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JP4051797B2 - Pressure detection device - Google Patents
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JP4051797B2 - Pressure detection device - Google Patents

Pressure detection device Download PDF

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Publication number
JP4051797B2
JP4051797B2 JP03406299A JP3406299A JP4051797B2 JP 4051797 B2 JP4051797 B2 JP 4051797B2 JP 03406299 A JP03406299 A JP 03406299A JP 3406299 A JP3406299 A JP 3406299A JP 4051797 B2 JP4051797 B2 JP 4051797B2
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JP
Japan
Prior art keywords
resistance
electrode
core electrode
detection device
temperature
Prior art date
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Expired - Fee Related
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JP03406299A
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Japanese (ja)
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JP2000230870A (en
Inventor
彪 長井
雅彦 伊藤
弘之 荻野
優子 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP03406299A priority Critical patent/JP4051797B2/en
Priority to US09/366,053 priority patent/US6271621B1/en
Priority to KR1019990031937A priority patent/KR100562598B1/en
Priority to CNB2003101010712A priority patent/CN100387957C/en
Priority to CNB99111969XA priority patent/CN1147720C/en
Publication of JP2000230870A publication Critical patent/JP2000230870A/en
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Publication of JP4051797B2 publication Critical patent/JP4051797B2/en
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Description

【0001】
【発明の属する技術分野】
本発明はケーブル状圧力センサを用いた圧力検出装置に関するものである。
【0002】
【従来の技術】
従来、この種のケーブル状圧力センサは以下のようなものであった。
【0003】
特開昭62−230071号公報では図6に示すように、線状導電材1と導電ゴム2とから構成された芯電極3の周囲に可撓性圧電体4を配置し、その周囲に可撓性外電極5を配置し、さらにその周囲に熱収縮チューブから成る外皮6を被覆して成るケーブル状圧力センサが開示されている。可撓性圧電体4として、合成ゴムや合成樹脂の中にチタン酸鉛などのセラミック圧電体粉末を添加した複合体あるいはビニリデンフルオロライド(VDF)/トリフルオロエチレン(TrFE)共重合体系などの圧電性高分子が用いられる。また、可撓性外電極5として、アルミニウム箔や塗装法による銀系導電性塗膜が用いられる。6は外皮、7は振動電圧検出手段である。
【0004】
類似のケーブル状圧力センサが特開平3−259577号公報にも開示されている。この公報では、可撓性圧電体4として、ポリエチレン、ポリプロピレンや塩化ビニルなどの樹脂の中にチタン酸鉛などのセラミック圧電体粉末を添加した複合体が開示されている。可撓性外電極5として、無電解メッキ法によるニッケル膜や銅膜、および蒸着法によるアルミニウム膜や銀膜が開示されている。
【0005】
上記ケーブル状圧力センサの一部あるいは全面に時間的に変化する圧力が印加されたとき、その部分の圧力センサに生じる加速度に応じた振動電圧が芯電極3と外電極5間に誘起される。この振動電圧を振動電圧検出手段7で検出することにより、時間的に変化する圧力を検出していた。
【0006】
【発明が解決しようとする課題】
しかしながら、従来のケーブル状圧力センサでは、時間的に変化する圧力を検出できるが、温度を検出できないという課題を有していた。可撓性圧電体4として前述した複合体を用いても、圧電性高分子を用いても、その最高使用温度は(80〜120)℃程度である。可撓性圧電体4が最高使用温度以上に曝された場合、その圧電性能が低下する。従って、可撓性圧電体4の使用に当たっては充分な温度管理を必要とするが、従来のケーブル状圧力センサでは、温度センサを別途に準備していたので、(1)複雑な構成になる、(2)温度センサで検出される温度は必ずしも可撓性圧電体4の温度と一致しない、などの課題があった。
【0007】
【課題を解決するための手段】
本発明は、上記課題を解決するために、芯電極と、前記芯電極の周囲に配置された可撓性圧電体と、前記可撓性圧電体の表面に配置された可撓性外電極を含むケーブル状圧力センサと、前記芯電極の両端に接続された抵抗検出手段と、前記芯電極と前記可撓性外電極に接続された振動電圧検出手段とからなる圧力検出装置である。
【0008】
芯電極の温度は、その周囲の可撓性圧電体の温度とほぼ等しい。上記発明によれば、抵抗検出手段により芯電極の抵抗が検出できるので、抵抗の温度依存性に基づき芯電極周囲の可撓性圧電体の平均温度を検出できると共に振動電圧検出手段により圧力もまた検出できる。従って、温度センサを特別に準備する必要がないので、簡素な構成で両者を検出できる。
【0009】
【発明の実施の形態】
本発明の請求項1にかかる圧力検出装置は、芯電極と、前記芯電極の周囲に配置された可撓性圧電体と、前記可撓性圧電体の表面に配置された可撓性外電極を含むケーブル状圧力センサと、前記芯電極の両端に接続された抵抗検出手段と、前記芯電極と前記可撓性外電極に接続された振動電圧検出手段を備えたものである。
【0010】
抵抗検出手段により芯電極の抵抗が検出できるので、芯電極周囲の可撓性圧電体の平均温度を抵抗の温度依存性に基づき検出できる。また、振動電圧検出手段により圧力もまた検出できる。従って、温度センサを特別に準備する必要がないので、簡素な構成で両者を検出できる。
【0011】
本発明の請求項2にかかる圧力検出装置は、抵抗検出手段に、抵抗温度特性に基づき抵抗を温度に換算する温度算出手段を接続した構成である。
【0012】
抵抗検出手段により検出された抵抗は、温度算出手段により温度に換算されるので、容易に温度を直読できある。
【0013】
本発明の請求項3にかかる圧力検出装置は、芯電極が絶縁性支持体に保持されたコイル状金属から成る構成である。
【0014】
抵抗検出手段により検出する抵抗は、コイル状金属の抵抗であるので、直線状の金属に比べ大きな抵抗を示す。従って、抵抗の検出が容易になる。
【0015】
本発明の請求項4にかかる圧力検出装置は、絶縁性支持体がポリエステル繊維束から成る構成である。
【0016】
ポリエステル繊維束は、電気的に絶縁性であり、且つ、可撓性に富むと共に機械的強度も大きいので、ケーブル状圧力センサ全体の可撓性を損なうことなくコイル状金属を支持できる。
【0017】
本発明の請求項5にかかる圧力検出装置は、コイル状金属が平板状である構成である。
【0018】
ケーブル状圧力センサの圧電性を得るために、前もって、芯電極と可撓性外電極間に直流の高電圧を印加して、可撓性圧電体を分極する必要がある。このときコイル状金属が平板状であるので、円筒状に比べ、芯電極と可撓性外電極間に均一な高電界が印加され易い。
【0019】
本発明の請求項6にかかる圧力検出装置は、コイル状金属が銅または銅合金から成る構成である。
【0020】
銅または銅合金は、可撓性に富むと共に工業的にも多く利用されているので、ケーブル状圧力センサ全体の可撓性を損なうことなく、量産できる。
【0021】
本発明の請求項7にかかる圧力検出装置は、抵抗検出手段が直流抵抗を検出する構成である。
【0022】
交流抵抗は周波数依存性を有するが、直流抵抗は周波数依存性を有しないので、コイル状金属のインダクタンスや浮遊容量の影響を受けることなく、コイル状金属の抵抗を検出できる。
【0023】
本発明の請求項8にかかる圧力検出装置は、振動電圧検出手段がコンデンサを介して芯電極と可撓性外電極に接続された構成である。
【0024】
直流抵抗を検出するとき芯電極の両端には直流電位が印加される。他方、振動電圧は交流信号である。振動電圧検出手段により振動電圧を検出するとき、コンデンサで直流成分を除去しているので、直流成分の影響を受けることなく振動電圧を検出できる。
【0025】
本発明の請求項9にかかる圧力検出装置は、可撓性外電極をアース電位とし、芯電極から振動電圧信号を取出す構成である。
【0026】
芯電極は、アース電位の可撓性外電極により外部空間からシールドされるので、抵抗や振動電圧の検出時に外部空間のノイズの影響を受けない。
【0027】
【実施例】
以下、本本発明の実施例について図面を用いて説明する。
【0028】
(実施例1)
図1は本発明の実施例1の圧力検出装置の構成図である。
【0029】
芯電極3の周囲に可撓性圧電体4を形成した後、可撓性外電極5を形成してケーブル状圧力センサを構成した。芯電極3として、従来例で示した構成の芯電極や複数の金属細線だけから成る芯電極などが用いられる。可撓性圧電体4として、ゴムや樹脂の中にチタン酸鉛、チタン酸鉛ジルコン酸鉛などのセラミック圧電体粉末を添加した複合体、あるいは、ビニリデンフルオロライド(VDF)/トリフルオロエチレン(TrFE)共重合体系などの圧電性高分子が用いられる。また、可撓性外電極5として、アルミニウム箔や塗装法による銀系導電性塗膜、あるいは、ポリエチレンテレフタレート・フィルム上にアルミニウム層の形成された導電性フィルムが用いられる。ケーブル状圧力センサを上述のようにして形成した後、芯電極3と可撓性外電極5間に振動電圧検出手段7と抵抗検出手段8を接続して、本発明の圧力検出装置が構成される。
【0030】
芯電極3の抵抗は、その両端間で抵抗検出手段8により検出される。芯電極3は上述したような導電性材料が用いられる。これらの導電性材料は特有の抵抗温度特性を示すので、検出された抵抗から温度を求めることができる。他方、ケーブル状圧力センサの一部あるいは全面に時間的に変化する圧力が印加されたとき、その部分の圧力センサに生じる加速度に応じた振動電圧が芯電極3と外電極5間に誘起される。この振動電圧は振動電圧検出手段7により検出される。この振動電圧を利用して、時間的に変化する圧力が検出される。このように、図1に示した実施例1の構成は、温度と圧力を同時に検出できる。
【0031】
検出された抵抗から温度を求めるには、抵抗温度特性を参照する必要がある。しかし、その度にいちいち参照することは、煩雑な作業であるので、図2に示すように、抵抗温度特性に基づき抵抗を温度に換算する温度算出手段を抵抗検出手段8に接続することが望ましい。これにより温度を直読できるからである。
【0032】
(実施例2)
図3は本発明の実施例2の圧力検出装置の構成図である。
【0033】
芯電極3は、絶縁性支持体10に巻き付けられたコイル状金属11から構成される。図6に示した従来例構成では、線状導電材1と導電ゴム2から成る芯電極3が開示されている。しかし、この場合、線状導電材1として、通常、複数の金属細線が用いられるので、芯電極3の両端間の抵抗はほぼ金属細線により決められる。従って、その抵抗は、多くの場合室温で0.1Ω/m以下と非常に低いので、抵抗の検出が困難になる。図3に示した実施例2の構成では、芯電極3が絶縁性支持体10に巻き付けられたコイル状金属11から構成されるので、芯電極3の両端間の抵抗はコイル状金属11の両端間の抵抗により決められる。コイル状金属11の有効長さは、ケーブル状圧力センサの長さよりもはるかに長いので、その両端間の抵抗は1Ω/m以上になる。従って、抵抗の検出が容易になる。例えば、銅と銀の合金線(0.3mmW×0.05mmt)の場合、室温で2.7Ω/m以上である。
【0034】
絶縁性支持体10として、ポリエステル繊維束から構成されることが好ましい。ポリエステル繊維は高い機械的強度と可撓性を有するので、ケーブル状圧力センサ全体の可撓性を損なうことなくコイル状金属を支持できる。また、その耐熱性も120℃以上であるので、可撓性圧電体4の最高使用温度[(80〜120)℃程度]でも充分な安定性を示す。
【0035】
また、コイル状金属11は平板状であることが好ましい。ケーブル状圧力センサは、図1や図3に示した構成に形成された後、芯電極3と可撓性外電極5間に直流高電圧(5〜10)kV/mm程度を印加して、可撓性圧電体4を分極する工程により圧電性を付与される。この分極工程では、芯電極3と可撓性外電極5間になるべく均一な高電界を印加する必要がある。コイル状金属11が円筒状やそれと類似の形状の場合に比べ、平板状の場合均一な高電界が得られる。また、コイル状金属の材質として、銅または銅合金が優れている。これら材料は可撓性に富むので、絶縁性支持体に巻き付けて容易にコイル状に成形できると共にケーブル状圧力センサ全体の可撓性を損なはない。また、工業的にも多く利用されているので、量産性に優れる。
【0036】
また、コイル状金属11はその形状に基づくインダクタンスや浮遊容量を有するので、その交流抵抗は周波数依存性を有する。しかし、直流抵抗は周波数依存性を有しないので、コイル状金属のインダクタンスや浮遊容量の影響を受けることなく、コイル状金属の抵抗を検出できる点で直流抵抗が優れている。前述した銅と銀の合金線(0.3mmW×0.05mmt)を用いて形成したケーブル状圧力センサ(長さ約7m)の芯電極3の両端間の直流抵抗、即ち、コイル状合金線の両端間の直流抵抗の抵抗温度特性を図4に示す。同図から明らかなように、0℃でも約18Ω(約2.5Ω/m)の高い抵抗値を示すと共に約3800ppm/℃の高い抵抗温度係数を示す。従って、抵抗の検出も、また、その抵抗温度特性に基づいて、芯電極3周辺の可撓性圧電体4の温度を算出することも容易である。
【0037】
なお、図4に示した測定は、恒温槽内にケーブル状圧力センサを配置して行ったので、ケーブル状圧力センサの温度は均一である。しかし、実用状態では、必ずしも全体的に均一な温度にならない。このような場合、抵抗は平均的な値を示すので、温度も平均温度が検出される。実用状態での温度分布を把握することにより、例えば耐熱性120℃のケーブル状圧力センサであれば、平均温度が例えば80℃になったときに、警報を発するなどの手段ができるので、平均温度検出は実用的にも有効である。
【0038】
図3の構成から明らかなように、同構成は振動電圧検出手段7も有しているので、直流抵抗のみならず、時間的に変化する圧力に基づく振動電圧も検出できる。直流抵抗を検出するとき芯電極3の両端には直流電位が印加される。他方、振動電圧は交流信号である。振動電圧検出手段7により振動電圧を検出するとき、図5に示すように、振動電圧検出手段7がコンデンサを介して芯電極3と可撓性外電極5に接続された構成が望ましい。コンデンサで直流成分を除去しているので、直流成分の影響を受けることなく振動電圧を検出できるからである。
【0039】
芯電極3と可撓性外電極5間に抵抗検出手段8と振動電圧検出手段7を接続する場合、可撓性外電極5をアース電位とし、芯電極3から電圧信号を取出すことが望ましい。芯電極3は、アース電位の可撓性外電極5により外部空間からシールドされるので、電圧信号はノイズから遮断されるからである。可撓性外電極5から信号を取出した場合、可撓性外電極5は外部空間からシールドされてないので、電圧信号は外部空間からのノイズの影響が大きくなる。
【0040】
なお、上記実施例では、図6に示した従来例の外皮6について特に触れてないが、保護などの必要に応じて用いてもよいことは明らかである。また、外皮6として、熱収縮チューブ以外にも塩化ビニールやウレタン樹脂などを用いてもよい。
【0041】
【発明の効果】
以上説明したように本発明の請求項1にかかる圧力検出装置は、抵抗検出手段により芯電極の抵抗が検出できるので、抵抗の温度依存性に基づき芯電極周囲の可撓性圧電体の平均温度を検出できると共に振動電圧検出手段により圧力もまた検出できる。従って、温度センサを特別に準備する必要がないので、簡素な構成で両者を検出できる。
【0042】
本発明の請求項2にかかる圧力検出装置では、抵抗検出手段により検出された抵抗は、温度算出手段により温度に換算されるので、容易に温度を直読できある。
【0043】
本発明の請求項3にかかる圧力検出装置では、抵抗検出手段により検出する抵抗は、コイル状金属の抵抗であるので、直線状金属線に比べ大きな抵抗を示す。従って、抵抗の検出が容易になる。
【0044】
本発明の請求項4にかかる圧力検出装置では、ポリエステル繊維束から成る絶縁性支持体は、電気的に絶縁性であり、且つ、可撓性に富むと共に機械的強度も大きいので、ケーブル状圧力センサ全体の可撓性を損なうことなくコイル状金属を支持できる。
【0045】
本発明の請求項5にかかる圧力検出装置では、コイル状金属が平板状である。ケーブル状圧力センサの圧電性を得るために、前もって、芯電極と可撓性外電極間に直流の高電圧を印加して、可撓性圧電体を分極する必要がある。このときコイル状金属が平板状であるので、円筒状に比べ、芯電極と可撓性外電極間に均一な高電界が印加され易い。
【0046】
本発明の請求項6にかかる圧力検出装置では、銅または銅合金は、可撓性に富むと共に工業的にも多く利用されているので、ケーブル状圧力センサ全体の可撓性を損なうことなく、量産できる。
【0047】
本発明の請求項7にかかる圧力検出装置は、抵抗検出手段が直流抵抗を検出する構成である。交流抵抗は周波数依存性を有するが、直流抵抗は周波数依存性を有しないので、コイル状金属のインダクタンスや浮遊容量の影響を受けることなく、コイル状金属の抵抗を検出できる。
【0048】
本発明の請求項8にかかる圧力検出装置は、振動電圧検出手段がコンデンサを介して芯電極と可撓性外電極に接続された構成である。直流抵抗を検出するとき芯電極の両端には直流電位が印加される。他方、振動電圧は交流信号である。振動電圧検出手段により振動電圧を検出するとき、コンデンサで直流成分を除去しているので、直流成分の影響を受けることなく振動電圧を検出できる。
【0049】
本発明の請求項9にかかる圧力検出装置は、可撓性外電極をアース電位とし、芯電極から振動電圧信号を取出す構成である。芯電極は、アース電位の可撓性外電極により外部空間からシールドされるので、振動電圧の検出時に外部空間のノイズの影響を受けない。
【図面の簡単な説明】
【図1】本発明の実施例1における圧力検出装置の構成図
【図2】本発明の実施例1における圧力検出装置の他の構成図
【図3】本発明の実施例2における圧力検出装置の構成図
【図4】同圧力検出装置のケーブル状圧力センサの直流抵抗の温度特性の一例を示す特性図
【図5】本発明の実施例2における圧力検出装置の他の構成図
【図6】従来のケーブル状圧力センサを用いた圧力検出装置の構成図
【符号の説明】
3 芯電極
4 可撓性圧電体
5 可撓性外電極
7 振動電圧検出手段
8 抵抗検出手段
9 温度算出手段
10 絶縁性支持体
11 コイル状金属
12 コンデンサ
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a pressure detection device using a cable-shaped pressure sensor.
[0002]
[Prior art]
Conventionally, this type of cable-shaped pressure sensor has been as follows.
[0003]
In Japanese Patent Application Laid-Open No. 62-230071, as shown in FIG. 6, a flexible piezoelectric body 4 is arranged around a core electrode 3 composed of a linear conductive material 1 and a conductive rubber 2, and a flexible piezoelectric body 4 is arranged around the core electrode 3. A cable-shaped pressure sensor is disclosed in which a flexible outer electrode 5 is disposed and a sheath 6 made of a heat-shrinkable tube is covered around the flexible outer electrode 5. As the flexible piezoelectric body 4, a piezoelectric material such as a composite in which ceramic piezoelectric powder such as lead titanate is added to synthetic rubber or synthetic resin, or a vinylidene fluoride (VDF) / trifluoroethylene (TrFE) copolymer system, etc. Functional polymer is used. Moreover, as the flexible outer electrode 5, a silver-based conductive coating film by an aluminum foil or a coating method is used. 6 is an outer skin, and 7 is a vibration voltage detecting means.
[0004]
A similar cable-shaped pressure sensor is also disclosed in JP-A-3-259575. This publication discloses a composite in which a ceramic piezoelectric powder such as lead titanate is added to a resin such as polyethylene, polypropylene, or vinyl chloride as the flexible piezoelectric body 4. As the flexible outer electrode 5, a nickel film or a copper film by an electroless plating method, and an aluminum film or a silver film by a vapor deposition method are disclosed.
[0005]
When a temporally changing pressure is applied to a part or the entire surface of the cable-shaped pressure sensor, an oscillating voltage corresponding to the acceleration generated in the pressure sensor in that part is induced between the core electrode 3 and the outer electrode 5. By detecting this oscillating voltage by the oscillating voltage detecting means 7, a pressure changing with time is detected.
[0006]
[Problems to be solved by the invention]
However, the conventional cable-type pressure sensor has a problem that it can detect the pressure changing with time but cannot detect the temperature. Whether the composite described above is used as the flexible piezoelectric body 4 or a piezoelectric polymer is used, the maximum use temperature is about (80 to 120) ° C. When the flexible piezoelectric body 4 is exposed to a temperature higher than the maximum use temperature, the piezoelectric performance is deteriorated. Accordingly, sufficient temperature control is required when using the flexible piezoelectric body 4, but the conventional cable-shaped pressure sensor has a temperature sensor separately prepared, so that (1) the configuration becomes complicated. (2) There is a problem that the temperature detected by the temperature sensor does not necessarily match the temperature of the flexible piezoelectric body 4.
[0007]
[Means for Solving the Problems]
In order to solve the above-described problems, the present invention includes a core electrode, a flexible piezoelectric member disposed around the core electrode, and a flexible outer electrode disposed on the surface of the flexible piezoelectric member. A pressure sensor including a cable-shaped pressure sensor, resistance detecting means connected to both ends of the core electrode, and vibration voltage detecting means connected to the core electrode and the flexible outer electrode.
[0008]
The temperature of the core electrode is approximately equal to the temperature of the surrounding flexible piezoelectric body. According to the invention, since the resistance of the core electrode can be detected by the resistance detection means, the average temperature of the flexible piezoelectric body around the core electrode can be detected based on the temperature dependence of the resistance, and the pressure can also be detected by the vibration voltage detection means. It can be detected. Therefore, since it is not necessary to prepare a temperature sensor specially, both can be detected with a simple configuration.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
The pressure detection device according to claim 1 of the present invention includes a core electrode, a flexible piezoelectric member disposed around the core electrode, and a flexible outer electrode disposed on a surface of the flexible piezoelectric member. Including a cable-like pressure sensor, resistance detection means connected to both ends of the core electrode, and vibration voltage detection means connected to the core electrode and the flexible outer electrode.
[0010]
Since the resistance of the core electrode can be detected by the resistance detection means, the average temperature of the flexible piezoelectric body around the core electrode can be detected based on the temperature dependence of the resistance. The pressure can also be detected by the vibration voltage detecting means. Therefore, since it is not necessary to prepare a temperature sensor specially, both can be detected with a simple configuration.
[0011]
According to a second aspect of the present invention, there is provided a pressure detecting device in which temperature detecting means for converting resistance to temperature based on resistance temperature characteristics is connected to the resistance detecting means.
[0012]
Since the resistance detected by the resistance detection means is converted into temperature by the temperature calculation means, the temperature can be read directly.
[0013]
According to a third aspect of the present invention, there is provided a pressure detecting device comprising a coiled metal in which a core electrode is held on an insulating support.
[0014]
Since the resistance detected by the resistance detection means is a resistance of a coiled metal, the resistance is larger than that of a straight metal. Therefore, the resistance can be easily detected.
[0015]
According to a fourth aspect of the present invention, the pressure detection device has a configuration in which the insulating support is made of a polyester fiber bundle.
[0016]
The polyester fiber bundle is electrically insulative and has high flexibility and high mechanical strength, so that the coiled metal can be supported without impairing the flexibility of the entire cable-shaped pressure sensor.
[0017]
The pressure detection device according to claim 5 of the present invention has a configuration in which the coiled metal has a flat plate shape.
[0018]
In order to obtain the piezoelectricity of the cable-shaped pressure sensor, it is necessary to polarize the flexible piezoelectric body by applying a high DC voltage between the core electrode and the flexible outer electrode in advance. At this time, since the coiled metal is flat, a uniform high electric field is more easily applied between the core electrode and the flexible outer electrode than in the cylindrical shape.
[0019]
In the pressure detecting device according to claim 6 of the present invention, the coiled metal is made of copper or a copper alloy.
[0020]
Copper or a copper alloy is rich in flexibility and widely used industrially, so that it can be mass-produced without impairing the flexibility of the entire cable-shaped pressure sensor.
[0021]
The pressure detection device according to claim 7 of the present invention is configured such that the resistance detection means detects a DC resistance.
[0022]
Although the AC resistance has frequency dependency, the DC resistance does not have frequency dependency. Therefore, the resistance of the coil metal can be detected without being affected by the inductance or stray capacitance of the coil metal.
[0023]
The pressure detection device according to claim 8 of the present invention has a configuration in which the vibration voltage detection means is connected to the core electrode and the flexible outer electrode via a capacitor.
[0024]
When detecting the DC resistance, a DC potential is applied to both ends of the core electrode. On the other hand, the oscillating voltage is an AC signal. When the vibration voltage is detected by the vibration voltage detection means, the direct current component is removed by the capacitor, so that the vibration voltage can be detected without being affected by the direct current component.
[0025]
According to a ninth aspect of the present invention, there is provided a pressure detecting device having a flexible outer electrode as a ground potential and taking out a vibration voltage signal from the core electrode.
[0026]
Since the core electrode is shielded from the external space by the flexible outer electrode having the ground potential, it is not affected by noise in the external space when detecting resistance or vibration voltage.
[0027]
【Example】
Embodiments of the present invention will be described below with reference to the drawings.
[0028]
Example 1
FIG. 1 is a configuration diagram of a pressure detection device according to a first embodiment of the present invention.
[0029]
After forming the flexible piezoelectric body 4 around the core electrode 3, a flexible outer electrode 5 was formed to constitute a cable-shaped pressure sensor. As the core electrode 3, a core electrode having the configuration shown in the conventional example, a core electrode composed only of a plurality of fine metal wires, or the like is used. As the flexible piezoelectric body 4, a composite in which ceramic piezoelectric powder such as lead titanate and lead zirconate titanate is added to rubber or resin, or vinylidene fluoride (VDF) / trifluoroethylene (TrFE) is used. ) Piezoelectric polymers such as copolymer systems are used. The flexible outer electrode 5 is made of an aluminum foil, a silver-based conductive coating by a coating method, or a conductive film in which an aluminum layer is formed on a polyethylene terephthalate film. After the cable-shaped pressure sensor is formed as described above, the vibration voltage detection means 7 and the resistance detection means 8 are connected between the core electrode 3 and the flexible outer electrode 5 to constitute the pressure detection device of the present invention. The
[0030]
The resistance of the core electrode 3 is detected by the resistance detection means 8 between both ends thereof. The core electrode 3 is made of the conductive material as described above. Since these conductive materials exhibit specific resistance-temperature characteristics, the temperature can be obtained from the detected resistance. On the other hand, when a temporally changing pressure is applied to a part or the entire surface of the cable-shaped pressure sensor, an oscillating voltage corresponding to the acceleration generated in the pressure sensor in that part is induced between the core electrode 3 and the outer electrode 5. . This oscillating voltage is detected by the oscillating voltage detecting means 7. Using this oscillating voltage, a temporally changing pressure is detected. Thus, the structure of Example 1 shown in FIG. 1 can detect temperature and pressure simultaneously.
[0031]
In order to obtain the temperature from the detected resistance, it is necessary to refer to the resistance temperature characteristic. However, since it is troublesome to refer to each time, it is desirable to connect a temperature calculation means for converting the resistance into temperature based on the resistance temperature characteristic as shown in FIG. . This is because the temperature can be read directly.
[0032]
(Example 2)
FIG. 3 is a configuration diagram of the pressure detection device according to the second embodiment of the present invention.
[0033]
The core electrode 3 is composed of a coiled metal 11 wound around an insulating support 10. In the configuration of the conventional example shown in FIG. 6, a core electrode 3 composed of a linear conductive material 1 and a conductive rubber 2 is disclosed. However, in this case, since a plurality of fine metal wires are usually used as the linear conductive material 1, the resistance between both ends of the core electrode 3 is determined by the fine metal wires. Therefore, the resistance is often as low as 0.1 Ω / m or less at room temperature, making it difficult to detect the resistance. In the configuration of Example 2 shown in FIG. 3, since the core electrode 3 is composed of the coiled metal 11 wound around the insulating support 10, the resistance between both ends of the core electrode 3 is the both ends of the coiled metal 11. It is determined by the resistance between. Since the effective length of the coiled metal 11 is much longer than the length of the cable-shaped pressure sensor, the resistance between both ends is 1 Ω / m or more. Therefore, the resistance can be easily detected. For example, in the case of an alloy wire of copper and silver (0.3 mm W × 0.05 mm t ), it is 2.7 Ω / m or more at room temperature.
[0034]
The insulating support 10 is preferably composed of a polyester fiber bundle. Since the polyester fiber has high mechanical strength and flexibility, the coiled metal can be supported without impairing the flexibility of the entire cable-shaped pressure sensor. Moreover, since the heat resistance is also 120 ° C. or higher, sufficient stability is exhibited even at the maximum use temperature of the flexible piezoelectric body 4 [about (80 to 120) ° C.].
[0035]
Moreover, it is preferable that the coil-shaped metal 11 is flat form. After the cable-shaped pressure sensor is formed in the configuration shown in FIGS. 1 and 3, a DC high voltage (5 to 10) kV / mm is applied between the core electrode 3 and the flexible outer electrode 5, Piezoelectricity is imparted by the step of polarizing the flexible piezoelectric body 4. In this polarization step, it is necessary to apply a uniform high electric field between the core electrode 3 and the flexible outer electrode 5. A uniform high electric field can be obtained in the case of a flat plate shape as compared with the case where the coiled metal 11 has a cylindrical shape or a similar shape. Moreover, copper or a copper alloy is excellent as a coil-shaped metal material. Since these materials are rich in flexibility, they can be easily wound into a coil shape by being wound around an insulating support, and the flexibility of the entire cable-shaped pressure sensor is not impaired. In addition, since it is widely used industrially, it is excellent in mass productivity.
[0036]
In addition, since the coiled metal 11 has an inductance or stray capacitance based on its shape, the AC resistance has frequency dependency. However, since the DC resistance has no frequency dependence, the DC resistance is excellent in that the resistance of the coiled metal can be detected without being affected by the inductance of the coiled metal or stray capacitance. DC resistance between both ends of the core electrode 3 of the cable-shaped pressure sensor (length: about 7 m) formed using the above-described copper-silver alloy wire (0.3 mm W × 0.05 mm t ), that is, a coil-shaped alloy FIG. 4 shows the resistance temperature characteristics of the DC resistance between both ends of the wire. As can be seen from the figure, a high resistance value of about 18Ω (about 2.5Ω / m) is exhibited even at 0 ° C., and a high resistance temperature coefficient of about 3800 ppm / ° C. is exhibited. Therefore, it is easy to detect the resistance and to calculate the temperature of the flexible piezoelectric body 4 around the core electrode 3 based on the resistance temperature characteristic.
[0037]
In addition, since the measurement shown in FIG. 4 was performed by arranging the cable-shaped pressure sensor in the thermostat, the temperature of the cable-shaped pressure sensor is uniform. However, in a practical state, the temperature is not necessarily uniform as a whole. In such a case, since the resistance shows an average value, the average temperature is also detected. By grasping the temperature distribution in a practical state, for example, if it is a cable-shaped pressure sensor having a heat resistance of 120 ° C., means such as issuing an alarm when the average temperature reaches 80 ° C. can be used. Detection is also effective in practical use.
[0038]
As apparent from the configuration of FIG. 3, the configuration also includes the oscillating voltage detection means 7, so that it is possible to detect not only the DC resistance but also the oscillating voltage based on time-varying pressure. When detecting the DC resistance, a DC potential is applied to both ends of the core electrode 3. On the other hand, the oscillating voltage is an AC signal. When the vibration voltage is detected by the vibration voltage detection means 7, as shown in FIG. 5, a structure in which the vibration voltage detection means 7 is connected to the core electrode 3 and the flexible outer electrode 5 through a capacitor is desirable. This is because since the DC component is removed by the capacitor, the oscillating voltage can be detected without being affected by the DC component.
[0039]
When the resistance detection means 8 and the vibration voltage detection means 7 are connected between the core electrode 3 and the flexible outer electrode 5, it is desirable to take the voltage signal from the core electrode 3 by setting the flexible outer electrode 5 to the ground potential. This is because the core electrode 3 is shielded from the external space by the flexible outer electrode 5 having a ground potential, so that the voltage signal is blocked from noise. When a signal is taken out from the flexible outer electrode 5, since the flexible outer electrode 5 is not shielded from the external space, the voltage signal is greatly affected by noise from the external space.
[0040]
In the above embodiment, the conventional outer skin 6 shown in FIG. 6 is not particularly mentioned, but it is obvious that it may be used as necessary for protection. Further, as the outer skin 6, vinyl chloride or urethane resin may be used in addition to the heat shrinkable tube.
[0041]
【The invention's effect】
As described above, in the pressure detection device according to the first aspect of the present invention, the resistance of the core electrode can be detected by the resistance detection means. Therefore, the average temperature of the flexible piezoelectric body around the core electrode is determined based on the temperature dependence of the resistance. The pressure can also be detected by the vibration voltage detecting means. Therefore, since it is not necessary to prepare a temperature sensor specially, both can be detected with a simple configuration.
[0042]
In the pressure detection device according to claim 2 of the present invention, the resistance detected by the resistance detection means is converted into a temperature by the temperature calculation means, so that the temperature can be read directly.
[0043]
In the pressure detecting device according to claim 3 of the present invention, the resistance detected by the resistance detecting means is a resistance of a coiled metal, and therefore shows a larger resistance than a straight metal wire. Therefore, the resistance can be easily detected.
[0044]
In the pressure detection device according to claim 4 of the present invention, the insulating support made of the polyester fiber bundle is electrically insulative and flexible, and has high mechanical strength. The coiled metal can be supported without impairing the flexibility of the entire sensor.
[0045]
In the pressure detection device according to claim 5 of the present invention, the coiled metal has a flat plate shape. In order to obtain the piezoelectricity of the cable-shaped pressure sensor, it is necessary to polarize the flexible piezoelectric body by applying a high DC voltage between the core electrode and the flexible outer electrode in advance. At this time, since the coiled metal is flat, a uniform high electric field is more easily applied between the core electrode and the flexible outer electrode than in the cylindrical shape.
[0046]
In the pressure detection device according to claim 6 of the present invention, since copper or copper alloy is rich in flexibility and used in many industrial fields, the flexibility of the entire cable-shaped pressure sensor is not impaired. Can be mass-produced.
[0047]
The pressure detection device according to claim 7 of the present invention is configured such that the resistance detection means detects a DC resistance. Although the AC resistance has frequency dependency, the DC resistance does not have frequency dependency. Therefore, the resistance of the coil metal can be detected without being affected by the inductance or stray capacitance of the coil metal.
[0048]
The pressure detection device according to claim 8 of the present invention has a configuration in which the vibration voltage detection means is connected to the core electrode and the flexible outer electrode via a capacitor. When detecting the DC resistance, a DC potential is applied to both ends of the core electrode. On the other hand, the oscillating voltage is an AC signal. When the vibration voltage is detected by the vibration voltage detection means, the direct current component is removed by the capacitor, so that the vibration voltage can be detected without being affected by the direct current component.
[0049]
According to a ninth aspect of the present invention, there is provided a pressure detecting device having a flexible outer electrode as a ground potential and taking out a vibration voltage signal from the core electrode. Since the core electrode is shielded from the external space by the flexible outer electrode having the ground potential, it is not affected by noise in the external space when the vibration voltage is detected.
[Brief description of the drawings]
1 is a configuration diagram of a pressure detection device according to a first embodiment of the present invention. FIG. 2 is another configuration diagram of a pressure detection device according to a first embodiment of the present invention. FIG. 3 is a pressure detection device according to a second embodiment of the present invention. FIG. 4 is a characteristic diagram showing an example of temperature characteristics of DC resistance of the cable-shaped pressure sensor of the pressure detection device. FIG. 5 is another configuration diagram of the pressure detection device according to the second embodiment of the present invention. ] Configuration diagram of pressure detection device using conventional cable pressure sensor 【Explanation of symbols】
3 Core electrode 4 Flexible piezoelectric body 5 Flexible outer electrode 7 Vibration voltage detecting means 8 Resistance detecting means 9 Temperature calculating means 10 Insulating support 11 Coiled metal 12 Capacitor

Claims (9)

芯電極と、前記芯電極の周囲に配置された可撓性圧電体と、前記可撓性圧電体の表面に配置された可撓性外電極を含むケーブル状圧力センサと、前記芯電極の両端に接続された抵抗検出手段と、前記芯電極と前記可撓性外電極に接続された振動電圧検出手段とを備えた圧力検出装置。A cable-like pressure sensor including a core electrode, a flexible piezoelectric body disposed around the core electrode, a flexible outer electrode disposed on a surface of the flexible piezoelectric body, and both ends of the core electrode A pressure detection device comprising: resistance detection means connected to the electrode; and vibration voltage detection means connected to the core electrode and the flexible outer electrode. 抵抗検出手段に、抵抗温度特性に基づき抵抗を温度に換算する温度算出手段を接続した請求項1記載の圧力検出装置。The pressure detection device according to claim 1, wherein temperature detection means for converting resistance to temperature based on resistance temperature characteristics is connected to the resistance detection means. 芯電極が絶縁性支持体に保持されたコイル状金属から成る請求項1項記載の圧力検出装置。2. The pressure detecting device according to claim 1, wherein the core electrode is made of a coiled metal held on an insulating support. 絶縁性支持体がポリエステル繊維束から成る請求項3項記載の圧力検出装置。4. The pressure detection device according to claim 3, wherein the insulating support is made of a polyester fiber bundle. コイル状金属が平板状である請求項3項記載の圧力検出装置。The pressure detection device according to claim 3, wherein the coiled metal has a flat plate shape. コイル状金属が銅または銅合金から成る請求項5項記載の圧力検出装置。6. The pressure detecting device according to claim 5, wherein the coiled metal is made of copper or a copper alloy. 抵抗検出手段が直流抵抗を検出する請求項1項記載の圧力検出装置。2. The pressure detection device according to claim 1, wherein the resistance detection means detects a direct current resistance. 振動電圧検出手段がコンデンサを介して芯電極と可撓性外電極に接続された請求項1項記載の圧力検出装置。2. The pressure detecting device according to claim 1, wherein the vibration voltage detecting means is connected to the core electrode and the flexible outer electrode via a capacitor. 可撓性外電極をアース電位とし、芯電極から振動電圧信号を取出す請求項1記載の圧力検出装置。The pressure detection device according to claim 1, wherein the flexible outer electrode is set to a ground potential and the vibration voltage signal is taken out from the core electrode.
JP03406299A 1998-08-05 1999-02-12 Pressure detection device Expired - Fee Related JP4051797B2 (en)

Priority Applications (5)

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JP03406299A JP4051797B2 (en) 1999-02-12 1999-02-12 Pressure detection device
US09/366,053 US6271621B1 (en) 1998-08-05 1999-08-02 Piezoelectric pressure sensor
KR1019990031937A KR100562598B1 (en) 1998-08-05 1999-08-04 Piezoelectric pressure sensor
CNB2003101010712A CN100387957C (en) 1998-08-05 1999-08-05 Piezoelectric pressure sensor
CNB99111969XA CN1147720C (en) 1998-08-05 1999-08-05 Piezoelectric pressure sensor

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