JP4154474B2 - Actuator element manufacturing method - Google Patents

Description

【図面の簡単な説明】
【図１】本発明に係る製造方法で得られたアクチュエータ素子の電圧無印加状態の概略断面図である。
【図２】本発明に係る製造方法で得られたアクチュエータ素子の電圧印加状態の概要断面図である。
【図３】本発明に係る製造方法で得られたアクチュエータ素子の応用例を示す概要図である。
【図４】図３の要部を拡大して示す模式図である。
【図５】本発明に係る製造方法で得られたさらに別のアクチュエータ素子の実施例を示す概略図である。
【符号の説明】
１ アクチュエータ素子
２ イオン交換樹脂成形品
３，３ａ，３ｂ 電極
４ ４ａ，４ｂ リード線
５ 電源[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for manufacturing an actuator element, and more particularly to a method for manufacturing an actuator element for bending and deforming an ion exchange resin molded product.
[0002]
[Prior art]
In fields such as medical equipment, industrial robots, and micromachines, there is an increasing need for small, lightweight, and flexible actuators.
[0003]
As the actuator is miniaturized in this way, friction and viscous force become more dominant than inertial force. Therefore, a mechanism that uses inertial force, such as a motor or engine, to convert energy into motion is used as power for the microminiature actuator. It was difficult. For this reason, electrostatic attractive force type, piezoelectric type, ultrasonic type, shape memory alloy type, polymer expansion / contraction type, etc. have been proposed as the operating principle of the micro actuator.
[0004]
An electrostatic attraction type actuator operates by attracting an electrode plate, rod, or the like to a counter electrode. For example, the electrode is bent by applying a voltage of about 100 V to a counter electrode separated by several tens of μm. It has been known. Piezoelectric actuators operate by applying a voltage of several volts to a ceramic piezoelectric element such as barium titanate and expanding and contracting the element, and those capable of controlling displacement in nm units are known. The ultrasonic actuator is operated by combining ultrasonic vibration generated by a piezoelectric element or the like and a frictional force or causing a shift. The shape memory alloy actuator is operated by a change in temperature by utilizing the fact that the shape of the shape memory alloy changes greatly depending on the temperature. A polymer telescopic actuator operates by utilizing the fact that a polymer expands and contracts due to a change in temperature or pH or a change in the concentration of a surrounding chemical substance.
[0005]
However, each of these ultra-small actuators has problems such as limited operating environment, insufficient response, complicated structure, and lack of flexibility. . For example, in order to operate a polymer telescopic actuator, it is necessary to replace the solution in contact with the polymer with a solution containing other salts, which makes it difficult to use for applications that require a small and fast response. Met.
[0006]
On the other hand, as an actuator element that is easy to miniaturize, has a quick response, and operates with low power, it consists of an ion exchange membrane and an electrode joined on the surface of the ion exchange membrane. Has proposed an actuator element that causes an ion exchange membrane to bend and deform by applying a potential difference to the ion exchange membrane (see Japanese Patent Application Laid-Open No. 4-275078).
[0007]
[Problems to be solved by the invention]
This actuator element is composed of an ion exchange resin film and a metal electrode joined to the surface of the ion exchange resin film in an insulated state. In the water-containing state of the ion exchange resin film, a potential difference is applied between the metal electrodes to form an ion exchange resin molded product. It is characterized by causing bending and deformation.
[0008]
In such an actuator element, an electrode is formed on the surface of an ion exchange resin molded product by a method such as chemical plating, electroplating, vacuum deposition, sputtering, coating, pressure bonding, or welding.
[0009]
For example, in chemical plating, after the surface of the ion exchange membrane is etched, a plating catalyst is carried and immersed in a plating bath to perform plating on the surface of the ion exchange membrane to form an electrode.
[0010]
However, the actuator element in which the electrode is formed by the above method cannot be said to have a sufficient amount of displacement. For this reason, it has been desired to generate an actuator element that can generate a larger displacement amount and that has a quick response.
[0011]
The present invention is intended to solve the problems associated with the prior art as described above, and has a large displacement and displacement force, a simple structure, easy miniaturization, quick response, and flexibility. It is an object of the present invention to provide a method for manufacturing such an actuator element.
[0012]
[Means for Solving the Problems]
The present invention was invented in order to achieve the problems and objects in the prior art as described above,
An ion exchange resin molded article and a metal electrode formed in an insulated state on the surface of the ion exchange resin molded article. In a water-containing state of the ion exchange resin molded article, an ion is applied by applying a potential difference between the metal electrodes. When manufacturing an actuator element that causes bending and deformation of an exchange resin molded product,
(i) After adsorbing the metal complex in an aqueous solution on the ion exchange resin molded article,
(ii) The metal complex adsorbed on the ion exchange resin molded product is reduced, and a metal is deposited on the surface of the ion exchange resin molded product to form a metal electrode. By forming the metal electrode with such a configuration, it is possible to obtain an actuator element that has a simple structure, can be easily downsized, has a quick response, and can generate a large amount of displacement.
[0013]
Further, as the metal complex, a gold or platinum complex is preferably used, and when a gold or platinum complex is used as the metal complex, an actuator element having a large displacement can be manufactured.
[0014]
Furthermore, in the present invention, it is preferable that after forming the metal electrode, the counter ion of the ion exchange resin molded product is exchanged with one or more cations selected from Li ⁺ , Na ⁺ and Cu ^2+. If the cation is exchanged, the displacement amount of the obtained actuator element can be further increased.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
1 and 2 are schematic cross-sectional views showing an optimum embodiment of an actuator element obtained by the manufacturing method according to the present invention. In this embodiment, the actuator element 1 includes an ion exchange resin molded product 2 having an elongated rectangular flat plate shape, and electrodes 3a and 3b formed in an insulated state on the surface of the ion exchange resin molded product 2, and ion exchange is performed. In the water-containing state of the resin molded product 2, the ion exchange resin molded product is bent and deformed by applying a potential difference between the electrodes.
[0016]
One end of a pair of lead wires 4a and 4b is electrically connected to the electrodes 3a and 3b, respectively, and each lead wire 4a and 4b is connected to a power source 5.
[0017]
The ion exchange resin molded product 2 is not limited to the rectangular flat plate shape, but may be a film shape, a columnar shape, a cylindrical shape, or the like.
Examples of the ion exchange resin constituting the ion exchange resin molded product 2 include anion exchange resins, cation exchange resins, and both ion exchange resins. Among these, the cation exchange resin is preferably used because the displacement amount of the actuator element can be increased.
[0018]
Examples of such cation exchange resins include those in which functional groups such as sulfonic acid groups and carboxyl groups are introduced into polyethylene, polystyrene, fluororesins, and the like. A cation exchange resin having a functional group introduced therein is preferred.
[0019]
Further, such a cation exchange resin has an ion exchange capacity of 0.8 to 2.2 meq / g, preferably 1.4 to 1.8 meq / g. When a cation exchange resin having such an ion exchange capacity is used, the displacement amount of the actuator element can be further increased.
[0020]
In the present invention, after the metal complex is adsorbed on the ion exchange resin molded article in an aqueous solution, the metal complex adsorbed on the ion exchange resin molded article is reduced with a reducing agent, and the metal is adsorbed on the surface of the ion exchange resin molded article. To form a metal electrode.
[0021]
As such a metal complex, a gold complex, a platinum complex, a palladium complex, a rhodium complex, a ruthenium complex, or the like is used. Among these, a gold complex and a platinum complex are particularly preferable because the displacement of the actuator element can be increased.
[0022]
Adsorption of these metal complexes onto an ion exchange resin molded product is performed by immersing the ion exchange resin molded product in an aqueous solution containing the metal complex.
Further, such reduction of the metal complex is performed by immersing the ion exchange resin molded article on which the metal complex is adsorbed in an aqueous solution containing a reducing agent.
[0023]
Examples of the reducing agent include sodium sulfite, hydroxylamine hydrochloride, hydrazine, and potassium borohydride, although depending on the type of metal complex used. Moreover, when reducing a metal complex, you may add an acid or an alkali as needed.
[0024]
When the metal complex adsorbed on the ion exchange resin molded product is reduced in this way, metal is deposited on the surface of the ion exchange resin molded product, and a metal electrode is formed.
In this invention, when forming a metal electrode, you may roughen the surface of the ion exchange resin molding used. Examples of the roughening treatment on the film surface include sand blast treatment and sand paper treatment. The degree of surface roughening may be such that the surface layer is scraped.
[0025]
By performing such roughening treatment, the contact area between the surface of the ion-exchange resin molded product and the electrode formed later can be increased, and the displacement of the actuator element can be increased.
[0026]
In the present invention, the following treatment may be applied to the ion exchange resin molded product to be used.
(1) Boil the ion exchange resin molded product in hot water.
[0027]
(2) Hydrochloric acid treatment The ion-exchange resin molded product is held in about 25 volume% dilute hydrochloric acid.
(3) NaOH treatment The ion exchange resin molded product is held in an aqueous sodium hydroxide solution of about 0.1 N.
[0028]
(4) The alcohol-treated ion exchange resin molded product is immersed in an alcohol such as methanol or ethanol.
[0029]
(5) Autoclave treatment The ion exchange resin molded product is treated at 110 to 150 ° C in an autoclave.
[0030]
Reduction of the metal complex adsorbed on the ion-exchange resin molded product causes the deposition of metal from the surface of the ion-exchange resin molded product where the metal complex and the reducing agent come into contact, and then the metal complex inside the membrane is near the membrane surface (deposition). It is thought that the metal is precipitated by moving to the metal). In addition, since the metal deposits are deposited not only on the surface of the ion exchange resin molded product but also inside the surface, the contact area between the ion exchange resin molded product and the metal electrode is larger than that of the conventional chemical plating method. It is thought that it is growing. For this reason, the actuator element obtained by the present invention has a larger displacement amount of the element than the conventional actuator element.
[0031]
The ion exchange resin molded article after electrode formation is usually washed with pure water to remove the metal complex and the reducing agent that have not been precipitated. Insulation between the electrodes can be performed by cutting an end portion of the ion exchange resin molded article on which the metal electrode is formed. In addition, it is possible to insulate between the electrodes by irradiating the ion-exchange resin molded product on which the metal electrodes are formed with laser light or an electron beam to cut off part of the metal electrodes and providing an insulating band between the electrodes. .
[0032]
Further, the ion exchange resin molded product after electrode formation may be subjected to the treatments (1) to (5).
Furthermore, an additional electrode layer may be provided on the formed electrode. The additional electrode layer can be formed by a method such as chemical plating, electroplating, vacuum deposition, sputtering, coating, pressure bonding, or welding. Such an additional electrode layer may be the same as or different from the metal layer formed on the surface of the ion exchange resin molded product.
[0033]
Furthermore, in the ion-exchange resin molded article on which the electrode is formed, the counter ion may be exchanged with Li ⁺ , Na ⁺ , Cu ²⁺ , H ⁺ , Ca ²⁺ , Fe ³⁺ , Mg ^2+, or the like. . Among these ions, it is particularly preferable that they are exchanged for Li ⁺ , Na ⁺ or Cu ²⁺ . Such exchange of the counter ions can be performed by immersing the ion exchange resin molded article on which the electrode is formed in an aqueous solution such as LiOH or NaOH.
[0034]
When the actuator element thus obtained is operated, the ion exchange membrane needs to be in a water-containing state. Here, the water-containing state means that the actuator operates even in water or in high humidity air.
[0035]
The operating principle of such an actuator element is that when a potential difference is applied between the surfaces of the ion exchange resin molded product in an insulated state, + ions 4 in the ion exchange resin molded product move to the cathode side as shown in FIG. It is presumed that a difference in water content can be made between the anode side and the cathode side because water molecules move in the film accompanying the ions. Therefore, it is considered that the ion exchange resin molded product is curved by swelling when the water content increases and contracting when the water content decreases.
[0036]
The actuator element thus obtained can obtain a displacement of about 0.5 to 3 times the element length within a few seconds when a direct voltage of 0.1 to 3 V is applied between the electrodes. Such an actuator element can act flexibly in water.
[0037]
An application example using such an actuator element is a derivative shown in FIG.
In this application example, the guide wire 11 as a derivative is composed of an elongated linear member 12 made of, for example, a synthetic resin or stainless steel tube, and an actuator element 13 joined to the tip of the linear member 12. .
[0038]
The actuator 13 has a pair of electrodes formed by the method according to the present invention on both surfaces of a slightly elongated rectangular flat plate-shaped ion exchange resin molded product 14, and by applying a voltage to the electrodes 15a and 15b, The actuator element 13 is curved in two directions.
[0039]
One end of each of the pair of lead wires 16a and 16b is electrically joined to each of the electrodes 15a and 15b, and each of the lead wires 16a and 16b is located inside the linear member 12. The wire member 12 extends over the entire length, and the other ends of the lead wires 16 a and 16 b are connected to the operation control unit 17.
[0040]
The operation control unit 17 is provided with an operation lever 18 that can be switched. When the operation lever 18 is operated, a power is supplied via a double pole double throw switch 19 built in the operation control unit 17. The electrodes of the current flowing from 20 to the pair of lead wires 16a and 16b are switched.
[0041]
That is, in FIG. 4, when the two-pole double-throw switch 19 is in the position indicated by the solid line, one lead wire 16a is connected to the + electrode, and the other lead wire 16b is connected to the-electrode. When the switch 19 is switched from the neutral position as indicated by a two-dot chain line in accordance with the operation of the operation lever 18 of the operation control unit 17, this time, on the contrary, one lead wire 16a becomes the negative electrode and the other lead The line 16b is connected to the + electrode.
[0042]
Thus, the actuator element 1 can be arbitrarily and positively deformed by operating the anode and the cathode.
In addition, according to the manufacturing method of the present invention, a cylindrical actuator element 40 as shown in FIG. 5 can be produced.
[0043]
In such a cylindrical actuator element 40, first, the metal complex is adsorbed to the cylindrical ion exchange resin molded product 41 by the method as described above, and the metal complex is reduced by a reducing agent. A metal is deposited on the surface of the molded product 41 to form a metal layer.
[0044]
Next, the surface of the cylindrical ion exchange resin molded product 41 having the metal layer formed on the outer surface thereof is irradiated with laser light from a laser processing apparatus, so that the metal layer in the irradiated portion is removed and the groove-shaped An insulating band 42 and a plurality of mutually electrically insulated metal electrodes 43a, 43b, 43c, 43d are formed.
[0045]
In the actuator element shown in FIG. 5, one end of each of the lead wires 44a, 44b, 44c, and 44d is electrically connected to each of the metal electrodes 43a, 43b, 43c, and 43d, and the ion exchange resin molded product 41 is sandwiched therebetween. By applying a voltage to the opposing electrodes 43a and 43c, 43b and 43d, it is possible to bend in four directions and to rotate by combining the directions of the bends. Such a metal electrode may be provided on the inner peripheral surface of the ion exchange resin molded product.
[0046]
【The invention's effect】
Since the present invention is configured as described above, it is possible to obtain an actuator element that has a simple structure, can be easily downsized, has a quick response, has a large amount of displacement, and can be operated with low power.
[0047]
Therefore, when the actuator element according to the present invention is joined to the distal end portion of the guide member body of the microdevice, the distal end portion of the guide member body can be arbitrarily and actively curved (deformed) by the operation of the operation control unit. It is possible to improve the guidance performance of microsurgery medical instruments such as scissors, forceps, snare, laser knife, spatula, etc., various sensors, tools, etc. connected to the target site in any direction. The operation can be performed quickly and easily without requiring skill.
[0048]
Therefore, tweezers, scissors, forceps, snare, laser knife, spatula, clip, etc. in microsurgery technology such as eyeball surgery, laparoscopic surgery, microvascular suture surgery, etc. If applied to this medical device, the pain given to the patient at the time of examination and treatment can be alleviated as much as possible, and the physical and mental burden on the patient can be reduced.
[0049]
In addition, such microdevices and micromachines equipped with such microdevices can be used for various sensors, repair tools, etc. for inspecting and repairing the piping system of engine systems such as power generation facilities, aircraft engines, etc. If it is applied, the repair work can be performed reliably without requiring time and effort.
[0050]
In addition to the above, the actuator element according to the present invention includes a health device such as a micro pump using high-frequency vibration, an auxiliary power massager for rehabilitation, a hygrometer, a hygrometer control device, a soft manipulator, a submersible valve, and a soft transport device. It can also be suitably used for industrial equipment such as underwater mobiles such as goldfish and seaweed, hobby supplies such as moving fishing bait and propeller fins.
[0051]
According to the present invention, an actuator element can be obtained.
[0052]
【Example】
EXAMPLES Hereinafter, although this invention is demonstrated based on an Example, this invention is not limited to these Examples at all.
[0053]
[Example 1]
Thickness 0.2mm fluororesin-based ion exchange resin molding (manufactured by Du Pont; Naf i on 117, ion exchange capacity 0.9 meq / g), and was sandblasted with alumina particles of No. # 800, the surface of the molded article Roughening was performed. The surface-roughened ion exchange resin molded product is subjected to ultrasonic cleaning to remove sandblast particles and other dirt, then boiled in 25% by volume hydrochloric acid aqueous solution for 30 minutes, and further boiled in pure water for 30 minutes. The hydrochloric acid was removed.
[0054]
The ion-exchange resin molded product after the boiling treatment was immersed in an aqueous platinum / amine complex solution for 6 hours to adsorb the platinum / amine complex in the molded product. Then, it was immersed in 40-65 degreeC sodium borohydride aqueous solution for 5 hours, platinum / amine complex was reduced, and platinum was deposited on the surface of the ion exchange resin molded article.
[0055]
The ion-exchange resin molded article with platinum deposited on the surface is further immersed in an aqueous platinum / amine complex solution, and an aqueous hydroxylamine hydrochloride solution and an aqueous hydrazine solution are added to reduce the platinum / amine complex at 40 to 60 ° C. for 5 hours. Then, platinum was grown on the surface of the ion exchange resin molded product to form an electrode.
[0056]
After forming the electrode, the ion-exchange resin molded article was boiled in a 25 volume% hydrochloric acid aqueous solution for 30 minutes, and further boiled in pure water for 30 minutes to remove hydrochloric acid.
Furthermore the ion exchange resin molded article was immersed for 6 hours in 1M LiOH aqueous solution, after exchanging the counterion Li ^+, cut into strips of 1mm wide, was produced actuator element.
[0057]
The bending displacement amount of the tip portion when a voltage of 2 V was applied to the obtained actuator element was measured using a laser displacement meter. The bending displacement was evaluated by the displacement with respect to the element length of 10 mm.
[0058]
The results are shown in Table 1.
[0059]
[Example 2]
In Example 1, an actuator element was produced in the same manner as in Example 1 except that a 1M NaOH aqueous solution was used in place of the 1M LiOH aqueous solution and the counter ion was exchanged with Na ⁺ , and the bending displacement amount was evaluated.
[0060]
The results are shown in Table 1.
[0061]
[Example 3]
In Example 1, an ion exchange resin molded article having an ion exchange capacity of 1.4 meq / g was used, and the counter ion was replaced with Na ⁺ by using a 1M NaOH aqueous solution instead of the 1M LiOH aqueous solution. Actuator elements were produced in the same manner as in Example 1, and the bending displacement amount was evaluated.
[0062]
The results are shown in Table 1.
[0063]
[Example 4]
In Example 1, an actuator element was prepared and the bending displacement amount was evaluated in the same manner as in Example 1 except that a 1M CuSO ₄ aqueous solution was used instead of the 1M LiOH aqueous solution and the counter ion was replaced with Cu ²⁺ . .
[0064]
The results are shown in Table 1.
[0065]
[Example 5]
In Example 1, the ion-exchange resin molded product after the roughening was boiled for 30 minutes in a 25% by volume aqueous hydrochloric acid solution, and further boiled for 30 minutes in pure water to remove hydrochloric acid.
[0066]
The ion exchange resin molded article was immersed in an aqueous solution of gold complex (dichlorophenanthroline gold chloride) to adsorb the gold complex in the molded article. The ion exchange resin molded article adsorbing the gold complex was immersed in an aqueous sodium sulfite solution, the gold complex was reduced at 40 to 80 ° C. for 5 hours, and gold was deposited on the surface of the ion exchange resin molded article to form an electrode.
[0067]
The ion exchange resin molded article on which the electrode was formed was immersed in 1N sulfuric acid for 30 minutes, and further immersed in pure water to remove sulfuric acid.
Further, the ion exchange resin molded product was immersed in a 1M LiOH aqueous solution for 6 hours to exchange counter ions with Li ⁺ , and then a 1 mm wide strip was cut out and connected to an electrode to produce an actuator element.
[0068]
About the obtained actuator element, the bending displacement amount was evaluated in the same manner as in Example 1.
The results are shown in Table 1.
[0069]
[Comparative Example 1]
The surface of the ion exchange resin molded product used in Example 1 was chemically plated to form a platinum electrode.
[0070]
The ion-exchange resin molded article on which the electrode was formed was immersed in a 1M LiOH aqueous solution for 6 hours in the same manner as in Example 1 and after exchanging the counter ion with Li ⁺ , a 1 mm wide strip was cut out and connected to the electrode. Thus, an actuator element was produced.
[0071]
About the obtained actuator element, the bending displacement amount was evaluated in the same manner as in Example 1.
The results are shown in Table 1.
[0072]
[Comparative Example 2]
A platinum electrode was formed on the surface of the ion-exchange resin molded product used in Example 1 by vacuum deposition of platinum.
[0073]
The ion-exchange resin molded article on which the electrode was formed was immersed in a 1M LiOH aqueous solution for 6 hours in the same manner as in Example 1 and after exchanging the counter ion with Li ⁺ , a 1 mm wide strip was cut out and connected to the electrode. Thus, an actuator element was produced.
[0074]
About the obtained actuator element, the bending displacement amount was evaluated in the same manner as in Example 1.
The results are shown in Table 1.
[0075]
[Comparative Example 3]
A platinum electrode was formed on the surface of the ion-exchange resin molded product used in Example 1 by sputtering.
[0076]
The ion-exchange resin molded article on which the electrode was formed was immersed in a 1M LiOH aqueous solution for 6 hours in the same manner as in Example 1 and after exchanging the counter ion with Li ⁺ , a 1 mm wide strip was cut out and connected to the electrode. Thus, an actuator element was produced.
[0077]
About the obtained actuator element, the bending displacement amount was evaluated in the same manner as in Example 1.
The results are shown in Table 1.
[0078]
[Comparative Example 4]
The surface of the ion exchange resin molded product used in Example 1 was coated with a conductive ink containing platinum fine particles to form a platinum electrode.
[0079]
The ion-exchange resin molded article on which the electrode was formed was immersed in a 1M LiOH aqueous solution for 6 hours in the same manner as in Example 1 and after exchanging the counter ion with Li ⁺ , a 1 mm wide strip was cut out and connected to the electrode. Thus, an actuator element was produced.
[0080]
About the obtained actuator element, the bending displacement amount was evaluated in the same manner as in Example 1.
The results are shown in Table 1.
[0081]
[Example 6]
In Example 1, an actuator element was produced in the same manner as in Example 1 except that a 1M HCl aqueous solution was used instead of the 1M LiOH aqueous solution and the counter ion was exchanged with H ⁺ , and the bending displacement amount was evaluated.
[0082]
The results are shown in Table 1.
[0083]
[Example 7]
In Example 1, instead of 1M LiOH aqueous solution with a 1M CaCl ₂ solution, the counterion in the same manner as in Example 1 except for replacing the Ca ^2+, to prepare the actuator element, evaluate the bending displacement did.
[0084]
The results are shown in Table 1.
[0085]
[Example 8]
In Example 1, an actuator element was prepared and the bending displacement was evaluated in the same manner as in Example 1 except that a 1M FeCl ₃ aqueous solution was used instead of the 1M LiOH aqueous solution and the counter ion was replaced with Fe ^3+. did.
[0086]
The results are shown in Table 1.
[0087]
[Example 9]
In Example 1, an actuator element was prepared in the same manner as in Example 1 except that a 1M MgCl ₂ aqueous solution was used instead of the 1M LiOH aqueous solution and the counter ion was changed to Mg ²⁺ , and the bending displacement was evaluated. did.
[0088]
The results are shown in Table 1.
[0089]
[Example 10]
In Example 1, instead of immersing the ion exchange resin molded product in the platinum / amine complex aqueous solution, the ion exchange resin molded product was immersed in the rhodium complex aqueous solution to form a rhodium electrode. Thus, an actuator element was produced and the amount of bending displacement was evaluated.
[0090]
The results are shown in Table 1.
[0091]
[Table 1]

[Brief description of the drawings]
FIG. 1 is a schematic cross-sectional view of an actuator element obtained by a manufacturing method according to the present invention in a state in which no voltage is applied.
FIG. 2 is a schematic cross-sectional view of a voltage application state of an actuator element obtained by a manufacturing method according to the present invention.
FIG. 3 is a schematic diagram showing an application example of an actuator element obtained by the manufacturing method according to the present invention.
4 is an enlarged schematic view showing a main part of FIG. 3. FIG.
FIG. 5 is a schematic view showing an example of still another actuator element obtained by the manufacturing method according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Actuator element 2 Ion exchange resin molded product 3, 3a, 3b Electrode 4 4a, 4b Lead wire 5 Power supply

Claims (1)

An ion exchange resin molded article and a metal electrode formed in an insulated state on the surface of the ion exchange resin molded article. In the water-containing state of the ion exchange resin molded article, a potential difference is applied between the metal electrodes. In manufacturing an actuator element that causes bending and deformation in an ion exchange resin molded product,
(i) After adsorbing a gold complex or a platinum complex in an aqueous solution to an ion exchange resin molded article composed of a cation exchange resin having a sulfonic acid group introduced into a fluororesin ,
(ii) reducing the gold complex or platinum complex adsorbed on the ion exchange resin molded article with a reducing agent, and depositing gold or platinum on the surface of the ion exchange resin molded article to form a metal electrode ;
(iii) After the formation of the metal electrodes, the actuator, characterized in that the exchange of counter ions of the ion exchange resin moldings, L i ^+, to one or more cations selected from N a ⁺ and C u ²⁺ Device manufacturing method.

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