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JP4159451B2 - Heat-resistant hermetic wall structure, regenerative gas treatment device, and adsorption / desorption gas treatment device - Google Patents
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JP4159451B2 - Heat-resistant hermetic wall structure, regenerative gas treatment device, and adsorption / desorption gas treatment device - Google Patents

Heat-resistant hermetic wall structure, regenerative gas treatment device, and adsorption / desorption gas treatment device Download PDF

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JP4159451B2
JP4159451B2 JP2003376951A JP2003376951A JP4159451B2 JP 4159451 B2 JP4159451 B2 JP 4159451B2 JP 2003376951 A JP2003376951 A JP 2003376951A JP 2003376951 A JP2003376951 A JP 2003376951A JP 4159451 B2 JP4159451 B2 JP 4159451B2
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義明 松井
雄二 永田
朋孝 三輪
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Description

本発明は、高温雰囲気下で空間どうしを仕切る耐熱性気密壁構造、耐熱性気密壁構造を用いる蓄熱式ガス処理装置、並びに、耐熱性気密壁構造を用いる吸脱着式ガス処理装置に関する。   The present invention relates to a heat-resistant airtight wall structure that partitions spaces in a high-temperature atmosphere, a heat storage gas processing apparatus that uses a heat-resistant airtight wall structure, and an adsorption / desorption gas processing apparatus that uses a heat-resistant airtight wall structure.

従来、高温雰囲気下において空間どうしを仕切るには、非金属性無機材料からなる剛性の壁材をもって空間どうしを仕切る構造が一般的に知られている。   Conventionally, in order to partition spaces under a high temperature atmosphere, a structure in which the spaces are partitioned by a rigid wall material made of a nonmetallic inorganic material is generally known.

しかしながら、従来の非金属性無機材料からなる剛性の壁材であると、高温雰囲気下における壁材として十分な剛性及び耐熱性は得ることができるが、壁材を挟む両空間の差圧が大きい場合など、壁材中に分布する極微細な空隙を通じてガスが壁材を透過してしまい十分な気密性が得られなくなることがあり、例えば、被処理ガスと処理済ガスとを隣り合う空間に通過させる蓄熱式ガス処理装置の仕切壁にこの非金属性無機材料からなる壁材を用いると、上記透過のために被処理ガスと処理済ガスとの漏洩混入を生じ、処理済ガスの汚染や装置の処理性能の低下等の不都合を招来する恐れがあった。
ちなみに、このガス透過を回避するには、金属製の壁材を用いることも考えうるが、金属製壁材は、高温となる使用条件下では熱膨張による変形が激しく、このため、この熱膨張による周囲構造の損傷を回避するのに特別な構造を要するので、汎用性の面で難がある。
この実情に鑑み、本発明の主たる課題は、合理的な改良をもって上記問題を効果的に解消する点にある。
However, a rigid wall material made of a conventional non-metallic inorganic material can provide sufficient rigidity and heat resistance as a wall material in a high-temperature atmosphere, but the differential pressure between both spaces sandwiching the wall material is large. In some cases, gas may permeate through the wall material through extremely fine gaps distributed in the wall material, and sufficient airtightness may not be obtained. For example, the gas to be treated and the treated gas may be adjacent to each other. If the wall material made of this non-metallic inorganic material is used for the partition wall of the regenerative gas processing apparatus to be passed, leakage of the gas to be processed and the processed gas occurs due to the permeation, and contamination of the processed gas There is a risk of inconvenience such as a decrease in processing performance of the apparatus.
Incidentally, in order to avoid this gas permeation, it is possible to use a metal wall material, but the metal wall material undergoes severe deformation due to thermal expansion under high temperature use conditions. Since a special structure is required to avoid damage to the surrounding structure due to, there is a difficulty in versatility.
In view of this situation, the main problem of the present invention is to effectively solve the above problems with a rational improvement.

高温雰囲気下で空間どうしを仕切る耐熱性気密壁構造において、
剛性を備える耐熱性の非金属性無機材料からなる壁主材どうしの間に、それら壁主材を透過する状態での前記空間どうしの間でのガス漏洩を防止する薄膜状の金属材を配置した構造にし、
前記薄膜状金属材をその両側それぞれに位置させる前記壁主材のうち、少なくとも一方の壁主材に対して固着的に貼着してもよい。
In a heat-resistant airtight wall structure that partitions spaces between high temperatures,
A thin-film metal material is installed between the main wall materials made of heat-resistant non-metallic inorganic materials with rigidity to prevent gas leakage between the spaces in the state of passing through the main wall materials. The structure
The thin film metal material may be fixedly attached to at least one wall main material among the wall main materials positioned on both sides thereof .

つまり、この構成であれば、非金属性無機材料からなる壁主材そのものは、その材質中に分布する微小な空隙を通じてガス透過が生じ得るとしても、壁主材どうしの間に配置した薄膜状の金属材によりガス透過を確実に遮断することができ、これにより、仕切り対象である両空間の差圧が大きくなるような場合でも、壁主材を透過する状態での空間どうしの間でのガス漏洩を確実に防止することができて、そのようなガス漏洩による種々の不都合を確実に防止できる気密性に優れた壁構造にすることができる。
また、薄膜状金属材そのものは剛性及び強度に劣るものの、剛性を備える非金属性無機材料からなる壁主材を薄膜状金属材の両側に配することにより、壁構造としての十分な剛性及び強度を確保できるとともに、それら壁主材により薄膜状金属材を保護することができて、薄膜状金属材の損傷や劣化による気密性の低下も効果的に防止することができるので、強度面及び耐久性の面でも優れた壁構造にすることができる。
そしてまた、壁主材どうしの間に配する薄膜状金属材が金属としての大きな熱膨張性を有するとしても、薄膜状にしてあることによりその熱膨張力をごく小さなものにすることができ、これにより、構成材に金属材を用いながらも、熱膨張による自身や周囲構造の損傷・変形も効果的に回避できて、耐熱性及び汎用性の面でも優れた壁構造にすることができるので、高温雰囲気下で高い気密性が要求される用途において極めて好適な壁構造にすることができる。
In other words, with this configuration, the wall main material itself made of a non-metallic inorganic material itself is a thin film disposed between the wall main materials even though gas permeation may occur through minute voids distributed in the material. The metal material can reliably block gas permeation, so that even when the differential pressure between the two spaces to be partitioned increases, the space between the spaces that transmit through the wall main material Gas leakage can be surely prevented, and a wall structure with excellent airtightness that can reliably prevent various inconveniences due to such gas leakage can be obtained.
In addition, although the thin-film metal material itself is inferior in rigidity and strength, sufficient rigidity and strength as a wall structure can be obtained by arranging the wall main material made of non-metallic inorganic material with rigidity on both sides of the thin-film metal material. It is possible to secure the thin film metal material by these wall main materials and effectively prevent the deterioration of the airtightness due to the damage and deterioration of the thin film metal material. The wall structure can be made excellent in terms of properties.
And, even if the thin-film metal material arranged between the wall main materials has a large thermal expansion property as a metal, the thermal expansion force can be made extremely small by being in the form of a thin film, This makes it possible to effectively avoid damage and deformation of itself and the surrounding structure due to thermal expansion while using a metal material as a constituent material, so that a wall structure excellent in heat resistance and versatility can be obtained. In addition, the wall structure can be made extremely suitable for applications that require high airtightness in a high-temperature atmosphere.

また、この構成では、前記薄膜状金属材をその両側それぞれに位置させる前記壁主材のうち、少なくとも一方の壁主材に対して固着的に貼着してあるから、次のことも可能になる。 Further, in this configuration , since the thin-film metal material is fixedly attached to at least one of the wall main materials for positioning the thin film metal material on both sides thereof, the following can also be performed. Become.

つまり、この構成であれば、薄膜状金属材を少なくとも一方の壁主材に対し固着的に貼着してあるから、その固着的な貼着による壁主材と薄膜状金属材との一体化により、薄膜状金属材と壁主材とからなる多層壁構造全体としての組み立て強度を一層高めることができる。
そして、薄膜状金属材と両側の壁主材とからなる多層壁構造を製作するのに、上記のように薄膜状金属材を少なくとも一方の壁主材に対し固着的に貼着する方式を採用することで、それら薄膜状金属材と壁主材との重ね合わせ作業も各部材どうしのずれ移動を伴い難い状態で安定的に容易に行うことができ、特に、壁構造による構築物の構築現場で上記の多層壁構造を製作する場合などにおいて好適なものになる。
In other words, in this configuration, the thin film metal material is fixedly attached to at least one wall main material, so that the wall main material and the thin film metal material are integrated by the fixed adhesion. Thereby, the assembly strength as the whole multilayer wall structure which consists of a thin-film-like metal material and a wall main material can be raised further.
And, in order to produce a multilayer wall structure consisting of a thin-film metal material and wall main materials on both sides, a method of adhering the thin-film metal material to at least one wall main material as described above is adopted. By doing so, it is possible to stably and easily perform the stacking work of the thin metal material and the wall main material in a state where it is difficult to cause the displacement of each member, especially at the construction site of the structure with the wall structure. This is suitable in the case of manufacturing the multilayer wall structure described above.

本発明の第特徴構成は、耐熱性気密壁構造に係り、その特徴は、
高温雰囲気下で空間どうしを仕切る耐熱性気密壁構造において、
剛性を備える耐熱性の非金属性無機材料からなる壁主材どうしの間に、それら壁主材を透過する状態での前記空間どうしの間でのガス漏洩を防止する薄膜状の金属材を配置した構造にし、
前記薄膜状金属材の両側それぞれに位置させる前記壁主材の各々に対し、各別の前記薄膜状金属材を固着的に貼着して、これら薄膜状金属材をそれらが相対向して当接する重ね合わせ状態で前記壁主材どうしの間に配置してある点にある。
The first characteristic configuration of the present invention relates to a heat-resistant airtight wall structure,
In a heat-resistant airtight wall structure that partitions spaces between high temperatures,
A thin-film metal material is installed between the main wall materials made of heat-resistant non-metallic inorganic materials with rigidity to prevent gas leakage between the spaces in the state of passing through the main wall materials. The structure
Each of the thin-walled metal materials is fixedly attached to each of the wall main members positioned on both sides of the thin-film metal material, and the thin-film metal materials are opposed to each other. It exists in the point arrange | positioned between the said wall main materials in the overlapping state which touches.

つまり、この構成であれば、剛性を備える耐熱性の非金属性無機材料からなる壁主材どうしの間に、それら壁主材を透過する状態での前記空間どうしの間でのガス漏洩を防止する薄膜状の金属材を配置するから、気密性に優れ、また、強度面及び耐久性の面、並びに、耐熱性及び汎用性の面でも優れた壁構造にすることができる。
そしてまた、薄膜状金属材の両側それぞれに位置させる壁主材の各々に対し各別に薄膜状金属材を固着的に貼着するから、前記構成の場合と同様、壁主材と薄膜状金属材との一体化により多層壁構造全体としての組み立て強度を一層高めることができるとともに、その製作において薄膜状金属材と壁主材との重ね合わせ作業を容易にすることができて、壁構造による構築物の構築現場で多層壁構造を製作する場合に特に好適なものにすることができ、また、このように強度面及び製作面で有利にしながら、併せて、各壁主材に貼着した薄膜状金属材どうしの重ねあわせにより、気密性を一層高めることができると共に薄膜状金属材の損傷による気密性の低下を一層効果的に防止することができる。
特に、この構成であれば、壁主材に薄膜状金属材を固着的に貼着した一仕様の組体の2組を、それら薄膜状金属材どうしが相対向する方向に重ね合わせるだけで所要の壁構造を得ることもでき、製作面で更に有利にすることもできる。
That is, if the this configuration, between the walls main member each other made of a heat-resistant non-metallic inorganic material with rigidity, gas leakage between the spaces each other in a state of transmitting them wall main members Since the metal material in the form of a thin film to be prevented is disposed, it is possible to obtain a wall structure that is excellent in airtightness, in terms of strength and durability, heat resistance, and versatility.
Further, since the thin film metal material is fixedly attached to each of the wall main materials positioned on both sides of the thin film metal material, the wall main material and the thin film metal material are the same as in the case of the above configuration. As a result, it is possible to further increase the assembly strength of the entire multilayer wall structure, and to facilitate the superposition of the thin-film metal material and the wall main material in the production of the structure. It can be particularly suitable for the production of multi-layered wall structures at the construction site, and it is advantageous in terms of strength and production in this way, and is also a thin film attached to each wall main material. By overlapping the metal materials, the airtightness can be further enhanced, and the deterioration of the airtightness due to the damage of the thin film metal material can be more effectively prevented.
In particular, with this configuration, it is necessary only to superimpose two sets of one-spec assemblies in which a thin-film metal material is firmly attached to a wall main material in the direction in which the thin-film metal materials face each other. The wall structure can be obtained, which can be further advantageous in terms of manufacturing.

高温雰囲気下で空間どうしを仕切る耐熱性気密壁構造において、
剛性を備える耐熱性の非金属性無機材料からなる壁主材どうしの間に、それら壁主材を透過する状態での前記空間どうしの間でのガス漏洩を防止する薄膜状の金属材を配置した構造にし、
前記薄膜状金属材を、その両側それぞれに位置させた前記壁主材との熱膨張又は熱収縮による壁面方向への相対移動を許す状態で、それら壁主材どうしの間に配置してもよい。
In a heat-resistant airtight wall structure that partitions spaces between high temperatures,
A thin-film metal material is installed between the main wall materials made of heat-resistant non-metallic inorganic materials with rigidity to prevent gas leakage between the spaces in the state of passing through the main wall materials. The structure
The thin-film metal material may be disposed between the wall main materials in a state that allows relative movement in the wall surface direction due to thermal expansion or contraction with the wall main material positioned on both sides thereof. .

つまり、この構成によれば、剛性を備える耐熱性の非金属性無機材料からなる壁主材どうしの間に、それら壁主材を透過する状態での前記空間どうしの間でのガス漏洩を防止する薄膜状の金属材を配置するから、気密性に優れ、また、強度面及び耐久性の面、並びに、耐熱性及び汎用性の面でも優れた壁構造にすることができる。
そしてまた、熱膨張又は熱収縮による壁面方向への移動が許された状態で薄膜状金属材が壁主材どうしの間に位置することで、熱膨張時や熱収縮時にそれら膨張・収縮を抑止する過度の外部応力が薄膜状金属材に作用するのを効果的に防止することができ、これにより、壁主材による薄膜状金属材の機械的保護と相俟って、薄膜状金属材の損傷による気密性の低下を一層効果的に防止することができる。
That is, according to this configuration, between the walls main member each other consisting of heat-resistant non-metallic inorganic material with rigidity, gas leakage between the spaces each other in a state of transmitting them wall main members Since the metal material in the form of a thin film to be prevented is disposed, it is possible to obtain a wall structure that is excellent in airtightness, in terms of strength and durability, heat resistance, and versatility.
In addition, the thin-film metal material is positioned between the wall main materials in a state where movement in the wall direction by thermal expansion or contraction is permitted, so that expansion and contraction are suppressed during thermal expansion and thermal contraction. It is possible to effectively prevent excessive external stress from acting on the thin film metal material, and in combination with the mechanical protection of the thin film metal material by the wall main material, It is possible to more effectively prevent a decrease in airtightness due to damage.

本発明の第特徴構成は、第1特徴構成の実施において好適な構成であり、その特徴は、
前記薄膜状金属材が0.001mm〜0.15mm厚の箔に形成されてある点にある。
The second feature configuration of the present invention is a preferred configuration in the implementation of the first feature configuration .
The thin film metal material is formed on a foil having a thickness of 0.001 mm to 0.15 mm.

つまり、壁主材どうしの間に配する薄膜状金属材として厚さ0.001mmから0.15mmの箔領域の金属材を用いることで、金属材の介装による壁構造の不要な厚み増大や不要な重量増大を効果的に回避することができるとともに、薄膜状金属材とその両側の壁主材との一体性を容易に高めることができ、これにより、高い汎用性を得ることができる。   In other words, by using a metal material in a foil region having a thickness of 0.001 mm to 0.15 mm as a thin film metal material disposed between wall main materials, an unnecessary increase in thickness of the wall structure due to the intervention of the metal material Unnecessary weight increase can be effectively avoided, and the integrity of the thin-film metal material and the wall main material on both sides thereof can be easily increased, and thereby high versatility can be obtained.

なお、上記構成のいずれかの実施において好適な構成としては、前記薄膜状金属材としてステンレス材を用いてもよい。 In addition, as a suitable configuration in the implementation of any of the above configurations, a stainless material may be used as the thin film metal material.

つまり、この構成であれば、非金属性無機材料からなる壁主材どうしの間に薄膜状金属材を配した前述の壁構造を製作するのに、耐熱性及び加工性に優れ、また、比較的廉価であるステンレス材を薄膜状金属材として用いることで、コスト面及び製作面で有利にすることができるとともに、ステンレス材は耐食性にも優れていることから、腐食性ガスを扱う構築物の構築にも適した壁構造にすることができる。   In other words, with this configuration, it is excellent in heat resistance and workability for producing the above-mentioned wall structure in which a thin-film metal material is arranged between wall main materials made of non-metallic inorganic materials. Use of inexpensive stainless steel as a thin-film metal material can be advantageous in terms of cost and production, and because stainless steel is also excellent in corrosion resistance, construction of a structure that handles corrosive gas It is possible to make the wall structure suitable for.

また、上記構成のいずれかの実施において好適な構成としては、前記薄膜状金属材の両側それぞれに位置させる前記壁主材が、セラミックス繊維材を板状に成形した板材であってもよい。 Moreover, as a suitable structure in implementation of either of the said structures , the said wall main material located in each of the both sides of the said thin film-like metal material may be the board | plate material which shape | molded the ceramic fiber material in plate shape.

つまり、この構成であれば、非金属性無機材料からなる壁主材どうしの間に薄膜状金属材を配した前述の壁構造を製作するのに、耐熱性に優れたセラミックス繊維材を板状に成形した板材を壁主材として用いることで、軽量であるため取り扱い性がよく、特に、壁構造による構築物の構築現場で上記の多層壁構造を製作する場合などにおいて好適なものにすることができるとともに、セラミックス繊維材は耐食性にも優れていることから、腐食性ガスを扱う構築物の構築にも適した壁構造にすることができ、また、セラミックス繊維材からなる板材は収縮率が極めて小さいため、高温雰囲気下であっても壁主材の収縮による薄膜状金属材や周囲構造の損傷を回避することができ、高温雰囲気下で空間どうしを仕切る壁構造として良好なものにすることができる。   In other words, with this configuration, a ceramic fiber material with excellent heat resistance is used to produce the above-mentioned wall structure in which a thin-film metal material is placed between wall main materials made of non-metallic inorganic materials. It is easy to handle because it is lightweight, and it can be made suitable especially when the above multilayer wall structure is manufactured at the construction site of a structure with a wall structure. In addition, the ceramic fiber material is also excellent in corrosion resistance, so it can be made into a wall structure suitable for construction of a structure that handles corrosive gas, and the plate material made of ceramic fiber material has a very small shrinkage rate. Therefore, even in a high temperature atmosphere, damage to the thin film metal material and surrounding structure due to shrinkage of the wall main material can be avoided, and the wall structure that partitions the spaces in a high temperature atmosphere is excellent. Rukoto can.

本発明の第特徴構成は、蓄熱式ガス処理装置に係り、その特徴は、
仕切壁により互いに仕切った複数の蓄熱室のそれぞれに通気性の蓄熱材層を収容するとともに、これら蓄熱室それぞれの一端を燃焼室に連通させ、
処理対象の被処理ガスを複数の前記蓄熱室のうち、一部の室数の蓄熱室を通して前記燃焼室に供給してその被処理ガスを前記燃焼室での燃焼により処理し、それに並行して前記燃焼室から処理済ガスを他の一部の室数の蓄熱室を通して排出する構成において、被処理ガス通過側の蓄熱室と処理済ガス通過側の蓄熱室とを交互に切り替える切替手段を設けた蓄熱式ガス処理装置において、
前記蓄熱室どうしを仕切る前記仕切壁を請求項1又は2記載の耐熱性気密壁構造にしてある点にある。
The third characteristic configuration of the present invention relates to a regenerative gas processing apparatus,
While storing a breathable heat storage material layer in each of a plurality of heat storage chambers partitioned from each other by a partition wall, one end of each of these heat storage chambers is communicated with the combustion chamber,
A target gas to be processed is supplied to the combustion chamber through a number of heat storage chambers out of the plurality of heat storage chambers, and the target gas is processed by combustion in the combustion chambers. In the configuration in which the treated gas is discharged from the combustion chamber through the heat storage chambers of the other part of the number of chambers, switching means for alternately switching between the heat storage chamber on the treated gas passage side and the heat storage chamber on the treated gas passage side is provided. In thermal storage gas processing equipment
The heat-resistant airtight wall structure according to claim 1 or 2 is used as the partition wall for partitioning the heat storage chambers.

この種の蓄熱式ガス処理装置では、燃焼室において燃焼処理された高温ガスが通過することで蓄熱材層を収容する蓄熱室の温度が大きく上昇するため、蓄熱室を被処理ガス通過側と処理済ガス通過側とに仕切る仕切壁には耐熱性及び剛性が必要不可欠となっている。
また、有機溶剤等を含んでいる被処理ガスを確実に燃焼室に供給して燃焼処理するため、被処理ガス通過側の蓄熱室に進入した被処理ガスが仕切壁を透過して処理済ガス通過側の蓄熱室に漏洩しないように、仕切壁には気密性も必要となっている。
つまり、剛性を備える耐熱性の非金属性無機材料からなる壁主材どうしの間に薄膜状金属材を配設した構造で、前述のように効果を奏する請求項1又は2記載の耐熱性気密壁構造を、高温に晒される蓄熱式ガス処理装置の蓄熱室の仕切壁に採用することで、薄膜状金属材が、被処理ガス通過側と処理済ガス通過側との間の差圧が大きい場合であっても仕切壁におけるガス透過を確実に遮断し、また、薄膜状金属材の両側に配された壁主材が仕切壁としての十分な剛性及び強度を確保しながら、それら壁主材により薄膜状金属材を保護し、薄膜状金属材の損傷や劣化による気密性の低下も効果的に防止するので、気密性、強度面及び耐久性の面でも優れた仕切壁にすることができ、よって、未処理のままの被処理ガスを処理済ガスと共に処理装置から排出されることなく、被処理ガスを確実に燃焼室に供給して燃焼処理する信頼性の高い蓄熱式ガス処理装置にすることができる。
In this type of heat storage type gas processing device, the temperature of the heat storage chamber that houses the heat storage material layer rises greatly when the high-temperature gas that has been subjected to the combustion process in the combustion chamber passes. Heat resistance and rigidity are indispensable for the partition wall that partitions the spent gas passage side.
In addition, in order to reliably supply the gas to be processed containing an organic solvent or the like to the combustion chamber for the combustion treatment, the gas to be processed that has entered the heat storage chamber on the gas-passing side passes through the partition wall and is processed gas The partition wall must also be airtight so that it does not leak into the heat storage chamber on the passing side.
That is, the heat-resistant and air-tight structure according to claim 1 or 2, which has the effect as described above in a structure in which a thin-film metal material is disposed between wall main materials made of a heat-resistant nonmetallic inorganic material having rigidity. By adopting the wall structure as the partition wall of the heat storage chamber of the regenerative gas processing device exposed to high temperature, the thin metal film has a large differential pressure between the gas to be processed and the gas to be processed. Even in this case, the gas permeation through the partition walls is surely cut off, and the wall main materials arranged on both sides of the thin-film metal material ensure sufficient rigidity and strength as the partition walls, while these wall main materials are Protects the thin metal material and effectively prevents the deterioration of the airtightness due to the damage or deterioration of the thin metal material, so that it can be made an excellent partition wall in terms of airtightness, strength and durability. Therefore, the untreated gas to be treated is treated with the treated gas. Without being discharged from the can to high regenerative gas treatment device reliable burning process by supplying to ensure the combustion chamber gas to be treated.

本発明の第特徴構成は、吸脱着式ガス処理装置に係り、その特徴は、
仕切壁により互いに仕切った複数の処理室のそれぞれに通気性の吸着剤層を収容するとともに、
処理対象の被処理ガスを複数の前記処理室のうち、一部の室数の処理室における前記吸着剤層に通過させる吸着処理と、それに並行して高温の脱着用ガスを他の一部の室数の処理室における前記吸着剤層に通過させる脱着処理とを行う構成において、被処理ガスを通過させる吸着処理側の処理室と脱着用ガスを通過させる脱着処理側の処理室とを交互に切り替える切替手段を設けた吸脱着式ガス処理装置であって、
前記処理室どうしを仕切る前記仕切壁を請求項1又は2記載の耐熱性気密壁構造にしてある点にある。
A fourth characteristic configuration of the present invention relates to an adsorption / desorption type gas processing apparatus,
While storing a breathable adsorbent layer in each of a plurality of processing chambers partitioned from each other by a partition wall,
Among the plurality of processing chambers, the gas to be processed is passed through the adsorbent layer in the processing chambers of some of the processing chambers, and at the same time, a high temperature desorption gas is supplied to other part of the processing chambers. In the configuration of performing the desorption process of passing through the adsorbent layer in the processing chamber of the number of chambers, the process chamber on the adsorption process side that allows the gas to be processed to pass and the process chamber on the side of the desorption process that allows the desorption gas to pass An adsorption / desorption type gas processing apparatus provided with a switching means for switching,
3. The heat-resistant airtight wall structure according to claim 1 or 2, wherein the partition wall that partitions the processing chambers is formed.

この種の吸脱着式ガス処理装置では、高温の脱着用ガスを通過させることで、脱着処理側の処理室の温度が大きく上昇するため、処理室を吸着処理側と脱着処理側とに仕切る仕切壁には、耐熱性及び剛性が必要不可欠となっている。
また、吸着剤層を通過し脱着処理を行った脱着処理後ガスは有機溶剤等を含んでいるため、この脱着処理後ガスが仕切壁を透過して吸着処理後の処理済ガスに混入しないように、仕切壁には気密性も必要となっている。
つまり、剛性を備える耐熱性の非金属性無機材料からなる壁主材どうしの間に薄膜状金属材を配設した構造で、前述のように効果を奏する請求項1又は2記載の耐熱性気密壁構造を、高温に晒される吸脱着式ガス処理装置の処理室の仕切壁に採用することで、薄膜状金属材が、吸着処理側の処理室と脱着処理側の処理室との間の差圧が大きい場合であっても仕切壁におけるガス透過を確実に遮断し、また、薄膜状金属材の両側に配された壁主材が仕切壁としての十分な剛性及び強度を確保しながら、それら壁主材により薄膜状金属材を保護し、薄膜状金属材の損傷や劣化による気密性の低下も効果的に防止するので、気密性、強度面及び耐久性の面でも優れた仕切壁にすることができ、よって、有機溶剤等を含む脱着処理後ガスが吸着処理済ガスと共に処理装置から排出されることのない信頼性の高い吸脱着式ガス処理装置にすることができる。
In this type of adsorption / desorption type gas treatment device, the temperature of the treatment chamber on the desorption treatment side is greatly increased by passing a high-temperature desorption gas. Therefore, the partition that divides the treatment chamber into the adsorption treatment side and the desorption treatment side Heat resistance and rigidity are indispensable for the walls.
In addition, since the desorbed gas that has passed through the adsorbent layer and has been desorbed contains an organic solvent or the like, the desorbed gas does not permeate the partition wall and enter the treated gas after the desorbing process. In addition, the partition wall must be airtight.
That is, the heat-resistant and air-tight structure according to claim 1 or 2, which has the effect as described above in a structure in which a thin-film metal material is disposed between wall main materials made of a heat-resistant nonmetallic inorganic material having rigidity. By adopting the wall structure for the partition wall of the processing chamber of the adsorption / desorption type gas processing device exposed to high temperature, the difference between the thin film metal material between the processing chamber on the adsorption processing side and the processing chamber on the desorption processing side Even when the pressure is high, the gas permeation through the partition wall is reliably blocked, and the wall main material arranged on both sides of the thin-film metal material ensures sufficient rigidity and strength as the partition wall, The main wall material protects the thin film metal material and effectively prevents the deterioration of the airtightness due to the damage and deterioration of the thin film metal material, thus making the partition wall excellent in terms of airtightness, strength and durability. Therefore, after desorption treatment including organic solvent, etc., the gas has been adsorbed It can be made highly reliable adsorption and desorption type gas treating apparatus that is not discharged from the processing unit together with scan.

〔第1実施形態〕
図1〜図10は、塗装工場や印刷工場などから排出される有機溶剤や塗料ミストなどの可燃性物質を含む排気(被処理ガスCG)を燃焼により浄化処理する蓄熱式ガス処理装置を示し、装置上部に配置したハウジング1の内部を仕切壁2により仕切ることで、蓄熱室3の室群として、平面視で並列配置の8室の蓄熱室3をハウジング1内に形成し、このハウジング1の下方には、各蓄熱室3に対して連通させる風路の切り換えを行う切替手段である切替装置4を配置してある。
[First Embodiment]
1 to 10 show a regenerative gas processing device that purifies exhaust gas (processed gas CG) containing combustible substances such as organic solvents and paint mist discharged from a paint factory or a printing factory by combustion, By partitioning the inside of the housing 1 arranged at the upper part of the apparatus by the partition wall 2, as the room group of the heat storage chambers 3, eight heat storage chambers 3 arranged in parallel in a plan view are formed in the housing 1, and the housing 1 Below, a switching device 4 that is a switching means for switching the air path that communicates with each heat storage chamber 3 is arranged.

ハウジング1は、外側のステンレス板1aと内側の耐火断熱ブロック1bとから形成されていて、ハウジング1の内側には、仕切壁2を嵌合させるための嵌合溝Fが形成されている。   The housing 1 is formed of an outer stainless steel plate 1 a and an inner fireproof and heat insulating block 1 b, and a fitting groove F for fitting the partition wall 2 is formed inside the housing 1.

各蓄熱室3には蓄熱材5aの通気性充填層5を収容してあり、蓄熱室3夫々の上端はハウジング1内の上部に形成した燃焼室6に開口連通させ、この燃焼室6にはバーナー7を装備してある。   Each heat storage chamber 3 accommodates a breathable packed layer 5 of a heat storage material 5 a, and the upper end of each heat storage chamber 3 is in open communication with a combustion chamber 6 formed in the upper portion of the housing 1. Equipped with burner 7.

8室の各蓄熱室3を仕切る仕切壁2は、壁主材として非金属性無機材料であるセラミックス繊維材を板状に成形したセラミックスファイバーボード2aと薄膜状金属材であるお0.05mm厚の箔状のステンレス材2bとから形成されていて、その仕切壁2の構造は、図3及び図4に示すように、1枚のセラミックスファイバーボード2aの一面に1枚の箔状ステンレス材2bを貼着してある2枚の壁材2Aを、箔状ステンレス材2bどうしが相対向して当接するように重ね合わせた状態で、ハウジング1の内側に形成された嵌合溝Fに嵌合固定されている。   The partition wall 2 that partitions each of the eight heat storage chambers 3 is a ceramic fiber board 2a obtained by forming a ceramic fiber material, which is a non-metallic inorganic material, into a plate shape as a wall main material, and a thin film metal material having a thickness of 0.05 mm. As shown in FIG. 3 and FIG. 4, the structure of the partition wall 2 is formed of one foil-like stainless steel material 2b on one surface of one ceramic fiber board 2a. The two wall materials 2A to which the foil is attached are overlapped with each other so that the foil-like stainless steel materials 2b are opposed to each other, and are fitted into the fitting grooves F formed on the inner side of the housing 1. It is fixed.

セラミックスファイバーボード2aは、壁主材として収縮率が極めて小さく、かつ、剛性を備え、耐熱性及び耐食性に優れているとともに、その中に微小な空隙を分布させた形態で有しており軽量であるため取り扱い性が良い。   The ceramic fiber board 2a has a very small shrinkage ratio as a wall main material, has rigidity, is excellent in heat resistance and corrosion resistance, and has a form in which minute voids are distributed therein, and is lightweight. It is easy to handle.

また、薄膜状金属材として耐熱性及び加工性に優れ、比較的廉価である箔状ステンレス材2bを用いることで、仕切壁2のコスト面及び製作面で有利にすることができるとともに、ステンレス材は耐食性にも優れていることから、腐食性ガスを扱う場合にも良好な気密状態を維持することができる。   Further, the use of the foil-like stainless steel material 2b, which is excellent in heat resistance and workability as a thin-film metal material and is relatively inexpensive, can be advantageous in terms of cost and production of the partition wall 2, and stainless steel material. Is excellent in corrosion resistance, and can maintain a good airtight state even when a corrosive gas is handled.

切替装置4は、図5〜図10に示すように、平面視で環状配置の8個の給排室8を仕切壁9により内部に形成した8角筒状の分配器10と、切替弁体11を内装した円筒状の弁体器12と、被処理ガスCGを受け入れる円筒状の気室器13とからなり、設置架台14の上部に弁体器12を固定的に取り付けるとともに、分配器10を弁体器12の上方に同芯状に配置して弁体器12に対し固定的に連結し、気室器13は、弁体器12の下方に同芯状に配置して弁体器12の環状底板12aに吊り下げ状に連結するとともに、設置架台14の下部フレーム14aにより下方から支持してある。   As shown in FIGS. 5 to 10, the switching device 4 includes an octagonal tubular distributor 10 in which eight supply / discharge chambers 8 having an annular arrangement in a plan view are formed by partition walls 9, and a switching valve body. 11 and a cylindrical air chamber 13 for receiving the gas to be processed CG. The valve body 12 is fixedly attached to the upper part of the installation base 14, and the distributor 10 Is arranged concentrically above the valve body 12 and fixedly connected to the valve body 12, and the air chamber 13 is disposed concentrically below the valve body 12. It is connected to 12 annular bottom plates 12a in a suspended manner and is supported from below by a lower frame 14a of the installation base 14.

8室の蓄熱室3は、それらの下端を上端閉塞の分配器10における8個の給排室8に対し給排路15を通じて個別に連通させてあり、弁体器12の天板を兼ねる分配器10の底板10aには、8個の扇状の給排口16を各給排室8に対し個別に対応位置させた環状配置(すなわち、後述する切替弁体11の回転方向に並ぶ配置)で形成し、その底板10aの下面には、図6及び図9に示すように外周部17aと内周部17bと8本の放射状部17cとからなって給排口16を個々に囲む形態のシール部材17を付設してある。   The eight heat storage chambers 3 have their lower ends individually communicated with the eight supply / discharge chambers 8 in the distributor 10 whose upper end is closed through the supply / discharge passage 15 and also serve as the top plate of the valve body 12. The bottom plate 10a of the vessel 10 has an annular arrangement in which eight fan-shaped supply / discharge ports 16 are individually positioned corresponding to the supply / discharge chambers 8 (that is, arranged in the rotation direction of the switching valve body 11 described later). As shown in FIGS. 6 and 9, the bottom plate 10a is formed on the lower surface of the bottom plate 10a with an outer peripheral portion 17a, an inner peripheral portion 17b, and eight radial portions 17c. A member 17 is attached.

また、分配器10の中央部には、パージ用ガスPGを受け入れる中央室18を仕切筒19により形成し、この中央室18には分配器10の上端側からパージ用ガス供給路20を連通させてある。   A central chamber 18 for receiving the purge gas PG is formed in the central portion of the distributor 10 by a partition cylinder 19, and a purge gas supply path 20 is communicated with the central chamber 18 from the upper end side of the distributor 10. It is.

弁体器12に内装する切替弁体11は、図8及び図9に示すように、弁周壁21と弁天板22と弁底板23と縦姿勢の筒状回転軸24とを備える逆向き円錐台状に形成してあり、弁天板22を分配器10の底板10aに対して摺接(厳密にはシール部材17に対して摺接)させ、かつ、弁底板23を気室器13の上端開口の縁部に対して摺接(厳密には、その縁部に装備した気室器側の環状シール部材25に対して摺接)させる形態で、弁体器12内において縦軸芯P周りで図中矢印Rで示す方向に回転させる。   As shown in FIGS. 8 and 9, the switching valve body 11 provided in the valve body 12 is a reverse truncated cone including a valve peripheral wall 21, a valve top plate 22, a valve bottom plate 23, and a vertical cylindrical rotating shaft 24. The valve top plate 22 is slidably contacted with the bottom plate 10 a of the distributor 10 (strictly speaking, slidably contacted with the seal member 17), and the valve bottom plate 23 is opened at the upper end of the air chamber 13. Slidably contacted with the edge of the valve body (strictly speaking, slidably contacted with the annular seal member 25 on the side of the air chamber mounted on the edge), and around the longitudinal axis P in the valve body 12. Rotate in the direction indicated by arrow R in the figure.

切替弁体11の内部は、弁周壁21と筒状回転軸24とにわたる2枚の仕切壁26により平面視で供給室27と排出室28とに区画し、また、切替弁体11内の上部において一方の仕切壁26の隣接箇所には、中底板29と上部仕切壁30とによりパージ用室31を形成し、これにより、切替弁体11の上部では、内部区画室の環状列として、供給室27とパージ用室31と排出室28とが、その順で切替弁体11の回転上手側から並ぶ構造にしてある。なお、32は室内連通用の連通口32aを形成してある補強リブ板であり、上部仕切壁30の下方に連なる部分も同様の補強リブ板構造にしてある。   The inside of the switching valve body 11 is partitioned into a supply chamber 27 and a discharge chamber 28 in a plan view by two partition walls 26 extending between the valve peripheral wall 21 and the cylindrical rotating shaft 24, and an upper portion in the switching valve body 11. In FIG. 2, a purge chamber 31 is formed by an intermediate bottom plate 29 and an upper partition wall 30 at a location adjacent to one partition wall 26, so that the upper portion of the switching valve body 11 is supplied as an annular row of internal compartment chambers. The chamber 27, the purge chamber 31, and the discharge chamber 28 are arranged in that order from the upper rotation side of the switching valve body 11. Reference numeral 32 denotes a reinforcing rib plate in which a communication port 32a for indoor communication is formed, and the portion connected below the upper partition wall 30 has a similar reinforcing rib plate structure.

そして、弁天板22には、切替弁体11の回転に伴い分配器10の側の給排口16に対して順次に対向連通させる被処理ガス用の供給口33とパージ用口34と処理済ガス用の排出口35とを、供給室27、パージ用室31、排出室28に対し個別に対応位置させた環状配置で、かつ、分配器10の側における同一の給排口16(厳密には同一の給排口16に対するシール部材17の囲い領域)に対して同時に対向連通することがない配置で形成してある。   Further, the valve top plate 22 has a treated gas supply port 33 and a purge port 34 which are sequentially communicated with the supply / discharge port 16 on the distributor 10 side in accordance with the rotation of the switching valve body 11. The gas discharge port 35 and the supply chamber 27, the purge chamber 31, and the discharge chamber 28 are individually arranged in corresponding positions, and the same supply / discharge port 16 (strictly speaking, on the distributor 10 side). Are formed so as not to be opposed to each other at the same time with respect to the same supply / exhaust port 16 (enclosed region of the seal member 17).

また、軸上端を分配器10の中央室18内に位置させる筒状回転軸24には、その内部空間をパージ用室31に連通させるパージ用連通口36を形成し、弁底板23には、気室器13の内部空間に対して供給室27を常時連通させる気室器用の連通口37を形成し、弁周壁21には、弁体器12内における切替弁体11周りの器内空間に対して排出室28を常時連通させる弁体器用の連通口38を形成し、この構成において、気室器13には、その気室器13に被処理ガスCGを供給するガス供給路39を接続し、一方、弁体器12には、その弁体器12から処理済ガスCG′を排出するガス排出路40を接続してある。   Further, the cylindrical rotary shaft 24 whose upper end is located in the central chamber 18 of the distributor 10 is formed with a purge communication port 36 for communicating its internal space with the purge chamber 31. A communication port 37 for the air chamber device that allows the supply chamber 27 to always communicate with the internal space of the air chamber device 13 is formed, and the valve peripheral wall 21 has an internal space around the switching valve body 11 in the valve body device 12. On the other hand, a communication port 38 for a valve body that always communicates with the discharge chamber 28 is formed. In this configuration, a gas supply path 39 that supplies the gas CG to be processed to the air chamber 13 is connected to the air chamber 13. On the other hand, a gas discharge path 40 for discharging the processed gas CG ′ from the valve body 12 is connected to the valve body 12.

つまり、この蓄熱式ガス処理装置では、ガス供給路39から気室器13及び気室器用の連通口37を通じて切替弁体11の供給室27に導入される被処理ガスCG(例えば、有機溶剤を含む塗装ブースからの排出空気)を、切替弁体11の弁天板22に形成の供給口33、その供給口33に対向連通する分配器10側の給排口16、その給排口16に連通の給排室8、及び、その給排室8に連通の給排路15を通じ、一部の蓄熱室3(いわゆる、被処理ガス通過側の蓄熱室3)に通過させて燃焼室6に至らせ、この燃焼室6において被処理ガスCG中の汚染物質や悪臭物質などを燃焼により処理する。   That is, in this regenerative gas processing apparatus, a gas to be processed CG (for example, an organic solvent is introduced from the gas supply path 39 into the supply chamber 27 of the switching valve body 11 through the air chamber 13 and the communication port 37 for the air chamber). Including the discharge air from the painting booth) is connected to the supply port 33 formed in the valve top plate 22 of the switching valve body 11, the supply / discharge port 16 on the distributor 10 side that communicates with the supply port 33, and the supply / discharge port 16. Through the supply / exhaust chamber 8 and the supply / exhaust passage 15 communicating with the supply / exhaust chamber 8 and passing through a part of the heat storage chamber 3 (so-called heat storage chamber 3 on the gas passage side) to reach the combustion chamber 6. In this combustion chamber 6, the pollutants and malodorous substances in the gas CG to be treated are treated by combustion.

また、処理済ガスCG′は、燃焼室6から他の蓄熱室3(いわゆる、処理済ガス通過側の蓄熱室3)に通過させて、その蓄熱室3に収容の蓄熱材5aに対し蓄熱を行わせ、その後、その蓄熱室3に連通の給排路15、その給排路15に連通する分配器10側の給排室8、その給排室8に連通の給排口16、及び、その給排口16に対向連通する切替弁体11側の排出口35を通じ、切替弁体11の排出室28へ導くとともに、それに続き、切替弁体11の弁周壁21に形成の弁体器用連通口38、及び、弁体器12内における切替弁体11周りの器内空間を通じて、ガス排出路40へ導出する。   Further, the treated gas CG ′ is passed from the combustion chamber 6 to another heat storage chamber 3 (so-called heat storage chamber 3 on the treated gas passage side) to store heat in the heat storage material 5a accommodated in the heat storage chamber 3. After that, the supply / discharge passage 15 communicating with the heat storage chamber 3, the supply / discharge chamber 8 on the distributor 10 side communicating with the supply / discharge passage 15, the supply / discharge port 16 communicating with the supply / discharge chamber 8, and Through the discharge port 35 on the side of the switching valve body 11 that communicates with the supply / discharge port 16, it is led to the discharge chamber 28 of the switching valve body 11, and subsequently, the communication for the valve body formed on the valve peripheral wall 21 of the switching valve body 11. The gas is led to the gas discharge path 40 through the opening 38 and the internal space around the switching valve body 11 in the valve body 12.

さらに、パージ用ガス供給路20から分配器10の中央室18に導入するパージ用ガスPGは、切替弁体11における筒状回転軸24の上端部に形成の連通孔24a、筒状回転軸24の内部、及び、その筒状回転軸24に形成のパージ用連通口36を通じて切替弁体11のパージ用室31に導くとともに、それに続き、切替弁体11の弁天板22に形成のパージ用口34、そのパージ用口34に対向連通する分配器10側の給排口16、その給排口16に連通の給排室8、及び、その給排室8に連通の給排路15を通じ、更に他の蓄熱室3に通過させて燃焼室6に至らせ、その後は処理済ガスCG′に合流させる。   Further, the purge gas PG introduced from the purge gas supply path 20 into the central chamber 18 of the distributor 10 is formed with a communication hole 24 a and a cylindrical rotary shaft 24 formed at the upper end of the cylindrical rotary shaft 24 in the switching valve body 11. And the purge port 31 formed in the valve top plate 22 of the switching valve body 11 following to the purge chamber 31 of the switching valve body 11 through the purge communication port 36 formed in the cylindrical rotary shaft 24. 34, the supply / discharge port 16 on the distributor 10 side communicating with the purge port 34, the supply / discharge chamber 8 communicating with the supply / discharge port 16, and the supply / discharge passage 15 communicating with the supply / discharge chamber 8, Further, it passes through the other heat storage chamber 3 to reach the combustion chamber 6 and then merges with the treated gas CG ′.

そして、この処理において切替弁体11を回転させることで、切替弁体11の弁天板22に形成の供給口33、パージ用口34、排出口35の各々を対向連通させる分配器10側の給排口16を順次に切り換えて、この切り換えにより、被処理ガスCGを通過させる蓄熱室3、パージ用ガスPGを通過させる蓄熱室3、処理済ガスCG′を通過させる蓄熱室3を順次に切り換える形態で、各蓄熱室3を図10に示すように被処理ガスCGの通過状態、パージ用ガスPGの通過状態、処理済ガスCG′の通過状態に、その順で順次に切り換え、これにより、処理済ガスCG′の通過をもって先に蓄熱した蓄熱材5aにより被処理ガスCGを各蓄熱室3の通過過程において予熱する。   Then, by rotating the switching valve body 11 in this process, the supply port 33, the purge port 34, and the discharge port 35 formed on the valve top plate 22 of the switching valve body 11 are connected to each other so as to face each other. The exhaust port 16 is sequentially switched, and by this switching, the heat storage chamber 3 through which the gas to be processed CG passes, the heat storage chamber 3 through which the purge gas PG passes, and the heat storage chamber 3 through which the processed gas CG ′ passes are sequentially switched. In the form, as shown in FIG. 10, each heat storage chamber 3 is sequentially switched to the passage state of the gas to be treated CG, the passage state of the purge gas PG, and the passage state of the treated gas CG ′ in this order. The gas to be processed CG is preheated in the process of passing through each heat storage chamber 3 by the heat storage material 5a that has previously stored heat with the passage of the processed gas CG ′.

そして、蓄熱室3を形成する仕切壁2の構造において、セラミックスファイバーボード2aどうしの間に箔状ステンレス材2bを配置することで、仕切壁2の気密性を向上させ、これによって、仕切壁2によって仕切られた両側の蓄熱室3の差圧が大きい場合であっても、被処理ガスCGを通過させる蓄熱室3の被処理ガスCGがセラミックスファイバーボード2a中に分布する微小な空隙から透過して処理済ガスを通過させる蓄熱室3に漏洩して処理済ガスCG′に被処理ガスCGが混入することを確実に防止する。   And in the structure of the partition wall 2 which forms the thermal storage chamber 3, the airtightness of the partition wall 2 is improved by arrange | positioning the foil-like stainless steel material 2b between ceramic fiber boards 2a, and, thereby, the partition wall 2 Even when the differential pressure between the heat storage chambers 3 on both sides partitioned by the gas is large, the gas to be processed CG in the heat storage chamber 3 through which the gas to be processed CG passes is transmitted through minute gaps distributed in the ceramic fiber board 2a. Thus, the gas to be treated CG is reliably prevented from leaking into the heat storage chamber 3 through which the treated gas passes and mixed into the treated gas CG ′.

また、被処理ガスCGの通過後、次に処理済ガスCG′を通過させるに先立ち各蓄熱室3にパージ用ガスPGを通過させるようにし、これにより、蓄熱室3内に残る被処理ガスCGを次の処理済ガスCG′の通過の前に燃焼室6へ排出して、次にその蓄熱室3を通過する処理済ガスCG′に残留被処理ガスCGが混入することを防止する。   In addition, after passing the gas to be processed CG, the purge gas PG is allowed to pass through each heat storage chamber 3 before passing the processed gas CG ′ next, whereby the gas to be processed CG remaining in the heat storage chamber 3 is passed. Is discharged to the combustion chamber 6 before the passage of the next treated gas CG ′, and the residual treated gas CG is prevented from being mixed into the treated gas CG ′ that next passes through the heat storage chamber 3.

なお、パージ用ガス供給路20はガス排出路40から分岐した風路であり、この風路分岐により、ガス排出路40への排出処理済ガスCG′の一部をパージ用ガスPGとして使用するようにしてある。   The purge gas supply passage 20 is an air passage branched from the gas discharge passage 40, and a part of the exhausted gas CG ′ discharged to the gas discharge passage 40 is used as the purge gas PG by this air passage branch. It is like that.

分配器10と切替弁体11との間では、分配器10の底板10aと切替弁体11の弁天板22との間の隙間を通じての供給口34と排出口35の連通、及び、供給口34とパージ用口34との連通を、弁天板22に対するシール部材17の摺接により遮断し、これにより、その隙間連通による処理済ガスCG′中への被処理ガスCGの混入を防止する Between the distributor 10 and the switching valve body 11, the communication between the supply port 34 and the discharge port 35 through the gap between the bottom plate 10 a of the distributor 10 and the valve top plate 22 of the switching valve body 11, and the supply port 34. And the purge port 34 are blocked by the sliding contact of the seal member 17 with the valve top plate 22, thereby preventing the gas CG to be processed from being mixed into the processed gas CG ′ due to the gap communication .

また、気室器13と切替弁体11との間では、切替弁体11の弁底板23に対する気室器側の環状シール部材25の摺接により、気室器13からの弁体器12内への被処理ガスCGの漏出を阻止して、処理済ガスCG′中への被処理ガスCGの混入を防止し、これらの混入防止により、被処理ガスCG中に含まれる汚染物質や悪臭物質が未処理のままで処理済ガスCG′とともに装置から排出されてしまうことを防止する。   Further, between the air chamber 13 and the switching valve body 11, the inside of the valve body 12 from the air chamber 13 due to the sliding contact of the annular seal member 25 on the air chamber side with respect to the valve bottom plate 23 of the switching valve body 11. The gas to be processed CG is prevented from leaking into the processed gas CG ′ to prevent the gas to be processed CG from being mixed. By preventing these gases from being mixed, pollutants and malodorous substances contained in the gas to be processed CG are prevented. Is discharged from the apparatus together with the processed gas CG ′ without being processed.

41は切替弁体11の筒状回転軸24に連結した駆動軸、42は減速機43及び駆動軸41を介して切替弁体22を回転動作させるモータである。   Reference numeral 41 denotes a drive shaft connected to the cylindrical rotary shaft 24 of the switching valve body 11, and 42 denotes a motor that rotates the switching valve body 22 via the speed reducer 43 and the drive shaft 41.

以上要するに、本第1実施形態では、蓄熱室3において、仕切壁2の壁主材として収縮率が極めて小さく、かつ、剛性、耐熱性及び耐食性に優れ軽量であるセラミックスファイバーボード2aを用い、そのセラミックスファイバーボード2aどうしの間に箔状ステンレス材2bを配置してあるので、取り扱い性が良く、更に、被処理ガスCGが仕切壁2を透過して処理済ガスCG′に混入することのない気密性に優れた仕切壁構造にでき、これによって、確実に被処理ガスCG(例えば、塗装ブースからの排出空気)に含有される有機溶剤を燃焼処理することができ、有機溶剤を系外に排出することのない安全性及び信頼性の高い蓄熱式ガス処理装置にすることができる。   In short, in the first embodiment, the heat storage chamber 3 uses the ceramic fiber board 2a having a very small shrinkage rate as the wall main material of the partition wall 2 and having excellent rigidity, heat resistance and corrosion resistance, and light weight. Since the foil-like stainless steel material 2b is disposed between the ceramic fiber boards 2a, the handleability is good, and the gas to be processed CG does not permeate the partition wall 2 and enter the processed gas CG '. A partition wall structure with excellent airtightness can be obtained, and by this, the organic solvent contained in the gas to be treated CG (for example, exhaust air from the painting booth) can be reliably burned, and the organic solvent can be removed from the system. It can be set as the heat storage type gas processing apparatus with high safety | security and high reliability which do not discharge | emit.

〔第2実施形態〕
図4及び図11〜図15は、塗装工場や印刷工場などから排出される有機溶剤や塗料ミストなどの溶剤蒸気を含む排気(被処理ガスcg)を吸着により浄化処理する吸脱着式ガス処理装置を示し、ハウジング51の内部を仕切壁52により仕切ることで、処理室53の室群として、平面視で並列配置の8室の処理室53をハウジング51内に形成し、このハウジング51の近傍には、各処理室53に対して連通させる風路の切り換えを行う切替手段である切替装置54を配置してある。
[Second Embodiment]
FIGS. 4 and 11 to 15 show an adsorption / desorption type gas processing apparatus for purifying exhaust gas (processed gas cg) containing solvent vapor such as an organic solvent or paint mist discharged from a coating factory or a printing factory by adsorption. By dividing the interior of the housing 51 by a partition wall 52, eight processing chambers 53 arranged in parallel in a plan view are formed in the housing 51 as a chamber group of the processing chambers 53, and in the vicinity of the housing 51. Is provided with a switching device 54 that is a switching means for switching the air path that communicates with each processing chamber 53.

各処理室53には吸着剤からなる通気性吸着層55を収容してあり、処理室53夫々の上端はハウジング51の上部から延設されている処理済ガス導出路56、濃縮ガス導出路57及びパージ用ガス導出路58に接続されているとともに、処理室それぞれの下端は、ハウジング51の下部から延設されている被処理ガス導入路59、脱着用ガス導入路60及びパージ用ガス導入路61に接続されている。   Each processing chamber 53 accommodates a gas-permeable adsorbing layer 55 made of an adsorbent, and the upper ends of the processing chambers 53 extend from the upper portion of the housing 51, and the processed gas outlet 56 and the concentrated gas outlet 57. In addition, the lower end of each of the processing chambers is connected to the purge gas lead-out path 58 and extends from the lower part of the housing 51 to be processed gas introduction path 59, desorption gas introduction path 60, and purge gas introduction path. 61 is connected.

切替装置54は、図11〜図15に示すように、処理済ガス導出路56、濃縮ガス導出路57、パージ用ガス導出路58、被処理ガス導入路59、脱着用ガス導入路60及びパージ用ガス導入路61の夫々に設けられている開閉弁vとその開閉弁vの開閉を制御する制御部CCとから構成されていて、設定してある所定時間の経過と共に制御部CCにより開閉弁vの開閉の切替が行われ、切替前において被処理ガスcgを通過させることによって被処理ガスcgに含まれる溶剤を吸着処理していた吸着処理側の処理室53が、開閉弁vの切替により高温の脱着用ガスrgを通過させることによって吸着剤層55に吸着されている溶剤蒸気を脱着処理する脱着処理側の処理室53に切り替わる。   As shown in FIGS. 11 to 15, the switching device 54 includes a treated gas outlet 56, a concentrated gas outlet 57, a purge gas outlet 58, a gas introduction path 59 to be processed, a desorption gas inlet 60, and a purge. Each of the operating gas introduction passages 61 and a control unit CC that controls the opening and closing of the on-off valve v. The control unit CC performs the on-off valve with the elapse of a predetermined time. Switching of the opening and closing of v is performed, and the processing chamber 53 on the adsorption processing side that has adsorbed the solvent contained in the processing target gas cg by allowing the processing target gas cg to pass before the switching is performed by switching the opening and closing valve v. By passing the high-temperature desorption gas rg, the solvent vapor adsorbed on the adsorbent layer 55 is switched to the process chamber 53 on the desorption process side where the desorption process is performed.

つまり、この吸脱着式ガス処理装置では、被処理ガス導入路59から吸着処理側の処理室53内に導入される被処理ガスcgを処理室53の吸着剤層55に通過させることで、その被処理ガスcgに含まれる溶剤蒸気を吸着剤層55に吸着させて除去し、そして、所定時間を経た後、脱着用ガス導入路60から吸着処理を行った処理室53内に導入される脱着用ガスrgをその処理室53内の吸着剤層55に通過させることで、吸着剤層55に吸着されている溶剤蒸気を脱着用ガスrg中へ脱着させる。   That is, in this adsorption / desorption type gas processing apparatus, by passing the gas to be processed cg introduced into the processing chamber 53 on the adsorption processing side from the processing gas introduction passage 59 through the adsorbent layer 55 of the processing chamber 53, The solvent vapor contained in the gas cg to be treated is adsorbed and removed by the adsorbent layer 55, and after a predetermined time, the desorption is introduced into the treatment chamber 53 where the adsorption treatment is performed from the desorption gas introduction path 60. By passing the working gas rg through the adsorbent layer 55 in the processing chamber 53, the solvent vapor adsorbed on the adsorbent layer 55 is desorbed into the desorption gas rg.

処理室53の切替りを詳しく説明すると、まず、図12(又は図14)に示すように4つの処理室53に被処理ガスcgを導入し吸着処理を行い、他の4つの処理室53で脱着用ガスrgを導入して脱着処理を行う。次に、所定時間の経過と共に、図13(又は図15)に示すように脱着処理を行っていた処理室53に対しパージ用ガスpgを導入して脱着処理後の処理室53内の吸着剤層55を冷却及びパージするパージ処理を行う。そして更に、所定時間の経過と共に、図14(又は図12)に示すようにパージ処理を行った処理室53に対して被処理ガスcgを導入して吸着処理を行い、吸着処理を行っていた処理室53に対し脱着用ガスrgを導入して脱着処理を行う。   The switching of the processing chambers 53 will be described in detail. First, as shown in FIG. 12 (or FIG. 14), the gas to be processed cg is introduced into the four processing chambers 53 and the adsorption processing is performed. Desorption gas rg is introduced to perform the desorption process. Next, as the predetermined time elapses, the purge gas pg is introduced into the processing chamber 53 that has been subjected to the desorption process as shown in FIG. 13 (or FIG. 15), and the adsorbent in the processing chamber 53 after the desorption process. A purge process for cooling and purging the layer 55 is performed. Further, as the predetermined time elapses, as shown in FIG. 14 (or FIG. 12), the gas cg to be treated is introduced into the processing chamber 53 that has been purged, and the adsorption processing is performed. Desorption gas rg is introduced into the processing chamber 53 to perform desorption processing.

そして、吸着処理により溶剤蒸気を除去して溶剤蒸気濃度を大気OAへの放出が可能な値まで低下させた処理済ガスcg′は、処理済ガス導出路56を通じて処理室から大気OA中へ放出し、一方、脱着処理により溶剤蒸気を濃縮した状態で含む状態になった脱着処理後の脱着ガスrg′(濃縮ガス)は、濃縮ガス導出路57を通じて処理室53から溶剤回収用装置Mへ送られる。   Then, the treated gas cg ′ whose solvent vapor is removed by adsorption treatment and the solvent vapor concentration is reduced to a value that can be released into the atmosphere OA is released from the treatment chamber 56 into the atmosphere OA through the treated gas lead-out path 56. On the other hand, the desorption gas rg ′ (concentrated gas) after the desorption process, which has been included in the state where the solvent vapor is concentrated by the desorption process, is sent from the processing chamber 53 to the solvent recovery apparatus M through the concentrated gas outlet path 57. It is done.

また、パージ処理後のパージ用ガスpg′は、パージ用ガス導出路58通じて、加熱後、脱着用ガスとして再利用する構成になっている。   Further, the purge gas pg ′ after the purge process is configured to be reused as a desorption gas after heating through the purge gas lead-out path 58.

この吸脱着式ガス処理装置において、処理室53どうしを仕切る仕切壁52は、第1実施形態で示した蓄熱式ガス処理装置における蓄熱室用の仕切壁2と具体的に同様の構造(図4参照)、すなわち、壁主材として非金属性無機材料であるセラミックス繊維材を板状に成形したセラミックスファイバーボード52aと薄膜状金属材である箔状のステンレス材52bとから形成されていて、1枚のセラミックスファイバーボード52aの一面に1枚の箔状ステンレス材52bを貼着してある2枚の壁材52Aを、箔状ステンレス材52bどうしが相対向して当接するように重ね合わせた壁構造にしてある。   In this adsorption / desorption type gas processing apparatus, the partition wall 52 that partitions the processing chambers 53 is specifically similar to the partition wall 2 for the heat storage chamber in the heat storage type gas processing apparatus shown in the first embodiment (FIG. 4). 1), that is, formed from a ceramic fiber board 52a obtained by forming a ceramic fiber material, which is a nonmetallic inorganic material, into a plate shape as a wall main material, and a foil-like stainless material 52b, which is a thin film metal material. A wall in which two foil members 52A each having one foil-like stainless steel material 52b attached to one surface of a single ceramic fiber board 52a are overlapped so that the foil-like stainless steel materials 52b are in contact with each other. It has a structure.

以上要するに、本第2実施形態では、処理室53において、仕切壁52の壁主材として収縮率が極めて小さく、かつ、剛性、耐熱性及び耐食性に優れ軽量であるセラミックスファイバーボード52aを用い、そのセラミックスファイバーボード52aどうしの間に箔状ステンレス材52bを配置してあるので、取り扱い性が良く、更に、濃縮ガスrg′が仕切壁52を透過して処理済ガスcg′に混合することのない気密性に優れた仕切壁構造にでき、これによって、確実に高濃度の溶剤を大気に排出することのない安全性及び信頼性の高い吸脱着式ガス処理装置にすることができる。   In short, in the second embodiment, in the processing chamber 53, the ceramic fiber board 52a having a very small shrinkage ratio and having excellent rigidity, heat resistance and corrosion resistance as a wall main material of the partition wall 52 is used. Since the foil-like stainless steel material 52b is disposed between the ceramic fiber boards 52a, it is easy to handle and the concentrated gas rg 'does not permeate the partition wall 52 and mix with the treated gas cg'. A partition wall structure having excellent airtightness can be obtained, and thereby, a safe and reliable adsorption / desorption type gas treatment apparatus that does not reliably discharge a high-concentration solvent to the atmosphere can be obtained.

〔別実施形態〕
次に別実施形態を列記する。
[Another embodiment]
Next, another embodiment will be listed.

上記第1実施形態では、本発明による耐熱性気密壁構造を回転弁型の蓄熱式ガス処理装置における蓄熱室3の仕切壁2に、上記第2実施形態では、塔型の吸脱着式ガス処理装置における処理室53の仕切壁52に用いたが、本発明の耐熱性気密壁構造は、例えば、塔型の蓄熱式ガス処理装置や回転弁型の吸脱着式ガス処理装置等の他方式のガス処理装置、耐熱性及び気密性を必要とする壁構造としてこれら以外の装置、又は、建築物等に使用してもよい。   In the said 1st Embodiment, the heat-resistant airtight wall structure by this invention is used for the partition wall 2 of the thermal storage chamber 3 in a rotary valve type thermal storage type gas processing apparatus, and in the said 2nd Embodiment, a tower type adsorption / desorption type gas processing. Although used for the partition wall 52 of the processing chamber 53 in the apparatus, the heat-resistant hermetic wall structure of the present invention has other types such as a tower-type heat storage type gas processing apparatus and a rotary valve type adsorption / desorption type gas processing apparatus. You may use it for apparatus other than these as a gas processing apparatus, a wall structure which requires heat resistance and airtightness, or a building.

上記実施形態では、非金属性無機材料からなる壁主材としてセラミックス繊維材からなるセラミックスファイバーボード2a,52aを使用したが、非金属性無機材料からなる壁主材であれば、セラミックス繊維材に限るものではなく、他の非金属性無機材料で壁主材を形成してもよい。   In the above embodiment, the ceramic fiber boards 2a and 52a made of a ceramic fiber material are used as the wall main material made of a non-metallic inorganic material. However, the wall main material may be formed of other non-metallic inorganic materials.

また、薄膜状金属材として箔状ステンレス材2b,52bを用いたが、同様に薄膜状金属材であればこれに限るものではなく、他の薄膜状の金属材を用いてもよい。   Further, although the foil-like stainless steel materials 2b and 52b are used as the thin-film metal material, the present invention is not limited to this as long as it is a thin-film metal material, and other thin-film metal materials may be used.

上記実施形態では、仕切壁2,52を構成する耐熱性気密壁構造として、壁主材である壁主材2a,52aの一面に薄膜状金属材2b,52bを固着的に貼着した2枚の壁材2A,52Aを重ね合わせた構造を採用したが、これに限らず、非金属性無機材料からなる壁主材2a,52aどうしの間に位置させる薄膜状金属材2b,52bを一方の壁主材2a,52aに対してのみ固着的に貼着する、或いは、両方の壁主材2a,52aに対して固着的に貼着する構造や、薄膜状金属材2b,52bをその両側それぞれに位置させた壁主材2a,52aとの熱膨張又は熱収縮による壁面方向への相対移動を許す状態で両壁主材2a,52aどうしの間に配置する構造などを採用してもよい。   In the above embodiment, as the heat-resistant and airtight wall structure constituting the partition walls 2 and 52, two sheets in which the thin-film metal materials 2b and 52b are firmly attached to one surface of the wall main materials 2a and 52a that are wall main materials. However, the present invention is not limited to this, and the thin-film metal materials 2b and 52b positioned between the wall main materials 2a and 52a made of non-metallic inorganic material are not limited to this. A structure in which only the wall main materials 2a, 52a are fixedly bonded, or a structure in which the wall main materials 2a, 52a are fixedly bonded, and the thin-film metal materials 2b, 52b are respectively attached to both sides thereof. A structure may be employed in which the wall main members 2a and 52a are disposed between the two wall main members 2a and 52a in a state that allows relative movement in the wall surface direction due to thermal expansion or contraction.

壁主材2a,52aどうしの間に配置する薄膜状金属材2b,52bは、1枚或いは複数枚を重ね合わせたもののいずれかであってもよく、また、薄膜状金属材2b,52bの両側に位置させる壁主材2a,52aの各々について、その壁主材2a,52aは1枚或いは複数枚を重ね合わせたもののいずれかであってもよく、更に、薄膜状金属材2b,52bと壁主材2a,52aとの交互に合わせる構造を採ってもよい。   The thin-film metal materials 2b and 52b arranged between the wall main materials 2a and 52a may be either one or a plurality of stacked metal materials, and both sides of the thin-film metal materials 2b and 52b. For each of the wall main materials 2a and 52a positioned on the wall main material 2a and 52a, the wall main materials 2a and 52a may be either one or a plurality of stacked ones. You may take the structure matched with the main materials 2a and 52a alternately.

また、薄膜状金属材2b,52b及び壁主材2a,52aの各々について、その厚さはそれら材質や壁構造の用途等に応じ、適当な値を選択すればよい。   Moreover, what is necessary is just to select an appropriate value for the thickness of each of the thin-film metal materials 2b and 52b and the main wall materials 2a and 52a according to the materials and the use of the wall structure.

本発明の第1実施形態である蓄熱式ガス処理装置の側面図Side view of the regenerative gas processing apparatus according to the first embodiment of the present invention. 第1実施形態の蓄熱式ガス処理装置の蓄熱室部分、並びに、第2実施形態の吸脱着式ガス処理装置の処理室部分での平面視断面図Plan view sectional drawing in the thermal storage chamber part of the thermal storage type gas processing apparatus of 1st Embodiment, and the processing chamber part of the adsorption / desorption type gas processing apparatus of 2nd Embodiment 第1実施形態の蓄熱式ガス処理装置の蓄熱室部分、並びに、第2実施形態の吸脱着式ガス処理装置の処理室部分での平面視拡大断面図Plan view enlarged sectional view of the heat storage chamber portion of the heat storage type gas processing device of the first embodiment and the processing chamber portion of the adsorption / desorption type gas processing device of the second embodiment. 第1実施形態の蓄熱式ガス処理装置、並びに、第2実施形態の吸脱着式ガス処理装置の仕切壁の構造を示す一部切欠きの斜視図The perspective view of the notch which shows the structure of the partition wall of the thermal storage type gas processing apparatus of 1st Embodiment and the adsorption / desorption type gas processing apparatus of 2nd Embodiment 第1実施形態の蓄熱式ガス処理装置の分配器部分での平面図The top view in the divider | distributor part of the thermal storage type gas processing apparatus of 1st Embodiment. 第1実施形態の蓄熱式ガス処理装置の切替装置部分の側面視断面図Side view sectional drawing of the switching apparatus part of the thermal storage type gas processing apparatus of 1st Embodiment 第1実施形態の蓄熱式ガス処理装置の切替装置要部の分解平面図Exploded plan view of the main part of the switching device of the regenerative gas processing apparatus of the first embodiment 第1実施形態の蓄熱式ガス処理装置の切替装置要部の分解斜視図The disassembled perspective view of the switching apparatus principal part of the thermal storage type gas processing apparatus of 1st Embodiment. 第1実施形態の蓄熱式ガス処理装置の切替弁体の分解斜視図The disassembled perspective view of the switching valve body of the heat storage type gas processing apparatus of 1st Embodiment. 第1実施形態の蓄熱式ガス処理装置の機能説明図Functional explanatory diagram of the regenerative gas processing apparatus of the first embodiment 第2実施形態の吸脱着ガス処理装置の構造図Structural diagram of the adsorption / desorption gas processing apparatus of the second embodiment 第2実施形態の吸脱着ガス処理装置におけるガスの流れを示す構造図Structural drawing showing the flow of gas in the adsorption / desorption gas processing apparatus of the second embodiment 第2実施形態の吸脱着ガス処理装置におけるガスの流れを示す構造図Structural drawing showing the flow of gas in the adsorption / desorption gas processing apparatus of the second embodiment 第2実施形態の吸脱着ガス処理装置におけるガスの流れを示す構造図Structural drawing showing the flow of gas in the adsorption / desorption gas processing apparatus of the second embodiment 第2実施形態の吸脱着ガス処理装置におけるガスの流れを示す構造図Structural drawing showing the flow of gas in the adsorption / desorption gas processing apparatus of the second embodiment

符号の説明Explanation of symbols

2 仕切壁
2A 壁材
2a 壁主材(板材)
2b 薄膜状金属材(ステンレス材)
3 蓄熱室(空間)
4 切替手段
5 蓄熱材層
6 燃焼室
52 仕切壁
52A 壁材
52a 壁主材(板材)
52b 薄膜状金属材(ステンレス材)
53 処理室(空間)
54 切替手段
55 吸着剤層
2 Partition wall 2A Wall material 2a Main wall material (plate material)
2b Thin metal film (stainless steel)
3 Thermal storage room (space)
4 switching means 5 heat storage material layer 6 combustion chamber 52 partition wall 52A wall material 52a wall main material (plate material)
52b Thin film metal (stainless steel)
53 Treatment room (space)
54 switching means 55 adsorbent layer

Claims (4)

高温雰囲気下で空間どうしを仕切る耐熱性気密壁構造であって、
剛性を備える耐熱性の非金属性無機材料からなる壁主材どうしの間に、それら壁主材を透過する状態での前記空間どうしの間でのガス漏洩を防止する薄膜状の金属材を配置した構造にし、
前記薄膜状金属材の両側それぞれに位置させる前記壁主材の各々に対し、各別の前記薄膜状金属材を固着的に貼着して、これら薄膜状金属材をそれらが相対向して当接する重ね合わせ状態で前記壁主材どうしの間に配置してある耐熱性気密壁構造。
A heat-resistant and airtight wall structure that partitions spaces in a high-temperature atmosphere,
A thin-film metal material is installed between the main wall materials made of heat-resistant non-metallic inorganic materials with rigidity to prevent gas leakage between the spaces in the state of passing through the main wall materials. The structure
Each of the thin-walled metal materials is fixedly attached to each of the wall main members positioned on both sides of the thin-film metal material, and the thin-film metal materials are opposed to each other. A heat-resistant airtight wall structure arranged between the wall main members in a superposed state in contact with each other .
前記薄膜状金属材が0.001mm〜0.15mm厚の箔に形成されてある請求項1記載の耐熱性気密壁構造。 The heat-resistant hermetic wall structure according to claim 1, wherein the thin-film metal material is formed on a foil having a thickness of 0.001 mm to 0.15 mm . 仕切壁により互いに仕切った複数の蓄熱室のそれぞれに通気性の蓄熱材層を収容するとともに、これら蓄熱室それぞれの一端を燃焼室に連通させ、While storing a breathable heat storage material layer in each of a plurality of heat storage chambers partitioned from each other by a partition wall, one end of each of these heat storage chambers is communicated with the combustion chamber,
処理対象の被処理ガスを複数の前記蓄熱室のうち、一部の室数の蓄熱室を通して前記燃焼室に供給してその被処理ガスを前記燃焼室での燃焼により処理し、それに並行して前記燃焼室から処理済ガスを他の一部の室数の蓄熱室を通して排出する構成において、被処理ガス通過側の蓄熱室と処理済ガス通過側の蓄熱室とを交互に切り替える切替手段を設けた蓄熱式ガス処理装置であって、  A target gas to be processed is supplied to the combustion chamber through a number of heat storage chambers out of the plurality of heat storage chambers, and the target gas is processed by combustion in the combustion chambers. In the configuration in which the treated gas is discharged from the combustion chamber through the heat storage chambers of the other part of the number of chambers, switching means for alternately switching between the heat storage chamber on the treated gas passage side and the heat storage chamber on the treated gas passage side is provided. A heat storage type gas processing device,
前記蓄熱室どうしを仕切る前記仕切壁を請求項1又は2記載の耐熱性気密壁構造にしてある蓄熱式ガス処理装置。  The heat storage type gas processing apparatus which has the heat-resistant airtight wall structure of Claim 1 or 2 in the said partition wall which partitions off the said heat storage chambers.
仕切壁により互いに仕切った複数の処理室のそれぞれに通気性の吸着剤層を収容するとともに、While storing a breathable adsorbent layer in each of a plurality of processing chambers partitioned from each other by a partition wall,
処理対象の被処理ガスを複数の前記処理室のうち、一部の室数の処理室における前記吸着剤層に通過させる吸着処理と、それに並行して高温の脱着用ガスを他の一部の室数の処理室における前記吸着剤層に通過させる脱着処理とを行う構成において、被処理ガスを通過させる吸着処理側の処理室と脱着用ガスを通過させる脱着処理側の処理室とを交互に切り替える切替手段を設けた吸脱着式ガス処理装置であって、Among the plurality of processing chambers, the gas to be processed is passed through the adsorbent layer in the processing chambers of some of the processing chambers, and at the same time, a high temperature desorption gas is supplied to other part of the processing chambers. In the configuration of performing the desorption process of passing through the adsorbent layer in the processing chamber of the number of chambers, the process chamber on the adsorption process side that allows the gas to be processed to pass and the process chamber on the side of the desorption process that allows the desorption gas to pass An adsorption / desorption type gas processing apparatus provided with a switching means for switching,
前記処理室どうしを仕切る前記仕切壁を請求項1又は2記載の耐熱性気密壁構造にしてある吸脱着式ガス処理装置。  An adsorption / desorption type gas processing apparatus in which the partition wall for partitioning the processing chambers has the heat-resistant and airtight wall structure according to claim 1 or 2.
JP2003376951A 2003-11-06 2003-11-06 Heat-resistant hermetic wall structure, regenerative gas treatment device, and adsorption / desorption gas treatment device Expired - Fee Related JP4159451B2 (en)

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