JP4092763B2 - Conveying device and delivery device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a transfer apparatus, and more particularly to a transfer apparatus suitable for use in a manufacturing facility for semiconductor devices, semiconductor wafers, and the like, and a delivery apparatus used in a semiconductor manufacturing apparatus.
[0002]
[Prior art]
In a semiconductor manufacturing facility, an automatic transfer carriage is used for transfer between processes and the like, and an automatic transfer device is provided for transferring a workpiece between each process and the automatic transfer carriage.
10 and 11 show a conventional example of a semiconductor manufacturing facility equipped with the above transfer apparatus.
Reference numeral 1 denotes a semiconductor manufacturing apparatus. In this semiconductor manufacturing apparatus, any one process or a plurality of processes such as polishing, cleaning, surface treatment, or temporary processing, which is a part of the semiconductor manufacturing process, is performed. It has been broken. Two transfer devices called load ports 2 are provided on the front surface of the semiconductor manufacturing apparatus 1 so that stored items such as wafers in the storage container 3 can be transferred to and from the semiconductor processing apparatus 1. It has become. The storage container 3 stores wafers and is abbreviated as FOUP (Front Opening Unified Pod), and the dimensions of each part are set based on a unified standard. The load port 2 is connected to the inside of the semiconductor manufacturing apparatus 1 via the entrance / exit 4 and opens the cover of the storage container 3 on the container mounting part 5 to take in the stored material into the apparatus, or The storage container 3 that is sent out from the apparatus and stores the stored contents is received on the container mounting portion 5, and has a function of opening and closing the lid of the storage container 3. Three pins 6 protrude from the container mounting portion 5, and the storage container 3 is placed in the container mounting portion 5 by fitting these pins 6 into grooves (not shown) on the lower surface of the storage container 3. It can be positioned at a predetermined position above.
[0003]
A track 7 is provided in front of the load port 2 in parallel with the arrangement direction of the semiconductor manufacturing apparatus 1, and an automatic conveyance carriage 8 driven by the principle of a linear motor or the like travels on the track 7. It has become. Further, a robot 9 is mounted on the automatic transfer carriage 8, and a wafer or the like is transferred between the automatic transfer carriage 8 and the load port 2 by a finger device 10 provided at the tip of the robot 9. It has become.
[0004]
The configuration of the load port 2 will be described in more detail with reference to FIG.
The load port 2 is a semiconductor manufacturing device that uses bolts (not shown) penetrating through bolt holes 12 provided around an opening 11 provided in the semiconductor manufacturing apparatus 1 and bolt holes 14 provided in a mounting plate 13. It is fixed to the side of the device 1.
[0005]
[Problems to be solved by the invention]
By the way, the load port 2 needs to be removed from the semiconductor manufacturing apparatus 1 and carried out to the outside for replacement and maintenance, and after carrying out a predetermined maintenance process, it is necessary to carry it back to a predetermined position and attach it again. Since the load port 2 has a weight of 60 to 80 kilograms, it is considerably difficult to handle it manually, and there is a problem that a long time is required for these series of operations. Further, when the semiconductor manufacturing apparatuses 1 are densely provided, there is a problem that it is difficult to secure a sufficient working space around the load port 2. Furthermore, as described above, a track 7 on which the automatic conveyance carriage 8 travels is provided around the semiconductor manufacturing apparatus 1, and the track 7 protrudes from the floor surface. Therefore, special equipment such as an overhead crane is provided. Unless it is used, there is a problem that the track 7 becomes an obstacle and the carry-out and carry-in becomes difficult.
[0006]
[Means for Solving the Problems]
The present invention has been made in view of the above circumstances, and an object thereof is to reduce the labor required for loading and unloading a load port as much as possible.
[0007]
To achieve the above object, the invention of claim 1, the frame having a plurality of wheels are attached and, a body having a mounting portion which the transported object is placed, it is possible the body the mounting tower, predetermined in conveying apparatus comprising a transport carriage that moves along the path, the vehicle wheel, and a state for supporting the frame lower surface and the surface for mounting the body of the conveyance carriage of the frame substantially not equal in height, The support mechanism is attached to the frame via a support mechanism that can be switched to a state of being stored above the frame without protruding from the side surface and the lower surface of the frame. The support mechanism includes a first support mechanism and a second support mechanism. The plurality of wheels are composed of a first wheel supported by the first support mechanism and a second wheel supported by the second support mechanism, and the first wheel is supported by the first support mechanism. The support mechanism of the first A first arm that supports the wheel in a rotatable state, and is pivotally supported with respect to the frame about an axis parallel to the rotation axis of the first wheel; and the first arm And a first fixing means that can be fixed at a position protruding from the lower surface of the frame, wherein the second support mechanism supports the second wheel in a rotatable state, and the second support mechanism A second arm that is pivotally supported with respect to the frame about an axis that is arranged in a direction different from a direction in which the rotation axis of the wheel is arranged, and the second arm from the lower surface of the frame And a second fixing means that can be fixed at the protruding position . The invention according to claim 2 is characterized in that the first wheel is attached to the front side in the traveling direction when the main body is mounted on the transport carriage, and the second wheel is attached to the rear side in the traveling direction. To do. According to a third aspect of the present invention, the second arm is supported so as to be rotatable with respect to the frame about an axis arranged in a direction orthogonal to a direction in which the rotation axis of the second wheel is arranged. It is characterized by. According to a fourth aspect of the present invention, there is provided a mounting plate that is vertically attached to one side surface of a semiconductor manufacturing apparatus, and a mounting portion that is horizontally supported by the mounting plate and on which an object to be carried into or out of the semiconductor manufacturing apparatus is placed. When a horizontal frame constituting the apparatus bottom surface provided below the mounting plate, and a plurality of wheels for supporting the substantially vertical position of the mounting plate attached to the horizontal frame, said wheels at least two of , a lowered position for supporting the mounting plate, movably supported to the support between a raised position that is stored above the horizontal frame without up from the lowered position protrudes from the side surface and the lower surface of the horizontal frame And the support mechanism includes a first support mechanism and a second support mechanism, and the plurality of wheels are supported by the first support mechanism. And a second wheel supported by the second support mechanism, the first support mechanism rotatably supporting the first wheel and parallel to the rotation axis of the first wheel. A first arm that is pivotally supported with respect to the mounting plate, and a first fixing means capable of fixing the first arm at the lowered position; The second support mechanism includes a second arm supported so as to be rotatable with respect to the mounting plate about an axis arranged in a direction different from a direction in which the rotation axis of the second wheel is arranged, And a second fixing means capable of fixing the second arm at the lowered position . According to a fifth aspect of the present invention, the first wheel is attached to the front side in the traveling direction when unloading from the semiconductor manufacturing apparatus, and the second wheel is attached to the rear side in the traveling direction,
The second arm is supported in a state of being rotatable with respect to the horizontal frame about an axis arranged in a direction orthogonal to a direction in which the rotation axis of the second wheel is arranged. Features.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the figure, the same parts as those in the conventional example are denoted by the same reference numerals, and the description will be simplified.
As shown in FIG. 1, the load port has a basic configuration in which a container mounting portion 5 is horizontally provided on a side surface of a vertical mounting plate 13. A frame 20 having the same planar shape as that of the mounting portion 5 is provided horizontally and in a cantilevered state at the lower portion of the mounting plate 13, and the horizontal frame 20 and the mounting plate 13 are reinforced. The arm 21 is connected and reinforced. Further, wheels 22 to 25 are provided on the lower surface of the frame 20 to support the entire load port. The details of the structure of these wheels 22 to 25 will be described later. Further, a cover having a U-shape in plan view as shown by a broken line in FIG. 4 is put between the frame 20 and the container mounting portion 5, and the space between them is covered by the cover. Thus, the entire load port is configured to have a rectangular parallelepiped appearance.
[0009]
A transport carriage for transporting the load port will be described with reference to FIG.
A track 31 is provided on the upper surface of the floor 30 so as to protrude therefrom. The track 31 is used for the traveling of the automatic transfer carriage in the conventional example, and the load port is transferred to the track 31 when the load port is attached or detached as in this embodiment. A hand-carried transport cart 32 is introduced and used for the following operations. Further, in the illustrated case, the transport carriage 32 is supported by installing four wheels 33 on the floor 30. The specific method of the transport carriage 32 is not limited to the method shown in FIG. 2, and is in contact with the track 31 in addition to the wheels 35 supported by the floor 30 as in the transport carriage 34 shown in FIG. 3. A method of providing the guide wheel 36 may be used.
[0010]
Next, details of a support mechanism for the wheels 22 to 25 that support the load port will be described with reference to FIG.
The wheels 22 and 24 are supported by a support plate 40 that is integrally attached to the horizontal frame 20. That is, a support arm 41 is supported at the front portion of the support plate 40 so as to be rotatable about the axis C1. The wheel 22 (and 23) is rotatably supported at the tip of the support arm 41. The axis C1 is arranged in parallel with the axis of the wheel 22. On the other hand, at the rear part of the support plate 40, a support arm 42 is rotatable around an axis C2 that is not parallel to the axis of each wheel (in the illustrated case, parallel to the traveling direction of the load port supported by the wheels 22 to 24). The wheel 24 (and 25) is supported at the tip of the support arm 42.
[0011]
A tension spring 43 is connected to the upper end of the support arm 41, and is urged clockwise by the tension spring 43 in FIG. The support plate 40 in the vicinity of the support arm 41 is provided with a lock member 44 that fixes the support arm 41 in a predetermined position against the tension spring 43. The lock member 44 is supported by a support hole 45 provided in the support plate 40 so as to be slidable in a direction parallel to the axis C1, and its tip is bent in a crank shape. On the other hand, the support arm 41 is also provided with a hole 46 parallel to the axis C1. By inserting the tip of the lock member 44 into the hole 46, the support arm 22 is rotated at a predetermined position. Be bound.
[0012]
The support arm 42 is supported by a hinge 50 so as to be rotatable around the axis C2, and a rectangular slot 51 parallel to the axis C2 is formed in the support plate 40 in the vicinity thereof. The elongated hole 51 is slidably provided with an L-shaped lock rod 52 as a whole. As shown in FIG. 8, the lock rod 52 is slid to the front position, thereby sandwiching the support arm 42 between the lock plate 52 and the support plate 40. It is designed to be fixed to a position that supports By retracting the lock bar 52, the support arm 42 is released from the restrained state and can be freely rotated. The support arm 42 is urged counterclockwise in FIG. 8 by urging the support arm 42 with a tension spring or the like or using a torsion spring acting around the axis C2. It is good also as a system rotated upwards by a force.
[0013]
Instead of the mechanism using the lock rod 52, a mechanism shown in FIG. 9 may be used. That is, a locking member 61 having an L-shaped cross section that is rotatably supported around the shaft 60 is used, and the supporting arm 42 is connected to the supporting plate 40 using a plate-like portion 62 on the distal end side of the locking member 61. It may be sandwiched between them and fixed at a predetermined position.
[0014]
The operation when the load port configured as described above is mounted on the transport carriage 32 will be described with reference to FIGS.
First, the support arms 41 and 42 are restrained by the lock member 44 and the lock rod 52 so that the support arms 41 and 42 of the wheels 22 to 25 have a vertical posture as shown in FIG. Next, as shown in FIG. 4, when the mounting plate 13 is removed from the semiconductor manufacturing apparatus 1 by loosening the surrounding bolts, the load port is supported by the wheels 22 to 25 and becomes movable.
When the load port is moved to the left in FIG. 4 in this state, the load port approaches the transport carriage 32 as shown in FIG.
[0015]
In this embodiment, the lower surface of the horizontal frame 20 of the load port supported by the wheels 22 to 25 is set slightly lower than the upper surface of the transport carriage 32 (specifically, such a positional relationship is established). The length of the support arms 41 and 42 and the angle in the fixed state are set), so that the tip of the horizontal frame 20 is lifted as shown in FIG. When the restraint of the support arm 41 is released by pressing the lock member 44 and then releasing the restraint of the support arm 41, the support arm 41 is rotated in the clockwise direction in FIG. 22 (23) moves backward. In the embodiment, the force of the tension spring 43 is sufficiently increased to automatically retract (rise) the wheel 22 (23). However, the spring is omitted and the load port is pushed onto the transport carriage 32. It may be configured to be lifted by being pushed by the side surface of the transport carriage 34 or to be lifted by rotating the support arm 41 manually by an operator.
[0016]
Further, the load port is pushed onto the conveyance carriage 32, and when it is confirmed that the center of gravity is surely placed on the conveyance carriage 32, the lock rod 52 is pushed in to release the restraint of the support arm 42, and the manual operation is performed. The wheel 24 (25) is retracted upward while rotating the arm 42 about the axis C2. In the illustrated case, the wheel 24 (25) is retracted to a position where the axis is vertical. In the illustrated case, the rear wheels 24 (25) are configured to move and be accommodated at right angles to the insertion direction of the load port, so that all the wheels are accommodated above the horizontal frame 20 without protruding. If the counterclockwise force of FIG. 8 is applied to the support arm 42 using a spring or the like, the retracting operation of the wheel 24 (25) can be automatically performed only by pushing the lock rod 52. . In these series of operations, the track provided for the traveling of the automatic transport cart in the semiconductor manufacturing facility is also used for the travel of the transport cart for the load port transport, so that it protrudes from the floor into the facility. The track that is provided in this way does not become an obstacle to this loading operation.
[0017]
On the other hand, when the load port placed on the transport carriage 32 is lowered, the entire load port is pulled to the right in the drawing from the state shown in FIG. 7 and before the center of gravity of the load port goes out of the transport carriage 32. Then, the wheel 24 (25) is lowered by manual operation, and the lock rod 52 is pulled and fixed. Next, the load port is further pulled out, and the wheel 22 (23) is lowered by manual operation with the tip of the horizontal frame 20 slightly left on the upper surface of the transport carriage 32 as shown in FIG. 6, and the lock member 44 is pulled and fixed. To do. After confirming that all the wheels 22 to 25 are lowered, the load port is further pulled out, positioned at a predetermined position of the semiconductor manufacturing apparatus 1 through the state of FIG. 5 and the state of FIG. 4, and each bolt is tightened. Installation is complete.
[0018]
In the above embodiment, the lower surface of the horizontal frame 20 is configured to be slightly lower than the upper surface of the transport carriage 32. However, even when the lower surface of the horizontal frame 20 is configured to be slightly higher than the upper surface of the transport cart 32, If the wheels 22 (23) are lifted while the load port is tilted forward and the lower surface of the horizontal frame 20 is in contact with the transport carriage 32, loading and unloading can be performed by the same operation as described above. Therefore, by setting the lengths, fixing angles, etc. of the support arms 41 and 42 so that the lower surface of the horizontal frame 20 is almost the same height as the upper surface of the transport carriage 24, the above loading and unloading operations can be performed without any trouble.
[0019]
In the above embodiment, the support arm of the front wheel is automatically housed in the raised position by the spring and the support arm of the rear wheel is housed in the raised position by manual operation. Of course, it is good also as a structure which lowers 42, and the structure which operates each support arm 41 and 42 manually. Further, the support arms 41 and 42 may be moved up and down, locked and released electrically by a motor or solenoid.
[0020]
In the above embodiment, two load ports are provided in one semiconductor manufacturing apparatus, but it goes without saying that the number of load ports is not limited to this. .
[0021]
【The invention's effect】
As apparent from the above description, the present invention includes a frame having a plurality of wheels are attached, and a body having a mounting portion which the transported object is placed, the body is capable mounting tower, predetermined path in conveying apparatus comprising a transport carriage which moves along, the vehicle wheel, and a state for supporting the frame lower surface and the surface for mounting the body of the conveyance carriage of the frame substantially not equal in height, the The support mechanism is attached to the frame via a support mechanism that can be switched to a state of being stored above the frame without protruding from the side surface and the lower surface of the frame, and the support mechanism includes the first support mechanism and the second support mechanism. A plurality of wheels including a first wheel supported by the first support mechanism and a second wheel supported by the second support mechanism. The support mechanism is the first vehicle. And a first arm supported rotatably about the frame around an axis parallel to the rotation axis of the first wheel, and the first arm First fixing means that can be fixed at a position protruding from the lower surface of the frame, and the second support mechanism supports the second wheel in a rotatable state, and the second wheel. A second arm supported pivotally with respect to the frame about an axis arranged in a direction different from a direction in which the rotation axis is arranged, and the second arm projecting from the lower surface of the frame Second fixing means that can be fixed at the position, and by operating the support mechanism and storing the wheel upward together with the operation of placing the main body on the transport carriage using the wheel, Easily place the main body on a transport carriage Door can be. Further , the movement in the one direction of the main body does not cause the force in the retracting direction to act on both support mechanisms simultaneously, so that the stability in the state where the main body is supported by the wheels is enhanced . Apparatus for transferring 請 Motomeko 4 includes a mounting plate to be mounted vertically on one side surface of the semiconductor manufacturing apparatus, is supported horizontally on the mounting plate, the transported object is to be placed to be carried or transported to the semiconductor manufacturing device and placing portion, and a horizontal frame forming the device underside provided below the mounting plate, and a plurality of wheels for supporting the substantially vertical position the mounting plate attached to the horizontal frame, said wheels at least two One or more, movable between a lowered position for supporting the mounting plate, and a raised position that is stored above the horizontal frame without up from the lowered position protrudes from the side surface and the lower surface of the horizontal frame and a support mechanism for supporting, the support mechanism is composed of a first supporting mechanism and the second supporting mechanism, a plurality of said wheels, first to be supported by the first support mechanism And a second wheel supported by the second support mechanism, wherein the first support mechanism rotatably supports the first wheel and a rotation shaft of the first wheel. A first arm supported so as to be rotatable with respect to the mounting plate about an axis parallel to the first plate, and first fixing means capable of fixing the first arm at the lowered position, The second support mechanism is a second arm supported so as to be rotatable with respect to the mounting plate about an axis arranged in a direction different from a direction in which the rotation axis of the second wheel is arranged. And the second fixing means capable of fixing the second arm at the lowered position, the transfer device can be easily attached to or removed from the semiconductor manufacturing apparatus for repair and maintenance. it is possible.
[Brief description of the drawings]
FIG. 1 is a perspective view of a load port portion according to an embodiment. FIG. 2 is a perspective view of a conveyance carriage according to an embodiment. FIG. 3 is a perspective view of a modification of the conveyance carriage. Explanatory diagram of loading operation [FIG. 5] Explanatory diagram of loading operation of load port in one embodiment. [FIG. 6] Explanatory diagram of loading operation of load port in one embodiment. [FIG. 7] Loading operation of load port in one embodiment. FIG. 8 is a perspective view of a wheel support mechanism according to an embodiment. FIG. 9 is a perspective view of another modified example of the wheel support mechanism. FIG. 10 is a perspective view showing the appearance of a conventional semiconductor manufacturing facility. FIG. 11 is a perspective view showing the appearance of a conventional load port section.
DESCRIPTION OF SYMBOLS 1 Semiconductor manufacturing apparatus 2 Load port 3 Storage container 5 Container mounting part 13 Mounting plate 20 Horizontal frame 22 Wheel 23 Wheel 24 Wheel 25 Wheel 40 Support plate 41 Support arm 42 Support arm 43 Tension spring 44 Lock member 45 Support hole 46 Hole 50 Hinge 51 Long hole 52 Lock rod 60 Shaft 61 Lock member 62 Plate-shaped part

Claims (5)

Frame in which a plurality of wheels are attached, and a body having a mounting portion which the transported object is placed, it is possible the body the mounting tower, in the transport apparatus comprising a transport carriage that moves along a predetermined path ,
The vehicle wheel, the lower surface and the surface for mounting the body of the conveyance carriage of the frame and the condition for supporting the frame at approximately equal has a height, above the frame without protruding from the side surface and the lower surface of the frame It is attached to the frame via a support mechanism that can be switched to a stored state ,
The support mechanism includes a first support mechanism and a second support mechanism,
The plurality of wheels include a first wheel supported by the first support mechanism and a second wheel supported by the second support mechanism,
The first support mechanism supports the first wheel in a rotatable state, and is supported so as to be rotatable with respect to the frame about an axis parallel to the rotation axis of the first wheel. And a first fixing means capable of fixing the first arm at a position protruding from the lower surface of the frame,
The second support mechanism supports the second wheel in a rotatable state, and has the frame centered on an axis arranged in a direction different from a direction in which the rotation axis of the second wheel is arranged. And a second fixing means capable of fixing the second arm at a position protruding from the lower surface of the frame . The said 1st wheel is attached to the front side of the advancing direction at the time of mounting the said main body in the said conveyance trolley, The said 2nd wheel is attached to the advancing direction back side of Claim 1 characterized by the above-mentioned. Conveying device. The second arm is supported so as to be rotatable with respect to the frame about an axis arranged in a direction orthogonal to a direction in which a rotation axis of the second wheel is arranged. The transport apparatus according to claim 1 or 2. A mounting plate vertically attached to one side of the semiconductor manufacturing apparatus;
A mounting portion that is horizontally supported by the mounting plate and on which an object to be carried into or out of the semiconductor manufacturing apparatus is placed;
A horizontal frame provided at a lower portion of the mounting plate and constituting a lower surface of the apparatus;
A plurality of wheels attached to the horizontal frame and supporting the mounting plate in a substantially vertical position ;
At least two of said wheels, and a lowered position for supporting the mounting plate, the raised position to be stored above the horizontal frame without up from the lowered position protrudes from the side surface and the lower surface of the horizontal frame And a support mechanism that is movably supported between
The support mechanism includes a first support mechanism and a second support mechanism,
The plurality of wheels include a first wheel supported by the first support mechanism and a second wheel supported by the second support mechanism,
The first support mechanism rotatably supports the first wheel and is rotatably supported with respect to the mounting plate about an axis parallel to the rotation axis of the first wheel. A first arm and first fixing means capable of fixing the first arm at the lowered position;
The second support mechanism is a second arm supported so as to be rotatable with respect to the mounting plate about an axis arranged in a direction different from a direction in which the rotation axis of the second wheel is arranged. And a second fixing means capable of fixing the second arm at the lowered position . The first wheel is attached to the front side in the traveling direction when unloading from the semiconductor manufacturing apparatus, and the second wheel is attached to the rear side in the traveling direction,
The second arm is supported in a state of being rotatable with respect to the horizontal frame about an axis arranged in a direction orthogonal to a direction in which the rotation axis of the second wheel is arranged. The delivery device according to claim 4, characterized in that:

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