JP4074205B2 - Detection device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention is an object confirmation means for confirming an object that is a foreign substance such as a solvent, dust, and dirt in the detected member, moving along a flat plate-shaped detected member such as a liquid crystal color filter substrate, The present invention relates to a detection apparatus including object height detection means that moves to a position of an object confirmed by the object confirmation means and detects the height of the object.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, there is known an apparatus that detects a foreign object on a substrate surface by illuminating with a CCD camera or the like.
[0003]
Furthermore, conventionally, a contact-type surface roughness meter has been used as the foreign matter height detection means (see, for example, Patent Document 1). Alternatively, a non-contact type air micro sensor or the like is used (for example, see Patent Document 2).
After the foreign matter is confirmed by the foreign matter confirmation means (not shown), the height of the foreign matter is detected by the foreign matter height detection means. The detected height information of the foreign matter is transmitted to, for example, a display unit (not shown), and the operator confirms the height of the foreign matter, or is transmitted to the foreign matter removing unit (not shown) to remove the foreign matter. The part removes the foreign matter based on the height information of the foreign matter.
[0004]
[Patent Document 1]
Japanese Patent Laid-Open No. 10-253818 (page 3, FIG. 1)
[Patent Document 2]
Japanese Patent Laid-Open No. 10-217089 (page 2-3, FIG. 1)
[Patent Document 3]
Japanese Patent Laid-Open No. 10-68618 (page 1-3, FIG. 5)
[0005]
[Problems to be solved by the invention]
However, the contact type surface roughness gauge generally has a point contact with the object to be measured, and in the case of an air microsensor, the height of the foreign matter is based on the back pressure of the jet air against the object to be measured. In some cases, the height of the highest part of the foreign object cannot be measured accurately depending on where the probe contacts the foreign object or depending on the shape of the foreign object.
[0006]
Therefore, in order to eliminate these problems, the foreign object height detection means 51 having a tip portion shaped like the tip portion 4 having a linear portion sufficiently longer than the horizontal width of the foreign material as shown in FIG. A foreign object detection device 52 may be considered. In the foreign object detection device 52 that detects the height of the foreign object by the foreign object height detection unit 2, the tip 4 of the foreign object height detection unit 2 has a shape that makes line contact with the object to be inspected. In the case of tilting as shown in FIG. 5, there is a problem that the height detection of the foreign matter becomes inaccurate, and therefore, the foreign matter height detection unit 2 is fixed after being rotated by adjusting with two adjusting screws 55. Thus, as shown in FIG. 16B, the tip 4 of the foreign object height detection unit 2 needs to be in a horizontal state. In this case, the rotational center around which the foreign object height detection unit 2 rotates is the foreign object height. Since the hard ball 56 positioned above the height detection unit 2 is provided, the position of the tip 4 of the foreign object height detection unit 2 is changed by the length a due to the rotation of the foreign object height detection unit 2. The foreign matter is fixed by the foreign matter confirmation means. After the recognition, even if the foreign object height detection unit 2 moves by a predetermined distance, there is no foreign object at that position, or the end of the foreign object is detected, and the height of the foreign object is accurately detected. could not. At this time, in order to re-detect the height of the foreign matter, the foreign matter height detection unit 2 is fixed after rotating by adjusting the two adjusting screws 55 again, and the foreign matter is detected again. There is a problem that must be performed, and there is still a problem that information on the interval between the foreign matter confirmation means and the foreign matter height detection unit 2 stored in advance is re-stored when the foreign matter cannot be accurately detected.
Note that this problem occurs in a measuring instrument that measures the height of a foreign object or the like with a stylus in addition to the support portion 31 and the tip portion 4 forming an inverted T shape as shown in FIG. The same exists in the technique in which the tip shape of the stylus needle is shaped to have a constant flat straight line width in the scanning direction (see, for example, Patent Document 3).
[0007]
The present invention has been made in view of the above problems, and even if the position of the object height detection means is changed, the position of the tip part in the object height detection unit is not changed. Provided is a detection device that can keep the distance between tip portions of an object confirmation unit and an object height detection unit substantially the same, and can appropriately detect the height of an object by the object height detection unit. For the purpose.
[0008]
[Means for Solving the Problems]
For the above purpose, the present invention detects the height of an object by making a relative movement along the detected member and detecting the height of the object in line contact with the object checking means for checking the object on the detected member. An object height detection unit that moves relative to the position of the object confirmed by the object confirmation unit and detects the height of the object by the object height detection unit Detecting means, wherein the object height detecting unit is rotatable about the tip of the object height detecting unit or the vicinity of the tip, and the object height detecting means A gonio stage having a fixed part that forms a base and a rotating part that rotates with respect to the fixed part around the tip part or the vicinity of the tip part, the height of the object with respect to the rotating part While fixing the detection part, the position of the fixing part is the position of the gonio stage. A sensing device, characterized in that the mountable position apart direction center.
[0009]
According to the present invention, the object height detection unit can rotate around the tip or the vicinity of the tip of the object height detection unit as a rotation center, so the object and the tip of the object height detection unit Even if the position of the object height detection part is rotated to make the angle of the part appropriate, the position of the tip part in the object height detection part does not change, the object confirmation means and the object height detection part It is possible to keep the distance between the front end portions substantially the same, and the object height detection unit can appropriately detect the height of the object.
Furthermore, by positioning the fixed part of the gonio stage away from the center in the width direction of the gonio stage, the object height detection means can be reduced in size and space, and the object can be confirmed with a simple configuration. The distance between the tip of the means and the object height detection unit can be kept substantially the same.
In addition, since the tip of the object height detection unit is in line contact with the object, the height of the object can be set regardless of the shape of the object, compared to the conventional tip that makes point contact with the object. It can be measured accurately.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
A detection device 1 according to an embodiment of the present invention will be described with reference to the drawings.
First, referring to FIG. 1 to FIG. 3, a foreign object (object) height detection unit (electric micro) 2 having a function of detecting the height of a foreign object and outputting height information of the detected foreign object. The method of adjusting the angle of the lower surface 5 of the tip 4 where the tip 4 of the probe 3 contacts the foreign matter will be described.
[0015]
1-3 is a figure which shows the relationship between the angle of the lower surface 5 of the front-end | tip part 4 which contacts a foreign material, and a foreign material height measurement result. This measurement uses a reference projection plate 8 in which a hemispherical projection 7 having a height of 3 μm is formed by etching on the surface of the glass plate 6, and the height of the projection 7 is determined by a foreign object height detection unit provided with the measuring element 3. This is implemented by detecting at 2.
[0016]
As shown in FIG. 1A, when the left side of the lower surface 5 of the tip portion 4 of the probe 3 is inclined upward, the detection unit 2 is moved in the direction of the arrow A at regular intervals, and the position When the height of the protrusion is measured and the measurement is sequentially repeated, the measurement result of the protrusion height becomes large at the measurement position on the left as shown in FIG.
When the same measurement as described above is performed as in FIG. 2A, when the right side of the lower surface 5 of the tip 4 of the probe 3 is inclined upward, as in FIG. This results in a distorted measurement result in which the measurement result of the protrusion height becomes large at the measurement position on the right side.
[0017]
On the other hand, as shown in FIG. 3A, when the lower surface 5 of the tip 4 of the probe 3 is in an appropriate state where it is horizontal, the same measurement as above is performed, as shown in FIG. The measurement results are symmetrical and have a flat central part.
[0018]
Therefore, in order to obtain the measurement result as shown in FIG. 3B by leveling the tip portion 5 of the probe 3, in the case of FIG. 1A, as shown in FIG. 2 needs to be rotated and fixed to the left, and in the case of FIG. 2A, the foreign object height detector 2 needs to be rotated and fixed to the right as shown in FIG.
Therefore, in the case of FIG. 1A or FIG. 2A, the operation of rotating and measuring the foreign object height detection unit 2 is repeated until the measurement result as shown in FIG. 3B is obtained. There was a need.
[0019]
The reason why the lower surface 5 of the distal end portion 4 of the probe 3 must be horizontal is as follows.
That is, as shown in FIG. 6, the tip 4 of the probe 3 in the foreign object height detector 2 moves on the liquid crystal color filter substrate 24 in one direction in the Y-axis direction, and then the tip 4 of the probe 3. Is moved in the X-axis direction by the length portion of the width of the probe, and then moved in the direction opposite to one direction in the Y-axis direction. Then, the length portion of the tip 4 of the probe 3 is also moved in the X-axis direction. The height of the foreign matter on the liquid crystal color filter substrate 24 is detected by repeating the operation of moving the position in the direction and then moving in one direction in the Y-axis direction.
[0020]
At this time, when the tip 4 of the probe 3 comes into contact with the foreign object while the foreign object height detection unit 2 is moving in the Y-axis direction, the tip 4 moves in the Y-axis direction while overcoming the foreign object. The height of the foreign matter is measured by measuring the amount of movement of the tip portion 4 when the portion 4 gets over the foreign matter.
[0021]
If the tip 4 of the probe 3 is in a horizontal state as shown in FIG. 7, an accurate measurement result can be obtained regardless of which part of the lower surface 5 of the tip 4 contacts the foreign matter. However, as shown in FIG. 8, when the tip 4 of the probe 3 is inclined, only one end of the tip 4 of the probe 3 comes into contact with the liquid crystal color filter substrate 24. The end opposite to the one end is in a state of floating from the liquid crystal color filter substrate 24. When the opposite end comes into contact with the foreign matter, the opposite end is originally in a floating state, so that the portion in contact with the liquid crystal color filter substrate 24 has less tip portion 4 than the portion that gets over the foreign matter. Depending on the amount of movement, you can get over a foreign object.
[0022]
As described above, when the tip 4 of the probe 3 is inclined, the height of the foreign matter is smaller than the actual height of the foreign matter depending on which part of the tip 4 is in contact with the foreign matter. It becomes.
For the above reasons, the lower surface 5 of the tip 4 of the probe 3 must be horizontal.
[0023]
With reference to FIG. 9, the detection apparatus 1 by embodiment of this invention is demonstrated.
A base 9 is placed on the floor, and a surface plate 10 is fixed to the base 9.
Two Y-axis guides 11 extending in parallel to the Y-axis direction (direction orthogonal to the paper surface in FIG. 6) are fixed to both ends of the surface plate 10. Each of the two Y-axis guides 11 is provided with two Y-axis sliders 12 slidable along the Y-axis sliding surface 14 by a Y-axis linear motor 60.
[0024]
A rectangular X-axis beam 15 extending in the X-axis direction is fixed over the two Y-axis sliders 12. An X-axis slider 16 is slidably provided on the X-axis beam 15 by an X-axis linear motor (not shown).
[0025]
The X-axis slider 16 includes a CCD camera 17 as a foreign matter confirmation unit 32, a foreign matter height detection unit 33 provided with a probe 3 in the foreign matter height detection unit 2, and a polishing head 18 as a foreign matter removal unit. They are attached as a unit, and each move in the z-axis direction by a moving means (not shown).
Further, the CCD camera 17, the foreign object height detection means 33, and the polishing head 18 move together in the X-axis direction and the Y-axis direction.
[0026]
A rectangular table 23 is fixed to the surface plate 10, and a liquid crystal color filter substrate 24 as a work (detected member) is placed on the table 23.
In the CCD camera 17, the light from the projection illumination unit 19 A attached in the vicinity of the camera 17 and the transmission illumination unit 19 B moving in synchronization with the X-axis slider 16 passes through the filter substrate 24 and passes through the microscope 20. To confirm foreign matter.
[0027]
The foreign object height detection means 33 will be described later.
The polishing head 18 includes a polishing film feed reel 18A and a take-up reel 18B, and the take-up reel 18B is rotated by a motor (not shown). Further, between the polishing film 21 that polishes and removes foreign matters while moving, a pressing portion 22A that presses the polishing film 21 against foreign matters by a driving means 22B that moves linearly, and between the delivery reel 18A and the pressing portion 22A. The idlers 22C and 22D are provided between the pressing portion 22A and the take-up reel 18B and span the polishing film 21.
[0028]
Next, with reference to FIG. 10 and FIG. 11, the foreign substance height detection means 33 in the detection apparatus 1 by embodiment of this invention is demonstrated.
The foreign object height detection means 33 includes a gonio stage 25 and a foreign object height detection unit (electric micro) 2, and the foreign object height detection unit 2 includes a measuring element 3.
[0029]
The gonio stage 25 is a stage (support) that rotates in a direction j that draws an arc, with a point h on the normal line s as a rotation center with respect to the center in the width direction of the stage. The goniometer stage 25 has a curved surface as a fixed surface 27 below, and has a fixed portion 28 serving as a base, and a rotating surface having a curved surface as a rotating surface 29 that rotates relative to the fixed surface 27 in the fixed portion 28. Part 30.
The fixing surface 27 below the fixing portion 28 of the goniostage 25 is a liquid crystal color filter substrate 24 so as to correct the inclination of the tip portion 4 in the longitudinal direction with the center position h of the tip portion 4 in the probe 3 as the rotation center. It is made into the curved surface shape which draws an arc in the surface which is orthogonal to the surface and includes the longitudinal direction of the tip part 4.
[0030]
The position of the rotating unit 30 relative to the fixed unit 28 of the gonio stage 25 is changed manually or electrically by operating a switch (not shown).
The foreign object height detection unit 2 is integrally fixed to the rotating unit 30 of the gonio stage 25.
[0031]
A probe 3 is present at the center of the lower end of the foreign object height detection unit 2. The measuring element 3 has a fixed length so that the lower surface 5 is in line contact with the member to be detected, and is supported integrally with the lower end portion of the support portion 31 and in contact with foreign matter. And a substantially semi-cylindrical tip portion 4 protruding downward.
[0032]
As shown in FIG. 10, the lower surface 5 is preferably horizontal when viewed from the front. However, actually, as shown in FIG. 11A, the lower surface 5 may be inclined with respect to the horizontal direction. In this case, as shown in FIG. 11 (b), the measuring element 3 is fixed by fixing the rotating surface 29 of the rotating portion 30 to the fixing surface 27 of the fixing portion 28 of the goniostage 25 while rotating it. The lower surface 5 of the front end portion 4 can be made horizontal. Moreover, since the rotation center h about which the rotation part 30 of the gonio stage 25 rotates is provided on the extension line of the support part 31 in the tip part 4 of the measuring element 3, the center position of the tip part 4 moves during the rotation. Can be prevented.
[0033]
FIG. 12 is another example showing the probe 3 according to the embodiment of the present invention.
FIG. 12A is a side view showing the probe 3, and FIG. 12B is a front view showing the lower end portion of the probe 3.
In FIG. 10, the tip 3 extends in the horizontal direction with respect to the support 31 and the support 31 and the tip 4 form an inverted T shape, whereas in this embodiment, the support 3 is supported. The portion 31 has a thick bar shape, and the tip portion 4 has a smaller area in the horizontal direction than the support portion 31. In this embodiment as well, the lower surface 5 of the tip 4 has a semi-cylindrical shape similar to that in FIG.
[0034]
FIG. 13 shows another example of the foreign object height detection means 33 according to the embodiment of the present invention.
In this embodiment, the fixed portion 28 and the rotating portion 30 of the gonio stage 25 are provided at a position away from the center in the width direction of the stage, and rotated with respect to the fixed surface 27 of the fixed portion 28 of the gonio stage 25. The rotation surface 29 of the moving part 30 is rotated.
For this reason, compared with the case where the fixed part 28 and the rotating part 30 of the gonio stage 25 are provided at the center in the width direction of the stage, the length of the foreign object height detection means 33 in the normal s direction can be shortened, and the foreign object height detection. The means 33 can be reduced in size and space.
[0035]
FIG. 14 is a diagram illustrating an operation for manually changing the position of the rotation unit 30 with respect to the fixed unit 28 in the foreign object height detection unit 33 according to the embodiment of the present invention.
In FIG. 14, first, by rotating the fixing screw 61, the rotating portion 30 can be rotated with respect to the fixing portion 28 from the state where the fixing screw 61 fixes the rotating portion 30 with respect to the fixing portion 28. Change to state.
Then, by rotating the adjustment screw 62, the position of the rotating unit 30 with respect to the fixed unit 28 is changed. By rotating the adjusting screw 62 clockwise, the rotating part 30 moves rightward, and by rotating the adjusting screw 62 counterclockwise, the rotating part 30 moves leftward. .
After changing the position of the rotating part 30, the fixing screw 61 is fixed to the fixing part 28 by rotating the fixing screw 61 in the direction opposite to the rotation direction.
Thus, the position change of the rotating unit 30 with respect to the fixed unit 28 is completed.
[0036]
Next, the operation of the detection apparatus 1 according to the embodiment of the present invention will be described.
As shown in FIGS. 1 to 3, the reference protrusion plate 8 is placed on the table 23, and the protrusion 3 on the reference protrusion plate 8 is brought into contact with the measuring element 3 in the foreign object height detection unit 2, thereby increasing the protrusion height. And the result confirms whether or not the lower surface 5 of the tip 4 of the probe 3 is horizontal.
[0037]
If the lower surface 5 of the tip portion 4 of the probe 3 is not horizontal, the rotation surface 29 of the rotation portion 30 is set against the fixed surface 27 of the fixing portion 28 of the goniostage 25 as shown in FIG. It fixes in the state rotated, and measures protrusion height again, and confirms whether the lower surface 5 of the front-end | tip part 4 in the measuring element 3 is horizontal. This operation is repeated until it can be confirmed that the lower surface 5 of the tip 4 of the probe 3 is horizontal.
[0038]
At this time, the rotation surface 29 of the rotation part 30 of the goniostage 25 is rotated along the fixed surface 27 of the fixing part 28 with the tip 4 of the measurement element 3 as the rotation center. There is no change in the position of the tip 4.
In this state, the reference projection plate 8 is removed, and the filter substrate 24 as a member to be detected is placed on the table 23.
[0039]
Then, a start button on the operation unit (not shown) is pressed. Then, based on the projection position data confirmed in the previous process (not shown), the foreign matter confirmation means 32 moves to the lower detection position, and illumination by the floodlight illumination unit 19A and the transmission illumination unit 19B is performed. Is called.
Then, the X-axis slider 16 starts to move along the X-axis beam 15 by an X-axis linear motor (not shown), and the Y-axis slider 12 starts to move along the Y-axis guide 11 by the Y-axis linear motor 60. Confirm. Thereby, the foreign substance confirmation means 32 can move in the X-axis direction and the Y-axis direction to confirm the foreign substance. The foreign matter height detection means 33 and the polishing head 18 also move together with the foreign matter confirmation means 32.
[0040]
When the foreign matter is confirmed by the foreign matter confirmation means 32, the foreign matter height detection means 33 moves above the position of the foreign matter. At this time, for example, if the distance between the foreign matter confirmation unit 32 and the tip 4 of the foreign matter height detection unit 33 is set to 300 mm with respect to the X axis direction, the foreign matter height detection unit 33 moves 300 mm in the X axis direction. Will be.
The foreign object height detecting means 33 is moved downward by a moving means (not shown) until the lower surface 5 of the tip 4 of the measuring element 3 comes into contact with the foreign substance, contacts the color filter substrate 24, and then moves to Y by the linear motor 60. By moving in the axial direction, the height of the foreign matter is measured, and the information is transmitted to the polishing head 18.
[0041]
The polishing head 18 is moved above the foreign matter by an X-axis linear motor and a Y-axis linear motor 60 (not shown), and the polishing unit 21 is moved to a predetermined height by the pressing unit 22 according to the transmitted height information of the foreign matter. While being pressed, the polishing unit 21 is moved downward to remove foreign matter.
When the removal of the foreign matter is completed, the pressing unit 22 in the polishing head 18 returns to the initial position and the movement of the polishing unit 21 stops.
Then, the above operation is repeated for the number of foreign objects.
[0042]
According to the detection device 1 according to the embodiment of the present invention, the CCD camera 17 that moves along the filter substrate 24 to check foreign matter on the filter substrate 24 and the foreign matter that contacts the foreign matter and detects the height of the foreign matter. A foreign object height detection means 33 that has a height detection unit 2, moves to the position of the foreign object confirmed by the CCD camera 17, and detects the height of the foreign object by the foreign object height detection unit 2. The height detector 2 can be rotated around the tip 4 or the vicinity of the tip 4 of the probe 3 as a rotation center.
[0043]
As a result, the foreign object height detection unit 2 is fixed in a predetermined rotated state with the tip 4 or the vicinity of the tip 4 of the probe 3 as the rotation center, so that the angle between the foreign object and the lower surface 5 of the tip 4 Even if the position of the foreign object height detection unit 2 is changed in order to properly adjust the distance between the CCD camera 17 and the center part of the tip part 4 of the probe 3, the center position of the tip part 4 of the probe 3 does not change. Can be kept substantially the same, and the height of the foreign matter can be appropriately detected by the foreign matter height detection unit 2.
[0044]
Furthermore, in the present invention, the CCD camera 17 and the foreign object height detection means 33 move together along the filter substrate 24 as a unit, so that complicated control is required when detecting the foreign object height after confirming the foreign object. It is possible to prevent the amount of movement of the foreign object height detecting means 33 from being shifted and to detect the height of the foreign object appropriately.
[0045]
Furthermore, the present invention includes a polishing head 18 that removes the foreign matter whose height is detected by the foreign matter height detection means 33, and the polishing head 18 is integrated with the CCD camera 17 and the foreign matter height detection means 33 as a filter substrate 24. Therefore, when the foreign matter is removed after detecting the height of the foreign matter, the movement amount of the polishing head 18 can be prevented from being shifted without performing complicated control. Can be removed.
[0046]
Further, according to the present invention, the foreign object height detection means 33 includes a goniostage 25 having a rotating part 30 that rotates about the center of the tip end part 4, and the foreign object height detection part 2 with respect to the rotating part 30. Is fixed, the distance between the CCD camera 17 and the center of the tip 4 of the probe 3 can be kept substantially the same with a simple configuration.
[0047]
【The invention's effect】
As described above, according to the present invention, the object height detection unit is rotatable about the tip part or the vicinity of the tip part in the object height detection part, so that the object and the object can be rotated. Even if the position of the object height detection unit is changed to make the angle of the tip part in the height detection unit appropriate, the position of the tip part in the object height detection unit is not changed, and the object confirmation means and the object The distance between the tip portions of the object height detection unit can be kept substantially the same, and the height of the object can be appropriately detected by the object height detection unit.
Furthermore, by positioning the fixed part of the gonio stage away from the center of the gonio stage in the width direction, the object height detection means can be reduced in size and space, and the object can be confirmed with a simple configuration. The distance between the tip of the means and the object height detection unit can be kept substantially the same.
In addition, since the tip of the object height detection unit is in line contact with the object, the height of the object can be set regardless of the shape of the object, compared to the conventional tip that makes point contact with the object. It can be measured accurately.
[Brief description of the drawings]
FIG. 1 is a diagram showing a relationship between an angle of a tip portion of a measuring element and foreign matter according to an embodiment of the present invention.
FIG. 2 is a diagram showing the relationship between the angle of the tip of the probe and the foreign matter according to the embodiment of the present invention.
FIG. 3 is a diagram illustrating a moving direction of a tip portion of the measuring element according to the embodiment of the present invention.
FIG. 4 is a relationship between the angle of the lower surface of the probe and the measurement result of the protrusion height according to the embodiment of the present invention.
FIG. 5 is a relationship between the angle of the lower surface of the measuring element and the measurement result of the protrusion height according to the embodiment of the present invention.
FIG. 6 is a relationship between the angle of the lower surface of the measuring element and the measurement result of the protrusion height according to the embodiment of the present invention.
FIG. 7 is a front view showing a state in which the angle of the lower surface of the probe according to the embodiment of the present invention is adjusted.
FIG. 8 is a front view showing a state in which the angle of the lower surface of the probe according to the embodiment of the present invention is adjusted.
FIG. 9 is an overall view showing a detection device according to an embodiment of the present invention.
FIG. 10 is a front view showing foreign object height detection means according to the embodiment of the present invention.
FIG. 11 is a front view showing foreign object height detection means according to the embodiment of the present invention.
FIG. 12 is a diagram showing another example of the measuring element according to the embodiment of the present invention.
FIG. 13 is a front view showing another example of the foreign object height detection unit according to the embodiment of the present invention.
FIG. 14 is a diagram showing a configuration for changing the position of a foreign object height detection unit in the embodiment of the present invention.
FIG. 15 is a diagram illustrating a foreign object height detection unit according to the prior art.
FIG. 16 is a diagram illustrating a foreign object height detection unit according to the prior art.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Detection apparatus 2 Foreign material height detection part (object height detection part)
3 Measuring Point 4 Tip 5 Lower Surface 17 CCD Camera 18 Polishing Head 19B Transmitted Illumination Unit 20 Microscope 24 Liquid Crystal Color Filter Substrate 25 Goniometer Stage 27 Fixed Surface 28 Fixed Portion 29 Rotating Surface 30 Rotating Portion 32 Foreign Object Confirming Means (Object Confirmation means)
33 Foreign object height detection means (object height detection means)
h Center of rotation

Claims (1)

An object confirmation means for confirming an object in the detected member by relatively moving along the detected member;
An object height detection unit that detects the height of the object in line contact with the object, and moves relative to the position of the object confirmed by the object confirmation means to detect the object height. An object height detecting means for detecting the height of the object by the unit,
The object height detector is rotatable about the tip of the object height detector or the vicinity of the tip as a rotation center ,
The object height detection means includes a goniometer stage having a fixed portion that forms a base and a rotating portion that rotates with respect to the fixed portion with the tip portion or the vicinity of the tip portion as a rotation center, A detection apparatus characterized in that the object height detection unit is fixed to a rotating unit, and the position of the fixing unit can be installed at a position away from the center in the width direction of the gonio stage .

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