JP4002148B2

JP4002148B2 - Heat pipe leak inspection method and inspection apparatus therefor

Info

Publication number: JP4002148B2
Application number: JP2002215609A
Authority: JP
Inventors: 啓治真下; 貴裕鈴木
Original assignee: Furukawa Electric Co Ltd
Current assignee: Furukawa Electric Co Ltd
Priority date: 2002-07-24
Filing date: 2002-07-24
Publication date: 2007-10-31
Anticipated expiration: 2022-07-24
Also published as: JP2004061128A

Description

【０００１】
【発明の属する技術分野】
本発明は、ヒートパイプのリークを、ヒートパイプの形状や作動液の種類に関係なく、迅速かつ高い信頼性で検査する方法およびその検査装置に関する。
【０００２】
【従来の技術】
ヒートパイプはコンテナに作動液を真空封入したものであり、その性能を維持するにはコンテナの気密性が重要である。そして前記気密性の検査は、気泡検出法、ボンビング法、ハロゲン法などにより行われている。
前記気泡検出法は、ヒートパイプの表面に石鹸水を塗り、ヒートパイプを加熱して内圧を高め、リーク箇所に生じる石鹸水の泡を目視観察して検査する方法である。
前記ボンビング法は、ヒートパイプを非凝縮性ガスが充満する加圧室内に所定時間放置したのち、このヒートパイプの発熱部を高温に保持しつつ、断熱部と凝縮部の温度を測定し、リーク箇所から非凝縮性ガスが侵入していると両部間に温度差が生じる現象を利用して検査する方法である。
前記ハロゲン法は、ハロゲンを含有する物質を作動液とするヒートパイプを加熱して内圧を高め、リーク箇所から漏出するガス状のハロゲン元素を、加熱した白金面に吸着させ、白金面から放射される陽イオンを検知して検査する方法である。
【０００３】
【発明が解決しようとする課題】
しかし、前記気泡検出法は、表面の僅かな汚れでも泡が発生することがあり、また目視観察のため検査員によって判定に差があるなど、信頼性に欠けるという問題がある。
前記ボンビング法は、変形し易い板型ヒートパイプを検査する場合は非凝縮性気体の圧力を低くする必要があるため、非凝縮性気体をリーク箇所から侵入させるのに時間が掛かるという問題がある。
前記ハロゲン法は、作動液にハロゲン元素を含む場合にしか適用できないという問題がある。
本発明は、ヒートパイプのリークを、ヒートパイプの形状や作動液の種類に関係なく、迅速かつ高い信頼性で検査する方法およびその検査装置を提供することを目的とする。
【０００４】
【課題を解決するための手段】
請求項１記載発明は、作動液として炭化水素、アンモニア、ナフタレン、ナトリウム、水銀、代替フロンのいずれかが封入されてなるヒートパイプのリーク検査方法であって、検査室に前記ヒートパイプを入れ、前記検査室内を真空排気して前記ヒートパイプから前記検査室内に漏出する作動液のガスを質量分析計により計測して分析出力を求め、予め求めた前記作動液のガスの構成元素のピーク高さを用いて前記分析出力を校正することによってリーク検査することを特徴とするヒートパイプのリーク検査方法である。
【０００５】
請求項２記載発明は、作動液として炭化水素、アンモニア、ナフタレン、ナトリウム、水銀、代替フロンのいずれかが封入されてなるヒートパイプのリーク検査方法であって、検査室に接して開閉自在に予備室を配し、前記予備室にヒートパイプを入れ、前記予備室内を真空排気し、次いで前記ヒートパイプを、予め真空排気した前記検査室に移動し、次いで両室間を密閉したのち、前記ヒートパイプから検査室内に漏出する作動液のガスを質量分析計により計測して分析出力を求め、予め求めた前記作動液のガスの構成元素のピーク高さを用いて前記分析出力を校正することによってリーク検査することを特徴とするヒートパイプのリーク検査方法である。
【０００６】
請求項３記載発明は、検査室に接して開閉自在に取出室を配し、前記検査室内の検査終了後のヒートパイプを、予め真空排気した前記取出室へ移動し、両室間を密閉後、前記ヒートパイプを前記取出室から取出すことを特徴とする請求項２記載のヒートパイプのリーク検査方法である。
【０００７】
請求項４記載発明は、予備室内の真空排気を、予備室内の水分量が４０ｐｐｍ以下になるまで行うことを特徴とする請求項２または３記載のヒートパイプのリーク検査方法である。
【０００８】
請求項５記載発明は、請求項１記載のリーク検査方法を実施するための検査装置であって、ヒートパイプのリークを検査するための検査室、前記検査室を真空排気するための真空ポンプ、前記検査室内に漏出する作動液ガスを分析するための質量分析計を主要部とすることを特徴とするヒートパイプのリーク検査装置である。
【０００９】
請求項６記載発明は、請求項２記載のリーク検査方法を実施するための検査装置であって、ヒートパイプのリークを検査するための検査室、前記検査室に接して配された予備室、前記検査室に連結された質量分析計、前記各室を真空排気するための真空ポンプを主要部とし、前記検査室と前記予備室間は、前記両室の真空状態が保持された状態で開閉自在であり、前記両室間にはヒートパイプを移動する機能が具備されていることを特徴とするヒートパイプのリーク検査装置である。
【００１０】
請求項７記載発明は、請求項３記載のリーク検査方法を実施するための検査装置であって、ヒートパイプのリークを検査するための検査室、前記検査室に接して配された予備室と取出室、前記検査室に連結された質量分析計、前記各室を真空排気するための真空ポンプを主要部とし、前記検査室と予備室間、および前記検査室と取出室間は、各両室の真空状態が保持された状態で開閉自在であり、前記各両室間にはヒートパイプを移動する機能が具備されていることを特徴とするヒートパイプのリーク検査装置である。
【００１１】
【発明の実施の形態】
請求項１記載発明は、ヒートパイプを検査室に入れ、前記検査室内を真空排気すると、ヒートパイプにリーク箇所がある場合、ヒートパイプの内圧は作動液の飽和蒸気圧となり、外圧は０に近いため、ヒートパイプ内の作動液ガスが検査室内に漏出するが、この漏出ガスを検査室に連結した質量分析計により分析してリークを検査する方法である。
【００１２】
この発明では、検査室内に漏出する作動液ガスを質量分析計で分析してリーク検査するので、作動液の種類によらず、迅速に、高い信頼性で検査できる。また検査時のヒートパイプの内外圧差は小さいので検査中にヒートパイプが変形したりしない。
【００１３】
前記質量分析計には、極微量の元素を分析することができる四重極質量分析計（ＱＭＳ）が推奨される。四重極質量分析計では、物質により分析感度が異なるため、予め作動液の構成元素の分析出力（ピーク高さ）を求めておき、これを基に、計測される分析出力を校正して作動液ガスを正確に分析（同定）する。
【００１４】
一般に、質量分析計では、検査室内は高真空度に排気する必要があるが、ヒートパイプ表面に洗浄水が付着していたり、大気中の水分が吸着していたりすると排気時間が長くなる。
請求項２記載発明は、この問題を解決した検査方法である。
即ち、請求項２記載発明は、検査室に接して配した予備室にヒートパイプを入れ、前記予備室内を真空排気して前記ヒートパイプ表面の付着水分や吸着水分を除去し、その後、前記ヒートパイプを検査室に移動してリーク検査する方法であり、検査室内の水分量が少なくなり、検査室での排気時間が短縮される。
【００１５】
予備室６内の真空排気は、予備室６の排気ガス中に含まれる水分量が４０ｐｐｍ以下になるまで行うのが良く、前記水分量が４０ｐｐｍ以下であればヒートパイプ表面の付着水分や吸着水分はほぼ完全に除去され、検査室での排気時間が短縮される。水分量は露点計を用いるなどの常法により容易に測定できる。
【００１６】
請求項３記載発明は、前記予備室によりヒートパイプの除湿を行うとともに、検査室に接して取出室を配し、検査後のヒートパイプを検査室から、真空排気した取出室に移動し、両室間を密閉してから、ヒートパイプを取出室から取出す検査方法で、検査室が常時真空に保持され、ヒートパイプを連続的に検査する場合は、検査室の排気時間が一層短縮される。
【００１７】
以下に、本発明の検査装置を図を参照して具体的に説明する。
図１は請求項１記載発明を実施する検査装置の実施形態を示す説明図である。
この検査装置は、リークを検査するための検査室２、検査室２を真空排気するための真空ポンプ３、検査室２内に漏出する作動液ガスを分析するための四重極質量分析計４を主要部とする。
図１で５は分析ガスのピーク高さを校正するための標準リークである。
【００１８】
この検査装置では、ヒートパイプ１を検査室２内に入れ、検査室２内を真空ポンプ３により排気し、この排気ガスを四重極質量分析計４に通し、分析出力を標準リーク５により校正し、その結果、作動液ガスが分析されれば、ヒートパイプにリーク箇所があると判定する。なお、検査室２内ではヒートパイプ１は作動液のガス化温度以上の温度に保持する。
【００１９】
図２は請求項２記載発明を実施する検査装置の実施形態を示す説明図である。
この検査装置は、リークを検査するための検査室２、検査室２に接して配された予備室６、検査室２に連結された質量分析計４、各室をそれぞれ真空排気するための真空ポンプ３を主要部とし、検査室２と予備室６間は、両室２、６の真空状態が保持された状態で開閉自在であり、両室２、６間にはヒートパイプ１を移動する機能が具備されている。
【００２０】
この検査装置では、ヒートパイプ１を予備室６に入れ、予備室６内を真空ポンプ３により真空排気してヒートパイプ１表面に付着或いは吸着した水分を除去し、その後、ヒートパイプ１を、予め真空排気した検査室２に、両室の真空を保持した状態で移動してリーク検査を行う。
検査中、予備室６には次の検査用ヒートパイプ１を入れて真空排気しておく。
【００２１】
図３は請求項３記載発明を実施する検査装置の実施形態を示す説明図である。
この検査装置は、リークを検査するための検査室２、検査室２に接して配された予備室６と取出室７、検査室２に連結された質量分析計４、各室をそれぞれ真空排気するための真空ポンプ３を主要部とし、検査室２と予備室６間、および検査室２と取出室７間は、各両室の真空状態が保持された状態で開閉自在であり、前記各両室間にはヒートパイプ１を移動する機能が具備されている。
【００２２】
この検査装置では、ヒートパイプ１を予備室６に入れ、予備室６内を真空排気してヒートパイプ１表面の付着水分や吸着水分を除去し、その後、ヒートパイプ１を真空排気した検査室２に、両室２、６の真空を保持した状態で移動し、両室２、６間を密閉したのち、リーク検査を行い、検査後、ヒートパイプ１は、予め真空排気した取出室７に、両室２、７間の真空を保持した状態で移動し、移動後両室２、７間を密閉し、次いでヒートパイプ１を取出室７から取出す。このため、検査室２内が常時真空に保持され、検査室２の排気時間が大幅に短縮される。
検査中、予備室には次の検査用ヒートパイプを入れて真空排気しておくとともに、取出室も真空排気しておく。
【００２３】
図４は本発明のリーク検査装置の他の例を示す説明図である。
この検査装置は、予備室６、検査室２、取出室７の３室の排気を１個の真空ポンプ３で行うようにしたものである。
この装置は、図３に示した装置に較べて真空ポンプ３の個数が少なく、また検査室２は２個の真空ポンプ３で真空排気することが可能であり、検査室２の真空排気が迅速になされる。図３で、８は切換バルブである。
【００２４】
本発明装置において、予備室６と検査室２間および検査室２と取出室７間のヒートパイプ１の移動はコンベヤ式が簡便で推奨される。予備室６と取出室７を検査室２の前後に直線状に配すると、ヒートパイプ１を１本のコンベヤに乗せて容易に移動できる。前記各両室間の開閉はシャッター式が簡便で推奨される。
【００２５】
本発明は、筒状ヒートパイプを始め、外圧で変形し易い板型ヒートパイプなど任意の形状のヒートパイプにも、またヘリウム、メタン、アンモニア、アセトン、ナフタレン、ナトリウム、水銀、代替フロン、炭化水素など通常の作動液が封入された任意のヒートパイプにも、さらにはウィックやグルーブを具備するヒートパイプにも問題なく適用できる。
【００２６】
【実施例】
以下に、本発明を実施例により詳細に説明する。
（実施例１）
アセトンが封入された板型ヒートパイプ（以下、ヒートパイプと略記する）について、図１に示した検査装置を用いてリーク検査を行った。
即ち、ヒートパイプ１を検査室２に入れ、検査室２内を真空排気し、その排気ガスを四重極質量分析計４により分析した。アセトン（Ｃ₃ Ｈ₆ Ｏ）の構成元素の各ピークを標準リーク５により校正し、アセトンが分析されればヒートパイプはリークしており、検出されなければリークなしと判定した。
検査後、検査室２からヒートパイプ１を取出し、次のヒートパイプ１を検査室２に入れて同様のリーク検査を行った。
このようにして、ヒートパイプ１を２０個検査し、ヒートパイプ１個あたりの平均検査時間および検査後のヒートパイプ１の変形有無を調べた。
【００２７】
（実施例２）
実施例１で用いたのと同じ種類のヒートパイプについて、図２に示した検査装置を用いてリーク検査を行った。
即ち、予備室６にヒートパイプ１を入れ、前記予備室６内の水分量が４０ｐｐｍ以下になるまで真空排気し、次いで、予め真空排気した検査室２との間を開放して、ヒートパイプ１を、検査室２に移動し、両室２、６間を密閉したのち、検査室２内を真空排気し、排気ガスを四重極質量分析計４により分析し、実施例１と同様にしてリーク検査を行った。
検査中に、予備室６に次の検査用ヒートパイプ１を入れ、予備室６内を真空排気してヒートパイプ１表面の付着水分や吸着水分を除去して次の検査に備えた。
検査後、検査室２からヒートパイプ１を取り出し、検査室２内を真空脱気したのち、予備室６内のヒートパイプを検査室２へ、両室２、６の真空を保持した状態で移動し、その後両室２、６間を密閉し、リーク検査を行った。
検査後のヒートパイプについて、実施例１と同じ調査を行った。
【００２８】
（実施例３）
実施例１で用いたのと同じ種類のヒートパイプについて、図３に示した検査装置を用いてリーク検査を行った。
ここでは、実施例２と同じ方法でリーク検査を行ったのち、検査室２と、予め真空排気した取出室７との間を開放して、検査室２内のヒートパイプ１を取出室７に移動し、次いで、両室２、７間を密閉し、取出室７からヒートパイプ１を取出した。
検査中に、予備室６に次の検査用ヒートパイプ１を入れ、予備室６内を真空排気して次の検査に備えるともに、取出室７を真空排気した。
検査後のヒートパイプについて、実施例１と同じ調査を行った。
【００２９】
（比較例１）
実施例１で用いたのと同じ種類のヒートパイプについて、従来のボンビング法によりリーク検査を行い、実施例１と同じ方法によりヒートパイプ１個あたりの平均検査時間および検査後のヒートパイプの変形有無を調べた。
実施例１〜３および比較例１の調査結果を表１に示す。
【００３０】
【表１】

【００３１】
表１から明らかなように、本発明例のＮｏ．１〜３はいずれも検査時間が短かった。中でもＮｏ．２はヒートパイプを、予備室に入れ、ヒートパイプ表面の付着水分や吸着水分を除去してから検査室に移動したので、検査室での排気時間が短縮された。またＮｏ．３はヒートパイプを、その付着水分や吸着水分を予備室で除去してから検査室へ移動し、検査後のヒートパイプは真空排気した取出室へ移動してから取出したので、検査室は常時真空が保たれ、検査室での排気時間が短縮された。
これに対し、従来のボンビング法により検査した比較例１のＮｏ．４は非凝縮性気体の圧力を高くしたためヒートパイプの外面に凹みが生じ、Ｎｏ．５は非凝縮性気体の圧力を低くしたため検査時間が長くなった。
【００３２】
【発明の効果】
以上に述べたように、本発明のリーク検査方法は、作動液を封入したヒートパイプを検査室に入れ、検査室内を真空排気し、リーク箇所から漏出する作動液ガスを質量分析計で分析して検査するので、作動液の種類によらず、迅速に、高い信頼性で検査できる。また検査時のヒートパイプの内外圧差が小さいので検査中にヒートパイプが変形したりしない。前記検査室に接して予備室を配し、前記予備室内でヒートパイプ表面の付着水分や吸着水分を除去しておくと検査室での排気時間が短縮される。また前記検査室に接して取出室を配し、検査後のヒートパイプを、予め真空排気した前記取出室へ移動してから取出すことにより、検査室を常時真空に保持することができ、検査室での排気時間がさらに短縮される。
【００３３】
本発明の検査装置は、ヒートパイプのリークを検査するための検査室、検査室を真空排気するための真空ポンプ、検査室内に漏出する作動液ガスを分析するための質量分析計、前記検査室を真空排気するための真空ポンプを主要部とするもの、或いは前記検査装置の検査室に接して予備室を配したもの、或いは前記検査装置の検査室に接して予備室と取出室を配したものであり、いずれも装置が簡便である。
依って、工業上顕著な効果を奏する。
【図面の簡単な説明】
【図１】本発明の検査装置の第１の実施形態を示す平面説明図である。
【図２】本発明の検査装置の第２の実施形態を示す平面説明図である。
【図３】本発明の検査装置の第３の実施形態を示す平面説明図である。
【図４】本発明の検査装置の第４の実施形態を示す平面説明図である。
【符号の説明】
１ヒートパイプ
２検査室
３真空ポンプ
４四重極質量分析計
５標準リーク
６予備室
７取出室
８切換バルブ[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for quickly and reliably inspecting heat pipe leaks regardless of the shape of the heat pipe and the type of hydraulic fluid, and an inspection apparatus therefor.
[0002]
[Prior art]
A heat pipe is a container in which a working fluid is vacuum-sealed, and the air tightness of the container is important to maintain its performance. The airtightness inspection is performed by a bubble detection method, a bombing method, a halogen method, or the like.
The bubble detection method is a method in which soap water is applied to the surface of a heat pipe, the internal pressure is increased by heating the heat pipe, and bubbles of soap water generated at a leaked portion are visually observed and inspected.
In the bombing method, after the heat pipe is left in a pressurized chamber filled with non-condensable gas for a predetermined time, the heat generating part of the heat pipe is kept at a high temperature, the temperature of the heat insulating part and the condensing part is measured, and leakage This is an inspection method using a phenomenon in which a temperature difference occurs between both parts when non-condensable gas enters from a part.
In the halogen method, a heat pipe using a halogen-containing substance as a working fluid is heated to increase the internal pressure, and a gaseous halogen element leaking from a leak point is adsorbed on the heated platinum surface and emitted from the platinum surface. This is a method of detecting and inspecting positive ions.
[0003]
[Problems to be solved by the invention]
However, the bubble detection method has a problem that bubbles are generated even if the surface is slightly soiled, and the reliability is lacking, such as a difference in judgment by an inspector for visual observation.
The above-described bombing method has a problem that it takes time to allow the non-condensable gas to enter from the leak portion because it is necessary to lower the pressure of the non-condensable gas when inspecting the plate-type heat pipe that is easily deformed. .
The halogen method has a problem that it can be applied only when the working fluid contains a halogen element.
An object of the present invention is to provide a method and an inspection apparatus for inspecting a leak of a heat pipe quickly and with high reliability regardless of the shape of the heat pipe and the type of hydraulic fluid.
[0004]
[Means for Solving the Problems]
According to claim 1 invention, the hydrocarbon as a hydraulic fluid, ammonia, naphthalene, sodium, mercury, be any leak inspection method of the heat pipe formed by encapsulation of the CFC substitutes, put the heat pipe to the laboratory, The inspection chamber is evacuated and the working fluid gas leaking from the heat pipe into the testing chamber is measured by a mass spectrometer to obtain an analysis output, and the peak height of the constituent elements of the working fluid gas obtained in advance is determined. A leak inspection method for a heat pipe, characterized in that a leak inspection is performed by calibrating the analysis output using a heat pump.
[0005]
The invention according to claim 2 is a leak inspection method for a heat pipe in which any one of hydrocarbon, ammonia, naphthalene, sodium, mercury, and alternative chlorofluorocarbon is sealed as a working fluid, and is preliminarily opened and closed in contact with an inspection room. A chamber is arranged, a heat pipe is put in the preliminary chamber, the preliminary chamber is evacuated, then the heat pipe is moved to the inspection chamber evacuated in advance, and then the space between both chambers is sealed, and then the heat By measuring the gas of the hydraulic fluid leaking from the pipe into the inspection chamber by a mass spectrometer to obtain an analytical output, and calibrating the analytical output using the peak height of the constituent element of the gas of the hydraulic fluid obtained in advance A leak inspection method for a heat pipe, wherein the leak inspection is performed.
[0006]
According to a third aspect of the present invention, an extraction chamber is arranged so as to be openable and closable in contact with the inspection room, the heat pipe after completion of the inspection in the inspection room is moved to the extraction chamber that has been evacuated in advance, and the two chambers are sealed The heat pipe leak inspection method according to claim 2, wherein the heat pipe is taken out from the take-out chamber.
[0007]
According to a fourth aspect of the present invention, in the heat pipe leak inspection method according to the second or third aspect, the evacuation of the preliminary chamber is performed until the moisture content in the preliminary chamber becomes 40 ppm or less.
[0008]
A fifth aspect of the present invention is an inspection apparatus for carrying out the leak inspection method according to the first aspect, wherein an inspection chamber for inspecting a leak of a heat pipe, a vacuum pump for evacuating the inspection chamber, A heat pipe leak inspection apparatus comprising a mass spectrometer as a main part for analyzing a working fluid gas leaking into the inspection chamber.
[0009]
A sixth aspect of the present invention is an inspection apparatus for performing the leak inspection method according to the second aspect, wherein an inspection room for inspecting a leak of a heat pipe, a spare room arranged in contact with the inspection room, A mass spectrometer connected to the examination chamber and a vacuum pump for evacuating the chambers as main parts, and opening and closing between the examination chamber and the spare chamber while the vacuum state of both the chambers is maintained. A heat pipe leak inspection apparatus characterized in that it has a function of moving a heat pipe between the two chambers.
[0010]
A seventh aspect of the present invention is an inspection apparatus for carrying out the leak inspection method according to the third aspect, wherein an inspection room for inspecting a leak of a heat pipe, a spare room arranged in contact with the inspection room, The main part is an extraction chamber, a mass spectrometer connected to the inspection chamber, and a vacuum pump for evacuating the chambers, and the space between the inspection chamber and the preliminary chamber and between the inspection chamber and the extraction chamber are both The heat pipe leak inspection apparatus is characterized in that the chamber can be opened and closed while the vacuum state is maintained, and a function of moving the heat pipe is provided between the two chambers.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
According to the first aspect of the present invention, when a heat pipe is placed in an inspection room and the inspection room is evacuated, if there is a leak location in the heat pipe, the internal pressure of the heat pipe becomes the saturated vapor pressure of the hydraulic fluid, and the external pressure is close to zero. Therefore, the working fluid gas in the heat pipe leaks into the inspection chamber, and this leak gas is analyzed by a mass spectrometer connected to the inspection chamber to inspect the leak.
[0012]
In the present invention, since the hydraulic fluid gas leaking into the inspection chamber is analyzed by the mass spectrometer and the leak inspection is performed, the inspection can be performed quickly and with high reliability regardless of the type of the hydraulic fluid. In addition, since the pressure difference between the inside and outside of the heat pipe at the time of inspection is small, the heat pipe does not deform during inspection.
[0013]
As the mass spectrometer, a quadrupole mass spectrometer (QMS) capable of analyzing a trace amount of elements is recommended. Since quadrupole mass spectrometers have different analytical sensitivities depending on the substance, the analytical output (peak height) of the constituent elements of the working fluid is obtained in advance, and the measured analytical output is calibrated based on this. Analyze (identify) liquid gas accurately.
[0014]
In general, in a mass spectrometer, it is necessary to evacuate the inspection chamber to a high degree of vacuum. However, if cleaning water adheres to the heat pipe surface or moisture in the atmosphere is adsorbed, the evacuation time becomes long.
The invention according to claim 2 is an inspection method which solves this problem.
That is, the invention according to claim 2 puts a heat pipe in a preliminary chamber arranged in contact with the inspection chamber, evacuates the preliminary chamber to remove the adhering moisture and adsorbed moisture on the surface of the heat pipe, and then the heat This is a method for inspecting leaks by moving the pipe to the inspection room, and the amount of water in the inspection room is reduced, and the exhaust time in the inspection room is shortened.
[0015]
The evacuation in the preliminary chamber 6 is preferably performed until the amount of moisture contained in the exhaust gas in the preliminary chamber 6 is 40 ppm or less. If the moisture content is 40 ppm or less, the adhering moisture and adsorbed moisture on the surface of the heat pipe. Is almost completely removed, and the exhaust time in the laboratory is shortened. The amount of water can be easily measured by a conventional method such as using a dew point meter.
[0016]
According to a third aspect of the present invention, the heat pipe is dehumidified by the preliminary chamber, an extraction chamber is arranged in contact with the inspection chamber, the heat pipe after inspection is moved from the inspection chamber to the extraction chamber evacuated, In the inspection method in which the chamber is sealed after the heat pipe is taken out from the extraction chamber, the inspection chamber is always kept in a vacuum, and when the heat pipe is continuously inspected, the exhaust time of the inspection chamber is further shortened.
[0017]
The inspection apparatus of the present invention will be specifically described below with reference to the drawings.
FIG. 1 is an explanatory view showing an embodiment of an inspection apparatus for carrying out the invention described in claim 1.
This inspection apparatus includes an inspection chamber 2 for inspecting leaks, a vacuum pump 3 for evacuating the inspection chamber 2, and a quadrupole mass spectrometer 4 for analyzing hydraulic fluid gas leaking into the inspection chamber 2. Is the main part.
In FIG. 1, 5 is a standard leak for calibrating the peak height of the analysis gas.
[0018]
In this inspection apparatus, the heat pipe 1 is put in the inspection chamber 2, the inside of the inspection chamber 2 is exhausted by the vacuum pump 3, the exhaust gas is passed through the quadrupole mass spectrometer 4, and the analysis output is calibrated by the standard leak 5. As a result, if the hydraulic fluid gas is analyzed, it is determined that there is a leak location in the heat pipe. In the inspection room 2, the heat pipe 1 is maintained at a temperature equal to or higher than the gasification temperature of the hydraulic fluid.
[0019]
FIG. 2 is an explanatory view showing an embodiment of an inspection apparatus for carrying out the invention described in claim 2.
This inspection apparatus includes an inspection chamber 2 for inspecting leaks, a preliminary chamber 6 arranged in contact with the inspection chamber 2, a mass spectrometer 4 connected to the inspection chamber 2, and a vacuum for evacuating each chamber. The pump 3 is a main part, and the inspection chamber 2 and the spare chamber 6 can be opened and closed while the vacuum state of both

chambers

2 and 6 is maintained. The heat pipe 1 is moved between the

chambers

2 and 6. A function is provided.
[0020]
In this inspection apparatus, the heat pipe 1 is put in the preliminary chamber 6, the inside of the preliminary chamber 6 is evacuated by the vacuum pump 3 to remove moisture adhering to or adsorbed on the surface of the heat pipe 1, and then the heat pipe 1 is Leak inspection is performed by moving to the evacuated inspection chamber 2 while maintaining the vacuum in both chambers.
During the inspection, the next heat pipe 1 for inspection is put in the preliminary chamber 6 and evacuated.
[0021]
FIG. 3 is an explanatory view showing an embodiment of an inspection apparatus for carrying out the invention described in claim 3.
In this inspection apparatus, an inspection chamber 2 for inspecting leaks, a preliminary chamber 6 and an extraction chamber 7 arranged in contact with the inspection chamber 2, a mass spectrometer 4 connected to the inspection chamber 2, and the respective chambers are evacuated. The vacuum pump 3 is a main part, and the inspection chamber 2 and the preliminary chamber 6 and the inspection chamber 2 and the extraction chamber 7 can be opened and closed while the vacuum state of both chambers is maintained. A function of moving the heat pipe 1 is provided between the two chambers.
[0022]
In this inspection apparatus, the heat pipe 1 is put in the preliminary chamber 6, the inside of the preliminary chamber 6 is evacuated to remove the adhering moisture and adsorbed moisture on the surface of the heat pipe 1, and then the inspection chamber 2 in which the heat pipe 1 is evacuated. In addition, the two

chambers

2 and 6 are moved in a vacuum state, the

chambers

2 and 6 are sealed, and then a leak inspection is performed. After the inspection, the heat pipe 1 is placed in the extraction chamber 7 that has been evacuated in advance. It moves in a state where the vacuum between both

chambers

2 and 7 is maintained. After the movement, the space between both

chambers

2 and 7 is sealed, and then the heat pipe 1 is taken out from the take-out chamber 7. For this reason, the inside of the inspection room 2 is always kept in a vacuum, and the exhaust time of the inspection room 2 is greatly shortened.
During the inspection, the spare chamber is evacuated with the next inspection heat pipe, and the take-out chamber is also evacuated.
[0023]
FIG. 4 is an explanatory view showing another example of the leak inspection apparatus of the present invention.
This inspection apparatus is configured such that a single vacuum pump 3 exhausts the three chambers of the preliminary chamber 6, the inspection chamber 2, and the take-out chamber 7.
This apparatus has a smaller number of vacuum pumps 3 than the apparatus shown in FIG. 3, and the inspection chamber 2 can be evacuated by two vacuum pumps 3 so that the inspection chamber 2 can be evacuated quickly. To be made. In FIG. 3, 8 is a switching valve.
[0024]
In the apparatus of the present invention, a conveyor type is convenient and recommended for the movement of the heat pipe 1 between the preliminary chamber 6 and the inspection chamber 2 and between the inspection chamber 2 and the extraction chamber 7. If the preliminary chamber 6 and the take-out chamber 7 are arranged linearly before and after the inspection chamber 2, the heat pipe 1 can be easily moved on a single conveyor. A shutter type is convenient and recommended for opening and closing between the two chambers.
[0025]
The present invention includes a cylindrical heat pipe, a heat pipe having an arbitrary shape such as a plate heat pipe that is easily deformed by an external pressure, helium, methane, ammonia, acetone, naphthalene, sodium, mercury, alternative chlorofluorocarbon, hydrocarbon The present invention can be applied to any heat pipe in which a normal working fluid is sealed, or to a heat pipe having a wick or a groove without any problem.
[0026]
【Example】
Hereinafter, the present invention will be described in detail with reference to examples.
Example 1
About the plate-type heat pipe (henceforth abbreviated as a heat pipe) in which acetone was enclosed, a leak inspection was performed using the inspection apparatus shown in FIG.
That is, the heat pipe 1 was put into the inspection room 2, the inside of the inspection room 2 was evacuated, and the exhaust gas was analyzed by the quadrupole mass spectrometer 4. Each peak of the constituent element of acetone (C ₃ H ₆ O) was calibrated with a standard leak 5, and if acetone was analyzed, the heat pipe leaked, and if not detected, it was determined that there was no leak.
After the inspection, the heat pipe 1 was taken out from the inspection room 2 and the next heat pipe 1 was put in the inspection room 2 to perform the same leak inspection.
In this way, 20 heat pipes 1 were inspected, and the average inspection time per heat pipe and the presence or absence of deformation of the heat pipe 1 after the inspection were examined.
[0027]
(Example 2)
The same kind of heat pipe as used in Example 1 was subjected to leak inspection using the inspection apparatus shown in FIG.
That is, the heat pipe 1 is placed in the preliminary chamber 6 and evacuated until the moisture content in the preliminary chamber 6 becomes 40 ppm or less, and then the space between the inspection chamber 2 evacuated in advance is opened, and the heat pipe 1 Is moved to the examination room 2 and the

chambers

2 and 6 are sealed, the inside of the examination room 2 is evacuated, and the exhaust gas is analyzed by the quadrupole mass spectrometer 4. A leak test was performed.
During the inspection, the next inspection heat pipe 1 was placed in the preliminary chamber 6 and the preliminary chamber 6 was evacuated to remove the adhering moisture and adsorbed moisture on the surface of the heat pipe 1 to prepare for the next inspection.
After the inspection, the heat pipe 1 is taken out from the inspection room 2 and the inside of the inspection room 2 is vacuum degassed, and then the heat pipe in the spare room 6 is moved to the inspection room 2 while maintaining the vacuum of both the

rooms

2 and 6. Thereafter, both

chambers

2 and 6 were sealed, and a leak test was performed.
The same investigation as in Example 1 was performed on the heat pipe after the inspection.
[0028]
(Example 3)
The same kind of heat pipe as used in Example 1 was subjected to a leak inspection using the inspection apparatus shown in FIG.
Here, after performing a leak inspection in the same manner as in Example 2, the space between the inspection chamber 2 and the extraction chamber 7 that has been evacuated in advance is opened, and the heat pipe 1 in the inspection chamber 2 is removed to the extraction chamber 7. Then, the space between the two

chambers

2 and 7 was sealed, and the heat pipe 1 was taken out from the take-out chamber 7.
During the inspection, the next heat pipe 1 for inspection was placed in the preliminary chamber 6 and the preliminary chamber 6 was evacuated to prepare for the next inspection, and the take-out chamber 7 was evacuated.
The same investigation as in Example 1 was performed on the heat pipe after the inspection.
[0029]
(Comparative Example 1)
About the same kind of heat pipe used in Example 1, a leak inspection is performed by a conventional bombing method, and the average inspection time per one heat pipe and the presence or absence of deformation of the heat pipe after the inspection by the same method as in Example 1 I investigated.
The investigation results of Examples 1 to 3 and Comparative Example 1 are shown in Table 1.
[0030]
[Table 1]

[0031]
As is apparent from Table 1, No. of the present invention example. 1 to 3 all had a short inspection time. Among these, No. In No. 2, the heat pipe was put into a preliminary chamber and moved to the inspection room after removing the adhering moisture and adsorbed moisture on the surface of the heat pipe, so that the exhaust time in the inspection room was shortened. No. 3 removed the adhering moisture and adsorbed moisture in the preliminary chamber and then moved to the inspection room. After the inspection, the heat pipe was moved to the evacuated extraction chamber and then removed. The vacuum was maintained and the evacuation time in the laboratory was shortened.
On the other hand, No. 1 of Comparative Example 1 inspected by the conventional bombing method. In No. 4, since the pressure of the non-condensable gas was increased, a dent was generated on the outer surface of the heat pipe. Since the pressure of non-condensable gas 5 was lowered, the inspection time became longer.
[0032]
【The invention's effect】
As described above, in the leak inspection method of the present invention, the heat pipe enclosing the hydraulic fluid is put in the inspection chamber, the inspection chamber is evacuated, and the hydraulic fluid gas leaking from the leak portion is analyzed by a mass spectrometer. Therefore, inspection can be performed quickly and with high reliability regardless of the type of hydraulic fluid. Further, since the pressure difference between the inside and outside of the heat pipe at the time of inspection is small, the heat pipe does not deform during inspection. If a preliminary chamber is provided in contact with the inspection chamber and the adhering moisture and adsorbed moisture on the surface of the heat pipe are removed in the preliminary chamber, the exhaust time in the inspection chamber is shortened. In addition, by arranging a take-out chamber in contact with the inspection room and removing the heat pipe after the inspection after moving it to the extraction chamber that has been evacuated in advance, the inspection room can be kept in a vacuum at all times. The exhaust time at is further reduced.
[0033]
An inspection apparatus according to the present invention includes an inspection chamber for inspecting a leak in a heat pipe, a vacuum pump for evacuating the inspection chamber, a mass spectrometer for analyzing a working liquid gas leaking into the inspection chamber, and the inspection chamber The main part is a vacuum pump for evacuating the vacuum pump, or the spare chamber is disposed in contact with the inspection chamber of the inspection apparatus, or the preliminary chamber and the extraction chamber are disposed in contact with the inspection chamber of the inspection apparatus. In both cases, the apparatus is simple.
Therefore, there is an industrially significant effect.
[Brief description of the drawings]
FIG. 1 is an explanatory plan view showing a first embodiment of an inspection apparatus of the present invention.
FIG. 2 is an explanatory plan view showing a second embodiment of the inspection apparatus of the present invention.
FIG. 3 is an explanatory plan view showing a third embodiment of the inspection apparatus of the present invention.
FIG. 4 is an explanatory plan view showing a fourth embodiment of the inspection apparatus of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Heat pipe 2 Inspection room 3 Vacuum pump 4 Quadrupole mass spectrometer 5 Standard leak 6 Preparatory room 7 Extraction room 8 Switching valve

Claims

Hydrocarbons as the working fluid, ammonia, naphthalene, sodium, mercury, be any leak inspection method of the heat pipe formed by encapsulation of the CFC substitutes, put the heat pipe to the laboratory, the test chamber was evacuated The working fluid gas leaking from the heat pipe into the inspection chamber is measured by a mass spectrometer to obtain an analytical output, and the analytical output is obtained using the peak height of the constituent element of the working fluid gas obtained in advance. A leak inspection method for a heat pipe, wherein the leak inspection is performed by calibration .

A leak inspection method for a heat pipe in which any one of hydrocarbon, ammonia, naphthalene, sodium, mercury, and alternative chlorofluorocarbon is sealed as a working fluid, and a spare chamber is provided that can be opened and closed in contact with the test chamber. A heat pipe is put into the chamber, the preliminary chamber is evacuated, then the heat pipe is moved to the inspection chamber which has been evacuated in advance, and then the chamber is sealed between the two chambers, and then leaks from the heat pipe into the inspection chamber. Measuring the gas of the working fluid with a mass spectrometer to obtain an analysis output, and performing a leak test by calibrating the analysis output using the peak height of the constituent element of the gas of the working fluid obtained in advance Leak inspection method for heat pipes.

An extraction chamber is provided in contact with the inspection room so that it can be freely opened and closed. After the inspection in the inspection chamber is completed, the heat pipe is moved to the extraction chamber that has been evacuated in advance. The heat pipe leak inspection method according to claim 2, wherein the heat pipe leak inspection method is taken out from the chamber.

4. The heat pipe leak inspection method according to claim 2, wherein the evacuation in the preliminary chamber is performed until the moisture content in the preliminary chamber becomes 40 ppm or less.

An inspection apparatus for carrying out the leak inspection method according to claim 1, wherein an inspection chamber for inspecting a leak in a heat pipe, a vacuum pump for evacuating the inspection chamber, and an operation for leaking into the inspection chamber A heat pipe leak inspection apparatus comprising a mass spectrometer for analyzing liquid gas as a main part.

An inspection apparatus for performing the leak inspection method according to claim 2, wherein the inspection room is for inspecting a leak of a heat pipe, a spare room arranged in contact with the inspection room, and connected to the inspection room. The main part of the mass spectrometer is a vacuum pump for evacuating the chambers, and the inspection chamber and the spare chamber are openable and closable while the vacuum state of the two chambers is maintained. A heat pipe leak inspection apparatus having a function of moving a heat pipe therebetween.

An inspection apparatus for carrying out the leak inspection method according to claim 3, wherein an inspection room for inspecting a leak of a heat pipe, a spare room and an extraction room arranged in contact with the inspection room, and the inspection room The main part is a connected mass spectrometer and a vacuum pump for evacuating each chamber, and the vacuum state of each chamber is maintained between the examination chamber and the spare chamber and between the examination chamber and the extraction chamber. A heat pipe leak inspection apparatus, wherein the apparatus can be opened and closed in a closed state and has a function of moving the heat pipe between the two chambers.