JP4046525B2 - Inverted microscope - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an inverted microscope for magnifying and observing an observation sample placed on a stage with an objective lens disposed immediately below the observation sample.
[0002]
[Prior art]
Inverted microscopes are widely used in the following fields. For example,
(1) Research in various fields dealing with living cells in medicine and physiology,
(2) Research and inspection of industrial systems such as structural observation of various metal materials and detection of defects and inclusions,
Etc.
[0003]
In recent years, cases where functions other than simple observation and photographing are required in research and inspection using an inverted microscope are increasing. Specifically, in addition to visual observation of a sample and taking a photograph with an eyepiece, there are the following uses. For example, imaging a sample using a TV camera and observing a change with time of the sample or performing image processing, irradiating the sample with laser light, and observing the change. In industrial research and inspection that handles metal materials, in addition to the above applications, there are cases where a macro observation device for observing a wider field of view of a sample at a low magnification is combined, or the internal structure, not the surface of the sample. In some cases, infrared light and an image sensor for infrared light are combined for observation.
[0004]
In order to increase the number of photographing optical paths having the same projection magnification, an inverted microscope is known in which light sequentially passing through an objective lens and an imaging lens is branched into photographing optical paths in three or more different directions (Japanese Patent Laid-Open No. 7-2008). No. 35986).
[0005]
According to the inverted microscope as described above, for example, three or more photographing devices such as a still camera and a TV camera can be attached. Further, the image magnification of the sample image formed on each photographing optical path by the imaging lens can be set equal. For this reason, each image can be easily compared and contrasted.
[0006]
However, in the above-described inverted microscope, the light sequentially passing through the objective lens and the imaging lens is branched into three or more different projection light paths. Therefore, this inverted microscope includes a first optical element in the microscope main body and a so-called optical path switching mechanism that changes the position of the first optical element on the optical path to change the light supply state to each imaging optical path. Must always be built in.
[0007]
For this reason, it is useless for a user who does not need a photographing optical path to always have a built-in optical path switching mechanism for switching between the first optical element and the first optical element, and this causes an increase in the cost of the microscope main body. . In addition, when you want to perform TV observation using infrared light in industrial research and inspection, the imaging lens and the first optical element in the microscope main body can be transmitted by changing the coating. There are many cases where it is necessary to change to the type to be. In order to make such changes, the inverted microscope needs to be lifted from the user to the manufacturing factory, and the inverted microscope needs to be disassembled, modified, and assembled. Therefore, there arises a problem that it takes labor and time to change the type.
[0008]
In addition, a structure in which an optical system can be newly added by expanding or contracting the stage support member with respect to the microscope base or arranging a spacer member between at least one of the stage and the microscope base and the stage support member. Also known is an inverted microscope having a lens (see Japanese Patent Application Laid-Open No. 11-72715).
[0009]
According to the inverted microscope as described above, a new space is formed between the stage and the microscope base. It is possible to add a new optical system to this space. In addition, the optical performance of the microscope can be achieved by placing a new optical system between the objective lens placed at the bottom of the stage and the imaging lens placed on the microscope base and in the parallel light beam emitted from the objective lens. It can be made to hardly decrease.
[0010]
As described above, the stage height from the desk surface is changed by extending or contracting the stage support member or arranging the spacer member. For this reason, there are the following problems.
[0011]
(1) The operability of the stage handle for moving the stage in the horizontal plane and changing the observation site of the sample deteriorates.
[0012]
(2) It is also necessary to change the height from the desk surface of peripheral devices such as manipulators used with the inverted microscope.
[0013]
(3) The operation itself of removing the stage and the stage support member, adding a new optical system, arranging the spacer member, and assembling the stage and the stage support member again is troublesome.
[0014]
(4) By arranging the spacer member, the orthogonality between the optical axis of the objective lens and the stage surface is deteriorated, and the optical performance is deteriorated.
[0015]
In addition, in an inverted microscope equipped with a filter block provided below the stage of the microscope body and an illumination projection unit that projects incident illumination light on the sample through the filter block, the sample is replaced with an illumination projection unit instead of the illumination projection unit. An inverted microscope having a light receiving means for receiving light is also known (see Japanese Patent Application Laid-Open No. 11-194277).
[0016]
According to such an inverted microscope, when the light receiving means is mounted instead of the illumination light projecting unit, the light from the sample reflected by the filter block is received by the light receiving means and converted into an electrical signal. Therefore, even a popular inverted microscope having no image output port can easily observe the microscope image and detect the light amount.
[0017]
However, the above-described inverted microscope has a problem that it cannot be applied at all to industrial research and inspection such as observation of the structure of a metal material that requires epi-illumination because the illumination projection unit is removed.
[0018]
[Problems to be solved by the invention]
The present invention provides an inverted microscope that can easily incorporate various auxiliary devices applicable to an industrial inverted microscope equipped with epi-illumination, is inexpensive in cost, and has excellent operability. For the purpose.
[0019]
[Means for Solving the Problems]
In order to solve the above-mentioned problems, the present invention has taken the following measures.
[0020]
  Of the present inventionFirstThe inverted microscope according to the aspectA stage on which the sample is placed, and the stage through the stage.An objective lens located below the sample;A microscope body supporting the stage;An imaging lens that is arranged in the optical path of the observation light emitted from the objective lens and forms an image of the observation light, and is arranged between the objective lens and the imaging lens, and is incident on the optical path of the observation light. Epi-illumination optical element to introduce,An optional unit that can be inserted into and removed from the microscope main body and is disposed between the epi-illumination optical element and the imaging lens, and provided in the optional unit, for the light flux from the observation optical path to the microscope main body A port optical element for branching or introducing a light beam into the observation optical path;It is characterized by comprising.
  An inverted microscope according to a second aspect of the present invention includes a stage on which a sample is placed, an objective lens disposed below the sample through the stage, a microscope main body that supports the stage, An imaging lens that is arranged in the optical path of the observation light emitted from the objective lens and forms an image of the observation light, and is arranged between the objective lens and the imaging lens, and an epi-illumination is applied to the optical path of the observation light. An option to arrange an epi-illumination optical element to be introduced and a port optical element for branching a light beam from the observation optical path or introducing a light beam into the observation optical path between the epi-illumination optical element and the imaging lens A port unit, wherein the optional port unit is detachable from the microscope body.
[0021]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0022]
(First embodiment)
1 and 2 are configuration diagrams of an inverted microscope to which the first embodiment of the present invention is applied. FIG. 1 is a side view. FIG. 2 is a front view of the vertical optical path portion including the objective lens of the inverted microscope shown in FIG. 1 as viewed from the front.
[0023]
In FIG. 1, a microscope main body (hereinafter referred to as “mirror body”) 1 has a generally concave shape. On the front and back of the mirror body 1, there are formed upward protruding portions called mirror legs. A stage 3 is disposed above the mirror legs. The observation sample 2 is placed on the stage 3.
[0024]
A light beam from the illumination light source 4 by a halogen lamp or the like is guided to a light projection tube 6 through a collector lens 5. The light beam guided to the light projecting tube 6 is incident on a semi-transmissive mirror 9 as an epi-illumination optical element via relay lenses 7 and 8 for relaying the light collected by the collector lens 5. In this case, the light projecting tube 6 is fixed to an opening (not shown) provided at the center of the rear mirror leg of the mirror body 1 to constitute an epi-illumination device.
[0025]
The IR cut filter 91 blocks the infrared light component contained in the illumination light source 4 in front of the collector lens 5.
[0026]
The light beam reflected by the semi-transmissive mirror 9 is irradiated onto the observation sample 2 through the objective lens 10. The revolver 11 holds a plurality of objective lenses (only one is shown in FIGS. 1 and 2). One objective lens 10 including a plurality of objective lenses is alternatively arranged in the optical path.
[0027]
The reflected light from the observation sample 2 passes through the semi-transmissive mirror 9. An enlarged image of the observation sample 2 is formed together with the objective lens 10 by the imaging lens 12 with respect to the transmitted light. This magnified image is incident on the reflection mirror 13. The reflection mirror 13 is disposed at the lowermost end portion of the mirror body 1. The reflection mirror 13 reflects the imaging light beam of the observation sample 2 emitted vertically downward by the objective lens 10 and the imaging lens 12 obliquely upward (here, 45 °). Then, an intermediate image I1 is formed on the observation optical path 14 in which the imaging light beam is directed obliquely upward.
[0028]
The intermediate image I1 is incident on the relay lenses 15 and 16. These relay lenses 15 and 16 relay the intermediate image I1 to adjust the light beam emitted from the lens barrel mounting portion 1a located above the front portion of the mirror body 1 into a parallel light beam. Then, the intermediate image I1 relayed by the relay lenses 15 and 16 forms an image at the position of the eyepiece 18 via the imaging lens 17. When the formed intermediate image I1 enters the observer's eye through the eyepiece lens 18, the image of the observation sample 2 is observed. In this case, the imaging lens 17 is provided inside the lens barrel 19 that is detachably attached to the lens barrel attaching portion 1a. The eyepiece 18 is attached to a binocular unit 20 for observation with both eyes provided integrally with the lens barrel 19.
[0029]
The revolver 11 is held on a revolver base 21. The revolver base 21 is supported so as to be movable in the vertical direction with respect to the central portion of the mirror body 1. A rack 22 is attached to the revolver base 21. A pinion shaft 23 that meshes with the rack 22 is provided coaxially with the focusing handle 24. Thereby, when the focusing handle 24 is rotated, the pinion shaft 23 is rotated. Then, the rack 22 that meshes with the pinion shaft 23 and the revolver base 21 to which the rack 22 is fixed are driven in the vertical direction. Thereby, the relative distance between the observation sample 2 placed on the stage 3 and the objective lens 10 held by the revolver 11 changes. As a result, it is possible to perform focus adjustment to form an intermediate image I1 of the observation sample 2 formed by the objective lens 10 and the imaging lens 12 at a predetermined position.
[0030]
On the other hand, an optional port unit 25 is inserted as an input / output port between the translucent mirror 9 inside the mirror body 1 and the imaging lens 12. The option port unit 25 can be inserted / removed along the dovetail portion 251 from the side surface of the mirror body 1.
[0031]
As shown in FIG. 2, a laser light source 26 is provided at the end of the option port unit 25 as an auxiliary device. In this case, the laser light source 26 is supported by the adapter 27. The adapter 27 is fixed to the base member of the option port unit 25 via the attachment portion 28. Further, a mirror 29 is disposed as an optical element for the port on the optical path of the light beam from the laser light source 26 inside the option port unit 25. The mirror 29 is fixed to the mirror frame 30. The mirror frame 30 is configured to be linearly movable in the left-right direction in FIG. 2 with respect to the base member of the option port unit 25 via the guide mechanism 31. Thereby, the mirror 29 can be inserted into and removed from the optical axis of the objective lens 10. In this case, when the mirror 29 is positioned on the optical axis of the objective lens 10, the mirror 29 reflects the light beam from the laser light source 26 toward the objective lens 10 and irradiates the observation sample 2 through the objective lens 10.
[0032]
In the industrial field, the laser light source 26 is used for the following applications, for example. For example, (1) a sample in which microspheres of polymer material are arrayed innumerably in a liquid, which is a medium, is captured by irradiating a laser light source having a high energy density as in the case of biological cells (laser trap). ) And (2) use of repairing a pattern (laser repair) in a sample such as an IC chip.
[0033]
A switching lever 32 is provided on the movable side of the guide mechanism 31, that is, on the mirror frame 30. The switching lever 32 causes the mirror frame 30 to move linearly via a guide mechanism 31 as a transfer means. By the switching lever 32, the mirror 29 is inserted into and removed from the optical axis of the objective lens 10.
[0034]
In such a configuration, first, the option port unit 25 is mounted while being moved along the dovetail portion 251 from the side surface of the mirror body 1.
[0035]
Next, the switching lever 32 is pushed toward the inside of the mirror body 1. The mirror frame 30 moves linearly in the right direction in FIG. Thereby, the mirror 29 is positioned at the solid line position in FIG. 2 on the optical axis of the objective lens 10.
[0036]
In this state, when laser light is generated from the laser light source 26, the laser light is reflected by the mirror 29 toward the objective lens 10 and is irradiated onto the observation sample 2 through the objective lens 10.
[0037]
Next, when the switching lever 32 is pulled out to the outside of the mirror body 1, the mirror frame 30 linearly moves in the left direction in FIG. 2 via the guide mechanism 31. As a result, the mirror 29 is retracted to the position of the broken line in FIG. 2 deviated from the optical axis of the objective lens 10.
[0038]
In this state, the laser light emitted from the laser light source 26 is not introduced into the objective lens 10. The light beam from the illumination light source 4 is reflected by the semi-transmissive mirror 9 and irradiated onto the observation sample 2 through the objective lens 10. Then, the reflected light from the observation sample 2 is transmitted through the semi-transmissive mirror 9 and is incident on the reflecting mirror 13 by the imaging lens 12. The light reflected by the reflection mirror 13 is formed as an intermediate image I1 on the observation optical path 14. The intermediate image I1 is imaged at the position of the eyepiece 18 via the relay lenses 15 and 16 and the imaging lens 17. Thereby, the change of the observation sample 2 etc. after irradiating the observation sample 2 with a laser beam etc. can be visually observed.
[0039]
In the above description, the laser light source 26 is illustrated as an auxiliary device. Depending on the auxiliary device to be combined, the mirror 29 may be exchanged with the mirror frame 30 for another optical element such as a dichroic mirror that reflects only a specific wavelength region.
[0040]
When the laser light source 26 having a relatively long wavelength is used in the above-described application such as a laser trap, the long wavelength side including the wavelength region of the laser light source 26 is reflected instead of the mirror 29, and the longer wavelength side is reflected. It is preferable to replace with a dichroic mirror that allows the short wavelength side to pass. Thereby, it is possible to irradiate the laser beam while observing the observation sample 2 with the illumination light source 4.
[0041]
According to the first embodiment, the laser light source as an auxiliary device is provided only with a relatively simple configuration including the mirror 29 and the guide mechanism 31 for inserting and removing the mirror 29 together with the mirror frame 30 with respect to the optical path. The option port unit 25 for irradiating the observation sample 2 with the light from 26 is constituted. Moreover, in the first embodiment, the option port unit 25 is detachable from the mirror body 1. As a result, the option port unit 25 can be retrofitted only to users who need it. Further, since the option port unit 25 is arranged in the parallel light portion between the objective lens 10 and the imaging lens 12, it is advantageous for branching or introducing the light beam, and there is a system advantage. Therefore, the inverted microscope according to the first embodiment can keep the cost of the main body 1 low compared to an inverted microscope in which an optical element for switching the optical path is permanently installed in the main body of the microscope. In addition, the inverted microscope according to the first embodiment avoids deterioration in workability and operability even when compared with an inverted microscope that changes the height of the stage in order to newly add a conventional optical system. it can. The inverted microscope according to the first embodiment can also be applied to an industrial inverted microscope requiring epi-illumination.
[0042]
(Second Embodiment)
A second embodiment of the present invention will be described with reference to FIG. FIG. 3 is a front view of the vertical optical path portion including the objective lens of the inverted microscope as viewed from the front. The inverted microscope shown in FIG. 3 differs from the inverted microscope described in the first embodiment only in the configuration of the option port unit, and the other configurations are the same. Therefore, in FIG. 3, the same parts as those in FIGS.
[0043]
In FIG. 3, the option port unit 41 is inserted between the semi-transmissive mirror 9 inside the mirror body 1 and the imaging lens 12. The option port unit 41 is detachable from the side surface of the mirror body 1 along an ant portion (not shown).
[0044]
At the end of the option port unit 41, a TV camera 42 incorporating an image sensor such as a CCD is provided as an auxiliary device. In this case, the TV camera 42 is supported by the adapter 43 and is fixed to the base member of the option port unit 41 via the attachment portion 44.
[0045]
A semi-transmissive mirror 45 is disposed inside the option port unit 41 so as to be detachable with respect to the optical axis of the objective lens 10. This semi-transmissive mirror 45 is fixed to a semi-transmissive mirror frame 46. The translucent mirror frame 46 can be linearly moved in the left-right direction in FIG. 3 with respect to the base member of the option port unit 41 via the guide mechanism 47. Thereby, the semi-transmissive mirror 45 can be inserted into and removed from the optical axis of the objective lens 10. In this case, the semi-transmissive mirror 45 is a part (for example, about 50%) of the reflected light from the observation sample 2 collected by the objective lens 10 while being positioned on the optical axis of the objective lens 10. Is deflected to the TV camera 42 side, and the remainder is transmitted to the imaging lens 12 side.
[0046]
A switching lever 48 is provided on the movable side of the guide mechanism 47, that is, on the semi-transmissive mirror frame 46. The switching lever 48 moves the mirror frame 46 linearly via the guide mechanism 47. The switching lever 48 switches the insertion / removal of the semi-transmissive mirror 45 on the optical axis of the objective lens 10.
[0047]
An imaging lens 49 is disposed between the semi-transmissive mirror 45 and the TV camera 42. The imaging lens 49 is a lens for connecting the reflected light from the observation sample 2 deflected by the semi-transmissive mirror 45 as an image on the imaging device of the TV camera 42, and is built in the imaging lens unit 50. . The imaging lens unit 50 is detachably attached inside the option port unit 41.
[0048]
In the above configuration, first, the option port unit 41 is mounted while being moved along the ant portion from the side surface of the mirror body 1.
[0049]
Next, when the switching lever 48 is pushed toward the inside of the mirror body 1, the translucent mirror frame 46 linearly moves in the left direction in FIG. 3 through the guide mechanism 47. The semi-transmissive mirror 45 is positioned at the solid line position in FIG. 3 on the optical axis of the objective lens 10.
[0050]
In this state, first, a light beam from an illumination light source (not shown) is reflected by the semi-transmissive mirror 9. Then, the reflected light is irradiated onto the observation sample 2 through the objective lens 10. Reflected light from the observation sample 2 enters the semi-transmissive mirror 45 via the semi-transmissive mirror 9. A part of light (for example, about 50%) incident on the semi-transmissive mirror 45 is deflected to the TV camera 42 side and is imaged on the image pickup device of the TV camera 42 through the imaging lens 49. Thereby, an imaging signal is output from the TV camera 42. This signal is observed as an image displayed on a TV monitor (not shown) or the like.
[0051]
When the switching lever 48 is pulled out to the outside of the mirror body 1, the semi-transmissive mirror frame 46 linearly moves in the right direction in FIG. 3 through the guide mechanism 47. Thereby, the semi-transmissive mirror 45 is retracted to the position of the broken line in FIG. 3 that is off the optical axis of the objective lens 10.
[0052]
In this state, the reflected light from the observation sample 2 is not introduced to the TV camera 42 side. Therefore, the reflected light from the observation sample 2 passes through the semi-transmissive mirror 9 and enters the reflecting mirror 13 through the imaging lens 12. The light reflected by the reflection mirror 13 is formed as an intermediate image I1 on the observation optical path 14. The intermediate image I1 is imaged at the position of the eyepiece 18 via the relay lenses 15 and 16 and the imaging lens 17, and is visually observed.
[0053]
The imaging lens unit 50 can be replaced with another imaging lens unit 52 having a built-in imaging lens 51 having different specifications such as magnification according to the size of the imaging element of the TV camera 42 to be combined. . Incidentally, in the second embodiment, for example, the imaging lens 49 is an imaging lens having an imaging magnification of 0.5 × at a focal length that is half the focal length of the imaging lens 12, and the imaging lens 51 is coupled. An imaging lens or the like having an imaging magnification of 0.35 × at a focal length that is about 1/3 of the focal length of the image lens 12 is used.
[0054]
Further, when an IR (infrared) camera is combined as the TV camera 42 for the purpose of observing the inside of the metal sample, IR (infrared) is sufficiently transmitted instead of the imaging lens 49 (51). An IR imaging lens with characteristics is used.
[0055]
Furthermore, it is possible to prepare another imaging lens having a magnification larger or smaller than that of the imaging lens 49 (and 51). An imaging lens suitable for the TV camera 42 combined with an inverted microscope can be selected from imaging lenses having different specifications such as magnification and wavelength characteristics. Therefore, it has the advantage that a use spreads.
[0056]
In the second embodiment, the semi-transmissive mirror 45 can be replaced with the semi-transmissive mirror frame 46. Therefore, when the TV camera 42 combined with the inverted microscope is an IR (infrared) camera, the semi-transparent mirror 45 is replaced with a mirror frame 46 and a dichroic mirror that reflects only the IR (infrared) wavelength region. By doing so, efficient IR observation becomes possible.
[0057]
When performing IR observation, the IR cut filter 91 shown in FIG. 1 is removed from the illumination optical path, and the infrared light component of the illumination light source 4 is sufficiently illuminated on the observation sample 2. Further, instead of the imaging lens unit 50 (or the imaging lens unit 52) or the like, an imaging lens unit having a characteristic of sufficiently transmitting infrared light is used.
[0058]
As described above, the image forming lens unit 50 (52) incorporating the image forming lens 49 (51) having different specifications such as magnification is detachably provided in the option port unit 41 according to the TV camera 42 to be combined. You can Therefore, when the TV camera 42 is attached, an imaging lens having a desired reduction magnification can be selected from several types of magnifications depending on the size of the imaging device, so that a wide field of view can be imaged at all times. Imaging becomes possible. Thereby, favorable microscope observation is realizable.
[0059]
Since the imaging lens unit can be supplied as an option independent of the mirror body 1, it can be easily replaced. In the second embodiment, the IR cut filter 91 as described in the first embodiment can be easily removed. As described above, also in the second embodiment, there is no need to modify or replace the components of the mirror body 1 itself. Therefore, the inverted microscope according to the second embodiment has an advantage that it can easily cope with various applications. The inverted microscope according to the second embodiment is very preferable for changing the imaging magnification, IR observation, and the like. Both of these are the effects of forming the option port unit at a position before the light from the objective lens 10 enters the imaging lens 12 after passing through the semi-transmissive mirror 9 for introducing epi-illumination light.
[0060]
(Third embodiment)
A third embodiment of the present invention will be described with reference to FIG. FIG. 4 is a front view of the vertical optical path portion including the objective lens of the inverted microscope as viewed from the front.
[0061]
The inverted microscope shown in FIG. 4 is different from the inverted microscope described in the second embodiment only in the configuration of the option port unit, and the other configurations are the same. Therefore, in FIG. 4, the same parts as those in FIG.
[0062]
In FIG. 4, the option port unit 61 is inserted between the semi-transmissive mirror 9 inside the mirror body 1 and the imaging lens 12. The option port unit 61 is detachable from the side surface of the mirror body 1 along an ant portion (not shown).
[0063]
The option port unit 61 is provided through the left and right side surfaces of the mirror body 1. A TV camera 42 incorporating an image pickup device such as a CCD is provided as an auxiliary device at one end of the option port unit 61. In this case, the TV camera 42 is supported by the adapter 43 and is fixed to the option port unit 61 via the attachment portion 44.
[0064]
Further, an imaging lens 49 for forming an image on the image pickup device of the TV camera 42 is disposed inside the option port unit 61. The imaging lens 49 is built in the imaging lens unit 50. The imaging lens unit 50 is detachably attached inside the option port unit 61.
[0065]
Since the configuration, operation, and effects up to here are the same as those of the second embodiment described above, detailed description thereof is omitted.
[0066]
A prism 62 is disposed inside the option port unit 61 so as to be detachable with respect to the optical axis of the objective lens 10. The prism 62 is fixed to the prism frame 63. The prism frame 63 is linearly movable in the left-right direction in FIG. 4 with respect to the base member of the option port unit 61 via the guide mechanism 64. Thereby, the prism 62 can be inserted into and removed from the optical axis of the objective lens 10. In this case, the prism 62 images a part (for example, about 80%) of the reflected light from the observation sample 2 collected by the objective lens 10 while being positioned on the optical axis of the objective lens 10. The light is deflected to the TV camera 42 side through the lens 49 and the rest is transmitted to the imaging lens 12 side. Further, although a switching lever is fixed to the mirror frame 46, the illustration is omitted.
[0067]
On the other hand, a macro observation device 66 is provided at the other end of the option port unit 61 as another auxiliary device via a mounting portion 65.
[0068]
The macro observation device 66 is configured as follows.
[0069]
An objective lens 68 is arranged with respect to an object 67 such as a horizontally placed specimen or a drawing surface. Light emitted from the upper surface of the object 67 is subjected to an image forming action of the objective lens 68. The optical axis 69 is deflected from the vertical direction to the horizontal direction by the first deflecting unit 70 formed of a mirror. Then, an image 72 is formed by the imaging action of the imaging lens 71. The light from the image 72 is subjected to an image forming action by the relay lens 73. The optical axis of the light from the image 72 is deflected from the horizontal direction to the vertical direction by the second deflecting unit including the two mirrors 74a and 74b, and then the image 75 is formed. Further, the light from the image 75 is subjected to an image forming action by the relay lens 76. After the optical axis of the light from the image 75 is deflected from the vertical direction to the horizontal direction by the third deflecting unit composed of the two mirrors 77a and 77b, it is adjusted to a parallel light beam by receiving the imaging action of the relay lens 78. Then, it is introduced into the interior of the mirror body 1 from the attachment portion 65. In this case, the objective lens 68, the first deflection unit 70, the imaging lens 71, the relay lens 73, the mirrors 74 a and 74 b, and the relay lens 76 are supported by the first lens barrel 79. The mirrors 77 a and 77 b and the relay lens 78 are supported by the second lens barrel 80. The first lens barrel 79 is supported by the second lens barrel 80 so as to be rotatable in a horizontal plane. The second lens barrel 80 is supported by a support base 81 so that the position of the second lens barrel 80 can be adjusted in the vertical direction. The objective lens 68 in the first lens barrel 79 is movable along the optical axis for changing the magnification. Further, the relay lens 78 in the second lens barrel 80 is movable along the optical axis for focusing.
[0070]
Even in the configuration as described above, a switching lever (not shown) is pushed toward the inside of the mirror body 1 to position the prism 62 at the solid line position of FIG. About 80% of the parallel light beam introduced in this way is deflected by the prism 62 toward the imaging lens 12 in the direction opposite to the objective lens 10 and is incident on the reflection mirror 13. Then, the light reflected by the reflecting mirror 13 forms an intermediate image I1 on the observation optical path 14 as described in FIG. The intermediate image I1 is visually observed by the eyepiece 18 through the relay lenses 15 and 16 and the imaging lens 17.
[0071]
On the other hand, when a light beam from an illumination light source (not shown) is reflected by the semi-transmissive mirror 9 and irradiated onto the observation sample 2 through the objective lens 10, the light enters the prism 62 through the semi-transmissive mirror 9. Then, about 80% of this is deflected to the TV camera 42 side and imaged on the image pickup device of the TV camera 42 via the imaging lens 49. As a result, an image pickup signal is output from the TV camera 42 and displayed as an image on a TV monitor (not shown) or the like for observation.
[0072]
Note that a part (approximately 20% in this case) of the parallel luminous flux from the object 67 introduced from the attachment portion 65 by the macro observation device 66 passes through the prism 62 without being reflected, and forms an image. The image is formed on the image sensor of the TV camera 42 through the lens 49. Accordingly, the TV camera 42 may superimpose the magnified image of the observation sample 2 by the objective lens 10 and the image of the object 67 by the macro observation device 66, and observe the superimposed image on a TV monitor or the like. Is possible.
[0073]
Similarly, a part (about 20% in this case) of the light beam from the observation sample 2 emitted from the objective lens 10 passes without being reflected by the prism 62, and forms the imaging lens 12, the reflection mirror 13, and the relay. The eyepiece 18 is visually observed through the lenses 15 and 16 and the imaging lens 17 in this order. Therefore, it is possible to superimpose the image of the object 67 by the macro observation device 66 and the enlarged image of the observation sample 2 by the objective lens 10 also on the eyepiece 18.
[0074]
When a white paper is placed as the object 67, it is possible to hand-write on the white paper according to the image of the observation sample 2. This technique is known as a drawing apparatus.
[0075]
The reflection / transmission ratio of the prism 62 is not limited to 80%: 20%, and can be appropriately selected according to the application, such as 50%: 50%.
[0076]
A switching lever (not shown) is pulled out to the outside of the mirror body 1 to retract the prism 62 to the position of the broken line in FIG. 4 that is off the optical axis of the objective lens 10. In this case, the reflected light from the observation sample 2 is not introduced to the TV camera 42 side. Therefore, the reflected light from the observation sample 2 enters the reflection mirror 13 through the imaging lens 12. The light reflected by the reflection mirror 13 is imaged as an intermediate image I1 on the observation optical path 14 and visually observed by the eyepiece 18 through the relay lenses 15 and 16 and the imaging lens 17.
[0077]
According to the third embodiment, the option port unit 61 is provided so as to penetrate the left and right side surfaces of the mirror body 1, and two auxiliary devices can be attached simultaneously. Therefore, observation with the TV camera 42 (IR camera) and macro observation with the macro observation device 66 can be realized simultaneously.
[0078]
(Fourth embodiment)
A fourth embodiment of the present invention will be described with reference to FIG. FIG. 5 is a front view of the vertical optical path portion including the objective lens of the inverted microscope as viewed from the front.
[0079]
The inverted microscope shown in FIG. 5 differs from the inverted microscope described in the second embodiment only in the configuration of the option port, and the other configurations are the same. Therefore, in FIG. 5, the same parts as those in FIG.
[0080]
In FIG. 5, the option port unit 101 is inserted between the semi-transmissive mirror 9 inside the mirror body 1 and the imaging lens 12. The option port unit 101 is detachable from the side surface of the mirror body 1 along an ant portion (not shown).
[0081]
A double port portion 102 is formed in a portion of the option port unit 101 that protrudes from the left mirror 1 in FIG. A TV camera 42 is attached to one attachment portion 102a of the double port portion 102, and another TV camera (here, referred to as “IR observation camera”) 103 is attached to the other attachment portion 102b. It is installed. In this case, the TV camera 42 is supported by the adapter 43 and is fixed to the double port portion 102 via the attachment portion 102a. Moreover, the TV camera 103 is supported by the adapter 110 and is fixed to the double port portion 102 via the attachment portion 102b.
[0082]
A dichroic mirror 104 that reflects only light in the infrared region is disposed inside the double port portion 102. The dichroic mirror 104 is movable in a direction perpendicular to the paper surface. By moving the dichroic mirror 104 in the direction perpendicular to the paper surface, the dichroic mirror 104 can be retracted from the optical axis connecting the semi-transmissive mirror 45 and the TV camera 42.
[0083]
In the fourth embodiment, the mounting portion 102b of the double port portion 102 is provided vertically upward. Of course, the mounting portion 102b can be provided in a horizontal direction (a direction perpendicular to the paper surface).
[0084]
Since the configurations and operations of the semi-transmissive mirror 45, the semi-transmissive mirror frame 46, the guide mechanism 47, and the switching lever 48 arranged in the option port unit 101 are the same as those in the second embodiment, the description thereof will be given. Omitted.
[0085]
An imaging lens 105 is disposed between the semi-transmissive mirror 45 in the option port unit 101 and the TV camera 42. The imaging lens 105 has a focal length longer than the imaging lens 49 in the second embodiment by the size of the double port portion 102. The imaging lens 105 images the reflected light from the observation sample 2 deflected by the semi-transmissive mirror 45 on the imaging device of the TV camera 42 or 103. The imaging lens 105 is built in the imaging lens unit 106. The imaging lens unit 106 is detachably attached inside the option port unit 101.
[0086]
In the above configuration, when the switching lever 48 is pushed, the semi-transmissive mirror 45 is positioned on the optical axis of the objective lens 10.
[0087]
In this state, when a light beam from an illumination light source (not shown) is reflected by the semi-transmissive mirror 9, the observation sample 2 is irradiated through the objective lens 10. When reflected light from the observation sample 2 enters the semi-transmissive mirror 45 via the semi-transmissive mirror 9, a part (for example, about 50%) of the light is deflected to the double port portion 102 side. When the dichroic mirror 104 inside the double port portion 102 is positioned on the optical axis connecting the semi-transparent mirror 45 and the TV camera 42, infrared light is included in the light beam deflected toward the double port portion 102. The component is reflected and imaged on the image sensor of the TV camera 103 for IR observation. The remaining visible light components excluding the infrared light components pass through the dichroic mirror 104 as they are and are imaged on the image pickup device of the TV camera 42.
[0088]
When the dichroic mirror 104 inside the double port portion 102 is retracted from the optical axis connecting the semi-transmissive mirror 45 and the TV camera 42, all the light beams deflected toward the double port portion 102 are all transmitted to the TV camera 42. The image is formed on the image sensor.
[0089]
Thereby, a video signal is output from the TV camera 42 and the IR observation TV camera 103. This signal is displayed as an image on a TV monitor (not shown) or the like for observation.
[0090]
When the switching lever 48 is pulled out of the mirror body 1, the reflected light from the observation sample 2 is used for visual observation without being introduced to the TV cameras 42 and 103 side, as in the case of the second embodiment. The
[0091]
In the third embodiment, the optical element built in the double port unit 102 is a dichroic mirror 104 that reflects an infrared light component. Not limited to this, the optical element may have different characteristics such as a simple translucent mirror depending on the type of TV camera to be mounted.
[0092]
As described above, in the fourth embodiment, the double port portion is formed at one end of the option port unit so that two cameras are mounted. Therefore, an application such as quickly switching between the normal observation image and the IR observation image of the sample and observing it becomes possible. Note that the option port unit is not limited to two, and more cameras may be attached.
[0093]
(Fifth embodiment)
A fifth embodiment of the present invention will be described with reference to FIG. FIG. 6 is a front view of the vertical optical path portion including the objective lens of the inverted microscope as viewed from the front.
[0094]
The inverted microscope shown in FIG. 6 differs from the inverted microscope described in the second embodiment only in the configuration of the option port, and the other configurations are the same. Therefore, in FIG. 6, the same parts as those in FIG.
[0095]
In FIG. 6, the option port unit 201 is inserted between the semi-transmissive mirror 9 inside the mirror body 1 and the imaging lens 12. The option port unit 201 can be inserted and removed from the side surface of the mirror body 1 along an ant portion (not shown).
[0096]
A TV camera 42 as an auxiliary device is attached to the left end of the option port unit 201 in FIG. The TV camera 42 is supported by the adapter 43. The adapter 43 is fixed to the base member of the option port unit 201 via the mounting portion 202.
[0097]
In addition, a laser light source 26 is mounted as an auxiliary device at the right end of the option port unit 201 in FIG. The laser light source 26 is supported by the adapter 27. The adapter 27 is fixed to the base member of the option port unit 201 via the attachment portion 203.
[0098]
Inside the option port unit 201, a semi-transmissive mirror 45 and a dichroic mirror 204 are disposed so as to be insertable / removable with respect to the optical axis of the objective lens 10. The semi-transmissive mirror 45 is fixed to the semi-transmissive mirror frame 46. The dichroic mirror 204 is fixed to the dichroic mirror frame 205. Further, the semi-transmissive mirror 45 and the dichroic mirror 204 are integrally disposed on the guide mechanism 206. Here, the semi-transmissive mirror 45 and the dichroic mirror 204 are linearly movable in the left-right direction in FIG. 6 with respect to the base member of the option port unit 201. Thereby, the semi-transmissive mirror 45 and the dichroic mirror 204 can be inserted into and removed from the optical axis of the objective lens 10. In FIG. 6, a switching lever 210 is fixed on the right side of the guide mechanism 206. FIG. 6 shows a state where the semi-transmissive mirror 45 is arranged on the optical axis of the objective lens 10. In this case, a part (for example, about 50%) of the reflected light from the observation sample 2 collected by the objective lens 10 is deflected to the TV camera 42 side, and the rest is transmitted to the imaging lens 12 side. ing. Further, when the dichroic mirror 204 is disposed on the optical axis of the objective lens 10, the following occurs. The light beam from the laser light source 26 is reflected 100% toward the objective lens 10 side. The reflected light is applied to the observation sample 2 through the objective lens 10. Further, the reflected light from the observation sample 2 by the light beam from the illumination light source (not shown) passes through the semi-transmissive mirror 9 and then passes from the dichroic mirror 204 toward the imaging lens 12.
[0099]
In FIG. 6, the imaging lens 208 is fixed to the left side of the guide mechanism 206 via the imaging lens frame 207. In this imaging lens 208, when the semi-transmissive mirror 45 is disposed on the optical axis of the objective lens 10, the light beam from the objective lens 10 deflected by the semi-transmissive mirror 45 is just taken by the TV camera 42. An image is formed on the element. When the dichroic mirror 204 is positioned on the optical axis of the objective lens 10, the imaging lens 208 is retracted to the left side in FIG. 6 together with the semi-transmissive mirror 45.
[0100]
In the configuration as described above, when the switching lever 210 is pushed, the dichroic mirror 204 is positioned on the optical axis of the objective lens 10.
[0101]
In this state, when laser light is emitted from the laser light source 26, the laser light is reflected by the dichroic mirror 204 to the objective lens 10 side. The reflected light is applied to the observation sample through the objective lens 10.
[0102]
When the switching lever 210 is pulled out, the semi-transmissive mirror 45 is positioned on the optical axis of the objective lens 10 and the imaging lens 208 is positioned at a predetermined position.
[0103]
In this state, a light beam from an illumination light source (not shown) is reflected by the semi-transmissive mirror 9 and irradiated onto the observation sample 2 through the objective lens 10. When the reflected light from the observation sample 2 enters the semi-transmissive mirror 45 via the semi-transmissive mirror 9, a part of the incident light (for example, about 50%) is deflected to the TV camera 42 side, and the imaging lens 208 is moved. Then, an image is formed on the image pickup device of the TV camera 42. Thereby, an imaging signal is output from the TV camera 42. This signal is displayed as an image on a TV monitor (not shown) and used for observation.
[0104]
The remaining light beam that has passed through the semi-transmissive mirror 45 is finally visually observed by the eyepiece 18 via the imaging lens 12, the mirror 13, and the like.
[0105]
As described above, in the fifth embodiment, the TV camera and the laser light source are mounted as auxiliary devices on both sides of the option port unit. This has the advantage that both applications can be efficiently performed in one place.
[0106]
According to each embodiment of the present invention, it can be applied not only to an inverted microscope for research purposes in various fields dealing with living cells of medicine and physiology, but also to an inverted microscope for industrial use with epi-illumination. . In addition, it is possible to combine a TV camera, introduce a laser beam, or combine a macro observation device in accordance with the user's wishes without causing an increase in cost of the microscope main body. In addition, an input / output port can be provided without deteriorating operability due to a change in stage height.
[0107]
The following inventions can be extracted from the above embodiments.
[0108]
An inverted microscope according to an aspect of the present invention includes an objective lens disposed on a lower side of a sample, an imaging lens that is disposed in an optical path of observation light emitted from the objective lens, and forms an image of the observation light, An epi-illumination optical element that is disposed between the objective lens and the imaging lens and introduces epi-illumination into an optical path of the observation light, and is disposed between the epi-illumination optical element and the imaging lens, and the observation lens And an input / output port for branching the light beam from the optical path of the light or introducing the light beam into the optical path of the observation light.
[0109]
In the aspect of the present invention, preferred embodiments are as follows. Note that the following embodiments may be applied alone or in appropriate combination.
[0110]
(1) The input / output port includes a detachable option port unit, and the option port unit includes a port optical element for branching or introducing a light flux with respect to the optical path of the observation light, and the observation of the port optical element. A switching means for inserting / removing the optical path of light and an auxiliary device for receiving a light beam branched from the optical path of the observation light by the port optical element or sending a light beam inserted into the optical path of the observation light are attached. An auxiliary device mounting part for the purpose.
[0111]
(2) Further comprising an ant mechanism for detachably attaching the option port unit.
[0112]
(3) The optional port unit further includes a second imaging lens disposed between the port optical element and the auxiliary device mounting portion.
[0113]
(4) The second imaging lens can be replaced with another imaging lens having a different magnification.
[0114]
(5) It further comprises an IR cut filter that is detachably disposed between the incident optical element and the light source.
[0115]
(6) Two optical paths branched or introduced into the optical path of the observation light are formed by the port optical element, and the auxiliary device mounting portion is provided corresponding to the two optical paths.
[0116]
(7) The option port unit has at least two attachment portions for attaching the imaging device.
[0117]
【The invention's effect】
According to the embodiment of the present invention, when the input / output port is used as an output port for extracting reflected light from the sample, the light extracted from the input / output port can be used for detection of the light amount or imaging by the TV camera. it can. In addition, when used as an input port for introducing light from the outside, it is possible to introduce light that irradiates the sample from an external laser light source so as to form an image on the sample. In this case, a primary image can be formed in exactly the same manner as the sample image that has passed through the objective lens, and can be observed with an eyepiece or the like.
[0118]
In addition, according to the embodiment of the present invention, only when an input / output port which is an optional unit is attached, an auxiliary device such as a TV camera or a macro observation device can be attached to perform various observations. Light can be introduced into the apparatus by operating the conveying means and inserting the optical element into the optical path.
[0119]
Furthermore, according to the embodiment of the present invention, it is possible to cope with various auxiliary devices by exchanging various imaging lenses inserted in the optical path of the reflected light from the sample. For example, when a TV camera or a digital camera is attached, a wide field of view can be imaged by selecting an imaging lens having a reduction magnification from several types of magnifications depending on the size of the imaging device. If an imaging lens that sufficiently transmits infrared light and an IR camera are used, infrared light observation is possible.
[0120]
Furthermore, according to the embodiment of the present invention, two auxiliary devices of different types can be attached, so that observation using a TV camera (IR camera) and macro observation using a macro observation device can be realized simultaneously. Can do.
[Brief description of the drawings]
FIG. 1 is a diagram showing a schematic configuration of an inverted microscope according to a first embodiment of the present invention.
FIG. 2 is a diagram of a vertical optical path portion including an objective lens of the inverted microscope according to the first embodiment viewed from the front.
FIG. 3 is a front view of a vertical optical path portion including an objective lens of an inverted microscope according to a second embodiment of the present invention.
FIG. 4 is a front view of a vertical optical path portion including an objective lens of an inverted microscope according to a third embodiment of the present invention.
FIG. 5 is a front view of a vertical optical path portion including an objective lens of an inverted microscope according to a fourth embodiment of the present invention as viewed from the front.
FIG. 6 is a front view of a vertical optical path portion including an objective lens of an inverted microscope according to a fifth embodiment of the present invention as viewed from the front.
[Explanation of symbols]
1 ... Microscope body (mirror body)
1a ... Tube mounting part
2 ... Observation sample
3 ... Stage
4 ... Light source for illumination
5 ... Collector lens
6 ... Floodlight tube
7, 8 ... Relay lens
9 ... Translucent mirror
10 ... Objective lens
11 ... Revolver
12 ... Imaging lens
13 ... Reflection mirror
14 ... Observation optical path
15, 16 ... Relay lens
17 ... Imaging lens
18 ... Eyepiece
19 ... Tube
20 ... Binocular
21 ... Revolver stand
22 ... Rack
23 ... pinion shaft
24 ... Focusing handle
25 ... Optional port unit
26 ... Laser light source
27 ... Adapter
29 ... Mirror
30 ... Mirror frame
31 ... Guide mechanism
32 ... Switching lever

Claims (13)

A stage on which a sample is placed;
An objective lens disposed under the sample through the stage ;
A microscope body supporting the stage;
An imaging lens that is arranged in an optical path of observation light emitted from the objective lens and forms an image of the observation light;
An epi-illumination optical element that is disposed between the objective lens and the imaging lens and introduces epi-illumination into the optical path of the observation light;
An optional unit that can be inserted into and removed from the microscope body and is disposed between the epi-illumination optical element and the imaging lens;
An inverted microscope comprising a port optical element provided in the optional unit and configured to branch a light beam from an optical path of the observation light or introduce a light beam into the observation light path . 2. The inverted microscope according to claim 1 , wherein the optional port unit receives a light beam branched from the optical path of the observation light by the optical element for the port or sends a light beam inserted into the optical path of the observation light. An inverted microscope comprising: an auxiliary device mounting portion for mounting the auxiliary device. 2. The inverted microscope according to claim 1, wherein the option port unit includes a switching unit that inserts and removes the optical element on the observation optical path. The inverted microscope according to claim 2, further comprising an ant mechanism for detachably attaching the option port unit. 4. The inverted microscope according to claim 2, wherein the option port unit further includes a second imaging lens disposed between the port optical element and the auxiliary device mounting portion. Inverted microscope characterized by 6. The inverted microscope according to claim 5, wherein the second imaging lens is replaceable with another imaging lens having a different magnification. The inverted microscope according to any one of claims 1 to 6, further comprising an IR cut filter that is detachably disposed between the incident optical element and the light source. Type microscope. In the inverted microscope according to claim 2,
Two optical paths branched or introduced into the optical path of the observation light are formed by the optical element for ports,
The inverted microscope, wherein the auxiliary device mounting portion is provided corresponding to the two optical paths. 3. The inverted microscope according to claim 2, wherein the option port unit has at least two attachment parts for attaching the imaging device. 2. The inverted microscope according to claim 1, wherein the microscope main body has an opening for inserting and removing the option port unit. A stage on which a sample is placed;
An objective lens disposed under the sample through the stage;
A microscope body supporting the stage;
An imaging lens that is arranged in an optical path of observation light emitted from the objective lens and forms an image of the observation light;
An epi-illumination optical element that is disposed between the objective lens and the imaging lens and introduces epi-illumination into the optical path of the observation light;
Optical element for a port for branching a light beam from the observation light path or introducing a light beam into the observation light path An optional port unit for disposing a child between the epi-illumination optical element and the imaging lens;
The inverted port microscope is characterized in that the optional port unit can be inserted into and removed from the microscope body. 12. The inverted microscope according to claim 11, wherein the microscope main body has an opening for inserting and removing the option port unit. 12. The inverted microscope according to claim 11, wherein the microscope main body has an ant mechanism for inserting and removing the option port unit.

Images