JP4137737B2 - Fabrication method of core expansion fiber array - Google Patents

Description

  The present invention relates to a core expansion fiber array, a method of manufacturing a core expansion fiber array, an optical array device with a fiber, and a method of manufacturing an optical array element, and in particular, an optical array device and a fiber that make use of the characteristics of a core expansion fiber. The present invention relates to a structure of an optical array device in which a coupling loss with an array is reduced and a manufacturing method thereof.

Since optical communication can transmit a large amount of information at high speed, it has been rapidly put into practical use recently.
When combining a fiber and a thick planar element, a structure is adopted in which the planar element is inserted into a groove formed in the fiber. At that time, when the planar element is as thick as about 1 mm, it is usual to use a core expansion fiber in order to reduce the loss (see Non-Patent Document 1 below).
For example, in Non-Patent Document 1 described above, a device in which a 1 mm thick isolator or a liquid crystal element is inserted between core expansion fiber arrays is realized.
On the other hand, it is known to fabricate a core-enlarged fiber array by utilizing the fact that the core of the fusion part is expanded by fusing the fiber array with a multi-core fiber fuser (see below, Patent Documents). 1).

As prior art documents related to the invention of the present application, there are the following.
Japanese Patent Application Laid-Open No. 8-297214 “Optical Filter and Manufacturing Method Thereof” Shojiro Kawakami, Osamu Hanazumi “Vertical Photonic Device” IEICE Transactions, Vol.77-CI, No.5, pp.334-339, May 1994 K.Hirabayashi, and C. Amano. “Liqid-Crystal Polaization Controller Arrays on Planar Waveguide Circuits,” IEEE PTL vol.14, No.4, April p, 504-506,2002 K.Hirabayashi, and C. Amano. “Variable and Rotatable Waveplates of PLZT Elcctro-Optic Cemmic Material on Waveguidw Circuits,” IEEE PTL vol.14, No.7, July, p.956-958,2002 Katsuhiko Hirabayashi and Chikar Amano, “Liquid Crystal Polarization Controllar Arrays on Planar Lightwave Circuits,” IEICE Trans.Electron., Vol.E86-C, No.5, May, pp.753-761,2003

Since a normal fiber array is a taped fiber, a fiber array can be easily manufactured if it is fixed to a V-groove array, but it is difficult to array a core expansion fiber. That is, the core expansion fiber expands the core by stripping the tape fiber from which the core is worn off with a burner. However, the core of the normal tape fiber (250 μm pitch) is stripped off, and the core is evenly spread even with the burner. Is not enlarged, adjacent fibers are in close contact with each other, and it is difficult to make the core fiber of the tape fiber larger.
Although it is possible to arrange the fibers whose cores are expanded one by one and arrange them one by one, they are very complicated and labor-intensive.
Further, in the method of manufacturing the core expansion fiber array described in the above-mentioned patent document, there is a problem that the core diameter of the core expansion portion is at most 15 μm and the variation is large.
On the other hand, there are few materials and devices that can perform various operations with a thickness of 1 mm or less even in a planar array element inserted into a core expansion fiber, and in the above-mentioned Non-Patent Document 1, the electro-optic effect is the largest. Only liquid crystal devices and passive devices such as isolators were inserted into the grooves.

Core-enlarged fibers are widely used to loosen alignment tolerance when coupling optical devices such as lasers and detectors to the fiber. However, since there is no core-enlarged fiber array, the core-enlarged fiber can be used as an array laser or array detector. It was difficult to couple.
A groove can be formed in a fiber or waveguide array, and a thin planar array element can be used to realize polarization control and a variable attenuator. However, it is limited to liquid crystal elements with a large electro-optic effect, In order to insert a material having a relatively small optical effect into the groove, it is necessary to increase the groove width, and there is a problem that the loss increases when the groove width is increased.
In addition, even a thin liquid crystal device has a problem in that loss increases when it is inserted in several stages. (See Non-Patent Documents 2, 3, and 4).
For this purpose, it is effective to use a core expansion fiber that can keep the loss low even if several grooves are formed. However, since the core expansion fibers are produced one by one, even in the case of arraying, one core expansion fiber is used. It was necessary to embed each one in the V-groove, which was not suitable for arraying.

The present invention has the been made to the prior art solving the problems of technology, object of the present invention is to provide a manufacturing how the core expanded fiber array easy, and inexpensive to produce.
The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

Of the inventions disclosed in this application, the outline of typical ones will be briefly described as follows.
Core expanded fiber array of the present invention, not loosened at both ends of the covering portion is fiber array bonded together, loosened fiber of the central portion one by one by mechanical or chemical, of the fiber of the central portion loosened the The coating is peeled off mechanically or chemically to expose the bare fiber array part, the exposed bare fiber array part is lined up, both ends are sandwiched with jigs, and the core is expanded from 20 μm to 40 μm by scrubbing with a burner. Then, pull both ends of the fiber array, arrange the bare fiber array part to be evenly aligned, then sandwich it with cloth or paper soaked with fiber core assembly adhesive, soak the adhesive, It is manufactured by laminating fiber coatings that are loosened one by one, or by cutting the fiber array at the core expansion center.

The effects obtained by the representative ones of the inventions disclosed in the present application will be briefly described as follows.
Conventionally, array fibers, tape fibers, and ribbon fibers have been difficult to TEC. However, according to the present invention, core expansion (TEC) of array fibers, tape fibers, and ribbon fibers can be easily performed at low cost.
Furthermore, according to the present invention, an optical array device with a fiber using a core expanded fiber array (low loss, high speed variable wavelength filter, high speed polarization control element, surface emitting laser array module with fiber, etc.) can be easily realized. It becomes.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
Note that components having the same function are denoted by the same reference symbols throughout the drawings for describing the embodiment, and the repetitive description thereof will be omitted.
[ Example ]
The core expansion fiber is usually expanded one core at a time by a burner in the bare fiber part where the coating has been removed.
It is very simple if an array of core-enlarged fibers can be realized by squeezing multi-fiber tape-like fibers arranged at a pitch of 250 μm in a lump with a burner, but using a tape-like fiber, the core-enlarged fiber array It was very difficult to make.
That is, if the cores are expanded by rolling fibers arranged at a narrow pitch of 250 μm with a burner, they often come into contact with adjacent fibers.
It is also possible to use a fiber whose core has been expanded one by one as a tape fiber, but it is very cumbersome and labor-intensive to align the positions of the core expansion portions and form a tape at a pitch of 250 μm. Furthermore, although one core expansion fiber is expensive, when it is taped, the number of the fibers becomes high.

Therefore, in order to manufacture the core expansion fiber array inexpensively and easily, the manufacturing method shown in FIGS. 1A and 1B has been invented.
In the figure, 5-1 is an 8-core tape fiber (any number of cores are possible if there are many cores), 5-2 is a bare fiber array part where the coating is peeled off, and 5-3 is a part where the tape fiber is loosened and coated. 5-4 is a core expansion burner, 5-5 is a jig for temporarily fixing the fiber, and 5-6 is a cloth or paper soaked with an adhesive for fiber concentration.
Reference numeral 5-7 denotes a glass plate for holding the bare fiber array portion (5-2) made of a core expansion (TEC) fiber.
5-8 is a V-groove array substrate, 5-9 is a groove formed by a dicing saw, 5-10 is a TEC fiber array in which the core is enlarged and re-arranged, and is cut with a fiber cutter. The gap between them is arranged to be 1000 μm or less.
In the production method shown in FIGS. 1A and 1B, first, 1-2 m of an 8-core tape fiber (5-1) is prepared, and 5 to 10 cm of both ends are left as tape, and the fiber at the center is removed. Separate one by one with an optical fiber single fiber separator.
Optical fiber single fiber separators have been developed by optical fiber manufacturers, but many are loosened by inserting a blade between the fibers of a tape fiber (for example, an optical fiber tape single fiber manufactured by NTT-AT) Separator).

Next, the unraveled fiber coating is peeled off mechanically or chemically by about 20 mm to 30 mm to expose the bare fiber (coating removers have been developed by each electric wire manufacturer. For example, manufactured by NTT-AT: (Optical fiber stripper for coupler, intermediate coat remover WFS-0010, and chemical is dichloroethane.)
Thoroughly clean the peeled parts, arrange them at a pitch of 1 mm to several mm, fix both ends of the fiber with jigs (5-5), pull them with a constant stress, and use a core expansion burner (5-4) at once. As a result, the core is expanded to 20 μm to 40 μm.
At this time, if the fibers are arranged at a pitch of 1 mm to several mm, the core can be expanded at one time, which is suitable for mass production. However, as the number of cores increases, it becomes difficult to expand the cores at once. Therefore, it is effective to divide the cores into 4 to 8 units and expand the cores. By doing in this way, the price of one core expansion fiber falls.
After cooling, the ends of the fiber with the expanded core are pulled in both directions so that the fibers are arranged at a pitch of 250 μm.
By doing so, it is not necessary to align the core enlargement portion, the pitch and the position of the core enlargement portion are naturally aligned, and it is very easy to return to the tape.
Cloth or paper soaked with a highly volatile adhesive (adhesive attached to a fiber concentrator marketed by an electric wire manufacturer, for example, an adhesive FAAA-03 for Fujikura electric wire fiber collector FAT-04) In 5-6), the fiber is traced across the fiber, and the fiber coatings loosened one by one are bonded together, so that the adhesive solidifies instantly and returns to the tape fiber.

According to this method, core expansion (TEC) fibers are arranged with an accuracy of 250 μm ± 10 μm. If the accuracy of adhesion is increased, it can be arranged with an accuracy of 250 μm ± 5 μm.
The bare fiber array (5-2) whose core is enlarged is inserted into a glass V-groove array substrate (5-8), and the end of the groove is pressed with a glass plate (5-7) and fixed with an adhesive. Thus, a core expansion fiber array fixed to the V-groove array substrate (5-8) can be realized.
As shown in FIG. 1 (b), the V-grooves may be fixed on the V-groove array substrate, or the cores are enlarged and rearranged as indicated by 5-10 in FIG. 1 (b). The TEC fiber array may be cut from the center with a fiber cutter, and a gap may be provided to be fixed on the V-groove array substrate. Although not shown in this drawing, a glass capillary array sold as a fiber splicer may be used. A fiber may be inserted from the left and right, and a gap may be provided between the fibers.
The TEC fiber array method of this embodiment is applied not only to the variable wavelength filter and polarization control element of the reference example of the present invention described later, but also to improve the coupling efficiency of light with the array element. Since an array of TEC fibers is desired, it is also effective for this purpose.

[ Reference Example 1 ]
Next, the structure and manufacturing method of a variable wavelength filter will be described as Reference Example 1 of the present invention.
Grooves are formed in a substrate in which the core expansion fiber array produced in the above-described embodiment is fixed to a V-groove, and a PLZT etalon plate array is inserted therein.
FIG. 2 shows the structure of the PLZT etalon plate array. The reference numeral 1-1 is (a composition typified by _{Pb 1-x La x (Zr} y Ti z) 1-x / 4 O 3, x / y / z = 9/65/35) PLZT substrate 1-2-1, 1-2-2 are electrodes attached to both sides of the PLZT convex portion. 1-3 is the back surface of a PLZT convex part, and light passes here.
1-4 is a reinforcing glass block, 1-5 is a core expansion fiber substrate in which the core expansion fiber array is fixed to the V-groove array, and 1-6 is a groove formed by a dicing saw.
1-7-1 is an enlarged part of the core of the TEC fiber, and 1-7-2 is a tape fiber part on both sides of the TEC fiber.
The points when producing the PLZT etalon plate are (1) increasing the parallel flatness of the etalon, and (2) applying an electric field effectively to the location where light passes.
The production process of the PLZT etalon plate array for that purpose is shown in FIGS.
In order to increase the parallel flatness of the PLZT, it is necessary to arrange the portion through which light passes so as to be approximately at the center of the etalon plate. This is because even at the end portion, the parallelism and flatness are lowered even when the parallel flat surface is polished.

As shown in FIGS. 3A and 3B, a number of grooves (2-2) are formed on the PLZT substrate with a dicing saw. PLZT has a convex shape, but electrodes are attached to both sides thereof, and light is incident on this surface to change the refractive index of the light, thereby changing the cavity gap of the etalon to obtain a variable wavelength filter.
3A and 3B, reference numeral 2-1 denotes a PLZT substrate in which grooves are formed, 2-2 denotes grooves formed by a dicing saw, 2-3 denotes electrodes, and 2-4 denotes a resist filling the grooves. 2-5 is an adhesive for bonding two PLZTs, 2-7 is a cutting surface for slicing the PLZT block, 2-8 is an individual electrode to be taken out upward, Reference numeral 2-9 denotes a common electrode to be taken out downward, and reference numeral 110 denotes a dielectric mirror formed on the back surface of the PLZT substrate.
First, a number of grooves (2-2) are formed on the PLZT substrate with a dicing saw.
Next, the electrode (2-3) is formed by sputtering including the groove (2-2) and the convex portion, and the electrode formed at the tip portion of the convex portion is removed by polishing the upper surface.
Next, an organic material (2-4) such as a resist (or polyimide) is embedded in the groove (2-2).
Next, the PLZT substrate (2-5) is pasted on the upper side with an adhesive (2-6) to form a block.

Next, along the cutting plane (2-7) shown in FIG. 3 (b), the PLZT block is sliced by dicing and cut into a substrate having a thickness of about 1 mm, and both surfaces are polished in parallel planes to 30 μm. To a thickness of about 50 μm. At this time, parallel plane polishing is performed.
Since the part through which light passes (upper part of the convex part) is almost at the center of the plate to be polished, it is suitable for parallel plane polishing, and in order to make a Fabry-Perot etalon, the parallel part of the convex part is used when polishing. Polishing is performed so that the flatness is 1 μm / cm or less and the flatness is 100 nm or less. The optimum pitch of the projections through which light passes is 250 μm, and the width of the projections is typically 50 μm.
Next, the organic material (2-4) in the groove (2-2) is removed by dissolving with a solvent. A portion through which light passes is a convex portion, and every other convex portion is used to make the electrodes independent.
Next, a common electrode (2-9) that is taken out to make the left electrode on both sides of the convex part a common electrode, and an individual electrode (2-8) that is taken out to make the right electrode an individual electrode Form.
The individual electrode (2-8) and the common electrode (2-9) are formed by lift-off, or a groove for the electrode is formed by dicing, and the upper and lower electrodes are formed when the electrode attached to the entire surface is removed by polishing. it can.
After forming the individual electrode (2-8) and the common electrode (2-9), a dielectric mirror (2-10) is formed on the back surface to form a Fabry-Perot etalon.
By applying a voltage to the common electrode (2-9) and the individual electrode (2-8), it is possible to independently and effectively apply an electric field to the PLZT convex portion.

By using a core expansion (TEC) fiber, the loss of the PLZT etalon variable wavelength filter can be reduced.
The thickness of the PLZT variable wavelength filter of this reference example is 30 μm to 50 μm and is so thin that it is not necessary to use a core expansion fiber. However, in the etalon type filter, the light entering inside is substantially reflected, so Is comparable to a thickness of 300 μm to 500 μm or more.
For this reason, when inserting an etalon, it is effective to use a core expansion fiber in order to reduce a loss.
Usually, when a groove is formed in a fiber, loss increases. Therefore, a groove is formed in the TEC fiber array. FIG. 4 shows the voltage dependence of the spectrum of the 16ch PLZT variable wavelength filter fabricated in this way.
By applying about 400 V, a wavelength shift of 10 nm is obtained, the loss is 3 dB, and the bandwidth is 0.1 nm. Further, the extinction ratio is as high as 34 dB, the speed is 1 μs or less, and a high-speed variable wavelength filter can be realized by the array. These characteristics are shown together in FIG.
In this reference example, the TEC fiber is fixed on the V-groove array substrate. However, the TEC fiber may be a □ groove instead of the V-groove, or a glass capillary array having an inner diameter corresponding to the outer diameter of the fiber. May be inserted and fixed.

[ Reference Example 2 ]
Next, the structure and manufacturing method of a PLZT polarization control element will be described as Reference Example 2 of the present invention.
The structure of the PLZT polarization control element of this reference example is shown in FIG.
Basically, it has the same structure as the PLZT variable wavelength filter shown in Reference Example 1 described above, but the polarization control element has no dielectric mirror, and the thickness of the PLZT starts from 300 μm in order to reduce the voltage. The difference is that it is as thick as about 1000 μm and a half-wave plate is also inserted.
FIG. 7 shows the relationship between the gap interval and the loss when the core diameter (MFD) of the TEC fiber is 20 μm, 30 μm, and 40 μm.
Since a normal fiber has a core diameter of 10 μm, if a groove of 30 μm or more is formed, the loss becomes 1 dB or more. For this reason, a core expansion fiber is used.
In the case of a fiber whose lower is expanded to 40 μm, even if a 1000 μm groove is formed, the loss is 1.5 dB, which indicates that the loss is very small.
Therefore, it is very effective to use the core expansion fiber, but until now, the core expansion fiber has only a single core, and the device to be inserted inside has only a single channel.
In this reference example , a structure and a manufacturing method of a PLZT polarization control element having a thickness of 300 μm to 1 mm inserted into a groove of a tape TEC fiber arranged at 250 μm are provided.

In FIG. 6, reference numeral 6-1 denotes a PLZT polarization control element which does not have the dielectric mirror of the PLZT etalon plate of Reference Example 1.
Reference numeral 6-2 denotes a half-wave plate. Here, a polyimide half-wave plate having a thickness of 15 μm is used.
6-3 is a TEC fiber array, 6-4 is a core expansion fiber substrate in which the core expansion fiber array is fixed to the V-groove array, 6-5 is two grooves formed in the core expansion fiber substrate, and 6-6 is for reinforcement. It is a block.
When a PLZT polarization control element + λ / 2 wavelength plate (λ / 2 wavelength plate with 22.5 degrees direction relative to the direction perpendicular to the bottom surface of the groove (6-5)) is arranged in a two-stage cascade. Arbitrary polarized waves can be converted into TE and TM polarized waves, and when a three-stage cascade is used, arbitrary polarized waves can be converted into arbitrary polarized waves. The speed is 1 μs or less, and polarization control is possible at a very high speed.
FIG. 8 shows voltage-phase characteristics of a PLZT convex modulator having a convex portion width of 80 μm and a thickness of 300 μm. 112V is a half-wave voltage. Furthermore, if the thickness of the convex portion is increased so as to be close to 1 mm, it can be driven at 50 V or less.
FIG. 9 shows the result of the response speed of the PLZT modulator. It can be seen that it can be driven in 1 μs or less.
Theoretically, in FIGS. 10 (a) and 10 (b), an arbitrary polarized wave can be obtained by arranging two stages of PLZT polarization control elements + λ / 2 wave plates (axis 22.5 ° direction) in series. The polarization castle that can be converted when incident is shown on the Poincare sphere. The whole castle cannot be covered, but it can be converted into horizontal polarization and vertical polarization. If another stage is added to form a three-stage cascade, any polarization can be converted to any polarization.

[ Reference Example 3 ]
In the reference example 2 described above, the method of manufacturing the polarization control element array in which the convex portion is sandwiched between the two electrodes has been described. However, the electrodes are attached to the top, bottom, left, and right, and the electric field at these central portions is rotated to change the variable rotation wavelength. It is possible to produce a plate.
However, there has been a report in the past that a single variable rotation wavelength plate is arranged on a glass plate.
A single variable rotation wave plate is a very useful device because it can convert any polarization into any polarization. (See Non-Patent Document 3)
Here, a manufacturing method of the variable rotation wavelength plate array will be described.
FIGS. 11A and 11B show the manufacturing process. In the figure, 10-1 is a PLZT rod having a square of about 500 μm, 10-2 is a groove formed on the four side surfaces of the square rod, 10-3 is an electrode in the groove, 10-4 is a PLZT plate, 10-5. Is a partitioning PLZT plate, 10-6 is a cutting surface for slicing the PLZT block, 10-7 is a slicing cut and polished, and 10-8 is an extraction electrode connected to four electrodes.

First, a 500 μm square PLZT rod (10-1) is prepared, and a groove (10-2) having a width of about 100 μm is formed by dicing on four side surfaces thereof, and an electrode interval is about 100 μm, that is, a voltage is applied. The groove is formed so that the area to be formed is about 100 μm □.
Next, in order to form the electrode (10-3) inside the groove (10-2), the electrode is formed on the entire side surface and the entire inner surface of the groove by sputtering, and the electrode attached to the side surface is polished, so that only the inside of the groove is formed. So that the electrode remains on the surface.
Next, these rods are arranged side by side with a partitioning PLZT plate (10-5), and further sandwiched and bonded from above and below with a PLZT substrate (10-4).
Next, slicing and cutting is performed to a thickness of several millimeters along the cut surface (10-6) shown in FIG. The thickness is desirably 300 μm to 1000 μm.
In order to take out the electrode (10-3), the take-out electrode (10-8) is taken out by lift-off processing.
Further, as shown in FIG. 11B, when the optical fiber is inserted into the fiber groove, it cannot be inserted if the lower substrate is long. Therefore, the lower excess portion is cut off and removed.

The four-electrode variable rotation wavelength plate array manufactured in this way is inserted into a groove formed in the TEC fiber array manufactured in Reference Example 1 .
By arranging the light passage part to be in the center of the four electrodes and applying voltages of ± V _o sin θ and ± V _o cos θ to the four electrodes, respectively, an electric field in an arbitrary direction can be applied to the light passage part, Since the rotation angle is reset-free, a variable rotation wavelength plate array with a fiber can be realized.
The variable rotation wavelength plate array is characterized by being capable of converting an arbitrary polarization into a desired polarization with a single element.
In a conventional polarization controller, at least three polarization control elements are required, but this element can be used for polarization control.
Grooves 1000μm is formed in the TEC fiber, by setting the thickness of the PLZT rotating waveplate of the present reference example about 950Myuemu, driving voltage can be as low as ± 40V, also the core diameter 30μm of By using the TEC fiber, the loss can be reduced to 2 dB, and these can be made into an array.

[ Reference Example 4 ]
Next, as Reference Example 4 of the present invention, FIG. 12 shows a structure for realizing a laser array module with a fiber array and a detector array module with a fiber array by coupling with a core expansion fiber array and a laser array or a detector array. I will explain.
In FIG. 12, 11-1 is a core expansion fiber array on one side obtained by cutting the core expansion fiber array produced in the example with a fiber cutter around the core expansion portion, and 11-2 schematically shows the tip of the fiber. It is a thing.
11-3 is a surface emitting laser array, 11-4 is a lens array, 11-5 is a waveguide type laser array, and 11-6 is a V-groove array substrate on which a core expansion fiber is mounted.
Here, 11-3 may be a planar detector array, and 11-5 may be a waveguide detector array.
When coupling a normal fiber and a surface emitting laser, they are connected by a butt joint that brings the fiber close to the light emitting part, but if a normal fiber is used, the core diameter is about 10 μm, so the alignment is very strict. is there.
Furthermore, in order to couple the surface emitting laser array and the fiber array, the pitch accuracy of the fiber array must be strictly 250 μm ± 1 μm, and labor is required for emergency coalignment.

When the core expansion fiber array manufactured in the example is manufactured accurately, the pitch is 250 μm ± 5 μm, and the expanded core is about 30 μm. Therefore, as shown in FIG. In the case of light emitted with a narrow irradiation angle such as 11-3), the light of the surface emitting laser array (11-3) can be directly coupled to the core expansion fiber array (11-1) with a butt joint. A surface emitting laser array module can be realized.
In addition, as shown in FIG. 12B, when the pitch of the core expansion fiber array (11-1) is not uniform, the pitch is fixed to the V groove array substrate (11-6) having a pitch of 250 μm ± 2 μm, A surface emitting laser array with a fiber array can be realized by coupling through a surface emitting laser array (11-3) and a lens array (11-4).
The pitch of the surface emitting laser array (11-3) and the waveguide laser array (11-5) is controlled with an accuracy of 2, 50 μm ± 1 μm, and is fixed to the V-groove array substrate (11-6). The core-enlarged fiber array (11-1) thus manufactured is also controlled and manufactured with a pitch of accuracy of 250 μm ± 2 μm.
Also when aligning both, since the core diameter of the fiber with the expanded core is as large as 30 μm, the alignment accuracy is as loose as ± 5 μm, and the alignment becomes very easy.
Therefore, a laser array with a fiber array and a detector array can be easily realized at low cost.
Moreover, as shown in FIG.12 (c), it is applicable similarly not only to a surface emitting laser array (11-3) but to a waveguide type laser array (11-5).
Although the invention made by the present inventor has been specifically described based on the above-described embodiment, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the invention. Of course.

It is a figure which shows the preparation process of the core expansion fiber array of the Example of this invention. It is a figure which shows the preparation process of the core expansion fiber array of the Example of this invention. It is a figure which shows the structure of the PLZT etalon plate array of the reference example 1 of this invention. It is a figure which shows the preparation process of the PLZT etalon plate array of the reference example 1 of this invention. It is a figure which shows the preparation process of the PLZT etalon plate array of the reference example 1 of this invention. It is a graph which shows the voltage dependence of the spectrum of the produced 16chPLZT variable wavelength filter. It is a graph which shows the wavelength shift characteristic of the produced PLZT etalon type | mold variable wavelength filter. It is a figure which shows the structure of the PLZT polarization control element of the reference example 2 of this invention. It is the graph which showed the relationship between a groove width and a loss by making the expansion core diameter of a core expansion fiber into a parameter. It is a graph which shows the voltage-phase characteristic of the PLZT convex modulator whose width | variety of a convex part is 80 micrometers and whose thickness is 300 micrometers. It is a graph which shows the response speed of a PLZT modulator. The Boincare sphere shows a polarization region that can be converted when an arbitrary polarized light is incident by placing two PLZT + 22.5 ° half-wave plates in series. The Boincare sphere shows a polarization region that can be converted when an arbitrary polarized light is incident by placing two PLZT + 22.5 ° half-wave plates in series. It is a figure which shows the preparation process of the variable rotation wavelength plate array of the reference example 3 of this invention. It is a figure which shows the preparation process of the variable rotation wavelength plate array of the reference example 3 of this invention. It is a figure which shows the laser array module with a phi array of the reference example 4 of this invention, and the detector array module with a fiber array.

Explanation of symbols

1-1 PLZT Substrate 1-2-1 Electrode 1-2-2 Electrode 1-3 Back Surface of PLZT Protrusion 1-4 Reinforcement Block 1-5 Core Expanded Fiber Substrate 1-6 Groove Formed by Dicing Saw 1-7 -1 Expanded core of core (TEC) fiber 1-7-2 Tape fiber part on both sides of expanded core (TEC) fiber 2-1 PLZT substrate 2-2 Groove formed by dicing saw 2-3 Electrode 2-4 Organic substance represented by resist 2-5 PLZT substrate 2-6 Adhesive for bonding two PLZTs 2-7 Cutting surface for slicing the PLZT block 2-8 Individual electrode to be taken out 2-9 Lower side Common electrode 2-10 Dielectric mirror 5-1 8-core tape fiber 5-2 Stripped bare fiber array section 5-3 Unraveled tape fiber and coated Part 5-4 Core expansion burner 5-5 Jig for temporarily fixing fiber 5-6 Fabric or paper soaked with adhesive for fiber concentrator 5-7 Glass plate for holding bare fiber array 5-8 V groove array Substrate 5-9 Grooves formed by dicing 5-10 Expand the core and re-align the TEC fiber array with a fiber cutter so that the gap between both fiber arrays from the left and right sides of the V-groove substrate is 1000 μm or less. Arrangement 6-1 PLZT polarization control element 6-2 1/2 wavelength plate 6-3 TEC fiber array 6-4 Core expansion fiber substrate 6-5 Two grooves formed on the core expansion fiber substrate 6-6 Reinforcement Block 10-1 PLZT rod of about 500 μm square 10-2 Grooves formed on the four side surfaces of the PLZT rod 10-3 Electrodes formed in the groove 10-4 PL T plate 10-5 partition PLZT plate 10-6 PLZT block cut face 10-7 slicing cutting slicing the polished ones 10-8 four out electrode was connected to the electrode 11-1 core expanded fiber array,
11-2 The tip of the core expansion fiber is schematically shown. 11-3 Surface emitting laser array 11-4 Lens array 11-5 Waveguide laser array 11-6 V-groove array substrate on which the core expansion fiber is mounted

Claims (2)

Not loosened at both ends of the fiber array the covering portion is bonded with each other, the step 1 to loosen the fibers of the central portion one by one by mechanical or chemical,
A step 2 of exposing the bare fiber array portion by mechanically or chemically stripping the coating of the center fiber loosened in the step 1;
Step 3 of removing the jig after arranging the bare fiber array portions exposed in the step 2 and sandwiching both ends with jigs, rolling with a burner to enlarge the core from 20 μm to 40 μm,
Step 4 of pulling both ends of the fiber array to arrange the bare fiber array portion so as to be evenly arranged;
A step 5 of sandwiching the fiber coatings that are loosened one by one in the step 1 by sandwiching the fibers with a cloth or paper impregnated with the fiber core assembly adhesive and dipping the adhesive. Manufacturing method of core expansion fiber array. Not loosened at both ends of the fiber array the covering portion is bonded with each other, the step 1 to loosen the fibers of the central portion one by one by mechanical or chemical,
A step 2 of exposing the bare fiber array portion by mechanically or chemically stripping the coating of the center fiber loosened in the step 1;
Step 3 of removing the jig after arranging the bare fiber array portions exposed in the step 2 and sandwiching both ends with jigs, rolling with a burner to enlarge the core from 20 μm to 40 μm,
Step 4 of pulling both ends of the fiber array to arrange the bare fiber array portion so as to be evenly arranged;
Step 5 of sandwiching the fiber core assembly with a cloth or paper impregnated with fiber core wire, immersing the adhesive, and laminating the fiber coatings loosened one by one in Step 1;
And a step 6 of cutting the fiber array at the core expansion center.

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