JP4007735B2 - Thin plate container opener - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a switching device of a container, capable of holding high airtightness capable of restricting an infiltration of particles, for the purpose of automating switching of a shipping thin plate accommodation container of an airtight structure, and preventing the generation of particles manually, preventing contamination, and reducing an operation load, and a shipping thin plate accommodation container switching device capable of enhancing efficiency of a switching operation. SOLUTION: A shipping thin plate accommodation container switching device 30 is structured by a fixing stage 11 for fixing an accommodation container 10, a lid body switching means 15 for switching a lid body of the container 10, a conveying mechanism 19, and a clean booth 31 housing them.

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a thin plate container opening / closing device used at the time of clogging, inspection, transport and shipment of thin plates used in various semiconductor devices such as silicon wafers and SOI.
[0002]
[Prior art]
As a manufacturing process of a semiconductor device such as a memory or an LSI, a single crystal manufacturing process for manufacturing a single crystal silicon ingot from polycrystalline silicon, and a wafer processing process for slicing the ingot to mirror-polish a thin wafer. It is roughly divided into device manufacturing processes for manufacturing various devices on the mirror-polished wafer, and each of the processes is further divided into various batch processes. Each of these processes / processes is carried out batchwise or at different locations and more time is taken. For this reason, when a wafer being manufactured is stored, stored or transported in a container or the like between the processes or processes There is.
[0003]
In particular, the process up to mirror polishing by wafer processing and the device manufacturing process for manufacturing various devices on the wafer are mostly performed by completely different companies. Therefore, after processing the wafer until it is mirror-polished, when transporting the wafer to a device manufacturing process company, the wafer is stored in a storage container (also referred to as a storage box or a shipping box) that holds many wafers at the same time and shipped. .
[0004]
By the way, in the device manufacturing process, it is required that the wafer surface is free of particles, organic substances and ions. Therefore, before storing the processed wafer in the shipping container in the final process of the wafer processing process, which is the previous process. In order to protect the surface of the cleaned wafer from contamination due to the particles, a predetermined operation is performed with sufficient consideration to protect the contamination from the contamination. ing.
[0005]
[Problems to be solved by the invention]
When storing and transporting a large number of thin sheets such as wafers as described above, the wafers housed inside are exposed to various vibrations during the transportation process, and the outside due to the lid being removed. There is a risk of contamination and damage to the thin plate itself. Therefore, the storage container used for storage and conveyance has a structure excellent in hermeticity and retention, and the lid can be tightly closed. As described above, in the opening / closing operation of the lid having a strict fastening structure, a laborious operation accompanied by a force by the operator is required, and tendonitis may be caused at the fingertip.
[0006]
The opening and closing of the storage container can be considered when packing the wafer that has been cleaned into the storage container, when inspecting the wafer after being packed, or when using the wafer after shipment, etc. As described above, when manually opening and closing a container that is tightly sealed, consideration for preventing contamination is also serious. In other words, particles increase due to dust generation from workers when opening and closing, leading to particle adhesion in the storage container or on the wafer surface. In other words, manual intervention has become a problem along with the improvement in cleanliness accompanying high integration.
[0007]
The above particle is a general term for very small substance particles floating in the space or adhering to the surface of the object. It is composed of metals, inorganic substances, and organic substances, and is a highly integrated LSI of 1 gigabit level. In the case of manufacturing, the particle size of the particles to be managed becomes smaller, and the increase of minute particles has become a problem that cannot be ignored.
[0008]
In other words, the adhesion of particles to the wafer during the device process not only leads to short-circuiting or disconnection of fine wiring, but also causes deterioration of device characteristics like metal and organic particles, resulting in a decrease in the yield of the entire device process. Have problems that lead to
[0009]
In other words, the particle size of particles has been reduced from about 0.16 μm to 0.10 μm due to miniaturization of the design rules accompanying high integration, and in the future 0.13 μm design rule generation will be 0.08 μm. The particle size is a management target.
[0010]
Further, as described above, manual opening and closing of the storage container tightly sealed requires a great deal of labor and attention to contamination, and automation is strongly desired from the viewpoint of improving work efficiency.
[0011]
In view of the above-mentioned problems, the present invention replaces automation of opening and closing of a thin plate container with a sealed structure in place of manpower, and further prevents contamination by particles and suppresses invasion of particles by processing in a closed space. An object of the present invention is to provide a thin plate container opening and closing device that facilitates opening and closing processing and improves the efficiency of opening and closing work even in a container that can maintain high sealing performance.
[0012]
[Means for Solving the Problems]
Accordingly, the present invention provides a multi-number of sheets accommodated support in thin plate container switchgear for opening and closing the lid of the container which is opened and closed by the desorption operation of the engaging member provided to each lid and the container body,
A lid opening / closing unit that opens and closes the container lid, a stationary stage that fixes and holds the storage container, and a lid in a closed space in which a vertical unidirectional flow area by clean air is formed from above to below the storage container A transport mechanism for transporting the body opening / closing unit to the detaching position of the engaging member is disposed,
Further, the lid opening / closing unit has an elevating function for adsorbing and holding the lid and moving it up and down in the direction of separation from the container main body, and the cam tip enters the engaging portion of the storage container main body, and at the entry position, An opening and closing cam formed so that the engaging piece can be detached from the engaging position by operating the cam;
The opening / closing cam is configured to be movable to a position where the engaging member is attached / detached following the conveyance of the lid opening / closing unit via the conveyance mechanism.
[0013]
Further, in the present invention, the rotation operation direction of the opening / closing cam is an engagement / disengagement direction from the engagement piece on the lid side and the engagement portion of the container body, and in a direction intersecting with the elevation direction of the elevation mechanism. Yes,
On the other hand, the guide direction of the engaging piece of the engaging portion of the container body may be the lifting direction of the lifting mechanism.
[0014]
More specifically, the open / close cam has a cam shape that allows the open / close cam to enter the lower part of the engagement piece, be detached from the outside by a rotational force, and press-engage the engagement piece from the outside, for example, It is preferable to form a cam with a tapered tip, and a cam device including a mechanism capable of inserting and rotating the cam at the engagement position.
[0015]
According to this invention, since the storage container is configured to automatically open and close, the generation of particles due to human intervention is suppressed, and in particular, the opening and closing operation is performed by a cam that easily enters the engagement site. In addition, even in a container with high sealing performance that can suppress the entry of particles, the cam tip enters the engaging portion of the storage container body, and the engaging piece on the lid side is engaged by the cam operation at the entering position. In order to detach from the position, the opening / closing process can be facilitated and the efficiency of the opening / closing operation can be improved.
[0016]
That is, even when the container is strongly engaged so as to maintain a sufficiently sealed state, the end of the opening / closing cam of the lid body opening / closing unit is inserted into the engaging portion and rotated, so that the container body is provided. It is easy to remove the engaging piece fitted to the engaging portion.
However, since the guiding direction of the engaging piece of the engaging portion of the container body is the lifting direction of the lifting mechanism, the lid body is sucked and held by the lifting mechanism and lifted in the separating direction with respect to the container body. It is possible to easily and automatically open and close the container main body, thereby further facilitating unmanned operation and further suppressing generation of particles due to human intervention.
[0017]
Further, the present invention provides a fixing unit for fixing and holding only the container main body on the fixed stage side, and the fixing unit follows the transport of the lid opening / closing unit via the transport mechanism to the fixed holding position of the container main body. It is good to make it movable .
The said fixed stage, especially, has an identification sensor, thereby detecting the fixed holding position, so as to conform to the shape of the container, it is preferable to press by the fixing unit from the container side.
[0018]
As a result, the lid can be opened with the container body side firmly fixed, and even when the container is strongly engaged so as to maintain a sufficiently sealed state, the container body is fitted to the engaging portion provided on the container body. It is easy to disengage the mating engagement pieces.
[0019]
The thin plate according to claim 1, wherein a plurality of slots wider than the thickness of the thin plate are provided in the thin plate container for holding the plurality of thin plates in a vertical state in order to separate the plurality of thin plates. In the storage container opening and closing device,
The fixed stage may be inclined in one direction toward a direction in which the thin plate falls from the vertical holding position , and the lid body may be opened and closed in a state where the thin plate in the storage container is inclined in the one direction.
In the thin plate container, a plurality of slots are provided to separate a plurality of thin plates. The slot is slightly wider than the thickness of the thin plate, and the thin plate can move to some extent in the slot width direction when the lid is removed. At this time, if the thin plate is not tilted in one direction, excessive force is required to close the lid due to the unstable position of the thin plate, and sometimes the position of the lid holder and the slot of the storage container body There is a possibility that the thin plate breaks. Therefore, by tilting the fixed stage in one direction, especially in a direction that prevents particles from adhering to the device formation surface of the thin plate, it prevents particle adhesion during opening and closing, prevents damage to the thin plate, and automates more stably. Can be done.
[0020]
[0021]
According to the first aspect of the present invention, even if a particle is generated at the engaging portion, it can be easily removed by downflow type clean air. Further, fine particles that may be generated when the engaging part is brought into and out of contact with the opening / closing unit can be discharged through the lower discharge part by vertical flow to the lower part without rising to the sealing part of the storage container. Moreover, the effect of preventing the adhesion of particles is further improved by preventing charging with an ionizer or the like.
[0022]
Further, the lid opening / closing unit has a configuration in which two sets of opening / closing arms are opposed to each other so as to be simultaneously opened / closed with respect to the engaging portions provided on the symmetrical portions on both sides of the storage container. For this reason, the engagement parts on both sides can be brought into and out of contact with each other symmetrically at the same time, so that the escape of the member can be prevented and efficient opening and closing is possible.
[0023]
Further, the engaging part of the storage container is provided below the sealing part of the lid, and particles generated from the engaging part when the lid is opened and closed are generated in the lower space from the sealing part, and the downflow is performed. The structure of the mold closed space can completely prevent contamination of the sealed portion by generated particles.
[0024]
In the closed space format downflow clean air from the top, it flowed from the ceiling portion entirely through the U LPA filter or the like, to flow out air from the opposing floor throughout the vertical direction one-way air flow forming Since it is made into the structure to which it is made, it can respond to collection of a particle | grain with a rated air volume and a particle size of 0.10 micrometer.
[0025]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in detail with reference to the embodiments shown in the drawings. However, the dimensions, materials, shapes, relative arrangements, and the like of the components described in this embodiment are merely illustrative examples and not intended to limit the scope of the present invention unless otherwise specified. Absent.
[0026]
FIG. 1 is a schematic view showing a schematic configuration of a thin plate container opening / closing device according to an embodiment of the present invention. FIG. 2 is a view of a storage container (storage box), a fixed stage, and a lid opening / closing means in the standby position shown in FIG. It is a perspective view which shows arrangement | positioning positional relationship. 3A and 3B are diagrams showing a schematic configuration of the fixed stage of FIG. 2, in which FIG. 3A is a plan view and FIG. 3B is a side view. FIG. 4 is a detailed perspective view showing the arrangement positional relationship and configuration of the lid adsorbing unit, lid opening / closing unit, and transport mechanism of FIG. FIG. 5 is a view showing an operating state of the opening / closing cam of the lid opening / closing unit shown in FIG.
[0027]
As shown in FIG. 1, the thin plate storage container opening / closing device 30 of the present invention includes a fixed stage 11 for fixing the storage container 10, a cover body opening / closing means 15 for opening / closing the cover body 10 a of the storage container 10, and the cover body. It comprises a transport mechanism 19 on which the opening / closing means 15 is mounted and a clean booth 31 in which they are built.
[0028]
The clean booth 31 is provided with a fan filter unit 31a having a built-in ULPA filter, which forms an air purifier integrated with a small blower, in the upper ceiling portion and an exhaust fan (not shown) on the lower floor portion. Is formed in the shape of a plastic curtain, and a vertical unidirectional flow area is formed in the room so that it can collect even particles having a particle size of approximately 0.10 μm or less. good. Further, an ionizer 31b may be installed.
[0029]
As shown in the perspective view of FIG. 2, the storage container 10, the fixed stage 11, and the lid opening / closing means 15 are provided with the lid opening / closing means 15 on the operation base 15 a, as shown in the perspective view of FIG. The storage container 10 is fixed on a container base 11a extending in the moving direction via a fixed stage 11 provided with a fixed unit 12, and is placed on standby.
[0030]
As shown in FIG. 2, the lid opening / closing means 15 is provided with a transport mechanism 19 on its central axis XX from the operation base 15a toward the container base 11a of the storage container 10. On the transport mechanism 19, a lid body opening / closing means 15 comprising a lid body adsorption unit 16 composed of a lid body holding unit 16 a and an elevating unit 16 b and two sets of lid body opening / closing units 17, 17 on the left and right sides. Is installed. At the time of use, the lid holding unit 16a is raised by the elevating unit 16b in the standby position and is moved in the direction of arrow A toward the storage container 10 fixed by the fixed stage 11, so that the left and right lid opening / closing units 17 and 17 are stored in the storage container It is made to face the engaging part 10e of 10 both sides. At the same time, the raised lid holding unit 16a is positioned directly above the lid 10a.
[0031]
3A and 3B are diagrams showing a schematic configuration of the fixed stage of FIG. 2, in which FIG. 3A is a plan view and FIG. 3B is a side view. As shown in FIG. 3 (A), a sensor (identification sensor) 13 is provided on the central axis XX, and a fixing jig 12b and a holding jig 12a are placed at opposing positions with the central axis XX interposed therebetween. The fixing jig 12b is positioned so that the axis of the storage container 10 and the central axis XX coincide with each other when provided and pressed and fixed in advance. In use, the center axis X-X is introduced so that the axis of the storage container 10 coincides, and the sensor 13 positions in the XX direction, and then using the fixing unit 12, that is, the fixing The holding jig 12a is pressed and fixed to the jig 12b via the high multi-cylinder 12d.
[0032]
The fixed stage may be set so that the contained thin plate is slightly inclined (about 5 to 15 degrees) so that the container is inclined in a certain direction (indicated by a dotted line 50 in FIG. 1). .
[0033]
In addition, a soft vinyl chloride plate 12c is affixed to the contact surfaces at the tips of the fixing jig 12b and the holding jig 12a to prevent damage to the fixing surface of the storage container 10 and to prevent slipping when the engaging portion is contacted or separated. It is like that.
[0034]
FIG. 4 is a detailed perspective view showing the arrangement position relationship and configuration of the lid body adsorbing unit 16 and lid body opening / closing units 17 and 17 forming the lid body opening / closing means 15 of FIG. is there.
[0035]
As shown in the figure, the lid adsorbing unit 16 has two adsorbing pads provided so as to adsorb the longitudinal axial portion of the lid 10a of the storage container 10 and can hold the lid 10a horizontally. A lid holding unit 16a having a structure, and an elevating unit 16b for raising and lowering the lid holding unit 16a in the vertical direction in the direction of arrow D.
[0036]
In addition, you may provide the adsorption | suction guide 16c for the cover body holding unit 16a to adsorb | suck the cover body 10a correctly. With this suction guide, the lid 10a can be moved up and down while maintaining the parallelism, and deviation from the container body can be minimized when the lid 10a is opened and closed.
[0037]
Next, the lid opening / closing unit 17 faces the engaging part 10e of the storage container 10, and an opening / closing cam 18c for making contact with and separating from the engaging part 10e, and a vertical arrow B direction of the opening / closing cam 18c. The rotary actuator 18b is configured to rotate, and the both are configured with an insertion slide 18a that causes the engagement portion 10e to be inserted and retracted in the direction of arrow C.
[0038]
The opening / closing cam 18c can be rotated in the direction of arrow B by an appropriate angle by the rotary actuator 18b, and the coupling structure of both the opening / closing cam 18c and the rotary actuator 18b is directed to the engaging portion 10e by the insertion slide 18a. Enables insertion and retraction movement in the direction.
[0039]
Then, two sets of lid body opening / closing units 17 having the above-described configuration are prepared and branched into two forks. When used, the lid body opening / closing units 17 are set on both sides of the storage container 10 fixed and fixed at predetermined positions. It arrange | positions so that the provided engagement site | part 10e may be faced, and it is set as the structure which enables symmetrical opening and closing movement.
[0040]
A structure of lid opening / closing means 15 in which the lid opening / closing units 17, 17 arranged in a bifurcated manner and the lid adsorption unit 16 are formed as an integral structure is mounted on a transport mechanism 19, and At the time of setting, it is retracted in the direction of the arrow A to make it stand by at the origin, and the storage container 10 is fixed by the fixed stage 11 and moved forward when the lid body is opened and closed, so that the engaging portion 10e is contacted and separated.
[0041]
FIG. 5 is a view showing an operating state of the opening / closing cam 18c of the lid opening / closing unit 17 shown in FIG.
[0042]
FIG. 5 (A) shows a case where the engaging piece 10d of the lid 10a is detached from a locking engaging portion (locking claw) 10c provided on the storage container body 10b of the engaging portion 10e. These are figures which show the case where the said engagement piece 10d is engaged with the latching engagement part 10c. As shown in the figure, the engaging piece 10d is a plate member having a flexible member on a strip-like base portion 10f suspended from the upper structure of the lid 10a. The engaging piece 10d is provided with an engaging hole in the center of the plate member. It is adapted to be fitted to or detached from an engaging portion-like projection forming a locking engaging portion 10c provided below the sealing portion of the container body 10b.
[0043]
As seen in FIG. 5 (A), when disengaged is allowed to penetrate the arrow C ₁ direction cams 18c in the lower portion of the engagement portion 10e, and then the tip of the engagement piece 10d is rotated in the arrow B ₁ direction Pushing and opening outward from the flexible portion of the base 10f toward the outside, the state shown in FIG. In this state, the lid body 10a is adsorbed by a lid body holding unit 16a (not shown), and is further lifted via the elevating unit 16b so that the lid body 10a can be released.
[0044]
Further, when the lid 10a is placed on the storage container body 10b and engaged with sealing, the lid holding unit 16a (not shown) is lowered from directly above the storage container body 10b and substantially sealed via packing. Place in a stationary state. Then, the cams 18c pushes the engagement piece 10d in the on inclined from the arrow C ₂ direction engaging hole is fitted with the locking engaging portion 10c, completely seal the container 10 to complete the engagement Put it in a state.
[0045]
The contact and separation of the engaging part by the above configuration is a simple structure, the engaging part can be performed without providing any rotation part, and is automatically and reliably performed while being isolated by a clean booth. be able to.
[0046]
Even when there is a possibility of generation of minute particles due to the rotation of the opening / closing cam 18c, as described above, the particle generation site is located at the lower portion of the sealing portion, and the built-in clean booth has a fan at the upper portion. Since the vertical flow downflow type having the filter unit 31a and the ionizer 31b and the exhaust device in the lower portion is used, it is possible to prevent contamination of particles generated from the engaging portion into the storage container 10.
[0047]
FIG. 6 is a diagram showing the state of the lid opening / closing state of the storage container 10 fixed by the fixing stage 11 by the lid opening / closing means 15 shown in FIG.
[0048]
This will be described below in order.
1) (A) in the figure is a diagram showing the positions and modes of the lid holding unit 16a and the opening / closing cam 18c immediately before opening and closing. In the figure, the lid holding unit 16a maintains a predetermined height with respect to the lid 10a. The lid opening / closing means 15 is moved via the transport mechanism 19 in a state where the opening / closing cam 18c is in a horizontal state with the storage container 10 sandwiched therebetween, and is brought into contact with the engaging portion 10e.
[0049]
More specifically, when the storage container 10 is carried onto the container base 11a, the lid holding unit 16a is raised in advance, and the lid opening / closing means 15 is also retracted via the transport mechanism 19 to take a standby posture. Put it. Then, the storage container is carried onto the fixed stage by an automatic container transfer device such as a conveyor (not shown) and fixed and set at a predetermined position by the fixed stage 11.
[0050]
Thereafter, the lid opening / closing means 15 kept at the origin position is advanced via the transport mechanism 19 so that the two sets of left and right lid opening / closing units 17 sandwich the container set on the fixed stage, and the engagement portion 10e. For the time being.
[0051]
2) Next, in (B) of the figure, the lid holding unit 16a is lowered to the upper surface of the lid by an elevator unit 16b (not shown) and is adsorbed by an adsorption pad. In this case, it is preferable to provide a lowering guide for the lid holding unit 16a and lower it while maintaining parallelism so that the lid is sucked at an accurate position.
[0052]
Simultaneously insertable angle cams 18c, for example, the strip-shaped engagement piece 10d of horizontally through the insertion slides 18a (not shown) while maintaining the advancing from the left and right in the C ₁ direction lid 10a to the tip Insert at the bottom.
[0053]
3) Next, in (C) of the figure, the inserted opening / closing cam 18c is rotated about 30 degrees through the rotary actuator 18b (not shown) in the directions of the arrows B ₁ and B ₁ simultaneously on the left and right sides, and The engaging piece 10d is spread outwardly in a curved shape at the base portion of the flexible member, and the engaging piece 10d is detached from the locking engaging portion 10c.
[0054]
At the same time, the lifting / lowering unit 16b (not shown) is operated and lifted while holding the lid 10a, and the lid 10a is placed in an open state. Then, the lid opening / closing means 15 is retracted to the origin position while the lid is held and raised.
[0055]
4) Next, in (D) of the figure, after completing a predetermined operation such as packing the wafer in the storage container, the container is carried in from the outside and set on the fixed stage. Then, the lid body opening / closing means 15 is advanced to advance to a predetermined position so as to sandwich the storage container body 10b to which the lid body opening / closing unit 17 is fixed. Next, the lid body holding unit 16a is lowered and pressed without causing a displacement right above the storage container body 10b while holding the lid body 10a through an elevator unit 16b (not shown), and the lid body 10a and the storage container body 10b is placed in a substantially sealed state.
[0056]
5) Next, in (E) of FIG, the cams 18c through the insertion slides 18a (not shown) in a state of being rotated in (C) of FIG advancing in the arrow C ₂ direction, the engagement The piece 10d is fitted into the locking engagement portion 10c and placed in the engaged state. In this case, the opening / closing cam may be rotated downward to press the engagement piece.
[0057]
FIG. 7 shows the configuration of another embodiment of the lid opening / closing unit 17 shown in FIG.
[0058]
In this case, the engagement piece 10d is disengaged by turning the opening / closing cam 18c via the rotary actuator 18b in the same manner as the lid opening / closing unit 17, and the engagement engagement portion of the detached engagement piece 10d is released. The engagement with 10c is performed by pressing a separately prepared closing jig 21.
[0059]
In other words, as shown in the figure, two opening / closing cams 18c, 18c are provided on a rotating shaft 22 rotated by a rotary actuator 18b, and closing jigs 21, 21 that are operated by a pressing cylinder 20 are provided on both sides thereof. It is as.
[0060]
【The invention's effect】
The above-described configuration provides the following effects.
1) Although the thin plate container opening and closing device according to the present invention shows a great effect no matter what process is used, it is particularly effective in a process that is easily affected by particles by incorporating a clean booth.
[0061]
For example, after cleaning of wafer processing, it is necessary to open and close the storage container for inspection at the shipping stage, etc., but at this time, the increase in particles is not preferable, and refilling of the wafer in a specific atmosphere is performed. In some cases, the switchgear according to the present invention may be preferable.
[0062]
2) Further, the use of this apparatus makes it possible to open and close the storage container without human intervention, thereby preventing generation of particles due to human intervention.
[Brief description of the drawings]
FIG. 1 is a schematic view showing a schematic configuration of a shipping thin plate container opening / closing device with a built-in clean booth according to the present invention.
2 is a perspective view showing the positional relationship between the storage container, the fixed stage, the lid opening / closing means, and the transport mechanism at the standby position shown in FIG. 1;
3A and 3B are diagrams showing a schematic configuration of the fixed stage of FIG. 2, in which FIG. 3A is a plan view and FIG. 3B is a side view.
4 is a detailed perspective view showing the arrangement positional relationship and configuration of the lid adsorbing unit, lid opening / closing unit, and transport mechanism of FIG. 2; FIG.
FIG. 5 is a diagram showing an operating state of an opening / closing cam of the lid opening / closing unit shown in FIG. 4;
FIG. 6 is a diagram illustrating a state in which the lid opening / closing state of the storage container 10 fixed by the fixing stage by the lid opening / closing means shown in FIG.
7 shows the configuration of another embodiment of the lid opening / closing unit 17 shown in FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Storage container 10a Cover body 10b Storage container main body 10c Locking engagement part (locking claw)
10d Engagement piece 10e Engagement site 10f Base 11 Fixing stage 12 Fixing unit 12a Holding jig 12b Fixing jig 13 Sensor 15 Lid opening / closing means 15a Operation stand 16a Lid holding unit 16b Lifting unit 17 Lid opening / closing unit 18a Insert slide 18b Rotary actuator 18c Opening / closing cam 19 Transport mechanism 21 Closing jig 31 Clean booth 31a Fan filter unit 31b Ionizer

Claims (5)

In a thin plate storage container opening and closing device that stores and supports a large number of thin plates and opens and closes a lid of a storage container that is opened and closed by an attachment / detachment operation of an engagement member provided on each of the lid and the container body,
A lid opening / closing unit that opens and closes the container lid, a stationary stage that fixes and holds the storage container, and a lid in a closed space in which a vertical unidirectional flow area by clean air is formed from above to below the storage container A transport mechanism for transporting the body opening / closing unit to the detaching position of the engaging member is disposed,
Further, the lid opening / closing unit has an elevating function for adsorbing and holding the lid and moving it up and down in the direction of separation from the container main body, and the cam tip enters the engaging portion of the storage container main body, and at the entry position, An opening and closing cam formed so that the engaging piece can be detached from the engaging position by operating the cam;
A thin plate container opening / closing device, wherein the opening / closing cam is configured to be movable to a detachment operation position of the engagement member following the conveyance of the lid opening / closing unit via the conveyance mechanism.   The thin plate storage container opening and closing device according to claim 1, wherein an ionizer is disposed at a position above the storage container in the closed space, and clean air directed downward from above the storage container is prevented from being charged.   A fixed unit for fixing and holding only the container main body on the fixed stage side is provided, and the fixed unit is configured to be movable to the fixed holding position of the container main body following the transport of the lid opening / closing unit via the transport mechanism. The thin plate container opening and closing device according to claim 1 or 2.   The thin plate storage container opening and closing device according to claim 3, wherein the fixed stage has an identification sensor, detects the fixed holding position, and presses it from the side surface of the storage container with the fixing unit. The thin plate container opening and closing device according to claim 1, wherein a plurality of slots wider than the thickness of the thin plate are provided in the thin plate container for holding the plurality of thin plates in a vertical state in order to separate the plurality of thin plates. ,
The fixed stage is inclined in one direction toward the direction in which the thin plate falls from the vertical holding position , and the lid is opened and closed in a state where the thin plate in the storage container is inclined in the one direction. A thin plate container opening and closing device.

Images