation of the joystick JS by the inspector Q to move the illumination box 22, so W is, for example, each chamfered area 3a ₁ ~ 3a ₄ Move in the order. In this case, the center position of the macro irradiation area W is set to each chamfered area 3a. ₁ ~ 3a ₄ The joystick JS is manually operated so as to coincide with the center position of.
Similarly, when performing a macro inspection of the six-chamfered glass substrate 3 shown in FIG. ₁ ~ 3a ₆ Move in the order.
Macro inspection by manual operation of these joystick JS can be performed on the glass substrate 3 by arbitrarily extracting the glass substrate 3 flowing in the LCD production line.
[0029]
In the case of manual operation of the joystick JS, the macro irradiation region W is, for example, each chamfered region 3a of the four-chamfered glass substrate 3. ₁ ~ 3a ₄ The chamfering area 3a is not limited to the chamfering area 3a. ₁ Only the chamfered area to be macro-inspected can be macro-inspected.
[0030]
In addition, as shown in FIG.5 and FIG.6, the size differs in each glass substrate 3 of 4 chamfering and 6 chamfering. Thereby, each chamfering region 3a in the four-chamfered glass substrate 3 is obtained. ₁ ~ 3a ₄ The size of each chamfered region 3a in the six-chamfered glass substrate 3 ₁ ~ 3a ₆ Larger than the size of. In this case, each chamfered region 3a in the largest four-chamfered glass substrate 3 is used. ₁ ~ 3a ₄ If the size of the macro irradiation region W is made larger than the size of each of the chamfered regions 3a of the four- and six-chamfered glass substrates 3, respectively. ₁ ~ 3a ₄ 3a ₁ ~ 3a ₆ Can be irradiated with the macro irradiation region W.
In the six-chamfered glass substrate 3, the size of one chamfered region 3a is smaller than that of the four-chamfered glass substrate 3. For this reason, for example, as shown in FIG. ₁ When the macro irradiation area W is moved to the approximate center of the lower chamfering area 3a ₄ May also be irradiated with macro illumination light. In this case, the 6-chamfered region 3a of interest ₁ If the macro illumination light is illuminated on the entire surface, the macro inspection is not affected.
[0031]
Next, the operation switch group SW ₁ A case where the automatic scan switch ASW is operated will be described.
A scanning path for automatically scanning the macro illumination light on the glass substrate 3 is set in advance for each of the four-sided or six-sided glass substrates 3. For example, an automatic scanning path for a four-chamfered glass substrate 3 is shown in FIG. ₁ ~ 3a ₄ For the six-chamfered glass substrate 3, as shown in FIG. ₁ ~ 3a ₆ In the order. These automatic scan paths can be arbitrarily changed.
In addition, each chamfering area 3a to which the macro irradiation area W is moved ₁ ~ 3a ₄ (3a ₁ ~ 3a ₆ ) Center position can be determined by the size of each glass substrate 3 of 4 chamfering or 6 chamfering and information of 4 chamfering or 6 chamfering.
Accordingly, when the inspector Q operates the automatic scan switch ASW, the macro irradiation region W is formed on each chamfered region 3a on the four-chamfered glass substrate 3. ₁ ~ 3a ₄ The chamfered regions 3a are moved to the six-chamfered glass substrate 3 in this order. ₁ ~ 3a ₆ Move in the order.
[0032]
In the automatic scanning of the macro irradiation region W, the macro illumination region W can be continuously moved along the scan path at a low speed on the glass substrate 3 while the light source 23 is turned on.
[0033]
In the automatic scanning of the macro irradiation area W, each chamfering area 3a is operated while the light source 23 is turned on. ₁ ~ 3a ₄ (3a ₁ ~ 3a ₆ ) Can be moved step by step.
If the inspector Q operates the stop switch GW during the automatic scan, the automatic scan stops during this operation. In this state, manual operation by the joystick JS is possible.
[0034]
Next, a case where the four-way switch FSW is operated will be described.
When the four-direction switch FSW is operated, the macro irradiation region W moves in the x direction, the −x direction, the y direction, or the −y direction with respect to each of the four or six chamfered glass substrates 3. As a result, by operating the four-way switch FSW, each chamfered region 3a on which the macro irradiation region W is to be macro-inspected on the glass substrate 3 is operated. ₁ ~ 3a ₄ (3a ₁ ~ 3a ₆ ).
Next, a case where the position switch PSW is operated will be described.
The position switch PSW divides the surface of the glass substrate 3 into a plurality of regions and assigns position switches to these region positions. In the illustrated example, a 3 × 3 9-position switch PSW is adopted, and each chamfering area 3a is set by enabling each of four or six position switches according to four or six chamfering. ₁ ~ 3a ₄ (3a ₁ ~ 3a ₆ ) Position should be assigned.
[0035]
When such a 9-position switch PSW is operated, for example, the macro irradiation region W is desired only by operating the position switch corresponding to each chamfering region where macro inspection is desired on the glass substrate 3 having four or six chamfers. Automatically move to the chamfer area. As the position switch PSW, for example, a 2 × 2 4-position switch in the case of 4-chamfering or a 2 × 3 6-position switch in the case of 6-chamfering may be employed in accordance with the chamfering of the glass substrate 3.
The movement of the macro irradiation region W with respect to the glass substrate 3 is not limited to the scattered light s, but can be similarly applied to the convergent light c.
[0036]
As described above, according to the first embodiment, since the illumination area moving mechanism 28 for moving the illumination box 22 that emits the macro illumination light in the xy direction has two axes in the x direction and the y direction, the configuration is simplified. it can. Further, each chamfer region 3a of the large glass substrate 3 ₁ ~ 3a ₄ Or 3a ₁ ~ 3a ₆ Since a small macro illumination optical system that irradiates the light is employed, the illumination optical path can be shortened as compared with the conventional macro illumination optical system that irradiates a wide area, and the conventionally used reflection mirror can be made unnecessary. Thereby, the whole macro illuminating device can be reduced in size.
There is no optical element that attenuates the illuminance of the macro illumination light, and no aberration is generated, as long as the reflection mirror used conventionally is eliminated. Therefore, since the macro illumination light only passes through the converging lens (Furnel lens 24) and the liquid crystal scattering plate 25, the illuminance of the macro illumination light on the glass substrate 3 can be increased. Thereby, the detection of the defective part on the glass substrate 3 becomes easy, and illumination suitable for the macro inspection can be obtained.
[0037]
Further, if the light source 23 and the drive control unit 57 are provided at the rear side or the lower part of the apparatus main body 20, particularly the front side of the apparatus main body 20, maintenance by the inspector Q can be facilitated.
Switch group SW when macro inspection of glass substrate 3 ₁ Auto scan switch ASW, position switch PSW In response to an operation instruction, the macro illumination area W is automatically scanned on the glass substrate 3, or the joystick JS, the trackball TB, and the 4-way switch FSW are manually operated to perform macro inspection. The macro illumination area W can be moved on each chamfering area. As a result, for example, only a region where defects occur frequently in the LCD production line can be selected for macro inspection, and the degree of freedom in selecting a region for macro inspection is increased.
[0038]
Since the liquid crystal scattering plate 25 is made to be in a semitransparent state and the convergent light c is scattered or transparently switched to either pass through the convergent light c as it is, the scattered light s or convergent with respect to the glass substrate 3 is operated. By irradiating the light c and performing a macro inspection, a defective portion on the glass substrate 3 can be reliably detected.
The first embodiment may be modified as follows. For example, the Fresnel lens 24 may be designed not to be provided in the illumination box 22 but to be provided at another position. The lens 27 at the tip of the optical fiber 26 may be removed.
[0039]
The illumination area moving mechanism 28 that moves the illumination box 22 in the xy direction may be configured using another linear actuator such as a linear motor.
A plurality of converging lenses (Fresnel lenses 24) having different irradiation angles are prepared. These converging lenses are exchanged according to the size of the glass substrate 3 and the size of the chamfered area. Thereby, the magnitude | size of the macro illumination area | region W can be changed appropriately according to the magnitude | size of the glass substrate 3, and the magnitude | size of a chamfering area | region.
[0040]
Next, a second embodiment of the present invention will be described with reference to the drawings. 3 and FIG. 4 are denoted by the same reference numerals, and detailed description thereof is omitted.
FIG. 7 is a configuration diagram of the illumination box 22 in the macro inspection apparatus. In this illumination box 22, a liquid crystal scattering plate 25 is integrally provided below the Fresnel lens 24.
With such a configuration of the illumination box 22, the scattered light s or the convergent light c is emitted from the illumination box 22 by switching the liquid crystal scattering plate 25 either to scatter the convergent light c or to pass the converged light c as it is. it can.
[0041]
Further, the liquid crystal scattering plate 25 which is smaller than the large liquid crystal scattering plate 25 used in the first embodiment can be used, and the entire apparatus can be reduced in weight and size.
Since the liquid crystal scattering plate 25 is provided integrally with the illumination box 22, the downflow DF can flow from above the apparatus main body 20. The downflow DF flows from the opening 55 of the X stage 48 to the surface of the glass substrate 3 through the opening 43 of the Y stage 36 and the opening 30 of the base 29. Thereby, the dust etc. on the glass substrate 3 surface can be dropped.
The second embodiment may be modified as follows. For example, instead of the liquid crystal scattering plate 25, a white translucent scattering plate may be provided so as to be detachable from the optical path of the convergent light c emitted from the illumination box 22.
[0042]
Next, a third embodiment of the present invention will be described with reference to the drawings. The same parts as those in FIG. 7 are denoted by the same reference numerals, and detailed description thereof is omitted.
FIG. 8 is a configuration diagram of the illumination box 22 in the macro inspection apparatus. A zoom lens 60 is provided at the exit of the other end of the optical fiber 26. The other end of the optical fiber 26 is provided in the rack and pinion 61 as a vertical mechanism. The rack and pinion 61 moves the other end of the optical fiber 26 up and down in the z direction.
[0043]
The zoom lens 60 narrows the emission angle θ of the illumination light as the other end of the optical fiber 26 is moved upward by the rack and pinion 61, and the emission angle θ of the illumination light as the other end of the optical fiber 26 is moved downward. spread. Thereby, the magnitude | size of the macro illumination area | region W irradiated on the glass substrate 3 can be adjusted.
Accordingly, each of the chamfered areas 3a of the glass substrate 3 has a macro illumination area W having a size of four or six chamfers. ₁ ~ 3a ₄ Or 3a ₁ ~ 3a ₆ Can be adjusted to the size of
[0044]
Next, a fourth embodiment of the present invention will be described with reference to the drawings. 3 and FIG. 4 are denoted by the same reference numerals, and detailed description thereof is omitted.
FIG. 9 is a configuration diagram of the illumination box 22 in the macro inspection apparatus. A retreat space 70 is formed in the illumination box 22. A slide type moving mechanism 72 is provided between the retreat space 70 and the optical path of illumination light emitted from the exit of the optical fiber 26. The slide type moving mechanism 72 puts the filter 71 in and out of the optical path of the illumination light. This filter 71 is, for example, a color filter or an ND filter.
[0045]
With such a configuration, when the convergent light c emitted from the Fresnel lens 24 of the illumination box 22 enters the liquid crystal scattering plate 25, the glass substrate 3 surface remains scattered light s or convergent light c from the liquid crystal scattering plate 25. Irradiated on top.
At this time, a filter 71 is inserted on the optical path in the illumination box 22 as necessary. Thereby, the illumination light on the surface of the glass substrate 3 is given a desired color by the color filter or is attenuated by the ND filter.
[0046]
The filter 71 may be a convex lens or a concave lens among various lenses, or a combination of these convex lens and concave lens.
The fourth embodiment may be modified as follows. The illumination box 22 may be integrally provided with a liquid crystal scattering plate 25 so that the scattered light s or the convergent light c is emitted from the illumination box 22. In this case, the scattered light s or the convergent light c can be given a desired color by a color filter or can be reduced by an ND filter.
[0047]
Next, a fifth embodiment of the present invention will be described with reference to the drawings. 3 and FIG. 4 are denoted by the same reference numerals, and detailed description thereof is omitted.
FIG. 10 is a configuration diagram of the light source group and the illumination box 22 in the macro inspection apparatus. The two light sources 23-1 and 23-2 as the light source group are of the same type or different types. Here, the light sources 23-1 and 23-2 of the same type are used.
A branched optical fiber 26-1 is provided between the light sources 23-1 and 23-2 and the illumination box 22. The branch type optical fiber 26-1 includes branch fibers 26a and 26b connected to the two light sources 23-1 and 23-2, and an optical fiber 26c obtained by synthesizing the branch fibers 26a and 26b.
One of these light sources 23-1, 23-2 is lit, or both are lit simultaneously.
[0048]
A rotating body 72 is provided in the illumination box 22. The rotating body 72 is provided with a plurality of filters 71 or various lenses and holes on concentric circles. Each filter 71 is, for example, a color filter or an ND filter. The rotating body 72 is provided with a motor 73. As a result, the rotating body 72 selectively inserts and removes the filter 71 or the various lenses and the holes on the optical path of the illumination light emitted from the exit of the optical fiber 26c by driving the motor 73.
[0049]
If it is such a structure, each illumination light each radiate | emitted from the two light sources 23-1 and 23-2 will be match | combined by the branch type optical fiber 26-1, and will be radiate | emitted from an output port. This illumination light becomes convergent light c by the convergent lens (Fresnel lens 24) and enters the liquid crystal scattering plate 25. Then, the convergent light c is irradiated onto the surface of the glass substrate 3 by the liquid crystal scattering plate 25 as the scattered light s or the convergent light c.
[0050]
The brightness on the glass substrate 3 surface at this time can be brightened by using the two light sources 23-1, 23-2. Alternatively, one of the two light sources 23-1 and 23-2 may be lit and switched to the other new light source when the lifetime is reached.
A filter 71 is inserted on the optical path in the illumination box 22 as required by the rotational drive of the motor 73. Thereby, the illumination light on the surface of the glass substrate 3 is given a desired color by the color filter or is attenuated by the ND filter. Further, among various lenses, a convex lens, a concave lens, and a combination of these convex lens and concave lens may be inserted.
[0051]
Thus, in the said 5th Embodiment, since each illumination light each radiate | emitted from the two light sources 23-1, 23-2 is match | combined with the branching type optical fiber 26-1, and it sends to the illumination box 22, glass is used. The brightness on the surface of the substrate 3 can be increased. Moreover, if an ND filter is inserted in the illumination box 22 in order to control the brightness on the surface of the glass substrate 3, it is possible to efficiently adjust the brightness to suit the macro inspection of the glass substrate 3. The brightness on the glass substrate 3 may be adjusted by turning on one or both of the two light sources 23-1, 23-2.
[0052]
In addition, by providing the two light sources 23-1, 23-2, one of the light sources 23-1 or 23-2 is normally turned on, and when the light source 23-1 or 23-2 breaks down, the other The light source 23-2 or 23-1 can be turned on for backup.
[0053]
Note that the fifth embodiment may be modified as follows.
[0054]
As shown in FIG. 11, a rotating plate 74 is provided on the rotating shaft of the motor 73. The rotating plate 74 is provided with a plurality of filters 75 to 78 as shown in FIG. Each of these filters 75 to 78 is, for example, a color filter (red, blue, orange, etc.). Instead of providing a color filter on all of the rotating plates 74, for example, an opening may be provided without providing one place, or another filter such as an ND filter may be provided.
Further, as shown in FIG. 13, another rotating plate 79 may be provided facing the rotating plate 74. The rotating plate 79 may be connected to the motor 80 and rotated. In this case, one rotary plate 74 is provided with color filters 75 to 78 such as red, blue, and orange, and the other rotary plate 79 is provided with an ND filter 81 shown in FIG. In the ND filter 81, the ND value (0% to 100%) continuously changes along the circumferential direction.
[0055]
With such a configuration, the color filters 75 to 78 and the ND value of the ND filter 81 can be selectively combined. Further, the Fresnel lens 24 and the crystal scattering plate 25 can be integrated with the illumination box 22, and the color filters 75 to 78 of red, blue, orange, etc. and the ND filter 81 having each ND value can be integrated. Furthermore, the number of light sources 23 is not limited to two, and a plurality of light sources 23 may be provided.
[0056]
Next, a sixth embodiment of the present invention will be described with reference to the drawings.
FIG. 15 is a configuration diagram of the macro illumination device. An opening 91 is formed in the lower part of the lighting box 90. The Fresnel lens 24 is provided in the opening 91. A liquid crystal scattering plate 25 is provided below the Fresnel lens 24. The liquid crystal scattering plate 25 may be provided integrally with the illumination box 90 or may be provided in the illumination area moving mechanism 28 shown in FIG.
[0057]
In the illumination box 90, a reflecting mirror 92 is inclined.
A first light source box 93 is formed on the side surface of the lighting box 90. The first light source box 93 is formed with the opening facing the reflection mirror 92 side. In the first light source box 93, for example, a Na lamp is provided as the first light source 94.
[0058]
A second light source box 95 is provided integrally with the lighting box 90 adjacent to the lighting box 90. For example, a halogen lamp is provided as the second light source 96 in the second light source box 95. On the optical path of the illumination light emitted from the second light source 96, the rotating plates 74 and 79 are provided. The rotating plate 74 is provided with a plurality of filters 75 to 78 such as red, blue and orange. The rotating plate 79 is provided with an ND filter 81.
An optical fiber 26 is connected between the second light source box 95 and the illumination box 90. The optical fiber 26 transmits the illumination light emitted from the second light source 96 to the illumination box 90 and radiates it toward the reflection mirror 92 in the illumination box 90.
[0059]
With such a configuration, when the Na lamp as the first light source 94 is turned on, the illumination light emitted from the Na lamp is reflected by the reflection mirror 92 and passes through the Fresnel lens 24 and the liquid crystal scattering plate 25. Irradiated onto the glass substrate 3.
When the halogen lamp which is the second light source 96 is turned on, the illumination light emitted from the halogen lamp passes through the filters 75 to 78 and the ND filter 81 and enters the optical fiber 26. The illumination light transmitted through the optical fiber 26 is emitted through the lens 27, reflected by the reflection mirror 92, and irradiated onto the glass substrate 3 through the Fresnel lens 24 and the liquid crystal scattering plate 25.
The illumination light emitted from the first light source 94 and the illumination light emitted from the second light source 96 have different wavelengths. Thereby, when these illumination lights are irradiated on the glass substrate 3 and a macro inspection is performed, there are a defect portion detected by illumination with the Na lamp and a defect portion detected by illumination with the halogen lamp. Therefore, if the Na lamp or the halogen lamp is turned on depending on the type of the defective portion, the target defective portion can be detected.
Illumination light emitted from the halogen lamp can be given a desired color by the filters 75 to 78 or can be reduced by the ND filter 81. Further, since the second light source box 95 is provided adjacent to the illumination box 90, the length of the optical fiber 26 can be shortened.
[0060]
[Industrial applicability]
The present invention can be used for macro illumination when a glass substrate of a flat panel display such as a semiconductor wafer, a liquid crystal display or a plasma display panel is subjected to macro inspection.
[Brief description of the drawings]
FIG. 1 is an external configuration diagram of a macro inspection apparatus to which a first embodiment of a macro illumination apparatus according to the present invention is applied.
FIG. 2 is a configuration diagram of a basic concept of a macro illumination device according to the present invention.
FIG. 3 is a specific configuration diagram showing a first embodiment of a macro illumination device according to the present invention.
FIG. 4 is a configuration diagram of the illumination area moving mechanism in the first embodiment of the macro illumination device according to the present invention as viewed from above.
FIG. 5 is a diagram showing a macro irradiation region on a four-chamfered glass substrate in the first embodiment of the macro illumination device according to the present invention.
FIG. 6 is a diagram showing a macro irradiation region on a six-chamfered glass substrate in the first embodiment of the macro illumination device according to the present invention.
FIG. 7 is a configuration diagram of an illumination box in the second embodiment of the macro illumination device according to the present invention.
FIG. 8 is a configuration diagram of an illumination box in the third embodiment of the macro illumination device according to the present invention.
FIG. 9 is a configuration diagram of an illumination box in a fourth embodiment of a macro illumination device according to the present invention.
FIG. 10 is a configuration diagram of a light source group and an illumination box in a fifth embodiment of a macro illumination apparatus according to the present invention.
FIG. 11 is a block diagram showing a modification of the fifth embodiment of the macro illumination device according to the present invention.
FIG. 12 is a view showing the arrangement of filters on a rotating plate in a modification of the apparatus.
FIG. 13 is a configuration diagram showing a modification of the fifth embodiment of the macro illumination device according to the present invention.
FIG. 14 is a view showing an ND filter on a rotating plate in a modification of the apparatus.
FIG. 15 is a configuration diagram showing a sixth embodiment of a macro lighting apparatus according to the present invention.
FIG. 16 is a configuration diagram of a conventional macro illumination device.

Claims (12)

In a macro illumination device that holds a glass substrate having a plurality of chamfered regions in a holder and performs visual inspection by irradiating illumination light onto the surface of the glass substrate in a state where the holder is swung at a predetermined angle.
A light source unit that emits the illumination light toward the glass substrate;
A converging lens that converges the illumination light emitted from the light source unit on the glass substrate to the size of the chamfered area;
An illumination box containing the light source unit and the converging lens;
A two-dimensional movement mechanism that is arranged above the holder and moves the illumination box two-dimensionally;
The holder is swung, and the illumination box is moved by the two-dimensional movement mechanism in a state where the irradiation angle of the illumination light is changed to a predetermined angle with respect to the glass substrate. A macro illumination device that irradiates the illumination light for each chamfer region.   The macro illumination device according to claim 1, wherein the two-dimensional movement mechanism moves the illumination box so as to coincide with a preset center position of the chamfered region.   The said two-dimensional movement mechanism moves the said illumination box above the selected said chamfer area | region, if the said chamfer area | region with a high occurrence frequency of a defect part is selected. The macro lighting device described.   The two-dimensional movement mechanism has a position switch corresponding to the position of the chamfered area on the glass substrate, and moves the illumination box to the chamfered area corresponding to the operated position switch. The macro illumination device according to claim 1 or 2. The two-dimensional movement mechanism has an XY stage mechanism that moves the illumination box in an xy plane,
The XY stage mechanism is provided movably on a base in which an opening is formed, a Y-axis linear guide provided along two opposite sides of the opening of the base, and the Y-axis linear guide. A Y stage having an opening formed therein, an X-axis linear guide provided along two longitudinal sides facing each other in the opening of the Y stage, and a movable on the X-axis linear guide And an X stage having an opening formed therein,
The illumination box is provided in the opening of the X stage and the XY stage mechanism is moved in the XY direction to move the light source unit and the converging lens two-dimensionally in the xy plane. The macro illumination device according to 1.   The illumination box has an opening on the side facing the glass substrate, a Fresnel lens formed in a plate shape as a converging lens in the opening, and a transmission state that transmits the illumination light converged by the convergence lens And a liquid crystal scattering plate for switching to a scattering state for scattering the illumination light.   The macro illumination device according to claim 1, wherein the light source unit includes a plurality of illumination light sources having different wavelengths and is switched on according to the type of the defect portion on the glass substrate. The light source unit includes a halogen lamp and an Na lamp connected to an optical fiber,
The exit end of the optical fiber and the Na lamp are provided on the same lateral side surface of the illumination box, and the convergence light is emitted from the halogen lamp emitted from the optical fiber and the illumination light emitted from the Na lamp. The macro illumination device according to claim 1, wherein a mirror that is reflected toward the inside of the illumination box is provided so as to be inclined.   The light source unit has a plurality of light sources of the same type, and these light sources and the illumination box are connected by an optical fiber, and the plurality of light sources are turned on simultaneously or selectively on the glass substrate. The macro illumination device according to claim 1, wherein brightness of the illumination light irradiated is adjusted.   The light source unit includes a plurality of light sources of the same type, and uses any one of the light sources by turning on the light source, and switches on from one failed light source to the other light source. The macro illumination device according to claim 1.   The light source unit includes a light source connected to an optical fiber, and a zoom lens provided so as to be movable in the optical axis direction on the exit side of the optical fiber, and moves the zoom lens in the optical axis direction. The macro illumination device according to claim 1, wherein a size of a macro illumination region irradiated on the glass substrate through the converging lens is adjusted.   12. The zoom lens according to claim 11, wherein a size of a macro illumination region irradiated on the glass substrate through the converging lens is adjusted so as to match a size of the chamfered region on the glass substrate. Macro lighting device.

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