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JP4124763B2 - Adherent inspection sample recovery apparatus and ultrasonic horn for the apparatus - Google Patents
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JP4124763B2 - Adherent inspection sample recovery apparatus and ultrasonic horn for the apparatus - Google Patents

Adherent inspection sample recovery apparatus and ultrasonic horn for the apparatus Download PDF

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JP4124763B2
JP4124763B2 JP2004319909A JP2004319909A JP4124763B2 JP 4124763 B2 JP4124763 B2 JP 4124763B2 JP 2004319909 A JP2004319909 A JP 2004319909A JP 2004319909 A JP2004319909 A JP 2004319909A JP 4124763 B2 JP4124763 B2 JP 4124763B2
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horn
ultrasonic
deposit
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supply
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JP2006132993A (en
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和幸 斉木
聡 土門
芳樹 橋本
張生 藤井
誠 瀧上
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Kaijo Corp
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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Description

本発明は、検査対象面に付着している付着物を採取するための付着物検査試料回収装置及び該装置用超音波ホーンに関する。特に、放射性物質取扱施設や、医療施設等の床面や壁面に付着した付着物を、出来るだけ検査対象面に残すことなくより確実に、かつ効率的に採取するための付着物検査試料回収装置及び該装置用超音波ホーンに関する。   The present invention relates to a deposit inspection sample collecting apparatus for collecting deposits adhering to a surface to be inspected and an ultrasonic horn for the apparatus. In particular, the deposit inspection sample collection device for collecting deposits attached to the floor and wall surfaces of radioactive material handling facilities and medical facilities more reliably and efficiently without leaving them on the surface to be inspected as much as possible. And an ultrasonic horn for the apparatus.

放射性物質使用施設では、安全性確保のために放射性物質による表面汚染状況の検査が義務づけられている。また、病院や福祉施設など、特に清潔でクリーンな環境が求められる場所では抗菌対策に注意を払うことが重要な要素となる。このような場所の床に付着した菌類(細菌類、及びカビなどの真菌類を指す)をサンプリングし、菌の種類や菌数を調査することが感染を防止する上で重要である。   In facilities where radioactive materials are used, inspection of surface contamination by radioactive materials is required to ensure safety. Also, paying attention to antibacterial measures is an important factor in places where clean and clean environments are required, such as hospitals and welfare facilities. Sampling fungi (referring to bacteria and fungi such as fungi) attached to the floor in such a place and investigating the type and number of fungi is important in preventing infection.

上記汚染状況の検知手法や、上記床面に付着した菌類のサンプリング方法の一つとして、特許文献1に記載の如く、壁面や床面に付着した付着物に回収溶液を供給するとともに超音波洗浄し、洗浄の終わった排出液体を排出液体タンク部に吸引回収して付着物を採取する付着物検査試料回収装置が存在する。   As one of the method for detecting the contamination status and the method for sampling the fungi adhering to the floor surface, as described in Patent Document 1, the recovered solution is supplied to the adhering material adhering to the wall surface and the floor surface and ultrasonic cleaning is performed. In addition, there is a deposit inspection sample collection device that collects the deposit by sucking and collecting the drained liquid that has been washed into the drain liquid tank section.

図7は、特許文献1に係る従来の付着物検査試料回収装置の概要を示す全体説明図、図8は、図7に示す付着物検査試料回収装置の超音波洗浄部を示す図、図9は、図8に示す超音波洗浄部の底面図である。   FIG. 7 is an overall explanatory view showing an outline of a conventional attached matter inspection sample collecting apparatus according to Patent Document 1, FIG. 8 is a view showing an ultrasonic cleaning unit of the attached matter inspection sample collecting apparatus shown in FIG. FIG. 9 is a bottom view of the ultrasonic cleaning unit shown in FIG. 8.

従来の付着物検査試料回収装置51は、回収溶液を供給するための回収溶液供給手段60と、液体を超音波洗浄する超音波洗浄手段70と、洗浄した排出液体を排出液体タンク部(排出液体貯留部)82に回収するための排出液体回収手段80と、各手段を制御する制御部90からなる。   A conventional deposit inspection sample recovery apparatus 51 includes a recovery solution supply means 60 for supplying a recovery solution, an ultrasonic cleaning means 70 for ultrasonically cleaning the liquid, and a discharged liquid tank portion (discharge liquid). It comprises a discharged liquid recovery means 80 for recovery to a storage section 82 and a control section 90 for controlling each means.

回収溶液供給手段60は、回収溶液を貯留している回収溶液タンク部62と、この回収溶液タンク部62内の回収溶液を所定量(例えば、5cc)供給するための回収溶液供給部(例えば、供給ポンプ部)61とからなり、供給管路63を介して超音波洗浄部70aに回収溶液を供給している。   The recovery solution supply means 60 includes a recovery solution tank unit 62 that stores the recovery solution, and a recovery solution supply unit (for example, 5 cc) for supplying a predetermined amount (for example, 5 cc) of the recovery solution in the recovery solution tank unit 62. The supply solution is supplied to the ultrasonic cleaning unit 70 a via the supply pipe 63.

排出液体回収手段80は、図8に示す付着物56と回収溶液とが混合された排出液体を回収するための排出液体吸引部(例えば、排出ポンプ部)81と、吸引回収された排出液体を貯留するための排出液体タンク部82とからなり、超音波洗浄部70aから排出管路83を介して排出している。   The discharged liquid recovery means 80 includes a discharged liquid suction part (for example, a discharge pump part) 81 for recovering the discharged liquid in which the deposit 56 and the collected solution shown in FIG. 8 are mixed, and the suctioned and recovered discharged liquid. It consists of a discharge liquid tank section 82 for storing, and is discharged from the ultrasonic cleaning section 70 a via a discharge pipe 83.

超音波洗浄手段70は、超音波を発生する超音波振動子部71と、この超音波振動子部71を所定の周波数および所定の振幅で発振させるための超音波発振制御部74と、超音波振動子部71の先端に設けられたホーン部72とからなる。超音波振動子部71には、圧電効果、磁気歪効果等を利用して超音波を発生させる振動子が内蔵されている。   The ultrasonic cleaning means 70 includes an ultrasonic transducer unit 71 that generates ultrasonic waves, an ultrasonic oscillation control unit 74 for causing the ultrasonic transducer unit 71 to oscillate at a predetermined frequency and a predetermined amplitude, The horn part 72 is provided at the tip of the vibrator part 71. The ultrasonic transducer unit 71 incorporates a transducer that generates ultrasonic waves using the piezoelectric effect, the magnetostrictive effect, and the like.

超音波振動子部71で発振した波動は、ホーン部72に伝搬し、ホーン部72の前端部72aから超音波が付着物56に照射され、強固な汚れが剥離洗浄される。即ち、床面55から付着物56を剥離させるとともに、回収溶液と混合させる。また、超音波発振制御部24においては、超音波の振幅を調整することが可能となる。   The wave oscillated by the ultrasonic transducer unit 71 propagates to the horn unit 72, the ultrasonic wave is applied to the deposit 56 from the front end 72a of the horn unit 72, and the strong dirt is peeled and washed. That is, the deposit 56 is peeled off from the floor surface 55 and mixed with the recovered solution. Further, the ultrasonic oscillation control unit 24 can adjust the amplitude of the ultrasonic wave.

ホーン部72の外側には給排液ケース73が設けられている。即ち、給排液ケース73はホーン部72の鍔部を挟み込むようにボルトで固定されている。超音波振動子部71、ホーン部72、給排液ケース73は、一体に固定されており、超音波洗浄部70aを形成している。給排液ケース73の内周面には円弧状の給排溝73aが一つまたは複数箇所(この例では、4箇所)形成されている。この給排溝73aには、供給管路63または排出管路83が接続されている。給排液ケース73の下端にはパッキン75が設けられている。すなわち、床面55と超音波洗浄部70aとが密着できるようになる。このことにより、排出液体吸引部81を稼動させたとき、排出液体を吸引できるようになる。   A supply / drainage case 73 is provided outside the horn portion 72. That is, the supply / drainage case 73 is fixed with bolts so as to sandwich the flange portion of the horn portion 72. The ultrasonic transducer unit 71, the horn unit 72, and the supply / drainage case 73 are integrally fixed to form an ultrasonic cleaning unit 70a. One or a plurality of arcuate supply / discharge grooves 73a (four in this example) are formed on the inner peripheral surface of the supply / discharge liquid case 73. A supply pipe 63 or a discharge pipe 83 is connected to the supply / discharge groove 73a. A packing 75 is provided at the lower end of the supply / drainage case 73. That is, the floor surface 55 and the ultrasonic cleaning unit 70a can be in close contact with each other. As a result, when the discharged liquid suction part 81 is operated, the discharged liquid can be sucked.

特開2004−271183号公報JP 2004-271183 A

しかしながら、従来の付着物検査試料回収装置51は、図8に示すように床面55近傍においては、空気等の対流によって微風が吹いている場合が多々あり、ホーン部72の外側に設けられた給排溝73aを通じて回収溶液の供給を行うと床面55近傍の微風の影響を受け、ホーン部72の直下に回収溶液を安定した状態で供給することが出来ず、洗浄状態が悪化し、洗浄効率が低下するといった課題が存在した。   However, as shown in FIG. 8, the conventional deposit inspection sample collecting apparatus 51 often has a breeze blowing near the floor surface 55 due to convection of air or the like, and is provided outside the horn portion 72. When the recovered solution is supplied through the supply / discharge groove 73a, the recovered solution cannot be supplied in a stable state immediately below the horn portion 72 due to the influence of the breeze near the floor surface 55, and the cleaning state deteriorates. There was a problem that efficiency decreased.

また、回収溶液を介して床面55と接触するホーン部72の前端部72aは、液膜を均一にして確実に回収溶液を回収するべく、前端部72aが、床面55と平行になることが望まれるが、前端部72aが傾いてしまうと回収溶液の液膜が均一にならないため、回収溶液が床面に残留してしまう場合が存在した。   Further, the front end portion 72a of the horn portion 72 that contacts the floor surface 55 via the recovered solution has the front end portion 72a parallel to the floor surface 55 in order to make the liquid film uniform and reliably recover the recovered solution. However, when the front end portion 72a is inclined, the liquid film of the recovered solution is not uniform, and the recovered solution sometimes remains on the floor surface.

さらに、回収溶液の供給と回収は、ホーン部72の外側に設けられた給排液ケース73の給排溝73aを通じてなされるため、排出管路83から距離がある部分における回収溶液の回収が不十分である場合が存在した。   Furthermore, since the supply and recovery of the recovered solution are performed through the supply / discharge groove 73a of the supply / discharge liquid case 73 provided outside the horn portion 72, the recovery of the recovered solution in a portion at a distance from the discharge pipe 83 is not possible. There were cases where it was sufficient.

そこで、本発明は、上記従来技術に鑑みてなされたものであって、放射性物質取扱施設や、医療施設等の床面や壁面に付着した付着物を、検査対象面に残すことなく確実に、かつ効率的に採取するための付着物検査試料回収装置及び該装置用超音波ホーンを提供することを目的とするものである。   Therefore, the present invention has been made in view of the above-described prior art, and reliably adheres to the radioactive substance handling facility, the floor surface and the wall surface of medical facilities, etc. without leaving the surface to be inspected, It is another object of the present invention to provide a deposit inspection sample collecting apparatus for efficiently collecting and an ultrasonic horn for the apparatus.

本発明による付着物検査試料回収装置は、検査対象面に付着している付着物に、回収溶液を所定量供給するための回収溶液供給手段と、前記付着物および前記回収溶液に、超音波を所定時間照射して前記付着物を前記検査対象面から剥離させるための超音波洗浄手段と、前記付着物と前記回収溶液が混合された排出液体を回収するための排出液体回収手段とを備えている付着物検査試料回収装置において、前記超音波洗浄手段は、前記超音波を発生させるための超音波振動子部と、前記超音波振動子部を所定の条件で発振させる超音波発振制御部と、前記超音波振動子部の先端に設けられ、前記超音波振動子部の波動を伝搬するホーン部とからなり、前記ホーン部の下端面の中心に回収溶液の供給及び排出を行う供給兼排出孔を単数又は複数設け、前記ホーン部の下端面は、検査対象面に対する傾斜角度θが0°<θ<10°の傾斜面が中央を中心としたテーパ状に形成され、  The deposit inspection sample recovery apparatus according to the present invention includes a recovery solution supply means for supplying a predetermined amount of a recovery solution to an adhesion that adheres to a surface to be inspected, and ultrasonic waves to the deposit and the recovery solution. Ultrasonic cleaning means for irradiating the deposit from the surface to be inspected by irradiating for a predetermined time, and a discharged liquid collecting means for collecting the discharged liquid in which the deposit and the collected solution are mixed. In the deposit inspection sample collecting apparatus, the ultrasonic cleaning means includes an ultrasonic transducer unit for generating the ultrasonic wave, an ultrasonic oscillation control unit that oscillates the ultrasonic transducer unit under a predetermined condition, and A supply and discharge unit for supplying and discharging the recovered solution at the center of the lower end surface of the horn unit, the horn unit being provided at the tip of the ultrasonic transducer unit and propagating the waves of the ultrasonic transducer unit. One or more holes Only, the lower end surface of the horn portion, the inclination angle theta is 0 ° with respect to the inspection target surface <theta inclined surface of <10 ° is formed in a tapered shape centered on the center,
かつ、該下端面の中心から外周に向けて曲線及び/又は直線状に切り欠かれた溝部が単数又は複数設けられ、前記ホーン部の外周には、円筒状で上面と下面が開放されたガイド部材が前記ホーン部から所定の距離離間し、かつ、前記ホーン部を包むように設けられている。In addition, one or a plurality of groove portions that are cut out in a curved line and / or linear shape from the center of the lower end surface toward the outer periphery are provided, and a cylindrical guide having an upper surface and a lower surface opened on the outer periphery of the horn portion. A member is provided so as to be separated from the horn part by a predetermined distance and to wrap the horn part.

また、本発明による付着物検査試料回収装置は、検査対象面に付着している付着物に、回収溶液を所定量供給するための回収溶液供給手段と、前記付着物および前記回収溶液に、超音波を所定時間照射して前記付着物を前記検査対象面から剥離させるための超音波洗浄手段と、前記付着物と前記回収溶液が混合された排出液体を回収するための排出液体回収手段とを備えている付着物検査試料回収装置において、前記超音波洗浄手段は、前記超音波を発生させるための超音波振動子部と、前記超音波振動子部を所定の条件で発振させる超音波発振制御部と、前記超音波振動子部の先端に設けられ、前記超音波振動子部の波動を伝搬するホーン部とからなり、前記ホーン部の下端面の中心に回収溶液の供給及び排出を行う供給兼排出孔を単数又は複数設け、前記ホーン部の下端面は、検査対象面に対する傾斜角度θが0°<θ<10°の傾斜面が中央を中心としたテーパ状に形成され、かつ、螺旋形状に形成され、前記ホーン部の外周には、円筒状で上面と下面が開放されたガイド部材が前記ホーン部から所定の距離離間し、かつ、前記ホーン部を包むように設けられている。  In addition, the deposit inspection sample recovery apparatus according to the present invention includes a recovery solution supply means for supplying a predetermined amount of a recovery solution to the deposit attached to the surface to be inspected, and the deposit and the recovery solution. An ultrasonic cleaning means for irradiating a sound wave for a predetermined time to separate the deposit from the surface to be inspected, and a discharged liquid collecting means for collecting the discharged liquid in which the deposit and the collected solution are mixed. In the attached matter inspection sample recovery apparatus, the ultrasonic cleaning means includes an ultrasonic transducer unit for generating the ultrasonic wave, and an ultrasonic oscillation control for causing the ultrasonic transducer unit to oscillate under a predetermined condition. And a horn unit that is provided at the tip of the ultrasonic transducer unit and propagates the waves of the ultrasonic transducer unit, and supplies and discharges the recovered solution at the center of the lower end surface of the horn unit. Cum discharge hole A plurality of lower end surfaces of the horn portion are formed such that an inclined surface with an inclination angle θ of 0 ° <θ <10 ° with respect to the surface to be inspected is formed in a tapered shape centered on the center, and formed in a spiral shape, On the outer periphery of the horn portion, a cylindrical guide member having an open upper surface and a lower surface is provided so as to be separated from the horn portion by a predetermined distance and to wrap the horn portion.

また、本発明による超音波ホーンは、検査対象面に付着している付着物を採取するための付着物検査試料回収装置用超音波ホーンであって、前記ホーンの下端面の中心に回収溶液の供給及び排出を行う供給兼排出孔を単数又は複数設け、前記ホーンの下端面は、検査対象面に対する傾斜角度θが0°<θ<10°の傾斜面が中央を中心としたテーパ状に形成され、かつ、該下端面の中心から外周に向けて曲線及び/又は直線状に切り欠かれた溝部が単数又は複数設けられ、前記ホーンの外周には、円筒状で上面と下面が開放されたガイド部材が前記ホーンから所定の距離離間し、かつ、前記ホーンを包むように設けられている。  The ultrasonic horn according to the present invention is an ultrasonic horn for a deposit inspection sample collecting device for collecting deposits adhering to a surface to be inspected, and a recovery solution is placed at the center of the lower end surface of the horn. One or a plurality of supply / discharge holes for supplying and discharging are provided, and the lower end surface of the horn is formed in a tapered shape with an inclined angle θ of 0 ° <θ <10 ° with respect to the surface to be inspected centered at the center. In addition, one or more grooves cut out in a curved line and / or linear shape from the center of the lower end surface toward the outer periphery are provided, and the upper and lower surfaces of the horn are cylindrical and open on the upper and lower surfaces. A guide member is provided so as to be separated from the horn by a predetermined distance and to wrap the horn.

また、本発明による超音波ホーンは、検査対象面に付着している付着物を採取するための付着物検査試料回収装置用超音波ホーンであって、前記ホーンの下端面の中心に回収溶液の供給及び排出を行う供給兼排出孔を単数又は複数設け、前記ホーンの下端面は、検査対象面に対する傾斜角度θが0°<θ<10°の傾斜面が中央を中心としたテーパ状に形成され、かつ、螺旋形状に形成され、前記ホーンの外周には、円筒状で上面と下面が開放されたガイド部材が前記ホーンから所定の距離離間し、かつ、前記ホーンを包むように設けられている。  The ultrasonic horn according to the present invention is an ultrasonic horn for a deposit inspection sample collecting device for collecting deposits adhering to a surface to be inspected, and a recovery solution is placed at the center of the lower end surface of the horn. One or a plurality of supply / discharge holes for supplying and discharging are provided, and the lower end surface of the horn is formed in a tapered shape with an inclined angle θ of 0 ° <θ <10 ° with respect to the surface to be inspected centered at the center. In addition, a cylindrical guide member having an upper surface and a lower surface opened is provided on the outer periphery of the horn so as to be separated from the horn by a predetermined distance and to wrap the horn. .

さらに、本発明による付着物検査試料回収装置の前記排出液体回収手段は、断続的に吸引を行うことによって前記排出液体を回収する。  Furthermore, the discharged liquid recovery means of the deposit inspection sample recovery apparatus according to the present invention recovers the discharged liquid by performing intermittent suction.

本発明によれば、ホーン部の外周部分にガイド部材を設け、ホーン部の前端部の中央に供給兼排出孔を設け、供給兼排出孔を中心にテーパ状に構成されていることにより、安定した回収溶液の液膜を床面に形成可能であり、確実に付着物を床面から剥離して回収溶液と混合させ、さらに確実に回収溶液を床面から回収することができる。   According to the present invention, the guide member is provided in the outer peripheral portion of the horn portion, the supply / discharge hole is provided in the center of the front end portion of the horn portion, and the supply / discharge hole is configured in a tapered shape as a center. A liquid film of the recovered solution can be formed on the floor surface, and the deposit can be reliably peeled off from the floor surface and mixed with the recovered solution, and the recovered solution can be recovered more reliably from the floor surface.

以下図面を参照して、本発明による付着物検査試料回収装置及び該装置用超音波ホーンの実施の形態について説明する。なお、図7乃至図8に示す従来の付着物検査試料回収装置と同一の構成及び機能を有するものについては、同じ符号を用いて説明する。   DESCRIPTION OF EMBODIMENTS Embodiments of a deposit inspection sample recovery apparatus and an ultrasonic horn for the apparatus according to the present invention will be described below with reference to the drawings. In addition, what has the same structure and function as the conventional deposit | attachment inspection sample collection | recovery apparatus shown in FIG. 7 thru | or FIG. 8 is demonstrated using the same code | symbol.

図1は、本発明による付着物検査試料回収装置の実施の形態の概要を示す全体図、図2は、ホーン部、脚部及びガイド部材の部分拡大図、図3(a)は、本発明による超音波ホーン部の正面図、(b)は(a)の左側面図、(c)は(a)に係るホーン部の底面図、(d)は、(c)の他の実施例を示す図、図4は、従来の付着物検査試料回収装置用超音波ホーン部と本発明による超音波ホーン部の傾斜した場合の対比図、図5は、使用時におけるホーン部、脚部及びガイド部材の部分拡大図、図6は、図5の他の実施例を示す図である。   FIG. 1 is an overall view showing an outline of an embodiment of the deposit inspection sample collecting apparatus according to the present invention, FIG. 2 is a partially enlarged view of a horn part, a leg part, and a guide member, and FIG. (B) is a left side view of (a), (c) is a bottom view of the horn unit according to (a), and (d) is another embodiment of (c). FIG. 4 is a comparison diagram of a conventional ultrasonic horn part for deposit inspection sample collection device and the ultrasonic horn part according to the present invention, and FIG. 5 is a horn part, a leg part and a guide in use. FIG. 6 is a partially enlarged view of the member, and FIG. 6 is a view showing another embodiment of FIG.

本発明による付着物検査試料回収装置1は、図1及び図2からも明らかなように、ホーン部22の外周部分にガイド部材25を設け、ホーン部22の前端部22aの中央に供給兼排出口22bを設け、該供給兼排出口22bを中心にテーパ状に構成されていることにより、確実に付着物56を検査対象面である床面55から剥離して回収溶液7と混合させ、さらに確実に回収溶液7を床面55から回収するものである。   As apparent from FIGS. 1 and 2, the deposit inspection sample collecting apparatus 1 according to the present invention is provided with a guide member 25 on the outer peripheral portion of the horn portion 22, and is supplied and discharged at the center of the front end portion 22 a of the horn portion 22. By providing the outlet 22b and being tapered around the supply / discharge port 22b, the deposit 56 is surely peeled off from the floor surface 55, which is the surface to be inspected, and mixed with the recovered solution 7, The recovered solution 7 is reliably recovered from the floor surface 55.

本発明による付着物検査試料回収装置1は、回収溶液を供給するための回収溶液供給手段10と、液体を超音波洗浄する超音波洗浄手段と、洗浄した排出液体を排出液体タンク部(排出液体貯留部)32に回収するための排出液体回収手段30と、各手段を制御する制御部90からなる。   The deposit inspection sample recovery apparatus 1 according to the present invention includes a recovery solution supply means 10 for supplying a recovery solution, an ultrasonic cleaning means for ultrasonically cleaning the liquid, and a discharge liquid tank section (discharge liquid) It comprises a discharged liquid recovery means 30 for recovery to a storage part 32 and a control unit 90 for controlling each means.

回収溶液供給手段10は、回収溶液タンク部12と、回収溶液供給部(例えば、供給ポンプ部)61とからなり、供給管路13を介して供給兼排出管路43へと接続され、最終的に超音波洗浄部70aに回収溶液7を供給している。   The recovered solution supply means 10 includes a recovered solution tank section 12 and a recovered solution supply section (for example, a supply pump section) 61, which is connected to the supply and discharge conduit 43 via the supply conduit 13, and finally. In addition, the recovered solution 7 is supplied to the ultrasonic cleaning section 70a.

排出液体回収手段30は、排出液体吸引部(例えば、排出ポンプ部)31と、排出液体タンク部32とからなり、超音波洗浄部20aから供給兼排出管路43へと接続され、さらに排出管路33を介して排出している。即ち、供給管路13及び排出管路33はともに、供給兼排出管路43に接続されて、該供給兼排出管路43を共用しているものである。   The discharged liquid recovery means 30 includes a discharged liquid suction part (for example, a discharge pump part) 31 and a discharged liquid tank part 32, and is connected from the ultrasonic cleaning part 20a to the supply / discharge line 43, and further, the discharge pipe. It discharges via the path 33. That is, the supply line 13 and the discharge line 33 are both connected to the supply / discharge line 43 and share the supply / discharge line 43.

超音波洗浄手段は、超音波振動子部21と、超音波発振制御部74と、超音波振動子部21の先端に設けられたホーン部22とからなる。   The ultrasonic cleaning means includes an ultrasonic transducer unit 21, an ultrasonic oscillation control unit 74, and a horn unit 22 provided at the tip of the ultrasonic transducer unit 21.

超音波振動子部21で発振した波動は、ホーン部22に伝搬し、ホーン部22の前端部22aから超音波が付着物56に照射され、強固な汚れが剥離洗浄される。即ち、床面55から付着物56を剥離させるとともに、回収溶液7と混合させる。また、超音波発振制御部74においては、超音波の振幅を調整することが可能となる。   The wave oscillated by the ultrasonic transducer unit 21 propagates to the horn unit 22, and the ultrasonic wave is applied to the deposit 56 from the front end 22 a of the horn unit 22, and the strong dirt is peeled and washed. That is, the deposit 56 is separated from the floor surface 55 and mixed with the recovered solution 7. In addition, the ultrasonic oscillation control unit 74 can adjust the amplitude of the ultrasonic wave.

ホーン部22の下端面である前端部22aは、超音波振動子部21において発振された超音波の振幅が最大、即ち、超音波の波動の腹が当たる位置に設けられ、図2及び図3からも明らかなように、その中心に供給兼排出管路43に接続される供給兼排出孔22bが設けられている。供給兼排出口孔22bは、供給兼排出管路43に接続されて、回収溶液7の床面55への供給及び回収溶液7の床面55からの回収を行うものである。供給兼排出孔22bが、ホーンの前端部22bの中央に設けられたことにより、回収溶液7を供給して液膜を形成する場合に、供給兼排出孔22bを中心に円形状に液膜を形成することが可能であり、回収溶液7の表面張力、床面55の状態、ホーンの前端部22aの形状(角度)等によって変化する回収溶液7の液膜の変化を最小限にすることが可能であり、安定した形状で回収溶液7の液膜を形成することが可能である。また、回収溶液7の回収時には、回収溶液7の供給と排出の兼ねる供給兼排出孔22bから排出を行うため、供給と反対の流れで回収溶液7が回収され、最適な回収が可能となる。   The front end portion 22a, which is the lower end surface of the horn portion 22, is provided at a position where the amplitude of the ultrasonic wave oscillated in the ultrasonic transducer portion 21 is maximum, that is, a position where the antinode of the ultrasonic wave hits. As can be seen from the above, a supply / discharge hole 22b connected to the supply / discharge line 43 is provided at the center thereof. The supply / discharge port hole 22b is connected to the supply / discharge line 43 to supply the recovered solution 7 to the floor surface 55 and recover the recovered solution 7 from the floor surface 55. Since the supply / discharge hole 22b is provided at the center of the front end portion 22b of the horn, when the recovered solution 7 is supplied to form a liquid film, the liquid film is formed in a circular shape around the supply / discharge hole 22b. It is possible to minimize the change in the liquid film of the recovered solution 7 that changes depending on the surface tension of the recovered solution 7, the state of the floor surface 55, the shape (angle) of the front end 22a of the horn, and the like. It is possible to form the liquid film of the recovered solution 7 in a stable shape. Further, when the recovered solution 7 is recovered, the recovered solution 7 is discharged from the supply / discharge hole 22b that serves both as the supply and discharge of the recovered solution 7, so that the recovered solution 7 is recovered in a flow opposite to the supply, and optimal recovery becomes possible.

また、ホーンの前端部22aの中心に設けられた供給兼排出孔22bは、単数のみならず、ホーンの前端部22aの中心近傍に複数設けることにより、複数の回収溶液7(洗浄液)を床面55に供給することも可能であり、その場合においては、回収溶液の種類等に応じて、複数の供給兼排出管路43を設ける。また、回収溶液7は、1種類であっても、ホーン部22の内部等で、供給兼排出孔22bを分岐させることにより、複数の供給兼排出孔22bを設け、各々の孔の角度等をホーン部22の外周に向けること等により、回収溶液7の外周方向への広がりや、回収の確実性を高めることも可能である。   Further, the supply / discharge hole 22b provided at the center of the front end portion 22a of the horn is not limited to a single one, and a plurality of the recovery solutions 7 (cleaning liquids) are provided on the floor surface by providing a plurality near the center of the front end portion 22a. In this case, a plurality of supply / discharge lines 43 are provided according to the type of the recovered solution. Further, even if there is only one kind of the recovered solution 7, a plurality of supply / discharge holes 22b are provided by branching the supply / discharge holes 22b inside the horn part 22 or the like. By facing the outer periphery of the horn part 22 and the like, it is possible to increase the recovery solution 7 in the outer peripheral direction and the reliability of the recovery.

また、図2及び図3からも明らかなように、ホーン部22の中央(供給兼排出口22b)を中心として、テーパ状の傾斜面が設けられている。傾斜角度は(図3参照)、床面55に対して、0°Y<10°の範囲が望ましい。ホーン部22の中央を中心として、テーパ状の傾斜面が設けられることにより、回収溶液7の供給時における安定した液膜の形成、超音波洗浄時の付着物56の床面55からの確実な剥離及び回収溶液7の排出時における確実な排出を行うものである。

As is clear from FIGS. 2 and 3, a tapered inclined surface is provided around the center of the horn portion 22 (supply / discharge port 22 b). The inclination angle Y (see FIG. 3) is preferably in the range of 0 ° < Y <10 ° with respect to the floor surface 55. By providing a tapered inclined surface centered on the center of the horn portion 22, formation of a stable liquid film when the recovered solution 7 is supplied, and reliable attachment of the deposit 56 from the floor surface 55 during ultrasonic cleaning are achieved. The detachment and the reliable discharge at the time of discharging the recovered solution 7 are performed.

即ち、図4に示すように床面55に対してホーンの前端部22aの平行関係に乱れが生じた場合において、ホーン部22の中央を中心として、テーパ状の傾斜面を設けた場合には、ホーンの前端面22aが従来の如く平面状の形状の場合に対して床面55からホーンの前端部22aまでの最大距離が半分の範囲になる。従って、回収溶液7の均一、かつ、安定した供給、洗浄効率の向上による付着物56の確実な剥離、回収溶液7の確実な回収が可能となる。図4に示すように、ホーン部22の直径を2D、床面55に対するホーンの前端部22aの最大距離をX及び床面55に対するホーンの前端部22aの傾斜角をAとすると以下の関係が成り立つ。
傾斜形状のホーン端面の場合 X= Dsin(A)
平面形状のホーン端面の場合 X=2Dsin(A)
従って、ホーン部22の中央を中心として、テーパ状の傾斜面を設けた場合には、従来の如く平面状の形状の場合に対して床面55からホーンの前端部22aまでの最大距離Xが半分の範囲になり、確実に回収容器7の供給、付着物56の剥離及び回収溶液7の回収が可能となる。
That is, as shown in FIG. 4, in the case where the parallel relationship of the front end portion 22a of the horn with respect to the floor surface 55 is disturbed, when a tapered inclined surface is provided around the center of the horn portion 22. The maximum distance from the floor surface 55 to the front end 22a of the horn is halved compared to the case where the front end surface 22a of the horn has a flat shape as in the prior art. Therefore, the recovered solution 7 can be uniformly and stably supplied, and the deposit 56 can be reliably peeled off and the recovered solution 7 can be reliably recovered by improving the cleaning efficiency. As shown in FIG. 4, when the diameter of the horn portion 22 is 2D, the maximum distance of the horn front end portion 22a with respect to the floor surface 55 is X, and the inclination angle of the horn front end portion 22a with respect to the floor surface 55 is A, the following relationship is established. It holds.
In the case of an inclined horn end face X = Dsin (A)
In case of planar horn end face X = 2Dsin (A)
Therefore, when a tapered inclined surface is provided with the center of the horn portion 22 as the center, the maximum distance X from the floor surface 55 to the front end portion 22a of the horn is larger than in the case of a planar shape as in the prior art. Thus, the collection container 7 can be supplied, the deposit 56 can be peeled off, and the collection solution 7 can be collected.

また、ホーン中央の供給兼排出孔22bから回収溶液7を吸引・回収する場合、ホーンの前端部22aにおいては、吸引・回収を進めるにつれて、回収溶液7が、ホーン部22の内部に吸引されて、ホーンの前端面22aと床面55の間の回収溶液7の量は少なくなるものの、床面55との距離が少なければ少ないほど回収溶液を吸引する機能は高くなるため、ホーン部22の中央を中心として、テーパ状の傾斜面が設けられることにより、最適な状況で吸引・回収が可能となる。   When the recovered solution 7 is sucked / recovered from the supply / discharge hole 22b at the center of the horn, the recovered solution 7 is sucked into the horn portion 22 as the suction / recovery proceeds at the front end 22a of the horn. Although the amount of the recovered solution 7 between the front end surface 22a of the horn and the floor surface 55 is reduced, the smaller the distance from the floor surface 55 is, the higher the function of sucking the recovered solution is. By providing a tapered inclined surface with the center at the center, suction and recovery can be performed in an optimal situation.

また、ホーン部22は、図3(c)に示す如く前端部22aにおいて、中心(供給兼排出口22b)から外周に向けて曲線状に切り欠かれた溝部22cが設けられている。該溝部22cは、回収溶液7の回収時に、回収溶液7の床面55への残留を防止するために設けられるものである。回収溶液7の回収時に風速や風量が一定化し、安定してしまうと、回収溶液7の表面張力、床面55の状態、ホーンの前端部22aの形状(角度)等の状況によっては、一部の回収溶液7のみが回収され、他の回収溶液7が回収されない場合が想定されるが、溝部22cの存在によって、床面55とホーンの前端部22aの間の気体の流れを活性化して、即ち、気体の流れに乱れ(風速、風量の変化)を生じさせて、確実に回収溶液7を回収するものである。従って、回収溶液7の回収を確実に行うべく、床面55とホーンの前端部22aの間の気体の流れを活性化することが可能であれば、溝部22cの形状は、直線状等の適宜の形状であってもよく、さらには、図3(d)に示すようにホーンの前端部22aの形状自体を螺旋形状に形成してもよい。   Further, as shown in FIG. 3C, the horn portion 22 is provided with a groove portion 22c cut out in a curved shape from the center (supply / discharge port 22b) toward the outer periphery at the front end portion 22a. The groove 22c is provided to prevent the recovered solution 7 from remaining on the floor surface 55 when the recovered solution 7 is recovered. If the wind speed and the air volume become constant and stable at the time of recovery of the recovered solution 7, depending on the surface tension of the recovered solution 7, the state of the floor surface 55, the shape (angle) of the front end 22a of the horn, etc. It is assumed that only the recovered solution 7 is recovered and the other recovered solution 7 is not recovered, but the presence of the groove 22c activates the gas flow between the floor surface 55 and the front end 22a of the horn, That is, turbulence (change in wind speed and air volume) is generated in the gas flow, and the recovered solution 7 is reliably recovered. Therefore, if the gas flow between the floor surface 55 and the front end portion 22a of the horn can be activated in order to reliably recover the recovered solution 7, the shape of the groove portion 22c may be an appropriate shape such as a straight line. Further, as shown in FIG. 3D, the shape of the front end 22a of the horn itself may be formed in a spiral shape.

図1、図2及び図5に示すようにホーン部22の外周には、円筒状で上面と下面が開放されたガイド部材25がホーン部22から所定の距離離間し、かつ、ホーン部22を包むように設けられている。超音波振動子部21、ホーン部22、ガイド部材25は、一体に固定されて、超音波洗浄部20aを形成している。ガイド部材25は、接続部材25bによってホーン部22のフランジ部22dにボルト等(図示せず)を介して接続されているものである。接続部材25bは、ホーン部22に接触するため、超音波振動に与える影響を最小限に押さえるべく、シリコンのパッキン等(図示せず)を介して、フランジ部22dに接続される。また、ガイド部材25の下端部25cは、ホーン部22の前端部22aより、下方に位置するように設けられ、かつ、ガイド部材25の下端部25cが床面55に対して完全に密着するように接続部材25b等に可撓性を有する樹脂や、バネ等を使用することにより、ガイド部材25への付勢を行う。また、ガイド部材25の下端部25cが床面55に完全に密着すればよいので、下端部25cにゴム等の可撓性を有する部材を装着することによっても可能である。   As shown in FIGS. 1, 2, and 5, a cylindrical guide member 25 having a top surface and a bottom surface that are open is separated from the horn portion 22 by a predetermined distance on the outer periphery of the horn portion 22. It is provided to wrap. The ultrasonic transducer unit 21, the horn unit 22, and the guide member 25 are integrally fixed to form an ultrasonic cleaning unit 20a. The guide member 25 is connected to the flange portion 22d of the horn portion 22 by a connecting member 25b via a bolt or the like (not shown). Since the connecting member 25b is in contact with the horn portion 22, the connecting member 25b is connected to the flange portion 22d via a silicon packing or the like (not shown) in order to minimize the influence on the ultrasonic vibration. Further, the lower end portion 25c of the guide member 25 is provided so as to be positioned below the front end portion 22a of the horn portion 22, and the lower end portion 25c of the guide member 25 is in close contact with the floor surface 55. The guide member 25 is biased by using a flexible resin, a spring or the like for the connection member 25b. Further, since the lower end portion 25c of the guide member 25 only needs to be completely in close contact with the floor surface 55, it is possible to attach a flexible member such as rubber to the lower end portion 25c.

上面が開放され、下端部25cが床面55に密着するガイド部材25の存在により、図5の矢印に示すような風の流れが回収溶液7の回収時に発生する。即ち、回収溶液7の表面張力や、床面55の状態により、一定の送風による吸引・回収では十分に回収溶液7を回収できない場合が発生するが、ガイド部材25の存在により、ホーンの供給兼排出孔22bの中心から離れた部分の回収溶液7をホーンの前端部22aの中心方向に押し出す風の流れが作られ、回収溶液7を確実に回収することが可能となる。特に、ガイド部材25から床面55に向かう空気の流れが、床面55に衝突することで渦のような送風の変化を起こし、その付近の回収溶液7を大きく移動させ、ホーンの前端部22aの中心部(供給兼排出孔22b)に向かわせることとなり、送風の変化を起こして安定した状態にある回収溶液7を流動させることで、吸引・回収の方向に回収溶液7の流れを変えることが可能となり、確実な吸引・回収が可能となる。また、ホーン部22の外周にガイド部材25が設けられることにより、ホーンの前端部22aの中心に設けられた供給兼排出孔22bから供給される回収溶液7に対して、床面55の近傍を流れる微風の影響を受けることを防止でき、確実な作業が可能となる。   Due to the presence of the guide member 25 whose upper surface is opened and whose lower end portion 25 c is in close contact with the floor surface 55, a wind flow as shown by an arrow in FIG. That is, depending on the surface tension of the recovered solution 7 and the state of the floor surface 55, there may occur a case where the recovered solution 7 cannot be sufficiently recovered by suction / recovery with constant air blowing. A flow of wind is generated to push the recovered solution 7 away from the center of the discharge hole 22b toward the center of the front end 22a of the horn, and the recovered solution 7 can be reliably recovered. In particular, the air flow from the guide member 25 toward the floor surface 55 collides with the floor surface 55 to cause a change in air flow like a vortex, greatly moving the recovered solution 7 in the vicinity thereof, and the front end 22a of the horn. The flow of the recovered solution 7 is changed in the direction of suction / recovery by flowing the recovered solution 7 in a stable state by causing a change in air flow. This makes it possible to perform reliable suction and recovery. In addition, by providing the guide member 25 on the outer periphery of the horn portion 22, the vicinity of the floor surface 55 can be reduced with respect to the recovered solution 7 supplied from the supply and discharge hole 22b provided at the center of the front end portion 22a of the horn. It can be prevented from being affected by the flowing breeze, and reliable work is possible.

また、図6示すように、ガイド部材25の内端部25aを、下方に向かってその径を減少させる構成とすることによって、さらなる送風の変化を起こし、回収溶液7の確実な回収を行うことができる。即ち、ホーン部22の外側面とガイド部材25の内端部25aの距離を下方に向こうにつれて減少させることにより、風速をさらに強化することが可能であり、回収溶液7を大きく移動させ、ホーンの前端部22aの中心部(供給兼排出孔22b)に向かわせることとなり、確実な吸引・回収が可能となる。   Further, as shown in FIG. 6, the inner end portion 25 a of the guide member 25 is configured to reduce its diameter downward, thereby causing a further change in air blowing and performing a reliable recovery of the recovered solution 7. Can do. That is, by decreasing the distance between the outer surface of the horn portion 22 and the inner end portion 25a of the guide member 25 as it goes downward, the wind speed can be further strengthened, the recovered solution 7 is moved greatly, It will be directed to the central portion (supply / discharge hole 22b) of the front end portion 22a, and reliable suction and recovery are possible.

また、図1及び図2に示すようにガイド部材25のさらに外側には、ホーンの前端部22aと床面55の位置(距離)決めを行う脚部45が設けられている。脚部45は、ホーン部22のフランジ部22dに、ボルト等(図示せず)を介して固定される。また、脚部45は、ガイド部材25と同様に、超音波振動に与える影響を最小限に押さえるべく、シリコンのパッキン等(図示せず)を介して、フランジ部22dに固定される。脚部45は、回収溶液7の床面55への供給、付着物56の床面55からの剥離、床面55からの回収溶液7の確実な回収を行うべく、ホーンの前端部22aと床面55の位置(距離)決めを行うものであって、ホーンの前端部22aと床面55の距離は、0.5mm乃至0.7mmになるように、脚部45下端の接地部45aの位置を調整して使用する。   Further, as shown in FIGS. 1 and 2, a leg portion 45 for determining the position (distance) between the front end portion 22a of the horn and the floor surface 55 is provided on the outer side of the guide member 25. The leg portion 45 is fixed to the flange portion 22d of the horn portion 22 via a bolt or the like (not shown). Similarly to the guide member 25, the leg portion 45 is fixed to the flange portion 22d via a silicon packing or the like (not shown) in order to minimize the influence on the ultrasonic vibration. The leg portion 45 is connected to the front end 22a of the horn and the floor in order to supply the recovered solution 7 to the floor surface 55, peel off the deposit 56 from the floor surface 55, and reliably recover the recovered solution 7 from the floor surface 55. The position (distance) of the surface 55 is determined, and the position of the grounding portion 45a at the lower end of the leg portion 45 is set so that the distance between the front end portion 22a of the horn and the floor surface 55 is 0.5 mm to 0.7 mm. Adjust and use.

制御部90は、超音波発振制御部74、回収溶液供給部11、排出液体吸引部31等を制御して、床面55に付着した付着物56の洗浄回収動作を連続的にスムースに自動で行えるようにしている。   The control unit 90 controls the ultrasonic oscillation control unit 74, the collected solution supply unit 11, the discharged liquid suction unit 31 and the like, and automatically and smoothly performs the cleaning and collecting operation of the deposit 56 attached to the floor surface 55. I can do it.

次に、付着物検査試料回収装置1の使用方法を説明する。
付着物56の付着した床面55の上部に超音波洗浄部20aを移動させ、超音波洗浄部20aの下方に検査を行う付着物56を囲繞するとともに、床面55とガイド部材25の下端部25cとを密着させる。
Next, a method for using the deposit inspection sample recovery apparatus 1 will be described.
The ultrasonic cleaning unit 20a is moved to the upper part of the floor surface 55 to which the deposit 56 is adhered, and the deposit 56 to be inspected is surrounded below the ultrasonic cleaning unit 20a, and the floor surface 55 and the lower end of the guide member 25 25c.

制御部90の洗浄回収スタートスイッチを押圧し、洗浄回収動作をスタートさせる。制御部90は、回収溶液供給部11に回収溶液7を所定量(例えば5cc)供給管路13、供給兼排出管路43及びホーンの供給兼排出孔22bを通じて、囲繞された付着物56に向かって噴出させる。次に、制御部90は超音波洗浄部20aに超音波を所定時間(例えば5秒間)照射させる。付着物56は床面55から剥離されるとともに、回収溶液7と付着物56が混合され排出液体となる。制御部90は、排出液体吸引部31に、回収溶液7をホーンの供給兼排出孔22b、供給兼排出管路43及び排出管路33を通じて吸引排出させる。吸引排出された排出液体は排出液体タンク部32に貯留される。この貯留された排出液体は回収され、シンチレータ(試薬)等を加えて放射線の強さ等が測定される。   The cleaning / recovery start switch of the control unit 90 is pressed to start the cleaning / recovery operation. The control unit 90 supplies the recovered solution 7 to the recovered solution supply unit 11 through the supply line 13, the supply / discharge line 43, and the horn supply / discharge hole 22 b toward the enclosed deposit 56. Erupt. Next, the control unit 90 irradiates the ultrasonic cleaning unit 20a with ultrasonic waves for a predetermined time (for example, 5 seconds). The deposit 56 is peeled off from the floor surface 55 and the recovered solution 7 and the deposit 56 are mixed to become a discharged liquid. The control unit 90 causes the discharged liquid suction unit 31 to suck and discharge the recovered solution 7 through the supply / discharge hole 22 b of the horn, the supply / discharge line 43, and the discharge line 33. The discharged liquid sucked and discharged is stored in the discharged liquid tank section 32. The stored discharged liquid is collected, and the intensity of radiation is measured by adding a scintillator (reagent) or the like.

また、排出液体吸引部31に、回収溶液7を吸引排出させる場合に、連続的な吸引のみならず、断続的な吸引を行うことにより、回収溶液7の移動を大きくすることが可能であり、回収溶液7の回収をより確実に行うことも可能である。   Further, when the collected liquid 7 is sucked and discharged to the discharged liquid suction part 31, it is possible to increase the movement of the collected solution 7 by performing not only continuous suction but also intermittent suction, It is also possible to recover the recovery solution 7 more reliably.

排出液体タンク部32の近傍には、排出液体の成分を分析するための排出液体分析手段を設けていてもよい。例えば、GMサーベイメーター等を設置して放射線の強さを測定し、汚染状況を分析することができる。この分析結果はサンプルとして日時とともに蓄積記録されるとよい。   In the vicinity of the discharged liquid tank section 32, a discharged liquid analyzing means for analyzing the components of the discharged liquid may be provided. For example, a GM survey meter can be installed to measure the intensity of radiation and analyze the contamination status. The analysis result may be accumulated and recorded as a sample together with the date and time.

排出液体分析手段については放射性物質を取り扱う分野等では公知な技術であり、ここでは詳述しない。   The discharged liquid analysis means is a well-known technique in the field of handling radioactive substances, and will not be described in detail here.

尚、超音波洗浄部20aは、防護服を着用した作業者が手動で移動させてもよいが、ロボット等搬送手段、移動手段で自動的に移動できるようにしてもよい。また、安全な場所より遠隔操作ができるようにするとさらによい。   The ultrasonic cleaning unit 20a may be manually moved by an operator wearing protective clothing, but may be automatically moved by a conveying means such as a robot or a moving means. It is even better if remote operation is possible from a safe place.

また、図1に示すように付着物検査試料回収装置1は、超音波発信制御部74、制御部90及び排出液体吸引部31がキャスター47付の筐体に搭載されていて、超音波洗浄部20a、回収溶液供給部11及び排出液体タンク部32が一体になるので、持ち運びしやすく作業性が良い。また、付着物検査試料回収装置1は、筐体内にバッテリーを備えることによって、外部電源等から独立して使用することも可能である。   As shown in FIG. 1, the deposit inspection sample collecting apparatus 1 includes an ultrasonic wave transmission control unit 74, a control unit 90, and a discharged liquid suction unit 31 mounted on a casing with casters 47, and an ultrasonic cleaning unit. Since 20a, the collection | recovery solution supply part 11, and the discharge | emission liquid tank part 32 are united, it is easy to carry and workability | operativity is good. Further, the deposit inspection sample collecting apparatus 1 can be used independently from an external power source or the like by providing a battery in the housing.

本発明による付着物検査試料回収装置の実施の形態の概要を示す全体図である。1 is an overall view showing an outline of an embodiment of a deposit inspection sample recovery apparatus according to the present invention. 図2は、ホーン部、脚部及びガイド部材の部分拡大図である。FIG. 2 is a partially enlarged view of the horn part, the leg part, and the guide member. 図3(a)は、本発明による超音波ホーン部の正面図、(b)は(a)の左側面図、(c)は(a)に係るホーン部の底面図、(d)は、(c)の他の実施例を示す図である。3 (a) is a front view of an ultrasonic horn unit according to the present invention, (b) is a left side view of (a), (c) is a bottom view of the horn unit according to (a), and (d) is It is a figure which shows the other Example of (c). 従来の付着物検査試料回収装置用超音波ホーン部と本発明による超音波ホーン部の傾斜した場合の対比図である。It is a comparison figure at the time of the inclination of the conventional ultrasonic horn part for deposit inspection sample collection | recovery apparatuses, and the ultrasonic horn part by this invention. 使用時におけるホーン部、脚部及びガイド部材の部分拡大図である。It is the elements on larger scale of a horn part at the time of use, a leg part, and a guide member. 図5の他の実施例を示す図である。It is a figure which shows the other Example of FIG. 特許文献1に示す従来の付着物検査試料回収装置の概要を示す全体説明図である。It is whole explanatory drawing which shows the outline | summary of the conventional deposit | attachment inspection sample collection | recovery apparatus shown in patent document 1. FIG. 図7に示す付着物検査試料回収装置の超音波洗浄部を示す図である。It is a figure which shows the ultrasonic cleaning part of the deposit | attachment test | inspection sample collection | recovery apparatus shown in FIG. 図8に示す超音波洗浄部の底面図である。FIG. 9 is a bottom view of the ultrasonic cleaning unit shown in FIG. 8.

符号の説明Explanation of symbols

1・・・付着物検査試料回収装置
7・・・回収溶液
10・・・回収溶液供給手段
11・・・回収溶液供給部
12・・・回収溶液タンク部(回収溶液貯留部)
13・・・供給管路
20a・・・超音波洗浄部
21・・・超音波振動子部
22・・・ホーン部
22a・・・前端部
22b・・・供給兼排出孔
22b1・・・接続孔
22c・・・溝部
22d・・・フランジ部
25・・・ガイド部材
25a・・・内端部
25b・・・接続部材
25c・・・下端部
30・・・排出液体回収手段
31・・・排出液体吸引部
32・・・排出液体タンク部(排出液体貯留部)
33・・・排出管路
43・・・供給兼排出管路
45・・・脚部
45a・・・接地部
47・・・キャスター
51・・・付着物検査試料回収装置
55・・・床面
56・・・付着物
60・・・回収溶液供給手段
61・・・回収溶液供給部
62・・・回収溶液タンク部(回収溶液貯留部)
63・・・供給管路
70・・・超音波洗浄手段
70a・・・超音波洗浄部
71・・・超音波振動子部
72・・・ホーン部
72a・・・前端部
73・・・給排液ケース
74・・・超音波発振制御部
75・・・パッキン
80・・・排出液体回収手段
81・・・排出液体吸引部
82・・・排出液体タンク部(排出液体貯留部)
83・・・排出管路
90・・・制御部
DESCRIPTION OF SYMBOLS 1 ... Deposit inspection sample collection device 7 ... Collection solution 10 ... Collection solution supply means 11 ... Collection solution supply part 12 ... Collection solution tank part (collection solution storage part)
13 ... Supply pipe line 20a ... Ultrasonic cleaning part 21 ... Ultrasonic vibrator part 22 ... Horn part 22a ... Front end part 22b ... Supply / discharge hole 22b1 ... Connection hole 22c ... groove 22d ... flange 25 ... guide member 25a ... inner end 25b ... connecting member 25c ... lower end 30 ... discharged liquid recovery means 31 ... discharged liquid Suction part 32 ... discharged liquid tank part (discharged liquid storage part)
33 ... Drain line 43 ... Supply and discharge line 45 ... Leg part 45a ... Grounding part 47 ... Caster 51 ... Adhesive inspection sample collection device 55 ... Floor surface 56 ... Deposits 60 ... Recovery solution supply means 61 ... Recovery solution supply part 62 ... Recovery solution tank part (recovery solution storage part)
63 ... Supply pipe 70 ... Ultrasonic cleaning means 70a ... Ultrasonic cleaning unit 71 ... Ultrasonic transducer 72 ... Horn 72a ... Front end 73 ... Supply / discharge Liquid case 74 ... Ultrasonic oscillation control part 75 ... Packing 80 ... Drained liquid recovery means 81 ... Drained liquid suction part 82 ... Drained liquid tank part (discharged liquid storage part)
83 ... Drain line 90 ... Control unit

Claims (6)

検査対象に付着している付着物に、回収溶液を所定量供給するための回収溶液供給手段と、前記付着物および前記回収溶液に、超音波を所定時間照射して前記付着物を前記検査対象から剥離させるための超音波洗浄手段と、前記付着物と前記回収溶液が混合された排出液体を回収するための排出液体回収手段とを備えている付着物検査試料回収装置において、
前記超音波洗浄手段は、前記超音波を発生させるための超音波振動子部と、前記超音波振動子部を所定の条件で発振させる超音波発振制御部と、前記超音波振動子部の先端に設けられ、前記超音波振動子部の波動を伝搬するホーン部とからなり、
前記ホーン部の下端面の中心に回収溶液の供給及び排出を行う供給兼排出孔を単数又は複数設け、
前記ホーン部の下端面は、検査対象面に対する傾斜角度θが0°<θ<10°の傾斜面が中央を中心としたテーパ状に形成され、
かつ、該下端面の中心から外周に向けて曲線及び/又は直線状に切り欠かれた溝部が単数又は複数設けられ、
前記ホーン部の外周には、円筒状で上面と下面が開放されたガイド部材が前記ホーン部から所定の距離離間し、かつ、前記ホーン部を包むように設けられていること
を特徴とする付着物検査試料回収装置。
A recovery solution supply means for supplying a predetermined amount of a recovery solution to the deposit adhered to the surface to be inspected, and the deposit and the recovery solution are irradiated with ultrasonic waves for a predetermined time to inspect the deposit. In the deposit inspection sample recovery apparatus comprising an ultrasonic cleaning means for peeling from the target surface , and a discharge liquid recovery means for recovering a discharge liquid in which the deposit and the recovery solution are mixed,
The ultrasonic cleaning means includes an ultrasonic transducer unit for generating the ultrasonic wave, an ultrasonic oscillation control unit that oscillates the ultrasonic transducer unit under a predetermined condition, and a tip of the ultrasonic transducer unit A horn unit that propagates the wave of the ultrasonic transducer unit,
Provide one or more supply and discharge holes for supplying and discharging the recovered solution at the center of the lower end surface of the horn part,
The lower end surface of the horn portion is formed in a tapered shape with an inclination angle θ with respect to the surface to be inspected being 0 ° <θ <10 ° centered at the center,
In addition, a single or a plurality of grooves cut into a curved line and / or a straight line from the center of the lower end surface toward the outer periphery are provided,
An outer periphery of the horn portion is provided with a cylindrical guide member whose upper surface and lower surface are open so as to be separated from the horn portion by a predetermined distance and to wrap the horn portion. Inspection sample collection device.
前記排出液体回収手段は、断続的に吸引を行うことによって前記排出液体を回収すること
を特徴とする請求項1に記載の付着物検査試料回収装置。
The deposit inspection sample recovery apparatus according to claim 1 , wherein the discharge liquid recovery means recovers the discharge liquid by intermittently performing suction.
検査対象に付着している付着物に、回収溶液を所定量供給するための回収溶液供給手段と、前記付着物および前記回収溶液に、超音波を所定時間照射して前記付着物を前記検査対象から剥離させるための超音波洗浄手段と、前記付着物と前記回収溶液が混合された排出液体を回収するための排出液体回収手段とを備えている付着物検査試料回収装置において、
前記超音波洗浄手段は、前記超音波を発生させるための超音波振動子部と、前記超音波振動子部を所定の条件で発振させる超音波発振制御部と、前記超音波振動子部の先端に設けられ、前記超音波振動子部の波動を伝搬するホーン部とからなり、
前記ホーン部の下端面の中心に回収溶液の供給及び排出を行う供給兼排出孔を単数又は複数設け、
前記ホーン部の下端面は、検査対象面に対する傾斜角度θが0°<θ<10°の傾斜面が中央を中心としたテーパ状に形成され、
かつ、螺旋形状に形成され、
前記ホーン部の外周には、円筒状で上面と下面が開放されたガイド部材が前記ホーン部から所定の距離離間し、かつ、前記ホーン部を包むように設けられていること
を特徴とする付着物検査試料回収装置。
A recovery solution supply means for supplying a predetermined amount of a recovery solution to the deposit adhered to the surface to be inspected, and the deposit and the recovery solution are irradiated with ultrasonic waves for a predetermined time to inspect the deposit. In the deposit inspection sample recovery apparatus comprising an ultrasonic cleaning means for peeling from the target surface , and a discharge liquid recovery means for recovering a discharge liquid in which the deposit and the recovery solution are mixed,
The ultrasonic cleaning means includes an ultrasonic transducer unit for generating the ultrasonic wave, an ultrasonic oscillation control unit that oscillates the ultrasonic transducer unit under a predetermined condition, and a tip of the ultrasonic transducer unit A horn unit that propagates the wave of the ultrasonic transducer unit,
Provide one or more supply and discharge holes for supplying and discharging the recovered solution at the center of the lower end surface of the horn part,
The lower end surface of the horn portion is formed in a tapered shape with an inclination angle θ with respect to the surface to be inspected being 0 ° <θ <10 ° centered at the center,
And formed in a spiral shape,
An outer periphery of the horn portion is provided with a cylindrical guide member whose upper surface and lower surface are open so as to be separated from the horn portion by a predetermined distance and to wrap the horn portion. Inspection sample collection device.
前記排出液体回収手段は、断続的に吸引を行うことによって前記排出液体を回収すること
を特徴とする請求項3に記載の付着物検査試料回収装置。
The deposit inspection sample recovery apparatus according to claim 3, wherein the discharge liquid recovery means recovers the discharge liquid by intermittently suctioning.
検査対象に付着している付着物を採取するための付着物検査試料回収装置用超音波ホーンであって、
前記ホーンの下端面の中心に回収溶液の供給及び排出を行う供給兼排出孔を単数又は複数設け、
前記ホーンの下端面は、検査対象面に対する傾斜角度θが0°<θ<10°の傾斜面が中央を中心としたテーパ状に形成され、
かつ、該下端面の中心から外周に向けて曲線及び/又は直線状に切り欠かれた溝部が単数又は複数設けられ、
前記ホーンの外周には、円筒状で上面と下面が開放されたガイド部材が前記ホーンから所定の距離離間し、かつ、前記ホーンを包むように設けられていること
を特徴とする超音波ホーン。
A deposit inspection ultrasonic horn sample collection device for collecting deposits adhering to the inspection target surface,
Provide one or more supply and discharge holes to supply and discharge the recovered solution at the center of the lower end surface of the horn,
The lower end surface of the horn is formed in a tapered shape with an inclination angle θ with respect to the surface to be inspected being 0 ° <θ <10 ° centered at the center,
In addition, a single or a plurality of grooves cut into a curved line and / or a straight line from the center of the lower end surface toward the outer periphery are provided,
An ultrasonic horn characterized in that a cylindrical guide member having an open upper surface and a lower surface is provided on the outer periphery of the horn so as to be separated from the horn by a predetermined distance and to wrap the horn.
検査対象に付着している付着物を採取するための付着物検査試料回収装置用超音波ホーンであって、
前記ホーンの下端面の中心に回収溶液の供給及び排出を行う供給兼排出孔を単数又は複数設け、
前記ホーンの下端面は、検査対象面に対する傾斜角度θが0°<θ<10°の傾斜面が中央を中心としたテーパ状に形成され、
かつ、螺旋形状に形成され、
前記ホーンの外周には、円筒状で上面と下面が開放されたガイド部材が前記ホーンから所定の距離離間し、かつ、前記ホーンを包むように設けられていること
を特徴とする超音波ホーン。
A deposit inspection ultrasonic horn sample collection device for collecting deposits adhering to the inspection target surface,
Provide one or more supply and discharge holes to supply and discharge the recovered solution at the center of the lower end surface of the horn,
The lower end surface of the horn is formed in a tapered shape with an inclination angle θ with respect to the surface to be inspected being 0 ° <θ <10 ° centered at the center,
And formed in a spiral shape,
An ultrasonic horn characterized in that a cylindrical guide member having an open upper surface and a lower surface is provided on the outer periphery of the horn so as to be separated from the horn by a predetermined distance and to wrap the horn.
JP2004319909A 2004-11-02 2004-11-02 Adherent inspection sample recovery apparatus and ultrasonic horn for the apparatus Expired - Fee Related JP4124763B2 (en)

Priority Applications (1)

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