JP4075436B2 - Chemical reactor and fuel cell system - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a chemical reaction device and a fuel cell system including the chemical reaction device.
[0002]
[Prior art]
In the technical field of chemical reaction, there is known a chemical reaction device that generates a desired fluid substance from a fluidized mixed substance by a chemical reaction (catalytic reaction) by a catalyst provided in a flow path. Some of such conventional chemical reaction apparatuses have micron-order or millimeter-order flow paths formed on a silicon substrate using microfabrication techniques accumulated in semiconductor manufacturing techniques such as semiconductor integrated circuits.
[0003]
FIG. 12 shows a transmission plan view of an example of such a conventional chemical reaction apparatus, and FIG. 13 shows a cross-sectional view along the line BB. This chemical reaction apparatus includes a silicon substrate 1. On one surface of the silicon substrate 1, a meandering minute flow path 2 is formed by using a fine processing technique accumulated in a semiconductor manufacturing technique. A catalyst layer 3 is provided on the inner wall surface of the flow path 2.
[0004]
A glass plate 4 serving as a lid is bonded to one surface of the silicon substrate 1. An inflow port 5 and an outflow port 6 are provided at two predetermined positions corresponding to both ends of the flow path 2 of the glass plate 4. A meandering thin film heater 7 is provided on the other surface of the silicon substrate 1. The thin-film heater 7 is for supplying predetermined thermal energy to the catalyst layer 3 in the flow path 2 during the chemical reaction when the chemical reaction (catalytic reaction) in this chemical reaction apparatus involves an endothermic reaction under a predetermined thermal condition. It is.
[0005]
Next, a usage example of the chemical reaction apparatus having the above configuration will be described. For example, in a fuel cell system using a fuel reforming type fuel cell whose research and development has been remarkable for practical use in recent years, it is obtained by evaporating (vaporizing), for example, an aqueous methanol solution using the chemical reaction device having the above configuration. Fuel gas for power generation (CH_ThreeOH + H₂O) may generate hydrogen and supply it to the fuel cell.
[0006]
That is, in the state where the flow path 2 is heated to a predetermined temperature by the heat generated by the thin film heater 7, the power generating fuel gas (CH_ThreeOH + H₂When O) is supplied into the flow path 2 via the inlet 5, an endothermic reaction is generated by the catalyst layer 3 in the flow path 2 to generate hydrogen and carbon dioxide as a by-product. If carbon dioxide is separated from hydrogen and removed from the product, only hydrogen can be generated, and this can be supplied to the fuel cell to generate power.
[0007]
[Problems to be solved by the invention]
By the way, in the said conventional chemical reaction apparatus, since electric power was supplied to the thin film heater 7 and it was made to heat | fever-generate and the inside of the flow path 2 was heated, there existed a problem that comparatively big electric power was required for heating. Further, since the thin film heater 7 is provided on the other surface side of the silicon substrate 1, heat energy is supplied to the catalyst layer 3 in the flow path 2 through the silicon substrate 1 and is also radiated to the surroundings. There was a problem that energy loss was large and energy utilization efficiency was poor.
Therefore, the present invention provides a chemical reaction apparatus that can reduce energy required for heating the inside of a predetermined flow path, reduce heat energy loss, and improve energy use efficiency. Objective.
[0008]
[Means for Solving the Problems]
  The invention according to claim 1 is provided between the first substrate, the second substrate and the third substrate bonded to one surface and the other surface of the first substrate, and the first substrate and the second substrate, respectively. A small first flow path provided, a small second flow path provided between the first substrate and the third substrate,A reaction catalyst layer provided in at least a part of the first flow path;A combustion catalyst layer provided in at least a part of the second flow path,An inlet provided at a location corresponding to one end of the first flow path of the second substrate; an outlet provided at a location corresponding to the other end of the first flow path of the second substrate; An inlet provided at a location corresponding to one end of the second flow path of the third substrate, and an outlet provided at a location corresponding to the other end of the second flow path of the third substrate. And the second substrate has an inflow port corresponding to the position of the outflow port of the third substrate in the third substrate, and the outflow port of the second substrate has So as to correspond to the position of the inlet of the third substrate in the third substrate;A first fluid is supplied to the first flow path, a combustion fluid is supplied to the second flow path, and the combustion fluid supplied into the second flow path is burned on the combustion catalyst layer. It burns by reaction and the inside of the first flow path is heated by the heat energy generated by the combustion.The first fluid is supplied to the inlet of the second substrate, and the second fluid containing oxygen flows out of the inlet of the third substrate and the outlet of the second substrate. A third fluid is supplied by separating and removing hydrogen from the fluid.It is characterized by this.
  Claim2The invention described in claim1In the invention described inAn inlet provided at a location corresponding to one end of the first flow path of the second substrate; an outlet provided at a location corresponding to the other end of the first flow path of the second substrate; An inlet provided at a location corresponding to one end of the second flow path of the third substrate, and an outlet provided at a location corresponding to the other end of the second flow path of the third substrate. And the second substrate has an inflow port corresponding to the position of the outflow port of the third substrate in the third substrate, and the outflow port of the second substrate has So as to correspond to the position of the inlet of the third substrate in the third substrate;A separation membrane that selectively permeates hydrogen, provided between the other end of the first flow path and the outlet of the second substrate; the other end of the first flow path; and the second flow path A communication hole provided in the first substrate between the first substrate, the first fluid is supplied to the inlet of the second substrate, and oxygen is contained in the inlet of the third substrate. A second fluid is supplied, and hydrogen is separated and removed from the fluid flowing out from the other end of the first flow path into the communication hole.LastThe third fluid is supplied.
  Claim3The invention described inA first substrate, a second substrate and a third substrate bonded to one surface and the other surface of the first substrate, respectively, and a minute first flow path provided between the first substrate and the second substrate A minute second flow path provided between the first substrate and the third substrate, a reaction catalyst layer provided in at least a part of the first flow path, and the second flow path A combustion catalyst layer provided on at least a part of the second substrate, an inlet provided at a position corresponding to one end of the first flow path of the second substrate, and the second flow of the third substrate. An inflow port provided at a location corresponding to one end of the path, and an outflow port provided at a location corresponding to the other end of the second flow path of the third substrate, An inflow port is provided in the second substrate so as to correspond to the position of the outflow port of the third substrate in the third substrate, and the first flow path is provided in the first channel. The combustion fluid is supplied to the second flow path, and the combustion fluid supplied into the second flow path is burned by a combustion reaction on the combustion catalyst layer, The inside of the first flow path is heated with the generated thermal energy,A communication hole provided in the first substrate between the other end portion of the first flow path and one end portion of the second flow path; and the first fluid is provided at an inlet of the second substrate. Is supplied, a fluid flowing out from the other end of the first flow path is supplied to the communication hole, and a second fluid containing oxygen is supplied to the inlet of the third substrate. To do.
  Claim4The invention described inA first substrate, a second substrate and a third substrate bonded to one surface and the other surface of the first substrate, respectively, and a minute first flow path provided between the first substrate and the second substrate A minute second flow path provided between the first substrate and the third substrate, and the first substrate One end of the first flow path of the second substrate, comprising: a reaction catalyst layer provided in at least part of the first flow path; and a combustion catalyst layer provided in at least part of the second flow path. An inlet provided at a location corresponding to the portion, an outlet provided at a location corresponding to the other end of the first flow path of the second substrate, and a second flow path of the third substrate. An outlet provided at a location corresponding to the other end, and the second substrate inlet corresponds to the position of the third substrate outlet on the third substrate. The first fluid is supplied to the first flow path, the combustion fluid is supplied to the second flow path, and the combustion fluid supplied into the second flow path is burned. Combusting by a combustion reaction on the catalyst layer, heating the inside of the first flow path with the heat energy generated by the combustion,A separation membrane that selectively permeates hydrogen, provided between the other end of the first flow path and the outlet of the second substrate; the other end of the first flow path; and the second flow path A communication hole provided in the first substrate between the first substrate and the first fluid at an inlet of the second substrate.And a second fluid containing oxygenAnd a third fluid from which hydrogen is separated and removed from the fluid flowing out from the other end of the first channel through the communication hole is supplied to one end of the second channel. It is characterized by.
  Claim5The invention described in claim1-4In the invention according to any one of the above, the number of the first substrates is one.
  Claim6The invention described in claim5The first flow path is provided on a surface of the second substrate facing the first substrate, and the second flow path is provided on a surface of the third substrate facing the first substrate. It is characterized by being.
  Claim7The invention described in claim1-4In any one of the inventions, the first substrate is composed of two stacked substrates.
  Claim8The invention described in claim7The first flow path is provided on a surface of the first substrate facing the second substrate, and the second flow path is provided on a surface of the first substrate facing the third substrate. It is characterized by being.
  Claim9The invention described in claim 18In the invention described in any of the above,At least part of the first flow pathReforming catalystHaveThe hydrogen is purified by reforming the first fluid in the first flow path.
  Claim10The invention described in claim 18In the invention described in any of the above,At least part of the first flow pathSelective oxidation catalystHaveIn the first fluidincludeCarbon monoxide is carbon dioxide in the first flow path.OxidizedIt is characterized by doing.
  Claim11The invention described in claim9And a fuel cell that generates electric power by reacting hydrogen and oxygen generated by the chemical reaction device.
  And according to this invention, the combustion fluid supplied in the 2nd flow path provided in the other surface side of the 1st board | substrate is burned by a combustion reaction on a combustion catalyst, and the thermal energy generated by this combustion is used. Since the inside of the first flow path provided on the one surface side of the first substrate is heated, it is not necessary to supply electric power to heat the first flow path. In addition, the third substrate bonded to the other surface of the first substrate to substantially form the second flow path can suppress the diffusion of thermal energy generated in the second flow path, and thus Loss of heat energy when heating the inside of one flow path can be reduced. Furthermore, this chemical reaction apparatus can be applied well to a fuel evaporation section, a reforming section, or a carbon monoxide removing section in a fuel cell system using a fuel reforming type fuel cell. The energy required for heating can be reduced, and the loss of thermal energy can be reduced, so that the energy use efficiency related to the power generation operation can be improved, and the size can be reduced.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 shows a transmission plan view of a chemical reaction apparatus as one embodiment of the present invention, and FIG. 2 shows a cross-sectional view along the line AA. This chemical reaction apparatus includes a main silicon substrate 11 and a combustion silicon substrate 12. The two silicon substrates 11 and 12 are bonded via an adhesive (not shown), but may simply be in close contact. The dimensions of the silicon substrates 11 and 12 are, for example, a length of about 15 to 35 mm, a width of about 10 to 25 mm, and a thickness of about 0.4 to 1.0 mm.
[0010]
On one surface of the main silicon substrate 11 and the other surface of the combustion silicon substrate 12, meandering minute flow paths 13 and 14 are formed using the fine processing technology accumulated in the semiconductor manufacturing technology. The dimensions of both the flow paths 13 and 14 are, for example, a width of about 0.2 to 0.8 mm, a depth of about 0.2 to 0.6 mm, and a total length of about 30 to 1000 mm.
[0011]
A reaction catalyst layer 15 is provided on the inner wall surface of the flow path 13 of the main silicon substrate 11. The reaction catalyst layer 15 may be provided on the entire inner wall surface of the flow path 13 or may be provided partially. A combustion catalyst layer 16 is provided on the inner wall surface of the flow path 14 of the combustion silicon substrate 12. The combustion catalyst layer 16 may be provided on the entire inner wall surface of the flow path 14 or may be provided partially. Here, the combustion catalyst layer 16 is made of, for example, Pt, Au, Ag, or the like.
[0012]
On one surface of the main silicon substrate 11 and the other surface of the combustion silicon substrate 12, a main glass substrate 17 and a combustion glass substrate 18 each having a thickness of about 0.7 mm are bonded by anodic bonding.
[0013]
Here, as a representative, an anodic bonding process for bonding the main glass substrate 17 to one surface of the main silicon substrate 11 will be described. A main glass substrate 17 is superposed on one surface of the main silicon substrate 11, and the main silicon substrate 11 side is used as an anode, and the main glass substrate 17 side is used as a cathode. Then, with the main silicon substrate 11 and the main glass substrate 17 heated to about 400 to 600 ° C., a DC voltage of about 1 kV is applied between the two electrodes.
[0014]
Then, cations that are impurities in the main glass substrate 17 move away from the main silicon substrate 11, and a layer having a high oxygen ion concentration appears at the interface of the main glass substrate 17 on the main silicon substrate 11 side. Then, silicon atoms at the interface on the main glass substrate 17 side of the main silicon substrate 11 and oxygen ions on the interface on the main silicon substrate 11 side of the main glass substrate 17 are combined to obtain a strong bonding interface.
[0015]
In this case, the main silicon substrate 11 and the main glass substrate 17 are heated to about 400 to 600 ° C. and a DC voltage of about 1 kV is applied between the two electrodes because the cations that are impurities in the main glass substrate 17 are the main silicon. This is to increase the moving speed in the direction away from the substrate 11.
[0016]
An inlet 19 and an outlet 20 are provided at two predetermined locations corresponding to both ends of the flow path 13 of the main glass substrate 17. An inlet 21 and an outlet 22 are provided at two predetermined locations corresponding to both ends of the flow path 14 of the glass substrate 18 for combustion. In this case, the arrangement of the inlet 19 and outlet 20 of the main glass substrate 17 and the arrangement of the inlet 21 and outlet 22 of the combustion glass substrate 18 are opposite to each other. Here, although both the flow paths 13 and 14 correspond planarly in FIG. 1, it does not need to correspond, for example, as shown in FIG. It is sufficient that the two portions overlap in a plane.
[0017]
Next, the case where the chemical reaction apparatus according to the present invention is applied to a fuel cell system using a fuel reforming type fuel cell will be described. FIG. 4 shows a block diagram of the main part of the fuel cell system 30. The fuel cell system 30 includes a power generation fuel section 31, a combustion fluid section 32, a fuel evaporation section 33, a reforming section 34, a carbon monoxide removal section 35, a power generation section 36, a charging section 37, and the like.
[0018]
The power generation fuel unit 31 includes a fuel pack in which power generation fuel (for example, aqueous methanol solution) is sealed, and supplies the power generation fuel to the fuel evaporation unit 33. The combustion fluid section 32 is formed of a cylinder filled with a combustion gas (for example, hydrogen gas), and supplies the combustion gas to the fuel evaporation section 33, the reforming section 34, and the carbon monoxide removal section 35. As will be described later, a part of the gas based on the power generation fuel may be used as the combustion gas so that the combustion fluid portion 32 is not provided.
[0019]
The fuel evaporating unit 33 has a structure as shown in FIGS. 1 and 2 as an example. However, in this case, the reaction catalyst layer 15 is not provided in the flow path 13 of the main silicon substrate 11. In the fuel evaporation section 33, first, a combustion fluid composed of combustion gas from the combustion fluid section 32 and oxygen (air) (second fluid) taken in from the atmosphere via a check valve is burned. When supplied into the flow path 14 of the combustion silicon substrate 12 through the inlet 21 of the glass substrate 18, the supplied combustion fluid burns on the fuel catalyst layer 16 by a combustion reaction, Thermal energy is generated. Combustion gas is discharged into the atmosphere from the outlet 22 of the glass substrate 18 for combustion.
[0020]
Next, in the fuel evaporation section 33, the power generation fuel (first fluid, for example, aqueous methanol solution) from the power generation fuel section 31 passes through the inlet 19 of the main glass substrate 17 in the flow path 13 of the main silicon substrate 11. When a small amount is supplied, the heat energy generated in the flow path 14 of the combustion silicon substrate 13 is received in the flow path 13 to evaporate (vaporize) the power generation fuel, and the power generation fuel is vaporized. Generated power generation gas (for example, when the power generation fuel is an aqueous methanol solution, CH_ThreeOH + H₂O) flows out from the outlet 20 of the main glass substrate 17.
[0021]
Thus, in the fuel evaporation section 33, the combustion gas and oxygen supplied into the flow path 14 of the combustion silicon substrate 12 are burned by the combustion reaction on the combustion catalyst 16, and the main energy is generated by the heat energy generated by this combustion. Since the inside of the flow path 13 of the silicon substrate 11 is heated, a heater for heating the flow path 13 is not provided, and it is not necessary to supply electric power for heating. Further, the combustion glass substrate 18 bonded to the other surface of the combustion silicon substrate 12 can prevent diffusion of thermal energy generated in the flow path 14 to some extent. Therefore, the loss of heat energy when heating the flow path 13 of the main silicon substrate 11 can be reduced. The same applies to the following reformer 34 and carbon monoxide remover 35. As a result, it is possible to improve the utilization efficiency of energy related to the power generation operation and reduce the size.
[0022]
Next, the fuel gas for power generation (CH_ThreeOH + H₂O) is supplied to the reforming section 34. In this case, the reforming part 34 also has a structure as shown in FIGS. 1 and 2 as an example. However, in this case, a reaction catalyst layer 15 is provided in the flow path 13 of the main silicon substrate 11, and the reaction catalyst layer 15 is, for example, Cu, ZnO, Al₂O_ThreeIt consists of reforming catalysts such as. In the reforming unit 34, first, as in the above case, the combustion silicon substrate 12 is supplied by supplying the combustion gas from the combustion fluid unit 32 and the oxygen taken in from the atmosphere through the check valve. Thermal energy is generated in the flow path 14, and the combustion gas is released into the atmosphere from the outlet 22 of the glass substrate 18 for combustion.
[0023]
Next, in the reforming unit 34, the power generation fuel gas (CH from the fuel evaporation unit 33)_ThreeOH + H₂When O) is supplied into the flow path 13 of the main silicon substrate 11 through the inlet 19 of the main glass substrate 17, the thermal energy generated in the flow path 14 of the combustion silicon substrate 12 in the flow path 13. To generate an endothermic reaction as shown in the following formula (1) to generate hydrogen and by-product carbon dioxide.
CH_ThreeOH + H₂O → 3H₂+ CO₂...... (1)
[0024]
Water on the left side of the above formula (1) (H₂O) may be contained in the fuel of the power generation fuel unit 31 at the initial stage of the reaction, but recovers water generated by the power generation of the power generation unit 36 described later and supplies it to the reforming unit 34. It is possible. Water (H on the left side of the above formula (1) during power generation by the power generation unit 36₂The supply source of O) may be only the power generation unit 36, the power generation unit 36 and the power generation fuel unit 31, or only the power generation fuel unit 31. At this time, although it is a small amount, carbon monoxide may be generated in the reforming unit 34.
[0025]
Then, the product (hydrogen, carbon dioxide) and a small amount of carbon monoxide on the right side of the formula (1) flow out from the outlet 20 of the main glass substrate 17 of the reforming unit 34. Of the products flowing out from the outlet 20 of the main glass substrate 17 of the reforming unit 34, hydrogen and carbon monoxide in a vaporized state are supplied to the carbon monoxide removing unit 35, and carbon dioxide is separated into the atmosphere. Released.
[0026]
Next, the carbon monoxide removing unit 35 has a structure as shown in FIGS. 1 and 2 as an example. However, in this case, the reaction catalyst layer 15 is made of, for example, Pt, Al₂O_ThreeIt consists of a selective oxidation catalyst. Then, in the carbon monoxide removal unit 35, as in the case described above, combustion silicon is supplied by supplying the combustion gas from the combustion fluid unit 32 and oxygen taken in from the atmosphere via the check valve. Thermal energy is generated in the flow path 14 of the substrate 12, and the combustion gas is released into the atmosphere from the outlet 22 of the glass substrate 18 for combustion.
[0027]
Next, in the carbon monoxide removal unit 35, vaporized hydrogen and carbon monoxide from the reforming unit 34 are supplied into the flow path 13 of the main silicon substrate 11 through the inlet 19 of the main glass substrate 17. In response to the supply of thermal energy generated in the flow path 14 of the combustion silicon substrate 12, carbon monoxide and water react among the hydrogen, carbon monoxide, and water supplied in the flow path 13. As shown in the following formula (2), hydrogen and by-product carbon dioxide are generated.
CO + H₂O → H₂+ CO₂(2)
[0028]
Water on the left side of the above formula (2) (H₂O) may be contained in the fuel of the power generation fuel unit 31 at the initial stage of the reaction, but the water generated by the power generation of the power generation unit 36 is recovered and the carbon monoxide removal unit 35 is supplied. Is possible. Further, the water supply source in the left side of the reaction formula (2) in the carbon monoxide removal unit 35 may be only the power generation unit 36, the power generation unit 36 and the power generation fuel unit 31, or only the power generation fuel unit 31. Good.
[0029]
And most of the fluid finally reaching the outlet 20 of the main glass substrate 17 of the carbon monoxide removing section 35 is hydrogen and carbon dioxide. In addition, when a trace amount of carbon monoxide is contained in the fluid reaching the outlet 20 of the main glass substrate 17 of the carbon monoxide removal unit 35, the remaining carbon monoxide is removed from the atmosphere through a check valve. By contacting with the incorporated oxygen, as shown in the following formula (3), carbon dioxide is generated, and carbon monoxide is surely removed.
CO + (1/2) O₂→ CO₂...... (3)
[0030]
The product after the series of reactions is composed of hydrogen and carbon dioxide (including a trace amount of water in some cases). Among these products, carbon dioxide is separated from hydrogen and released into the atmosphere. Accordingly, only hydrogen is supplied from the carbon monoxide removal unit 35 to the power generation unit 36. Note that the carbon monoxide removal unit 35 may be provided between the fuel evaporation unit 33 and the reforming unit 34.
[0031]
Next, as shown in FIG. 5, the power generation unit 36 is composed of a known solid polymer fuel cell. That is, the power generation unit 36 includes a cathode 41 made of a carbon electrode to which a catalyst such as Pt and C is attached, an anode 42 made of a carbon electrode to which a catalyst such as Pt, Ru, and C is attached, and a cathode 41 and an anode 42. A film-like ion conductive film 43 interposed between and a power supply to a charging unit 37 including a secondary battery or a capacitor provided between the cathode 41 and the anode 42. To do.
[0032]
In this case, a space 44 is provided outside the cathode 41. Hydrogen is supplied from the carbon monoxide removing unit 35 into the space 44 and hydrogen is supplied to the cathode 41. A space 45 is provided outside the anode 42. Oxygen taken in from the atmosphere through the check valve is supplied into the space 45 and oxygen is supplied to the anode 42.
[0033]
On the cathode 41 side, as shown in the following formula (4), electrons (e^-) Separated hydrogen ions (protons; H⁺) Are generated and pass through the ion conductive film 43 to the anode 42 side, and electrons (e^-) Is taken out and supplied to the charging unit 37.
3H₂→ 6H⁺+ 6e^-...... (4)
[0034]
On the other hand, on the anode 42 side, as shown in the following formula (5), the electrons (e^-) And hydrogen ions (H⁺) And oxygen react to produce by-product water.
6H⁺+ (3/2) O₂+ 6e^-→ 3H₂O ...... (5)
[0035]
The series of electrochemical reactions as described above (formula (4) and formula (5)) proceed in a relatively low temperature environment of about room temperature to about 80 ° C., and by-products other than electric power are basically water. It becomes only. The electric power generated by the power generation unit 36 is supplied to the charging unit 37, whereby the charging unit 37 is charged.
[0036]
Water as a by-product generated in the power generation unit 36 is recovered. In this case, as described above, if at least a part of the water generated by the power generation unit 36 is supplied to the reforming unit 34, the amount of water initially sealed in the power generation fuel unit 31 can be reduced. In addition, the amount of recovered water can be reduced.
[0037]
By the way, the fuel applied to the fuel cell of the fuel reforming method currently being researched and developed is at least a liquid fuel, a liquefied fuel or a gaseous fuel containing hydrogen element, Any fuel can be used as long as it can generate electric energy with a relatively high energy conversion efficiency. In addition to the above methanol, alcohol-based liquid fuels such as ethanol and butanol, dimethyl ether, isobutane, and natural gas (CNG) It is possible to satisfactorily apply liquid fuel made of hydrocarbons vaporized at room temperature and normal pressure, such as gas fuel such as hydrogen gas.
[0038]
Next, still another first to sixth examples of the reforming unit 34 by the chemical reaction device according to the present invention will be described. FIG. 6 is a sectional view similar to FIG. 2, showing still another first example of the reforming section 34 according to the present invention. In this example, power generation fuel gas (for example, CH_ThreeOH + H₂When O) contains a combustion gas (for example, hydrogen), the power generation fuel gas is supplied to the inlet 19 of the main glass substrate 17 and also to the inlet 21 of the combustion glass substrate 18. Fuel gas and oxygen taken in from the atmosphere through a check valve are supplied. In such a case, it is not necessary to prepare the fuel gas section 32 separately.
[0039]
Next, FIG. 7 is a sectional view similar to FIG. 2 showing still another second example of the reforming section 34 according to the present invention. In this example, when the separation unit 51 is provided outside and the power generation product discharged from the outlet 20 of the main glass substrate 17 contains combustible components (for example, unreacted power generation fuel), The power generation product is supplied to the separation unit 51 and separated into a power generation product (hydrogen) to be taken out and a combustible component, and the separated combustible component is introduced into the inlet 21 of the glass substrate 18 for combustion. And oxygen taken in from the atmosphere through a check valve.
[0040]
In this case, as a separation method, if any of the power generation product to be taken out and combustible components is liquefied at room temperature or higher and there is a difference between the boiling points, use the liquefaction separation method. Can do. There is also a method of separation with a separation membrane such as a selectively permeable membrane such as a Pb membrane that selectively permeates H2.
[0041]
Next, FIG. 8 is a sectional view similar to FIG. 2 showing still another third example of the reforming section 34 according to the present invention. In this example, a separation membrane 53 is provided on the silicon substrate 17 side portion of the outlet 20 of the flow path 13 of the main silicon substrate 11, and the inlet 21 of the outlet 14 and the flow path 14 of the combustion silicon substrate 12. Communication holes 52 are provided in the silicon substrates 11 and 12 between the two. The separation membrane 53 is made of, for example, a Pb membrane that selectively transmits H2.
[0042]
In this example, in the portion of the outlet 20 of the flow path 13 of the main silicon substrate 11, hydrogen out of the power generation product passes through the separation membrane 53 and flows out from the outlet 20. On the other hand, components other than hydrogen in the power generation product are introduced into the communication hole 52 and introduced into the inlet 21 of the flow path 14 of the combustion silicon substrate 12 to check valves and combustion from the atmosphere. It is mixed with oxygen taken in through the inlet 21 of the glass substrate 18. That is, this configuration substantially substitutes the separation part 51 in FIG. 7 with the separation membrane 53. In this case, the separation part 51 shown in FIG. 7 is not required, and thus the apparatus is simplified and miniaturized. be able to.
[0043]
Next, FIG. 9 is a sectional view similar to FIG. 2, showing still another fourth example of the reforming section 34 according to the present invention. In this example, a communication hole 52 is provided between the outlet 20 of the flow path 13 of the main silicon substrate 11 and the inlet 21 of the flow path 14 of the combustion silicon substrate 12 as in FIG. The outlet 20 and the separation membrane 53 of the glass substrate 17 are not provided. In this example, the power generation product is introduced from the flow path 13 of the main silicon substrate 11 into the inlet 21 of the flow path 14 of the combustion glass substrate 18 through the communication hole 52, and the power generation product is When combustible components (for example, unreacted power generation fuel) are included, a part of the power generation product and the atmosphere are taken in through the check valve and the inlet 21 of the combustion glass substrate 18. Oxygen thus burned by the combustion reaction on the fuel catalyst layer 16, and the power generation product and the combustion gas flow out from the outlet 22 of the combustion glass substrate 18. At least the combustion gas of the effluent fluid is separated and released into the atmosphere. Also in this case, the apparatus can be simplified and downsized as compared with the configuration of FIG.
[0044]
Next, FIG. 10 is a sectional view similar to FIG. 2, showing still another fifth example of the reforming section 34 according to the present invention. In this example, the separation membrane 53 is provided on the silicon substrate 17 side portion of the outlet 20 of the flow path 13 of the main silicon substrate 11 as in FIG. 8, and the outlet 20 of the flow path 13 of the main silicon substrate 11 Although the communication hole 52 is provided between the inflow port 21 of the flow path 14 of the combustion silicon substrate 12, the inflow port 21 of the fuel glass substrate 18 is not provided. In this example, the power generation fuel gas and oxygen taken in from the atmosphere through the check valve are supplied to the inlet 19 of the main glass substrate 17, and the power generation product is output from the outlet 20 of the main glass substrate 17. Among them, hydrogen that has permeated through the separation membrane 53 flows out, and components other than hydrogen in the power generation product are introduced into the communication hole 52 and introduced into the flow path 14 of the combustion silicon substrate 12, and the combustion gas burns. It flows out from the outlet 22 of the glass substrate 18 for use. Also in this case, the apparatus can be simplified and downsized as compared with the configuration of FIG.
[0045]
Next, FIG. 11 is a sectional view similar to FIG. 2, showing yet another sixth example of the reforming section 34 according to the present invention. In this example, the flow channel 13 formation surface of the main silicon substrate 11 shown in FIG. 2 is bonded to one surface of the glass substrate 61, and the flow channel 14 formation surface of the combustion silicon substrate 12 shown in FIG. It is joined to the surface. In this case, an inlet 19 and an outlet 20 are provided at two predetermined locations corresponding to both ends of the flow path 13 of the main silicon substrate 11. An inlet 21 and an outlet 22 are provided at two predetermined locations corresponding to both ends of the flow path 14 of the combustion silicon substrate 12. In this example, since the number of the glass substrates 61 is one, the apparatus can be thinned.
[0046]
By the way, instead of the silicon substrates 11 and 12, a glass substrate, an aluminum substrate, or the like may be used. Further, instead of the glass substrates 17, 18, 61, an aluminum substrate or the like may be used. In particular, in the case of the example shown in FIG. 11, the heat conductivity from the flow path 14 of the combustion substrate 12 to the flow path 13 of the main substrate 11 can be improved by changing the material and thickness of the single substrate 61. Can be controlled. Of course, each of the examples shown in FIGS. 6 to 10 may have a three-layer structure as shown in FIG.
[0047]
【The invention's effect】
  As described above, according to the present invention, the combustion fluid supplied into the second flow path provided on the other surface side of the first substrate is burned by the combustion reaction on the combustion catalyst, and is generated by this combustion. In the first flow path provided on the one surface side of the first substrate with the thermal energyCan be heated.
[Brief description of the drawings]
FIG. 1 is a transparent plan view of a chemical reaction apparatus as one embodiment of the present invention.
2 is a cross-sectional view taken along line AA in FIG.
FIG. 3 is a transmission plan view similar to FIG. 1 of another example of the chemical reaction device according to the present invention.
FIG. 4 is a block diagram of a main part of an example of a fuel cell system including a chemical reaction device according to the present invention.
FIG. 5 is a schematic configuration diagram of a power generation unit of the fuel cell system shown in FIG. 4;
6 is a sectional view similar to FIG. 2 of still another first example of the chemical reaction device according to the present invention.
FIG. 7 is a sectional view similar to FIG. 2 of still another second example of the chemical reaction device according to the present invention.
FIG. 8 is a sectional view of still another third example of the chemical reaction device according to the present invention, similar to FIG.
FIG. 9 is a sectional view similar to FIG. 2 of still another fourth example of the chemical reaction device according to the present invention.
FIG. 10 is a sectional view similar to FIG. 2 of still another fifth example of the chemical reaction device according to the present invention.
FIG. 11 is a sectional view similar to FIG. 2 of still another sixth example of the chemical reaction device according to the present invention.
FIG. 12 is a transmission plan view of an example of a conventional chemical reaction apparatus.
13 is a cross-sectional view taken along line BB in FIG.
[Explanation of symbols]
11 Main silicon substrate
12 Silicon substrate for combustion
13, 14 flow path
15 Reaction catalyst layer
16 Combustion catalyst layer
17 Main glass substrate
18 Glass substrate for combustion
19, 21 Inlet
20, 22 Outlet

Claims (11)

A first substrate, a second substrate and a third substrate bonded to one surface and the other surface of the first substrate, respectively, and a minute first flow path provided between the first substrate and the second substrate A minute second flow path provided between the first substrate and the third substrate, a reaction catalyst layer provided in at least a part of the first flow path, and the second flow path A combustion catalyst layer provided on at least a part of the first substrate, an inlet provided at a position corresponding to one end of the first flow path of the second substrate, and the first flow of the second substrate. An outflow port provided at a location corresponding to the other end of the path, an inflow port provided at a location corresponding to one end of the second flow path of the third substrate, and a second phase of the third substrate. An outlet provided at a location corresponding to the other end of the flow path, and the inlet of the second substrate is the third substrate in the third substrate The second substrate has the second substrate so as to correspond to the position of the outflow port, and the second substrate has an outflow port corresponding to the position of the inflow port of the third substrate in the third substrate. a substrate, the first fluid is supplied to the first passage, the combustion fluid is supplied to the second flow path, the combustion of the combustion fluid supplied to the second flow path The first flow path is heated by the heat energy generated by the combustion reaction on the catalyst layer, and the first fluid is supplied to the inlet of the second substrate, and the third substrate The chemical reaction apparatus is characterized in that a second fluid containing oxygen and a third fluid obtained by separating and removing hydrogen from the fluid flowing out from the outlet of the second substrate are supplied to the inlet . The invention according to claim 1 , wherein the inlet is provided at a position corresponding to one end of the first flow path of the second substrate, and corresponds to the other end of the first flow path of the second substrate. An outlet provided at a position where the second substrate is provided, an inlet provided at a location corresponding to one end of the second flow path of the third substrate, and the other end of the second flow path of the third substrate. An outlet provided in a corresponding location, and the second substrate has an inlet in the second substrate so as to correspond to the position of the outlet of the third substrate in the third substrate, The second substrate has an outlet of the second substrate so that the outlet of the third substrate corresponds to a position of the inlet of the third substrate in the third substrate, and the other end of the first flow path and the second substrate A separation membrane selectively permeating hydrogen provided between the substrate outlet and the other end of the first flow path and one end of the second flow path; A communication hole provided in the first substrate between the first substrate, the first fluid is supplied to the inlet of the second substrate, and the second fluid containing oxygen is supplied to the inlet of the third substrate. There is provided, a chemical reactor, wherein a third fluid which is separated by dividing the hydrogen from the fluid flowing from the other end of the first flow path is supplied to the communication hole. A first substrate, a second substrate and a third substrate bonded to one surface and the other surface of the first substrate, respectively, and a minute first flow path provided between the first substrate and the second substrate A minute second flow path provided between the first substrate and the third substrate, a reaction catalyst layer provided in at least a part of the first flow path, and the second flow path A combustion catalyst layer provided on at least a part of the second substrate, an inlet provided at a position corresponding to one end of the first flow path of the second substrate, and the second flow of the third substrate. An inflow port provided at a location corresponding to one end of the path, and an outflow port provided at a location corresponding to the other end of the second flow path of the third substrate, An inflow port is provided in the second substrate so as to correspond to the position of the outflow port of the third substrate in the third substrate, and the first flow path is provided in the first channel. The combustion fluid is supplied to the second flow path, and the combustion fluid supplied into the second flow path is burned by a combustion reaction on the combustion catalyst layer. The inside of the first flow path is heated by the generated thermal energy, and a communication hole is provided in the first substrate between the other end portion of the first flow path and one end portion of the second flow path. The first fluid is supplied to the inlet of the second substrate, the fluid flowing out from the other end of the first flow path is supplied to the communication hole, and the inlet of the third substrate is supplied to the inlet of the third substrate. A chemical reaction apparatus, wherein a second fluid containing oxygen is supplied. A first substrate, a second substrate and a third substrate bonded to one surface and the other surface of the first substrate, respectively, and a minute first flow path provided between the first substrate and the second substrate A minute second flow path provided between the first substrate and the third substrate, a reaction catalyst layer provided in at least a part of the first flow path, and the second flow path A combustion catalyst layer provided on at least a part of the first substrate, an inlet provided at a position corresponding to one end of the first flow path of the second substrate, and the first flow of the second substrate. An outlet provided at a location corresponding to the other end of the path; and an outlet provided at a location corresponding to the other end of the second flow path of the third substrate, the second substrate. Having an inflow port in the second substrate so as to correspond to the position of the outflow port of the third substrate in the third substrate, and in the first channel. The combustion fluid is supplied to the second flow path, and the combustion fluid supplied into the second flow path is burned by a combustion reaction on the combustion catalyst layer. A separation membrane that selectively permeates hydrogen provided between the other end of the first flow path and the outlet of the second substrate, heating the inside of the first flow path with the generated thermal energy ; A communication hole provided in the first substrate between the other end of the first flow path and one end of the second flow path, and the first fluid and A second fluid containing oxygen is supplied, and at one end of the second flow path, hydrogen is separated and removed from the fluid flowing out from the other end of the first flow path through the communication hole. A chemical reaction apparatus characterized by being supplied with a fluid. In the invention described in claim 1, a chemical reactor, wherein the first substrate is one. 6. The invention according to claim 5 , wherein the first flow path is provided on a surface of the second substrate facing the first substrate, and the second flow path is opposed to the first substrate of the third substrate. A chemical reaction device provided on a surface. In the invention described in claim 1, wherein the first substrate is chemical reaction apparatus characterized by comprising the two substrates are laminated. 8. The invention according to claim 7 , wherein the first flow path is provided on a surface of the first substrate facing the second substrate, and the second flow path is opposed to the third substrate of the first substrate. A chemical reaction device provided on a surface. The invention according to any one of claims 1 to 8 , wherein a reforming catalyst is provided in at least a part of the first flow path, and hydrogen is obtained by reforming the first fluid in the first flow path. A chemical reaction device characterized in that The invention according to any one of claims 1 to 8 , wherein a selective oxidation catalyst is provided in at least part of the first flow path, and carbon monoxide contained in the first fluid is converted into the first flow path. A chemical reaction device characterized in that it is oxidized to carbon dioxide. A fuel cell system comprising: the chemical reaction device according to claim 9 ; and a fuel cell that generates electricity by reacting hydrogen and oxygen generated by the chemical reaction device.

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