JP4094596B2 - Temperature control device - Google Patents

Description

  The present invention relates to a temperature control device that controls the temperature of a sample.

  FIG. 15 is a configuration diagram of the environmental test apparatus 51 disclosed in Patent Document 1. The environmental test apparatus 51 supplies the air whose temperature is controlled by the temperature control mechanism 54 into the test tank 53 formed by the heat insulating box 52, and the test object 55 on the workpiece mounting table 56 arranged in the test tank 53 is supplied. Cool or heat. The air exchanged heat with the device under test 55 is discharged from the inside of the test tank 53 through the air circulation port 58. In addition, the work mounting table 56 is provided with a heat storage unit 57, and the product under test 55 is also subjected to heat transfer from the work mounting table 56 and temperature controlled.

By the way, since this environmental test apparatus 51 controls the temperature of the DUT 55 by supplying hot air or cold air into the test tank 53 that houses the DUT 55, the apparatus becomes large. Further, the temperature of the DUT 55 can be controlled by bringing air at a constant temperature into contact with the DUT 55. However, when a plurality of DUTs 55 are arranged on the workpiece mounting table 56, the DUT If 55 is for high-frequency applications such as LEDs and photodiodes, the electromagnetic waves emitted by other adjacent products under test 55 become noise. Therefore, in such an environmental test apparatus 51, it is necessary to test the products under test 55 one by one, and it was not possible to test a large number of products under test 55 at the same time.
JP 2003-294797 A

  Therefore, an object of the present invention is to provide a temperature control apparatus that has extremely good thermal conductivity and can simultaneously test a large number of samples.

  In order to solve the above-mentioned problem, in the invention of claim 1, a sample placing portion is provided on a heat transfer plate heated or cooled to a predetermined temperature by a heating device or a cooling device, and the sample is placed on the sample placing portion. In the temperature control device that performs temperature control of the above, a lid that covers the sample placed on the sample mounting portion is provided to form an air layer stopped above the sample, and the lid is thermally transferred from the heat transfer plate, The air in the air layer in the room formed by the heat transfer plate and the lid is heat-transferred from the heat transfer plate and the lid, and the temperature of the sample is controlled by the heat transfer plate and the air.

According to a second aspect of the present invention, in the first aspect of the present invention, a recess is formed on the heat transfer plate, and a sample mounting portion is provided in the recess.
The depth of the recess may be larger or smaller than the height of the sample. When the sample is completely contained in the recess, heat transfer from the inner wall of the recess is facilitated.

In the invention of claim 3, in the invention of claim 1 or 2, a plurality of samples are arranged at intervals, and each sample is covered with a separate lid.
A plurality of samples may be arranged on one wide sample mounting section, or a plurality of sample mounting sections may be provided, and the samples may be arranged on each sample mounting section.

  In the invention of claim 4, in the invention of claim 3, the lid is provided with a magnetic shield material.

According to a fifth aspect of the present invention, in any one of the first to fourth aspects of the present invention, the sample mounting portion is provided with a heat conductive sheet, and the sample is disposed on the heat conductive sheet.
When the heat conductive sheet having adsorptivity is employed, the work of fixing the sample to the sample mounting portion becomes unnecessary, and the working time can be greatly shortened.

According to a sixth aspect of the present invention, in the invention according to any one of the first to fifth aspects, the lid is provided with a hole into which a transparent member that allows observation of a sample having a light emitting portion is fitted .

  According to the first aspect of the present invention, the sample mounting portion is provided on the heat transfer plate heated or cooled to a predetermined temperature by the heating device or the cooling device, and the cover for covering the sample placed on the sample mounting portion is provided. Since the lid transfers heat from the heat transfer plate, the air in the stopped air layer formed by the heat transfer plate and the lid is heated by the heat transfer plate and the lid, and the temperature rises. Since the sample can be heated from the surroundings with the transmission plate, the temperature of the sample can be raised uniformly without partial deviation.

  In the invention of claim 2, since the recess is formed on the heat transfer plate and the sample mounting portion is provided in the recess, the temperature of the sample is easily increased by heating air from the inner wall of the recess. Can be adjusted quickly.

  When the invention of claim 3 is carried out, a plurality of samples can be simultaneously tested under the same environment. Therefore, many samples can be tested in a short time.

  In the invention of claim 4, since the lid is provided with a magnetic shield material, a plurality of samples can be tested at the same time without being influenced by other adjacent samples even if the sample is a component for high frequency applications. it can. Therefore, the reliability of the test is improved, and the performance of the sample is easily made uniform.

  According to the fifth aspect of the present invention, since the sample mounting portion is provided with the heat conductive sheet and the sample is disposed on the heat conductive sheet, the heat transfer to the sample can be further improved.

According to the sixth aspect of the present invention, since the hole fitted with a transparent member that enables observation of the sample having the light emitting portion is provided, the light emission state of the sample can be confirmed while performing temperature control.

  FIG. 1 is a perspective view of a temperature control apparatus 1 embodying the invention of claim 1. As shown in FIG. 1, the temperature control device 1 includes a heat transfer plate 2 having a sample placement unit 3 on the upper surface, and a lid 4. The heat transfer plate 2 is made of a metal having a good heat transfer coefficient such as an aluminum alloy, and can be heated or cooled by a heating device or a cooling device (not shown). Similarly to the heat transfer plate 2, the lid 4 is also made of a metal having a good heat transfer coefficient such as an aluminum alloy.

  The heat transfer plate 2 shown in FIG. 1 is provided with two sample placement units 3, and a lid 4 is provided only on one of the sample placement units 3. A sample 10 is installed on the sample placement unit 3. Although not shown, the sample 10 is fixed to the sample mounting portion 3 with, for example, a screw, an adsorbing or adhesive sheet material, a leaf spring, or the like.

  After fixing the sample 10 to the sample mounting portion 3, the lid 4 is put on. Thereafter, the heat transfer plate 2 is heated or cooled to a predetermined temperature. Since the cover 4 has a good heat transfer coefficient as with the heat transfer plate 2, the heat transfer plate 2 is quickly transferred (heated or cooled), and the heat transfer plate 2 and the cover 4 have a uniform temperature.

  Furthermore, the air in the internal space 25 (shown in FIG. 4 described later) in which the sample 10 is accommodated is heat transferred (heated or cooled) from the heat transfer plate 2 and the lid 4, and the sample 10 transfers heat with this air. Heat is transferred from the surroundings by the plate 2 and uniformly heated or cooled without causing a temperature distribution.

  FIG. 2 is a perspective view of the temperature control device 11 embodying the invention of claim 2. The configuration of the temperature control device 11 is different from the configuration of the temperature control device 1 of FIG. 1 only in that a recess 5 is formed on the heat transfer plate 2 and the sample placement portion 3 is provided in the recess 5. Other configurations are the same as those of the temperature control apparatus 1.

  As shown in FIG. 2, the lid 4 has a size that can be fitted into the recess 5, and the lower side surface of the lid 4 is in contact with the heat transfer plate 2, as in the temperature control device 1 of FIG. 1. Furthermore, compared with the case where it installs on the heat transfer plate 2 simply, the contact area of the lid | cover 4 and the heat transfer plate 2 is large, and more efficient heat transfer is possible.

  FIG. 3 is a perspective view of the temperature control device 12 embodying the invention of claim 5. The configuration of the temperature control device 12 is only that the heat conduction sheet 6 is pasted on the heat transfer plate 2, the sample placement portion 3 is formed on the heat conduction sheet 6, and the sample 10 is placed. It differs from the structure of the temperature control apparatus 1 of FIG.

  Since the heat conductive sheet 6 improves the adhesion between the heat transfer plate 2, the lid 4 and the sample 10, the heat transfer effect is enhanced. Accordingly, the temperature control device 12 can control the temperature of the sample 10 more efficiently than the temperature control device 1 of FIG.

  FIG. 4 is a cross-sectional view of the temperature control device 13 in which the invention of claim 4 is implemented. The configuration of the temperature control device 13 is different from the configuration of the temperature control device 1 of FIG. 1 only in that a magnetic shield material 7 that absorbs electromagnetic waves is provided on the inner surface of the lid 4.

  By providing the magnetic shield material 7 on the lid 4, when the sample 10 is an optical device for high frequency applications such as an LED or a photodiode, it may be affected by the noise of electromagnetic waves emitted by other adjacent samples 10. Absent. In the example of FIG. 4, the magnetic shield material 7 is provided on the inner surface of the lid 4, but it may be provided on the outer surface of the lid 4 or built in.

  5-9 is sectional drawing of the temperature control apparatuses 14-18 provided with another structure. In the temperature control device 14 shown in FIG. 5, the recess 5 is provided in the heat transfer plate 2, and the magnetic shield material 7 is provided on the inner surface of the lid 4. The lid 4 is fitted with the recess 5.

  In the temperature control device 15 shown in FIG. 6, the sample 10 is fitted in the recess 5 (sample mounting portion 3), and the lid 4 provided with the magnetic shield material 7 is disposed on the heat transfer plate 2. . In the example of the temperature control device 15, since the sample 10 is in contact with the heat transfer plate 2 not only at the bottom but also at the side, the temperature can be controlled very well.

  In the temperature control device 16 shown in FIG. 7, an example is shown in which a heat conductive sheet 6 is affixed on the heat transfer plate 2 and the magnetic shield material 7 is provided on the lid 4. The configuration of the temperature control device 16 is simpler than the configuration of the temperature control devices 14 and 15, is easy to manufacture, has a good heat transfer rate, and is not affected by the electromagnetic waves emitted from the adjacent sample 10.

  The temperature control device 17 shown in FIG. 8 has a configuration in which the heat conductive sheet 6 is attached to the bottom surface of the recess 5 (sample mounting portion 3) in the temperature control device 14 shown in FIG. Therefore, the temperature control device 17 can control the temperature of the sample 10 better than the temperature control device 14 by the amount provided with the heat conductive sheet 6.

  The temperature control device 18 shown in FIG. 9 has a configuration in which the heat conductive sheet 6 is attached to the bottom surface of the recess 5 in the temperature control device 15 of FIG. Therefore, the temperature control device 18 can control the temperature of the sample 10 better than the temperature control device 15 by the amount of the heat conductive sheet 6 provided.

  FIG. 10 is a plan view of a temperature control device 19 that can control the temperature of a plurality of samples 10 simultaneously. In FIG. 10, for convenience of explanation, the lid 4 is not shown, and the sample 10 is not installed only on the one sample mounting unit 3 in the lower right.

  The sample placement section 3 is provided with a recess 5, and although not shown, a heat conductive sheet 6 is stuck in the recess 5. Further, since the sample 10 is tested while being energized, a power cable 10a is provided. The heat transfer plate 2 is provided with a groove 2a for passing the power cable 10a.

  Furthermore, although not shown in FIG. 10, the influence of electromagnetic waves emitted from other adjacent samples 10 is blocked by individually covering each sample 10 with the lid 4 provided with the magnetic shield material 7. Since the temperature control device 19 can simultaneously control the temperature of a large number of samples 10, it is useful when testing an optical device such as an LED or a photodiode for high frequency applications as the sample 10.

  FIG. 11 is a perspective view of a temperature control device 20 which is a modification of the temperature control device 19 of FIG. In the temperature control device 20, the sample mounting substrate 8 is installed inside the heat transfer plate 2. On the sample mounting substrate 8, a large number (15 in FIG. 11) of sample mounting portions 9 are provided.

  The sample mounting portion 9 is provided with a sample 10 (LED). FIG. 11 shows a state in which two samples 10 are installed. The lid 4 is provided with an observation hole 4 a at a position corresponding to the sample mounting portion 9. When the bolt hole 4b of the lid 4 and the bolt hole 2b of the heat transfer plate 2 are aligned and fixed with bolts and nuts, the light emission state of the sample 10 (LED) can be observed from the observation hole 4a. It has become. In the temperature control device 20 of FIG. 11, the sample 10 (LED) can be observed with a luminance meter from directly above.

  FIG. 12 is a cross-sectional view of the temperature control device 21 when the temperature of the LED as the sample 10 is controlled. As shown in FIG. 12, a hole 26 is provided in the lid 4 of the temperature control device 21. The other configuration of the temperature control device 21 is the same as the configuration of the temperature control device 17 of FIG. In the temperature control device 21, the samples 10 are accommodated in separate lids 4, and the light emission state of the sample 10 can be confirmed through the holes 26. A transparent member may be fitted into the hole 26 so that the internal space 25 is completely blocked from outside air.

  11 and 12 show the case where the sample 10 itself is an LED, but when an LED is used as a part of the sample 10, a lid is provided so that the light emission state of the LED can be observed from the outside. 4 is provided with a hole.

  FIG. 13 is a perspective view of a temperature control device 22 provided with a tubular member 27 instead of the lid 4 in FIGS. 11 and 12. The temperature control device 22 is provided with a sample mounting portion 8 for mounting a plurality of samples 10 (LEDs). A cylindrical member 27 is installed in the sample mounting portion 8 so that the individual samples 10 attached to the sample mounting portion 8 are accommodated therein.

  Although not shown, a sheet-like magnetic shield material is affixed to the inner peripheral wall of the cylindrical member 27. Further, a flange portion is provided at the lower portion of the cylindrical member 27, a through hole is provided in the flange portion, and a screw hole is provided in the sample mounting portion 8, so that the cylindrical member 27 is fixed to the sample mounting portion 8 with a bolt. It may be.

  FIG. 14 is a perspective view of the temperature control device 23 provided with a leaf spring 28 for pressing the sample 10. As shown in FIG. 14, the temperature control device 23 is provided with a plurality of recesses 5 on the heat transfer plate 2. The recess 5 communicates with the groove 2 a having a shallower depth than the recess 5. The groove 2 a reaches the side surface of the heat transfer plate 2.

  A leaf spring 28 is provided in the vicinity of the recess 5 so as to be rotatable about a shaft 28a. The leaf spring 28 is made of an elastic material (metal, plastic, etc.), and is provided with a protruding portion 28b protruding downward. The leaf spring 28 is rotated 90 degrees in advance and retracted from above the recess 5 before the sample 10 is placed in the recess 5. The leaf spring 28 is preferably made of a metal having good thermal conductivity.

  After placing the sample 10 in the recess 5, the leaf spring 28 is rotated, and the sample 10 is pressed against the bottom of the recess 5 by the protruding portion 28 b of the leaf spring 28. When such a leaf spring 28 is provided, the adhesion between the sample 10 and the heat transfer plate 2 becomes good, and heat transfer is performed well. Furthermore, the sample 10 is heat-transferred through the leaf spring 28.

  Furthermore, by providing a lid (not shown) that covers the sample 10 to form a stopped air layer above the sample 10 so that heat can be transferred through the air layer, the sample 10 The temperature can be controlled well.

  In each temperature control device shown in FIGS. 1 to 11, the lid 4 not only blocks the internal space 25 (shown in FIGS. 4 to 9) and the outside air but also transfers heat from the heat transfer plate 2 to the lid 4. The air in the internal space 25 is heated or cooled via the lid 4 and the temperature of the heat transfer plate 2 is stabilized.

  Depending on the shape of the sample 10, the shape of the lid 4 can be arbitrarily changed. It is possible to appropriately select whether or not the recess 5 is installed as necessary (in consideration of economic efficiency, the type of the sample 10, and the like).

  In many cases, wiring and various parts are arranged on the bottom surface (back surface) of the sample 10, and it is not easy to closely contact the heat transfer plate 2, but the sample 10 is placed on the insulated heat conductive sheet 6. By placing and covering the sample 10 with the lid 4, heat transfer to the sample 10 becomes extremely good. Further, in order to improve heat transfer between the heat transfer plate 2 and the lid 4 and the sample 10, the lid 4 and the sample 10 may be pressed against the heat transfer plate 2 so as to improve the adhesion between them.

The heat transfer plate 2 and the lid 4 are preferably in contact with each other over a wide range. Further, the sample 10 usually has to be fixed to the sample mounting portion 3 with screws or the like, but the fixing work is not necessary by using the heat conductive sheet 6 having adsorptivity.
Further, the fixing work becomes more complicated as the size of the sample 10 becomes smaller. However, if the heat conductive sheet 6 is used, the fixing work becomes unnecessary, and the effect of improving the work efficiency is increased.

  The shapes of the lid 4 and the internal space 25 (FIG. 4) can be arbitrarily selected according to the shape of the sample 10. For example, if the sample 10 is cylindrical, it is preferable that the lid 4 (internal space 25) is formed in a cylindrical shape because the sample 10 is uniformly heated from the surroundings.

  When the height of the sample 10 is high, a spacer may be provided between the lid 4 and the heat transfer plate 2 to increase the volume of the internal space 25 in the height direction and accommodate the sample 10. The spacer used at that time is selected from a material (aluminum alloy or the like) having a good heat transfer coefficient that can transfer heat from the heat transfer plate 2 to the lid 4 satisfactorily.

It is a perspective view of the temperature control apparatus which implemented invention of Claim 1. It is a perspective view of the temperature control apparatus which implemented invention of Claim 2. It is a perspective view of the temperature control apparatus which implemented invention of Claim 5. It is sectional drawing of the temperature control apparatus which implemented invention of Claim 4. It is sectional drawing of the temperature control apparatus provided with another structure. It is sectional drawing of the temperature control apparatus provided with another structure. It is sectional drawing of the temperature control apparatus provided with another structure. It is sectional drawing of the temperature control apparatus provided with another structure. It is sectional drawing of the temperature control apparatus provided with another structure. It is a top view of the temperature control apparatus which can carry out temperature control of the some sample simultaneously. It is a perspective view of the temperature control apparatus which is a modification of the temperature control apparatus of FIG. It is sectional drawing of the temperature control apparatus in the case of controlling temperature of LED as a sample. It is a perspective view of the temperature control apparatus which employ | adopted the cylindrical member instead of the cover. It is a perspective view of the temperature control apparatus provided with the leaf | plate spring which hold | suppresses a sample. 1 is a configuration diagram of an environmental test apparatus disclosed in Patent Document 1. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Temperature control apparatus 2 Heat transfer plate 3 Sample mounting part 4 Lid 5 Indentation 6 Thermal conductive sheet 7 Magnetic shield material 8 Sample mounting substrate 9 Sample mounting part 10 Samples 11-21 Temperature control apparatus 25 Internal space in which a sample is accommodated ( Room)
26 holes (observation holes on the lid)
27 Cylindrical member 28 Leaf spring

Claims (6)

In the temperature control device for providing a sample mounting portion on a heat transfer plate heated or cooled to a predetermined temperature by a heating device or a cooling device, and controlling the temperature of the sample placed on the sample mounting portion,
Providing a lid that covers the sample placed on the sample mounting portion to form an air layer stopped above the sample;
The lid receives heat from the heat transfer plate,
The air in the air layer formed by the heat transfer plate and the lid is transferred from the heat transfer plate and the lid, and the temperature of the sample is controlled by the heat transfer plate and the air. A characteristic temperature control device.   The temperature control apparatus according to claim 1, wherein a depression is formed on the heat transfer plate, and a sample placement portion is provided in the depression.   The temperature control device according to claim 1 or 2, wherein a plurality of samples are arranged at intervals, and each sample is covered with a separate lid.   The temperature control device according to claim 3, wherein the lid is provided with a magnetic shield material.   The temperature control apparatus in any one of Claims 1-4 which provided the heat conductive sheet in the sample mounting part, and arrange | positioned the sample on the said heat conductive sheet. The temperature control device according to any one of claims 1 to 5, wherein the lid is provided with a hole into which a transparent member that enables observation of a sample including a light emitting unit is fitted .

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