JP4158913B2 - Ozone generator - Google Patents

Description

  The present invention relates to a flat plate-type ozone generator that has a plurality of flat plate-shaped high-voltage electrodes and low-voltage electrodes, and generates an ozone gas by applying an AC voltage between them to generate ozone gas. A main part of a generator, which relates to an ozone generator that has a high-pressure electrode and a low-pressure electrode and generates ozone gas by being supplied with a gas containing oxygen gas. The present invention relates to a structure aiming at downsizing of the apparatus while reducing the number of parts of the apparatus.

  FIG. 49 is a side sectional view of a conventional coaxial cylindrical ozone generator disclosed in, for example, Japanese Patent Publication No. 59-48761. FIG. 50 is a cross-sectional view taken along line FF of the coaxial cylindrical ozone generator of FIG. 49 and 50, the coaxial cylindrical ozone generator includes a power source 1300 for applying a high voltage to the high voltage electrode 3, a glass dielectric tube 5 having a diameter of Φ40 mm and a length of about 1 m, and the glass dielectric tube 5 A high-voltage electrode 3 made of a conductive film layer formed on the inner peripheral surface, and a cylindrical grounding having an outer diameter of Φ50 mm and a length of about 1.2 m arranged coaxially with the glass dielectric tube 5 on which the high-voltage electrode 3 is formed An electrode tube 7, a discharge gap 106 formed between the cylindrical ground electrode tube 7 and the glass dielectric tube 5, and a spring-like shape installed at opposing portions of both electrodes to form the discharge gap 106 A spacer 113 is provided. A container 1100 for storing these constituent members is provided with a supply port 1010 and a discharge port 111 for a source gas containing oxygen. A cooling space 109 is provided on the outer peripheral side of the cylindrical ground electrode tube 7 of the container 1100.

  The glass dielectric tube 5 has a double tube structure with the cylindrical ground electrode tube 7, and forms an electrode pair in which a dielectric is inserted between the cylindrical ground electrode and the high voltage electrode 3. By applying a high voltage to the high voltage electrode 3, discharge occurs in the discharge gap 106, and ozone gas is generated. In the cooling space 109, water (refrigerant) is allowed to flow from the inlet 112a to the outlet 112b for cooling.

The discharge gap 106 is formed by fitting a cylindrical ground electrode tube 7 with a spring spacer 113 installed on a part of the outer periphery of the glass dielectric tube 5, so that the cylindrical ground electrode tube 7 and the glass dielectric tube 5 are fitted. Are formed at intervals of about 0.6 mm (discharge gap). Between the discharge gaps, oxygen or air, which is a raw material gas, is allowed to flow under a gas pressure of about 0.1 MPa, and the gas that has passed through the apparatus can be taken out. Usually, in one ozone generating cell having an outer diameter of Φ50 mm and a length of 1.2 m, the power injection density for efficiently generating ozone is 0.2 W / cm ² or less.

An AC high voltage is applied between the electrodes (between the gaps) formed by the cylindrical ground electrode tube 7 and the glass dielectric tube 5 having the high-voltage electrode 3 formed on the inner peripheral surface, and the power density is 0.2 W / cm ^2. By generating a dielectric barrier discharge (silent discharge) of a degree, the raw material gas is converted into an ozonized gas having an ozone concentration of about 100 g / m ³ . The generated ozonized gas can be continuously taken out from the discharge port 111 by flowing the raw material gas. In general, one ozone generation cell having an outer diameter of Φ50 mm and a length of about 1.2 m can obtain an ozone generation amount of about 25 g / h per cell. The ozone efficiency for obtaining 1 kg / h ozone gas is about 10 kWh / kg. The volume of the single ozone generator is about 2000 cm ³ .

The ozonized gas is used in cleaning of semiconductor / liquid crystal manufacturing equipment, film formation and resist stripping processes, and also used in water treatment equipment and pulp bleaching equipment, and a large volume of ozone is required in this field. The amount of ozone generated used in the semiconductor / liquid crystal manufacturing field is about several tens of g / h to 500 g / h per unit, and the apparatus is strongly required to be compact in addition to the ozone generation performance. For example, only an ozone generator having an ozone generation amount of 250 g / h requires a width of 20 cm or less, a height of 20 cm or less, a depth of 50 cm or less, and a volume of 20000 cm ³ (0.02 m ³ ) or less. In the field of water treatment and pulp bleaching, large-volume ozone with a generation amount of 10 to 60 kg / h is required. In this case, if a 60 kg / h-class ozone generator is configured with a large number of the above-described ozone generation cells of Φ50 mm-1.2 m, about 2400 (= 60000 g / h / 25 g / h) ozone generation cells are obtained. It becomes necessary, becomes very large, and manufacturing cost and maintenance cost become high. The size of the 60 kg / h class ozone generator is about 4.8 m ³ (= 2400 × 2000 cm ³ ) in a simple calculation, and is actually a large apparatus of about 6 m ³ . FIGS. 51 and 52 show an apparatus in which this ozone generation cell is made into a multi-tube. Although this apparatus shows an apparatus composed of eight ozone generation cells, the conventional large apparatus is configured as shown in FIG. 53, and in the actual apparatus of the 60 kg / h class ozone generation apparatus, 2400 glasses are used. The dielectric tube 5 is inserted.

  FIGS. 51 and 52 are large-sized cases in which a plurality of electrode pairs each composed of a cylindrical ground electrode tube and a glass dielectric tube 5 having a diameter of 40 mm-1 m having a high-voltage electrode 3 formed on the inner peripheral surface are accommodated in one container 1100. FIG. 51 is a side sectional view of the ozone generator, and FIG. 52 is a sectional view taken along line JJ of FIG. The apparatus shown in FIGS. 51 and 52 has a butt structure (tandem structure) in which the above-described electrode pairs are inserted into one cylindrical ground electrode tube 7 with glass dielectric tubes 5 inserted from both sides. A total of four electrode pairs, i.e., a total of eight electrode pairs, is made up of two electrode pairs arranged in one. (See FIG. 52).

  54 and FIG. 55 are stacked in multiple stages to form a compact structure of the apparatus comprising a large number of the ozone generating cells of Φ50 mm-1.2 m shown in FIG. 51 and FIG. FIG. 54 is a cross-sectional view of FIG. 54, and FIG. 55 is a cross-sectional view of the conventional ozone generator proposed in, for example, “discharge cell for ozone generator” in Japanese Patent Laid-Open No. 10-25104. It is a GG line longitudinal cross-sectional view. FIG. 54 shows a case where the HH line of FIG. 55 is viewed from the direction of the arrow. 54 and 55, the ozone generator 1100 is connected to high-frequency inverter units 1300a, 1300b, and 1300c that supply power to the ozone generator 1100. Inside the ozone generator 1100, overcurrent prevention fuses 177a, 177b, 177c electrically connected to the high-frequency inverter units 1300a, 1300b, 1300c are arranged. The overcurrent prevention fuses 177a, 177b, and 177c are held on the side surfaces of the low-voltage electrodes 107x and 107y via an insulating insulator.

  The ozone generator 1100 has a generator cover 1110 that has a bottomed cylindrical shape and has a secret structure inside. The generator cover 1110 is provided with a raw material gas inlet 1010 for supplying a raw material gas (oxygen gas) into the generator cover 1110 from the outside. Inside the ozone generator 1100, two low voltage electrodes 107x and 107y having a deformed hexagonal plate shape are disposed. The low-voltage electrodes 107x and 107y are manufactured by joining machined members by welding, and the inside is hollow. This internal cavity is used as a cooling water passage 109 as described later. That is, the low-voltage electrodes 107x and 107y circulate cooling water as a refrigerant inside, and serve as heat sinks as well as electrodes.

  In a space between the two low voltage electrodes 107x and 107y, three disk-shaped low voltage electrode plates 107xa, 107xb (107xc not shown) are provided on the surface of the low voltage electrode 107x on the low voltage electrode 107y side. It is joined. On the other hand, three disk-shaped low voltage electrode plates 107ya, 107yb (107yc not shown) are joined to the surface of the low voltage electrode 107y on the low voltage electrode 107x side.

  Further, in the space between the two low voltage electrodes 107x and 107y, three disk-shaped dielectric plates are opposed to the disk-shaped low voltage electrode plates 107xa, 107xb and (107xc not shown). 105a, 105b, and 105c are provided, respectively. On the other hand, on the low-voltage electrode 107y side, three disk-shaped dielectric plates 105a, 105b, and 105c are arranged to face the low-voltage electrode plates 107ya, 107yb, (107yc not shown). Each of the two dielectric plates 105a, 105b, and 105c forms a pair. Thin-film conductive films 115a, 115b, and 115c are formed on the opposing surfaces of the two dielectric plates 105a, 105b, and 105c that form a pair.

  Spacers 113 are sandwiched between the low-voltage electrode plates 107xa, 107xb, (107xc not shown) and the dielectric plates 105a, 105b, 105c, respectively. Discharge regions 106 are formed by spacers 113 between the low-voltage electrode plates 107xa, 107xb, (107xc not shown) and the dielectric plates 105a, 105b, 105c, respectively. The discharge region 106 is formed as a minute gap. Similarly, a discharge region 106 is formed as a minute gap between the low voltage electrode plates 107ya, 107yb, (107yc not shown) and the dielectric plates 105a, 105b, 105c by the spacer 113. .

  Between each of the two dielectric plates 105a, 105b, and 105c forming a pair, an elastic gas seal material 131 is contracted. A high-voltage electrode 103 that is a thin plate electrode is disposed between each of the two dielectric plates 105a, 105b, and 105c that make a pair. Further, metal springs 132 are contracted between the high-voltage electrode 103 and the dielectric plates 105a, 105b, and 105c, respectively. That is, the high-voltage electrode 103 has a structure sandwiched between two dielectric plates 105a, 105b, and 105c having an elastic function. The high voltage electrode 103 is electrically connected to the surfaces of the conductive films 115a, 115b, and 115c of the dielectric plates 105a, 105b, and 105c via the metal spring 132, whereby a high voltage is applied to the dielectric plates 105a, 105b, and 105c. Is supplied.

  In this prior art, a disk-shaped low-voltage electrode plate 107xa having a high-precision flatness as a discharge surface on a low-voltage electrode surface divided into three equal parts at an angle of 120 degrees from the center of the deformed hexagonal plate-shaped low-voltage electrodes 107x and 107y. , 107xb, (107xc not shown) are joined, and three dielectric plates 105a, 105b, 105c are arranged opposite to the low-voltage electrode plates 107xa, 107xb, (107xc not shown). . As described above, discharge portions having common low-voltage electrodes 107x and 107y and one dielectric plate 105a or 105b or 105c are referred to as ozone-generating discharge cells 199a and 199b (199c not shown), respectively. In this prior art, a discharge body having three discharge cells 199a, 199b, and 199c on a common low voltage electrode 107x, 107y, that is, a discharge unit is configured.

  In the center of the dielectric plates 105a, 105b, and 105c, ozone gas extraction holes 128a, 128b, and 128c are formed. Further, ozone gas extraction holes are also formed in the low pressure electrode plates 107xa, 107xb, (107xc not shown), and ozone gas discharge pipes 111a, 111b, (111c not shown) penetrating the low pressure electrode 107x, respectively. ) Is communicated. The ozone gas flows as indicated by an arrow 110 in FIG. 55 and is taken out from the ozone generator 1100.

  A cooling water passage 109 through which cooling water as a refrigerant flows is formed inside the low voltage electrodes 107x and 107y. The cooling water passage 109 has a cooling water inlet 123a and an outlet 123b. A cooling water supply header 121a and a cooling water drain header 121a are connected to the inlet 123a and the outlet 123b through pipes 122a and 122b, respectively. Further, the cooling water feed header 121a is connected to a discharge port 112a of a main cooling pipe for supplying cooling water to the ozone generator 1100 from the outside, and the cooling water drain header 121a is connected to the outside from the ozone generator 1100. A suction port 112b of a main cooling pipe for discharging cooling water is connected. The cooling water flows and is supplied to the ozone generator 1100 as indicated by an arrow 120 in FIG.

  In this manner, three discharge regions 106 are provided on the main surfaces of the low-voltage electrodes 107x and 107y, and further, the discharge regions 106 are formed on both surfaces of the high-voltage electrode 103, so that a total of six discharge regions 106 are formed. Six sets of discharge cells are formed by the spacer 113 for forming the discharge region 106 provided in the six discharge regions 106, one set of low voltage electrodes 107x and 107y, six dielectric plates 105a, 105b and 105c, and the high voltage electrode 103. A pair of low-voltage electrodes 107x and 107y is formed and has six discharge regions 106, so that a large-capacity ozone generator can be configured.

  The discharge cell structure has a structure in which a cooling water passage 109 is formed inside the pair of low-voltage electrodes 107x and 107y, an ozone gas passage 108 is formed, and three ozone gas passages 108 are provided in the stacking direction.

  Next, the operation will be described. The high voltage generated in the high-frequency inverter units 1300a, 1300b, and 1300c is passed through the metal spring 132 from the high-voltage electrode 103 via the overcurrent prevention fuses 177a, 177b, and 177c installed on the side surfaces of the low-voltage electrodes 107x and 107y. 105a, 105b, 105c. When a source gas containing oxygen is introduced from a source gas introduction port 1010 provided in the generator cover 1110, the source gas is sucked into the discharge gap 106 from the outer peripheral direction of the ozone generation discharge cells 199a, 199b, and 199c. When silent discharge is performed in the gap 106, the source gas becomes ozone gas. The ozone gas that has exited the discharge gap 106 is guided to ozone gas extraction holes 128a, 128b, and 128c, discharged in the directions of the ozone gas discharge pipes 111a, 111b, and 111c in the direction of arrow 110, and taken out to the outside.

  In the ozone generator having such a configuration, in order to increase the discharge area and increase the capacity, by disposing a plurality of dielectric plates 105a, 105b, 105c facing the common low voltage electrodes 107x, 107y, Capacitance can be increased without increasing the size of the dielectric plates 105a, 105b, and 105c that must be thickened to obtain flatness with a predetermined accuracy. In addition, the number of low-pressure electrodes 107x and 107y and the number of low-pressure electrode components such as cooling joints connected to the low-pressure electrodes 107x and 107y can be reduced, and the volume of ozone generation can be increased.

  Further, a compact device can be realized by effectively arranging the plurality of discharge cells 199a, 199b, 199c on the common low voltage electrodes 107x, 107y. The common low-voltage electrodes 107x and 107y are obtained by joining the disk-shaped low-voltage electrode plates 107xa, 107xb, and 107xc having high-precision flatness to be discharge surfaces, respectively, so that flatness with a predetermined accuracy can be obtained.

  A total of six high-voltage electrodes 103 are arranged on the main surfaces of the pair of low-voltage electrodes 107x and 107y, and an AC high voltage is applied to the high-voltage electrodes 103, whereby a discharge region 106 between the electrodes via the dielectric plates 105a, 105b, and 105c. A dielectric barrier discharge is generated. In order to discharge by applying an alternating high voltage to each of the six high-voltage electrodes 103 and the pair of low-voltage electrodes 107x and 107y, three pairs (six) discharge regions 106 are formed on substantially the same plane. Oxygen gas is once dissociated into oxygen atoms by this discharge, and at the same time, the oxygen atoms cause three-body collisions with other oxygen molecules or walls, and ozone gas is generated simultaneously from the six discharge regions 106 to obtain a large amount of ozone gas. Will be.

  Since the low voltage electrodes 107x and 107y are common to the three discharge regions 106, if the cooling water is supplied to one low voltage electrode 107x or 107y, the electrodes of the three discharge regions 106 can be cooled together.

  In this prior art, only a pair of low-voltage electrodes 107x and 107y is provided, but a module composed of a pair of low-voltage electrodes 107x and 107y and a plurality of electrodes sandwiched between them is parallel to the main surface. It is common practice to increase the volume of generated gas by stacking a plurality of gases.

Japanese Examined Patent Publication No. 59-48761 Japanese Patent Laid-Open No. 10-25104 (page 4-5, FIG. 1-2) JP-A-11-292516

  However, in the ozone generating apparatus having such a configuration, the low-voltage electrodes 107x and 107y are manufactured by machining and welding, which is a problem because they are robust and heavy and prevent the apparatus from being compact.

  In addition, an ozone generator having piping for extracting ozone gas and a number of piping for cooling the low-pressure electrodes 107x and 107y, particularly a module comprising a pair of low-pressure electrodes 107x and 107y and a plurality of electrodes sandwiched between them. In the case where a plurality of layers are stacked in parallel to the main surface, the piping is extended from each module, and it is not easy because the piping is complicated, and the manufacturing cost is high, and the ozone generator is large. was there.

  The present invention has been made to solve the above-described problems. In particular, the present invention is intended to increase the discharge region area to increase the amount of ozone generation. The discharge region is increased with respect to one electrode surface. However, the ozone generation performance is not impaired and the reliability is high, the plane accuracy of the electrode surface can be ensured with high accuracy, and the laminated structure of the module can be easily constructed. An object of the present invention is to obtain an ozone generator that has a high cooling performance, can be a small and light device, can have a simple structure, and can further reduce manufacturing costs.

In addition, by reducing the outer shape of the ozone generation module container by reducing the outer shape of the ozone generation module by increasing the generation capacity of the ozone generation module by elongating the shape of the plate electrode and stacking several stages of ozone generation cells, The object is to obtain a strong ozone generator as a pressure vessel.
It is another object of the present invention to obtain an ozone generator that can reduce the manufacturing cost and the maintenance cost by downsizing the ozone generator in which a plurality of generators are inserted into one container to further increase the generation capacity.

An ozone generator according to the present invention includes a flat plate-like first electrode, a flat plate-like second electrode facing the main surface of the first electrode, the first electrode, and the second electrode. and a spacer for forming a flat dielectric plate and the discharge gap provided between the, the electrode module having a plurality of stacked, is applied an AC voltage between the first electrode and the second electrode And generating ozone gas by generating a discharge between the gaps of the discharge region into which the gas containing at least oxygen gas is injected, and the first electrode is formed in the discharge region inside the main surface. An ozone gas passage for taking out the ozone gas and a plate-like electrode discharge portion in which a refrigerant passage for circulating the refrigerant is formed , wherein the first electrode is narrower than the electrode width of the electrode discharge portion and the ozone gas passage Gas outlet and refrigerant passage The electrode discharge part that exerts on the inlet / outlet part the inlet / outlet part in which the refrigerant inlet and the refrigerant outlet are formed, and the side part of any side of the electrode discharge part and the side part of any side of the input / output part A constricted portion having a small rigidity to be coupled so as to reduce the influence of deformation, and among the plurality of electrode modules stacked, each of the electrode discharge portions attaches the dielectric plate and the spacer to the second plate. The portion sandwiched between the electrodes is placed between the pedestal and the electrode pressing plate or between the two electrode pressing plates, and the pedestal and the electrode pressing plate or the two electrode pressing plates are connected to the first clamping bolt. The portions where the inlet / outlet portions sandwich the manifold block are placed between the base and the press plate or between the two press plates and the base and the press plate or the two pieces Tighten the work clamp It is fastened by tightening with only bolts.

  The effect of the ozone generator according to the present invention is that the accumulated error caused by stacking the low voltage electrode discharge part, the high voltage electrode, the dielectric plate and the spacer, and the accumulated error caused by stacking the input / output part and the manifold block. The bending stress generated between the low voltage electrode discharge part and the input / output part due to the relative difference between the low voltage electrode discharge part and the input / output part is absorbed by the narrow neck part provided between them. No stress is applied to the other between the door and the entrance / exit. And it is managed very delicately for the purpose of accurately managing the height (thickness) of the discharge region, which is a very thin gap, by being sandwiched by separate clamping mechanisms.

Embodiment 1 FIG.
In many cases, the flat plate type ozone generator incorporating the ozone generator of the present invention is provided together with other apparatuses such as a semiconductor manufacturing apparatus and a cleaning apparatus. Each device is generally provided with an operation panel and an operation unit, and it is ideal that these operation panels and operation units are arranged side by side facing, for example, a passage in consideration of operator operability. Is. On the other hand, a relatively large length (area) is allowed for the depth perpendicular to the surface on which the operation panels are arranged. For these reasons, each device is often formed into an elongated shape having a narrow width and a long length in the depth direction facing the passage.

  In the water treatment and pulp bleaching fields, when this flat plate type ozone generator is adopted as a large-capacity ozone device, it must be a container having sufficient strength against gas pressure. And the electrode shape of the discharge cell is an elongated rectangular shape to ensure the electrode area, and in the container forming the ozone generator, the cylindrical container with a smaller diameter can increase the pressure strength, and The device can be lightened and can be made cheaper.

  As described above, the flat plate type ozone generator incorporating the ozone generator of the present invention is generally required to have an elongated rectangular shape. On the other hand, the flat plate type ozone generator is required to increase the volume to the maximum for the purpose of increasing the volume of ozone generated by the ozone generator 100. In view of these two requirements, it is ideal that the flat plate type ozone generator has a rectangular parallelepiped shape that extends to the maximum within the permissible space, and more specifically, has an elongated rectangular cross section in the horizontal plane.

  FIG. 1 is a schematic cross-sectional view of a flat plate type ozone generator equipped with the ozone generator of the present invention. FIG. 2 is a top view of the flat plate ozone generator of FIG. 1 and 2, the flat plate type ozone generator includes an ozone generator 100 as a main configuration for generating ozone, an ozone transformer 200 that supplies power to the ozone generator 100, and a high-frequency inverter 300. ing.

  The high frequency inverter 300 converts the electric power input from the input power supply 404 into a necessary frequency and outputs it to the inverter output cable 403. The ozone transformer 200 improves the power factor of the load with the inductance of the ozone transformer itself, boosts this power to a predetermined voltage, and supplies it to the ozone generator 100 via the high voltage cable 401 as the power necessary for ozone generation. . The high voltage cable 401 passes through the high voltage bushing 120 and is electrically connected to the high voltage electrode 3 in the ozone generator 100 described later. The high frequency inverter 300 has a function of controlling current / voltage, and controls the amount of power injected to the ozone generator 100.

  The high voltage supplied from the ozone transformer 200 is supplied from the high voltage cable 401 to the high voltage electrode 3 of the ozone generator 100 through the high voltage bushing 120. On the other hand, the low voltage supplied from the ozone transformer 200 is supplied from the low voltage cable 402 to the low voltage electrode 7 via the base 24.

  The ozone generator 100 is configured by laminating a plurality of electrode modules 102. One electrode module 102 has a low voltage electrode 7 as a first electrode and a high voltage electrode 3 as a second electrode. The structure of the electrode module 102 will be described in detail later. A predetermined number of electrode modules 102 are stacked on the base 24 in the vertical direction in FIG. 1 to form an ozone generator electrode 101. The plurality of stacked electrode modules 102 are provided with a predetermined tightening force by an electrode pressing plate 22 provided to be overlapped with the uppermost electrode module 102, and a clamping bolt 21a penetrating the electrode pressing plate 22 and each electrode module 102. Fastened to the base 24. This tightening force will be described later.

  The ozone generator electrode 101 is covered with a generator cover 110. The generator cover 110 has a substantially box shape with one side removed, and a flange provided at the peripheral edge of the opening is fastened to the base 24 by a cover fastening bolt 26. An O-ring is sandwiched between the peripheral edge of the opening of the generator cover 110 and the base 24, and the internal space formed by the generator cover 110 and the base 24 has a sealed structure.

  The base 24 is provided with an oxygen gas inlet 130 for supplying oxygen gas containing a small amount of nitrogen, carbon dioxide, etc. in the internal space. The oxygen gas supplied from the oxygen gas inlet 130 is filled in the generator cover 110 and enters a gap in the discharge region described later. The base 24 is provided with an ozone gas outlet 11 through which ozone gas generated in a discharge region, which will be described later, is discharged from the ozone generator 100 and a cooling water inlet / outlet 12 through which cooling water for cooling the electrode module 102 enters and exits. That is, the ozone gas outlet 11 is an end opening of the ozone gas passage 8 provided in the base 24, and the cooling water inlet / outlet 12 is an end opening of the cooling water passage 9 provided in the base 24.

  In the flat plate type ozone generator having such a configuration, the present invention particularly relates to the ozone generator 100 which is a main part of the ozone generator, and more specifically, the capacity of the ozone generator 100 is increased, and the space of the apparatus. In order to improve the factor, the ozone generator 100 has a rectangular shape, and when the ozone generator 100 is made rectangular, the shapes of the high voltage electrode, dielectric plate, and low voltage electrode in the electrode module 102, the cooling structure, and the ozone gas extraction It relates to the structure, and further, the shape for efficiently generating ozone and the compactness of the generator, the manufacturing cost reduction, the weight reduction and the container sealing method for increasing the pressure strength of the container, the container shape, etc. The present invention relates to a structure of a large-capacity ozone generator having a plurality of structures and generators.

  FIG. 3 is a schematic detailed sectional view of an ozone generator electrode showing the ozone generator according to Embodiment 1 of the present invention. FIG. 4 is an enlarged view of a portion E in FIG. 3 and 4, the ozone generator electrode 101 includes a flat low voltage electrode 7 as a first electrode, and a flat high voltage electrode 3 as a second electrode facing the main surface of the low voltage electrode 7. And a flat dielectric plate 5 provided between the low-voltage electrode 7 and the high-voltage electrode 3 and a spacer 13 for forming a discharge region having a small thickness in the stacking direction. One electrode module 102 combines the high voltage electrode 3, the low voltage electrode 7, the dielectric plate 5 and the spacer 13 to form a discharge region which will be described later. The electrode module 102 is laminated in multiple stages to constitute the ozone generator electrode 101.

  The ozone generator electrode 101 is applied with an alternating voltage between the low voltage electrode 7 and the high voltage electrode 3, and generates an ozone gas by generating a discharge in a discharge region into which a gas containing oxygen gas (raw material gas) is injected. Electric power is supplied from the ozone transformer 200 shown in FIG. 1 to the power supply terminal 4 of the high voltage electrode 3 through the high voltage bushing 120. The high voltage electrode 3 is made of a metal such as stainless steel or aluminum. The main surface of the dielectric plate 5 is in close contact with the high voltage electrode 3 through a conductive film described later. The dielectric plate 5 is made of a material such as ceramic, glass, or silicon. A discharge region is formed by a spacer 13 between the dielectric plate 5 and the low voltage electrode 7. In the present embodiment, the discharge region is divided into six discharge regions 27a to 27f indicated by broken lines in FIG. Each discharge region 27a to 27f is formed in a substantially square shape with rounded four corners, and the source gas filled in the generator cover 110 in FIG. From the entire circumference of the discharge area toward the center of each discharge area.

  Then, by applying an alternating current / high voltage between the high voltage electrode 3 and the low voltage electrode 7, the raw material gas flowing in the discharge regions 27a to 27f is converted into ozone. The ozone gas converted into ozonized oxygen in each of the discharge regions 27a to 27f enters the inside of the low pressure electrode 7 through ozone gas outlet holes 28a to 28f, which will be described later, and passes through the ozone gas passage 8 provided in the low pressure electrode 7 to generate ozone gas. It is led to the outlet 11.

  The low-voltage electrode 7 is a thin plate-like conductive rigid body in which four metal plates made of stainless steel plates or the like are joined to form an ozone gas passage 8 between the plates. In addition to the ozone gas passage 8, the low-pressure electrode 7 is provided with a cooling water passage 9 for increasing ozone generation efficiency. And the gas temperature in discharge area 27a-27f is lowered | hung by making the cooling water as a refrigerant | coolant flow through this cooling water channel | path 9. FIG.

The ozone gas passage 8 formed in the low voltage electrode 7 communicates with the ozone gas outlet 11 provided in the base 24 via the ozone gas passage 8 formed in the manifold block 23. On the other hand, the cooling water passage 9 formed in the low voltage electrode 7 communicates with the cooling water inlet / outlet 12 provided in the base 24 via the cooling water passage 9 formed in the manifold block 23.
Although not particularly illustrated, a gasket material such as an O-ring is sandwiched between the low-voltage electrode 7 and the manifold block 23 or the base 24 as a countermeasure against watertightness of the cooling water. Further, a gasket material such as an O-ring is sandwiched as a measure against airtightness of ozone gas.

  The electrode module 102 composed of the low-voltage electrode 7, the high-voltage electrode 3, the dielectric plate 5, and the spacer 13 is fastened and fixed between the electrode pressing plate 22 and the base 24 by fastening bolts 21 a penetrating each component. Has been.

Next, the structure of the low voltage electrode 7 will be described in detail. FIG. 5 is a top view of the low-voltage electrode. 6 is a cross-sectional view taken along line AA in FIG. 7 is a cross-sectional view taken along the line BB in FIG. 8 is a cross-sectional view taken along the line CC of FIG. 9 is a cross-sectional view taken along line DD in FIG.
The low-voltage electrode 7 is made of a metal material having high ozone resistance and has a substantially rectangular (rectangular) flat plate shape that extends over the entire horizontal section of the generator cover 110 for the purpose of securing a large area. .

The low-voltage electrode 7 includes a rectangular flat plate-shaped low-pressure electrode discharge portion 700 having a principal surface forming an electrode and an ozone gas passage 8 and a cooling water passage (refrigerant passage) 9 formed therein, and one side of the low-pressure electrode discharge portion 700. and a entrance and exit part 710 gas of the ozone gas passage 8 provided in the sides of the side outlet 8 and the cooling water inlet of the cooling water passage 9 (refrigerant inlet) 9a, the cooling water outlet (coolant outlet) 9b is formed. The cooling water passage 9 as a refrigerant passage provided in the low voltage electrode discharge unit 700 is formed over the entire low voltage electrode discharge unit 700 so that the cooling water as the refrigerant can circulate all over the low voltage electrode discharge unit 700. Has been.

The low voltage electrode discharge part 700 constitutes the electrode module 102 together with the high voltage electrode 3, the dielectric plate 5, and the spacer 13, is laminated on the base 24, and is fastened by a fastening bolt 21a. On the other hand, in order to interpolate the height in the stacking direction formed by the high-voltage electrode 3, the dielectric plate 5, and the spacer 13, the input / output section 710 is stacked with the manifold block 23 sandwiched between adjacent upper and lower portions, and tightening bolts 21b. It is fastened by. In the manifold block 23, an ozone gas passage 8 and a cooling water passage 9 extending in the stacking direction are formed.
The low-pressure electrode 7 has a width narrower than the electrode width of the low-pressure electrode discharge part 700 and the inlet / outlet part 710 in which the gas outlet 8 of the ozone gas passage 8 and the refrigerant inlet 9a and the refrigerant outlet 9b of the refrigerant passage 9 are formed. A constricted portion 720 having a low rigidity for connecting the side portion of the portion 700 and the side portion of the input / output portion 710 so as to reduce the influence of deformation of the low-voltage electrode discharge portion 700 on the input / output portion 710.

  A constricted portion 720 is provided between the low voltage electrode discharge portion 700 and the input / output portion 710. The constricted portion 720 is deformed by either the low voltage electrode discharge portion 700 or the input / output portion 710 when the low voltage electrode discharge portion 700 and the input / output portion 710 are fastened by the tightening bolt 21a and the tightening bolt 21b, respectively. It is formed as a portion having a small rigidity so as not to affect the other fastening force.

  That is, the low voltage electrode discharge part 700 is fastened to the base 24 with a predetermined tightening force by the tightening bolt 21a together with the high voltage electrode 3, the dielectric plate 5 and the spacer 13, and this tightening force is very high. It is managed very delicately for the purpose of accurately managing the height (thickness) of the discharge areas 27a to 27f, which are thin gaps.

  On the other hand, the entry / exit part 710 is fastened to the base 24 together with the manifold block 23 by fastening bolts 21b. Although the entrance / exit part 710 and the manifold block 23 are manufactured by advanced dimensional management, since a manufacturing error cannot be made zero, a slight error occurs between the ideal height and the ideal height.

  The cumulative error generated by stacking the low voltage electrode discharge unit 700, the high voltage electrode 3, the dielectric plate 5 and the spacer 13 and the cumulative error generated by stacking the input / output unit 710 and the manifold block 23 are relative to each other. Because of this difference, a bending stress is generated between the low voltage electrode discharge part 700 and the input / output part 710. For the purpose of absorbing this bending stress, a constricted part 720 having a small rigidity is provided between the two. . Due to the narrow neck portion 720, the low voltage electrode discharge portion 700 and the input / output portion 710 do not exert stress on each other.

  On both the upper and lower main surfaces of the low-pressure electrode discharge part 700, six ozone gases each exist in the discharge region of the surface of the low-pressure electrode discharge part 700 for the purpose of substantially uniforming the radial flow velocity distribution centering on the ozone gas passage. The extraction holes 28a to 28f are perforated. Ozone gas flows evenly into the six perforated holes, so that the amount of ozone generated on the surface of the low-pressure electrode discharge part 700 is made uniform, high-concentration ozone can be obtained, and the ozone gas extraction efficiency is improved. Furthermore, in addition to the six ozone gas extraction holes 28a to 28f, the high voltage electrode is divided into six around the ozone gas extraction holes, thereby dispersing the discharge regions and equalizing the raw material gas flowing from the periphery of each discharge region. In the present embodiment, as described above, it is divided into six discharge regions 27a to 27f. And ozone gas extraction hole 28a-28f is provided so that it may be located in the approximate center part of six discharge area | regions 27a-27f, and the ozone gas generate | occur | produced in each discharge area | region 27a-27f is from this ozone gas extraction hole 28a-28f. It is sucked into the low voltage electrode 7. The ozone gas that has entered the low pressure electrode 7 through the ozone gas extraction holes 28 a to 28 f is merged into one in the low pressure electrode 7 by the ozone gas passage 8 formed in the low pressure electrode 7, and the ozone gas passage 8 formed in the inlet / outlet portion 710. Head for.

  As shown in FIGS. 6 to 9, the low-voltage electrode 7 is produced by bonding a total of four metal electrodes, ie, two first metal electrodes 7a and two second metal electrodes 7b. . A large number of U-shaped grooves having a depth of several millimeters are engraved in advance on one side main surface of each metal electrode 7a, 7b by half etching or machining. First, the two first metal electrodes 7a are bonded to each other so that the grooves face each other, and the ozone gas passage 8 is formed therein. Subsequently, the two second metal electrodes 7b are formed with the grooves. The formed surfaces are bonded together toward the outer surface of the electrode 7a to form the cooling water passage 9. These four metal electrodes 7a and 7b are overlapped and joined by brazing or hot pressing or the like to form a secret structure.

  Further, an ozone gas passage 8 and a cooling water passage 9 extending in the stacking direction are formed in the inlet / outlet portion 710. Here, the cooling water passage 9 is divided into a cooling water inlet (refrigerant inlet) 9a and a cooling water outlet (refrigerant outlet) 9b. The cooling water passage 9 communicating with the cooling water inlet 9a and the cooling water outlet 9b is formed almost entirely within the low-pressure electrode 7 as shown by a dotted line in FIG. That is, a plurality of cooling water passages 9 are concentrically formed from the central part to the outer peripheral part in the rectangular flat plate-like low-voltage electrode discharge part 700. Adjacent concentric cooling water passages 9 are partitioned by narrow ribs. The cooling water flows through the cooling water passage 9 as indicated by broken line arrows in FIG.

  On the other hand, the ozone gas passage 8 formed inside the low-voltage electrode discharge unit 700 extends in a branch shape from the passage extending in the stacking direction formed in the input / output unit 710 into the low-pressure electrode discharge unit 700, and the tip of the branch And communicated with ozone gas extraction holes 28a to 28f formed on the main surfaces on both sides. The ozone gas extraction holes 28a to 28f are divided into six equal parts, and are respectively provided at the centers of the divided regions 27a to 27f. In this six-divided discharge region, the source gas flows toward the ozone gas extraction holes 28a to 28f provided in the center, and a substantially uniform gas flows from the surroundings into the ozone gas extraction holes 28a to 28f. The ozone gas extraction holes 28a to 28f and the branch-like ozone gas passages 8 formed in the low-pressure electrode 7 constitute collective extraction means for collecting and extracting ozone gas generated in the plurality of discharge regions 27a to 27f. In the present embodiment, the low-pressure electrode discharge part is divided into six parts, and the ozone gas extraction holes 28a to 28f are provided correspondingly. However, the low-pressure electrode discharge part 700 is divided into two or more n parts, and n Individual ozone gas extraction holes may be provided.

  The ozone gas passage 8 and the cooling water passage 9 extending in the stacking direction formed in the inlet / outlet portion 710 are connected to each of the ozone gas passage and the cooling water passage provided in the manifold block 23 so as to be linear, and finally the base 24 Are connected to an ozone gas outlet 11 and a cooling water inlet / outlet 12.

The generated ozone gas merges from the central portion of the plurality of discharge regions 27a to 27f through the ozone gas passage 8 provided in the low-pressure electrode discharge portion 700, and enters the ozone gas passage 8 extending in the stacking direction provided in the input / output portion 710. It reaches. On the other hand, the cooling water flowing through the whole of the low voltage electrode discharge part 700 enters the low voltage electrode 7 from the cooling water inlet 9a of the inlet / outlet part 710, cools the entire surface of the low voltage electrode discharge part 700, and cools the water outlet 9b of the inlet / outlet part 710. Break through.

  The passage assembly structure of the ozone gas passage 8 and the cooling water passage 9 of the inlet / outlet portion 710 provided on the side of one side of the low voltage electrode 7 is the same as the manifold block 23 provided adjacent to the upper and lower sides of the inlet / outlet portion 710. The ozone gas passage 8 and the cooling water passage 9 that extend linearly in the stacking direction are formed in cooperation with the passage assembly structure formed as described above. The ozone gas passage 8 and the cooling water passage 9 formed in cooperation with each other The ozone gas outlet 11 and the cooling water inlet / outlet 12 provided on the table 24 are connected.

  As described above, in the present embodiment, by forming the ozone gas passage 8 and the cooling water passage 9 in the low pressure electrode 7 and the manifold block 23, the collective joint and the piping member that have been conventionally used are eliminated, and these joints, A compact and simplified ozone generator is realized by reducing the space for piping members.

Further, in the present embodiment, an airtight circulation space is formed by bonding four metal plates obtained by etching or machining the low voltage electrode 7 within a few millimeters by etching or machining, and the ozone gas passage 8 and the cooling water passage 9 are formed. the so formed by hermetically separated, it is possible to reduce the thickness of the low voltage electrode 7, it is possible to reduce the size of the apparatus. Moreover, since cooling water and ozone gas extraction piping are not required, assembly and disassembly can be easily performed, and an inexpensive ozone generator can be provided.

  In the present embodiment, the four metal electrodes 7a and 7b are joined to produce the low voltage electrode 7. However, the four or more electrodes are joined and the ozone gas passage 8 and the cooling water passage 9 are inside. May be formed.

  In the present embodiment, the discharge regions 27a to 27f are provided between the low voltage electrode 7 and the dielectric plate 5, and the ozone gas passage 8 is formed in the low voltage electrode 7. A discharge region may be provided between the plate 5 and an ozone gas passage may be formed in the high voltage electrode 3.

  In the present embodiment, a dielectric plate 5 necessary for silent (dielectric barrier) discharge is provided between the high-voltage electrode 3 and the low-voltage electrode 7, and the dielectric plate 5 and the low-voltage electrode 7 are provided between the dielectric plate 5 and the low-voltage electrode 7. Discharge regions 27a to 27f are provided by arranging spacers. However, the discharge regions 27 a to 27 f may be provided by arranging a spacer between the high voltage electrode 3 and the dielectric plate 5.

  10 is a top view of the high voltage electrode, FIG. 11 is a front view of the high voltage electrode, and FIG. 12 is a side view of the high voltage electrode. The high-voltage electrode 3 is made of a conductive thin plate such as a stainless steel plate, and a part of the high-voltage electrode 3 protrudes as the power supply terminal 4. The high-voltage electrode 3 has six flat convex portions 3a to 3f formed on one side by removing unnecessary portions from a rectangular flat plate material by machining. That is, twelve convex portions 3a to 3f are formed on both side surfaces. Electrode surfaces are formed on the flat portions of the top surfaces of the convex portions 3a to 3f. The six discharge regions 27 a to 27 f described above are formed based on the six convex portions 3 a to 3 f of the high-voltage electrode 3 in one part.

  Each convex part 3a-3f is formed in the substantially square shape by which the four corners were rounded. Of the six convex portions, four convex portions 3 a, 3 c, 3 d, and 3 f are formed with two sides coincident with the four corners of the high-voltage electrode 3. Of the other two convex portions 3b and 3e, the convex portion 3b is provided between the convex portions 3a and 3c. Moreover, the convex part 3e is provided between the convex parts 3d and 3f. Adjacent convex portions are separated from each other by a predetermined interval. This interval will be mentioned later.

  The main surface of each convex part 3a-3f is formed so that it may exist on the same plane, and it is formed so that it may have a highly accurate flatness, respectively. As can be seen from the front view of FIG. 11 and the side view of FIG. 12, the outer peripheral portions of the respective convex portions 3a to 3f are chamfered in a circular arc shape in cross section to have a smooth shape.

  A power supply terminal 4 protrudes from one side of the rectangular plate-shaped high-voltage electrode 3. The power supply terminal 4 may be formed by machining as in the convex portions 3a to 3f, or may be formed by joining small plate-like member pieces by welding, screwing, or the like. good.

  The six discharge regions 27a to 27f described above are generated in regions where the convex portions 3a to 3f are formed. The ratio of the length of the side in the longitudinal direction in the horizontal direction in the convex portions 3a to 3f and the length of the side perpendicular to the length (the aspect ratio in the horizontal plane, that is, the aspect ratio, hereinafter referred to as the aspect ratio) is approximately 1: 1. Yes. That is, it has a substantially square shape. Therefore, the aspect ratio of the six discharge regions 27a to 27f is approximately 1: 1. If the ozone gas extraction hole is provided at the center of the discharge region having an aspect ratio of 1: 1, the radial gas flow around the ozone gas extraction hole can be made uniform.

  As a result of measuring the ozone concentration and the ozone generation efficiency while varying the aspect ratio of the discharge region, if the aspect ratio is within 1.5: 1.0, the gas when the gas flows in the radial direction centering on the ozone gas extraction hole The distribution of the flow velocity V (or flow rate Q) is not significantly different in the vertical and horizontal directions in the horizontal plane. As a result, it was confirmed that the ozone concentration and ozone generation efficiency could be secured at 80% or more, and no other significant performance degradation was observed. On the other hand, when the aspect ratio exceeded 1.5: 1.0, it was confirmed that the ozone concentration and the ozone generation efficiency were remarkably lowered, and the effect of increasing the area was reduced.

  In general, when the discharge region has one large area, the variation in discharge power density increases between the central portion and the peripheral portion of the discharge region, and the ozone concentration and the ozone generation efficiency decrease. Here, reference is made to the maximum allowable discharge area, which is the area of the discharge region where a predetermined ozone concentration and ozone generation efficiency can be obtained. If the discharge area is smaller than the maximum allowable discharge area, the ozone concentration and the ozone generation efficiency are improved. On the other hand, if the discharge area is larger than the maximum allowable discharge area, the ozone concentration and the ozone generation efficiency are extremely deteriorated. The predetermined performance cannot be maintained.

  The maximum allowable discharge area varies somewhat depending on the shape (aspect ratio) of the discharge region. As the shape changes, the maximum allowable discharge area is maximized when there is an ozone gas extraction hole at the center of the discharge region and the discharge region is circular. When the discharge region is circular, the source gas enters from the circumference and flows to the ozone gas extraction hole provided in the center, and the flow of the source gas is uniform no matter where the periphery of the discharge region enters. .

  In the case of a rectangular discharge region, even if the discharge area is less than the maximum allowable discharge area, if the aspect ratio deteriorates, the flow of gas in the radial direction around the ozone gas extraction hole in the discharge region becomes uneven, and the gas flow In the slow part, the gas temperature in the discharge space rises and the ozone generation efficiency decreases. And the ozone generation performance of the whole apparatus worsens.

The maximum allowable discharge area can be obtained by the following equation. That is,
The maximum allowable discharge area S0 [cm ² ] is
The gap length of the discharge region is d [cm],
The discharge gas pressure is P [MPa],
(P [MPa] = 7500 (0.1 + P) [Torr] = p [Torr])
The discharge voltage is Vp [V] (note that the discharge waveform is alternating current, and the discharge voltage here indicates the peak value of the alternating current waveform, so Vp is used as a sign.)
Discharge power density is W [W / cm ² ]
When

S0 = (A × d × P × Vp) / W (Formula 1)
A: Proportional constant

It can obtain | require by the type | formula.
Here, A is a proportionality constant determined by the shape (aspect ratio) of the discharge region, and varies in the range of about 10 to 30 depending on the shape of the discharge region.

And about discharge region 27a-27f of this Embodiment,
The gap length of the discharge region is 0.01 [cm],
Discharge gas pressure is 0.25 [MPa],
Discharge voltage is 5000 [V],
Discharge power density is 1 [W / cm ² ]
It is said that. Here, if the proportionality constant is 20, the maximum allowable discharge area S0 is

S0 = (20 × 0.01 × 0.25 × 5000) /1.0=250 cm ²

And is determined to be 250 cm ² . In addition to being within the maximum allowable discharge area S0, the area S of each of the discharge regions 27a to 27f in the present embodiment is set to 75 cm ² (φ200) based on the overall configuration of the ozone device. For example, the area is set by setting the area S of the protrusions 3 a to 3 f of the high-voltage electrode 3 to 75 cm ² . The area S of the discharge regions 27a to 27f is related not only to the area of the convex portions 3a to 3f of the high voltage electrode 3, but also to the area of the conductive film formed on the surface of the dielectric plate described in detail later. To do.

  As described above, dielectric barrier discharge (silent discharge) is generally a discharge in which the power density increases uniformly on the electrode surface in proportion to the increase in the discharge voltage. Due to the dimensional error, etc., discharge starts from a portion having a smaller interval in the discharge region, and the power density increases in the portion having the smaller interval. When the discharge region becomes large, the difference in the power density distribution on the electrode surface becomes large, which causes a decrease in ozone generation capability. If the discharge area is of one large area, the difference in discharge power density between the central part of the discharge area (generally, it is often the smallest part in the discharge area) and the peripheral part increases. End up. Further, when the discharge region is one large area, depending on the shape of the rectangular electrode, the aspect ratio becomes a value that is larger than 1: 1. The values apart from the ideal values of the discharge power density and the aspect ratio cause a decrease in ozone generation efficiency and a decrease in ozone concentration.

  In order to solve this problem, in the present embodiment, the discharge region is divided into six discharge regions 27a to 27f. The six convex portions 3a to 3f provided on the high voltage electrode 3 correspond to the discharge regions 27a to 27f. In the present embodiment, one discharge region is limited within the optimum discharge area S0 in this way, the aspect ratio of the optimum discharge region is ensured within a certain value, and the positions of the ozone gas extraction holes are dispersed. Arranged.

In the relational expression (formula 1) of the maximum allowable discharge area S0 described above, the discharge voltage Vp can be obtained by the following formula. That is,
The discharge voltage Vp is
The discharge region gap length is d [cm],
Discharge gas pressure is p [Torr]
When

Vp = B × p × d (Formula 2)
B: Proportional constant

It can obtain | require by the type | formula.
Here, B is a proportionality constant for conversion into a discharge voltage value, and the actual value is about 188, but slightly differs depending on the discharge gas type and the electrode material.

  Here, when the above equation 1 is rewritten using the discharge region gap length d [cm] and the discharge gas pressure p [Torr],

S0 = (A × d × P × Vp) / W (Formula 1)
= A * d * (p / 7500-0.1) * B * p * d / W
= {A * B / 7500 (p * d) 2 / W}-{A * B * (p * d) * d / W}
= {0.5 * (p * d) 2 / W}-{376.0 * (p * d) * d / W}
(Formula 3)

It becomes.
The minimum value 0.001 cm of the discharge area gap length d is a value determined by the machining accuracy of the electrode surface. However, if the electrode surface is manufactured with a processing error of ± 10 μm or less, it becomes a factor that increases the processing cost of the electrode. On the other hand, if the discharge region gap length d is 0.001 cm and the processing error of the electrode surface is ± 10 μm or more, the accuracy of the discharge gap becomes ± 10% or more, and the ozone performance is deteriorated due to variations in the discharge gap.

  FIG. 13 is a characteristic diagram showing the relationship between the product p × d and the discharge voltage. FIG. 14 is a characteristic diagram showing the relationship between the discharge voltage and the high voltage insulation distance. FIG. 15 is a characteristic diagram showing an example of the relationship between the product p × d and the volume ratio of the discharge cells when the value of the product p × d is varied. FIG. 16 is a characteristic diagram showing an example of the relationship between the discharge power density and the volume ratio of the discharge cells when the discharge power density is varied. Each figure is based on data obtained by measuring an actual device or calculating from the measured value. In each figure, areas indicated by black squares are efficient areas.

  An increase in the discharge region gap length d and an increase in the discharge gas pressure p increase the value of the product p × d, and the discharge voltage for generating ozone increases as shown in FIG. Further, when the discharge voltage becomes high, as shown in FIG. 14, it is necessary to secure a large insulation distance in the apparatus, so that the volume of the ozone apparatus increases and a large power source is required.

  FIG. 15 is a graph in which the volume ratio of the discharge cells when the discharge power density is constant and the value of the product p × d is changed is roughly calculated in consideration of securing the insulation distance. When the value of the product p × d is, for example, from 20 Torr · cm to 50 Torr · cm, the volume ratio of the discharge cells becomes 2.5 times, and the discharge voltage Vp becomes 9.5 kV or more. If it is more than that, restrictions such as high voltage regulation and high pressure vessel regulation occur, resulting in a significant increase in production cost.

FIG. 16 is a graph showing an approximate calculation of the volume ratio of the discharge cells when the discharge power density is changed while keeping the value of the product p × d constant. When the discharge power density is changed from 0.3 W / cm ² to 4 W / cm ² , the volume ratio of the discharge cells can be reduced to about 0.3 times. In addition, the discharge power density depends on the cooling capacity of the electrode. When the discharge is 4 W / cm ² or more, the gas temperature in the discharge part increases rapidly and the ozone generation performance deteriorates rapidly. It becomes difficult to secure the amount of ozone generated. Then, it is understood that the range of ^1W / cm ^{2 ~3W} / cm 2 As seen from FIG. 16 is a efficient region most devices.

  As described above, from the knowledge of the actual apparatus, in the ozone generator of the present embodiment, the discharge region gap length d, the discharge gas pressure p, the product p × d of both, and the discharge power density W are the size of the apparatus. In consideration of the volume ratio and economic efficiency, it is desirable to select the region indicated by the black squares in FIGS. 13 to 16, that is, the range shown in Table 1 below.

[Table 1]
Discharge region gap length d 0.001 to 0.06 [cm]
Discharge gas pressure p 0.1-0.4 [MPa]
1500-3750 [Torr]
Product p × d 15-50 [Torr × cm]
Discharge power density W 0.3 to 4 [W / cm ² ]

  When the maximum allowable discharge area is calculated from the above formula 3 and the range of Table 1, the following conditions can be derived.

Discharge region gap length d 0.06 [cm] or less Product p × d 50 [Torr × cm] or less Discharge power density W 0.3 [W / cm ² ] or more The maximum allowable discharge area at this time is
The maximum allowable discharge area S0 3038 [cm ² ] or less.

When this is verified by experiment, for example,
Discharge region gap length d 0.06 [cm] or less Product p × d 50 [Torr × cm] or less Discharge power density W 0.3 [W / cm ² ] or more Maximum allowable discharge area S0 3000 [cm ² ] or less

  At that time, the ozone generation efficiency was 80%. On the other hand, when this condition is broken, the ozone concentration and the ozone generation efficiency are significantly reduced. That is, it was confirmed that the effect of area increase was reduced.

  17 is a top view of the dielectric plate, FIG. 18 is a front view of the dielectric plate, and FIG. 19 is a side view of the dielectric plate. The ozone generator has an outer shape with a rectangular cross section in order to increase the capacity of the ozone generator 100 and improve the space factor of the apparatus. The dielectric plate 5 is made of a material such as glass or ceramic and has a substantially rectangular (rectangular) flat plate shape extending over the entire horizontal section of the generator cover 110 for the purpose of securing a large area. 3 is sandwiched from both sides.

  The dielectric plate 5 has a rectangular flat plate shape, and six conductive films 5 a to 5 f are formed on the surface in contact with the high voltage electrode 3. Each of the conductive films 5a to 5f is formed in a substantially square shape with four rounded corners. That is, each of the conductive films 5a to 5f has an aspect ratio of approximately 1: 1. Each of the conductive films 5a to 5f is provided at a position corresponding to the convex portions 3a to 3f of the high-voltage electrode 3, and has substantially the same shape as the convex portions 3a to 3f. Adjacent conductive films are separated from each other by a predetermined interval. The main surfaces of the respective conductive films 5a to 5f are formed so as to exist on the same plane, and are formed so as to have high-precision flatness. Further, between the adjacent conductive films, large and small source gas uniform supply holes 5g and 5h are drilled so that the source gas flows evenly into the discharge regions 27a to 27f, respectively.

  The sizes of the conductive films 5a to 5f are also related to the sizes of the six discharge regions 27a to 27f described above. That is, the size of the six discharge regions 27a to 27f is determined by the size of the convex portions 3a to 3f of the high-voltage electrode 3 and the size of the conductive films 5a to 5f.

  In this way, the conductive films 5a to 5f are directly formed on the surface of the dielectric plate 5, and the dielectric plate 5 and the high voltage electrode 3 are brought into contact with each other through the conductive films 5a to 5f. That is, the convex portions 3 a to 3 f of the high voltage electrode 3 and the conductive films 5 a to 5 f of the dielectric plate 5 are in contact with each other. With such a configuration, even if there is a partial contact failure between the surfaces of the convex portions 3a to 3f of the high voltage electrode 3 and the surfaces of the conductive films 5a to 5f, the conductive films 5a to 5f and the high voltage The electric potential of the electrode 3 becomes the same electric potential, so that unauthorized discharge due to partial contact failure does not occur, the efficiency of the ozone generator 100 is prevented from being lowered, and the life of the ozone generator is extended.

  For forming discharge regions 27a to 27f on the surface of dielectric plate 5 opposite to the surface on which conductive films 5a to 5f are formed, that is, on the surface of dielectric plate 5 on the low voltage electrode 7 side (discharge region side). Spacers 13 are provided. The spacer 13 forms a very thin space having an aspect ratio of 1: 1. In the present embodiment, the spacer 13 has an elongated rod shape or disk shape with a thickness of 0.1 mm. The spacer 13 is formed by, for example, machining the plate-like dielectric plate 5 and cutting the periphery thereof so that the spacer 13 is cut into a relatively convex shape. In this way, by cutting the dielectric plate 5 and the spacer 13 integrally from one material, the parts of the spacer 13 alone are eliminated as compared with the procedure of separately manufacturing and bonding the dielectric plate 5 and the spacer 13. The number of parts is reduced, and further, the positioning step of the spacer 13 is not required, and the assembly of the ozone generator is facilitated.

  As described above, the conductive films 5a to 5f are formed on one side surface and the spacer 13 is provided on the other side surface on both sides of the high-voltage electrode 3 in which the six convex portions 3a to 3f are formed on both main surfaces. A plurality of dielectric plates 5 are disposed so that the conductive films 5a to 5f are brought into contact with the convex portions 3a to 3f, and the high voltage electrode 3 is sandwiched therebetween, and the low voltage electrodes 7 are disposed on both surfaces thereof. Then, six discharge regions 27 a to 27 f are formed by the spacer 13 between the dielectric plate 5 and the low voltage electrode 7. The high voltage electrode 3, the low voltage electrode 7, the dielectric plate 5, and the spacer 13 stacked in this way constitute an electrode module 102, and a plurality of the electrode modules 102 are stacked. The manifold blocks 23 are respectively arranged between the upper and lower portions of 710, and these are fastened to the base 24 with a predetermined fastening force by fastening bolts 21a and 21b.

  Next, the operation will be described. When an AC / high voltage is applied to the high voltage electrode 3 and the low voltage electrode 7, silent (dielectric barrier) discharge is generated in the discharge regions 27a to 27f. At this time, when a gas containing oxygen gas (raw material gas) is passed through the discharge regions 27a to 27f, oxygen is converted and ozone is generated. The raw material gas filled in the generator cover 110 enters toward the center from the entire periphery of each of the discharge regions 27a to 27f as indicated by broken line arrows in FIG. The oxygen gas passes through the discharge regions 27a to 27f formed between the low voltage electrode 7 and the dielectric plate 5, and is converted into ozone in the meantime. In the present embodiment, the dielectric plate 5, the high-voltage electrode 3, and the discharge regions 27a to 27f formed between them each have a substantially square shape. The source gas flows from the entire periphery of the square toward the center and becomes ozone gas (ozonized oxygen gas) in the discharge regions 27a to 27f.

  In order to efficiently generate ozone gas, it is necessary to accurately maintain the discharge regions 27a to 27f, which are very thin spaces. By fastening the laminated body of the electrode module 102 between the electrode holding plate 22 and the base 24 with a plurality of fastening bolts 21a and 21b penetrating in the lamination direction with the manifold block 23 disposed on one side, The gap accuracy can be obtained.

  The discharge regions 27 a to 27 f are formed by the discharge region manufacturing spacer 13 disposed on the surface of the low voltage electrode 7. That is, the thickness (height in the stacking direction) of the discharge regions 27a to 27f is set by the spacer 13 for forming the discharge region. The accuracy of the discharge regions 27a to 27f is ensured by processing the height of the spacer 13 for producing the discharge region uniformly and fastening each electrode module 102 with a predetermined force with the fastening bolts 21a and 21b.

  As another means for efficiently generating ozone gas, there is a method for lowering the temperature in the discharge regions 27a to 27f. A high voltage electrode 3 and a low voltage electrode 7 are provided as electrodes, and a method of cooling both electrodes with water or gas is conceivable. Although the cooling effect of water and gas is greater with water, when water is used, a high voltage is applied to the high-voltage electrode 3, so the electrical conductivity of the cooling water must be reduced (eg, using ion-exchanged water). There is. On the other hand, there is no need to use gas, but there are advantages and disadvantages, such as a complicated structure, large noise, and a small heat capacity of the refrigerant.

  In the present embodiment, discharge regions 27 a to 27 f are formed adjacent to the low voltage electrode 7, and the discharge regions 27 a to 27 f are cooled by providing the cooling water passage 9 in the low voltage electrode 7. Further, in order to cool the high voltage electrode 3, a cooling water passage 9 is provided in the low voltage electrode 7, whereby the heat of the high voltage electrode 3 is released. The heat generated at the high voltage electrode 3 is cooled by the low voltage electrode 7 that is heat-sinked with cooling water. Thus, by simultaneously cooling the discharge regions 27a to 27f and the high voltage electrode 3, the gas temperatures of the discharge regions 27a to 27f can be kept low.

  In the present embodiment, the gas temperature in the discharge regions 27 a to 27 f is lowered by flowing cooling water through the low-voltage electrode 7. The generated ozone gas passes through the ozone gas passage 8 in the low pressure electrode 7, passes through the side portion of the low pressure electrode 7, passes through the ozone gas passage 8 formed by the stacked inlet / outlet portion 710 and the manifold block 23, and then passes through the ozone gas passage 8. The ozone gas outlet 11 provided on the table 24 is reached.

On the other hand, the cooling water as the refrigerant enters the ozone generator 100 from the cooling water inlet 12 provided in the base 24, passes through the cooling water passage 9 formed by the stacked inlet / outlet portion 710 and the manifold block 23, Cooling formed by the inlet / outlet part 710 and the manifold block 23 through the cooling water outlet 9b of the inlet / outlet part 710 after entering the low-pressure electrode 7 from the cooling water inlet 9a of the inlet / outlet part 710 and circulating around the entire surface of the low-pressure electrode discharge part 700. It passes through the water passage 9 and exits from the cooling water outlet 12 provided in the base 24.

  In this embodiment, since the high voltage electrode 3 can be cooled by the low voltage electrode 7, it is not necessary to reduce the electrical conductivity of the cooling water flowing to the low voltage electrode 7. Can be used. Therefore, the cooling water can be made inexpensive.

  For this reason, in the present embodiment, the cooling efficiency of the discharge regions 27a to 27f can be improved, and the temperature of the discharge regions 27a to 27f can be lowered satisfactorily. As a result, the discharge power density can be increased without reducing the ozone generation efficiency, the number of electrode modules 102 can be reduced, and the apparatus can be reduced in size and price. Furthermore, since the high-voltage electrode 3 is cooled via the low-voltage electrode 7, it is not necessary to use ion-exchanged water or the like having a low electrical conductivity as the cooling water, and it is possible to use cooling water that is about the same as general tap water. This eliminates the need for an electrical conductivity monitoring device, ion-exchanged water circulation equipment, and the like, thereby reducing the cost by reducing the number of device components and reducing maintenance costs.

  In this embodiment, in order to increase the ozone generation amount (capacity) of the ozone generator 100, the discharge area of one electrode module 102 is increased, and the electrode modules 102 are stacked in multiple stages to increase the capacity. Realized. Further, from the viewpoint of improving the space factor of the ozone generator 100, the shape of one electrode module 102 is rectangular.

  In this way, in response to increasing the area of one electrode module 102, if the area of the discharge region is simply increased and the discharge region is formed on the entire surface of the electrode module 102, the central portion and the peripheral portion are formed. The difference in discharge power density is increased. Further, when the discharge area becomes large, there arises a problem that the raw material gas cannot flow evenly on the discharge surface.

  If there is a problem of variations in the discharge power density or uneven material gas flow, the ozone concentration is lowered and the ozone generation efficiency is deteriorated. Furthermore, if the electrode shape is made a rectangular flat plate in order to improve the space factor of the ozone generator 100, the discharge area also becomes a rectangular shape, so that the aspect ratio greatly deviates from 1: 1, and the gas flow rate in the discharge area Since the distribution is further deteriorated, the ozone concentration is further decreased, and the ozone generation efficiency is further deteriorated.

  In the present embodiment, the electrode shape is rectangular and the discharge region for one electrode is enlarged. However, by forming the six convex portions 3a to 3f on the high-voltage electrode 3, this large discharge region is changed to six small discharge regions. The ozone gas extraction holes 28a to 28f are provided on the main surface of the low-pressure electrode 7 that is divided into 27a to 27f and is located at a substantially central position of each of the discharge regions 27a to 27f.

  By adopting such a configuration, only the discharge region of the portion facing the six convex portions 3a to 3f is generated in the high-voltage electrode 3, so that the problem of the aspect ratio of one discharge region and the increase of the discharge region is improved. Can do. Then, the source gas is supplied from the entire periphery of the discharge regions 27a to 27f, and is taken out from the ozone gas extraction holes 28a to 28f provided in the low pressure electrode 7 at the center of each region. Therefore, the source gas can be made to flow almost uniformly in each discharge region.

The ozone gas generated from one electrode module 102 can be collected in an ozone gas passage 8 provided through the inlet / outlet portion 710 of the low-pressure electrode 7 in the stacking direction and taken out from the ozone gas passage 8 , and the low-pressure electrode 7 is cooled. Cooling water as a refrigerant is supplied from a cooling water inlet 9 a provided in the inlet / outlet part 710, circulates in the low pressure electrode 7 to cool the low pressure electrode 7, and then enters a cooling water outlet 9 b provided in the inlet / outlet part 710. Return.

  In the present embodiment, in order to divide the discharge region into six regions 27a to 27f, the distance between the adjacent convex portions 3a to 3f of the high voltage electrode 3 is set to about 3 mm. The distance between adjacent conductive films 5a to 5f of the dielectric plate 5 was also about 3 mm. However, when experiments were conducted while changing the distance in various ways, it was found that a distance of 1.5 mm or more was sufficient. On the other hand, when the thickness is 1.5 mm or less, unauthorized discharge occurs in the space between the adjacent discharge regions 27a to 27f. In addition, problems such as electrode damage due to unauthorized discharge and a decrease in ozone generation efficiency occurred.

  In the present embodiment, the ozone gas can be taken out from the inlet / outlet portion 710 provided at the end of the low-pressure electrode 7 through the ozone gas passage 8 provided in the low-pressure electrode 7 from the central portion of each of the discharge regions 27a to 27f. I have to. Therefore, the ozone gas generated in each of the discharge regions 27a to 27f can be taken out as it is, and there is no need to provide a structure for separating the ozone gas portion and the raw material gas portion as in the conventional device, and the raw material gas is mixed into the ozone gas in the conventional device. Thus, it is possible to prevent the “gas short pass” phenomenon that the ozone concentration to be taken out decreases and to take out a high concentration ozone gas.

  In addition, the low voltage electrode 7 as the first electrode includes a rectangular flat plate electrode discharge portion 700 in which the main surface forms an electrode and an ozone gas passage 8 and a cooling water passage 9 as a refrigerant passage are formed therein. Since it has an inlet / outlet part 710 provided with a gas outlet 8a of the ozone gas passage 8, a cooling water inlet 9a of the cooling water passage 9, and a cooling water outlet 9b provided on either side of the part 700, the ozone gas extraction Piping for supplying and discharging refrigerant can be simplified.

  In the present embodiment, the flat plate-like first electrode 7, the flat plate-like second electrode 3 facing the main surface of the first electrode 7, the first electrode 7 and the second electrode A plurality of electrode modules 102 having a flat dielectric plate 5 provided between the first electrode 7 and a spacer 13 forming a discharge region are stacked, and an alternating current is provided between the first electrode 7 and the second electrode 3. A voltage was applied to cause discharge in the discharge region into which the source gas was injected to generate ozone gas, and the first electrode 7 was generated in the discharge region between the electrode surface facing the discharge region and the side portion. An ozone gas passage 8 for taking out ozone gas is formed, and a plurality of ozone gas passages are dispersedly arranged in the discharge region of the first electrode in order to make the flow velocity distribution in the radial direction around the ozone gas passage 8 substantially uniform. Ozone gas passages 8 are respectively formed inside the first electrode 7. Since the ozone gas generated in the discharge section is collected and taken out, the discharge area can be increased without impairing the ozone generation performance, and even if the discharge area is increased with respect to one electrode surface, the ozone generation performance is not impaired and reliable. Therefore, the laminated structure of the modules can be easily constructed, and the piping for extracting ozone gas can be simplified.

  Further, the discharge region is located between the first electrode 7 and the second electrode 3 so as to correspond to the plurality of ozone gas passages 8 so that the flow velocity distribution in the radial direction around the ozone gas passages 8 becomes substantially uniform. Therefore, the discharge area can be further increased without impairing the ozone generation performance, and even if the discharge area is increased with respect to one electrode surface, the ozone generation performance is not impaired and is reliable. It can be made high, the plane accuracy of the electrode surface can be ensured with high accuracy, the laminated structure of the module can be easily constructed, and the piping for extracting ozone gas can be simplified.

Embodiment 2. FIG.
FIG. 20 is a schematic cross-sectional view showing another example of a flat plate type ozone generator equipped with the ozone generator of the present invention. FIG. 21 is a top view of the flat plate ozone generator of FIG. In the present embodiment, the ozone generator 100 has an outer shape of a rectangular cross section for the purpose of increasing the capacity and improving the space factor of the ozone generator. In this embodiment, an ozone transformer 200 and a high-frequency inverter 300 that supply electric power to the ozone generator 100 are installed in parallel with the ozone generator 100. For this reason, the ozone generator 100 is formed in an elongated rectangular shape. Accordingly, the high-voltage electrode 3, the low-voltage electrode 7, and the dielectric plate 5 housed in the interior are further formed into an elongated rectangular shape as compared with the first embodiment. Therefore, the discharge region formed in the high voltage electrode 3 and the low voltage electrode 7 is divided into three discharge regions 27a to 27c. Accordingly, the convex portions provided on the high-voltage electrode 3 and the conductive films provided on the dielectric plate 5 are also formed in three.
Other configurations are the same as those of the first embodiment.
Although not shown in the structural diagrams of the low-pressure electrode of the ozone generator shown in FIGS. 21, 22, and 27, the way of cooling water is basically the same as the way of FIG. In addition, the ozone gas extraction hole has a structure in which the passage is branched in the low-pressure electrode 7 in FIG. 5 and the ozone gas extraction holes 28a to 28f are provided at the tip portions. The ozone gas extraction hole of the low-pressure electrode of the ozone generator is provided along the center line of the low-pressure electrode, and one passage is provided on the center line of the low-pressure electrode. Although three are provided on the center line of the ozone generators of FIGS. 21, 22, and 27, they are not necessarily provided on the center line. For example, they may be arranged in a staggered manner apart from the center line.

  The discharge region of the present embodiment has a rectangular shape that is further elongated than that of the first embodiment, and is divided into three discharge regions 27a to 27c. However, the aspect ratio of the three discharge regions 27a to 27c is approximately 1: 1 as in the first embodiment. Therefore, a decrease in ozone generation efficiency can be prevented, and a decrease in ozone concentration can be prevented.

  FIG. 22 is a top view of the flat plate ozone generator of FIG. 20 showing another example of the present embodiment. In the apparatus shown in FIG. 21, the discharge region is divided into three parts 27a to 27c. However, when the discharge region is elongated and the ozone gas extraction holes 28a to 28c are formed in one row, the discharge region is shown in FIG. Assuming that the discharge area is equally divided so that the aspect ratio is approximately 1 without dividing the discharge area as in the apparatus, the ozone gas extraction hole 28a to 28c is simply provided at the center of each area. The flow velocity distribution of the ozone gas in the radial direction around the holes 28a to 28c can be made to flow substantially uniformly. And the performance comparable with the apparatus of FIG. 21 can be obtained.

Embodiment 3 FIG.
FIG. 23 is a front sectional view of a flat plate type ozone generator provided with an ozone generator according to Embodiment 3 of the present invention. 24 is a side view of the ozone generator of FIG. 23 on the gas inlet / outlet side. 25 is a side view of the ozone generator of FIG. 23 on the high voltage supply side. FIG. 26 is a front sectional view of the ozone generator module of the ozone generator of FIG. FIG. 27 is a plan view of an ozone generator module of the ozone generator of FIG. FIG. 28 is a side view of the gas inlet / outlet side of the ozone generator module of the ozone generator of FIG. FIG. 29 is a side view of the high voltage supply unit side of the ozone generator module of the flat plate ozone generator of FIG.

The apparatus according to the present embodiment includes a cylindrical tube container 1100. The cylindrical container 1100 has a sealed structure in which both end faces are closed by end face lids 24a and 24b connected by welding. In the present embodiment, an elongated flat plate type ozone generator 101 is housed in a cylindrical tube container 1100 having a diameter of about 100 mm via a module base 24c. The cooling water outlet pipe 112a extends through the end cover 24a to the outside. The periphery of the portion where the outlet pipe 112a penetrates the end face lid 24a is hermetically fixed to the end face lid 24a by a pipe cap C3 having a hole formed in the center. The outlet pipe 112a and the pipe cap C3 are joined at a joint W7. This joining is performed by brazing or welding. The cooling water inlet pipe 112b extends through the end face lid 24a. The periphery of the portion where the inlet pipe 112b passes through the end face lid 24a is hermetically fixed to the end face lid 24a by a pipe cap C1 having a hole formed in the center. The inlet pipe 112b and the pipe cap C1 are joined at a joint W5.

  The raw material gas is supplied from the raw material gas intake pipe 1010 communicating with the cylindrical container 1100, and the cylindrical container 1100 is filled with the raw material gas. In this way, the raw material gas is continuously supplied, and the ozone gas is taken out from the ozone gas extraction pipe 111. The ozone gas extraction pipe 111 extends outside through the end face lid 24a. The periphery of the portion where the ozone gas extraction pipe 111 passes through the end face lid 24a is hermetically fixed to the end face lid 24a by a pipe cap C2 having a hole formed in the center. The ozone gas extraction pipe 111 and the pipe cap C2 are joined at a joint W6.

The high-pressure bushing 120 extends outside through the end face lid 24b. The periphery of the portion where the high voltage bushing 120 penetrates the end surface lid 24b is hermetically sealed and fixed to the end surface lid 24b by a high voltage power supply flange 120a.

23, 24, and flat plate laminate ozone generating apparatus of FIG. 25, an elongated videos flat plate laminate ozonizer 101 to the cylindrical tubular container 1100 about φ100mm via the module base, one of the tubular container 1100 The ozone gas extraction pipe 111 communicating with the ozone gas passage 8, the cooling water inlet pipe 112 b of the cooling water passage 9, and the cooling water output pipe 112 a are formed at the ends of the ozone gas extraction pipe 111 and the raw material gas intake pipe. 1010 and the high-pressure bushing 120 are provided, and the cooling water inlet pipe 112b, outlet pipe 112a, and ozone gas extraction pipe 111 are covered with pipe caps C1, C3, and C2, and hermetic welding is performed. The high-pressure bushing 120 is hermetically welded around the high-voltage power supply flange 120a. Furthermore, the end face lids 24a and 24b at both ends and the cylindrical tube container 1100 are hermetically welded around the welded portions W2 and W3.

In the apparatus of the second embodiment, the cooling water inlet / outlet pipe, the ozone gas outlet pipe and the high-voltage power supply terminal are structured to be taken out from the base surface provided at the bottom, but in this embodiment, the space factor of the apparatus, the cylinder In consideration of ease of assembly with the container 1100, the end surface lid 24a is provided with an inlet pipe 112b, an outlet pipe 112a, and an ozone gas extraction pipe 111.

  Thus, by storing the flat plate type ozone generator 101 in the cylindrical container 1100, the ozone generator can be made compact and large in capacity, and the container 1100 is a cylindrical container. The pressure intensity can be increased and reduced. Further, the assembly work and welding work of the apparatus are facilitated, and the assembly line can be easily automated.

  As an example, when the conventional cylindrical ozone generator shown in FIG. 49 and FIG. 50 is used to form a generator having a diameter of about 100 mm and a length of about 500 mm, the cylindrical high-pressure electrode space becomes a useless space. This structure is inserted, and a discharge gap of 0.04 cm is provided, and ozone can be generated only at about 200 g / h. On the other hand, in the ozone generator of the present embodiment, an electrode having a width of 6 cm and a length of 50 cm has a laminated structure so as to have about 6 discharge surfaces, the electrode cooling structure is double-sided cooling, and the discharge gap is set to 0. When it is 01 cm and the cylindrical container 300 having a diameter of 100 mm and a length of 50 cm is used, the ozone generator generates an amount of about 0.5 kg / h by one generator and generates high-concentration ozone.

Reference example 1
Figure 30 is a sectional view taken along the line K-K of Yes Figure 31 a longitudinal section view of the outline of the flat plate laminate ozone generating apparatus of Reference Example 1 with an ozone generator. FIG. 31 is a cross-sectional view of the flat plate type ozone generator, and is a cross-sectional view taken along line LL in FIG. Reference Example 1 is a flat plate type ozone generator equipped with a rectangular ozone generator. A plurality of flat plate type ozone generators 101a, 101b, 101c, 101d are inserted into one container, and a large capacity An ozone generator is realized. In the figure, the apparatus of Reference Example 1 has a cylindrical tube container 1100. The cylindrical container 1100 has a sealed structure in which both end surfaces are closed by end surface lids 24a and 24b. This apparatus has a shelf-like module base 24c. Also, cooling water inlet / outlet pipes 112aa, 112ab, 112ac, 112ad, 112ba, 112bb, 112bc, 112bd and a plurality of ozone gas extraction pipes 111a, 111b, 111c and 111d.

  Furthermore, the cooling water header pipes 112a-p (means for branching and sending the refrigerant to the plurality of ozone generating modules) that also serve as branch pipes for dispersing the plurality of flat plate-type ozone generators, and the plurality of flat plates There is provided a cooling water header pipe 112b-p (means for collecting and taking out refrigerant from a plurality of ozone generating modules) which also serves as a collecting pipe for collecting from the stacked ozone generator. The cylindrical container 1100 is provided with an inlet pipe 112b and an outlet pipe 112a as inlets and outlets for the cooling water of the entire apparatus, and the ozone outlet 111p of the entire apparatus (collects ozone gas from a plurality of ozone generation modules). And a high-pressure bushing 120 (means for supplying a voltage to the high-voltage electrodes of a plurality of ozone generation modules).

In Reference Example 1 , a plurality of elongated flat plate-type ozone generators 101 are installed side by side on the module base 24 in one container 1100, and the cooling water inlet / outlet piping and the ozone gas extraction pipe of the flat plate-type ozone generator 101 are cooled. The water header pipes 112b-p and 112b-p and the ozone outlet 111p are taken out.

  By placing a plurality of flat-plate-type ozone generators 101 in one large cylindrical container, a large-scale ozone generator of several tens of kg / h can be produced with a size of 1/5 or less of the conventional size, Compactness can be achieved.

As an example, in Reference Example 1 , about 100 flat-plate ozone generators 101 having a diameter of 800 mm and a 500 mm container (volume 0.25 cm 3) and a 60 mm square and a length of 500 mm are accommodated. That is, when the flat plate type ozone generator 101 is set to about 0.5 kg / h, an ozone generator having a large capacity of about 50 kg / h can be obtained. Compared with the conventional cylindrical ozone generator as shown in FIG. 53, it is very small, and it is possible to realize a high concentration ozone generator with a large capacity.

Reference example 2
Figure 32 is a schematic sectional view of a flat plate laminate ozone generating apparatus of Reference Example 2 with an ozone generator. In Reference Example 2 , an insulating plate 2 having both insulation and cooling functions is provided on the back side of the high voltage electrode 3, a high voltage electrode cooling plate 1 is provided on the insulating plate 2, and a refrigerant is applied to the surface of the high voltage electrode cooling plate 1. By flowing, the high voltage electrode 3 can be cooled via the insulating plate 2.

  The high voltage electrode cooling plate 1 is produced by bonding two metal plates. A large number of U-shaped grooves having a depth of several millimeters are engraved in advance on one main surface of the two metal plates by half etching or machining. Then, two metal plates are bonded together so that the grooves face each other, and a cooling water passage is formed inside. The two metal plates are overlapped and joined by brazing or hot pressing or the like, and the inside has a confidential structure.

  An ozone gas passage and a cooling water passage extending in the stacking direction are formed in the input / output portion provided on the side portion of the high-voltage electrode cooling plate 1 in the same manner as the low-pressure electrode 7. Here, the cooling water passage is divided into a cooling water inlet (refrigerant inlet) and a cooling water outlet (refrigerant outlet). The cooling water passage communicating with the cooling water inlet and the cooling water outlet is formed almost entirely in the high voltage electrode cooling plate 1 as in the low voltage electrode 7. That is, a plurality of cooling water passages are concentrically formed from the central portion to the outer peripheral portion in the rectangular flat plate-shaped high voltage electrode cooling plate 1. Adjacent concentric cooling water passages are partitioned by narrow ribs.

  The ozone gas passage and the cooling water passage formed in the inlet / outlet portion extending in the stacking direction are connected to the ozone gas passage and the cooling water passage provided in the manifold block 23 so as to be linear, respectively, and finally provided on the base 24. The ozone gas outlet 11 and the cooling water inlet / outlet 12 are connected.

In the ozone generator of Reference Example 2 , it is possible to improve the density of discharge power injected into the apparatus by adopting a structure of cooling both electrodes that cools not only the low voltage electrode 7 but also the high voltage electrode 3, The device can also be made compact. Further, since the high voltage electrode 3 is electrically insulated by the insulating plate 2, the cooling water for cooling the high voltage electrode 3 can be shared with the cooling water for the low voltage electrode 7. In addition, the structure for cooling both electrodes can be provided without increasing the number of pipes of the apparatus.

Reference example 3
Figure 33 is a schematic sectional view of a flat plate laminate ozone generating apparatus of Reference Example 3 with an ozone generator. In Reference Example 3 , the number of parts of the ozone generator is reduced, the source gas space area of the device is reduced, the joint between the generator cover 110 and the base 24 is reduced, and the workability of attaching the generator cover 110 is improved. It was made for the purpose.

In the reference example 3 , the function of pressing the electrode module 102, which is composed of the low voltage electrode 7, the high voltage electrode 3, the dielectric plate 5, and the spacer 13 (not shown) and is laminated to the base 24 side with a predetermined pressing force, The generator cover 110 is held. The generator cover 110 is produced by drawing using a thin stainless steel plate, and has a plurality of holding blocks 110a on the inner side of the ceiling. The holding block 110a is protruded from the back surface of the ceiling so as to be managed to have a predetermined height. The generator cover 110 is not provided with a fastening flange formed on the peripheral edge of the opening of the first embodiment.

  On the other hand, an L-shaped member 24a having an L-shaped cross section is attached to the periphery of the base 24 on which the ozone generator electrode 101 formed by stacking the electrode modules 102 is placed by brazing. The generator cover 110 covers the ozone generator electrode 101, covers the ozone generator electrode 101, and presses the electrode module 102 stacked by the holding block 110a from above to the base 24 side. And the opening peripheral part of the generator cover 110 and the L-shaped member 24a provided in the outer peripheral part of the base 22 are joined by butt joining, and also a brazing material is poured and brazed or welded to the surrounding part. It is a monolithic structure. The generator cover 110 and the base 24 form a sealed space inside.

  In the ozone generator having such a configuration, the apparatus can be made compact, the number of parts can be reduced, and the assembly work process can be improved. Furthermore, automated assembly of the apparatus can be achieved.

Embodiment 4 FIG.
FIG. 34 is a schematic view of a low-pressure electrode showing still another example of the ozone generator of the present invention. The low-voltage electrode 17 of the present embodiment includes a rectangular flat plate-shaped low-pressure electrode discharge portion 1700 having a principal surface forming an electrode and an ozone gas passage 8 and a cooling water passage 9 formed therein, and one side of the low-pressure electrode discharge portion 1700 And a gas outlet 8a of the ozone gas passage 8, a cooling water inlet (refrigerant inlet) 9a of the cooling water passage 9, and an inlet / outlet portion 1710 formed with a cooling water outlet (refrigerant outlet) 9b. The cooling water passage 9 as a refrigerant passage provided in the low voltage electrode discharge part 1700 is formed over the entire low voltage electrode discharge part 1700 so that the cooling water as the refrigerant goes around the whole low voltage electrode discharge part 1700. ing.
The low-pressure electrode 17 is narrower than the electrode width of the low-pressure electrode discharge part 1700, and the inlet / outlet part 1710 in which the gas outlet 8 of the ozone gas passage 8 and the refrigerant inlet 9a and the refrigerant outlet 9b of the refrigerant passage 9 are formed. A constricted portion 1720 having a low rigidity for joining the side portion of the portion 1700 and the side portion of the input / output portion 1710 so as to reduce the influence of deformation of the low-voltage electrode discharge portion 1700 on the input / output portion 1710.

  A constricted portion 1720 is provided between the low voltage electrode discharge portion 1700 and the input / output portion 1710. The constriction 1720 is deformed by either the low voltage electrode discharge part 1700 or the input / output part 1710 when the low voltage electrode discharge part 1700 and the input / output part 1710 are fastened by the fastening bolt 21a and the fastening bolt 21b, respectively. It is formed as a portion having a small rigidity so as not to affect the other fastening force.

The low voltage electrode 17 is produced by bonding two metal electrodes (not shown). A large number of U-shaped grooves having a depth of several millimeters are engraved in advance on one side main surface of each metal electrode by half etching or machining. Two metal electrodes are bonded to each other so that the grooves face each other, and an ozone gas passage 8 and a cooling water passage 9 are formed inside. That is, on one side main surface of each metal electrode, both a U-shaped groove for forming the ozone gas passage 8 and a U-shaped groove for forming the cooling water passage 9 are formed. ing. The two metal electrodes are overlapped and joined by brazing or hot pressing, and the inside is a secret structure.
Other configurations are the same as those of the first embodiment.

  As described above, the low voltage electrode 17 as the first electrode of the present embodiment is manufactured by bonding two metal flat plates each having a groove formed on the main surface thereof so that the grooves face each other. The ozone gas passage 8 and the cooling water passage 9 are formed on the main surface, and both the groove for forming the ozone gas passage and the groove for forming the refrigerant passage are formed on the bonded main surface. Or a thin electrode.

  Each metal electrode has six ozone extraction holes 28a to 28f formed in the main surface in the same manner as in the first embodiment. Each of the ozone extraction holes 28 a to 28 f communicates with the ozone gas passage 8. The ozone gas that has entered the low pressure electrode 7 through the ozone extraction holes 28 a to 28 f merges in the low pressure electrode 17 and is guided to the ozone gas passage 8 provided in the inlet / outlet portion 1710.

  On the other hand, the cooling water as the refrigerant enters the low voltage electrode 17 from the cooling water inlet (refrigerant inlet) 9 a provided in the inlet / outlet part 1710, travels through the entire low voltage electrode 17, and then provided in the inlet / outlet part 1710. The cooling water exit (refrigerant exit) 9b exits.

  In the ozone generator having such a configuration, the low voltage electrode 17 as the first electrode is produced by bonding two metal flat plates each having a groove formed on the main surface thereof so that the grooves face each other. Then, the ozone gas passage 8 and the cooling water passage 9 are formed inside, and both the ozone gas passage forming groove and the refrigerant passage forming groove are formed on the bonded main surface. Or a thin electrode.

Embodiment 5 FIG.
FIG. 35 is a schematic view of a low-pressure electrode showing still another example of the ozone generator of the present invention. The low-voltage electrode 27 of the present embodiment includes a rectangular flat plate-shaped low-pressure electrode discharge part 2700 having a main surface forming an electrode and an ozone gas passage 8 and a cooling water passage 9 formed therein, and a first of the low-pressure electrode discharge part 2700. a first entrance and exit part 2710 which the cooling water inlet (coolant inlet) 9a of the gas outlet 8 of the provided on the side of the side ozone gas passage 8 and cooling water passages 9 are formed, a first low voltage electrode discharge portion 2700 And a second inlet / outlet part 2730 provided on the side of the second side opposite to the side of the cooling water and having a cooling water outlet (refrigerant outlet) 9b of the cooling water passage 9 formed therein.
The low-pressure electrode 27 includes a first inlet / outlet portion 2710 that is narrower than the electrode width of the low-pressure electrode discharge portion 2700 and has the gas outlet 8 of the ozone gas passage 8 and the refrigerant inlet 9a of the refrigerant passage 9 formed therein, and the low-pressure electrode discharge portion. 2700, which is narrower than the electrode width of 2700 and formed with the refrigerant outlet 9b of the refrigerant passage 9, the side of the first side of the low-voltage electrode discharge part 2700, and the side of the first inlet / outlet part 2710 A first constriction portion 2720 having a low rigidity, and a first side of the low-voltage electrode discharge portion 2700, so as to reduce the influence of deformation of the low-voltage electrode discharge portion 2700 on the first input / output portion 2710 The rigidity of coupling the side portion of the second side opposite to the side portion and the side portion of the second input / output portion 2730 so as to reduce the influence of the deformation of the low voltage electrode discharge portion 2700 on the second input / output portion 2730. Small second constriction Has a 2720, a.

In the above-described fourth embodiment, one cooling water passage 9 is provided, but in the present embodiment, two cooling water passages 9 are provided. The cooling water passage 9 as a refrigerant passage provided in the low voltage electrode discharge unit 2700 is formed over the entire low voltage electrode discharge unit 2700 so that the cooling water as the refrigerant goes around the entire low voltage electrode discharge unit 2700. ing.

A constricted portion 2720 is provided between the low voltage electrode discharge portion 2700 and the input / output portions 2710 and 2730, respectively. The constricted part 2720 is formed by either the low voltage electrode discharge part 2700 or the input / output part 2710, 2730 when the low voltage electrode discharge part 2700 and the input / output parts 2710, 3730 are fastened by the fastening bolt 21a and the fastening bolt 21b, respectively. It is formed as a portion having small rigidity so that the generated deformation does not affect the other fastening force.
Other configurations are the same as those of the first embodiment.

  In the low voltage electrode 27 of the present embodiment, the ozone gas outlet 8a and the cooling water inlet 9a are formed in the first inlet / outlet part 2710 provided on the side of the first side of the low voltage electrode discharge part 2700, A cooling water outlet 9b is formed in a second inlet / outlet portion 2730 provided on a side portion of the second side opposite to the first side of the low-voltage electrode discharge portion 2700.

  In the ozone generator having such a configuration, the low-pressure electrode 27 serving as the first electrode is a rectangular flat plate electrode discharge portion in which the main surface forms an electrode and the ozone gas passage 8 and the cooling water passage 9 are formed therein. 2700, a first inlet / outlet portion 2710 provided on the side of the first side of the electrode discharge portion 2700, in which the gas outlet 8a of the ozone gas passage 8 and the cooling water inlet 9a of the cooling water passage 9 are formed, and an electrode discharge Since the second inlet / outlet part 2730 provided on the side of the second side opposite to the first side of the part 2700 and formed with the cooling water outlet 9b of the cooling water passage 9 is provided, the flow of the cooling water is 1 Only the direction, the half-etching pattern is simplified, and the pressure loss when the cooling water passes through the low-pressure electrode 27 can be reduced. Improve Door can be.

Embodiment 6 FIG.
FIG. 36 is a schematic view of a low-pressure electrode showing still another example of the ozone generator of the present invention. The low-pressure electrode 37 of the present embodiment includes a rectangular flat plate-shaped low-pressure electrode discharge part 3700 having a principal surface forming an electrode and an ozone gas passage 8 and a cooling water passage 9 formed therein, and a first of the low-pressure electrode discharge part 3700. The first inlet / outlet portion 3710 provided in the side portion of the ozone gas passage 8 in which the gas outlet 8a of the ozone gas passage 8 is formed, and the second side portion opposite to the first side of the low-voltage electrode discharge portion 3700 Cooling of the cooling water passage 9 provided on the side of the second side of the second low-pressure electrode discharge portion 3700, similarly to the second inlet / outlet portion 3730 provided with the cooling water inlet (refrigerant inlet) 9a of the cooling water passage 9. And a third inlet / outlet part 3740 having a water outlet (refrigerant outlet) 9b. The cooling water passage 9 as a refrigerant passage provided in the pressure electrode discharge unit 3700 is formed over the entire low-pressure electrode discharge unit 3700 so that the cooling water as the refrigerant goes around the entire low-pressure electrode discharge unit 3700. ing.
The low voltage electrode 37 is narrower than the electrode width of the low voltage electrode discharge part 3700 and narrower than the first input / output part 3710 in which the gas outlet 8 of the ozone gas passage 8 is formed, and the electrode width of the low voltage electrode discharge part 3700. The third inlet / outlet part 3730 where the refrigerant inlet 9a of the refrigerant passage 9 is formed, and the third inlet / outlet part 3740 which is narrower than the electrode width of the low pressure electrode discharge part 3700 and where the refrigerant outlet 9b of the refrigerant passage 9 is formed. And the side of the first side of the low voltage electrode discharge part 3700 and the side of the side of the first input / output part 3710 reduce the influence of deformation of the low voltage electrode discharge part 3700 on the first input / output part 3710. The first constriction 3720 having a small rigidity coupled to the second side, the second side facing the first side of the low-voltage electrode discharge part 3700, and the side of the second input / output part 3730 are connected to the second side. Of low voltage on the entrance / exit part 3730 Second constriction portion 3720 having a low rigidity for coupling so as to reduce the influence of deformation of discharge portion 3700, a side portion of the second side of low-voltage electrode discharge portion 3700, and a side portion of the side of third input / output portion 3740 And a third constricted portion 3720 having a small rigidity that couples the third input / output portion 3740 with the deformation of the low-voltage electrode discharge portion 3700.

A constricted portion 3720 is provided between the low-voltage electrode discharge portion 3700 and the input / output portions 3710, 3730, and 3740, respectively. The constricted portion 3720 includes the low voltage electrode discharge portion 3700 and the input / output portions 3710, 3730, and 3740 when the low voltage electrode discharge portion 3700 and the input / output portions 3710, 3730, and 3740 are fastened by the fastening bolt 21a and the fastening bolt 21b, respectively. It is formed as a portion with small rigidity so that the deformation occurring in either of the above does not affect the other fastening force.
Other configurations are the same as those of the first embodiment.

In the low voltage electrode 37 of the present embodiment, the ozone gas outlet 8 is formed in the first inlet / outlet portion 3710 provided on the side of the first side of the low voltage electrode discharge portion 3700, and the low pressure electrode discharge portion 3700. A cooling water inlet 9a and a cooling water outlet 9b are respectively formed in two second inlet / outlet portions 3730 and 3740 provided on the side of the second side. In the present embodiment, the second inlet / outlet part in which the cooling water inlet 9a and the cooling water outlet 9b are formed is divided into two parts, an inlet / outlet part 3730 and an inlet / outlet part 3740. It may be put together.

In the ozone generator having such a configuration, the low-pressure electrode 37 serving as the first electrode is a rectangular flat plate electrode discharge portion in which the main surface forms an electrode and the ozone gas passage 8 and the cooling water passage 9 are formed therein. 3700, a first inlet / outlet portion 3710 provided on a side portion of the first side of the electrode discharge portion 3700, in which the gas outlet 8 of the ozone gas passage 8 is formed, and a first side of the electrode discharge portion 3700. Since it has the 2nd entrance / exit part 3730, 3740 in which the cooling water inlet 9a of the cooling water passage 9 provided in the side part of the 2nd side and the cooling water outlet 9b were formed, the entrance / exit part in which the ozone gas passage 8 was provided And the inlet / outlet part provided with the cooling water passage can be separated, and the ozone gas piping and the cooling water piping outside the ozone generator communicating with these can be separated from each other, so that the piping can be easily routed.

Reference example 4
FIG. 37 is a top view of the high-voltage electrode of Reference Example 4 of the ozone generator, FIG. 38 is a front sectional view of the high-voltage electrode, and FIG. 39 is a side sectional view of the high-voltage electrode. In the high voltage electrode 33 of Reference Example 4 , two conductive thin plates such as stainless steel plates are overlapped and joined. One conductive thin plate is pressed so that a plurality of flat convex portions are formed on the front surface and a plurality of flat concave portions are formed on the back surface, and the back surfaces are overlapped and joined. In the high-voltage electrode 33, six substantially square convex portions 33a to 33f are formed on both main surfaces. The high voltage electrode 33 manufactured in this way is substantially the same as the high voltage electrode of the first embodiment in terms of the outer shape.

  In the ozone generator having such a configuration, the high-voltage electrode 33 as the second electrode is made of two pieces of metal having a convex portion formed on the front surface and a concave portion formed at a position corresponding to the convex portion on the back surface. Since the flat plate is bonded with the concave portions facing each other, the high voltage electrode 33 can be lightened. Further, the cost can be reduced by reducing the material, and furthermore, the structure of the divided discharge region can be easily constructed. Moreover, since the shape of the top surface of the convex portion is approximately square, the aspect ratio of the divided discharge region formed corresponding to this can be approximately 1: 1.

Reference Example 5
40 is a top view of the high-voltage electrode of Reference Example 5 of the ozone generator, FIG. 41 is a front sectional view of the high-voltage electrode, and FIG. 42 is a side sectional view of the high-voltage electrode. In the high voltage electrode 43 of Reference Example 5 , two conductive thin plates such as stainless steel plates are overlapped and joined. One conductive thin plate is pressed so that a convex portion is formed on the front surface and a concave portion is formed on the back surface, and the back surfaces are overlapped and joined. And in the high voltage electrode 43, six circular convex parts 43a-43f are formed in both main surfaces, respectively. Other configurations are the same as those in Reference Example 4 .

  In the ozone generator having such a configuration, since the top surfaces of the convex portions 43a to 43f are substantially circular, the discharge regions 27a to 27c formed based thereon are also circular. Thereby, the flow velocity of the ozone gas in the discharge regions 27a to 27c can be made constant, the decrease in the ozone concentration can be prevented, and the ozone generation efficiency can be improved.

The convex portions 33a to 33f formed on the high voltage electrode 33 of the reference example 4 are substantially square, and the convex portions 43a to 43f formed on the high voltage electrode 43 of the reference example 5 are circular. . And the convex part formed in a high voltage | pressure electrode is not limited to a square or a circle, It may be made into the shape of an intermediate | middle of a square and a circle. Importantly, an aspect ratio is 1.5: 1.0. Is to be done within.

Reference Example 6
43 is a top view of a dielectric plate of Reference Example 6 of the ozone generator, FIG. 44 is a front view of the dielectric plate, and FIG. 45 is a side view of the dielectric plate. In the dielectric plate 35 of Reference Example 6 , the six conductive films 35a to 35f formed on the surface in contact with the high voltage electrode 3 are circular. Therefore, the six discharge regions 27a to 27f formed at the corresponding positions of the six conductive films 35a to 35f are also formed in a substantially circular shape, and the flow rate of ozone gas in the discharge region can be made constant. A decrease in concentration can be prevented, and the ozone generation efficiency can be improved. In addition, between the adjacent conductive films 35a to 35f, large and small source gas uniform supply holes 35g and 35h are drilled so that the source gas flows evenly into the discharge regions 27a to 27f, respectively.

In the dielectric plate 35 of Reference Example 6, the surface of the dielectric plate 35 opposite to the surface on which the conductive films 35a to 35f are formed, that is, the low-voltage electrode 7 side (discharge region side) of the dielectric plate 5. The spacer 14 for forming the discharge regions 27a to 27f is provided on the surface. The spacer 14 is formed, for example, as a plurality of cylindrical projections having a small diameter with a height of 0.1 mm. The spacer 14 is formed by, for example, machining the plate-shaped dielectric plate 35 and cutting the periphery thereof so that the spacer 14 is cut into a relatively convex shape. In this way, by cutting the dielectric plate 35 and the spacer 14 together from one material, the parts of the spacer 14 alone are eliminated as compared with the procedure of separately manufacturing and bonding the dielectric plate 35 and the spacer 14. The number of parts is reduced, and the positioning process of the spacer 14 is not necessary, and the assembly of the ozone generator is facilitated.

  That is, in the ozone generator having such a configuration, the dielectric plate 35 has conductive films 35a to 35f provided on the main surface on the high voltage electrode 3 side. The conductive films 35a to 35f are in close contact with the high voltage electrode 3 and are electrically joined to the high voltage electrode 3, and the conductive films 35a to 35f are divided in correspondence with the divided discharge regions 27a to 27f. The configuration of the discharge regions 27a to 27f can be easily realized.

  Since the shape of the conductive films 35a to 35f is circular, the shape of the divided discharge region formed correspondingly is also substantially circular, and the flow rate of ozone gas in the discharge region can be made constant, and the ozone concentration Can be prevented, and ozone generation efficiency can be improved. Furthermore, since the spacer 14 is integrally provided on the main surface of the dielectric plate 35 opposite to the conductive films 35a to 35f, the number of parts can be reduced and the positioning step of the spacer 14 is not necessary. The assembly work can be facilitated.

In Reference Example 6 , the spacer 14 is provided inside the circle corresponding to the conductive films 35a to 35f on the surface of the dielectric plate 35 opposite to the surface on which the conductive films 35a to 35f are formed. However, the position where the spacer 14 is provided is not limited to the inside of the circle, and may be provided outside the circle.

  Further, the shape of the conductive film is not limited to a square or a circle, and may be an intermediate shape between a square and a circle. Importantly, the aspect ratio is set within 1.5: 1.0. Is Rukoto.

Reference Example 7
Figure 46 is a cross-sectional view of an electrode module of Reference Example 7 of the ozone generator. FIG. 47 is a top view of the dielectric plate of this electrode module. The dielectric plate 45 of Reference Example 7 is divided into six corresponding to the six discharge regions 27a to 27f. The substantially square flat dielectric plate 45 has a rectangular conductive film 45a on the main surface. An elongated rod-like spacer 13 having a thickness of 0.1 mm is provided integrally with the dielectric plate 45 on the surface opposite to the conductive film 45a.

  By adopting such a configuration, the dielectric plate 45 has a simple structure in which one conductive film 45a is formed on the plate, so that it can be easily manufactured, the cost can be reduced, and mass productivity can be achieved. Will also improve.

Reference Example 8
Figure 48 is a top view of a dielectric plate of an ozonizer of Reference Example 8. The dielectric plate 55 of the reference example 8 is divided into six corresponding to the six discharge regions 27a to 27f. The disc-shaped dielectric plate 55 has a circular conductive film 55a on the main surface. On the surface opposite to the conductive film 55a, the spacer 14 is formed as a plurality of cylindrical projections having a small diameter.

  With such a configuration, the dielectric plate 55 can be easily manufactured, the cost can be reduced, mass productivity is improved, and the discharge regions 27a to 27f are formed in a substantially circular shape. The flow rate of ozone gas in the discharge region can be made constant, the decrease in ozone concentration can be prevented, and the ozone generation efficiency can be improved.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic cross-sectional view of a flat plate type ozone generator provided with an ozone generator according to Embodiment 1 of the present invention. It is the figure which looked at the flat laminated ozone generator of FIG. 1 from upper direction. It is a typical detailed sectional view of the ozone generator electrode which shows the ozone generator of Embodiment 1 of this invention. FIG. 4 is an enlarged view of a portion E in FIG. 3. It is a top view of the low voltage | pressure electrode of the ozone generator of Embodiment 1 of this invention. It is arrow sectional drawing which follows the AA line of FIG. It is arrow sectional drawing which follows the BB line of FIG. It is arrow sectional drawing which follows the CC line of FIG. It is arrow sectional drawing which follows the DD line | wire of FIG. It is a top view of the high voltage electrode of the ozone generator of Embodiment 1 of this invention. It is a front view of the high voltage electrode of FIG. It is a side view of the high voltage electrode of FIG. FIG. 6 is a characteristic diagram showing a relationship between a product p × d and a discharge voltage in the first embodiment. It is a characteristic view which shows the relationship between the discharge voltage of Embodiment 1, and the insulation distance of a high voltage. FIG. 6 is a characteristic diagram showing an example of a relationship between a product p × d and a volume ratio of a discharge cell when the value of the product p × d of Embodiment 1 is varied. It is a characteristic view which shows one example of the relationship with the volume ratio of the discharge cell of the discharge power density at the time of varying the discharge power density of Embodiment 1. It is a top view of the dielectric material board of the ozone generator of Embodiment 1 of this invention. It is a front view of the dielectric material board of FIG. FIG. 18 is a side view of the dielectric plate of FIG. 17. It is general | schematic sectional drawing of the flat plate type | mold ozone generator provided with the ozone generator of Embodiment 2 of this invention. It is the figure which looked at the flat plate type ozone generator of FIG. 20 from the upper part. It is the figure which looked at the flat laminated ozone generator of FIG. 20 which shows the other example of the flat laminated ozone generator provided with the ozone generator of Embodiment 2 of this invention from upper direction. It is front sectional drawing of the flat laminated ozone generator provided with the ozone generator of Embodiment 3 of this invention. It is a side view by the side of the gas inlet / outlet side of the flat plate type ozone generator of FIG. It is a side view by the side of the high voltage supply part of the flat plate type ozone generator of FIG. It is front sectional drawing of the ozone generator module of the flat plate type | mold laminated ozone generator of FIG. It is a top view of the ozone generator module of the flat plate type ozone generator of FIG. It is a side view by the side of the gas inlet / outlet side of the ozone generator module of the flat plate type ozone generator of FIG. It is a side view by the side of the high voltage supply part of the ozone generator module of the flat plate type ozone generator of FIG. FIG. 32 is a schematic longitudinal sectional view of the flat plate laminated ozone generator of Reference Example 1 including an ozone generator, and is a sectional view taken along the line KK in FIG. 31. It is a cross-sectional view of the flat plate type ozone generator of Reference Example 1 provided with an ozone generator, and is a cross-sectional view taken along line LL in FIG. It is general | schematic sectional drawing of the flat plate lamination type | mold ozone generator of the reference example 2 provided with the ozone generator. It is sectional drawing of the outline of the flat laminated ozone generator of the reference example 3 provided with the ozone generator. It is a schematic diagram of the low pressure electrode of the ozone generator of Embodiment 4 of this invention. It is a schematic diagram of the low voltage | pressure electrode of the ozone generator of Embodiment 5 of this invention. It is a schematic diagram of the low voltage | pressure electrode of the ozone generator of Embodiment 6 of this invention. It is a top view of the high voltage electrode of the reference example 4 of an ozone generator. It is front sectional drawing of the high voltage electrode of FIG. It is side surface sectional drawing of the high voltage electrode of FIG. It is a top view of the high voltage electrode of Reference Example 5 of the ozone generator. It is front sectional drawing of the high voltage electrode of FIG. It is side surface sectional drawing of the high voltage electrode of FIG. It is a top view of the dielectric material board of the reference example 6 of an ozone generator. It is a front view of the dielectric material board of FIG. It is a side view of the dielectric material board of FIG. It is sectional drawing of the electrode module of the reference example 7 of an ozone generator. FIG. 47 is a top view of a dielectric plate of the electrode module of FIG. 46. It is a top view of the dielectric material board of the reference example 8 of an ozone generator. It is a sectional side view of the conventional coaxial cylinder type ozone generator. It is sectional drawing along the FF line of the coaxial cylinder type ozone generator of FIG. It is a sectional side view which shows the other example of the conventional coaxial cylinder type ozone generator. It is sectional drawing along the JJ line of the coaxial cylinder type ozone generator of FIG. It is a side view which makes the cross section a part which shows the conventional large sized coaxial cylinder system ozone generator. It is a cross-sectional view of a main part showing still another example of a conventional ozone generator, and is a cross-sectional view taken along line HH in FIG. FIG. 56 is a longitudinal sectional view of a main part of a conventional ozone generator and is a cross-sectional view taken along line GG in FIG. 54.

Explanation of symbols

  1 High voltage electrode cooling plate, 3, 33, 43 High voltage electrode (second electrode), 3a-3f, 33a-33f, 43a-43f Convex part, 5, 35, 45, 55 Dielectric plate, 5a-5f, 35a ~ 35f, 45a, 55a Conductive film, 7, 17, 27, 37 Low pressure electrode (first electrode), 8 Ozone gas passage, 9 Cooling water passage (refrigerant passage), 13 Spacer, 24 base, 24a L-shaped member , 27a to 27f discharge area, 28a to 28f ozone gas outlet hole, 100 ozone generator, 102 electrode module, 110 generator cover, 110a holding block, 700, 1700, 2700, 3700 electrode discharge part, 710 inlet / outlet part, 720 constriction part , 710, 1710 Inlet / outlet part, 720, 1720, 2710, 3710 Constricted part, 2710, 3710 Inlet / outlet part (first Input / output section), 2730, 3730, 3740 Input / output section (second input / output section).

Claims (4)

A flat plate-like first electrode, a flat plate-like second electrode facing the main surface of the first electrode, and a flat plate-like electrode provided between the first electrode and the second electrode A plurality of electrode modules having a dielectric plate and a spacer for forming a discharge gap;
An alternating voltage is applied between the first electrode and the second electrode, and an ozone gas is generated by generating a discharge between the gaps of the discharge region into which a gas containing at least oxygen gas is injected,
The first electrode has a plate-like electrode discharge portion in which a main surface forms an electrode, an ozone gas passage for taking out ozone gas generated in the discharge region, and a refrigerant passage through which the refrigerant flows are formed.
The first electrode is narrower than the electrode width of the electrode discharge part, and includes any one of the electrode discharge part and the gas discharge port of the ozone gas passage, the refrigerant inlet and the refrigerant outlet of the refrigerant passage, and the electrode discharge part. A constricted portion having a small rigidity for connecting the side portion of the side and the side portion of either side of the input / output portion so as to reduce the influence of the deformation of the electrode discharge portion on the input / output portion. Have
Of the plurality of stacked electrode modules, each electrode discharge portion sandwiches the dielectric plate and spacer with the second electrode between the pedestal and the electrode pressing plate or two of the electrode pressing members. The portion placed between the plates and fastened by fastening the pedestal and the electrode pressing plate or the two electrode pressing plates with a first tightening bolt, and each of the inlet / outlet portions sandwiching the manifold block An ozone which is placed between a pedestal and a press plate or between the two press plates and is fastened by fastening the pedestal and the press plate or the two press plates with a second tightening bolt. Generator. A flat plate-like first electrode, a flat plate-like second electrode facing the main surface of the first electrode, and a flat plate-like electrode provided between the first electrode and the second electrode A plurality of electrode modules having a dielectric plate and a spacer forming a discharge gap are laminated,
An alternating voltage is applied between the first electrode and the second electrode, and an ozone gas is generated by generating a discharge between the gaps of the discharge region into which a gas containing at least oxygen gas is injected,
The first electrode has a plate-like electrode discharge portion in which a main surface forms an electrode, an ozone gas passage for taking out ozone gas generated in the discharge region, and a refrigerant passage through which the refrigerant flows are formed.
The first electrode is narrower than the electrode width of the electrode discharge portion and has a first inlet / outlet portion in which a gas outlet of the ozone gas passage and a refrigerant inlet of the refrigerant passage are formed, and an electrode of the electrode discharge portion A second inlet / outlet portion that is narrower than the width and in which the refrigerant outlet of the refrigerant passage is formed, a side portion of one side of the first side and the first inlet / outlet portion of the electrode discharge portion; A first constricted portion having a low rigidity so as to reduce the influence of deformation of the electrode discharge portion on the first input / output portion, and a second confronting the first side of the electrode discharge portion A second portion having a low rigidity for coupling the side portion of the side and the side portion of any one of the second inlet / outlet portions so as to reduce the influence of deformation of the electrode discharge portion on the second inlet / outlet portion. A constriction, and
Of the plurality of stacked electrode modules, the portion where each of the electrode discharge portions sandwiches the dielectric plate and the spacer with the second electrode is placed between the pedestal and the electrode pressing plate or between the two electrode pressing plates. Further, the pedestal and the electrode pressing plate or the two electrode pressing plates are fastened by tightening with a first tightening bolt, and the portions where the first entry / exit portions sandwich the manifold block are It is placed between the first presser plates or between the two first presser plates and tightened by tightening the pedestal and the first presser plate or the two first presser plates with a second tightening bolt. The portions where the second input / output portions sandwich the manifold block are placed between the pedestal and the second presser plate or between the two second presser plates, and the pedestal and the second presser plate Or ozone generator, characterized in that it is fastened by tightening the second pressing plate two aforementioned third tightening bolts. A flat plate-like first electrode, a flat plate-like second electrode facing the main surface of the first electrode, and a flat plate-like electrode provided between the first electrode and the second electrode A plurality of electrode modules having a dielectric plate and a spacer forming a discharge gap are laminated,
An alternating voltage is applied between the first electrode and the second electrode, and an ozone gas is generated by generating a discharge between the gaps of the discharge region into which a gas containing at least oxygen gas is injected,
The first electrode has a plate-like electrode discharge portion in which a main surface forms an electrode, an ozone gas passage for taking out ozone gas generated in the discharge region, and a refrigerant passage through which the refrigerant flows are formed.
The first electrode is narrower than the electrode width of the electrode discharge portion and has a first inlet / outlet portion where a gas outlet of the ozone gas passage is formed; and the width of the first electrode is narrower than the electrode width of the electrode discharge portion; The second inlet / outlet part in which the refrigerant inlet and the refrigerant outlet of the refrigerant passage are formed, the side part of the first side of the electrode discharge part, and the side part of one side of the first inlet / outlet part are connected to the first part. A first constricted portion having a small rigidity to be coupled so as to reduce the influence of deformation of the electrode discharge portion on one input / output portion, and a side portion of the second side facing the first side of the electrode discharge portion And a second constricted portion having a low rigidity for connecting the side portion of either side of the second input / output portion to the second input / output portion so as to reduce the influence of deformation of the electrode discharge portion, Have
Of the plurality of stacked electrode modules, the portion where each of the electrode discharge portions sandwiches the dielectric plate and the spacer with the second electrode is placed between the pedestal and the electrode pressing plate or between the two electrode pressing plates. Further, the pedestal and the electrode pressing plate or the two electrode pressing plates are fastened by tightening with a first tightening bolt, and the portions where the first entry / exit portions sandwich the manifold block are It is placed between the first presser plates or between the two first presser plates and tightened by tightening the pedestal and the first presser plate or the two first presser plates with a second tightening bolt. The portions where the second input / output portions sandwich the manifold block are placed between the pedestal and the second presser plate or between the two second presser plates, and the pedestal and the second presser plate Or ozone generator, characterized in that it is fastened by tightening the second pressing plate two aforementioned third tightening bolts. A flat plate-like first electrode, a flat plate-like second electrode facing the main surface of the first electrode, and a flat plate-like electrode provided between the first electrode and the second electrode A plurality of electrode modules having a dielectric plate and a spacer forming a discharge gap region are laminated,
An alternating voltage is applied between the first electrode and the second electrode, and an ozone gas is generated by generating a discharge between the gaps of the discharge region into which a gas containing at least oxygen gas is injected,
The first electrode has a plate-like electrode discharge portion in which a main surface forms an electrode, an ozone gas passage for taking out ozone gas generated in the discharge region, and a refrigerant passage through which the refrigerant flows are formed.
The first electrode is narrower than the electrode width of the electrode discharge portion and has a first inlet / outlet portion where a gas outlet of the ozone gas passage is formed; and the width of the first electrode is narrower than the electrode width of the electrode discharge portion; A second inlet / outlet portion in which the refrigerant inlet of the refrigerant passage is formed, a third inlet / outlet portion that is narrower than the electrode width of the electrode discharge portion and in which the refrigerant outlet of the refrigerant passage is formed, and the electrode discharge portion The rigidity of coupling the side part of the first side and the side part of any side of the first input / output part so as to reduce the influence of the deformation of the electrode discharge part on the first input / output part is small. The first constriction part, the side part of the second side opposite to the first side of the electrode discharge part, and the side part of any side of the second entry / exit part to the second entry / exit part A second constriction portion having a low rigidity for coupling so as to reduce the influence of the deformation of the electrode discharge portion, and The side part of the second side of the electrode discharge part and the side part of any side of the third input / output part are coupled so as to reduce the influence of deformation of the electrode discharge part on the third input / output part. A third constricted portion having a small rigidity,
Of the plurality of stacked electrode modules, the portion where each of the electrode discharge portions sandwiches the dielectric plate and the spacer with the second electrode is placed between the base and the electrode pressing plate or between the two electrode pressing plates. The pedestal and the electrode pressing plate or the two electrode pressing plates are fastened by tightening with a first tightening bolt, and the portions where the first entry / exit portions sandwich the manifold block are the pedestals. And the first presser plate or between the two first presser plates, and the base and the first presser plate or the two first presser plates are fastened with a second fastening bolt. The portions where the second input / output portions sandwich the manifold block are placed between the pedestal and the second presser plate or between the two second presser plates, and the pedestal and the second presser plate. The plate plate or the two second press plates are fastened with a third tightening bolt, and the portion where each of the third input / output portions sandwiches the manifold block is the pedestal and the third presser. It is placed between the plates or between the two third pressing plates, and is fastened by tightening the pedestal and the third pressing plate or the two third pressing plates with a fourth tightening bolt. An ozone generator characterized by that.

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