JP4039751B2 - Image data collection microspectrophotometer - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a microspectrophotometer capable of analyzing the characteristics of an object to be measured by optical means, and more particularly to improvement of data acquisition of an object image to be measured by a microspectrophotometer.
[0002]
[Prior art]
The microspectrophotometer can measure the spectrum of a minute and minute sample that cannot be measured by a normal spectrophotometer. The microinfrared spectrophotometer generally used as a microspectrophotometer has a spatial resolution of 10 μm and a sample size. Can be reduced to about 10 μm.
[0003]
Further, it has features such as non-destructive and non-contact measurement of a sample, confirmation of a measurement site, easy sampling, and measurement of not only an individual but also a solution. Therefore, films and coatings, foreign materials in rubber, deposits on gallium arsenide, impurities in silicon wafers, deposits on microswitches, cells, biological samples, analysis of minerals in rocks and meteorites, etc. It is applied in various fields such as fields, electrical and electronic materials, medical fields, and academic fields.
[0004]
In such a microspectrophotometer, the object to be measured is visually observed with a microscope, and after adjusting the measurement site, the object to be measured is measured by irradiating the object with light in an invisible region. It was to analyze the characteristics.
[0005]
[Problems to be solved by the invention]
However, with a microspectrophotometer, when the measurement site is adjusted with a microscope, only the spectral data of the object to be measured is collected, even though the object image is visually confirmed. There has been no apparatus that can collect a measured object image as data.
[0006]
For this reason, when measuring the state of the phase transition of the object to be measured, for example, only the object image before the start of measurement and the object image after the measurement can be seen, and the object image is also measured by the phase transition. In spite of the large change, it was impossible to see the image of the object to be measured that changed slightly due to the slight change of time or temperature, and how it changed. In addition, the object image data at the time of spectral data collection should be retained, even though the object image before the start of measurement and the object image after the end of the measurement can be seen with eyes or as photographs. However, even if the spectrum data can be reviewed again after the measurement is completed, the measured object image cannot be reviewed.
[0007]
Further, the microspectrophotometer is generally performed with light in an invisible region when collecting spectral data, and there is a problem that it cannot be directly captured as an image. For this reason, even if the object to be measured is irradiated with light in the visible region, if the object to be measured is irradiated with light in the visible region together with the light in the invisible region, the visible light enters the detector that detects the spectrum, and the spectrum is measured. There was a problem that the result could not be obtained correctly or noise was added.
For this reason, it was necessary to improve the optical system of the conventional microspectrophotometer in order to simultaneously perform spectrum measurement and capture of the measured object image.
[0008]
The present invention has been made in view of the above problems, and an object of the present invention is to provide a microspectrophotometer capable of collecting data of an object to be measured together with spectrum data of the object to be measured.
[0009]
[Means for Solving the Problems]
In order to achieve the above object, a microspectrophotometer according to the present invention includes a light source for irradiating light to a measurement object, a spectrum detection means for detecting a spectrum from light having information on the measurement object, and a measurement result. In a microspectrophotometer comprising a storage means for storing and a display means for displaying the measurement result stored in the storage means, the microspectrophotometer comprises an image capturing means for capturing a measured object image as image data, and the image capturing means The captured object image is stored in the storage means, and the image data stored in the storage means is read, whereby the object image can be reproduced on the display means.
Further, in the microspectrophotometer according to the present invention, the microspectrophotometer includes a switching unit capable of switching the light irradiated from the light source to the light in the visible region to the light in the visible region and the light in the invisible region. It is preferable to collect spectrum data and image data by irradiating light in an invisible region from a light source, and irradiating light in the visible region when capturing object image data.
[0010]
Moreover, in the microspectrophotometer according to the present invention, visible light incidence prevention is achieved by simultaneously irradiating the object to be measured with light in the visible region and invisible region from the light source and preventing the light in the visible region from entering the spectrum detecting means. By providing the means, it is preferable to simultaneously collect the spectrum data and the image data of the object to be measured.
In the microspectrophotometer according to the present invention, it is preferable that the visible light incident preventing means is a filter that blocks light in the visible region.
Further, in the microspectrophotometer according to the present invention, the visible light incidence preventing means transmits the light in the visible region, reflects the light in the invisible region, or transmits the light in the invisible region, and transmits the light in the visible region. It is preferable to be composed of a beam spiriter that reflects the light beam.
Moreover, in the microspectrophotometer according to the present invention, the light irradiated from the light source to the object to be measured uses light in the invisible region, and the image capturing means captures image data of the object image by the light in the invisible region. It is preferable to use a CCD that can be captured.
[0011]
Further, in the microspectrophotometer according to the present invention, when performing time-varying measurement for measuring the change of the measurement object with respect to the change of the measurement object over time or the environment surrounding the measurement object, spectral data and When storing the image data in the storage means, the elapsed time from the start of measurement or one or more parameters of the external environment of the sample to be measured are used as a common index, and the spectrum data and the image data are respectively referred to as the index. It is preferable to store them in correspondence.
Further, in the microspectrophotometer according to the present invention, when performing time-varying measurement for measuring the change of the measurement object with respect to the change of the measurement object over time or the environment surrounding the measurement object, spectral data and When storing the image data in the storage means, it is preferable to store the spectrum data and the image data collected at the same time as a set.
[0012]
Further, in the microspectrophotometer according to the present invention, when performing time-varying measurement for measuring the change of the measurement object with respect to the change of the measurement object over time or the environment surrounding the measurement object, spectral data and When storing the image data in the storage means, it is preferable to store the spectrum data and the image data in the order of collection.
Further, in the microspectrophotometer according to the present invention, when displaying the measurement result on the display means, the state of change of the object to be measured is displayed by overlapping the spectral data and the image data in the collected order. Is preferably displayed as a moving image.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
The image data collection microspectrophotometer according to the present invention can collect image data of a measured object image together with spectrum data. For this reason, the microspectrophotometer according to the present invention can analyze the measurement object in more detail by newly adding information such as an image of the measurement object to the spectrum data when analyzing the measurement object.
[0014]
Hereinafter, a microspectrophotometer according to the present invention will be described in detail using an embodiment of the present invention.
First embodiment
FIG. 1 is a schematic diagram of an apparatus according to an embodiment of an image data collection microspectrophotometer of the present invention.
As shown in the figure, a microspectrophotometer 2 according to the present invention includes a light source 4 that irradiates light to a measurement object, a spectrum detection means 6 that detects a spectrum from light having information on the measurement object, and a measurement result. Storage means 8 for storing data, display means 10 for displaying the measurement results stored in the storage means 8, and image capturing means 12 for capturing the measured object image as image data.
[0015]
In the present embodiment, the microspectrophotometer 2 is a microinfrared spectrophotometer, an infrared light source is used as the light source 4, a mercury cadmium tellurium (MCT) photodetector is used as the spectrum detection means 6, and a storage means 8 is used as the storage means 8. A hard disk built in the spectrophotometer is used, a CRT is used as the display means 10, and a CCD camera is used as the image capturing means 12. The present invention is not limited to these.
[0016]
What is characteristic in the present invention is that not only spectral data of an object to be measured is obtained as in an ordinary microspectrophotometer, but also image capturing means 12 for capturing an image of the object to be measured as image data. The measured object image captured by the means 12 can be stored in the storage means 8, and the measured object image can be displayed by reading out the image data stored in the storage means 8 even after the measurement. It can be played back to 10.
[0017]
The infrared light emitted from the light source 4 is applied to the object to be measured installed on the sample stage 28 by the transmission / reflection switching mirror 14, the reflection mirrors 16, 18, 20, the semi-transmission mirror 22, and the Gassegrain mirrors 24, 26. The In order to measure the transmitted infrared light of the object to be measured, it is reflected downward by the transmission / reflection switching mirror 14 and further reflected by the reflecting mirrors 18 and 20 to the Gassegrain mirror 26 and placed on the sample stage 28. The measured object can be irradiated with infrared light from below to obtain transmitted infrared light of the object to be measured. Conversely, when the light is reflected upward by the transmission / reflection switching mirror 14, it is reflected by the reflection mirror 16 and the semi-transmission mirror 22 to the Gassegrain mirror 24, and the infrared light is placed on the sample stage 28. The reflected infrared light can be obtained from the object to be measured which is irradiated from above and receives the infrared light from above. Such transmitted infrared light and reflected infrared light have information on the object to be measured, which is detected by the MCT detector 6 and a spectrum is collected. The collected spectrum data of the measured object is stored in the hard disk as the storage means 8 via the A / D converter 30 and the CPU 32.
[0018]
What is characteristic in the present invention is that the image data of the object to be measured together with the spectrum data of the object to be measured is stored in the storage means 8 as data, and the image data can be reproduced even after the measurement. is there. However, since the infrared light emitted from the light source 4 is light in an invisible region, if the image data is collected as it is, the measured object image cannot be seen even if the image data is displayed on the display means.
[0019]
Therefore, in the present embodiment, a changeover switch 34 that switches the light emitted from the light source 4 from infrared light to visible light is provided. With this configuration, infrared light is emitted from the light source 4 when collecting spectral data, and emitted from the light source 4 by the changeover switch 34 when collecting image data of the measured object image. By switching light from infrared light to visible light, visible image data can be collected.
[0020]
In the present embodiment having such a configuration, the change of the measurement object can be performed by changing various parameters of the environment surrounding the measurement object such as a change of the measurement object over time or a change of the measurement object due to a temperature change. Even during measurement, the time error for collecting the spectrum data and the image data can be within a few seconds to a few tens of seconds, and can be collected almost simultaneously.
It is also possible to automatically switch the light source from invisible light to visible light after collecting spectral data of the object to be measured and collect image data.
[0021]
In the microspectrophotometer according to the present invention configured as in the first embodiment, when collecting spectral data of an object to be measured, only invisible light is emitted from the light source, and when collecting image data. Since only visible light is emitted, visible light is not incident on a detector that detects invisible light, and accurate spectral data can be obtained, and clear image data of an object to be measured can be obtained by visible light. Can do.
[0022]
Second embodiment
FIG. 2 shows a schematic diagram of the second embodiment of the present invention. In the same figure, the thing corresponding to FIG. 1 of 1st embodiment adds the code | symbol 100, and abbreviate | omits description.
Infrared light, which is invisible light, and visible light are simultaneously emitted from the light source 104 of the microspectrophotometer 102 in the present embodiment. If this is the case, when the spectral data of the object to be measured is collected by the MCT detector 106, visible light is incident on the detector and accurate spectral data cannot be obtained. Therefore, in this embodiment, a visible light blocking filter 136 that blocks and cuts light in the visible region is provided in front of the MCT detector 106 as a visible light incident preventing unit that prevents visible light from entering the detector. .
[0023]
Also in this embodiment, the infrared light emitted from the light source 104 is sampled by the transmission / reflection switching mirror 114, the reflection mirrors 116, 118, 120, the semi-transmission mirror 122, and the Gassegrain mirrors 124, 126 as in the first embodiment. The object to be measured placed on the stage 128 is irradiated. In order to measure the visible and infrared transmitted light of the object to be measured, the light is reflected downward by the transmission / reflection switching mirror 114 and further reflected by the reflection mirrors 118 and 120 to the Gassegrain mirror 126 and placed on the sample table 128. Further, infrared light is irradiated from below on the measured object, and visible and infrared transmitted light of the measured object can be obtained. Conversely, when the light is reflected upward by the transmission / reflection switching mirror 114, it is reflected by the reflection mirror 116 and the semi-transmission mirror 122 to the Gassegrain mirror 124, and the visible and infrared light is reflected on the sample table 128. Visible and infrared reflected light can be obtained from an object to be measured which is irradiated from above and receives visible and infrared light from above. Then, the obtained transmitted infrared light or reflected infrared light has information on the object to be measured.
[0024]
The difference from the first embodiment is that such transmitted infrared light or reflected infrared light is obtained together with visible light. Visible and infrared light having information on the object to be measured is separated by the beam splitter 138 into light sent to the MCT detector 106 for collecting the spectrum and the CCD camera 112 for collecting image data of the object to be measured. The light transmitted to the CCD camera 112 is collected as an object image to be measured. From the light sent to the MCT detector 106, visible light is cut by the visible light blocking filter 136, and only infrared light enters the MCT detector 106, and the spectrum of the object to be measured is collected. The collected spectral data and image data of the object to be measured are stored in the hard disk as the storage means 108 via the A / D converter 130 and the CPU 132.
[0025]
What is characteristic in the present invention is that image data of the object to be measured is collected at the same time as the spectrum data of the object to be measured, and stored in the storage means 108 as data, so that the image data can be reproduced even after measurement. It is a thing. In the present embodiment, by using a filter that simultaneously emits infrared light and visible light from the light source 104 and cuts visible light from light incident on the MCT detector 106, spectrum data and object image data are measured. Can be collected at the same time.
[0026]
In the present embodiment having such a configuration, the change of the measurement object can be performed by changing various parameters of the environment surrounding the measurement object such as a change of the measurement object over time or a change of the measurement object due to a temperature change. Even when measuring, there is no time error in collecting spectral data and image data, and it is possible to collect simultaneously, so together with spectral data such as substances that undergo phase transition due to temperature and substances that change their form over time It is possible to visually grasp the state of change of the object to be measured by the image data, it is possible to dramatically increase the amount of information of the object to be measured, and accurate analysis because there is no time deviation in the data It can be performed.
The light sent to the CCD camera 112 includes both visible and infrared light, but light in the infrared region is not visible to the eye. It can be observed as a measured object image.
[0027]
Third embodiment
FIG. 3 shows a schematic diagram of the third embodiment of the present invention. In the same figure, the thing corresponding to FIG. 1 of 1st embodiment adds the code | symbol 200, and abbreviate | omits description.
From the light source 204 of the microspectrophotometer 202 in the present embodiment, infrared light that is invisible light and visible light are emitted simultaneously as in the second embodiment.
[0028]
Visible and infrared light emitted from the light source 204 is transmitted to the measurement object placed on the sample stage 228 by the transmission / reflection switching mirror 214, the reflection mirrors 216, 218 and 220, the semi-transmission mirror 222, and the Gassegrain mirrors 224 and 226. Irradiated. In order to measure the visible and infrared transmitted light of the object to be measured, it is reflected downward by the transmission / reflection switching mirror 214 and further reflected by the reflecting mirrors 218 and 220 to the Gassegrain mirror 226 and placed on the sample table 228. Further, visible and infrared light is irradiated from below on the measured object, and visible and infrared transmitted light of the measured object can be obtained. Conversely, when the light is reflected upward by the transmission / reflection switching mirror 214, it is reflected by the reflection mirror 216 and the semi-transmission mirror 222 to the Gassegrain mirror 224, and visible and infrared light is placed on the sample table 228. Visible and infrared reflected light can be obtained from an object to be measured which is irradiated from above and receives visible and infrared light from above. Then, the obtained transmitted infrared light or reflected infrared light has information on the object to be measured. Visible and infrared light from the object to be measured is separated by the beam splitter 224 into light sent to the MCT detector 206 that collects the spectrum and the CCD camera 212 that collects image data of the object to be measured. The CCD camera 212 collects a measured object image, and the MCT detector 206 collects a spectrum of the measured object. The collected spectrum data and image data of the object to be measured are stored in the hard disk as the storage unit 208 via the A / D converter 230 and the CPU 232.
[0029]
In the present embodiment, the MCT detector 206 that collects the spectrum and the beam splitter 238 that distributes visible and infrared light from the object to be measured to the CCD camera 212 that collects image data of the object image are MCTs. Visible light incidence preventing means for preventing visible light from entering the detector. The beam spirit 238 reflects visible light and transmits infrared light. For this reason, there is an advantage that it is not necessary to change the configuration of an ordinary optical system.
As in the second embodiment, the image data of the object to be measured is collected at the same time as the spectrum data of the object to be measured and stored in the storage unit 208 as data, and the image data can be reproduced even after the measurement. It is also possible to simultaneously output infrared light and visible light from the light source 204 and collect spectral data and measured object image data simultaneously.
[0030]
Therefore, there is no time error in collecting spectrum data and image data, and it is possible to drastically increase the amount of information of the object to be measured by collecting it at the same time. Analysis can be performed.
In the present embodiment, a beam spiriter that reflects visible light and transmits infrared light is used. However, even a beam spiriter that transmits visible light and reflects infrared light by an optical system is used. Functions and effects similar to those of the embodiment can be obtained.
[0031]
Fourth embodiment
A fourth embodiment of the present invention will be described with reference to FIG.
Only infrared light which is invisible light is emitted from the light source 204 of the microspectrophotometer 202 in the present embodiment.
[0032]
Infrared light emitted from the light source 204 is irradiated on the object to be measured placed on the sample stage 228 by the transmission / reflection switching mirror 214, the reflection mirrors 216, 218, 220, the semi-transmission mirror 222, and the Gassegrain mirrors 224, 226. The From the object to be measured irradiated with infrared light, transmitted light or reflected light having information on the object to be measured is emitted, and the information light from the object to be measured is collected by the beam splitter 238 for MCT. The light is divided into a detector 206 and light sent to a CCD camera 212 that collects image data of the measured object image. The CCD camera 212 collects a measured object image, and the MCT detector 206 collects a spectrum of the measured object. The collected spectrum data and image data of the object to be measured are stored in the hard disk as the storage unit 208 via the A / D converter 230 and the CPU 232.
[0033]
In the present embodiment, the CCD camera 212 uses an infrared imaging camera in order to collect image data of an object image to be measured with infrared light that is light in an invisible region. For this reason, there is an advantage that there is no need to change the configuration of a normal optical system.
Further, in the present embodiment, similarly to the first and second embodiments, the image data of the object to be measured is collected simultaneously with the spectrum data of the object to be measured and stored in the storage unit 208 as data. Image data can be reproduced, infrared light can be emitted from the light source 204, and spectral data and object image data can be collected simultaneously.
[0034]
Therefore, there is no time error in collecting spectrum data and image data, and it is possible to drastically increase the amount of information of the object to be measured by collecting it at the same time. Analysis can be performed.
In this embodiment, a changeover switch for switching between visible light and invisible light is attached to the light source as in the first embodiment, and the object image is confirmed by the eyepiece by irradiating the object with visible light. It can also be configured to. If comprised in this way, it will select while visually observing which part of a to-be-measured object is analyzed before a measurement, and only infrared light can be irradiated in a measurement.
[0035]
The present invention is not limited to the first to fourth embodiments. Even a device equipped with a differential scanning calorimeter in a microspectrophotometer can be configured as in the present invention. With such a device, it is possible to measure differential scanning heat together with the spectral data of the object to be measured and obtain the data, as well as an apparatus capable of taking the object image together with these data as data. Become. Such an apparatus is useful when analyzing a phase transition material.
Microspectrophotometers are frequently used not only for simply measuring spectral data of an object to be measured, but also for measuring changes in the object to be measured over time or temperature changes by changing the temperature. The present invention can also be used in such measurement.
[0036]
In the microspectrophotometer, an aperture may be used to collect a spectrum of a specific part of the object to be measured. However, if this aperture is used when taking an image of the object to be measured, the range of the image data is often too narrow to be useful. Therefore, in the present invention, when the aperture is used, the aperture is closed so that the spectrum data of the specific part can be collected when the spectrum data is collected, and the aperture is fully opened when the image data is collected. Is good. It is desirable that the aperture is automatically opened and closed. Alternatively, the aperture may be applied only to the light incident on the spectral data detecting means after passing through a beam spiriter that divides the light from the object to be measured into the spectral data detecting means and the image data capturing means.
[0037]
In the present invention, when the spectrum data and image data of the sampled object to be measured are read from the storage means and displayed on the display means, the captured images are arranged on the time axis and sequentially displayed, It can be reproduced as a moving image in which the object image changes, or detailed analysis can be performed by displaying the spectrum data and the image data side by side.
In order to display the spectrum data and the image data collected at the same time in this way, it is important how the spectrum data and the image data are stored in correspondence in the storage means.
[0038]
In this way, when multiple spectral data and image data are collected for one measured object, when analyzing changes in the measured object over time, changes due to temperature of the measured object, changes due to pressure changes In many cases, the measurement is performed with the passage of time, such as when changing the parameters of the external environment of the object to be measured.
[0039]
Therefore, as one method, the elapsed time from the start of measurement is used as a common index, and spectrum data and image data are stored together with the collected time, respectively. Corresponds to the collected time. Alternatively, one or more parameters in the external environment of the sample to be measured, such as temperature changes and pressure changes, are used as a common index, and each of these parameters is combined with parameters that indicate the state when the spectrum data and image data are collected. When the spectral data and the image data collected at the same time are associated with each other, the correspondence is made by a parameter representing the state of the object to be measured when the spectral data is collected.
[0040]
FIG. 4 shows a first example of a storage format of measurement results obtained by measuring the object to be measured by the apparatus of the present invention. Spectral data and image data are stored in separate files together with an index of how many times each was measured, and the spectrum and image data collected at the same time correspond to the same temperature at the time of collection. Thus, it is possible to associate the spectrum data and the image data collected at the same time.
[0041]
When this method is used in the above-described first embodiment, it is predicted that the time and parameters will be slightly shifted. Therefore, it is preferable that the corresponding time and parameters have a slight width.
If this method is used for storage, the parameters of the environment surrounding the object to be measured are stored as an index together with the spectrum and image data. It is easy to understand what characteristics are shown depending on the environment.
[0042]
As another method, spectral data and image data collected simultaneously from the beginning are stored as a set.
FIG. 5 shows a second example of the storage format of the measurement result obtained by measuring the object to be measured by the apparatus of the present invention. Spectral data and image data collected at the same time are stored in the same file.
If stored by this method, the spectrum and image data correspond to each other from the beginning, so that it is possible to omit the work of re-corresponding the data collected at the same time.
[0043]
There is also a method in which spectrum data and image data are stored in the order of collection, and the spectrum data and image data in the same order are associated with each other.
FIG. 6 shows a third example of the storage format of the measurement result obtained by measuring the object to be measured by the apparatus of the present invention. Spectral data and image data are arranged in the order of measurement, and the spectral data and image data in the same order correspond to each other.
[0044]
Further, FIG. 7 shows a fourth example of the storage format of the measurement result obtained by measuring the object to be measured by the apparatus of the present invention. In this example, the time measured by a clock incorporated in the apparatus is shown, and the data is arranged in the order of the time. The spectral data and image data having the same order are associated with each other.
If stored in this way, the spectrum and image data can be associated with each other relatively easily.
[0045]
It should be noted that the present invention is not limited to those in which spectral data and image data are associated by these methods.
In the apparatus provided with the differential scanning calorimeter in the microspectrophotometer according to the present invention, the measurement data by the differential heat measurement and the image data can be displayed in correspondence with each other.
[0046]
【The invention's effect】
As described above, since the microspectrophotometer according to the present invention can collect image data together with spectrum data, it can analyze the object to be measured in detail.
In addition, by providing visible light incident prevention means for preventing visible light from entering the spectrum detection means, it is possible to collect image data and spectral data of the object to be measured simultaneously without any time error. is there.
[Brief description of the drawings]
FIG. 1 is a schematic view of an apparatus according to an embodiment of an image data collection microspectrophotometer of the present invention.
FIG. 2 shows a schematic diagram of a second embodiment of the present invention.
FIG. 3 is a schematic diagram of a third embodiment and a fourth embodiment of the present invention.
FIG. 4 shows a first example of a storage format of measurement results obtained by measuring an object to be measured by the apparatus of the present invention.
FIG. 5 shows a second example of a storage format of measurement results obtained by measuring an object to be measured by the apparatus of the present invention.
FIG. 6 shows a third example of a storage format of measurement results obtained by measuring an object to be measured by the apparatus of the present invention.
FIG. 7 shows a fourth example of a storage format of measurement results obtained by measuring an object to be measured by the apparatus of the present invention.
[Explanation of symbols]
2: Microspectrophotometer
4: Light source
6: Spectrum detection means
8: Memory means
10: Display means
12: Image capturing means
14: Sample stage
16: A / D converter
18: CPU
20: Changeover switch
122: Visible light blocking filter
124: Beam splitter

Claims (5)

A light source for irradiating the object to be measured;
Spectrum detecting means for detecting a spectrum from light having information on the object to be measured;
Storage means for storing measurement results;
Display means for displaying the measurement results stored in the storage means;
In a microspectrophotometer comprising:
Image capturing means for capturing a measured object image as image data;
The measurement object image captured by the image capturing unit is stored in the storage unit,
By reading the image data stored in the storage means, Ri renewable der measured object image on the display means,
When measuring changes over time in measuring changes in the measurement object over time or changes in the environment surrounding the measurement object, measurement is performed when storing spectral data and image data in the storage means. Image data characterized in that the elapsed time from the start or one or more parameters of the external environment of the sample to be measured are used as a common index, and spectral data and image data are stored in correspondence with the respective indices. Collection microspectrophotometer. A light source for irradiating the object to be measured;
Spectrum detecting means for detecting a spectrum from light having information on the object to be measured;
Storage means for storing measurement results;
Display means for displaying the measurement results stored in the storage means;
In a microspectrophotometer comprising:
Image capturing means for capturing a measured object image as image data;
The measurement object image captured by the image capturing unit is stored in the storage unit,
By reading out the image data stored in the storage means, the measured object image can be reproduced on the display means,
When performing time-dependent change measurement to measure changes in the measurement object over time or changes in the measurement object relative to the environment surrounding the measurement object, the spectral data and the image data are stored simultaneously in the storage means. An image data collection microspectrophotometer characterized by storing collected spectrum data and image data as a set. A light source for irradiating the object to be measured;
Spectrum detecting means for detecting a spectrum from light having information on the object to be measured;
Storage means for storing measurement results;
Display means for displaying the measurement results stored in the storage means;
In a microspectrophotometer comprising:
Image capturing means for capturing a measured object image as image data;
The measurement object image captured by the image capturing unit is stored in the storage unit,
By reading out the image data stored in the storage means, the measured object image can be reproduced on the display means,
When measuring the time-dependent change measurement to measure the change of the measurement object over time or the change of the measurement object relative to the environment surrounding the measurement object, it is collected when storing the spectrum data and image data in the storage means. A spectral data spectrophotometer characterized by storing spectral data and image data in order. In the image data collection microspectrophotometer according to any one of claims 1 to 3 ,
When displaying the measurement result on the display means, the image data is characterized in that the state of change of the object to be measured is displayed as a moving image by displaying the spectrum data and the image data in the order of collection. Collection microspectrophotometer. A light source for irradiating the object to be measured;
Spectrum detecting means for detecting a spectrum from light having information on the object to be measured;
Storage means for storing measurement results;
Display means for displaying the measurement results stored in the storage means;
In a microspectrophotometer comprising:
Image capturing means for capturing a measured object image as image data;
The measurement object image captured by the image capturing unit is stored in the storage unit,
By reading out the image data stored in the storage means, the measured object image can be reproduced on the display means,
When displaying the measurement result on the display means, the image data is characterized in that the state of change of the object to be measured is displayed as a moving image by displaying the spectrum data and the image data in the order of collection. Collection microspectrophotometer.

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