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JP4149196B2 - Spring contact probe - Google Patents
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JP4149196B2 - Spring contact probe - Google Patents

Spring contact probe Download PDF

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Publication number
JP4149196B2
JP4149196B2 JP2002149049A JP2002149049A JP4149196B2 JP 4149196 B2 JP4149196 B2 JP 4149196B2 JP 2002149049 A JP2002149049 A JP 2002149049A JP 2002149049 A JP2002149049 A JP 2002149049A JP 4149196 B2 JP4149196 B2 JP 4149196B2
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JP
Japan
Prior art keywords
conductive tube
spring
plunger
peripheral wall
contact probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002149049A
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Japanese (ja)
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JP2003344450A (en
Inventor
聡 掛川
智之 山田
康夫 福島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokowo Co Ltd
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Yokowo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to JP2002149049A priority Critical patent/JP4149196B2/en
Publication of JP2003344450A publication Critical patent/JP2003344450A/en
Application granted granted Critical
Publication of JP4149196B2 publication Critical patent/JP4149196B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【0001】
【発明の属する技術分野】
本発明は、閉塞端側に透孔を設けて内周壁に導電薄膜のメッキを適正に施すことができる導電チューブ内に、透孔を介して塵埃等が侵入しないようにしたスプリングコンタクトプローブに関するものである。
【0002】
【従来の技術】
従来のスプリングコンタクトプローブの構造の一例を図3を参照して説明する。図3は、従来のスプリングコンタクトプローブの一例の縦断面図である。
【0003】
図3において、導電チューブ10は一端が閉塞され、他端が開口され、この開口部よりスプリング12とプランジャー14の太径部14aが挿入される。そして、開口部がカシメにより狭搾されて、プランジャー14は、軸方向に摺動自在でしかも太径部14aが抜け出ることなしに当接部14bが突出するように構成される。ここで、スプリング12は縮設され、プランジャー14を突出方向に弾性付勢している。なお、プランジャー14の当接部14bの先端と、導電チューブ10の閉塞端の先端は、被検査デバイスおよび基板の接続電極等に当接して確実に電気的導通が図れるように、一例として先端十字割(クラウン)型に構成されている。また、導電チューブ10の閉塞端側で、側壁と閉塞端の軸心上に、透孔16,18がそれぞれ穿設されている。
【0004】
ところで、導電チューブ10とプランジャー14の電気的導通は、導電チューブ10の内周壁にプランジャー14の太径部14aが摺接することにより図られている。そこで、この電気的導通における抵抗値を小さくする目的で、導電チューブ10内の内周壁とプランジャー14の外周壁に金メッキ等の導電薄膜のメッキが施される。この導電薄膜のメッキは、電解メッキまたは無電解メッキのいずれによりなされても良い。
【0005】
導電チューブ10は、一例として、内径0.4mmで長さ2.5mmと、長さに対してその内径が極めて細い。そこで、導電チューブ10の閉塞端側に透孔16,18を穿設することで、導電薄膜のメッキを施す際に、導電チューブ10内の閉塞端側の奥部までメッキ液が十分に侵入することができ、また奥部まで侵入したメッキ液を洗浄する洗浄液も十分に侵入することができ、導電チューブ10内の内周壁に導電薄膜のメッキを適正に施すことができる。もって、製造工程における歩留まりを良好なものとしている。
【0006】
【発明が解決しようとする課題】
しかるに、上記従来構造の導電チューブ10にあっては、閉塞端側に穿設された透孔16,18を介して、導電チューブ10内に塵埃などが侵入する虞がある。導電チューブ10内に侵入した塵埃は、内周壁に付着し、導電チューブ10とプランジャー14の接触抵抗を増加させるという不具合が生ずる。また、導電チューブ10の内周壁への塵埃の付着により、導電チューブ10に対するプランジャー14の摺動抵抗も増大し、動作不良を生ずる。さらに、導電チューブ10とプランジャー14の摺接部が摩耗し、この摩耗により接触抵抗が増加し、耐久性が損なわれる。
【0007】
本発明は、上述のごとき従来技術の事情に鑑みてなされたもので、透孔により内周壁に導電薄膜のメッキを歩留まり良く適正に施すことができる導電チューブ内で、プランジャーが配設される側に、透孔を介して塵埃などが侵入することのないスプリングコンタクトプローブを提供することを目的とする。
【0008】
【課題を解決するための手段】
かかる目的を達成するために、本発明のスプリングコンタクトプローブは、閉塞端側に透孔を設けて内周壁に導電薄膜のメッキを施した導電チューブ内に、プランジャーを軸方向に摺動自在でかつ当接部を突出させて抜け出ないように配設し、前記導電チューブ内にスプリングを前記プランジャーを突出方向に弾性付勢するように縮設し、前記プランジャーが前記導電チューブの内周壁に摺接して電気的導通を図るスプリングコンタクトプローブにおいて、前記導電チューブ内の前記閉塞端と前記スプリングの間に、前記導電チューブの内周壁に嵌合当接する閉塞部材を配設して、前記閉塞部材を前記スプリングで前記閉塞端側に弾性付勢し、前記閉塞部材により前記透孔と前記導電チューブ内の前記プランジャーが配設された側の連通を遮断するように構成されている。
【0009】
【発明の実施の形態】
以下、本発明の第1実施例を図1を参照して説明する。図1(a)は、本発明のスプリングコンタクトプローブの第1実施例の縦断面図であり、図1(b)は、カップ形状の閉塞部材の外観斜視図である。図1(a)において、図3と同じまたは均等な部材には同じ符号を付けて重複する説明を省略する。
【0010】
図1に示す本発明のスプリングコンタクトプローブの第1実施例において、図3に示す従来技術と相違するところは、導電チューブ10の閉塞端側に、内周壁に嵌合当接するとともにカップ形状の閉塞部材20が挿入配設された、ことにある。この閉塞部材20は、導電チューブ10の内周壁に密接し、透孔16,18側と導電チューブ10内閉塞部材20が配設された位置よりプランジャー14側の部分との連通を遮断し、透孔16,18を実質的に閉塞させる。この閉塞部材20は、スプリング12により常に閉塞端側に弾性偏寄され、位置ずれすることはない。しかも、閉塞部材20のカップ形状内にスプリング12の一端部が挿入され、スプリング12の一端部の位置が安定する。
【0011】
かかる構成において、閉塞端側に穿設した透孔16,18により導電チューブ10内にはメッキ液および洗浄液が十分に流れ、その内周壁に適正な導電薄膜のメッキが施される。そして、本発明のスプリングコンタクトプローブが組み立てられた後は、閉塞部材20により透孔16,18は実質的に閉塞され、透孔16,18を介して導電チューブ10内のプランジャー14が摺接する部分に塵埃等が侵入することがない。もって、塵埃等による接触抵抗の増大および摺動抵抗の増大、さらには耐久性が損なわれる等の不具合を生じない。この結果、透孔16,18を穿設したことによる不具合は生ずることがなく、導電薄膜のメッキを適正になし得るために接触抵抗が小さな値で安定する。
【0012】
図2は、本発明の第2実施例である。図2(a)は、本発明のスプリングコンタクトプローブの第2実施例の縦断面部分図であり、図2(b)は、円柱形状の閉塞部材の外観斜視図である。
【0013】
図2の第2実施例で、図1の第1実施例と相違するところは、導電チューブ10の閉塞端側に挿入されて、内周壁に嵌合当接して外形が円柱形状の閉塞部材22が配設されたことにある。この円柱形状の閉塞部材22により、透孔16,18側と導電チューブ10内の閉塞部材22よりプランジャー14側の部分との連通が遮断される。
【0014】
第2実施例の構造は、閉塞部材22の形状が極めて簡単であり、部品製造が導電チューブ10の内径が細くなっても比較的に容易である。そして、第1実施例と同様の作用効果が得られる。
【0015】
【発明の効果】
以上説明したように本発明のスプリングコンタクトプローブは構成されているので、以下のごとき格別な作用効果を奏する。
【0016】
請求項1記載のスプリングコンタクトプローブにあっては、導電チューブの閉塞端側の透孔により、導電チューブの内周壁に導電薄膜のメッキが適正になされる。そして、組み立て後は、導電チューブの内周壁に嵌合当接する閉塞部材により透孔と導電チューブ内のプランジャーが配設された側の連通が遮断されるので、透孔が実質的に閉塞され、透孔を介して導電チューブ内のプランジャーが配設された側に塵埃等が侵入する虞がなく、接触抵抗や摺動抵抗の増大および耐久性が損なわれる虞がない。この結果、接触抵抗特性等の安定したスプリングコンタクトプローブを提供し得る。
【0017】
請求項2記載のスプリングコンタクトプローブにあっては、閉塞部材をカップ形状とするので、閉塞部材を軽量に構成でき、またカップ内にスプリングの一端部を挿入することで、スプリングの一端部の位置が安定する。
【0018】
請求項3記載のスプリングコンタクトプローブにあっては、閉塞部材を円柱形状とするので、構造が簡単で部品製造が容易である。特に、導電チューブの内径が細くなるほど、製造の容易性が著しい。
【図面の簡単な説明】
【図1】 (a)は、本発明のスプリングコンタクトプローブの第1実施例の縦断面図であり、(b)は、カップ形状の閉塞部材の外観斜視図である。
【図2】 (a)は、本発明のスプリングコンタクトプローブの第2実施例の縦断面部分図であり、(b)は、円柱形状の閉塞部材の外観斜視図である。
【図3】 従来のスプリングコンタクトプローブの一例の縦断面図である。
【符号の説明】
10 導電チューブ
12 スプリング
14 プランジャー
14a 太径部
14b 当接部
16,18 透孔
20,22 閉塞部材
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a spring contact probe in which a through hole is provided on a closed end side and dust or the like does not enter through a through hole in a conductive tube in which a conductive thin film can be appropriately plated on an inner peripheral wall. It is.
[0002]
[Prior art]
An example of the structure of a conventional spring contact probe will be described with reference to FIG . FIG. 3 is a longitudinal sectional view of an example of a conventional spring contact probe.
[0003]
In FIG. 3 , one end of the conductive tube 10 is closed and the other end is opened, and the spring 12 and the large diameter portion 14 a of the plunger 14 are inserted from this opening. Then, the opening is squeezed by caulking, and the plunger 14 is configured to be slidable in the axial direction, and the contact portion 14b protrudes without the large diameter portion 14a coming out. Here, the spring 12 is contracted and elastically biases the plunger 14 in the protruding direction. The tip of the abutting portion 14b of the plunger 14 and the tip of the closed end of the conductive tube 10 are, for example, a tip so as to contact the device under test and the connection electrode of the substrate to ensure electrical conduction. It is configured in a cross shape. Further, on the closed end side of the conductive tube 10, through holes 16 and 18 are formed on the side walls and the axis of the closed end, respectively.
[0004]
Incidentally, the electrical continuity between the conductive tube 10 and the plunger 14 is achieved by the large diameter portion 14 a of the plunger 14 slidingly contacting the inner peripheral wall of the conductive tube 10. Therefore, for the purpose of reducing the resistance value in electrical conduction, the inner peripheral wall in the conductive tube 10 and the outer peripheral wall of the plunger 14 are plated with a conductive thin film such as gold plating. The conductive thin film may be plated by either electrolytic plating or electroless plating.
[0005]
As an example, the conductive tube 10 has an inner diameter of 0.4 mm and a length of 2.5 mm, and the inner diameter is extremely thin with respect to the length. Therefore, by providing the through holes 16 and 18 on the closed end side of the conductive tube 10, the plating solution sufficiently penetrates to the inner side of the closed end side in the conductive tube 10 when plating the conductive thin film. In addition, the cleaning solution for cleaning the plating solution that has penetrated to the back can also penetrate sufficiently, and the inner peripheral wall in the conductive tube 10 can be appropriately plated with the conductive thin film. Therefore, the yield in the manufacturing process is improved.
[0006]
[Problems to be solved by the invention]
However, in the conductive tube 10 having the above-described conventional structure, there is a possibility that dust or the like may enter the conductive tube 10 through the through holes 16 and 18 formed on the closed end side. The dust that has entered the conductive tube 10 adheres to the inner peripheral wall, causing a problem of increasing the contact resistance between the conductive tube 10 and the plunger 14. Further, due to the adhesion of dust to the inner peripheral wall of the conductive tube 10, the sliding resistance of the plunger 14 with respect to the conductive tube 10 also increases, resulting in malfunction. Further, the sliding contact portion between the conductive tube 10 and the plunger 14 is worn, and this wear increases the contact resistance and impairs the durability.
[0007]
The present invention has been made in view of the circumstances of the prior art as described above, and a plunger is disposed in a conductive tube that can be appropriately plated with a conductive thin film on the inner peripheral wall with a through hole. An object of the present invention is to provide a spring contact probe that does not allow dust or the like to enter the side through a through hole.
[0008]
[Means for Solving the Problems]
In order to achieve such an object, the spring contact probe of the present invention is capable of sliding the plunger in the axial direction in a conductive tube having a through hole on the closed end side and a conductive thin film plated on the inner peripheral wall. And a contact portion protruding so as not to come out, and a spring is contracted in the conductive tube so as to elastically urge the plunger in the protruding direction, and the plunger is an inner peripheral wall of the conductive tube. In the spring contact probe that slides in contact with the spring to make electrical conduction, a blocking member that fits and contacts the inner peripheral wall of the conductive tube is disposed between the closed end of the conductive tube and the spring, and the closed The member is elastically biased toward the closed end by the spring, and the closed member blocks communication between the side where the plunger is disposed in the through hole and the conductive tube. It is configured to.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a first embodiment of the present invention will be described with reference to FIG. 1A is a longitudinal sectional view of a first embodiment of the spring contact probe of the present invention, and FIG. 1B is an external perspective view of a cup-shaped closing member. In FIG. 1A , the same or equivalent members as in FIG.
[0010]
In a first embodiment of a spring contact probe of the present invention shown in FIG. 1, which differ in the prior art shown in FIG. 3, obstruction of cup-shaped with the closed end side of the conductive tube 10 is fitted abuts against the inner peripheral wall The member 20 is inserted and arranged. The closure member 20 is in close contact with the inner circumferential wall of the conductive tube 10, and cuts off the communication between the plunger 14 side of the section from the position where the closing member 20 is arranged in the through hole 16, 18 side and the conductive tube 10. The through holes 16 and 18 are substantially closed. The closing member 20 is always elastically biased toward the closing end by the spring 12 and is not displaced. In addition, one end of the spring 12 is inserted into the cup shape of the closing member 20, and the position of the one end of the spring 12 is stabilized.
[0011]
In such a configuration, the plating solution and the cleaning solution sufficiently flow into the conductive tube 10 through the through holes 16 and 18 formed on the closed end side, and an appropriate conductive thin film is plated on the inner peripheral wall. After the spring contact probe of the present invention is assembled, the through holes 16 and 18 are substantially closed by the closing member 20, and the plunger 14 in the conductive tube 10 is in sliding contact with the through holes 16 and 18. Dust and the like do not enter the part. Therefore, problems such as an increase in contact resistance and an increase in sliding resistance due to dust and the like, and further deterioration in durability are not caused. As a result, there is no problem due to the through holes 16 and 18 being formed, and the contact resistance is stabilized at a small value so that the conductive thin film can be appropriately plated.
[0012]
FIG. 2 shows a second embodiment of the present invention. FIG. 2A is a partial longitudinal sectional view of a second embodiment of the spring contact probe of the present invention, and FIG. 2B is an external perspective view of a cylindrical occlusion member.
[0013]
The second embodiment of FIG. 2 is different from the first embodiment of FIG. 1 in that it is inserted on the closed end side of the conductive tube 10 and is fitted and abutted on the inner peripheral wall to form a closed member 22 having a cylindrical shape. Is in the arrangement. The columnar blocking member 22 blocks communication between the through holes 16 and 18 and the portion closer to the plunger 14 than the blocking member 22 in the conductive tube 10.
[0014]
In the structure of the second embodiment, the shape of the closing member 22 is extremely simple, and the parts can be manufactured relatively easily even if the inner diameter of the conductive tube 10 is reduced. And the effect similar to 1st Example is obtained.
[0015]
【The invention's effect】
As described above, since the spring contact probe of the present invention is configured, the following advantageous effects can be obtained.
[0016]
In the spring contact probe according to claim 1, the conductive thin film is appropriately plated on the inner peripheral wall of the conductive tube by the through hole on the closed end side of the conductive tube. After assembly , the through-hole is substantially blocked since the communication between the through-hole and the plunger in the conductive tube is blocked by the closing member that fits and contacts the inner peripheral wall of the conductive tube. In addition, there is no possibility that dust or the like enters the side where the plunger in the conductive tube is disposed through the through hole, and there is no possibility that the contact resistance and the sliding resistance increase and the durability is not impaired. As a result, it is possible to provide a spring contact probe having stable contact resistance characteristics and the like.
[0017]
In the spring contact probe according to claim 2, since the closing member has a cup shape, the closing member can be configured to be lightweight, and by inserting one end of the spring into the cup, the position of one end of the spring can be determined. Is stable.
[0018]
In the spring contact probe according to the third aspect, since the closing member has a cylindrical shape, the structure is simple and the parts can be easily manufactured. In particular, the smaller the inner diameter of the conductive tube, the more prominent the manufacturing.
[Brief description of the drawings]
1A is a longitudinal sectional view of a first embodiment of a spring contact probe of the present invention, and FIG. 1B is an external perspective view of a cup-shaped closing member.
FIG. 2 (a) is a longitudinal sectional partial view of a second embodiment of the spring contact probe of the present invention, and FIG. 2 (b) is an external perspective view of a cylindrical blocking member.
FIG. 3 is a longitudinal sectional view of an example of a conventional spring contact probe.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Conductive tube 12 Spring 14 Plunger 14a Large diameter part 14b Contact part 16, 18 Through-hole 20, 22 Closure member

Claims (3)

閉塞端側に透孔を設けて内周壁に導電薄膜のメッキを施した導電チューブ内に、プランジャーを軸方向に摺動自在でかつ当接部を突出させて抜け出ないように配設し、前記導電チューブ内にスプリングを前記プランジャーを突出方向に弾性付勢するように縮設し、前記プランジャーが前記導電チューブの内周壁に摺接して電気的導通を図るスプリングコンタクトプローブにおいて、前記導電チューブ内の前記閉塞端と前記スプリングの間に、前記導電チューブの内周壁に嵌合当接する閉塞部材を配設して、前記閉塞部材を前記スプリングで前記閉塞端側に弾性付勢し、前記閉塞部材により前記透孔と前記導電チューブ内の前記プランジャーが配設された側の連通を遮断するように構成したことを特徴とするスプリングコンタクトプローブ。A plunger is slidable in the axial direction in a conductive tube provided with a through hole on the closed end side and plated with a conductive thin film on the inner peripheral wall, and arranged so that it does not come out by protruding the contact part, A spring contact probe in which a spring is contracted in the conductive tube so as to elastically urge the plunger in a protruding direction, and the plunger is slidably contacted with an inner peripheral wall of the conductive tube to make electrical conduction. Between the closed end in the tube and the spring, a closing member that fits and contacts the inner peripheral wall of the conductive tube is disposed, and the closing member is elastically biased toward the closed end by the spring, A spring contact probe configured to block communication between the through hole and the side of the conductive tube on which the plunger is disposed by a closing member . 請求項1記載のスプリングコンタクトプローブにおいて、前記閉塞部材を、前記導電チューブの内周壁に嵌合当接するとともに前記スプリングの一端部が挿入されるカップ形状に構成したことを特徴とするスプリングコンタクトプローブ。2. The spring contact probe according to claim 1, wherein the closing member is configured in a cup shape that fits and contacts the inner peripheral wall of the conductive tube and into which one end of the spring is inserted . 請求項1記載のスプリングコンタクトプローブにおいて、前記閉塞部材を、前記導電チューブの内周壁に嵌合当接する円柱形状に構成したことを特徴とするスプリングコンタクトプローブ。2. The spring contact probe according to claim 1, wherein the blocking member is formed in a cylindrical shape that fits and contacts the inner peripheral wall of the conductive tube.
JP2002149049A 2002-05-23 2002-05-23 Spring contact probe Expired - Fee Related JP4149196B2 (en)

Priority Applications (1)

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JP2002149049A JP4149196B2 (en) 2002-05-23 2002-05-23 Spring contact probe

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Publication number Priority date Publication date Assignee Title
JP4695337B2 (en) 2004-02-04 2011-06-08 日本発條株式会社 Conductive contact and conductive contact unit
JP2007316023A (en) * 2006-05-29 2007-12-06 Morihiro Shimano Contact probe
JP4857046B2 (en) * 2006-08-02 2012-01-18 株式会社エンプラス Electrical contact and socket for electrical parts
KR100836045B1 (en) * 2007-01-22 2008-06-09 리노공업주식회사 Inspection probe
JP5325085B2 (en) 2009-12-24 2013-10-23 日本碍子株式会社 Connection device
JP5568441B2 (en) * 2010-10-27 2014-08-06 日置電機株式会社 Power connection terminal
KR102002694B1 (en) * 2017-09-29 2019-07-23 주식회사 새한마이크로텍 Conductive contact and anisotropic conductive sheet with the same

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