JP3985580B2 - Pulse power supply - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a pulse power supply device used for an excimer laser, an ozonizer, and the like, and more particularly to a main circuit configuration in the case of a multi-unit configuration.
[0002]
[Prior art]
An example of the main circuit configuration of this type of pulse power supply device is shown in FIG. 3, and the device configuration is constituted by a charging unit 1, a magnetic compression unit 2, and a load unit 3.
[0003]
In FIG. 3, by simultaneously turning on the semiconductor switches SW1 and SW2, such as GTO and IGBT, a current flows through the path indicated by I1, and the DC power supply voltage E and the inductance value of the reactor L1 are set to L and ON. Assuming that t, a current of I = E / L × t flows, and at this time, electromagnetic energy of ½ × LI ² is stored in the reactor L1.
[0004]
Next, when the switches SW1 and SW2 are simultaneously turned OFF, a current flows through the path indicated by I2, and the electromagnetic energy stored in the reactor L1 is transferred to the capacitor C0, where the capacitor capacity of the capacitor C0 is C and the charging voltage is V. , V = √L / √C × I.
[0005]
Next, when SW3 is turned on, the pulse current is transferred while being compressed with the magnetic pulses C0 → C1 → C2, and the discharge pulse current can be supplied to the load such as the laser electrode of the load unit 3.
[0006]
[Problems to be solved by the invention]
The pulse power supply device is divided into three units, that is, a charging unit, a magnetic compression unit, and a load unit, as described above, due to size and weight restrictions, and is stored in one frame. The main circuit configuration of each unit is as shown in FIG.
[0007]
In FIG. 3, when the connection A, the connection B, or both of the connections A and B are forgotten or the operation is performed again, the electromagnetic energy stored in the reactor L1 loses its place when the switches SW1 and SW2 are simultaneously turned OFF. , SW1 and SW2 may be damaged.
[0008]
Connection between each unit is performed by the user, and the device may be replaced on a unit-by-unit basis due to lifetime or version upgrade. At this time, there is a problem that the device may be damaged by forgetting to connect the connections A and B.
[0009]
Even when the connection is normally performed, since the switch SW2 and the capacitor C0 are housed in separate units, the reactor becomes large in the closed circuit between SW2 and C0. When SW2 is turned off, a larger surge voltage is generated in SW2, so that a larger snubber circuit is required in SW2, and switching loss of SW2 increases.
[0010]
The objective of this invention is providing the pulse power supply device which solved said subject.
[0011]
[Means for Solving the Problems]
The present invention is an inter-unit separation structure in which electromagnetic energy is not stored in the reactor L1 when the connection unit is forgotten between the charging unit and the magnetic compression unit, or an inter-unit separation structure that can release the stored energy of the reactor L1, It is characterized by the following configuration.
[0012]
(1) A charging unit that accumulates electromagnetic energy in a reactor by turning on a semiconductor switch, and a pulse current that is magnetically compressed by using the capacitor as a power source by charging a capacitor with the electromagnetic energy of the reactor by turning off the semiconductor switch. In a pulse power supply device comprising a magnetic compression unit that generates and a load unit to which the pulse current is supplied,
The semiconductor switch is disposed in the magnetic compression unit, and has an inter-unit separation structure in which the charging unit and the magnetic compression unit are line-connected.
[0013]
(2) A charging unit that accumulates electromagnetic energy in the reactor by turning on the semiconductor switch, a capacitor charged by the electromagnetic energy of the reactor by turning off the semiconductor switch, and a pulse current obtained by compressing magnetic pulses using the capacitor as a power source. In a pulse power supply device comprising a magnetic compression unit that generates and a load unit to which the pulse current is supplied,
The semiconductor switch and the capacitor are arranged in the charging unit, and have an inter-unit separation structure in which the charging unit and the magnetic compression unit are line-connected.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a unit configuration diagram showing Embodiment 1 of the present invention. 3 is different from FIG. 3 in that the charging unit 1 and the magnetic compression unit 2 are separated by a connection line between the reactor L1 and the semiconductor switch SW2.
[0015]
That is, the switch SW <b> 2 and the diode D <b> 2 configured in the conventional charging unit 1 are disposed in the magnetic compression unit 2.
[0016]
According to the above configuration, the main circuit configuration as seen in the entire pulse power supply device does not change, but if connection A and B are forgotten, current I1 does not flow even if switches SW1 and SW2 are turned on. Therefore, magnetic energy is not accumulated in the reactor L1, and the switches SW1 and SW2 can be prevented from being damaged without generating a high surge voltage even when the switches SW1 and SW2 are turned off.
[0017]
FIG. 2 is a unit configuration diagram showing Embodiment 2 of the present invention. In the figure, between the charging unit 1 and the magnetic compression unit 2, a capacitor C0 is disposed on the charging unit 1 side and separated by a connection line between the capacitor C0 and the switch SW3.
[0018]
That is, the capacitor C0 that has been configured in the conventional magnetic compression unit 2 is disposed in the charging unit 2.
[0019]
According to this configuration, the main circuit configuration when viewed as a whole of the pulse power supply device is not changed, but when connection A and B are forgotten, the discharge pulse current is supplied to the load unit 3 even if the switch SW3 is turned on. However, since the current flows through the path I2 when the switches SW1 and SW2 are turned off, the capacitor C0 is charged, and the overvoltage is not generated in the switches SW1 and SW2, and the damage can be prevented. .
[0020]
【The invention's effect】
As described above, according to the present invention, it is possible to prevent the switches SW1 and SW2 from being damaged even if the main circuit connection between the charging unit and the magnetic compression unit is forgotten.
[0021]
In addition, since the switch SW2 and the C0 capacitor are configured in the same unit, a closed circuit in which the reactor is reduced between SW2 and C0 can be closed, the SW2 snubber circuit becomes unnecessary, and the SW2 switching can be performed. Loss can be reduced.
[Brief description of the drawings]
FIG. 1 is a unit configuration diagram illustrating a first embodiment of the present invention.
FIG. 2 is a unit configuration diagram illustrating a second embodiment of the present invention.
FIG. 3 is a unit circuit configuration diagram of a conventional pulse power supply device.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Charging unit 2 ... Magnetic compression unit 3 ... Load unit L1 ... Reactor SW1, SW2, SW3 ... Semiconductor switch C0 ... Capacitor

Claims (2)

A charging unit that stores electromagnetic energy in a reactor by on-control of a semiconductor switch, and a magnet that charges a capacitor with electromagnetic energy of the reactor by off-control of the semiconductor switch and generates a pulse current that is compressed by magnetic pulses using the capacitor as a power source In a pulse power supply device comprising a compression unit and a load unit to which the pulse current is supplied,
The pulse power supply device according to claim 1, wherein the semiconductor switch is disposed in the magnetic compression unit and has an inter-unit separation structure in which the charging unit and the magnetic compression unit are line-connected. A charging unit that stores electromagnetic energy in a reactor by on-control of a semiconductor switch, and a magnet that charges a capacitor with electromagnetic energy of the reactor by off-control of the semiconductor switch and generates a pulse current that is compressed by magnetic pulses using the capacitor as a power source In a pulse power supply device comprising a compression unit and a load unit to which the pulse current is supplied,
The pulse power supply device according to claim 1, wherein the semiconductor switch and the capacitor are arranged in the charging unit, and an inter-unit separation structure is provided in which the charging unit and the magnetic compression unit are connected in a line.

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