JP3999986B2 - Cleaning device, cleaning method, and manufacturing method of liquid crystal display device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
In the manufacturing process of a high-brightness, high-definition, thin and lightweight liquid crystal display device, the present invention forms an alignment film on a substrate surface with a polymer material such as polyimide resin, and then weaves conductive rayon yarn and the like. The present invention relates to a cleaning apparatus and a cleaning method for performing a rubbing treatment with a rubbing cloth, which is a buff material made in this manner, and cleaning the liquid crystal panel member.
[0002]
Furthermore, the present invention provides a method for producing a liquid crystal display device in which an alignment marker for bonding positioning provided on a non-display area of a substrate for a liquid crystal panel member is washed, whereby a liquid crystal panel member is attached with high accuracy. It is about.
[0003]
[Prior art]
When manufacturing a liquid crystal display (LCD), first, a transparent electrode made of a large number of indium tin oxide or indium tin oxide compound (ITO) arranged in parallel on one glass substrate and silicon dioxide (SiO 2).₂And an overcoat layer which is a thin film having an insulating property.
[0004]
Further, on the other glass substrate, a color filter in which each color of red, green, and blue is arranged for each pixel and a light shielding film in which a black resist of chromium metal or a photosensitive resist is arranged between the color filters, Further, a plurality of transparent electrodes made of ITO arranged in parallel are sequentially formed.
[0005]
Next, an alignment film, which is a thin film having orientation properties such as polyimide resin, is formed so as to cover both transparent electrodes, and then the rubbing treatment is performed by rubbing this film surface in a predetermined direction as a rubbing cloth. Is going.
[0006]
However, in this rubbing treatment step, scraping occurs to rub the alignment film, which is a resin material, and for this reason, the surface of the liquid crystal panel member is subjected to a cleaning treatment.
[0007]
In such a cleaning process, it is important to perform cleaning so that the alignment characteristics generated in the alignment film are not changed by the rubbing process. For this purpose, a solvent such as isopropyl alcohol (IPA) or Freon and pure water are used. Then, the substrate was cleaned and dried.
[0008]
By the way, after such a rubbing process or a substrate cleaning process, there is a step of bonding a pair of liquid crystal panel members. For this purpose, both the liquid crystal panel members are bonded and positioned on the non-display area of the substrate. The alignment marker is provided.
[0009]
That is, a male alignment marker formed of ITO or the like is formed on one substrate, a female alignment marker formed of ITO or the like is formed on the other substrate, and the barycentric coordinates of the alignment marker are formed by image recognition processing. Then, the two substrates were bonded together with a sealing material through a liquid crystal layer.
[0010]
[Problems to be solved by the invention]
However, in the conventional technology, for example, the substrate surface is cleaned with IPA while improving the wettability of the substrate surface, and the substrate surface is replaced with pure water, and then ultrasonic (Ultrasonic US) or A rubbing process is performed even if a minute foreign matter on the order of μm adhered to the substrate surface is removed using high-frequency ultrasonic waves (megasonic MS), and then a drying process is performed to remove moisture on the substrate surface. The alignment marker adhering to the surface could not be completely removed.
[0011]
Therefore, using the image processing technique, according to the STN type liquid crystal display device, the center-of-gravity coordinates of the alignment markers of each of the two types of liquid crystal panel members, ie, the signal side substrate and the scanning side substrate are precisely determined. Even if detection and alignment are performed, the image recognition algorithm recognizes dirt adhering to the alignment marker as a part of the alignment marker. Therefore, it is recognized that the width is larger than the actual pattern width, and the calculated barycentric coordinates of the pattern are different from the actual barycentric coordinates. As a result, there was a problem that the bonding accuracy in the bonding process did not reach the target value of 5 μm or less, for example.
[0012]
In order to solve this problem, according to Japanese Patent Laid-Open No. 7-77777, there is a technique for removing foreign matter adhering to the substrate surface after the rubbing process by supplying pure water in a curtain-like manner to the substrate surface. Proposed.
[0013]
However, even if pure water is flowed down to the substrate surface in the form of a curtain to improve the cleaning performance, it is difficult to completely remove the alignment marker dirt adhered in the rubbing process. The problem that the bonding accuracy does not reach the target value of 5 μm or less still remained unsolved.
[0014]
Therefore, the present invention has been completed in view of the above description, and the purpose thereof is to more effectively remove dirt adhering to the alignment marker for bonding positioning provided on the non-display area of the liquid crystal panel member. An object of the present invention is to provide a cleaning device and a cleaning method that can be removed.
[0015]
Another object of the present invention is to provide a method of manufacturing a liquid crystal display device in which an alignment marker for bonding positioning is washed and a liquid crystal panel member is bonded with high accuracy.
[0016]
[Means for Solving the Problems]
  The cleaning apparatus of the present invention has an electrode on a substrate.And arrangementAnd forming the counter membrane sequentiallyBecomeIndicated AreaoutsideCleaning the liquid crystal panel member provided with alignment markers for bonding and positioning on the non-display areaForAn alcohol cleaning chamber for cleaning the liquid crystal panel member with an alcohol liquid;AAlignment markerIncluding the part provided withOnly in hidden areaApply brush cleaning processA brush cleaning room,Through the brush cleaning chamberA pure water cleaning chamber for cleaning liquid crystal panel members with pure water solution;IncludingIt is characterized by becoming.In this cleaning apparatus, the region where the brush cleaning process is performed in the brush cleaning chamber is preferably a region parallel to the transport direction of the liquid crystal panel member in the brush cleaning chamber. In this cleaning apparatus, the alignment marker is preferably cross-shaped.
[0017]
  The cleaning method of the present invention comprises an electrode on a substrate.And arrangementAnd forming the counter membrane sequentiallyBecomeIndicated AreaoutsideLiquid crystal panel member provided with alignment markers for positioning in a non-display areaTheWashforAn alcohol washing step of washing the liquid crystal panel member with an alcohol liquid;SaidAlignment markerIncluding the part provided withOnly in hidden areaApply brush cleaning processBrush cleaning process;The above-mentioned brush cleaning processA pure water cleaning process for cleaning liquid crystal panel members with pure water;IncludingIt is characterized by becoming.In this cleaning method, the region where the brush cleaning process is performed in the brush cleaning step is preferably a region which is parallel to the transport direction of the liquid crystal panel member in the brush cleaning step. In this cleaning method, the alignment marker is preferably a cross shape.
[0018]
  The manufacturing method of the liquid crystal display device according to the present invention is such that an electrode and an alignment film are sequentially formed on a substrate.BecomeIndicated AreaoutsideLiquid crystal panel member provided with alignment markers for positioning in a non-display areaincludingTwo types of liquid crystal panel members are bonded together via a liquid crystal layerA manufacturing method comprising:LCD panel materialsSaidRubbing the alignment filmThe first step, andAlignment markerIncluding the part provided withOnly in hidden areaThe second step for performing the brush cleaning process and the second step.Cleaning the liquid crystal panel memberA third step, the first step, the second step, and the third step;Passed through the processSaidTwo types of liquid crystal panel membersSaidAlignment with reference to alignment markerTheAnd pasteAnd a fourth step..In this manufacturing method, it is preferable that the region where the brush cleaning process is performed in the second step is a region which is parallel to the transport direction of the liquid crystal panel member in the second step. In this production method, the alignment marker is preferably a cross shape.
[0019]
DETAILED DESCRIPTION OF THE INVENTION
(Liquid crystal display device)
First, an example of a liquid crystal display device used in the cleaning apparatus and the cleaning method of the present invention will be described in detail with reference to the drawings.
[0020]
FIG. 1 is an enlarged cross-sectional view of a main part of a STN type simple matrix type color liquid crystal display device.
[0021]
In the color liquid crystal display device of FIG. 1, 1 is a signal side glass substrate, and 2 is a scanning side glass substrate.
[0022]
According to one liquid crystal panel member, a transparent electrode 3 made of a large number of ITO arranged in parallel on the glass substrate 1 and SiO 2₂An overcoat layer 4 which is a thin film having an insulating property and an alignment film 5 which is a thin film having an alignment property such as a polyimide resin subjected to an alignment treatment in one direction are sequentially formed.
[0023]
According to the other liquid crystal panel member, a color filter 6 in which red, green, and blue are arranged for each pixel on the glass substrate 2 and a black resist 7 of chromium metal or a photosensitive resist is arranged between the color filters 6. A light shielding film is formed.
[0024]
The color filter 6 is formed by a pigment dispersion method, that is, a photosensitive resist previously prepared with a pigment is applied onto a substrate and is formed by photolithography. In the figure, each of R, G, and B indicates a photosensitive resist colored in red, green, and blue, respectively.
[0025]
An overcoat layer 8 as a surface protective layer made of an acrylic resin or the like on the color filter 6 and the black resist 7, and a transparent electrode 9 made of a large number of ITOs arranged orthogonal to and parallel to the transparent electrode 3. And an alignment film 10 which is a thin film having an alignment property such as a polyimide resin subjected to an alignment process in one direction.
[0026]
Then, one liquid crystal panel member and the other liquid crystal panel member are bonded to each other by a sealing material 12 via a liquid crystal layer 11 made of chiral nematic liquid crystal twisted at an angle of 250 °, for example.
[0027]
Further, a large number of spacers 17 made of plastic or the like are provided between the panel members in order to keep the thickness of the liquid crystal layer 11 constant.
[0028]
In the liquid crystal display device of this example, the overcoat layers 4 and 8 are provided.
[0029]
In addition, a retardation plate 13 and a polarizing plate 14 are sequentially provided on the outside of the glass substrate 1, and a retardation plate 15 and a polarizing plate 16 are sequentially provided on the other glass substrate 2.
[0030]
(Cleaning device and cleaning method)
FIG. 3 shows an outline of the cleaning apparatus of the present invention.
The basic apparatus configuration relates to the above-described liquid crystal display device, in order to clean the liquid crystal panel member provided with the alignment marker for bonding and positioning on the non-display area of the substrate, the alcohol cleaning chamber, and the brush cleaning The alcohol cleaning chamber and the brush cleaning chamber are shared by the pretreatment and brush cleaning chamber 1. A cleaning liquid replacement chamber 2, which is a pure water cleaning chamber, is connected to the pretreatment / brush cleaning chamber 1.
[0031]
In practice, as shown in FIG. 3, a pretreatment and brush cleaning chamber 1, a cleaning liquid replacement chamber 2, an ultrasonic cleaning chamber 3, and a draining and drying chamber 4 are sequentially connected.
[0032]
Furthermore, the transport rollers 5 for transporting the substrate S, which is a liquid crystal panel member, are arranged in a row in each chamber.
[0033]
And the washing | cleaning of this invention is achieved by passing through the said alcohol washing | cleaning process, a brush washing | cleaning process, and a pure water washing | cleaning process sequentially using the washing | cleaning apparatus of the said structure.
[0034]
Hereafter, each process is demonstrated with the washing | cleaning apparatus shown in FIG.
[0035]
Alcohol cleaning process:
In the pretreatment and brush cleaning chamber 1, an IPA shower head 6 is disposed above the substrate S to be transferred.
[0036]
This IPA shower head 6 is connected to an IPA tank 7 storing IPA through a high-pressure pump 8, and by driving this high-pressure pump, IPA is supplied from the IPA tank 7 to the IPA shower head 6. It is ejected onto the substrate surface that has been transported.
[0037]
The IPA shower head 6 is installed in a direction orthogonal to the transport direction of the substrate S, can spray IPA in a curtain shape with respect to the substrate surface, and can wet the entire surface of the substrate S.
[0038]
Brush cleaning process:
Subsequently, while the substrate S is transported by the transport roller 5, the end surface cleaning brush 9 is brought into contact with two sides of the substrate end surface positioned in parallel with the substrate transport direction while rotating.
[0039]
For this brushing, only the portion of the non-display area where the alignment marker of the substrate of the liquid crystal panel member is formed is targeted, but as shown in FIG. 2, the area where the brush cleaning process is performed is in the substrate transport direction. It is the area | region of the oblique line part 1a on the board | substrate S which becomes parallel with respect to the oblique line part 1b.
[0040]
FIG. 4 shows the shape of the end face cleaning brush 9. There are three types, a, b, and c. The left side is a side view and the right side is a front view.
[0041]
4a is a roll shape, FIG. 4b is a disk shape, and FIG. 4c is a linear shape. If the end surface cleaning brush 9 does not come into contact with the display surface of the substrate S, and the end surface cleaning brush 9 comes into contact with the alignment marker used in the bonding process and can remove dirt, the end surface cleaning brush 9 can be removed. The shape of is not limited.
[0042]
Further, when the end face cleaning brush 9 is in contact with the substrate S, it may be rotated or reciprocated. However, if the edge cleaning brush 9 does not come into contact with the display surface of the substrate S, and the brush can come into contact with the alignment marker used in the bonding process and the dirt can be removed, the rotational movement and reciprocating movement of the brush The operation direction is not limited.
[0043]
Further, nylon is generally used as a material for the end face cleaning brush 9. However, the material of the end face cleaning brush 9 is not limited as long as dirt attached to the alignment marker used in the bonding process can be removed.
[0044]
Pure water cleaning process:
In the next cleaning liquid replacement chamber 2, a replacement shower head 10 is disposed above the substrate S to be transported.
[0045]
The replacement shower head 10 is connected to a pure water supply pipe. Pure water is supplied from the replacement shower head 10 and is ejected onto the surface of the substrate that has been transported. The replacement shower head 10 is installed in a direction orthogonal to the transport direction of the substrate S, can eject pure water in a curtain shape with respect to the substrate surface, and the IPA on the substrate surface is purified with pure water. Can be substituted. The pure water waste liquid replacing IPA is temporarily stored in the replacement tank 11 and then collected and discarded.
[0046]
Next, in the ultrasonic cleaning chamber 3, a plurality of ultrasonic cleaning devices 12 including an ultrasonic generator and an ultrasonic shower head are arranged in parallel along the transfer direction of the substrate S above the transferred substrate S. Has been.
[0047]
The shower head of each ultrasonic cleaning device 12 is connected to a pure water tank 13 storing pure water via a high-pressure pump 14. By driving the high-pressure pump 14, ultrasonic waves are generated from the pure water tank 13. Pure water is supplied to the ultrasonic shower head of the cleaning device 12, ultrasonic waves are applied to the pure water, and the substrate surface is cleaned by being ejected onto the substrate surface that has been transported by the transport roller 5. .
[0048]
Further, in the same ultrasonic cleaning chamber 3, a plurality of MS cleaning devices 15 including an MS generator and an MS shower head are arranged in parallel along the transport direction of the substrate S above the transported substrate S. . The shower head of each MS cleaning device 15 is connected to a pure water tank 13 storing pure water via a high-pressure pump 14. By driving the high-pressure pump 14, the MS cleaning device is removed from the pure water tank 13. Pure water is supplied to the MS shower head 15, MS is applied to the pure water, and the substrate surface is transported by the transport roller 5, and the substrate surface is cleaned.
[0049]
Finally, in the draining and drying chamber 4, a plurality of air knives 16 connected to a pressurized air source are provided. Then, by spraying pressurized air toward the surface of the substrate S which has been transported by the transport roller 5 after the cleaning is completed, water droplets remaining on the substrate surface are removed and dried.
[0050]
【Example】
Next, the single wafer cleaning method as in the present invention was evaluated as follows.
In this example, a method for manufacturing the liquid crystal display device of the present invention will be described.
[0051]
(Example 1)
Step (1):
An electrode and an alignment film are sequentially formed on a substrate to form a display area, and a liquid crystal panel member is prepared in which an alignment marker for bonding positioning is provided on a non-display area of the substrate.
[0052]
Specifically, first, a 0.7 mm thick 420 mm × 530 mm glass substrate having an ITO film formed on the entire surface as a signal substrate, and a glass substrate having an ITO film formed on the entire surface of a color filter as a scanning substrate. And prepared.
[0053]
Next, an electrode pattern was formed by a photolithography technique, an alignment film was formed on a display portion of a liquid crystal display device (LCD) using a roll printing technique, and then baked at 240 ° C.
[0054]
Subsequently, the substrate was rubbed with a rubbing cloth made by weaving conductive rayon raw yarn. Here, when the alignment marker used in the bonding step was observed with a microscope, it was confirmed that the foreign matter 2 adhered to a part of the alignment marker 1 as shown in FIG.
[0055]
Step (2) and step (3):
Brushing is performed only on the portion of the non-display area where the alignment marker is formed on the substrate. Thereafter, the liquid crystal panel member is washed.
[0056]
In other words, the substrate (liquid crystal panel member) was put into a cleaning apparatus in which a roller-shaped end surface cleaning brush as shown in FIG. 4a was installed, and the cleaning process was performed by brushing as described above. .
[0057]
Here, when the alignment marker used in the bonding step was observed with a microscope, it was confirmed that the foreign matter adhering to the alignment marker 3 was removed as shown in FIG. 5b.
[0058]
Step (4):
The two types of liquid crystal panel members that have undergone the steps (1) to (3) are aligned and bonded together using the alignment marker as a reference.
[0059]
Hereinafter, this process will be described in detail.
Peripheral sealing material made of epoxy resin or the like to prevent liquid crystal leakage is formed on the signal board, and a number of spacers made of plastic or the like to keep the liquid crystal layer thickness constant on the scanning board. did.
[0060]
Next, the film surfaces of the substrates were brought into contact with each other, and the alignment markers of the signal substrate and the scanning substrate were precisely aligned using an image processing technique.
[0061]
As a result, when the difference in the center of gravity coordinates of the alignment markers between the signal substrate and the scanning substrate was measured, the X direction was +4 μm and the Y direction was +2 μm. When the positional deviation of the electrode pattern in the substrate was observed, there was no positional deviation between the transparent electrode and the light shielding film, and the bonding accuracy reached the target value of 5 μm or less.
[0062]
(Example 2)
First, a 0.7 mm thick 420 mm × 530 mm glass substrate having an ITO film formed on the entire surface as a signal substrate and a glass substrate having an ITO film formed on the entire surface of a color filter as a scanning substrate were prepared. .
[0063]
Next, an electrode pattern was formed by a photolithography technique, an alignment film was formed on the display portion of the LCD using a roll printing technique, and then baked at 240 ° C.
[0064]
Next, the substrate was rubbed with a rubbing cloth made by weaving conductive rayon raw yarn. Here, when the alignment marker used in the bonding step was observed with a microscope, it was confirmed that the foreign matter 2 was adhered to a part of the alignment marker 1 as shown in FIG.
[0065]
And the said board | substrate was thrown into the washing | cleaning apparatus in which the disc-shaped end surface washing brush as shown in FIG. 4b was installed, and the cleaning process was implemented. Here, when the alignment marker used in the bonding step was observed with a microscope, it was confirmed that the foreign matter adhering to the alignment marker 3 was removed as shown in FIG. 5b.
[0066]
After that, a peripheral sealing material made of epoxy resin to prevent liquid crystal leakage is formed on the signal board, and a number of spacers made of plastic etc. to keep the liquid crystal layer thickness constant on the scanning board Arranged individually.
[0067]
Thereafter, the film surfaces of the substrate were brought into contact with each other, and the alignment of the signal substrate and the scanning substrate was precisely aligned using an image processing technique.
[0068]
As a result, when the distance difference between the center of gravity coordinates of the alignment marker between the signal substrate and the scanning substrate was measured, the X direction was −3 μm and the Y direction was +1 μm. When the positional deviation of the electrode pattern in the substrate was observed, there was no positional deviation between the transparent electrode and the light shielding film, and the bonding accuracy reached the target value of 5 μm or less.
[0069]
(Example 3)
First, a 0.7 mm thick 420 mm × 530 mm glass substrate having an ITO film formed on the entire surface as a signal substrate and a glass substrate having an ITO film formed on the entire surface of a color filter as a scanning substrate were prepared. . Next, an electrode pattern was formed by a photolithography technique, an alignment film was formed on the display portion of the LCD using a roll printing technique, and then baked at 240 ° C.
[0070]
Next, the substrate was rubbed with a rubbing cloth made by weaving conductive rayon raw yarn. Here, when the alignment marker used in the bonding step was observed with a microscope, it was confirmed that the foreign matter 2 adhered to a part of the alignment marker 1 as shown in FIG.
[0071]
And the said board | substrate was thrown into the washing | cleaning apparatus with which the linear end surface washing brush as shown in FIG. 4c was installed, and the cleaning process was implemented. Here, when the alignment marker used in the bonding step was observed with a microscope, it was confirmed that the foreign matter adhering to the alignment marker 3 was removed as shown in FIG.
[0072]
Next, a peripheral sealing material made of epoxy resin or the like for preventing leakage of liquid crystal is formed on the signal board, and a large number of spacers made of plastic or the like for keeping the thickness of the liquid crystal layer constant on the scanning board. Arranged individually. Next, the film surfaces of the substrates were brought into contact with each other, and the alignment of the signal substrate and the scanning substrate was precisely aligned using an image processing technique.
[0073]
As a result, when the distance difference between the center of gravity coordinates of the alignment marker between the signal substrate and the scanning substrate was measured, the X direction was +2 μm and the Y direction was −3 μm. When the positional deviation of the electrode pattern in the substrate was observed, there was no positional deviation between the transparent electrode and the light shielding film, and the bonding accuracy reached the target value of 5 μm or less.
[0074]
(Comparative example)
First, a 420 mm × 530 mm glass substrate having an ITO film formed on the entire surface as a signal substrate and a glass substrate having an ITO film formed on the entire surface of a color filter as a scanning substrate were prepared. . Next, an electrode pattern was formed by a photolithography technique, an alignment film was formed on the display portion of the LCD using a roll printing technique, and then baked at 240 ° C.
[0075]
Next, the substrate was rubbed with a rubbing cloth made by weaving conductive rayon raw yarn. Here, when the alignment marker used in the bonding step was observed with a microscope, it was confirmed that the foreign matter 2 adhered to a part of the alignment marker 1 as shown in FIG.
[0076]
Next, the said board | substrate was thrown into the washing | cleaning apparatus in which the washing | cleaning roller of the board | substrate end surface was not installed, and the cleaning process was implemented. Here, when the alignment marker used in the bonding step was observed with a microscope, it was confirmed that the foreign material 2 remained attached to the alignment marker 1 as in FIG. 5a.
[0077]
Next, a peripheral sealing material made of epoxy resin or the like for preventing leakage of liquid crystal is formed on the signal board, and a spacer made of plastic or the like for keeping the liquid crystal layer thickness constant on the scanning board. Many were arranged. Next, the film surfaces of the substrates were brought into contact with each other, and the alignment of the signal substrate and the scanning substrate was precisely aligned using an image processing technique.
[0078]
As a result, when the distance difference between the centroid coordinates of the alignment marker between the signal board and the scanning board was measured, the X direction was +11 μm and the Y direction was +15 μm, and the centroid coordinates of the alignment marker could not be normally detected by image processing. . Furthermore, when the positional deviation of the electrode pattern in the substrate was observed, misalignment between the transparent electrode and the light shielding film occurred, and the bonding accuracy did not reach the target value of 5 μm or less, resulting in light leakage and display characteristics. A defect occurred.
[0079]
According to the experiments repeatedly conducted by the present inventors, by the single wafer type substrate cleaning method in which the brush cleaning process is performed within 25 mm from the substrate end face, the dirt attached to the substrate end face, particularly the dirt attached to the alignment marker, can be completely removed. It was confirmed that the bonding accuracy in the bonding process reached the target value of 5 μm or less. Conventionally, display characteristics such as light leakage have occurred due to misalignment between the transparent electrodes made of a large number of ITO arranged in parallel and the light shielding film provided with the black resist. It was also confirmed that the display characteristic defect disappeared by reaching the target value of 5 μm or less.
[0080]
【The invention's effect】
As described above, according to the present invention, as a cleaning device, an electrode and a rubbing-treated alignment film are sequentially formed on a substrate to form a display area, and the bonding positioning is performed on the non-display area of the substrate. In an apparatus configuration for cleaning a liquid crystal panel member provided with an alignment marker, brushing is performed only on an alcohol cleaning chamber for cleaning the liquid crystal panel member with an alcohol liquid and a non-display area portion on the substrate where the alignment marker is formed. A brush cleaning chamber and a pure water cleaning chamber for cleaning the liquid crystal panel member after the brushing cleaning with a pure water solution. According to the cleaning method of the present invention, the liquid crystal panel member is An alcohol cleaning process for cleaning with an alcohol solution, and a brush for brushing only on a portion of the non-display area where the alignment marker is formed on the substrate. Alignment for bonding positioning provided on the non-display area of the liquid crystal panel member by comprising a cleaning step and a pure water cleaning step of cleaning the liquid crystal panel member after the brushing treatment with pure water. Dirt adhered to the marker could be removed more effectively.
[0081]
Further, according to the method of manufacturing a liquid crystal display device of the present invention, an electrode and an alignment film are sequentially formed on a substrate to form a display area, and an alignment marker for bonding positioning is formed on the non-display area of the substrate. (1) rubbing the alignment film of the liquid crystal panel member on the provided liquid crystal panel member, (2) brushing only on the non-display area portion of the substrate where the alignment marker is formed, (3) the liquid crystal The panel member is washed. (4) The liquid crystal panel member is pasted with high accuracy by performing the steps of aligning and bonding two types of liquid crystal panel members with the alignment marker as a reference. I was able to.
[Brief description of the drawings]
FIG. 1 is an enlarged cross-sectional view of a main part of an STN type simple matrix type color liquid crystal display device according to the present invention.
FIG. 2 is a schematic diagram showing a region where a brush cleaning process is performed on an end surface portion of a substrate surface according to the present invention.
FIG. 3 is a diagram showing an outline of a cleaning apparatus of the present invention.
4A, 4B, and 4C show a schematic configuration example of a substrate end face cleaning brush according to the present invention, a left view thereof is a front view thereof, and a right view thereof is a side view thereof.
FIG. 5A is a state diagram of the alignment marker before cleaning, and b is a state diagram of the alignment marker after cleaning.
[Explanation of symbols]
1 ... Pretreatment and brush cleaning room
2 ... Cleaning liquid replacement chamber
3 ... Ultrasonic cleaning room
4 ... Drainer drying room
5 ... Conveying roller
9 ... End face cleaning brush
12 ... Ultrasonic cleaning device
S ... Board

Claims (9)

A cleaning apparatus for cleaning a substrate as the electrode arrangement the alignment film and successively formed to become the display region outside of the liquid crystal panel member provided with alignment markers for positioning bonded to the non-display area,
An alcohol cleaning chamber for cleaning the liquid crystal panel member with an alcohol liquid;
A brush cleaning chamber subjected to brush cleaning only in the non-display area including a portion having a pre-Kia Lai instrument marker,
Characterized in that it comprises a pure water cleaning chamber for cleaning the liquid crystal panel member having passed through the brush cleaning chamber with pure water solution, washing device. 2. The cleaning apparatus according to claim 1, wherein a region where the brush cleaning process is performed in the brush cleaning chamber is a region which is parallel to a conveyance direction of the liquid crystal panel member in the brush cleaning chamber. The cleaning apparatus according to claim 1, wherein the alignment marker has a cross shape. A cleaning method for cleaning a liquid crystal panel member provided with an alignment marker for bonding and positioning in a non-display area outside a display area formed by sequentially forming an electrode and an alignment film on a substrate,
An alcohol cleaning step of cleaning the liquid crystal panel member with an alcohol liquid;
A brush cleaning process for performing a brush cleaning process only on the non-display area including the portion provided with the alignment marker;
And a pure water cleaning step of cleaning the liquid crystal panel member that has undergone the brush cleaning step with a pure water solution. 5. The cleaning method according to claim 4, wherein the region where the brush cleaning process is performed in the brush cleaning step is a region which is parallel to a conveyance direction of the liquid crystal panel member in the brush cleaning step. The cleaning method according to claim 4, wherein the alignment marker has a cross shape. Two types of liquid crystal panel members including a liquid crystal panel member provided with an alignment marker for bonding and positioning in a non-display area outside the display area formed by sequentially forming an electrode and an alignment film on a substrate, A method of manufacturing a liquid crystal display device bonded together,
A first step of rubbing the alignment film of the liquid crystal panel member;
A second step of performing a brush cleaning process only on the non-display area including the portion provided with the alignment marker;
A third step of cleaning the liquid crystal panel member that has undergone the second step;
And a fourth step of aligning and bonding the two types of liquid crystal panel members that have undergone the first step, the second step, and the third step with reference to the alignment marker. A method for manufacturing a liquid crystal display device. 8. The liquid crystal display device according to claim 7, wherein the region where the brush cleaning process is performed in the second step is a region which is parallel to the transport direction of the liquid crystal panel member in the second step. The manufacturing method. The method of manufacturing a liquid crystal display device according to claim 7, wherein the alignment marker is a cross shape.

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