JP4133065B2 - Card case holder and substrate storage container - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a substrate storage container for storing a substrate such as a semiconductor wafer or a mask glass, and more particularly to a card case holding a card having substrate identification information and a substrate storage container having a card case holder and easy to identify.
[0002]
[Prior art]
Conventionally, in order to hold a process management card having substrate identification information at one end of a substrate storage container in an identifiable manner, a plurality of ribs having an L-shaped cross section are provided on one side wall of the substrate storage container. Japanese Patent Laid-Open No. 4-225257 has proposed a method of holding a process management card in the opening between the two.
[0003]
In such a process management card, lot information of a substrate to be stored and items to be transmitted by an operator in the process, for example, notes such as processing conditions and a report are written and used.
[0004]
[Problems to be solved by the invention]
In the conventional method, since the process management card is folded in half and stored in the holder, it is necessary to take out the card and check the written contents in order to check the contents. Further, since the paper process management card is directly exposed on the side wall and held, the card is easily damaged or damaged during use of the substrate storage container.
[0005]
Since the conventional card holder is integrally formed on one side wall of a jig called a carrier for storing a substrate, the size of the card that can be held is limited to one type. If a factory using such a carrier used an identification information card of a different size, it was necessary to recreate the carrier in accordance with the dimensions of each process management card.
[0006]
In general, in a factory for processing and processing a substrate, the factory is divided into several sections according to the processing and processing steps of the substrate. (For example, in the semiconductor wafer processing process, the pre-process of forming the metal thin film and the post-process after forming the metal thin film) Therefore, the substrate storage container used there is also divided into several categories depending on the processing process of the substrate and the type of substrate Therefore, since it is less contaminated and easier to clean, it has been managed so that it is not mixed into other compartments by distinguishing it from factory compartments.
In this case, the conventional process management card alone easily causes mistakes due to artificial oversight or misunderstanding, and there has been a demand for a means that can be used in combination with this to enable the substrate storage container to be distinguished at a glance with a simpler method.
[0007]
[Means for Solving the Problems]
In order to solve the above problems, the present invention is provided to hold a card case for storing an identification sheet on which identification information of a substrate stored in the substrate storage container is stored on one side wall of the substrate storage container. And
The card case holder is provided with a set of holder parts that hold the card case with a gap therebetween,
Each holder part has a flat base material, an L-shaped storage part provided at one end of the base material, and is formed to protrude from the other end surface of the base material, facing the storage part, and in contact with the card case. A rib for bending, and at least one attachment portion provided on the opposite side of the storage portion to engage with the substrate storage container ,
The storage unit includes a side wall provided at one end of the base material, a lower end wall orthogonal to the side wall, and a flat plate part that is provided on the side wall and covers a portion surrounded by the side wall and the lower end wall. An opening is formed in a direction opposite to each of the above, and the side wall and the flat plate portion are combined in an L-shaped cross section,
It is characterized in that the storage portions of a set of holder parts are arranged so as to face each other at intervals .
In addition, the square hole which releases the contact of the corner | angular part of a card case can be formed in the base material facing the accommodating part of a holder component.
[0008]
Further, in the present invention, in order to solve the above problems, a substrate storage container comprising a container body having an opening at one end and a lid for closing the opening of the container body,
The card case holder according to claim 1 or 2 is characterized in that it has a mounting portion that can be detachably mounted.
In addition, it is preferable that the board | substrate storage container is attached with at least 1 component colored in the color different from a container main body.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described with reference to the drawings. 1 is a front view showing a card case holder 10 of the present invention, FIG. 2 is a rear view of the card case holder 10, and FIG. 3 is a cross-sectional view taken along line AA of FIG. The card case holder 10 of the present invention is formed as a pair of symmetrical holder parts 11 using a thermoplastic resin such as polycarbonate resin, acrylic resin, or polypropylene resin, preferably a transparent material as a raw material. The holder component 11 includes a flat base 12, a storage portion 13 formed in an L-shaped cross section provided at one end of the base 12, and the storage portion 13 at the other end of the base 12. A rib 14 provided so as to protrude from the surface of the base material 12, and a mounting portion that is attached to the upper outer side (opposite side of the storage unit) and the lower outer side (reverse side of the storage unit) of the side wall 16 of the storage unit 13 Fifteen.
[0010]
The storage portion 13 includes a side wall 16 integrally formed from the base material 12, a lower end wall 17 orthogonal to the side wall 16, and a flat plate portion 18 that covers a portion surrounded by the side wall 16 and the lower end wall 17. An opening 19 is formed in a direction opposite to each of 16 and the lower end portion 17. As is apparent from FIGS. 2 and 3, a square hole 20 having substantially the same shape as the flat plate is formed in the portion of the card case holder 10 where the flat plate is projected.
[0011]
The ribs 14 provided at the other end of the substrate 12 are formed to be elongated so as to be parallel to the storage portion 13, and both end portions of the rib 14 are inclined surfaces that gradually increase in height toward the central portion. Are formed, and the central portion has the same height. The tip of the rib is formed in a substantially semicircular cross section.
[0012]
A mounting portion 15 provided as a circular boss in a plan view in each of the upper and lower directions of the storage portion 13 is provided outside the opening 19 of the storage portion 13, and is a threaded component when fixed to the substrate storage container 1 in the center. A through hole for storing the head and a recess for storing the head of the threaded component are formed.
[0013]
Next, the use state of the card case holder 10 of the present invention will be described. FIG. 4 is a development view of the substrate storage container 1 to which the card case holder 10 of the present invention can be attached. The substrate storage container 1 has an opening at one end, and the substrates are placed horizontally on the inner walls facing each other at regular intervals. It consists of a container body 2 having a support portion 4 to be stored, and a lid 3 that closes the opening of the container body. Various transport handles 7 and 8 used when transporting the substrate storage container 1 automatically or manually are attached to the upper surface and the outer wall of the container body. A pressing member that contacts and protects the end of the substrate is detachably attached to the inner surface of the lid 3. Further, a sealing member 5 formed in an endless shape is attached to the side wall of the lid 3 in order to hermetically close the opening.
[0014]
Such a container main body and the lid 3 are preferably formed of a material that dissipates static electricity so that trouble and damage such as dust adhesion and performance deterioration due to static electricity do not occur on the accommodated substrate. For example, a resin such as polycarbonate, polybutylene terephthalate, or polyether ether ketone is added with a conductive material such as carbon fiber, carbon nanotube, or barium titanate, or a polyamide block and a polyether block and / or a polyether block. Preferably, these blocks are formed from a material having electrostatic dissipative properties by alloy formulation with a conductive resin material, such as using a block copolyamide resin in which an ester bond or an ester amide bond is used.
[0015]
The card case holder 10 is preferably attached at a position where it can be easily confirmed from the outside, and is attached to the back surface of the substrate storage container 1 via a fixing bolt as shown in FIG. For this reason, on the back surface of the container main body 2, mounting portions 15 of a plurality of card case holders 10 having threaded portions are provided at regular intervals so as to match each of the fixing portions 26 of the card case holder 10. . For example, an identification sheet 22 for process management stored in a transparent card case 21 formed in a predetermined size such as B5 or B6 defined by JIS is inserted into the storage unit 13 of the opposing card case. The
[0016]
6 is a cross-sectional view taken along the line B-B of FIG. 5, and the transparent case inserted into the card case holder 10 is bent by the rib 14 formed in the card case holder 10 so as to be substantially parallel to the curved surface of the transparent window 6. To keep it from moving. At this time, by providing the square hole 20 in the base material facing the back side of the storage portion, the contact of the corner portion of the card case 21 is released, so that it is easy to bend and hold.
As a result, the process management sheet can be easily confirmed, and the transparent case can be firmly held by the ribs 14 and the storage portion 13, and the transparent case can be prevented from falling off or being displaced during conveyance. Furthermore, it is possible to prevent the transparent window 6 from being damaged or rubbed by the transparent case to generate particles.
[0017]
FIG. 7 shows another embodiment of the present invention, and shows a mounting structure of a card case holder 10 that can store card cases 21 of different sizes in the substrate storage container 1. In addition, the card case holder 10 can use what was demonstrated in previous embodiment as it is. In this case, an attachment dimension adjusting adapter 23 is interposed between the container body 2 for holding the card cases 21 of different sizes and the card case holder 10 to accommodate the card case holders 10 of different sizes. . The dimension adjustment adapter 23 includes a threaded portion 24 for fixing the card case holder 10 and a long hole 25 for fixing to the container main body 2 so that it can be fixed to the container main body 2 at an arbitrary position of the long hole 25. Thus, the card case of different dimensions can be held by one card case holder 10.
[0018]
The card case holder 10 is not limited to this, but may be fixed using magnetism, and magnet parts may be embedded in predetermined positions of the container body 2 and the card case holder 10. In this case, it is possible to easily cope with the size difference of the card case 21 by embedding magnet parts at a plurality of positions of the container body 2.
[0019]
FIGS. 8A to 8C show still another embodiment of the present invention, in which the color of the transport part detachably attached to the substrate storage container 1 and the color of the lid surface plate 9 are different from those of the container body 2. It is a thing. FIG. 8A is an example in which the manual handle 7 attached to the side wall 16 of the container is made in a color (for example, white, yellow, blue, red, green) different from the color (for example, black) of the container body 2. . FIG. 8B is an example in which the robotic handle 8 attached to the top surface of the container body 2 is color-coded in the same manner as the manual handle 7 described above. Furthermore, FIG.8 (c) is the example which color-coded similarly the surface plate 9 attached to the surface of the cover body 3 which has a U-shaped cross section. Further, when there are a large number of the substrate storage containers 1 to be divided, these three components can be combined and used. Further, such color coding is not limited to these, and other parts and the colors of the container body 2 and the lid 3 may be color-coded.
[0020]
By classifying the substrate storage container 1 in this way, the classification of the substrate storage container 1 used by the worker who is working in the process can be confirmed at a glance, so that the process can be performed in different processes or different types. It is possible to prevent work mistakes such as inadvertently injecting into other processes.
[0021]
【The invention's effect】
The card case holder of the present invention can be easily confirmed from the outside, so that the identification card is not soiled or the card case holder is not dropped. In addition, it is possible to store a plurality of card cases with one type of card case holder. Furthermore, by attaching a plurality of parts having different colors to the substrate storage container 1, it is easy to distinguish and work errors can be prevented.
[Brief description of the drawings]
FIG. 1 is a front view illustrating an embodiment of a card case holder of the present invention.
FIG. 2 is a rear view showing an embodiment of the card case holder of the present invention.
3 is a cross-sectional view taken along line AA in FIG.
FIG. 4 is an exploded perspective view showing a substrate storage container to which the card case holder of the present invention is attached.
FIG. 5 is a rear view showing a substrate storage container to which the card case holder of the present invention is attached. FIG. 6 is a cross-sectional view taken along line BB of FIG. The rear view showing the attached substrate storage container.
FIG. 8A is a side view in which a color identification member is attached to the top surface of the substrate storage container of the present invention.
(B) The front view which attached the identification member by color to the side wall of the substrate storage container of this invention.
(C) The front view which attached the identification member by a color to the cover body surface of the substrate storage container of this invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Substrate storage container, 2 Container main body, 3 Cover body, 4 Support part, 5 Seal member, 6 Transparent window, 7 Manual handle, 8 Robotic handle, 9 Cover body surface plate 10 Card case holder, 11 Holder parts, 12 groups Material, 13 Storage part, 14 Rib, 15 Mounting part, 16 Side wall, 17 Lower end wall, 18 Flat plate part, 19 Opening, 20 Square hole 21 Card case, 22 Identification sheet, 23 Size adjustment adapter, 24 Screw part, 25 Long Hole, 26 fixing part

Claims (4)

A card case holder provided for holding a card case storing an identification sheet on which identification information of a substrate stored in a substrate storage container is stored on one side wall of the substrate storage container,
The card case holder is provided with a set of holder parts that hold the card case with a gap therebetween,
Each holder part has a flat base material, an L-shaped storage part provided at one end of the base material, and is formed to protrude from the other end surface of the base material, facing the storage part, and in contact with the card case. A rib for bending, and at least one attachment portion provided on the opposite side of the storage portion to engage with the substrate storage container ,
The storage unit includes a side wall provided at one end of the base material, a lower end wall orthogonal to the side wall, and a flat plate part that is provided on the side wall and covers a portion surrounded by the side wall and the lower end wall. An opening is formed in a direction opposite to each of the above, and the side wall and the flat plate portion are combined in an L-shaped cross section,
A card case holder, characterized in that a set of holder parts are disposed so as to face each other with a space therebetween . The card case holder according to claim 1, wherein a square hole for releasing contact of a corner portion of the card case is formed in a base material opposed to the holder part storage portion . A substrate storage container comprising a container body having an opening at one end and a lid for closing the opening of the container body,
3. A substrate storage container comprising a mounting portion to which the card case holder according to claim 1 can be detachably attached.   The substrate storage container according to claim 3, wherein the substrate storage container is attached with at least one component colored in a color different from that of the container main body.

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