JP4096348B2 - Cable processing equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To resolve an existent elaborate and expensive structure where an arm type robot is used, the robot wiring is positioned outside a vacuum vessel, and a processed substrate holder fixed in the vacuum vessel is operated from the atmosphere side. SOLUTION: Within equipment having a vacuum vessel 1 capable of maintaining an airtight vacuum condition, a longitudinal shaft 3 laid through one side of the vacuum vessel 1 so as to extend from the vacuum interior of the vacuum vessel 1 to the atmospheric exterior, a processed substrate holder 4 fixed to the end of the shaft 3 located in the vacuum vessel 1, a drive 6 for reciprocating the device 4 from the atmospheric exterior via the shaft 3, and a shaft support part 2 joined to the vacuum vessel 1, to the fixing frame of the drive 6 or to both of them integrally to support the reciprocating shaft 3, a cable handling device is so constructed that the shaft 3 forms a hollow shaft, that a connection 3b between the device 4 and the end of the shaft 3 is kept airtight, and that a cable and a cooling water hose 5, both flexible, from the device 4 are connected to a control means through the hollow shaft 3.

Description

[0001]
[Industrial application fields]
The present invention relates to a semiconductor manufacturing apparatus, in particular, a cable to a substrate holding apparatus in a device that reciprocates a hollow shaft penetrating into a vacuum vessel and a substrate holding apparatus fixed to the shaft end from the atmosphere side, and The present invention relates to a processing device such as a cooling water hose.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, for example, an arm type robot is used as a mechanism for holding a substrate to be processed in a vacuum vessel and giving it a transfer operation and a processing operation for the substrate.
In that case, the wiring of the robot is located outside the vacuum vessel, and the cable is not bent by the operation of the robot. However, as a device that holds the substrate to be processed from the viewpoints of space saving, dust generation, gas generation, etc. for delivery of the substrate to be processed in the vacuum vessel and processing to the substrate, the vacuum vessel is A simple structure in which the penetrating shaft and the substrate holding device to be processed fixed in the vacuum container of the shaft are operated from the atmosphere side is desirable.
The to-be-processed substrate holding device may not only hold the substrate but also have a drive shaft, and needs to process the cable. Further, since the processing is performed in a vacuum, when it is necessary to cool the substrate to be processed, for example, if a method of circulating cooling water is used, it is also necessary to process the cooling water hose. These cables and hoses can be arranged and processed in a vacuum vessel.
[0003]
[Problems to be solved by the invention]
By the way, when wiring and piping a conventional cable and hose in a vacuum vessel, use a vacuum-resistant member for the cable and hose, or put the cable and hose in a duct, and put a vacuum-resistant member in the duct. A device that uses a [conventional example] is hereafter considered.
As for the conventional example, it is necessary to provide wiring and piping that can be expected to have a long life against bending caused by the operation of the substrate holding device to be processed so as not to affect the transport of the substrate and the processing to the substrate. .
Therefore, in the case of such a conventional example, since the cable and the hose are made of a vacuum resistant member, the cost becomes high. Wiring in the vacuum vessel requires space in the vacuum vessel, and if there is a significant adverse effect on the vacuum vessel such as dust generation or gas generation, and if water leaks due to hose breakage, the vacuum vessel and pump It is necessary to take sufficient measures since the cable may be seriously damaged, and replacing the cable is a work inside the vacuum vessel. There was a point.
[0004]
Furthermore, there is JP-A-7-205082 as a reference. The purpose of this is to “provide a support device that can be changed arbitrarily with a structure that is small and lightweight in the cable extraction direction from the robot body or moving shaft”, and its configuration is “to the cable extraction hole of the cable extraction case. The holder is fixed, and the fitting part of the elbow adapter is fitted into the groove on the longitudinal end face of the holder, and is rotatably joined around the longitudinal center line of the holder and fixed with screws. The cable supported by the cable holder is connected to the motor by the connector on the holder side and the connector on the cable take-out case side, and the cable is taken out in the plane including the joint surface with the adapter of the holder. Change around the direction center line and fix with screws at that position.You can also remove the adapter from the holder and use it It is set to ".
In this reference, the cable take-out part does not form a movable mechanism, and the cable take-out case or holder / adapter for taking out the cable does not require a vacuum airtight means. The technical category of the invention deviates.
[0005]
Therefore, in view of the problems of the prior art, the present invention provides a substrate to be processed in an apparatus for reciprocating a shaft passing through the vacuum vessel and a substrate holding device fixed to the shaft end in the vacuum vessel from the atmosphere side. Cable and cooling water hose processing device for holding device cable and cooling water hose are inexpensive, have a long service life against shaft reciprocation, can be wired and piping in a small space, and generate dust and gas. It is an object of the present invention to provide a cable processing apparatus that does not adversely affect the inside of the vacuum vessel, does not cause great damage to the inside of the vacuum vessel and the pump, and has excellent maintainability.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, the invention of claim 1 of the present invention includes a vacuum vessel capable of maintaining a vacuum-tight state, and penetrating into the vacuum vessel, and extending over the vacuum side inside and the atmosphere side outside of the vacuum vessel. A longitudinal hollow shaft laid, a substrate holding device positioned inside the vacuum chamber on the vacuum side and hermetically coupled to one end of the shaft, and the atmosphere of the shaft through the shaft hollow A flexible cable and a cooling water hose from the substrate holding apparatus led out to the other end outside the side, and a fixed frame fixed to the atmosphere side outside of the vacuum vessel, and fixed to the other end of the shaft A drive device for reciprocating the substrate to be processed and the shaft in a direction in which the shaft extends, and a shaft fixed to the vacuum vessel and reciprocating the shaft to the vacuum vessel. And a shaft support portion that is airtightly supported. In the semiconductor manufacturing apparatus, the flexible cable and the cooling water hose fixed to the other end of the shaft and led to the other end outside the atmosphere side of the shaft are perpendicular to the reciprocating direction of the shaft. And a cable supporter for guiding the drive device in a direction opposite to the direction in which the drive device is located, a first clamp fixed on the cable supporter and fixing the flexible cable and the cooling water hose; The flexible cable and the cooling water hose are looped back from the first clamp so that the flexible cable and the cooling water hose pass between the connecting member and the shaft support portion. A second clamp that is fixed by a fixing frame of the driving device, wherein the first clamp and the second clamp sandwich the flexible cable and the cooling water hose. The clamp portion is installed in a fixing frame of the cable supporter or the driving device, and the clamp portion is rotated as the flexible cable and the cooling water hose are bent by the reciprocating motion of the shaft. And a holder for holding the semiconductor device .
According to a second aspect of the present invention, there is provided the semiconductor manufacturing apparatus according to the first aspect, wherein the flexible cable and the first cable are provided on the cable supporter and between the connecting member and the first clamp. A flexible cable that is provided with a connector that relays the cooling water hose and a pipe fitting, and that is fixed to the connector box provided on the fixed frame of the drive device by the second clamp and led to the connector box; The semiconductor manufacturing apparatus is provided with a connector for relaying a cooling water hose and a pipe fitting.
Thus, according to the present invention, since the cable and the cooling water hose are wired and piped in the shaft and arranged in the atmosphere, the cable and the cooling water hose do not need to be a vacuum-resistant member, and other parts In comparison with the above, a cable having a relatively short life and a hose for cooling water itself can be reduced in cost, and it is not necessary to provide a space for cable processing in the vacuum vessel. In addition, since there is no cable or cooling water hose wiring or piping in the vacuum vessel, there is no adverse effect on the vacuum vessel such as dust generation or gas generation in the vacuum vessel, and there is a vacuum due to water leakage due to damage to the cooling water hose. There is no risk of major damage to the container and pump. Furthermore, the cable / hose from the substrate holding device to the cable supporter through the shaft does not bend as the shaft reciprocates, and a long life can be expected, while the cable / hose from the cable supporter to the connector box can be expected. The hose repeatedly bends along with the reciprocating movement of the shaft, but since the connection was made using a connector / pipe fitting on the cable supporter, if the cable between the cable supporter and the connector box was replaced, Well, it is a work on the atmosphere side and can be done relatively easily. Furthermore, regarding the life of the cable and the cooling water hose, the clamp part and the bent part are likely to be damaged, but the clamp part on the cable supporter and the clamp part on the frame can be tilted. In addition, the life against breakage at the clamp portion can be extended.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a plan view showing the entire embodiment of the present invention.
FIG. 2 is a plan view showing the details of the clamp of FIG. 1 with a part thereof cut away.
In FIG. 1, a shaft support portion 2 is fixed to a vacuum vessel 1. A bearing or bush (not shown) is incorporated in the shaft support 2 to support the shaft 3. In addition, a seal (not shown) is incorporated, and this seals the vacuum 3a. The vacuum seal method uses O-ring, packing, magnetic fluid, bellows, etc.
A processing substrate holding device 4 is fixed to the shaft end of the shaft 3 inside the vacuum vessel 1. In addition to holding the substrate, this may have a drive shaft, and for example, cooling water may be circulated for substrate cooling.
Accordingly, the cables and the hose for the cooling water are required to be connected. However, the cable / hose 5 from the substrate holder 4 to be processed has a vacuum at the joint between the shaft 3 and the substrate holder 4 to be processed. Seal 3b.
On the atmosphere side, a driving device 6 for driving the shaft 3 and the substrate holding device 4 to be processed is fixed to the vacuum vessel 1 or the shaft support portion 2. As the driving means, a linear motor, a motor and ball screw, an air cylinder, or the like is applied. The movable part in the driving device 6 and the shaft end on the atmosphere side of the shaft 3 are fixed by the connecting member 7, and the shaft 3 and the substrate holding device 4 to be processed provided at the shaft end are caused to reciprocate linearly.
A cable supporter 8 is disposed below the connecting member 7, that is, near the cable outlet of the shaft 3, and a connector / pipe fitting 9 is disposed thereon for relaying.
[0011]
Then, the previous cable hose 5 is fixed by the clamp A • 10 on the cable supporter 8, and from there to the clamp B • 11 provided on the upper part of the frame of the driving device 6, and fixed there. At this time, the cable / hose 5 is fixed to such a length that the cable / hose 5 bends appropriately as the shaft 3 moves up and down.
The clamps A and 10 and the clamps B and 11 can be tilted. For example, as shown in FIG. 2 regarding the structure of the clamp portion 10a, the cable / hose 5 is sandwiched from both sides by the clamp A · 10 divided in two, and the holders 13 are arranged on both sides of the clamp A · 10. The bearing 14 is fixed inside.
The threaded shaft 15 is passed through the bearing 14, and the clamp A · 10 is fixed from both sides by the threaded portion 15a of the threaded shaft 15. At this time, the height of the holder 13 is determined so as not to inhibit the inclination of the clamp A · 10 due to the bending of the cable / hose 5 accompanying the reciprocating motion of the shaft 3.
[0012]
With such a structure of the clamp portion 10a, the clamp portion 10a can be tilted more than the inclination of the clamp A · 10 due to the bending of the cable / hose 5 accompanying the reciprocating motion of the shaft 3, so Prevents the lifespan from being reduced due to local force.
The cable / hose 5 fixed by the clamp B • 11 is led to the connector box 12 provided at the lower part of the frame of the driving device 6 and fixed there by the connector / pipe fitting 9. From there, the cable hose 5 is connected to a controller or the like.
Relaying on the cable supporter 8 and the connector box 12 using the connector / pipe fitting 9 is expected to have a short life of the bent part of the cable / hose 5 due to the vertical movement of the shaft 3, so the cable should be replaced. This is to make it easier.
If the controller is arranged close to the drive device 6, the clamp B11 may be directly connected to the controller.
[0013]
【The invention's effect】
As described above, according to the present invention, since the cable and the cooling water hose are wired and piped in the shaft and arranged in the atmosphere, it is necessary to make the cable and the cooling water hose a vacuum-resistant member. Therefore, it is possible to reduce the cost of the cable and the cooling water hose itself, which have a relatively short life compared with other parts, and there is a special effect that it is not necessary to take a space for cable processing in the vacuum vessel.
In addition, since there is no cable or cooling water hose wiring or piping in the vacuum vessel, there is no adverse effect on the vacuum vessel such as dust generation or gas generation in the vacuum vessel. The remarkable effect can be exhibited that there is no fear of damaging the inside of the container and the pump.
Furthermore, the cable / hose from the substrate holding device to the cable supporter through the shaft does not bend as the shaft reciprocates, and a long life can be expected, while the cable / hose from the cable supporter to the connector box can be expected. The hose repeatedly bends along with the reciprocating movement of the shaft, but since the connection was made using a connector / pipe fitting on the cable supporter, if the cable between the cable supporter and the connector box is replaced, Well, it is a work on the atmosphere side and can be done relatively easily, and the practical effect is great.
Furthermore, regarding the life of the cable and the cooling water hose, the clamp part and the bent part are likely to be damaged, but the clamp part on the cable supporter and the clamp part on the frame can be tilted. The service life against breakage at the clamp portion can be extended, and its usefulness is further improved.
[Brief description of the drawings]
FIG. 1 is a plan view showing the overall configuration of an embodiment of the present invention. FIG. 2 is a plan view showing the details of the clamp shown in FIG.
1 Vacuum container 2 Shaft support 3 Shaft
3a Seal part
3b Connecting part 4 Substrate holding device 5 Cable / hose 6 Drive device 7 Connecting material 8 Cable supporter 9 Connector / pipe fitting
10 Clamp A
10a Clamp part
11 Clamp B
12 Connector box
13 Holder
14 Bearing
15 Threaded shaft
15a Screw part

Claims (2)

A vacuum container capable of maintaining a vacuum-tight state;
A shaft having an elongated hollow shape that penetrates into the vacuum vessel and is laid across the vacuum side inside and the atmosphere side outside of the vacuum vessel ,
A target substrate holding device located inside the vacuum side of the vacuum vessel and hermetically coupled to one end of the shaft ;
A flexible cable and a cooling water hose from the target substrate holding device led to the other end outside the atmosphere side of the shaft through the hollow of the shaft;
A fixed frame is fixed outside the atmosphere side of the vacuum container, and the substrate to be processed and the shaft are reciprocated in a direction in which the shaft extends through a connecting member fixed to the other end of the shaft. Equipment,
In a semiconductor manufacturing apparatus comprising: a shaft support portion fixed to the vacuum vessel and supporting the reciprocating shaft in an airtight manner with respect to the vacuum vessel ;
The flexible cable and the cooling water hose fixed to the other end of the shaft and led to the other end outside the atmosphere side of the shaft are perpendicular to the direction of the reciprocating motion of the shaft and the driving device A cable supporter that guides in a direction opposite to the direction in which the
A first clamp fixed on the cable supporter and fixing the flexible cable and cooling water hose;
The flexible cable and the cooling water hose so that the flexible cable and the cooling water hose are looped back from the first clamp and pass between the coupling member and the shaft support portion. And a second clamp for fixing the same with a fixed frame of the drive device,
The first clamp and the second clamp are installed in a clamp part that sandwiches the flexible cable and the cooling water hose, and a fixed frame of the cable supporter or the driving device. A semiconductor manufacturing apparatus, comprising: a holder that holds the clamp portion so that the clamp portion rotates in accordance with the bending of the flexible cable and the cooling water hose. The semiconductor manufacturing apparatus according to claim 1.
  On the cable supporter and between the connecting member and the first clamp, a connector and a pipe fitting for relaying the flexible cable and the cooling water hose are provided.
The connector box provided on the fixed frame of the driving device is provided with a connector and a pipe fitting for relaying the flexible cable and the cooling water hose fixed to the connector box by the second clamp. A semiconductor manufacturing apparatus.

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