JP4085653B2 - Laminated body having antistatic function - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a laminate for packaging used for packaging semiconductor wafers, printed boards, IC chips, audio video tape heads, MR heads and the like that require cleanliness.
[0002]
[Prior art]
In recent years, packaging materials used for packaging of semiconductor wafers, printed boards, IC chips, audio video tape heads, MR heads, and the like have various problems when dust is adsorbed by static electricity or the like when used as a final product. For example, in the case of an audio video tape head or MR head, static electricity is generated by running the tape and rotating the recording board, and dust adsorbed on the tape and recording board accumulates on the reproducing head and records sound and video. There is a great need for packaging materials that maintain cleanliness because problems such as deterioration of information quality or destruction of the head occur.
[0003]
Therefore, it is already known to add a surfactant to the base resin as an antistatic agent, but it may disappear due to water washing, friction or aging, and is unsuitable for articles passing through various processes and environments. .
In addition, even when a hydrophilic polymer antistatic agent (molecular weight: 2000 to 3000 or more) in which the instability of the surfactant (molecular weight: 300 to 1000 or less) is eliminated, the influence of moisture such as humidity is completely eliminated. The surface resistance may not be maintained as designed, especially in a low humidity environment.
[0004]
[Problems to be solved by the invention]
The present invention was devised in view of the above problems, and an object of the present invention is to provide a laminate having an antistatic function capable of maintaining a sealing property as a sealant while the laminate has an antistatic function and a moisture adjusting function. To do.
[0005]
[Means for Solving the Problems]
[0006]
In order to achieve the above object in the present invention, first, in claim 1 , it has an antistatic function characterized in that it comprises a mixed layer in which an antistatic agent and a water absorbent are mixed and mixed with a base film resin. It is a laminated body.
[0007]
According to a second aspect of the present invention, the moisture absorption layer includes a base film resin mixed with a water absorbent and a mixed layer including a base film resin mixed with an antistatic agent and a water absorbent. It is a laminate having an antistatic function characterized by providing a layer.
[0010]
Further, in claim 3 , a bonding layer made of a base film resin, a moisture absorbing layer in which a moisture absorbent is blended with the base film resin, and a mixture in which a base film resin is blended with an antistatic agent and a moisture absorbent And a laminated body having an antistatic function, wherein the mixed layer is provided on a sealing surface.
[0012]
Further, in claim 4 , a moisture absorbing layer in which a moisture absorbent is blended with a base film resin, an intermediate layer made of the base film resin, and a mixed layer in which a base film resin is blended with an antistatic agent and a moisture absorbent. And a laminated body having an antistatic function, wherein the mixed layer is provided on the sealing surface.
[0013]
Further, in claim 5 , the base film resin is made of a polyolefin resin, and the laminate having an antistatic function according to any one of claims 1 to 4 is provided.
[0014]
Further, in claim 6, wherein the moisture absorbing layer, antistatic layer, mixed layer, any of claims 1 to 5 the layer thickness of the bonding layer and the intermediate layer is equal to or is 5μm or more 100μm or less A laminate having an antistatic function as described in item 1 above.
[0015]
Moreover, in Claim 7 , 0.1-50 weight part of said antistatic agent is mix | blended with respect to 100 weight part of said base film resin, The any one of Claim 1 thru | or 6 characterized by the above-mentioned. And a laminate having an antistatic function described in 1.
[0016]
Further, in claim 8, wherein the antistatic agent is nonionic, anionic, cationic, amphoteric, Po Rieteru system, quaternary ammonium base system, scan sulfonic acid, betaine-based, nitride boron, or, boron - is obtained by a laminate having an antistatic function according to any one of claims 1 to 7, characterized in that a polymer types including aircraft structure for performing charge transfer between nitrogen .
[0017]
Further, the water absorbent cliff over di compound according to claim 9, Po polyvinyl alcohol, polyacrylic acid, polyacrylates, carboxymethyl cellulose, polyglycolic, ionomer, hydroxyethyl cell row scan, magnesium sulfate, calcium oxide The laminate having an antistatic function according to any one of claims 1 to 8, wherein the laminate has any one of aluminum oxide and aluminum oxide.
[0018]
Furthermore, in claim 10 , the surface resistance of the innermost layer of the laminate having the antistatic function according to any one of claims 1 to 9 is 20 ± 5 ° C., 40 ± 10% RH to 65. It is a laminate having an antistatic function characterized by being in a range of 10 ⁸ to 10 ¹² Ω / □ in a measurement environment of ± 10% RH.
[0019]
DETAILED DESCRIPTION OF THE INVENTION
The laminate having an antistatic function of the present invention comprises an antistatic layer in which a hydrophilic polymer type antistatic agent having an antistatic performance is blended with a base film resin, and a water absorbent as a water attractant in the base film resin. It is composed of a blended moisture absorbing layer, a mixed layer in which an antistatic agent and a moisture absorbent are mixed and blended with the base film resin, a bonding layer, and an intermediate layer. There is also a laminate of three or more layers using a dense layer as an intermediate layer or a bonding layer, and the laminate requires a clean property having an antistatic function and a moisture adjusting function while maintaining a sealing property as a sealant. A packaging material is provided.
[0020]
Hereinafter, embodiments of the present invention will be described.
[0021]
The invention according to claim 1 is a mixture 20 comprising a mixed layer 31 in which an antistatic agent and a water absorbent are mixed and blended with a base resin as shown in FIG. 2 (a), and as shown in FIG. 2 (b). The laminated body 20a has a three-layer structure including a mixed layer 31, a mixed layer 31a, and a mixed layer 31b, and the mixed layers 31, 31a, and 31b have an antistatic function and a moisture adjusting function. By blending the moisture absorbent in the same layer as the antistatic agent, the antistatic property is expressed in the layer having improved moisture retention.
[0022]
The invention according to claim 2 is a combination of the mixed layer 31 and the moisture absorbing layer 21, and has a two-layer structure comprising the mixed layer 31 and the moisture absorbing layer 21 as shown in FIG. There is a body 30 and a laminated body 30b having a three-layer structure including a mixed layer 31, a moisture absorption layer 21, and a moisture absorption layer 21a as shown in FIG. By disposing the moisture absorbing layer behind the mixed layer, moisture retention is more easily expressed in the mixed layer.
[0025]
The invention according to claim 3 is a laminate 60 having a three-layer structure composed of a mixed layer 31, a moisture absorbing layer 21, and a bonding layer 41 as shown in FIG. The mixed layer 31 is disposed on the sealing surface. In addition to the combined effect of the moisture absorbent and the antistatic agent, a bonding layer is provided in consideration of bonding with the substrate.
[0027]
The invention according to claim 4 is a laminate 80 having a three-layer structure consisting of a mixed layer 31, an intermediate layer 51 made of a base film resin, and a moisture absorbing layer 21, as shown in FIG. The moisture absorption layer 21, the mixed layer 31 on the sealing surface, and the intermediate layer 51 between the moisture absorption layer 21 and the mixture layer 31 are arranged. The bonding layer also serves as a moisture absorption layer.
[0028]
As another embodiment of the invention according to claim 4 , FIG. 9 shows an example of a laminate 90 having a three-layer structure composed of a mixed layer 31, an intermediate layer 51, and a bonding layer 41. In this, the mixed layer 31 is disposed on the sealing surface, and the intermediate layer 51 and the bonding layer 41 are disposed on the base material surface. In addition to the combined effect of the moisture absorbent and the antistatic agent, a bonding layer is provided in consideration of bonding with the substrate.
[0029]
The invention according to claim 5 relates to a base film resin, and as the resin of the antistatic layer disposed on the sealing surface, polyolefin resin such as low density polyethylene and linear low density polyethylene is used. It is suitable as a resin that requires cleanliness and cleanliness. Moreover, as resin arrange | positioned at the base material surface of a bonding layer, an intermediate | middle layer, and a water | moisture-content absorption layer, polyolefin resin, for example, a linear low density polyethylene, a medium density polyethylene, and a high density polyethylene are preferable. In addition, the resin selection criteria for the antistatic layer, the bonding layer, the intermediate layer, and the water absorption layer were the resin density of the bonding layer, the intermediate layer, and the water absorption layer formed on the base material surface. It is desirable that the density be set 0.015 or more higher than the resin density of the antistatic layer. Thereby, the moisture retention of a moisture absorption layer improves.
[0030]
In the invention according to claim 6 , the water absorption layer, the antistatic layer, the mixed layer, the bonding layer, and the intermediate layer constituting the laminate are formed with a thickness of 5 to 100 μm. Preferably it is 10-50 micrometers.
[0031]
In the invention according to claim 7 , the antistatic agent is blended in an amount of 0.1 to 50 parts by weight with respect to 100 parts by weight of the base film resin to form an antistatic layer. The blending ratio is determined by the type of antistatic agent, molecular weight, and the like.
[0032]
The invention according to claim 8 is an invention related to an antistatic agent to be blended to form an antistatic layer, and is nonionic, anionic, cationic, amphoteric, or polyethylene oxide, polyetheresteramide, poly Polyethers such as ether amide imide, ethylene oxide-epihalohydrin copolymer, methoxypolyethylene glycol (meth) acrylate copolymer, quaternary ammonium base-containing (meth) acrylate copolymer, quaternary ammonium base-containing maleimide copolymer , Quaternary ammonium bases such as methacrylimide copolymers containing quaternary ammonium bases, sulfonic acids such as polystyrene sulfonate soda, betaines such as carbobetaine graft copolymers, or boron nitride, boron-nitrogen A polymer type including a mechanism for performing charge transfer between elements can be used, and is appropriately selected and used.
[0033]
The invention according to claim 9 is an invention related to a moisture absorbent to be blended for forming a moisture absorbing layer, and is a cage compound such as synthetic zeolite, montmorillonite, activated carbon, or polyvinyl alcohol, polyacrylic acid, polyacrylate. Humidity-dependent polymers such as carboxymethyl cellulose, polyglycol, ionomer, hydroxyethyl cellulose, or so-called hygroscopic agents such as magnesium sulfate, calcium oxide, and aluminum oxide can be used.
[0034]
Invention according to claim 1 0, in the invention relating to the innermost layer of the surface resistance of the sealing surface of the laminate, 20 ± 5 ℃, 108~1012Ω / □ under the measurement environment RH 40 ± 10% ~65 ± 10 % The surface resistance is reproduced. Adjust mainly by the amount of moisture absorbent.
[0035]
【Example】
Examples will be described in detail below.
<Example 1>
This example is an example for reference.
A pellet resin in which 5 parts by weight of an antistatic agent composed of a hydrophilic polymer resin is blended with 100 parts by weight of a general-purpose low-density polyethylene resin (d = 0.920) and 100 parts by weight of a general-purpose high-density polyethylene resin (d = 0.950) A 10 μm-thick antistatic layer 11 and a 20 μm-thick water-absorbing layer 21 were formed by using a two-layer co-extrusion apparatus to form a pellet resin containing 5 parts by weight of a water-absorbing agent made of polyacrylic acid-modified resin. A two-layer laminate 10 made of
[0036]
<Example 2>
This example is an example for reference.
A pellet resin in which 5 parts by weight of an antistatic agent composed of a hydrophilic polymer resin is blended with 100 parts by weight of a general-purpose low-density polyethylene resin (d = 0.920) and 100 parts by weight of a general-purpose high-density polyethylene resin (d = 0.950) A pellet resin in which 5 parts by weight of a water absorbent composed of a polyacrylic acid-modified resin is blended with a general-purpose low-density polyethylene resin (d = 0.920) is formed into a film by a three-layer co-extrusion molding apparatus, and 10 μm A three-layer laminate 40 including a thick antistatic layer 11, a 20 μm thick moisture absorbing layer 21 and a 10 μm thick bonding layer 41 was produced.
[0037]
<Example 3>
This example is an example for reference.
A pellet resin in which 5 parts by weight of an antistatic agent composed of a hydrophilic polymer resin is blended with 100 parts by weight of a general-purpose low-density polyethylene resin (d = 0.920) and 100 parts by weight of a general-purpose high-density polyethylene resin (d = 0.950) A pellet resin in which 5 parts by weight of a water absorbent composed of a polyacrylic acid-modified resin is blended with a general-purpose low-density polyethylene resin (d = 0.90) is formed into a film by a three-layer co-pressing inflation molding apparatus. A three-layer laminate 70 made of an antistatic layer 11 having a thickness of 10 μm, an intermediate layer 51 having a thickness of 20 μm, and a moisture absorbing layer 21 having a thickness of 10 μm was produced.
[0038]
<Example 4>
This example is an example for reference.
A pellet resin in which 5 parts by weight of an antistatic agent composed of a hydrophilic polymer resin is blended with 100 parts by weight of a general-purpose low-density polyethylene resin (d = 0.920) and 100 parts by weight of a general-purpose high-density polyethylene resin (d = 0.950) A 10 μm-thick antistatic layer 11 and a 20 μm-thick water-absorbing layer 21 were formed by using a three-layer co-extrusion molding apparatus to form a pellet resin containing 5 parts by weight of a water-absorbing agent made of a polyacrylic acid-modified resin. And a 10 μm-thick moisture absorption layer 21a were produced.
[0039]
<Example 5>
General-purpose low-density polyethylene resin (d = 0.920) 100 parts by weight of a pellet resin containing 5 parts by weight of an antistatic agent made of a hydrophilic polymer resin and 5 parts by weight of a water absorbent made of a polyacrylic acid-modified resin A film 20 was formed by a three-layer co-pushing inflation molding apparatus to produce a mixture 20 composed of a mixed layer 31 having a thickness of 10 μm.
[0040]
<Example 6>
General-purpose low-density polyethylene resin (d = 0.920) 100 parts by weight of a pellet resin in which an antistatic agent composed of a hydrophilic polymer resin is blended in parts by weight and a pellet in which a water absorbent composed of a polyacrylic acid-modified resin is blended in parts by weight A resin and a general-purpose density polyethylene resin (d = 0.90) are formed into a film by a three-layer co-pressing inflation molding apparatus, and a three-layer structure including a 10 μm-thick mixed layer 31 and a 20 μm-thick bonding layer 41 A laminate 50 was produced.
[0041]
<Example 7>
A pellet resin in which 5 parts by weight of an antistatic agent made of a hydrophilic polymer resin and 5 parts by weight of a water absorbent made of a polyacrylic acid-modified resin are mixed with 100 parts by weight of a general-purpose low-density polyethylene resin (d = 0.920) A general-purpose low-density polyethylene resin (d = 0.920) is formed into a film by a three-layer co-extrusion molding apparatus, and a mixed layer 31 having a thickness of 10 μm, an intermediate layer 51 having a thickness of 20 μm, and a bonding layer 41 having a thickness of 10 μm are formed. A three-layer laminate 90 made of was prepared.
[0042]
<Example 8>
This example is an example for reference.
A pellet resin in which 5 parts by weight of an antistatic agent made of a hydrophilic polymer resin and 5 parts by weight of a water absorbent made of a polyacrylic acid-modified resin are mixed with 100 parts by weight of a general-purpose low-density polyethylene resin (d = 0.920) A general-purpose low-density polyethylene resin (d = 0.90) is formed into a film by a three-layer co-extrusion inflation molding apparatus, a 10 μm-thick mixed layer 31, a 20 μm-thick mixed layer 31a, and a 10 μm-thick bonding layer 41; A three-layer laminate 50a made of
[0043]
<Example 9>
General-purpose low-density polyethylene resin (d = 0.920) 100 parts by weight of a pellet resin containing 5 parts by weight of an antistatic agent made of a hydrophilic polymer resin and 5 parts by weight of a water absorbent made of a polyacrylic acid-modified resin A three-layer co-extrusion apparatus was used to form a three-layer laminate 20a composed of a 10 μm thick mixed layer 31, a 20 μm thick mixed layer 31a, and a 10 μm thick mixed layer 31b.
[0044]
<Example 10>
A pellet resin in which 5 parts by weight of an antistatic agent made of a hydrophilic polymer resin and 5 parts by weight of a water absorbent made of a polyacrylic acid-modified resin are mixed with 100 parts by weight of a general-purpose low-density polyethylene resin (d = 0.920) A general-purpose low-density polyethylene resin (d = 0.920) 100 parts by weight and a pellet resin in which 5 parts by weight of a water absorbent made of polyacrylic acid-modified resin is blended are formed into a film by a three-layer co-extrusion molding apparatus, and 10 μm A two-layer laminate 30 composed of a thick mixed layer 31 and a 20 μm thick moisture absorbing layer 21 was produced.
[0045]
<Example 11>
A pellet resin in which 5 parts by weight of an antistatic agent made of a hydrophilic polymer resin and 5 parts by weight of a water absorbent made of a polyacrylic acid-modified resin are mixed with 100 parts by weight of a general-purpose low-density polyethylene resin (d = 0.920) General-purpose low-density polyethylene resin (d = 0.920) A pellet resin in which 5 parts by weight of a water absorbent composed of a polyacrylic acid-modified resin is blended with 100 parts by weight and a general-purpose low-density polyethylene resin (d = 0.920) A three-layer co-extrusion apparatus was used to form a three-layer laminate 60 composed of a 10 μm thick mixed layer 31, a 20 μm thick moisture absorbing layer 21, and a 10 μm thick bonding layer 41.
[0046]
<Example 12>
A pellet resin in which 5 parts by weight of an antistatic agent made of a hydrophilic polymer resin and 5 parts by weight of a water absorbent made of a polyacrylic acid-modified resin are mixed with 100 parts by weight of a general-purpose low-density polyethylene resin (d = 0.920) General-purpose low-density polyethylene resin (d = 0.920) A pellet resin in which 5 parts by weight of a water absorbent composed of a polyacrylic acid-modified resin is blended with 100 parts by weight and a general-purpose low-density polyethylene resin (d = 0.920) A three-layer co-extrusion apparatus was used to form a three-layer laminate 80 including a mixed layer 31 having a thickness of 10 μm, an intermediate layer 51 having a thickness of 20 μm, and a moisture absorbing layer 21 having a thickness of 10 μm.
[0047]
<Example 13>
A pellet resin in which 5 parts by weight of an antistatic agent made of a hydrophilic polymer resin and 5 parts by weight of a water absorbent made of a polyacrylic acid-modified resin are mixed with 100 parts by weight of a general-purpose low-density polyethylene resin (d = 0.920) A general-purpose low-density polyethylene resin (d = 0.920) 100 parts by weight and a pellet resin in which 5 parts by weight of a moisture absorbent made of a polyacrylic acid-modified resin is blended are formed by a three-layer co-extrusion molding apparatus, A three-layer laminate 30a including a mixed layer 31 having a thickness of 10 μm, a moisture absorbing layer 21 having a thickness of 20 μm, and a moisture absorbing layer 21a having a thickness of 10 μm was produced.
[0048]
<Example 14>
A pellet resin in which 5 parts by weight of an antistatic agent made of a hydrophilic polymer resin and 5 parts by weight of a water absorbent made of a polyacrylic acid-modified resin are mixed with 100 parts by weight of a general-purpose low-density polyethylene resin (d = 0.920) A general-purpose low-density polyethylene resin (d = 0.920) 100 parts by weight and a pellet resin in which 5 parts by weight of a water absorbent made of polyacrylic acid-modified resin is blended are formed into a film by a three-layer co-extrusion molding apparatus, and 10 μm A three-layer laminate 30b composed of a thick mixed layer 31, a 20 μm thick mixed layer 31a, and a 10 μm thick moisture absorbing layer 21 was produced.
[0049]
The results of measuring the surface resistance of the laminate samples of Examples 1 to 14 in a measurement environment of 20 ° C., 40% RH and 20 ° C., 65% RH with Hireta MCP-HT250 (Mitsubishi Chemical). As shown in FIG. In either case, the surface resistance was in the range of 10 ⁸ to 10 ¹² Ω / □, and it was confirmed that the film had antistatic performance.
In other words, by using a moisture absorbent in each layer structure in combination with a hydrophilic antistatic agent that needs to retain moisture, the surface resistance is 10 ⁸ to 10 ¹² even under low humidity (40% RH). It became possible to enter the range of Ω / □.
[0050]
【The invention's effect】
As described above, since the laminate having the antistatic function of the present invention is composed of a sealant having an antistatic function and a moisture adjusting function, cleanliness of articles such as semiconductor wafers, printed boards and IC chips, and antistatic It is optimal as a packaging material that requires high performance.
In addition, it has the effect of always maintaining antistatic performance for several years by providing a time-and-quantity delay effect on the absorption and release of moisture in the moisture-absorbing layer or mixed layer after packaging the product. .
[Brief description of the drawings]
2A is a schematic partial sectional view showing an embodiment of a laminate having an antistatic function of the present invention according to claim 1. FIG. (B) is a schematic structural partial sectional view showing another embodiment of a laminate having an antistatic function of the present invention according to claim 1 .
3A is a schematic partial sectional view showing an embodiment of a laminate having an antistatic function of the present invention according to claim 2. FIG. (B) is a schematic fragmentary sectional view showing another embodiment of a laminate having an antistatic function of the present invention according to claim 2 . (C) is a schematic fragmentary sectional view showing another embodiment of a laminate having an antistatic function of the present invention according to claim 2 .
6 is a schematic partial sectional view showing an embodiment of a laminate having an antistatic function of the present invention according to claim 3. FIG.
8 is a schematic configuration cross-sectional view showing an embodiment of a laminate having an antistatic function of the present invention according to claim 4.
FIG. 9 is a schematic partial sectional view showing another embodiment of a laminate having an antistatic function according to the fourth aspect of the present invention.
FIG. 11 is an explanatory view showing the surface resistance measurement results of a laminate sample having an antistatic function of the present invention obtained in an example.
[Explanation of symbols]
10, 10a, 20a, 30, 30a, 40, 50, 50a, 60, 70, 80, 90 ... Laminate 20 ... Mixture 11 ... Antistatic layer 21, 21a ... Moisture absorbing layers 31, 31a, 31b …… Mixed layer 41 …… Bonding layer 51 …… Intermediate layer

Claims (10)

  A laminate having an antistatic function, comprising a mixed layer in which an antistatic agent and a water absorbent are mixed and mixed in a base film resin.   It consists of a moisture absorption layer in which a moisture absorbent is blended with a base film resin, and a mixed layer in which a base film resin is blended with an antistatic agent and a moisture absorbent, and the mixed layer is provided on the sealing surface. A laminate having an antistatic function.   It consists of a bonding layer made of a base film resin, a moisture absorbing layer in which a moisture absorbent is blended with the base film resin, and a mixed layer in which a base film resin is blended with an antistatic agent and a moisture absorbent. A laminate having an antistatic function, wherein the mixed layer is provided.   It consists of a moisture absorption layer in which a moisture absorbent is blended with the base film resin, an intermediate layer made of the base film resin, and a mixed layer in which the antistatic agent and the moisture absorbent are mixed and blended in the base film resin. A laminate having an antistatic function, wherein a mixed layer is provided. The laminate having an antistatic function according to any one of claims 1 to 4 , wherein the base film resin is made of a polyolefin resin. The antistatic according to any one of claims 1 to 5 , wherein the moisture absorption layer, the antistatic layer, the mixed layer, the bonding layer, and the intermediate layer have a thickness of 5 µm to 100 µm. A laminate having a function. The antistatic function according to any one of claims 1 to 6 , wherein the antistatic agent is blended in an amount of 0.1 to 50 parts by weight based on 100 parts by weight of the base film resin. Laminated body. The antistatic agent is nonionic, anionic, cationic, amphoteric, Po Rieteru system, quaternary ammonium base system, scan sulfonic acid, betaine-based, nitride boron, or boron - a charge transfer between the nitrogen laminate having an antistatic function according to any one of claims 1 to 7, characterized in that a polymer types including aircraft structure to carry out. The water absorbent cliff over di compounds, Po polyvinyl alcohol, polyacrylic acid, polyacrylates, carboxymethyl cellulose, polyglycolic, ionomer, hydroxyethyl cell row scan, magnesium sulfate, calcium oxide, from one of aluminum oxide The laminate having an antistatic function according to any one of claims 1 to 8, wherein the laminate has an antistatic function. The surface resistance of the innermost layer of the laminate having an antistatic function according to any one of claims 1 to 9 is 20 ± 5 ° C under a measurement environment of 40 ± 10% RH to 65 ± 10% RH. A laminate having an antistatic function, which is in a range of 10 ⁸ to 10 ¹² Ω / □.

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