JP4068495B2

JP4068495B2 - Scanning probe microscope

Info

Publication number: JP4068495B2
Application number: JP2003104307A
Authority: JP
Inventors: 和徳安藤; 聡蓮村; 良晃鹿倉; 和俊渡辺
Original assignee: SII NanoTechnology Inc
Current assignee: Hitachi High Tech Analysis Corp
Priority date: 2003-04-08
Filing date: 2003-04-08
Publication date: 2008-03-26
Anticipated expiration: 2023-04-08
Also published as: JP2004309347A

Description

【０００１】
【発明の属する技術分野】
本発明は、先端に微小な探針を有するプローブと、プローブの変位を検出する手段と、試料を移動させる試料移動手段からなり、試料の表面凹凸などの表面形状あるいは試料の表面物性を測定する走査型プローブ顕微鏡に関する。
【０００２】
【従来の技術】
従来の走査型プローブ顕微鏡は、先端に微小な探針を有するプローブと、プローブの変位を検出する手段と、試料を移動させる試料移動手段とを備えて、試料周囲に磁場印加手段を設置して磁場を一定にして試料の測定領域の磁気分布を像として測定し、磁場印加の大きさを別の一定値に変更して同じ測定領域の磁気分布の変化を像として測定していた。また従来の磁場印加では磁場印加に伴う試料の磁気特性の変化や試料の磁歪（変位）が測定されていて、磁場印加に伴う試料の電気特性の変化を自動で測定されていなかった。また磁場印加の向きは正逆のみで試料面内における磁場印加の方向（角度）を変えることもできなかった。（特許文献１参照）
【０００３】
【特許文献１】
特開平８−２３３８３３号公報
【０００４】
【発明が解決しようとする課題】
従来の走査型プローブ顕微鏡では、試料周囲に磁場印加の手段を設置し磁場を一定にして試料の測定領域の磁気分布を像として測定し、磁場印加の大きさを別の一定値に変更して同じ測定領域の磁気分布の変化を像として測定していたので、測定に時間がかかるという欠点があった。また従来の技術による磁場印加では磁場印加の大きさにともなう試料の電気特性の変化は自動測定されていなかった。また、磁場印加の向きは正逆のみで試料面内における磁場印加の方向（角度）を自動で変化させ、試料の電気特性変化を自動で測定することもされていなかった。
【０００５】
そこで本願発明は、磁場印加の値の変化に対する電気特性の変化について短時間で測定を行なえる走査型プローブ顕微鏡を提供することを課題とした。
【０００６】
【課題を解決するための手段】
上記の問題点を解決するために、本発明では、先端に微小な探針を有するプローブと、プローブの変位を検出する手段と、試料を移動させる試料移動手段からなり、試料の表面凹凸形状あるいは試料の表面物性を測定する走査型プローブ顕微鏡において、試料の周囲に磁場印加する手段とプローブと試料の間に流れる電流を検出する手段を有し、プローブを試料測定面上の定点に接触させ、磁場印加の操作量を自動で変化させ、前記検出した電流から得られる試料の電気特性の変化を自動表示するようにした。
【０００７】
【発明の実施の形態】
本発明は、図に示すように、先端に微小な探針を有するプローブと、プローブの変位を検出する手段と、試料を移動させる試料移動手段からなり、試料の表面凹凸形状あるいは試料の表面物性を測定する走査型プローブ顕微鏡において、試料の周囲に磁場印加する手段とプローブと試料の間に流れる電流を検出する手段を有し、プローブを試料測定面上の定点に接触させ、磁場印加の操作量を自動で変化させ、試料の電気特性の変化を自動表示することで、磁場印加にともなう試料の磁気特性の変化ではなく、試料の磁歪量（変位）でもなく、試料の電気特性の変化を測定できるようにした。また、プローブを試料測定面上の定点に接触させて、磁場印加の強さを自動で変化させ、試料の電気特性の変化を自動表示することで測定時間の短縮を可能にした。また、磁場印加する手段を試料の周囲に複数配置することで試料面内における磁場印加の方向（角度）も自動で連続に変化させることを可能にした。
【０００８】
（実施例）
本発明の実施例について以下に図面を参照して説明する。図１は本発明の走査型プローブ顕微鏡の模式図である。図１（Ａ）に示すように、プローブ１の先端には探針２があり、プローブ取り付け部３に装着されている。プローブ取り付け部３はリード線４を介して電流検出手段５に接続されている。プローブ１にはレーザ７が照射され、反射光は変位検出手段８に到達し、探針２の高さ（変位）は到達位置の違いとして測定される。試料９は面内に例えば磁場印加により電気特性（例えば電気抵抗）が変化する部分１０が存在し、試料移動手段１１上に設置される。試料移動手段１１はリード線１２を介して電圧印加手段１３に接続されている。電圧印加手段１３により電圧を印加するとリード線１２を介して試料移動手段１１に電圧が印加され、試料９にも同じ電圧が印加される。探針２は磁場印加により電気特性（例えば電気抵抗）が変化する部分１０に接触しているので、プローブ１およびリード線４を経由して電流検出手段５に電流が流れる。印加電圧と検出した電流値より試料の電気抵抗を求めることができる。試料の周囲には磁場印加手段１４が対向する配置で設置されている。磁場印加手段１４はホルダ１５の円周面にコイル１６が巻かれ、コイル１６はリード線１７を介して操作手段１８に接続されている。操作手段１８は例えば直流電源で電圧を出力することでコイル１６に電流が流れる。ホルダ１５は磁性の材質が使われ、ホルダ長手方向が磁場の方向になる。コイル１６に流す電流を一定に決めれば、例えばホルダ１５の右端はＮ極となり、対向する位置に設置されている磁場印加手段のホルダの左端をＳ極になるようにすれば試料９の測定面に平行な磁場１９（水平磁場）を作成することができる。水平磁場の強さは操作手段１８によりコイル１６に流す電流で変えることがでる。例えば電流を大きくすれば水平磁場の強さは大きく、電流を小さくすれば水平磁場の強さは小さくなる。また、水平磁場の方向を逆にするときはコイルに流す電流の方向を逆にしてやればよい。
【０００９】
図１（Ｂ）に本発明により得られる電気特性の自動表示例を示す。探針２を磁場印加により変化する部分１０に接触させた状態で電圧印加手段１３により印加電圧を一定で電流検出手段５によりプローブと試料間に流れる電流値を常時モニタしておき、磁場印加手段の操作手段１８の操作量を自動で変化させ、電流検出手段５で得られる電気特性量の変化を自動で表示させる。
【００１０】
図２（Ａ）に本発明により得られる別の電気特性の自動表示例を示す。横軸に操作手段１８の操作量としてコイル１６に流す電流値を、縦軸に電流検出手段５で検出される電流値を自動に表示する。
【００１１】
図２（Ｂ）に本発明により得られるさらに別の電気特性の自動表示例を示す。水平磁場の強さを測定できる磁気センサを探針の近くに設置し、操作手段の操作量を自動で変化させるとき操作量の結果として得られる磁場の強さ（磁気センサの値）を横軸に、電流検出手段の検出電流と電圧印加手段の印加電圧から得られる試料の電気抵抗を縦軸にして自動表示する。
【００１２】
図３に別の実施例を示す。図３（Ａ）に示すように、試料の周囲には磁場印加手段３４が対向する配置で設置されている。磁場印加手段３４は永久磁石３５の右端が例えばＮ極になるように操作手段３８に装着され、左右方向に動くことができるようになっている。対向する位置に設置されている磁場印加手段の永久磁石３５は左端がＳ極になるように装着され、同様に左右方向に動くことができるようになっている。Ｎ極とＳ極になるようにすれば試料９の測定面に平行な磁場１９（水平磁場）を作成することができる。操作手段３８により永久磁石３５を左右方向に変更すること、あるいは対向する磁場印加手段の操作で同じく左右方向に変更すること、あるいは両者の併用で水平磁場の強さは変更することができる。例えばＮ極とＳ極の距離を大きくすれば水平磁場の強さは小さく、距離を小さくすれば水平磁場の強さは大きくなる。また、水平磁場の方向を逆にするときは操作手段に永久磁石と装着するとき取り付けの方向を逆にしてやればよい。
【００１３】
図３（Ｂ）にこの発明により得られる電気特性の自動表示例を示す。探針２を磁場印加により変化する部分１０に接触させた状態で電圧印加手段１３により印加電圧を一定で電流検出手段５によりプローブと試料間に流れる電流値を常時モニタしておき、磁場印加手段の操作手段３８の操作量でＮ極とＳ極の永久磁石間の距離を自動で変化させ、電流検出手段５で得られる電気特性量の変化を自動で表示させる。
【００１４】
図４に本発明の別の実施例を示す。試料の上方から見た配置として図４で説明する。試料９上には磁場印加により変化する部分１０があり、試料の周囲には磁場印加手段４３および磁場印加手段４８が複数配置されている。磁場印加手段４４はホルダ１５の円周面にコイル１６が巻かれ、コイル１６はリード線１７を介して操作手段１８に接続されている。操作手段１８は例えば直流電源で電圧を出力することでコイル１６に電流が流れる。ホルダ１５は磁性の材質が使われ、ホルダ長手方向が磁場の方向になる。コイル１６に流す電流を一定に決めれば、例えばホルダ１５の右端はＮ極となり、対向する位置に設置されている磁場印加手段のホルダの左端をＳ極になるようにすれば試料９の測定面に平行な磁場４９（水平磁場）を作成することができる。水平磁場の強さは操作手段１８によりコイル１６に流す電流で変えることがでる。例えば電流を大きくすれば水平磁場の強さは大きく、電流を小さくすれば水平磁場の強さは小さくなる。また、水平磁場の方向を逆にするときはコイルに流す電流の方向を逆にしてやればよい。さらに同様な磁場印加手段４３が前記磁場印加手段４４に例えば直交する配置で設置されていて、試料９の測定面に平行な磁場４１（水平磁場）を作成することができる。
【００１５】
次に２組の磁場印加手段を用いて、試料面内における各水平磁場の合成で水平磁場の方向（角度）を変更する方法を図５で説明する。まず、図５（Ａ）では磁場印加手段４４により右方向の磁場を作成し、Ｘ＝１００で表示することにし、もう一方の磁場印加手段４３では磁場を作成しないとし、Ｙ＝０で表示している。合成された磁場の方向は図示とおり右向きであり、ベクトル角度は０度となる。次に図５（Ｂ）では磁場印加手段４４により右方向の磁場を作成し、Ｘ＝１００で表示することにし、もう一方の磁場印加手段４３でも紙面内上方向の磁場を作成し、Ｙ＝１００で表示している。合成された磁場の方向は図示どおり右斜め４５度の向きになり、ベクトル角度は４５度となる。ここでベクトル角度を０度と４５度の間にするにはＸ＝１００、Ｙ＝５０などにする、つまり磁場印加手段４４で作成する磁場の強さ１００に対して磁場印加手段４３で作成する磁場の強さ５０にすればベクトル角度０度と４５度の間の角度を実現できる。次に図５（Ｃ）では磁場印加手段４４では磁場を作成しないとし、Ｘ＝０で表示することにし、もう一方の磁場印加手段４３では紙面内上方向の磁場を作成し、Ｙ＝１００で表示している。合成された磁場の方向は図示どおり紙面内上方向になり、ベクトル角度は９０度となる。以下同様にして図５（Ｄ）から図５（Ｇ）に示すように、磁場印加手段４４と磁場印加手段４３で磁場の方向と大きさを変化させることで合成させた結果として、試料面における水平磁場の方向（角度）を連続で変更、回転することができる。
【００１６】
図６に、試料面内における磁場の方向（角度）を自動で変更し、試料の電気特性量を自動で表示する例を示す。
【００１７】
図７に本発明の別の実施例を示す。試料の上方から見た配置として永久磁石での実施例を説明する。試料９上には磁場印加により変化する部分１０があり、試料の周囲には磁場印加手段３４および磁場印加手段５３が配置されている。試料の周囲には磁場印加手段３４が対向する配置で設置されている。磁場印加手段３４は永久磁石３５の右端が例えばＮ極になるように操作手段３８に装着され、左右方向に動くことができるようになっている。対向する位置に設置されている磁場印加手段の永久磁石は左端がＳ極になるように装着され、同様に左右方向に動くことができるようになっている。Ｎ極とＳ極になるようにすれば試料９の測定面に平行な磁場５９（水平磁場）を作成することができる。操作手段３８により永久磁石３５を左右方向に変更すること、あるいは対向する磁場印加手段の操作で同じく左右方向に変更すること、あるいは両者の併用で水平磁場の強さは変更することができる。例えばＮ極とＳ極の距離を大きくすれば水平磁場の強さは小さく、距離を小さくすれば水平磁場の強さは大きくなる。さらに同様な磁場印加手段５３が前記磁場印加手段３４に例えば直交する配置で設置されていて、試料９の測定面に平行な磁場５１（水平磁場）を作成することができる。２組の磁場印加手段を用いて、試料面内における各水平磁場の合成で水平磁場の方向（角度）を変更する方法は前述のとおりである。
【００１８】
図８に本発明の別の実施例を示す。試料の上方から見た配置としてコイルでの実施例を説明する。ホルダ１５にコイル１６が巻かれたものが試料を挟んで対向する位置に操作手段６１上に設置されている。コイル１６はリード線１７を介して操作手段１８に接続されている。操作手段１８によりコイル１６に電流を流すことで水平磁場１９を作成する。本実施例では操作手段１８の操作量は一定にし、操作手段６１の回転を自動で行う。操作量としては操作手段６１の角度とし、角度に応じて試料の電気特性量の変化を自動で表示する。
【００１９】
図９に本発明の別の実施例を示す。試料の上方から見た配置として永久磁石での実施例を説明する。試料の周囲には磁場印加手段３４が対向する配置で設置されている。磁場印加手段３４は永久磁石３５の右端が例えばＮ極になるように操作手段３８に装着され、左右方向に動くことができるようになっている。対向する位置に設置されている磁場印加手段の永久磁石は左端がＳ極になるように装着され、同様に左右方向に動くことができるようになっている。Ｎ極とＳ極になるようにすれば試料９の測定面に平行な磁場１９（水平磁場）を作成することができる。操作手段３８により永久磁石３５を左右方向に変更すること、あるいは対向する磁場印加手段の操作で同じく左右方向に変更すること、あるいは両者の併用で水平磁場の強さは変更することができる。例えばＮ極とＳ極の距離を大きくすれば水平磁場の強さは小さく、距離を小さくすれば水平磁場の強さは大きくなる。本実施例では操作手段３８の操作量は一定にし、操作手段６１の回転を自動で行う。操作量としては操作手段６１の角度とし、角度に応じて試料の電気特性量の変化を自動で表示する。
【００２０】
図１０に真空容器と磁場印加手段を組み合わせた別の実施例を示す。真空容器８１内に探針を所有するプローブ１、プローブ取り付け部３、試料９、試料移動手段１１が配置されている。真空容器８１には真空排気手段８２が接続されている。真空容器８１の上部にはウインドウ８３で真空気密性が確保されていて、測定したい位置を目視あるいは顕微鏡などによる観察で確認できるようになっている。レーザ７はウインドウ８３を介して真空容器８１内に導入されプローブ１に照射される。照射されたレーザ７の反射光は、ウインドウ８３を介して大気側に戻され変位検出手段８に到達する。試料９は試料移動手段１１上に設置される。電流検出手段５に接続されるリード線４および電圧印加手段１３に接続されるリード線１２は真空容器８１と真空気密性、電気絶縁性は確保されている。本実施例ではホルダ１５を真空容器の部品のひとつとしてホルダの円周部に真空気密性をもたせて真空気密シール８５で気密性を確保している。なお水平磁場１９を作成するのは前述のとおりである。
【００２１】
真空容器８１には、ガス導入８４が配置され、真空容器内８１を真空排気したあと所望のガスを導入して大気圧に戻し、磁場を掃引してもよい。またガスの導入は、大気圧になる手前の負圧状態で中止し、同じく磁場を掃引してもよい。また導入するガスに水分を含ませて同じく磁場を掃引してもよい。また真空排気せず、真空容器内へガスあるいは水分を含めたガスを常時流し続けて１気圧状態で磁場を掃引してもよい。
【００２２】
図１１に真空容器と磁場印加手段を組み合わせた別の実施例を示す。ホルダ９１の先端の右端には永久磁石９２が装着され、Ｎ極が右側になっている。ホルダ９１の円周部には真空気密シール８５で真空容器８１と気密性が確保され、かつ、操作手段３８により左右方向の動作が気密性を確保したまま可能になっている。対向する永久磁石は左側がＳ極になっていて、磁石間の距離を変えることで磁場９９の強さを自動掃引するようになっている。
【００２３】
図１２に真空容器と磁場印加手段を組み合わせた別の実施例を示す。永久磁石を真空容器８１の外側（大気側）に置き、操作手段３８で左右方向に動作させることでＮ極とＳ極の距離を変えることで磁場１９の大きさを変えることができ、前述同様に磁場を自動掃引することができる。なお永久磁石の代りに電磁石（コイル）としてもよい。
【００２４】
図１３に加熱冷却手段と磁場印加手段を組み合わせた別の実施例を示す。図１３（Ａ）に示すように試料９は加熱冷却手段１１１の上に設置され、加熱冷却手段１１１は試料移動手段１１上に設置されている。加熱冷却手段１１１は内部にヒータが組み込まれていて試料９を加熱することができる。また加熱冷却手段１１１は熱伝導手段１１２を介して冷却供給手段１１３と接続されている。熱伝導手段は銅箔、銀箔などの金属箔でフレキシブルなものが使用される。冷却供給手段１１３には内部に液体窒素などの冷媒をため込む空間があり、冷却供給源となっている。冷却供給手段１１３が冷えることで熱伝導手段１１２を介して加熱冷却手段１１１が冷却される。また、冷却供給手段で加熱冷却手段を冷やしながら加熱冷却手段に内蔵されるヒ−タの出力を調整することで冷却から加熱までの任意の温度に制御することができる。試料９を所望の温度にして磁場を自動掃引することができる。図１３（Ｂ）に試料を所望の温度にして磁場を自動掃引して試料の電気抵抗の変化を自動表示した実施例を示す。
【００２５】
図１４は本発明の別の実施例である。水平磁場印加以外に垂直磁場印加の例である。ホルダ１２１は例えば円筒状の部品であり、外周部にはコイル１２２が巻かれている。コイル１２２に電流を流すと試料９に対して垂直の磁場１２３が印加される。本実施例でも磁場を自動掃引して垂直磁場の変化に対する試料の電気特性変化を自動表示させてもよい。
【００２６】
図１５は本発明の別の実施例である。試料面に対して、水平でも垂直でもなく斜め方向の磁場印加の例である。永久磁石３５は操作手段３８に装着され、対向する永久磁石との距離を変化させて磁場１９の強さを変えることができる。操作手段３８は別の操作手段１３１に装着されている。操作手段３８で対向する永久磁石間の距離を決めたあと、操作手段１３１を回転させると試料面に対して斜め入射の角度を変えることもできる。操作量（角度）を連続で変えることで試料の電気特性量の変化を自動表示させることもできる。なお永久磁石のかわりに電磁石（コイル）でもよい。
【００２７】
図１６は本発明の別の実施例である。プローブとしてカンチレバー（板バネ）タイプで説明してきたが、プローブとしては走査型トンネル顕微鏡で使われているＳＴＭプローブでもよい。先端には探針１４２を有するプローブ１４１はプローブ取り付け部３に装着されていて、試料９には電圧印加手段により電圧が印加されている。試料移動手段１１により試料９の磁場印加により変化する部分１０を探針１４２に近づけていくと接触する直前に探針１４２と試料間にトンネル電流が流れ、一定の電流値になったところで試料移動手段による接近動作を止める。または探針を試料面に接触させた状態で接近動作を止めてもよい。次に操作手段１８によりコイル１６に流す電流の方向と大きさを自動掃引すると磁場１９の大きさあるいは方向（角度）を自動で変化させれば、試料の電気特性量の変化を自動表示してもよい。
【００２８】
【発明の効果】
本発明は、以上説明したような形態で実施され、以下に記載されるような効果を奏する。
【００２９】
先端に微小な探針を有するプローブと、プローブの変位を検出する手段と、試料を移動させる試料移動手段からなり、試料の表面凹凸形状あるいは試料の表面物性を測定する走査型プローブ顕微鏡において、前記試料の周囲に磁場印加する手段とプローブと試料の間に流れる電流を検出する手段を有し、プローブを試料測定面上の定点に接触させ、磁場印加の操作量を自動で変化させることで試料の電気特性の変化を自動表示する効果がある。また測定位置は定点とすることで測定時間短縮の効果がある。
【図面の簡単な説明】
【図１】（Ａ）磁場印加手段として磁気コイルを用いて水平磁場を印加する本発明の模式図、（Ｂ）は磁場印加の操作量と試料の電気特性変化を自動で表示する本発明の模式図。
【図２】（Ａ）は磁場印加の操作量として操作する電流値として試料の電気特性として検出される電流値として自動で表示する本発明の模式図、（Ｂ）は磁場印加の操作量として操作した結果としての磁場の強さとして試料の電気特性として検出される電流値から電気抵抗として自動で表示する本発明の模式図。
【図３】（Ａ）は磁場印加手段として永久磁石を用いて水平磁場を印加し、電気特性を測定する本発明の模式図、（Ｂ）は磁場印加の操作量として永久磁石間の距離として試料の電気特性変化を自動で表示する本発明の模式図。
【図４】複数の磁場印加手段によりその合成磁場で試料面内の水平磁場の方向（角度）を可変にする本発明の模式図。
【図５】磁場印加手段を複数用いて各磁場の大きさと合成された水平磁場の方向を説明する本発明の模式図
【図６】磁場印加手段を複数用い、各磁場の大きさと合成された水平磁場の方向から角度から操作量としてベクトル角度とし、試料の電気特性変化を自動表示する本発明の模式図。
【図７】複数の永久磁石の各磁場の合成で試料面内の水平磁場の方向（角度）を可変にする本発明の別の模式図。
【図８】磁気コイルと回転させる操作手段を用い、試料面内の水平磁場の方向（角度）を可変にする本発明の別の模式図。
【図９】永久磁石と回転させる操作手段により試料面内の水平磁場の方向（角度）を可変にする本発明の別の模式図。
【図１０】磁場印加手段の構成部品（ホルダ）に真空気密性を持たせた磁気コイルでの本発明の別の模式図。
【図１１】磁場印加手段の構成部品（ホルダ）に真空気密性を持たせた永久磁石での本発明の別の模式図。
【図１２】磁場印加手段を真空容器の周囲に配置し、磁場の強さを可変にする本発明の別の模式図。
【図１３】（Ａ）は加熱冷却手段により試料を所望の温度にし、磁気コイルを用いて水平磁場を印加する本発明の模式図、（Ｂ）は磁場の強さを試料温度ごとに試料の電気抵抗変化として表示する本発明の模式図。
【図１４】磁場印加手段により試料面に対して垂直に磁場印加する本発明の別の模式図。
【図１５】磁場印加手段により斜めに磁場印加する本発明の別の模式図。
【図１６】ＳＴＭ（走査型トンネル顕微鏡）に応用し、磁場印加にともなう試料の電気特性変化を測定する本発明の別の模式図。
【符号の説明】
１、１４１…プローブ
２、１４２…探針
３…プローブ取り付け部
４、１２、１７…リード線
５…電流検出手段
７…レーザ
８…変位検出手段
９…試料
１０…磁場印加により変化する部分
１１…試料移動手段
１３…電圧印加手段
１４、３４、４３、４４、５３…磁場印加手段
１５、９１、１２１…ホルダ
１６、１２２…コイル
１８、３８、４２、５２、６１、１３１…操作手段
１９、４１…磁場
３５、９２…永久磁石
４１、４９、５１、５９、９９、１２３…磁場
８１…真空容器
８２…真空排気手段
８３…ウインドウ
８４…ガス導入
８５…真空気密シール
１１１…加熱冷却手段
１１２…熱伝導手段
１１３…冷却供給手段[0001]
BACKGROUND OF THE INVENTION
The present invention comprises a probe having a minute probe at the tip, a means for detecting the displacement of the probe, and a sample moving means for moving the sample, and measures the surface shape such as the surface irregularities of the sample or the surface physical properties of the sample. The present invention relates to a scanning probe microscope.
[0002]
[Prior art]
A conventional scanning probe microscope includes a probe having a minute probe at the tip, a means for detecting the displacement of the probe, and a sample moving means for moving the sample, and a magnetic field applying means is provided around the sample. The magnetic distribution in the measurement region of the sample was measured as an image with the magnetic field kept constant, and the change in the magnetic distribution in the same measurement region was measured as an image by changing the magnitude of the magnetic field application to another constant value. Further, in the conventional magnetic field application, the change in the magnetic properties of the sample and the magnetostriction (displacement) of the sample due to the magnetic field application are measured, and the change in the electrical properties of the sample due to the magnetic field application is not automatically measured. Moreover, the direction of magnetic field application was only forward and reverse, and the direction (angle) of magnetic field application in the sample plane could not be changed. (See Patent Document 1)
[0003]
[Patent Document 1]
JP-A-8-233833 [0004]
[Problems to be solved by the invention]
In conventional scanning probe microscopes, magnetic field application means are installed around the sample, the magnetic field is kept constant, the magnetic distribution in the measurement area of the sample is measured as an image, and the magnitude of magnetic field application is changed to another constant value. Since the change in the magnetic distribution in the same measurement region was measured as an image, there was a drawback that it took time for the measurement. Further, in the conventional magnetic field application, a change in the electrical characteristics of the sample with the magnitude of the magnetic field application has not been automatically measured. Further, the direction of magnetic field application is only forward and reverse, and the direction (angle) of magnetic field application in the sample surface is automatically changed, and the change in the electrical characteristics of the sample is not automatically measured.
[0005]
Accordingly, an object of the present invention is to provide a scanning probe microscope capable of measuring in a short time a change in electrical characteristics with respect to a change in magnetic field application value.
[0006]
[Means for Solving the Problems]
In order to solve the above problems, the present invention comprises a probe having a microprobe at the tip, a means for detecting the displacement of the probe, and a sample moving means for moving the sample. In a scanning probe microscope that measures the surface physical properties of a sample, it has a means for applying a magnetic field around the sample and a means for detecting a current flowing between the probe and the sample. The probe is brought into contact with a fixed point on the sample measurement surface. The operation amount of the magnetic field application was automatically changed, and the change in the electrical characteristics of the sample obtained from the detected current was automatically displayed.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
As shown in the figure, the present invention comprises a probe having a microprobe at the tip, a means for detecting the displacement of the probe, and a sample moving means for moving the sample. In a scanning probe microscope for measuring a magnetic field, there is a means for applying a magnetic field around the sample and a means for detecting the current flowing between the probe and the sample. The probe is brought into contact with a fixed point on the sample measurement surface, and the magnetic field is applied. By changing the amount automatically and automatically displaying the change in the electrical characteristics of the sample, the change in the electrical characteristics of the sample, not the magnetostriction (displacement) in the sample, not the change in the magnetic characteristics of the sample due to the application of the magnetic field. I was able to measure. In addition, the probe is brought into contact with a fixed point on the sample measurement surface, the intensity of the magnetic field application is automatically changed, and the change in the electrical characteristics of the sample is automatically displayed, thereby shortening the measurement time. In addition, by arranging a plurality of means for applying a magnetic field around the sample, it is possible to automatically and continuously change the direction (angle) of magnetic field application in the sample surface .
[0008]
(Example)
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic diagram of a scanning probe microscope of the present invention. As shown in FIG. 1 (A), a probe 2 is provided at the tip of the probe 1 and is attached to a probe mounting portion 3. The probe mounting portion 3 is connected to the current detection means 5 through the lead wire 4. The probe 1 is irradiated with the laser 7, the reflected light reaches the displacement detection means 8, and the height (displacement) of the probe 2 is measured as a difference in the arrival position. The sample 9 has a portion 10 whose electric characteristics (for example, electric resistance) change in the plane by applying a magnetic field, for example, and is placed on the sample moving means 11. The sample moving means 11 is connected to the voltage applying means 13 via the lead wire 12. When a voltage is applied by the voltage applying unit 13, a voltage is applied to the sample moving unit 11 through the lead wire 12, and the same voltage is also applied to the sample 9. Since the probe 2 is in contact with the portion 10 whose electrical characteristics (for example, electrical resistance) change due to application of a magnetic field, a current flows to the current detection means 5 via the probe 1 and the lead wire 4. The electrical resistance of the sample can be obtained from the applied voltage and the detected current value. Around the sample, a magnetic field applying means 14 is disposed so as to face each other. In the magnetic field applying means 14, a coil 16 is wound around the circumferential surface of the holder 15, and the coil 16 is connected to the operating means 18 via a lead wire 17. The operating means 18 outputs a voltage with, for example, a DC power source, and a current flows through the coil 16. The holder 15 is made of a magnetic material, and the longitudinal direction of the holder is the direction of the magnetic field. If the current flowing through the coil 16 is determined to be constant, for example, the right end of the holder 15 becomes the N pole, and the left end of the holder of the magnetic field applying means installed at the opposite position becomes the S pole. It is possible to create a magnetic field 19 (horizontal magnetic field) parallel to. The strength of the horizontal magnetic field can be changed by the current applied to the coil 16 by the operating means 18. For example, if the current is increased, the strength of the horizontal magnetic field is increased, and if the current is decreased, the strength of the horizontal magnetic field is decreased. Further, when the direction of the horizontal magnetic field is reversed, the direction of the current flowing through the coil may be reversed.
[0009]
FIG. 1B shows an example of automatic display of electrical characteristics obtained by the present invention. While the probe 2 is in contact with the portion 10 that changes due to the application of the magnetic field, the applied voltage is kept constant by the voltage application means 13 and the current value flowing between the probe and the sample is constantly monitored by the current detection means 5. The operation amount of the operation means 18 is automatically changed, and the change in the electrical characteristic amount obtained by the current detection means 5 is automatically displayed.
[0010]
FIG. 2A shows an example of automatic display of another electrical characteristic obtained by the present invention. The current value flowing through the coil 16 as the operation amount of the operation means 18 is automatically displayed on the horizontal axis, and the current value detected by the current detection means 5 is automatically displayed on the vertical axis.
[0011]
FIG. 2B shows another example of automatic display of electrical characteristics obtained by the present invention. When a magnetic sensor that can measure the strength of the horizontal magnetic field is installed near the probe and the amount of operation of the operating means is changed automatically, the magnetic field strength (magnetic sensor value) obtained as a result of the amount of operation is plotted on the horizontal axis. The electrical resistance of the sample obtained from the detected current of the current detecting means and the applied voltage of the voltage applying means is automatically displayed with the vertical axis.
[0012]
FIG. 3 shows another embodiment. As shown in FIG. 3A, a magnetic field applying means 34 is disposed around the sample so as to face each other. The magnetic field applying means 34 is mounted on the operating means 38 so that the right end of the permanent magnet 35 becomes, for example, N pole, and can move in the left-right direction. The permanent magnet 35 of the magnetic field applying means installed at the opposite position is mounted so that the left end is the S pole, and can move in the left-right direction as well. If the N and S poles are used, a magnetic field 19 (horizontal magnetic field) parallel to the measurement surface of the sample 9 can be created. The strength of the horizontal magnetic field can be changed by changing the permanent magnet 35 in the left-right direction by the operating means 38, or by changing the same in the left-right direction by operating the opposing magnetic field applying means. For example, if the distance between the N pole and the S pole is increased, the strength of the horizontal magnetic field is decreased, and if the distance is decreased, the strength of the horizontal magnetic field is increased. Further, when the direction of the horizontal magnetic field is reversed, the mounting direction may be reversed when the permanent magnet is attached to the operating means.
[0013]
FIG. 3B shows an example of automatic display of electrical characteristics obtained by the present invention. While the probe 2 is in contact with the portion 10 that changes due to the application of the magnetic field, the applied voltage is kept constant by the voltage application means 13 and the current value flowing between the probe and the sample is constantly monitored by the current detection means 5. The distance between the N-pole and S-pole permanent magnets is automatically changed by the operation amount of the operation means 38, and the change in the electrical characteristic amount obtained by the current detection means 5 is automatically displayed.
[0014]
FIG. 4 shows another embodiment of the present invention. The arrangement viewed from above the sample will be described with reference to FIG. On the sample 9, there is a portion 10 that is changed by applying a magnetic field, and a plurality of magnetic field applying means 43 and a plurality of magnetic field applying means 48 are arranged around the sample. In the magnetic field applying means 44, the coil 16 is wound around the circumferential surface of the holder 15, and the coil 16 is connected to the operating means 18 via the lead wire 17. The operating means 18 outputs a voltage with, for example, a DC power source, and a current flows through the coil 16. The holder 15 is made of a magnetic material, and the longitudinal direction of the holder is the direction of the magnetic field. If the current flowing through the coil 16 is determined to be constant, for example, the right end of the holder 15 becomes the N pole, and the left end of the holder of the magnetic field applying means installed at the opposite position becomes the S pole. A magnetic field 49 (horizontal magnetic field) parallel to can be created. The strength of the horizontal magnetic field can be changed by the current applied to the coil 16 by the operating means 18. For example, if the current is increased, the strength of the horizontal magnetic field is increased, and if the current is decreased, the strength of the horizontal magnetic field is decreased. Further, when the direction of the horizontal magnetic field is reversed, the direction of the current flowing through the coil may be reversed. Further, a similar magnetic field applying means 43 is installed in, for example, an orthogonal arrangement to the magnetic field applying means 44, and a magnetic field 41 (horizontal magnetic field) parallel to the measurement surface of the sample 9 can be created.
[0015]
Next, a method for changing the direction (angle) of the horizontal magnetic field by synthesizing the horizontal magnetic fields in the sample plane using two sets of magnetic field applying means will be described with reference to FIG. First, in FIG. 5A, a magnetic field in the right direction is created by the magnetic field applying means 44 and is displayed with X = 100, and the other magnetic field applying means 43 is not created with a magnetic field, and is displayed with Y = 0. ing. The direction of the synthesized magnetic field is rightward as shown in the figure, and the vector angle is 0 degree. Next, in FIG. 5B, a magnetic field in the right direction is created by the magnetic field applying means 44 and is displayed as X = 100. A magnetic field in the upper direction in the drawing is also created by the other magnetic field applying means 43, and Y = 100. As shown, the direction of the synthesized magnetic field is 45 degrees diagonally to the right, and the vector angle is 45 degrees. Here, in order to make the vector angle between 0 degrees and 45 degrees, X = 100, Y = 50, etc., that is, the magnetic field applying means 44 creates the magnetic field strength 100 created by the magnetic field applying means 44. If the magnetic field strength is 50, a vector angle between 0 and 45 degrees can be realized. Next, in FIG. 5C, it is assumed that the magnetic field applying unit 44 does not create a magnetic field, and X = 0 is displayed. The other magnetic field applying unit 43 generates a magnetic field in the upper direction in the drawing, and Y = 100. it's shown. The direction of the synthesized magnetic field is upward in the drawing as shown in the figure, and the vector angle is 90 degrees. Similarly, as shown in FIGS. 5D to 5G, as a result of combining the magnetic field applying unit 44 and the magnetic field applying unit 43 by changing the direction and magnitude of the magnetic field, The direction (angle) of the horizontal magnetic field can be continuously changed and rotated.
[0016]
FIG. 6 shows an example in which the direction (angle) of the magnetic field in the sample surface is automatically changed and the electrical characteristic amount of the sample is automatically displayed.
[0017]
FIG. 7 shows another embodiment of the present invention. An embodiment using permanent magnets will be described as an arrangement viewed from above the sample. On the sample 9, there is a portion 10 that changes due to the application of a magnetic field, and a magnetic field applying means 34 and a magnetic field applying means 53 are arranged around the sample. Around the sample, a magnetic field applying means 34 is disposed so as to face each other. The magnetic field applying means 34 is mounted on the operating means 38 so that the right end of the permanent magnet 35 becomes, for example, N pole, and can move in the left-right direction. The permanent magnet of the magnetic field applying means installed at the opposite position is mounted so that the left end is the S pole, and can move in the left-right direction in the same manner. If the N and S poles are used, a magnetic field 59 (horizontal magnetic field) parallel to the measurement surface of the sample 9 can be created. The strength of the horizontal magnetic field can be changed by changing the permanent magnet 35 in the left-right direction by the operating means 38, or by changing the same in the left-right direction by operating the opposing magnetic field applying means. For example, if the distance between the N pole and the S pole is increased, the strength of the horizontal magnetic field is decreased, and if the distance is decreased, the strength of the horizontal magnetic field is increased. Further, a similar magnetic field applying means 53 is installed in, for example, an orthogonal arrangement to the magnetic field applying means 34, and a magnetic field 51 (horizontal magnetic field) parallel to the measurement surface of the sample 9 can be created. The method of changing the direction (angle) of the horizontal magnetic field by combining the horizontal magnetic fields in the sample plane using two sets of magnetic field applying means is as described above.
[0018]
FIG. 8 shows another embodiment of the present invention. An embodiment using a coil will be described as an arrangement viewed from above the sample. A coil 16 wound around the holder 15 is placed on the operating means 61 at a position facing the sample 15 across the sample. The coil 16 is connected to the operating means 18 via the lead wire 17. A horizontal magnetic field 19 is created by passing an electric current through the coil 16 by the operating means 18. In this embodiment, the operation amount of the operation means 18 is fixed, and the operation means 61 is automatically rotated. The operation amount is the angle of the operation means 61, and the change in the electrical characteristic amount of the sample is automatically displayed according to the angle.
[0019]
FIG. 9 shows another embodiment of the present invention. An embodiment using permanent magnets will be described as an arrangement viewed from above the sample. Around the sample, a magnetic field applying means 34 is disposed so as to face each other. The magnetic field applying means 34 is mounted on the operating means 38 so that the right end of the permanent magnet 35 becomes, for example, N pole, and can move in the left-right direction. The permanent magnet of the magnetic field applying means installed at the opposite position is mounted so that the left end is the S pole, and can move in the left-right direction in the same manner. If the N and S poles are used, a magnetic field 19 (horizontal magnetic field) parallel to the measurement surface of the sample 9 can be created. The strength of the horizontal magnetic field can be changed by changing the permanent magnet 35 in the left-right direction by the operating means 38, or by changing the same in the left-right direction by operating the opposing magnetic field applying means. For example, if the distance between the N pole and the S pole is increased, the strength of the horizontal magnetic field is decreased, and if the distance is decreased, the strength of the horizontal magnetic field is increased. In this embodiment, the operation amount of the operation means 38 is fixed, and the operation means 61 is automatically rotated. The operation amount is the angle of the operation means 61, and the change in the electrical characteristic amount of the sample is automatically displayed according to the angle.
[0020]
FIG. 10 shows another embodiment in which a vacuum vessel and a magnetic field applying means are combined. In the vacuum vessel 81, the probe 1, the probe mounting portion 3, the sample 9, and the sample moving means 11 that own the probe are arranged. A vacuum exhaust means 82 is connected to the vacuum container 81. The upper part of the vacuum vessel 81 has a vacuum tightness secured by a window 83 so that the position to be measured can be confirmed visually or by observation with a microscope or the like. The laser 7 is introduced into the vacuum container 81 through the window 83 and irradiated to the probe 1. The reflected light of the irradiated laser 7 is returned to the atmosphere side through the window 83 and reaches the displacement detecting means 8. The sample 9 is set on the sample moving means 11. The lead wire 4 connected to the current detection means 5 and the lead wire 12 connected to the voltage application means 13 are secured to the vacuum vessel 81 and vacuum hermeticity and electrical insulation. In the present embodiment, the holder 15 is one of the parts of the vacuum vessel, and the peripheral portion of the holder is provided with a vacuum-tightness, and the vacuum-tight seal 85 ensures the air-tightness. The horizontal magnetic field 19 is created as described above.
[0021]
The vacuum vessel 81 may be provided with a gas introduction 84, and after evacuating the inside of the vacuum vessel 81, a desired gas may be introduced to return to atmospheric pressure, and the magnetic field may be swept. Further, the introduction of the gas may be stopped in a negative pressure state before the atmospheric pressure is reached, and the magnetic field may be similarly swept. Also, the magnetic field may be swept by adding moisture to the introduced gas. Alternatively, the magnetic field may be swept at 1 atm by continuously flowing a gas or a gas including moisture into the vacuum vessel without evacuation.
[0022]
FIG. 11 shows another embodiment in which a vacuum vessel and a magnetic field applying means are combined. A permanent magnet 92 is attached to the right end of the tip of the holder 91, and the N pole is on the right side. A vacuum tight seal 85 secures the air tightness with the vacuum vessel 81 around the circumference of the holder 91, and the operation means 38 enables the operation in the left-right direction while keeping the air tightness. The opposing permanent magnet has an S pole on the left side, and the strength of the magnetic field 99 is automatically swept by changing the distance between the magnets.
[0023]
FIG. 12 shows another embodiment in which a vacuum vessel and a magnetic field applying means are combined. The magnitude of the magnetic field 19 can be changed by changing the distance between the N pole and the S pole by placing a permanent magnet on the outside (atmosphere side) of the vacuum vessel 81 and moving it in the left-right direction with the operating means 38. The magnetic field can be automatically swept. An electromagnet (coil) may be used instead of the permanent magnet.
[0024]
FIG. 13 shows another embodiment in which heating / cooling means and magnetic field applying means are combined. As shown in FIG. 13A, the sample 9 is installed on the heating / cooling means 111, and the heating / cooling means 111 is installed on the sample moving means 11. The heating / cooling means 111 has a built-in heater and can heat the sample 9. The heating / cooling means 111 is connected to the cooling supply means 113 via the heat conducting means 112. The heat conduction means is a flexible metal foil such as copper foil or silver foil. The cooling supply means 113 has a space for storing a refrigerant such as liquid nitrogen therein and serves as a cooling supply source. When the cooling supply means 113 is cooled, the heating / cooling means 111 is cooled via the heat conduction means 112. Further, by adjusting the output of the heater built in the heating / cooling means while cooling the heating / cooling means with the cooling supply means, the temperature can be controlled to any temperature from cooling to heating. The magnetic field can be automatically swept by setting the sample 9 to a desired temperature. FIG. 13B shows an embodiment in which the change in the electrical resistance of the sample is automatically displayed by automatically sweeping the magnetic field with the sample at a desired temperature.
[0025]
FIG. 14 shows another embodiment of the present invention. This is an example of vertical magnetic field application in addition to horizontal magnetic field application. The holder 121 is, for example, a cylindrical part, and a coil 122 is wound around the outer periphery. When a current is passed through the coil 122, a perpendicular magnetic field 123 is applied to the sample 9. Also in this embodiment, the magnetic field may be automatically swept to automatically display the change in the electrical characteristics of the sample with respect to the change in the vertical magnetic field.
[0026]
FIG. 15 shows another embodiment of the present invention. This is an example of applying a magnetic field in an oblique direction, not horizontal or vertical with respect to the sample surface. The permanent magnet 35 is attached to the operating means 38, and the strength of the magnetic field 19 can be changed by changing the distance from the opposing permanent magnet. The operation means 38 is attached to another operation means 131. When the operation means 131 is rotated after the distance between the opposing permanent magnets is determined by the operation means 38, the angle of oblique incidence with respect to the sample surface can be changed. By continuously changing the operation amount (angle), it is possible to automatically display a change in the electrical characteristic amount of the sample. An electromagnet (coil) may be used instead of the permanent magnet.
[0027]
FIG. 16 shows another embodiment of the present invention. Although the cantilever (plate spring) type has been described as the probe, the probe may be an STM probe used in a scanning tunneling microscope. A probe 141 having a probe 142 at the tip is attached to the probe mounting portion 3, and a voltage is applied to the sample 9 by voltage applying means. When the portion 10 that changes due to the magnetic field application of the sample 9 is brought closer to the probe 142 by the sample moving means 11, a tunnel current flows between the probe 142 and the sample immediately before contact, and the sample moves when the constant current value is reached. Stop approaching by means. Alternatively, the approaching operation may be stopped while the probe is in contact with the sample surface. Next, when the direction and the magnitude of the current flowing through the coil 16 are automatically swept by the operating means 18, the magnitude or direction (angle) of the magnetic field 19 is automatically changed. Also good.
[0028]
【The invention's effect】
The present invention is implemented in the form as described above, and has the following effects.
[0029]
In a scanning probe microscope comprising a probe having a microprobe at the tip, a means for detecting displacement of the probe, and a sample moving means for moving the sample, and measuring the surface irregularity shape of the sample or the surface physical properties of the sample, The sample has a means for applying a magnetic field around the sample and a means for detecting the current flowing between the probe and the sample. The probe is brought into contact with a fixed point on the sample measurement surface, and the operation amount of the magnetic field application is automatically changed. It has the effect of automatically displaying changes in electrical characteristics. In addition, the measurement position is fixed, and the measurement time can be shortened.
[Brief description of the drawings]
FIG. 1A is a schematic diagram of the present invention in which a horizontal magnetic field is applied using a magnetic coil as a magnetic field applying means, and FIG. 1B is a diagram of the present invention that automatically displays an operation amount of a magnetic field application and a change in electrical characteristics of a sample Pattern diagram.
FIG. 2A is a schematic diagram of the present invention automatically displayed as a current value detected as an electrical characteristic of a sample as a current value operated as a manipulated variable for applying a magnetic field, and FIG. 2B is a manipulated variable for applying a magnetic field. The schematic diagram of this invention displayed automatically as an electrical resistance from the electric current value detected as an electrical property of a sample as the strength of the magnetic field as a result of the operation.
FIG. 3A is a schematic diagram of the present invention in which a horizontal magnetic field is applied using a permanent magnet as a magnetic field applying means, and electrical characteristics are measured, and FIG. 3B is a distance between permanent magnets as an operation amount of magnetic field application. The schematic diagram of this invention which displays automatically the electrical property change of a sample.
FIG. 4 is a schematic diagram of the present invention in which the direction (angle) of a horizontal magnetic field in a sample surface is made variable by a synthetic magnetic field by a plurality of magnetic field applying means.
FIG. 5 is a schematic diagram of the present invention illustrating the magnitude of each magnetic field and the direction of the combined horizontal magnetic field using a plurality of magnetic field applying means. FIG. 6 is a diagram illustrating the magnitude of each magnetic field combined with a plurality of magnetic field applying means. The schematic diagram of this invention which makes a vector angle as an operation amount from an angle from the direction of a horizontal magnetic field, and displays automatically the electrical property change of a sample.
FIG. 7 is another schematic diagram of the present invention in which the direction (angle) of the horizontal magnetic field in the sample surface is made variable by combining the magnetic fields of a plurality of permanent magnets.
FIG. 8 is another schematic diagram of the present invention in which the direction (angle) of the horizontal magnetic field in the sample plane is made variable using a magnetic coil and rotating operation means.
FIG. 9 is another schematic view of the present invention in which the direction (angle) of the horizontal magnetic field in the sample surface is made variable by an operating means that rotates with a permanent magnet.
FIG. 10 is another schematic view of the present invention in a magnetic coil in which the component (holder) of the magnetic field applying means is vacuum-tight.
FIG. 11 is another schematic view of the present invention in a permanent magnet in which the component (holder) of the magnetic field applying means is vacuum-tight.
FIG. 12 is another schematic diagram of the present invention in which the magnetic field applying means is arranged around the vacuum vessel to make the magnetic field strength variable.
FIG. 13A is a schematic diagram of the present invention in which a sample is brought to a desired temperature by heating and cooling means, and a horizontal magnetic field is applied using a magnetic coil, and FIG. 13B is a diagram showing the intensity of the magnetic field for each sample temperature. The schematic diagram of this invention displayed as an electrical resistance change.
FIG. 14 is another schematic view of the present invention in which a magnetic field is applied perpendicularly to the sample surface by a magnetic field applying means.
FIG. 15 is another schematic view of the present invention in which a magnetic field is applied obliquely by a magnetic field applying means.
FIG. 16 is another schematic diagram of the present invention applied to an STM (scanning tunneling microscope) and measuring a change in electrical characteristics of a sample accompanying application of a magnetic field.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1, 141 ... Probe 2, 142 ... Probe 3 ... Probe attachment part 4, 12, 17 ... Lead wire 5 ... Current detection means 7 ... Laser 8 ... Displacement detection means 9 ... Sample 10 ... The part 11 which changes with magnetic field application ... Sample moving means 13 ... Voltage applying means 14, 34, 43, 44, 53 ... Magnetic field applying means 15, 91, 121 ... Holder 16, 122 ... Coils 18, 38, 42, 52, 61, 131 ... Operating means 19, 41 ... Magnetic fields 35, 92 ... Permanent magnets 41, 49, 51, 59, 99, 123 ... Magnetic field 81 ... Vacuum vessel 82 ... Vacuum exhaust means 83 ... Window 84 ... Gas introduction 85 ... Vacuum hermetic seal 111 ... Heating / cooling means 112 ... Heat Conducting means 113 ... cooling supply means

Claims

In a scanning probe microscope comprising a probe having a minute probe at the tip, a means for detecting displacement of the probe, and a sample moving means for moving the sample, and measuring the surface shape of the sample or the surface physical properties of the sample, the sample means for applying a magnetic field around the comprises means for detecting a current flowing between the probe and the sample, the probe is brought into contact with any point on the sample measuring surface, by changing the operation amount of the magnetic field applied automatically, the A scanning probe microscope characterized by automatically displaying a change in electrical characteristics of a sample obtained from a detected current .

The scanning probe microscope according to claim 1, wherein the operation amount of the magnetic field application is a strength of a magnetic field applied to the sample.

The scanning probe microscope according to claim 2, wherein the change of the strength of the magnetic field is performed by changing a value of a current flowing through the magnetic coil.

The scanning probe microscope according to claim 2, wherein the magnetic application means is a magnet, and the change of the strength of the magnetic field is performed by changing a distance between the magnet and the sample.

The scanning probe microscope according to claim 1, wherein the operation amount of the magnetic field application is a magnetic field application direction in the sample surface .

6. The scanning probe microscope according to claim 5, wherein the magnetic field applying means comprises a plurality of magnets, and the change of the magnetic field application direction in the sample surface is performed by synthesizing the magnetic fields by arranging the plurality of magnets around the sample. .

6. The scanning probe microscope according to claim 5, wherein the change of the direction of application of the magnetic field in the sample plane has a magnet and means for rotating the magnet, and is performed at a rotation angle of the magnet.

The scanning probe microscope according to any one of claims 1 to 6, further comprising a vacuum vessel and an exhaust unit, wherein a holder portion of a part constituting the magnet is provided with a vacuum tightness.

8. A scanning probe microscope according to claim 7, wherein said scanning probe microscope has a vacuum container and an exhaust means, and means for rotating a magnet and a part holding the magnet is disposed around the vacuum container.

The scanning probe microscope according to claim 9, wherein the sample and the cantilever are housed in the vacuum vessel, and the inside of the vacuum vessel is measured at atmospheric pressure.

The scanning probe microscope according to claim 9, wherein the sample and the cantilever are housed in the vacuum vessel and are measured in a vacuum environment.

10. The scanning probe microscope according to claim 9, wherein the sample and the cantilever are housed in the vacuum container, and after the inside of the vacuum container is evacuated, gas replacement is performed and measurement is performed in a gas atmosphere.

The scanning probe microscope according to claim 12, wherein the gas is a gas containing moisture and is measured in a humidity atmosphere having a desired humidity.

The scanning probe microscope according to claim 12, wherein the gas is a reactive gas.

The scanning probe microscope according to any one of claims 1 to 14, further comprising means for heating and cooling the sample, wherein a change in electrical characteristics of the sample is automatically displayed for each sample temperature.