JP4139005B2 - Floor panel and floor using the same - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a floor panel and a floor using the floor panel, and more particularly to an aluminum die-cast floor panel used for a floor material in a clean room or a computer room.
[0002]
[Prior art]
The clean room is a room with a special environment that forms a production environment for semiconductors, precision electronic components, bio-related products, and the like. A clean room is required to have a nearly perfect dust-proof, grease-proof, and clean environment, and a floor structure that can maintain a high-level indoor environment even when a robot or a self-propelled vehicle runs on the floor.
[0003]
Conventionally, a clean room, for example, lays a floor panel on a plurality of support legs arranged on the floor of a building, forms a room to be a clean room on the floor surface side of the laid floor panel, It is constructed by forming a space that can be used as a ventilation passage in a clean room between the building floor.
In the clean room configured as described above, the air conditioned by the air conditioner is purified by a high performance filter such as a HEPA filter or a ULPA filter installed on the ceiling side of the clean room and then taken in. And the air discharged | emitted from the clean room is made into the circulating air which returns to a clean room, after being cleaned again by a high performance filter through the ventilation passage under a floor.
[0004]
In general, a floor panel made of aluminum die cast having excellent characteristics such as corrosion resistance and rust resistance is used.
As shown in FIGS. 12 and 13 , the floor panel 1 has, for example, a square shape of 600 × 600 mm or 500 × 500 mm, and is integrally formed so that the reinforcing rib 2 protrudes from the lower surface side of the floor panel substrate 1a. Is provided. The floor panel 1 has a large number of small holes for forming a clean room.
[0005]
As a clean room having a floor structure in which the floor panel 1 is laid, for example, one having a bay structure as shown in FIG. 14 is known.
A transport vehicle such as an automatic transport device travels on a path indicated by an arrow, and a wafer or the like is taken in or out at the installation position of the production apparatus 5.
Moreover, the production apparatus installed in the clean room is carried in via the conveyance path 6 shown in FIG. 15 , for example.
[0006]
On the other hand, a double floor structure is formed by laying the same floor panel in the computer room.
[0007]
[Problems to be solved by the invention]
Recently, the weight of production equipment installed on floor panels and automatic transfer equipment accompanying automation has increased.
[0008]
However, since such a conventional floor panel has a structure in which the floor panel is laid, for example, as shown in FIGS. 16 and 17 , the floor panel 1 is dotted when the production apparatus is carried in or the automatic conveyance apparatus is moved. As shown in Fig. 3, the manufacturing equipment cannot be kept horizontal by deforming or deforming, adversely affects the indoor environment, or destroys the floor panel 1 and requires improvement. Has been.
[0009]
These problems are pointed out in JP-A-7-94375, JP-A-6-1086, and the like.
However, in the solution disclosed in Japanese Patent Laid-Open No. 7-94375, there is a problem that the apparatus becomes large and there are problems in workability and economy.
In addition, in the conveyance cart disclosed in Japanese Utility Model Publication No. 6-1086, there is a problem in that existing floor panels cannot be used and there are problems in workability and economy.
[0010]
The present invention has been made to solve such conventional problems, and an object of the present invention is to provide a floor panel capable of reducing the amount of bending and deformation and increasing the breaking strength.
Another object of the present invention is to provide a floor capable of meeting large load bearing performance requirements.
[0011]
[Means for Solving the Problems]
According to the first aspect of the present invention, in the floor panel having the reinforcing rib on the lower surface side, the reinforcing rib is connected to the reinforcing rib by the metal thin plate by affixing a thin metal plate to the reinforcing rib in a single character. It is characterized by comprising.
According to a second aspect of the present invention, in the floor panel in which the reinforcing rib is provided on the lower surface side, the reinforcing rib is connected to the reinforcing rib by the metal thin plate by sticking a thin metal plate to the reinforcing rib in a cross shape. It is characterized by comprising.
[0012]
According to a third aspect of the present invention, in the floor panel provided with the reinforcing rib on the lower surface side, the reinforcing rib is connected to the reinforcing rib by the metal thin plate by sticking a metal thin plate to the reinforcing rib in a lattice shape. It is characterized by comprising.
According to a fourth aspect of the present invention, in the floor panel according to any one of the first to third aspects, the thin metal plate is a reinforcing rib on the outermost periphery of each of the opposing sides of the floor panel. It is characterized in that at least both ends are adhered to the outer wall surface of the adjacent reinforcing rib .
[0013]
According to a fifth aspect of the present invention, in the floor panel according to the fourth aspect, the metal thin plate is formed by bending at both ends abutting against the outer wall surface of the reinforcing rib adjacent to the outermost reinforcing rib. The two tongue pieces are attached to the outer wall surface of the reinforcing rib adjacent to the outermost reinforcing rib via an adhesive .
According to a sixth aspect of the present invention, in the floor panel according to any one of the first to third aspects, the metal thin plate is located outside the reinforcing rib parallel to the opposite side of the floor panel. It is characterized by sticking at least both ends to the wall surface .
[0014]
According to a seventh aspect of the present invention, in the floor panel according to the sixth aspect, the metal thin plate is formed by bending at both ends abutting against the outer wall surface of the reinforcing rib parallel to the opposite sides of the floor panel. The tongue pieces are attached to the outer wall surfaces of the reinforcing ribs parallel to the opposing sides of the floor panel via an adhesive .
The invention according to claim 8 is the floor panel according to claim 5 or 7, characterized in that the tongue piece has a cut portion straddling the reinforcing rib.
[0015]
The invention according to claim 9 is the floor panel according to claim 5 or claim 7 , wherein the height of the tongue piece is 1/3 of the height of the reinforcing rib to be attached via an adhesive. characterized in that there.
The invention according to claim 10 is characterized in that the floor panel according to any one of claims 1 to 9 is laid .
[0016]
According to an eleventh aspect of the present invention, in the floor formed by laying a floor panel provided with a reinforcing rib on the lower surface side, the reinforcing rib of each floor panel is a thin metal plate in a direction perpendicular to the traveling direction of the transport vehicle. Is affixed .
According to a twelfth aspect of the present invention, in the floor according to the eleventh aspect, the metal thin plate is attached to a reinforcing rib adjacent to the adjacent floor panel .
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described based on embodiments shown in the drawings.
[0019]
1 and 2 show a floor panel according to a first embodiment of the present invention (corresponding to claim 2 ).
In the present embodiment, the floor panel 10 is composed of a floor panel body 11 having the same shape as a conventional one and a metal thin plate 20 that connects the reinforcing ribs 12b.
The floor panel main body 11 has a square shape of, for example, 600 × 600 mm, and is integrally provided so that the reinforcing rib 12 protrudes from the lower surface side of the floor panel substrate 11a, similarly to the conventional aluminum die-cast floor panel. ing.
[0020]
The reinforcing rib 12 includes a rectangular reinforcing rib 12a having a width of about 7 mm formed on the outermost periphery, and a reinforcing rib 12b formed in a grid pattern inside the reinforcing rib 12a.
As shown in FIG. 2, the reinforcing rib 12b has four types of heights 12b1, 12b2, 12b3, 12b4, and 12b5. The reinforcing ribs 12a, 12b1, and 12b4 have the same height.
[0021]
The floor panel body 11 has a number of small holes for forming a clean room.
In the present embodiment, the reinforcing ribs 12b, 12b formed in a grid pattern on the inner side formed on the outermost periphery are connected via a thin metal plate 20.
As shown in FIGS. 3 and 4, the metal thin plate 20 includes a rectangular flat plate portion 21 and tongue pieces 22 and 22 formed by bending both end portions of the flat plate portion 21 in the same direction. And cutout portions 23 and 23 for straddling the reinforcing ribs 12b1 and 12b1 formed on the tongue pieces 22 and 22, respectively.
[0022]
The metal thin plate 20 has, for example, a tensile strength equivalent to that of an aluminum die cast floor panel, and includes a stainless plate, an iron plate, and the like. The thickness is about 1 to 3 mm.
In the present embodiment, the height of the reinforcing rib 12b1 is 40 mm, and the height of the tongue piece 22 is 13 mm. The height of the tongue piece 22 is preferably about 1/3 of the height of the reinforcing rib 12b1 in consideration of the adhesive force of the tongue piece 22 to the outer wall surface 12b1a of the reinforcing rib 12b1. Therefore, the height of the reinforcing rib 12b1 is 11 to 15 mm.
[0023]
Furthermore, it is desirable that the mounting position of the metal thin plate 20 be provided in a direction orthogonal to the traveling direction of the transport vehicle when used as a floor surface. In particular, as shown in FIG. 1, it is desirable to provide at a location near the outer peripheral portion of the floor panel main body 11.
The reason will be explained. The floor panel main body 11 has a strong structure by arranging the reinforcing ribs 12 in a grid pattern. Therefore, in the center part of the floor panel main body 11, the load applied to a floor surface is disperse | distributed equally, and it is comprised so that it may endure a predetermined load. However, in the outermost periphery of the floor panel main body 11, a sufficient area for dispersing the load cannot be secured, so that even when the same load is received, bending or deformation of about several millimeters occurs. In particular, aluminum has a smaller tensile load and Young's modulus, and is therefore more prominent than stainless steel or the like.
[0024]
In such a faulty floor panel, as shown in FIG. 1, the outer peripheral portion of the floor panel body 11 is in a direction (indicated by an arrow) orthogonal to the traveling direction of the transport vehicle when used as a floor surface. By providing the metal thin plate 20 at a location close to, the reinforcing rib 12 is reinforced from a T-shaped cross-section structure material to an I-type cross-section structure material to a rigid structure, and a location where bending or deformation is likely to occur is eliminated.
[0025]
In this embodiment, an adhesive (for example, a two-component acrylic adhesive) is applied to the inside of both tongue pieces 22 and 22 of a thin metal plate (a stainless steel plate having a width of 100 mm, a length of 520 mm, and a thickness of 13 mm) 20. After that, the outer ribs 12b1 are pressed against the outer wall surfaces 12b1a and 12b1a and cured. Thereby, for example, an adhesive strength of about 200 kg / cm ² can be obtained.
[0026]
According to the floor panel 10 configured as described above, even if the floor surface 13 is subjected to a load that causes bending or deformation in the conventional floor panel, the tongue piece 22 of the metal thin plate 20 and the reinforcing rib 12b1 are formed. The strength of the reinforcing rib 12 is changed from the T-shaped cross-section structure to the I-shaped cross-section structure by the adhesive force with the outer wall surfaces 12b1a and 12b1a, and the strength can be improved and a counter force can be applied. As a result, the conventional bending and deformation do not occur.
[0027]
Moreover, in this embodiment, since the metal thin plate 20 is stuck as a strength improvement material, a commercially available floor panel can be used as it is, and the sticking operation | work is easy. Of course, it is also possible to apply to the laid floor panel. Therefore, it becomes possible to cope easily at the site.
In addition, since the metal thin plate 20 to be attached is lightweight, the weight of the floor panel 10 is almost the same as that of the conventional floor panel and can be handled in the same manner as the conventional floor panel.
[0028]
FIG. 5 shows a floor 30 on which the floor panel 10 shown in FIGS. 1 and 2 is laid (corresponding to claims 10 , 11 and 12 ).
According to the floor 30 according to the present embodiment, each floor panel 10 bends or deforms even when a production apparatus installed in a clean room is carried in or when a heavy automatic conveyance apparatus is driven by automation. Therefore, there is no problem that the manufacturing apparatus cannot be kept horizontal or the indoor environment is adversely affected.
[0029]
In each of the above embodiments, the case where the metal thin plates 20 are installed at two locations has been described. However, one location may be added to the central portion, or one may be removed to provide one location.
Moreover, although the case where the metal thin plate 20 is disposed between the reinforcing ribs 12b1 and 12B1 has been described, the present invention is not limited thereto, and may be disposed between the reinforcing ribs 12b4 and 12b4, for example. Of course, it is also possible to arrange locally between the reinforcing ribs 12b1 to 12b1 (between the reinforcing ribs 12a to 12a).
[0030]
Further, the case where the metal thin plate 20 is provided with the two cut portions 23 in the tongue piece 22 has been described, but may be one cut portion 23 as shown in FIGS. Of course, three notches may be provided, or no notch may be provided.
Moreover, although the tongue piece 22 of the metal thin plate 20 is used as the bonding portion with the reinforcing rib 12, the present invention is not limited thereto, and an adhesive can be applied to all or a part of the contact portion with the reinforcing rib 12. is there.
[0031]
Further, although a two-component acrylic adhesive is used as the adhesive, other adhesives may be used in a clean room where chemical resistance and weather resistance need not be considered. Moreover, although the case where 600 * 600 mm was used as the floor panel 10 was demonstrated, 500 * 500 mm may be sufficient.
Further, the shape of the floor 30 is not particularly limited as long as it is configured by laying the floor panel 10, and is arbitrary.
[0032]
8 and 9 show a floor panel according to a second embodiment of the present invention (corresponding to claim 3 ).
The present embodiment is characterized in that the metal thin plate 20 is stuck in a cross shape. Other configurations are the same as those of the first embodiment shown in FIGS.
[0033]
In the floor panel 10A according to the present embodiment, when a load of 6000 N (612 kgs) was applied to the center of the surface, a deflection of 0.96 mm occurred. Moreover, it was 42,435N (4,330 kgs) when the destructive test was done.
On the other hand, in the conventional floor panel 1 in which the metal thin plate 20 shown in FIGS. 12 and 13 is not adhered, when a load of 6000 N (612 kgs) is applied to the center of the surface, a deflection of 1.29 mm occurs. Moreover, it was 23,479N (2,396kgs) when the destructive test was done.
[0034]
As described above, according to the present embodiment, it is possible to make the deformation and deformation extremely small as compared with the conventional floor panel. Moreover, the breaking strength was greatly improved.
The floor shown in FIG. 5 can also be configured by the floor panel 10A according to the present embodiment. Moreover, the same effect can be produced.
10 and 11 show a floor panel according to a third embodiment of the present invention (corresponding to claim 4 ).
[0035]
The present embodiment is characterized in that the metal thin plate 20 is stuck in a lattice shape. Other configurations are the same as those of the first embodiment shown in FIGS.
In the floor panel 10B according to the present embodiment, when a load of 6000 N (612 kgs) was applied to the center of the surface, a deflection of 0.78 mm occurred. Moreover, it was 48,705N (4,969kgs) when the destructive test was done.
[0036]
On the other hand, in the conventional floor panel 1 in which the metal thin plate 20 shown in FIGS. 12 and 13 is not adhered, when a load of 6000 N (612 kgs) is applied to the center of the surface, a deflection of 1.29 mm occurs. Moreover, it was 23,479N (2,396kgs) when the destructive test was done.
As described above, according to the present embodiment, it is possible to make the deformation and deformation extremely small as compared with the conventional floor panel. Moreover, the breaking strength was greatly improved.
[0037]
The floor panel 10B according to the present embodiment can also form the floor shown in FIG. Moreover, the same effect can be produced .
[0040]
【The invention's effect】
As described above, according to the floor panel according to the present invention, the reinforcing rib which is provided with strength resistance in the T-type structure is changed to the I-shaped shape by sticking a thin metal plate to the reinforcing rib. Therefore, the bending and deformation of the reinforcing rib can be greatly reduced as in the prior art.
[0041]
Further, according to the floor according to the present invention, since the floor surface is very little bent and deformed, the manufacturing apparatus is kept level even if the transport vehicle moves, and the indoor environment is not adversely affected.
[Brief description of the drawings]
FIG. 1 is a rear view showing a floor panel according to a first embodiment of the present invention.
FIG. 2 is a cross-sectional view of the floor panel shown in FIG.
3 is a perspective view of a metal thin plate used in FIG. 1. FIG.
4 is an end view of the thin metal plate shown in FIG. 1. FIG.
FIG. 5 is a side view of a floor using the floor panel shown in FIG. 1;
6 is a perspective view showing a modification of the metal thin plate used in FIG. 1. FIG.
7 is an end view of the thin metal plate shown in FIG. 6. FIG.
FIG. 8 is a rear view showing a floor panel according to a second embodiment of the present invention.
9 is a cross-sectional view of the floor panel shown in FIG.
FIG. 10 is a rear view showing a floor panel according to a third embodiment of the present invention.
11 is a cross-sectional view of the floor panel shown in FIG.
FIG. 12 is a rear view showing a conventional floor panel.
13 is a cross-sectional view of the floor panel shown in FIG.
FIG. 14 is an explanatory diagram showing a clean room for semiconductor manufacturing.
FIG. 15 is an explanatory diagram showing a clean room for semiconductor manufacturing.
FIG. 16 is an explanatory view showing a floor of a conventional clean room for semiconductor manufacturing.
17 is an explanatory diagram of the floor panel shown in FIG . 16. FIG.
[Explanation of symbols]
10, 10A, 10B Floor panel 11 Floor panel main body 11a Floor panel substrate 12, 12a, 12b, 12b1, 12b2, 12b3, 12b4, 12b5 Reinforcement rib 12b1a Outer wall surface 13 Floor surface
20 Metal thin plate 22 Tongue piece 23 Notch

Claims (12)

In floor panels with reinforcing ribs on the bottom side,
A floor panel comprising: a metal thin plate attached to the reinforcing rib in a single letter shape, and the reinforcing rib connected by the metal thin plate . In floor panels with reinforcing ribs on the bottom side,
Wherein by attaching a thin metal plate crosswise to the reinforcing ribs, floor panels, characterized in that formed by connecting the reinforcing rib in the metal sheet. In floor panels with reinforcing ribs on the bottom side,
A floor panel, wherein the reinforcing ribs are connected to each other by attaching the thin metal plates to the reinforcing ribs in a lattice shape . In the floor panel in any one of Claims 1 thru | or 3,
The metal thin plate is a floor characterized in that at least both ends are adhered to the outer wall surface of the reinforcing rib adjacent to the outermost reinforcing rib on each of the opposing sides of the floor panel among the reinforcing ribs. panel. The floor panel according to claim 4,
The metal thin plate has tongue pieces formed by bending abutting against the outer wall surfaces of the reinforcing ribs adjacent to the outermost reinforcing ribs at both ends, and both the tongue pieces are arranged on the outermost side through an adhesive. A floor panel, which is adhered to an outer wall surface of a reinforcing rib adjacent to an outer peripheral reinforcing rib . In the floor panel in any one of Claims 1 thru | or 3 ,
The metal thin plate is stuck to at least both ends on the outer wall surface of the reinforcing rib parallel to the opposite side of the floor panel among the reinforcing ribs . The floor panel according to claim 6 , wherein
The metal thin plate has tongue pieces formed by bending abutting against outer wall surfaces of reinforcing ribs parallel to opposite sides of the floor panel at both ends, and both tongue pieces are attached to the floor via an adhesive. A floor panel characterized in that it is attached to the outer wall surface of a reinforcing rib parallel to the opposite sides of the panel. In the floor panel according to claim 5 or claim 7,
The tongue piece has a cut portion straddling the reinforcing rib. In the floor panel according to claim 5 or 7 ,
The floor panel is characterized in that a height of the tongue piece is 1/3 of a height of a reinforcing rib to be attached via an adhesive . Floor, characterized by comprising laying the floor panels according to any one of claims 1 to 9. In the floor constructed by laying floor panels with reinforcing ribs on the bottom side,
A metal thin plate is attached to the reinforcing rib of each floor panel in a direction perpendicular to the traveling direction of the transport vehicle . The floor according to claim 11,
The metal thin plate is attached to a reinforcing rib adjacent to the adjacent floor panel .

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