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JP4154479B2 - Magnetic head - Google Patents
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JP4154479B2 - Magnetic head - Google Patents

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Publication number
JP4154479B2
JP4154479B2 JP2002085992A JP2002085992A JP4154479B2 JP 4154479 B2 JP4154479 B2 JP 4154479B2 JP 2002085992 A JP2002085992 A JP 2002085992A JP 2002085992 A JP2002085992 A JP 2002085992A JP 4154479 B2 JP4154479 B2 JP 4154479B2
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Japan
Prior art keywords
wear
magnetic head
contact surface
sliding contact
magnetic
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JP2003281703A (en
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実雄 右田
孝章 楠木
典明 南
純 明渡
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National Institute of Advanced Industrial Science and Technology AIST
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National Institute of Advanced Industrial Science and Technology AIST
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【0001】
【発明の属する技術分野】
本発明は磁気ヘッドに関し、より詳しくは、磁気ヘッドのスペーシングロスを低減可能であり、かつ、成膜時の磁気ヘッドへの熱的負荷を低減可能な耐摩耗膜を備えた磁気ヘッドに関する。
【0002】
【従来の技術】
磁気記録媒体(以下、記録媒体という)が摺接して使用される磁気ヘッドの構成を図1に示す。磁気ヘッドAは金属製のシールドケース2を備え、シールドケース2は記録媒体が摺接する摺接面2aを有し、摺接面2aには開口2bが形成されている。シールドケース2内には磁気ギャップGを有する磁気コア5が収容され、磁気コア5の上面は開口2bにて摺接面2aを構成し、且つ磁気ギャップGが開口2b内に位置付けられている。磁気コア5には励磁コイル6及び検出コイル7が巻回され、これらコイル6,7は磁気コア5と共にシールドケース2内で樹脂部材9によりモールドされている。
【0003】
摺接面2aは、磁気コア5等が記録媒体と摺接したときに摩耗しないよう、或いは、錆びないように、全面に亘って耐摩耗層10により被覆されている。
この場合、耐摩耗層10は、摺接面への付着強度が高いこと、および耐摩耗性に優れることはもとより、記録媒体が耐摩耗層10の表面と滑らかに摺接可能なように、滑動性が良好な材料から成ることが要求される。このような材料としてはセラミックス材料があげられ、例えばアルミナ(Al23),ジルコニア(ZrO2),窒化珪素(Si34),チタニア(TiO2),部分安定化ジルコニア(PSZ),酸化クロム(Cr23)等及びこれらの混合物又は化合物が耐摩耗層10に用いられている。
【0004】
そして、これらのセラミックス材料からなる耐摩耗層10は、例えば、溶射,イオンスパッタリング法,イオンプレーティング法またはCVD法により形成され、その厚みは通常、溶射で100μm以上、他の成膜法で0.1〜5μmとされる。
【0005】
【発明が解決しようとする課題】
耐摩耗性の観点からは、溶射が好ましいが、溶射の場合、粗面化前処理等に起因する耐摩耗層10の表面粗さ不良が発生し成膜後に研磨処理を要する、成膜時に摺接面を2aを200℃程度の温度まで昇温することが必要である、および樹脂部材9上への成膜が不可能であるなど問題が多い。また、磁気ヘッドAのスペーシングロスを低減し、磁気ヘッドの特性を向上するためには、耐摩耗層10は薄いことが好ましく、溶射は不向きである。そのため、耐摩耗層10は、上記した方法のうち、イオンスパッタリング法,イオンプレーティング法またはCVD法により成膜される。しかし、これらの成膜法による耐摩耗層10は、厚みが5μmを超えると内部応力が大きくなり、クラックを生じて剥離する欠点があり、耐摩耗性の観点からは十分とは言えない。また、これらの成膜法を採用した場合、成膜条件にもよるが、耐摩耗層10と摺接面2aの間の剥離強度(付着強度)を実用に供するレベルに高めるためには、成膜時に摺接面2aを最低でも400℃の温度まで昇温することが必要である。
【0006】
しかしながら、摺接面2aの温度を高めるために磁気ヘッドAを加熱した場合、コイル6,7の素材であるコイル線の絶縁被覆が溶融して短絡し、コイル6,7がコイルとしての機能を消失したり、或いは、内部応力により樹脂部材9が歪んで磁気コア5のアライメントに狂いが生じたりして、磁気ヘッドAの特性が損なわれるという問題があった。
【0007】
また一方、上記した剥離等のコーティングトラブルを解消する手段として、特開2002−50004号は、セグメントパターンを有する耐摩耗層を開示しているが、この耐摩耗層の形成は製造工程が複雑であり、磁気ヘッドの製造コストの上昇を招くという問題があった。
本発明は、上記した問題を解決し、磁気ヘッドのスペーシングロスを低減可能であり、かつ、成膜時の磁気ヘッドへの熱的負荷を低減可能な耐摩耗膜を備えた安価な磁気ヘッドを提供することを目的とする。
【0008】
【課題を解決するための手段】
上記した目的を達成するために、本発明においては、磁気記録媒体と摺接する摺接面を有したシールドケーシングと、前記シールドケーシングに収容され、表面の一部が前記摺接面を形成する磁気コアと、前記摺接面の全域を被覆し、セラミックス材料の微粒子により成膜された耐摩耗膜とを具備し、前記磁気コアはパーマロイから成ることを特徴とする磁気ヘッドが提供される。
【0009】
前記耐摩耗膜は、厚みが1〜100μmである。そして、前記耐摩耗膜は、アルミナ系セラミックスまたはジルコニア系セラミックスから成る。
【0010】
【発明の実施の形態】
以下、図面を参照しながら本発明の磁気ヘッドを説明する。
図1は、本発明の第一の実施形態に係る磁気ヘッドBを示している。
磁気ヘッドBは、パーマロイ製の中空のシールドケース2を備えている。シールドケース2の下面は全体が開口し、シールドケース2の上面は、記録媒体が摺接する摺接面2aとなっている。摺接面2aは、開口部2bを有し、曲率半径が12mmであり、図1中に示した幅Wが11mm及び図面に垂直な方向の奥行きが8mmである。
【0011】
シールドケース2の下部には、金属製のベース3が収容されている。ベース3の下面には中空のピン4,4の基端部が接続され、ピン4,4はシールドケース2の外方へと突出している。
ベース3の上面にはパーマロイ製の磁気コア5が配置されている。磁気コア5は左右対称な2つの部材5a,5bからなり、これら部材5a,5bは下端にて互いに直接接続され、上端では所定幅の隙間を形成している。この隙間は磁気ギャップGとして機能し、非磁性材料であるBe合金製の板が介挿されている。
【0012】
磁気コア5の表面の一部であって、磁気ギャップGを含む上面は、シールドケース2の上面と略同一の曲率を有して開口2b内に位置し、記録媒体が摺接する摺接面2aをシールドケース2の上面とともに構成している。
磁気コア5はパーマロイ製であったが、センダストまたはフェライト等の磁性材料から成るものであってもよい。ただし、パーマロイ製の磁気コア5は、センダストまたはフェライトを用いた場合に比べ耐摩耗膜11の付着強度が高くなるので好ましい。
【0013】
磁気コア5の両側部には、励磁コイル6及び検出コイル7がそれぞれ巻回され、各コイル6,7はピン4,4を通じて磁気ヘッドの外部と接続される。そして、これらのコイル6,7と接触しない状態で、シールドケース2及び磁気コア5の側面の間には亜鉛合金製のホルダ8,8が配置されている。ホルダ8,8はシールドケース2内にて磁気コア5を挟持し、シールドケース2に対して磁気コア5を位置決めしている。
【0014】
そして、上記の如く配置されたベース3,ピン4,4,磁気コア5及びホルダ8,8は、シールドケース2内において、エポキシ系樹脂からなる樹脂部材9によりモールドされて固定され、樹脂部材9の一部は摺接面2aを構成している。
摺接面2aを構成する部材は、シールドケース2,磁気コア5,および樹脂部材9に限定されることはなく、磁気ヘッドの仕様に応じて適宜設定される。例えば、磁気ヘッドBにおいては、ホルダ8,8は摺接面2aに位置していなかったが、図2に示した磁気ヘッドCのように、ホルダ8,8が磁気コア5と共に摺接面2aに位置していても良い。
【0015】
ホルダ8,8の材質としては、洋白,ステンレス,真鍮,アルミ及び亜鉛合金があげられるが、磁気ヘッドCのようにホルダ8,8が摺接面2aに位置する場合、他の材料の場合に比べ耐摩耗膜11の付着強度が高くなることから亜鉛合金が好ましい。
本発明においては、上記した磁気ヘッドBの摺接面2aの全域が、セラミックス材料からなる微粒子により成膜された耐摩耗膜11で被覆されていることを特徴とする。そして、この微粒子により成膜された耐摩耗膜11は、結晶性を有する粒子が互いにランダムな方向で結合してなる多結晶膜であって、各粒子は材料に固有な自形を示さず不定形であり、かつ、結晶子サイズが0.1μm以下である。
【0016】
ここで、図1中に示した耐摩耗膜の厚みDは、磁気ヘッドのスペーシングロスを低減するために、成膜可能な範囲で薄ければ薄いほど良い。また、耐摩耗膜の厚みが厚くなると膜内の内部応力が増加し、耐摩耗膜が剥離しやすくなるので、耐摩耗膜の厚みDは1〜100μmであるのが好ましい。
また、耐摩耗膜を形成するセラミックス材料としては、硬度(耐摩耗性)や、潤滑性を考慮して、アルミナ(Al23),ジルコニア(ZrO2),窒化珪素(Si34),チタニア(TiO2),部分安定化ジルコニア(PSZ),酸化クロム(Cr23)等及びこれらの混合物又は化合物があげられるが、より高い付着強度が得られることから、アルミナ,ジルコニア及びこれらの混合物又は化合物等のアルミナ系セラミックス又はジルコニア系セラミックスが好ましい。
【0017】
上記した耐摩耗膜は、セラミックス材料の微粒子を高速で吹き付け、その衝撃力で薄膜を形成する成膜法(以下、微粒子成膜法という)により作成することができる。
この微粒子成膜法は、具体的には、機械的に粉砕またはコロイドケミカルに調整された2μm以下のセラミックス微粒子を、アルゴン(Ar),ヘリウム(He),窒素,空気等のガスにより流速100m/s以上の速度で搬送し、摺接面に吹き付け、基材に衝突すると、微粒子の持つ高い運動エネルギが粒子と基材の接触面内で局部的な加熱やメカノケミカル反応を誘起し、前記摺接面と強固な結合をする。この場合、結合に預かる以外の無駄な熱エネルギが殆ど発生せず、前記摺接面の表面温度をほとんど上げることなく真空蒸着や、スパッタリング並の緻密さと強度の薄膜を形成することができる。このような成膜方法は、特許第2963993号、特許第3015869号等に開示されている。
【0018】
かくして微粒子成膜法により得られる耐摩耗膜は、その表面の凹凸が極めて少なく滑動性が良好であるため耐摩耗性に優れ、更には、温度400℃の摺接面にイオンスパッタリング法を適用して耐摩耗膜を形成した場合に比して遜色ない緻密さと付着強度を有する。
したがって、上記した微粒子成膜法によれば、スパッタリング法,イオンプレーティング法及びCVD法の場合のように、摺接面を予め加熱して400℃以上の高温状態とする必要がない。そのため、耐摩耗膜の成膜時に磁気ヘッドへの熱的負荷が小さいので、耐摩耗膜が成膜された磁気ヘッドにあっては、コイルの絶縁被覆の溶融による絶縁破壊や、内部応力による歪みに基づく磁気コア5のアライメント不良の発生を防止することができるので、磁気ヘッドを歩留り良く製造することができる。
【0019】
そして、微粒子成膜法を適用して耐摩耗膜により被覆される摺接面2aは、成膜後に耐摩耗膜の研磨処理を省略し、磁気ヘッドの製造工程を簡略化及び低コスト化できるようになることから、JIS―B0601に規定されるRaが成膜以前に0.3μm以下に調整されているのが好ましい。
1.耐摩耗性の評価
厚み2.5μmのアルミナ系セラミックの耐摩耗膜11を摺接面2aに形成した磁気ヘッドBの摺接面2aに、1000円札を長手方向に荷重0.98N及び搬送速度500m/sにて摺接させ、摺接させた回数(パス回数)と耐摩耗膜11の摩耗深さとの関係を調べ、その結果を図3に示した。
【0020】
また、比較例として、耐摩耗膜11を備えない以外は磁気ヘッドBと同じ構造を有する磁気ヘッドを用いて、磁気ヘッドBの場合と同様に摺接回数と摺接面の摩耗深さとの関係を調べ、その結果をあわせて図3に示した。
図3から明らかなように、パス回数100万回のときに、耐摩耗膜11を備える磁気ヘッドBの摩耗深さは、1μm以下であったのに対し、耐摩耗膜11を備えない比較例の場合、0.3mmを超え、耐摩耗膜11が磁気ヘッドの耐摩耗性を向上させるのに極めて有効であることがわかる。
【0021】
2.付着強度の評価
厚み2.5μmのアルミナ系セラミックの耐摩耗膜11が摺接面2aに形成され、磁気コア5として、リードコア、およびリードコアの両側に配置されたサイドコアを含む磁気ヘッドBの摺接面2aに、1000円札を長手方向に荷重0.98N及び搬送速度500m/sにて250万回摺接させ、摺接面2aの観察を行なった結果を図4(a)に示した。
【0022】
また、磁気コアがセンダスト製であり、かつ、リードコア及びサイドコア寸法が異なる以外は磁気ヘッドBと同じ構成を有する磁気ヘッドに、厚み2.5μmの耐摩耗膜11を摺接面2aに形成し、磁気ヘッドBの場合と同じ条件で1000円札を摺接させ、摺接面2aの観察を行なった。この結果を図4(b)に示した。
【0023】
図4(a)に示したように、パーマロイ製の磁気コアを備えた磁気ヘッドBの場合、耐摩耗膜11の剥がれは認められなかったのに対し、センダスト製の磁気コアを備えた磁気ヘッドの場合、図4(b)に白い矢印で示したように耐摩耗膜11の局所的な剥離が認められた。このことから、磁気コアの材質としては、パーマロイが好ましいことがわかる。
【0024】
なお、本発明は上述した実施例に限定されることはなく、様々な変形が可能である。例えば、磁気ヘッドB,Cは一対の励磁コイル6及び検出コイル7を備えていたが、複数対備えているものであっても良いのは勿論である。
【0025】
【発明の効果】
以上説明したように、本発明の磁気ヘッドは、摺接面が微粒子により成膜された耐摩耗膜により被覆されており、この耐摩耗膜は滑動性が良好で耐摩耗性に優れ、かつ付着強度が大きい。
そして、この耐摩耗膜は厚みが1〜100μmであって、磁気ヘッドのスペーシングロスを低減可能であると共に、膜内の内部応力が抑制されて剥離しづらい。
【0026】
更には、この耐摩耗膜は、摺接面を加熱することなく成膜することができるので、成膜時に磁気ヘッドへの熱的負荷が小さく、磁気ヘッドを歩留り良く製造することができる。
【図面の簡単な説明】
【図1】本発明の一実施例に係る磁気ヘッドの断面図である。
【図2】本発明の他の実施例に係る磁気ヘッドの断面図である。
【図3】磁気ヘッドの摩耗特性図である。
【図4】耐摩耗性試験後の耐摩耗膜の観察結果である。
【符号の説明】
B,C 磁気ヘッド
2 シールドケーシング
2a 摺接面
2b 開口部
5 磁気コア
6 励磁コイル
7 検出コイル
8 ホルダ
9 樹脂部材
10 耐摩耗層
11 耐摩耗膜
G 磁気ギャップ
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a magnetic head, and more particularly, to a magnetic head including a wear-resistant film that can reduce the spacing loss of the magnetic head and can reduce the thermal load on the magnetic head during film formation.
[0002]
[Prior art]
FIG. 1 shows the configuration of a magnetic head that is used in sliding contact with a magnetic recording medium (hereinafter referred to as a recording medium). The magnetic head A includes a shield case 2 made of metal. The shield case 2 has a sliding contact surface 2a on which a recording medium slides, and an opening 2b is formed on the sliding contact surface 2a. A magnetic core 5 having a magnetic gap G is accommodated in the shield case 2, the upper surface of the magnetic core 5 forms a sliding contact surface 2a by an opening 2b, and the magnetic gap G is positioned in the opening 2b. An excitation coil 6 and a detection coil 7 are wound around the magnetic core 5, and these coils 6 and 7 are molded together with the magnetic core 5 by a resin member 9 in the shield case 2.
[0003]
The slidable contact surface 2a is covered with the wear-resistant layer 10 over the entire surface so as not to be worn or rusted when the magnetic core 5 or the like is slidably contacted with the recording medium.
In this case, the wear-resistant layer 10 slides so that the recording medium can smoothly come into sliding contact with the surface of the wear-resistant layer 10 as well as having high adhesion strength to the slide-contact surface and excellent wear resistance. It is required to be made of a material having good properties. Such materials include ceramic materials such as alumina (Al 2 O 3 ), zirconia (ZrO 2 ), silicon nitride (Si 3 N 4 ), titania (TiO 2 ), partially stabilized zirconia (PSZ), Chromium oxide (Cr 2 O 3 ) or a mixture thereof or a compound thereof is used for the wear resistant layer 10.
[0004]
The wear-resistant layer 10 made of these ceramic materials is formed by, for example, thermal spraying, ion sputtering, ion plating, or CVD, and the thickness is usually 100 μm or more by thermal spraying, and 0 by other film deposition methods. .1 to 5 μm.
[0005]
[Problems to be solved by the invention]
From the viewpoint of wear resistance, thermal spraying is preferable. However, in the case of thermal spraying, a surface roughness defect of the wear-resistant layer 10 due to the pre-roughening treatment or the like occurs, and polishing treatment is required after film formation. There are many problems such that it is necessary to raise the temperature of the contact surface 2a to a temperature of about 200 ° C. and the film formation on the resin member 9 is impossible. Further, in order to reduce the spacing loss of the magnetic head A and improve the characteristics of the magnetic head, the wear-resistant layer 10 is preferably thin and spraying is not suitable. Therefore, the abrasion resistant layer 10 is formed by an ion sputtering method, an ion plating method or a CVD method among the methods described above. However, the wear-resistant layer 10 formed by these film forming methods has a drawback that when the thickness exceeds 5 μm, the internal stress becomes large, causing cracks and peeling, which is not sufficient from the viewpoint of wear resistance. In addition, when these film forming methods are employed, although depending on the film forming conditions, in order to increase the peel strength (adhesion strength) between the wear-resistant layer 10 and the sliding contact surface 2a to a practical level, It is necessary to raise the temperature of the sliding contact surface 2a to a temperature of at least 400 ° C. during film formation.
[0006]
However, when the magnetic head A is heated to increase the temperature of the sliding contact surface 2a, the insulation of the coil wire that is the material of the coils 6 and 7 is melted and short-circuited, and the coils 6 and 7 function as a coil. There is a problem in that the characteristics of the magnetic head A are lost due to disappearance or distortion of the resin member 9 due to internal stress, resulting in a deviation in the alignment of the magnetic core 5.
[0007]
On the other hand, as a means for solving the coating trouble such as peeling described above, Japanese Patent Application Laid-Open No. 2002-50004 discloses an abrasion resistant layer having a segment pattern. There is a problem that the manufacturing cost of the magnetic head is increased.
The present invention solves the above-described problems, can reduce the spacing loss of the magnetic head, and is an inexpensive magnetic head having a wear-resistant film that can reduce the thermal load on the magnetic head during film formation. The purpose is to provide.
[0008]
[Means for Solving the Problems]
In order to achieve the above object, in the present invention, a shield casing having a sliding contact surface in sliding contact with a magnetic recording medium, and a magnetic member housed in the shield casing and part of the surface forming the sliding contact surface. There is provided a magnetic head comprising a core and a wear-resistant film that covers the entire surface of the sliding contact surface and is formed of fine particles of a ceramic material, and the magnetic core is made of permalloy .
[0009]
The wear-resistant layer has a thickness of Ru 1~100μm der. Then, the wear layer is Ru consists of alumina ceramics or zirconia ceramics.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
The magnetic head of the present invention will be described below with reference to the drawings.
FIG. 1 shows a magnetic head B according to the first embodiment of the present invention.
The magnetic head B includes a hollow shield case 2 made of permalloy. The entire lower surface of the shield case 2 is opened, and the upper surface of the shield case 2 is a slidable contact surface 2a on which the recording medium is slidably contacted. The slidable contact surface 2a has an opening 2b, a radius of curvature of 12 mm, a width W shown in FIG. 1 of 11 mm, and a depth in a direction perpendicular to the drawing of 8 mm.
[0011]
A metal base 3 is accommodated in the lower part of the shield case 2. Base ends of hollow pins 4, 4 are connected to the lower surface of the base 3, and the pins 4, 4 protrude outward from the shield case 2.
A permalloy magnetic core 5 is disposed on the upper surface of the base 3. The magnetic core 5 is composed of two symmetrical members 5a and 5b. The members 5a and 5b are directly connected to each other at the lower end, and a gap having a predetermined width is formed at the upper end. This gap functions as a magnetic gap G, and a Be alloy plate, which is a nonmagnetic material, is interposed.
[0012]
A top surface including a magnetic gap G, which is a part of the surface of the magnetic core 5, is located in the opening 2 b with substantially the same curvature as the top surface of the shield case 2, and a sliding contact surface 2 a on which the recording medium slides. Is configured together with the upper surface of the shield case 2.
The magnetic core 5 is made of permalloy, but may be made of a magnetic material such as sendust or ferrite. However, the magnetic core 5 made of permalloy is preferable because the adhesion strength of the wear resistant film 11 is higher than when Sendust or ferrite is used.
[0013]
An excitation coil 6 and a detection coil 7 are wound around both sides of the magnetic core 5, and the coils 6 and 7 are connected to the outside of the magnetic head through pins 4 and 4. And the holders 8 and 8 made from a zinc alloy are arrange | positioned between the side surfaces of the shield case 2 and the magnetic core 5 in the state which does not contact these coils 6 and 7. FIG. The holders 8, 8 hold the magnetic core 5 in the shield case 2 and position the magnetic core 5 with respect to the shield case 2.
[0014]
The base 3, the pins 4, 4, the magnetic core 5 and the holders 8, 8 arranged as described above are molded and fixed by the resin member 9 made of epoxy resin in the shield case 2. A part of the surface constitutes the sliding contact surface 2a.
The members constituting the slidable contact surface 2a are not limited to the shield case 2, the magnetic core 5, and the resin member 9, and are appropriately set according to the specifications of the magnetic head. For example, in the magnetic head B, the holders 8 and 8 are not positioned on the sliding contact surface 2a, but the holders 8 and 8 together with the magnetic core 5 are in contact with the sliding contact surface 2a as in the magnetic head C shown in FIG. May be located in
[0015]
Examples of the material of the holders 8 and 8 include white, stainless steel, brass, aluminum, and zinc alloy. When the holders 8 and 8 are positioned on the sliding contact surface 2a as in the magnetic head C, other materials are used. Zinc alloy is preferable because the adhesion strength of the wear-resistant film 11 is higher than that of.
The present invention is characterized in that the entire sliding contact surface 2a of the magnetic head B described above is covered with the wear-resistant film 11 formed of fine particles made of a ceramic material. The wear-resistant film 11 formed of the fine particles is a polycrystalline film formed by bonding crystalline particles in a random direction, and each particle does not exhibit a self-shape unique to the material and is incomplete. It has a regular shape and a crystallite size of 0.1 μm or less.
[0016]
Here, the thickness D of the wear-resistant film shown in FIG. 1 is preferably as thin as possible within a film forming range in order to reduce the spacing loss of the magnetic head. Moreover, since the internal stress in a film | membrane will increase and the abrasion-resistant film will peel easily when the thickness of an abrasion-resistant film becomes thick, it is preferable that the thickness D of an abrasion-resistant film is 1-100 micrometers.
In addition, as a ceramic material for forming the wear-resistant film, alumina (Al 2 O 3 ), zirconia (ZrO 2 ), silicon nitride (Si 3 N 4 ) are considered in consideration of hardness (wear resistance) and lubricity. , Titania (TiO 2 ), partially stabilized zirconia (PSZ), chromium oxide (Cr 2 O 3 ) and the like, and mixtures or compounds thereof, but since higher adhesion strength is obtained, alumina, zirconia and these Alumina-based ceramics or zirconia-based ceramics such as a mixture or compound of these are preferred.
[0017]
The above-described wear-resistant film can be produced by a film forming method (hereinafter referred to as a fine particle film forming method) in which fine particles of a ceramic material are sprayed at a high speed and a thin film is formed by the impact force.
Specifically, this fine particle film forming method is a method in which ceramic fine particles of 2 μm or less that are mechanically pulverized or adjusted to colloidal chemicals are flown at a flow rate of 100 m / min. When transported at a speed of s or more, sprayed onto the sliding contact surface, and collided with the substrate, the high kinetic energy of the fine particles induces local heating and mechanochemical reaction within the contact surface between the particle and the substrate, and the sliding Make a strong bond with the contact surface. In this case, wasteful thermal energy other than entrusting to bonding is hardly generated, and vacuum deposition or a thin film having the same fineness and strength as sputtering can be formed without substantially increasing the surface temperature of the sliding contact surface. Such a film forming method is disclosed in Japanese Patent No. 2963993, Japanese Patent No. 3015869, and the like.
[0018]
Thus, the wear resistant film obtained by the fine particle film forming method has excellent wear resistance because it has very little surface irregularities and good sliding properties, and furthermore, an ion sputtering method is applied to the sliding contact surface at a temperature of 400 ° C. Compared to the case where an abrasion resistant film is formed, it has a denseness and adhesion strength comparable to each other.
Therefore, according to the fine particle film forming method described above, it is not necessary to preheat the sliding contact surface to a high temperature state of 400 ° C. or higher as in the case of the sputtering method, the ion plating method and the CVD method. For this reason, the thermal load on the magnetic head is small when the wear-resistant film is formed. Therefore, in the magnetic head with the wear-resistant film, dielectric breakdown due to melting of the insulating coating of the coil or distortion due to internal stress is caused. Therefore, the occurrence of misalignment of the magnetic core 5 based on the above can be prevented, so that the magnetic head can be manufactured with a high yield.
[0019]
Further, the sliding contact surface 2a coated with the wear-resistant film by applying the fine particle film formation method can omit the abrasion-resistant film polishing process after the film formation, thereby simplifying and reducing the manufacturing process of the magnetic head. Therefore, Ra specified in JIS-B0601 is preferably adjusted to 0.3 μm or less before film formation.
1. Evaluation of abrasion resistance A load of 0.98 N in the longitudinal direction and a conveying speed are applied to the sliding contact surface 2a of the magnetic head B in which the wear-resistant film 11 of alumina ceramic having a thickness of 2.5 μm is formed on the sliding contact surface 2a. The relationship between the number of times of sliding contact (number of passes) and the wear depth of the wear-resistant film 11 was examined at 500 m / s, and the results are shown in FIG.
[0020]
Further, as a comparative example, using a magnetic head having the same structure as the magnetic head B except that the wear-resistant film 11 is not provided, the relationship between the number of sliding contacts and the wear depth of the sliding surface is the same as in the case of the magnetic head B. The results are shown in FIG.
As is clear from FIG. 3, the wear depth of the magnetic head B having the wear resistant film 11 was 1 μm or less when the number of passes was 1 million times, whereas the comparative example without the wear resistant film 11 was used. In this case, the wear resistance film 11 exceeds 0.3 mm, and it is found that the wear resistance film 11 is extremely effective in improving the wear resistance of the magnetic head.
[0021]
2. Evaluation of Adhesion Strength A wear-resistant film 11 made of alumina ceramic having a thickness of 2.5 μm is formed on the sliding contact surface 2a. The magnetic core 5 includes a lead core and a sliding contact of a magnetic head B including side cores arranged on both sides of the lead core. FIG. 4A shows the result of observing the slidable contact surface 2a by causing the 1000 yen bill to slidably contact the surface 2a 2.5 million times in the longitudinal direction at a load of 0.98 N and a conveyance speed of 500 m / s.
[0022]
Further, a wear resistant film 11 having a thickness of 2.5 μm is formed on the sliding contact surface 2a on a magnetic head having the same configuration as the magnetic head B except that the magnetic core is made of Sendust and the lead core and side core dimensions are different. A 1000 yen bill was brought into sliding contact under the same conditions as in the case of the magnetic head B, and the sliding contact surface 2a was observed. The result is shown in FIG.
[0023]
As shown in FIG. 4 (a), in the case of the magnetic head B having a permalloy magnetic core, the wear-resistant film 11 was not peeled off, whereas the magnetic head having a sendust magnetic core. In this case, as shown by the white arrow in FIG. 4B, local peeling of the wear-resistant film 11 was observed. This indicates that permalloy is preferable as the material of the magnetic core.
[0024]
In addition, this invention is not limited to the Example mentioned above, A various deformation | transformation is possible. For example, although the magnetic heads B and C are provided with a pair of excitation coils 6 and detection coils 7, it is needless to say that a plurality of pairs may be provided.
[0025]
【The invention's effect】
As described above, the magnetic head of the present invention is covered with a wear-resistant film whose sliding surface is formed of fine particles. This wear-resistant film has good sliding properties, excellent wear resistance, and adhesion. High strength.
The wear-resistant film has a thickness of 1 to 100 μm, can reduce the spacing loss of the magnetic head, and suppresses internal stress in the film and is difficult to peel off.
[0026]
Furthermore, since the wear-resistant film can be formed without heating the sliding contact surface, the thermal load on the magnetic head is small at the time of film formation, and the magnetic head can be manufactured with good yield.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view of a magnetic head according to an embodiment of the present invention.
FIG. 2 is a sectional view of a magnetic head according to another embodiment of the present invention.
FIG. 3 is a wear characteristic diagram of a magnetic head.
FIG. 4 is an observation result of an abrasion resistant film after an abrasion resistance test.
[Explanation of symbols]
B, C Magnetic head 2 Shield casing 2a Sliding contact surface 2b Opening 5 Magnetic core 6 Excitation coil 7 Detection coil 8 Holder 9 Resin member 10 Wear resistant layer 11 Wear resistant film G Magnetic gap

Claims (1)

磁気記録媒体と摺接する摺接面を有したシールドケーシングと、前記シールドケーシングに収容され、表面の一部が前記摺接面を形成する磁気コアと、前記摺接面の全域を被覆し、セラミックス材料の微粒子により成膜された耐摩耗膜とを具備し、
前記磁気コアはパーマロイから成り、
前記耐摩耗膜はアルミナ又はジルコニアからなり、
前記耐摩耗膜の厚みは1〜100μmである
ことを特徴とする磁気ヘッド。
A shield casing having a sliding contact surface in sliding contact with the magnetic recording medium; a magnetic core housed in the shield casing and having a part of the surface forming the sliding contact surface; A wear-resistant film formed of fine particles of material,
Wherein the magnetic core Ri consists of permalloy,
The wear-resistant film is made of alumina or zirconia,
The magnetic head according to claim 1, wherein the wear-resistant film has a thickness of 1 to 100 m .
JP2002085992A 2002-03-26 2002-03-26 Magnetic head Expired - Lifetime JP4154479B2 (en)

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