JP4078799B2 - Two-dimensional positioning device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a two-dimensional positioning apparatus having an optical measurement unit such as a laser interferometer and having a slider unit movable in the XY directions.
[0002]
[Prior art]
FIG. 3 is a plan view showing a stage in a conventional two-dimensional positioning apparatus. The stage 1 has a platen portion 10, and the platen portion 10 extends in the X and Y directions at intervals corresponding to the tooth pitch of the motor core in the platen groove 10 a (in the XY direction in the figure). (Shown by a black straight line). An X-axis stopper 11 is disposed on the right side of the drawing in the platen portion 10 to stop the slider portion moving in the X direction during abnormal running, and the platen portion 10 moves in the Y direction below the drawing. A Y-axis stopper 12 is provided for stopping the slider portion that stops during abnormal running.
[0003]
Further, an X-axis plane mirror 13 that reflects the laser light of the laser interferometer 30 is disposed adjacent to the X-axis stopper 11, and the laser light of the laser interferometer 30 is reflected adjacent to the Y-axis stopper 12. A Y-axis plane mirror 14 is provided. The X-axis plane mirror 13 and the Y-axis plane mirror 14 are attached so as to be parallel or perpendicular to the groove of the platen unit 10.
[0004]
An OTX sensor 15 is disposed in the vicinity of the X-axis stopper 11, and the OTX sensor 15 is configured to be turned on when the slider portion 40 (see FIG. 4) approaches the X-axis flat mirror 13. Further, an OTY sensor 16 is disposed in the vicinity of the Y-axis plane mirror 14, and the OTY sensor 16 is configured to be turned on when the slider unit 40 approaches the Y-axis plane mirror 14. These OTX sensor 15 and OTY sensor 16 are used when returning to the origin.
[0005]
At a position corresponding to one end portion of the X-axis stopper 11 in the X-axis plane mirror 13, a reflection plate 18 that reflects the sensor light of the OTY sensor 16 is also provided at one end portion of the Y-axis stopper 12 in the Y-axis plane mirror 14. Reflecting plates 17 that reflect the sensor light of the OTX sensor 15 are disposed at corresponding positions. Each of the OTX sensor 15 and the OTY sensor 16 is turned on when the slider unit 40 blocks the sensor light.
[0006]
FIG. 4 is a schematic diagram showing the slider unit 40 that moves on the platen unit 10 in the XY directions. The slider unit 40 includes a motor unit 20 provided on the side facing the platen unit 10 and a laser interferometer 30 mounted on the motor unit 20.
[0007]
FIG. 5 is a schematic diagram showing the configuration of the motor unit 20. The motor unit 20 has a total of four X1 motor cores 21, X2 motor cores 25, Y1 motor cores 23, and Y2 motor cores 24 on the surface facing the platen unit 10 so as to be point-symmetrical with respect to the center of the motor unit 20. I have. Each of the X1 motor core 21 and the X2 motor core 25 has a tooth portion extending at a predetermined interval from each other in the X direction (vertical direction in FIG. 5). Further, each of the Y1 motor core 23 and the Y2 motor core 24 has tooth portions extending at a predetermined interval from each other in the Y direction (left-right direction in FIG. 5). The white portions in the motor cores 21, 23, 24, and 25 in the figure indicate the teeth of the motor, and the gray portions indicate the valleys.
[0008]
FIG. 6 is a schematic diagram showing the structure of the three-axis laser interferometer 30. The laser interferometer 30 has three laser interferometers 31 to 33. With respect to the Y-axis laser interferometer 33, the X1-axis laser interferometer 31 and the X2-axis laser interferometer 32 are disposed so as to be orthogonal to each other. The laser interferometer 30 is fixed to the motor unit 20 and is arranged so that the optical axis of the laser interferometer 30 and each tooth portion of the motor core form a right angle.
[0009]
The slider part 40 assembled in this way is placed on the platen part 10 so that the tooth parts of the motor cores 21, 23, 24, 25 and the platen groove 10a do not cross obliquely. In this state, the slider 40 is floated by air bellows (not shown), and a constant current is supplied to each of the motor cores 21, 23, 24, 25. As a result, the slider unit 40 stops in a posture in which the optical axis of the Y-axis laser interferometer 33 is substantially perpendicular to the Y-axis flat mirror 14. In addition, the optical axes of the X1-axis laser interferometer 31 and the X2-axis laser interferometer 32 are in a posture that is substantially perpendicular to the X-axis plane mirror 13.
[0010]
Accordingly, each laser beam emitted from the laser interferometer 30 is reflected by the respective plane mirrors 13 and 14 and returns to the corresponding interferometer among the laser interferometers 31 to 33, so that the displacement of the motor unit 20 can be measured. The positioning control can be executed by using the measurement result.
[0011]
[Problems to be solved by the invention]
However, in the conventional two-dimensional positioning device, the air bearings are in a state in which the tooth portions of the motor cores 21, 23, 24, and 25 and the platen groove 10a of the platen portion 10 are obliquely intersected and inclined in the yawing direction. Even if the slider portion 40 is air-lifted and a constant current is supplied to the motor cores 21, 23, 24, 25, the optical axes of the laser beams from the laser interferometer 30 are in relation to the plane mirrors 13, 14. It is not a right angle.
[0012]
In this state, the laser light does not return properly to the laser interferometers 31 to 33 in the laser interferometer 30 and the optical power is reduced, so that the displacement of the motor unit 20 cannot be measured and positioning control is performed. I can't. Moreover, even if the displacement of the motor unit 20 can be measured, since the respective tooth portions of the motor cores 21, 23, 24, and 25 and the platen groove 10a are slanted, it is possible to obtain good originally provided thrust. I can't.
[0013]
At present, in the above case, the user manually performs the work of returning the posture to the normal state with the slider portion 40 floating in the air, but this work is not allowed for safety depending on the application device. There is also. In addition, since the angle of the slider portion 40 needs to be adjusted fairly accurately, it is a heavy burden on the user who performs the work manually.
[0014]
Further, as long as the normal operation continues, the toothed portions of the motor cores 21, 23, 24, and 25 and the platen groove 10a do not stop in an oblique state. When a power failure occurs, the slider 40 may stick to the platen unit 10 in an inclined state.
[0015]
The present invention has been made in order to solve the above-described problems of the prior art, and even when the slider portion is inclined in the yawing direction with respect to the platen groove, the manual operation of the user is performed. It is an object of the present invention to provide a two-dimensional positioning device that can automatically return the motor unit to a normal posture and perform servo control, improve safety, and reduce the burden on the user when an abnormality occurs. To do.
[0016]
[Means for Solving the Problems]
To achieve the above object, a two-dimensional positioning apparatus of the present invention is mounted on a stage having a plurality of platen grooves extending in the XY direction, a slider part having a motor part facing the platen groove, and the slider part. An optical measurement unit that detects the posture of the slider unit when moving based on light reflection, a control unit that controls movement of the slider unit in the X and Y directions on the stage, and a slider unit that is in surface contact is corrected to a normal posture. A two-dimensional positioning device comprising a stopper for
A two-dimensional positioning device characterized in that a control unit determines whether the posture of a slider unit detected by an optical measurement unit is good or bad after moving the slider unit toward a stopper to make a surface contact at the start of operation. provide.
[0017]
In the two-dimensional positioning device of the present invention, if the inclination of the motor unit can be self-propelled by adjusting the stopper mounting angle and changing the control sequence, the posture of the motor unit is set to a normal state without human intervention. be able to. As a result, even when the slider portion is tilted in the yawing direction with respect to the platen groove, the servo control can be performed by automatically returning the motor portion to the normal posture regardless of the manual operation of the user. It is possible to improve safety and reduce the burden on the user when an abnormality occurs.
[0018]
Specifically, the motor unit includes a first X-direction motor core having a tooth portion parallel to the X direction and disposed in one direction around the center of the opposing surface on the opposing surface to the platen groove, and the Y direction. A first Y-direction motor core having parallel teeth, a second X-direction motor core having teeth parallel to the X direction, and a second Y-direction motor core having teeth parallel to the Y direction Is configured to supply the same current signal to the first and second Y-direction motor cores at the same time, and to supply current signals to the first and second X-direction motor cores simultaneously or individually.
[0019]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in more detail based on an embodiment of the present invention with reference to the drawings. FIG. 1 is a plan view showing an overall configuration of a two-dimensional positioning device according to this embodiment.
[0020]
In the two-dimensional positioning apparatus according to this embodiment, a slider portion 40 similar to that shown in FIG. 4 is placed on the stage 1 in a predetermined state. The slider unit 40 operates under the control of the control driver 50 connected by the cable 61.
[0021]
The control driver 50 independently controls the supply of current (sine wave current) signals to the three sets of the X1 motor core 21, the X2 motor core 25, the Y1 motor core 23, and the Y2 motor core 24 in the motor unit 20 shown in FIG. It is configured to be able to. A sine wave current for driving the three sets of motor cores 20, 21, and 23 + 24 and detection signals of the three-axis laser interferometer 30 shown in FIG.
[0022]
The control driver 50 determines whether or not the laser light is properly returned to the X1-axis laser interferometer 31, the X2-axis laser interferometer 32, and the Y-axis laser interferometer 33 shown in FIG. judge.
[0023]
An X-axis plane mirror 13 is arranged in parallel to the Y direction on the right side of the drawing in the platen unit 10, and a Y-axis plane mirror 14 is arranged in parallel to the X direction below the drawing in the platen unit 10. ing. The X-axis plane mirror 13 reflects the laser light from the X1-axis laser interferometer 31 and the X2-axis laser interferometer 32 mounted on the laser interferometer 30. The Y-axis plane mirror 14 reflects the laser beam from the Y-axis laser interferometer 33. The optical axis of the laser beam from the Y-axis laser interferometer 33 is fixed so as to be perpendicular to each tooth portion of the Y1 motor core 23 and the Y2 motor core 24.
[0024]
An X-axis stopper 11 having a length equivalent to that of the X-axis plane mirror 13 and extending along the extending direction of the X-axis plane mirror 13 is disposed on the platen part 10 side of the X-axis plane mirror 13. On the side of the platen portion 10 of the mirror 14, a Y-axis stopper 12 having a length equivalent to that of the Y-axis plane mirror 14 and extending in the extending direction of the Y-axis plane mirror 14 is disposed.
[0025]
Since the X-axis stopper 11 has a function of stopping the slider unit 40 that moves in the X direction and a function of correcting the slider unit 40 to a normal posture when it comes into surface contact, its position and angle are set strictly. Yes. The Y-axis stopper 12 has a function of stopping the slider that moves in the Y direction. Note that the Y-axis stopper 12 may have a posture correction function for the slider unit 40 instead of the X-axis stopper 11.
[0026]
Further, an OTX sensor 15 is disposed in the vicinity of the upper end portions of the X-axis plane mirror 13 and the X-axis stopper 11 in the figure, and this OTX sensor 15 is provided when the slider portion 40 approaches the X-axis plane mirror 13. Turn on. An OTY sensor 16 is disposed in the vicinity of the left end of the Y-axis plane mirror 14 and the Y-axis stopper 12 in the drawing, and this OTY sensor 16 is turned on when the slider portion 40 approaches the Y-axis plane mirror 14. Become. The output signals of these sensors 15 and 16 are input to the control driver 50.
[0027]
At a position corresponding to one end portion of the X-axis stopper 11 in the X-axis plane mirror 13, a reflection plate 18 that reflects the sensor light of the OTY sensor 16 is also provided at one end portion of the Y-axis stopper 12 in the Y-axis plane mirror 14. Reflecting plates 17 that reflect the sensor light of the OTX sensor 15 are disposed at corresponding positions.
[0028]
Further, an electromagnetic valve 62 is disposed between the control driver 50 and the slider portion 40. The electromagnetic valve 62 is used for on / off control of air belling and is controlled by the control driver 50.
[0029]
In the two-dimensional positioning apparatus according to this embodiment, the control driver 50 performs the control sequence of FIG. That is, at the start of operation, current signals are supplied to all the motor cores 21, 23, 24, and 25 in step S 1, and then the electromagnetic valve 62 is turned on so that the slider unit 40 is floated on the platen unit 10.
[0030]
Next, in step S <b> 2, the slider unit 40 is moved in the X direction and positioned in the vicinity of the OTX sensor 15, and the slider unit 40 is further moved in the Y direction and positioned in the vicinity of the OTY sensor 16. At this time, if the slider portion 40 is tilted to the extent that it cannot run on its own or the OTX sensor 15, the OTY sensor 16, and the electromagnetic valve 62 are out of order, the operation ends abnormally due to a time-over.
[0031]
Further, in step S3, the slider unit 40 is moved in the Y direction so that the distance between the slider unit 40 and the Y-axis plane mirror 14 becomes a specified distance. Subsequently, in step S4, the laser from the Y-axis plane mirror 14 is moved. It is determined whether there is an abnormality in the return light of the light.
[0032]
As a result of the determination in step S4, if there is an abnormality in the return light, the process proceeds to step S5, the current to the Y1 motor core 23 and the Y2 motor core 24 is set to 0, and the current signal is supplied to the X1 motor core 21 and the X2 motor core 25. Then, the slider unit 40 is abutted against the X-axis stopper 11 to correct the posture, and the slider unit 40 is stopped by moving a specified feed amount to determine whether the return light is normal, and then the process proceeds to step S6.
[0033]
On the other hand, if there is no abnormality in the return light as a result of the determination in step S4, the process jumps to step S10 to apply different current signals to both the X1 motor core 21 and the X2 motor core 25 to rotate the slider portion 40, thereby returning the return light. The rotation range in which is normal is detected, the angle is determined at the center, and it is determined that the rotation is normal, and the process ends.
[0034]
In step S6, the slider portion 40 is slightly returned to supply current to all of the motor cores 21, 23, 24, and 25. Then, in step S7, it is determined whether or not the return light is normal. As a result, if the return light is normal, the slider unit 40 is returned to the vicinity of the OTX sensor 15. If the return light is not normal, the processing from step S5 is repeated until the number of retries is exceeded in step S9. . If the number of retries exceeds, an abnormality is determined and the process is terminated.
[0035]
According to the two-dimensional positioning device according to the present embodiment, the current signal to the X1 motor core 21 and the X2 motor core 25 is independently controlled to rotate the slider unit 40, and the posture is checked by checking the return light during this rotation. While confirming, the posture of the slider part 40 can be kept normal. If the inclination is within a range in which the slider unit 40 can travel, it can be returned to a normal posture by the control sequence shown in FIG.
[0036]
As described above, in the present embodiment, the slider portion 40 is inclined in the yawing direction with respect to the platen groove 10a by adjusting the attachment angle of the X-axis stopper 11 and changing the control sequence by the control driver 50. Even in such a case, if the motor unit 20 can be self-propelled, the servo control can be performed by automatically returning to the normal posture, not manually. Thereby, the burden on the user when an abnormality occurs can be reduced, and safety can be improved.
[0037]
As described above, the present invention has been described based on the preferred embodiment. However, the two-dimensional positioning device of the present invention is not limited to the configuration of the above-described embodiment, and various configurations are possible from the configuration of the above-described embodiment. A two-dimensional positioning device that has been modified and changed as described above is also included in the scope of the present invention.
[0038]
【The invention's effect】
As described above, according to the present invention, even when the slider portion is inclined in the yawing direction with respect to the platen groove, the motor portion is allowed to self-run, and the motor portion is automatically in a normal posture regardless of the manual operation of the user. It is possible to obtain a two-dimensional positioning apparatus that can perform servo control by returning to the above, improve safety, and reduce the burden on the user when an abnormality occurs.
[Brief description of the drawings]
FIG. 1 is a plan view showing an overall configuration of a two-dimensional positioning apparatus according to an embodiment.
FIG. 2 is a flowchart showing a control sequence of a planar motor placement according to the present embodiment example.
FIG. 3 is a plan view showing a stage in a conventional two-dimensional positioning apparatus.
FIG. 4 is a schematic diagram showing a slider portion that moves in the XY directions on the platen portion.
FIG. 5 is a schematic diagram showing a configuration of a motor unit.
FIG. 6 is a schematic diagram showing the structure of a three-axis laser interferometer.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Stage 10 Platen part 10a Platen groove | channel 11 X-axis stopper 12 Y-axis stopper 13 X-axis plane mirror 14 Y-axis plane mirror 15 OTX sensor 16 OTY sensor 17, 18 Reflector 20 Motor part 21 X1 motor core 23 Y1 motor core 24 Y2 motor core 25 X2 motor core 30 3-axis laser interferometer 31 X1-axis laser interferometer 32 X2-axis laser interferometer 33 Y-axis laser interferometer 40 Slider unit 50 Control driver 62 Solenoid valve

Claims (2)

A stage having a plurality of platen grooves extending in the XY direction, a slider part having a motor part facing the platen groove, and light mounted on the slider part and detecting the attitude of the slider part when moving based on light reflection A two-dimensional positioning apparatus comprising a measurement unit, a control unit that controls movement of the slider unit in the XY directions on the stage, and a stopper that corrects the slider unit in surface contact to a normal posture,
2. A two-dimensional positioning apparatus characterized in that, at the start of operation, the control unit moves the slider unit toward the stopper to bring it into surface contact, and then determines whether the posture of the slider unit detected by the optical measurement unit is good or bad. A first X-direction motor core having a tooth portion parallel to the X direction, the tooth portion parallel to the X direction, and a tooth portion parallel to the Y direction. A first Y-direction motor core having a second X-direction motor core having teeth parallel to the X-direction, and a second Y-direction motor core having teeth parallel to the Y-direction,
The control unit is configured to supply the same current signal to the first and second Y-direction motor cores at the same time, and to supply current signals to the first and second X-direction motor cores simultaneously or individually. Item 2. The two-dimensional positioning device according to item 1.

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