Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JP4041858B2 - Composite polishing method and abrasive polishing apparatus for cemented carbide electrical discharge machining surface - Google Patents
[go: Go Back, main page]

JP4041858B2 - Composite polishing method and abrasive polishing apparatus for cemented carbide electrical discharge machining surface - Google Patents

Composite polishing method and abrasive polishing apparatus for cemented carbide electrical discharge machining surface Download PDF

Info

Publication number
JP4041858B2
JP4041858B2 JP2004138862A JP2004138862A JP4041858B2 JP 4041858 B2 JP4041858 B2 JP 4041858B2 JP 2004138862 A JP2004138862 A JP 2004138862A JP 2004138862 A JP2004138862 A JP 2004138862A JP 4041858 B2 JP4041858 B2 JP 4041858B2
Authority
JP
Japan
Prior art keywords
abrasive
cemented carbide
electric discharge
hole
oxide layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2004138862A
Other languages
Japanese (ja)
Other versions
JP2005320576A (en
Inventor
武夫 田村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP2004138862A priority Critical patent/JP4041858B2/en
Publication of JP2005320576A publication Critical patent/JP2005320576A/en
Application granted granted Critical
Publication of JP4041858B2 publication Critical patent/JP4041858B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Description

本発明は、例えば高圧噴射や、化繊ノズルなどの各種ノズルに利用される超硬合金の、放電加工面の研磨に関するものである。   The present invention relates to polishing of an electric discharge machined surface of a cemented carbide used for various nozzles such as high-pressure injection and chemical nozzles.

現在、耐摩耗性及び耐熱性に秀れている超硬合金は、例えば高圧噴射や、化繊ノズル等の各種ノズルの他、様々な用途に幅広く利用されている。   At present, cemented carbides having excellent wear resistance and heat resistance are widely used in various applications in addition to various nozzles such as high-pressure injection and synthetic fiber nozzles.

ここで、超硬合金はビッカース硬さHV約1400と極めて硬いので、切削等の刃物を用いて加工することが難しく、一般的に超硬合金の加工には放電加工が主に使用されている。   Here, since the cemented carbide is extremely hard with a Vickers hardness HV of about 1400, it is difficult to process using a cutting tool such as cutting, and electric discharge machining is generally used mainly for machining cemented carbide. .

しかし、超硬合金を放電加工すると、加工条件によっては、その加工面にクラックや微小穴等の表面欠陥が形成され、この表面欠陥が材料強度を著しく低下させる大きな要因となり、製品寿命を短くしている。   However, when EDM is performed on cemented carbide, depending on the processing conditions, surface defects such as cracks and microholes are formed on the processed surface, and this surface defect is a major factor that significantly reduces the material strength, shortening the product life. ing.

そこで、表面欠陥をできるだけ除去することが望まれるが、超硬合金は非常に硬いので従来の機械的研磨のみで表面欠陥をすべて除去することは非常に困難であり、また、例えばノズルなどの微細穴の加工面を研磨する場合には、その形状も複雑であり、ノズル穴内面の研磨は一層困難となる為、放電加工面の表面欠陥を完全に除去する良好な研磨方法の開発が強く望まれている。   Therefore, it is desirable to remove surface defects as much as possible. However, since cemented carbide is very hard, it is very difficult to remove all surface defects only by conventional mechanical polishing. When polishing the processed surface of the hole, the shape is also complicated, and polishing the inner surface of the nozzle hole becomes even more difficult, so the development of a good polishing method that completely removes surface defects on the electric discharge processed surface is strongly desired. It is rare.

本発明は、上記問題を鑑みて完成したもので、例えば超硬合金製ノズル等の、非常に硬いだけでなく形状が複雑且つ微細で極めて研磨が困難な超硬合金製微細穴においても、酸化現象を利用した表面改質法と流動砥粒による研磨とを組み合わせた全く新しい複合研磨法を適用することで、ワイヤ放電加工後の形状を維持したまま、表面欠陥の全く存在しない表面健全性に秀れた超硬合金製放電加工面に仕上げることが可能な、画期的な複合研磨方法を提供することを目的とする。   The present invention has been completed in view of the above problems. For example, in a hard hole made of cemented carbide, such as a nozzle made of cemented carbide, which is not only very hard but also has a complicated shape and is very fine and difficult to polish. By applying a completely new combined polishing method that combines surface modification using phenomenon and polishing with fluidized abrasive grains, the surface integrity without surface defects is maintained while maintaining the shape after wire EDM. It is an object of the present invention to provide an epoch-making composite polishing method capable of finishing an excellent electric discharge machining surface made of cemented carbide.

添付図面を参照して本発明の要旨を説明する。   The gist of the present invention will be described with reference to the accompanying drawings.

ワイヤ放電加工によって成形した超硬合金放電加工面1の研磨方法であって、高周波誘導加熱によって前記加工面1を620℃以上の温度で加熱保持することでこの加工面1に酸化コバルト,タングステン酸化物,及びタングステンとコバルトとの複合酸化物からなる酸化層2を表面から内部に向って形成し、この酸化層2に砥粒3を接触させて前記加工面1から前記酸化層2を完全に剥離することを特徴とする超硬合金放電加工面の複合研磨方法に係るものである。 A method of polishing a cemented carbide electro-discharge machined surface 1 formed by wire electric discharge machining, wherein the machined surface 1 is heated and held at a temperature of 620 ° C. or higher by high-frequency induction heating so that cobalt oxide and tungsten oxide are formed on the machined surface 1. And an oxide layer 2 composed of a composite oxide of tungsten and cobalt is formed from the surface to the inside, and abrasive grains 3 are brought into contact with the oxide layer 2 to completely form the oxide layer 2 from the processed surface 1. The present invention relates to a composite polishing method for a cemented carbide electric discharge machined surface that is peeled off.

また、前記加工面1は、超硬合金4にワイヤ放電加工によって成形した超硬合金製微細穴5の穴内面5aであることを特徴とする請求項1記載のワイヤ放電加工によって成形した超硬合金放電加工面の複合研磨方法に係るものである。   The cemented carbide formed by wire electric discharge machining according to claim 1, wherein the machined surface 1 is a hole inner surface 5a of a cemented carbide fine hole 5 formed in the cemented carbide 4 by wire electric discharge machining. The present invention relates to a composite polishing method for an alloy electric discharge machining surface.

また、前記砥粒3を前記微細穴5の開口部6から前記砥粒3を強制流入させてこの流動砥粒3aを前記加工面1である穴内面5aに接触させて穴内面5aに形成した前記酸化層2を剥離することを特徴とする請求項2記載のワイヤ放電加工によって成形した超硬合金放電加工面の複合研磨方法に係るものである。   Further, the abrasive grains 3 were forced to flow from the openings 6 of the fine holes 5, and the fluidized abrasive grains 3a were brought into contact with the hole inner surface 5a which is the processed surface 1 to form the hole inner surface 5a. 3. The composite polishing method for a cemented carbide electric discharge machined surface formed by wire electric discharge machining according to claim 2, wherein the oxide layer 2 is peeled off.

また、前記砥粒3を前記微細穴5の両端の開口部6の一端から他端及び他端から一端に、交互に強制流通させることを特徴とする請求項3記載のワイヤ放電加工によって成形した超硬合金放電加工面の複合研磨方法に係るものである。   Further, the abrasive grains 3 are forcibly distributed alternately from one end to the other end and from the other end to the other end of the opening 6 at both ends of the fine hole 5 and formed by wire electric discharge machining according to claim 3. The present invention relates to a composite polishing method for a cemented carbide electric discharge machined surface.

また、ワイヤ放電加工によって加工面1を成形し、高周波誘導加熱によって前記加工面1を620℃以上の温度で加熱保持することでこの加工面1に酸化コバルト,タングステン酸化物,及びタングステンとコバルトとの複合酸化物からなる酸化層2を表面から内部に向って形成した前記超硬合金4を保持する保持部9と、この保持部9に保持した前記超硬合金4の加工面1に砥粒3を接触させる砥粒接触手段10とを設けて、この砥粒接触手段10により前記酸化層2を形成した加工面1に砥粒3を接触させることにより、この加工面1から酸化層2を剥離するように構成したことを特徴とする超硬合金放電加工面の砥粒研磨装置に係るものである。 Further, the machined surface 1 is formed by wire electric discharge machining, and the machined surface 1 is heated and held at a temperature of 620 ° C. or higher by high-frequency induction heating, whereby cobalt oxide, tungsten oxide, and tungsten and cobalt are formed on the machined surface 1. A holding portion 9 for holding the cemented carbide 4 formed with the oxide layer 2 made of the composite oxide from the surface toward the inside, and abrasive grains on the processed surface 1 of the cemented carbide 4 held by the holding portion 9 3 is provided, and the abrasive grains 3 are brought into contact with the processed surface 1 on which the oxide layer 2 is formed by the abrasive contact means 10. The present invention relates to an abrasive polishing apparatus for a cemented carbide electro-discharge machined surface, which is configured to peel.

また、前記加工面1は、超硬合金4にワイヤ放電加工によって成形した超硬合金製微細穴5の穴内面6とし、この穴内面6を酸化処理した前記超硬合金4を保持する前記保持具9と、この保持具9に保持した前記超硬合金4の微細穴5の開口部6から砥粒3を強制流入する砥粒接触手段10とを設けて、この砥粒接触手段10により前記微細穴5の開口部6から前記砥粒3を強制流入してこの流動砥粒3aを前記加工面1である穴内面6に接触させて穴内面6に形成した前記酸化層2を剥離するように構成したことを特徴とする請求項5記載の超硬合金放電加工面の砥粒研磨装置に係るものである。
Further, the processed surface 1 is a hole inner surface 6 of a micro hole 5 made of cemented carbide formed on the cemented carbide 4 by wire electric discharge machining, and the holding for holding the cemented carbide 4 obtained by oxidizing the inner surface 6 of the hole. The tool 9 and abrasive contact means 10 for forcibly flowing the abrasive grains 3 from the openings 6 of the fine holes 5 of the cemented carbide 4 held by the holder 9 are provided. The abrasive grains 3 are forced to flow from the openings 6 of the fine holes 5 so that the fluidized abrasive grains 3 a are brought into contact with the hole inner surface 6 as the processing surface 1 to peel off the oxide layer 2 formed on the hole inner surface 6. The present invention relates to an abrasive polishing apparatus for a cemented carbide electric discharge machined surface according to claim 5 .

また、前記砥粒接触手段10として、前記微細穴5の両端の開口部6に前記砥粒3が流通し得る砥粒流通部11を一端を前記開口部6に連結して設け、この砥粒流通部11の他端に前記砥粒3を貯留する砥粒貯留部12を連結して設け、この砥粒貯留部12に貯留する砥粒3を、前記砥粒流通部11を介して前記微細穴5の開口部6の一端から他端及び他端から一端に交互に強制流通するように構成したことを特徴とする請求項6記載の超硬合金放電加工面の砥粒研磨装置に係るものである。   Further, as the abrasive contact means 10, an abrasive distribution part 11 through which the abrasive grains 3 can be distributed through the openings 6 at both ends of the fine hole 5 is provided with one end connected to the opening 6. An abrasive grain storage part 12 that stores the abrasive grains 3 is connected to the other end of the circulation part 11, and the abrasive grains 3 that are stored in the abrasive grain storage part 12 are provided via the abrasive grain circulation part 11. 7. The abrasive polishing apparatus for a cemented carbide electric discharge machined surface according to claim 6, wherein the opening 6 of the hole 5 is configured to alternately flow from one end to the other end and from the other end to the other end alternately. It is.

本発明は上述のように構成したから、研磨が困難な、ワイヤ放電加工によって成形した超硬合金放電加工面を、酸化処理による表面改質法と砥粒による研磨とを組み合わせた複合研磨によって、単に機械的な研磨だけでは、表面欠陥を全て除去することは極めて困難であった超硬合金の加工面においても、表面欠陥の全く存在しない表面健全性に秀れた加工面に仕上げることができるだけでなく、短時間で良好に研磨することができるので作業性に秀れ、しかもワイヤ放電加工後の加工面を高い形状精度で維持したまま表面欠陥を除去することができ、さらに、砥粒が良好に狭い隙間や穴内に入り込み、確実に加工面に形成した酸化層と接触し、該酸化層を剥離することができるので、様々な形状の加工面にも対応できる、極めて実用性に秀れた超硬合金放電加工面の複合研磨方法を提供することとなる。   Since the present invention is configured as described above, it is difficult to polish, a cemented carbide electric discharge machining surface formed by wire electric discharge machining, by a composite polishing that combines a surface modification method by oxidation treatment and polishing with abrasive grains, Even if the surface of the cemented carbide has been extremely difficult to remove all surface defects by simply mechanical polishing, it can be finished to a surface with excellent surface integrity with no surface defects. In addition, it is excellent in workability because it can be polished well in a short time, and surface defects can be removed while maintaining the processed surface after wire electric discharge machining with high shape accuracy. It can penetrate into narrow gaps and holes well, reliably contact with the oxidized layer formed on the processed surface, and peel off the oxidized layer, so it can be applied to processed surfaces of various shapes and is extremely practical. Integrated polishing method for a cemented carbide EDM surface and thus to provide a.

また、例えば前記加工面を超硬合金にワイヤ放電加工によって成形した超硬合金製微細穴の穴内面とする場合には、形状が複雑で、従来の研磨方法では表面欠陥を全て取り除くことが極めて困難な微細穴においても、極めて良好に研磨し、表面欠陥の全く存在しない表面健全性に秀れた加工面に仕上げることができる本発明の秀れた実用性が一層明確になる。   In addition, for example, when the processed surface is made of a cemented carbide fine hole made of cemented carbide by wire electric discharge machining, the shape is complicated and it is extremely difficult to remove all surface defects with the conventional polishing method. Even in difficult fine holes, the excellent practicality of the present invention can be further clarified by polishing very well and finishing to a processed surface with excellent surface integrity without any surface defects.

また、例えば前記砥粒を前記微細穴の開口部から前記砥粒を強制流入させた場合には、単にこの微細穴の開口部の一端側のみから砥粒を強制流入させた場合、この微細穴の穴内面は、前記砥粒が流入する流入端側が流出端側に比して前記砥粒研磨による消耗が大きく、前記穴内面の形状精度の損失が流入端側に片寄ってしまうが、前記微細穴の両端の開口部から前記砥粒を強制流入させることで、この微細穴内から前記酸化層を完全に除去した後も、この穴内面の形状精度の損失が一端側だけに片寄ることなく略均一となり、しかも、一端側からだけでなく両端側から前記酸化層を除去していくので、効率が良く、短い時間で全ての酸化層の除去を完了でき、高い形状精度を維持でき、一層作業性及び実用性に秀れた超硬合金放電加工面の複合研磨方法を提供することとなる。   Further, for example, when the abrasive grains are forced to flow from the opening of the fine hole, the fine holes are simply forced to flow from only one end side of the opening of the fine hole. As for the inner surface of the hole, the inflow end side into which the abrasive grains flow is more consumed by the abrasive polishing than the outflow end side, and the loss of shape accuracy of the inner surface of the hole tends to be shifted toward the inflow end side. By forcibly flowing the abrasive grains through the openings at both ends of the hole, even after the oxide layer is completely removed from within the fine hole, the loss of shape accuracy of the inner surface of the hole is substantially uniform without shifting to the one end side. In addition, since the oxide layer is removed not only from one end but from both ends, the removal of all oxide layers can be completed efficiently in a short time, and high shape accuracy can be maintained, further improving workability. In addition, a composite of super hard metal EDM with excellent practicality And thus to provide a polishing method.

また、例えば前記砥粒を前記微細穴の両端の開口部の一端から他端及び他端から一端に、交互に強制流通させる場合には、前記微細穴の内面から、酸化層を完全除去した後の微細穴の穴内面の形状精度を一層均一に保つことができ、また一層効率良く短時間で酸化層を除去でき、一層作業性及び実用性に秀れた超硬合金放電加工面の複合研磨方法を提供することとなる。   Further, for example, when the abrasive grains are forced to flow alternately from one end to the other end of the opening of both ends of the fine hole and from the other end to one end, the oxide layer is completely removed from the inner surface of the fine hole. This makes it possible to keep the shape accuracy of the inner surface of the fine holes more uniform, remove the oxide layer more efficiently and in a shorter time, and make the composite polishing of the cemented carbide electrical discharge machined surface more excellent in workability and practicality A method will be provided.

本発明は上述のように構成したから、極めて研磨が困難な、ワイヤ放電加工によって成形した超硬合金放電加工面を、表面欠陥の全く存在しない表面健全性に秀れた加工面に仕上げることが可能なだけでなく、様々な形状の加工面にも対応でき、しかも効率良く短時間で、ワイヤ放電加工後の形状の形状精度を高く維持したまま良好に研磨することができる極めて実用性に秀れた画期的な超硬合金製微細穴の複合研磨方法及び複合研磨装置を提供することとなる。   Since the present invention is configured as described above, it is possible to finish a cemented carbide electro-discharge machined surface formed by wire electric discharge machining, which is extremely difficult to polish, into a machined surface excellent in surface integrity without any surface defects. In addition to being possible, it can handle various shapes of machining surfaces, and can be polished efficiently while maintaining high shape accuracy after wire electric discharge machining efficiently and in a short time. Thus, a ground-breaking cemented carbide fine hole composite polishing method and composite polishing apparatus are provided.

好適と考える本発明の実施形態(発明をどのように実施するか)を、図面に基づいて本発明の作用を示して簡単に説明する。   Embodiments of the present invention that are considered suitable (how to carry out the invention) will be briefly described with reference to the drawings, illustrating the operation of the present invention.

超硬合金4にワイヤ放電加工を施して成形した加工面1に酸化処理を行う。   An oxidation treatment is performed on the processed surface 1 formed by subjecting the cemented carbide 4 to wire electric discharge machining.

具体的には、前記加工面1を高周波誘導加熱によって620℃以上の高温に加熱保持することで、この加工面1の表面から内部方向に向かって徐々に酸化し始め、この加工面1には酸化コバルト,タングステン酸化物,及びタングステンとコバルトとの複合酸化物からなる多孔質で剥離性に秀れた酸化層2が形成されることとなる。
Specifically, the processed surface 1 is heated and held at a high temperature of 620 ° C. or higher by high frequency induction heating, and gradually begins to oxidize from the surface of the processed surface 1 toward the inside. A porous oxide layer 2 made of cobalt oxide, tungsten oxide, and a composite oxide of tungsten and cobalt and having excellent peelability is formed.

この酸化層2に砥粒3を接触させると、該酸化層2は該砥粒3との接触によって粉砕されながら前記加工面1から容易に剥離されることとなり、該加工面1から前記酸化層2を完全に除去することで表面健全性に秀れた加工面1に仕上がる。   When the abrasive grains 3 are brought into contact with the oxide layer 2, the oxide layer 2 is easily separated from the processed surface 1 while being pulverized by contact with the abrasive grains 3, and the oxidized layer is separated from the processed surface 1. By removing 2 completely, the finished surface 1 is excellent in surface integrity.

また、例えば、前記加工面1を超硬合金製微細穴5の穴内面5aとする場合においては、従来の機械的な研磨方法だけでは、この穴内面5aを良好に研磨することは極めて困難であったが、この微細穴5の穴内面5aに酸化処理によって酸化層2を形成し、この微細穴5の開口部6から前記砥粒3を強制流入させる構成とすることで、この流動状態の砥粒3である流動砥粒3aが前記微細穴5内に侵入し、この微細穴5の穴内面6に形成した酸化層2に砥粒3が接触し、この穴内面6から酸化層2が剥離され、表面健全性に秀れた加工面1に仕上げることとなる。   Further, for example, when the processed surface 1 is the hole inner surface 5a of the cemented carbide fine hole 5, it is extremely difficult to satisfactorily polish the hole inner surface 5a only by the conventional mechanical polishing method. However, by forming the oxide layer 2 on the hole inner surface 5a of the fine hole 5 by an oxidation treatment and forcing the abrasive grains 3 to flow through the opening 6 of the fine hole 5, The fluidized abrasive grains 3 a that are the abrasive grains 3 penetrate into the fine holes 5, the abrasive grains 3 come into contact with the oxide layer 2 formed on the inner surface 6 of the fine holes 5, and the oxidized layer 2 is formed from the inner surface 6 of the holes. It will peel and will be finished in the processing surface 1 excellent in surface soundness.

従って、本発明は、研磨が困難な超硬合金4の加工面1だけでなく、例えば加工面1が微細穴5の穴内面5aのように極めて研磨が困難な加工面1においても良好に研磨し表面健全性に秀れた加工面1に仕上げることができるだけでなく、様々な形状の加工面1にも使用でき、しかも従来に比して短時間で研磨可能であるが故に作業性に秀れた、実用性に秀れた極めて画期的な超硬合金放電加工面の複合研磨方法及び砥粒研磨装置となる。   Therefore, the present invention is good for polishing not only the machined surface 1 of the cemented carbide 4 that is difficult to polish, but also the machined surface 1 that is extremely difficult to polish, such as the hole inner surface 5a of the fine hole 5. In addition to being able to finish the machined surface 1 with excellent surface integrity, it can be used on the machined surface 1 of various shapes, and it can be polished in a shorter time than before, so it has excellent workability. Thus, the composite polishing method and the abrasive polishing apparatus for the super-hard alloy electric discharge machined surface having excellent practicality are obtained.

本発明の具体的な実施例について図面に基づいて説明する。   Specific embodiments of the present invention will be described with reference to the drawings.

本実施例は、ワイヤ放電加工によって加工面1を成形し、この加工面1を加熱し酸化処理して酸化層2を形成した前記超硬合金4を保持する保持部9と、この保持部9に保持した前記超硬合金4の加工面1に砥粒3を接触させる砥粒接触手段10とを設けて、この砥粒接触手段10により前記酸化層2を形成した加工面1に砥粒3を接触させることにより、この加工面1から酸化層2を剥離するように構成した超硬合金放電加工面の砥粒研磨装置である。   In this embodiment, a machined surface 1 is formed by wire electric discharge machining, and the machined surface 1 is heated and oxidized to hold the cemented carbide 4 formed with the oxide layer 2, and the holder 9 Abrasive grain contact means 10 for bringing the abrasive grains 3 into contact with the processed surface 1 of the cemented carbide 4 held on the surface is provided, and the abrasive grains 3 are formed on the processed surface 1 on which the oxide layer 2 is formed by the abrasive grain contact means 10. Is an abrasive polishing apparatus for a cemented carbide electric discharge machined surface configured to peel the oxide layer 2 from the machined surface 1 by bringing them into contact with each other.

本実施例では、前記加工面1を、図2に示すように、化繊ノズルとして使用される超硬合金製ノズル等の、超硬合金製十字型微細穴5の穴内面5aとする。   In the present embodiment, the processed surface 1 is a hole inner surface 5a of a cemented carbide cross-shaped fine hole 5, such as a cemented carbide nozzle used as a chemical fiber nozzle, as shown in FIG.

また、この超硬合金4には超硬合金D20(JIS規格V種)を用いている。   The cemented carbide 4 is a cemented carbide D20 (JIS standard V type).

本実施例の構成を具体的に説明すると、図1に示すように、前記超硬合金4を挟持状態に保持する保持具9aで構成した保持部9と、前記溶媒7(脱イオン水)及び前記砥粒3(グリーンカーボランダム)を貯留する砥粒容器12aを前記保持具9a内に保持した超硬合金4の微細穴5の両端の開口部6に夫々設けた構成の砥粒貯留部12と、前記開口部6の一端側に設けた砥粒容器12aと開口部6の一端、及び前記開口部6の他端側に設けた砥粒容器12aと開口部6の他端とを夫々水密状態に連結する連結具としての砥粒管11aで構成した砥粒流通部11と、前記開口部6の両端に設けた前記砥粒容器12a夫々に設けるピストンポンプ14と、このピストンポンプ14内に嵌設するシリンダ13と、このシリンダ13を境に一方は空隙部14b他方は容器部14aとなっており該容器部14aには前記溶媒7が満ちており該溶媒7の吸水及び排水を行い得る前記ピストンポンプ14の容器部14aと前記砥粒容器12aを水密状態に連結する連結具としての溶媒管15と、この溶媒管15の前記砥粒容器12aと連結する側の端部に設け前記ピストンポンプ14内に前記砥粒3が侵入することを防ぐ構成のフィルタ部16と、前記ピストンポンプ14の空隙部14bに圧縮空気を送り、このピストンポンプ14内に嵌設するシリンダ13を圧動させるエアコンプレッサ17と、このエアコンプレッサ17と前記ピストンポンプ14の空隙部14bとを連結する送気管18と、このエアコンプレッサ17、若しくは送気管18の所定の位置に設け前記エアコンプレッサ17の圧縮空気を一定の圧力に調整し送気方向を一方のピストンポンプ14から他方のピストンポンプ14に切り替え制御し得る制御装置19とで構成している。   The configuration of this example will be described in detail. As shown in FIG. 1, a holding part 9 constituted by a holding tool 9a for holding the cemented carbide 4 in a sandwiched state, the solvent 7 (deionized water), and An abrasive grain storage section 12 having a configuration in which an abrasive grain container 12a for storing the abrasive grains 3 (green carborundum) is provided in the openings 6 at both ends of the fine holes 5 of the cemented carbide 4 held in the holder 9a. And an abrasive container 12a provided at one end of the opening 6 and one end of the opening 6, and an abrasive container 12a provided at the other end of the opening 6 and the other end of the opening 6 are watertight. In the piston pump 14, there is an abrasive flow part 11 composed of an abrasive tube 11 a as a connection tool connected to the state, a piston pump 14 provided in each of the abrasive containers 12 a provided at both ends of the opening 6, and the piston pump 14. Cylinder 13 to be fitted and one side of this cylinder 13 is a gap portion 14b and the other side is a container portion 14a. The container 14a is filled with the solvent 7 and can absorb and drain the solvent 7. The solvent as a connector for connecting the container 14a of the piston pump 14 and the abrasive container 12a in a watertight state. A tube 15, a filter portion 16 provided at an end of the solvent tube 15 on the side connected to the abrasive container 12 a and configured to prevent the abrasive particles 3 from entering the piston pump 14, and the piston pump 14 Compressed air is sent to the air gap portion 14b, and an air compressor 17 that pressurizes the cylinder 13 fitted in the piston pump 14 and an air supply pipe 18 that connects the air compressor 17 and the air gap portion 14b of the piston pump 14 are connected. The compressed air of the air compressor 17 provided at a predetermined position of the air compressor 17 or the air supply pipe 18 is adjusted to a constant pressure, and the air supply direction is switched from one piston pump 14 to the other piston pump 14. It is constituted by a control device 19 capable of changing control.

尚、本実施例では砥粒3として、グリーンカーボランダムを採用しており、一般的に超硬合金4の研磨材として使用されているダイヤモンド砥粒と比して、極めてコスト安となるだけでなく、グリーンカーボランダムは、一般的に超硬合金の加工にも用いられるほど硬度が高く、超硬合金を良好に研磨し得る研磨材である。   In this embodiment, green carborundum is used as the abrasive grain 3, and the cost is much lower than the diamond abrasive grain generally used as an abrasive for the cemented carbide 4. On the other hand, green carborundum is an abrasive that has a hardness that is generally high enough to be used for processing cemented carbide, and that can satisfactorily grind cemented carbide.

また、溶媒7として、脱イオン水を採用しており、単に水道水等、他の溶媒を使用する場合に比して、極めて腐食しにくいだけでなく、精製や取り扱いも容易で、実用性に秀れたものである。   Moreover, deionized water is adopted as the solvent 7, and it is not only extremely difficult to corrode compared with the case of using other solvents such as tap water, but also is easy to purify and handle, making it practical. It is excellent.

また、前記砥粒容器12aをステンレス鋼で形成しており、前記砥粒管11a及び溶媒管15はウレタンチューブで形成してあるので、耐圧性や耐久性にも秀れた装置である。   Further, since the abrasive container 12a is made of stainless steel, and the abrasive tube 11a and the solvent tube 15 are made of urethane tubes, the apparatus is excellent in pressure resistance and durability.

さらに、前記制御装置19は、前記エアコンプレッサ17からの圧縮空気を一定の圧力に調整し、送気方向を切り替え制御し得るだけでなく、送気方向を切り替えた回数をカウントするカウント機能,圧縮空気の流量の測定機能及びサイクルタイムの調整機能を設けており、加工面1の形状に合わせて様々な研磨条件に適宜設定することが可能な、実用性に秀れたものである。   Further, the control device 19 not only can adjust the compressed air from the air compressor 17 to a constant pressure and control the switching of the air feeding direction, but also counts the number of times the air feeding direction is switched, the compression function A function for measuring the air flow rate and a function for adjusting the cycle time are provided, and it is excellent in practicality and can be appropriately set to various polishing conditions according to the shape of the processed surface 1.

次に本実施例の作動と共に、本実施例を用いた、酸化現象を利用した表面改質法と砥粒3による研磨とを組み合わせた複合研磨による超硬合金放電加工面1の複合研磨方法の手順を図3に沿って説明する。   Next, in conjunction with the operation of the present embodiment, the composite polishing method of the cemented carbide electric discharge machining surface 1 by the composite polishing using the combination of the surface modification method using the oxidation phenomenon and the polishing by the abrasive grains 3 is used. The procedure will be described with reference to FIG.

まず、超硬合金4にワイヤ放電加工を施すと、加工条件によって図3aに示すように加工面1にクラックや穴などの表面欠陥8が数多く形成されることとなり、超硬合金4のような脆い材質では、この表面欠陥8によって強度を非常に低下させることとなり、この加工面1を表面欠陥8のない表面健全性に秀れた加工面1に表面改質する複合研磨方法の手順として、まず、この加工面1を加熱し酸化処理する。   First, when wire electric discharge machining is performed on the cemented carbide 4, many surface defects 8 such as cracks and holes are formed on the machining surface 1 as shown in FIG. In the case of a brittle material, the strength is greatly reduced by this surface defect 8, and as a procedure of the composite polishing method for surface modification of this processed surface 1 to a processed surface 1 having no surface defects 8 and excellent surface integrity, First, the processed surface 1 is heated and oxidized.

すると、加工面1は表面から徐々に酸化していき、該加工面1に酸化層2が徐々に形成される。   Then, the processed surface 1 is gradually oxidized from the surface, and an oxide layer 2 is gradually formed on the processed surface 1.

具体的には高周波誘導加熱によって前記加工面1を加熱する。   Specifically, the processed surface 1 is heated by high frequency induction heating.

この高周波誘導加熱は、電気炉などの他の加熱方法と比して、短時間での加熱が可能であり、しかも表面から発熱させる表皮効果があるので、表面層の加熱酸化処理を目的とする場合に、短時間のうちに効率良く表面から加熱し、酸化させることができる、効率的で実用性に秀れた加熱方法である。   This high-frequency induction heating is capable of heating in a short time compared to other heating methods such as an electric furnace, and also has a skin effect of generating heat from the surface, and is intended for heat oxidation treatment of the surface layer In this case, the heating method can be efficiently heated from the surface and oxidized in a short time, and has excellent efficiency and practicality.

このように、高周波誘導加熱によって前記加工面1を620℃以上の高温に加熱すると、まず加工面1が約400℃以上に達し、該加工面1に密着性の弱い酸化コバルトが形成され始め、次いで加工面1が約620℃以上に達すると前記酸化コバルトの他に、タングステン酸化物、及びタングステンとコバルトの複合酸化物の三種類の酸化物が表面から内部に向かって法線方向に略均一な厚さで形成されていくこととなる。   Thus, when the processed surface 1 is heated to a high temperature of 620 ° C. or higher by high-frequency induction heating, the processed surface 1 first reaches about 400 ° C. or higher, and cobalt oxide having low adhesion begins to be formed on the processed surface 1. Next, when the processed surface 1 reaches about 620 ° C. or more, in addition to the cobalt oxide, three types of oxides of tungsten oxide and a composite oxide of tungsten and cobalt are substantially uniform in the normal direction from the surface to the inside. It will be formed with an appropriate thickness.

この三種類の酸化物から成る酸化層2は多孔質で、さらに、既に加工面1が400℃以上の温度に加熱された時点から徐々にこの加工面1に形成されている前記酸化コバルトは密着性が弱いが故に剥離性に秀れている。   The oxide layer 2 composed of these three kinds of oxides is porous, and the cobalt oxide formed on the processed surface 1 gradually from the time when the processed surface 1 has already been heated to a temperature of 400 ° C. or higher. Because of its weak nature, it has excellent peelability.

従って、前記高周波誘導加熱によって前記加工面1を620℃以上の温度で加熱保持することで、この加工面1は短時間のうちに表面から効率よく良好に加熱され酸化するだけでなく、この加工面1に形成される酸化層2は、表面から法線方向に略均一な厚さで、しかも多孔質で剥離性に秀れているが故に容易に剥離除去できる酸化層2が形成されることとなる。   Therefore, by holding the processed surface 1 at a temperature of 620 ° C. or higher by the high frequency induction heating, the processed surface 1 is not only efficiently heated and oxidized from the surface within a short time, but also this processed surface 1 The oxide layer 2 formed on the surface 1 has a substantially uniform thickness in the normal direction from the surface, and is formed with an oxide layer 2 that can be easily peeled and removed because it is porous and excellent in peelability. It becomes.

この際、この酸化層2は前記加工面1に形成する表面欠陥8を含んだまま形成されていくので、図3bに示すように、この酸化層が、前記加工面1に形成される表面欠陥8を全て含有する形成厚さに達するまで前記加工面1を加熱保持する。   At this time, since the oxide layer 2 is formed while including the surface defects 8 formed on the processed surface 1, the oxide layers are formed on the processed surface 1 as shown in FIG. The processed surface 1 is heated and held until a formation thickness containing all 8 is reached.

この高周波誘導加熱によって、微細穴5の穴内面5aに酸化層2を形成した超硬合金4を本実施例の前記保持部9の保持具9aに挟持状態に保持する。   By this high-frequency induction heating, the cemented carbide 4 in which the oxide layer 2 is formed on the inner surface 5a of the fine hole 5 is held in the holding state by the holding tool 9a of the holding portion 9 of this embodiment.

この状態で、前記エアコンプレッサ17によって前記ピストンポンプ14のうちの一のピストンポンプ14の空隙部14bに前記送空管18を介して圧縮空気を送気すると、空気圧によってこのピストンポンプ14内に嵌設されたシリンダ13が圧動し、該ピストンポンプ14内を容器部14a側方向にスライド移動して、ピストンポンプ14の容器部14aに貯留している溶媒7を強制排出し、この強制排出された溶媒7が溶媒管15を介して該ピストンポンプ14の容器部14aと連結する砥粒容器12aに強制流入する。   In this state, when compressed air is supplied to the gap portion 14b of one piston pump 14 of the piston pumps 14 through the air feeding pipe 18 by the air compressor 17, the air is fitted into the piston pump 14 by air pressure. The installed cylinder 13 is pressure-operated, slides in the piston pump 14 in the direction of the container part 14a, forcibly discharges the solvent 7 stored in the container part 14a of the piston pump 14, and this forced discharge The solvent 7 is forced to flow into the abrasive container 12 a connected to the container portion 14 a of the piston pump 14 through the solvent tube 15.

これにより砥粒容器12a内に流動が発生し、この流動によって該砥粒容器12a内に貯留する前記溶媒7及び砥粒3が混合しスラリー状態の流動砥粒3aを生成すると共に、この流動砥粒3aが砥粒容器12a内から強制排出され、前記砥粒管11aを介して、前記保持具9aに保持した超硬合金4の微細穴5の一端の開口部6から強制流入し、この微細穴5の穴内面5aに形成された前記酸化層2に前記流動砥粒3aに懸濁する砥粒3が接触し、図3cに示すように、前記酸化層2を穴内面5aから剥離する。   As a result, a flow is generated in the abrasive container 12a, and the solvent 7 and the abrasive grains 3 stored in the abrasive container 12a are mixed by the flow to generate a fluidized abrasive grain 3a in a slurry state. The grains 3a are forcibly discharged from the abrasive container 12a and are forced to flow in from the opening 6 at one end of the micro hole 5 of the cemented carbide 4 held by the holder 9a through the abrasive tube 11a. The abrasive grains 3 suspended in the fluidized abrasive grains 3a come into contact with the oxide layer 2 formed on the hole inner surface 5a of the hole 5, and the oxide layer 2 is peeled from the hole inner surface 5a as shown in FIG. 3c.

このように、本実施例では、前記砥粒3を、前記砥粒容器12a内で前記溶媒7と混合したスリラー状の流動砥粒3aとするので、単に砥粒3を流動させただけの流動砥粒3aと比して、流動抵抗が小さく、極めて流動性が増すので、空気圧を介して比較的複雑な形状である十字型の微細穴5にも容易に強制流入させることが可能なだけでなく、本実施例の微細穴5の十字型の穴形状に限らず、様々な形状の微細穴5にも良好に強制流入させることができるので、様々な形状の微細穴5の穴内面5aを研磨できる極めて実用性に秀れたものである。   As described above, in this embodiment, the abrasive grains 3 are the thriller-shaped fluidized abrasive grains 3a mixed with the solvent 7 in the abrasive grain container 12a. Therefore, the flow of the abrasive grains 3 is simply flowed. Compared with the abrasive grains 3a, the flow resistance is small and the flowability is extremely increased, so that it can be easily forced to flow into the cross-shaped fine hole 5 having a relatively complicated shape via air pressure. In addition, the present invention is not limited to the cross-shaped hole shape of the fine hole 5 of the present embodiment, and can be forced to flow into the fine hole 5 having various shapes, so that the hole inner surface 5a of the fine hole 5 having various shapes can be formed. It is extremely practical for polishing.

また、前記砥粒容器12aに貯留する前記砥粒3は、この砥粒容器12a内で沈殿し、底部に積層状態に貯留されているので、前記溶媒7と良好に懸濁が行われにくいが、本実施例では、前記砥粒管11aの砥粒容器12aと連結する側の端部を、この砥粒容器12aの底部の前記砥粒3が沈殿して形成した砥粒3の積層の内部に到達する位置まで挿入した状態で連結することで、前記前記砥粒管11aに良好に砥粒3が流入し得る構成とし、前記スリラー状の流動砥粒3aは前記溶媒7と前記砥粒3の懸濁が良好に行われ、より高濃度で砥粒3が懸濁した流動砥粒3aとなるので、それだけ研磨性に秀れたものである。   Further, the abrasive grains 3 stored in the abrasive container 12a are precipitated in the abrasive container 12a and stored in a laminated state at the bottom, so that it is difficult to be suspended well with the solvent 7. In this embodiment, the end of the abrasive tube 11a on the side connected to the abrasive container 12a is the inside of a stack of abrasive grains 3 formed by precipitation of the abrasive grains 3 at the bottom of the abrasive container 12a. In this state, the abrasive grains 3 can flow into the abrasive tube 11a well, and the thriller-shaped fluid abrasive grains 3a are composed of the solvent 7 and the abrasive grains 3. Is suspended and the fluidized abrasive grains 3a in which the abrasive grains 3 are suspended at a higher concentration are obtained, and thus the polishing performance is excellent.

この前記微細穴5の両端の開口部6の一端から強制流入された前記流動砥粒3aが、この微細穴5の穴内面5aを研磨し、前記開口部6の他端から強制排出され、前記砥粒管11aを介して、この開口部6の他端に連結して設けた砥粒容器12aに強制流入されると共に、該砥粒容器12aから前記溶媒管15を介して、該砥粒容器12aと連結するピストンポンプ14の容器部14aに溶媒7を強制流入する。   The flowing abrasive grains 3a forcedly flowed from one end of the opening 6 at both ends of the fine hole 5 polish the hole inner surface 5a of the fine hole 5, and are forcibly discharged from the other end of the opening 6. The abrasive container 11a is forced to flow into the abrasive container 12a connected to the other end of the opening 6 through the abrasive tube 11a, and the abrasive container from the abrasive container 12a through the solvent tube 15. The solvent 7 is forced to flow into the container portion 14a of the piston pump 14 connected to 12a.

ここで、溶媒管15の前記砥粒容器12aと連結する側の端部に設けたフィルタ部16は、前記溶媒7を通過可能とし、前記砥粒3の通過を阻止するフィルタによって構成するものである。   Here, the filter section 16 provided at the end of the solvent tube 15 on the side connected to the abrasive container 12a is configured by a filter that allows the solvent 7 to pass therethrough and prevents the abrasive grains 3 from passing therethrough. is there.

従って、本実施例では、前記砥粒容器12aから溶媒7を強制排出し、該溶媒7を前記溶媒管15を介して前記ピストンポンプ14の容器部14aに強制流入する際に、このフィルタ部16によってピストンポンプ14の容器部14a内に前記砥粒3が侵入することを防ぐこととなり、ピストンポンプ14の容器部14a内に前記砥粒3が侵入し、ピストンポンプ14が該砥粒3による研磨によって著しく耐久性を損ねることを阻止する構成で、極めて耐久性に秀れたものである。   Therefore, in the present embodiment, when the solvent 7 is forcibly discharged from the abrasive container 12a and the solvent 7 is forced to flow into the container portion 14a of the piston pump 14 via the solvent tube 15, this filter portion 16 is used. This prevents the abrasive grains 3 from entering the container portion 14 a of the piston pump 14. The abrasive grains 3 enter the container portion 14 a of the piston pump 14, and the piston pump 14 is polished by the abrasive particles 3. Therefore, the structure is extremely excellent in durability.

尚、フィルタ部16は前記ピストンポンプ14の容器部14a内に前記砥粒3が侵入することを防ぐ構成であれば良いので、本実施例の構成に限らず、例えば、この容器部14aと前記砥粒容器12aを連結する前記溶媒管15の所定の位置に溶媒容器を水密状態に連結し、この溶媒容器を、容器部14aと砥粒容器12aに介設状態に設けた構成としても良く、この場合、前記砥粒容器12aから排出された流動砥粒3aは、前記溶媒管15を介して溶媒管15の所定の位置に連結した前記溶媒容器に強制流入し、砥粒3がこの溶媒容器内に沈殿し、溶媒7だけが良好にこの溶媒容器から排出され前記溶媒管15を介して前記ピストンポンプ14の容器部14aに強制流入されることになるので、この溶媒容器によって、前記砥粒3が前記容器部14aへ侵入することを良好に防ぐものである。   In addition, since the filter part 16 should just be the structure which prevents the said abrasive grain 3 invading into the container part 14a of the said piston pump 14, it is not restricted to the structure of a present Example, For example, this container part 14a and the said The solvent container may be connected in a watertight state to a predetermined position of the solvent tube 15 for connecting the abrasive container 12a, and the solvent container may be provided in an interposed state between the container part 14a and the abrasive container 12a. In this case, the flowing abrasive grains 3a discharged from the abrasive container 12a forcibly flow into the solvent container connected to a predetermined position of the solvent tube 15 via the solvent tube 15, and the abrasive particles 3 are in the solvent container. Since only the solvent 7 is satisfactorily discharged from the solvent container and forced into the container part 14a of the piston pump 14 via the solvent tube 15, the abrasive container allows the abrasive grains to 3 prevents the intrusion into the container part 14a. It is.

このピストンポンプ14の容器部14aに強制流入した前記溶媒7によって該ピストンポンプ14の容器部14aに溶媒7が満たされ、この水圧によって前記ポストンポンプ14内に陥設されたシリンダ13が圧動し、該ピストンポンプ14内を空隙部14b側方向にスライド移動することとなる。   The solvent 7 forcibly flows into the container portion 14a of the piston pump 14 fills the container portion 14a of the piston pump 14 with the solvent 7, and the water pressure causes the cylinder 13 that is recessed in the Poston pump 14 to move. The piston pump 14 is slid in the gap 14b side direction.

次に前記制御装置19によって前記エアコンプレッサ17の送気方向を逆側のピストンポンプ14に切り替え、前記溶媒7が強制流入し容器部14aに溶媒7が満たされたピストンポンプ14に圧縮空気を送気することで、本実施例の砥粒研磨装置内の溶媒7を逆流させて、前記微細穴5に逆方向から、つまり該微細穴5の両端の開口部6の他端から前記流動砥粒3aを強制流入させる。   Next, the control device 19 switches the air supply direction of the air compressor 17 to the piston pump 14 on the reverse side, and the compressed air is sent to the piston pump 14 in which the solvent 7 is forcibly introduced and the container portion 14a is filled with the solvent 7. As a result, the solvent 7 in the abrasive polishing apparatus of the present embodiment is caused to flow backward to the fine holes 5 from the opposite direction, that is, from the other ends of the openings 6 at both ends of the fine holes 5. 3a is forced to flow in.

このように、前記ピストンポンプ14のうちの一のピストンポンプ14に圧縮空気を送気することで、この空気圧を介して前記溶媒7及び前記流動砥粒3aを流動させて前記微細穴5の一端の開口部6から流動砥粒3aを強制流入し、次いで前記ピストンポンプ14のうちの他のピストンポンプ14に圧縮空気を送気することで、この空気圧を介して前記溶媒7及び前記流動砥粒3aを逆流させ前記微細穴5の他端の開口部6から流動砥粒3aを強制流入させる動作を、前記制御装置19によって前記エアコンプレッサ17の送気方向を切り替えて繰り返し行う。   In this way, by sending compressed air to one of the piston pumps 14, the solvent 7 and the fluidized abrasive grains 3 a are caused to flow through the air pressure to cause one end of the fine hole 5. The fluidized abrasive grains 3a are forcibly introduced from the opening 6 and then the compressed air is supplied to the other piston pumps 14 of the piston pumps 14, so that the solvent 7 and the fluidized abrasive grains are transmitted via the air pressure. The operation for forcibly flowing the flowing abrasive grains 3a from the opening 6 at the other end of the fine hole 5 by reversing the flow 3a is repeated by switching the air feeding direction of the air compressor 17 by the control device 19.

つまり、本実施例では前記微細穴5の両端の開口部6の一端から他端及び他端から一端に交互方向に繰り返し前記流動砥粒3aを高速で通過させることで、この微細穴5の穴内面5aの研磨を進めていき、この穴内面5aに形成する酸化層2を該穴内面5aから徐々に剥離していくこととなる。   In other words, in the present embodiment, the fluidized abrasive grains 3a are repeatedly passed at high speed from one end to the other end of the opening 6 at both ends of the fine hole 5 and from the other end to the one end, so that the hole of the fine hole 5 is obtained. The polishing of the inner surface 5a proceeds, and the oxide layer 2 formed on the hole inner surface 5a is gradually peeled off from the hole inner surface 5a.

この際、前記酸化層2は、前述したように前記穴内面5aに形成する表面欠陥8を全て含有する形成厚さに形成してある。   At this time, as described above, the oxide layer 2 is formed to a thickness that includes all the surface defects 8 formed in the hole inner surface 5a.

従って、本実施例は、この酸化層2を前記流動砥粒3aによって前記微細穴5から完全に除去することで、同時に該酸化層2に含有される全ての表面欠陥8も前記微細穴5から完全に除去することとなり、この酸化層2を除去することで極めて研磨が困難な超硬合金4の微細穴5の穴内面5aを、図3dに示すように表面欠陥8の全く存在しない、表面健全性に秀れた加工面1に仕上げることができる極めて実用的な複合研磨方法である。   Therefore, in this embodiment, the oxide layer 2 is completely removed from the fine holes 5 by the fluidized abrasive grains 3 a, and at the same time, all surface defects 8 contained in the oxide layer 2 are also removed from the fine holes 5. The hole inner surface 5a of the micro hole 5 of the cemented carbide 4 which is extremely difficult to polish by removing the oxide layer 2 is completely removed, as shown in FIG. This is an extremely practical composite polishing method capable of finishing the processed surface 1 with excellent soundness.

さらに、本実施例では、前記微細穴5の端部の開口部6から前記流動砥粒3aを強制流入していくので、穴内面5aに形成した酸化層2は、前記流動砥粒3aが流入する流入端部側から徐々に前記酸化層2が完全に除去されていき、この穴内面5a内の全ての面で前記酸化層2が完全に除去されるまでには、最も早く前記酸化層3が除去される前記穴内面5aの端部側は、穴内面5aの全ての酸化層2が完全除去されるまでの間も、前記砥粒3によって研磨され続け、それだけ表面形状が消耗し形状精度を損ねることとなる。   Furthermore, in this embodiment, the flowing abrasive grains 3a are forced to flow from the opening 6 at the end of the fine hole 5, so that the flowing abrasive grains 3a flow into the oxide layer 2 formed on the hole inner surface 5a. The oxide layer 2 is gradually completely removed from the inflow end portion side, and the oxide layer 3 is earliest before the oxide layer 2 is completely removed on all the surfaces in the hole inner surface 5a. The end portion side of the hole inner surface 5a is removed by the abrasive grains 3 until the entire oxide layer 2 of the hole inner surface 5a is completely removed, and the surface shape is consumed as much as the shape accuracy. Will be damaged.

しかし、本実施例においては、単に一端側の開口部6から前記砥粒3を強制流入した場合に比して、両端の開口部6から交互に強制流入させるので、前記穴内面5aの一端側からだけでなく、両端側から効率良く酸化層2を除去でき、短時間で穴内面5aの酸化層2を全て除去することができ、前記穴内面5aは放電加工後の形状を高い形状精度で維持したまま、しかも前記穴内面5a形状の消耗が一端側だけに片寄ることがなく穴内面5aにおいて略均一な形状精度を保ちながらこの穴内面5aから前記酸化層2を完全に除去するものである。   However, in this embodiment, as compared with the case where the abrasive grains 3 are simply forced to flow in from the opening 6 on one end side, they are forced to flow in alternately from the openings 6 on both ends. The oxide layer 2 can be efficiently removed not only from both ends, but the entire oxide layer 2 on the hole inner surface 5a can be removed in a short time. The hole inner surface 5a has a shape with high shape accuracy after electric discharge machining. The oxide layer 2 is completely removed from the hole inner surface 5a while maintaining a substantially uniform shape accuracy in the hole inner surface 5a without being deviated only to one end side while maintaining the shape. .

従って、本実施例は、上述のように構成したから、極めて研磨が困難な、ワイヤ放電加工によって成形した超硬合金放電加工面を、表面欠陥の全く存在しない表面健全性に秀れた加工面に仕上げることが可能なだけでなく、様々な形状の加工面にも対応でき、しかも効率良く短時間で、ワイヤ放電加工後の形状の形状精度を高く維持したまま良好に研磨することができ、さらに耐久性や耐圧性にも秀れ、極めて実用性に秀れた画期的な超硬合金放電加工面の研磨装置となる。   Therefore, since the present embodiment is configured as described above, the surface of the cemented carbide which is extremely difficult to polish and formed by wire electric discharge machining is excellent in surface integrity with no surface defects. In addition to being able to finish, it is possible to handle various shapes of processed surfaces, and it can efficiently polish in a short time while maintaining high shape accuracy of the shape after wire electric discharge machining, Furthermore, it is excellent in durability and pressure resistance, and it becomes a revolutionary cemented carbide electro-discharge machined surface polishing machine with excellent practicality.

尚、本発明は、本実施例に限られるものではなく、各構成要件の具体的構成は適宜設計し得るものである。   Note that the present invention is not limited to this embodiment, and the specific configuration of each component can be designed as appropriate.

本実施例の砥粒研磨装置の概略説明図である。It is a schematic explanatory drawing of the abrasive grain polishing apparatus of a present Example. 本実施例の係る超硬合金の概略説明図である。It is a schematic explanatory drawing of the cemented carbide which concerns on a present Example. 本実施例を使用した複合研磨方法の手順の概略説明図である。It is a schematic explanatory drawing of the procedure of the composite grinding | polishing method using a present Example.

符号の説明Explanation of symbols

1 加工面
2 酸化層
3 砥粒
3a 流動砥粒
4 超硬合金
5 微細穴
5a 穴内面
6 開口部
9 保持部
10 砥粒接触手段
11 砥粒流通部
12 砥粒貯留部
DESCRIPTION OF SYMBOLS 1 Processed surface 2 Oxidized layer 3 Abrasive grain 3a Fluidized abrasive grain 4 Cemented carbide 5 Fine hole 5a Hole inner surface 6 Opening part 9 Holding part
10 Abrasive contact means
11 Abrasive Distribution Department
12 Abrasive reservoir

Claims (7)

ワイヤ放電加工によって成形した超硬合金放電加工面の研磨方法であって、高周波誘導加熱によって前記加工面を620℃以上の温度で加熱保持することでこの加工面に酸化コバルト,タングステン酸化物,及びタングステンとコバルトとの複合酸化物からなる酸化層を表面から内部に向って形成し、この酸化層に砥粒を接触させて前記加工面から前記酸化層を完全に剥離することを特徴とする超硬合金放電加工面の複合研磨方法。 A method for polishing a cemented carbide electric discharge machining surface formed by wire electric discharge machining, wherein the machining surface is heated and held at a temperature of 620 ° C. or higher by high-frequency induction heating , and cobalt oxide, tungsten oxide, and An oxide layer made of a composite oxide of tungsten and cobalt is formed from the surface toward the inside, and abrasive particles are brought into contact with the oxide layer to completely peel the oxide layer from the processed surface. A composite polishing method for a hard alloy electric discharge machined surface. 前記加工面は、超硬合金にワイヤ放電加工によって成形した超硬合金製微細穴の穴内面であることを特徴とする請求項1記載のワイヤ放電加工によって成形した超硬合金放電加工面の複合研磨方法。   2. The composite of a cemented carbide electric discharge machined surface formed by wire electric discharge machining according to claim 1, wherein the processed surface is a hole inner surface of a fine hole made of cemented carbide formed in the cemented carbide by wire electric discharge machining. Polishing method. 前記砥粒を前記微細穴の開口部から前記砥粒を強制流入させてこの流動砥粒を前記加工面である穴内面に接触させて穴内面に形成した前記酸化層を剥離することを特徴とする請求項2記載のワイヤ放電加工によって成形した超硬合金放電加工面の複合研磨方法。   The abrasive grains are forced to flow from the openings of the fine holes, and the fluidized abrasive grains are brought into contact with the inner surface of the hole, which is the processing surface, to peel off the oxide layer formed on the inner surface of the hole. A composite polishing method for a cemented carbide electric discharge machined surface formed by wire electric discharge machining according to claim 2. 前記砥粒を前記微細穴の両端の開口部の一端から他端及び他端から一端に、交互に強制流通させることを特徴とする請求項3記載のワイヤ放電加工によって成形した超硬合金放電加工面の複合研磨方法。   The cemented carbide electric discharge machining formed by wire electric discharge machining according to claim 3, wherein the abrasive grains are alternately forced to flow from one end to the other end and from the other end to the other end of the opening at both ends of the fine hole. Composite polishing method for surfaces. ワイヤ放電加工によって加工面を成形し、高周波誘導加熱によって前記加工面を620℃以上の温度で加熱保持することでこの加工面に酸化コバルト,タングステン酸化物,及びタングステンとコバルトとの複合酸化物からなる酸化層を表面から内部に向って形成した前記超硬合金を保持する保持部と、この保持部に保持した前記超硬合金の加工面に砥粒を接触させる砥粒接触手段とを設けて、この砥粒接触手段により前記酸化層を形成した加工面に砥粒を接触させることにより、この加工面から酸化層を剥離するように構成したことを特徴とする超硬合金放電加工面の砥粒研磨装置。 A processed surface is formed by wire electric discharge machining, and the processed surface is heated and held at a temperature of 620 ° C. or higher by high-frequency induction heating, so that the processed surface is made of cobalt oxide, tungsten oxide, and a composite oxide of tungsten and cobalt. provided a holding portion for holding the oxide layer the cemented carbide formed toward the inside from the surface made, the abrasive grains contacting means for contacting the abrasive on the processed surface of the cemented carbide and held to the holding portion The abrasive of the cemented carbide electric discharge machined surface is characterized in that the oxide layer is peeled off from the machined surface by bringing the abrasive grain into contact with the machined surface on which the oxide layer is formed by the abrasive grain contact means. Grain polishing equipment. 前記加工面は、超硬合金にワイヤ放電加工によって成形した超硬合金製微細穴の穴内面とし、この穴内面を酸化処理した前記超硬合金を保持する前記保持具と、この保持具に保持した前記超硬合金の微細穴の開口部から砥粒を強制流入する砥粒接触手段とを設けて、この砥粒接触手段により前記微細穴の開口部から前記砥粒を強制流入してこの流動砥粒を前記加工面である穴内面に接触させて穴内面に形成した前記酸化層を剥離するように構成したことを特徴とする請求項5記載の超硬合金放電加工面の砥粒研磨装置。 The machined surface is an inner surface of a hard hole made of cemented carbide formed by wire electric discharge machining on a cemented carbide, the holder holding the cemented carbide obtained by oxidizing the inner surface of the hole, and the holder held by the holder Provided with an abrasive contact means for forcibly flowing abrasive grains from the opening of the fine hole of the cemented carbide, and forcing the abrasive grains to flow from the opening of the fine hole by the abrasive contact means. The abrasive polishing apparatus for a cemented carbide electric discharge machined surface according to claim 5 , wherein the oxide layer formed on the inner surface of the hole is peeled off by bringing the abrasive grains into contact with the inner surface of the hole as the processed surface. . 前記砥粒接触手段として、前記微細穴の両端の開口部に前記砥粒が流通し得る砥粒流通部を一端を前記開口部に連結して設け、この砥粒流通部の他端に前記砥粒を貯留する砥粒貯留部を連結して設け、この砥粒貯留部に貯留する砥粒を、前記砥粒流通部を介して前記微細穴の開口部の一端から他端及び他端から一端に交互に強制流通するように構成したことを特徴とする請求項6記載の超硬合金放電加工面の砥粒研磨装置。   As the abrasive contact means, an abrasive circulation part through which the abrasive grains can circulate is provided in the openings at both ends of the fine hole with one end connected to the opening, and the abrasive is provided at the other end of the abrasive circulation part. An abrasive grain storage part for storing grains is connected and provided, and abrasive grains stored in the abrasive grain storage part are connected to one end from the other end and the other end of the opening of the fine hole via the abrasive circulation part. The abrasive polishing apparatus for a cemented carbide electric discharge machined surface according to claim 6, wherein the apparatus is configured to alternately and forcibly circulate.
JP2004138862A 2004-05-07 2004-05-07 Composite polishing method and abrasive polishing apparatus for cemented carbide electrical discharge machining surface Expired - Lifetime JP4041858B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004138862A JP4041858B2 (en) 2004-05-07 2004-05-07 Composite polishing method and abrasive polishing apparatus for cemented carbide electrical discharge machining surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004138862A JP4041858B2 (en) 2004-05-07 2004-05-07 Composite polishing method and abrasive polishing apparatus for cemented carbide electrical discharge machining surface

Publications (2)

Publication Number Publication Date
JP2005320576A JP2005320576A (en) 2005-11-17
JP4041858B2 true JP4041858B2 (en) 2008-02-06

Family

ID=35468051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004138862A Expired - Lifetime JP4041858B2 (en) 2004-05-07 2004-05-07 Composite polishing method and abrasive polishing apparatus for cemented carbide electrical discharge machining surface

Country Status (1)

Country Link
JP (1) JP4041858B2 (en)

Also Published As

Publication number Publication date
JP2005320576A (en) 2005-11-17

Similar Documents

Publication Publication Date Title
KR100706868B1 (en) Articles made of super hardened materials
WO1998014307A1 (en) Superabrasive tool and method of its manufacture
US4754115A (en) High speed electrical discharge machining by redressing high resolution graphite electrodes
CN104736300B (en) Grinding tool and grinding and polishing device using the same
CN102059417A (en) Electrode and machine tool dedicated for combined machining of electric spark shaping of inner round bore and elastic honing
WO1991006388A1 (en) Method of super-mirror finishing with electrolytic grinding for internal surface of small-diameter tube
JP4041858B2 (en) Composite polishing method and abrasive polishing apparatus for cemented carbide electrical discharge machining surface
JP2009178770A (en) Method of machining mold member, method of producing the same, extrusion die, method for production of extruding material, and extruding material
RU2588953C1 (en) Method for anodic-abrasive machining of holes
Rahman et al. Nano finish grinding of brittle materials using electrolytic in-process dressing (ELID) technique
CN114589601A (en) Abrasive particle energizing line cutting device and method
JP2003191164A (en) Precision grinding method and apparatus, composite bond grindstone used therefor, and manufacturing method thereof
EP1877216B1 (en) Method of electrolytically microfinishing a metallic workpiece
JP2569348B2 (en) Mold regeneration method
CN108453634B (en) Integrative device of fluid cutting polishing
Ohmori et al. Highly efficient grinding of ceramic parts by electrolytic in-process dressing (ELID) grinding
JP3648442B2 (en) Grinding wheel manufacturing method, grinding wheel manufacturing apparatus, and grinding wheel
JP4467865B2 (en) Mold member processing method and manufacturing method
JPH01188266A (en) Grinding equipment
CN106078516A (en) A New CMP Polishing Pad Dresser
Shanawaz et al. Characteristics of electrolysis in-process dressing grinding of Al/SiCp composite materials
Tawakoli et al. Advanced Grinding
CN103952748A (en) Electroplating tank for manufacturing electroplating sawing wire with surface abrasive particles distributed in groups, joints and blocks
Itoh et al. A study of smooth surface finish by ELID-lap grinding and metal-resin bonded wheel
KR200243352Y1 (en) A holder for drilling and tapping machine

Legal Events

Date Code Title Description
A80 Written request to apply exceptions to lack of novelty of invention

Free format text: JAPANESE INTERMEDIATE CODE: A80

Effective date: 20040508

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050302

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20060731

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060810

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20061010

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070308

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070410

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070913

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20071010

R150 Certificate of patent or registration of utility model

Ref document number: 4041858

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101122

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101122

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111122

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121122

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131122

Year of fee payment: 6

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131122

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131122

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131122

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131122

Year of fee payment: 6

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S303 Written request for registration of pledge or change of pledge

Free format text: JAPANESE INTERMEDIATE CODE: R316303

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

S303 Written request for registration of pledge or change of pledge

Free format text: JAPANESE INTERMEDIATE CODE: R316303

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term