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JP4048464B2 - Method and apparatus for loading / unloading glass substrate to / from sealant curing surface plate - Google Patents
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JP4048464B2 - Method and apparatus for loading / unloading glass substrate to / from sealant curing surface plate - Google Patents

Method and apparatus for loading / unloading glass substrate to / from sealant curing surface plate Download PDF

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JP4048464B2
JP4048464B2 JP2000121930A JP2000121930A JP4048464B2 JP 4048464 B2 JP4048464 B2 JP 4048464B2 JP 2000121930 A JP2000121930 A JP 2000121930A JP 2000121930 A JP2000121930 A JP 2000121930A JP 4048464 B2 JP4048464 B2 JP 4048464B2
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glass substrate
surface plate
seal material
material curing
curing surface
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JP2001305562A (en
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章五 中島
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Sintokogio Ltd
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Sintokogio Ltd
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Description

【0001】
【発明の属する技術分野】
本発明は、液晶ディスプレイ組立て工程において、貼合せ装置により仮止めされたガラス基板をシ−ル材硬化定盤上に搬入載置し、シ−ル材硬化処理を済ませた後、ガラス基板をシ−ル材硬化定盤上から搬出する方法及びその装置に関する。
【0002】
【従来の技術】
従来、液晶ディスプレイ組立て工程では、貼合せ装置により仮止めされたガラス基板はシ−ル材硬化工程に送られ、2枚のガラス基板間の隙間が所定のギャップ平行度を得られた時点でシ−ル材を硬化させる硬化処理が行われる。このシ−ル材の硬化方法としては、熱硬化方式と紫外線照射硬化方式の2方式があり、熱硬化方式においては内部にヒ−タを埋め込んだ加熱定盤が使用され、紫外線照射硬化方式では紫外線を透過する石英定盤が使用される。
またそれぞれの定盤上にガラス基板を載置し、シ−ル材硬化処理後定盤上からガラス基板を取り出す方法としては、一般にガラス基板を上面から多数の吸着パッドで吸着をして吊り上げて定盤上に載置あるいは定盤上から取り出す上面吸着搬送方式と、ガラス基板を下面から搬送ア−ムで持ち上げて、定盤を貫通して上昇したリフトピンに移し替え、リフトピンが下降して定盤上にガラス基板を載置あるいは定盤上から取り出すリフトピン方式の2方式がある。
【0003】
【発明が解決しようとする課題】
しかし上記の上面吸着搬送方式では、搬送途中において2枚のガラス基板の仮止めがガラス基板自身の質量で剥がれてしまい、処理(搬送)できるガラス基板のサイズが限定される。この問題を解決するためにはシ−ル材の塗布量を増やしたり塗布個所を増加させたりして接着強度を上げればよいが、一旦硬化した仮止め用シ−ル材は加熱あるいは紫外線照射をしても軟化せずガラス基板間の突支え棒になり、この部分が他の部分よりもギャップが10μm程度広くなってしまいギャップ平行度に悪影響を及ぼす。このためガラス基板上面吸着搬送を行うために仮止め用シ−ル材の数量を増やすのは望ましくない。
さらに上記のリフトピン方式は、定盤にリフトピン昇降用の穴を開けるが、ガラス基板を加圧する際にこの穴の部分だけが圧力が掛からずこの部分のギャップが広くなってギャップ平行度に悪影響を及ぼす。このため定盤にリフトピン昇降用の穴を開けるのは望ましくない。
【0004】
本発明は上記の問題に鑑みて成されたものであって、ガラス基板の仮止め用シ−ル材の塗布量を最小限に抑え、且つシ−ル材硬化定盤に穴開け加工を行わずに仮止めされたガラス基板をシ−ル材硬化定盤上に搬入載置すると共に硬化処理の後シ−ル材硬化定盤上から搬出することができるガラス基板のシ−ル材硬化定盤への搬入出方法及びその装置を提供することを目的とする。
【0005】
【課題を解決するための手段】
上記の目的を達成するために本発明におけるガラス基板のシ−ル材硬化定盤への搬入出方法は、仮止め用シール材と硬化用シール材とにより貼り合わされたガラス基板を、該硬化用シール材を硬化させるシ−ル材硬化定盤上に搬入し、シ−ル材硬化処理をした後シ−ル材硬化定盤上のガラス基板を搬出させる方法であって、前記ガラス基板の搬入の際に、ガラス基板とシ−ル材硬化定盤との間に気体を吹き入れて気体膜を形成してガラス基板をシ−ル材硬化定盤から浮き上がらせた状態で上側ガラス基板吸着によるロ−ラ送り込み搬送をさせ、前記シ−ル材硬化処理済ガラス基板の搬出の際に、ガラス基板の一端上面を吸着引き上げにより持ち上げ、ガラス基板とシ−ル材硬化定盤との間に隙間を設けた後該隙間に正負にイオン化したエヤ−を吹き入れて気体膜を形成してガラス基板全面を浮き上がらせることによってガラス基板及びシ−ル材硬化定盤表面に帯電した電荷を逆極性のイオンで中和し除電を行い、上側ガラス基板吸着によるロ−ラ引込み搬送をさせることを特徴とするものである。
【0006】
また本発明におけるガラス基板のシ−ル材硬化定盤への搬入出装置は、ガラス基板を搬送させる複数のロ−ラ該ロ−ラを跨ぐ門形構造の移動フレ−ムを搬送させる複数のロ−ラとを配置すると共に両ロ−ラ間にガイドを設けた一軸多数ロ−ラ構成の正逆回転ロ−ラコンベヤの搬送端外側に仮止めガラス基板のシ−ル材硬化定盤を前記正逆回転ロ−ラコンベヤの搬送面よりも若干低くして配置し、前記移動フレ−ムのシ−ル材硬化定盤寄り前方に複数の吸着パッドを間隔をおくと共に昇降可能にして取付け、かつ除電用エヤ−ノズルを前記吸着パッドにより吸着したガラス基板の端面下部に向けて下降傾斜させて取付け、前記正逆回転ロ−ラコンベヤの搬入出口寄り下方に前記移動フレ−ムの押し上げ機を配設すると共に正逆回転ロ−ラコンベヤのシ−ル材硬化定盤寄り下方に、ガラス基板停止用のストッパを配設し、前記正逆回転ロ−ラコンベヤとシ−ル材硬化定盤との間位置にシ−ル材硬化定盤上のガラス基板の下面に向かって上昇傾斜させて気体吹き付けノズルを取付け、さらに前記シ−ル材硬化定盤におけるガラス基板の移動方向に交差する方向の両外側上方に、複数のノズルを間隔をおいて配置すると共に対向移動可能にして設けたことを特徴とするものである。
【0007】
【発明の実施の形態】
以下本発明の実施の形態を図面に基づいて詳しく説明する。装置は正逆回転ロ−ラコンベヤA、硬化用シール材を硬化させるシ−ル材硬化定盤B及び移動フレ−ムCが組み合わされたものとなっており、該正逆回転ロ−ラコンベヤAは次のような構成にされている。コンベヤフレ−ム1、1間に多数の回転軸2、2が間隔をおいて回転可能に支持されていて、各回転軸2、2はプ−リ3、3及びタイミングベルト4を介して正逆回転モ−タ5に連結されている。
【0008】
また回転軸2、2にはガラス基板Pを搬送すると共に撓みを防止するロ−ラ6、6が100〜150mmピッチでガラス基板サイズに応じて複数個取付けられており、このロ−ラ6、6の外側にはガラス基板Pの横ずれ防止のためのガイド7、7が取付けられ、さらにガイド7、7の外側には移動フレ−ムCを搬送するためのロ−ラ6A、6Aが左右2個づつと、その外側には移動フレ−ムCの横ずれ防止のためのガイド7A、7Aが取付けられている。
【0009】
また移動フレ−ムCは、全体が門形構造(図3参照)を成し、左右の脚8、8が移送板9、9上に固定されており、移送板9、9が前記ロ−ラ6A、6A上に載せられている。該移動フレ−ムCの天井部にはシ−ル材硬化定盤Bの方向に突出すると共に左右に適当な間隔をおいて取り付けた複数の取付けフレ−ム10、10を介してシリンダ11、11が下向きにして取り付けられ、該シリンダ11、11の下端には取付け板12、12を介して吸着パッド13、13が下向きにして取り付けられている。なお吸着パッド13、13は、図5に示すようにシリンダ11、11に取付け板12、12を介して固定されたホルダ13A、13Aの内径に貫通し且つホルダ13Aに固定されていない配管シャフト13Bと共に上下動する。また吸着パッド13、13は真空発生器14に連通されている。
【0010】
さらに中央の吸着パッド13の背後位置(移動フレ−ムC本体側)には、通過するエヤ−をイオナイザ−によって正負にイオン化する除電機構を有する除電用エヤ−ノズル15がノズル先端をガラス基板搬送面に対し30〜60度下方に傾斜させて取付けられている。なお除電用エヤ−ノズル15は圧縮空気発生器16に連通され、0.3〜0.8MPa(好ましくは0.5MPa)の圧縮エヤ−を吹き付けるようにされている。
【0011】
さらに正逆回転ロ−ラコンベヤAにおける移動フレ−ムCに対応する下方には移動フレ−ムCを正逆回転ロ−ラコンベヤAから持ち上げる押し上げ機17が、また正逆回転ロ−ラコンベヤAのシ−ル材硬化定盤B寄り位置下方にはガラス基板Pの移動停止用のストッパ18がそれぞれ昇降可能にして配設されている。
また正逆回転ロ−ラコンベヤAの終端外側にはシ−ル材硬化定盤Bがその上面を正逆回転ロ−ラコンベヤAの搬送面よりも2〜3mm低くして配置されている。
【0012】
またシ−ル材硬化定盤Bの左右両外側上部には図4に示すように横向シリンダ19、19がフレ−ム20、20を介して対向して設けられており、各横向シリンダ19、19のピストンロッド先端部には、マニホ−ルド21、21が取り付けられている。各マニホ−ルド21、21の下部には、L字状を成した複数のノズル22、22が所定の間隔をおいて連通されていると共にその水平部がシ−ル材硬化定盤B上面から0.5mm程度の隙間を持つようにされている。
なお各ノズル22、22は、各横向シリンダ19、19の伸長作動によりガラス基板Pの端面から内側へ10mm程度差し込みされ、縮引作動によりガラス基板Pの端面から外れるようにされている。また各マニホ−ルド21、21は前記圧縮空気発生器16に連通され、0.3〜0.8MPa(好ましくは0.5MPa)の圧縮エヤ−をノズル22、22から吹き出すようにされている。
【0013】
さらに前記正逆回転ロ−ラコンベヤAの終端中央部には、シ−ル材硬化定盤B上面端部に向けて30〜60度上昇傾斜させた気体吹き付けノズル23が設けられていて、該気体吹き付けノズル23は前記圧縮空気発生器16に連通され、0.3〜0.8MPa(好ましくは0.5MPa)の圧縮エヤ−を吹き付けるようにされている。なお前記除電用エヤ−ノズル15及び気体吹き付けノズル23は、内径1mm程度の吹き出し口を1.5mmピッチ程度で50〜100mm程度直列にガラス基板Pと平行に配置するか、幅1mm程度で長さ50〜100mm程度の吹き出し口をガラス基板Pと平行に配置するのが望ましい。
【0014】
このように構成されたものの作動を説明する。正逆回転ロ−ラコンベヤAに仮止め用シール材により仮止めされるとともに硬化用シール材が塗布されて貼り合わされたガラス基板Pが載せられていない状態で、移動フレ−ムCを正逆回転ロ−ラコンベヤAの所定位置(左端位置)に位置決めして押し上げ機17が上昇作動して移動フレ−ムCを持ち上げた後、ストッパ18が上昇される。次に仮止めした2枚のガラス基板Pを図示されない貼合せ装置から正逆回転ロ−ラコンベヤAの左端中央部に搬入し、ガラス基板Pがストッパ18に当たって位置決めされた後、押し上げ機17を下降作動させ、移動フレ−ムCを正逆回転ロ−ラコンベヤA上に載せ替え、ストッパ18を下降させる。
【0015】
次に移動フレ−ムCに取り付けられた吸着パッド13、13を、ガラス基板Pのシ−ル材硬化定盤Bへの搬入方向とは反対(図1、2で左側)の辺の端から10〜20mm程度の位置にシリンダ11、11を下降作動させて吸着パッド13、13をガラス基板Pに密着させ、真空発生器14を作動させて真空吸引を行い、吸着パッド13、13によってガラス基板Pを吸着する。この際シリンダ11、11の下方への押し付け力が吸着パッド13、13を介してガラス基板Pに掛からないように吸着パッド13、13はガラス基板Pに接触した時点で、シリンダ11、11に取付け板12、12を介して固定されたホルダ−13A、13Aの内径に貫通し且つホルダ−13A、13Aに固定されていない配管シャフト13B、13Bと共に余分なストロ−ク分スライドする(図5参照)。このためガラス基板Pには吸着パッド13、13の自重(数十グラム)が作用するだけでよけいな外力が作用しないためガラス基板Pの相互のずれが防止される。
【0016】
この状態で正逆回転モ−タ5が正回転作動して各回転軸2、2を正回転させ、ガラス基板Pと移動フレ−ムCを移送させる。ガラス基板Pと移動フレ−ムCは同一径のロ−ラ6、6Aによって送られるため両者の移動スピ−ドは同一であり、吸着パッド13、13が上側のガラス基板を水平方向に引きずる力が作用するのを防止し、ガラス基板Pの相互のずれが防止される。
このようにしてガラス基板Pは搬送されるにつれ正逆回転ロ−ラコンベヤAを外れ、シ−ル材硬化定盤B上に移行してゆく。
【0017】
この際ガラス基板P下面(ロ−ラ6の搬送面)とシ−ル材硬化定盤B上面間に設けられた2〜3mmの隙間に気体吹き付けノズル23を介して0.3〜0.8MPaの圧縮エヤ−が吹き付けられてガラス基板Pとシ−ル材硬化定盤Bの間に気体膜が形成され、ガラス基板Pはシ−ル材硬化定盤B上から3mm程度浮き上がる。
さらに、この3mm程度の隙間には、横向シリンダ19、19の作動によりノズル22、22を前進させてガラス基板P端面から10mm程度差し込み、0.3〜0.8MPaの圧縮エヤ−を吹き付ける。
【0018】
ガラス基板Pが正逆回転ロ−ラコンベヤAから完全に外れシ−ル材硬化定盤B上方に移行すると気体吹き付けノズル23からの吹き付けエヤ−は作用しなくなるがノズル22、22からの吹き付けエヤ−により浮き上がった状態を維持される。一方、ガイド7、7によって規制されていたガラス基板Pの進行方向左右へのずれはガラス基板P上面に吸着された吸着パッド13、13を介して移動フレ−ムCによって規制される。
【0019】
さらにガラス基板Pがシ−ル材硬化定盤B上に載置される所定位置に到達すると正逆回転モ−タ5の作動が停止され、移動フレ−ムCの進行を停止させる。次にノズル22、22への圧縮エヤ−の供給を停止すると同時に横向シリンダ19、19が逆作動してガラス基板Pの下部からノズル22、22を引出し、次に真空発生器14による吸引を停止し、シリンダ11、11を上昇作動させ、吸着パッド13、13をガラス基板Pから引き離した後正逆回転モ−タ5が逆回転作動して移動フレ−ムCを移動させ、吸着パッド13、13をシ−ル材硬化定盤B上から退避させる。これによりガラス基板Pはシ−ル材硬化定盤Bの所定位置に載置される。
【0020】
次にシ−ル材硬化定盤B上のガラス基板Pがシ−ル材硬化処理を終えると、正逆回転モ−タ5が正回転されて移動フレ−ムCを、上記ガラス基板Pをシ−ル材硬化定盤B上に載置した際の停止位置まで移動させ、吸着パッド13、13によりガラス基板Pの吸着を行う。次にシリンダ11、11を上昇作動させることにより吸着パッド13、13を介してガラス基板Pを数mm(好ましくは2mm)上昇させガラス基板Pの一端を持ち上げると同時にできた隙間に除電用エヤ−ノズル15から0.3〜0.8MPaの圧縮エヤ−を吹き付け、気体膜を形成させてガラス基板P全面を浮き上がらせる。
【0021】
この時、圧縮空気発生器16から除電用エヤ−ノズル15を通る圧縮エヤ−はイオナイザ−により正負にイオン化され、ガラス基板Pの下面及びシ−ル材硬化定盤Bの上面に帯電した電荷を逆極性のイオンで中和し除電する。
次にガラス基板Pが浮き上がってシ−ル材硬化定盤Bとの間にできた隙間にノズル22、22を横向シリンダ19、19の伸長作動により前進差し込みさせ、0.3〜0.8MPaの圧縮エヤ−を吹き付ける。
この状態で正逆回転モ−タ5を逆回転作動させて移動フレ−ムCをシ−ル材硬化定盤Bから離れる方向に移動させる。これにより浮き上がっているガラス基板Pは吸着パッド13、13を介して移動フレ−ムCに誘導されて正逆回転ロ−ラコンベヤAに向かって移動する。
【0022】
ガラス基板が移動し始めたら除電用エヤ−ノズル15からのエヤ−供給を気体吹き付けノズル23からのエヤ−供給に切り替える。ガラス基板Pは移動フレ−ムCの移動に伴ってシ−ル材硬化定盤Bから正逆回転ロ−ラコンベヤA上に移行する。この際ガラス基板Pは気体吹き付けノズル23及びノズル22、22から吹き付けられるエヤ−によって常に浮き上がりシ−ル材硬化定盤Bとは非接触のまま正逆回転ロ−ラコンベヤAのロ−ラ6、6上に乗り移る。
【0023】
移動フレ−ムCとガラス基板Pは正逆回転ロ−ラコンベヤA上を移動し、移動フレ−ムCが押し上げ機17の上方に位置した時点で正逆回転モ−タ5の作動が停止される。その後、吸着パッド13、13の吸着作用を解除し、シリンダ11、11を上昇作動させ、吸着パッド13、13をガラス基板Pから引き離した後、押し上げ機17が上昇作動して移動フレ−ムCを正逆回転ロ−ラコンベヤAから浮き上がらせた状態にする。
次に正逆回転モ−タ5が再び逆回転作動してガラス基板Pのみを正逆回転ロ−ラコンベヤAにより移動させて次の工程に搬出する。
【0024】
なお本発明の実施の形態では、ノズル22、22及び気体吹き付けノズル23から吹き出される気体としてはエヤ−を示したが、窒素ガスなどの気体であってもよく、窒素ガスなどの気体を使用する場合は、圧縮空気発生器16とは別に気体供給源を設けることにより対応できる。
【0025】
【発明の効果】
本発明は上記の説明から明らかなように、ガラス基板の搬入の際に、ガラス基板とシ−ル材硬化定盤との間に気体を吹き入れて気体膜を形成してガラス基板をシ−ル材硬化定盤から浮き上がらせた状態で上側ガラス基板吸着によるロ−ラ送り込み搬送をさせ、前記シ−ル材硬化処理済ガラス基板の搬出の際に、ガラス基板の一端上面を吸着引き上げにより持ち上げ、ガラス基板とシ−ル材硬化定盤との間に隙間を設けた後該隙間に正負にイオン化したエヤ−を吹き入れて気体膜を形成してガラス基板全面を浮き上がらせることによってガラス基板及びシ−ル材硬化定盤表面に帯電した電荷を逆極性のイオンで中和し除電を行い、上側ガラス基板吸着によるロ−ラ引込み搬送をさせるようにしたから、2枚のガラス基板の相互のずれがなくなると共にガラス基板に余計な外力が作用しなくなり、仮止めシ−ル材の塗布量を最小限に抑えることが可能で大きなサイズのガラス基板でも移載が可能になる。
またシ−ル材硬化定盤には一切加工穴を設ける必要がなくなり、ギャップ平行度になんら影響を与えない。さらにシ−ル材硬化定盤からの搬出の際に、吹き付けエヤ−をイオン化することによりガラス基板の剥離帯電を除去できる等種々の効果がある。
【図面の簡単な説明】
【図1】本発明を実施する装置全体を示す平面図である。
【図2】図1におけるX−X矢視図である。
【図3】図1におけるY−Y矢視図である。
【図4】図1におけるZ−Z矢視図である。
【図5】吸着パッドスライド機構の作動説明図であって、
(イ)は吸着パッドがガラス基板を吸着していない状態を示す。
(ロ)は吸着パッドがガラス基板を吸着している状態を示す。
【符号の説明】
A 正逆回転ロ−ラコンベヤ
B シ−ル材硬化定盤
C 移動フレ−ム
P ガラス基板
6 6A ロ−ラ
7 7A ガイド
13 吸着パッド
15 除電用エヤ−ノズル
17 押し上げ機
18 ストッパ
22 ノズル
23 気体吹き付けノズル
[0001]
BACKGROUND OF THE INVENTION
In the liquid crystal display assembling process, the glass substrate temporarily fixed by the laminating apparatus is loaded and placed on a seal material curing surface plate, and after the seal material curing treatment is completed, the glass substrate is sealed. -It is related with the method and apparatus which carry out from a steel material hardening surface plate.
[0002]
[Prior art]
Conventionally, in a liquid crystal display assembly process, a glass substrate temporarily fixed by a laminating apparatus is sent to a seal material curing process, and when a gap between two glass substrates has a predetermined gap parallelism, the glass substrate is fixed. -A curing process for curing the glue material is performed. There are two methods of curing the seal material: a thermosetting method and an ultraviolet irradiation curing method. In the thermosetting method, a heating surface plate in which a heater is embedded is used, and in the ultraviolet irradiation curing method, A quartz surface plate that transmits ultraviolet rays is used.
Also, as a method of placing a glass substrate on each surface plate and taking out the glass substrate from the surface plate after the seal material is cured, generally the glass substrate is adsorbed from a number of suction pads and lifted up. The upper surface suction transfer method, which is placed on the surface plate or taken out from the surface plate, and the glass substrate is lifted from the lower surface by the transfer arm and transferred to the lift pins that have passed through the surface plate, and the lift pins are lowered and fixed. There are two methods, a lift pin method in which a glass substrate is placed on a plate or taken out from a surface plate.
[0003]
[Problems to be solved by the invention]
However, in the above-described upper surface suction transfer method, the temporary fixing of the two glass substrates is peeled off by the mass of the glass substrate itself during the transfer, and the size of the glass substrate that can be processed (transferred) is limited. In order to solve this problem, the adhesive strength can be increased by increasing the amount of sealant applied or increasing the number of places to be applied. Even if it does not soften, it becomes a support rod between the glass substrates, and this part has a gap wider than other parts by about 10 μm, which adversely affects the parallelism of the gap. For this reason, it is not desirable to increase the number of seal materials for temporary fixing in order to perform suction conveyance of the glass substrate.
Furthermore, the lift pin method described above makes a hole for lifting the lift pin on the surface plate, but when pressurizing the glass substrate, only the portion of the hole is not pressurized and the gap at this portion becomes wider, which adversely affects the parallelism of the gap. Effect. For this reason, it is not desirable to make holes for lifting and lowering the lift pins on the surface plate.
[0004]
The present invention has been made in view of the above-described problems, and minimizes the amount of application of the sealing material for temporary fixing of the glass substrate and performs drilling in the sealing material curing surface plate. The glass substrate that has been temporarily fixed without being carried in and placed on the seal material curing surface plate and can be unloaded from the seal material curing surface plate after the curing treatment. It is an object of the present invention to provide a loading / unloading method and apparatus for a board.
[0005]
[Means for Solving the Problems]
Sheet of glass substrate in the present invention in order to achieve the above object - carrying out the method of the sealing material curing platen, the glass substrates bonded by the temporary fastening sealing material and curing the sealant, for curing A method of carrying on a seal material curing surface plate for curing a sealing material , carrying out a seal material curing process, and then unloading the glass substrate on the seal material curing surface plate. In this case, gas is blown between the glass substrate and the seal material curing surface plate to form a gas film, and the glass substrate is lifted from the seal material curing surface plate by the upper glass substrate adsorption. When carrying out the roller feeding and carrying out the seal material cured glass substrate, the upper surface of one end of the glass substrate is lifted up by suction, and a gap is formed between the glass substrate and the seal material curing surface plate. Air that is ionized positively and negatively in the gap By blowing in and forming a gas film, the entire surface of the glass substrate is lifted to neutralize the charges charged on the surface of the glass substrate and the seal material curing surface plate with ions of opposite polarity, and perform static elimination. The roller pull-in conveyance is performed.
[0006]
The glass substrate of the present invention sheet - unloading device to sealing material curing platen, a plurality of b for conveying the glass substrate - La and該Ro - moving frame of portal structures across La - more to transport the arm of Russia - the sealing material cured plate - uniaxially multiple b is provided a guide between La - - forward and reverse rotation b La structure - the conveying end outside the Rakonbeya temporary bonding glass substrate sheet both Russia with arranging the La Placed slightly lower than the transport surface of the forward / reverse rotating roller conveyor, and attached a plurality of suction pads in front of the moving frame close to the seal material curing surface plate so that it can be raised and lowered, In addition, a static elimination air nozzle is attached to the lower end face of the glass substrate sucked by the suction pad so as to be inclined downward, and a pusher for moving the moving frame is arranged below the entrance / exit of the forward / reverse rotating roller conveyor. Forward and reverse rotation roller A stopper for stopping the glass substrate is arranged below the seal material curing surface plate of the seal member, and the seal material curing surface is positioned between the forward / reverse rotating roller conveyor and the seal material curing surface plate. A gas spray nozzle is attached to the lower surface of the glass substrate on the board, and the nozzles are further spaced above both outer sides in the direction intersecting the glass substrate movement direction in the seal material curing surface plate. It is characterized in that it is disposed at a distance and can be moved oppositely.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The apparatus is a combination of a forward / reverse rotating roller conveyor A, a seal material curing surface plate B for curing a curing sealing material, and a moving frame C. The configuration is as follows. A number of rotary shafts 2 and 2 are rotatably supported at intervals between the conveyor frames 1 and 1, and the rotary shafts 2 and 2 are forward and reverse via pulleys 3 and 3 and a timing belt 4. The rotary motor 5 is connected.
[0008]
Further, a plurality of rollers 6 and 6 for conveying the glass substrate P and preventing bending are attached to the rotary shafts 2 and 2 at a pitch of 100 to 150 mm according to the size of the glass substrate. Guides 7 and 7 for preventing lateral displacement of the glass substrate P are attached to the outside of the glass 6, and rollers 6A and 6A for transporting the moving frame C are arranged on the left and right sides of the guides 7 and 7. Individually, guides 7A and 7A for preventing the lateral displacement of the moving frame C are attached to the outside thereof.
[0009]
The moving frame C has a gate-like structure as a whole (see FIG. 3), the left and right legs 8 and 8 are fixed on the transfer plates 9 and 9, and the transfer plates 9 and 9 are connected to the lower plate. La 6A, 6A. Cylinders 11 through a plurality of mounting frames 10 and 10 that protrude in the direction of the seal material curing surface plate B and are attached to the ceiling of the moving frame C at appropriate intervals on the left and right. 11 is attached facing downward, and suction pads 13 and 13 are attached to the lower ends of the cylinders 11 and 11 with attachment plates 12 and 12 facing downward. As shown in FIG. 5, the suction pads 13 and 13 pass through the inner diameters of the holders 13A and 13A fixed to the cylinders 11 and 11 through the mounting plates 12 and 12, and are not fixed to the holder 13A. Move up and down. Further, the suction pads 13 and 13 are communicated with a vacuum generator 14.
[0010]
Further, at the position behind the central suction pad 13 (moving frame C main body side), a static elimination air nozzle 15 having a static elimination mechanism that ionizes the passing air positively and negatively by an ionizer conveys the nozzle tip to the glass substrate. It is inclined 30-60 degrees below the surface. The static elimination air nozzle 15 communicates with the compressed air generator 16 so as to blow a compressed air of 0.3 to 0.8 MPa (preferably 0.5 MPa).
[0011]
Further, a pusher 17 that lifts the moving frame C from the forward / reverse rotating roller conveyor A is provided below the moving frame C in the forward / reverse rotating roller conveyor A, and the forward / reverse rotating roller conveyor A -A stopper 18 for stopping the movement of the glass substrate P is disposed below the position where the glass substrate hardening plate B is located so as to be movable up and down.
Further, a seal material curing surface plate B is disposed outside the terminal end of the forward / reverse rotating roller conveyor A with its upper surface being lowered by 2-3 mm from the conveying surface of the forward / reverse rotating roller conveyor A.
[0012]
Further, as shown in FIG. 4, horizontal cylinders 19 and 19 are provided on the upper left and right outer sides of the seal material hardening surface plate B so as to face each other through frames 20 and 20, respectively. Manifolds 21 and 21 are attached to the tip of 19 piston rods. A plurality of L-shaped nozzles 22, 22 are communicated with each other at a predetermined interval at the lower part of each manifold 21, 21, and the horizontal portion thereof extends from the upper surface of the seal material hardening surface plate B. A gap of about 0.5 mm is provided.
The nozzles 22 and 22 are inserted about 10 mm inward from the end surface of the glass substrate P by the extending operation of the horizontal cylinders 19 and 19 and are detached from the end surface of the glass substrate P by the contracting operation. The manifolds 21 and 21 are connected to the compressed air generator 16 so that a compressed air of 0.3 to 0.8 MPa (preferably 0.5 MPa) is blown out from the nozzles 22 and 22.
[0013]
Further, a gas blowing nozzle 23 inclined upward by 30 to 60 degrees toward the upper surface end of the seal material curing surface plate B is provided at the center of the terminal end of the forward / reverse rotating roller conveyor A. The spray nozzle 23 communicates with the compressed air generator 16 and sprays a compressed air of 0.3 to 0.8 MPa (preferably 0.5 MPa). The static elimination air nozzle 15 and the gas blowing nozzle 23 are arranged such that blowout ports having an inner diameter of about 1 mm are arranged in series at a pitch of about 1.5 mm and about 50 to 100 mm in parallel with the glass substrate P, or are about 1 mm in width and long. It is desirable to arrange an outlet of about 50 to 100 mm in parallel with the glass substrate P.
[0014]
The operation of the apparatus configured as described above will be described. The moving frame C is rotated in the forward / reverse direction in a state where the glass substrate P which is temporarily fixed to the forward / reverse rotating roller conveyor A by the temporary fixing sealing material and is coated with the curing sealing material is not put thereon. After positioning at a predetermined position (left end position) of the roller conveyor A and the push-up machine 17 is lifted to lift the moving frame C, the stopper 18 is lifted. Next, the two temporarily fixed glass substrates P are transferred from a laminating apparatus (not shown) to the center of the left end of the forward / reverse rotating roller conveyor A, and after the glass substrate P hits the stopper 18, the pusher 17 is lowered. The moving frame C is placed on the forward / reverse rotating roller conveyor A, and the stopper 18 is lowered.
[0015]
Next, the suction pads 13 and 13 attached to the moving frame C are moved from the end of the side opposite to the loading direction of the glass substrate P to the seal material curing surface plate B (left side in FIGS. 1 and 2). The cylinders 11 and 11 are moved down to a position of about 10 to 20 mm to bring the suction pads 13 and 13 into close contact with the glass substrate P, and the vacuum generator 14 is operated to perform vacuum suction. Adsorb P. At this time, the suction pads 13 and 13 are attached to the cylinders 11 and 11 so that the downward pressing force of the cylinders 11 and 11 is not applied to the glass substrate P via the suction pads 13 and 13. Slides by an extra stroke along with the piping shafts 13B and 13B that penetrate the inner diameters of the holders 13A and 13A fixed through the plates 12 and 12 and are not fixed to the holders 13A and 13A (see FIG. 5). . For this reason, since the self-weight (tens of grams) of the suction pads 13 and 13 only acts on the glass substrate P, no extraneous force acts on the glass substrate P, thereby preventing mutual displacement of the glass substrates P.
[0016]
In this state, the forward / reverse rotation motor 5 rotates forward to rotate the rotary shafts 2 and 2 forward, and the glass substrate P and the moving frame C are transferred. Since the glass substrate P and the moving frame C are sent by the rollers 6 and 6A having the same diameter, both moving speeds are the same, and the suction pads 13 and 13 drag the upper glass substrate in the horizontal direction. Prevents the glass substrate P from being displaced from each other.
Thus, as the glass substrate P is conveyed, the glass substrate P moves out of the forward / reverse rotating roller conveyor A and moves onto the seal material curing surface plate B.
[0017]
At this time, 0.3 to 0.8 MPa through a gas blowing nozzle 23 into a gap of 2 to 3 mm provided between the lower surface of the glass substrate P (the conveying surface of the roller 6) and the upper surface of the seal material curing surface plate B. The compressed air is sprayed to form a gas film between the glass substrate P and the seal material curing platen B, and the glass substrate P is lifted from the seal material curing platen B by about 3 mm.
Further, in the gap of about 3 mm, the nozzles 22 and 22 are advanced by the operation of the horizontal cylinders 19 and 19 to insert about 10 mm from the end face of the glass substrate P, and a compressed air of 0.3 to 0.8 MPa is sprayed.
[0018]
When the glass substrate P is completely removed from the forward / reverse rotating roller conveyor A and moves above the seal material curing platen B, the spraying air from the gas spraying nozzle 23 stops working, but the spraying air from the nozzles 22 and 22 is used. Is maintained in a raised state. On the other hand, the shift of the glass substrate P in the direction of travel left and right regulated by the guides 7 and 7 is regulated by the moving frame C via the suction pads 13 and 13 sucked on the upper surface of the glass substrate P.
[0019]
Further, when the glass substrate P reaches a predetermined position where the glass substrate P is placed on the seal material curing surface plate B, the operation of the forward / reverse rotation motor 5 is stopped, and the movement of the moving frame C is stopped. Next, the supply of the compression air to the nozzles 22 and 22 is stopped, and at the same time, the horizontal cylinders 19 and 19 are reversely operated to pull out the nozzles 22 and 22 from the lower part of the glass substrate P, and then the suction by the vacuum generator 14 is stopped. Then, the cylinders 11 and 11 are raised and the suction pads 13 and 13 are separated from the glass substrate P. Then, the forward / reverse rotation motor 5 is reversely rotated and the moving frame C is moved. 13 is retracted from the seal material curing surface plate B. As a result, the glass substrate P is placed at a predetermined position on the seal material curing surface plate B.
[0020]
Next, when the glass substrate P on the seal material curing surface plate B finishes the seal material curing process, the forward / reverse rotation motor 5 is rotated forward to move the moving frame C to the glass substrate P. The glass substrate P is sucked by the suction pads 13 and 13 after being moved to the stop position when placed on the seal material curing surface plate B. Next, the cylinders 11 and 11 are lifted to raise the glass substrate P by several mm (preferably 2 mm) through the suction pads 13 and 13 and lift one end of the glass substrate P. A compressed air of 0.3 to 0.8 MPa is sprayed from the nozzle 15 to form a gas film, and the entire surface of the glass substrate P is lifted.
[0021]
At this time, the compressed air passing from the compressed air generator 16 through the static elimination air nozzle 15 is positively and negatively ionized by the ionizer, and the charged charges are applied to the lower surface of the glass substrate P and the upper surface of the seal material curing surface plate B. Neutralize with ions of reverse polarity to remove static electricity.
Next, the nozzles 22 and 22 are moved forward by the extension operation of the horizontal cylinders 19 and 19 into the gap formed between the glass substrate P and the seal material curing platen B, and the pressure is 0.3 to 0.8 MPa. Spray with compression air.
In this state, the forward / reverse rotation motor 5 is reversely rotated to move the moving frame C in a direction away from the seal material hardening surface plate B. As a result, the floating glass substrate P is guided to the moving frame C via the suction pads 13 and 13 and moves toward the forward / reverse rotating roller conveyor A.
[0022]
When the glass substrate starts to move, the air supply from the static elimination air nozzle 15 is switched to the air supply from the gas blowing nozzle 23. As the moving frame C moves, the glass substrate P moves from the seal material curing surface plate B onto the forward / reverse rotating roller conveyor A. At this time, the glass substrate P is always lifted by the gas blowing nozzle 23 and the air blown from the nozzles 22, 22, and the roller 6 of the forward / reverse rotating roller conveyor A without contact with the seal material curing surface plate B, Change to 6.
[0023]
The moving frame C and the glass substrate P move on the forward / reverse rotating roller conveyor A, and when the moving frame C is positioned above the pusher 17, the operation of the forward / reverse rotating motor 5 is stopped. The Thereafter, the suction action of the suction pads 13 and 13 is released, the cylinders 11 and 11 are lifted and the suction pads 13 and 13 are separated from the glass substrate P, and then the pusher 17 is lifted and the moving frame C is moved. Is raised from the forward / reverse rotating roller conveyor A.
Next, the forward / reverse rotation motor 5 is operated again in reverse rotation, and only the glass substrate P is moved by the forward / reverse rotation roller conveyor A and carried out to the next step.
[0024]
In the embodiment of the present invention, air is shown as the gas blown from the nozzles 22 and 22 and the gas blowing nozzle 23. However, a gas such as nitrogen gas may be used, and a gas such as nitrogen gas is used. In this case, a gas supply source can be provided separately from the compressed air generator 16.
[0025]
【The invention's effect】
As is apparent from the above description, the present invention, when a glass substrate is carried in, forms a gas film by blowing a gas between the glass substrate and the seal material curing surface plate to form the glass substrate. In the state of being lifted from the seal material curing surface plate, the upper glass substrate is sucked into the roller and conveyed, and when the seal material cured glass substrate is unloaded, the upper surface of one end of the glass substrate is lifted by suction. Then, after providing a gap between the glass substrate and the seal material curing surface plate, blowing a positively and negatively ionized air into the gap to form a gas film to lift the entire surface of the glass substrate and Since the charge charged on the surface of the sealing material platen is neutralized with ions of opposite polarity and neutralized, and the roller is drawn and transported by adsorption of the upper glass substrate, the mutual contact between the two glass substrates The gap disappears Both extra external force to the glass substrate is not applied, tacking sheet - also enables the mounting transfer glass substrates of large size can be minimized coating amount of sealing material.
Further, it is not necessary to provide any processing holes in the seal material curing surface plate, and the gap parallelism is not affected at all. Further, there are various effects such as removal of the peeling charge of the glass substrate by ionizing the spraying air at the time of carrying out from the seal material curing surface plate.
[Brief description of the drawings]
FIG. 1 is a plan view showing an entire apparatus for carrying out the present invention.
FIG. 2 is a view taken along arrow XX in FIG.
FIG. 3 is a view on arrow YY in FIG. 1;
4 is a view taken along the line ZZ in FIG. 1. FIG.
FIG. 5 is an operation explanatory diagram of the suction pad slide mechanism,
(A) shows a state where the suction pad does not suck the glass substrate.
(B) shows a state in which the suction pad is sucking the glass substrate.
[Explanation of symbols]
A Forward / Reverse Rotating Roller Conveyor B Seal Material Curing Plate C Moving Frame P Glass Substrate 6 6A Roller 7 7A Guide 13 Suction Pad 15 Electric Discharge Air Nozzle 17 Pusher 18 Stopper 22 Nozzle 23 Gas Blowing nozzle

Claims (4)

仮止め用シール材と硬化用シール材とにより貼り合わされたガラス基板を、該硬化用シール材を硬化させるシ−ル材硬化定盤上に搬入し、シ−ル材硬化処理をした後シ−ル材硬化定盤上のガラス基板を搬出させる方法であって、前記ガラス基板の搬入の際に、ガラス基板とシ−ル材硬化定盤との間に気体を吹き入れて気体膜を形成してガラス基板をシ−ル材硬化定盤から浮き上がらせた状態で上側ガラス基板吸着によるロ−ラ送り込み搬送をさせ、前記シ−ル材硬化処理済ガラス基板の搬出の際に、ガラス基板の一端上面を吸着引き上げにより持ち上げ、ガラス基板とシ−ル材硬化定盤との間に隙間を設けた後該隙間に正負にイオン化したエヤ−を吹き入れて気体膜を形成してガラス基板全面を浮き上がらせることによってガラス基板及びシ−ル材硬化定盤表面に帯電した電荷を逆極性のイオンで中和し除電を行い、上側ガラス基板吸着によるロ−ラ引込み搬送をさせることを特徴とするガラス基板のシ−ル材硬化定盤への搬入出方法。The glass substrate bonded with the temporary fixing sealing material and the curing sealing material is loaded onto a seal material curing surface plate for curing the curing sealing material, and after the seal material curing treatment, A method of carrying out a glass substrate on a seal material curing surface plate, wherein a gas film is formed by blowing a gas between the glass substrate and the seal material curing surface plate when the glass substrate is loaded. When the glass substrate is lifted from the seal material curing surface plate, the roller substrate is conveyed by suction on the upper glass substrate, and one end of the glass substrate is taken out when the seal material cured glass substrate is unloaded. The upper surface is lifted by suction and a gap is provided between the glass substrate and the seal material curing surface plate. After that, positively and negatively ionized air is blown into the gap to form a gas film to lift the entire surface of the glass substrate. Glass substrate and The glass substrate seal plate is characterized by neutralizing the charge charged on the surface of the seal plate with ions of the opposite polarity and removing the charge, and then transporting the roller by attracting the upper glass substrate. How to carry in and out. ガラス基板を搬送させる複数のロ−ラ(6)と該ロ−ラ(6)を跨ぐ門形構造の移動フレ−ムCを搬送させる複数のロ−ラ(6A)とを配置すると共に両ロ−ラ(6)(6A)間にガイド(7)を設けた一軸多数ロ−ラ構成の正逆回転ロ−ラコンベヤ(A)の搬送端外側に仮止めガラス基板(P)のシ−ル材硬化定盤(B)を前記正逆回転ロ−ラコンベヤ(A)の搬送面よりも若干低くして配置し、前記移動フレ−ム(C)のシ−ル材硬化定盤(B)寄り前方に複数の吸着パッド(13)を間隔をおくと共に昇降可能にして取付け、かつ除電用エヤ−ノズル(15)を前記吸着パッド(13)により吸着したガラス基板(P)の端面下部に向けて下降傾斜させて取付け、前記正逆回転ロ−ラコンベヤ(A)の搬入出口寄り下方に前記移動フレ−ム(C)の押し上げ機(17)を配設すると共に正逆回転ロ−ラコンベヤ(A)のシ−ル材硬化定盤(B)寄り下方に、ガラス基板(P)停止用のストッパ(18)を配設し、前記正逆回転ロ−ラコンベヤ(A)とシ−ル材硬化定盤(B)との間位置にシ−ル材硬化定盤(B)上のガラス基板(P)の下面に向かって上昇傾斜させて気体吹き付けノズル(23)を取付け、さらに前記シ−ル材硬化定盤(B)におけるガラス基板(P)の移動方向に交差する方向の両側位置の上方に、複数のノズル(22)を間隔をおいて配置すると共に対向移動可能にして設けたことを特徴とするガラス基板のシ−ル材硬化定盤への搬入出装置。 A plurality of b for conveying the glass substrate - La (6) and該Ro - La portal structure across the (6) moving frame - a plurality of B for transporting the beam C - both Russia with arranging the La (6A) -Seal of the temporary fixing glass substrate (P) on the outer side of the conveying end of the forward / reverse rotating roller conveyor (A) having a uniaxial multi-roller configuration in which a guide (7) is provided between the rollers (6) and (6A). The material curing surface plate (B) is arranged slightly lower than the conveying surface of the forward / reverse rotating roller conveyor (A) , and the moving frame (C) is closer to the seal material curing surface plate (B). A plurality of suction pads (13) are attached to the front so that the suction pads (13) can be moved up and down, and the neutralizing air nozzle (15) is directed to the lower end surface of the glass substrate (P) sucked by the suction pads (13). mounting is lowered inclined, the forward and reverse rotation b - the move to transfer port toward lower Rakonbeya (a) Les - sheet of Rakonbeya (A) - - downward toward sealing material cured plate (B), the stopper of the glass substrate (P) for stopping forward and reverse rotation B with pushed up arm (C) machine (17) disposed (18) is disposed, and the glass substrate (P ) on the seal material curing surface plate (B) is positioned between the forward / reverse rotating roller conveyor (A) and the seal material curing surface plate (B). A gas spray nozzle (23) is attached to the bottom surface of the seal material curing surface plate (B) , and further above both side positions in the direction intersecting the moving direction of the glass substrate (P) on the seal material curing surface plate (B) . An apparatus for carrying in and out a glass substrate to a seal material curing surface plate, wherein a plurality of nozzles (22) are arranged at an interval and can be moved opposite to each other. 前記除電用エヤ−ノズル(15)及び気体吹き付けノズル(23)のノズル角度が水平状態のガラス基板(P)の搬送面に対し30〜60度にされていることを特徴とする請求項2記載のガラス基板のシ−ル材硬化定盤への搬入出装置。The nozzle angle of the air nozzle for discharging (15) and the gas blowing nozzle (23) is set to 30 to 60 degrees with respect to the conveying surface of the horizontal glass substrate (P). Equipment for loading and unloading glass substrates into and from the seal material curing surface plate. 前記シ−ル材硬化定盤(B)上面の高さが前記正逆回転ロ−ラコンベヤ(A)の搬送面高さより2〜3mm低くされていることを特徴とする請求項2又は3のいずれかに記載のガラス基板のシ−ル材硬化定盤への搬入出装置。The height of the upper surface of the seal material curing surface plate (B) is set to be 2 to 3 mm lower than the height of the conveying surface of the forward / reverse rotating roller conveyor (A). An apparatus for carrying in and out the glass substrate according to claim 1 to a seal material curing surface plate.
JP2000121930A 2000-04-24 2000-04-24 Method and apparatus for loading / unloading glass substrate to / from sealant curing surface plate Expired - Fee Related JP4048464B2 (en)

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JP2011045946A (en) * 2009-08-26 2011-03-10 Ushio Inc Substrate conveying arm

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RU2299183C1 (en) * 2005-11-14 2007-05-20 Открытое акционерное общество "Саратовский институт стекла" Method of production of float-glass
JP2010076929A (en) * 2008-09-29 2010-04-08 Ushio Inc Substrate conveying arm
CN113697480B (en) * 2021-08-24 2022-05-17 深圳市创新特科技有限公司 Board collecting and releasing machine applied to multiple jigs of integrated circuit board in common use

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011045946A (en) * 2009-08-26 2011-03-10 Ushio Inc Substrate conveying arm

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