JP4103272B2 - Pulse power supply cooling method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for cooling a pulse power supply apparatus that combines a pulse generation circuit using a power semiconductor switch and a magnetic pulse compression circuit using a saturable reactor and a capacitor to generate a large current pulse with a high repetition rate and a narrow width, In particular, it relates to cooling of circuit elements housed in oil-tight tanks, and is used in high voltage pulse generation circuits such as excimer racers.
[0002]
[Prior art]
FIG. 11 shows a circuit diagram of a conventional pulse power supply device. The pulse generation circuit 1 is provided with a first-stage capacitor CO for power, and the first-stage capacitor CO is initially charged by a high-voltage charger 2 to turn on the semiconductor switch SW. Under control, the pulse current I0 is supplied from the first stage capacitor CO to the pulse transformer PT via the saturable reactor SI0. The saturable reactor SI0 performs a saturation operation after the semiconductor switch SW is completely turned on to generate a pulse current I0, thereby reducing the duty of the semiconductor switch SW and reducing switching loss.
[0003]
A magnetic pulse compression circuit 3 is connected to the secondary side of the pulse transformer PT, and the pulse current I0 is boosted by the pulse transformer PT to become the pulse current I1, and the capacitor C1 is charged with high voltage, and is saturated with the charging voltage of the capacitor C1. When the reactor SI1 operates as a magnetic switch, a narrow pulse current I2 compressed by magnetic pulses is applied to the capacitor C2 in the direction shown in the figure to charge the capacitor C2 with a high voltage. Further, the saturable reactor SI2 operates as a magnetic switch with the charging voltage of the capacitor C2, so that a further narrow pulse current I3 flows in the direction shown in the figure, and a narrow and high voltage pulse is applied to the load 4 such as the chamber of the laser head. The current I3 is repeatedly supplied.
[0004]
Here, in the core used for the saturable reactors SI0 to SI2 and the pulse transformer PT, a hysteresis loss and an eddy current loss due to a high repetition pulse current flowing in the winding occur, and the temperature rises. Further, the semiconductor switch SW also generates heat due to loss during the switching operation. These heat generating circuit elements are housed in an oil-tight tank for cooling (the semiconductor switch SW may be water-cooled or air-cooled outside the oil-tight tank). Further, since the capacitors C1 and C2 are arranged close to each other so that a narrow pulse current can flow between the saturable reactors SI0 and SI1, they are collectively stored in an oil-tight tank. As the refrigerant of the oil-tight tank, a highly insulating liquid such as insulating oil or fluorinate is used.
[0005]
There existed what was shown in FIG.12 and FIG.13 as a cooling device of the conventional pulse power supply device. FIG. 12 is a cross-sectional view of a natural convection type cooling device. Oil 6 is stored in the oil-tight tank 5, and air 7 is present in the upper part of the oil-tight tank 5. A heating element 8 composed of the circuit elements as described above is immersed in the lower part of the oil 6, and a radiator 9 is immersed in the upper part of the oil 6. Cooling inserted into the radiator 9 from above the oil-tight tank 5. A water inflow pipe 10 and an outflow pipe 11 are connected, and a baffle 12 for adjusting the oil flow is provided between the heating element 8 and the radiator 9.
[0006]
In the cooling device of FIG. 12, the oil 6 around the exothermic material 8 takes heat away from the exothermic material 8, and this oil moves upward as the specific gravity is reduced. On the other hand, cooling water flows into the radiator 9 from the inflow pipe 10 and flows out from the outflow pipe 11. The heated oil is cooled by coming into contact with the radiator 9, the specific gravity is increased, and the oil moves downward. Such an oil flow is adjusted so as to flow efficiently by a guide called a baffle 12, and the heat generating material 8 is cooled by such natural convection.
[0007]
FIG. 13 is a schematic configuration diagram of a forced convection type cooling device, and a heat generating material is immersed in the oil stored in the oil-tight tank 5. The oil-tight tank 5 is provided with an oil inflow pipe 13 and an outflow pipe 14, and a pipe 17 is connected to the inflow pipe 13 and the outflow pipe 14 through joints 15 and 16. A pump 18 and heat exchange are connected to the pipe 17. A cooler pipe 20 is inserted in the heat exchanger 19.
[0008]
In the cooling device of FIG. 13, oil forcedly circulated between the oil-tight tank 5 and the pipe 17 by the pump 18 is cooled by heat exchange with the cooling water in the heat exchanger 19, and the cooled oil is It flows into the oil-tight tank 5 from the inflow pipe 13 and is sprayed on the heat generating material. As a result, the heat generating material is cooled and the oil is heated, and the heated oil flows out of the oil-tight tank 5 from the outflow pipe 14 and is circulated again.
[0009]
[Problems to be solved by the invention]
However, in the cooling device shown in FIG. 12, since the convection is caused by a physical phenomenon of change in specific gravity of oil, the flow is weak and the cooling capacity is low. For this reason, when the heat generation amount of the circuit element increases due to the high repetition rate of the pulse power supply or the shortening of the pulse due to multistage compression, the cooling cannot be performed. Further, the cooling device shown in FIG. 13 has a high cooling capacity, but requires a pump 18 and the like, resulting in an increase in the size of the device and an increase in cost. In addition, the number of joints (in fact, not only those indicated by reference numerals 15 and 16) of the pipe 17 for circulating the oil increases, and the reliability for preventing oil leakage decreases.
[0010]
The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a cooling method for a pulse power supply device that has a high cooling capacity, is small and inexpensive, and does not cause refrigerant leakage. .
[0011]
[Means for Solving the Problems]
According to a first aspect of the present invention, there is provided a cooling method for a pulse power supply apparatus, wherein the circuit element is disposed inside a tank made of a non-magnetic material. While storing the refrigerant to be immersed, a radiator through which cooling water flows from outside the tank is immersed in this refrigerant, and a stirring member comprising a magnet and a cross-flow blade for stirring the refrigerant is provided inside the tank, and stirring is performed outside the tank. The magnetic coupling means coupled to the motor and magnetically coupled to the agitating member is provided so as to face the member, and the refrigerant is agitated in the lateral direction by the rotation of the magnet, and the refrigerant is caused in the longitudinal direction by the rotation of the cross flow blade. Stirring.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Embodiment 1
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a cross-sectional view of a cooling device for a pulse power supply device according to the first embodiment. An oil-tight tank 21 is made of a non-magnetic material such as stainless steel or aluminum, and contains oil 6 therein. Air 7 is present in the upper part. A heating element 8 comprising circuit elements of the pulse power supply device is accommodated in the lower part of the oil 6, and a radiator 9 is accommodated in the upper part. The radiator 9 has cooling water inserted in the upper part of the oil-tight tank 21. The inflow pipe 10 and the outflow pipe 11 are connected, and cooling water flows.
[0013]
A magnet 22 as a stirring member is disposed inside the side surface of the oil-tight tank 21, and a magnetic coupling means 23 is provided on the outer side of the side surface of the oil-tight tank 21 so as to face the magnet 22. Two magnets 25 and 26 are attached to the magnet attachment plate 24 in reverse polarity. The magnet attachment plate 24 is attached to a rotating shaft 27 a of a motor 27, and the motor 27 is connected to an AC power source 28. The motor 27 may be an AC type or a DC type. Further, the magnet 22 does not require a bearing.
[0014]
In the above configuration, when the motor 27 is driven, the magnetic connecting means 23 rotates, the magnet 22 magnetically connected to the magnetic connecting means 23 through the side wall of the oil-tight tank 21 also rotates, and the oil 6 is agitated. .
[0015]
In the first embodiment, the oil 6 heated by the heat generating material 8 rises, is cooled by the radiator 9, and descends. Further, the oil 6 is agitated by the rotation of the magnet 22, and the cold oil 6 and the heated oil 6 are mixed to promote heat exchange. For this reason, cooling efficiency can be improved. Further, since the magnet 22 in the oil-tight tank 21 is rotated by a magnetic force from the outside, a member penetrating the oil-tight tank 21 is unnecessary, and it can be seamless and highly reliable for preventing oil leakage. . Further, the oil-tight tank 21 is made of stainless steel or aluminum which is a non-magnetic metal, and the magnetic force from the magnetic coupling means 23 to the magnet 22 is somewhat weakened, but the structure is simple and the pump, the oil pipe or the magnet 22 bearings. Therefore, the apparatus can be made small and inexpensive. Further, since the magnet 22, the magnetic coupling means 23, and the motor 27 are provided on the side surface of the oil-tight tank 21, the heating element 8 can be arranged so that it can be easily cooled by the flow of the oil 6 from the side. There is no problem even when the parts are arranged on the bottom surface of the dense tank 21 without a gap or the input / output terminals are provided on the bottom surface.
[0016]
In addition, when the radiator 9 is provided between the magnet 22 and the heat generating material 8 as indicated by a two-dot chain line, the oil 6 cooled by the radiator 9 can be sprayed on the heat generating material 8 by the rotation of the magnet 22, and the cooling efficiency Can be further enhanced.
Embodiment 2
FIG. 2 shows a cross-sectional view of the cooling device of the pulse power supply device according to the second embodiment. A hole 21a is provided in the side wall of an oil-tight tank 21 made of a nonmagnetic material such as stainless steel or aluminum, and an O-ring 29 is provided in the hole 21a. A non-metallic insulating plate 30 is closely attached. Other configurations are the same as those of the first embodiment.
[0017]
In the second embodiment, a part of the oil-tight tank 21 is a non-metallic insulating plate 30, and the magnet 22 and the magnetic coupling means 23 are provided on both sides thereof, so that the magnetic coupling between the two can be strengthened. it can. Other effects are the same as those of the first embodiment.
Embodiment 3
FIG. 3 is a cross-sectional view of the cooling device of the pulse power supply device according to the third embodiment. The magnet 22 disposed inside the insulating plate 30 has a rotating shaft 31, and the rotating shaft 31 stands on the bottom surface in the tank 21. The bearing 32 is rotatably supported. A blade 33 is attached to the tip of the rotating shaft 31, and a stirring member is formed by the magnet 22 and the blade 33. The blades 33 have angles such as fan blades, ship screws, airplane propellers, and the like. Other configurations are the same as those of the second embodiment.
[0018]
In the third embodiment, since the stirring member is constituted by the magnet 22 and the blade 33, the oil flow in the direction of the heat generating material 8 can be increased, and the heat generating material 8 can be effectively cooled. Other effects are the same as those of the second embodiment. The magnets 22 may be attached to the blades 33, and the rotating shaft 31 may be rotatably supported by the insulating plate 30.
Embodiment 4
FIG. 4 is a cross-sectional view of the cooling device of the pulse power supply device according to the fourth embodiment. A rotating shaft 34 is rotatably supported inside the insulating plate 30, and an iron blade 35 as a stirring member is attached to the rotating shaft 34. It has been. Other configurations are the same as those of the second embodiment.
[0019]
In the fourth embodiment, the magnetic coupling means 23 and the blades 35 are magnetically coupled, and the blades 35 are also rotated by the rotation of the magnetic coupling means 23, and stirring is performed. Therefore, since the magnet 22 is omitted, the configuration is simplified, and an oil flow in the direction of the heating element 8 can be secured. Other effects are the same as those of the second embodiment.
Embodiment 5
FIG. 5 is a cross-sectional view of the cooling device of the pulse power supply device according to the fifth embodiment. The periphery of the heating element 8 is covered with a cylindrical guide 36, and the guide 36 is arranged in the direction of oil flow by the blades 35. Other configurations are the same as those of the fourth embodiment.
[0020]
In the fifth embodiment, the oil flow caused by the rotation of the blades 35 is guided by the guide 36 and passes through the periphery of the heating material 8, and then heated to rise, cooled by the radiator 9, and lowered to the blades 35. Return. Thus, the cooling effect can be improved by directing the oil flow by the guide 36. Other effects are the same as those of the fourth embodiment.
Embodiment 6
FIG. 6 shows a cross-sectional view of the cooling device of the pulse power supply device according to the sixth embodiment. The magnet 22, the magnetic coupling means 23, the motor 27, and the AC power supply 28 provided on the side surface of the oil-tight tank 21 in the first embodiment are shown. In the sixth embodiment, the oil-tight tank 21 is provided on the bottom surface. Other configurations are the same as those of the first embodiment.
[0021]
In the sixth embodiment, the magnet 22, the magnetic coupling means 23 and the like are provided on the bottom surface of the oil-tight tank 21, and this is effective when there is room in the space inside and outside of this bottom surface. This is effective when the arrangement of the circuit elements constituting the heating element 8 is easily cooled by such an oil flow. Further, since the direction of transmission of the magnetic force from the magnetic coupling means 23 to the magnet 22 coincides with the direction of gravity, the magnetic force transmission efficiency is good, and the direction of the rotary shaft 27a also matches the direction of gravity. And less bearing friction. Other effects are the same as those of the first embodiment.
Embodiment 7
FIG. 7 shows a cross-sectional view of the cooling device of the pulse power supply device according to the seventh embodiment, in which oil flows in a direction perpendicular to the direction of the rotary shaft 31 instead of the blades 33 on the rotary shaft 31 of the magnet 22 in the third embodiment. A cross flow blade 37 to be generated is attached. Other configurations are the same as those of the third embodiment.
[0022]
In the seventh embodiment, the oil flow generated by the rotation of the magnet 22 is generated in the horizontal direction, and the oil flow generated by the rotation of the cross flow blade 37 is generated in the vertical direction. Therefore, the oil-tight tank 21 is uniformly stirred. It is possible to increase the cooling efficiency by promoting heat exchange. Other effects are the same as those of the third embodiment.
Embodiment 8
FIG. 8 is a cross-sectional view of the cooling device for the pulse power supply device according to the eighth embodiment. The protruding portion 21b is provided on the side surface of the oil-tight tank 21 formed of a nonmagnetic material such as stainless steel or aluminum, and the protruding portion 21b is provided outside. A motor stator 38 is provided, a motor rotor 39 made of a permanent magnet is provided inside the protrusion 21 b, and a blade 35 is provided on a rotating shaft 40 of the rotor 39.
[0023]
In the eighth embodiment, since the blades 35 are directly driven by a motor including the stator 38 and the rotor 39, a powerful and controllable rotational force can be applied to the blades 35, and stirring is effectively performed. Cooling efficiency is improved. In addition, since this cooling structure does not penetrate the oil-tight tank 21, the reliability for preventing oil leakage is high. Furthermore, since a pump or the like is not necessary, it is small and inexpensive.
Embodiment 9
FIG. 9 is a cross-sectional view of the cooling device of the pulse power supply device according to the ninth embodiment. The motor 27 is provided in the oil-tight tank 21, and the blades 35 are connected to the motor 27.
[0024]
In Embodiment 9, since the blade | wing 35 is directly driven by the motor 27, powerful stirring can be performed and cooling efficiency can be improved. However, since the motor 27 and the AC power supply 28 are electrically connected, a seal structure is required. Moreover, since the motor 27 is immersed in the oil 6, maintenance becomes somewhat difficult. The structure is simple and small and inexpensive.
Embodiment 10
FIG. 10 is a cross-sectional view of the cooling device for the pulse power supply device according to the tenth embodiment. A fan (motor-equipped) 41 is provided in place of the motor 27 in the first embodiment, and a gear mechanism 42 for adjusting the rotational speed. Is provided between the fan 41 and the magnetic coupling means 23. Other configurations are the same as those of the first embodiment.
[0025]
In the tenth embodiment, the magnetic connecting means 23 is driven using a fan 41 that cools the components outside the oil-tight tank 21, and the oil 6 is stirred and the components outside the oil-tight tank 21 are cooled. It can be done at the same time and is efficient. Other effects are the same as those of the first embodiment.
[0026]
In each of the above embodiments, oil 6 is used as the refrigerant, but other refrigerants such as florinate can be used. In addition, as shown in the sixth embodiment, providing each component of the cooling device inside and outside the bottom surface of the oil-tight tank 21 can be applied to other embodiments.
[0027]
【The invention's effect】
As described above, according to the first aspect of the present invention, the stirring member is constituted by the magnet and the crossflow blade, and the refrigerant is stirred in the lateral direction by the rotation of the magnet, and the refrigerant is longitudinally driven by the rotation of the crossflow blade. Stirring is performed, and thus stirring in the tank can be performed uniformly by stirring in the horizontal direction and the vertical direction, and the cooling effect can be improved.
[Brief description of the drawings]
FIG. 1 is a sectional view of a cooling device for a pulse power supply device according to Embodiment 1 of the present invention;
FIG. 2 is a cross-sectional view of a cooling device for a pulse power supply device according to a second embodiment.
FIG. 3 is a cross-sectional view of a cooling device of a pulse power supply device according to a third embodiment.
FIG. 4 is a cross-sectional view of a cooling device for a pulse power supply device according to a fourth embodiment.
FIG. 5 is a cross-sectional view of a cooling device of a pulse power supply device according to a fifth embodiment.
FIG. 6 is a sectional view of a cooling device for a pulse power supply device according to a sixth embodiment.
FIG. 7 is a cross-sectional view of a cooling device for a pulse power supply device according to a seventh embodiment.
FIG. 8 is a cross-sectional view of a cooling device of a pulse power supply device according to an eighth embodiment.
FIG. 9 is a cross-sectional view of a cooling device for a pulse power supply device according to a ninth embodiment.
FIG. 10 is a sectional view of a cooling device for a pulse power supply device according to a tenth embodiment.
FIG. 11 is a circuit diagram of a conventional pulse power supply device.
FIG. 12 is a cross-sectional view of a cooling device of a conventional pulse power supply device.
FIG. 13 is a perspective view of a cooling device of another conventional pulse power supply device.
[Explanation of symbols]
6 ... Oil 8 ... Heat generation 9 ... Radiator 21 ... Oil-tight tank 21a ... Hole 22 ... Magnet 23 ... Magnetic connecting means 27 ... Motor 30 ... Insulating plate 33, 35 ... Blade 36 ... Guide 37 ... Cross flow blade 38 ... Stator 39 ... rotor 40 ... fan

Claims (1)

  In a cooling method of a pulse power supply device for cooling a circuit element of a pulse power supply device that generates a pulse, a refrigerant in which the circuit element is immersed is stored in a tank made of a non-magnetic material, and the refrigerant is cooled from outside the tank. A radiator through which water is passed is immersed, and a stirring member comprising a magnet and a cross-flow blade for stirring the refrigerant is provided in the tank, and is connected to a motor so as to face the stirring member outside the tank. A cooling method for a pulse power supply apparatus, comprising: a magnetic coupling means coupled to the first and second components, wherein the refrigerant is agitated in the horizontal direction by rotation of the magnet and the refrigerant is agitated in the vertical direction by rotation of the crossflow blades.

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