JP4153492B2 - Measuring method in airtight inspection device for box with water vapor transfer control device - Google Patents

Description

  The present invention provides a box-shaped airtightness inspection apparatus equipped with a water vapor movement control device used as a humidifying device, a dehumidifying device, a humidity control device, etc. by controlling the moving direction of water vapor with a special film body and its arrangement. The present invention relates to a measurement method to be applied, and in particular, relates to a technique for finely adjusting an air supply device in advance for the purpose of reducing measurement errors.

The present applicant has already proposed a water vapor movement control device (see Japanese Patent Laid-Open No. 5-322060).
The present applicant has already proposed an airtight inspection device for confirming the airtight state of the box attached with the water vapor movement control device (see International Publication No. WO99 / 66300 pamphlet).
In this conventional water vapor movement control device, one vent is communicated with the inside of the box, the other vent is opened to the atmosphere, and a plurality of small chambers have air permeability and moisture permeability between the two vents. A compartment is formed by the film body.
Then, using the air permeability and moisture permeability of each film body, the movement of water vapor is controlled so that the inside of the box body is dehumidified or humidified or conditioned by the temperature fluctuation speed of the outside air and the box body. .
As described above, the water vapor movement control device is attached to the box, and the water vapor movement control device functions on the premise that the box is kept airtight.
As shown in FIG. 39, such an airtight inspection device for confirming the airtight state of the box body is a pressure buffering space 92 communicating with the inside of the box body 90 to which the water vapor movement control device 9 is attached via an air supply pipe 91. And an air supply device 93 for supplying gas at a constant pressure into the box 90 through the pressure buffering space 92, and a pressure measuring meter 94 for measuring the pressure in the pressure buffering space 92.
In use, after connecting the air supply pipe 91 to the box 90, the pressure from the air supply device 93 is injected into the box 90 at a constant pressure through the pressure buffering space 92 by the pressure adjusting valve 95, and this pressure buffering is performed. When the pressure in the space 92 is measured by the pressure meter 94 and the pressure meter 96, and the measured pressure value rises substantially equal to the pressure value before the gas injection, the airtightness of the box 90 is maintained. When the measured pressure value is largely different from the pressure value before the injection, the inspection method certifies that the airtightness of the box 90 is leaking.
In the airtightness inspection apparatus for the box body provided with the water vapor movement control device, it is desirable to apply as weak pressure as possible so as not to apply stress to the film body or the box body provided in the water vapor movement control device, In this respect, in the conventional airtightness inspection apparatus described above, in order to measure the pressure in the pressure buffering space 92 with the pressure measuring instrument 94 as it is, a high pressure must be applied. Since the pressure measuring instrument 94 and the pressure measuring instrument 96 that measure the pressure as it is are used, the measurement sensitivity is lowered, and there remains a problem that the accuracy of the inspection is lacking.
In addition, since the water vapor movement control device is attached to a box installed outdoors (for example, a steel tower), if there is damage to the box or poor airtightness of the door, rainwater may enter the box. May accumulate.
In such a state, when the airtightness inspection device is used, when the air supply tube is connected to the box, rainwater flows down the air supply tube and enters the inside of the device, leading to the failure of the airtightness inspection device. There will be problems in terms of safety such as electric shock accidents.
In addition, in such an airtightness inspection device, malfunctions may occur, such as inaccurate measurement due to artificial application errors or unavoidable unexpected abnormal pressures. Must be prevented as much as possible.
And in such an airtightness inspection device, pressure rise and change occur in the upstream air supply passage and the downstream air supply passage due to the air supply until the start of measurement, and the measurement is calculated from the pressure increase that occurs from the start of measurement. The time until the measurement time when it was possible was unstable. Possible causes are that the flexibility of the air pipe used inside the airtightness inspection device, the internal volume inside the airtightness inspection device, and the acoustic characteristics of the overall length of the airflow pipe and the material of the airflow pipe are affected. Conceivable.
As described above, countermeasures against acoustic vibrations generated in the airtightness inspection apparatus and differential pressure measurement errors caused by vibrations and interference of air in the pipelines are insufficient.
The present invention has been made to solve the conventional problems as described above, and by applying a weak pressure, it does not apply stress to the film body or the box body of the water vapor movement control device and is highly sensitive. In an airtightness inspection device that accurately inspects the airtight state of the box body and discovers airtight leaks caused by breakage of the box body or tearing of the film body, etc. It is an object to provide a measurement method capable of stabilizing pressure fluctuations due to resonance of air vibrations and reflected waves in accordance with the volume of the airtightness inspection to be adjusted from the measurement start time to the measurement target. .

In order to solve the above problems, the measurement method of the present invention (Claim 1)
One vent is communicated with the inside of the box that is the object to be inspected, the other vent is opened to the atmosphere, and a plurality of small chambers are defined by a film body having air permeability and moisture permeability between the two vents. An airtightness inspection device is connected to the box that is formed and has a water vapor movement control device that controls the movement of water vapor between both vents,
This airtightness inspection device is based on a pressure intake casing in which a pressure buffering space is formed, and an air supply device formed by connecting a diaphragm pump to an electric motor or an electromagnet with a tip connected to the pressure intake casing. An upstream air supply path having an end connected thereto, and a downstream air supply path in which a metal fitting for connection to the box body is provided at the tip, and a base end connected to the pressure intake casing, and the upstream air supply path A differential pressure gauge connected between the outward pressure intake path branched from the pressure intake casing and the return pressure intake path branched from the pressure intake casing,
The upstream air supply passage and the downstream air supply passage are connected to the pressure intake casing in a state of being arranged in a straight line, and the distal end of the upstream pipe portion of the upstream air supply passage has a downstream air supply. Passing through the pressure buffering space so as to open inside the base end of the passage and inserted into the base end of the downstream air supply passage, and the return side pressure intake passage includes the upstream air supply passage and the downstream side The air supply passage is branched so as to have an angle with respect to the straight line where the air supply passage is arranged, and is connected to the pressure intake casing, and the outward gas supplied from the air supply device is supplied downstream from the upstream air supply passage. Air is sent to the inside of the box through the path, and the return side gas reflected from the inside of the box is taken from the downstream side air supply path through the pressure buffering space to the differential pressure gauge from the return side pressure intake path. The pressure of the return-side gas taken into the differential pressure gauge from the return-side pressure intake path, and the differential pressure gauge from the forward-side pressure intake path Is formed so as to measure a differential pressure between the pressure of 往側 gas,
In the measurement preparation stage before the measurement by the differential pressure gauge, a measurement method in which the basic air supply speed and the air supply amount by the air supply device are finely adjusted,
By combining the program operation of the air supply device and the timer AND output of the contact information of the differential pressure gauge so as to obtain the differential pressure measurement as the measurement result at the time corresponding to the measurement with a low sound pressure change in the air passage. The pressure change of the air supply device so that the pressure display can be displayed as a measurement result with small accuracy error measured in the measurement section where the sound pressure change in the ventilation channel is low as a result of measuring in a specific time section Operation control (program operation) was made so that the amount followed the trapezoidal pressure increase process.
In the measurement method (Claim 1), the difference between the pressure of the return side gas taken into the differential pressure gauge from the return side pressure take-in path and the pressure of the forward side gas taken into the differential pressure gauge from the forward pressure take-in path As a result of measuring the pressure, if the pressure of the forward gas is greater than the pressure of the return gas, the differential pressure gauge will display the differential pressure, and it will be recognized that there is damage to the box or membrane and the airtightness is leaking. In addition, when the pressure of the outward gas and the pressure of the return gas are substantially the same, the differential pressure gauge does not display the differential pressure, so that the airtightness is maintained.
In the airtightness inspection device, even if it is determined that the airtightness of the box is leaking, the water vapor movement control device has the function as long as the leakage is less than the humidity control capability of the water vapor movement control device. It can be fulfilled and the leak is not immediately certified as bad.
Moreover, in the said invention (invention 1), there exists an aspect (invention 2) in which the water receiver is provided in the front-end | tip of the said downstream air supply path in order to receive the water which flowed down from the inside of a box.
In the present invention (invention 1 or 2), the return side pressure intake path is a pressure intake so as to branch at right angles to a straight line on which the upstream side air supply path and the downstream side air supply path are arranged. There is an aspect (Claim 3) connected to the insert casing.
Moreover, in the said invention (invention 1 or 2 or 3), there exists an aspect (invention 4) in which the air-drying means is provided in the intake side of the said air_supply apparatus.
Moreover, in the said invention (invention 1 or 2 or 3 or 4), there exists an aspect (invention 5) in which the pressure safety valve is provided in the ventilation path branched from the said upstream air supply path.
In the present invention (invention 5), the pressure safety valve has one end connected to the upstream air supply path and the other end vented to the valve chamber, and one end communicating with the atmosphere. And an exhaust passage having an exhaust port at the other end opened in the valve chamber is formed in the cylinder in the axial direction of the cylinder, and an iron-containing sphere as a valve body is accommodated in the valve chamber. However, the valve seat is normally held in close contact with the valve seat formed so as to surround the vent, and the communication between the vent passage and the exhaust passage is shut off. A pressure safety valve formed so as to communicate the air passage and the exhaust passage away from each other, and a magnet is used as a means for holding the iron-containing sphere in close contact with the valve seat. When the iron-containing sphere is in close contact with the valve seat, A magnetic force for adhering the iron-containing sphere to the valve seat and holding it closely is adjusted to an operation threshold required for the operation of the device to be used. There is a mode (Claim 6).
Therefore, in this pressure safety valve, the magnet is kept away from the iron-containing sphere and the valve seat, so that the surface of the iron-containing sphere is fouled by magnet powder or a magnetically attracted substance (iron powder, etc.) that may adhere to the magnet. It is possible to prevent the generation of magnet powder caused by the movement of the sphere.
Further, since the cutting powder generated by the wear of the magnet and the wear of the iron-containing sphere is adsorbed by the magnet, the airtightness between the valve seat and the iron-containing sphere is not hindered.
In addition, since the iron-containing sphere is in close contact with the valve seat using magnetic force, the valve operation can be performed at an extremely low pressure.
Further, the distance between the magnet and the iron-containing sphere is not in contact, that is, the distance is set so that the iron-containing sphere and the magnet are kept at a distance even when they are closest to each other. The adsorbing force on the valve seat does not decrease. That is, the iron-containing sphere, the valve seat, and the magnet are electrically insulated, and the iron-containing sphere has a small moving distance, so that the iron-containing sphere that is a temporary magnetic body is not easily magnetized. Adsorption power is stable and hardly changes over time.
In the above invention (invention 5 or 6), there is provided a separation adjusting means for adjusting the separation distance between the magnet, the iron-containing sphere, and the valve seat by moving the magnet in the axial direction of the cylinder. There is a mode (Claim 7).
Thus, by providing the separation adjusting means, the magnetic force for adsorbing and holding the iron-containing sphere in contact with the valve seat can be adjusted by adjusting the delicate distance relationship between the iron-containing sphere and the magnet, The valve operation can be performed at an extremely low pressure, and can be accurately adjusted to the operation threshold required for the operation of the device to be used.
Moreover, in the said invention (invention 5 or 6 or 7), there exists an aspect (invention 8) in which the spacer for adjusting the attachment position of the said magnet is provided.
Thus, if a spacer is provided, the attachment position of a magnet can be adjusted and the attraction | suction force with respect to the iron containing sphere by a magnet can be adjusted.
In the invention (any one of claims 5 to 8), a recess is formed on the inner surface of the exhaust port opened in the valve chamber for increasing the moving distance of the iron-containing sphere (invention 9). )
Thus, if the recessed part is formed, the adjustment range by the said space | interval adjustment means can be taken widely.
In the invention (any one of claims 5 to 9), in order to prevent the iron-containing sphere separated from the valve seat from blocking the exhaust port, a ventilation groove communicating with the exhaust path on the inner surface of the exhaust port There is a mode in which is formed (claim 10).
When the air flow is momentarily generated due to abnormal pressure and the iron-containing sphere is separated from the valve seat, the exhaust port may be blocked by the iron-containing sphere. If the exhaust port is closed in this way, abnormal pressure cannot be released, causing trouble on the device side.
Therefore, by providing the ventilation groove, even if the exhaust port is blocked by the iron-containing sphere, abnormal pressure can be released to the exhaust path through the ventilation groove.
If the surface of the iron-containing sphere is anticorrosive (for example, Teflon or nickel-cobalt plating), the iron-containing sphere can be prevented from rusting or fouling, and accompanying the movement of the iron-containing sphere. The production of magnet powder can be prevented.
In this case, a material having a surface-immobilized anticorrosion layer such as a bearing ball made of a low-quality stainless steel ball is preferable as the iron-containing sphere.
The iron-containing sphere is a temporary magnet that also changes to a magnetic body, and is a soft (soft) magnetic material.
Also, by attaching a packing made of fluorinated rubber to the valve seat, air tightness between the iron-containing sphere and the valve seat can be secured, and the effect of reducing contact resistance between the valve seat and the iron-containing sphere and preventing deterioration due to oil resistance, etc. Can be obtained, and the valve structure can be operated precisely.
Moreover, in the said invention (any one of Claims 1-10), there exists an aspect (invention 11) in which the upstream air supply path and the downstream air supply path are formed with the high heat resistant vinyl chloride tube.

FIG. 1 is an overall schematic view showing an embodiment of an airtightness inspection apparatus.
FIG. 2 is a cross-sectional view of the pressure intake casing portion provided in the airtightness inspection apparatus.
FIG. 3 is a cross-sectional view of a water receiver provided in the airtightness inspection apparatus.
FIG. 4 is a sectional view showing a pressure safety valve provided in the airtightness inspection apparatus.
FIG. 5 is a cross-sectional view showing a state of separation and adhesion between the iron-containing sphere and the valve seat in the pressure safety valve.
FIG. 6 is a cross-sectional view showing the state of separation and adhesion between the iron-containing sphere and the valve seat in the pressure safety valve.
FIG. 7 is a cross-sectional view showing the state of separation and adhesion between the iron-containing sphere and the valve seat in the pressure safety valve.
FIG. 8 is a cross-sectional view showing an example of a structure for attaching the packing to the valve seat in the pressure safety valve.
FIG. 9 is a cross-sectional view showing an example of a structure for attaching the packing to the valve seat in the pressure safety valve.
FIG. 10 is a perspective view showing a ventilation groove formed in the valve chamber of the pressure safety valve.
FIG. 11 is a sectional view showing a pressure safety valve of the second embodiment.
FIG. 12 is a sectional view showing a pressure safety valve of the third embodiment.
FIG. 13 is an explanatory view showing a locking device for positioning the pressure safety valve provided in the airtightness inspection device at the vertical position.
FIG. 14 is an explanatory diagram of an operation unit provided in the airtightness inspection apparatus.
FIG. 15 is an explanatory view showing a state where the pendulum of the tilt switch provided in the airtightness inspection apparatus is bent and deformed.
FIG. 16 is an explanatory view showing a lock device for locking the pendulum of the tilt switch provided in the airtightness inspection device.
FIG. 17 is a block diagram showing a control circuit of electric parts of the airtightness inspection apparatus.
FIG. 18 is a flowchart showing the procedure of the measurement method of the present invention.
FIG. 19 is a graph showing the result of the limit pressure test of the pressure safety valve using the low water pressure test apparatus.
FIG. 20 is a diagram showing daily changes in pressure applied to the box.
FIG. 21 shows the ideal pressure rise process of a box body in which each airtightness is confirmed when the vertical axis indicates pressure change and the horizontal axis indicates time, and the vibration of duct air in the box body in which each airtightness is confirmed. It is a figure which shows the change of the supplied air supply speed and the air supply amount.
FIG. 22 is a diagram showing a waveform with the vertical axis representing voltage change and the horizontal axis representing time.
FIG. 23 is a diagram showing the time change of the rotational speed of the driven motor when the vertical axis represents the motor speed change amount and the horizontal axis represents time.
FIG. 24 is a diagram showing the difference between the feed side air amount and the return side air amount when the reflected wave corresponds to the reverse rotation when the vertical axis represents the air amount change amount and the horizontal axis represents time.
FIG. 25 is a schematic diagram assuming changes in the pipe cross-sectional area when air vibration (sound) of a specific frequency propagates through the pipe.
In FIG. 26, when the vertical axis represents the amount of attenuation change and the horizontal axis represents the frequency, air vibration (sound) having a specific frequency propagates through the tube, so that the cross section changes, resonators, pores leading to the outside, etc. It is a figure which shows propagation of a specific frequency when the acoustic impedance change of this arises.
FIG. 27 is a schematic diagram assuming a pipeline through which air vibration (sound) of a specific frequency propagates.
FIG. 28 is a diagram showing the progress of pressure increase of a trapezoid in which the air supply device is operated by a program when the vertical axis indicates the pressure change amount and the horizontal axis indicates time.
FIG. 29 is a diagram showing a differential pressure obtained from a result of an example of a trapezoidal pressure increase process when the air supply device is programmed with the vertical axis representing the differential pressure change time integrated value and the horizontal axis representing time. .
FIG. 30 is a diagram showing an example of a trapezoidal stepwise pressure increasing process in the case where the air supply device is operated by a program when the vertical axis represents the pressure change amount and the horizontal axis represents time.
FIG. 31 is a diagram showing a differential pressure obtained as a result of an example of a trapezoidal step-by-step increase in pressure when the air supply device is programmed with the vertical axis representing the differential pressure change time integrated value and the horizontal axis representing time. It is.
FIG. 32 is a diagram showing the progress of pressure increase by a conventional method when the vertical axis represents the pressure change amount and the horizontal axis represents time.
FIG. 33 is a diagram showing the differential pressure obtained as a result of the progress of pressure increase according to the conventional method when the vertical axis represents the differential pressure change amount time integral value and the horizontal axis represents time.
FIG. 34 is a method of simply boosting when the vertical axis is the pressure change amount and the horizontal axis is the time. Examples of the boosting progress when uniquely increasing are shown in (3-1) to (3-8). It is the figure shown as a pattern.
FIG. 35 is a diagram showing a differential pressure obtained as a result of a boosting process when the pressure is uniquely increased by a method of simply boosting with the time axis representing the differential pressure change amount integrated time and the horizontal axis representing time. .
FIG. 36 is a diagram showing the progress of pressure increase when the pressure is increased uniquely by a method of simply boosting the pressure on the vertical axis and time on the horizontal axis.
FIG. 37 is a diagram showing a differential pressure obtained as a result of a pressure increase process when the pressure is uniquely increased by a method of simply boosting with the time axis representing the differential pressure change time integrated value on the vertical axis and time on the horizontal axis. .
FIG. 38 is a diagram showing the differential pressure obtained as a result of phase adjustment that causes an error when the vertical axis represents the differential pressure change amount time integral value and the horizontal axis represents time.
FIG. 39 is a view showing a conventional airtightness inspection apparatus.

α：減衰定数
ｃ：音速 ［ｍ］
Ｒ：菅の半径
ｆ：音源を振動させる力
このとき管の長さをＬとすると一端が閉じられているときはＵ_２＝０として、式２で表される。

ｐ：音圧
ρ：密度
ｊ：複素数
ｋ：係数
Ｕ：体積速度
ｃ：音速
図２５のＳ_２の右端が閉であってこれをＵ_２、左端をＵ_１とする二つの管路の平均から求められる管路直径を有する直管の同一の直径の管路を図２７のように想定する。ｐ_１、ｐ_２はそれぞれの断面部の圧力である。Ｕ_２が終端のとき、Ｕ_２＝０であるから、式３のようになる。

この式３から、体積速度に対して、音圧は反比例することがわかる。
そこで、本装置の差圧センサーによる最も感度の高い使用する管の空気振動特性（音響特性）から、本測定装置の管の全長から求めた略計算結果と、実測結果より前述のＧｎ点の音圧起始点から差圧センサーまでの距離が求められ、音圧源である送気ポンプの駆動を変化させることにより、収束点Ｇｎの位置が差圧センサーに一致させるようにすることができ、この結果誤差を低減することができる。この方法はアクティブフィルタの方法を駆動源のポンプ駆動に置き換えた方法である。
また、この容積の置換方法では、空気振動に置換して振動特性を評価する場合には、管路材質の振動特性評価に関する基本的な事前測定を行い、周波数特性を略振動特性の評価に参考資料として用いる。この場合、振動周期の予測計算に最も悪作用する要素は、弾性の高い管路である。そこで、本実施例では、使用する管路の弾性による予測計算の反映にたいする悪作用を予防するために、温度による熱軟化や硬化などの弾性の温度依存による性質変化が低い、高耐熱性塩化ビニールチューブ（−５０℃〜＋５０℃）などを使用するのが好ましい。
また、昇圧の手段としては、昇圧のレベルが音圧に比例して発生しやすいので、次第に図２１の曲線Ｐ_２のように変化する。音圧変化として図２８のように台形状の昇圧経過をとるように送気装置をプログラム運転（運転制御）し、音圧変化が低い水平状態の区間同士、例えば区間Ｔａ〜Ｔｂで、差圧測定をおこなうことが望ましい。また、前述の特定の振動波の減衰部であるＧｎは、図２８のＴａ〜Ｔｂの区間に複数点存在する。したがって、このＧｎで測定すれば、音圧の波高長分の誤差を低減することができる。
図２８のようにポンプ駆動をプログラム運転する場合には、図２９のように、送り波形と戻り波形の総変化量は区間Ｔａ〜Ｔｂでは一定量を示し、この区間では差圧計の変動量も抑制される。そこで、この結果、昇圧状況を示す図２１のＰ_２の上方の修正曲線の結果が得られることになる。
図２９に用いた横軸のしきい値は、差圧積分、即ち、｜送り圧力の時間積分｜−｜戻り圧力の時間積分｜である。そこで、それぞれの時間積分に使用した時間をしきい値とおく。これは時間と同様に考えてよいが、差圧の時間積分に対して比較し易いようにしきい値として示した。
同様に、図３０のようにプログラム運転した場合、送り波形は、上方に示した二つの定常部を有する曲線として、戻り波形はこの定常部の平坦部が消失した場合を示す下方の曲線の場合を考える。この場合でも、図３１に示すように、差圧計のしきい値が変動した場合には、区間Ｔａ〜Ｔｂが一定値を示すので、この区間で測定すれば差圧測定は空気振動に影響を受けにくい。
しかし、図３２に示すような従来の昇圧方法では、昇圧時間を単純に短縮するために、送気装置の運転速度を速くする場合には、図３３のように差圧結果の誤差が拡大してしまうので、時間経過に伴って差圧測定結果が変動して、正確な測定結果を得にくい。
また単純に昇圧する方法を、駆動方法を一定時間のＯＮとＯＦＦによるのみの方法による昇圧結果を示す図を図３４の（３−１）と（３−２）に示し、その差圧結果を図３５の（３−１）−（３−５）と（３−２）−（３−６）として示した。また図３の（３−３）や（３−４）のような昇圧結果は、図３５の（３−３）−（３−７）や（３−４）−（３−８）のような差圧結果となり、同様に時間経過に伴って、ある特定の時間を指定しても、測定区間で一定の差圧結果を得にくい。図３６のように単純に昇圧方法を１形式で増加させた場合で、昇圧過程が一定な変化を辿る区間において差圧を測定しても、図３７の差圧結果のように、同様に時間経過に伴って、ある特定の時間を指定しても、測定区間で一定の差圧結果を得にくい。
そこで、図２８のように台形の昇圧経過を辿るように送気装置をプログラム運転し、通気路内の音圧変化が低い測定区間Ｔａ〜Ｔｂに相当する時間に測定結果として差圧測定結果を得るように、送気装置のプログラム運転と差圧計の接点情報のタイマーＡＮＤ出力の組み合わせによって差圧表示が特定の時間区間により測定された結果を示す図２９に示した区間Ｔａ〜Ｔｂに測定された正確な誤差が小さい測定結果として表示することができる。
また、電源の回路や電池の電圧変化特性を考慮して、消費時間が最も小さくなるように、図３０のように台形状に段階的に昇圧するようにプログラム運転を行い、最も効率よい気密性試験を行う各容積差に適した昇圧運転や減圧運転を行うようにしてもよい。この結果を図３１に示す。
また、これらの結果を昇圧経過で実際の昇圧量と見かけ上で差圧センサにて検出することができる昇圧量との誤差を図３８に示す。アクティブな空気振動に対する修正が理想的に行えた場合には、図３８に示すように、差圧センサーによって検出することができる誤差量は測定開始から全域で確保することができることになる。
しかし、昇圧には温度や湿度の変化が著しい屋外環境を想定する場合には、図３８の上部頂点近くの時刻まで待ち、厳密な気密検査結果とすることが好ましいが、前述の方法では、より短い全測定時間間隔で、気密想定としての結果を示すために必要な方法である。
測定前の測定準備の段階で基本的な送気速度と送気量を事前に微調整する。この調整は気密性接続管路１８を接続しない状態で、０点調整を行うに必要な最小送気量と送気速度の状態で、測定装置自体の内部の管路特性によって決定される、駆動源のモータまたは電磁石の駆動変調リズムの微調整である。この０点調整によって、差圧計に表示される数値が、本気密性測定装置の誤差となる。またこの後の、気密性検査を行う箱体にいたる経路１８や水蒸気移動制御装置の設定された箱体の空気振動特性などを考慮するために必要な、基礎的な、測定開始時の起点が決定される。
ついで、測定対象となる気密性検査を行う箱体の容積に伴って、全測定時間の短縮を目的として行われる送気装置の送気速度と送気量の調整は、図１４のロータリスイッチ２０７の選択によって、調整方式の各選択プログラムがＲＯＭから呼び出される。このロータリスイッチ２０７の選択によって、最も気密性検査を行うために必要な時間短縮を行うことができ、送気量または送気速度を考慮した、測定経路の往復路内で生じる圧力上昇の変化を最小限に抑制する駆動源の運転のためのプログラムがＲＯＭから呼び出される。
本装置では、少なくとも２枚の透湿可能な防水膜から構成された１小室からなる、水蒸気移動制御装置が装着された箱の気密検査を行うことが主な目的である。
しかし、その他の応用事例としては、医科用機材の機密検査などにも用いることができ、与圧量が小さく、かつ気密シールに対して負担が小さな簡易的な気密検査を行うことができる。また。本装置が例えば、重篤な感染症の汚染地域で使用された場合や危険地域で使用された場合などにおいて、装置のメンテナンスを完全に行うためには消毒が必要である。特に本装置では、装置内を通過する空気の水蒸気濃度を低濃度に保つために使用するシリカゲルケーシング５や通気管路内の汚染対策が必要である。シリカゲルケーシング５にあっては、多孔性の吸着体や、吸着性の高い物質を収容するので、外気の異物の濃縮も考えられる。
また、シリカゲルケーシング５は着脱可能であり、廃棄可能である。しかし、使用後はケーシング５を収容するソケットや、その他、圧力安全弁Ｖ１や通気管路内、ディアフラグムポンプ４３内部、圧力取込みケーシング１内、逆止弁１７や、水受け器２内部や外部などは汚染されることが考えられる。さらに、本体ケーシング５７内も汚染される可能性が考えられる。
一般的に、熱可塑性物質に対する消毒方法として、エチレンオキサイドガス滅菌法が用いられている方法を、本装置で使用可能にする工夫を必要とする。エチレンオキサイドガス滅菌方法では、通常、エチレンオキサイドガスとともに被滅菌物を、遮蔽した熱シール袋に収容し、２７℃では芽胞形成菌も対象に含めて１６時間以上、それ以下の常温では２４時間以上そのままの状態に保存することによって、滅菌を完全に成立するものとされている。このほか、滅菌条件に影響する要素として、被滅菌物の材料や寸法やシール袋内へのつめこみ具合などがあることが知られている（歯科臨床における感染防止対策 １９８３年、昭和５８年１０月２５日第１版第２刷発行 医師薬出版株式会社 園山昇、長田保、小倉保巳 編集、Ｐ．９５〜９６）。そこで、本体ケーシング５７に少なくとも２ヶ所の可撤性の通気孔を設け、エチレンオキサイドガス滅菌法を行うにあたって、ケーシング５７内にエチレンオキサイドガスの拡散を促進するようにしてもよい。また、管路内の消毒は、ポンプ４３を駆動状態におかなければならないので、電源線を滅菌用の熱シールのパッケージから導出して、テーピングによりエチレンオキサイドガスが漏出しないように、緊密なシールを行い、熱シールのパッケージ内に充填された熱シールのエチレンオキサイドガスで満たされたパッケージ内で、本気密検査装置を間欠的に駆動して、管路内や複雑な構造物内部に至る消毒や滅菌を完了する。この装置内部の消毒や滅菌に適した駆動スイッチやプログラム、例えば、駆動速度を変更できるようにしたプログラムなどを設定してもよい。このとき、特に通気抵抗となるシリカゲルケーシングを外した場合に変化する通気抵抗の減少を考慮して、装置内部の管路などの通気路の滅菌消毒効果が得られやすい至適湿度といわれている３０〜５０％ＲＨになりやすいように、滅菌消毒用のパッケージ内の滅菌消毒操作下の通気量を消毒滅菌操作を最適化するためのプログラム運転を行うようにしてもよい。Embodiments of the present invention will be described below with reference to the examples shown in the drawings.
FIG. 1 is an overall view showing an embodiment of an airtightness inspection device, FIG. 2 is a cross-sectional view of a pressure intake casing portion provided in the airtightness inspection device, and FIG. 3 is a cross-sectional view of a water receiver provided in the airtightness inspection device. .
The airtightness inspection apparatus A according to the present embodiment is for inspecting the airtight state inside the box body K provided with the water vapor movement control device S. By applying a weak pressure, the film body of the water vapor movement control device S is used. Inspect the airtight state of the box K with high sensitivity and high accuracy without applying stress to the M and the box K, and find airtight leaks caused by damage to the box K and film M It is something that can be done.
As the box body K, for example, a power supply cubicle, a control box, a switch box installed on a steel tower or a roof of a building, a distribution box, a box having a certain closed circuit formed therein, etc. Assumed.
The water vapor movement control device S has three film bodies M. ₁ , M ₂ , M ₃ Two chambers R and R are defined between the vents N and N by controlling the movement of water vapor between the vents N and N. It has become a thing. That is, it is used with one vent N opened to the outside air and the other vent N connected to the inside of the box K. ₁ , M ₂ , M ₃ The movement of water vapor is controlled so that the inside of the box K is dehumidified or humidified (humidified) by the temperature fluctuation speed of the outside air and the box K using the air permeability and the slope of the moisture permeability.
The water vapor movement control device S includes a type that uses only ambient temperature fluctuations as a driving source, and a device that operates with minute electric power in addition to ambient temperature fluctuations (for example, a Peltier element addition type, a built-in driving fan type, There is a type using a built-in heater type or a vibration pressure applying type) as a drive source alone or in combination, and both types can be applied.
In the latter type, water vapor in the direction opposite to its intended function is utilized while utilizing temperature fluctuations so that water vapor does not diffuse from the inside of the device and a dehumidification phenomenon in the closed space that is the subject of humidity control does not occur. It is effective in preventing movement.
Moreover, the attachment position with respect to the box K of this water vapor | steam movement control apparatus S may be any of the upper surface lower surface and side surface of the box K, and determines suitably according to a condition.
Next, the configuration of the airtightness inspection apparatus A will be described.
1 and 2, reference numeral 1 denotes a pressure intake casing, which is formed in a cylindrical casing having a pressure buffering space 10 formed therein by a transparent synthetic resin.
In the pressure intake casing 1, a lower end connection port 11 is formed at the center of the lower end surface and an upper end connection port 12 is formed at the center of the upper end surface so as to be disposed on the center line C (straight line). .
A side connection port 13 is formed on the side surface, and the side connection port 13 is formed at a position having a height T higher than the bottom surface of the pressure buffering space 10.
Reference numeral 14 denotes a drain port, to which a drain line 16 having an on-off valve 15 is attached, and a check valve 17 is attached to the tip of the drain line 16.
This check valve 17 is provided to prevent the backflow of drainage due to the start of the diaphragm pump 43 described later, and to prevent the backflow of drainage due to the temperature change of the airtightness inspection apparatus A. The check valve 17 is provided. Thus, the drainage flows only in one direction, and the backflow of the drainage can be prevented.
A base end of a downstream air supply path 18 by a flexible hose is detachably connected to the upper end connection port 12 of the pressure intake casing 1 via a connector 19. A water receiver 2 for receiving water flowing down from the inside of the box K is provided.
The upper end connection port 12 is normally kept in a sealed state and can also be used for an airtight inspection. When the connector 19 is attached to the upper end connection port 12, the upper end connection port 12 is opened and the downstream side air supply path 18 is in a communication state.
As a pre-stage of the airtightness inspection, the upper end connection port 12 is sealed, the on-off valve 15 is opened, and the airtightness inspection device A is operated in this state, thereby drying the inside of each piping system and the differential pressure gauge 54. , Moisture inside can be removed.
As shown in FIG. 3, the water receiver 2 has an upper end cap 22 attached to the upper end of a cylindrical body 20 formed of a transparent synthetic resin via an upper connection cylinder 21, and the lower end of the cylindrical body 20 on the lower side. A lower end cap 24 is attached via a connecting cylinder 23, a connection plug 25 is projected from the upper end cap 22, and the tip of the downstream air supply path 18 is connected to the lower end cap 24.
The connection plug 25 is formed so as to be detachable with a single touch on a socket 26 attached to the bottom surface of the box body K. The socket 26 is normally closed in a sealed state by a valve body 27, and the connection plug 25 is connected to the socket. 26, the valve body 27 is released, and the inside of the box body K and the inside of the cylindrical body 20 communicate with each other.
An opening 28 is formed in the side surface of the lower connecting cylinder 23, and a cover cylinder 29 for opening and closing the opening 28 is fitted on the outer periphery of the lower connecting cylinder 23 so as to be slidable in the vertical direction. The cover cylinder 29 is normally lowered and closes the opening 28, and when the water received inside the cylindrical body 20 is discharged, the cover cylinder 29 is raised to release the opening 28.
The lower end cap 24 is provided with an extension pipe 30 extending upward in the cylindrical body 20, and a communication port 31 formed in the upper end portion of the extension pipe 30 is opened inside the cylindrical body 20. A waterproof cover 32 is attached to the upper end of the extension pipe 30 so as to cover the communication port 31.
Therefore, when the connection plug 25 is fitted into the socket 26, the inside of the box body K and the inside of the cylindrical body 20 communicate with each other, and the inside of the cylindrical body 20 and the extension pipe 30 communicate with each other via the communication port 31. In addition, since the extension pipe 30 and the downstream side air supply path 18 communicate with each other, the downstream side air supply path 18 and the inside of the box body K can communicate with each other in series to ensure gas circulation.
In addition, since the waterproof cover 32 is provided, water can be prevented from entering from the communication port 31 and water can be prevented from entering the extension pipe 30 and the downstream air supply path 18.
An air supply device 42 is connected to the pressure intake casing 1 through an upstream air supply path 41.
As this air supply device 42, a diaphragm pump 43 that discharges and supplies air at a weak pressure is used, and the base end of the upstream air supply path 41 is connected to the discharge port 44 of this diaphragm pump 43, so The tip of the air passage 41 is connected to the lower end connection port 11 of the pressure intake casing 1.
In this case, the distal end pipe portion 45 of the upstream air supply passage 41 passes through the pressure buffering space 10 so that the distal end port 46 opens into the proximal end portion of the downstream air supply passage 18. The air passage 18 is inserted into the proximal end portion.
The diaphragm pump 43 is connected to an electric motor 47, and the electric motor 47 operates with a battery as a power source. Therefore, in order to prevent the battery from being consumed, when an operation switch (such as a start switch 203 described later) is not turned on or off for a certain period of time, an auto power off circuit is used, for example, after 5 to 10 minutes have elapsed. The main power supply may be automatically turned off. The time setting at this time can be arbitrarily changed.
The diaphragm pump 43 is inexpensive, has a simple structure, and has a large amount of air supply. Therefore, the diaphragm pump 43 can be suitably used for the airtightness inspection apparatus of the present invention.
Further, the diaphragm pump 43 and the electric motor 47 are accommodated in a drive casing 48, and a silica gel casing 5 as an air drying means is connected to an intake port 49 of the drive casing 48 via an air supply conduit 50. . The air supply duct 50 can be connected to an appropriate position of the silica gel casing 5.
This silica gel casing 5 is used to allow the airtightness inspection apparatus A to be used even in a humid environment. A silica gel casing 5 containing silica gel is connected to the intake side of the diaphragm pump 43 so that the outside air has a high humidity. Even in some cases, consideration is given to obtaining a stable test result by ventilating dry air with a constant water vapor pressure.
Since the water vapor pressure is most sensitive to and sensitive to temperature changes, it tends to affect the airtightness test. Therefore, a reed switch 221 is provided so that the inspection cannot be performed when the silica gel casing 5 is not attached. The reed switch 221 can be attached to an appropriate position of the silica gel casing 5.
In addition, the silica gel casing 5 is formed of a transparent casing so that the deterioration of the silica gel can be confirmed. When the silica gel is in a moisture absorption state and needs to be replaced, the blue silica gel usually changes to a pink color. Preferably it contains grains.
When the silica gel casing 5 is not attached, measurement cannot be performed, but measurement can be performed even with the empty casing with the silica gel removed. However, in this case, the ventilation of the pipeline in the airtightness inspection apparatus A is not kept below a certain humidity. In order to dry the pipeline in the airtightness inspection apparatus A, it is necessary to fill the silica gel casing 5 with regular fine dry silica gel of blue fine particles and perform a ventilation operation.
When the box K side or the water vapor movement control device S is wet, by applying pressure, the water vapor in the box K or the water vapor movement control device S changes in concentration, so the box K side or the water vapor movement control device S The airtightness test may be higher than when the inside of S is not wet, or the internal pressure may gradually decrease depending on the temperature change. Therefore, the amount of pressurization can be increased and the time required for inspection can be shortened.
Further, a return side pressure intake path 52 is connected to the side connection port 13 of the pressure intake casing 1 so as to branch at a right angle with respect to the center line C. The side pressure intake path 53 is connected so as to branch, and a differential pressure gauge 54 is connected between the forward pressure intake path 53 and the return side pressure intake path 52. The return side pressure intake passage 52 may be connected so as to branch at an angle with respect to the center line C. In this case, the angle ranges from 30 ° to 90 ° with respect to the center line C. preferable.
A protective cap 55 is detachably attached to the upper end connection port 12 of the pressure intake casing 1.
The protective cap 55 is attached for the purpose of dust protection and protection from impacts, and is attached to the main body casing 57 by a chain 56 or the like in order to prevent falling off in the detached state.
In addition, an outside air traffic path 58 branched from the air supply conduit 50 is connected to a return side pressure intake path 52 via a three-way valve 59. By switching the three-way valve 59, the side connection port 13 of the pressure intake casing 1 and the differential pressure gauge 54 communicate with each other via the return side pressure intake path 52, and the air supply conduit 50 and the differential pressure gauge 54 are connected to the outside air. It is possible to switch to a state of communication through the traffic path 58.
Therefore, when the capacity of the box body K is large, the outside air from the air supply conduit 50 is taken into the differential pressure gauge 54 by the outside air traffic passage 58 by switching the three-way valve 59, and the value at that time is set as an initial value, and thereafter If it is used as a reference value for measurement, it can be used as a guide when a pump fails or piping is abnormal, and the measurement time can be shortened.
In this embodiment, the suction port 49 and the discharge port 44 are replaced to replace the three-way valve 59 and the back side, the return side pressure intake path 52, and the front end port 46, and the silica gel casing used for intake from the outside air. The air passing through 5 may pass through the air supply device 42. That is, in the embodiment, the front end port 46 is on the plus side and the return side pressure intake path 52 is on the minus side, but this can be reversed.
The upstream side air supply passage 41 is provided with a pressure safety valve on the upstream side of the forward pressure intake passage 53.
As a feature of this pressure relief valve, the pressure operating threshold value can be operated at a low value such as 5 cm water column, and can be adjusted and changed to a high pressure such as 1 m to 1.5 m water, In addition, even when used for a long period of time, the pressure condition serving as the operation threshold value is unlikely to change, and the deterioration rate is slow and the pressure can be stably used.
Further, in order to inspect the steam movement control device S itself for breakage and performance deterioration using the airtightness inspection apparatus A of the present invention, as shown by the phantom line in FIG. It is attached to the inside of the box of the device S or the outside air side, and is connected to the downstream air supply path 18 such as the water receiver 2 or the upper end connection port 12 through the measurement port S10 provided in the temporary sealing lid S1 with the measurement port. It can be connected using a connector.
Moreover, in order to assist the confidential inspection on the box side, the water vapor movement control device S may be temporarily sealed. In other words, the steam movement control device S itself is damaged or is in the process of construction, and the steam movement control device S is temporarily installed in the process of airtight construction such as a passage route for securing the airtightness of the box K. It is easier to seal. Therefore, in such a case, as shown by a broken line in FIG. 1, the airtight inspection can be simplified by mounting the temporary sealing lid S2 on the inside or outside of the box of the water vapor movement control device S. In addition, by attaching the temporary sealing lid S2 to the outside air side of the water vapor movement control device S, the film body M of the water vapor movement control device S. ₁ , M ₂ Can be confirmed for damage or deterioration.
In addition, a temporary sealing lid, a valve, or the like can be attached in the middle of the connection plug 25 of the water receiver 2, the upper end connection port 12 of the airtightness inspection apparatus A, and the air supply path to perform the airtightness inspection in the airtightness inspection apparatus A. You may do it.
The configuration of this pressure safety valve will be described.
4 is a cross-sectional view showing the pressure safety valve V1 of the first embodiment. FIGS. 5 (a), (b), FIGS. 6 (a), (b), FIG. 7 (a), and (b) are iron-containing spheres. FIG. 8 and FIG. 9 are sectional views showing an example of a structure for attaching the packing to the valve seat. FIG. 10 is a perspective view showing a ventilation groove formed in the valve chamber.
In FIG. 4, reference numeral 60 denotes a cylinder, which includes a ventilation side cylinder 61 and an exhaust side cylinder 62, and is integrally connected by screwing into a screw hole 61 a of the ventilation side cylinder 61 with a screw portion 62 a of the exhaust side cylinder 62. ing.
The ventilation side cylinder 61 and the exhaust side cylinder 62 are formed of a transparent synthetic resin (acrylic, polycarbonate, etc.) so that the state of the inside can be seen, and the state of the iron-containing sphere 75 such as adhesion of water droplets (condensation), rust and dirt, etc. Can be confirmed. In addition, a synthetic resin containing an antifungal material or an ultraviolet resistant synthetic resin can be used, and the cylinder 60 may be protected by being shaded or covered with a heat resistant material.
An assembly hole 64 is formed at the center of the ventilation side cylinder 61, and a ventilation pipe 66 having an interior formed in the ventilation path 65 is attached to the assembly hole 64 in the axial direction of the cylinder 60.
The upper end of the air passage 65 is communicated with the upstream air supply passage 41 by a bendable tube 67 and a valve pipe 68, while the lower end vent 69 is opened in the valve chamber 70 and surrounds the vent 69. In the state, a valve seat 71 is formed on the lower end surface of the vent pipe 66.
Further, a filter 72 as air filtering means is mounted in the middle of the ventilation path 65 of the ventilation side cylinder 61, and the filter 72 can be replaced by attaching / detaching the end member 73 screwed into the assembly hole 64. Can be done.
As shown in FIG. 5, the valve seat 71 has a ring-shaped packing 74 mounted along the inner edge of the vent hole 69 of the vent passage 65, as shown in FIG. There is a configuration in which a ring-shaped packing 74 is attached along the outer edge of 66, and a configuration in which the lower end surface of the vent pipe 66 is formed as a concave surface as shown in FIG. In this case, in order to prevent adhesion with the iron-containing sphere 75 while ensuring close contact with the iron-containing sphere 75 as a valve body, the form shown in FIG. 5 is most preferable.
5, 6, and 7, (a) shows a state in which the iron-containing sphere 75 is separated from the valve seat 71, and (b) shows a state in which the iron-containing sphere 75 is in close contact with the valve seat 71. ing.
In addition, about the material of the vent pipe 66 which forms the valve seat 71, a magnetic permeability body is used, for example, a Teflon material, a stainless material, copper, brass, a ceramic etc. can be considered. Among these materials, brass has good processability and good touch resistance, but a low-quality stainless steel material is preferable in terms of strength, but it may become a temporary magnetic body (temporary magnet), which can be a temporary magnet. A material having a property is not preferable for the ventilation pipe 66. In addition, the vent pipe 66 forming the valve seat 71 is required to be oil resistant, and it is necessary to select a material that is not easily corroded.
Further, in order to reduce the error of the operating pressure of the iron-containing sphere 75 and to ensure the fine pressure operation, the iron-containing sphere 75 is closely attached to the valve seat 71 and separated from the packing 74 easily and reliably. Therefore, it is necessary to select a material for the packing 74.
As a material for the ring-shaped packing 74, it is necessary to select a material that can withstand high temperatures and has high oil resistance in consideration of weather resistance. In addition, oil components such as exhaust gas may be suspended in the air, and such contaminated air may also contaminate the valve seat 71.
Therefore, as materials used for the packing 74, nitrile rubber (NBR), acrylic rubber (ACM), silicone rubber (VMQ), fluoro rubber (FKM), etc. are used, and among these, fluoro rubber (FKM) is the most. Is suitable.
8 and 9 are sectional views showing an example of a structure for attaching the packing to the valve seat.
In FIG. 8, a packing 76 having an elliptical cross section is used as the packing, and in FIG. 9, a lip packing 77 having a notch part in the middle is used as the packing.
When the iron-containing sphere 75 is separated from the valve seat 71, the iron-containing sphere 75 may be stuck to the packings 76 and 77. Therefore, as shown in the figure, an undercut portion 79 is formed in the fitting groove 78 of the packings 76 and 77 to prevent the iron-containing sphere 75 and the packings 76 and 77 from being caught.
Further, the outer diameters of the packings 76 and 77 are formed to be larger than the inner diameter of the fitting groove 78, whereby the packings 76 and 77 and the fitting groove 78 are brought into close contact with each other without being bonded with an adhesive or the like. We are trying to ensure sex.
As shown in FIG. 4, an exhaust path 80 is formed at the center of the exhaust side cylinder 62 so as to be in line with the vent path 65. The lower end of the exhaust path 80 is opened to the atmosphere, while the upper end The exhaust port 81 is opened in the valve chamber 70.
A semicircular recess 82 forming the inner surface of the valve chamber 70 is formed on the upper end surface of the exhaust side cylinder 62 so as to surround the exhaust port 81 of the exhaust passage 80, and the upper end edge of the semicircular recess 82 is tapered. The surface 83 is chamfered.
Further, a filter 84 as air filtering means is mounted in the middle of the exhaust passage 80 of the exhaust side cylinder 62, and the filter 84 is attached by detaching an end member 85 screwed to the lower end of the exhaust side cylinder 62. Can be exchanged.
An iron-containing sphere 75 as a valve body is accommodated in the valve chamber 70, and the iron-containing sphere 75 is normally held in close contact with the valve seat 71 so that the air passage 65 and the exhaust passage 80 communicate with each other. On the other hand, when an abnormal pressure is generated in the device to be used (box K), the vent passage 65 and the exhaust passage 80 are communicated with each other away from the valve seat 71.
The surface of the iron-containing sphere 75 is anticorrosive (for example, Teflon-processed), thereby preventing the iron-containing sphere 75 from being rusted or fouling the surface, and accompanying the movement of the iron-containing sphere 75. The production of magnet powder can be prevented.
In this case, the iron-containing sphere 75 is preferably made of a material having a surface-immobilized anticorrosion layer such as a bearing ball made of a low-quality stainless steel ball.
The iron-containing sphere 75 is a temporary magnet that also changes to a magnetic material, and is a soft (soft) magnetic material.
In order to prevent the iron-containing sphere 75 separated from the valve seat 71 from closing the exhaust port 81, a tapered surface 83 is formed from the semicircular recess 82 which is the inner surface of the valve chamber 70 as shown in FIG. A ventilation groove 86 communicating with the exhaust passage 80 is formed by processing the exhaust side cylinder 62 directly in the part extending to.
A magnet 87 (permanent magnet) is used as means for holding the iron-containing sphere 75 in close contact with the valve seat 71.
The magnet 87 adjusts the magnetic force for attracting and holding the iron-containing sphere 75 to the valve seat 71 to the operation threshold required for the operation of the water vapor movement control device S attached to the box K. Has been.
The magnet 87 is disposed apart from the iron-containing sphere 75 and the valve seat 71 in a state where the iron-containing sphere 75 is in close contact with the valve seat 71.
In this case, by inserting two ring-shaped magnets 87, 87 in a cylinder hole 61b formed in the inside of the ventilation side cylinder 61 while holding a gap with the ventilation pipe 66, In addition, a gap is provided between the magnet 87 and the iron-containing sphere 75 and the valve seat 71.
Further, the magnet 87 is provided with a separation adjusting means for moving the magnet 87 in the axial direction of the cylinder 60 to adjust the separation distance between the magnet 87 and the iron-containing sphere 75 and the valve seat 71. Yes.
As the separation adjusting means, a spring 88 is provided in the inner part of the cylinder hole 61b, and the magnet 87 is normally moved by the spring 88 in a direction facing the exhaust side cylinder 62 (downward in the drawing) via an interposition member 87a. I am trying to energize.
Then, the separation distance is adjusted by screwing the screw portion 62a and the screw hole 61a with the ventilation side cylinder 61 of the exhaust side cylinder 62. In this case, the exhaust side cylinder 62 is moved backward (downward in the drawing). ), The magnet 87 moves downward by being urged by the spring 88, the magnet 87 approaches the iron-containing sphere 75 and the valve seat 71, and a strong magnetic force acts on the iron-containing sphere 75. Can do.
On the other hand, when the exhaust side cylinder 62 is tightened in the forward direction (upward in the drawing), the magnet 87 moves upward against the spring 88, and the magnet 87 moves away from the iron-containing sphere 75 and the valve seat 71, The magnetic force can be applied to the iron-containing sphere 75 weakly.
As described above, the adjustment of the separation distance, that is, the adjustment of the limit pressure is performed by tightening or loosening the exhaust side cylinder 62. Therefore, the exhaust side cylinder 62 and the exhaust side cylinder 62 Scales 89 and 89 in which the separation distance is converted into a limit pressure are displayed on the ventilation side cylinder 61. In this case, as the scales 89 and 89, it is preferable to use a vernier scale as used in a caliper as a distance measuring tool in order to perform accurate adjustment. In addition, as a scale display, the volume of the box K to be attached and the average temperature band of the area to be used may be displayed to make simple adjustments.
In such a valve mechanism, the adhesion force is greatly affected by the magnetic strength at which the iron-containing sphere 75 contacts the valve seat 71 and the weight of the iron-containing sphere 75.
Therefore, it is necessary to greatly change the distance between the iron-containing sphere 75 and the magnet 87. Therefore, as described above, if the semicircular recess 82 is formed on the inner surface of the valve chamber 70, the iron-containing sphere 75 The moving range is widened, and accordingly, the adjustment range of the separation distance by the separation adjusting means can be increased.
Next, FIG. 11 is a sectional view showing the pressure safety valve of the second embodiment.
In this pressure relief valve V2, as in the first embodiment, the magnet 87 is fitted into the cylinder hole formed in the ventilation side cylinder 61 and at the same time the magnet 87c is attached to the inside of the exhaust side cylinder 62. Both magnets 87 and 87c are arranged so that the same magnetic poles (S poles in the drawing) face each other.
In this way, when the magnets 87 and 87c are arranged above and below the iron-containing sphere 75 with the same magnetic poles facing each other, the magnetic lines of force are distorted so as to embrace the iron-containing sphere 75 as shown in the figure. Therefore, the magnetic force can be reliably applied to the iron-containing sphere 75 so that the iron-containing sphere 75 can be reliably operated.
The other configuration is the same as that of the first embodiment.
Next, FIG. 12 is a sectional view showing a pressure safety valve of the third embodiment.
In this pressure safety valve V3, the magnet 87 is disposed away from the iron-containing sphere 75 and the valve seat 71 in a state where the iron-containing sphere 75 is in close contact with the valve seat 71. A ring-shaped magnet 87 is fitted into a cylinder hole 61b formed inside 61 with a gap between the magnet 87 and the interposed member 87a, and a spacer 87b is inserted between the magnet 87 and the interposition member 87a. Is attached so that the distance between the magnet 87 and the iron-containing sphere 75 can be adjusted.
That is, by changing the height of the spacer 87b, the attachment position of the magnet 87 (interval with the iron-containing sphere 75) can be adjusted, and the attractive force of the magnet 87 to the iron-containing sphere 75 can be adjusted.
Other configurations and operations are the same as those of the pressure safety valve V1 of the first embodiment.
The pressure safety valve of the present embodiment is attached to the main body casing 57 so that it can be turned upside down.
In this case, the fixed plate 100 is attached to the outer surface of the main body casing 57, and the reversing case 101 is pivotally supported so as to pass through the fixing plate 100 and the side wall of the main body casing 57. V1 is attached.
In addition, a communication pipe 102 is provided through the side wall of the fixed plate 100 and the main body casing 57, and a guide hole 103 is formed in the reversing case 101 by a semicircular long hole that passes through the communication pipe 102. . The outer surface of the reversing case 101 is closed by a transparent plate 104 so that the inside can be seen through the transparent plate 104.
The communication pipe 102 is connected to the downstream air supply path 5 through a valve pipe line 68 and is connected to the vent path 65 of the pressure safety valve V1 by the tube 67.
Therefore, when the reversing case 101 is rotated around the support shaft 104, the reversing case 101 is reversed 180 ° while the guide hole 103 is guided by the communication pipe 102, and the pressure safety valve V1 can be reversed upside down.
The vertical position of the pressure safety valve V1 can be determined by the locking device 105. As shown in FIG. 13, the locking device 105 forms locking recesses 107, 107 at the outer peripheral 180 ° position of the flange 106 provided on the support shaft 104, and is engaged with the locking recess 107. The locking roller 108 is attached to the lever arm 109, and a spring 110 attached to the lever arm 109 is urged to engage the locking roller 108 with the locking recess 107.
When the reversing case 101 is turned 180 degrees upside down from the state of FIG. 1, the pressure safety valve V1 is turned upside down from the state of FIG. 4 and the weight of the iron containing sphere 75 is added to the valve seat 71. It is necessary to adjust the attractive force of the magnet 87 taking into account the weight of 75.
In the pressure safety valve V <b> 1, a difference occurs in the sensitivity threshold value and the response pressure due to the vertical positional relationship between the iron-containing sphere 75 and the magnet 87 constituting the valve. When the pressure safety valve V1 is turned upside down from the state of FIG. 4 and the iron-containing sphere 75 is above the magnet 87, the sensitivity threshold increases due to the weight of the iron-containing sphere 75, whereas, as shown in FIG. In addition, when the magnet 87 is on the upper side and the iron-containing sphere 75 is on the lower side, the sensitivity threshold value tends to be low. Therefore, the upper and lower positional relationship of the pressure safety valve V1 is inverted 180 ° so that the airtight inspection and the humidity control device can be inspected by utilizing the difference in the sensitivity threshold due to the upper and lower positional relationship, It was made possible to change.
Usually, as shown in FIG. 4, since the iron-containing sphere 75 is set to be disposed below the magnet 87, the amount of pressure applied to the box K tends to be small if measurement is performed in the same direction. On the other hand, when the iron-containing sphere 75 of the pressure safety valve V <b> 1 is positioned above the magnet 87, the amount of pressure applied to the box K tends to be high. This difference is considered to be the difference shown in the graph of FIG.
Further, when the box K has a large volume or when there is a question of airtightness, the inspection time can be shortened by increasing the amount of pressurization, but the burden on the water vapor movement control device S is increased. On the contrary, when the water vapor movement control device S is not mounted or when there is a doubt about the airtightness of the box body K, the inspection method is suitable. With respect to aging deterioration of the water vapor movement control device S, the remaining proof stress can be inspected or used for function confirmation at the initial setting. On the other hand, in the inspection by the arrangement in the same direction, since the amount of pressurization is small, it is useful for the inspection with the box K having a small volume.
In the embodiment of the present invention, the magnetic force of the magnet 87 is about 30.8 gf / cm when the weight of the iron-containing sphere 75 is about 5 g. ² FIG. 4, FIG. 11, and FIG. 12 are shown as examples using permanent magnets of the same degree. In addition, it is possible to reinforce the magnetic force of the magnet or to reduce it.
As the material of the magnet (magnetic material), a hard magnetic material made of Alnico R—Co; Ba ferrite or a soft magnetic material made of Fe—Si; Mn—Zn ferrite can be used, but a hard magnetic material is preferred.
In the present invention, an anti-mold resin can be used for each component of the box and the pressure safety valve, such as a water vapor movement control device and an airtightness inspection device, or a anti-mold agent and a water repellent can be used on the surface thereof. Then, a temperature indicating paint may be applied to an appropriate part (particularly, the pressure relief valve vent passage, the periphery of the diaphragm pump) and the like may be displayed when an abnormal temperature is reached.
In the airtightness inspection apparatus A of the present invention, the upstream side air supply path 41, the downstream side air supply path 18, the forward side pressure intake path 53, the return side pressure intake path 52, the air supply pipe line 50, and the outside air traffic path. For the pipes 58 and the like, the tube 67 and the like use high heat resistant vinyl chloride tubes (cold resistant: −50 ° C. to + 50 ° C. or heat resistant: −30 ° C. to + 80 ° C.).
FIG. 19 is a graph showing the test result of the limit pressure of the pressure safety valve of the present invention.
Line C1: Limit pressure when two magnets 87, 87 are arranged below the iron-containing sphere 75 (the state inverted from the state of the first embodiment of FIG. 4).
Line C2: Limit pressure when one magnet 87 is arranged above the iron-containing sphere 75 via the spacer 87b (state of the third embodiment in FIG. 12)
Line C3: Limit pressure when one magnet 87 is arranged below the iron-containing sphere 75 via the spacer 79
Line C4: limit pressure when two magnets 87, 87 are arranged above the iron-containing sphere 75 (state of the first embodiment in FIG. 4)
Line C5: Limit pressure when one magnet 87 is arranged above and below the iron-containing sphere 75
In this figure, it can be seen that the limit pressure is high when the magnet 87 is approaching the iron-containing sphere 75, and the limit pressure decreases as the magnet 87 moves away from the iron-containing sphere 75.
Therefore, the separation distance between the magnet 87 and the iron-containing sphere 75 and the valve seat 71 is adjusted by the separation adjusting means, and the attachment position of the magnet 87 (the distance from the iron-containing sphere 75) is adjusted by the spacer 87b. It can be understood from this figure that the adsorption force of the magnet 87 to the iron-containing sphere 75 can be adjusted.
In order to easily adjust the attracting force of the magnet 87 to the iron-containing sphere 75, it is preferable that the limit pressure gradually decreases as the magnet 87 moves away from the iron-containing sphere 75. In that respect, it can be said that the form of line C3, line C4, and line C5 is preferable in FIG.
Thus, the pressure safety valve of the present invention can release the abnormal pressure when an internal abnormal pressure such as an airtightness inspection device used when setting the water vapor movement control device is generated.
Further, since the adsorption force to the iron-containing sphere 75 by the magnet 87 can be adjusted, the limit pressure of the pressure safety valve can be adjusted. Therefore, for example, as the water vapor movement control device, one type of water vapor movement control according to a predetermined standard is possible. If a device is made and the limit pressure of the pressure safety valve is adjusted at this time, one type of water vapor movement control device can be applied to a box having different conditions in size, installation environment and material.
As the water vapor movement control device in this case, as shown in FIG. 20, the pressure safety valve may be operated in a range L1 further inside the safe use range L of the film body, or may be destroyed. As long as it is within the pressure range L2, the pressure safety valve may be operated within a range exceeding the safe use range L.
Therefore, in the pressure safety valve configured as described above, the steam movement control device, the humidifying device, the dehumidifying device, and the setting thereof associated with the change in the water vapor movement characteristic due to the destruction or rapid deterioration of the boundary of the movement of water vapor or air. When a local abnormal pressure is generated inside an airtightness inspection apparatus to be used, the abnormal pressure can be released to prevent the film from being damaged.
Further, since the magnet 87 keeps a distance from the iron-containing sphere 75 and the valve seat 71, the surface of the iron-containing sphere 75 is soiled by magnet powder or a magnetically attracted substance (iron powder, etc.) that may adhere to the magnet 87. It is possible to prevent the generation of magnet powder caused by the movement of the iron-containing sphere 75.
Further, since the cutting powder generated by the wear of the magnet 87 and the wear of the iron-containing sphere 75 is adsorbed by the magnet 87, the airtightness between the valve seat 71 and the iron-containing sphere 75 is not hindered.
Further, since the iron-containing sphere 75 is in close contact with the valve seat 71 using magnetic force, the valve operation can be performed at an extremely low pressure.
In addition, the distance between the magnet 87 and the iron-containing sphere 75 is such that the iron-containing sphere 75 and the magnet 87 are kept at a distance that does not come into contact with each other, that is, the iron-containing sphere 75 is magnetized. In other words, the adsorption force of the iron-containing sphere 75 to the valve seat 71 does not decrease. That is, the iron-containing sphere 75, the valve seat 71, and the magnet 87 are electrically insulated, and the iron-containing sphere 75 has a small moving distance, so that the iron-containing sphere 75, which is a temporary magnetic body, is not easily magnetized. The adsorption force to the valve seat 71 is stable and hardly changes over time.
Further, since the filters 72 and 84 as air filtering means are provided, pollutants such as foreign magnetic attracting substances (iron powder, etc.) from the outside air (exhaust gas oil, dust, small animals, etc. as pollutants in the air) ) And magnet powder that may adhere to the magnet 87 or a magnetic attractive substance (iron powder, etc.) can be prevented from entering the valve chamber 70.
Since the separation adjusting means is provided, the magnetic force for attracting and holding the iron-containing sphere 75 to the valve seat 71 can be adjusted by adjusting the delicate distance relationship between the iron-containing sphere 75 and the magnet 87. The valve operation can be performed at an extremely low pressure and can be accurately adjusted to the operation threshold required for the operation of the device to be used.
In addition, when the spacer 87b is provided, the attachment position of the magnet 87 can be adjusted, the attractive force of the magnet 87 to the iron-containing sphere 75 can be adjusted, and the semicircular recess 82 is formed. Can be taken widely. In addition, since the ventilation groove 86 is provided, even if the exhaust port 81 is blocked by the iron-containing sphere 75, abnormal pressure can be released to the exhaust path 80 via the ventilation groove 86.
Furthermore, since the surface of the iron-containing sphere 75 is anticorrosive, the rusting of the iron-containing sphere 75 and the surface can be prevented from being stained, and the generation of magnet powder accompanying the movement of the iron-containing sphere 75 can be prevented. Can do.
Since the packing made of fluorinated rubber is attached to the valve seat 71, the airtightness between the iron-containing sphere 75 and the valve seat 71 can be secured, and the contact resistance between the valve seat 71 and the iron-containing sphere 75 can be reduced and the oil resistance can be increased. Effects such as prevention of deterioration can be obtained, and a precise valve structure can be achieved.
As shown in FIG. 14, the airtightness inspection apparatus A of the present embodiment is provided with an operation unit 300 on the outer surface.
The operation unit 300 includes a power switch 301, an illumination switch 302, a start switch 303, a buzzer switch 304, a power switch 305, a differential pressure gauge display unit 306, a rotary switch 307, a tilt switch JP switch 308, a test / forced operation switch. 309 is provided. Reference numeral 310 denotes a battery storage unit.
The airtightness inspection apparatus A of the present embodiment is incorporated in a main body casing 57 that can be carried by an operator.
The main body casing 57 is made of reinforced plastic and is preferably formed in a heat insulating structure.
An attachment means such as a magnet 210 is provided on the outer side surface of the main casing 57 so that the attachment means can be attached to a fixing member (for example, a tower column or a beam) at a measurement place (for example, a steel tower). I have to.
Although not shown in the figure, when thermo paint is applied to an appropriate place such as an appropriate inner surface of the main body casing or a lower surface of the pressure intake casing 1 and each component is abnormally overheated, the abnormal color is caused by discoloration of the thermo paint. It makes it easy to detect overheating.
Moreover, as the pipe material used for each pipe, a pipe material coated with a mold prevention material or impregnated with the mold prevention material can be used.
In addition, a water vapor movement control device may be attached to the main body casing 57, whereby the humidity inside the airtightness inspection apparatus A (inside the main body casing 57) can be adjusted.
A tilt switch 211 is mounted in the main body casing 57, and when the main body casing 57 is mounted beyond a certain angle, the pendulum 212 is tilted beyond the swing limit and the switch is turned on. The drive is stopped.
This inclination switch 211 is for detecting that the inclination of the airtightness inspection apparatus A is within the normal inclination range.
Since the tilt switch 211 is operated by the pendulum 212, when the pendulum 212 is carried, the pendulum 212 swings and collides with the switch body or the like, and the pendulum is bent or deformed as shown in FIG. It may disappear.
Therefore, as shown in FIG. 16, the swing motion of the pendulum 212 can be fixed to the lock device 213. The lock device 213 reciprocates the manual dial 214 to reciprocate the lock bar 216 via the crank bar 215, and as shown in the figure, the pendulum 212 is fixed by advancing the lock bar 216, and the reverse In addition, when performing an airtight inspection, the lock bar 216 is moved backward to release the pendulum 212 from being fixed.
Next, the control circuit of the electrical components of the airtightness inspection apparatus A will be described with reference to the block diagram shown in FIG.
The power supply circuit E is a power supply part for supplying power, and the internal power supply 311 and the external power supply 312 can be selected by the power supply selector switch 305.
The power switch 301 operates to operate to supply power to each circuit. By operating the power switch 301, the measurement time distribution switch 313 can be operated at the same time, and a rough measurement time can be selected.
The power supply control circuit F controls the power supply from the power supply circuit E to each circuit by operating the reed switch 314, the inclination switch 211, and the limit switch 315.
The reed switch 314 is for detecting that the silica gel casing 5 is attached at a proper position.
The reed switch 314 is attached to the silica gel casing 5 and supplies power to each circuit only when the passing air is supplied with a desiccant.
The inclination switch 211 is for detecting that the inclination of the airtightness inspection apparatus A is within a normal inclination range. The inclination switch 211 supplies power to each circuit only when the measurement state is in the correct posture. However, by operating the tilt switch JP switch 308, the power supply to each circuit can be controlled without depending on the operation of the tilt switch 211. A tilt switch JP switch operation confirmation LED 316 is provided so that the operation can be visually confirmed.
The limit switch 315 is for detecting the state in which the pressure safety valve V1 is positioned at an appropriate upward or downward position in conjunction with the operation of the lever arm 109 shown in FIG. This limit switch 315 supplies power to each circuit only when the pressure safety valve V1 is in the correct posture.
In addition, about a power supply control circuit, you may make a check, operation, etc. easy using a jumper etc.
The EL circuit G controls the operation of the EL plate 318 (sheet-like illumination plate) via the EL plate inverter 317 by operating the illumination switch 302.
The EL circuit may be replaced with illumination such as an LED with low power consumption.
The program circuit H attaches the ROM 320 to the CPU 319, and controls the operation of each unit with reference to the program in the ROM 320.
The time setting in the box volume and the operation of the pump 43 can be freely set by exchanging the ROM 320 or the like, and the pumping air amount may be changed.
The test / forced operation switch 309 is provided so that the operation of the diaphragm pump 43 can be selected. When the differential pressure is abnormal, the diaphragm pump 43 is stopped.
A differential pressure gauge 54 is provided to measure the differential pressure between the air feed and the return air.
The differential pressure gauge operation confirmation LED 321 is provided so that the normal operation can be visually confirmed.
The rotary switch 307 is used to simultaneously select the time setting and the operation of the pump 43, so that the relationship between the box volume and the pressure air amount can be set by one operation and the measurement time can be shortened. Provided.
The start switch 303 can start measurement by operating it.
The start confirmation LED 322 is provided so that the operation can be visually confirmed.
The buzzer 323 is provided so that an abnormal operation and measurement end can be confirmed audibly.
The buzzer switch 304 can control the operation of the buzzer 323 by operating this.
In addition, you may enable it to confirm the use condition of other components by changing lighting of LED to blink etc. about all LED.
Next, the procedure of the measurement method will be described with reference to the flowchart shown in FIG.
Step. 1. Start measurement preparation.
Step. 2, the ROM 320 is attached to the base CPU 319. The program applied in the ROM 320 is reflected in the measurement.
Step. 3, the power supply selector switch 301 is operated to select the internal power supply 311 or the external power supply 312.
Step. 4, the power switch 301 is operated to turn on the power. At the same time, the measurement time distribution switch 313 is operated to select an approximate measurement time (large, small, etc.).
Step. 5, the attachment of the silica gel casing 5 is confirmed by the reed switch 314. When the silica gel casing 5 is not attached, the reed switch 314 shuts off the power to each circuit.
Step. 6, the tilt switch JP switch 308 is operated to select ON or OFF. In this case, the operation of the tilt switch 211 is not considered when the JP switch 308 for the tilt switch is ON. Consider the operation of the tilt switch 211 when it is OFF.
At the same time, the operation of the tilt switch JP switch 308 is confirmed by the tilt switch JP switch operation confirmation LED 321. When the operation check LED 321 is lit, the tilt switch JP switch 308 is ON, and when the operation check LED 321 is not lit, the tilt switch JP switch 308 is OFF.
Step. 7, the tilt switch 211 confirms whether the tilt of the main body is in a normal posture at the time of measurement. When the inclination of the main body is not a normal posture at the time of measurement, the power to each circuit is shut off by the inclination switch 211. However, when the tilt switch JP switch 308 is turned on, the operation of the tilt switch 211 is not considered.
Step. In 8, the limit switch 315 confirms whether the direction of the pressure safety valve V1 is in a normal position at the time of measurement. When the direction of the pressure safety valve V1 is not in the normal position at the time of measurement, the power to each circuit is shut off by the limit switch 315.
Step. 9, the operation of the diaphragm pump 43 is selected by the test / forced operation switch 309. During the test operation of the test / forced operation switch 309, the rotation and operation time of the motor of the diaphragm pump 43 can be set by the rotary switch 307. During the forced operation, the operation time of the diaphragm pump 43 can be set by the rotary switch 307.
Step. 10, the rotary switch 307 is operated to select the rotation and operation time of the motor 47 of the diaphragm pump 43. During the forced operation of the test / forced operation switch 309, only the operation time of the diaphragm pump 43 can be set by the rotary switch 307.
Step. 11, the operation of the buzzer 323 is selected by operating the buzzer switch 304. The measurement ends when the buzzer switch 304 is ON, and the buzzer 323 sounds when there is an abnormality. When the buzzer switch 304 is OFF, the buzzer 323 stops. At this time, the lighting switch 302 is operated to turn on the EL plate 318, and the inside of the main body is checked.
Step. At 12, the measurement preparation is completed.
Step. The measurement starts at 13.
Step. 14, the start switch 303 is operated to start measurement.
Step. 15, the measurement operation is confirmed by the start confirmation LED 322. When the start confirmation LED 322 is lit, measurement is being performed, and when it is turned off, measurement is stopped.
Step. At 16, the diaphragm pump 43 is started.
Step. 17, the output value is displayed on the differential pressure gauge 54.
Step. In 18, the operation of the differential pressure gauge 54 is confirmed by the differential pressure gauge operation confirmation LED 321. When the differential pressure gauge operation confirmation LED 321 is lit, the output value and operation are normal, and when the LED is not lit, the output value and operation are stopped.
Step. At 19 the measurement ends.
In order to use the airtightness inspection apparatus A of this embodiment, the connection plug 25 provided at the upper end of the water receiver 2 is fitted into the socket 26 provided in the box K, and in this state, the diaphragm pump is operated by the electric motor 47. 43 is activated.
The forward gas supplied from the diaphragm pump 43 is supplied from the upstream air supply passage 41 through the downstream air supply passage 18 to the inside of the box K, and the box K and the downstream air supply passage 18 are supplied. The return side gas reflected from the inside of the gas is taken into the differential pressure gauge 54 from the return side pressure intake passage 52 through the pressure buffering space 10 from the downstream side air supply passage 18.
The pressure P2 of the return side gas taken into the differential pressure gauge 54 from the return side pressure take-in path 52 and the pressure P1 of the forward side gas taken into the differential pressure gauge 54 from the forward pressure take-in path 53 By measuring the differential pressure with the differential pressure gauge 54, the airtight state of the box K is inspected.
In this case, the differential pressure between the pressure P2 of the return side gas taken into the differential pressure gauge 54 from the return side pressure take-in path 52 and the pressure P1 of the forward side gas taken into the differential pressure gauge 54 from the forward pressure take-in path 53 When the pressure P1 of the forward gas is larger than the pressure P2 of the return gas (P1> P2), the box K or the film body M is damaged and the airtightness is leaked. In addition, when the pressure P1 of the outward side gas and the pressure P2 of the return side gas are substantially the same (P1≈P2), it is recognized that the airtightness is maintained.
In the airtight state (P1≈P2), the differential pressure gauge 54 is lit with a lamp indicating normality, and a stop signal is output to the electric motor 47 of the diaphragm pump 43 by a timer relay after a predetermined time has elapsed. The pump 43 is stopped. Further, when an abnormal pressure is detected for a certain time or more, a stop signal is output, and the diaphragm pump 43 is stopped.
Further, when the differential pressure gauge 54 is out of order, a stop signal to the electric motor 47 of the diaphragm pump 43 is not output, and excessive pressurization to the box body K and the film body M may occur. . Therefore, the pressure safety valve V1 is opened by such excessive pressurization, and it can be recognized that the airtightness of the box body K is maintained by opening the pressure safety valve V1. On the contrary, when the airtightness of the box K is leaking, pressure leaks from there, so that the pressure safety valve V1 is not opened. Thus, when the differential pressure gauge 54 is broken, the pressure safety valve The airtight state of the box body K can be inspected by opening and closing V1.
As described above, in the airtightness inspection apparatus A of the present embodiment, since a weak pressure is applied by the diaphragm pump 43, no stress is applied to the film body M and the box body K of the water vapor movement control apparatus S, and the differential pressure gauge 54 is used, the measurement threshold is lowered, the airtight state of the box body K is inspected with high sensitivity and high accuracy, and the leakage of airtightness caused by the breakage of the box body K or the film body M is detected. Can be found.
In particular, the downstream side air supply path 45 passes through the pressure buffering space 10 so that the distal end pipe portion 45 of the upstream side air supply path 41 opens into the proximal end portion of the downstream side air supply path 18. 18 is inserted into the base end portion of the pressure sensor 18 so that the turbulent flow and the interference wave of the air vibration due to the interference between the outward gas and the return gas in the pressure buffer space 10 can be prevented, and the return side pressure is taken in. Since the path 52 is connected so as to branch at an angle (right angle) to the center line C, the pressure of the return side gas is gently lowered from the pressure buffering space 10 while avoiding the influence of pulsation by the diaphragm pump 43. Therefore, measurement by the differential pressure gauge 54 can be performed with high accuracy.
A silencer (for example, a baffle plate structure) may be provided in the proximal end side of the return side pressure intake path 52 or in the pressure buffering space 10 of the pressure intake casing 1.
In addition, since the water receiver 2 is provided at the tip of the downstream air supply path 18, even if the airtight inspection device A is used in a state where water such as rainwater is accumulated inside the box body K, The water flowing down from the box K is immediately received inside the water receiver 2, and it is possible to prevent troubles such as water entering the inside of the apparatus or causing an electric shock accident.
Although the water receiver 2 is provided, the downstream side air supply path 18 and the inside of the box body K communicate with each other in series. The airtight inspection of the box body K by the inspection apparatus A can be performed without hindrance.
Moreover, since the water receiver 2 and the pressure taking-in casing 1 are transparent, the state at the time of inspection can be confirmed visually.
In addition, since the pressure safety valve V1 is provided, abnormal pressure can be released, and malfunctions and damage to various parts of the device such as the differential pressure gauge 54 and the diaphragm pump 43 can be avoided.
Next, the measurement method of the present invention will be described with reference to FIGS.
FIG. 21 shows the ideal pressure increase process (100L, 300L) of the box (100L, 200L, 300L) in which the airtightness is confirmed with the pressure change on the vertical axis and the time on the horizontal axis, and the airtightness is confirmed. The change in the air supply speed and the air supply amount considering the vibration of the duct air in the box (300L) is shown, and the pressure increasing process when fine adjustment is not performed is shown as P2.
22 (a) and 22 (b) show waveforms when the vertical axis indicates the amount of voltage change and the horizontal axis indicates time, the solid line indicates the feed waveform, and the broken line indicates the applied voltage of the return waveform.
FIG. 23 shows the change over time in the rotational speed of the driven motor 47 when the vertical axis represents the motor speed change amount and the horizontal axis represents time.
FIG. 24 shows the difference between the feed side air amount and the return side air amount when the reflected wave corresponds to the reverse rotation when the vertical axis represents the air amount change amount and the horizontal axis represents time. The upper curve shows the feed side air amount, and the lower curve shows the return side air amount.
FIG. 25 is a schematic diagram assuming changes in the pipe cross-sectional area when air vibration (sound) of a specific frequency propagates through the pipe.
In FIG. 26, when the vertical axis represents the amount of attenuation change and the horizontal axis represents the frequency, air vibration (sound) having a specific frequency propagates through the tube, so that the cross section changes, resonators, pores leading to the outside, etc. The propagation of a specific frequency when an acoustic impedance change occurs is shown.
FIG. 27 is a schematic diagram assuming a pipe through which air vibration (sound) of a specific frequency propagates. For the distance L between X1 and X2, the cross-section pressure at the X1 portion is P1, and the cross-section pressure at the X2 portion is Shown as P2.
FIG. 28 shows the progress of pressure increase of a trapezoid in which the air supply device is programmed for operation, with the vertical axis representing pressure change and the horizontal axis representing time. The upper curve shows the feed air pressure, and the lower curve shows the return air pressure.
In FIG. 29, the differential pressure obtained from the result of an example of the trapezoidal pressure increase when the air supply device 42 is programmed with the vertical axis representing the differential pressure change time integrated value and the horizontal axis representing time is indicated by the solid line. Show. A broken line portion indicates a section where a measurable differential pressure change is small.
FIG. 30 shows an example of a trapezoidal step-by-step pressure increase process when the air supply device is programmed for operation with the vertical axis representing the pressure change amount and the horizontal axis representing time. The upper curve is the feed sound pressure, and the lower curve is the return sound pressure. Tc to Td indicate sections where the change in measurable differential pressure is small.
FIG. 31 shows the differential pressure obtained as a result of an example of a trapezoidal stepwise pressure increase when the air supply device 42 is programmed with the vertical axis representing the differential pressure change time integral value and the horizontal axis representing time. Shown in the section. Tc to Td indicate a section where the change in measurable differential pressure is small, and a section of the corresponding time is indicated by a broken line.
FIG. 32 shows the progress of pressure increase by the conventional method when the vertical axis represents pressure change and the horizontal axis represents time. The upper curve is the feed sound pressure, and the lower curve is the return sound pressure. In the conventional measuring method, the change in the pumping amount is curvilinear, and the change in the differential pressure always occurs.
FIG. 33 shows the differential pressure obtained as a result of the increase in pressure according to the conventional method, where the vertical axis represents the differential pressure change time integrated value and the horizontal axis represents time. When the scale of the vertical axis is enlarged, the time interval that continues to change is long as in FIG.
FIG. 34 is a method of simply boosting when the vertical axis is the pressure change amount and the horizontal axis is the time. Examples of the boosting progress when uniquely increasing are shown in (3-1) to (3-8). This is shown as a pattern.
FIG. 35 shows a differential pressure obtained as a result of the increase in pressure when the pressure is uniquely increased by a method of simply increasing pressure with the vertical axis representing the differential pressure change time integrated value and the horizontal axis representing time.
FIG. 36 shows the progress of pressure increase when it is uniquely increased by a method of simply boosting the pressure on the vertical axis and time on the horizontal axis. The upper curve is the feed waveform, and the lower curve is the return waveform.
FIG. 37 is a method of simply boosting when the vertical axis represents the differential pressure change time integrated value and the horizontal axis represents time. When the pressure is uniquely increased, the differential pressure obtained as a result of the boosting process is represented by the upper curve. Show. The lower curve shows the amount of change in the section.
FIG. 38 shows the differential pressure obtained as a result of phase adjustment that causes an error when the vertical axis represents the differential pressure change amount time integral value and the horizontal axis represents time. The solid line shows the differential pressure before phase adjustment, and the broken line shows the differential pressure after phase adjustment. Before phase adjustment, the change becomes large in the first half of all the sections.
In the measurement start stage, first, in order to confirm whether or not the airtightness inspection apparatus A is in a normal measurable state, the pressure in the measurement state is applied while the pressure intake casing 1 is closed. In general, a diaphragm pump 43 using an electromagnet or a motor rotational force as a drive source is used as a pump used to obtain a pressurized amount. At this time, in the pipe line in the airtightness inspection apparatus A, the pressure fluctuation generated from the air supply apparatus 42 is affected, and the air in the pipe line is vibrated.
For this reason, sound reflection and interference occur due to air vibration in the pressure intake casing 1, and each passage in the passage path vibrates. ₂ As shown in Fig. 1, a time interval showing an unstable pressure rise is observed.
For example, the pressurization time required to perform the airtightness test of a large volume box and the pressurization time required to perform the airtight test of a small volume box are intended to shorten the total measurement time. In addition, adjust the air supply volume and the air supply speed. In an airtight test of a large volume box, the air supply amount and the air supply speed are set large so that the amount of time required to secure a constant pressure increase amount does not become too large. In a small-volume airtight test, the time required to ensure a certain amount of pressure increase is small, but in this case, the time lapse affected by the air vibration inside the device A that occurs when the pressure intake casing 1 is closed. The generation of a slight differential pressure accompanying the measurement also contributes to measurement errors.
P in FIG. ₂ As shown in FIG. 5, this unstable fluctuation in the pressure rise process works adversely to adjust the air supply amount and the air supply speed for measurement and to shorten the measurement time.
That is, P in FIG. ₂ In the case where the airtightness test of the 200L box is carried out, it is necessary to increase the air supply amount and the air supply speed of the pump 43 even though the 300L box airtightness test is actually performed. Section t where the pressure rise curve approaches or the pressure value intersects ₀ ~ T ₃ Exists. Therefore, the airtightness cannot be determined in the time interval in which the measurement result can be obtained from the start of measurement in this interval. However, P ₂ This is not the case with the modified boosting curve located above, so that the determination of airtightness can be confirmed at an early stage from the start of measurement as a measurement result. The 300 L and 200 L pressure increase results described above increase the air supply speed and the air supply amount as the measurement time is shortened, so that the vibration phenomenon of each pipeline also increases. Correction or ancillary measures are necessary.
As an idea to shorten the total measurement time, the adjustment of the air supply amount and the air supply speed can be made larger or smaller according to the volume of the box body performing the airtightness test uniquely. As described above, the countermeasures against the acoustic vibration generated in the apparatus A and the differential pressure measurement error caused by the vibration and interference of the air in the pipe line are insufficient.
For example, as shown in FIG. 21 shown as a measurement example, time t ₀ In the period of time, the pressure rise process of the pressure increase process of the box body confirmed to be airtight for performing the 200L airtightness test approaches the pressure increase process of the box body confirmed to be airtight for the 300L airtightness test. End up. Also, time t ₁ To t ₂ In the period of time, the pressure rise process of the box body in which the airtightness in the 300L airtightness test is confirmed is compared with the pressure increase process in the pressure rise process of the box body in which the airtightness in the 200L airtightness test is confirmed. Proximity.
That is, in this situation, the airtightness of the box is confirmed, but as a result, the air vibration generated by the air supply amount and the air supply speed used at the time of 300 L measurement is adversely affected, resulting in a pressure of 200 L. Since a time elapse in which the pressure increase is not obtained is observed in the vicinity of the ascending process, this is a process showing the non-hermeticity of the 300 L box. Considering the premise that such a phenomenon requires a higher air supply rate and speed to be set for a larger volume box in order to shorten the total measurement time, the vibration of the pipe air is reduced. Fine adjustment of the air supply speed and the air supply amount considering the vibration of the pipe air and the pipe passage is arbitrarily performed over time without performing the fine adjustment of the air supply speed and the air supply amount taking into consideration Must be set to
Such a fine adjustment cannot be performed simply by providing a blower. Therefore, in this embodiment, as shown in FIG. 22, a pulse wave is used, and the pump drive source is adjusted by adjusting the ON and OFF times and applied voltage, and the air supply amount and the air supply speed are arbitrarily set. Program operation using ROM was made possible. As a result, it is possible to reduce the measurement error and shorten the measurement time in consideration of the difference in altitude, temperature difference, and air density in the pipeline due to the humidity of the measurement environment.
Note that FIG. 22B shows a pulse wave having an ON time corresponding to the section a in FIG. As a result, a motor rotational force equivalent to that shown in FIG.
As a specific method, a simple vibration model is constructed based on the reciprocating path length of all pipes, and based on this vibration prediction calculation, the air supply volume and the air Fine-tune the air speed.
As a pressurizing means, it is possible that a pressurizing amount cannot be secured even with a pump other than the diaphragm pump 43. For example, in a gear pump, it is necessary to use a sealing material such as silicon oil for an air seal of a gear portion. There is. Therefore, when the gear pump is used, there is a possibility that the air seal material in the reciprocating path of the ventilation path may be contaminated. Therefore, the gear pump is not used in this embodiment. However, in the future, when a pump device that can efficiently seal the air without using silicon oil that has been used as a sealing material for the gear part in the future is put on the market, it is not a diaphragm pump. A gear pump can also be used. However, even in this case, the absolute amount of air vibration gradually increases as the amount of pressurization increases, and phenomena such as interference with pressure due to the movement of the gear portion that supplies air occur as the pressure increases. Therefore, depending on the type of pump, a simple vibration model is constructed based on the reciprocal length of all the pipes as described above according to each pump and pipe characteristics, and the influence of this vibration and interference. Therefore, it is necessary to perform prediction calculation in consideration of the pipe line characteristics in advance and finely adjust the air supply amount and the air supply speed.
Next, adjustment means for air vibration and interference phenomenon will be described.
The total pipe volume is considered to be the sum of the volumes of all the internal pipes in the set state of the airtightness inspection apparatus A itself, the connection tubes up to the box for performing the airtightness inspection, and the box for performing the airtightness inspection. Among these volumes, the volume used for adjusting the zero point of the apparatus is the total volume of all the internal pipes of the airtightness inspection apparatus itself and the path from the pump 43 to the opening of the upstream air supply path 41.
Based on this volume determination, the Diaphragm pump 43 accompanying the air supply required to reduce the error amount of the differential pressure measurement result caused by the air vibration in the pipe at any time during the measurement from the start of the measurement. The zero point adjustment is performed by adjusting the phase difference of the driving cycle of the pump such as the electromagnetic pump and the driving speed.
FIG. 23 shows the rotation when the diaphragm pump 43 driven by the motor is used, and FIG. 22 shows an example of a pulse wave necessary for the rotation.
As an improvement of this time, a pulse wave is used to drive the pump 43, and the power consumption time is shortened under CPU control. Further, by using the pulse wave, the driving of the pump 43 can be arbitrarily controlled by controlling the voltage application time, the voltage amount, and the OFF time.
Assuming that the pump drive of FIG. 23 is obtained with respect to the applied voltage of FIG. 22, the feed wave shown in the upper curve of FIG. 24 is obtained. This feed wave is a pressure fluctuation amount that is assumed to be the sum of the pump driving time of the pressure fluctuation amount. The waveform of the path that is reflected back from the inside of the inspection device or by the box that performs the airtightness inspection with respect to the transmitted wave is shown below. The return waveform has a smaller amount of absolute change than the feed waveform due to pressure loss or vibration propagation through the pipe or passage, and the waveform characteristics also change.
Differences in the phase and absolute change amount of these feed waveforms and return waveforms cause errors. In order to determine these adjustment means, the total volume of each of the device and the path to the connection, and the measurement volume is determined, and the standard of the volume in the pipe having a constant diameter assumed by the approximate cross-sectional area. Substituting with air, the approximate calculation can be set in advance for the vibration characteristics.
Further, the most adverse element in the prediction calculation of the vibration period is a highly elastic pipe line. Therefore, in this configuration, in order to prevent adverse effects on the reflection of the prediction calculation due to the elasticity of the pipe used, a highly heat-resistant vinyl chloride tube with a low temperature-dependent property change such as thermal softening and hardening due to temperature ( It is preferable to use (-50 ° C to + 50 ° C), (-30 ° C to + 80 ° C), or the like.
In the present invention, the pump drive by the CPU 319 program by the ROM 320 can be performed. The fluctuation of the pressure increase process when the pressure is increased, the phase modulation of the pump drive, the fluctuation of the pressure increase process predicted in advance, and the tube It can be arbitrarily changed by a program in consideration of interference associated with the round trip of the road. From these, various specification changes such as strict measurement specifications such as measurement environment and measurement area, and characteristics as a measurement device can be easily performed by replacing the ROM.
In general, it has been reported that when sound propagates through a thin tube, the sound attenuation differs depending on the material of the tube wall. If the speed u of the vibrating sound source and the force f to vibrate the sound source are given, Zm = f / u is the mechanical impedance of the sound source machine, which is also referred to as radiation impedance. Part of the energy is emitted as sound, but part is consumed as vibration energy. The real part of the radiation impedance is related to the radiation power.
Where a certain S ₁ To S ₂ Consider a model that assumes a change in the pipe cross-sectional area that changes to. This model is shown in FIG. At this time, S showing the cross-sectional area change ₁ / S ₂ Assuming = m, when air vibration (sound) of a specific frequency propagates through the tube as shown in FIG. 26, there is a change in impedance such as a cross-sectional change, a resonator, and a pore leading to the outside. It is known that a part of the sound is reflected and, as a point Gn in FIG. 26, as a result, the propagation of a specific frequency is reduced and converged (Experimental Physics Account 9 Sound and Vibration 10 The first edition of the first day of the month was issued. Kyoritsu Publishing, p. 37-46).
Further, as shown in Equation 1, the differential pressure gauge 54 has a specific detectable frequency depending on the sound pressure and frequency characteristics that can respond.

α: Damping constant
c: speed of sound [m]
R: radius of ridge
f: Force that vibrates the sound source
At this time, when the length of the tube is L, when one end is closed, U ₂ = 0, which is expressed by Equation 2.

p: Sound pressure
ρ: Density
j: Complex number
k: coefficient
U: Volume velocity
c: speed of sound
S in FIG. ₂ Is closed at the right end ₂ , U on the left ₁ As shown in FIG. 27, a straight pipe having the same diameter as the straight pipe having the pipe diameter obtained from the average of the two pipes is assumed. p ₁ , P ₂ Is the pressure at each cross-section. U ₂ When is the end, U ₂ Since = 0, Equation 3 is obtained.

From Equation 3, it can be seen that the sound pressure is inversely proportional to the volume velocity.
Therefore, from the air vibration characteristics (acoustic characteristics) of the pipe used with the highest sensitivity by the differential pressure sensor of this device, the approximate calculation result obtained from the total length of the tube of this measurement device and the sound at the Gn point described above from the actual measurement result. The distance from the pressure start point to the differential pressure sensor is obtained, and the position of the convergence point Gn can be made to coincide with the differential pressure sensor by changing the drive of the air supply pump that is the sound pressure source. Result errors can be reduced. This method is a method in which the method of the active filter is replaced with the pump drive of the drive source.
In addition, in this volume replacement method, when evaluating vibration characteristics by replacing with air vibration, basic pre-measurement on vibration characteristics evaluation of pipe material is performed, and frequency characteristics are used as a reference for evaluating vibration characteristics. Use as material. In this case, the most adverse element in the prediction calculation of the vibration period is a highly elastic pipe. Therefore, in this embodiment, in order to prevent adverse effects on the reflection of the prediction calculation due to the elasticity of the pipe used, the highly heat-resistant vinyl chloride has a low property change due to temperature dependence of elasticity such as thermal softening and curing due to temperature. It is preferable to use a tube (−50 ° C. to + 50 ° C.) or the like.
As a means for boosting, the level of boosting is likely to be generated in proportion to the sound pressure, so that the curve P in FIG. ₂ It changes as follows. As shown in FIG. 28, the air supply device is programmed to operate (operating control) so as to change the trapezoidal pressure as shown in FIG. 28, and the differential pressure between the horizontal sections where the sound pressure change is low, for example, sections Ta to Tb. It is desirable to make measurements. Further, there are a plurality of Gn, which are the aforementioned specific vibration wave attenuating portions, in the section of Ta to Tb in FIG. Therefore, by measuring with this Gn, the error corresponding to the wave height of the sound pressure can be reduced.
When the pump drive is programmed as shown in FIG. 28, the total change amount of the feed waveform and the return waveform is a constant amount in the sections Ta to Tb as shown in FIG. It is suppressed. Therefore, as a result, P in FIG. ₂ The result of the correction curve above is obtained.
The threshold value on the horizontal axis used in FIG. 29 is differential pressure integration, that is, | feed pressure time integration |-| return pressure time integration |. Therefore, the time used for each time integration is set as a threshold value. Although this may be considered in the same way as time, it is shown as a threshold value for easy comparison with respect to the time integration of the differential pressure.
Similarly, when the program operation is performed as shown in FIG. 30, the feed waveform is a curve having two steady portions shown above, and the return waveform is a lower curve showing a case where the flat portion of the steady portion disappears. think of. Even in this case, as shown in FIG. 31, when the threshold value of the differential pressure gauge fluctuates, the sections Ta to Tb show a constant value. Therefore, if the measurement is performed in this section, the differential pressure measurement affects the air vibration. It is hard to receive.
However, in the conventional boosting method as shown in FIG. 32, when the operating speed of the air supply device is increased in order to shorten the boosting time simply, the error of the differential pressure result increases as shown in FIG. Therefore, the differential pressure measurement result varies with time, and it is difficult to obtain an accurate measurement result.
Further, FIGS. 34 (3-1) and (3-2) are diagrams showing boosting results by simply boosting the driving method by only turning the driving method on and off for a certain period of time. The differential pressure results are shown in FIG. They are shown as (3-1)-(3-5) and (3-2)-(3-6) in FIG. Further, the boosting results such as (3-3) and (3-4) in FIG. 3 are as shown in (3-3)-(3-7) and (3-4)-(3-8) in FIG. Similarly, even if a specific time is designated as time elapses, it is difficult to obtain a constant differential pressure result in the measurement section. Even if the pressure increase method is simply increased in one form as shown in FIG. 36 and the pressure difference is measured in a section where the pressure increase process follows a constant change, the time is similarly measured as in the pressure difference result of FIG. Even if a specific time is specified with the passage of time, it is difficult to obtain a constant differential pressure result in the measurement section.
Therefore, as shown in FIG. 28, the air supply device is programmed so as to follow the trapezoidal pressure increase process, and the differential pressure measurement result is obtained as the measurement result at the time corresponding to the measurement section Ta to Tb where the sound pressure change in the air passage is low. As shown in FIG. 29, the differential pressure display is measured in the interval Ta to Tb shown in FIG. 29, which shows the result of measurement in a specific time interval by the combination of the program operation of the air supply device and the timer AND output of the contact information of the differential pressure gauge. It can be displayed as a measurement result with a small accurate error.
In addition, considering the voltage change characteristics of the power supply circuit and the battery, the program operation is performed so as to step-up in a trapezoidal shape as shown in FIG. You may make it perform the pressure | voltage rise operation and pressure reduction operation suitable for each volume difference to test. The result is shown in FIG.
Further, FIG. 38 shows an error between the actual pressure increase amount and the pressure increase amount that can be detected by the differential pressure sensor in the course of the pressure increase. When the correction to the active air vibration is ideally performed, the error amount that can be detected by the differential pressure sensor can be ensured in the entire region from the start of measurement as shown in FIG.
However, when assuming an outdoor environment in which temperature and humidity change are significant for boosting, it is preferable to wait until the time near the top of FIG. 38 to obtain a strict airtight inspection result. This is a necessary method for showing the result of the airtight assumption in a short total measurement time interval.
Fine adjustment of basic air supply speed and air supply amount in advance at the measurement preparation stage before measurement. This adjustment is determined by the pipeline characteristics inside the measuring device itself in the state of the minimum air supply amount and the air supply speed necessary for performing the zero point adjustment without connecting the airtight connection pipe line 18. This is a fine adjustment of the drive modulation rhythm of the source motor or electromagnet. By this zero point adjustment, the numerical value displayed on the differential pressure gauge becomes an error of the airtightness measuring apparatus. In addition, there is a basic starting point at the start of measurement necessary for considering the path 18 leading to the box where the airtightness inspection is performed and the air vibration characteristics of the box set with the water vapor movement control device. It is determined.
Next, the adjustment of the air supply speed and the air supply amount of the air supply device performed for the purpose of shortening the total measurement time in accordance with the volume of the box for performing the airtightness inspection to be measured is performed by the rotary switch 207 in FIG. With this selection, each selection program for the adjustment method is called from the ROM. By selecting this rotary switch 207, it is possible to shorten the time required for performing the most airtightness inspection, and it is possible to reduce the change in the pressure rise that occurs in the reciprocating path of the measurement path in consideration of the air supply amount or the air supply speed. A program for driving the driving source to be minimized is called from the ROM.
The main purpose of this apparatus is to conduct an airtight inspection of a box equipped with a water vapor movement control device, which is composed of at least two moisture permeable waterproof membranes.
However, as another application example, it can also be used for a confidential inspection of medical equipment, and a simple airtight inspection with a small amount of pressurization and a small burden on the airtight seal can be performed. Also. For example, when this apparatus is used in a contaminated area of a serious infectious disease or used in a hazardous area, disinfection is necessary for complete maintenance of the apparatus. In particular, in this apparatus, it is necessary to take measures against contamination in the silica gel casing 5 and the ventilation pipe used to keep the water vapor concentration of the air passing through the apparatus at a low concentration. In the silica gel casing 5, since a porous adsorbent or a highly adsorbent substance is accommodated, the concentration of foreign matter in the outside air can be considered.
The silica gel casing 5 is detachable and can be discarded. However, after use, the socket for housing the casing 5, the pressure safety valve V 1, the ventilation pipe, the inside of the deer diaphragm pump 43, the inside of the pressure intake casing 1, the check valve 17, the inside of the water receiver 2, and the outside Etc. are considered to be contaminated. Furthermore, there is a possibility that the inside of the main body casing 57 is also contaminated.
In general, as a method for disinfecting thermoplastic materials, it is necessary to devise a method in which an ethylene oxide gas sterilization method can be used with this apparatus. In the ethylene oxide gas sterilization method, the object to be sterilized is usually stored together with ethylene oxide gas in a shielded heat-sealed bag. At 27 ° C, spore-forming bacteria are included for 16 hours or more, and at room temperature below that, 24 hours or more By storing it as it is, sterilization is completely established. In addition, it is known that factors affecting the sterilization conditions include the material and dimensions of the item to be sterilized and the condition of the bag being put into the seal bag (Infection Prevention Measures in Dental Clinic 1983, October 1983) 25th, 1st edition, 2nd edition is published. Therefore, at least two removable vent holes may be provided in the main body casing 57 to promote the diffusion of ethylene oxide gas in the casing 57 when performing the ethylene oxide gas sterilization method. In order to sterilize the pipe line, the pump 43 must be in a driving state, so that the power line is led out from the heat seal package for sterilization and tightly sealed so that ethylene oxide gas does not leak by taping. In the package filled with the heat seal ethylene oxide gas filled in the heat seal package, the airtightness inspection device is intermittently driven to disinfect the inside of the pipeline or the complicated structure. And complete sterilization. A drive switch or program suitable for disinfection and sterilization inside the apparatus, for example, a program that can change the drive speed may be set. At this time, it is said to be the optimum humidity at which it is easy to obtain a sterilization and sterilizing effect of the air passage such as a pipe inside the apparatus in consideration of the reduction of the air resistance that changes when the silica gel casing that becomes the air resistance is removed. A program operation for optimizing the disinfection sterilization operation may be performed with the ventilation amount under the sterilization operation in the sterilization / disinfection package so as to easily become 30 to 50% RH.

As described above, according to the measurement method of the present invention, the pump drive adjustment is performed based on the resonance of the air vibration to be sent and the reflected wave in accordance with the volume of the airtightness inspection to be measured from the measurement start time. The purpose of this is to stabilize the pressure fluctuation, and as a result of this adjustment, the reduction of measurement error increases the sensitivity of the airtightness inspection, and the airtightness inspection can be completed with a smaller amount of time elapsed from the start of measurement, Further, it is possible to detect a smaller hermetic failure state.
In addition, shortening the measurement time leads to ease of use, and improves the safe operation especially at work in high places. In addition, the use of ROM can cope with deterioration of the motor and changes in the differential pressure gauge threshold over time, such as differences in altitude, temperature differences, and humidity differences in the measurement environment. Can be fine-tuned in advance.

Claims (11)

One vent is communicated with the inside of the box that is the object to be inspected, the other vent is opened to the atmosphere, and a plurality of small chambers are defined by a film body having air permeability and moisture permeability between the two vents. An airtightness inspection device is connected to the box that is formed and has a water vapor movement control device that controls the movement of water vapor between both vents,
This airtightness inspection device is based on a pressure intake casing in which a pressure buffering space is formed, and an air supply device formed by connecting a diaphragm pump to an electric motor or an electromagnet with a tip connected to the pressure intake casing. An upstream air supply path having an end connected thereto, and a downstream air supply path in which a metal fitting for connection to the box body is provided at the tip, and a base end connected to the pressure intake casing, and the upstream air supply path A differential pressure gauge connected between the outward pressure intake path branched from the pressure intake casing and the return pressure intake path branched from the pressure intake casing,
The upstream air supply passage and the downstream air supply passage are connected to the pressure intake casing in a state of being arranged in a straight line, and the distal end of the upstream pipe portion of the upstream air supply passage has a downstream air supply. Passing through the pressure buffering space so as to open inside the base end of the passage and inserted into the base end of the downstream air supply passage, and the return side pressure intake passage includes the upstream air supply passage and the downstream side The air supply passage is branched so as to have an angle with respect to the straight line where the air supply passage is arranged, and is connected to the pressure intake casing, and the outward gas supplied from the air supply device is supplied downstream from the upstream air supply passage. Air is sent to the inside of the box through the path, and the return side gas reflected from the inside of the box is taken from the downstream side air supply path through the pressure buffering space to the differential pressure gauge from the return side pressure intake path. The pressure of the return-side gas taken into the differential pressure gauge from the return-side pressure intake path, and the differential pressure gauge from the forward-side pressure intake path Is formed so as to measure a differential pressure between the pressure of 往側 gas,
In the measurement preparation stage before the measurement by the differential pressure gauge, a measurement method in which the basic air supply speed and the air supply amount by the air supply device are finely adjusted,
By combining the program operation of the air supply device and the timer AND output of the contact information of the differential pressure gauge so as to obtain a differential pressure measurement as a measurement result at the time corresponding to the measurement with a low sound pressure change in the air passage. The pressure change of the air supply device so that the pressure display can be displayed as a measurement result with small accuracy error measured in the measurement section where the sound pressure change in the ventilation passage is low as a result of measuring in a specific time section A measuring method in an airtight inspection device for a box provided with a water vapor movement control device, characterized in that the operation is controlled so that the amount follows a trapezoidal pressure increase process. The measurement method according to claim 1, wherein the box body is provided with a water vapor movement control device in which a water receiver is provided at a tip of the downstream air supply path to receive water flowing down from the inside of the box body. Measuring method in inspection equipment. 3. The measurement method according to claim 1, wherein the return side pressure intake passage is branched at right angles to a straight line in which the upstream air supply passage and the downstream air supply passage are arranged. A measuring method in a box airtightness inspection device provided with a water vapor movement control device connected to the container. 4. The measuring method according to claim 1, 2 or 3, wherein the airtightness inspection device for a box includes a water vapor movement control device provided with an air drying means on the intake side of the air supply device. 5. The measuring method according to claim 1 or 2, or 3 or 4 in a box airtightness inspection device comprising a water vapor movement control device in which a pressure safety valve is provided in an air passage branched from the upstream air supply passage. . The measurement method according to claim 5, wherein
The pressure safety valve has one end connected to the upstream air supply passage and the other end vent opening into the valve chamber, and one end communicating with the atmosphere and the other exhaust outlet at the valve chamber. An exhaust passage opened in the cylinder is formed in the cylinder in the axial direction of the cylinder,
An iron-containing sphere as a valve body is accommodated in the valve chamber, and the iron-containing sphere is held in a state of being in close contact with a valve seat that is normally formed so as to surround the vent hole. A pressure safety valve formed to connect the ventilation path and the exhaust path away from the valve seat when an abnormal pressure is generated in the device to be used;
A magnet is used as means for holding the iron-containing sphere in close contact with the valve seat,
This magnet is arranged in a state in which the iron-containing sphere is in close contact with the valve seat, spaced apart from the iron-containing sphere and the valve seat,
Airtight inspection of a box provided with a water vapor movement control device in which the magnetic force for adsorbing and holding the iron-containing sphere on the valve seat is adjusted to the operation threshold required for the operation of the device to be used. Measurement method in the apparatus. The measurement method according to claim 5 or 6, wherein the magnet is moved in the axial direction of the cylinder to provide a separation adjusting means for adjusting a separation distance between the magnet, the iron-containing sphere, and the valve seat. A measuring method in an airtight inspection device for a box provided with a movement control device. 8. The measuring method according to claim 5, 6 or 7, wherein the box airtightness inspection device includes a water vapor movement control device provided with a spacer for adjusting a mounting position of the magnet. The measurement method according to any one of claims 5 to 8, further comprising a water vapor movement control device in which a recess for increasing a moving distance of the iron-containing sphere is formed on an inner surface of the exhaust port opened in the valve chamber. Measuring method in an airtight inspection device for a box. In the measuring method according to any one of claims 5 to 9, in order to prevent the iron-containing sphere separated from the valve seat from blocking the exhaust port, a ventilation groove communicating with the exhaust path is formed on the inner surface of the exhaust port. The measuring method in the airtight test | inspection apparatus of the box provided with the water vapor | steam movement control apparatus currently formed. In the measuring method in any one of Claims 1-10, the airtight of the box provided with the water vapor movement control apparatus in which the upstream air supply path and the downstream air supply path are formed with the high heat resistant vinyl chloride tube Measuring method in inspection equipment.

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