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JP3979928B2 - High-temperature high-pressure optical measurement cell - Google Patents
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JP3979928B2 - High-temperature high-pressure optical measurement cell - Google Patents

High-temperature high-pressure optical measurement cell Download PDF

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Publication number
JP3979928B2
JP3979928B2 JP2002332351A JP2002332351A JP3979928B2 JP 3979928 B2 JP3979928 B2 JP 3979928B2 JP 2002332351 A JP2002332351 A JP 2002332351A JP 2002332351 A JP2002332351 A JP 2002332351A JP 3979928 B2 JP3979928 B2 JP 3979928B2
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cell
pressure
temperature
optical measurement
window material
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JP2004163368A (en
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修一 村石
潤一郎 守屋
勝 中原
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Jeol Ltd
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Jeol Ltd
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Description

【0001】
【発明の属する技術分野】
本発明は紫外・可視・赤外線における吸収・発光分光測定装置の付属品として利用でき、亜臨界・超臨界反応、触媒反応等の研究分野に応用できる高温高圧光学測定用セルに関する。
【0002】
【従来の技術】
亜臨界水、超臨界水にレーザ光を照射してラマンスペクトルを測定し、そのピーク周波数の変化から亜臨界水、超臨界水の分子状態を考察することが行われている。この場合に用いられる従来の測定用セルとしては、例えば、高耐圧の金属ブロック内の液体試料に窓材を通してレーザビームを照射し、窓材を通してその透過光(散乱角0°)や90°散乱光を検出するものが使用されている。
【0003】
【発明が解決しようとする課題】
ところで、従来の測定用ラマンセルに用いられている窓材は、サファイヤ、石英、ガラスが主体であり、30MPa以上の圧力に耐えるために厚みを10mm以上にする必要があり、そのため対物レンズを試料の近くに配置することができず、耐圧と光学系の感度を上げる(開口比を上げる)ためにセルが大型となり、耐圧上限と温度安定度(直接加熱ができないためオーブン方式にしている)に問題が生じていた。
【0004】
また、従来のラマン分光用高圧セルはラマン散乱集光光学系は90°散乱光学系を形成してリレーレンズ方式を採用しているため、窓が最低でも2箇所必要となり、耐圧性に問題があった。
【0005】
また、窓材のフラット面とセルの金属面(試料が溜められる部分)の間に金シートを入れて、窓材の背面に押さえ板とバネ板を押し込みナットで締め付けて圧力に抗するような形をとっており、高圧下でのシール性に難点があった。
【0006】
【課題を解決するための手段】
本発明は上記課題を解決しようとするものであり、セルの窓厚を薄くして感度を上げることができ、セル容積を小さくし、シール性を向上させ、窓数も少なくし、セルを小さくすることにより温度制御を容易にし、断熱真空槽内にも収納することができるようにすることを目的とする。
本発明は、高温高圧下の液体試料に窓材を通して光を照射し、その散乱光を窓材を通して受光する光学測定用セルにおいて、単結晶ダイヤモンド薄板を窓材として用い、ダイヤモンド窓材を金コートした座金に熔着したことを特徴とする。
また、本発明は、試料溜めの金属部分と座金部を白金または金シートでシールし、座金と白金または金シートとの当たり面を線当たりにしたことを特徴とする。
また、本発明は、液体試料が導入されるセル部分は断熱真空槽内に配置されることを特徴とする。
また、本発明は、単結晶ダイヤモンド薄板を窓材として用い、ダイヤモンド窓材を金コートした座金に熔着した高温高圧光学測定用セルと、レーザ照射の光軸と後方散乱光の光軸とを同軸とするファイバーヘッドとを組み合わせたことを特徴とする。
【0007】
【発明の実施の形態】
以下、本発明の実施の形態について説明する。
図1は本発明の高温高圧光学測定用セルの構造の例を説明する図で、図1(a)は平断面面図、図1(b)は正面断面図、図1(c)は側断面図、図2はセル本体部分の拡大図である。
【0008】
図1において、光学測定用セルは暗箱ケース1内に配置され、セル本体2はスペーサ3を介してベース10に支持されている。セル本体2にはVCR継手4を介してサンプル導入口/圧力ポンプ5から数十MPaに加圧された状態の試料が導入される。また、セル本体の試料が導入される部分は断熱支持棒6で支持され、セラミックヒータ7により数百度に加熱され、この温度は熱電対で計測されて温度制御される。また、暗箱ケース1内にはレーザ照射の光軸と後方散乱光の光軸とを同軸とするファイバーヘッドがXYZステージ11により位置調節可能に支持されている。ファイバーヘッドはプローブホルダー12に保持されたファイバープローブ13を備え、ファイバープローブ13の顕微鏡用対物レンズ14がセル本体2の測定用窓に対向し、照射したレーザ光の後方散乱光を検出するようになっている。
【0009】
図2の拡大図において、真空外胴30、O−リング31、蓋32で形成される断熱真空槽33内にセル本体の試料が導入される部分、超臨界用ラマンセル20が置かれていて、導入された試料は超臨界用ラマンセル20に導かれる。超臨界用ラマンセル20は薄板のダイヤモンド製窓21がシール用押えナット27で保持された構造であり、石英製窓28を通してファイバープローブ13よりレーザ光が照射され、顕微鏡用対物レンズ14により後方散乱光が検出される。
【0010】
本実施の形態において使用されるダイヤモンド製窓21は、3.5mmφ、厚さ0.5mm、耐圧80MPa、耐温度590℃のダイヤモンド薄板とし、これにより耐高温、耐高圧性に優れたサイズの小さいセルとしている。窓材の厚みを薄くできるため、集光レンズと試料測定ポイントが近づき、開口比が大きく、集光効率の良い顕微鏡対物レンズ(倍率:×20、作動距離:1.1mm、開口数:0.4、倍率:×50、作動距離:8.1mm、開口数:0.55)を装着したファイバープローブを使用することができ、リモートによるその場測定を容易となった。また、真空チャンバーを外した構成とすると、更に高開口数の対物レンズが搭載可能となり、感度を向上させることができる。
【0011】
また、耐圧窓材としてダイヤモンドを使用したため、セル本体が小さくなって温度コントロールが容易となり、容積が小さいため高圧・高温の安全対策としてセルを断熱真空槽内に納めることが容易になった。また、小型セルのため直接加熱方式をとることができ、セルのみならず装置全体を小型化できる。
【0012】
図3は高圧セル部の詳細を説明する図である。
1mm以下の薄板からなるダイヤモンド製窓21は金コートしたベース座金(モリブデン)22に熔着する。また、試料溜め用金属部25とダイヤモンド製窓21の間には金又は白金シート24を介在させてシールし、金又は白金シート24とベース座金22との当たり面は平面ではなく、図示のように山形として線当たりとし、座金の尖った部分が少しシート24に食い込むようにする。そして、ベース座金22の背面には押え座金26を介してシール用押えナット27で締めつけて高圧に耐えるようにする。
【0013】
なお、上記の例においては超臨界用ラマンセルについて説明したが、ダイヤモンド窓間隔を変えたセルを作成し、図2に示したVCR継手4の部分から取り替えると、可視・紫外吸収測定用高温高圧セルとして使用可能になる。
【0014】
【実施例】
本願発明の高温高圧セルを使用して、H2 Oのラマンスペクトルを測定した実施例について説明する。
図4は400℃におけるH2 Oラマンスペクトル測定結果を示す図である。
水を25℃から400℃まで40MPaの等圧下において昇温し、その後、400℃の等温下で40MPa(密度0.52g/cm3 )から0.1MPa(密度3×10-4 g/cm3 )まで徐々に減圧した。測定時間は、各波数について、400℃において20MPaまでは30秒、それ以下の圧力については信号強度に応じて観測時間を延ばした。0.1MPaでの各波数の測定時間は120分である。測定は波数4500から500(cm-1)の範囲で行った。図示するように、400℃において、40MPaの圧力下では、水分子間の水素結合により線幅が広がっていたラマンスペクトルが、圧力を下げることで水分子間の水素結合が切れ、孤立水分子のシャープなラマンスペクトルが観測された。
【0015】
【発明の効果】
以上のように本発明によれば、以下のような効果が達成される。
▲1▼セルの窓材として薄板のダイヤモンドを採用して集光レンズと試料測定ポイントとを近づけることで、開口比の大きい顕微鏡用対物レンズが使用可能となり、感度を向上させることが可能である。
▲2▼窓材を直接シールするのではなく、ダイヤモンドを座金に熔着して座金とシール材とを線接触させてシールすることにより、耐高圧性、安全性を向上させることが可能である。
▲3▼高圧セルが小型となり、真空室内に収納して安全性を高めることができる。▲4▼小型のセルで直接加熱方式であるため、セルばかりでなく装置全体を小型化することができる。
▲5▼ダイヤモンド窓間隔を変えるだけで種々の分光法に対応が可能となる。
▲6▼従来の高温高圧ラマンセルは、リレーレンズ方式の90°散乱光学系を採用していたため、高温高圧セルに90°の角度で照射窓と出射窓の2つの窓を設けなければならなかったのに対し、本願発明では、ラマン励起用レーザの光軸と、ラマン散乱光の光軸とを同軸とする180°散乱光学系を採用したファイバーヘッドと、高温高圧セルとを組み合わせ、180°散乱光学系の高温光学ラマンセルを実現できるので、照射窓と出射窓とを1つの窓で兼ねることができ、高温高圧セルの機械的強度が増し、また、周囲を真空断熱槽で囲んだことにより、断熱性を高め、かつ、万一の事故に対する安全性を高めることができる。
【図面の簡単な説明】
【図1】 本発明の高温高圧光学測定用セルの構造の例を説明する図である。
【図2】 セル本体部分の拡大図である。
【図3】 高圧セル部の詳細を説明する図である。
【図4】 H2 Oラマンスペクトル測定結果を示す図である。
【符号の説明】
1…暗箱ケース、2…セル本体、3…スペーサ、4…VCR継手、5…サンプル導入口/圧力ポンプ、6…断熱支持棒、7…セラミックヒータ、13…ファイバープローブ、14…対物レンズ、20…超臨界ラマンセル、21…ダイヤモンド製窓、22…ベース座金、23…熔着部、24…金又は白金シート、25…試料溜め用金属部、26…押え座金、27…テール用押えナット、28…石英製窓、30…真空外胴、33…断熱真空槽。
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a high-temperature and high-pressure optical measurement cell that can be used as an accessory of an ultraviolet / visible / infrared absorption / emission spectrometer and can be applied to research fields such as subcritical / supercritical reactions and catalytic reactions.
[0002]
[Prior art]
The Raman spectrum is measured by irradiating laser light to subcritical water and supercritical water, and the molecular state of subcritical water and supercritical water is considered from the change of the peak frequency. As a conventional measurement cell used in this case, for example, a liquid sample in a high pressure resistant metal block is irradiated with a laser beam through a window material, and the transmitted light (scattering angle 0 °) or 90 ° scattering through the window material. What detects light is used.
[0003]
[Problems to be solved by the invention]
By the way, the window materials used in the conventional Raman cell for measurement are mainly sapphire, quartz, and glass, and it is necessary to make the thickness 10 mm or more in order to withstand a pressure of 30 MPa or more. It cannot be placed close to the cell, and the cell becomes large in order to increase the pressure resistance and sensitivity of the optical system (increase the aperture ratio), and there is a problem with the upper limit of pressure resistance and temperature stability (the oven method is used because direct heating is not possible) Has occurred.
[0004]
In addition, the conventional high-pressure cell for Raman spectroscopy has a 90 ° scattering optical system for the Raman scattering condensing optical system and adopts a relay lens system. Therefore, at least two windows are required, and there is a problem with pressure resistance. there were.
[0005]
Also, put a gold sheet between the flat surface of the window material and the metal surface of the cell (the part where the sample is stored), press the pressure plate and spring plate on the back surface of the window material, and tighten the nuts to resist pressure. It has a shape and has a difficulty in sealing performance under high pressure.
[0006]
[Means for Solving the Problems]
The present invention is intended to solve the above-mentioned problems, and can increase the sensitivity by thinning the cell window thickness, reducing the cell volume, improving the sealing performance, reducing the number of windows, and reducing the cell size. It is an object of the present invention to make temperature control easy and to be housed in an adiabatic vacuum chamber.
The present invention relates to a cell for optical measurement in which a liquid sample under high temperature and high pressure is irradiated with light through a window material, and the scattered light is received through the window material, using a single crystal diamond thin plate as the window material, and the diamond window material is coated with gold. It is characterized by being welded to the washer.
In addition, the present invention is characterized in that the metal portion and the washer portion of the sample reservoir are sealed with platinum or a gold sheet, and the contact surface between the washer and the platinum or gold sheet is per line.
Further, the present invention is characterized in that a cell portion into which a liquid sample is introduced is disposed in an adiabatic vacuum chamber.
Further, the present invention uses a single crystal diamond thin plate as a window material, a high-temperature high-pressure optical measurement cell welded to a gold-coated washer with a diamond window material, an optical axis of laser irradiation, and an optical axis of backscattered light. It is characterized by combining with a coaxial fiber head.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below.
FIG. 1 is a diagram for explaining an example of the structure of a high-temperature / high-pressure optical measurement cell according to the present invention. FIG. 1 (a) is a plane sectional view, FIG. 1 (b) is a front sectional view, and FIG. Sectional drawing and FIG. 2 are enlarged views of the cell body.
[0008]
In FIG. 1, an optical measurement cell is arranged in a dark box case 1, and a cell body 2 is supported by a base 10 via a spacer 3. A sample in a state of being pressurized to several tens of MPa from the sample inlet / pressure pump 5 is introduced into the cell body 2 through the VCR joint 4. The portion of the cell body into which the sample is introduced is supported by a heat insulating support rod 6 and heated to several hundred degrees by a ceramic heater 7, and this temperature is measured by a thermocouple and temperature controlled. In the dark box case 1, a fiber head having an optical axis of laser irradiation and an optical axis of backscattered light coaxially supported by an XYZ stage 11 is supported. The fiber head includes a fiber probe 13 held by a probe holder 12 so that the microscope objective lens 14 of the fiber probe 13 faces the measurement window of the cell body 2 and detects the back scattered light of the irradiated laser light. It has become.
[0009]
In the enlarged view of FIG. 2, the supercritical Raman cell 20 is placed in a part where the sample of the cell body is introduced into a heat insulating vacuum chamber 33 formed by the vacuum outer cylinder 30, the O-ring 31, and the lid 32. The introduced sample is guided to the supercritical Raman cell 20. The supercritical Raman cell 20 has a structure in which a thin diamond window 21 is held by a sealing presser nut 27, which is irradiated with laser light from a fiber probe 13 through a quartz window 28 and backscattered by a microscope objective lens 14. Is detected.
[0010]
The diamond window 21 used in the present embodiment is a diamond thin plate having a diameter of 3.5 mm, a thickness of 0.5 mm, a withstand pressure of 80 MPa, and a withstand temperature of 590 ° C. It is a cell. Since the thickness of the window material can be reduced, the focusing lens and the sample measurement point are close to each other, the aperture ratio is large, and the microscope objective lens (magnification: × 20, working distance: 1.1 mm, numerical aperture: 0.0. 4, a fiber probe equipped with a magnification: × 50, a working distance: 8.1 mm, and a numerical aperture: 0.55) can be used, and remote in-situ measurement is facilitated. Further, when the vacuum chamber is removed, an objective lens having a higher numerical aperture can be mounted and the sensitivity can be improved.
[0011]
In addition, since diamond was used as the pressure resistant window material, the cell body was small and temperature control was easy, and the small volume made it easy to place the cell in an adiabatic vacuum chamber as a safety measure for high pressure and high temperature. Moreover, since it is a small cell, a direct heating system can be adopted, and not only the cell but also the entire apparatus can be miniaturized.
[0012]
FIG. 3 is a diagram for explaining the details of the high-pressure cell unit.
A diamond window 21 made of a thin plate of 1 mm or less is welded to a gold-coated base washer (molybdenum) 22. Further, a gold or platinum sheet 24 is interposed between the sample reservoir metal portion 25 and the diamond window 21 for sealing, and the contact surface between the gold or platinum sheet 24 and the base washer 22 is not a flat surface, as shown in the figure. In addition, it is assumed that the angle is per line as the chevron, and the sharp part of the washer bites into the seat 24 a little. Then, the back surface of the base washer 22 is fastened with a sealing presser nut 27 via a presser washer 26 so as to withstand high pressure.
[0013]
In the above example, the supercritical Raman cell has been described. However, when a cell having a different diamond window interval is prepared and replaced from the VCR joint 4 shown in FIG. Can be used as
[0014]
【Example】
An example in which the Raman spectrum of H 2 O was measured using the high-temperature and high-pressure cell of the present invention will be described.
FIG. 4 is a diagram showing the results of H 2 O Raman spectrum measurement at 400 ° C.
Water was heated from 25 ° C. to 400 ° C. under an equal pressure of 40 MPa, and then from 40 MPa (density 0.52 g / cm 3 ) to 0.1 MPa (density 3 × 10 −4 g / cm 3 ) at an isothermal temperature of 400 ° C. The pressure was gradually reduced to The measurement time was 30 seconds for each wave number up to 20 MPa at 400 ° C., and the observation time was extended according to the signal intensity for pressures lower than that. The measurement time of each wave number at 0.1 MPa is 120 minutes. The measurement was performed in the wave number range of 4500 to 500 (cm −1 ). As shown in the figure, at 400 ° C. and under a pressure of 40 MPa, the Raman spectrum whose line width is widened by hydrogen bonds between water molecules is broken, and when the pressure is lowered, hydrogen bonds between water molecules are broken, and isolated water molecules A sharp Raman spectrum was observed.
[0015]
【The invention's effect】
As described above, according to the present invention, the following effects are achieved.
(1) By adopting thin diamond as the window material of the cell and bringing the condenser lens and the sample measurement point close to each other, a microscope objective lens with a large aperture ratio can be used and the sensitivity can be improved. .
(2) Rather than directly sealing the window material, it is possible to improve the high pressure resistance and safety by welding diamond to the washer and sealing it by bringing the washer and the seal material into line contact. .
(3) The high-pressure cell is small and can be housed in a vacuum chamber to enhance safety. (4) Since it is a direct heating system with a small cell, not only the cell but also the entire apparatus can be miniaturized.
(5) Various spectroscopic methods can be handled by simply changing the diamond window interval.
(6) Since the conventional high-temperature and high-pressure Raman cell employs a relay lens type 90 ° scattering optical system, the high-temperature and high-pressure cell had to be provided with two windows, an irradiation window and an exit window, at an angle of 90 °. On the other hand, in the present invention, a fiber head employing a 180 ° scattering optical system in which the optical axis of the Raman excitation laser and the optical axis of the Raman scattered light are coaxially combined with a high-temperature and high-pressure cell, 180 ° scattering is achieved. Since the high-temperature optical Raman cell of the optical system can be realized, the irradiation window and the emission window can be combined with one window, the mechanical strength of the high-temperature and high-pressure cell is increased, and the surroundings are surrounded by a vacuum heat insulating tank. Insulation can be improved and safety against accidents can be increased.
[Brief description of the drawings]
FIG. 1 is a diagram illustrating an example of the structure of a high-temperature high-pressure optical measurement cell according to the present invention.
FIG. 2 is an enlarged view of a cell main body portion.
FIG. 3 is a diagram illustrating details of a high-pressure cell unit.
FIG. 4 is a diagram showing the results of H 2 O Raman spectrum measurement.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Dark box case, 2 ... Cell main body, 3 ... Spacer, 4 ... VCR joint, 5 ... Sample introduction port / pressure pump, 6 ... Thermal insulation support rod, 7 ... Ceramic heater, 13 ... Fiber probe, 14 ... Objective lens, 20 ... Supercritical Raman cell, 21 ... Diamond window, 22 ... Base washer, 23 ... Welded part, 24 ... Gold or platinum sheet, 25 ... Sample reservoir metal part, 26 ... Presser washer, 27 ... Presser nut for tail, 28 ... quartz window, 30 ... vacuum shell, 33 ... heat insulation vacuum chamber.

Claims (4)

高温高圧下の液体試料に窓材を通して光を照射し、その散乱光を窓材を通して受光する光学測定用セルにおいて、
単結晶ダイヤモンド薄板を窓材として用い、ダイヤモンド窓材を金コートした座金に熔着したことを特徴とする高温高圧光学測定用セル。
In an optical measurement cell that irradiates a liquid sample under high temperature and high pressure through a window material and receives the scattered light through the window material,
A cell for high temperature and high pressure optical measurement, characterized in that a single crystal diamond thin plate is used as a window material and the diamond window material is welded to a gold-coated washer .
試料溜めの金属部分と座金部を白金または金シートでシールし、座金と白金または金シートとの当たり面を線当たりにしたことを特徴とする請求項記載の高温高圧光学測定用セル。The metal part and the washer portion of the sample reservoir and sealed with platinum or gold sheets, washer and platinum or gold sheets and high-temperature high-pressure optical cell for measuring according to claim 1, wherein a contact surface and per line. 液体試料が導入されるセル部分は断熱真空槽内に配置されることを特徴とする請求項1または2記載の高温高圧光学測定用セル。The cell for high-temperature and high-pressure optical measurement according to claim 1 or 2, wherein the cell portion into which the liquid sample is introduced is disposed in an adiabatic vacuum chamber. 請求項1記載の高温高圧光学測定用セルと、レーザ照射の光軸と後方散乱光の光軸とを同軸とするファイバーヘッドとを組み合わせたことを特徴とする高温高圧光学測定用セル。  2. A high-temperature high-pressure optical measurement cell according to claim 1, wherein the high-temperature high-pressure optical measurement cell is combined with a fiber head having an optical axis of laser irradiation and an optical axis of backscattered light.
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