JP3993136B2 - Optical switch device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an optical waveguide switching device used in an optical fiber exchange or an optical switch device used as a variable optical attenuator for appropriately attenuating optical input. More specifically, the present invention relates to a driving technique for a light reflecting member that switches a light emission position.
[0002]
[Prior art]
As an optical waveguide switching device used in an optical fiber switch, or an optical switch device used as a variable optical attenuator for appropriately attenuating optical input, an optical waveguide type device that utilizes refractive index fluctuations due to heat of the optical fiber, A MEMS (Micro Electro Mechanical System) type using a micro optical element and a micro actuator by a semiconductor process is known (for example, Patent Document 1).
[0003]
[Patent Document 1]
JP 2002-250874 A (page 3 to page 8, FIG. 1)
[0004]
[Problems to be solved by the invention]
However, an optical waveguide type optical waveguide switching device has a large optical loss due to coupling and branching of optical waveguide fibers. Further, in order to maintain the state after switching the optical waveguide, it is necessary to always supply power to the heater, and there is a problem that the life of the apparatus is relatively short. On the other hand, a MEMS type optical switch uses a semiconductor process, and therefore has a high manufacturing cost.
[0005]
Further, the applicant of the present application provides a plurality of movable bodies on which the light reflecting members are mounted. Suspension wire However, in this type of optical switch device, the movable body is displaced due to the influence of external vibrations. Easy to wake up.
[0006]
Therefore, we are studying a configuration that clamps the movable body at a predetermined position. When such a configuration is adopted, the movable body is clamped. Suspension wire Will be bent, Suspension wire There is a problem that the fatigue and deterioration of the steel are remarkable.
[0007]
In view of the above problems, an object of the present invention is to provide a plurality of movable bodies on which light reflecting members are mounted. Suspension wire And the movable body can be held at a predetermined position in an optical switch device of a type that supports the movable body by a magnetic drive circuit, and Suspension wire An object of the present invention is to provide a structure that can prevent fatigue and deterioration of the resin.
[0008]
[Means for Solving the Problems]
In order to solve the above-described problem, in the present invention, when the directions orthogonal to each other are set to the X direction, the Y direction, and the Z direction, respectively, the predetermined position that reflects light incident from the Z direction and is shifted in the X direction. A movable body on which a light reflecting member for emitting light in the Z direction is mounted The A stationary member that supports the movable body so as to be movable in the X direction and the Y direction; And a common input light guide path and a plurality of output light guide paths are arranged in the X direction at a position facing the light incident / exit surface of the light reflecting member. In an optical switch device, While having a magnetic drive circuit which drives the movable body in the X direction and the Y direction, the fixed side member supports the movable body movably in the X direction and the Y direction by a plurality of suspension wires, For the movable body, the movable body is In the X and Y directions When the movable body is driven, the movable body is released. When the movable body is driven to a predetermined position in the X direction, the movable body is pressed in the Y direction and pressed against the fixed member. And fixing the position of the light reflecting member A clamping mechanism is configured, and the movable body is applied with a position in the Y direction when the clamping body is pressed and fixed toward the fixed member by the clamping mechanism, and a thrust in the Y direction by the magnetic drive circuit. Absent Supported by the plurality of suspension wires in a state The position in the Y direction coincides with that at the time.
[0009]
In the present invention, in the initial state, the movable body is pressed and fixed to the fixed member by the clamp mechanism. When switching the light emission position, the clamp mechanism first releases the clamp on the movable body, and then After the magnetic drive circuit drives the movable body in the Y direction and floats from the fixed member, the magnetic drive circuit drives the movable body to a predetermined position in the X direction. When the movable body reaches a predetermined position in the X direction, the movable body is pressed and fixed to the stationary member by the clamp mechanism. Therefore, although the structure is relatively simple, the movable body does not shift in the X direction even when vibrations are transmitted from the outside, and the stability of the light emission position is high.
[0010]
In this embodiment, since the movable body is supported by a plurality of suspension wires, the position of the movable body is stable when the movable body is driven, so that the light reflecting member does not tilt.
[0011]
Furthermore, in the present invention, the position of the movable body in the Y direction when the movable body is pressed and fixed to the fixed side member coincides with the position in the Y direction when the thrust in the Y direction is not applied by the magnetic drive circuit. Therefore, no stress in the Y direction is applied to the suspension wire in a state where the movable body is pressed and fixed to the fixed member. Therefore, fatigue of the suspension wire can be reduced and the life of the suspension wire can be extended.
[0012]
In the present invention, the clamp mechanism generates a pressing portion for pressing the movable body toward the fixed-side member, and an urging force that the pressing portion presses and fixes the movable body toward the fixed-side member. It is preferable that a spring member to be moved and a solenoid that separates the pressing portion from the movable body against an urging force of the spring member. If comprised in this way, after switching the emission position of light, the electric power supply for the position holding is unnecessary. Therefore, power consumption in the optical switch device can be reduced.
[0013]
In the present invention, in the movable body and the fixed-side member, a movement path in the X direction of the movable body and a fixed region of the fixed-side member to which the movable body is pressed and fixed by the clamp mechanism are parallel. It is preferable. If comprised in this way, since a movable body is driven with the same attitude | position as a clamp attitude | position, after driving to a X direction, it clamps smoothly with an attitude | position as it is.
[0014]
In this invention, it is preferable that the support center position of the said movable body by the said suspension wire and the gravity center position of the said whole movable body correspond. With this configuration, the suspension wire can support the movable body in a stable posture, and can suppress vibration of the movable body when driving and stopping the movable body.
[0015]
In the present invention, it is preferable that the center position of the thrust in the X direction applied to the movable body by the magnetic drive circuit coincides with the position of the center of gravity of the entire movable body. If comprised in this way, when driving a movable body, the attitude | position can be hold | maintained in the more stable state, and when driving a movable body and stopping it, the vibration of a movable body can be suppressed.
[0016]
In the present invention, there is provided posture adjusting means for preventing the movable body from being tilted between when the movable body is driven by the magnetic drive circuit and when the movable body is clamped by the clamp mechanism. Is preferred. When configured in this way, after driving the movable body, when clamping the movable body to the stationary member, and after releasing the clamped state of the movable body to the stationary member, both when driving the movable body, The posture of the movable body can be kept constant. Therefore, since the light reflecting member does not tilt, the accuracy of the light emission position is high.
[0017]
In the present invention, the light reflecting member includes an inclined surface in which light enters and exits from the Z direction, a first reflecting surface that reflects light incident from the inclined surface in the X direction, and an orthogonal to the first reflecting surface. Preferably, the prism is a right-angle prism having a second reflecting surface that reflects light reflected from the first reflecting surface toward the slope. If such a right-angle prism mirror is employed, the incident optical axis and the outgoing optical axis can be set in parallel, so that the layout of the incident-side optical waveguide and the outgoing-side optical waveguide is easy. Further, by using a general optical member such as a right-angle prism mirror, the cost of the optical switch device can be reduced.
[0018]
When the optical switch device according to the present invention is used in an optical waveguide switching device used in an optical fiber switch, a common input light guide path at a position facing the light incident / exit surface of the light reflecting member, and A plurality of output light guides are arranged in the X direction. In this case, the pitch of the unevenness is, for example, 125 μm.
[0019]
When the optical switch device according to the present invention is used as a variable optical attenuator for appropriately attenuating light input, the light guide for input and the light output for output are provided at positions facing the light incident / exit surface of the light reflecting member. The light guide and the monitor light guide are arranged in the X direction. In this case, the pitch of the unevenness is, for example, 1 μm. With this configuration, if the position of the movable body is controlled while monitoring the output light via the monitor light guide, it is possible to guide a predetermined amount of output light to the output light guide.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described with reference to the drawings.
[0021]
[Embodiment 1]
(Basic principle of optical waveguide switching device)
FIG. 1 is an explanatory view schematically showing the basic principle of the optical waveguide switching device according to Embodiment 1 of the present invention. In the following description, directions orthogonal to each other will be described as an X direction, a Y direction, and a Z direction, respectively.
[0022]
In FIG. 1, an optical waveguide switching device 1 (optical switch device) according to the present embodiment includes one input side optical fiber 20 extending in the Z direction and eight output side optical fibers 21 arranged in parallel along the X direction. This is an 8-channel optical waveguide switching device that can guide light output from the input-side optical fiber 20 to one of the eight output-side optical fibers 21. Here, in the optical fiber array 3 composed of the input side optical fiber 20 and the output side optical fiber 21, the optical fibers are arranged at equal intervals at a pitch of 250 nm in the X direction.
[0023]
In the optical waveguide switching device 1 of this embodiment, a prism driven in the X direction is used as a light reflecting member for reflecting the light incident from the Z direction and emitting it from a predetermined position shifted in the X direction toward the Z direction. A mirror 10 is used. The prism mirror 10 includes an inclined surface 101 where light enters and exits from the Z direction, a first reflecting surface 102 that reflects light incident from the inclined surface 101 in the X direction, and an orthogonal to the first reflecting surface 102. , A right-angle prism having a second reflecting surface 103 that reflects light reflected from the first reflecting surface 101 toward the inclined surface 101, and the inclined surface 101 (opening side) faces the optical fiber array 3. ing. The light emitted from the input side optical fiber 20 is collimated by the collimating lens 22 before entering the prism mirror 10. Although not shown, a collimator lens may be disposed between the eight output optical fibers 21 and the inclined surface 101 of the prism mirror 10.
[0024]
In the optical waveguide switching device 1 configured as described above, for example, it is assumed that the prism mirror 10 is fixed at a position indicated by a solid line. In this state, the light emitted from the input side optical fiber 20 enters the prism mirror 10, and the path of the optical path L1 that reflects the first slope 102 and the second slope 102 in the prism mirror 10 at 90 degrees, respectively. , And is guided to the output-side optical fiber 21a at the rightmost end of the output-side optical fiber 21.
[0025]
Next, when the output side optical waveguide is switched from the output side optical fiber 21a to the output side optical fiber 21f located at the sixth position from the right side, the prism mirror 10 is driven in the X direction and moved to the position indicated by the dotted line. Let When the prism mirror 10 is moved in this way, the reflection position of the light emitted from the input-side optical fiber 20 on the first inclined surface 102 in the prism mirror 10 moves, and follows the optical path L2, and the output-side optical fiber. It will be guided to 21f.
[0026]
Here, in the optical fiber array 3, the input side optical fiber 20 and the output side optical fiber 21 are arranged at a pitch of 250 μm, so that the prism mirror 10 has the input side optical fiber 20 and the output side optical fiber 21. It is moved in the X direction in units of 125 μm corresponding to 1/2 the pitch.
[0027]
(Configuration of optical waveguide switching device)
FIG. 2 is a perspective view of the optical waveguide switching device 1 according to Embodiment 1 of the present invention as viewed obliquely from the rear. FIG. 3 is a perspective view of a main part of the optical waveguide switching device 1 shown in FIG.
[0028]
The optical waveguide switching device 1 of the present embodiment includes a movable body 2 on which a prism mirror 10 is mounted with the inclined surface 101 facing in the Z direction, and a fixed side member 13 that supports the movable body 2 so as to be movable in the X direction and the Y direction. And have.
[0029]
In addition to the prism mirror 10, one movable driving coil 5 for driving in the Y direction and a pair of left and right driving coils 6 for driving in the X direction are mounted on the movable body 2. On the other hand, the fixed side member 13 is mounted with a support base 12, a drive magnet 7 for driving in the Y direction, a pair of left and right drive magnets 8 for driving in the X direction, and a yoke 9. , Located inside the drive coil 5. Further, the drive magnet 8 faces the drive coil 6.
[0030]
From the support base 12, two left and right suspension wires 4 that support the movable body 2 from both sides in the X direction in a cantilever state extend horizontally in the Z direction. Note that a control circuit (not shown) for the drive coils 5 and 6 mounted on the movable body 2 is disposed on the support member 12 side, and power is supplied to the drive coils 5 and 6 mounted on the movable body 2 by the wire 4. Is performed as a power supply line.
[0031]
Here, the center position of the support position of the movable body 2 (the tip portion of the suspension wire 4) of the four suspension wires 4 and the center of gravity position of the entire movable body 2 are respectively in the X direction, the Y direction, and the Z direction. It is almost coincident. That is, the support position of the movable body 2 of the four suspension wires 4 is the center position in the X direction, the center position in the Y direction, and the center position in the X direction are the positions in the X direction of the center of gravity of the entire movable body 2. The position in the Y direction and the position in the Z direction substantially coincide with each other.
[0032]
The drive magnet 7 generates a magnetic flux interlinking with the drive coil 5 mounted on the movable body 2 and is paired with the drive coil 5 to drive the movable body 2 in the Y direction. Is configured. Therefore, by supplying power to the drive coil 5, thrust in the Y direction is applied to the movable body 2. Further, the drive magnet 8 generates a magnetic flux interlinking with the drive coil 6 mounted on the movable body 2 and is paired with the drive coil 6 to drive the movable body 2 in the X direction. The circuit is configured. Therefore, by supplying power to the drive coil 6, thrust in the X direction is applied to the movable body 2.
[0033]
Here, the driving coil 6 is symmetrical with respect to the movable body 2 in the X direction at the center position in the Y direction (thickness direction) of the movable body 2 and the central position in the Z direction (length direction) of the movable body 2. It is fixed at the position. For this reason, the center of the thrust in the X direction applied to the movable body 2 by the magnetic drive circuit substantially coincides with the position of the center of gravity of the entire movable body 2.
[0034]
The driving coil 5 is fixed to the center position in the Y direction (thickness direction) and the X direction (width direction) of the movable body 2, but in the Z direction (length direction) of the movable body 2. It is located slightly behind. Accordingly, the movable body 2 is moved by the magnetic drive circuit by a method such as shifting the mounting position of the driving coil 5 with respect to the movable body 2 in the Z direction or mounting a weight or the like on the movable body 2 to shift the center of gravity position in the Z direction. The center of thrust in the Y direction applied to 2 can also be made substantially coincident with the position of the center of gravity of the entire movable body 2.
[0035]
The movable body 2 includes a prism mirror mounting portion 11 on which a prism mirror 10 is mounted in front and a frame portion 16 on which driving coils 5 and 6 are mounted. Here, the optical fiber array 3 described with reference to FIG. 1 is arranged further in front of the prism mirror mounting portion 11, and the input side optical fibers 20 of the optical fiber array 3 are shown in FIGS. 2 and 3. The optical axes of the light emitted from the optical fiber and the light emitted from the optical fiber array 3 to the output side optical fiber 20 are indicated by an optical axis Lin and an optical axis Lout.
[0036]
In the optical waveguide switching device 1 configured as described above, a clamp mechanism 40 that presses the movable body 2 downward in the Y direction and presses and fixes the movable body 2 to the fixed side member 13 is configured on the Z direction side with respect to the movable body 2. ing.
[0037]
The clamp mechanism 40 includes a metal clamp plate 41, swing fulcrums 42 and 43 that support the clamp plate 41 so as to swing, and a tip portion of the clamp plate 41 on the upper surface of the prism mirror mounting portion 11 of the movable body 2. A leaf spring 47 that exerts an urging force to be pressed against 11b, and two solenoids 45 and 46 disposed on the opposite side of the movable body 2 with the swing fulcrum 42 interposed therebetween. The solenoids 45 and 46 are all upright from the fixed-side member 13. A hemispherical protrusion 44 (pressing portion) that abuts on the upper surface 11 b of the prism mirror mounting portion 11 is formed on the lower surface of the tip portion of the clamp plate 41.
[0038]
Further, in the present embodiment, in the movable body 2, the V-shaped grooves 30 are continuously formed at a constant pitch over the entire range in the X direction on the lower surface 11 a facing the fixed side member 13 of the prism mirror mounting portion 11. ing. Therefore, on the lower surface side of the movable body 2, concave portions with V-shaped cross sections and convex portions with V-shaped cross sections are formed alternately. In this embodiment, since the pitch of the optical fiber array 3 is 250 μm, the pitch of the V-shaped grooves 30 is 125 μm correspondingly.
[0039]
On the other hand, in the fixed side member 13, a fixed portion 15 having a dimension longer in the X direction than the lower surface 11 a is formed at a position facing the lower surface 11 a of the prism mirror mounting portion 11 of the movable body 2. A V-shaped groove 31 (unevenness) that meshes with a V-shaped groove 30 (unevenness) formed on the lower surface 11 a of the movable body 2 is continuously formed on the upper surface 15 a of the movable body 2. Therefore, the fixed-side member 13 is alternately formed with a V-shaped concave section and a V-shaped convex section. The pitch of the V-shaped grooves 31 is also 125 μm.
[0040]
Here, the moving path of the movable body 2 in the X direction, the lower surface 11a of the prism mirror mounting portion 11, and the upper surface 15a of the fixed portion 15 formed on the fixed side member 13 are formed in parallel to each other.
[0041]
In the optical waveguide switching device 1 configured as described above, since the power supply to the solenoids 45 and 46 is stopped in the clamp mechanism 40 in a state where the switching of the optical waveguide is completed, the movable body 2 is moved by the clamp plate 41. In this state, the suspension wire 4 is in a state in which no stress is applied in the Y direction, and all of the four suspension wires 4 extend straight in parallel.
[0042]
[Description of optical waveguide switching operation]
With reference to FIG. 4, the operation | movement which switches an optical waveguide with the optical waveguide switching apparatus 1 of this form is demonstrated.
[0043]
FIG. 4 is an explanatory diagram showing the positional relationship between the movable body 2 and the fixed member 13 when performing the operation of switching the optical waveguide in the optical waveguide switching device 1.
[0044]
As shown in FIG. 4A, in the initial fixed position, the movable body 2 is pressed and fixed to the fixed side member 13 by the clamp plate 41, and the upper and lower V-shaped grooves 30, 31 are engaged. is there.
[0045]
In order to perform the operation of switching the optical waveguide from this state, as shown in FIG. 4 (b), first, power is supplied to the solenoids 45, 46, against the urging force of the leaf spring 47, The tip end side is lifted, and the restraint state of the movable body 2 is released. Next, power is supplied to the drive coil 5, the movable body 2 is moved upward in the Y direction, and the movable body 2 is floated from the fixed side member 13.
[0046]
Next, power is supplied to the drive coil 6 and the movable body 2 is moved in the X direction as shown in FIG. Then, when the movable body 2 has moved to a desired position in the X direction, as shown in FIG. 4D, the power supply to the drive coil 5 is stopped, and the movable body 2 is moved by the elastic return force of the suspension wire 4. Is sunk downward in the Y direction.
[0047]
Next, power supply to the solenoids 45 and 46 is stopped. As a result, as shown in FIG. 4 (d), the clamp plate 41 presses the movable body 2 downward in the Y direction and presses and fixes it to the fixed member 13. At this time, the V-shaped groove 30 formed in the movable body 2 and the V-shaped groove 31 formed in the stationary member 13 are engaged with each other, and the movable body 2 is positioned in the X direction.
[0048]
Thereafter, power supply to the drive coil 6 is stopped. Thereby, the switching operation of the optical waveguide is completed. Accordingly, the light incident on the prism mirror 10 from the incident side optical fiber 20 is emitted to the predetermined output side optical fiber 21 via the prism mirror 10.
[0049]
(Effect of this embodiment)
As described above, in the optical waveguide switching device 1, the magnetic drive actuator used in the optical head device or the like is used as the actuator for driving the prism mirror 10 in the X direction, and the prism mirror 10 is moved in the X direction by this actuator. To a predetermined position. In addition, the movable body 2 is pressed and fixed to the stationary member 13 by the clamp mechanism 40 at a predetermined position in the X direction. Therefore, since the movable body 2 is reliably positioned at a predetermined position in the X direction, the movable body 2 is not displaced in the X direction even when vibrations are transmitted from the outside, and the light emission position is stable. Is expensive. Further, in a state where the movable body 2 is pressed and fixed to the fixed side member 13 by the clamp mechanism 40, the V-shaped grooves 30 and 31 formed at a predetermined pitch mesh with each of the movable body 2 and the fixed side member 13. Therefore, the movable body 2 is reliably positioned at a predetermined position in the X direction. Moreover, since the V-shaped grooves 30 and 31 are used for positioning the movable body 2 in the X direction, even if there is an error in the stop position of the movable body 2 as shown in FIGS. At the stage where the movable body 2 is fixed to the fixed side member 13, the error is corrected, and the incident light can be reliably guided to a predetermined output side optical fiber.
[0050]
Further, since the prism mirror 10 made of a right-angle prism is used as the light reflecting member for switching the optical path, the incident optical axis and the outgoing optical axis can be set in parallel. Therefore, the layout of the optical waveguide on the incident side and the optical waveguide on the outgoing side is easy. In addition, since a general optical member such as the prism mirror 10 is used, the cost of the optical waveguide switching device 1 can be reduced.
[0051]
Furthermore, in a state in which the movable body 2 is pressed and fixed to the stationary member 13 by the clamp mechanism 40, the suspension wire 4 is in a state of being straightly stretched without being stressed in the Y direction. For this reason, since the suspension wire 4 is less fatigued, the reliability of the optical waveguide switching device 1 can be improved, for example, the deterioration of the suspension wire 4 can be prevented.
[0052]
In addition, the movable body 2 is pressed and fixed to the stationary member 13 by the clamp member 41 that receives the urging force of the leaf spring 47, and during that time, power supply to the drive coils 5 and 6 and power supply to the solenoids 45 and 46 are stopped. Is done. Therefore, since it is not necessary to always supply power to the drive coils 5 and 6 and the solenoids 45 and 46, the power consumption of the optical waveguide switching device 1 can be reduced.
[0053]
The moving path of the movable body 2 in the X direction, the lower surface 11a of the prism mirror mounting portion 11, and the upper surface 15a of the fixed portion 15 formed on the fixed side member 13 are parallel to each other. Therefore, since the movable body 2 is driven in the same posture as the clamping posture, after being driven in the X direction, the movable body 2 is smoothly clamped in the same posture. Therefore, the optical waveguide switching operation of the optical waveguide switching device 1 is stabilized.
[0054]
Further, the center position of the support position of the movable body 2 (the tip portion of the suspension wire 4) of the four suspension wires 4 and the position of the center of gravity of the entire movable body 2 substantially coincide with each other. Further, the center of thrust in the X direction applied to the movable body 2 by the magnetic drive circuit substantially coincides with the position of the center of gravity of the entire movable body 2. Therefore, when the movable body 2 is moved in the X direction or stopped, the vertical and horizontal shakes of the movable body 2 can be reduced. Therefore, the optical waveguide switching operation of the optical waveguide switching device 1 is stable.
[0055]
[Embodiment 2]
The first embodiment is an example in which the present invention is applied to an optical waveguide switching device among various optical switches. However, the present invention may be applied to a variable optical attenuator. In this case, the configuration of the magnetic drive circuit, the clamp mechanism, and the like for the prism mirror 10 is the same as that of the first embodiment, and therefore, detailed description of common parts is omitted.
[0056]
FIG. 5 is an explanatory diagram schematically showing the basic principle of a variable optical attenuator to which the present invention is applied. In FIG. 5, the variable optical attenuator 100 of this embodiment is configured to appropriately attenuate the light incident on the variable optical attenuator 100 from one input side optical fiber 200 and output the light to the output side optical fiber 210. . In order to set the light output to the output side optical fiber 210 to a desired value, a monitoring optical fiber 230 for monitoring a part of the output light is provided. Further, a control circuit (not shown) for feedback-controlling the stop position of the prism mirror 10 based on the value of light incident on the monitor optical fiber 230 is provided.
[0057]
The variable optical attenuator 100 includes a right-angle prism mirror 10 that can move in the X direction. The light emitted from the input-side optical fiber 200 is collimated by the collimating lens 22 before entering the prism mirror 10.
[0058]
In the initial state, it is assumed that the prism mirror 10 is fixed at a position represented by a solid line. In this state, the light emitted from the input-side optical fiber 200 follows the optical paths reflected at 90 degrees on the first inclined surface 102 and the second inclined surface 103 in the prism mirror 10 with a constant width, and the inclined surface 101. The light beam L10 is emitted from At this time, the emitted light is incident on both the output-side optical fiber 210 and the monitoring optical fiber 230. Therefore, if the light emitted from the prism mirror 10 is monitored via the monitoring optical fiber 230, and the prism mirror 10 is moved in the X direction based on the monitoring result, the light is guided to the output side optical fiber 210. Light can be controlled to a predetermined attenuation rate.
[0059]
For example, when the prism mirror 10 is at the position indicated by the solid line, if the prism mirror 10 is moved to the position indicated by the dotted line in the X direction based on the monitoring result via the monitoring optical fiber 230, Therefore, the light beam L20 is emitted from the inclined surface 101. Therefore, the amount of light incident on the output side optical fiber 210 can be reduced.
[0060]
Here, in the variable optical attenuator 100, it is necessary to finely control the movement pitch of the prism mirror 10 in order to appropriately attenuate and output the input light. Therefore, the pitch in the X direction of the V-shaped grooves 30 and 31 formed in the movable body 2 and the stationary member 13 shown in FIGS. 2 and 3 is set to 1 μm.
[0061]
[Other embodiments]
In the above embodiment, continuous V-shaped grooves 30 and 31 are formed on the movable body 2 and the fixed-side member 13 as irregularities for positioning the movable body 2 in the X direction. The side member 13 has a V-shaped concave section and a V-shaped convex section on both sides. For example, as shown in FIG. While forming at a predetermined pitch, the V-shaped recess 31 ′ may be formed at a predetermined pitch with respect to the stationary member 13. Although not shown, contrary to FIG. 6A, a V-shaped concave section is formed in the movable body 2 at a predetermined pitch, while a V-shaped convex section is formed in the fixed member 13. The portions may be formed at a predetermined pitch.
[0062]
Further, as shown in FIG. 6B, convex portions 30 ″ having a circular cross section are formed at a predetermined pitch with respect to the movable body 2, while concave portions 31 ″ having a circular cross section are formed at a predetermined pitch with respect to the fixed side member 13. May be formed. Although not shown, contrary to FIG. 6 (b), a concave portion having a circular cross section is formed at a predetermined pitch on the movable body 2, while a convex portion having a circular cross section is formed on the fixed member 13. You may form with a predetermined pitch.
[0063]
Furthermore, in the said form, although the clamp mechanism 40 was comprised on the light incident / exit side with respect to the movable body 2, as shown in FIG. If arranged on the opposite side, there is an advantage that the layout of the fiber array 3 becomes easy.
[0064]
Furthermore, as a spring member for pressing and fixing the movable body 2 against the stationary member 13, in the above embodiment, the leaf spring 47 is arranged at the tip of the clamp plate 41. As such a spring member, a leaf spring is used. Not only 47 but a coil spring may be used. Moreover, you may comprise the clamp board 41 itself with a leaf | plate spring.
[0065]
Moreover, in the said embodiment, you may arrange | position the coil spring etc. which receive the lower surface of the movable body 2 as an attitude | position adjustment means in the area | region where the movable body 2 sinks among the upper surfaces of the stationary side member 13. With this configuration, the movable body 2 can be prevented from being tilted between when the movable body 2 is driven by the magnetic drive circuit and when the movable body 2 is clamped by the clamp mechanism 40.
[Brief description of the drawings]
FIG. 1 is a diagram schematically showing the principle of an optical waveguide switching device to which the present invention is applied.
FIG. 2 is a perspective view of the optical waveguide switching device according to the first embodiment of the present invention as viewed obliquely from the rear.
FIG. 3 is a perspective view of a main part of the optical waveguide switching device shown in FIG. 2 as viewed obliquely from the front.
FIGS. 4 (a), (b), (c), (d), and (e) are respectively used when an optical waveguide switching operation is performed in the optical waveguide switching device according to the first embodiment of the present invention. It is explanatory drawing which shows the positional relationship etc. of a movable body and a stationary side member.
FIG. 5 is a perspective view schematically showing the principle of a variable optical attenuator to which the present invention is applied.
6A and 6B are explanatory diagrams of unevenness that can be used for positioning the movable body in the X direction in the optical switch device to which the present invention is applied. FIG.
FIG. 7 is a perspective view of another optical waveguide switching device to which the present invention is applied as viewed obliquely from the rear.
[Explanation of symbols]
1. Optical waveguide switching device (optical switch device)
2 Movable body
3 Optical fiber array
4 wires
5, 6 Driving coil
7, 8 Drive magnet
10 Prism mirror
13 Fixed member
20 Input side optical fiber
21 Output side optical fiber
30, 31 V-shaped groove (unevenness)
40 Clamp mechanism
41 Clamp plate
45, 46 Solenoid
44 Protrusion (pressing part)
100 Variable optical attenuator (optical switch device)
200 Input side optical fiber
210 Output side optical fiber
230 Optical fiber for monitoring

Claims (9)

When the directions perpendicular to each other are the X direction, the Y direction, and the Z direction,
A movable body which the light reflecting member for emitting toward the Z-direction is mounted from the predetermined position shifted in the X direction by reflecting the light incident from the Z-direction, moving the movable member in the X and Y directions And a common input light guide path and a plurality of output light guide paths arranged in the X direction at positions facing the light incident / exit surface of the light reflecting member. In an optical switch device,
While having a magnetic drive circuit which drives the movable body in the X direction and the Y direction, the fixed side member supports the movable body movably in the X direction and the Y direction by a plurality of suspension wires,
For the movable body, the movable body is released when the movable body is driven in the X and Y directions, and the movable body is moved in the Y direction when the movable body is driven to a predetermined position in the X direction. A clamp mechanism configured to press and fix to the fixed side member and fix the position of the light reflecting member , and
The movable body includes the plurality of suspension wires in a state where the position in the Y direction when being pressed and fixed toward the fixed member by the clamp mechanism and the thrust in the Y direction by the magnetic drive circuit are not applied. The optical switch device is characterized in that the position in the Y-direction when being supported by the head is the same .   The clamp mechanism according to claim 1, wherein the clamp mechanism has a pressing portion for pressing the movable body toward the fixed-side member, and an urging force by which the pressing portion presses and fixes the movable body toward the fixed-side member. An optical switch device comprising: a spring member to be generated; and a solenoid that separates the pressing portion from the movable body against a biasing force of the spring member. In Claim 1 or 2 , in the movable body and the fixed side member, a movement path in the X direction of the movable body and a fixed region of the fixed side member to which the movable body is pressed and fixed by the clamp mechanism. An optical switch device characterized by being parallel.   4. The optical switch device according to claim 1, wherein a support center position of the movable body by the suspension wire coincides with a center of gravity position of the entire movable body.   5. The optical switch according to claim 1, wherein a center position of thrust in the X direction applied to the movable body by the magnetic drive circuit coincides with a center of gravity position of the entire movable body. apparatus.   6. The posture adjusting means for preventing inclination of the movable body between the time when the movable body is driven by the magnetic drive circuit and the time when the movable body is clamped by the clamp mechanism. An optical switch device comprising:   7. The light reflecting member according to claim 1, wherein the light reflecting member includes a slope on which light enters and exits from the Z direction, a first reflecting surface that reflects light incident from the slope in the X direction, and the first reflecting surface. An optical switch device comprising: a right-angle prism having a second reflecting surface which is orthogonal to the reflecting surface and reflects light reflected from the first reflecting surface toward the inclined surface. 8. The optical switch device according to claim 1, wherein a pitch of the unevenness is 125 μm . 8. The optical switch device according to claim 1, wherein the uneven pitch is 1 [mu] m .

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