JP4092300B2 - Organic material property evaluation method and device - Google Patents

Description

  The present invention relates to an organic material property evaluation method and an evaluation device, and more particularly, an applied voltage-current characteristic when an organic thin film using the organic material is not irradiated with light, and its time dependency, and the organic thin film is irradiated with light. The present invention relates to a method and an apparatus for evaluating electrical characteristics such as applied voltage-current characteristics and time dependency, spectral sensitivity characteristics, current injection luminescence characteristics, and the like.

Since organic materials have good light-emitting characteristics, photoconductive characteristics, photovoltaic characteristics, and the like, they are being applied to light-emitting elements, light-receiving elements, solar cells, and the like.
Usually, the basic structure of these elements using an organic material is a sandwich structure in which an organic material is sandwiched between a transparent electrode formed on a glass substrate and a metal electrode facing the transparent electrode.

The operation principle of an organic electroluminescence (organic EL) element, which is a representative example of applying an organic material to a light emitting element, is as follows.
That is, when a positive voltage is applied to the transparent electrode and a negative voltage is applied to the metal electrode, holes are injected from the transparent electrode and electrons are injected from the metal electrode into the organic material. Pairs are formed.
The organic material is excited by the relaxation energy of the electron-hole pairs, and the subsequent light emission of the organic material is detected through the glass substrate.

On the other hand, in the case where an organic material is applied to the light receiving element, the light incident from the glass substrate side is transmitted through the transparent electrode and then absorbed by the photoconductive organic material so that electrons are present in the conduction band and holes are present in the valence band. appear.
Both carriers are accelerated in opposite directions by the applied electric field, and a current flows through the external circuit by reaching the electrodes at both ends. The incident light is measured by detecting this current.

By the way, in order to improve the performance of these elements, it is extremely important to first grasp the electrical characteristics of the organic material.
Usually, when evaluating the electrical characteristics of an organic material, as in the final product element, measurement is generally performed with the organic material sandwiched between a transparent electrode and a metal electrode (Non-patent Document 1). reference). In some cases, a method of measuring the electrical characteristics in a direction parallel to the transparent substrate by forming the metal electrode in a comb shape is also employed.
Therefore, the method for creating a device under measurement in evaluating the electrical characteristics of a conventional organic material is as follows, as with the final device creation method.

  After thoroughly washing the glass substrate or quartz glass substrate provided with the transparent electrode, an organic material film is deposited on the transparent electrode by a wet method or a dry method to a thickness of several tens of nm to 1 μm. On the organic material film, metals or metals such as aluminum, vanadium, gold, silver, platinum, iron, cobalt, carbon, nickel, tungsten, palladium, magnesium, calcium, tin, lead, titanium, yttrium, lithium, ruthenium, manganese A metal electrode is formed of these alloy metals.

  As a method for forming a metal electrode on the organic material film, a vacuum deposition method, a sputtering method, or the like is used. As is well known, the vacuum deposition method is a method in which a metal molecule is evaporated and sublimated by resistance heating or the like, and the sputtering method is a method in which an inert gas such as argon is blown onto the metal surface as a target to eject the metal molecule. This is a method of forming a film using

Basics and applications of conducting polymers (pp393-396: edited by Katsumi Yoshino, IPC, 1988)

  However, when the electrical characteristics of the organic material are measured in the same element structure state as the product, in this element structure, as described above, the metal electrode is formed on the organic material film. The presence of the electrode causes the following problems.

The first problem is that a so-called junction structure is formed at the organic-metal interface due to the difference in Fermi energy between the metal material and the organic material.
For example, it is known that when a metal having a small work function is used, a Schottky junction is formed at the organic-metal interface and exhibits a semiconductor behavior at the interface (supervised by electronics-related dyes, supervised by Sumio Tokita, pp. 261- 273, CMC, 1998), which makes it difficult to measure the exact properties of organic materials.

  In addition, as a second problem, when an electrode forming method such as a vacuum evaporation method or a sputtering method is used, metal molecules having kinetic energy reach the surface of the organic material film. For example, alterations such as defects may occur.

For this reason, for example, in the sputtering method, a method for controlling the energy of metal molecules and ionized electrons simultaneously generated during sputtering is disclosed (Japanese Patent Laid-Open Nos. 10-158821 and 2003-31363). These are effective means for reducing the deterioration of the organic material and do not completely eliminate the deterioration.
In particular, since the degree of the alteration varies depending on the metal film forming conditions, characteristics vary even in an element manufactured using the same metal, making it difficult to measure the exact characteristics of the organic material.

  That is, in the conventional evaluation method of electrical characteristics, in addition to the original characteristics of organic materials, it is measured as a phenomenon in which the influence of the organic-metal interface interaction and the influence of the organic material film surface alteration are superimposed. Therefore, it is difficult to accurately evaluate the original electrical characteristics of the organic material.

  The present invention has been made to solve the above problems, and even when a product element using an organic material includes a metal electrode, the influence of the interaction between the organic and metal interfaces, and the film surface of the organic material. It is an object of the present invention to provide an organic material characteristic evaluation method and characteristic evaluation apparatus capable of accurately evaluating the electric characteristics of an organic material by eliminating the influence due to the alteration.

The organic material property evaluation method of the present invention is a method for evaluating the electrical properties of an organic thin film containing an organic material.
A sample in which a transparent electrode and an organic thin film to be measured are stacked in this order on a transparent substrate, and an electron gun positioned so as to face the organic thin film to be measured are disposed in a vacuum vessel,
The electrical characteristics of the organic thin film to be measured are evaluated based on the measurement result obtained by irradiating the organic thin film to be measured with the electron beam from the electron gun.

  When the organic thin film to be measured is a photoconductive material, in addition to irradiating the organic thin film to be measured with the electron beam from the electron gun, the light beam is irradiated from the transparent substrate side of the sample. It is preferable to evaluate the electrical characteristics of the organic thin film to be measured based on the measurement results obtained.

  Further, when the organic thin film to be measured is a luminescent material, based on the measurement result obtained by emitting the sample when the organic thin film to be measured is irradiated with the electron beam from the electron gun. The electrical characteristics of the organic thin film to be measured are preferably evaluated.

The organic material property evaluation apparatus of the present invention is an apparatus for evaluating the electrical characteristics of an organic thin film containing an organic material.
A vacuum vessel whose interior is evacuated to a predetermined pressure;
In this vacuum vessel, for a sample in which a transparent electrode and a measured organic thin film are laminated in this order on a transparent substrate, an electron gun disposed so as to face the measured organic thin film;
An applied voltage control means for controlling an applied voltage of the electron gun so as to irradiate a predetermined electron beam onto the organic thin film to be measured is provided.

  Further, when the organic thin film to be measured is a photoconductive material, a change in intensity of a predetermined light beam irradiated from the transparent substrate side of the sample or a change in applied voltage between the electron gun and the transparent electrode And a photocurrent change measuring means for measuring a change in current from the transparent electrode according to the above.

  On the other hand, when the organic thin film to be measured is a luminescent material, a change in light emission that measures a change in light emission from the organic thin film to be measured according to a change in applied voltage between the electron gun and the transparent electrode. It is preferable to comprise a measuring means.

  According to the organic material property evaluation method and property evaluation apparatus of the present invention, a sample in which a transparent electrode and a measured organic thin film are laminated in this order on a transparent substrate, and an electron positioned so as to face the measured organic thin film A gun is disposed in a vacuum vessel, and the electrical characteristics of the organic thin film to be measured are evaluated based on the measurement results obtained by irradiating the organic thin film to be measured with the electron beam from the electron gun. I am doing so.

  Therefore, since the measurement of the electrical characteristics of the organic thin film to be measured can be performed in a state where the metal electrode is not disposed, the influence due to the interaction between the organic-metal interface, which has been a problem in the prior art, In addition, the influence of alteration of the film surface of the organic material can be eliminated, and the electrical characteristics of the organic thin film to be measured can be accurately evaluated.

  Embodiments of the present invention will be described below with reference to the drawings.

<First Embodiment>
FIG. 1 is a conceptual diagram showing an organic material characteristic evaluation apparatus according to a first embodiment of the present invention, and shows an example of an apparatus for measuring an applied voltage-current characteristic of an organic thin film 8 to be measured.
This characteristic evaluation apparatus includes a vacuum container (vacuum chamber) 1 in which an electron gun 2 and an element sample 3 using an organic material are arranged to face each other, and an element sample 3 disposed in the vacuum container 1. A light beam irradiating unit including a light source 9, a spectroscope 10, and a condenser lens system 11 that irradiates a light beam from the back side thereof, a source meter 13 connected to the vacuum vessel 1, and each part of the apparatus are controlled. And a control unit 12 for performing the above operation.

  As shown in FIG. 2, an electron gun 2 and an element sample 3 are disposed opposite to each other in the vacuum container 1, and the stabilized power supply is provided so that the electrode of the element sample 3 is positive and the electron gun 2 side is negative. 4 are connected to each other, and a current value or the like is measured by the measuring instrument 5 as necessary. The stabilized power supply 4 and the measuring instrument 5 constitute the source meter 13.

The light source 9 is composed of a xenon lamp, a halogen lamp, or the like, and the light emitted from the light source 9 enters a spectroscope 10 composed of a color filter or the like. The incident light is split into monochromatic light by the spectroscope 10 and guided to the back side of the element sample 3 by the condenser lens system 11.
The source meter 13 and the spectroscope 10 are controlled by a control signal from a control unit 12 constituted by a personal computer or the like.

  FIG. 3 shows a laminated structure of the element sample 3, and a transparent electrode 7 made of an ITO (indium tin oxide) film or the like and an organic material to be measured are formed on a transparent substrate 6 made of a glass substrate or the like. The measurement organic thin film 8 is laminated in this order. In the element sample 3, the light beam from the condenser lens system 11 is incident on the back surface side (transparent substrate 6 side) so that the organic thin film 8 to be measured faces the electron gun 2. Are arranged as follows. The transparent electrode 7 is connected to the positive terminal of the stabilized power supply 4.

The electron gun 2 is configured to emit an electron beam from the cathode, and includes a heater that controls the amount of the electron beam, a grid that controls acceleration, and a focusing system that focuses the electron beam. The cathode is composed of tungsten, an oxide cathode, an impregnated oxide cathode, or the like. Furthermore, the emitted electron density is desirably about 1-1000 mA / cm ² . The electron beam focusing system is configured to focus the electron beam on the element sample 3, and an electromagnetic system, an electrostatic system, or the like can be used.

A glass port or the like is installed on the wall surface portion of the vacuum vessel 1 where the element sample 3 is mounted, and light is irradiated from outside the vacuum vessel 1 to the organic thin film 8 to be measured through the transparent substrate 6 and the transparent electrode 7. It can be so.
Further, the pressure in the vacuum vessel 1 is preferably about 10 ⁻⁴ Pa or less, and therefore, a low vacuum exhaust pump such as a rotary pump and a high vacuum exhaust pump such as a cryopump, a turbo molecular pump, and an oil diffusion pump. The vacuum vessel 1 is evacuated in combination.

  As described above, in the first embodiment, since it is possible to measure the applied voltage-current characteristic without providing the metal electrode on the element sample 3, there is a problem in the prior art. Further, the influence due to the interaction between the organic-metal interface and the influence due to the alteration of the film surface of the organic material can be eliminated, and the applied voltage-current characteristics of the organic thin film 8 to be measured can be accurately evaluated.

  Hereinafter, the characteristics of the organic thin film 8 to be measured (applied voltage-current characteristics when the element sample 3 is not irradiated with light and when the element sample 3 is irradiated with light) are evaluated using the apparatus configured as described above. How to do will be described.

  As described above, the electron gun 2 is set so that the electron beam is irradiated onto the organic thin film 8 to be measured, and the stabilized power source 4 is applied to the transparent electrode 7 of the element sample 3 set in the vacuum vessel 1. To apply a positive voltage v.

  Setting the cathode of the electron gun 2 to ground and setting the cathode potential to 0 is equivalent to applying the voltage v to the organic thin film 8 to be measured. Next, the applied voltage v is scanned, and the current value from the transparent electrode 7 of the element sample 3 is measured by the measuring instrument 5 according to each voltage value, whereby the applied voltage-current characteristic of the organic thin film 8 to be measured is measured. Can be measured.

  The applied voltage-current characteristics of the organic thin film 8 to be measured are set such that the light beam from the condenser lens system 11 is incident on the back side (transparent substrate 6 side) along with the irradiation of the electron beam. The applied voltage-current characteristics when the element sample 3 is irradiated with light are obtained, and the light beam from the condenser lens system 11 is not incident on the back surface side (transparent substrate 6 side). Thus, the applied voltage-current characteristics when the element sample 3 is not irradiated with light can be obtained.

  In addition, as the setting of the electron gun 2 described above, for example, there is a setting for controlling the electron beam diameter by an electron beam focusing system, and from this, the whole measurement of irradiating the entire surface of the organic thin film 8 to be measured, Arbitrary measurement is possible up to partial measurement in which a beam is irradiated onto a minute portion of the surface. Further, when performing the partial measurement, the electron beam can be scanned over the surface by setting the electron beam deflection system attached to the electron gun 2, and each part can be measured continuously. is there.

<Second Embodiment>
FIG. 4 is a conceptual diagram showing an organic material characteristic evaluation apparatus according to the second embodiment of the present invention, and shows an example when applied to an apparatus for measuring the spectral sensitivity characteristic of the organic thin film 8 to be measured. is there. In addition, about each part of the apparatus of this 2nd Embodiment, about what has the same function as each part of the said 1st Embodiment apparatus, 100 was added to the code | symbol attached | subjected to each part of the 1st Embodiment apparatus Reference numerals are attached and detailed description thereof is omitted.

  In the vacuum vessel 101, as shown in FIG. 4, an electron gun 102 and an element sample 103 are arranged to face each other, and the source meter 113 is arranged so that the electrode of the element sample 103 is positive and the electron gun 102 side is negative. Each power supply terminal of the stabilized power supply 4 is connected, and a current value or the like is measured by the measuring instrument 5 of the source meter 113 as necessary.

  Further, light emitted from the light source 109 enters the spectroscope 110. Incident light is split into monochromatic light by the spectroscope 110 and guided to the back side (transparent substrate 6 side) of the element sample 103 by the condenser lens system 111. Further, when measuring the spectral sensitivity, it is necessary to make the energy or the number of photons of the monochromatic light to be radiated constant. Therefore, for example, a variable ND that changes the light transmittance between the spectroscope 110 and the element sample 103. The light transmittance varying means 114 such as a filter is inserted, and the light transmittance in the light transmittance varying means 114 is changed based on a control signal from the constant energy irradiation control unit 115.

  Here, the amount of change in the light transmittance is adjusted so that the amount of light emitted from the light transmittance variable means 114 is constant, covering the variation in the amount of light emitted from the light source 109, Based on the result of monitoring the variation in the amount of light emitted from the light source 109 (or drive current), this variation is offset by the change in the light transmittance of the light transmittance variable means 114. A predetermined control signal is sent from the control unit 112 to the constant energy irradiation control unit 115 so that the amount of the emitted light beam is constant. The control unit 112 controls the operation of the source meter 113 and the light transmittance varying unit 114, stores the current value detected by the measuring instrument 5 of the source meter 113, and the spectral sensitivity of the organic thin film 8 to be measured. Analyze the characteristics.

  As described above, in the second embodiment, since the spectral sensitivity characteristic can be measured in a state where the metal electrode is not disposed on the element sample 103, there has been a problem in the prior art. The influence due to the interaction between the organic-metal interface and the influence due to the alteration of the film surface of the organic material can be eliminated, and the spectral sensitivity characteristics of the organic thin film 8 to be measured can be accurately evaluated.

<Third Embodiment>
FIG. 5 is a conceptual diagram showing an organic material characteristic evaluation apparatus according to the third embodiment of the present invention, in which an applied voltage-current characteristic of the organic thin film 8 to be measured (when the element sample 203 is not irradiated with light, and An example of an apparatus for measuring time dependency of applied voltage-current characteristics when the element sample 203 is irradiated with light is shown. In addition, about each part of the apparatus of this 3rd Embodiment, about what has the same function as each part of the said 1st Embodiment apparatus, 200 was added to the code | symbol attached | subjected to each part of the 1st Embodiment apparatus Reference numerals are attached and detailed description thereof is omitted.

  In the vacuum vessel 201, as shown in FIG. 5, an electron gun 202 and an element sample 203 are arranged to face each other, and the source meter 213 is arranged so that the electrode of the element sample 203 is positive and the electron gun 202 side is negative. The power supply terminals of the stabilized power supply 4 are connected, and the current value and the like are measured by the measuring instrument 5 of the source meter 213 as necessary. In addition, the light emitted from the pulse light source 209 is configured to be guided to the back surface side (transparent substrate 6 side) of the element sample 203.

  In the above measurement when the element sample 203 is irradiated with light using the apparatus of the third embodiment, the attenuation of the photocurrent from the transparent electrode 7 is measured according to the elapsed time from the timing when the light irradiation is completed. Is done. Therefore, the light source 209 is a light source that can output pulsed light such as a pulsed laser that can easily determine the timing of the end of light irradiation. In addition, a part of the light from the light source 209 is separated by the half mirror 217 and incident on the trigger generator 218, so that a measurement instruction signal is transmitted from the control unit 212 in synchronization with the irradiation timing of the pulsed light to the element sample 203. It can be sent to the source meter 213 to measure the photocurrent. The control unit 212 controls the operation of the source meter 213 and the pulse light source 209 and stores the current value detected by the measuring instrument 5 of the source meter 213, and the applied voltage-current characteristic of the organic thin film 8 to be measured. Analyze the time dependence of.

  As described above, in the third embodiment, the time dependency of the applied voltage-current characteristic of the organic thin film 8 to be measured can be measured without providing the metal electrode on the element sample 203. Therefore, it is possible to eliminate the influence due to the organic-metal interface interaction and the influence due to the alteration of the film surface of the organic material, which are problems in the prior art, and the applied voltage-current characteristics of the organic thin film 8 to be measured. It is possible to accurately evaluate the time dependency of.

<Fourth Embodiment>
FIG. 6 is a conceptual diagram showing an organic material characteristic evaluation apparatus according to the fourth embodiment of the present invention, and shows an example of an apparatus for measuring the current injection emission characteristics of the organic thin film 8 to be measured. In addition, about each part of the apparatus of this 4th Embodiment, about what has the same function as each part of the said 1st Embodiment apparatus, 300 was added to the code | symbol attached | subjected to each part of the 1st Embodiment apparatus Reference numerals are attached and detailed description thereof is omitted.

  In the vacuum vessel 301, as shown in FIG. 6, an electron gun 302 and an element sample 303 are arranged to face each other, and the source meter 313 is arranged so that the electrode of the element sample 303 is positive and the electron gun 302 side is negative. Each power supply terminal of the stabilized power supply 4 is connected, and a current value or the like is measured by the measuring instrument 5 of the source meter 313 as necessary.

  In this element sample 303, the organic thin film to be measured 8 is made of a light emitting material such as an organic EL material, and the above-described applied voltage applied between the electron gun 302 and the organic thin film to be measured 8 or electron beam irradiation. Light emission according to the value of the flowing current is configured to be emitted to the outside from the back surface side (transparent substrate 6 side).

  The emitted light emitted in this way is incident on the photodetector 319 through the spectroscope 310 that separates the monochromatic light by the condenser lens system 311. The photodetector 319 can perform desired luminescence measurement in combination with devices such as a commercially available luminance meter, illuminance meter, or luminescence quantum efficiency meter.

  The control unit 312 controls the operation of the source meter 313 and the spectroscope 310 and stores the luminescence measurement result of the measured organic thin film 8 detected by the photodetector 319 and the like. Analyze current injection emission characteristics.

  As described above, in the fourth embodiment, the element sample 303 can be measured for the current injection luminescence characteristics of the organic thin film 8 to be measured without providing the metal electrode. The influence of the interaction between the organic-metal interface and the influence of the alteration of the film surface of the organic material, which has been a problem, can be eliminated, and the current injection emission characteristics of the organic thin film 8 to be measured can be accurately evaluated. be able to.

  The organic material property evaluation method and property evaluation apparatus of the present invention are not limited to those of the above-described embodiment, and various other aspects can be changed. For example, electrical characteristics to be measured and evaluated Can be other than the above.

  Here, a more specific example in the case where the device according to the first embodiment is a photocurrent measuring device will be described.

A 4286D-HD manufactured by Hamamatsu Photonics Co. was used as the electron gun 2, and a Keithley 2400 was used as the source meter 13 incorporating the stabilized power source 4 and the measuring instrument 5. Further, a halogen lamp was used as the light source 9 and set so that 1.0 μW / cm ² of light was incident on the element sample 3.
Moreover, a color filter (HS-B1 manufactured by Fuji Photo Optical Co., Ltd.) that transmits only blue light was used as the spectroscope 10.

The vacuum vessel 1 is evacuated to a pressure of 10 ⁻⁵ Pa or less using a rotary pump and a turbo molecular pump, and is continuously evacuated by operating the turbo molecular pump even during measurement, so that the pressure is maintained. Was set as follows.

FIG. 7 shows the applied voltage-current characteristics when the device sample 3 configured as follows is measured by the photocurrent measuring device configured as described above.
The element sample 3 is formed by depositing 70 nm of an ITO transparent electrode (7) on a glass substrate (6) having a diameter of 17 mm and depositing a cobalt porphyrin complex as the organic thin film 8 to be measured by 100 nm thereon. is there.

  As shown in FIG. 7, when light is not irradiated (in the dark), even when a voltage is applied to the element sample 3, a current (dark current) is not detected below 8V, and the dark current is not detected until 8V or higher. Is detected. On the other hand, at the time of light irradiation, a photocurrent is detected even if the applied voltage is 1V.

The conceptual diagram which shows the characteristic evaluation apparatus of the organic material which concerns on the 1st Embodiment of this invention The conceptual diagram which shows the principal part of the characteristic evaluation apparatus of the organic material which concerns on embodiment of this invention Schematic which shows the laminated structure of the element sample which is a measuring object of the characteristic evaluation apparatus of the organic material which concerns on embodiment of this invention The conceptual diagram which shows the characteristic evaluation apparatus of the organic material which concerns on the 2nd Embodiment of this invention The conceptual diagram which shows the characteristic evaluation apparatus of the organic material which concerns on the 3rd Embodiment of this invention The conceptual diagram which shows the characteristic evaluation apparatus of the organic material which concerns on the 4th Embodiment of this invention The graph which shows the applied voltage-current characteristic of the to-be-measured organic thin film obtained using the Example of this invention at the time of light incidence, and the time of light non-incidence

Explanation of symbols

1, 101, 201, 301 Vacuum container 2, 102, 202, 302 Electron gun 3, 103, 203, 303 Element sample 4 Stabilized power supply 5 Measuring instrument 6 Transparent substrate 7 Transparent electrode 8 Organic thin film 9 to be measured 9, 109 Light source 10 , 110, 310 Spectrometer 11, 111, 311 Condensing lens 12, 112, 212, 312 Control unit 13, 113, 213, 313 Source meter 114 Light transmittance variable means 115 Constant energy irradiation control unit 209 Pulse light source 217 Half mirror 218 Trigger generator 319 photodetector

Claims (6)

In a method for evaluating the electrical characteristics of an organic thin film containing an organic material,
A sample in which a transparent electrode and an organic thin film to be measured are stacked in this order on a transparent substrate, and an electron gun positioned so as to face the organic thin film to be measured are disposed in a vacuum vessel,
A method for evaluating characteristics of an organic material, characterized in that electrical characteristics of the organic thin film to be measured are evaluated based on a measurement result obtained by irradiating the organic thin film to be measured with an electron beam from the electron gun.   When the organic thin film to be measured is a photoconductive material, in addition to irradiating the organic thin film to be measured with the electron beam from the electron gun, irradiating the light beam from the transparent substrate side of the sample 2. The method for evaluating characteristics of an organic material according to claim 1, wherein the electrical characteristics of the organic thin film to be measured are evaluated based on the measurement result obtained by the above.   When the measured organic thin film is a luminescent material, based on the measurement result obtained by emitting the sample when the electron beam from the electron gun is irradiated onto the measured organic thin film, 2. The method for evaluating the characteristics of an organic material according to claim 1, wherein the electrical characteristics of the organic thin film to be measured are evaluated by a change in light emission from the organic thin film. In an apparatus for evaluating the electrical characteristics of organic thin films containing organic materials,
A vacuum vessel whose interior is evacuated to a predetermined pressure;
In this vacuum vessel, for a sample in which a transparent electrode and a measured organic thin film are laminated in this order on a transparent substrate, an electron gun disposed so as to face the measured organic thin film;
An apparatus for evaluating characteristics of an organic material, comprising: applied voltage setting means for setting an applied voltage of the electron gun so that a predetermined electron beam is irradiated onto the organic thin film to be measured.   When the organic thin film to be measured is a photoconductive material, depending on a change in intensity of a predetermined light beam irradiated from the transparent substrate side of the sample or a change in applied voltage between the electron gun and the transparent electrode 5. The organic material property evaluation apparatus according to claim 4, further comprising a photocurrent change measuring means for measuring a change in current from the transparent electrode. When the organic thin film to be measured is a luminescent material, a light emission change measuring means for measuring a change in light emission from the organic thin film to be measured according to a change in an applied voltage between the electron gun and the transparent electrode; The organic material property evaluation apparatus according to claim 4, comprising:

Images