JP3977554B2 - Substrate processing apparatus, simulation apparatus for substrate processing apparatus, and computer-readable recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To limit power consumption in each group of substrates within a prescribed range by adjusting the put-in timings of a plurality of the groups of the substrates. SOLUTION: The put-in order of a plurality of groups of substrates is acquired and at the same time, a recipe set in each group of the substrates is acquired and a power consumption in every unit time in each group of the substrates is found on the basis of those recipes. A power consumption in the group of the substrates to become the first putting-in object is set on a time base, the power consumption in the groups of the substrates continue to be set in order on the time base according to the putting-in order and at the same time, the put-in timings of the groups of the substrates, which are set in order, are corrected so that the prescribed total power consumption, which is consumed in a substrate treater, is a consumption within a range which is specified at a previously set allowable value (step S15).

Description

[0001]
BACKGROUND OF THE INVENTION
In the present invention, predetermined processing is sequentially performed in a plurality of processing units on a thin precision substrate (hereinafter simply referred to as “substrate”) such as a semiconductor wafer, a glass substrate for liquid crystal display, and a plasma display panel. The present invention relates to a substrate processing apparatus, a simulation apparatus for such a substrate processing apparatus, and a computer-readable recording medium on which a simulation program for the substrate processing apparatus is recorded.
[0002]
[Prior art]
2. Description of the Related Art In recent years, substrate processing apparatuses that perform processing on such substrates tend to increase in size as the substrate size increases.
[0003]
For this reason, the consumption of utilities (utilities) such as gas, pure water, and electric power consumed by the substrate processing apparatus also becomes enormous. For example, when performing a cleaning process on a substrate group by immersing a substrate group consisting of one or a plurality of substrates in a predetermined washing tank in the substrate processing apparatus, the washing tank itself is enlarged with an increase in the diameter of the substrate, The amount of pure water required for the cleaning process increases. This is not limited to pure water, and the same applies to any utility that is supplied from the factory equipment such as gas and electric power.
[0004]
[Problems to be solved by the invention]
When introducing a substrate processing apparatus for processing a large-diameter substrate, it is necessary to install a power supply facility that can withstand a large amount of power consumption as a factory facility for the reasons described above, which requires a great investment. There is.
[0005]
In addition, for example, when a plurality of washing tanks are provided in the substrate processing apparatus, it is necessary to construct the apparatus on the assumption that the maximum amount of pure water per unit time is supplied to all the washing tanks. Each part used in itself is also increased in size, resulting in an increase in installation space and an increase in apparatus cost.
[0006]
This invention is made in view of the said subject, Comprising: The substrate processing apparatus which can restrict | limit utility consumption within the predetermined range by adjusting the injection | throwing-in timing of several board | substrate groups, and a substrate processing apparatus It is an object of the present invention to provide a simulation apparatus and a computer-readable recording medium on which a simulation program for such a substrate processing apparatus is recorded.
[0007]
[Means for Solving the Problems]
  In order to achieve the above object, according to the first aspect of the present invention, a plurality of substrate groups composed of one or a plurality of substrates are sequentially transferred to a plurality of processing units, whereby the plurality of substrate groups. A substrate processing apparatus that performs a predetermined process on each of them, (a) a power consumption calculating unit that calculates a power consumption of a predetermined power per unit time according to a recipe for each substrate group; and (b) Accumulating the power consumption required for each of the plurality of substrate groups every unit time to obtain a total consumption of the power, and determining whether the total consumption is within a predetermined range; If the total consumption is not within the range,Find the time span when the total consumption is not within the range,The charging timing of at least one board group among the plurality of board groups is set.Delay by the durationThus, there is provided timing correction means for setting the total consumption amount to be within the range.
[0008]
  According to the second aspect of the present invention, predetermined processing is performed on each of the plurality of substrate groups by sequentially transferring a plurality of substrate groups including one or a plurality of substrates to a plurality of processing units. A substrate processing apparatus simulating apparatus, comprising: (a) a power consumption calculating means for calculating a power consumption of a predetermined power for each unit time according to a recipe for each substrate group; and (b) the plurality of substrates. The power consumption calculated for each group is accumulated every unit time to determine the total consumption of the power, and it is determined whether the total consumption is within a predetermined range, and the total consumption Is not within the above range,Find the time span when the total consumption is not within the range,The charging timing of at least one board group among the plurality of board groups is set.Delay by the durationAccordingly, a timing correction means for setting the total consumption amount to be within the range is provided, which is configured separately from the substrate processing apparatus.
[0009]
  The invention according to claim 3A recording medium for recording a simulation program, the computer executing the simulation program on the computer, (a) A power consumption calculating step for obtaining a power consumption of a predetermined power per unit time according to a recipe for each substrate group; and (b) Accumulating the power consumption required for each of the plurality of substrate groups every unit time to obtain a total consumption of the power; and (c) Said (b) Determining whether the total consumption determined in the process is within a predetermined range; (d) Said (c) When it is determined in the step that the total consumption is not within the range, a time width in which the total consumption is not within the range is obtained, and at least one substrate group of the plurality of substrate groups is input. A timing correction step of setting the total consumption to be within the range by delaying the timing by the time width;It is characterized by that.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0011]
<1. Outline of substrate processing equipment>
FIG. 1 is a plan view showing the configuration of the substrate processing apparatus 1 of the present embodiment. In FIG. 1, three-dimensional coordinates composed of an X axis, a Y axis, and a Z axis are defined.
[0012]
As shown in FIG. 1, the substrate processing apparatus 1 includes a buffer unit 10, a transfer robot 20, a transfer robot 30, a processing unit group 40, and a control unit CL.
[0013]
The buffer unit 10 stores a plurality of carriers C that store a plurality of substrates W, and carries in and out the carriers C with an external device (for example, AGV) of the substrate processing apparatus 1. Further, an in-buffer transport unit 11 is provided inside the buffer unit 10, and the substrate W to be loaded from among the plurality of carriers C is stored in the buffer transport unit 11 in accordance with a predetermined loading order. The carrier C is specified, and the carrier C is transported to a predetermined delivery position TP.
[0014]
The transfer robot 20 accesses the transfer position TP, takes out a substrate group consisting of one or a plurality of substrates W as a processing unit from the carrier C, and stores a substrate group in the carrier C, and a substrate group A posture conversion mechanism 20b that converts the posture between a horizontal posture and a vertical posture, and a lifting mechanism 20c that lifts and lowers the substrate group in the vertical posture, and transports the substrate group between the buffer unit 10 and the transport robot 30. Is configured to do.
[0015]
The transfer robot 30 can move horizontally along the X-axis and move up and down along the Z-axis, and transfers the substrate group by holding the substrate group in a vertical posture by a pair of holding mechanisms 31. The transfer robot 30 transfers the substrate group to and from the lifting mechanism 20c. In addition, the substrate group can be transferred to and from the first lifter 35, the second lifter 36, and the third lifter 37 provided in the processing unit group 40.
[0016]
The processing unit group 40 includes a plurality of processing units that perform predetermined processing on the substrate group. Specifically, a drying processing unit 41 that performs drying under reduced pressure on the substrate group, a first water washing processing unit 42 that includes a water washing tank WB1 that stores pure water, and a first chemical liquid processing unit that includes a chemical liquid tank CB1 that stores chemicals. 43, the 2nd washing process part 44 which has the washing tank WB2 which accommodates a pure water, and the 2nd chemical | medical solution process part 45 which has the chemical | medical solution tank CB2 which accommodates a chemical | medical solution are provided. The plurality of processing units are linearly arranged in the X direction, and the conveyance path of the above-described conveyance robot 30 is formed along this linear arrangement.
[0017]
A first lifter 35 is disposed on the rear side of the drying processing unit 41, and the first lifter 35 can move up and down (Z direction), and the substrate group received from the transfer robot 30 is transferred to the drying processing unit 41. Transport to the inside.
[0018]
In addition, a second lifter 36 is disposed on the rear side of the first water washing processing unit 42 and the first chemical liquid processing unit 43, and a third side is provided on the rear side of the second water washing processing unit 44 and the second chemical liquid processing unit 45. A lifter 37 is disposed. The second lifter 36 and the third lifter 37 can move up and down (Z direction) and traverse (X direction). Then, the second lifter 36 immerses the substrate group received from the transport robot 30 in the chemical bath CB1 of the first chemical processing section 43 or the rinsing tank WB1 of the first cleaning section 42. Further, the third lifter 37 immerses the substrate group received from the transport robot 30 in the chemical bath CB2 of the second chemical processing section 45 or in the rinsing tank WB2 of the second flush processing section 44.
[0019]
In this embodiment, the processing units 41 to 45 for the substrate group, and the substrate group transfer means including the transfer unit 11 in the buffer, the transfer robot 20, the transfer robot 30, and the first to third lifters 35 to 37 are described. The substrate processing apparatus 1 forms essential function means when performing substrate processing. Operation control of these functional means is performed by the control unit CL.
[0020]
Although not shown, a piping system for receiving the supply of pure water from the factory equipment side is connected to the washing tanks WB1 and WB2, and each functional means is provided from the factory equipment side necessary for operation. A power distribution system for receiving the power supply is connected. Furthermore, although other gas supply systems are not shown, they are connected from the factory equipment side.
[0021]
With such a configuration, each substrate group to be processed is sequentially transferred to each processing unit according to a recipe defined in advance, and predetermined processing is performed in each processing unit. In addition, the substrate group that has been processed according to the recipe is configured to be returned to the buffer unit 10 again by the transport unit and stored in the carrier C. Moreover, when processing each board | substrate group, appropriate processing according to a recipe is performed, receiving supply of various utility power from the factory equipment side.
[0022]
Here, an example of the substrate processing procedure by the substrate processing apparatus 1 will be described. The in-buffer transport unit 11 sequentially transports the plurality of carriers C accommodated in the buffer unit 10 in a standby state to the delivery position TP in accordance with a preset insertion order.
[0023]
The transfer robot 20 takes out the substrate W from the carrier C for each substrate group, which is one or more processing units, converts the horizontal posture into a vertical posture, and then passes the substrate group to the transport robot 30.
[0024]
When receiving the substrate group, the transfer robot 30 moves in the X direction and passes the substrate group to the second lifter 36 or the third lifter 37. When the second or third lifter 36 or 37 receives the substrate group to be processed, the second or third lifter 36 or 37 lowers the substrate group and immerses the substrate group in a predetermined chemical solution in the chemical solution layers CB1 and CB2. Thereby, the chemical treatment for the substrate group is started. Note that the second or third lifters 36 and 37 continue to hold the substrate group in a vertical posture even during the immersion treatment for the substrate group.
[0025]
When the chemical treatment time based on the recipe has elapsed, the second or third lifters 36 and 37 are taken out from the chemical by raising the substrate group, moved onto the washing tanks WB1 and WB2, and then into the pure water. Soak. As a result, a cleaning process is performed on the substrate group. In the cleaning process for the substrate group, a certain amount of pure water is supplied from the factory equipment side every unit time according to the recipe, and the pure water overflows in the washing tanks WB1 and WB2.
[0026]
When the chemical treatment and pure water treatment for the substrate group are completed, the transfer robot 30 takes out the substrate group from the second or third lifters 36 and 37 and passes it to the first lifter 35. Then, the first lifter 35 dries the substrate group by conveying the substrate group received from the conveyance robot 30 into the drying processing unit 41.
[0027]
When the drying is completed, the transfer robot 30 takes out the substrate group that has been dried from the first lifter 35, and passes the substrate group that has been subjected to all the processing to the transfer robot 20. The transfer robot 20 converts the processed substrate group from the vertical posture to the horizontal posture, and then stores it in the carrier C at the transfer position TP of the buffer unit 10.
[0028]
Although a series of substrate processing is completed as described above, when one group of substrates is being processed in a specific processing unit, the other processing unit, the transfer robot 30 and the like are vacant, and this implementation In the embodiment, the substrate processing schedule is set so as to carry out and process other substrate groups using such a vacant state, thereby improving the efficiency of the substrate processing.
[0029]
<2. Control mechanism of substrate processing apparatus>
FIG. 2 is a block diagram showing details of the controller CL of the substrate processing apparatus 1 as described above. As shown in FIG. 2, the control unit CL is provided with three control units including a master control unit 2, a process control unit 3, and a transport control unit 4.
[0030]
The master control unit 2 is a control unit that comprehensively controls and manages the overall operation of each unit in the substrate processing apparatus 1. The master control unit 2 includes a memory 5 for storing recipes relating to processing contents set for each substrate or lot, data relating to the configuration of the substrate processing apparatus 1, etc., and information on substrate processing statuses to the operator (operator). A display unit 6 for displaying various types of information, a keyboard 7 for inputting predetermined information by an operation input by an operator, a processing control unit 3 and a conveyance control unit 4 are connected to each other.
[0031]
The processing control unit 3 controls each processing unit by individually transmitting parameters related to the operation of each processing unit in the processing unit group 40. The drying processing unit 41, the first water washing processing unit 42 described above, The first chemical liquid processing unit 43, the second water washing processing unit 44, and the second chemical liquid processing unit 45 are connected in a communicable state.
[0032]
The transfer control unit 4 individually controls each transfer unit by transmitting a transfer command or the like to each transfer unit in the substrate processing apparatus 1. The transfer control unit 4 in the buffer, the transfer robot 20, The transfer robot 30, the first lifter 35, the second lifter 36, and the third lifter 37 are connected in a communicable state.
[0033]
When processing a substrate group in the substrate processing apparatus 1, first, the carrier C in which a plurality of processing target substrates W are stored is carried into the buffer unit 10. Almost simultaneously with the loading of the carrier C, a recipe relating to the processing content of the substrate group stored in the carrier C is input as data and stored in the memory 5 by the master control unit 2. The input of the recipe may be input from the keyboard 7 by the operator, or may be input from another computer (for example, a management computer provided in the factory) via a data input means (not shown).
[0034]
In the recipe, what kind of processing is performed on the substrate group is described in a predetermined data format. For example, the pressure value at the time of pressure reduction in the drying processing unit 41 and the drying processing time, the water washing processing time in the first water washing processing unit 42 and the second water washing processing unit 44, and pure water per unit time when supplying pure water overflow The processing procedure and processing contents for the substrate group such as the supply amount, the chemical processing time in the first chemical processing unit 43 and the second chemical processing unit 45 are described in detail.
[0035]
When processing a substrate group, the master control unit 2 reads a recipe related to the substrate group from the memory 5 and gives various parameters to the processing control unit 3 and the transfer control unit 4 so that the transfer control unit 4 A drive command is given to the transport means to cause the substrate groups to be transported in the order corresponding to the processing procedure, and the processing control unit 3 performs management control so that the processing of the substrate groups in each processing unit is appropriately performed.
[0036]
In the substrate processing apparatus 1 configured as described above, each substrate is processed prior to the substrate processing so as to sequentially process a plurality of substrate groups based on a preset allowable value for utility such as pure water or electric power. Group injection timing is determined. In other words, the substrate processing apparatus 1 sets a limit in advance on the total consumption of the power used when sequentially processing a plurality of substrate groups so that the total consumption of the power is within the range of the limit. In addition, the loading timing for each substrate group, which is a processing unit for each substrate or lot, is adjusted. In addition, the allowable value that defines the restriction on the total consumption of the utility may be stored in the memory 5 in advance, or the operator may use the utility supply capacity on the factory equipment side or the substrate processing apparatus 1 prior to the substrate processing. The setting input may be performed from the keyboard 7 in consideration of the ability of each component.
[0037]
FIG. 3 is a diagram schematically illustrating functions realized by the master control unit 2.
[0038]
The master control unit 2 operates as the schedule determination unit 25 prior to actual substrate processing, so that the total amount of power consumed in the entire substrate processing apparatus 1 consumed when processing each substrate group is defined as an allowable value. The input timing of each substrate group is determined so as to be within the specified range.
[0039]
Further, when the substrate processing is actually performed, the master control unit 2 operates as the loading management unit 26 to control the loading operation of each substrate group at a loading timing determined in advance for each substrate group. That is, an operation command is given to the processing control unit 3 and the transfer control unit 4 so as to sequentially load each substrate group from the buffer unit 10 at the determined loading timing.
[0040]
The schedule determination unit 25 that sets the total consumption of the power in the entire substrate processing apparatus 1 within the allowable range further functions as the power consumption calculation unit 25a and the timing correction unit 25b.
[0041]
Based on a recipe defined for each substrate group as a processing unit, the utility consumption calculating unit 25a calculates the consumption amount of the utility consumed by each processing unit when processing the substrate group for each unit time. Ask. That is, the power consumption calculated by the power consumption calculation unit 25a indicates how much predetermined power is consumed per unit time from the start (input) to the end (unload) of the process for the board group. Therefore, it is obtained for each of the plurality of substrate groups based on the processing contents described in the recipe.
[0042]
The timing correction unit 25b accumulates the power consumption required for each of the plurality of substrate groups every unit time along a predetermined time axis, and the power correction in the substrate processing apparatus 1 when the substrate processing apparatus 1 is in operation. Find the total consumption. Then, the timing correction unit 25b obtains an allowable value that defines the limitation of the power consumption amount from the memory 5 (see FIG. 2) or the like, and falls within a range in which the total consumption amount of the utility power per unit time is defined by the allowable value. It is determined whether or not there is. Here, when the total consumption is within the range defined by the allowable value, it is not necessary to adjust the loading timing, and efficient loading is possible as long as different board groups do not occupy the same functional means. Each substrate group may be introduced sequentially at the timing. On the other hand, when the total consumption per unit time exceeds the range defined by the allowable value in a certain time zone, by adjusting the input timing of at least one substrate group of the plurality of substrate groups, The consumption amount of the utility in that time zone is shifted to another time zone, thereby correcting the total consumption amount to be within the range defined by the allowable value.
[0043]
Since these units are closely related, it is possible to limit the power consumption per unit time in the substrate processing apparatus 1 within a predetermined range when processing each group of substrates prior to substrate processing. Can determine the appropriate timing.
[0044]
Hereinafter, details of the processing in the master control unit 2 will be described.
[0045]
<3. Processing sequence>
A plurality of carriers C are waiting in the buffer unit 10, and each carrier C stores a substrate group serving as a predetermined processing unit in the order of loading. It is assumed that the predetermined order of insertion is recorded in the memory 5 (see FIG. 2).
[0046]
In the following description, in order to facilitate understanding of each procedure, a case where three substrate groups A, B, and C having the same processing contents in the buffer unit 10 are in a standby state will be described as an example. In addition, it is assumed that recipes a, b, and c are set for these substrate groups A, B, and C, respectively.
[0047]
4, 5, and 6 are flowcharts illustrating a processing procedure performed by the master control unit 2.
[0048]
As shown in FIG. 4, prior to actual substrate processing (step S2), when there are a plurality of substrate groups that the master control unit 2 stands by in the buffer unit 10, the loading timing of these substrate groups is determined (step S1). ). That is, when the master control unit 2 performs the process of step S1, it functions as the schedule determination unit 25 (see FIG. 3).
[0049]
The detailed processing content of the input timing determination (step S1) is the flowchart of FIG.
[0050]
In step S11, the master control unit 2 acquires a predetermined order for a plurality of substrate groups. Specifically, when the master control unit 2 accesses the memory 5, the order of loading for the plurality of substrate groups A, B, and C is acquired. Here, it is assumed that the loading order for the substrate groups A, B, and C is defined as “A → B → C”.
[0051]
And the master control part 2 acquires the recipe set for every board | substrate group which accesses the memory 5 and waits in the buffer part 10 (step S12). Thereby, the master control part 2 can clarify the processing content with respect to each board | substrate group. For example, in the case of the above example, recipes a, b, and c individually set for each of the substrate groups A, B, and C are acquired. However, in this example, the substrate groups A, B, and C are set so that the same processing content is performed by the substrate processing apparatus 1, and therefore the contents of the recipes a, b, and c are substantially the same. It has become.
[0052]
Then, the master control unit 2 calculates the utility for each unit time consumed when processing each substrate group based on the recipe for each substrate group (step S13). Utility is a concept that includes all of pure water, electric power, gas, etc. supplied from the factory equipment side, but it is stored in advance in the memory 5 as to which of these is to be calculated. The master control unit 2 accesses the memory 5 to identify the utility to be calculated, and calculates the consumption of the utility based on the processing content described in the recipe. At this time, the master control unit 2 functions as the utility consumption calculating unit 25a.
[0053]
For example, the recipes a, b, and c for the substrate groups A, B, and C include “a first chemical processing unit 43, a first water washing processing unit 42, a second chemical processing unit 45, a second water washing processing unit 44, and a drying process. It is assumed that the processing content in the procedure of “part 41” is described, and “pure water” is specified as the restriction target of the utility consumption. Further, it is assumed that 150 (liters / minute) is set in the memory 5 as an allowable value of the utility consumption (pure water consumption).
[0054]
When the master control unit 2 obtains the consumption of pure water for each of the substrate groups A, B, and C based on the recipes a, b, and c for each unit time Δt, it is as shown in FIG. That is, FIG. 7A shows the power consumption SA for each unit time Δt for the board group A, and FIG. 7B shows the power consumption SB for every unit time Δt for the board group B. FIG. 7C shows the power consumption SC for each unit time Δt for the substrate group C. Since the substrate groups A, B, and C have the same processing content, the consumption of pure water per unit time Δt is equal.
[0055]
The utility consumptions SA, SB, and SC in FIG. 7 will be described. Substrate groups A, B, and C are subjected to chemical processing in the first chemical processing unit 43 from the start of processing (time 0) to time ta, and in the first washing processing unit 42 from time ta to time tb. Washing with water is performed. Since pure water is not used during the chemical treatment for the substrate group, pure water is not consumed for the substrate group from time 0 to time ta, and the power consumption is 0 (liters / minute). Become. On the other hand, during the water washing process, pure water is filled in the water washing tank WB1, and the overflow of pure water is also performed during the water washing process, so that the utility consumption related to the pure water per unit time Δt is obtained. Here, a relatively large amount of pure water may be supplied to the washing tank WB1 at the start of the pure water treatment. For this reason, the pure water consumption is 80 (liters / minute) during the unit time Δt from the time ta. On the other hand, after that, the consumption of pure water per unit time Δt is 30 (liters / minute). The unit time Δt may be 1 second, 1 minute, or other time.
[0056]
Then, the substrate groups A, B, and C are subjected to the chemical treatment in the second chemical treatment unit 45 from the time tb to the time tc, and are washed in the second water washing treatment unit 44 from the time tc to the time td. Is done. Since the chemical solution treatment is performed between the time tb and the time tc, the pure water consumption is 0 (liters / minute), while the water washing treatment is performed between the time tc and the time td. During this period, 80 (liter / minute) pure water is consumed, and thereafter 30 (liter / minute) pure water is consumed.
[0057]
The substrate groups A, B, and C are dried under reduced pressure in the drying processing unit 41 between time td and time te, and the processing for the substrate group is completed. Since the drying process is performed from time td to time te, pure water is not consumed for the substrate group, and the power consumption amount per unit time Δt is 0 (liters / minute).
[0058]
Strictly speaking, in order to process the substrate group, it is preferable to consider a schedule expressing the power consumption per unit time in consideration of the time during which the substrate is being transported by the transport means. In the form, they will be ignored for the sake of simplicity.
[0059]
In step S14, the power consumption amount of the substrate group to be loaded first in the loading order acquired in step S11 is set at a predetermined position on the time axis. In the case of the above example, since the first throwing target is the board group A, the power consumption SA for the board group A is set to a predetermined position on the time axis (for example, the time axis origin position t = 0).
[0060]
FIG. 8 is a diagram illustrating the power consumption set on the time axis. As shown in FIG. 8, in step S14, the power consumption SA for the substrate group A is set on the time axis so that the starting time coincides with the time axis origin t = 0.
[0061]
Then, the process proceeds to step S15, and the master control unit 2 sequentially sets the power consumption amount of each term board group on the time axis in accordance with the loading order, and corrects the loading timing of the added board group. By doing so, the total consumption of the utility per unit time is set within the range defined by the allowable value. That is, in step S15, the master control unit 2 functions as the timing correction unit 25b.
[0062]
The detailed processing content of this step S15 is a flowchart shown in FIG.
[0063]
In step S151, the board group to be loaded next is specified based on the loading order acquired in step S11, and the power consumption amount for the board group is additionally set at a predetermined position on the time axis. In the case of the above example, the substrate group B is introduced next to the substrate group A. Therefore, the power consumption SB for the board group B is added on the time axis where the power consumption for the board group A is set.
[0064]
At this time, when the loading of the substrate group B is started, it is set so as not to interfere with the processing of the substrate group A. This is because both the substrate groups A and B are processed in the order of “first chemical processing unit 43 → first water washing processing unit 42 → second chemical processing unit 45 → second water washing processing unit 44 → drying processing unit 41”. Therefore, when the substrate group A is being processed by the first chemical solution processing unit 43 and the first water washing processing unit 42, the second lifter 36 is being used by the substrate group A. Therefore, the next substrate group B cannot be loaded unless the processing of the substrate group A in the first chemical solution processing unit 43 and the first water washing processing unit 42 is completed. For this reason, when the loading of the substrate group B is started, the timing is set so as not to interfere with the processing of the substrate group A.
[0065]
As a result, as shown in FIG. 8, the substrate group B is additionally set on the time axis so that the substrate group B is inserted at the timing (time t1) when the processing in the first water washing processing unit 42 of the substrate group A is completed.
[0066]
Next, in step S152, the master control unit 2 obtains the total consumption of the utility for each unit time in the entire substrate processing apparatus. That is, the power consumption consumed for each substrate group set with respect to the time axis is accumulated per unit time, and the total consumption of power consumed per unit time as the whole substrate processing apparatus is obtained. For example, in the case of FIG. 8, the power consumption of the board group A and the board group B is accumulated every unit time from time t = 0 along the time axis, and the total consumption ST1 per unit time is calculated. Ask.
[0067]
In FIG. 8, since only the substrate group A is processed in the substrate processing apparatus 1 from time 0 to time t1, the total consumption amount of utility (pure water) per unit time is the consumption amount of power for the substrate group A. Matches. On the other hand, while the substrate groups A and B are processed in parallel in the substrate processing apparatus 1 after the time t1, the accumulated value of the power consumption of the substrate groups A and B is the substrate processing apparatus. 1 is the total consumption.
[0068]
Next, in step S153, the master control unit 2 reads an allowable value related to the power consumption amount from the memory 5, and determines whether or not the total consumption amount per unit time is within a range defined by the allowable value. For example, in the case of the above example, when the master control unit 2 reads the allowable value related to the power consumption amount from the memory 5, the master control unit 2 determines that the allowable value is 150 (liters / minute). It is determined whether the total consumption is 150 (liters / minute) or less. In the total consumption ST1 shown in FIG. 8, when it is determined whether the total consumption per unit time is sequentially 150 or less along the time axis from time axis 0, time t3 and time t4 The total consumption amount during this period is 160, which exceeds the range defined by the allowable value. Therefore, NO is determined in step S153, and the process proceeds to step S154. In the determination in step S153, “YES” is determined only when the total consumption per unit time is within the range defined by the allowable value, and the process proceeds to step S156, and at least one time zone If there is a value exceeding the range, “NO” is determined.
[0069]
In step S154, a time width that is not within the range defined by the allowable value in the total consumption is obtained. For example, in the case of FIG. 8, since the time width from time t3 to time t4 is equal to the unit time Δt, the time width obtained in step S154 is Δt. The time width here is a continuous time width when the total consumption continuously exceeds the range defined by the allowable value along the time axis.
[0070]
Next, proceeding to step S155, the master control unit 2 shifts the addition timing of the added substrate group along the time axis according to the time width obtained in step S154. In other words, the processing schedule of the board group is corrected by delaying the loading timing of the board group added later by the time corresponding to the time width in which the total consumption exceeds the allowable value, so that a large amount of time is consumed in the same time zone. It does not consume power.
[0071]
In the case of FIG. 8, the time width in which the total consumption amount is 160 coincides with the unit time Δt. Therefore, in step S155, the loading timing of the substrate group B is delayed by Δt. FIG. 9 is a diagram showing a result of correcting the input timing of FIG. As shown in FIG. 9, the master control unit 2 shifts the loading timing of the substrate group B to the rear side of the time axis by Δt by performing the process of step S155, and corrects the substrate group B to be loaded at time t2. To do. As a result, the total consumption between time t3 and time t4 is 80 (liters / minute), which is the utility consumption within the range defined by the allowable value.
[0072]
After shifting the loading timing of the added substrate group in this way, the process returns to step S152 to obtain the total consumption again based on the corrected processing content.
[0073]
In step S152, the master control unit 2 obtains the total consumption of the power for each unit time in the entire substrate processing apparatus based on the corrected power consumption. For example, in the case of FIG. 9, the power consumption of the substrate group A and the substrate group B is accumulated every unit time from time t = 0 along the time axis, and the total consumption ST2 per unit time is obtained. Ask.
[0074]
In step S153, the master control unit 2 determines whether or not the total consumption ST2 per unit time is within a range defined by the allowable value. In the case of FIG. 9, in the total consumption ST2, it is determined whether or not the total consumption per unit time is sequentially 150 or less from the time axis 0 along the time axis. The consumption amount is 150 or less. In step S153, “YES” is determined, and the process proceeds to step S156.
[0075]
  In step S156, the master control unit 2 is additionally set in step S151.substrateDetermine the timing of group entry. That is, as shown in FIG. 9, the loading timing when the total amount of power consumption is within the range indicated by the allowable value in all time zones is determined as the loading start time of the added board group. As a result, if the substrate group B is introduced after the time t2 has elapsed since the introduction of the substrate group A, the power consumed by the substrate processing apparatus 1 is limited within a predetermined range.
[0076]
In step S157, the master control unit 2 determines whether there is a substrate group to be input next. If YES, the process from step S151 is repeated. If NO, all prepared substrates are determined. Since the input timing for the group has been determined, the processing for determining the input timing (step S1 in FIG. 4) is terminated, and the process proceeds to the start of actual substrate processing (step S2). In the case of the above example, since there is a substrate group C to be input next, the processing from step S151 is repeated.
[0077]
In step S151, the board group C to be loaded next is specified, and the power consumption SC for the board group C is additionally set at a predetermined position on the time axis. At this time, since the setting of the substrate group C is set so as not to interfere with the processing of the substrate groups A and B, the processing in the first washing processing section 42 of the substrate group B is completed as shown in FIG. Additional setting is made on the time axis so that the substrate group B is inserted at the timing (time t6).
[0078]
In step S152, as shown in FIG. 10, the power consumptions SA, SB, SC consumed for each of the substrate groups A, B, C set with respect to the time axis are accumulated every unit time, and the substrate processing is performed. The total consumption ST3 of the utility consumed per unit time as the entire apparatus 1 is obtained.
[0079]
In step S153, the master control unit 2 determines whether the total consumption per unit time is 150 (liters / minute) or less. In the total consumption ST3 shown in FIG. 10, when it is determined whether or not the total consumption per unit time is sequentially 150 or less along the time axis from time axis 0, time t8 and time t9 are obtained. The total consumption amount during this period is 160, which exceeds the range defined by the allowable value. Accordingly, the process proceeds to step S154, and a time width from time t8 to time t9 is obtained.
[0080]
Next, proceeding to step S155, the loading timing of the substrate group C is shifted by a time corresponding to the time width in which the total consumption is 160. FIG. 11 is a diagram illustrating a result of correcting the input timing of FIG. As shown in FIG. 11, the master control unit 2 performs the process of step S155 to shift the loading timing of the substrate group C to the rear side of the time axis by Δt, and corrects the substrate group C to be loaded at time t7. To do. As a result, the total consumption between time t8 and time t9 is 80 (liters / minute), which is the utility consumption within the range defined by the allowable value.
[0081]
Then, the process returns to step S152, and the master control unit 2 calculates the total power usage per unit time in the entire substrate processing apparatus 1 based on the power consumption amounts SA, SB, SC of the corrected substrate groups A, B, C. The consumption ST4 is obtained.
[0082]
Then, in step S153, when the master control unit 2 determines whether or not the total consumption ST4 per unit time is within the range defined by the allowable value, in the total consumption ST4 in FIG. The total consumption amount is 150 or less, and “YES” is determined in the step S153, and the process proceeds to the step S156.
[0083]
In step S156, when the master control unit 2 determines the loading timing for the board group C, there is no board group to be loaded next, so the loading timing for all the board groups is confirmed. The process of step S1 ends.
[0084]
Therefore, in the case of the above example, each of the substrate groups A, B, and C is determined at the input timing as shown in FIG. As shown in FIG. 11, even when the processing for each substrate group is performed in parallel in the substrate processing apparatus 1, by performing the above processing, the substrate processing apparatus 1 performs the processing before the substrate processing. It becomes possible to limit the total consumption per unit time of the predetermined utility consumed within a predetermined range.
[0085]
Then, the process proceeds to step S2 in FIG. 4, and when the actual substrate processing is started, if each substrate group is input based on the input timing determined in step S1, the substrate group is processed. The substrate processing apparatus 1 can be operated in a state in which the total consumption amount of the entire substrate processing apparatus 1 consumed is limited within a predetermined range. At this time, the master control unit 2 functions as the loading management unit 26 shown in FIG. 3 and sequentially loads each board group based on the loading timing determined in step S1, thereby reducing the total consumption of power. Appropriate substrate processing can be performed while being limited within a predetermined range.
[0086]
In the above processing procedure, since the power consumption can be limited to a predetermined range prior to the actual substrate processing in the substrate processing apparatus 1, it can withstand a large amount of power consumption as factory equipment. Without installing a usable utility supply facility, it becomes possible to perform substrate processing according to the utility supply capability of the existing utility supply facility.
[0087]
Further, by performing the above processing procedure, when a plurality of processing units are provided as in the substrate processing apparatus 1 shown in this embodiment, the maximum utility per unit time is given to each processing unit. There is no need to configure the device on the premise of supply. In the case of the above example, since there may be a case where a maximum of 80 (liters / minute) pure water is supplied per unit time to one washing tank, considering that two washing tanks are provided. It seems that it is inherently necessary to construct a piping system so that the entire substrate processing apparatus 1 has a pure water supply capacity of 160 (liters / minute). However, in this embodiment, the input timing of each substrate group is determined so as to limit the total consumption of the power consumed by the entire substrate processing apparatus 1 per unit time within the range defined by the allowable value. Therefore, the pure water supply capacity of the piping system may be 160 (liters / minute) or less. In other words, in this embodiment, the loading timing of each substrate group is determined so that a plurality of processing units do not consume the maximum power at the same time. Therefore, when the substrate processing apparatus 1 is constructed, it may be constructed using relatively small parts, and the installation space can be reduced and the apparatus cost can be reduced.
[0088]
Further, for example, when a plurality of substrate processing apparatuses 1 are installed in a factory, as the number of installed apparatuses increases, the power supply equipment on the factory equipment side is connected to one substrate processing apparatus 1. The utility that can be supplied is reduced. Even in such a case, it is possible to operate a plurality of substrate processing apparatuses 1 at the same time without any problem by changing the allowable value regarding the utility according to the number of installed units.
[0089]
Further, by adjusting the loading timing of each substrate group according to the above processing procedure, the power consumption supplied to the substrate processing apparatus 1 is limited by limiting the total consumption of the power to the predetermined range within the substrate processing apparatus 1 as a whole. Since (the difference between the maximum and minimum) can be reduced, it is possible to stabilize the substrate processing process. In other words, in order to stably process a plurality of substrate groups in the substrate processing apparatus 1, it is desirable to stabilize various conditions, and it is also desirable to reduce the fluctuations in the power consumption.
[0090]
Note that the processing until determining the loading timing of each substrate group based on the recipe associated with the substrate group to be processed and the total consumption of the power within the predetermined range is the actual substrate processing Since the operation (physical operation) of the apparatus 1 is not accompanied, this corresponds to performing a process of simulating the consumption state of a predetermined utility based on the processing procedure and processing contents of the substrate group.
[0091]
Further, in the example shown in the above processing procedure, the case where pure water is the utility to be restricted has been described, but other utilities such as gas and electric power are similarly limited within the range defined by the allowable value. Of course, it is possible. In this case, which utility is to be restricted may be selected, for example, at the first stage of the processing procedure. Further, it may be configured so that each consumption amount is limited within a predetermined range for all utility powers (that is, all of pure water, electric power, gas, etc.), and any combination of utility powers is predetermined. You may comprise so that it may restrict | limit within the range.
[0092]
In the above description of the processing procedure, an example has been described in which the total consumption of power used when performing substrate processing on the substrate groups A, B, and C having the same processing content is limited within a predetermined range. Even if they are different, it is possible to limit the total consumption of the utility per unit time within a predetermined range by performing the same processing procedure as described above. That is, the flowcharts shown in FIGS. 4, 5, and 6 can be applied even when different recipes are set for each substrate group, and the power consumed by the entire substrate processing apparatus 1 can be applied. It is possible to determine the loading timing of each substrate group that limits the total consumption within a predetermined range.
[0093]
<4. Substrate processing equipment simulation equipment>
Since the processing related to the determination of the input timing (step S1) described above does not involve the actual operation of the substrate processing apparatus 1, the input timing is determined for a plurality of substrate groups even if the apparatus does not have a physical configuration. It is possible.
[0094]
That is, if there is data on the recipe for each substrate group, data on the configuration of the substrate processing apparatus, and an allowable value regarding utility, each of the substrate groups in a general computer configured separately from the substrate processing apparatus 1 It is possible to determine the input timing.
[0095]
Then, by determining the input timing using a computer configured separately from the substrate processing apparatus, it is necessary when processing a plurality of substrate groups even at a location away from the substrate processing apparatus 1. Conveniently, it is possible to perform a simulation process on the total consumption of utility based on recipe data or the like.
[0096]
This is because, by performing a simulation process with a computer, it is possible to determine how much throughput can be realized when the substrate processing apparatus 1 is operated with an existing utility supply facility before the substrate processing apparatus 1 is introduced. This is because it can be simulated dynamically.
[0097]
Here, the simulation apparatus of the substrate processing apparatus comprised as a different body from the main body of the substrate processing apparatus 1 from such a viewpoint is demonstrated.
[0098]
FIG. 12 is a diagram showing an example of the configuration of the simulation apparatus 200 of the substrate processing apparatus in this embodiment. As shown in FIG. 12, an input / output device 201, a CPU 202, a memory 203, a storage unit 204, and interfaces 205, 206, and 209 are connected to each other via a bus line 210. The input / output device 201 is a device that reads data from, and writes data to, a computer-readable portable recording medium 211 such as a flexible disk, a magneto-optical disk, and a CD-ROM. The CPU 202 is a processing unit that performs arithmetic processing. The memory 203 is a device for temporarily storing and holding data. The storage unit 204 is a computer-readable fixed recording medium such as a magnetic disk, and includes an operating system (OS), a simulation program for realizing a simulation apparatus, data relating to the configuration of the substrate processing apparatus, recipe data, and allowable values relating to utility. Etc. are stored.
[0099]
A display device 207 such as a CRT or a liquid crystal display is further connected to the interface 205, and a keyboard 208 is connected to the interface 206. Further, the interface 209 is an interface for communicating with an external apparatus (for example, the substrate processing apparatus 1 or the like).
[0100]
As is clear from this configuration, the simulation apparatus 200 of the substrate processing apparatus is configured separately from the substrate processing apparatus 1.
[0101]
The simulation apparatus 200 acquires data regarding the recipe of the substrate group to be processed, data regarding the arrangement configuration of each functional unit of the substrate processing apparatus, and the like via the interface 209 or the input / output device 201. These data are stored and saved in the memory 203 or the storage unit 204.
[0102]
Thereafter, the CPU 202 of the simulation apparatus 200 functions as the schedule determination unit 25 shown in FIG. 3 by reading the simulation program from the recording medium 211 or the storage unit 204 and executing it. As a result, the CPU 202 performs processing in accordance with the processing procedures of the flowcharts shown in FIGS. 5 and 6, obtains the power consumption corresponding to the recipes of the plurality of substrate groups, and uses the power consumed by the substrate processing apparatus. The input timing of each substrate group is determined so that the total consumption amount is within the range defined by the allowable value.
[0103]
As described above, if the simulation apparatus 200 is realized by a general computer configured separately from the substrate processing apparatus 1, the power consumed when processing a plurality of substrate groups in a place other than the clean room is used. It becomes possible to simulate a substrate processing situation in which the total consumption is limited within a predetermined range. As a result, for example, even in a management computer provided in a factory, it is possible to determine the input timing of a plurality of substrate groups in the substrate processing apparatus 1.
[0104]
Note that the above simulation program is a program for executing the processing sequence shown in the flowcharts of FIGS. 5 and 6, and may be read from the portable recording medium 211 or stored in the storage unit 204 in advance. You can keep it. In other words, the simulation program is stored regardless of whether it is a portable recording medium or a fixed recording medium. The simulation of the substrate processing apparatus 1 is performed by executing a simulation program in a general computer configured such that the CPU 202 can read and execute the program from the recording medium by basic software such as an OS. It operates as the device 200.
[0105]
<5. Modification>
The embodiment of the present invention has been described above, but the present invention is not limited to the above-described content.
[0106]
For example, the processing form in the substrate processing apparatus 1 may be a single wafer processing form or a batch processing form. Moreover, it is not limited to what immerses the board | substrate group to be processed in a liquid. That is, the substrate processing apparatus is a substrate processing apparatus that sequentially applies a plurality of substrate groups each composed of one or a plurality of substrates to a plurality of processing units, thereby performing processing according to the recipe on each substrate group. It only has to be.
[0107]
In the above description, the case where the power consumed for substrate processing is mainly limited has been described. However, the input timing may be determined based on the other power limitations. For example, the input timing of each substrate group may be limited so as to limit the amount of liquid drained from the substrate processing apparatus 1 within a predetermined range according to the drainage capacity on the factory facility side.
[0108]
【The invention's effect】
  As described above, according to the substrate processing apparatus of the first aspect, the power consumption required for each of the plurality of substrate groups is accumulated per unit time to obtain the total power consumption, and the total consumption Is not within the prescribed range,Find the time span when the total consumption is not within rangeThe loading timing of at least one board group of the plurality of board groupsDelay by time spanThus, since the total consumption is set to be within the range, it is possible to limit the total consumption of the utility for each unit time while performing appropriate substrate processing on each substrate group.
[0109]
  According to the simulation apparatus of the substrate processing apparatus according to claim 2, the power consumption required for each of the plurality of substrate groups is accumulated every unit time to obtain the total power consumption, and the total consumption is predetermined. If not in the range ofFind the time span when the total consumption is not within rangeThe loading timing of at least one board group of the plurality of board groupsDelay by time spanTherefore, the configuration for setting the total consumption to be within the range is configured as a separate body from the substrate processing apparatus, so when processing each substrate group even at a location away from the substrate processing apparatus. It is possible to perform a simulation process for the total consumption of the power consumed by the machine.
[0110]
  The simulation program according to claim 3RecordAccording to the recording medium, the computerInSubstrate processing equipment simulation equipmentExecute the same process asIt becomes possible.
[Brief description of the drawings]
FIG. 1 is a plan view showing a configuration of a substrate processing apparatus according to an embodiment of the present invention.
FIG. 2 is a block diagram illustrating details of a control unit of the substrate processing apparatus.
FIG. 3 is a diagram schematically illustrating functions realized by a master control unit.
FIG. 4 is a flowchart showing a processing procedure in the embodiment of the present invention.
FIG. 5 is a flowchart showing a processing procedure in the embodiment of the present invention.
FIG. 6 is a flowchart showing a processing procedure in the embodiment of the present invention.
FIG. 7 is a diagram showing an example of utility consumption per unit time for a plurality of substrate groups.
FIG. 8 is a diagram showing a processing concept in the embodiment of the present invention.
FIG. 9 is a diagram showing a processing concept in the embodiment of the present invention.
FIG. 10 is a diagram showing a processing concept in the embodiment of the present invention.
FIG. 11 is a diagram showing a processing concept in the embodiment of the present invention.
FIG. 12 is a diagram illustrating an example of a configuration of a simulation apparatus of a substrate processing apparatus.
[Explanation of symbols]
1 Substrate processing equipment
2 Master controller
25 Schedule decision part
25a Utility consumption calculation part (Utility consumption calculation means)
25b Timing correction unit (timing correction means)
10 Buffer section
30 Transport robot
35 First lifter
36 Second lifter
37 3rd lifter
41 Drying section
42 1st washing process part
43 First chemical treatment section
44 Second washing section
45 Second chemical processing section
SA, SB, SC Power consumption
ST1 to ST4 Total consumption
200 Simulating device
211 recording media

Claims (3)

A substrate processing apparatus that performs predetermined processing on each of the plurality of substrate groups by sequentially transferring a plurality of substrate groups including one or a plurality of substrates to a plurality of processing units,
(a) a utility consumption calculating means for obtaining a utility consumption of a predetermined utility per unit time according to a recipe for each board group;
(b) The power consumption calculated for each of the plurality of substrate groups is accumulated for each unit time to obtain a total consumption of the power, and whether or not the total consumption is within a predetermined range. When the total consumption amount is not within the range, a time width in which the total consumption amount is not within the range is obtained, and the input timing of at least one substrate group of the plurality of substrate groups is determined as the time period. Timing correction means for setting the total consumption to be within the range by delaying by a width;
A substrate processing apparatus comprising: A simulation apparatus of a substrate processing apparatus that performs a predetermined process on each of the plurality of substrate groups by sequentially transferring a plurality of substrate groups including one or a plurality of substrates to a plurality of processing units. There,
(a) a utility consumption calculating means for obtaining a utility consumption of a predetermined utility per unit time according to a recipe for each board group;
(b) The power consumption calculated for each of the plurality of substrate groups is accumulated for each unit time to obtain a total consumption of the power, and whether or not the total consumption is within a predetermined range. When the total consumption amount is not within the range, a time width in which the total consumption amount is not within the range is obtained, and the input timing of at least one substrate group of the plurality of substrate groups is determined as the time period. Timing correction means for setting the total consumption to be within the range by delaying by a width;
With
A substrate processing apparatus simulating apparatus, wherein the apparatus is configured separately from the substrate processing apparatus. A recording medium for recording a simulation program, the computer executing the simulation program on the computer,
(a) a power consumption calculating step for obtaining a power consumption of a predetermined power per unit time according to a recipe for each board group; and
(b) a step of accumulating the power consumption calculated for each of the plurality of substrate groups every unit time to obtain a total consumption of the power;
total consumption and the step of determining whether or not within a predetermined range determined in (c) the step (b),
(d) When it is determined in the step (c) that the total consumption is not within the range, a time width in which the total consumption is not within the range is obtained, and among the plurality of substrate groups, A timing correction step of setting the total consumption so as to be within the range by delaying the input timing of at least one substrate group by the time width;
The computer-readable recording medium characterized by the above .

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